High frequency power supply device

Abstract

To suppress reduction in power supply efficiency generated due to a power difference of an amplifier output of each power amplifier in a high-frequency power supply device which performs power synthesis of the power of the plurality of amplifier outputs subjected to power amplification by the plurality of stages of power amplifiers.SOLUTION: A high-frequency power supply device according to the present invention, in a control unit of controlling an output level of a synthetic output obtained by performing power synthesis on amplifier outputs of a plurality of stages of power amplifiers, (a) defines an amplifier output reference value pref that defines the output level of each amplifier output, (b) compares each amplifier output feedback value pfb with the amplifier output reference value pref, (c) sets an operation amount MV of controlling the output level of each amplifier output of each power amplifier for each power amplifier, and (d) controls the output level of each amplifier output of each power amplifier on the basis of the set operation amount MV.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a radio frequency power supply device having a power amplifying section composed of multiple stages of power amplifiers and a power combining section, and relates to a radio frequency power supply device that distributes a radio frequency signal to multiple power amplifiers, and power combines the amplifier outputs amplified by each power amplifier in the power combining section to output a combined output. [Background technology]

[0002] There is known a radio frequency power supply device in which a power amplifying section is formed by multiple stages of power amplifiers arranged in parallel, and the amplifier outputs obtained from the power amplifiers of each stage are power-combined in a power combining section to output a combined output. Among such radio frequency power supplies, there is known a linear amplifier type radio frequency power supply device (see Patent Document 1) that uses class AB amplifiers as the power amplifiers of each stage, or a switching amplifier type radio frequency power supply device (see Patent Document 2) that uses class D amplifiers.

[0003] In a linear amplifier type high frequency power supply device, the output power amplified by each stage of the power amplifier in a parallel-configured multi-stage power amplifier fluctuates due to the variation in characteristics of the semiconductor elements (MOSFETs, bipolar transistors) used in the power amplifier and the variation in the circuit components used in the peripheral amplifier circuit of the power amplifier. For example, when the output power of a certain stage of the power amplifier is 1000W (60dBm), if the amplification degree of the power amplifier fluctuates by a maximum of ±1.5dB, the output power at -1.5dB is 708W (58.5dBm) and the output power at +1.5dB is 1412W (61.5dBm). Therefore, a power fluctuation occurs with a maximum power difference of about 300W above and below the reference power of 1000W.

[0004] Regarding fluctuations in the output power of the power amplifiers, Patent Document 1 describes a method of setting an optimum output level by comparing the output power levels of the output powers of two power amplifiers, adjusting the control voltage of a variable attenuator provided in the power amplifier at the optimum output level, and controlling the attenuation of the variable attenuator so as to minimize the loss in the power combining section.

[0005] Furthermore, Patent Document 2 describes that the power amplification section is configured with two power amplifiers connected in parallel, and the harmonic output is changed by changing the phase of each of the two power amplifiers in response to a suddenly changing load. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2001-237651 A [Patent Document 2] JP 2021-106462 A Summary of the Invention [Problem to be solved by the invention]

[0007] The combined output of the high frequency power supply device is obtained by power combining the amplifier outputs of multiple power amplifier stages. Meanwhile, the power efficiency of each power amplifier varies depending on the output power according to the characteristics of the semiconductor elements that make up each power amplifier.

[0008] When there is a difference in output power due to the variation of the semiconductor elements and circuit components of the power amplifiers of each stage, the power efficiency of the power amplifiers of each stage changes due to the output power / power efficiency characteristics, and a difference in power efficiency occurs between the power amplifiers of each stage. When the power efficiency between the power amplifiers of each stage becomes uneven in this way, it becomes impossible to drive each power amplifier with optimal power efficiency when power combining the outputs of each amplifier. This reduces the overall power efficiency of the high frequency power supply device.

[0009] In the above-mentioned conventional technology, Patent Document 1 compares the output levels of two power amplifiers with respect to the fluctuation of the output power of a high frequency power supply device, and controls the attenuation of each power amplifier so as to minimize the loss of the power combiner. However, Patent Document 1 does not disclose the problem of the power supply efficiency of each power amplifier of the high frequency power supply device, nor the means for solving this problem.

[0010] In addition, Patent Document 2 changes the phase of two power amplifiers in response to a suddenly changing load, thereby reducing the electrical stress generated in the circuit components of the high frequency power supply device and the load device when the load suddenly changes, without increasing the size of the power supply device. However, Patent Document 2 does not disclose the problem of the power supply efficiency of each power amplifier of the high frequency power supply device, nor any means for solving this problem.

[0011] The present invention aims to solve the above-mentioned problems of the conventional technology, and to suppress a decrease in the power efficiency of a radio frequency power supply device that combines the power of multiple amplifier outputs amplified by multiple stages of power amplifiers, which is caused by a power difference between the amplifier outputs of each power amplifier. [Means for solving the problem]

[0012] (A) High frequency power supply device A1: Composition The high frequency power supply device of the present invention comprises: a power amplifying section in which a plurality of power amplifier stages are arranged in parallel; A distribution unit that distributes a high frequency signal to each power amplifier; The power combiner unit combines the power of the multiple amplifier outputs amplified by each power amplifier and outputs the resulting combined output. The power combiner unit also includes a detector for detecting a feedback value and a control unit for controlling the output level.

[0013] In the present invention, as a detector, the amplifier output feedback value p fb The amplifier output detection section detects the composite output feedback value P FB The combined output detection unit is connected between the power combiner and the output terminal, and separates the forward power from the output terminal toward the load and the reflected power from the output terminal toward the power combiner, and calculates a combined output feedback value P FB The combined output detector may be, for example, a directional coupler.

[0014] The control unit of the present invention comprises: (a) Composite output command value P com or the composite output feedback value P FBBased on this, the amplifier output reference value p determines the output level of each amplifier output. ref (Amplifier output command value p com or amplifier output conversion value p FB ) and (b) The amplifier output feedback value p detected by the amplifier output detector fb and amplifier output reference value p ref (Amplifier output command value p com , amplifier output equivalent value p FB ) and (c) setting a manipulated variable MV for each power amplifier to control the output level of each amplifier output; (d) The output level of each amplifier output of each power amplifier is controlled based on each set manipulated variable MV.

[0015] In addition, "P" represents the composite output, and "p" represents the amplifier output. In the character strings following the symbols P and p, "com" represents the command value, "ref" represents the reference value, "FB" represents the feedback of the composite output, and "fb" represents the feedback of the amplifier output.

[0016] Composite output command value P com is a command value that determines a target value of the combined output of the power combiner. Amplifier output feedback value p fb is the power value of the amplifier output of each power amplifier, and is detected by the amplifier output detection unit.

[0017] The composite output feedback value P FB is the power value of the combined output of the power combiner, and is detected by the combined output detector. Amplifier output reference value p ref is a reference value that determines the output level of the amplifier output, and the amplifier output command value p com , or amplifier output equivalent value p FB can be used. Amplifier output command value p comis the output command value per power amplifier determined for each power amplifier, and is determined based on the number N of power amplifier stages and the output power / power supply efficiency characteristics of the power amplifier. com It is calculated by apportioning the above. Amplifier output conversion value p FB is the amplifier output determined for each power amplifier. The composite output feedback value P is determined based on the number N of power amplifier stages and the output power / power efficiency characteristics of the power amplifier. FB It is calculated by apportioning the above.

[0018] In the present invention, in setting the manipulated variable MV that controls the output level of the amplifier output of the power amplifier, a composite output command value P com , or the composite output feedback value P FB The amplifier output reference value p determines the output level of the amplifier output based on ref (Amplifier output command value p com Or the amplifier output equivalent value p FB ) is determined (a), and this amplifier output reference value p ref (Amplifier output command value p com or amplifier output conversion value p FB ) is used as the standard for controlling the output level of each amplifier output, and the amplifier output feedback value p fb By comparing with (b), the reference value for setting the manipulated variable MV for controlling each power amplifier is stabilized, and the control of the output level is stabilized.

[0019] In the control of the conventional device, the feedback values ​​of the amplifier outputs are compared, and the manipulated variable MV is set by a relative comparison between these feedback values. Therefore, it is difficult to identify which feedback value is normal, and the standard for setting the manipulated variable MV is unstable. In contrast, in the present invention, the composite output command value P com , or the composite output feedback value P FB Based on this, the amplifier output reference value p ref (Amplifier output command value p com or amplifier output conversion value pFB ) and determine the amplifier output reference value p ref (Amplifier output command value p com or amplifier output conversion value p FB ) is the reference value, and each amplifier output feedback value p fb Therefore, the manipulated variable MV can be set independently of the feedback values ​​of the amplifier outputs.

[0020] In conventional high frequency power supplies, if a failure occurs in one stage of a power amplifier and output is not possible, there is a risk that the operation of the entire device will be stopped. In contrast, in the high frequency power supply of the present invention, even if a power amplifier in one stage fails and output is not possible, operation can be continued by automatically optimizing the output balance of the power amplifiers in the other stages.

[0021] A2: Setting the operation amount MV In setting the manipulated variable MV, the amplifier output feedback value p fb The amplifier output reference value p of each power amplifier used as a reference value for comparison with ref (Amplifier output command value p com or amplifier output conversion value p FB ) is the composite output command value P com The setting mode (A2-a) based on the above, or the composite output feedback value P FB This can be obtained by the setting mode (A2-b) based on the above.

[0022] A2-a: Combined output command value P com Setting manner of the manipulated variable MV based on This setting form is the composite output command value P com Based on this, the amplifier output command value p com Set.

[0023] The control unit determines the output level of the composite output by a composite output command value P com Based on the number N of power amplifiers and the output power / power efficiency characteristics of each power amplifier, the amplifier output command value p comThe control unit determines the amplifier output feedback value p fb is the amplifier output command value p com A manipulated variable MV is set so that the gain of the power amplifier is controlled based on the manipulated variable MV that has been set. Note that the number N of power amplifiers is an integer equal to or greater than 2, and corresponds to the number of stages.

[0024] The setting of this manipulated variable MV includes a setting mode (a1) in which the output of each power amplifier is set to an equal output level, and a setting mode (a2) in which the output of each power amplifier is set to an individual output level.

[0025] (a1) Setting to achieve uniform output level In this setting mode, each power amplifier has the same output power / power supply efficiency characteristics, and each output power is set so that the power supply efficiency of each power amplifier is the same. The control unit determines the composite output command value P com Divide by the number of power amplifiers N (composite output command value P com / Quantity N:(P com / N) is calculated, and the calculated value is used as the amplifier output command value p com It is defined as follows.

[0026] Composite output command value / number (P com / N) amplifier output command value p com becomes an equal command value for each power amplifier, and the amplifier output becomes equal. Since the output power / power efficiency characteristics of each power amplifier are equal, by making the output power equal, the power efficiency of each power amplifier becomes equal, and the overall power efficiency improves.

