Optical Devices

Abstract

To provide a novel optical device.SOLUTION: An optical device includes a magnetic element including a first ferromagnetic layer, a second ferromagnetic layer, and a spacer layer sandwiched between the first ferromagnetic layer and the second ferromagnetic layer, and a laser diode, and at least a part of the light emitted from the laser diode is applied to the magnetic element.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to optical devices. [Background technology]

[0002] Lasers are used in various fields. Lasers are emitted, for example, from laser diodes. Laser diodes are packaged and commercially available. Can packages and butterfly packages are known as laser diode packages.

[0003] For example, Patent Document 1 discloses a structure in which a laser diode is housed in a can package. In the can package, a semiconductor photodiode is disposed on the back side of the laser diode as a light detection element, and the semiconductor photodiode monitors the light output from the laser diode. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Special publication 2005-516404 Summary of the Invention [Problem to be solved by the invention]

[0005] Semiconductor photodiodes are widely used as photoelectric conversion elements. However, new breakthroughs are required for the further development of optical devices that include photoelectric conversion elements.

[0006] The present invention has been made in view of the above problems, and has an object to provide a novel optical device. [Means for solving the problem]

[0007] In order to solve the above problems, the following means are provided.

[0008] (1) An optical device according to a first aspect includes a magnetic element having a first ferromagnetic layer, a second ferromagnetic layer, and a spacer layer sandwiched between the first ferromagnetic layer and the second ferromagnetic layer, and a laser diode, and at least a portion of the light emitted from the laser diode is irradiated onto the magnetic element.

[0009] (2) In the optical device according to the above aspect, the laser diode may have a first emission portion and a second emission portion, and at least a portion of the light emitted from the first emission portion or the second emission portion may be irradiated onto the magnetic element.

[0010] (3) The optical device according to the above aspect may further include a substrate, and the magnetic element and the laser diode may be located on or above the substrate.

[0011] (4) The optical device according to the above aspect may further include a substrate and a support, the substrate and the support being separate members, the laser diode being on or above the substrate, and the magnetic element being on or above the support.

[0012] (5) The optical device according to the above aspect may further include a reflector that reflects at least a portion of the light emitted from the laser diode toward the magnetic element.

[0013] (6) The optical device according to the above aspect may be configured such that at least a part of the light from the laser diode is irradiated onto the magnetic element in a direction intersecting with the stacking direction of the magnetic element.

[0014] (7) The optical device according to the above aspect may be configured such that at least a part of the light from the laser diode is irradiated onto the magnetic element in the stacking direction of the magnetic element. Effect of the Invention

[0015] The optical device according to the above aspect has the potential to bring about a new breakthrough in the development of optical devices. [Brief description of the drawings]

[0016] [Figure 1] 1 is a cross-sectional view of a package including an optical device according to a first embodiment. [Diagram 2] 1 is a perspective view of an optical device according to a first embodiment. [Diagram 3] 1 is a cross-sectional view of an optical device according to a first embodiment. [Figure 4] 1 is a perspective view of the vicinity of a magnetic element of an optical device according to a first embodiment. [Diagram 5] 1 is a cross-sectional view of a magnetic element according to a first embodiment. [Figure 6] 5A to 5C are diagrams illustrating a first mechanism of operation of the magnetic element according to the first embodiment. [Figure 7] 6A to 6C are diagrams illustrating a second operation mechanism of the magnetic element according to the first embodiment. [Figure 8] 6A to 6C are diagrams illustrating another example of the operation of the magnetic element according to the first embodiment. [Figure 9] 6A to 6C are diagrams illustrating another example of the operation of the magnetic element according to the first embodiment. [Figure 10] 6 is a cross-sectional view of a characteristic portion of an optical device according to a second embodiment. FIG. [Figure 11] FIG. 11 is a perspective view of the vicinity of a magnetic element of an optical device according to a second embodiment. [Figure 12] FIG. 11 is a cross-sectional view of a characteristic portion of an optical device according to a third embodiment. [Figure 13] FIG. 13 is a perspective view of an optical device according to a fourth embodiment. [Figure 14] FIG. 11 is a cross-sectional view of an optical device according to a fourth embodiment. [Figure 15] FIG. 13 is a cross-sectional view of a characteristic portion of an optical device according to a fifth embodiment. [Figure 16] FIG. 13 is a cross-sectional view of a characteristic portion of an optical device according to a sixth embodiment. [Figure 17]FIG. 13 is a cross-sectional view of a characteristic portion of an optical device according to a seventh embodiment. [Figure 18] FIG. 13 is a perspective view of the vicinity of a magnetic element of an optical device according to a sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, the embodiments will be described in detail with reference to the drawings as appropriate. The drawings used in the following description may show characteristic parts in an enlarged scale for the sake of convenience in order to make the characteristics easier to understand, and the dimensional ratios of each component may differ from the actual ones. The materials, dimensions, etc. exemplified in the following description are merely examples, and the present invention is not limited thereto, and may be appropriately modified and implemented within the scope of the effects of the present invention.

[0018] The directions are defined as follows. One direction in the plane in which the substrate 10 (see FIG. 2) extends is the x-direction, and the direction in the plane perpendicular to the x-direction is the y-direction. For example, the direction connecting the laser diode 20 and the magnetic element 30 is the x-direction. The direction perpendicular to the substrate 10 (perpendicular to the x-direction and y-direction) is the z-direction. Hereinafter, the +z direction may be expressed as "up" and the -z direction as "down". Up and down do not necessarily coincide with the direction in which gravity is applied.

[0019] "First embodiment" Fig. 1 is a cross-sectional view of a package 200 including an optical device 100 according to the first embodiment. The package 200 shown in Fig. 1 is a can package. The package 200 is not limited to a can package, and may be, for example, a butterfly package.

