SiC Semiconductor Device

Abstract

To provide a SiC semiconductor device that can mitigate external forces.SOLUTION: The SiC semiconductor device includes: a SiC chip having a first main surface on one side and a second main surface on the other side; a first main electrode containing a first Al layer and formed on the first main surface; a pad electrode formed on the first main electrode and connected to a conductor; and a second main electrode containing a second Al layer and formed on the second main surface.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a SiC semiconductor device. [Background technology]

[0002] Patent Document 1 discloses a SiC semiconductor device including a SiC substrate (SiC chip), a pad electrode including Al formed on the front surface of the SiC substrate, and an ohmic electrode formed on the back surface of the SiC substrate. A bonding wire (conductor) is bonded to the pad electrode. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-207780 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the post-process (assembly process), various external forces are applied to the SiC semiconductor device. For example, when mounting the SiC semiconductor device, a mounting machine equipped with a suction nozzle is used. The SiC semiconductor device is transported to the connection target while being held by the suction nozzle, and then pressed and mounted on the connection target. At this time, an external force from the suction nozzle toward the connection target and an external force from the connection target toward the suction nozzle are applied to the SiC semiconductor device.

[0005] After mounting the SiC semiconductor device, the capillary presses the conductor wire onto the pad electrode. At this time, an external force from the capillary toward the connection object and an external force from the connection object toward the capillary are applied to the SiC semiconductor device. If an external force exceeding the strength of the SiC chip is applied to the SiC semiconductor device, a crack will occur in the SiC chip.

[0006] An embodiment of the present invention provides a SiC semiconductor device capable of mitigating external forces. [Means for solving the problem]

[0007] One embodiment of the present invention provides a SiC semiconductor device including a SiC chip having a first main surface on one side and a second main surface on the other side, a first main surface electrode including a first Al layer formed on the first main surface, a pad electrode formed on the first main surface electrode and connected to a conductor, and a second main surface electrode including a second Al layer formed on the second main surface.

[0008] In this SiC semiconductor device, the first Al layer is formed as a first buffer layer that absorbs external forces on the first main surface side, and the second Al layer is formed as a second buffer layer that absorbs external forces on the second main surface side, thereby making it possible to absorb external forces in the direction from the first main surface to the second main surface and in the direction from the second main surface to the first main surface.

[0009] The above and other objects, features and advantages of the present invention will become apparent from the following detailed description of the embodiments with reference to the accompanying drawings. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a plan view showing a SiC semiconductor device according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a cross-sectional view taken along the line II-II shown in FIG. 1, showing a configuration in which the second principal surface electrode according to the first embodiment is incorporated. [Diagram 3] FIG. 3 is a cross-sectional view diagrammatically showing the second principal surface electrode shown in FIG. [Figure 4A] FIG. 4A is a cross-sectional view diagrammatically showing a second principal surface electrode according to the second embodiment. [Figure 4B] FIG. 4B is a cross-sectional view diagrammatically showing a second principal surface electrode according to the third embodiment. [Figure 4C] FIG. 4C is a cross-sectional view diagrammatically showing a second principal surface electrode according to a fourth embodiment. [Figure 4D]FIG. 4D is a cross-sectional view diagrammatically showing a second principal surface electrode according to a fifth embodiment. [Figure 4E] FIG. 4E is a cross-sectional view diagrammatically showing a second principal surface electrode according to a sixth embodiment. [Figure 4F] FIG. 4F is a cross-sectional view diagrammatically showing a second principal surface electrode according to a seventh embodiment. [Figure 4G] FIG. 4G is a cross-sectional view diagrammatically showing a second principal surface electrode according to an eighth embodiment. [Figure 4H] FIG. 4H is a cross-sectional view diagrammatically showing a second principal surface electrode according to a ninth embodiment. [Figure 4I] FIG. 4I is a cross-sectional view diagrammatically showing a second principal surface electrode according to a tenth embodiment. [Diagram 5] FIG. 5 is a diagram showing a semiconductor package in which the SiC semiconductor device shown in FIG. 1 is incorporated. [Figure 6] FIG. 6 is a perspective view of a SiC semiconductor device according to a second embodiment of the present invention, showing a configuration in which the second principal surface electrode according to the first embodiment is incorporated. [Figure 7] FIG. 7 is a plan view of the SiC semiconductor device shown in FIG. [Figure 8] FIG. 8 is a plan view in which the structure above the first principal surface electrode has been removed. [Figure 9] FIG. 9 is an enlarged plan view showing the internal structure of region IX shown in FIG. [Figure 10] FIG. 10 is a cross-sectional view taken along the line XX shown in FIG. [Figure 11] FIG. 11 is a cross-sectional view taken along the line XI-XI shown in FIG. [Figure 12] FIG. 12 is an enlarged view of region XII shown in FIG. [Figure 13] FIG. 13 is a cross-sectional view taken along line XIII-XIII shown in FIG. [Figure 14] FIG. 14 is a cross-sectional view showing a gate pad electrode. [Figure 15] FIG. 15 is a cross-sectional view showing a source pad electrode. [Figure 16]FIG. 16 is a cross-sectional view diagrammatically showing the second principal surface electrode. [Figure 17A] FIG. 17A is a cross-sectional view diagrammatically showing a second principal surface electrode according to the second embodiment. [Figure 17B] FIG. 17B is a cross-sectional view diagrammatically showing the second principal surface electrode according to the third embodiment. [Figure 17C] FIG. 17C is a cross-sectional view diagrammatically showing a second principal surface electrode according to the fourth embodiment. [Figure 17D] FIG. 17D is a cross-sectional view diagrammatically showing a second principal surface electrode according to the fifth embodiment. [Figure 17E] FIG. 17E is a cross-sectional view diagrammatically showing a second principal surface electrode according to the sixth embodiment. [Figure 17F] FIG. 17F is a cross-sectional view diagrammatically showing a second principal surface electrode according to the seventh embodiment. [Figure 17G] FIG. 17G is a cross-sectional view diagrammatically showing a second principal surface electrode according to an eighth embodiment. [Figure 17H] FIG. 17H is a cross-sectional view diagrammatically showing the second principal surface electrode according to the ninth embodiment. [Figure 17I] FIG. 17I is a cross-sectional view diagrammatically showing a second principal surface electrode according to a tenth embodiment. [Figure 18] FIG. 18 is a diagram showing a semiconductor package in which the SiC semiconductor device shown in FIG. 6 is incorporated. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Fig. 1 is a plan view showing a SiC semiconductor device 1 according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view taken along line II-II shown in Fig. 1, showing a configuration in which a second principal surface electrode 31 according to a first embodiment is incorporated. Fig. 3 is a cross-sectional view diagrammatically showing the second principal surface electrode 31 shown in Fig. 2.

[0012] 1 and 2, the SiC semiconductor device 1 includes a SiC chip 2. The SiC chip 2 includes a SiC single crystal made of a hexagonal crystal. The SiC single crystal made of a hexagonal crystal has a plurality of polytypes including 2H (Hexagonal)-SiC single crystal, 4H-SiC single crystal, 6H-SiC single crystal, and the like, depending on the period of the atomic arrangement. In this embodiment, the SiC chip 2 is made of a 4H-SiC single crystal, but does not exclude other polytypes.

[0013] The SiC chip 2 is formed in a rectangular parallelepiped chip shape. The SiC chip 2 has a first main surface 3 on one side, a second main surface 4 on the other side, and side surfaces 5A, 5B, 5C, and 5D connecting the first main surface 3 and the second main surface 4. The first main surface 3 and the second main surface 4 are formed in a quadrangular shape (square shape in this embodiment) in a plan view (hereinafter simply referred to as "plan view") seen from their normal direction Z.

[0014] The thickness of the SiC chip 2 may be 40 μm or more and 300 μm or less. The thickness of the SiC chip 2 may be 40 μm or more and 100 μm or less, 100 μm or more and 150 μm or less, 150 μm or more and 200 μm or less, 200 μm or more and 250 μm or less, or 250 μm or more and 300 μm or less. The thickness of the SiC chip 2 is preferably 60 μm or more and 150 μm or less.

[0015] The first main surface 3 and the second main surface 4 face the c-plane of the SiC single crystal. The first main surface 3 faces the silicon surface ((0001) surface) of the SiC single crystal. The first main surface 3 is a non-mounting surface. The second main surface 4 faces the carbon surface ((000-1) surface) of the SiC single crystal. The second main surface 4 is a mounting surface. The second main surface 4 may be a rough surface having either or both of grinding marks and annealing marks. The annealing marks are laser irradiation marks. The second main surface 4 may be an ohmic surface having annealing marks.

[0016] The first principal surface 3 and the second principal surface 4 have an off angle inclined at an angle of 0° or more and 10° or less in the a-axis direction ([11-20] direction) with respect to the c-plane of the SiC single crystal. The normal direction Z is inclined by the off angle with respect to the c-axis (

[0001] direction) of the SiC single crystal.

[0017] The off angle may be 0° or more and 6° or less. The off angle may be 0° or more and 2° or less, 2° or more and 4° or less, or 4° or more and 6° or less. The off angle is preferably more than 0° and 4.5° or less. The off angle may be 3° or more and 4.5° or less. In this case, the off angle is preferably 3° or more and 3.5° or less, or 3.5° or more and 4° or less. The off angle may be 1.5° or more and 3° or less. In this case, the off angle is preferably 1.5° or more and 2° or less, or 2° or more and 2.5° or less.

[0018] The side surfaces 5A to 5D include a first side surface 5A, a second side surface 5B, a third side surface 5C, and a fourth side surface 5D. The first side surface 5A and the second side surface 5B extend along a first direction X and face each other in a second direction Y that intersects with the first direction X. The third side surface 5C and the fourth side surface 5D extend along the second direction Y and face each other in the first direction X. More specifically, the second direction Y is perpendicular to the first direction X.

[0019] The first side surface 5A and the second side surface 5B are formed by the a-plane of the SiC single crystal. When the normal direction Z is taken as a reference, the first side surface 5A and the second side surface 5B may form an inclined surface inclined toward the c-axis direction (

[0001] direction) of the SiC single crystal with respect to the normal direction Z. When the normal direction Z is set to 0°, the first side surface 5A and the second side surface 5B may be inclined at an angle corresponding to the off angle with respect to the normal direction Z. The angle corresponding to the off angle may be equal to the off angle, or may be an angle greater than 0° and less than the off angle.

[0020] The third side surface 5C and the fourth side surface 5D may be formed by an m-plane of a SiC single crystal. The third side surface 5C and the fourth side surface 5D extend planarly along the normal direction Z. More specifically, the third side surface 5C and the fourth side surface 5D are formed substantially perpendicular to the first main surface 3 and the second main surface 4.

[0021] The side surfaces 5A to 5D may be cleaved or ground surfaces. The length of the side surfaces 5A to 5D may be 0.1 mm or more and 10 mm or less. The length of the side surfaces 5A to 5D is preferably 0.5 mm or more and 2.5 mm or less.

[0022] In this embodiment, the SiC chip 2 is + The SiC chip 2 has a layered structure including an n-type SiC semiconductor substrate 6 and an n-type SiC epitaxial layer 7. The second main surface 4 of the SiC chip 2 is formed by the SiC semiconductor substrate 6. The first main surface 3 of the SiC chip 2 is formed by the SiC epitaxial layer 7. The SiC semiconductor substrate 6 and the SiC epitaxial layer 7 form side surfaces 5A to 5D of the SiC chip 2.

[0023] The n-type impurity concentration of the SiC epitaxial layer 7 is less than the n-type impurity concentration of the SiC semiconductor substrate 6. The n-type impurity concentration of the SiC semiconductor substrate 6 is 1.0×10 18 cm -3 Above 1.0×10 21 cm -3 The n-type impurity concentration of the SiC epitaxial layer 7 may be 1.0×10 15 cm -3 Above 1.0×10 18 cm -3 It may be the following.

[0024] The thickness of the SiC semiconductor substrate 6 may be 40 μm or more and 250 μm or less. The thickness of the SiC semiconductor substrate 6 may be 40 μm or more and 100 μm or less, 100 μm or more and 150 μm or less, 150 μm or more and 200 μm or less, or 200 μm or more and 250 μm or less. The thickness of the SiC semiconductor substrate 6 is preferably 40 μm or more and 150 μm or less. By thinning the SiC semiconductor substrate 6, the resistance value of the SiC semiconductor substrate 6 can be reduced.

[0025] The thickness of the SiC epitaxial layer 7 may be 1 μm or more and 50 μm or less. The thickness of the SiC epitaxial layer 7 may be 1 μm or more and 5 μm or less, 5 μm or more and 10 μm or less, 10 μm or more and 15 μm or less, 15 μm or more and 20 μm or less, 20 μm or more and 30 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less. The thickness of the SiC epitaxial layer 7 is preferably 5 μm or more and 15 μm or less.

[0026] The SiC chip 2 includes an active region 8 and an outer region 9. The active region 8 is a region including an SBD (Schottky Barrier Diode) as an example of a functional device (diode). The active region 8 is formed in the center of the SiC chip 2 and spaced inward from the side surfaces 5A to 5D in a plan view. The active region 8 is formed in a quadrangle shape having four sides parallel to the side surfaces 5A to 5D in a plan view.

[0027] The outer region 9 is a region outside the active region 8. The outer region 9 is formed in a region between the side surfaces 5A to 5D and the active region 8. The outer region 9 is formed in a ring shape (more specifically, endless shape) surrounding the active region 8 in a plan view.

[0028] The SiC semiconductor device 1 includes an n-type diode region 10 formed in a surface layer portion of the first main surface 3 in the active region 8. The diode region 10 is formed in the center of the first main surface 3. The diode region 10 may have any planar shape. The diode region 10 may be formed in a quadrangle shape having four sides parallel to the side surfaces 5A to 5D in a plan view.

[0029] In this embodiment, the diode region 10 is formed by utilizing a part of the SiC epitaxial layer 7. The n-type impurity concentration of the diode region 10 is equal to the n-type impurity concentration of the SiC epitaxial layer 7. The n-type impurity concentration of the diode region 10 may exceed the n-type impurity concentration of the SiC epitaxial layer 7. In this case, the diode region 10 is formed by introducing an n-type impurity into a surface portion of the SiC epitaxial layer 7.

[0030] In the outer region 9, a guard region 11 containing p-type impurities is formed in a surface layer portion of the first main surface 3. The p-type impurities in the guard region 11 may be activated or may not be activated.

[0031] The guard region 11 is formed in a band shape extending along the diode region 10 in a plan view. More specifically, the guard region 11 is formed in a ring shape (more specifically, endless shape) surrounding the diode region 10 in a plan view. Thus, the guard region 11 is formed as a guard ring region.

[0032] The active region 8 (diode region 10) is defined by a guard region 11. The planar shape of the active region 8 (diode region 10) is adjusted by the planar shape of the guard region 11. The guard region 11 may be formed in a polygonal ring shape or a circular ring shape in a plan view.

[0033] The SiC semiconductor device 1 includes a main surface insulating layer 12 formed on the first main surface 3. The main surface insulating layer 12 may have a laminated structure including a silicon oxide layer and a silicon nitride layer. The main surface insulating layer 12 may have a single layer structure made of a silicon oxide layer or a silicon nitride layer. In this embodiment, the main surface insulating layer 12 has a single layer structure made of a silicon oxide layer.

[0034] The main surface insulating layer 12 includes a contact opening 13 that exposes the diode region 10. The contact opening 13 also exposes the inner peripheral edge of the guard region 11. The contact opening 13 may have any planar shape. The contact opening 13 may be formed in a quadrangle shape having four sides parallel to the side surfaces 5A to 5D in a plan view.

[0035] The periphery of the main surface insulating layer 12 is exposed from the side surfaces 5A to 5D. In this embodiment, the periphery of the main surface insulating layer 12 is continuous with the side surfaces 5A to 5D. The periphery of the main surface insulating layer 12 may be formed at a distance inward from the side surfaces 5A to 5D. In this case, the main surface insulating layer 12 exposes a portion of the first main surface 3 located in the outer region 9.

[0036] The thickness of the main surface insulating layer 12 may be 0.1 μm or more and 10 μm or less. The thickness of the main surface insulating layer 12 may be 0.1 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less. The thickness of the main surface insulating layer 12 is preferably 0.5 μm or more and 5 μm or less.

[0037] The SiC semiconductor device 1 includes a first principal surface electrode 14 formed on the first principal surface 3. The first principal surface electrode 14 is connected to the diode region 10 and the guard region 11 in a contact opening 13. The first principal surface electrode 14 is extended from the contact opening 13 onto the principal surface insulating layer 12. The periphery of the first principal surface electrode 14 is formed on the principal surface insulating layer 12 with a space inward from the side surfaces 5A to 5D.

[0038] More specifically, the first principal surface electrode 14 has a laminated structure including a Schottky barrier layer 15 (barrier layer) and a first Al layer 16, which are laminated in this order from the first principal surface 3 side. The first Al layer 16 is formed as a first buffer layer that utilizes the cushioning properties of Al, which has a relatively small Young's modulus (rigidity modulus), to buffer an external force applied to the SiC chip 2 from the first principal surface 3 side.

[0039] The Schottky barrier layer 15 is formed in the form of a film along the first principal surface 3 and the principal surface insulating layer 12. The Schottky barrier layer 15 forms a Schottky junction with the diode region 10. This forms an SBD in which the first principal surface electrode 14 serves as the anode and the diode region 10 serves as the cathode. In other words, the first principal surface electrode 14 is the anode electrode of the SBD.

[0040] The Schottky barrier layer 15 may include at least one of a Ti layer, a Pd layer, a Cr layer, a V layer, a Mo layer, a W layer, a Pt layer, and a Ni layer. The thickness of the Schottky barrier layer 15 may be 0.01 μm or more and 5 μm or less. The thickness of the Schottky barrier layer 15 may be 0.01 μm or more and 0.1 μm or less, 0.1 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 3 μm or less, 3 μm or more and 4 μm or less, or 4 μm or more and 5 μm or less.

[0041] The first Al layer 16 is formed on the Schottky barrier layer 15. The first Al layer 16 is formed in a film shape along the Schottky barrier layer 15. The first Al layer 16 covers the entire main surface of the Schottky barrier layer 15. The periphery of the first main surface electrode 14 is formed by the Schottky barrier layer 15 and the first Al layer 16.

[0042] The first Al layer 16 includes at least one of a pure Al layer (meaning an Al layer made of Al with a purity of 99% or more; the same applies below), an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer. The first Al layer 16 may have a layered structure in which two or more of the pure Al layer, the AlSi alloy layer, the AlCu alloy layer, and the AlSiCu alloy layer are layered in any order.

[0043] The first Al layer 16 may have a single-layer structure made of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer. The first Al layer 16 preferably has a single-layer structure made of an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer.

[0044] The thickness of the first Al layer 16 exceeds the thickness of the Schottky barrier layer 15. The thickness of the first Al layer 16 may be 0.05 μm or more and 10 μm or less. The thickness of the first Al layer 16 may be 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less. The thickness of the first Al layer 16 is preferably 1 μm or more and 8 μm or less.