[0027] (a2) Control mode for individual output levels In this setting mode, each power amplifier has its own output power / power efficiency characteristic. The control unit sets each output power value determined for the same power efficiency in the unique output power / power efficiency characteristic of each power amplifier as the operation amount MV of each power amplifier, and outputs the amplifier output command value p com This amplifier output command value p comIn the setting of each amplifier output command value p com The sum of these is the composite output command value P com The amplifier output command value p com The sum of these is the composite output command value P com By imposing the restriction that the output level of the combined output is determined to be equal to or greater than the reference output, the fluctuation in the output level of the combined output is suppressed.

[0028] A2-b: Composite output feedback value P FB Setting manner of the manipulated variable MV based on In this configuration, the composite output feedback value P FB Based on this, the amplifier output equivalent value p FB Set.

[0029] The control unit outputs a feedback value P FB Based on the number of power amplifiers N and the output power / power efficiency characteristics of each power amplifier, the amplifier output equivalent value p FB The control unit determines the amplifier output feedback value p fb is the amplifier output conversion value p FB The control value MV is set so that the gain of the power amplifier is controlled based on the control value MV. FB is the amplifier output determined for each power amplifier, and the composite output feedback value P FB It is calculated by apportioning the above. The composite output feedback value P FB In the setting based on the above, the manipulated variable MV can be set in a setting mode (b1) in which the outputs of the power amplifiers are set to an equal output level, and in a setting mode (b2) in which the outputs of the power amplifiers are set to individual output levels.

[0030] (b1) Setting of uniform output level In this setting mode, each power amplifier has the same output power / power supply efficiency characteristics, and each output power is set so that the power supply efficiency of each power amplifier is the same.

[0031] The control unit calculates the composite output feedback value P FB is divided by the number of power amplifiers N (composite output feedback value P FB / Number of power amplifiers N:(P FB / N)), and this calculated value is used as the amplifier output equivalent value p FB Since the output power / power supply efficiency characteristics of each power amplifier are equal, the power supply efficiency of each power amplifier becomes equal by equalizing the output power, and the overall power supply efficiency is improved.

[0032] (b2) Control of individual output levels In this configuration, each power amplifier has its own unique output power / power efficiency characteristics. The control unit calculates the amplifier output conversion value p of each power amplifier that has the same power efficiency in the output power / power efficiency characteristic of each power amplifier. FB From the combination of these, the equivalent amplifier output value p FB The sum of these is the composite output feedback value P FB The amplifier output conversion value p FB The sum of these is the composite output feedback value P FB By limiting the output level of the combined output to be equal to or greater than 1, the output level of the combined output is suppressed from fluctuating.

[0033] A3: Manipulated amount MV The manipulated variable MV that controls the output level of the amplifier output of the power amplifier section is set according to the amplifier form of the power amplifier at each stage of the power amplifier section.

[0034] (a) When the power amplifiers at each stage of the power amplifier section are configured as linear amplifiers including an amplifier with a variable attenuator, the operation amount MV is the attenuation amount A tt It is set by: (b) When the power amplifiers in each stage of the power amplification section are configured as switching amplifiers including a phase control section, the manipulated variable MV is set by the phase shift amount θ and phase amount Θ of the phase control section.

[0035] It is possible to make the gain of the power amplifiers at each stage uniform by adjusting the manual adjustment circuit using a variable resistor, but in this case, there are problems in that the adjustment process requires many steps and that it is difficult to automatically respond to gain fluctuations due to aging of the power amplifiers at each stage. tt These problems can be solved by controlling the phase shift amount θ and the phase amount Θ of the phase control section as the manipulated variable MV in the case of a switching amplifier.

[0036] A4: Abnormal detection of power amplifier As a mode of detecting an abnormality in the power amplifier, the composite output feedback value P FB Abnormality detection mode based on (a), each amplifier output feedback value p fb There is an anomaly detection mode (b) based on the above.

[0037] (a) Synthetic output feedback value P FB Anomaly detection mode based on The control unit calculates the composite output feedback value P FB In one embodiment, the abnormal condition is detected based on the composite output feedback value P FB and the composite output command value P com and the composite output feedback value P FB is the amplifier composite output command value P com If the allowable range is exceeded, the power amplifier is detected as being in an abnormal state.

[0038] In another embodiment, the composite output feedback value P FB Based on the amount of fluctuation in FB If the fluctuation range of the power amplifier exceeds the allowable range, the power amplifier is detected as being in an abnormal state.

[0039] (b) Amplifier output feedback value p fb Anomaly detection mode based on The control section determines the amplifier output feedback value p fbIn one embodiment, the abnormal condition is detected based on the amplifier output feedback value p fb and amplifier output command value p com Compare with the amplifier output feedback value p fb is the amplifier output command value p com If the allowable range is exceeded, the power amplifier is detected as being in an abnormal state.

[0040] In another embodiment, the amplifier output feedback value p fb Based on the amount of variation in the amplifier output feedback value p fb If the fluctuation range of the power amplifier exceeds the allowable range, the power amplifier is detected as being in an abnormal state.

[0041] (B): Control method of high frequency power supply device B1: Control method A control method for a high frequency power supply device including a power amplifier section in which multiple stages of power amplifiers are arranged in parallel, a distribution section that distributes a high frequency signal to each stage of the power amplifier section, and a power combiner that combines the multiple amplifier outputs amplified by each power amplifier and outputs the resulting combined output, (a) Composite output command value P com , or the composite output feedback value P FB The amplifier output reference value p determines the output level of each amplifier output based on ref (Amplifier output command value p com or amplifier output conversion value p FB ) is established. (b) Each amplifier output feedback value p fb and the amplifier output reference value p ref (The amplifier output command value p com or amplifier output conversion value p FB ) for comparison. (c) Based on the comparison, a manipulated variable MV that controls the output level of each amplifier output is set for each power amplifier. (d) The output level of each amplifier output of each power amplifier is controlled based on each manipulated variable MV.

[0042] B2: Setting the manipulated variable MV In setting the manipulated variable MV, the amplifier output feedback value p fb The amplifier output reference value p of each power amplifier used as a reference value for comparison with ref is the composite output command value P com Based on the setting mode (B2-a), or the composite output feedback value P FB This can be obtained by the setting mode (B2-b) based on the above.

[0043] B2-a: Composite output command value P com Setting manner of the manipulated variable MV based on Composite output command value P com The amplifier output command value p of each power amplifier is calculated based on the number N of power amplifiers and the output power / power supply efficiency characteristics of each power amplifier. com The amplifier output command value p com The amplifier output reference value p ref As the output feedback value of each amplifier, p fb is the amplifier output command value p com The manipulated variable MV to be controlled is set so that

[0044] B2-b: Composite output feedback value P FB Setting manner of the manipulated variable MV based on The composite output feedback value P FB Based on the number of power amplifiers N and the output power / power efficiency characteristics of each power amplifier, the amplifier output equivalent value p FB Determine the amplifier output equivalent value p FB The amplifier output reference value p ref As the output feedback value of each amplifier, p fb is the amplifier output conversion value p FB The manipulated variable MV is set so that Effect of the Invention

[0045] As described above, according to the present invention, it is possible to suppress a decrease in the power efficiency of a high frequency power supply device caused by a difference in output power output by each power amplifier. [Brief description of the drawings]

[0046] [Figure 1] 1 is a diagram for explaining a schematic configuration of a high-frequency power supply device according to the present invention; [Diagram 2] 4 is a diagram for explaining the general operation of the high frequency power supply device of the present invention; FIG. [Diagram 3] FIG. 2 is a block diagram for explaining a configuration example of a linear amplifier of a high frequency power supply device according to the present invention. [Figure 4] 5 is a flowchart showing an example of operation of the linear amplifier of the high frequency power supply device of the present invention. [Diagram 5] FIG. 4 is a diagram for explaining abnormality detection based on a composite output feedback value PFB of the present invention. [Figure 6] 4 is a flowchart showing abnormality detection of the amplifier of the present invention. [Figure 7] 5 is a diagram for explaining abnormality detection based on an amplifier output feedback value pfb according to the present invention. FIG. [Figure 8] 4 is a flowchart showing abnormality detection of the amplifier output of the power amplifier of the present invention. [Figure 9] FIG. 4 is an explanatory diagram for explaining equal setting of amplifier output levels and setting of a manipulated variable MV according to the present invention. [Figure 10] 5 is a flowchart for explaining the setting of equal amplifier output levels and the setting of a manipulated variable MV according to the present invention. [Figure 11] FIG. 4 is an explanatory diagram for explaining equal setting of amplifier output levels and setting of a manipulated variable MV according to the present invention. [Figure 12] 5 is a flowchart for explaining the setting of equal amplifier output levels and the setting of a manipulated variable MV according to the present invention. [Figure 13] FIG. 4 is an explanatory diagram for explaining individual setting of an amplifier output level and setting of a manipulated variable MV according to the present invention. [Figure 14] 5 is a flowchart for explaining individual setting of amplifier output levels and setting of a manipulated variable MV according to the present invention. [Figure 15] 4 is a flowchart illustrating an example of an operation for setting an attenuation amount Att according to the present invention. [Figure 16] 1 is a flowchart for explaining a setting operation example 1 of the present invention. [Figure 17] FIG. 1 is an operational diagram for explaining a setting operation example 1 of the present invention. [Figure 18] 11 is a flowchart for explaining a setting operation example 2 of the present invention. [Figure 19] FIG. 11 is an operational diagram for explaining a setting operation example 2 of the present invention. [Figure 20] 13 is a flowchart illustrating a setting operation example 3 of the present invention. [Figure 21] FIG. 11 is an operational diagram for explaining a setting operation example 3 of the present invention. [Figure 22] 11 is a flowchart illustrating a setting operation example 4 of the present invention. [Diagram 23] FIG. 2 is a block diagram for explaining a configuration example of a switching amplifier of a high frequency power supply device according to the present invention. [Figure 24] FIG. 1 is a diagram showing an example of the configuration of a phase controller using a triac. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0047] (1) Schematic configuration of the high frequency power supply device of the present invention Hereinafter, a schematic configuration of a high frequency power supply device according to the present invention will be described with reference to FIG. The high frequency power supply PS of the present invention includes a control unit 1 for controlling the high frequency power supply PS, a power amplification unit 4 in which multiple stages of power amplifiers 4A, 4B, . . . 4N are configured in parallel, an RF signal unit 2 for generating a high frequency signal (RF signal), a distribution unit 3 for distributing the high frequency signal (RF signal) generated by the RF signal unit 2 to the power amplifiers (4A to 4N) of each stage of the power amplification unit 4, a power combiner 6 for power combining the multiple amplifier outputs power-amplified by each power amplifier (4A to 4N) and outputting a combined output, and a power amplifier output feedback value p fb to the control unit 1, and an amplifier output detection unit 5 is connected between the power synthesis unit 6 and the output terminal OUT, and calculates a synthesis output feedback value P from the separated forward power. FBand a combined output detection unit 7 that detects the combined output.