[0020] The package 200 includes an optical device 100, a cap 110, a stem 120, a cover glass 130, an adhesive portion 140, and a lead 150. The optical device 100 is mounted on the stem 120 and surrounded by the cap 110. The cap 110 has an opening. The opening of the cap 110 is covered by the cover glass 130. The cover glass 130 is connected to the cap 110 via, for example, the adhesive portion 140. The adhesive portion 140 is, for example, a low-melting point glass. The lead 150 serves for electrical connection to the outside. The lead 150 is electrically connected to the optical device 100.

[0021] FIG. 2 is a perspective view of the optical device 100 according to the first embodiment. FIG. 3 is a cross-sectional view of the optical device 100 according to the first embodiment. The optical device 100 has a substrate 10, a laser diode 20, and a magnetic element 30. The laser diode 20 has a first emission section 24 and a second emission section 25, and emits light L1 from the first emission section 24 and emits light L2 from the second emission section 25. At least a part of the light L1 and L2 emitted from the laser diode 20 (at least a part of the light L2) is irradiated onto the magnetic element 30. The light L1 passes through, for example, a cover glass 130 and is emitted to the outside.

[0022] The substrate 10 is, for example, a semiconductor substrate, a sapphire substrate, etc. The semiconductor substrate is, for example, a Si substrate, a GaN substrate, a SiC substrate, etc. The laser diode 20 and the magnetic element 30 are on the substrate 10 or above the substrate 10.

[0023] The upper surface of the substrate 10 may have a buffer layer 11. The buffer layer 11 is, for example, an n-type semiconductor. The buffer layer 11 is, for example, an n-type GaN. The buffer layer 11 may be formed on the entire upper surface of the substrate 10, or may be only in a position overlapping with the laser diode 20.

[0024] The laser diode 20 has an n-type cladding layer 21, an active layer 22, and a p-type cladding layer 23. The active layer 22 is sandwiched between the n-type cladding layer 21 and the p-type cladding layer 23.

[0025] The n-type cladding layer 21, the active layer 22, and the p-type cladding layer 23 may each be made of a known material. The n-type cladding layer 21 is, for example, an n-type semiconductor. The n-type cladding layer 21 is, for example, a laminated film of n-type AlGaN and GaN, or n-type InP. The active layer 22 is, for example, an InGaN quantum well layer (MQW), or InGaAsP. The p-type cladding layer 23 is, for example, a p-type semiconductor. The p-type cladding layer 23 is, for example, a laminated film of p-type AlGaN and GaN, or p-type InP.

[0026] The laser diode 20 can be manufactured by a known method. For example, the laser diode 20 is manufactured by a lamination process and a processing process of each layer. For example, the laser diode 20 is formed on the substrate 10 through a buffer layer 11 and the like by a vacuum film formation process.

[0027] The laser diode 20 is sandwiched between an electrode 51 and an electrode 52. The electrode 51 is, for example, between the substrate 10 and the buffer layer 11. When a voltage is applied between the electrode 51 and the electrode 52, electrons flow into the active layer 22 from the n-type cladding layer 21, and holes flow into the active layer 22 from the p-type cladding layer 23. These electrons and holes recombine in the active layer 22, causing the laser diode 20 to emit light. The light is confined in the active layer 22, travels back and forth within the active layer 22 while being amplified, and is stimulated and emitted from the first emission portion 24 and the second emission portion 25. A part of the light L1 emitted from the first emission portion 24 is emitted to the outside. A part of the light L2 emitted from the second emission portion 25 is irradiated to the magnetic element 30. The first emission portion 24 and the second emission portion 25 are the ends of the active layer 22 in the x direction.

[0028] The magnetic element 30 is on the same substrate 10 as the laser diode 20. The magnetic element 30 and the laser diode 20 are integrated into one article. The laser diode 20 and the magnetic element 30 are on or above the substrate 10.

[0029] The magnetic element 30 is located at a position where it is irradiated with at least a part of the light L1, L2 (at least a part of the light L2) emitted from the laser diode 20. The height position of the magnetic element 30 in the z direction coincides with, for example, the height position of the second emission portion 25 in the z direction. The magnetic element 30 is located, for example, beyond the second emission portion 25 of the laser diode 20 (forward in the traveling direction of the light L2 emitted from the second emission portion 25). At least a part of the light L1, L2 (at least a part of the light L2) emitted from the laser diode 20 is irradiated to the magnetic element 30 from a direction intersecting the stacking direction of the magnetic element 30 (z direction in FIG. 2).

[0030] The light L2 irradiated to the magnetic element 30 is not limited to visible light, and may be infrared light having a longer wavelength than visible light, or ultraviolet light having a shorter wavelength than visible light. The wavelength of visible light is, for example, 380 nm or more and less than 800 nm. The wavelength of infrared light is, for example, 800 nm or more and 1 mm or less. The wavelength of ultraviolet light is, for example, 200 nm or more and less than 380 nm. The light L2 irradiated to the magnetic element 30 is, for example, light including a high-frequency optical signal and varying in intensity. The high-frequency optical signal is, for example, a signal having a frequency of 100 MHz or more.

[0031] 4 is a perspective view of the vicinity of the magnetic element 30 of the optical device 100 according to the first embodiment. The magnetic element 30 is electrically connected to, for example, electrodes 41 and 42, via wirings 43 and 44, a first terminal 45, and a second terminal 46. The periphery of the magnetic element 30 is covered with an insulating layer 48.

[0032] The electrode 41 is connected to a first surface of the magnetic element 30. The electrode 42 is connected to a second surface of the magnetic element 30. The first surface and the second surface face each other in the stacking direction of the magnetic element 30.

[0033] The electrodes 41 and 42 include a material having electrical conductivity. The electrodes 41 and 42 are made of a metal such as Cu, Al, Au, or Ru. Ta or Ti may be laminated above and below these metals. The electrodes 41 and 42 may also be a laminated film of Cu and Ta, a laminated film of Ta, Cu, and Ti, or a laminated film of Ta, Cu, and TaN. The electrodes 41 and 42 may also be made of TiN or TaN.

[0034] The electrodes 41 and 42 may be transparent to the wavelength region of light irradiated to the magnetic element 30. For example, the electrodes 41 and 42 may be transparent electrodes including transparent electrode materials such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium gallium zinc oxide (IGZO), etc. The electrodes 41 and 42 may also be configured to include a plurality of metal pillars in these transparent electrode materials.