[0045] The SiC semiconductor device 1 includes an insulating layer 17 covering the first principal surface electrode 14 on the first principal surface 3. In FIG. 1, the insulating layer 17 is shown by hatching. More specifically, the insulating layer 17 is formed on the principal surface insulating layer 12. The periphery of the insulating layer 17 is formed with a space inward from the side surfaces 5A to 5D. As a result, the insulating layer 17 exposes a portion of the principal surface insulating layer 12 that covers the outer region 9.

[0046] The periphery of the insulating layer 17 defines dicing streets DS between the side surfaces 5A to 5D. The dicing streets DS eliminate the need to physically cut the insulating layer 17 when cutting the SiC semiconductor device 1 from the SiC wafer. This allows the SiC semiconductor device 1 to be smoothly cut out from the SiC wafer, while simultaneously suppressing peeling and deterioration of the insulating layer 17. As a result, the insulating layer 17 can adequately protect objects to be protected, such as the SiC chip 2 and the first principal surface electrode 14.

[0047] The width of the dicing street DS may be 1 μm or more and 25 μm or less. The width of the dicing street DS is the width in a direction perpendicular to the direction in which the dicing street DS extends. The width of the dicing street DS may be 1 μm or more and 5 μm or less, 5 μm or more and 10 μm or less, 10 μm or more and 15 μm or less, 15 μm or more and 20 μm or less, or 20 μm or more and 25 μm or less.

[0048] The insulating layer 17 has a pad opening 18 that exposes the first principal surface electrode 14. In this embodiment, the pad opening 18 exposes the first principal surface electrode 14 in a region surrounded by the contact opening 13 in a plan view. The pad opening 18 may surround the contact opening 13 in a region outside the contact opening 13 in a plan view. The pad opening 18 may have any planar shape. The pad opening 18 may be formed in a quadrangle having four sides parallel to the side surfaces 5A to 5D in a plan view.

[0049] In this embodiment, the insulating layer 17 has a laminated structure including a passivation layer 19 and a resin layer 20, which are laminated in this order from the SiC chip 2 side.

[0050] The passivation layer 19 may include at least one of a silicon oxide layer and a silicon nitride layer. The passivation layer 19 may have a laminated structure including a silicon oxide layer and a silicon nitride layer. The passivation layer 19 may have a single-layer structure made of a silicon oxide layer or a silicon nitride layer. The passivation layer 19 preferably includes an insulating material different from the main surface insulating layer 12. In this form, the passivation layer 19 has a single-layer structure made of a silicon nitride layer.

[0051] The passivation layer 19 is formed in the form of a film along the principal surface insulating layer 12 and the first principal surface electrode 14. The passivation layer 19 has a first opening 21 that exposes a part of the first principal surface electrode 14. The first opening 21 may have any planar shape. The first opening 21 may be formed in a quadrangle shape having four sides parallel to the side surfaces 5A to 5D in a plan view.

[0052] The thickness of the passivation layer 19 may be 0.1 μm or more and 20 μm or less. The thickness of the passivation layer 19 may be 0.1 μm or more and 1 μm or less, 1 μm or more and 5 μm or less, 5 μm or more and 10 μm or less, 10 μm or more and 15 μm or less, or 15 μm or more and 20 μm or less.

[0053] The resin layer 20 is formed in a film shape along the main surface of the passivation layer 19. The resin layer 20 may contain a photosensitive resin. The photosensitive resin may be a negative type or a positive type. The resin layer 20 may contain at least one of polyimide, polyamide, and polybenzoxazole. In this embodiment, the resin layer 20 contains polybenzoxazole.

[0054] In this embodiment, the periphery of the resin layer 20 exposes the periphery of the passivation layer 19. The periphery of the insulating layer 17 is formed by the periphery of the resin layer 20 and the periphery of the passivation layer 19. The resin layer 20 may cover the periphery of the passivation layer 19.

[0055] The resin layer 20 has a second opening 22 that exposes a part of the first principal surface electrode 14. The second opening 22 may have any planar shape. The second opening 22 may be formed in a quadrangle having four sides parallel to the side surfaces 5A to 5D in a planar view. The second opening 22 communicates with the first opening 21 of the passivation layer 19, and forms one pad opening 18 between the second opening 22 and the first opening 21.

[0056] The inner wall of the second opening 22 may be formed flush with the inner wall of the first opening 21. The inner wall of the second opening 22 may be located on the side of the side faces 5A to 5D with respect to the inner wall of the first opening 21. The inner wall of the second opening 22 may be located inside the SiC chip 2 with respect to the inner wall of the first opening 21. In other words, the resin layer 20 may cover the inner wall of the first opening 21.

[0057] The thickness of the resin layer 20 may be 1 μm or more and 50 μm or less. The thickness of the resin layer 20 may be 1 μm or more and 10 μm or less, 10 μm or more and 20 μm or less, 20 μm or more and 30 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less.

[0058] The SiC semiconductor device 1 includes a pad electrode 23 formed on the first principal surface electrode 14. The pad electrode 23 is electrically connected to the first principal surface electrode 14. The pad electrode 23 is formed on the first principal surface electrode 14 in the pad opening 18. The pad electrode 23 has a terminal surface 24 that is externally connected to a conductive wire.

[0059] The terminal surface 24 is located on the first principal surface electrode 14 side with respect to the principal surface of the insulating layer 17 (resin layer 20). The terminal surface 24 may protrude above the principal surface of the insulating layer 17 (resin layer 20). The terminal surface 24 may have an overlapping portion that covers the principal surface of the insulating layer 17 (resin layer 20).

[0060] The pad electrode 23 includes a metal material different from that of the first principal surface electrode 14. In this embodiment, the pad electrode 23 has a laminated structure including a Ni layer 25, a Pd layer 26, and an Au layer 27, which are laminated in this order from the first principal surface electrode 14 side. Ni, Pd, and Au each have a Young's modulus (rigidity modulus) that exceeds that of Al. The Ni layer 25, the Pd layer 26, and the Au layer 27 may be plated layers formed by a plating method.

[0061] The pad electrode 23 may include at least one of the Ni layer 25, the Pd layer 26, and the Au layer 27. The pad electrode 23 may have a laminated structure in which at least two of the Ni layer 25, the Pd layer 26, and the Au layer 27 are laminated in any order. The pad electrode 23 may have a single layer structure consisting of the Ni layer 25, the Pd layer 26, or the Au layer 27.

[0062] The pad electrode 23 preferably has a terminal surface 24 formed by an Au layer 27. The pad electrode 23 preferably has a laminated structure including at least a Ni layer 25 and an Au layer 27 laminated in this order from the first principal surface electrode 14 side.

[0063] The thickness of the Ni layer 25 may be 0.1 μm or more and 10 μm or less. The thickness of the Ni layer 25 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less.

[0064] The thickness of the Pd layer 26 may be 0.1 μm or more and 10 μm or less. The thickness of the Pd layer 26 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less.

[0065] The thickness of the Au layer 27 may be 0.01 μm or more and 3 μm or less. The thickness of the Au layer 27 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less. The thickness of the Au layer 27 is preferably less than the thickness of the Ni layer 25. The thickness of the Au layer 27 is preferably less than the thickness of the Pd layer 26.

[0066] 2 and 3, the SiC semiconductor device 1 includes a second principal surface electrode 31 formed on the second principal surface 4. The second principal surface electrode 31 is formed as a cathode electrode of the SBD. In this embodiment, the second principal surface electrode 31 covers the entire area of ​​the second principal surface 4.

[0067] The second principal surface electrode 31 may be formed at a distance inward from the side surfaces 5A to 5D, exposing the peripheral portion of the second principal surface 4. In this case, it is not necessary to physically cut the second principal surface electrode 31 when cutting the SiC semiconductor device 1 from the SiC wafer. This allows the SiC semiconductor device 1 to be smoothly cut out from the SiC wafer, and simultaneously prevents the second principal surface electrode 31 from peeling off or deteriorating. As a result, the second principal surface electrode 31 can be appropriately connected to the second principal surface 4.

[0068] As one example, such a second principal surface electrode 31 can be obtained by removing unnecessary portions of the second principal surface electrode 31 by an etching method using a resist mask during the manufacturing process. As another example, the second principal surface electrode 31 can be obtained by forming the second principal surface electrode 31 that partially covers the second principal surface 4 by a lift-off method using a resist mask during the manufacturing process.

[0069] The second principal surface electrode 31 includes a second Al layer 32 covering the second principal surface 4. The second Al layer 32 faces the first Al layer 16 of the first principal surface electrode 14 across the SiC chip 2. The second Al layer 32 is formed as a second buffer layer that utilizes the cushioning properties of Al, which has a relatively small Young's modulus (rigidity), to buffer an external force applied to the SiC chip 2 from the second principal surface 4 side.

[0070] The second Al layer 32 includes at least one of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer. The second Al layer 32 may have a layered structure in which two or more of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer are layered in any order. The second Al layer 32 may be formed by a sputtering method and / or a deposition method.

[0071] The second Al layer 32 may have a single-layer structure made of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer. The Al-based metallic material of the second Al layer 32 may be different from the Al-based metallic material of the first Al layer 16. The second Al layer 32 preferably has a single-layer structure made of a pure Al layer.

[0072] The second Al layer 32 may have a thickness less than that of the first Al layer 16. The second Al layer 32 may have a thickness of 0.01 μm or more and 5 μm or less. The second Al layer 32 may have a thickness of 0.01 μm or more and 0.1 μm or less, 0.1 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 3 μm or less, 3 μm or more and 4 μm or less, or 4 μm or more and 5 μm or less.

[0073] The second principal surface electrode 31 includes, in addition to the second Al layer 32, one or more electrode layers made of a metal material different from the second Al layer 32. In this embodiment, the second principal surface electrode 31 includes, as an example of the multiple electrode layers, a Ti layer 33, a Ni layer 34, a Pd layer 35, an Au layer 36, and an Ag layer 37 stacked in this order from the second principal surface 4 side.

[0074] The Ti layer 33 is an ohmic electrode that forms ohmic contact with the second principal surface 4. The second Al layer 32 covers the second principal surface 4 with the Ti layer 33, Ni layer 34, Pd layer 35, Au layer 36 and Ag layer 37 sandwiched therebetween.

[0075] Each of Ti, Ni, Pd, Au and Ag has a Young's modulus (rigidity modulus) that exceeds that of Al. The Ti layer 33, the Ni layer 34, the Pd layer 35, the Au layer 36 and the Ag layer 37 may be formed by a sputtering method, a vapor deposition method and / or a plating method.

[0076] The second principal surface electrode 31 may include, as one or more electrode layers, at least one of a Ti layer 33, a Ni layer 34, a Pd layer 35, an Au layer 36, and an Ag layer 37. The second Al layer 32 preferably covers the second principal surface 4 with at least the Ti layer 33 sandwiched therebetween.

[0077] When the second principal surface electrode 31 includes at least one of a Ni layer 34, a Pd layer 35, and an Au layer 36, at least one of the Ni layer 34, the Pd layer 35, and the Au layer 36 may be a plating layer formed simultaneously with the Ni layer 25, the Pd layer 26, and the Au layer 27 of the pad electrode 23.

[0078] The thickness of the Ti layer 33 may be 0.01 μm or more and 3 μm or less. The thickness of the Ti layer 33 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less.

[0079] The thickness of the Ni layer 34 may be 0.1 μm or more and 10 μm or less. The thickness of the Ni layer 34 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less. The thickness of the Ni layer 34 is preferably greater than the thickness of the Ti layer 33.

[0080] The thickness of the Pd layer 35 may be 0.1 μm or more and 10 μm or less. The thickness of the Pd layer 35 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less. The thickness of the Pd layer 35 is preferably greater than the thickness of the Ti layer 33.

[0081] The thickness of the Au layer 36 may be 0.01 μm or more and 3 μm or less. The thickness of the Au layer 36 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less. The thickness of the Au layer 36 is preferably less than the thickness of the Ni layer 34. The thickness of the Au layer 36 is preferably less than the thickness of the Pd layer 35.

[0082] The thickness of the Ag layer 37 may be 0.01 μm or more and 3 μm or less. The thickness of the Ag layer 37 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less. The thickness of the Ag layer 37 is preferably less than the thickness of the Ni layer 34. The thickness of the Ag layer 37 is preferably less than the thickness of the Pd layer 35.

[0083] The second principal surface electrode 31 may have the structure shown in FIGS. 4A to 4I.

[0084] 4A is a cross-sectional view diagrammatically showing a second principal surface electrode 31 according to a second embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0085] 4A, in this embodiment, the second principal surface electrode 31 has a layered structure including a second Al layer 32, a Ti layer 33, a Ni layer 34, a Pd layer 35, and an Au layer 36. The Ti layer 33, the Ni layer 34, the Pd layer 35, and the Au layer 36 are layered in this order from the second principal surface 4 side. The second Al layer 32 covers the second principal surface 4 with the Ti layer 33, the Ni layer 34, the Pd layer 35, and the Au layer 36 sandwiched therebetween.

[0086] 4B is a cross-sectional view diagrammatically showing the second principal surface electrode 31 according to the third embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0087] 4B, in this embodiment, the second principal surface electrode 31 has a layered structure including a second Al layer 32, a Ti layer 33, a Ni layer 34, an Au layer 36, and an Ag layer 37. The Ti layer 33, the Ni layer 34, the Au layer 36, and the Ag layer 37 are layered in this order from the second principal surface 4 side. The second Al layer 32 covers the second principal surface 4 with the Ti layer 33, the Ni layer 34, the Au layer 36, and the Ag layer 37 sandwiched therebetween.

[0088] 4C is a cross-sectional view diagrammatically showing a second principal surface electrode 31 according to a fourth embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0089] 4C, in this embodiment, the second principal surface electrode 31 has a layered structure including a second Al layer 32, a Ti layer 33, a Ni layer 34, and an Au layer 36. The Ti layer 33, the Ni layer 34, and the Au layer 36 are layered in this order from the second principal surface 4 side. The second Al layer 32 covers the second principal surface 4 with the Ti layer 33, the Ni layer 34, and the Au layer 36 sandwiched therebetween.

[0090] 4D is a cross-sectional view diagrammatically showing the second principal surface electrode 31 according to the fifth embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0091] 4D, in this embodiment, the second principal surface electrode 31 has a laminated structure including a second Al layer 32 and a Ti layer 33. The Ti layer 33 is connected to the second principal surface 4. The second Al layer 32 covers the second principal surface 4 with the Ti layer 33 sandwiched therebetween.

[0092] 4E is a cross-sectional view diagrammatically showing a second principal surface electrode 31 according to a sixth embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0093] 4E, in this embodiment, the second principal surface electrode 31 includes a second Al layer 32, a Ti layer 33, a Ni layer 34, and an Au layer 36. The Ti layer 33, the Ni layer 34, and the Au layer 36 are laminated in this order from the second principal surface 4 side. The second Al layer 32 is interposed between the Ti layer 33 and the Ni layer 34, and covers the second principal surface 4 with the Ti layer 33 sandwiched therebetween.

[0094] In this case, the pad electrode 23 preferably has a two-layer structure consisting of a Ni layer 25 and an Au layer 27 laminated in this order from the first principal surface electrode 14 side. The Ni layer 34 and the Au layer 36 of the second principal surface electrode 31 can be formed by plating simultaneously with the Ni layer 25 and the Au layer 27 of the pad electrode 23.

[0095] 4F is a cross-sectional view diagrammatically showing a second principal surface electrode 31 according to a seventh embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0096] 4F, in this embodiment, the second principal surface electrode 31 includes a second Al layer 32, a Ti layer 33, a Ni layer 34, an Au layer 36, and an Ag layer 37. The Ti layer 33, the Ni layer 34, the Au layer 36, and the Ag layer 37 are laminated in this order from the second principal surface 4 side. The second Al layer 32 is interposed between the Ti layer 33 and the Ni layer 34, and covers the second principal surface 4 with the Ti layer 33 sandwiched therebetween.

[0097] In this case, the pad electrode 23 preferably has a two-layer structure consisting of a Ni layer 25 and an Au layer 27 laminated in this order from the first principal surface electrode 14 side. The Ni layer 34 and the Au layer 36 of the second principal surface electrode 31 can be formed by plating simultaneously with the Ni layer 25 and the Au layer 27 of the pad electrode 23.

[0098] 4G is a cross-sectional view diagrammatically showing the second principal surface electrode 31 according to the eighth embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0099] 4G, in this embodiment, the second principal surface electrode 31 includes a second Al layer 32, a Ti layer 33, a Ni layer 34, a Pd layer 35, an Au layer 36, and an Ag layer 37. The Ti layer 33, the Ni layer 34, the Au layer 36, and the Ag layer 37 are laminated in this order from the second principal surface 4 side. The second Al layer 32 is interposed between the Ti layer 33 and the Ni layer 34, and covers the second principal surface 4 with the Ti layer 33 sandwiched therebetween.

[0100] In this case, the pad electrode 23 preferably has a three-layer structure consisting of a Ni layer 25, a Pd layer 26, and an Au layer 27, which are laminated in this order from the first principal surface electrode 14 side. The Ni layer 34, the Pd layer 35, and the Au layer 36 of the second principal surface electrode 31 can be formed by plating simultaneously with the Ni layer 25, the Pd layer 26, and the Au layer 27 of the pad electrode 23.

[0101] 4H is a cross-sectional view diagrammatically showing the second principal surface electrode 31 according to the ninth embodiment. In the following, the same reference numerals are given to structures corresponding to those described in FIGS. 1 to 3, and description thereof will be omitted.

[0102] 4H, in this embodiment, the second principal surface electrode 31 includes a second Al layer 32, a Ti layer 33, a Ni layer 34, a Pd layer 35, and an Au layer 36. The Ti layer 33, the Ni layer 34, the Pd layer 35, and the Au layer 36 are laminated in this order from the second principal surface 4 side. The second Al layer 32 is interposed between the Ti layer 33 and the Ni layer 34, and covers the second principal surface 4 with the Ti layer 33 sandwiched therebetween.

[0103] In this case, the pad electrode 23 preferably has a three-layer structure consisting of a Ni layer 25, a Pd layer 26, and an Au layer 27, which are laminated in this order from the first principal surface electrode 14 side. The Ni layer 34, the Pd layer 35, and the Au layer 36 of the second principal surface electrode 31 can be formed by plating simultaneously with the Ni layer 25, the Pd layer 26, and the Au layer 27 of the pad electrode 23.

[0104] 4I is a cross-sectional view diagrammatically showing a second principal surface electrode 31 according to a tenth embodiment. In the following, structures corresponding to those described in FIGS. 1 to 3 are given the same reference numerals, and description thereof will be omitted.

[0105] 4I, in this embodiment, the second principal surface electrode 31 includes a second Al layer 32 and a silicide layer 38. The silicide layer 38 is formed on the second principal surface 4. The silicide layer 38 is a layer in which SiC exposed from the second principal surface 4 is silicided with a metal material. The silicide layer 38 may include at least one of an FeSi2 layer, a NiSi layer, a NiSi2 layer, a CoSi2 layer, a CrSi2 layer, a WSi2 layer, a MoSi2 layer, a MnSi2 layer, a NbSi2 layer, a TiSi2 layer, and a VSi2 layer.