[0048] For the power amplifiers 4A, 4B, . . . 4N, for example, class AB linear amplifiers or class D switching amplifiers can be used.

[0049] The control unit 1 includes an amplifier control unit 1a that controls the gain of the power amplifiers (4A to 4N) of each stage of the power amplification unit 4, an amplifier abnormality detection unit 1b that detects abnormalities in the power amplifiers (4A to 4N), a distribution control unit 1c that controls the distribution unit 3 that distributes the RF signal, and an RF signal setting unit 1d that sets the frequency and signal level of the radio frequency signal (RF signal).

[0050] The amplifier control unit 1a includes an amplifier output reference value setting unit 1a-1 and an operation amount setting unit 1a-2. The amplifier output reference value setting unit 1a-1 sets an amplifier output reference value p ref The operation amount setting unit 1a-2 sets the amplifier output feedback value p fb and the amplifier output reference value p set by the amplifier output reference value setting unit 1a-1. ref Based on this comparison, a manipulated variable MV for controlling the output level of each amplifier output of each power amplifier (4A to 4N) is set for each power amplifier (4A to 4N). ref is the composite output command value P com The amplifier output command value p is set based on com , or the composite output feedback value P FB The amplifier output conversion value p is set based on FB can be used.

[0051] Each of the power amplifiers 4A, 4B, . . . 4N of the power amplifier unit 4 calculates an amplifier output feedback value p fb and amplifier output reference value p ref The control is performed so that the deviation between the MV and the attenuator is reduced. ttand in the switching amplifier, the phase shift amount is θ and the phase amount is Θ.

[0052] The amplifier control unit 1a controls the output level of the amplifier output of each of the power amplifiers 4A, 4B, . . . 4N of the power amplification unit 4 based on each operation amount MV. The amplifier output reference value setting unit 1a-1 sets a composite output command value P com , or the composite output feedback value P detected by the composite output detection unit 7 FB Based on the amplifier output reference value p ref Set the amplifier output reference value p ref is an amplifier output command value p com , or amplifier output equivalent value p FB The amplifier output reference value p ref The setting of the combined output command value P is based on the number of power amplifiers 4A, 4B, . . . 4N and the output power / power efficiency of each power amplifier 4A, 4B, . . . 4N. com or the composite output feedback value P FB This is done by apportioning the following.

[0053] The amplifier abnormality detection unit 1b detects the amplifier output feedback value p fb , or the composite output feedback value P FB Based on this, the presence or absence of an abnormal state of the amplifier is detected.

[0054] The distribution control unit 1c distributes radio frequency signals (RF signals) to the power amplifiers 4A, 4B, ..., 4N of each stage of the power amplification unit 4. When a change occurs in the power amplifiers 4A, 4B, ..., 4N to be driven due to a setting change or the like, the distribution control unit 1c stops the supply of radio frequency signals (RF signals) to the power amplifiers 4A, 4B, ..., 4N to be stopped from being driven. In addition, when the amplifier abnormality detection unit 1b detects an abnormality in any of the power amplifiers 4A, 4B, ..., 4N, the distribution of radio frequency signals (RF signals) to the power amplifier detected as having an abnormality is stopped.

[0055] The RF signal setting unit 1d sets the frequency and signal level of a radio frequency signal (RF signal) based on setting data stored inside or setting data input from the outside. The combined output detector 7 separates the forward wave and the reflected wave using, for example, a directional coupler, and detects the combined output feedback value P FB is detected and fed back to the control unit 1.

[0056] (2) Overview of operation of high frequency power supply The general operation of the high frequency power supply device of the present invention will be described with reference to FIG. The high frequency power supply device of the present invention outputs a combined output through the operations of amplifier abnormality detection (SA), operation amount MV setting (SB), amplifier control (SC), power combining (SD), and output detection (SE).

[0057] (SA) Power amplifier abnormality detection The control unit 1 monitors the output level of the amplifier output output from each power amplifier (4A to 4N) of the power amplification unit 4, or the output level of the combined output combined by the power combining unit 6, and if these output levels deviate from a reference level or if the fluctuation range of the output levels deviates from an allowable range, it determines that an abnormality has occurred in the amplifier and detects the abnormality in the amplifier.

[0058] The timing for detecting an abnormality in the power amplifiers (4A to 4N) can be set arbitrarily, for example, at predetermined time intervals while the high frequency power supply device is in operation, or at a predetermined time such as when the device starts operating.

[0059] (SB) Setting of the manipulated variable MV When an abnormality is detected in the power amplifiers (4A to 4N), it suggests that a difference has occurred between the output levels of the power amplifiers (4A to 4N), implying that the balance of the power efficiency of the power amplifiers (4A to 4N) has shifted and the overall power efficiency has decreased. To maintain a high overall power efficiency of the high frequency power supply device, it is necessary for the power efficiency of each power amplifier (4A to 4N) to be equal.

[0060] The control amount MV for controlling the output level of the amplifier output of each power amplifier (4A to 4N) is set so that the power efficiency of each power amplifier (4A to 4N) is equalized. For example, the control amount MV is set to the attenuation amount A of the attenuator of the amplifier with an attenuator in a linear amplifier. tt and in the switching amplifier, the phase shift amount θ and the phase amount Θ of the phase control section.

[0061] When setting the manipulated variable MV, the amplifier output reference value p ref Set.

[0062] This amplifier output reference value p ref is a composite output command value P that commands the output level of the output power output by the high frequency power supply PS com , or the composite output feedback value P detected by the composite output detection unit 7 FB The amplifier output command value p com , amplifier output equivalent value p FB It is set by finding

[0063] The amplifier output feedback value p of each power amplifier (4A to 4N) fb and amplifier output reference value p ref (Amplifier output command value p com or amplifier output conversion value p FB The manipulated variable MV is calculated based on the difference between the gain and the attenuation value A. tt and in the switching amplifier, the phase shift amount is θ and the phase amount is Θ.

[0064] (SC) Amplifier Control The control unit 1 controls the output level of the amplifier output of each power amplifier (4A to 4N) and calculates an amplifier output feedback value p fb and amplifier output reference value p ref (Amplifier output command value p com or amplifier output conversion value p FB) is controlled so as to reduce the deviation.

[0065] (SD)Power synthesis The power combiner 6 combines the power of each amplifier output from each power amplifier (4A to 4N). Known combiner circuits include those using resistors, those using transformers, and hybrid circuits. The power combiner 6 of the present invention can use any combiner circuit selected to suit the output characteristics.

[0066] (SE) Output Detection The output detection includes an amplifier output detection (SEa) that detects each amplifier output of each power amplifier (4A to 4N), and a combined output detection (SEb) that detects a power-combined combined output.

[0067] Each amplifier output feedback value p detected by the amplifier output detection (SEa) fb is used for the abnormality detection performed in the power amplifier abnormality detection (SA), and is also used for the setting of the manipulated variable MV performed in the setting of the manipulated variable MV (SB). In addition, the composite output feedback value P FB is used for power amplifier abnormality detection (SA), and is also used for amplifier output command value p com Used to calculate.

[0068] (3) High-frequency power supply using a linear amplifier In the high frequency power supply device of the present invention, each of the power amplifiers (4A to 4N) in the power amplifying section 4 can be configured with a class AB linear amplifier or a class D switching amplifier. A configuration example (3a) and an operation example (3b) of a high frequency power supply device using a linear amplifier will be described below.

[0069] (3a) Example of configuration using a linear amplifier FIG. 3 is a block diagram for explaining an example of the configuration of the high frequency power supply device of the present invention using a linear amplifier. The high frequency power supply device 10 includes a control unit 11, an RF signal unit 12, a distribution unit 13, a power amplification unit 14, an amplifier output detection unit 15, a power combining unit 16, a combined output detection unit 17, an A / D converter 18, and a D / A converter 19.

[0070] The RF signal unit 12 includes an RF signal generating unit 12a, a power control amplifier 12b, and a power control interface 12c, and generates a high frequency signal (RF signal) which is a frequency signal of the high frequency output of the high frequency power supply device. The high frequency signal (RF signal) generated by the RF signal generating unit 12a is power-controlled to a predetermined power level by the power control amplifier 12b, and is sent to the distribution unit 13. The power control amplifier 12b can be configured by, for example, a variable attenuator amplifier. The gain of the variable attenuator amplifier is controlled according to the attenuation amount of the control signal input from the power control interface 12c.

[0071] The distribution unit 13 distributes the high frequency signal (RF signal) generated by the RF signal generation unit 12a to the multiple stages of power amplifiers 14A, 14B, ..., 14D of the power amplification unit 14. Note that "N" indicates the number of power amplifiers included in the power amplification unit 14, and is set appropriately according to the output level of the high frequency output set in the high frequency power supply device and the output level of the amplifier output of the power amplifiers 14A, 14B, ..., 14D. The distribution unit 13 distributes the high frequency signal (RF signal) of a signal level according to the output level of the amplifier output of each power amplifier to each of the power amplifiers 14A, 14B, ..., 14D. When the output levels of the amplifier outputs of the power amplifiers 14A, 14B, ..., 14D are the same, the signal levels of the high frequency signals (RF signals) distributed to each of the power amplifiers 14A, 14B, ..., 14D are the same.

[0072] Each of the power amplifiers 14A, 14B, ..., 14D is configured by connecting linear amplifiers, for example, a variable gain amplifier 14a, a driver amplifier 14b, and a termination stage power amplifier 14c, in series, and amplifies the power of the high frequency signal (RF signal) distributed from the distribution unit 13 to produce an amplifier output. The variable gain amplifier 14a can be configured by, for example, a variable attenuator amplifier, and receives an attenuation control signal sent from the control unit 11 via a D / A converter 19 to perform gain adjustment. The driver amplifier 14b amplifies the level of the high frequency signal (RF signal) gain-adjusted by the variable gain amplifier 14a, and the termination stage power amplifier 14c power-amplifies the signal amplified by the driver amplifier 14b to an output level set for each of the power amplifiers 14A, 14B, ..., 14D. For example, a class AB linear amplifier can be used for the amplifiers of the power amplifiers 14A, 14B, ..., 14D.

[0073] The power combiner 16 combines the power of the multiple amplifier outputs amplified by the power amplifiers 14A, 14B, . . . , 14D, and outputs the resulting combined output.

[0074] The amplifier output detection unit 15 is connected between each of the power amplifiers 14A, 14B, . . . 14D and the power combiner 16, detects the amplifier output of each of the power amplifiers 14A, 14B, . . . 14D, and outputs an amplifier output feedback value p fb is converted into a digital signal via an A / D converter 18 and then returned to the control unit 11.