[0035] The via wiring 43 connects the first terminals 45 to the electrode 41 or the electrode 42. There are, for example, two first terminals 45. A current or a voltage is input to one of the first terminals 45, and the other of the first terminals 45 is connected to a reference potential. The first terminals 45 are exposed on the upper surface of the insulating layer 48, for example.

[0036] The via wiring 44 connects the second terminals 46 to the electrode 41 or the electrode 42. There are, for example, two second terminals 46. A signal is output from one of the second terminals 46, and the other of the second terminals 46 is connected to a reference potential. The second terminals 46 are exposed on the upper surface of the insulating layer 48, for example.

[0037] The via wirings 43, 44, the first terminal 45, and the second terminal 46 include a conductive material. The materials for the via wirings 43, 44, the first terminal 45, and the second terminal 46 may be the same as those given as examples of the electrodes 41 and 42.

[0038] The insulating layer 48 is an interlayer insulating layer. The insulating layer 48 is, for example, an oxide, a nitride, or an oxynitride of Si, Al, or Mg. The insulating layer 48 is, for example, a silicon oxide (SiO x ), silicon nitride (SiN x), silicon carbide (SiC), chromium nitride, silicon carbonitride (SiCN), silicon oxynitride (SiON), aluminum oxide (Al 2 O 3 ), zirconium oxide (ZrO x ) etc.

[0039] When the state of the light L2 irradiated to the magnetic element 30 changes, the voltage output from the magnetic element 30 (the potential difference between the electrode 41 and the electrode 42) changes in response to the change in the state of the light L2.

[0040] 5 is a cross-sectional view of the magnetic element 30 according to the first embodiment. The magnetic element 30 has, for example, a first ferromagnetic layer 31, a second ferromagnetic layer 32, and a spacer layer 33. The first ferromagnetic layer 31 is connected to an electrode 41, and the second ferromagnetic layer 32 is connected to an electrode 42. The spacer layer 33 is located between the first ferromagnetic layer 31 and the second ferromagnetic layer 32. The magnetic element 30 may have other layers in addition to these. The magnetic element 30 is irradiated with light L2, for example, from the x direction.

[0041] The magnetic element 30 is, for example, a magnetic tunnel junction (MTJ) element in which the spacer layer 33 is made of an insulating material. In this case, the magnetic element 30 is an element in which the resistance value in the stacking direction (the resistance value when a current flows in the stacking direction) changes according to the relative change between the magnetization state of the first ferromagnetic layer 31 and the magnetization state of the second ferromagnetic layer 32. Such an element is also called a magnetoresistance effect element.

[0042] The first ferromagnetic layer 31 is a light detection layer whose magnetization state changes when irradiated with light from the outside. The first ferromagnetic layer 31 is also called a magnetization free layer. The magnetization free layer is a layer including a magnetic material whose magnetization state changes when a predetermined external energy is applied. The predetermined external energy is, for example, light irradiated from the outside, a current flowing in the stacking direction of the magnetic element 30, or an external magnetic field. The magnetization state of the first ferromagnetic layer 31 changes depending on the intensity of the light L2 irradiated to the first ferromagnetic layer 31.

[0043] The first ferromagnetic layer 31 includes a ferromagnetic material. In this specification, ferromagnetism includes ferrimagnetism. The first ferromagnetic layer 31 includes at least one of magnetic elements such as Co, Fe, or Ni. The first ferromagnetic layer 31 may include a nonmagnetic element such as B, Mg, Hf, or Gd in addition to the magnetic elements described above. The first ferromagnetic layer 31 may be, for example, an alloy including a magnetic element and a nonmagnetic element. The first ferromagnetic layer 31 may be composed of a plurality of layers. The first ferromagnetic layer 31 is, for example, a CoFeB alloy, a stacked body in which a CoFeB alloy layer is sandwiched between Fe layers, or a stacked body in which a CoFeB alloy layer is sandwiched between CoFe layers.

[0044] The first ferromagnetic layer 31 may be an in-plane magnetization film having an axis of easy magnetization in the in-plane direction, or a perpendicular magnetization film having an axis of easy magnetization in the direction perpendicular to the film plane (the lamination direction of the magnetic element 30).

[0045] The thickness of the first ferromagnetic layer 31 is, for example, 1 nm or more and 5 nm or less. The thickness of the first ferromagnetic layer 31 is preferably, for example, 1 nm or more and 2 nm or less. When the first ferromagnetic layer 31 is a perpendicular magnetization film, if the thickness of the first ferromagnetic layer 31 is thin, the perpendicular magnetic anisotropy application effect from the layers above and below the first ferromagnetic layer 31 is strengthened, and the perpendicular magnetic anisotropy of the first ferromagnetic layer 31 is enhanced. In other words, if the perpendicular magnetic anisotropy of the first ferromagnetic layer 31 is high, the force that causes the magnetization to return to the direction perpendicular to the film surface is strengthened. On the other hand, if the thickness of the first ferromagnetic layer 31 is thick, the perpendicular magnetic anisotropy application effect from the layers above and below the first ferromagnetic layer 31 is relatively weak, and the perpendicular magnetic anisotropy of the first ferromagnetic layer 31 is weakened.

[0046] When the thickness of the first ferromagnetic layer 31 is thin, its volume as a ferromagnetic body is small, and when the thickness is thick, its volume as a ferromagnetic body is large. The responsiveness of the magnetization of the first ferromagnetic layer 31 when external energy is applied is inversely proportional to the product (KuV) of the magnetic anisotropy (Ku) and the volume (V) of the first ferromagnetic layer 31. In other words, when the product of the magnetic anisotropy and the volume of the first ferromagnetic layer 31 is small, the responsiveness to light is increased. From this viewpoint, in order to increase the responsiveness to light, it is preferable to appropriately design the magnetic anisotropy of the first ferromagnetic layer 31 and then reduce the volume of the first ferromagnetic layer 31.