[0106] The second Al layer 32 covers the second principal surface 4 with the silicide layer 38 sandwiched therebetween. The second principal surface electrode 31 may include at least one of the Ti layer 33, the Ni layer 34, the Pd layer 35, the Au layer 36, and the Ag layer 37 in addition to the second Al layer 32 and the silicide layer 38. The second Al layer 32, the Ti layer 33, the Ni layer 34, the Pd layer 35, the Au layer 36, and the Ag layer 37 may be stacked in any order. As the structure for covering the silicide layer 38, any one of the stacked structures of the first to tenth embodiment examples may be adopted.

[0107] Fig. 5 is a diagram showing a semiconductor package 41 incorporating the SiC semiconductor device 1 shown in Fig. 1. In Fig. 5, the internal structure of the semiconductor package 41 is shown through a package body 42.

[0108] 5, the semiconductor package 41 in this embodiment is a two-terminal TO-220. The semiconductor package 41 includes a package body 42, a metal plate 43, a first terminal 44, a second terminal 45, the SiC semiconductor device 1, a conductive bonding material 46, and a conductive wire 47.

[0109] The package body 42 is made of molded resin. The package body 42 may contain epoxy resin as an example of the molded resin. The package body 42 is formed in a rectangular parallelepiped shape. The package body 42 includes a first surface 48 on one side and a second surface 49 on the other side, as well as four side surfaces 50A, 50B, 50C, and 50D that connect the first surface 48 and the second surface 49.

[0110] More specifically, the four side surfaces 50A to 50D include a first side surface 50A, a second side surface 50B, a third side surface 50C, and a fourth side surface 50D. The first side surface 50A and the second side surface 50B face each other. The third side surface 50C and the fourth side surface 50D face each other.

[0111] The metal plate 43 may include at least one of Fe, Au, Ag, Cu, and Al. The metal plate 43 may have an outer surface on which at least one of a Ni plating film, an Au plating film, an Ag plating film, and a Cu plating film is formed. The planar shape of the metal plate 43 is arbitrary. In this embodiment, the metal plate 43 is formed in a quadrangular shape (rectangular shape) in a planar view.

[0112] The metal plate 43 integrally includes a pad portion 51 located inside the package body 42 and a heat sink portion 52 located outside the package body 42. The heat sink portion 52 is drawn out from the pad portion 51 across the second side surface 50B to the outside of the package body 42. The heat sink portion 52 includes a through hole 52a. The through hole 52a is formed in a circular shape.

[0113] In this embodiment, the metal plate 43 is disposed within the package body 42 so as to be exposed from the second surface 49. The metal plate 43 may also be disposed within the package body 42 so as not to be exposed from the second surface 49.

[0114] The first terminal 44 may include at least one of Fe, Au, Ag, Cu, and Al. The first terminal 44 may have an outer surface on which at least one of a Ni plating film, an Au plating film, an Ag plating film, and a Cu plating film is formed. The first terminal 44 is drawn out from inside the package body 42 across the first side surface 50A to the outside of the package body 42. The first terminal 44 is disposed in an area on the fourth side surface 50D side in a plan view. The first terminal 44 is disposed in an area on the first surface 48 side with respect to the plate surface of the metal plate 43.

[0115] The first terminal 44 includes a first inner end 53, a first outer end 54, and a first strip-shaped portion 55. The first inner end 53 is connected to the metal plate 43 within the package body 42. The first outer end 54 is disposed outside the package body 42. The first strip-shaped portion 55 extends between the first inner end 53 and the first outer end 54 in a direction perpendicular to the first side surface 50A.

[0116] The second terminal 45 may include at least one of Fe, Au, Ag, Cu, and Al. The second terminal 45 may include at least one of Ni plating film, Au plating film, Ag plating film, and Cu plating film. The second terminal 45 is drawn out from inside the package body 42 across the first side surface 50A to the outside of the package body 42.

[0117] The second terminal 45 is disposed in an area on the third side surface 50C side at a distance from the first terminal 44 in a plan view. The second terminal 45 is disposed in an area on the first surface 48 side with respect to the plate surface of the metal plate 43.

[0118] The second terminal 45 includes a second inner end 56, a second outer end 57, and a second strip-shaped portion 58. The second inner end 56 is disposed within the package body 42 and spaced apart from the metal plate 43. The second outer end 57 is disposed outside the package body 42. The second strip-shaped portion 58 extends between the second inner end 56 and the second outer end 57 in a direction perpendicular to the first side surface 50A.

[0119] The SiC semiconductor device 1 is disposed on a pad portion 51 of a metal plate 43 in a package body 42. A conductive bonding material 46 is interposed between the SiC semiconductor device 1 and the pad portion 51, and bonds a second principal surface electrode 31 of the SiC semiconductor device 1 to the pad portion 51. As a result, the SiC semiconductor device 1 is electrically connected to the first terminal 44 via the metal plate 43.

[0120] The conductive bonding material 46 may be a metal paste or a solder. The metal paste may include at least one of Au, Ag, and Cu. The conductive bonding material 46 is preferably made of solder. The solder may be a lead-free solder. The solder may include at least one of SnAgCu, SnZnBi, SnCu, SnCuNi, and SnSbNi.

[0121] The conductive wire 47 is made of a metal wire (bonding wire) or a metal clip. The metal wire may be an Al wire, an Au wire, a Cu wire, or a solder wire. The solder wire may be a lead-free solder wire. The solder wire may include at least one of SnAgCu, SnZnBi, SnCu, SnCuNi, and SnSbNi. The metal clip may be an Al clip, an Au clip, or a Cu clip. In this embodiment, the conductive wire 47 is made of a solder wire.

[0122] The conductive wire 47 is connected to the second inner end portion 56 of the second terminal 45 and the pad electrode 23 of the SiC semiconductor device 1 within the package body 42. In this way, the SiC semiconductor device 1 is electrically connected to the second terminal 45.

[0123] Figure 5 1 shows an example in which one conductor 47 is connected to the second inner end 56 and the pad electrode 23, the number of conductors 47 is arbitrary. Two or more conductors 47 may be connected to the second inner end 56 and the pad electrode 23.

[0124] The semiconductor package 41 may have a form other than TO-220. The semiconductor package 41 may have various forms such as SOP (Small Outline Package), QFN (Quad For Non Lead Package), DFP (Dual Flat Package), DIP (Dual Inline Package), QFP (Quad Flat Package), SIP (Single Inline Package), SOJ (Small Outline J-leaded Package), or similar forms.

[0125] As described above, according to the SiC semiconductor device 1, the first Al layer 16 is formed as a first buffer layer that relieves external forces on the side of the first main surface 3, and the second Al layer 32 is formed as a second buffer layer that relieves external forces on the side of the second main surface 4. This makes it possible to relieve external forces in the direction from the first main surface 3 to the second main surface 4 and in the direction from the second main surface 4 to the first main surface 3.

[0126] As an example, the first Al layer 16 and the second Al layer 32 can reduce the external force applied to the SiC chip 2 when mounting the SiC semiconductor device 1 on the pad portion 51 of the metal plate 43. Also, the first Al layer 16 and the second Al layer 32 can reduce the external force applied to the SiC chip 2 when joining the conductive wire 47 to the pad electrode 23 of the SiC semiconductor device 1. As a result, cracks in the SiC chip 2 can be suppressed.

[0127] The SiC semiconductor device 1 also includes a pad electrode 23 externally joined to a conductive wire 47. The pad electrode 23 includes at least one of a Ni layer 25, a Pd layer 26, and an Au layer 27. This allows the conductive wire 47 to be appropriately connected to the pad electrode 23.

[0128] On the other hand, Ni, Pd, and Au each have a Young's modulus (rigidity modulus) that exceeds that of Al. Therefore, in a structure including the pad electrode 23, the external force applied when the conductive wire 47 is joined cannot be adequately alleviated.

[0129] Therefore, in the SiC semiconductor device 1, a first Al layer 16 containing Al is interposed between the SiC chip 2 and the pad electrode 23. The first Al layer 16 can mitigate the external force applied to the SiC chip 2 from the first main surface 3 side by utilizing the cushioning properties of Al, which has a relatively small Young's modulus (rigidity modulus). Therefore, the conductive wire 47 can be appropriately joined to the pad electrode 23, and at the same time, cracks in the SiC chip 2 can be suppressed.

[0130] Moreover, the SiC semiconductor device 1 includes a second principal surface electrode 31 having one or more electrode layers made of a metal material different from the second Al layer 32, in addition to the second Al layer 32. The one or more electrode layers include at least one of a Ti layer 33, a Ni layer 34, a Pd layer 35, an Au layer 36, and an Ag layer 37. This can appropriately increase the adhesion of the conductive bonding material 46 to the second principal surface electrode 31. As a result, the SiC semiconductor device 1 can be appropriately mounted on the pad portion 51 of the metal plate 43.

[0131] On the other hand, Ti, Ni, Pd, Au and Ag each have a Young's modulus (rigidity modulus) that exceeds that of Al. Therefore, in a structure in which the second principal surface electrode 31 includes at least one of the Ti layer 33, the Ni layer 34, the Pd layer 35, the Au layer 36 and the Ag layer 37, it is not possible to adequately reduce the external force applied when mounting the SiC semiconductor device 1 or when joining the conductor 47.

[0132] Therefore, in the SiC semiconductor device 1, the second principal surface electrode 31 is formed including the second Al layer 32 in addition to at least one of the Ti layer 33, the Ni layer 34, the Pd layer 35, the Au layer 36, and the Ag layer 37. The second Al layer 32 can mitigate the external force applied to the SiC chip 2 from the second principal surface 4 side by utilizing the cushioning properties of Al having a relatively small Young's modulus (rigidity modulus). Therefore, the SiC semiconductor device 1 can be appropriately mounted on the pad portion 51, and at the same time, cracks in the SiC chip 2 can be suppressed.

[0133] Fig. 6 is a perspective view of a SiC semiconductor device 61 according to a second embodiment of the present invention, showing a configuration in which the second principal surface electrode 200 according to the first embodiment is incorporated. Fig. 7 is a plan view of the SiC semiconductor device 61 shown in Fig. 6. Fig. 8 is a plan view in which the structure above the first principal surface electrode 150 has been removed.

[0134] Fig. 9 is an enlarged plan view showing the internal structure of region IX shown in Fig. 8. Fig. 10 is a cross-sectional view taken along line XX shown in Fig. 9. Fig. 11 is a cross-sectional view taken along line XI-XI shown in Fig. 9. Fig. 12 is an enlarged view of region XII shown in Fig. 10.

[0135] Fig. 13 is a cross-sectional view taken along line XIII-XIII shown in Fig. 7. Fig. 14 is a cross-sectional view showing the gate pad electrode 191. Fig. 15 is a cross-sectional view showing the source pad electrode 192. Fig. 16 is a cross-sectional view diagrammatically showing the second main surface electrode 200. Figs. 14 and 15 are cross-sectional views showing the schematic structures of the gate pad electrode 191 and the source pad electrode 192, and do not show cross sections of specific locations.

[0136] 6 to 13, a SiC semiconductor device 61 includes a SiC chip 62. The SiC chip 62 includes a SiC single crystal made of a hexagonal crystal. The SiC single crystal made of a hexagonal crystal has a plurality of polytypes including 2H (Hexagonal)-SiC single crystal, 4H-SiC single crystal, 6H-SiC single crystal, etc., depending on the period of the atomic arrangement. In this embodiment, the SiC chip 62 is made of a 4H-SiC single crystal, but other polytypes are not excluded.

[0137] The SiC chip 62 has a first main surface 63 on one side, a second main surface 64 on the other side, and side surfaces 65A, 65B, 65C, and 65D connecting the first main surface 63 and the second main surface 64. The first main surface 63 and the second main surface 64 are formed in a quadrangular shape (rectangular in this embodiment) in a plan view seen from their normal direction Z (hereinafter simply referred to as "plan view").

[0138] The thickness of the SiC chip 62 may be 40 μm or more and 300 μm or less. The thickness of the SiC chip 62 may be 40 μm or more and 100 μm or less, 100 μm or more and 150 μm or less, 150 μm or more and 200 μm or less, 200 μm or more and 250 μm or less, or 250 μm or more and 300 μm or less. The thickness of the SiC chip 62 is preferably 60 μm or more and 150 μm or less.

[0139] In this embodiment, the first main surface 63 and the second main surface 64 face the c-plane of the SiC single crystal. The first main surface 63 faces the silicon surface ((0001) surface) of the SiC single crystal. The first main surface 63 is a non-mounting surface. The second main surface 64 faces the carbon surface ((000-1) surface) of the SiC single crystal. The second main surface 64 is a mounting surface. The second main surface 64 may be a rough surface having either one or both of grinding marks and annealing marks. The annealing marks are laser irradiation marks. The second main surface 64 may be an ohmic surface having annealing marks.

[0140] The first main surface 63 and the second main surface 64 have an off angle inclined at an angle of 0° to 10° in the a-axis direction ([11-20] direction) with respect to the c-plane of the SiC single crystal. The normal direction Z is inclined by the off angle with respect to the c-axis (

[0001] direction) of the SiC single crystal.

[0141] The off angle may be 0° or more and 6° or less. The off angle may be 0° or more and 2° or less, 2° or more and 4° or less, or 4° or more and 6° or less. The off angle is preferably more than 0° and 4.5° or less. The off angle may be 3° or more and 4.5° or less. In this case, the off angle is preferably 3° or more and 3.5° or less, or 3.5° or more and 4° or less. The off angle may be 1.5° or more and 3° or less. In this case, the off angle is preferably 1.5° or more and 2° or less, or 2° or more and 2.5° or less.

[0142] The side surfaces 65A to 65D include a first side surface 65A, a second side surface 65B, a third side surface 65C, and a fourth side surface 65D. The first side surface 65A and the second side surface 65B extend along a first direction X and face a second direction Y intersecting the first direction X. The first side surface 65A and the second side surface 65B form a short side of the SiC chip 62 in a plan view. The third side surface 65C and the fourth side surface 65D extend along the second direction Y and face the first direction X. The third side surface 65C and the fourth side surface 65D form a long side of the SiC chip 62 in a plan view. More specifically, the second direction Y is perpendicular to the first direction X.

[0143] In this embodiment, the first direction X is the m-axis direction ([1-100] direction) of the SiC single crystal. The second direction Y is the a-axis direction ([11-20] direction) of the SiC single crystal. That is, the first side surface 65A and the second side surface 65B are formed by the a-plane of the SiC single crystal and face the a-axis direction of the SiC single crystal. The third side surface 65C and the fourth side surface 65D are formed by the m-plane of the SiC single crystal and face the m-axis direction of the SiC single crystal.

[0144] The first side surface 65A and the second side surface 65B may form an inclined surface inclined toward the c-axis direction (

[0001] direction) of the SiC single crystal with respect to the normal direction Z when the normal direction Z is taken as a reference. The first side surface 65A and the second side surface 65B may be inclined at an angle corresponding to the off angle with respect to the normal direction Z when the normal direction Z is set to 0°. The angle corresponding to the off angle may be equal to the off angle or may be an angle greater than 0° and less than the off angle.

[0145] The third side surface 65C and the fourth side surface 65D extend planarly along the normal direction Z. More specifically, the third side surface 65C and the fourth side surface 65D are formed substantially perpendicular to the first main surface 63 and the second main surface 64.

[0146] The side surfaces 65A to 65D may be cleaved or ground surfaces. The length of the side surfaces 65A to 65D may be 0.1 mm or more and 10 mm or less. The length of the side surfaces 65A to 65D is preferably 0.5 mm or more and 2.5 mm or less.

[0147] In this embodiment, the SiC chip 62 is + The semiconductor device has a layered structure including an n-type SiC semiconductor substrate 66 and an n-type SiC epitaxial layer 67. The SiC semiconductor substrate 66 is formed as a drain region 68. The SiC epitaxial layer 67 is formed as a drift region 69.

[0148] A second main surface 64 of the SiC chip 62 is formed by the SiC semiconductor substrate 66. A first main surface 63 of the SiC chip 62 is formed by the SiC epitaxial layer 67. Side surfaces 65A to 65D of the SiC chip 62 are formed by the SiC semiconductor substrate 66 and the SiC epitaxial layer 67.

[0149] The thickness of the SiC semiconductor substrate 66 may be 40 μm or more and 250 μm or less. The thickness of the SiC semiconductor substrate 66 may be 40 μm or more and 100 μm or less, 100 μm or more and 150 μm or less, 150 μm or more and 200 μm or less, or 200 μm or more and 250 μm or less. The thickness of the SiC semiconductor substrate 66 is preferably 40 μm or more and 150 μm or less. By thinning the SiC semiconductor substrate 66, the resistance value of the SiC semiconductor substrate 66 can be reduced.

[0150] The thickness of the SiC epitaxial layer 67 may be 1 μm or more and 50 μm or less. The thickness of the SiC epitaxial layer 67 may be 1 μm or more and 5 μm or less, 5 μm or more and 10 μm or less, 10 μm or more and 15 μm or less, 15 μm or more and 20 μm or less, 20 μm or more and 30 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less. The thickness of the SiC epitaxial layer 67 is preferably 5 μm or more and 15 μm or less.

[0151] The n-type impurity concentration of the SiC epitaxial layer 67 is less than the n-type impurity concentration of the SiC semiconductor substrate 66. The n-type impurity concentration of the SiC semiconductor substrate 66 is 1.0×10 18 cm -3 Above 1.0×10 21 cm -3 The n-type impurity concentration of the SiC epitaxial layer 67 may be 1.0×10 15 cm -3 Above 1.0×10 18 cm -3 It may be the following.

[0152] In this embodiment, the SiC epitaxial layer 67 has a plurality of regions having different n-type impurity concentrations along the normal direction Z. More specifically, the SiC epitaxial layer 67 includes a high-concentration region 70 having a relatively high n-type impurity concentration, and a low-concentration region 71 having a lower n-type impurity concentration than the high-concentration region 70.

[0153] The high concentration region 70 is formed in a region on the first main surface 63 side. The low concentration region 71 is formed in a region on the second main surface 64 side with respect to the high concentration region 70. The thickness of the high concentration region 70 is less than the thickness of the low concentration region 71. The thickness of the high concentration region 70 is less than half the total thickness of the SiC epitaxial layer 67.

[0154] The peak value of the n-type impurity concentration of the high concentration region 70 is 1.0×10 16 cm -3 Above 1.0×10 18 cm -3 The peak value of the n-type impurity concentration of the low concentration region 71 may be 1.0×10 15 cm -3 Above 1.0×10 16 cm -3 It may be the following.

[0155] The SiC chip 62 includes an active region 72 and an outer region 73. The active region 72 is a region in which a MISFET (Metal Insulator Semiconductor Field Effect Transistor) as an example of a functional device (transistor) is formed.

[0156] The active region 72 is formed in the center of the SiC chip 62 at a distance inward from the side surfaces 65A-65D in a plan view. The active region 72 is formed in a quadrangular shape (rectangular shape in this embodiment) having four sides parallel to the side surfaces 65A-65D in a plan view.