[0075] The combined output detector 17 is connected between the power combiner 16 and the output terminal OUT, and detects the combined output feedback value P FB The combined output detector 17 can be configured with a directional coupler, and separates the forward power toward the load and the reflected power returning from the load, and converts the forward power into a combined output feedback value P FB Detect as.

[0076] The control unit 11 includes an amplifier control unit 11a that controls the gain of the variable gain amplifier 14a of the power amplifiers (14A to 14D) of the power amplification unit 14, a power amplifier abnormality detection unit 11b that detects abnormalities in the power amplifiers (14A to 14D), a distribution control unit 11c that controls the distribution of the RF signal by the distribution unit 13, and an RF signal setting unit 11d that sets the frequency and signal level of the radio frequency signal (RF signal).

[0077] The amplifier control unit 11a includes an amplifier output reference value setting unit 11a-1 and an operation amount setting unit 11a-2. The amplifier output reference value setting unit 11a-1 sets an amplifier output reference value p ref The operation amount setting unit 11a-2 sets the amplifier output feedback value p fb and the amplifier output reference value p set by the amplifier output reference value setting unit 11a-1. ref and based on this comparison, an attenuation amount A is calculated to control the output level of each of the power amplifiers 14A to 14D. tt is set for each of the power amplifiers 14A to 14D. Each of the variable gain amplifiers 14a of the power amplifiers 14A to 14D has an attenuation amount A tt Based on the amplifier output feedback value p fb and the amplifier output reference value p ref The attenuation is controlled so that the deviation from tt corresponds to the amplifier gain.

[0078] Each attenuation amount A tt The amplifier output reference value setting unit 11a-1 controls the output level of the amplifier output of each of the power amplifiers 14A to 14D of the power amplifying unit 14 based on the composite output command value P com , or the composite output feedback value P detected by the composite output detection unit 17 FB Based on this, an amplifier output reference value pref (amplifier output command value p com , amplifier output equivalent value p FBThe amplifier output reference value p ref (Amplifier output command value p com , amplifier output equivalent value p FB ) is set based on the number N of the power amplifiers 14A to 14D and the output power / power efficiency of each of the power amplifiers 14A to 14D, com or the composite output feedback value P FB This is done by apportioning the following.

[0079] The power amplifier abnormality detection unit 11b detects the amplifier output feedback value p fb or the composite output feedback value P FB The presence or absence of an abnormal state of the power amplifier is detected based on the detected abnormal state.

[0080] The distribution control unit 11c distributes high-frequency signals (RF signals) to the power amplifiers 14A to 14D of each stage of the power amplification unit 14. When a change occurs in the power amplifier to be driven due to detection of an abnormality in the power amplifiers 14A to 14D, for example, the distribution control unit 11c performs control to stop the supply of high-frequency signals (RF signals) to the power amplifier in which the abnormality is detected.

[0081] The RF signal setting unit 11d sets the frequency and signal level of a high frequency signal (RF signal) based on setting data stored inside or setting data input from the outside.

[0082] (3b) Example of operation using a linear amplifier The following is an example of operation of the high frequency power supply device of the present invention using a linear amplifier. (3b-1) Operation to detect abnormal conditions (3b-2) Operation for setting the manipulated variable MV (3b-3) Attenuation amount A tt Setting the action 4 is a flow chart showing an example of operation by a linear amplifier, in which steps (SA) to (SE) correspond to the flow chart in FIG.

[0083] (3b-1: Example of detection operation for abnormal state of power amplifier)

[0084] The amplifier operation amount MV (attenuation amount A tt ) initial value MVo(initial attenuation A tto ) is set (SO), the linear amplifiers are driven with a gain determined by the initially set manipulated variable MV to obtain the amplifier output of each power amplifier, and these amplifier outputs are power-combined to obtain a composite output (SC).

[0085] The presence or absence of an abnormal state of the power amplifier is detected based on the amplifier output and the composite output obtained in step (SC) (SA). If an abnormal state is detected in this abnormality detection step (SA), the operation amount MV of the linear amplifier of each power amplifier (attenuation amount A tt ) is set (SB), and the updated manipulated variable MV (attenuation A tt ) is used to control the linear amplifier (SC). The detection of an abnormal state of the power amplifier may be performed by abnormality determination (SA2, SA3) performed after a predetermined time has elapsed or at a predetermined point in time (SA1), or by fault detection (SA4) performed continuously.

[0086] At the end of a predetermined time or at a predetermined point in time (SA1), the amplifier output feedback value p fb Anomaly detection based on (SA2) or synthetic output feedback value P FB Furthermore, the abnormality may be detected by a failure detection (SA4) that constantly monitors the power amplifier device.

[0087] When an abnormality is detected in the abnormality detection of (SA2) or (SA3), or when a fault is detected in the fault detection of (SA4), the manipulated variable MV of the linear amplifier of each power amplifier is set and updated (SB). The manipulated variable MV is set by the attenuation A when the amplifier is an amplifier with an attenuator. tt is set as the manipulated variable MV.

[0088] Regarding the abnormality detection (SA) of the power amplifier, the composite output feedback value P FBThe abnormality detection (SA3) based on the amplifier output feedback value p detected by the amplifier output detection unit 15 will be explained with reference to FIG. 5 and FIG. fb The abnormality detection (SA2) based on the above will be explained with reference to FIGS.

[0089] (SA3: Composite output feedback value P FB (Anomaly detection based on The composite output feedback value P FB The abnormality detection of the power amplifier based on the composite output command value P com (a) is the comparison standard, or the composite output feedback value P FB This can be done in the form (b) based on the range of variation.

[0090] (a) Synthetic output feedback value P FB and the composite output command value P com and the composite output feedback value P FB is the composite output command value P com An abnormality in the power amplifier is detected based on whether the output voltage Vout falls within a predetermined range based on the reference voltage Vout. Fig. 5 is a flow chart showing the abnormality detection for the power amplifier.

[0091] Composite output command value P com (S11), and the composite output feedback value P FB (S12), and the composite output threshold P th1 (S13) The composite output feedback value P FB is the composite output command value P com The composite output threshold P based on th1 If it is within the range (S14), the composite output feedback value P FB is within the allowable range, and the power amplifier is determined to be in a normal state (S17). FB is the composite output command value P com The composite output threshold P based on th1 If it is outside the range of (S14), the composite output feedback value P FBis outside the allowable range, it is determined that the power amplifier is in an abnormal state (S15), and an abnormality in the combined output is detected (S16).

[0092] (b) The composite output feedback value P FB An abnormality in the power amplifier is detected based on the fluctuation range of the output voltage. The composite output feedback value P FB The fluctuation width with time change of is monitored, and an abnormality in the power amplifier is detected depending on whether the fluctuation width is within a predetermined range or not. Fig. 6 is a flowchart showing this amplifier abnormality detection.

[0093] The composite output feedback value P FB1 After a predetermined time has elapsed (S22), the composite output feedback value P FB2 The composite output feedback value P FB1 and the composite output feedback value P FB2 Difference ΔP FB (=P FB2 -P FB1 ) is calculated (S24). th2 (S25) and the difference ΔP FB and the composite output threshold P th2 and compare (S26).

[0094] Difference ΔP FB is the composite output threshold ±P th2 If the composite output feedback value P FB is within the allowable range, and the power amplifier is determined to be normal (S29). FB is the composite output threshold ±P th2 If it is outside the range, the composite output feedback value P FB is outside the allowable range, an abnormality determination is made (S27), and an abnormality in the composite output is detected (S28).

[0095] (SA2: Amplifier output feedback value p fb (Anomaly detection based on The abnormality detection of this power amplifier is performed by setting the amplifier output command value p com(a) is the comparison standard, or the amplifier output feedback value P fb This can be done in the form (b) based on the range of variation.

[0096] (a) Amplifier output feedback value p fb and amplifier output command value p com Based on the comparison, abnormality detection is performed on the amplifier output of the power amplifier. Amplifier output feedback value p fb and amplifier output command value p com Compare with the amplifier output feedback value p fb is the amplifier output command value p com An abnormality in the power amplifier is detected based on whether or not the output voltage is within a predetermined range based on the reference voltage . Fig. 7 is a flow chart showing the abnormality detection of the amplifier output of the power amplifier.

[0097] Amplifier output command value p com The amplifier output command value p com is the composite output command value P com The amplifier output command value p com (=P com / N) is the composite output command value P com The output level is obtained by equally dividing the output level commanded by the number N of amplifiers (S31).

[0098] Amplifier output feedback value p fb (S32), and the amplifier output threshold p th3 (S33) The amplifier output feedback value p fb is the amplifier output command value p com Based on the amplifier output threshold p th3 If it is within the range (S34), the amplifier output feedback value p fb is within the allowable range, the power amplifier is determined to be normal (S37). fb is the amplifier output command value p com Based on the amplifier output threshold p th3If it is outside the range of (S34), the amplifier output feedback value p fb is outside the allowable range, an abnormality determination is made (S35), and an abnormality in the amplifier output of the power amplifier is detected (S36).

[0099] (b) Amplifier output feedback value p fb Based on the fluctuation range of the output of the power amplifier, an abnormality is detected. Amplifier output feedback value p fb The fluctuation width accompanying the time change of is monitored, and an abnormality in the amplifier output is detected depending on whether the fluctuation width is within a predetermined range or not. Fig. 8 is a flowchart showing an abnormality detection of the amplifier output of this power amplifier.

[0100] Amplifier output feedback value p fb1 (S41), and after a predetermined time has elapsed (S42), the amplifier output feedback value p fb2 The amplifier output feedback value p fb1 and the amplifier output feedback value p fb2 Difference Δp fb (=p fb2 -p fb1 ) is calculated (S44). th4 (S45), and the difference Δp fb and the composite output threshold P th4 and compare (S46).

[0101] Difference Δp fb is the amplifier output threshold ±p fb4 If the amplifier output feedback value p fb is within the allowable range, and the amplifier output is determined to be normal (S49). fb is the amplifier output threshold ±p th4 If it is outside the range of p fb is outside the allowable range, an abnormality determination is made (S47), and an abnormality in the amplifier output is detected (S48).

[0102] (3b-2: Setting operation of the manipulated variable MV) The manipulated variable MV is used to adjust the output level of the amplifier output of each power amplifier so that it becomes a set level. If the set level of the amplifier output of each power amplifier is different, the manipulated variable MV also differs, and is determined according to the output level of the amplifier output (amplifier set level) set for each power amplifier. Therefore, the amplifier set level of each power amplifier is first determined, and the manipulated variable MV is set based on this amplifier set level.

[0103] Amp setting level: The amplifier output level (amplifier setting level) set for each power amplifier can be set to an equal value for multiple power amplifiers or can be set to an individual value for each power amplifier depending on the output power / power efficiency characteristics of each power amplifier.