[0047] When the thickness of the first ferromagnetic layer 31 is greater than 2 nm, an insertion layer made of, for example, Mo or W may be provided in the first ferromagnetic layer 31. That is, the first ferromagnetic layer 31 may be a laminate in which a ferromagnetic layer, an insertion layer, and a ferromagnetic layer are laminated in this order. The interfacial magnetic anisotropy at the interface between the insertion layer and the ferromagnetic layer enhances the perpendicular magnetic anisotropy of the entire first ferromagnetic layer 31. The thickness of the insertion layer is, for example, 0.1 nm to 0.6 nm.

[0048] The second ferromagnetic layer 32 is a magnetization fixed layer. The magnetization fixed layer is a layer made of a magnetic material in which the state of magnetization is less likely to change than the magnetization free layer when a predetermined external energy is applied. For example, the magnetization direction of the magnetization fixed layer is less likely to change than the magnetization free layer when a predetermined external energy is applied. Also, for example, the magnitude of magnetization of the magnetization fixed layer is less likely to change than the magnetization free layer when a predetermined external energy is applied. The coercive force of the second ferromagnetic layer 32 is, for example, larger than the coercive force of the first ferromagnetic layer 31. The second ferromagnetic layer 32 has an easy magnetization axis in the same direction as the first ferromagnetic layer 31, for example. The second ferromagnetic layer 32 may be an in-plane magnetization film or a perpendicular magnetization film.

[0049] The material constituting the second ferromagnetic layer 32 is, for example, the same as that of the first ferromagnetic layer 31. The second ferromagnetic layer 32 may be, for example, a laminate in which Co having a thickness of 0.4 nm to 1.0 nm, Mo having a thickness of 0.1 nm to 0.5 nm, a CoFeB alloy having a thickness of 0.3 nm to 1.0 nm, and Fe having a thickness of 0.3 nm to 1.0 nm are laminated in this order.

[0050] The magnetization of the second ferromagnetic layer 32 may be fixed by, for example, magnetic coupling with a third ferromagnetic layer via a magnetic coupling layer. In this case, the combination of the second ferromagnetic layer 32, the magnetic coupling layer, and the third ferromagnetic layer may be referred to as a magnetization fixed layer.

[0051] The third ferromagnetic layer is magnetically coupled to, for example, the second ferromagnetic layer 32. The magnetic coupling is, for example, an antiferromagnetic coupling caused by RKKY interaction. The material constituting the third ferromagnetic layer is, for example, the same as that of the first ferromagnetic layer 31. The magnetic coupling layer is, for example, Ru, Ir, or the like.

[0052] The spacer layer 33 is a non-magnetic layer disposed between the first ferromagnetic layer 31 and the second ferromagnetic layer 32. The spacer layer 33 is composed of a layer made of a conductor, an insulator, or a semiconductor, or a layer including a current-carrying point made of a conductor in an insulator. The thickness of the spacer layer 33 can be adjusted according to the orientation directions of the magnetizations of the first ferromagnetic layer 31 and the second ferromagnetic layer 32 in the initial state described later.

[0053] For example, when the spacer layer 33 is made of an insulator, the magnetic element 30 has a magnetic tunnel junction (MTJ) consisting of the first ferromagnetic layer 31, the spacer layer 33, and the second ferromagnetic layer 32. Such an element is called an MTJ element. In this case, the magnetic element 30 can exhibit a tunnel magnetoresistance (TMR) effect. For example, when the spacer layer 33 is made of a metal, the magnetic element 30 can exhibit a giant magnetoresistance (GMR) effect. Such an element is called a GMR element. The magnetic element 30 may be called an MTJ element, a GMR element, or the like, depending on the material of the spacer layer 33, but is also collectively called a magnetoresistance effect element.

[0054] When the spacer layer 33 is made of an insulating material, a material containing aluminum oxide, magnesium oxide, titanium oxide, silicon oxide, or the like can be used as the spacer layer 33. These insulating materials may also contain elements such as Al, B, Si, and Mg, or magnetic elements such as Co, Fe, and Ni. A high magnetoresistance ratio can be obtained by adjusting the thickness of the spacer layer 33 so that a high TMR effect is generated between the first ferromagnetic layer 31 and the second ferromagnetic layer 32. In order to efficiently utilize the TMR effect, the thickness of the spacer layer 33 may be 0.5 to 5.0 nm, or 1.0 to 2.5 nm.

[0055] When the spacer layer 33 is made of a nonmagnetic conductive material, a conductive material such as Cu, Ag, Au, or Ru can be used. In order to efficiently utilize the GMR effect, the thickness of the spacer layer 33 may be 0.5 to 5.0 nm, or 2.0 to 3.0 nm.

[0056] When the spacer layer 33 is made of a nonmagnetic semiconductor material, it may be made of a material such as zinc oxide, indium oxide, tin oxide, germanium oxide, gallium oxide, ITO, etc. In this case, the thickness of the spacer layer 33 may be 1.0 to 4.0 nm.

[0057] When a layer including a current-carrying point formed by a conductor in a nonmagnetic insulator is used as the spacer layer 33, the nonmagnetic insulator made of aluminum oxide or magnesium oxide may have a structure including a current-carrying point formed by a nonmagnetic conductor such as Cu, Au, or Al. The conductor may also be made of a magnetic element such as Co, Fe, or Ni. In this case, the thickness of the spacer layer 33 may be 1.0 to 2.5 nm. The current-carrying point is, for example, a columnar body having a diameter of 1 nm to 5 nm when viewed from a direction perpendicular to the film surface.

[0058] The magnetic element 30 may further include an underlayer, a cap layer, a perpendicular magnetization induction layer, and the like. The underlayer is located under the second ferromagnetic layer 32. The underlayer is a seed layer or a buffer layer. The seed layer enhances the crystallinity of the layer stacked on the seed layer. The seed layer is, for example, Pt, Ru, Hf, Zr, or NiFeCr. The thickness of the seed layer is, for example, 1 nm or more and 5 nm or less. The buffer layer is a layer that relieves lattice mismatch between different crystals. The buffer layer is, for example, Ta, Ti, W, Zr, Hf, or a nitride of these elements. The thickness of the buffer layer is, for example, 1 nm or more and 5 nm or less.