[0157] The outer region 73 is a region outside the active region 72. The outer region 73 is formed in a region between the side surfaces 65A-65D and the periphery of the active region 72. The outer region 73 is formed in an annular (more specifically, endless) shape surrounding the active region 72 in a plan view.

[0158] The SiC semiconductor device 61 includes a p-type body region 74 formed in a surface layer portion of the first main surface 63 in the active region 72. The body region 74 defines the active region 72. The peak value of the p-type impurity concentration in the body region 74 is 1.0×10 17 cm -3 Above 1.0×10 19 cm -3 The peak value of the p-type impurity concentration of the body region 74 may be 1.0×10 18 cm -3 More preferably, it is equal to or greater than this.

[0159] 9 to 12, the SiC semiconductor device 61 includes a plurality of trench gate structures 75 formed on the first main surface 63 in an active region 72. The plurality of trench gate structures 75 are each formed in a band shape extending along a first direction X, and are formed at intervals along a second direction Y. The plurality of trench gate structures 75 are formed in a striped shape as a whole in a plan view.

[0160] In this embodiment, the multiple trench gate structures 75 extend in a strip shape from the periphery on one side (the third side surface 65C side) to the periphery on the other side (the fourth side surface 65D side) in the active region 72. The multiple trench gate structures 75 cross the intermediate portion between the periphery on one side and the periphery on the other side in the active region 72.

[0161] The length of each trench gate structure 75 may be 1 mm or more and 10 mm or less. The length of each trench gate structure 75 may be 1 mm or more and 2 mm or less, 2 mm or more and 4 mm or less, 4 mm or more and 6 mm or less, 6 mm or more and 8 mm or less, or 8 mm or more and 10 mm or less. The length of each trench gate structure 75 is preferably 2 mm or more and 6 mm or less. The total extension per unit area of ​​one trench gate structure 75 is 0.5 μm / μm. 2 More than 0.75μm / μm 2 It may be the following.

[0162] Each trench gate structure 75 includes an active portion 76 and a contact portion 77. The active portion 76 is a portion along the channel of the MISFET. The contact portion 77 is a portion outside the channel of the MISFET. The contact portion 77 is an end portion of the trench gate structure 75 and is primarily intended for external connection.

[0163] Each trench gate structure 75 includes a gate trench 78, a gate insulating layer 79, and a gate electrode 80. In Figure 9, the gate insulating layer 79 and the gate electrode 80 are indicated by hatching.

[0164] The gate trench 78 is formed in the SiC epitaxial layer 67 so as to penetrate the body region 74. The gate trench 78 includes side walls and a bottom wall. The side walls forming the long sides of the gate trench 78 are formed by the a-plane of the SiC single crystal. The side walls forming the short sides of the gate trench 78 are formed by the m-plane of the SiC single crystal.

[0165] The sidewall of the gate trench 78 may extend along the normal direction Z. In the SiC chip 62, the angle that the sidewall of the gate trench 78 forms with the first main surface 63 may be not less than 90° and not more than 95° (for example, not less than 91° and not more than 93°). The sidewall of the gate trench 78 may be formed approximately perpendicular to the first main surface 63. The gate trench 78 may be formed in a tapered shape in which the opening area on the bottom wall side is smaller than the opening area on the opening side in a cross-sectional view.

[0166] The bottom wall of the gate trench 78 is located in the high concentration region 70. The bottom wall of the gate trench 78 faces the c-plane of the SiC single crystal. The bottom wall of the gate trench 78 has an off angle inclined in the [11-20] direction with respect to the (0001) plane of the SiC single crystal. The bottom wall of the gate trench 78 may be formed parallel to the first main surface 63. The bottom wall of the gate trench 78 may be formed in a curved shape toward the second main surface 64.

[0167] With respect to the normal direction Z, the depth of the gate trench 78 may be 0.5 μm or more and 3.0 μm or less. The depth of the gate trench 78 may be 0.5 μm or more and 1.0 μm or less, 1.0 μm or more and 1.5 μm or less, 1.5 μm or more and 2.0 μm or less, 2.0 μm or more and 2.5 μm or less, or 2.5 μm or more and 3.0 μm or less.

[0168] The width of the gate trench 78 in the second direction Y may be 0.1 μm or more and 2 μm or less. The width of the gate trench 78 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1.0 μm or less, 1.0 μm or more and 1.5 μm or less, or 1.5 μm or more and 2 μm or less.

[0169] The opening edge portion of the gate trench 78 includes an inclined portion that slopes downward from the first main surface 63 toward the inside of the gate trench 78. The opening edge portion of the gate trench 78 is a portion that connects the first main surface 63 and the sidewall of the gate trench 78.

[0170] The inclined portion of the gate trench 78 is formed in a curved shape toward the inside of the SiC chip 62. The inclined portion of the gate trench 78 may be formed in a curved shape toward the inside of the gate trench 78. The inclined portion of the gate trench 78 relieves electric field concentration at the opening edge portion of the gate trench 78.

[0171] The gate insulating layer 79 includes at least one of silicon oxide, silicon nitride, aluminum oxide, zirconium oxide, and tantalum oxide. The gate insulating layer 79 may have a laminated structure including a silicon nitride layer and a silicon oxide layer. The gate insulating layer 79 may have a single-layer structure made of a silicon oxide layer or a silicon nitride layer. In this embodiment, the gate insulating layer 79 has a single-layer structure made of a silicon oxide layer.

[0172] The gate insulating layer 79 is formed in a film shape along the inner wall of the gate trench 78, and defines a recess space within the gate trench 78. The gate insulating layer 79 includes a first region 81, a second region 82, and a third region 83.

[0173] The first region 81 is formed along the sidewall of the gate trench 78. The second region 82 is formed along the bottom wall of the gate trench 78. The third region 83 is formed along the first main surface 63.

[0174] The thickness of the first region 81 is less than the thickness of the second region 82 and the thickness of the third region 83. The thickness of the first region 81 may be 0.01 μm or more and 0.2 μm or less. The thickness of the second region 82 may be 0.05 μm or more and 0.5 μm or less. The thickness of the third region 83 may be 0.05 μm or more and 0.5 μm or less.

[0175] The gate insulating layer 79 includes a bulge portion 84 that bulges toward the inside of the gate trench 78 at the opening edge portion. The bulge portion 84 is formed at a corner portion that connects the first region 81 and the third region 83 of the gate insulating layer 79. The bulge portion 84 is formed in a curved shape that bulges toward the inside of the gate trench 78. The bulge portion 84 narrows the opening of the gate trench 78 at the opening edge portion. A gate insulating layer 79 that does not have a bulge portion 84 may be formed. A gate insulating layer 79 having a uniform thickness may be formed.

[0176] The gate electrode 80 is embedded in the gate trench 78 with a gate insulating layer 79 therebetween. More specifically, the gate electrode 80 is embedded in a recess space defined by the gate insulating layer 79 in the gate trench 78.

[0177] The gate electrode 80 has an upper end portion located on the opening side of the gate trench 78. The upper end portion of the gate electrode 80 is formed in a curved shape recessed toward the bottom wall of the gate trench 78. The upper end portion of the gate electrode 80 has a constricted portion that is constricted along a bulging portion 84 of the gate insulating layer 79.

[0178] The gate electrode 80 includes p-type polysilicon doped with p-type impurities. The p-type impurities of the gate electrode 80 may include at least one of boron, aluminum, indium, and gallium.

[0179] The p-type impurity concentration of the gate electrode 80 is higher than the p-type impurity concentration of the body region 74. The p-type impurity concentration of the gate electrode 80 is 1.0×10 18 cm -3 Above 1.0×10 22 cm -3 The gate electrode 80 may have a sheet resistance of 10 Ω / □ or more and 500 Ω / □ or less (about 200 Ω / □ in this embodiment). The gate electrode 80 may have a thickness of 0.5 μm or more and 3 μm or less.

[0180] 9 and 11, the SiC semiconductor device 61 includes a gate wiring 85 formed on the first main surface 63 in the active region 72. In FIG. 9, the gate wiring 85 is indicated by hatching. More specifically, the gate wiring 85 is formed on a third region 83 of the gate insulating layer 79. The gate wiring 85 is formed along the first side surface 65A, the third side surface 65C, and the fourth side surface 65D in the active region 72, and defines a region in which the plurality of trench gate structures 75 are formed from three directions.

[0181] The gate wiring 85 is connected to the gate electrode 80 exposed from the contact portion 77 of the trench gate structure 75. In this embodiment, the gate wiring 85 is formed by an extension portion of the gate electrode 80 extended from the gate trench 78 onto the first main surface 63. An upper end portion of the gate wiring 85 is connected to an upper end portion of the gate electrode 80.

[0182] The SiC semiconductor device 61 includes a low resistance layer 86 that covers the gate electrode 80. The low resistance layer 86 covers an upper end of the gate electrode 80 in the gate trench 78. The low resistance layer 86 forms a part of the trench gate structure 75.

[0183] The low resistance layer 86 includes a conductive material having a sheet resistance lower than the sheet resistance of the gate electrode 80. The sheet resistance of the low resistance layer 86 may be not less than 0.01 Ω / □ and not more than 10 Ω / □.

[0184] More specifically, the low resistance layer 86 includes a polycide layer. The polycide layer is formed by silicidating the portion forming the surface layer of the gate electrode 80 with a metal material. More specifically, the polycide layer is made of a p-type polycide layer containing p-type impurities added to the gate electrode 80 (p-type polysilicon). The polycide layer preferably has a resistivity of 10 μΩ·cm or more and 110 μΩ·cm or less.

[0185] The sheet resistance in the gate trench 78 in which the gate electrode 80 and the low resistance layer 86 are embedded is equal to or lower than the sheet resistance of the gate electrode 80 alone. The sheet resistance in the gate trench 78 is preferably equal to or lower than the sheet resistance of n-type polysilicon doped with n-type impurities.

[0186] The sheet resistance in the gate trench 78 is approximated to the sheet resistance of the low resistance layer 86. That is, the sheet resistance in the gate trench 78 may be 0.01 Ω / □ or more and 10 Ω / □ or less. The sheet resistance in the gate trench 78 is preferably less than 10 Ω / □.

[0187] The low resistance layer 86 may contain at least one of TiSi, TiSi2, NiSi, CoSi, CoSi2, MoSi2, and WSi2. Of these materials, NiSi, CoSi2, and TiSi2 have relatively small resistivity and temperature dependency, and are therefore suitable as a polycide layer for forming the low resistance layer 86. The low resistance layer 86 is most preferably made of CoSi2, which has the property of being less likely to diffuse into other regions.

[0188] The low-resistance layer 86 includes a contact portion in contact with the gate insulating layer 79. More specifically, the contact portion of the low-resistance layer 86 is in contact with a third region 83 (bulge portion 84) of the gate insulating layer 79. The contact portion of the low-resistance layer 86 is formed in a region on the first main surface 63 side with respect to the bottom of the body region 74. More specifically, the contact portion of the low-resistance layer 86 is formed in a region on the first main surface 63 side with respect to the bottom of a source region 97 described later. The low-resistance layer 86 does not face the body region 74 across the gate insulating layer 79.

[0189] This makes it possible to suppress the formation of a current path between the low resistance layer 86 and the body region 74. In particular, a design in which the contact portion of the low resistance layer 86 is connected to a relatively thick corner portion of the gate insulating layer 79 is effective in reducing the risk of a current path.

[0190] In the normal direction Z, the thickness of the low resistance layer 86 is preferably less than the thickness of the gate electrode 80. The thickness of the low resistance layer 86 may be not less than 0.01 μm and not more than 3 μm.

[0191] The low-resistance layer 86 also covers the upper end of the gate wiring 85. A portion of the low-resistance layer 86 covering the upper end of the gate wiring 85 is integrally formed with a portion of the low-resistance layer 86 covering the upper end of the gate electrode 80. As a result, the low-resistance layer 86 covers the entire area of ​​the gate electrode 80 and the entire area of ​​the gate wiring 85.

[0192] By embedding p-type polysilicon, which has a work function different from that of n-type polysilicon, in the gate trench 78, the gate threshold voltage Vth can be increased by about 1 V. However, p-type polysilicon has a sheet resistance several tens of times (approximately 20 times) higher than the sheet resistance of n-type polysilicon. Therefore, when p-type polysilicon is used as the material for the gate electrode 80, energy loss increases with an increase in the parasitic resistance in the gate trench 78 (hereinafter simply referred to as "gate resistance").

[0193] Therefore, in the SiC semiconductor device 61, a low-resistance layer 86 (p-type polycide) is formed on the gate electrode 80 (p-type polysilicon). The low-resistance layer 86 can reduce the sheet resistance in the gate trench 78 while allowing an increase in the gate threshold voltage Vth (for example, an increase of about 1 V).

[0194] For example, the structure having the low resistance layer 86 can reduce the sheet resistance to 1 / 100 or less compared to a structure not having the low resistance layer 86. Also, the structure having the low resistance layer 86 can reduce the sheet resistance to 1 / 5 or less compared to a gate electrode 80 including n-type polysilicon.

[0195] This reduces the gate resistance, allowing the current to be efficiently diffused along the trench gate structure 75. That is, the low-resistance layer 86 is formed as a current diffusion layer that diffuses the current in the gate trench 78. In particular, in the case of a gate trench 78 having a length on the order of millimeters (length of 1 mm or more), it takes time to transmit the current, but the low-resistance layer 86 can appropriately suppress the switching delay.

[0196] Furthermore, according to the structure having the low resistance layer 86, it is not necessary to increase the p-type impurity concentration in the body region 74 in order to increase the gate threshold voltage Vth. Therefore, it is possible to appropriately increase the gate threshold voltage Vth while suppressing an increase in the channel resistance.

[0197] The SiC semiconductor device 61 includes a plurality of trench source structures 91 formed in regions between adjacent trench gate structures 75. The trench source structures 91 are formed at intervals in the second direction Y (the a-axis direction of the SiC single crystal) in such a manner that one trench gate structure 75 is sandwiched between the trench source structures 91.

[0198] The trench source structures 91 are each formed in a band shape extending along a first direction X (the m-axis direction of the SiC single crystal). The trench source structures 91 are formed in a stripe shape as a whole in a plan view. In the second direction Y, the pitch between the centers of adjacent trench source structures 91 may be 1.5 μm or more and 3 μm or less.

[0199] Each trench source structure 91 includes a source trench 92, a source insulating layer 93, and a source electrode 94. In Figure 9, the source insulating layer 93 and the source electrode 94 are indicated by hatching.

[0200] The source trench 92 is formed in the SiC epitaxial layer 67 so as to penetrate the body region 74. The source trench 92 includes side walls and a bottom wall. The side walls forming the long sides of the source trench 92 are formed by the a-plane of the SiC single crystal. The side walls forming the short sides of the source trench 92 are formed by the m-plane of the SiC single crystal.

[0201] The sidewall of the source trench 92 may extend along the normal direction Z. In the SiC chip 62, the angle that the sidewall of the source trench 92 forms with the first main surface 63 may be not less than 90° and not more than 95° (for example, not less than 91° and not more than 93°). The sidewall of the source trench 92 may be formed approximately perpendicular to the first main surface 63. The source trench 92 may be formed in a tapered shape in which the opening area on the bottom wall side is smaller than the opening area on the opening side in a cross-sectional view.

[0202] The bottom wall of the source trench 92 is located in the high concentration region 70. The bottom wall of the source trench 92 is located in a region on the second main surface 64 side with respect to the bottom wall of the gate trench 78. The bottom wall of the source trench 92 is located in a region between the bottom wall of the gate trench 78 and the low concentration region 71 in relation to the normal direction Z.

[0203] The bottom wall of the source trench 92 faces the c-plane of the SiC single crystal. The bottom wall of the source trench 92 has an off angle inclined in the [11-20] direction with respect to the (0001) plane of the SiC single crystal. The bottom wall of the source trench 92 may be formed parallel to the first main surface 63. The bottom wall of the source trench 92 may be formed in a curved shape toward the second main surface 64.

[0204] The depth of the source trench 92 exceeds the depth of the gate trench 78. The ratio of the depth of the source trench 92 to the depth of the gate trench 78 may be 1.5 or more, provided that the source trench 92 is located within the high concentration region 70. The ratio of the depth of the source trench 92 to the depth of the gate trench 78 is preferably 2 or more. The depth of the source trench 92 may be equal to the depth of the gate trench 78. With respect to the normal direction Z, the depth of the source trench 92 may be 0.5 μm or more and 10 μm or less (for example, about 2 μm).

[0205] The width of the source trench 92 in the second direction Y may be greater than the width of the gate trench 78 in the second direction Y, or may be less than the width of the gate trench 78 in the second direction Y. The width of the source trench 92 in the second direction Y is preferably equal to the width of the gate trench 78 in the second direction Y. The width of the source trench 92 in the second direction Y may be not less than 0.1 μm and not more than 2 μm (for example, about 0.5 μm).

[0206] The source insulating layer 93 includes at least one of silicon oxide, silicon nitride, aluminum oxide, zirconium oxide, and tantalum oxide. The source insulating layer 93 may have a laminated structure including a silicon nitride layer and a silicon oxide layer. The source insulating layer 93 may have a single-layer structure made of a silicon oxide layer or a silicon nitride layer. In this embodiment, the source insulating layer 93 has a single-layer structure made of a silicon oxide layer.

[0207] The source insulating layer 93 is formed in a film shape along the inner wall of the source trench 92, and defines a recess space within the source trench 92. The source insulating layer 93 includes a first region 95 and a second region 96.

[0208] The first region 95 is formed along the sidewall of the source trench 92. The second region 96 is formed along the bottom wall of the source trench 92. The thickness of the first region 95 is smaller than the thickness of the second region 96. The thickness of the first region 95 may be not less than 0.01 μm and not more than 0.2 μm. The thickness of the second region 96 may be not less than 0.05 μm and not more than 0.5 μm.

[0209] The thickness of the first region 95 may be approximately equal to the thickness of the first region 95 of the gate insulating layer 79. The thickness of the second region 96 may be approximately equal to the thickness of the second region 96 of the gate insulating layer 79. A source insulating layer 93 having a uniform thickness may be formed.

[0210] The source electrode 94 is embedded in the source trench 92 with the source insulating layer 93 therebetween. More specifically, the source electrode 94 is embedded in a recess space defined by the source insulating layer 93 in the source trench 92.

[0211] The source electrode 94 has an upper end located on the opening side of the source trench 92. The upper end of the source electrode 94 is formed on the bottom wall side of the source trench 92 with respect to the first main surface 63. The upper end of the source electrode 94 may be located above the first main surface 63.

[0212] An upper end of the source electrode 94 is formed in a curved shape recessed toward the bottom wall of the source trench 92. The upper end of the source electrode 94 may be formed parallel to the first main surface 63. With respect to the normal direction Z, the thickness of the source electrode 94 may be not less than 0.5 μm and not more than 10 μm (for example, about 1 μm).

[0213] The source electrode 94 preferably contains polysilicon having properties similar to those of SiC. This can reduce stress generated in the SiC chip 62. In this embodiment, the source electrode 94 contains p-type polysilicon doped with p-type impurities. In this case, the source electrode 94 can be formed simultaneously with the gate electrode 80.