[0104] When multiple power amplifiers have common output power / power efficiency characteristics, the power efficiency of each power amplifier can be made equal by equally setting the amplifier output level (amplifier setting level) for each power amplifier, thereby improving the overall power efficiency.

[0105] In addition, when multiple power amplifiers each have their own unique output power / power efficiency characteristics, the overall power efficiency can be improved by individually setting the output level of the amplifier output of each power amplifier so that the power efficiency of each power amplifier is equal.

[0106] The amplifier output level (amplifier setting level) set in the power amplifier depends on the number N of power amplifiers to be driven and the output level of the composite output. The number N of power amplifiers in the driven state is determined by the amplifier state detected by the amplifier abnormality detection. The output level of the composite output is determined by the composite output command value P com , or the composite output feedback value P FB is required from.

[0107] The following describes the settings of the amplifier setting levels and the manipulated variable MV in two cases: (a) when the amplifier output levels are set to uniform values, and (b) when the amplifier output levels are set to individual values.

[0108] (a) Setting the amplifier output levels evenly In the equal setting of the amplifier output levels and the operation amount MV associated with this equal setting, the amplifier output command value p com is the amplifier output feedback value p fb This is the reference value when comparing with the amplifier output command value p com is the composite output command value P com Setting based on (a1), or the composite output feedback value P FB This can be obtained by setting (a2) based on the above.

[0109] (a1) Composite output command value P com Based on the setting 9 and 10 show the amplifier output level equalization and the operation amount MV setting in the case of the composite output command value P com 9 is an explanatory diagram and a flowchart for explaining an example based on the above. In Fig. 9, the horizontal axis represents the output and the vertical axis represents the power supply efficiency. Note that Fig. 9 shows a case where the amplifier outputs of the three power amplifiers are equal.

[0110] Figure 9(a) shows a normal operation state, with the three power amplifiers outputting p out1 ,p out2 ,p out3 The figure shows the state in which the amplifiers are outputting equal power outputs. com P com / 3, and the amplifier output p out1 ,p out2 ,p out3 This results in a composite output P out (=p out1 +p out2 +p out3 ) is output. out is the composite output command value P comAt this time, since each power amplifier has the same output power / power efficiency characteristic, the power efficiency EF1 of each power amplifier is equal and the overall power efficiency is high.

[0111] Figure 9(b) shows the amplifier output p out3 indicates an abnormal state where the composite output P out (=p out1 +p out2 +p out3 ) is the composite output command value P com The amplifier output p out1 ,p out2 is the amplifier output command value p com (=P com / 3), but with equal power levels based on p out3 is the amplifier output command value p due to an amplifier abnormality. com (=P com At this time, the amplifier output p out1 ,p out2 The power supply efficiency of the power amplifier that outputs p out3 Since the power supply efficiency of the power amplifier is reduced to EF2, the overall power supply efficiency is reduced.

[0112] FIG. 9(c) shows the setting of the manipulated variable MV when an amplifier abnormality is detected. As shown in FIG. 9(b), the amplifier output p out3 When the amplifier output p out3 and amplifier output command value p com (=P com / 3), a difference Δ1 occurs. The manipulated variable MV is the amplifier gain adjustment amount that eliminates this difference, and the amplifier output p out3 The amplifier output command value p com (=P com This increases the output of each amplifier p out1 , p out2 ,p out3 will have equal output levels, the power efficiency of each amplifier will be equal to EF1, and the overall power efficiency will return to a high state.

[0113] In the flowchart of FIG. 10, after amplifier abnormality detection (SA), the manipulated variable MV is set (SB), amplifier control (SC) is performed based on the manipulated variable MV, a combined output is output by power combining (SD), and output detection (SE) is performed.

[0114] In the following, the composite output command value P com Regarding the setting of the operation amount MV (SB) based on the above, the attenuation amount A of the amplifier with attenuator is set as the operation amount MV. tt The case where the above is applied will be described.

[0115] Based on the amplifier abnormality detection (SA), the number N of power amplifiers to be driven is calculated (S51). com Based on the number of power amplifiers N, the combined output command value P com Divide by N to get the amplifier output command value p com (=P com / N) is calculated (S52). com and the amplifier output feedback value p fb The difference between Δ1(=p fb -p com ) is calculated (S53), and the attenuation amount A tt (S54) and the attenuation A tt Update and save (S55).

[0116] Updated attenuation A tt The power amplifiers are driven and controlled (SC) with a gain using the above, and the amplifier outputs of each power amplifier are power-combined (SD). The output detection (SE) is the amplifier output feedback value p fb , or the power-combined composite output feedback value P FB Detect.

[0117] (a2) Composite output feedback value P FB Based on the setting Figures 11 and 12 show the amplifier output level equalization and the operation amount MV setting, and the composite output feedback value P FB11 is an explanatory diagram and a flowchart for explaining an example based on the above. In Fig. 11, the horizontal axis represents the output and the vertical axis represents the power supply efficiency. Note that Fig. 11 shows a case where the amplifier outputs of the three power amplifiers are equal.

[0118] Fig. 11(a) shows the normal operation state, and the amplifier output feedback value p fb1 ,p fb2 ,p fb3 indicates a state where the power outputs are equal. The composite output feedback value at this time is P FB1 Then, in normal operation, the amplifier output feedback value p fb1 ,p fb2 ,p fb3 The output level of is the composite output feedback value P FB1 The equivalent amplifier output p per unit is calculated by dividing the above evenly by the number of power amplifiers. FB (=P FB1 / 3), and the composite output P out (p fb1 +p fb2 +p fb3 ).

[0119] At this time, since each power amplifier has the same output power / power efficiency characteristic, the power efficiency EF1 of each amplifier is equal and the overall power efficiency is in a high state.

[0120] Figure 11(b) shows the amplifier output p out3 This shows an abnormal state where the combined output P out2 (=p out1 +p out2 +p out3 ) is the composite output P out1 The lower the value, the amplifier output p out1 ,p out2 is the composite output feedback value P FB1 The amplifier output equivalent value p is calculated by dividing it equally by the number of power amplifiers. FB (=P FB1 / 3) output level. out3 is the amplifier output conversion value p due to an amplifier abnormality. FB(=P FB1 / 3).

[0121] At this time, the amplifier output p out1 ,p out2 The power supply efficiency of the power amplifier that outputs p out3 Since the power efficiency of the amplifier drops to EF2, the power efficiency of the entire power amplifier section drops.

[0122] FIG. 11(c) shows the setting of the manipulated variable MV when an amplifier abnormality is detected. As shown in FIG. 11(b), the amplifier output p out3 When the amplifier output p out3 and the normal amplifier output equivalent value p FB (=P FB1 / 3), a difference Δ2 occurs. The manipulated variable MV is the adjustment variable that adjusts the amplifier gain to eliminate this difference, and the amplifier output p out3 As the amplifier output p out1 and p out2 to equal output levels to equalize the power supply efficiency of all power amplifiers.

[0123] The amplifier output p out1 ,p out2 ,p out3 is the amplifier output conversion value p FB2 (=P FB2 / 3). Note that the adjusted composite output feedback value P FB2 is the amplifier output p out3 and the amplifier output p out1 ,p out2 The value is the sum of the above. This allows each amplifier output p out1 ,p out2 ,p out3 The power amplifiers have the same output level, the power efficiency of each power amplifier is equal to EF3, and the power efficiency of the entire power amplifier section can be increased compared to before the gain adjustment.

[0124] In the flowchart of FIG. 12, after faulty amplifier detection (SA), the manipulated variable MV is set (SB), amplifier control (SC) is performed based on the manipulated variable MV, a combined output is output by power combining (SD), and output detection (SE) is performed.

[0125] In the following, the composite output feedback value P FB Regarding the setting of the operation amount MV (SB) based on the above, the attenuation amount A of the amplifier with attenuator is set as the operation amount MV. tt The case where the above is applied will be described.

[0126] Based on the faulty amplifier detection (SA), the power amplifier to be driven is identified and the number N of amplifiers that can be driven is calculated (S61). FB Based on the number of power amplifiers N, the composite output feedback value P FB Divide by N to get the equivalent amplifier output p per power amplifier. FB (=P FB / N) is calculated (S62). FB and the amplifier output feedback value p of each power amplifier fb The difference between Δ2(=p fb -p FB ) is calculated (S63), and the attenuation amount A tt The attenuation A tt Update and save (S65). Updated attenuation A tt The power amplifiers are driven and controlled (SC) based on the gain of each power amplifier calculated using the above, and the amplifier outputs of the power amplifiers are power-combined (SD). The output detection (SE) is performed by detecting the amplifier output feedback value p fb , or the power-combined composite output feedback value P FB Detect.

[0127] (b) Individual amplifier output level settings The individual setting of the amplifier output level is performed by driving multiple power amplifiers with equal power efficiency and by setting the combined output at the combined output command value P comThe amplifier output level of each power amplifier is set so that the amplifier output command value p com is a value that is an index of the amplifier output level of each power amplifier, and the amplifier output command value p com The sum of these values ​​is the composite output command value P com Set it so that:

[0128] 13 and 14 are an explanatory diagram and a flow chart for explaining the individual setting of the amplifier output level and the setting of the manipulated variable MV. In Fig. 13, the horizontal axis represents the output and the vertical axis represents the power supply efficiency. FIG. 13(a) shows a normal operation state, where the three power amplifiers are driven with the same power supply efficiency EF4, and each out1 ,p out2 ,p out3 The amplifier output is p out1 ,p out2 ,p out3 The combined power P obtained by combining out1 (=p out1 +p out2 +p out3 ) is the composite output command value P com When the power amplifier has a unique output power / power efficiency characteristic, when the power efficiency is the same, each power amplifier has a different amplifier output p according to each output power / power efficiency characteristic. out1 ,p out2 ,p out3 FIG. 13(a) shows this state, and each power amplifier outputs a different amplifier output p out1 ,p out2 ,p out3 Output.

[0129] FIG. 13(b) shows the power amplifier output p out3 This shows an abnormal state where the amplifier output p out1 and p out2 Although the power supply efficiency of the power amplifier that outputs out3 (=p out1 +p out2 ) is the composite output Pout1 The composite output command value P com Deviate from.

[0130] FIG. 13(c) shows the setting of the manipulated variable MV when an amplifier abnormality is detected. As shown in FIG. 13(b), the amplifier output p out3 When disappears, the composite output P out3 is the composite output command value P com than the amplifier output p out3 In order to compensate for this amplifier output shortage, the amplifier output p out1 and amplifier output p out2 Increase the amplifier output p out1 and amplifier output p out2 The increase in the power amplifier output command value p com This amplifier output command value p com The gain of the power amplifier is adjusted by the manipulated variable MV corresponding to the increase in

[0131] In adjusting the gain of this power amplifier, the amplifier output p out1 and amplifier output p out2 The distribution of is set so that the power efficiency of each power amplifier is the same value based on the output power / power efficiency characteristics. In FIG. 13(c), out1 and amplifier output p out2 shows the state in which the power supply efficiency is set to EF5. As a result, the power efficiency of each power amplifier becomes equal to EF5, and the power efficiency of the entire power amplifier unit can be increased compared to before the gain adjustment.