[0059] The cap layer is located above the first ferromagnetic layer 31. The cap layer prevents damage to the lower layer during the process and improves the crystallinity of the lower layer during annealing. The thickness of the cap layer is, for example, 3 nm or less. The cap layer is, for example, MgO, W, Mo, Ru, Ta, Cu, Cr, or a laminated film of these materials.

[0060] The perpendicular magnetization induced layer is formed when the first ferromagnetic layer 31 is a perpendicular magnetization film. The perpendicular magnetization induced layer is laminated on the first ferromagnetic layer 31. The perpendicular magnetization induced layer induces perpendicular magnetic anisotropy in the first ferromagnetic layer 31. The perpendicular magnetization induced layer is, for example, magnesium oxide, W, Ta, Mo, or the like. When the perpendicular magnetization induced layer is magnesium oxide, it is preferable that the magnesium oxide has oxygen deficiency in order to increase the conductivity. The film thickness of the perpendicular magnetization induced layer is, for example, 0.5 nm or more and 2.0 nm or less.

[0061] The magnetic element 30 is fabricated, for example, by a lamination process, an annealing process, and a processing process for each layer. Each layer is formed, for example, by sputtering. Annealing is performed, for example, at 250° C. or higher and 450° C. or lower. The laminated film is processed, for example, by photolithography and etching. The laminated film becomes a columnar magnetic element 30. The magnetic element 30 may be a cylinder or a prism. For example, the shortest width of the magnetic element 30 when viewed from the lamination direction may be 10 nm or higher and 2000 nm or lower, or 30 nm or higher and 500 nm or lower. The magnetic element 30 is obtained by the above processes.

[0062] The magnetic element 30 can be manufactured regardless of the material constituting the base. Therefore, the magnetic element 30 can be manufactured directly on the substrate 10 without an adhesive layer or the like. For example, the magnetic element 30 is formed on the substrate 10 via an insulating layer 48 or the like by a vacuum film formation process.

[0063] Next, some examples of the operation of the magnetic element 30 will be described. The first ferromagnetic layer 31 is irradiated with light L2. The magnetic element 30 detects the change in intensity of the light L2. The output voltage from the magnetic element 30 changes due to the change in intensity of the light L2 irradiated to the first ferromagnetic layer 31. The exact mechanism by which the output voltage from the magnetic element 30 changes due to the irradiation with light has not yet been clarified, but for example, the following two mechanisms are conceivable.

[0064] Fig. 6 is a diagram for explaining a first mechanism of operation of the magnetic element 30 according to the first embodiment. In the upper graph of Fig. 6, the vertical axis represents the intensity of the light L2 irradiated to the first ferromagnetic layer 31, and the horizontal axis represents time. In the lower graph of Fig. 6, the vertical axis represents the resistance value in the stacking direction of the magnetic element 30, and the horizontal axis represents time.

[0065] First, in a state where the first ferromagnetic layer 31 is irradiated with light of a first intensity (hereinafter referred to as an initial state), the magnetization M31 of the first ferromagnetic layer 31 and the magnetization M32 of the second ferromagnetic layer 32 are parallel to each other, and the resistance value in the stacking direction of the magnetic element 30 is a first resistance value R 1 and the magnitude of the output voltage from the magnetic element 30 indicates a first value. The first intensity may be the case where the intensity of the light irradiated to the first ferromagnetic layer 31 is zero.

[0066] For example, when a sense current Is is applied to the magnetic element 30 in the stacking direction, a voltage is generated across the magnetic element 30, and the resistance value in the stacking direction of the magnetic element 30 can be calculated from the voltage value using Ohm's law. An output voltage from the magnetic element 30 is generated between the electrodes 41 and 42. In the example shown in FIG. 6, it is preferable to apply the sense current Is from the first ferromagnetic layer 31 to the second ferromagnetic layer 32. By applying the sense current Is in this direction, a spin transfer torque in the same direction as the magnetization M32 of the second ferromagnetic layer 32 acts on the magnetization M31 of the first ferromagnetic layer 31, and the magnetization M31 and the magnetization M32 become parallel in the initial state. In addition, by applying the sense current Is in this direction, it is possible to prevent the magnetization M31 of the first ferromagnetic layer 31 from being reversed during operation.

[0067] Next, the intensity of the light L2 irradiated to the first ferromagnetic layer 31 changes. The magnetization M31 of the first ferromagnetic layer 31 is tilted from its initial state by external energy due to the irradiation of the light L2. The angle between the direction of the magnetization M31 of the first ferromagnetic layer 31 in a state where the first ferromagnetic layer 31 is not irradiated with light and the direction of the magnetization M31 in a state where the first ferromagnetic layer 31 is irradiated with light is both greater than 0° and smaller than 90°.

[0068] When the magnetization M31 of the first ferromagnetic layer 31 tilts from the initial state, the resistance value of the magnetic element 30 in the stacking direction changes. Then, the output voltage from the magnetic element 30 changes. For example, the greater the intensity of the light L2 irradiated to the magnetic element 30, the greater the tilt of the magnetization M31 from the initial state. For example, the resistance value of the magnetic element 30 in the stacking direction changes from a second resistance value R 2 , the third resistance value R 3 , the fourth resistance value R 4 The first resistance R 1 , the second resistance value R 2 , the third resistance value R 3 , the fourth resistance value R 4The resistance value increases in this order. That is, the output voltage from the magnetic element 30 changes from the first voltage value to the second voltage value, the third voltage value, and the fourth voltage value according to the tilt of the magnetization M31 of the first ferromagnetic layer 31. The output voltage increases in the order of the first voltage value, the second voltage value, the third voltage value, and the fourth voltage value.