[0214] The p-type impurity concentration of the source electrode 94 is greater than the p-type impurity concentration of the body region 74. The p-type impurity concentration of the source electrode 94 may be equal to the p-type impurity concentration of the gate electrode 80. The p-type impurity concentration of the source electrode 94 is 1.0×10 18 cm -3 Above 1.0×10 22 cm -3 It may be the following.

[0215] The p-type impurity of the source electrode 94 may include at least one of boron, aluminum, indium, and gallium. The sheet resistance of the source electrode 94 may be 10 Ω / □ or more and 500 Ω / □ or less (about 200 Ω / □ in this embodiment). The sheet resistance of the source electrode 94 may be equal to the sheet resistance of the gate electrode 80.

[0216] The source electrode 94 may contain at least one of n-type polysilicon, tungsten, aluminum, copper, an aluminum alloy, and a copper alloy instead of or in addition to p-type polysilicon.

[0217] The SiC semiconductor device 61 has n-type junctions formed in the surface layer of the body region 74 along the sidewalls of the gate trenches 78. + The peak value of the n-type impurity concentration of the source region 97 is 1.0×10 18 cm -3 Above 1.0×10 21 cm -3 The peak value of the n-type impurity concentration of the source region 97 may be 1.0×10 20 cm -3 More preferably, it is equal to or greater than this.

[0218] A plurality of source regions 97 are formed along one sidewall and the other sidewall of the gate trench 78. The plurality of source regions 97 are each formed in a band shape extending along the first direction X. The plurality of source regions 97 are formed in a stripe shape as a whole in a plan view. Each source region 97 is exposed from the sidewall of the gate trench 78 and the sidewall of each source trench 92.

[0219] The portion of the source region 97 along the sidewall of the gate trench 78 defines a channel of the MISFET between the high concentration region 70 and the source region 97. The ON / OFF of the channel is controlled by the gate electrode 80.

[0220] The SiC semiconductor device 61 has p-type junctions formed in the surface layer of the first main surface 63 along the source trenches 92. + The peak value of the p-type impurity concentration of each contact region 98 exceeds the peak value of the p-type impurity concentration of the body region 74. The peak value of the p-type impurity concentration of each contact region 98 is 1.0×10 18 cm -3 Above 1.0×10 21 cm -3 It may be the following.

[0221] In this embodiment, a plurality of contact regions 98 are formed for one source trench 92. The plurality of contact regions 98 are formed at intervals along the corresponding source trench 92. The plurality of contact regions 98 are formed at intervals from the gate trench 78.

[0222] Each contact region 98 covers the sidewalls and the bottom wall of the corresponding source trench 92. The bottom of each contact region 98 may be formed parallel to the bottom wall of the corresponding source trench 92.

[0223] In each contact region 98, a portion covering the sidewall of the source trench 92 is formed in a region on the first main surface 63 side with respect to the bottom of the body region 74. In each contact region 98, a portion covering the sidewall of the source trench 92 is drawn out toward the adjacent gate trench 78. In each contact region 98, a portion covering the sidewall of the source trench 92 may extend to an intermediate region between the gate trench 78 and the source trench 92. Each contact region 98 is electrically connected to the body region 74 and the source region 97.

[0224] The SiC semiconductor device 61 includes a deep well region 99 formed in a surface layer portion of the first main surface 63 in the active region 72. A plurality of deep well regions 99 are formed in a one-to-one correspondence with the plurality of source trenches 92. Each deep well region 99 is formed in a strip shape extending along the corresponding source trench 92 in a plan view.

[0225] Each deep well region 99 is formed in the high concentration region 70. Each deep well region 99 covers each source trench 92 with a corresponding contact region 98 therebetween. Each deep well region 99 covers the sidewall and bottom wall of the source trench 92 with a corresponding contact region 98 therebetween. Each deep well region 99 is continuous with the body region 74 at a surface portion of the first main surface 3.

[0226] Each deep well region 99 has a bottom located on the second main surface 64 side with respect to the bottom wall of the gate trench 78. The bottom of each deep well region 99 may be formed parallel to the bottom wall of each source trench 92. The multiple deep well regions 99 are preferably formed to a constant depth.

[0227] The peak value of the p-type impurity concentration of each deep well region 99 may be less than the peak value of the p-type impurity concentration of the contact region 98. The peak value of the p-type impurity concentration of each deep well region 99 may be equal to the peak value of the p-type impurity concentration of the body region 74. The peak value of the p-type impurity concentration of each deep well region 99 may be greater than the peak value of the p-type impurity concentration of the body region 74 or less than the peak value of the p-type impurity concentration of the body region 74.

[0228] The peak value of the p-type impurity concentration of each deep well region 99 is 1.0×10 17 cm -3 Above 1.0×10 19 cm -3 The peak value of the p-type impurity concentration of each deep well region 99 may be 1.0×10 18cm -3 More preferably, it is equal to or greater than this.

[0229] Each deep well region 99 forms a pn junction with the high concentration region 70. A depletion layer extends from this pn junction toward the gate trench 78. The depletion layer may overlap the bottom wall of the gate trench 78.

[0230] The SiC semiconductor device 61 includes a p-type peripheral well region 100 formed in a surface layer portion of the first main surface 63 at the periphery of the active region 72. The peripheral well region 100 covers a contact portion 77 of the trench gate structure 75 and exposes the active portion 76.

[0231] The peripheral well regions 100 cover the side walls and bottom walls of the gate trenches 78 at the corresponding contact portions 77. The bottoms of the peripheral well regions 100 are located on the first main surface 63 side with respect to the bottom walls of the deep well regions 99. Each peripheral well region 100 is electrically connected to the body region 74 and the deep well region 99 in a surface portion of the first main surface 63.

[0232] The p-type impurity concentration of the peripheral well region 100 may be approximately equal to the p-type impurity concentration of the deep well region 99. The peak value of the p-type impurity concentration of the peripheral well region 100 may be 1.0×10 17 cm -3 Above 1.0×10 19 cm -3 The peak value of the p-type impurity concentration in the peripheral well region 100 may be 1.0×10 18 cm -3 More preferably, it is equal to or greater than this.

[0233] In a SiC semiconductor device having only a pn junction diode, since the structure does not have a trench, there is little problem of electric field concentration in the SiC chip 62. Each deep well region 99 brings the trench gate type MISFET closer to the structure of a pn junction diode.

[0234] This allows the trench-gate MISFET to reduce the electric field in the SiC chip 62. Therefore, narrowing the pitch between adjacent deep well regions 99 is effective in reducing the electric field concentration.

[0235] Furthermore, the deep well region 99 having a bottom on the second main surface 64 side relative to the bottom wall of the gate trench 78 can appropriately reduce electric field concentration on the gate trench 78 by a depletion layer. The deep well regions 99 are preferably formed to a constant depth. This can prevent the withstand voltage (e.g., breakdown resistance) of the SiC chip 62 from being limited by each deep well region 99, thereby appropriately improving the withstand voltage. The peripheral well region 100 also has the same effect as the deep well region 99.

[0236] By using the source trench 92, the deep well region 99 can be appropriately formed in a relatively deep region of the SiC chip 62. In addition, since the deep well region 99 can be formed along the source trench 92, the occurrence of variation in the depth of the multiple deep well regions 99 can be appropriately suppressed.

[0237] Furthermore, a part of the high concentration region 70 is interposed in a region between adjacent deep well regions 99. This makes it possible to reduce JFET (Junction Field Effect Transistor) resistance in the region between adjacent deep well regions 99.

[0238] In this embodiment, the bottom of each deep well region 99 is located in the high concentration region 70. This allows a current path to be formed in the region directly below each deep well region 99 in the high concentration region 70 in the lateral direction parallel to the first main surface 63. As a result, the current spreading resistance can be reduced. In this structure, the low concentration region 71 increases the breakdown voltage of the SiC chip 62.

[0239] The SiC semiconductor device 61 includes a plurality of source sub-trenches 101 formed in the first main surface 63 so as to border the upper ends of the source electrodes 94 in the active region 72. The plurality of source sub-trenches 101 are formed in a one-to-one correspondence with the plurality of source electrodes 94. Each source sub-trenches 101 communicates with a corresponding source trench 92 and forms part of a sidewall of the corresponding source trench 92.

[0240] In this embodiment, the source sub-trench 101 is formed in a ring shape (more specifically, endless shape) surrounding the upper end of the source electrode 94 in a plan view. The source sub-trench 101 is formed by digging down a part of the source insulating layer 93. More specifically, the source sub-trench 101 is formed by digging down from the first main surface 63 to the upper end of the source insulating layer 93 and the upper end of the source electrode 94.

[0241] The source sub-trench 101 is formed in a tapered shape with a bottom area smaller than an opening area in a cross-sectional view. The bottom wall of the source sub-trench 101 may be formed in a curved shape toward the second main surface 64. The source sub-trench 101 exposes the source region 97, the contact region 98, the source insulating layer 93, the source electrode 94, and the contact region 98.

[0242] The upper end of the source electrode 94 has a shape that is narrowed inward relative to the lower end of the source electrode 94. The lower end of the source electrode 94 is a portion of the source electrode 94 that is located on the bottom wall side of each source trench 92. The width of the upper end of the source electrode 94 along the second direction Y may be smaller than the width of the lower end of the source electrode 94 along the second direction Y.

[0243] The opening edge portion of each source trench 92 includes an inclined portion that slopes downward from the first main surface 63 toward the inside of each source trench 92. The opening edge portion of each source trench 92 is a portion that connects the first main surface 63 and the sidewall of each source trench 92. The inclined portion of each source trench 92 is formed by a source sub-trench 101.

[0244] In this embodiment, the inclined portion of each source trench 92 is formed in a curved shape recessed toward the inside of the SiC chip 62. The inclined portion of each source trench 92 may be formed in a curved shape toward the source sub-trench 101. The inclined portion of each source trench 92 relieves electric field concentration at the opening edge portion of each source trench 92.

[0245] 13, the active region 72 has an active main surface 111 that forms a part of the first main surface 63. The outer region 73 has an outer main surface 112 that forms a part of the first main surface 63. The outer main surface 112 is connected to the side surfaces 65A to 65D.

[0246] The active principal surface 111 and the outer principal surface 112 each face the c-plane of the SiC single crystal. The active principal surface 111 and the outer principal surface 112 each have an off angle inclined in the [11-20] direction with respect to the (0001) plane of the SiC single crystal.

[0247] The outer region 73 is formed by digging down the first main surface 63 toward the second main surface 64. Therefore, the outer main surface 112 is formed in a region recessed toward the second main surface 64 side with respect to the active main surface 111. The outer main surface 112 is located on the second main surface 64 side with respect to the bottom wall of the gate trench 78.

[0248] In this embodiment, the outer main surface 112 is formed at a depth position substantially equal to the bottom walls of the source trenches 92. The outer main surface 112 is located on substantially the same plane as the bottom walls of the source trenches 92. The outer main surface 112 may be located on the second main surface 64 side within a range of 0 μm or more and 1 μm or less from the bottom walls of the source trenches 92. The outer main surface 112 exposes the high concentration region 70.

[0249] In this embodiment, the active region 72 is partitioned into a plateau shape by the outer region 73. The active region 72 is formed as an active plateau 113 that protrudes upward from the outer main surface 112.

[0250] The active plateau 113 includes an active sidewall 114 connecting the active principal surface 111 and the outer principal surface 112. The active sidewall 114 defines a boundary area between the active area 72 and the outer area 73. The first principal surface 63 is formed by the active principal surface 111, the outer principal surface 112 and the active sidewall 114.

[0251] In this embodiment, the active sidewall 114 extends along a normal direction Z of the active principal surface 111 (outer principal surface 112). The active sidewall 114 is formed by the m-plane and the a-plane of a SiC single crystal. The active sidewall 114 may have an inclined surface that slopes downward from the active principal surface 111 toward the outer principal surface 112. The active sidewall 114 exposes the high concentration region 70. The active sidewall 114 may expose the body region 74.

[0252] The SiC semiconductor device 61 has p + The diode region 121 includes a diode region 121 of a type having a high impurity concentration. The diode region 121 is formed in the high impurity concentration region 70. The diode region 121 is formed in the outer region 73 in a region between the active sidewall 114 and the side surfaces 65A to 65D.

[0253] The diode region 121 is formed at a distance from the active sidewall 114 and the side surfaces 65A-65D. The diode region 121 extends in a band shape along the active region 72 in a plan view. In this embodiment, the diode region 121 is formed in a ring shape (more specifically, endless shape) surrounding the active region 72 in a plan view.

[0254] The diode region 121 is located on the second main surface 64 side with respect to the bottom wall of the gate trench 78. The bottom of the diode region 121 is located on the second main surface 64 side with respect to the bottom wall of each source trench 92. The bottom of the diode region 121 may be formed at a depth position substantially equal to the bottom of the contact region 98.

[0255] The bottom of the diode region 121 may be located on approximately the same plane as the bottom of the contact region 98. The bottom of the diode region 121 may be located on the second main surface 64 side with respect to the bottom of the contact region 98. The bottom of the diode region 121 may be located on the second main surface 64 side with respect to the bottom of the contact region 98 within a range of 0 μm or more and 1 μm or less.

[0256] The diode region 121 forms a pn junction with the high concentration region 70. This forms a pn junction diode with the diode region 121 as the anode and the high concentration region 70 as the cathode. The peak value of the p-type impurity concentration of the diode region 121 is 1.0×10 17 cm -3 Above 1.0×10 21 cm -3 It may be the following.

[0257] The SiC semiconductor device 61 includes a p-type outer well region 122 formed in a surface layer portion of the outer principal surface 112. The peak value of the p-type impurity concentration of the outer well region 122 is 1.0×10 17 cm -3 Above 1.0×10 19 cm -3 The peak value of the p-type impurity concentration of the outer well region 122 may be less than the peak value of the p-type impurity concentration of the diode region 121. The peak value of the p-type impurity concentration of the outer well region 122 may be approximately equal to the peak value of the p-type impurity concentration of the deep well region 99.

[0258] The outer well region 122 is formed in a region between the active sidewall 114 and the diode region 121 in a plan view. The outer well region 122 extends in a band shape along the active region 72 in a plan view. In this embodiment, the outer well region 122 is formed in an annular shape (more specifically, endless shape) surrounding the active region 72 in a plan view.

[0259] The outer well region 122 is formed in the high concentration region 70. The outer well region 122 is located on the second main surface 64 side with respect to the bottom wall of the gate trench 78. The bottom of the outer well region 122 is located on the second main surface 64 side with respect to the bottom wall of each source trench 92. The bottom of the outer well region 122 is located on the second main surface 64 side with respect to the bottom of the diode region 121. The bottom of the outer well region 122 may be formed at a depth position substantially equal to the bottom of the deep well region 99.

[0260] The inner periphery of the outer well region 122 covers the corner connecting the active sidewall 114 and the outer major surface 112. The inner periphery of the outer well region 122 further extends along the active sidewall 114 and connects to the body region 74. The inner periphery of the outer well region 122 may be spaced apart from the active sidewall 114 towards the diode region 121.

[0261] The outer periphery of the outer well region 122 covers the diode region 121 from the second main surface 64 side. The outer well region 122 is electrically connected to the diode region 121. The outer well region 122 may form a part of a pn junction diode. The outer periphery of the outer well region 122 may be formed at a distance from the diode region 121 towards the active sidewall 114.

[0262] The SiC semiconductor device 61 includes an FL structure 123 (field limit structure) formed in a surface layer portion of the outer main surface 112. The FL structure 123 is formed in a region between the diode region 121 and the side surfaces 65A-65D in a plan view. In this embodiment, the FL structure 123 is formed at an interval from the side surfaces 65A-65D toward the diode region 121. The FL structure 123 is formed in the high concentration region 70.

[0263] The FL structure 123 includes one or more (for example, 2 to 20) FL regions (field limit regions) 124. In this embodiment, the FL structure 123 includes an FL region group having five FL regions 124A, 124B, 124C, 124D, and 124E. The FL regions 124A to 124E are formed in this order at intervals along a direction away from the diode region 121.

[0264] The FL regions 124A-124E each extend in a band shape along the periphery of the active region 72 in a plan view. More specifically, the FL regions 124A-124E are each formed in an annular (more specifically, endless) shape surrounding the active region 72 in a plan view. The FL regions 124A-124E are also referred to as field limiting ring regions (FLR regions).

[0265] The bottoms of the FL regions 124A to 124E are located on the second main surface 64 side with respect to the bottom of the diode region 121. Of the FL regions 124A to 124E, the innermost FL region 124A covers the diode region 121 from the second main surface 64 side. As a result, the FL region 124A is electrically connected to the diode region 121. The FL region 124A may form part of a pn junction diode.

[0266] The entirety of the FL regions 124A to 124E is located on the second main surface 64 side with respect to the bottom wall of the gate trench 78. The bottoms of the FL regions 124A to 124E are located on the second main surface 64 side with respect to the bottom wall of the source trench 92.

[0267] The FL structure 123 relieves electric field concentration in the outer region 73. The number, width, depth, p-type impurity concentration, etc. of the FL regions 124 can take various values ​​depending on the electric field to be relieved. The FL structure 123 may include one or more FL regions 124 formed in a region between the active sidewall 114 and the diode region 121 in a plan view.

[0268] The SiC semiconductor device 61 includes an outer insulating layer 131 covering the outer main surface 112. The outer insulating layer 131 is formed in a film shape along the active sidewall 114 and the outer main surface 112. The outer insulating layer 131 is continuous with the gate insulating layer 79 (third region 83) on the active main surface 111. The outer insulating layer 131 covers the diode region 121, the outer well region 122, and the FL structure 123 in the outer region 73.

[0269] The outer insulating layer 131 may include silicon oxide. The outer insulating layer 131 may include other insulating films such as silicon nitride. In this embodiment, the outer insulating layer 131 is formed of the same insulating material type as the gate insulating layer 79.

[0270] The periphery of the outer insulating layer 131 is exposed from the side surfaces 65A to 65D. In this embodiment, the periphery of the outer insulating layer 131 is continuous with the side surfaces 65A to 65D. The periphery of the outer insulating layer 131 may be formed at a distance inward from the side surfaces 65A to 65D. In this case, the outer insulating layer 131 exposes the outer main surface 112.

[0271] The SiC semiconductor device 61 further includes a sidewall structure 132 that covers the active sidewall 114. The sidewall structure 132 protects and reinforces the active plateau 113 from the outer region 73. The sidewall structure 132 also forms a step reduction structure that reduces a step formed between the active main surface 111 and the outer main surface 112.

[0272] When an upper layer structure (covering layer) is formed to cover the boundary region between the active region 72 and the outer region 73, the upper layer structure covers the sidewall structure 132. The sidewall structure 132 enhances the flatness of the upper layer structure. The sidewall structure 132 may have an inclined surface that slopes downward from the active principal surface 111 toward the outer principal surface 112. The inclined surface of the sidewall structure 132 can appropriately reduce the step.

[0273] The inclined surface of the sidewall structure 132 may be formed in a curved shape recessed toward the SiC chip 62. The inclined surface of the sidewall structure 132 may be formed in a curved shape directed toward the opposite side to the SiC chip 62. The inclined surface of the sidewall structure 132 may extend in a plane from the active principal surface 111 side toward the outer principal surface 112 side.