[0132] In the flowchart of FIG. 14, after amplifier abnormality detection (SA), the manipulated variable MV is set (SB), amplifier control (SC) is performed based on the manipulated variable MV, a combined output is output by power combining (SD), and output detection (SE) is performed.

[0133] In the following, the setting of the control variable MV (SB) that determines the amplifier output level individually for each power amplifier is explained. ttThe case where the above is applied will be described.

[0134] Based on the faulty amplifier detection (SA), the power amplifier to be driven is specified (S71). com Based on the output power / power supply efficiency characteristics, the amplifier output command value p com The output power / power efficiency characteristic is characteristic data that indicates the relationship between the amplifier output and power efficiency of the power amplifier, and is characteristic data that is unique to each stage of the power amplifier that constitutes the power amplification section. The output power / power efficiency characteristic is stored in a readable storage means, read out based on the power amplifier to be driven, and the amplifier output command value p com The amplifier output command value p of the power amplifier calculated in (S72) is used to calculate the amplifier output command value p com Based on the attenuation A tt (S73) and the attenuation A tt is updated and saved (S74). Updated attenuation A tt The power amplifiers are driven and controlled (SC) based on the gain of each power amplifier calculated using the above, and the amplifier outputs of the power amplifiers are power-combined (SD). The output detection (SE) is performed by detecting the amplifier output feedback value p fb , or the power-combined composite output feedback value P FB Detect.

[0135] Next, the attenuation A tt Operational examples 1 to 3 for setting the power supply efficiency EF will be described with reference to FIGS. 15 to 21, and operation example 4 for setting the power supply efficiency EF will be described with reference to FIG.

[0136] (3b-3: Attenuation amount A tt (Settings) In the operation examples 1 to 3, the amplifier output feedback value p fb is the amplifier output command value p com The attenuation amount A is set to a value within a certain range. tt This is an example of the operation of setting the (a) Setting operation example 1 In operation example 1, the amplifier output feedback value p fbis the amplifier output command value p com In the first stage, the amplifier output command value p com In the second stage, the amplifier output command value p com Compare with the lower limit of

[0137] First, the initial attenuation A tto (S80) Initial attenuation A tto An example of the setting operation will be described with reference to the flow chart of FIG. Composite output command value P com (S80a), and obtains the number of stages N (number of units N) of the power amplifiers constituting the power amplifier section (S80b). com Based on the number of stages N, the amplifier output command value p com (=P com / N) is calculated (S80c).

[0138] Output power / power supply efficiency characteristics of each power amplifier and amplifier output command value p com Based on this, the attenuation A of each power amplifier is calculated. tt Calculate the attenuation A tt In the calculation of out The composite output value of the amplifier output command value p com The attenuation A satisfies the two conditions: tt is calculated based on the output power / power supply efficiency characteristics (S80d). tt The initial attenuation A tto (S80e).

[0139] The first setting operation example will be described with reference to the flow chart of FIG. 16 and the operation diagram of FIG. 17. tto The power amplifier is driven using the amplifier output feedback value p fb (S81).

[0140] In the first stage comparison, the amplifier output feedback value p fb and amplifier output command value pcom The amplifier output command value p com As the upper limit of the amplifier output command value p com Threshold p th The value obtained by adding (p com +p th ) is used (S82).

[0141] Amplifier output feedback value p fb But (p com +p th ) does not exceed (S82), the attenuation A tt and lower the amplifier output feedback value p fb (S83d). On the other hand, the amplifier output feedback value p fb But (p com +p th ) or more (S82), the attenuation amount A tt Increase the amplifier output feedback value p fb (S83u) The attenuation A set in S83 is decreased. tt The power amplifier is driven using the amplifier output feedback value p fb (S84).

[0142] In the second comparison, the obtained amplifier output feedback value p fb and amplifier output command value p com The amplifier output command value p com As the lower limit of the amplifier output command value p com From the threshold p th The value obtained by subtracting (p com -p th ) is used (S85).

[0143] Amplifier output feedback value p fb But (p com -p th ) or more (S85), the attenuation amount A tt Increase the amplifier output feedback value p fb On the other hand, the amplifier output feedback value p fb But (p com -p th) (S85), the attenuation A tt and lower the amplifier output feedback value p fb (S86d) Increase the attenuation A set in S86. tt The power amplifier is driven using the amplifier output feedback value p fb (S87).

[0144] The obtained amplifier output feedback value p fb and amplifier output command value p com It is then determined whether the calculated value has converged to within the range between the upper and lower limits (S88). Amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th If it is outside the range of attenuation A (S88), return to S81 and tt On the other hand, the amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) range (S88), the attenuation A tt is confirmed as the value at that time (S89).

[0145] In the operation example of FIG. 17(a), the amplifier output feedback value p fb is the lower bound (p com -p th ) and starts control from a value less than the attenuation A tt (S83d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ), the attenuation A tt (S86u). This increases the amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) and the attenuation A tt is set.

[0146] In the operation example of FIG. 17(b), the amplifier output feedback value p fb is the lower bound (p com -p th ) and starts control when the attenuation amount A tt (S83d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ) and the attenuation A tt (S86u). This increases the amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) and the attenuation A tt is set.

[0147] In the operation example of FIG. 17(c), the amplifier output feedback value p fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) and the attenuation A tt (S83d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ) and the attenuation A tt Increase the amplifier output feedback value p (S86u). fb is the upper limit (p com +p th If the attenuation does not fall below A, the first comparison is performed again. tt (S83u). This increases the amplifier output feedback value p fb is the lower bound (p com -p th ), the attenuation A tt (S86u). This increases the amplifier output feedback value p fb is the upper limit (pcom +p th ) and the lower bound (p com -p th ) and the attenuation A tt is set.

[0148] In the operation example of FIG. 17(d), the amplifier output feedback value p fb is the upper limit (p com +p th ) and starts control when the attenuation A tt (S83u). This increases the amplifier output feedback value p fb The fall of the lower limit (p com -p th ) does not exceed the attenuation A in the second comparison. tt Increase the amplifier output feedback value p (S86u). fb is the lower bound (p com -p th ), the first step is compared again to determine the amount of attenuation A tt (S83d). This reduces the amplifier output feedback value p fb is the lower bound (p com -p th ) does not exceed the attenuation A in the second comparison. tt (S86d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) and the attenuation A tt is set.

[0149] (b) Setting operation example 2 Setting operation example 2 is the amplifier output feedback value p fb is the amplifier output command value p com In the first stage, the amplifier output command value p com In the second stage, the amplifier output command value p com Compare with the upper limit of .

[0150] The setting operation example 2 will be described with reference to the flowchart of Fig. 18 and the operation diagram of Fig. 19. As in the operation example 1, the initial attenuation amount A tto This initial attenuation A tto The power amplifier is driven using the amplifier output feedback value p fb (S91).

[0151] In the first stage comparison, the amplifier output feedback value p fb and amplifier output command value p com The amplifier output command value p com As the lower limit of the amplifier output command value p com From the threshold p th The value obtained by subtracting (p com -p th ) is used (S92).

[0152] Amplifier output feedback value p fb But (p com -p th ) (S92), attenuation A tt and lower the amplifier output feedback value p fb (S93d). On the other hand, the amplifier output feedback value p fb But (p com -p th ) or more (S92), the attenuation amount A tt Increase the amplifier output feedback value p fb (S93u) The attenuation A set in S93 is decreased. tt The power amplifier is driven using the amplifier output feedback value p fb (S94).

[0153] In the second comparison, the obtained amplifier output feedback value p fb and amplifier output command value p com The amplifier output command value p com As the upper limit of the amplifier output command value p com Threshold p th The value obtained by adding (p com +p th ) is used (S95).

[0154] Amplifier output feedback value p fb But (p com +p th ) or more (S95), the attenuation A tt Increase the amplifier output feedback value p fb On the other hand, the amplifier output feedback value p fb But (p com +p th ) (S95), attenuation A tt and lower the amplifier output feedback value p fb (S96d) Increase the attenuation A set in S96. tt The power amplifier is driven using the amplifier output feedback value p fb (S97).

[0155] The obtained amplifier output feedback value p fb and amplifier output command value p com It is then determined whether the calculated value has converged to within the range between the upper and lower limits (S98). Amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th If it is outside the range of attenuation A (S98), return to S91 and tt On the other hand, the amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) range (S98), attenuation A tt is confirmed as the value at that time (S99).

[0156] In the example of the setting operation in FIG. 19(a), the amplifier output feedback value p fb is the lower bound (p com -p th ) and starts control from a value less than the attenuation A tt (S93d). This reduces the amplifier output feedback value pfb is the upper limit (p com +p th ), the attenuation A tt (S96d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ), the first comparison is performed again to determine the amount of attenuation A tt (S93u). This increases the amplifier output feedback value p fb is still the upper limit (p com +p th ) is exceeded, the attenuation A tt (S96u). This increases the amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) and the attenuation A tt is set.

[0157] In the example of the setting operation in FIG. 19(b), the amplifier output feedback value p fb is the upper limit (p com +p th ) and starts control when the attenuation amount A tt (S93u). This increases the amplifier output feedback value p fb is the lower bound (p com -p th ) and falls below the attenuation A tt (S96d). This reduces the amplifier output feedback value p fb is the lower bound (p com -p th If it does not exceed A, the first comparison is performed again. tt (S93d). This reduces the amplifier output feedback value p fb is the lower bound (p com -p th ) is exceeded, the attenuation A tt (S96d). This reduces the amplifier output feedback value pfb is the upper limit (p com +p th ) and the lower bound (p com -p th ) and the attenuation A tt is set.

[0158] In the example of the setting operation in FIG. 19(c), the amplifier output feedback value p fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) and the attenuation A tt (S93u). This increases the amplifier output feedback value p fb is the lower bound (p com -p th ) and falls below the attenuation A tt (S96d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) and the attenuation A tt is set.

[0159] In the example of the setting operation in FIG. 19(d), the amplifier output feedback value p fb is the upper limit (p com +p th ) and starts control when the attenuation amount A tt (S93u). This increases the amplifier output feedback value p fb is the upper limit (p com +p th ) and the lower bound (p com -p th ), the attenuation A tt (S96d). This reduces the amplifier output feedback value p fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) and the attenuation Att is set.