[0069] When the intensity of the light L2 irradiated to the magnetic element 30 changes, the output voltage from the magnetic element 30 (resistance value in the stacking direction of the magnetic element 30) changes. The output voltage from the magnetic element 30 changes in response to the change in the intensity of the light L2 irradiated to the first ferromagnetic layer 31. That is, the magnetic element 30 can convert the change in the intensity of the irradiated light L2 into a change in the output voltage. That is, the magnetic element 30 can convert the received light into an electric signal. Here, the case where four values ​​are read out is shown as an example, but the number of values ​​to be read out can be freely designed by setting a threshold value of the output voltage from the magnetic element 30. The magnetic element 30 may also output an analog value as it is.

[0070] A spin transfer torque acts on the magnetization M31 of the first ferromagnetic layer 31 in the same direction as the magnetization M32 of the second ferromagnetic layer 32. Therefore, when the intensity of the light L2 irradiated to the first ferromagnetic layer 31 returns to the first intensity, the magnetization M31, which has been tilted from the initial state, returns to the initial state. When the magnetization M31 returns to the initial state, the resistance value in the stacking direction of the magnetic element 30 becomes the first resistance value R 1 Return to.

[0071] Here, the case where the magnetization M31 and the magnetization M32 are parallel in the initial state has been described as an example, but the magnetization M31 and the magnetization M32 may be antiparallel in the initial state. In this case, the resistance value in the stacking direction of the magnetic element 30 decreases as the magnetization M31 tilts (as the angle change from the initial state of the magnetization M31 increases). When the initial state is one in which the magnetization M31 and the magnetization M32 are antiparallel, it is preferable to flow the sense current Is from the second ferromagnetic layer 32 toward the first ferromagnetic layer 31. By flowing the sense current Is in this direction, a spin transfer torque in the opposite direction to the magnetization M32 of the second ferromagnetic layer 32 acts on the magnetization M31 of the first ferromagnetic layer 31, and the magnetization M31 and the magnetization M32 become antiparallel in the initial state.

[0072] Fig. 7 is a diagram for explaining a second mechanism of operation of the magnetic element 30 according to the first embodiment. In the upper graph of Fig. 7, the vertical axis represents the intensity of the light L2 irradiated to the first ferromagnetic layer 31, and the horizontal axis represents time. In the lower graph of Fig. 7, the vertical axis represents the resistance value in the stacking direction of the magnetic element 30, and the horizontal axis represents time.

[0073] The initial state shown in Fig. 7 is similar to the initial state shown in Fig. 6. In the example shown in Fig. 7, it is also preferable to flow the sense current Is from the first ferromagnetic layer 31 toward the second ferromagnetic layer 32. By flowing the sense current Is in this direction, a spin transfer torque acts on the magnetization M31 of the first ferromagnetic layer 31 in the same direction as the magnetization M32 of the second ferromagnetic layer 32, and the initial state is maintained.

[0074] Next, the intensity of the light L2 irradiated to the first ferromagnetic layer 31 changes. The magnitude of the magnetization M31 of the first ferromagnetic layer 31 decreases from its initial state due to external energy caused by the irradiation of the light L2. When the magnetization M31 of the first ferromagnetic layer 31 decreases from its initial state, the resistance value in the stacking direction of the magnetic element 30 changes. Then, the output voltage from the magnetic element 30 changes. For example, the greater the intensity of the light L2 irradiated to the magnetic element 30, the smaller the magnitude of the magnetization M31. For example, the resistance value in the stacking direction of the magnetic element 30 changes from a second resistance value R 2 , the third resistance value R3 , the fourth resistance value R 4 The first resistance R 1 , the second resistance value R 2 , the third resistance value R 3 , the fourth resistance value R 4 The resistance value increases in this order. That is, the output voltage from the magnetic element 30 changes from the first voltage value to the second voltage value, the third voltage value, and the fourth voltage value according to the magnitude of the magnetization M31 of the first ferromagnetic layer 31. The output voltage increases in the order of the first voltage value, the second voltage value, the third voltage value, and the fourth voltage value.

[0075] When the intensity of the light irradiated to the first ferromagnetic layer 31 returns to the first intensity, the magnitude of the magnetization M31 of the first ferromagnetic layer 31 returns to the original value, and the magnetic element 30 returns to the initial state. That is, the resistance value of the magnetic element 30 in the stacking direction returns to the first resistance value R 1 Return to.

[0076] 7, the magnetizations M31 and M32 may be antiparallel in the initial state. In this case, the resistance value in the stacking direction of the magnetic element 30 decreases as the magnitude of the magnetization M31 decreases. When the magnetizations M31 and M32 are antiparallel in the initial state, it is preferable to flow the sense current Is from the second ferromagnetic layer 32 to the first ferromagnetic layer 31.

[0077] 6 and 7 show an example in which the magnetization M31 and the magnetization M32 are parallel or antiparallel in the initial state, but the magnetization M31 and the magnetization M32 may be perpendicular to each other in the initial state. For example, this applies to a case in which the first ferromagnetic layer 31 is an in-plane magnetization film in which the magnetization M31 is oriented in the in-plane direction, and the second ferromagnetic layer 32 is a perpendicular magnetization film in which the magnetization M32 is oriented in the direction perpendicular to the film plane. The magnetization M31 is oriented in any direction in the film plane due to magnetic anisotropy, and the magnetization M32 is oriented in the direction perpendicular to the film plane, so that the magnetization M31 and the magnetization M32 are perpendicular to each other in the initial state.

[0078] 8 and 9 are diagrams for explaining another example of the operation of the first mechanism of the magnetic element 30 according to the first embodiment. The flow direction of the sense current Is applied to the magnetic element 30 is different between Fig. 8 and Fig. 9. In Fig. 8, the sense current Is is flowed from the first ferromagnetic layer 31 to the second ferromagnetic layer 32. In Fig. 9, the sense current Is is flowed from the second ferromagnetic layer 32 to the first ferromagnetic layer 31.