[0274] The sidewall structure 132 is formed along the active sidewall 114. In this embodiment, the sidewall structure 132 is formed in a ring shape (more specifically, endless shape) surrounding the active region 72 in a plan view. The sidewall structure 132 preferably contains polysilicon. In this case, the sidewall structure 132 can be formed simultaneously with the gate electrode 80 and the source electrode 94.

[0275] The SiC semiconductor device 61 includes an interlayer insulating layer 140 formed on the first main surface 63. The interlayer insulating layer 140 covers the active region 72 and the outer region 73. The interlayer insulating layer 140 is formed in the form of a film along the active main surface 111 and the outer main surface 112.

[0276] An interlayer insulating layer 140 is formed along the sidewall structure 132 in the boundary region between the active region 72 and the outer region 73. The interlayer insulating layer 140 forms part of an upper structure covering the sidewall structure 132.

[0277] The periphery of the interlayer insulating layer 140 is exposed from the side surfaces 65A to 65D. The periphery of the interlayer insulating layer 140 is continuous with the side surfaces 65A to 65D. The periphery of the interlayer insulating layer 140 may be formed at a distance inward from the side surfaces 65A to 65D. In this case, the interlayer insulating layer 140 exposes the outer main surface 112 (outer insulating layer 131).

[0278] The interlayer insulating layer 140 may include silicon oxide or silicon nitride. The interlayer insulating layer 140 may include USG (Undoped Silicate Glass), PSG (Phosphor Silicate Glass), and / or BPSG (Boron Phosphor Silicate Glass), which are examples of silicon oxide.

[0279] The interlayer insulating layer 140 includes a gate contact hole 141, a source contact hole 142, and a diode contact hole 143. The gate contact hole 141 exposes the gate wiring 85 in the active region 72. The gate contact hole 141 may be formed in a strip shape along the gate wiring 85. An opening edge portion of the gate contact hole 141 is formed in a curved shape toward the inside of the gate contact hole 141.

[0280] The source contact hole 142 exposes the source region 97, the contact region 98, and the trench source structure 91 in the active region 72. The source contact hole 142 may be formed in a strip shape extending along the trench source structure 91. The opening edge portion of the source contact hole 142 is formed in a curved shape toward the inside of the source contact hole 142.

[0281] The diode contact hole 143 exposes the diode region 121 in the outer region 73. The diode contact hole 143 may be formed in a strip shape (more specifically, endless shape) extending along the diode region 121. The diode contact hole 143 may expose the outer well region 122 and / or the FL structure 123. An opening edge portion of the diode contact hole 143 is formed in a curved shape toward the inside of the diode contact hole 143.

[0282] The SiC semiconductor device 61 includes a first principal surface electrode 150 formed on a first principal surface 63. More specifically, the first principal surface electrode 150 is formed on an interlayer insulating layer 140. The first principal surface electrode 150 includes a gate principal surface electrode 151 and a source principal surface electrode 152 that are electrically insulated from each other.

[0283] A gate voltage is applied to the gate principal surface electrode 151. The gate voltage may be 10 V or more and 50 V or less (for example, about 30 V). A source voltage is applied to the source principal surface electrode 152. The source voltage may be a reference voltage (for example, a GND voltage).

[0284] The gate principal surface electrode 151 is formed in the active region 72. The gate principal surface electrode 151 includes a gate pad 153 and a gate finger 154. The gate pad 153 is formed in a region on the first side surface 65A side in a plan view. More specifically, the gate pad 153 is formed along a region along the center of the first side surface 65A in a plan view. The gate pad 153 may be formed in a region along a corner connecting any two of the side surfaces 65A to 65D in a plan view. The gate pad 153 may be formed in a quadrangular shape in a plan view.

[0285] The gate fingers 154 are drawn out from the gate pad 153 and extend in a strip shape along the periphery of the active region 72. In this embodiment, the gate fingers 154 are formed along the first side surface 65A, the third side surface 65C, and the fourth side surface 65D so as to partition the inside of the active region 72 from three directions.

[0286] The gate finger 154 has a pair of open ends 155, 156. The pair of open ends 155, 156 are formed in a region facing the gate pad 153 across the inner side of the active region 72. In this embodiment, the pair of open ends 155, 156 are formed in a region along the second side surface 65B in a plan view.

[0287] The gate finger 154 enters the gate contact hole 141 from above the interlayer insulating layer 140. The gate finger 154 is electrically connected to the gate wiring 85 in the gate contact hole 141. As a result, an electrical signal from the gate pad 153 is transmitted to the gate electrode 80 and the gate wiring 85 via the gate finger 154.

[0288] The source principal surface electrode 152 is formed in the active region 72 and the outer region 73. The source principal surface electrode 152 includes a source pad 157, a source wiring 158, and a source connection portion 159. The source pad 157 is formed in the active region 72 at a distance from the gate principal surface electrode 151. The source pad 157 is formed in a C-shape in a plan view so as to cover the C-shaped region defined by the gate principal surface electrode 151.

[0289] The source pad 157 extends from above the interlayer insulating layer 140 into the source contact hole 142 and the source sub-trench 101. The source pad 157 is electrically connected to the source region 97, the contact region 98, and the source electrode 94 within the source contact hole 142 and the source sub-trench 101.

[0290] The above-mentioned source electrode 94 may be formed by utilizing a partial region of the source pad 157. The source electrode 94 may be formed by a portion of the source pad 157 that extends into each source trench 92.

[0291] The source wiring 158 is formed in the outer region 73. The source wiring 158 extends in a strip shape along the active region 72. The source wiring 158 is formed in a ring shape (more specifically, endless shape) surrounding the active region 72 in a plan view.

[0292] The source wiring 158 enters the diode contact hole 143 from above the interlayer insulating layer 140. The source wiring 158 is electrically connected to the diode region 121 in the diode contact hole 143.

[0293] The source connection portion 159 connects the source pad 157 and the source wiring 158. The source connection portion 159 runs from the source pad 157 across the open ends 155, 156 of the gate finger 154 and is connected to the source wiring 158. The source connection portion 159 runs from the active region 72 across the sidewall structure 132 to the outer region 73. The source connection portion 159 forms part of an upper layer structure that covers the sidewall structure 132.

[0294] The MISFET formed in the active region 72 includes an npn-type parasitic transistor due to its structure. When an avalanche current generated in the outer region 73 flows into the active region 72, the parasitic transistor turns on. In this case, latch-up causes the operation of the MISFET to become unstable. Therefore, in the SiC semiconductor device 61, an avalanche current absorption structure is formed by utilizing the structure of the source main surface electrode 152.

[0295] The avalanche current generated in the outer region 73 is absorbed by the source wiring 158 via the diode region 121. The avalanche current absorbed by the source wiring 158 reaches the source pad 157 via the source connection part 159. If a conductor is electrically connected to the source pad 157, the avalanche current reaches the outside via the conductor.

[0296] This makes it possible to suppress the driving of the parasitic transistor caused by the avalanche current, thereby suppressing latch-up and improving the stability of the MISFET.

[0297] 14 and 15, the first principal surface electrode 150 (gate principal surface electrode 151 and source principal surface electrode 152) has a laminated structure including a barrier layer 160 and a first Al layer 161 laminated in this order from the SiC chip 62 side. The first Al layer 161 is formed as a first buffer layer that utilizes the cushioning properties of Al, which has a relatively small Young's modulus (rigidity modulus), to buffer an external force applied to the SiC chip 62 from the first principal surface 63 side.

[0298] The barrier layer 160 may have a single layer structure including a Ti layer or a TiN layer. The barrier layer 160 may have a laminated structure including a Ti layer and a TiN layer laminated in this order from the SiC chip 62 side. The thickness of the barrier layer 160 may be 0.01 μm or more and 6 μm or less. The thickness of the barrier layer 160 may be 0.01 μm or more and 0.1 μm or less, 0.1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, or 4 μm or more and 6 μm or less.

[0299] The first Al layer 161 has a resistance value smaller than that of the barrier layer 160. The first Al layer 161 includes at least one of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer. The first Al layer 161 may have a layered structure in which two or more of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer are layered in any order.

[0300] The first Al layer 161 may have a single-layer structure made of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer. The first Al layer 161 preferably has a single-layer structure made of an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer.

[0301] The thickness of the first Al layer 161 exceeds the thickness of the barrier layer 160. The thickness of the first Al layer 161 may be 0.05 μm or more and 10 μm or less. The thickness of the first Al layer 161 may be 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less. The thickness of the first Al layer 161 is preferably 1 μm or more and 8 μm or less.

[0302] The SiC semiconductor device 61 includes an insulating layer 170 formed on the interlayer insulating layer 140. In Fig. 9, the insulating layer 170 is indicated by hatching. The periphery of the insulating layer 170 is formed at a distance inward from the side surfaces 65A to 65D. As a result, the insulating layer 170 exposes the periphery of the SiC chip 62 (more specifically, the interlayer insulating layer 140) in plan view.

[0303] The periphery of the insulating layer 170 defines dicing streets DS between the side surfaces 65A to 65D. The dicing streets DS eliminate the need to physically cut the insulating layer 170 when cutting out the SiC semiconductor device 61 from the SiC wafer. This allows the SiC semiconductor device 61 to be smoothly cut out from the SiC wafer, while simultaneously suppressing peeling and deterioration of the insulating layer 170. As a result, the insulating layer 170 can appropriately protect objects to be protected, such as the SiC chip 102 and the first principal surface electrode 150.

[0304] The width of the dicing street DS may be 1 μm or more and 25 μm or less. The width of the dicing street DS is the width in a direction perpendicular to the direction in which the dicing street DS extends. The width of the dicing street DS may be 1 μm or more and 5 μm or less, 5 μm or more and 10 μm or less, 10 μm or more and 15 μm or less, 15 μm or more and 20 μm or less, or 20 μm or more and 25 μm or less.

[0305] The insulating layer 170 selectively covers the gate principal surface electrode 151 and the source principal surface electrode 152. The insulating layer 170 includes a pad opening 171. More specifically, the pad opening 171 includes a gate pad opening 172 and a source pad opening 173. The gate pad opening 172 exposes the gate pad 153. The source pad opening 173 exposes the source pad 157. The gate pad opening 172 may have any planar shape. The source pad opening 173 may have any planar shape.

[0306] In this embodiment, the insulating layer 170 has a laminated structure including a passivation layer 174 and a resin layer 175, which are laminated in this order from the SiC chip 62 side.

[0307] The passivation layer 174 may include at least one of a silicon oxide layer and a silicon nitride layer. The passivation layer 174 may have a laminated structure including a silicon oxide layer and a silicon nitride layer. The passivation layer 174 may have a single-layer structure made of a silicon oxide layer or a silicon nitride layer. The passivation layer 174 preferably includes an insulating material different from the interlayer insulating layer 140. In this form, the passivation layer 174 has a single-layer structure made of a silicon nitride layer.

[0308] The passivation layer 174 is formed in a film shape along the interlayer insulating layer 140. The passivation layer 174 covers the active region 72 and the outer region 73 with the interlayer insulating layer 140 in between. The passivation layer 174 is extended from the active region 72 across the sidewall structure 132 to the outer region 73. The passivation layer 174 forms a part of an upper layer structure that covers the sidewall structure 132.

[0309] The passivation layer 174 has a first gate opening 176 and a first source opening 177. The first gate opening 176 exposes the gate pad 153. The first source opening 177 exposes the source pad 157. The first gate opening 176 may have any planar shape. The first source opening 177 may have any planar shape.

[0310] The thickness of the passivation layer 174 may be 0.1 μm to 20 μm inclusive. The thickness of the passivation layer 174 may be 0.1 μm to 1 μm inclusive, 1 μm to 5 μm inclusive, 5 μm to 10 μm inclusive, 10 μm to 15 μm inclusive, or 15 μm to 20 μm inclusive.

[0311] The resin layer 175 is formed in a film shape along the main surface of the passivation layer 174. The resin layer 175 is extended from the active region 72 across the sidewall structure 132 to the outer region 73. The resin layer 175 forms a part of an upper layer structure that covers the sidewall structure 132.

[0312] The resin layer 175 may include a photosensitive resin. The photosensitive resin may be a negative type or a positive type. The resin layer 175 may include at least one of polyimide, polyamide, and polybenzoxazole. In this embodiment, the resin layer 175 includes polybenzoxazole.

[0313] In this embodiment, the periphery of the resin layer 175 exposes the periphery of the passivation layer 174. The periphery of the insulating layer 170 is formed by the periphery of the resin layer 175 and the periphery of the passivation layer 174. The resin layer 175 may cover the periphery of the passivation layer 174.

[0314] The resin layer 175 has a second gate opening 178 and a second source opening 179. The second gate opening 178 communicates with the first gate opening 176 of the passivation layer 174, and forms a gate pad opening 172 between the second gate opening 178 and the first gate opening 176. The second source opening 179 communicates with the first source opening 177 of the passivation layer 174, and forms a source pad opening 173 between the second source opening 179 and the first source opening 177.

[0315] The inner wall of second gate opening 178 may be formed flush with the inner wall of first gate opening 176. The inner wall of second gate opening 178 may be located outside first gate opening 176 in plan view. The inner wall of second gate opening 178 may be located inside first gate opening 176 in plan view. In other words, resin layer 175 may cover the inner wall of first gate opening 176.

[0316] The inner wall of second source opening 179 may be formed flush with the inner wall of first source opening 177. The inner wall of second source opening 179 may be located outside first source opening 177 in plan view. The inner wall of second source opening 179 may be located inside first source opening 177 in plan view. In other words, resin layer 175 may cover the inner wall of first source opening 177.

[0317] The thickness of the resin layer 175 may be 1 μm or more and 50 μm or less. The thickness of the resin layer 175 may be 1 μm or more and 10 μm or less, 10 μm or more and 20 μm or less, 20 μm or more and 30 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less.

[0318] The SiC semiconductor device 61 includes an uneven structure 180 formed on the outer main surface 112. More specifically, the uneven structure 180 includes unevenness formed by utilizing an interlayer insulating layer 140 that covers the outer main surface 112. More specifically, the uneven structure 180 includes anchor holes 181 formed in the interlayer insulating layer 140.

[0319] The anchor hole 181 is formed by digging down a portion of the interlayer insulating layer 140 that covers the outer region 73. The anchor hole 181 may be formed in a region between the diode region 121 and the side faces 65A to 65D in a planar view. In this embodiment, the anchor hole 181 is formed in a region between the FL structure 123 and the side faces 65A to 65D in a planar view.

[0320] The anchor hole 181 may be defined by the interlayer insulating layer 140. In this embodiment, the anchor hole 181 exposes the outer main surface 112. The anchor hole 181 may be formed by digging the outer main surface 112 toward the second main surface 64. The opening edge portion of the anchor hole 181 is formed in a curved shape toward the inside of the anchor hole 181.

[0321] The anchor hole 181 extends in a band shape along the active region 72 in a plan view. In this embodiment, the anchor hole 181 is formed in a ring shape (more specifically, endless shape) surrounding the active region 72 in a plan view. The number of anchor holes 181 is arbitrary. One anchor hole 181 may be formed in the interlayer insulating layer 140, or multiple anchor holes 181 may be formed in the interlayer insulating layer 140.

[0322] The resin layer 175 has an anchor portion 182 that engages with the anchor hole 181. In this embodiment, the resin layer 175 engages with the anchor hole 181 via the passivation layer 174. More specifically, the passivation layer 174 penetrates into the anchor hole 181 from above the interlayer insulating layer 140. The passivation layer 174 contacts the outer main surface 112 within the anchor hole 181. A recess 183 recessed toward the anchor hole 181 is formed in a portion of the main surface of the passivation layer 174 that covers the anchor hole 181.

[0323] A part of the resin layer 175 forms an anchor portion 182 in the recess 183 of the passivation layer 174. This can increase the connection strength of the resin layer 175 to the first main surface 63, and therefore peeling of the resin layer 175 can be appropriately suppressed.

[0324] 14 and 15, the SiC semiconductor device 61 includes a pad electrode 190 formed on the first main surface electrode 150. More specifically, the pad electrode 190 includes a gate pad electrode 191 and a source pad electrode 192.

[0325] The gate pad electrode 191 is formed on the gate main surface electrode 151 and is electrically connected to the gate main surface electrode 151. More specifically, the gate pad electrode 191 is formed on the gate pad 153 in the gate pad opening 172. The gate pad electrode 191 has a gate terminal surface 193 that is externally connected to a conductive line.

[0326] The gate terminal surface 193 is located on the gate pad 153 side with respect to the main surface of the insulating layer 170 (resin layer 175). The gate terminal surface 193 may protrude upward from the main surface of the insulating layer 170 (resin layer 175). The gate terminal surface 193 may have an overlapping portion that covers the main surface of the insulating layer 170 (resin layer 175).

[0327] The source pad electrode 192 is formed on the source principal surface electrode 152 and is electrically connected to the source principal surface electrode 152. More specifically, the source pad electrode 192 is formed on the source pad 157 in the source pad opening 173. The source pad electrode 192 has a source terminal surface 194 that is externally connected to a conductive line.

[0328] The source terminal surface 194 is located on the source pad 157 side with respect to the main surface of the insulating layer 170 (resin layer 175). The source terminal surface 194 may protrude above the main surface of the insulating layer 170 (resin layer 175). The source terminal surface 194 may have an overlapping portion that covers the main surface of the insulating layer 170 (resin layer 175).

[0329] The pad electrode 190 (gate pad electrode 191 and source pad electrode 192) contains a metal material different from that of the first principal surface electrode 150. In this embodiment, the pad electrode 190 has a layered structure including a Ni layer 195, a Pd layer 196, and an Au layer 197, which are layered in this order from the first principal surface electrode 150 side. Ni, Pd, and Au each have a Young's modulus (rigidity modulus) that exceeds that of Al. The Ni layer 195, the Pd layer 196, and the Au layer 197 may be plated layers formed by a plating method.

[0330] The pad electrode 190 may include at least one of the Ni layer 195, the Pd layer 196, and the Au layer 197. The pad electrode 190 may have a laminated structure in which at least two of the Ni layer 195, the Pd layer 196, and the Au layer 197 are laminated in any order. The pad electrode 190 may have a single layer structure consisting of the Ni layer 195, the Pd layer 196, or the Au layer 197.

[0331] The gate pad electrode 191 preferably has a gate terminal surface 193 formed by an Au layer 197. The source pad electrode 192 preferably has a source terminal surface 194 formed by an Au layer 197. The pad electrode 190 preferably has a laminated structure including at least a Ni layer 195 and an Au layer 197 laminated in this order from the first principal surface electrode 150 side.

[0332] The thickness of the Ni layer 195 may be 0.1 μm or more and 10 μm or less. The thickness of the Ni layer 195 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less.

[0333] The thickness of the Pd layer 196 may be 0.1 μm or more and 10 μm or less. The thickness of the Pd layer 196 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less.

[0334] The thickness of the Au layer 197 may be 0.01 μm or more and 3 μm or less. The thickness of the Au layer 197 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less. The thickness of the Au layer 197 is preferably less than the thickness of the Ni layer 195. The thickness of the Au layer 197 is preferably less than the thickness of the Pd layer 196.