[0160] (c) Setting operation example 3 Setting operation example 3 is the amplifier output feedback value p fb is the amplifier output command value p com In determining whether the amplifier output command value p com and amplifier output command value p com Compare with the range bounded by the lower limit of .

[0161] The setting operation example 3 will be described with reference to the flowchart of Fig. 20 and the operation diagram of Fig. 21. As in the operation example 1, the initial attenuation amount A tto This initial attenuation A tto The power amplifier is driven using the amplifier output feedback value p fb (S101).

[0162] The obtained amplifier output feedback value p fb is the amplifier output command value p com and amplifier output command value p com The attenuation of the power amplifier is calculated by determining whether the power amplifier output command value p is within the range between the upper and lower limits of p com The amplifier output command value p com From the threshold p th The value obtained by subtracting (p com -p th ) and the amplifier output command value p com The upper limit of the amplifier output command value p com Threshold p th The value obtained by adding (p com +p th ) is used (S102).

[0163] Amplifier output feedback value p fb is the amplifier output command value p com and amplifier output command value p com If the attenuation is within the range between the lower limit and the attenuation A tt This is confirmed as (S103).

[0164] Amplifier output feedback value p fb is the amplifier output command value p com The upper limit of (p com +p th ), the attenuation amount is reduced (S104d), and the amplifier output feedback value p fb is the amplifier output command value p com The lower limit of (p com -p th ), the amount of attenuation is increased (S104u). Return to S101 using the attenuation amount determined in S104d or S104u to drive the power amplifier and obtain the amplifier output feedback value p fb Then, repeat the steps from S102 onwards to obtain the attenuation amount A tt Confirm.

[0165] In the example of the setting operation in FIG. 21(a), the obtained amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) (S102), the attenuation amount at this time is attenuation amount A tt This is confirmed as (S103).

[0166] In the example of the setting operation in Fig. 21(b), the obtained amplifier output feedback value p fb is the upper limit (p com +p th ) (S102), the attenuation is increased (S104u). The amplifier output feedback value p fb is the upper limit (p com +p th ) and lower bound (p com -p th ) (S102), the attenuation amount at this time is set to attenuation amount A tt This is confirmed as (S103).

[0167] In the example of the setting operation in FIG. 21(c), the obtained amplifier output feedback value p fb is the upper limit (pcom +p th ) (S102), the attenuation is increased (S104u). The amplifier output feedback value p fb However, there is still an upper limit (p com +p th ) (S102), the attenuation is increased again (S104u). fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) (S102), the attenuation amount at this time is set to attenuation amount A tt This is confirmed as (S103).

[0168] In the example of the setting operation in FIG. 21(d), the obtained amplifier output feedback value p fb is the lower bound (p com -p th ) (S102), the attenuation is reduced (S104d). fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) (S102), the attenuation amount at this time is set to attenuation amount A tt This is confirmed as (S103).

[0169] In the example of the setting operation in FIG. 21(e), the obtained amplifier output feedback value p fb is the lower bound (p com -p th ) (S102), the attenuation is reduced (S104d). fb However, there is still a lower bound (p com -p th ) (S102), the amount of attenuation is reduced again (S104d).

[0170] The amplifier output feedback value p obtained with the reduced attenuationfb However, there is still a lower bound (p com -p th If the attenuation is less than the value p (S102), the attenuation is reduced again (S104d). fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) (S102), the attenuation amount at this time is set to attenuation amount A tt This is confirmed as (S103).

[0171] In the example of the setting operation in Fig. 21(f), the obtained amplifier output feedback value p fb is the upper limit (p com +p th ) (S102), the attenuation is increased (S104u). The amplifier output feedback value p fb is the lower bound (p com -p th If the attenuation is less than the value p (S102), the attenuation is decreased (S104d). fb is the upper limit (p com +p th ) and the lower bound (p com -p th ) (S102), the attenuation amount at this time is set to attenuation amount A tt This is confirmed as (S103).

[0172] (3b-4: Power efficiency EF setting operation) Setting operation example 4 is the composite output P out is the composite output command value P com This is an example of an operation in which the power supply efficiency EF is set on the condition that it converges within a predetermined range with The setting operation example 4 will be described with reference to the flowchart of FIG. Composite output command value P com In order to set the optimal power supply efficiency EF for com is obtained (S110), and an initial power supply efficiency EF0 of the power amplifier is set (S111).

[0173] Based on the output power / power efficiency characteristics of each power amplifier, the amplifier output p of each power amplifier is set according to the initial power efficiency EF0. out When the output power / power efficiency characteristics of the multiple power amplifiers in the power amplifier section are the same, the amplifier output p out The output power of the amplifier p out Adding these, the composite output P out is calculated (S113).

[0174] The lower limit of the composite output required for the power amplifier, P limit The composite output P calculated in S113 is set. out This lower limit output P limit It is determined whether the above condition is satisfied (S114).

[0175] Calculated composite output P out is the lower limit output P limit If the power output exceeds the threshold, it is determined that the minimum required power output can be obtained, and the combined power command value P com This determination is made based on the composite output P out is the composite output command value P com This can be done based on whether the difference is within the allowable error ΔP range (S115).

[0176] Calculated composite output P out is the composite output command value P com If it is within the allowable error ΔP range of p obtained in S112 out The amplifier output p of each power amplifier out (S117).

[0177] Calculated composite output P out is the composite output command value P com If the power supply efficiency EF is not within the allowable error ΔP range, the power supply efficiency EF is changed (S118), and the steps from S112 are repeated.

[0178] In S114, the calculated composite output P out is the lower limit output Plimit If the power efficiency EF is not exceeded, and if it is possible to change the power efficiency EF, the power efficiency EF is changed (S118), and the steps from S112 are repeated. On the other hand, if the power efficiency EF is not possible to change, the combined output P out Since this is not possible, the settings of the power amplifier are reviewed (S119).

[0179] (4) High-frequency power supply using switching amplifier When the power amplifiers in each stage of the power amplification section are configured with switching amplifiers including phase control sections, the manipulated variable MV is set by the phase shift amount θ and phase amount Θ of the phase control section. Below, a configuration example of a high-frequency power supply device using a switching amplifier will be explained using Fig. 23, and a configuration example of a phase control section will be explained using Fig. 24.

[0180] Example configuration 1: FIG. 23 is a block diagram for explaining an example of the configuration of a high frequency power supply device of the present invention using a switching amplifier.

[0181] Configuration example 1 shows an example in which the operation amount MV for controlling the output level of each amplifier output of each power amplifier is controlled by the phase shift amount θ and the phase amount Θ, and the output level of the high frequency power supply device is controlled by increasing and decreasing the DC voltage of the DC power supply. Configuration example 1 shows an example in which the DC voltage of the DC power supply is increased and decreased by PWM control.

[0182] The high frequency power supply device 20 includes a control unit 21, a DC power supply unit 22, a distribution unit 23, a power amplification unit 24, an amplifier output detection unit 25, a power synthesis unit 26, a synthesis output detection unit 27, an A / D converter 28, and an RF signal generation unit 29.

[0183] The DC power supply unit 22 is a power supply unit capable of controlling a DC voltage, and includes an AC power supply 22a, an AC / DC conversion unit 22b that converts the AC voltage of the AC power supply 22a into a DC voltage, a DC / DC conversion unit 22c that amplifies the amplitude of the DC voltage converted by the AC / DC conversion unit 22b by PWM control, and a PWM signal generation unit 22d that generates a PWM signal used for the PWM control of the DC / DC conversion unit 22c.

[0184] The DC / DC converter 22c outputs a DC voltage according to the duty ratio of the PWM signal generated by the PWM signal generator 22d, and the DC voltage is applied to the termination stage power amplifier 24c.

[0185] The power amplifier 24 includes a plurality of stages of power amplifiers 24A, 24B, ..., 24N. Each of the power amplifiers 24A to 24N is configured by connecting in series each of the digital amplifiers, that is, an RF phase converter / phase controller 24a, a driver circuit 24b, and a terminal stage power amplifier 24c. The RF signal generated by the RF signal generator 29 is distributed by the distributor 23 to each of the power amplifiers 24A, 24B, ..., 24N. The RF phase converter / phase controller 24a converts the RF signal distributed by the distributor 23 into a phase shift signal, and further controls the output level of each of the amplifier outputs of the power amplifiers 24A, 24B, ..., 24N by phase shift control. The DC voltage applied from the DC power supply 22 is adjusted by PWM control, and the voltage of the terminal stage power amplifier 24c is adjusted, thereby improving the accuracy of power control.

[0186] The RF phase conversion section / phase control section 24a can use a CD / RF converter of a class D amplifier configured with a bridge circuit of semiconductor switching elements.

[0187] Phase shift control is performed on RF phase converter / phase control section 24a of power amplifier 24A and RF phase converter / phase control section 24a of power amplifier 24B based on phase shift amount θ and phase amount Θ, and power combining is performed by power combining section 26. Similarly, phase shift control is performed on RF phase converter / phase control section 24a of power amplifier 24C and RF phase converter / phase control section 24a of power amplifier 24D based on phase shift amount θ and phase amount Θ, and power combining is performed by power combining section 26.

[0188] The control unit 21 includes a phase shift amount setting control unit 21a that controls the switching phase of the RF phase conversion unit / phase control unit 24a of the power amplifiers (24A to 24N) of the power amplification unit 24, a power amplifier abnormality detection unit 21b that detects abnormalities in the power amplifiers (24A to 24N), a distribution control unit 21c that controls distribution of the RF signal by the distribution unit 23, an RF signal setting unit 21d that sets the frequency and signal level of the radio frequency signal (RF signal), and a DC power supply control unit 21e that controls the output level of the terminal stage power amplifier 24c.

[0189] The phase shift amount setting control section 21a includes an amplifier output reference value setting section 21a-1 and an operation amount setting section 11a-2. Note that the amplifier output reference value setting section 21a-1 and the operation amount setting section 11a-2 are omitted in FIG. The amplifier output reference value setting unit 21a-1 sets an amplifier output reference value p ref The manipulated variable setting unit 21a-2 sets the amplifier output feedback value p fb and the amplifier output reference value p set by the amplifier output reference value setting unit 21a-1. ref Based on the phase shift amount θ, the RF phase conversion section / phase control section 24a of each of the power amplifiers 22A to 24N sets an amplifier output feedback value p fb and the amplifier output reference value p ref The phase shift amount θ corresponds to the amplifier gain. The output level of the amplifier output of each of the power amplifiers 24A to 24N in the power amplifying section 24 is controlled based on the phase shift amount θ.