[0079] In both cases of Fig. 8 and Fig. 9, a sense current Is flows through the magnetic element 30, and thus a spin transfer torque acts on the magnetization M31 in the initial state. In the case of Fig. 8, the spin transfer torque acts so that the magnetization M31 becomes parallel to the magnetization M32 of the second ferromagnetic layer 32. In the case of Fig. 9, the spin transfer torque acts so that the magnetization M31 becomes antiparallel to the magnetization M32 of the second ferromagnetic layer 32. In both cases of Fig. 8 and Fig. 9, in the initial state, the effect of the magnetic anisotropy on the magnetization M31 is greater than the effect of the spin transfer torque, so that the magnetization M31 faces in any direction within the film surface.

[0080] When the intensity of the light L2 irradiated to the first ferromagnetic layer 31 increases, the magnetization M31 of the first ferromagnetic layer 31 is tilted from the initial state by the external energy due to the irradiation of the light L2. This is because the sum of the effect of the irradiation of the light L2 applied to the magnetization M31 and the effect of the spin transfer torque becomes larger than the effect of the magnetic anisotropy related to the magnetization M31. When the intensity of the light L2 irradiated to the first ferromagnetic layer 31 increases, the magnetization M31 in the case of FIG. 8 is tilted to be parallel to the magnetization M32 of the second ferromagnetic layer 32, and the magnetization M31 in the case of FIG. 9 is tilted to be antiparallel to the magnetization M32 of the second ferromagnetic layer 32. The tilt directions of the magnetization M31 in FIG. 8 and FIG. 9 are different because the directions of the spin transfer torque acting on the magnetization M31 are different.

[0081] When the intensity of light irradiated to the first ferromagnetic layer 31 increases, the resistance value in the stacking direction of the magnetic element 30 decreases in the case of Fig. 8, and the resistance value in the stacking direction of the magnetic element 30 increases in the case of Fig. 9. That is, when the intensity of light irradiated to the first ferromagnetic layer 31 increases, the output voltage from the magnetic element 30 decreases in the case of Fig. 8, and the output voltage of the magnetic element 30 increases in the case of Fig. 9.

[0082] When the intensity of the light L2 irradiated to the first ferromagnetic layer 31 returns to the first intensity, the state of the magnetization M31 of the first ferromagnetic layer 31 returns to the original state due to the effect of magnetic anisotropy on the magnetization M31. As a result, the magnetic element 30 returns to the initial state.

[0083] Here, the first ferromagnetic layer 31 is an in-plane magnetization film, and the second ferromagnetic layer 32 is a perpendicular magnetization film, but this relationship may be reversed. That is, in the initial state, the magnetization M31 may be oriented in the direction perpendicular to the film surface, and the magnetization M32 may be oriented in any direction within the film surface.

[0084] As described above, the magnetic element 30 receives the light L2 and converts the received light L2 into an electrical signal. By converting the light L2 into an electrical signal by the magnetic element 30, it is possible to monitor the change in intensity of a part (light L2) of the light L1 and L2 emitted from the laser diode 20 via the magnetic element 30.

[0085] A change in intensity of the light L1 emitted from the first emission portion 24 of the laser diode 20 corresponds to a change in intensity of the light L2 emitted from the second emission portion 25. By monitoring the change in intensity of the light L2 with the magnetic element 30, it is possible to monitor the change in intensity of the light L1 emitted to the outside.

[0086] Furthermore, the smaller the volume of the first ferromagnetic layer 31, the more easily the magnetization M31 of the first ferromagnetic layer 31 changes in response to irradiation with light L2. That is, the smaller the volume of the first ferromagnetic layer 31, the more easily the state of the magnetization M31 of the first ferromagnetic layer 31 changes in response to irradiation with light L2. In other words, by reducing the volume of the first ferromagnetic layer 31, the magnetization M31 can be changed even with a small amount of light. That is, the magnetic element 30 according to the first embodiment can detect light with high sensitivity.

[0087] More precisely, the changeability of the magnetization M31 is determined by the magnitude of the product (KuV) of the magnetic anisotropy (Ku) and the volume (V) of the first ferromagnetic layer 31. The smaller the KuV, the smaller the amount of light that the magnetization M31 changes, and the larger the KuV, the larger the amount of light required to change the magnetization M31. In other words, the KuV of the first ferromagnetic layer 31 is designed according to the amount of laser light required for the application. When detecting an extremely small amount of light, the KuV of the first ferromagnetic layer 31 can be reduced to enable the detection of such a small amount of light. This is a great advantage because the detection of such a small amount of light becomes difficult when the element size is reduced in conventional pn junction semiconductors. The KuV can be reduced by reducing the volume of the first ferromagnetic layer 31.

[0088] Furthermore, the magnetic element 30 can be manufactured regardless of the material constituting the base. Therefore, it is possible to manufacture it on the same substrate as the substrate 10 that supports the laser diode 20. The magnetic element 30 can be formed by a process on the substrate 10 together with the laser diode 20. For example, the laser diode 20 and the magnetic element 30 can be formed on the same substrate 10 by a vacuum film formation process. By treating the laser diode 20 and the magnetic element 30 as one component formed on the same substrate, the number of components can be reduced compared to the case of using a laser diode and a semiconductor photodiode, which need to be treated as separate components.

[0089] "Second embodiment" Fig. 10 is a cross-sectional view of a characteristic portion of the optical device 101 according to the second embodiment. Fig. 11 is a perspective view of the vicinity of the magnetic element 30 of the optical device 101 according to the second embodiment. In the second embodiment, the same configurations as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

[0090] The optical device 101 has a reflector 60. The reflector 60 reflects at least a part of the light emitted from the laser diode 20 (at least a part of the light L2) toward the magnetic element 30. The reflector 60 is located in the traveling direction of the light L2 from the second emission portion 25 of the laser diode 20. The height position of the reflector 60 in the z direction is, for example, the same as the height position of the second emission portion 25 of the laser diode 20 in the z direction. The reflector 60 has an inclined surface that is inclined with respect to the traveling direction of the light L2.

[0091] The reflector 60 reflects light. The reflector 60 is, for example, a reflecting mirror. The periphery of the reflector 60 is covered with an insulating layer 61. The insulating layer 61 may be made of the same material as the insulating layer 48.