[0335] The SiC semiconductor device 61 includes a second principal surface electrode 200 formed on the second principal surface 64. The second principal surface electrode 200 is formed as a drain electrode of a MISFET. In this embodiment, the second principal surface electrode 200 covers the entire area of ​​the second principal surface 64.

[0336] The second principal surface electrode 200 may be formed at a distance inward from the side surfaces 65A to 65D, exposing the peripheral portion of the second principal surface 64. In this case, it is not necessary to physically cut the second principal surface electrode 200 when cutting out the SiC semiconductor device 61 from the SiC wafer. This allows the SiC semiconductor device 61 to be smoothly cut out from the SiC wafer, and simultaneously prevents the second principal surface electrode 200 from peeling off or deteriorating. As a result, the second principal surface electrode 200 can be appropriately connected to the second principal surface 64.

[0337] As one example, such a second principal surface electrode 200 can be obtained by removing unnecessary portions of the second principal surface electrode 200 by an etching method using a resist mask during the manufacturing process. As another example, the second principal surface electrode 200 can be obtained by forming the second principal surface electrode 200 that partially covers the second principal surface 64 by a lift-off method using a resist mask during the manufacturing process.

[0338] The second principal surface electrode 200 includes a second Al layer 201 covering the second principal surface 64. The second Al layer 201 faces the first Al layer 161 of the gate principal surface electrode 151 and the first Al layer 161 of the source principal surface electrode 152 across the SiC chip 62. The second Al layer 201 is formed as a second buffer layer that utilizes the cushioning properties of Al, which has a relatively small Young's modulus (rigidity), to buffer an external force applied to the SiC chip 62 from the second principal surface 64 side.

[0339] The second Al layer 201 includes at least one of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer. The second Al layer 201 may have a layered structure in which two or more of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer are layered in any order. The second Al layer 201 may be formed by a sputtering method and / or a deposition method.

[0340] The second Al layer 201 may have a single-layer structure made of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer. The Al-based metallic material of the second Al layer 201 may be different from the Al-based metallic material of the first Al layer 161. The second Al layer 201 preferably has a single-layer structure made of a pure Al layer.

[0341] The second Al layer 201 may have a thickness less than that of the first Al layer 161. The second Al layer 201 may have a thickness of 0.01 μm or more and 5 μm or less. The second Al layer 201 may have a thickness of 0.01 μm or more and 0.1 μm or less, 0.1 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 3 μm or less, 3 μm or more and 4 μm or less, or 4 μm or more and 5 μm or less.

[0342] The second principal surface electrode 200 includes, in addition to the second Al layer 201, one or more electrode layers made of a metal material different from the second Al layer 201. In this embodiment, the second principal surface electrode 200 includes, as an example of the multiple electrode layers, a Ti layer 202, a Ni layer 203, a Pd layer 204, an Au layer 205, and an Ag layer 206 stacked in this order from the second principal surface 64 side.

[0343] The Ti layer 202 is an ohmic electrode that forms ohmic contact with the second principal surface 64. The second Al layer 201 covers the second principal surface 64 with the Ti layer 202, Ni layer 203, Pd layer 204, Au layer 205 and Ag layer 206 sandwiched therebetween.

[0344] Each of Ti, Ni, Pd, Au and Ag has a Young's modulus (rigidity modulus) that exceeds that of Al. The Ti layer 202, the Ni layer 203, the Pd layer 204, the Au layer 205 and the Ag layer 206 may be formed by a sputtering method, a vapor deposition method and / or a plating method.

[0345] The second principal surface electrode 200 may include, as one or more electrode layers, at least one of a Ti layer 202, a Ni layer 203, a Pd layer 204, an Au layer 205, and an Ag layer 206. The second Al layer 201 preferably covers the second principal surface 64 with at least the Ti layer 202 sandwiched therebetween.

[0346] When the second principal surface electrode 200 includes at least one of the Ni layer 203, the Pd layer 204, and the Au layer 205, at least one of the Ni layer 203, the Pd layer 204, and the Au layer 205 may be a plating layer formed simultaneously with the Ni layer 195, the Pd layer 196, and the Au layer 197 of the pad electrode 190.

[0347] The thickness of the Ti layer 202 may be 0.01 μm or more and 3 μm or less. The thickness of the Ti layer 202 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less.

[0348] The thickness of the Ni layer 203 may be 0.1 μm or more and 10 μm or less. The thickness of the Ni layer 203 may be 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, 2 μm or more and 4 μm or less, 4 μm or more and 6 μm or less, 6 μm or more and 8 μm or less, or 8 μm or more and 10 μm or less. The thickness of the Ni layer 203 is preferably greater than the thickness of the Ti layer 202.

[0349] The thickness of the Pd layer 204 may be 0.1 μm to 10 μm. The thickness of the Pd layer 204 may be 0.1 μm to 0.5 μm, 0.5 μm to 1 μm, 1 μm to 2 μm, 2 μm to 4 μm, 4 μm to 6 μm, 6 μm to 8 μm, or 8 μm to 10 μm. The thickness of the Pd layer 204 is preferably greater than the thickness of the Ti layer 202.

[0350] The thickness of the Au layer 205 may be 0.01 μm or more and 3 μm or less. The thickness of the Au layer 205 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less. The thickness of the Au layer 205 is preferably less than the thickness of the Ni layer 203. The thickness of the Au layer 205 is preferably less than the thickness of the Pd layer 204.

[0351] The thickness of the Ag layer 206 may be 0.01 μm or more and 3 μm or less. The thickness of the Ag layer 206 may be 0.01 μm or more and 0.05 μm or less, 0.05 μm or more and 0.1 μm or less, 0.1 μm or more and 0.5 μm or less, 0.5 μm or more and 1 μm or less, 1 μm or more and 2 μm or less, or 2 μm or more and 3 μm or less. The thickness of the Ag layer 206 is preferably less than the thickness of the Ni layer 203. The thickness of the Ag layer 206 is preferably less than the thickness of the Pd layer 204.

[0352] The second principal surface electrode 200 may have the structure shown in FIGS. 17A to 17I.

[0353] Fig. 17A is a cross-sectional view diagrammatically showing a second principal surface electrode 200 according to the second embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0354] 17A, in this embodiment, the second principal surface electrode 200 has a layered structure including a second Al layer 201, a Ti layer 202, a Ni layer 203, a Pd layer 204, and an Au layer 205. The Ti layer 202, the Ni layer 203, the Pd layer 204, and the Au layer 205 are layered in this order from the second principal surface 64 side. The second Al layer 201 covers the second principal surface 64 with the Ti layer 202, the Ni layer 203, the Pd layer 204, and the Au layer 205 sandwiched therebetween.

[0355] Fig. 17B is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the third embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0356] 17B, ​​in this embodiment, the second principal surface electrode 200 has a layered structure including a second Al layer 201, a Ti layer 202, a Ni layer 203, an Au layer 205, and an Ag layer 206. The Ti layer 202, the Ni layer 203, the Au layer 205, and the Ag layer 206 are layered in this order from the second principal surface 64 side. The second Al layer 201 covers the second principal surface 64 with the Ti layer 202, the Ni layer 203, the Au layer 205, and the Ag layer 206 sandwiched therebetween.

[0357] Fig. 17C is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the fourth embodiment. In the following, structures corresponding to those described in Figs. 6 to 16 are given the same reference numerals, and description thereof will be omitted.

[0358] 17C, in this embodiment, the second principal surface electrode 200 has a layered structure including a second Al layer 201, a Ti layer 202, a Ni layer 203, and an Au layer 205. The Ti layer 202, the Ni layer 203, and the Au layer 205 are layered in this order from the second principal surface 64 side. The second Al layer 201 covers the second principal surface 64 with the Ti layer 202, the Ni layer 203, and the Au layer 205 sandwiched therebetween.

[0359] Fig. 17D is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the fifth embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0360] 17D, in this embodiment, the second principal surface electrode 200 has a laminated structure including a second Al layer 201 and a Ti layer 202. The Ti layer 202 is connected to the second principal surface 64. The second Al layer 201 covers the second principal surface 64 with the Ti layer 202 sandwiched therebetween.

[0361] Fig. 17E is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the sixth embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0362] 17E, in this embodiment, the second principal surface electrode 200 includes a second Al layer 201, a Ti layer 202, a Ni layer 203, and an Au layer 205. The Ti layer 202, the Ni layer 203, and the Au layer 205 are laminated in this order from the second principal surface 64 side. The second Al layer 201 is interposed between the Ti layer 202 and the Ni layer 203, and covers the second principal surface 64 with the Ti layer 202 sandwiched therebetween.

[0363] In this case, it is preferable that the pad electrode 190 has a two-layer structure consisting of a Ni layer 195 and an Au layer 197 laminated in this order from the first principal surface electrode 150 side. The Ni layer 203 and the Au layer 205 of the second principal surface electrode 200 can be formed simultaneously with the Ni layer 195 and the Au layer 197 of the pad electrode 190 by a plating method.

[0364] Fig. 17F is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the seventh embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0365] 17F, in this embodiment, the second principal surface electrode 200 includes a second Al layer 201, a Ti layer 202, a Ni layer 203, an Au layer 205, and an Ag layer 206. The Ti layer 202, the Ni layer 203, the Au layer 205, and the Ag layer 206 are laminated in this order from the second principal surface 64 side. The second Al layer 201 is interposed between the Ti layer 202 and the Ni layer 203, and covers the second principal surface 64 with the Ti layer 202 sandwiched therebetween.

[0366] In this case, it is preferable that the pad electrode 190 has a two-layer structure consisting of a Ni layer 195 and an Au layer 197 laminated in this order from the first principal surface electrode 150 side. The Ni layer 203 and the Au layer 205 of the second principal surface electrode 200 can be formed simultaneously with the Ni layer 195 and the Au layer 197 of the pad electrode 190 by a plating method.

[0367] Fig. 17G is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the eighth embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0368] 17G, in this embodiment, the second principal surface electrode 200 includes a second Al layer 201, a Ti layer 202, a Ni layer 203, a Pd layer 204, an Au layer 205, and an Ag layer 206. The Ti layer 202, the Ni layer 203, the Au layer 205, and the Ag layer 206 are laminated in this order from the second principal surface 64 side. The second Al layer 201 is interposed between the Ti layer 202 and the Ni layer 203, and covers the second principal surface 64 with the Ti layer 202 sandwiched therebetween.

[0369] In this case, it is preferable that the pad electrode 190 has a three-layer structure consisting of a Ni layer 195, a Pd layer 196, and an Au layer 197, which are laminated in this order from the first principal surface electrode 150 side. The Ni layer 203, the Pd layer 204, and the Au layer 205 of the second principal surface electrode 200 can be formed by plating simultaneously with the Ni layer 195, the Pd layer 196, and the Au layer 197 of the pad electrode 190.

[0370] Fig. 17H is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the ninth embodiment. In the following, structures corresponding to those described in Fig. 6 to Fig. 16 are given the same reference numerals, and description thereof will be omitted.

[0371] 17H, in this embodiment, the second principal surface electrode 200 includes a second Al layer 201, a Ti layer 202, a Ni layer 203, a Pd layer 204, and an Au layer 205. The Ti layer 202, the Ni layer 203, the Pd layer 204, and the Au layer 205 are laminated in this order from the second principal surface 64 side. The second Al layer 201 is interposed between the Ti layer 202 and the Ni layer 203, and covers the second principal surface 64 with the Ti layer 202 sandwiched therebetween.

[0372] In this case, it is preferable that the pad electrode 190 has a three-layer structure consisting of a Ni layer 195, a Pd layer 196, and an Au layer 197, which are laminated in this order from the first principal surface electrode 150 side. The Ni layer 203, the Pd layer 204, and the Au layer 205 of the second principal surface electrode 200 can be formed by plating simultaneously with the Ni layer 195, the Pd layer 196, and the Au layer 197 of the pad electrode 190.

[0373] Fig. 17I is a cross-sectional view diagrammatically showing the second principal surface electrode 200 according to the tenth embodiment. In the following, the same reference numerals are given to structures corresponding to those described in Figs. 6 to 16, and description thereof will be omitted.

[0374] 17I, in this embodiment, the second principal surface electrode 200 includes a second Al layer 201 and a silicide layer 207. The silicide layer 207 is formed on the second principal surface 64. The silicide layer 207 is formed by silicidating SiC exposed from the second principal surface 64 with a metal material. The silicide layer 207 may include at least one of an FeSi2 layer, a NiSi layer, a NiSi2 layer, a CoSi2 layer, a CrSi2 layer, a WSi2 layer, a MoSi2 layer, a MnSi2 layer, a NbSi2 layer, a TiSi2 layer, and a VSi2 layer.

[0375] The second Al layer 201 covers the second main surface 64 with the silicide layer 207 sandwiched therebetween. The second main surface electrode 200 may include at least one of the Ti layer 202, the Ni layer 203, the Pd layer 204, the Au layer 205, and the Ag layer 206 in addition to the second Al layer 201 and the silicide layer 207. The second Al layer 201, the Ti layer 202, the Ni layer 203, the Pd layer 204, the Au layer 205, and the Ag layer 206 may be stacked in any order. As a structure for covering the silicide layer 207, any one of the stacked structures of the first to tenth embodiment examples may be adopted.

[0376] Fig. 18 is a diagram showing a semiconductor package 211 incorporating the SiC semiconductor device 61 shown in Fig. 6. In Fig. 18, the internal structure of the semiconductor package 211 is shown with a package body 212 being transparent.

[0377] 18, in this embodiment, a semiconductor package 211 is a three-terminal TO-220. The semiconductor package 211 includes a package body 212, a metal plate 213, a first terminal 214, a second terminal 215, a third terminal 216, a SiC semiconductor device 61, a conductive bonding material 217, a first conductive wire 218, and a second conductive wire 219.

[0378] The package body 212 is made of mold resin. The package body 212 may contain epoxy resin as an example of the mold resin. The package body 212 is formed in a rectangular parallelepiped shape. The package body 212 includes a first surface 221 on one side and a second surface 222 on the other side, as well as four side surfaces 223A, 223B, 223C, and 223D that connect the first surface 221 and the second surface 222.

[0379] More specifically, the four side surfaces 223A to 223D include a first side surface 223A, a second side surface 223B, a third side surface 223C, and a fourth side surface 223D. The first side surface 223A and the second side surface 223B face each other. The third side surface 223C and the fourth side surface 223D face each other.

[0380] The metal plate 213 may include at least one of Fe, Au, Ag, Cu, and Al. The metal plate 213 may have an outer surface on which at least one of a Ni plating film, an Au plating film, an Ag plating film, and a Cu plating film is formed. The planar shape of the metal plate 213 is arbitrary. In this embodiment, the metal plate 213 is formed in a quadrangular shape (rectangular shape) in a planar view.

[0381] More specifically, the metal plate 213 integrally includes a pad portion 224 located inside the package body 212 and a heat sink portion 225 located outside the package body 212. The heat sink portion 225 is drawn out from the pad portion 224 across the second side surface 223B to the outside of the package body 212. The heat sink portion 225 includes a through hole 225a. The through hole 225a is formed in a circular shape. The planar area of ​​the heat sink portion 225 may exceed the planar area of ​​the pad portion 224.

[0382] In this embodiment, the metal plate 213 is disposed within the package body 212 so as to be exposed from the second surface 222. The metal plate 213 may also be disposed within the package body 212 so as not to be exposed from the second surface 222.

[0383] First terminal 214 may include at least one of Fe, Au, Ag, Cu, and Al. First terminal 214 may have an outer surface on which at least one of a Ni plating film, an Au plating film, an Ag plating film, and a Cu plating film is formed. First terminal 214 is drawn out from inside package body 212 across first side surface 223A to the outside of package body 212.

[0384] The first terminal 214 is disposed in the center of the first side surface 223A in a plan view. The first terminal 214 is disposed in an area on the first surface 221 side with respect to the plate surface of the metal plate 213.

[0385] The first terminal 214 includes a first inner end 226, a first outer end 227, and a first strip-shaped portion 228. The first inner end 226 is connected to the metal plate 213 within the package body 212. The first outer end 227 is disposed outside the package body 212. The first strip-shaped portion 228 extends between the first inner end 226 and the first outer end 227 in a direction perpendicular to the first side surface 223A.

[0386] The second terminal 215 may include at least one of Fe, Au, Ag, Cu, and Al. The second terminal 215 may have an outer surface on which at least one of a Ni plating film, an Au plating film, an Ag plating film, and a Cu plating film is formed. The second terminal 215 is drawn out from inside the package body 212 across the first side surface 223A to the outside of the package body 212.

[0387] Second terminal 215 is disposed in an area on third side surface 223C side with a gap between first terminal 214 and second terminal 215. Second terminal 215 is disposed in an area on first surface 221 side with respect to the plate surface of metal plate 213.

[0388] The second terminal 215 includes a second inner end 229, a second outer end 230, and a second strip-shaped portion 231. The second inner end 229 is disposed within the package body 212 and spaced apart from the metal plate 213. The second outer end 230 is disposed outside the package body 212. The second strip-shaped portion 231 extends between the second inner end 229 and the second outer end 230 in a direction perpendicular to the first side surface 223A.

[0389] Third terminal 216 may include at least one of Fe, Au, Ag, Cu, and Al. Third terminal 216 may have an outer surface on which at least one of a Ni plating film, an Au plating film, an Ag plating film, and a Cu plating film is formed. Third terminal 216 is drawn out from inside package body 212 across first side surface 223A to the outside of package body 212.

[0390] The third terminal 216 is disposed in an area on the fourth side surface 223D side with a gap between it and the first terminal 214 in a plan view. The third terminal 216 is disposed in an area on the first surface 221 side with respect to the plate surface of the metal plate 213.

[0391] The third terminal 216 includes a third inner end 232, a third outer end 233, and a third strip portion 234. The third inner end 232 is disposed within the package body 212 and spaced apart from the metal plate 213. The third outer end 233 is disposed outside the package body 212. The third strip portion 234 extends between the third inner end 232 and the third outer end 233 in a direction perpendicular to the first side surface 223A.

[0392] The SiC semiconductor device 61 is disposed on a pad portion 224 of the metal plate 213 in the package body 212. The conductive bonding material 217 is interposed between the SiC semiconductor device 61 and the pad portion 224, and bonds the second principal surface electrode 200 of the SiC semiconductor device 61 to the pad portion 224. As a result, the SiC semiconductor device 61 is electrically connected to the first terminal 214 via the metal plate 213.

[0393] The conductive bonding material 217 may be a metal paste or solder. The metal paste may include at least one of Au, Ag, and Cu. The conductive bonding material 217 is preferably made of solder. The solder may be a lead-free solder. The solder may include at least one of SnAgCu, SnZnBi, SnCu, SnCuNi, and SnSbNi.

[0394] The first conductive wire 218 is made of a metal wire (bonding wire) or a metal clip. The metal wire may be an Al wire, an Au wire, a Cu wire, or a solder wire. The solder wire may be a lead-free solder wire. The solder wire may include at least one of SnAgCu, SnZnBi, SnCu, SnCuNi, and SnSbNi. The metal clip may be an Al clip, an Au clip, or a Cu clip. In this embodiment, the first conductive wire 218 is made of a solder wire.