[0190] The amplifier output reference value setting unit 21a-1 sets the output level output from the output terminal OUT of the high frequency power supply device 20 based on the composite output command value P com Or the composite output feedback value P detected by the composite output detection unit 27 FB Based on this, an amplifier output reference value pref (Amplifier output command value p com , amplifier output equivalent value p FB ) to set the

[0191] The amplifier output reference value p by the amplifier output reference value setting unit 21a-1 ref (Amplifier output command value p com , amplifier output equivalent value p FB ) is set based on the number N of the power amplifiers 24A to 24N and the output power / power efficiency of each of the power amplifiers 24A to 24N, com or the composite output feedback value P FB The output level of the terminal stage power amplifier 24c can be controlled by the DC power supply voltage of the DC power supply control unit 21e.

[0192] Configuration example 2: Configuration example 2 is a configuration in which a phase controller using a triac or the like is used instead of the RF phase conversion section / phase control section 24a. Configuration example 1 shows an example in which, in the RF phase conversion section / phase control section 24a, the RF phase conversion section converts the signal into a phase shift signal, and the phase control section controls the phase shift of each power amplification section.

[0193] On the other hand, the phase controller of configuration example 2 controls the timing of turning on the triac using the phase amount Θ to perform power control. In the phase controller of configuration example 2, instead of the RF phase conversion unit / phase control unit 24a, the on / off of a switching element such as a triac is adjusted using the phase amount Θ to perform power control of the amplifier output.

[0194] Figure 24 shows an example of a phase controller using a triac. The phase controller connects a series circuit of a resistor and a switching element to a triac in parallel, and the connection terminal between the switching element and one of the resistors is connected to the gate terminal of the triac. The power of the amplifier output is controlled by adjusting the timing at which the switching element is turned on using the phase amount Θ. [Industrial Applicability]

[0195] The high frequency power supply device of the present invention can be applied to a high frequency power supply (RF generator) used in semiconductor manufacturing equipment, liquid crystal panel manufacturing equipment, and the like. [Explanation of symbols]

[0196] 1. Control section 1a Amplifier control section 1a-2 Manipulated amount setting section 1a-1 Amplifier output reference value setting section 1b Amplifier abnormality detection section 1c Distribution control section 1d RF signal setting section 2 RF signal section 3 Distribution section 4. Power Amplification Section 4A, 4B Power amplifier 5 Amplifier output detection section 6 Power combining section 7. Composite output detector 10 High frequency power supply 11 Control section 11a Amplifier control section 11a-1 Amplifier output reference value setting section 11a-2 Manipulated amount setting section 11b Power amplifier abnormality detection unit 11c Distribution control section 11d RF signal setting section 12 RF signal section 12a RF signal generation section 12b Power Control Amplifier 12c Power Control Interface 13 Distribution section 14 Power amplifier section 14A~14D Power amplifiers 14a Variable Gain Amplifier 14b Driver Amplifier 14c Termination stage power amplifier 15 Amplifier output detection section 16 Power combiner 17 Composite output detector 18 A / D Converter 19 D / A Converter 20 High frequency power supply 21 Control section 21a Phase shift amount setting control section 21a-1 Amplifier output reference value setting section 21a-2 Manipulated amount setting section 21b Power amplifier abnormality detection unit 21c Distribution control section 21d RF signal setting section 21e DC power supply control unit 22 DC power supply section 22A~24N Power Amplifier 22a AC power supply 22d PWM signal generation section 23 Distribution section 24 Power amplifier section 24A~24N Power Amplifier 24B, 24C, 24D Power amplifier 24a RF phase conversion section / phase control section 24b Driver circuit 24c terminal stage power amplifier 25 Amplifier output detection section 26 Power combiner 27 Composite output detector 28 A / D Converter 29 RF signal generator A tt Attenuation A tto Initial Attenuation EF, EF1~EF4 Power efficiency EF0 Initial power efficiency MV manipulated variable MVo initial value OUT Output terminal P FB ,P FB1 ,P FB2 Composite Output Feedback Value P fb ,p fb1 ,p fb2 Amplifier Output Feedback Value P limit Lower Limit Output P out ,P out1 ,P out2 ,Pout3 Composite Output P th1 ,P th2 Composite Output Threshold PS high frequency power supply p FB Amplifier output equivalent value p com Amplifier output command value p out ,p out1 ,p out2 ,p out3 Amplifier Output p ref Amplifier output reference value p th Threshold p th3 ,p th4 Amplifier Output Threshold Δ1,Δ2 difference ΔP tolerance ΔP FB difference Δp fb difference Θ Phase amount θ Phase shift amount

Claims

1. an RF signal generating unit that generates a radio frequency signal (RF signal); a power amplifying section including a plurality of power amplifier stages arranged in parallel, the RF signal generated by the RF signal generating section being input to each input terminal of the power amplifier of each stage; a distribution unit that distributes the RF signal to the power amplifiers of each stage; a power combining unit that combines the power of the multiple amplifier outputs amplified by the power amplifiers at each stage and outputs a combined output obtained by the power combining; The amplifier output of each of the power amplifier stages is detected, and the detected amplifier output feedback value p ｆｂ an amplifier output detection unit that outputs A feedback signal is provided between the power combiner and an output terminal, and the feedback signal is provided to the power combiner to separate a forward power of the combined output of the power combiner and to obtain a combined output feedback value P ＦＢ A composite output detection unit for detecting The amplifier output command value p determines the output level of each amplifier output. ｃｏｍ Each amplifier output feedback value p ｆｂ and the amplifier output command value p ｃｏｍ a control unit for comparing the output levels of the respective amplifier outputs of the power amplifiers at each stage with the respective control values ​​MV for the respective power amplifiers at each stage based on the results of the comparison, and controlling the output levels of the respective amplifier outputs of the power amplifiers at each stage based on the respective control values ​​MV; The control unit determines the amplifier output command value p ｃｏｍ The combined output command value P ｃｏｍ or the composite output feedback value P ＦＢ Based on the above, High frequency power supply.

2. The control unit determines a composite output command value P ｃｏｍ and the number N of the power amplifiers (N is an integer equal to or greater than 2) and the output power / power efficiency characteristics of each power amplifier, an amplifier output command value p ｃｏｍ stipulates, The amplifier output feedback value p detected by each amplifier output detector ｆｂ is the amplifier output command value p ｃｏｍ Set the manipulated variable MV to be controlled so that 2. The high frequency power supply device according to claim 1.

3. each of said power amplifiers having equal output power / power efficiency characteristics; The control unit determines the combined output command value P ｃｏｍ is divided by the number N of the power amplifiers (composite output command value P ｃｏｍ / Number N: (P ｃｏｍ / N) is expressed as the amplifier output command value p ｃｏｍ Defined as:

3. The high frequency power supply device according to claim 2.

4. Each of the power amplifiers has a unique output power / power efficiency characteristic; The control unit sets each output power value determined for the same power efficiency in the output power / power efficiency characteristic specific to each of the power amplifiers as an amplifier output command value p ｃｏｍ and each amplifier output command value p ｃｏｍ The sum of the combined output command value P ｃｏｍ It is defined as follows:

3. The high frequency power supply device according to claim 2.

5. The control unit outputs a combined output feedback value P ＦＢ and an amplifier output command value p of each power amplifier based on the number N of the power amplifiers and the output power / power supply efficiency characteristics of each power amplifier. ｃｏｍ is defined, and the amplifier output feedback value p ｆｂ is the amplifier output command value p ｃｏｍ Set the manipulated variable MV to be controlled so that 2. The high frequency power supply device according to claim 1.

6. each of said power amplifiers having equal output power / power efficiency characteristics; The control unit determines the composite output feedback value P ＦＢ is divided by the number N of the power amplifiers (composite output feedback value P ＦＢ / Number of power amplifiers N: (P ＦＢ / N) is expressed as the amplifier output command value p ｃｏｍ Defined as:

6. The high frequency power supply device according to claim 5.

7. Each of the power amplifiers has a unique output power / power efficiency characteristic; The control unit sets each output power value determined for the same power efficiency in the output power / power efficiency characteristic specific to each of the power amplifiers as an amplifier output command value p ｃｏｍ and each amplifier output command value p ｃｏｍ The sum of the composite output feedback value P ＦＢ It is defined as follows:

6. The high frequency power supply device according to claim 5.

8. Each of the power amplifiers is a linear amplifier including an amplifier with a variable attenuator, 8. The high frequency power supply device according to claim 1, wherein the manipulated variable MV is an attenuation amount of a variable attenuator of the amplifier with a variable attenuator.

9. Each of the power amplifiers is a switching amplifier including a phase control section, 8. The high frequency power supply device according to claim 1, wherein the manipulated variable MV is a phase variable of the phase control section.

10. The control unit determines the composite output feedback value P ＦＢ and the composite output command value P ｃｏｍ or the feedback value P ＦＢ and detecting an abnormality in the power amplifier unit based on the amount of fluctuation in the power amplifier.

8. The high frequency power supply device according to claim 2.

11. The control unit determines the amplifier output feedback value p ｆｂ and the amplifier output command value p ｃｏｍ or the amplifier output feedback value p ｆｂ and detecting an abnormality in the power amplifier unit based on the amount of fluctuation in the power amplifier.

8. The high frequency power supply device according to claim 2.

12. an RF signal unit that generates a radio frequency signal (RF signal); a power amplifying section including a plurality of power amplifier stages arranged in parallel, the RF signal generated by the RF signal section being input to each input terminal of the power amplifier of each stage; a distribution unit that distributes the RF signal to the power amplifiers of each stage; a power combiner that combines the power of a plurality of amplifier outputs amplified by the power amplifiers at each stage and outputs a combined output obtained by the power combination, (a) A combined output command value P that determines a target value of the combined output of the power combiner ｃｏｍ Or a composite output feedback value P obtained by detecting the forward wave power of the composite output of the power combiner ＦＢ The amplifier output command value p determines the output level of each amplifier output based on ｃｏｍ stipulates, (b) Each amplifier output feedback value p ｆｂ and the amplifier output command value p ｃｏｍ Compare with (c) setting a manipulated variable MV for controlling the output level of each amplifier output for each power amplifier based on the result of the comparison; (d) controlling an output level of each of the amplifier outputs of the power amplifiers based on each of the manipulated variables MV; A method for controlling a high frequency power supply device.

13. The composite output command value P ｃｏｍ Based on the number N of the power amplifiers and the output power / power supply efficiency characteristics of each power amplifier, an amplifier output command value p ｃｏｍ stipulates, Each amplifier output feedback value p ｆｂ is the amplifier output command value p ｃｏｍ Set the manipulated variable MV to be controlled so that A method for controlling a high frequency power supply device according to claim 12.

14. The composite output feedback value P ＦＢ and an amplifier output command value p of each power amplifier based on the number N of the power amplifiers and the output power / power supply efficiency characteristics of each power amplifier. ｃｏｍ stipulates, Each amplifier output feedback value p ｆｂ is the amplifier output command value p ｃｏｍ Set the manipulated variable MV to be controlled so that A method for controlling a high frequency power supply device according to claim 12.

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