[0395] The first conducting wire 218 is connected to a second inner end 229 of the second terminal 215 and a gate pad electrode 191 of the SiC semiconductor device 61 inside the package body 212. As a result, the SiC semiconductor device 61 is electrically connected to the second terminal 215.

[0396] 18 shows an example in which one first conducting wire 218 is connected to the second inner end 229 and the gate pad electrode 191, but the number of first conducting wires 218 is arbitrary. Two or more first conducting wires 218 may be connected to the second inner end 229 and the gate pad electrode 191.

[0397] The second conductive wire 219 is made of a metal wire (bonding wire) or a metal clip. The metal wire may be an Al wire, an Au wire, a Cu wire, or a solder wire. The solder wire may be a lead-free solder wire. The solder wire may include at least one of SnAgCu, SnZnBi, SnCu, SnCuNi, and SnSbNi. The metal clip may be an Al clip, an Au clip, or a Cu clip. In this embodiment, the second conductive wire 219 is made of a solder wire.

[0398] The second conducting wire 219 is connected to a third inner end 232 of the third terminal 216 and a source pad electrode 192 of the SiC semiconductor device 61 within the package body 212. In this way, the SiC semiconductor device 61 is electrically connected to the third terminal 216.

[0399] 18 shows an example in which two second conductive wires 219 are connected to the third inner end portion 232 and the source pad electrode 192, but the number of second conductive wires 219 is arbitrary. One or three or more second conductive wires 219 may be connected to the third inner end portion 232 and the source pad electrode 192.

[0400] The semiconductor package 211 may have a form other than TO-220. The semiconductor package 211 may have various forms such as SOP (Small Outline Package), QFN (Quad For Non Lead Package), DFP (Dual Flat Package), DIP (Dual Inline Package), QFP (Quad Flat Package), SIP (Single Inline Package), SOJ (Small Outline J-leaded Package), or similar forms.

[0401] As described above, according to the SiC semiconductor device 61, the first Al layer 161 is formed as a first buffer layer that relieves external forces on the first main surface 63 side, and the second Al layer 201 is formed as a second buffer layer that relieves external forces on the second main surface 64 side. This makes it possible to relieve external forces in the direction from the first main surface 63 to the second main surface 64 and in the direction from the second main surface 64 to the first main surface 63.

[0402] As an example, the first Al layer 161 and the second Al layer 201 can reduce the external force applied to the SiC chip 62 when mounting the SiC semiconductor device 61 on the pad portion 224 of the metal plate 213. Also, the first Al layer 161 and the second Al layer 201 can reduce the external force applied to the SiC chip 62 when joining the first conductive wire 218 and the second conductive wire 219 to the pad electrode 190 of the SiC semiconductor device 61. As a result, cracks in the SiC chip 62 can be suppressed.

[0403] Moreover, the SiC semiconductor device 61 includes a pad electrode 190 (a gate pad electrode 191 and a source pad electrode 192) externally joined to the first conductive wire 218 and the second conductive wire 219. The pad electrode 190 includes at least one of a Ni layer 195, a Pd layer 196, and an Au layer 197. This allows the first conductive wire 218 and the second conductive wire 219 to be appropriately connected to the pad electrode 190.

[0404] On the other hand, Ni, Pd, and Au each have a Young's modulus (rigidity modulus) that exceeds that of Al. Therefore, in a structure including the pad electrode 190, it is not possible to adequately reduce the external force applied when the first conductive wire 218 and the second conductive wire 219 are joined.

[0405] Therefore, in the SiC semiconductor device 61, a first Al layer 161 containing Al is interposed between the SiC chip 62 and the pad electrode 190. The first Al layer 161 can mitigate the external force applied to the SiC chip 62 from the first main surface 63 side by utilizing the cushioning properties of Al, which has a relatively small Young's modulus (rigidity modulus). Therefore, the first conductive wire 218 and the second conductive wire 219 can be appropriately joined to the pad electrode 190, and at the same time, cracks in the SiC chip 62 can be suppressed.

[0406] Moreover, the SiC semiconductor device 61 includes, in addition to the second Al layer 201, a second principal surface electrode 200 having one or more electrode layers made of a metal material different from the second Al layer 201. The one or more electrode layers include at least one of a Ti layer 202, a Ni layer 203, a Pd layer 204, an Au layer 205, and an Ag layer 206. This makes it possible to appropriately increase the adhesion of the conductive bonding material 217 to the second principal surface electrode 200. As a result, the SiC semiconductor device 61 can be appropriately mounted on the pad portion 224 of the metal plate 213.

[0407] On the other hand, Ti, Ni, Pd, Au and Ag each have a Young's modulus (rigidity modulus) that exceeds that of Al. Therefore, in a structure in which the second principal surface electrode 200 includes at least one of the Ti layer 202, the Ni layer 203, the Pd layer 204, the Au layer 205 and the Ag layer 206, it is not possible to adequately reduce the external force applied when mounting the SiC semiconductor device 61 or when joining the first conductive wire 218 and the second conductive wire 219.

[0408] Therefore, in the SiC semiconductor device 61, the second principal surface electrode 200 including the second Al layer 201 is formed in addition to at least one of the Ti layer 202, the Ni layer 203, the Pd layer 204, the Au layer 205, and the Ag layer 206. The second Al layer 201 can mitigate the external force applied to the SiC chip 62 from the second principal surface 64 side by utilizing the cushioning properties of Al having a relatively small Young's modulus (rigidity modulus). Therefore, the SiC semiconductor device 61 can be appropriately mounted on the pad portion 224, and at the same time, cracks in the SiC chip 62 can be suppressed.

[0409] The present invention may be embodied in other forms.

[0410] In the above-described first embodiment, an example has been described in which the insulating layer 17 has a laminated structure including the passivation layer 19 and the resin layer 20. However, the insulating layer 17 may have a single-layer structure consisting of the passivation layer 19 or the resin layer 20.

[0411] In the above-described first embodiment, an example in which an SBD is formed as an example of a diode has been described. However, a p-type diode region 10 may be formed instead of the n-type diode region 10. In this case, a pn junction diode can be provided instead of the SBD.

[0412] In the above-described second embodiment, an example has been described in which the insulating layer 170 has a laminated structure including the passivation layer 174 and the resin layer 175. However, the insulating layer 170 may have a single-layer structure including the passivation layer 174 or the resin layer 175.

[0413] In the above-described second embodiment, an example has been described in which the gate electrode 80 and the gate wiring 85 include p-type polysilicon doped with p-type impurities. However, when the increase in the gate threshold voltage Vth is not important, the gate electrode 80 and the gate wiring 85 may include n-type polysilicon doped with n-type impurities instead of or in addition to the p-type polysilicon.

[0414] In this case, the low resistance layer 86 may be formed by silicidating the portion of the gate electrode 80 (n-type polysilicon) that forms the surface layer with a metal material. That is, the low resistance layer 86 may include n-type polycide. With such a structure, the gate resistance can be reduced.

[0415] In the above-described second embodiment, an example in which a MISFET is formed as an example of an insulated gate transistor has been described. + Instead of the drain region 68 of p + A collector region of a type similar to that of the MISFET may be adopted. With this structure, an IGBT (Insulated Gate Bipolar Transistor) can be provided instead of the MISFET. In this case, in the second embodiment, the "source" of the MISFET is replaced with the "emitter" of the IGBT, and the "drain" of the MISFET is replaced with the "collector" of the IGBT.

[0416] In each of the above-described embodiments, a structure in which the conductivity type of each semiconductor portion is inverted may be adopted, that is, a p-type portion may be made n-type, and an n-type portion may be made p-type.

[0417] Below are examples of features extracted from this specification and the drawings.

[0418] In the post-process (assembly process), various external forces are applied to the semiconductor device. For example, when mounting the semiconductor device, a mounting machine equipped with a suction nozzle is used. The semiconductor device is transported to the connection object while being sucked and held by the suction nozzle, and then pressed and mounted on the connection object. At this time, an external force from the suction nozzle toward the connection object and an external force from the connection object toward the suction nozzle are applied to the semiconductor device.

[0419] After mounting the semiconductor device, the capillary presses the conductor wire onto the pad electrode. At this time, an external force from the capillary toward the connection object and an external force from the connection object toward the capillary are applied to the semiconductor device. If an external force exceeding the strength of the chip is applied to the semiconductor device, a crack will occur in the chip. Below, a semiconductor device capable of mitigating the external force is provided.

[0420] [A1] A semiconductor device including: a chip having a first main surface on one side and a second main surface on the other side; a first main surface electrode including a first Al layer and formed on the first main surface; a pad electrode formed on the first main surface electrode and connected to a conductor; and a second main surface electrode including a second Al layer and formed on the second main surface.

[0421] In this semiconductor device, the first Al layer is formed as a first buffer layer that absorbs external forces on the first main surface side, and the second Al layer is formed as a second buffer layer that absorbs external forces on the second main surface side, thereby making it possible to absorb external forces in the direction from the first main surface to the second main surface and in the direction from the second main surface to the first main surface.

[0422] [A2] The semiconductor device described in A1, further including an insulating layer covering the first main surface electrode on the first main surface and having a pad opening exposing a portion of the first main surface electrode, the pad electrode being formed on the first main surface electrode within the pad opening.

[0423] [A3] The semiconductor device described in A2, wherein the chip has a side surface connecting the first main surface and the second main surface, and the insulating layer has a periphery formed on the first main surface at a distance from the side surface.

[0424] [A4] The semiconductor device according to A2 or A3, wherein the insulating layer includes a resin layer.

[0425] [A5] The semiconductor device according to any one of A1 to A4, wherein the pad electrode includes a metal material different from that of the first main surface electrode.

[0426] [A6] The semiconductor device according to any one of A1 to A5, wherein the pad electrode includes at least one of a Ni layer, a Pd layer, and an Au layer.

[0427] [A7] The semiconductor device according to any one of A1 to A6, wherein the pad electrode includes a Ni layer and an Au layer laminated in this order from the first principal surface electrode side.

[0428] [A8] The semiconductor device according to any one of A1 to A7, wherein the pad electrode includes a Ni layer, a Pd layer, and an Au layer laminated in this order from the first main surface electrode side.

[0429] [A9] A semiconductor device according to any one of A1 to A8, wherein the second main surface electrode includes one or more electrode layers made of a metal material different from the second Al layer, and the second Al layer covers the one or more electrode layers.

[0430] [A10] The semiconductor device according to A9, wherein the one or more electrode layers include at least one of a Ti layer, a Ni layer, a Pd layer, an Au layer, and an Ag layer.

[0431] [A11] The semiconductor device according to A9 or A10, wherein the one or more electrode layers include an ohmic electrode layer that forms an ohmic contact with at least the second main surface, and the second Al layer covers at least the ohmic electrode layer.

[0432] [A12] The semiconductor device according to any one of A1 to A11, wherein the second Al layer has a thickness less than that of the first Al layer.

[0433] [A13] The semiconductor device according to any one of A1 to A12, wherein the second Al layer includes at least one of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer.

[0434] [A14] The semiconductor device according to any one of A1 to A13, wherein the second Al layer is made of a pure Al layer.

[0435] [A15] The semiconductor device according to any one of A1 to A14, wherein the first Al layer includes at least one of a pure Al layer, an AlSi alloy layer, an AlCu alloy layer, and an AlSiCu alloy layer.

[0436] [A16] The semiconductor device according to any one of A1 to A15, further including a diode formed on the first main surface, the first main surface electrode forming an anode electrode electrically connected to an anode of the diode, and the second main surface electrode forming a cathode electrode electrically connected to a cathode of the diode.

[0437] [A17] A semiconductor device according to any one of A1 to A16, further including a MISFET formed on the first main surface, the first main surface electrode including a gate main surface electrode electrically connected to a gate of the MISFET and a source main surface electrode electrically connected to a source of the MISFET, the pad electrode including a gate pad electrode formed on the gate main surface electrode and a source pad electrode formed on the source main surface electrode, and the second main surface electrode forming a drain electrode electrically connected to a drain of the MISFET.

[0438] [A18] The semiconductor device according to any one of A1 to A17, wherein the chip has a layered structure including a semiconductor substrate and an epitaxial layer layered in this order from the second main surface side to the first main surface side.

[0439] [A19] The semiconductor device according to any one of A1 to A18, wherein the chip has a thickness of 300 μm or less.

[0440] [A20] The semiconductor device according to any one of A1 to A19, wherein the chip is a SiC chip made of a SiC single crystal.

[0441] This application corresponds to Japanese Patent Application No. 2019-080227 filed with the Japan Patent Office on April 19, 2019, the entire disclosure of which is incorporated herein by reference. Although the embodiments of the present invention have been described in detail, these are merely specific examples used to clarify the technical content of the present invention, and the present invention should not be interpreted as being limited to these specific examples, and the scope of the present invention is limited only by the scope of the appended claims. [Explanation of symbols]

[0442] 1. SiC semiconductor device 2. SiC chip 3 First main surface 4 Second main surface 5A 1st side 5B 2nd side 5C 3rd aspect 5D 4th side 6. SiC semiconductor substrate 7. SiC epitaxial layer 14 First principal surface electrode 16 1st Al layer 17 Insulating layer 18 Pad opening 20 Resin layer 23 Pad Electrode 25 Ni layer 26 Pd layer 27 Au layer 31 Second principal surface electrode 32 2nd Al layer 33 Ti layer 34 Ni layer 35 Pd layer 36 Au layer 37 Ag layer 61 SiC Semiconductor Device 62 SiC chip 63 First main surface 64 Second main surface 65A 1st side 65B 2nd side 65C 3rd side 65D 4th side 66 SiC semiconductor substrate 67 SiC epitaxial layer 150 First principal surface electrode 151 Gate main surface electrode 152 Source main surface electrode 161 1st Al layer 170 Insulating layer 171 Pad opening 172 Gate pad opening 173 Source pad opening 175 Resin layer 190 Pad Electrode 191 Gate pad electrode 192 Source pad electrode 195 Ni layer 196 Pd layer 197 Au layer 200 Second principal surface electrode 201 2nd Al layer 202 Ti layer 203 Ni layer 204 Pd layer 205 Au layer 206 Ag layer

Claims

1. a SiC chip having a first main surface on one side and a second main surface on the other side; a first principal surface electrode formed on the first principal surface; a pad electrode formed on the first principal surface electrode and connected to a conductive line; a second principal surface electrode formed on the second principal surface; the first principal surface electrode has a laminated structure including a barrier layer formed on the first principal surface and a first Al layer covering an entire principal surface of the barrier layer; the first Al layer is thicker than the barrier layer and has a single-layer structure made of an AlSi alloy layer, an AlCu alloy layer, or an AlSiCu alloy layer; the second principal surface electrode includes a second principal surface side electrode layer including an electrode layer formed on the entire second principal surface and made of a metal material different from Al; a second Al layer made of a pure Al layer covering the entire area of ​​the second principal surface side electrode layer and exposed on the entire area of ​​the second principal surface side, The electrode layer includes at least two of a Ti layer, a Ni layer, a Pd layer, an Au layer, and an Ag layer stacked on the second main surface.

2. The SiC semiconductor device as described in claim 1, wherein the electrode layer includes at least three of a Ti layer, a Ni layer, a Pd layer, an Au layer and an Ag layer stacked on the second main surface.

3. The SiC semiconductor device as described in claim 2, wherein the electrode layer includes at least four of a Ti layer, a Ni layer, a Pd layer, an Au layer and an Ag layer stacked on the second main surface.

4. A SiC semiconductor device as described in claim 3, wherein the electrode layer is a four-layer electrode layer including three layers of a Ti layer, a Ni layer and a Pd layer stacked in that order on the second principal surface, and one of an Au layer and an Ag layer formed on the Pd layer.

5. The SiC semiconductor device described in claim 3, wherein the electrode layer is a five-layer electrode layer including a Ti layer, a Ni layer, a Pd layer, an Au layer and an Ag layer stacked in this order on the second principal surface.

6. The SiC semiconductor device according to any one of claims 1 to 5, wherein the second main surface side electrode layer includes a silicide layer and the electrode layer stacked in this order on the second main surface, and the silicide layer is formed by silicidizing SiC with a metal material.

7. an insulating layer covering the first principal surface electrode on the first principal surface and having a pad opening exposing a portion of the first principal surface electrode; 7. The SiC semiconductor device according to claim 1, wherein the pad electrode is formed on the first main surface electrode in the pad opening.

8. the SiC chip has a side surface connecting the first main surface and the second main surface, The SiC semiconductor device according to claim 7 , wherein the insulating layer has a periphery formed on the first main surface and spaced from the side surface.

9. The SiC semiconductor device according to claim 7 , wherein the insulating layer includes a resin layer.

10. The SiC semiconductor device according to any one of claims 1 to 9, wherein the pad electrode includes a metal material different from that of the first main surface electrode.

11. The SiC semiconductor device according to any one of claims 1 to 10, wherein the pad electrode includes at least one of a Ni layer, a Pd layer, and an Au layer.

12. The SiC semiconductor device according to any one of claims 1 to 11, wherein the pad electrode includes a Ni layer and an Au layer laminated in this order from the first main surface electrode side.

13. The SiC semiconductor device according to any one of claims 1 to 12, wherein the pad electrode includes a Ni layer, a Pd layer, and an Au layer stacked in this order from the first main surface electrode side.

14. The SiC semiconductor device according to any one of claims 1 to 13, wherein the second Al layer has a thickness less than that of the first Al layer.

15. further comprising a diode formed on the first major surface; the first principal surface electrode forms an anode electrode electrically connected to the anode of the diode; The SiC semiconductor device according to any one of claims 1 to 14, wherein the second principal surface electrode forms a cathode electrode electrically connected to a cathode of the diode.

16. further comprising a MISFET formed on the first major surface; the first principal surface electrode includes a gate principal surface electrode electrically connected to a gate of the MISFET, and a source principal surface electrode electrically connected to a source of the MISFET; the pad electrode includes a gate pad electrode formed on the gate principal surface electrode and a source pad electrode formed on the source principal surface electrode; The SiC semiconductor device according to any one of claims 1 to 15, wherein the second principal surface electrode forms a drain electrode electrically connected to a drain of the MISFET.

17. The SiC chip has a laminated structure including a SiC semiconductor substrate and a SiC epitaxial layer laminated in this order from the second main surface side to the first main surface side. The SiC semiconductor device according to any one of claims 1 to 16.

18. The SiC semiconductor device according to any one of claims 1 to 17, wherein the SiC chip has a thickness of 300 μm or less.

19. the first main surface and the second main surface face a c-plane of a SiC single crystal, The first main surface is a non-mounting surface facing a silicon surface ((0001) surface) of the SiC single crystal, 2. The SiC semiconductor device according to claim 1, wherein the second main surface is a mounting surface facing a carbon surface ((000-1) surface) of the SiC single crystal.

20. 20. The SiC semiconductor device according to claim 19, wherein the first main surface and the second main surface have an off angle inclined at an angle of 0° or more and 10° or less in an a-axis direction ([11-20] direction) with respect to a c-plane of the SiC single crystal.

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