[0092] The magnetic element 30 is in an insulating layer 48 on an insulating layer 61. The magnetic element 30 is above a substrate 10. The magnetic element 30 (first ferromagnetic layer 31) has a height position in the z direction different from that of the second emission section 25. The magnetic element 30 is, for example, above a reflector 60.

[0093] The light L2 reflected by the reflector 60 is irradiated to the magnetic element 30, for example, from the stacking direction of the magnetic element 30. In this case, the electrode 42 is transparent to the wavelength region of the light L2 irradiated to the magnetic element 30. The electrode 42 transmits a part of the light L2, so that the magnetic element 30 is irradiated with the light. Here, an example in which the electrode 42 is disposed closer to the reflector 60 than the electrode 41 is illustrated, but the electrode 41 may be disposed closer to the reflector 60 than the electrode 42 (the first ferromagnetic layer 31 may be disposed closer to the reflector 60 than the second ferromagnetic layer 32). In this case, the electrode 41 is transparent to the wavelength region of the light irradiated to the magnetic element 30. The electrode 41 transmits a part of the light L2, so that the magnetic element 30 is irradiated with the light. When the electrode 41 is disposed closer to the reflector 60 than the electrode 42, the efficiency of irradiating the light L2 to the first ferromagnetic layer 31 is increased.

[0094] The optical device 101 according to the second embodiment has the same effects as the optical device 100 according to the first embodiment. In addition, the reflector 60 allows the irradiation direction of the light L2 onto the magnetic element 30 to be freely designed. For example, when the light L2 is irradiated onto the magnetic element 30 from the stacking direction, the light receiving area of ​​the magnetic element 30 can be secured to be wide.

[0095] "Third embodiment" 12 is a cross-sectional view of a characteristic portion of an optical device 102 according to the third embodiment. In the third embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0096] In the optical device 102 according to the third embodiment, the stacking direction of the magnetic element 30 is inclined with respect to the z direction. The light L2 emitted from the second emission portion 25 of the laser diode 20 is irradiated onto the side surface of the magnetic element 30 and the first surface of the magnetic element 30 on the electrode 41 side.

[0097] The optical device 102 according to the third embodiment provides the same effects as the optical device 100 according to the first embodiment.

[0098] "Fourth embodiment" Fig. 13 is a perspective view of an optical device 103 according to a fourth embodiment. Fig. 14 is a cross-sectional view of the optical device 103 according to the fourth embodiment. In the fourth embodiment, configurations similar to those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0099] The optical device 103 has a substrate 10 supporting the laser diode 20 and a support 70 supporting the magnetic element 30. The support 70 is a member separate from the substrate 10 on which the laser diode 20 is formed. The support 70 and the substrate 10 may be fixed on a common support part 90, for example, as shown in Figs. 13 and 14. The laser diode 20 is on or above the substrate 10. The magnetic element 30 is on or above the support 70. In the first to third embodiments, examples have been shown in which the laser diode 20 and the magnetic element 30 are formed on or above the same substrate 10, but in the fourth embodiment, the laser diode 20 and the magnetic element 30 are formed on different members.

[0100] The support 70 is, for example, of a similar material as the substrate 10. The magnetic element 30 is in an insulating layer 48 on the support 70.

[0101] The height position in the z direction of the magnetic element 30 coincides with, for example, the height position in the z direction of the second emission portion 25 of the laser diode 20. At least a part of the light emitted from the laser diode 20 (at least a part of the light L2) is irradiated onto the magnetic element 30 from a direction intersecting the stacking direction of the magnetic element 30 (z direction).

[0102] Even when the laser diode 20 and the magnetic element 30 are formed on different members, the optical device 103 can monitor the change in intensity of at least a part of the light (at least a part of L2) emitted from the laser diode 20 by using the magnetic element 30. That is, the optical device 103 can monitor the change in intensity of the light L1 emitted from the laser diode 20 to the outside.

[0103] "Fifth embodiment" 15 is a cross-sectional view of a characteristic portion of an optical device 104 according to the fifth embodiment. In the fifth embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0104] In the optical device 104, the substrate 10 supporting the laser diode 20 and the support 70 supporting the magnetic element 30 are separate members. The laser diode 20 is on or above the substrate 10. The magnetic element 30 is on or above the support 70. The magnetic element 30 is in the insulating layer 48 on the support 70.

[0105] Between the support 70 and the magnetic element 30 is a reflector 60 covered with an insulating layer 61. The height position of the reflector 60 in the z direction coincides with the height position of the second emission portion 25 of the laser diode 20 in the z direction, for example.

[0106] The reflector 60 reflects at least a part of the light emitted from the laser diode 20 (at least a part of the light L2) toward the magnetic element 30. The light L2 reflected by the reflector 60 is irradiated to the magnetic element 30, for example, from the stacking direction of the magnetic element 30. In this case, the electrode 42 is transparent to the wavelength range of the light L2 irradiated to the magnetic element 30. The electrode 42 transmits a part of the light L2, so that the light is irradiated to the magnetic element 30.

[0107] The optical device 104 according to the fifth embodiment is a combination of the characteristic configuration of the optical device 101 according to the second embodiment and the characteristic configuration of the optical device 103 according to the fourth embodiment. Therefore, the optical device 104 according to the fifth embodiment has the same effects as the optical devices 101 and 103.

[0108] Sixth embodiment 16 is a cross-sectional view of a characteristic portion of an optical device 105 according to the sixth embodiment. In the sixth embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0109] In the optical device 105, the substrate 10 supporting the laser diode 20 and the support 70 supporting the magnetic element 30 are separate members. The laser diode 20 is on or above the substrate 10. The magnetic element 30 is on or above the support 70. The stacking direction of the magnetic element 30 is inclined with respect to the z direction. The height position of the magnetic element 30 in the z direction coincides with, for example, the height position of the second emission portion 25 of the laser diode 20 in the z direction.

[0110] The light L2 emitted from the second emission portion 25 of the laser diode 20 is irradiated onto the side surface of the magnetic element 30 and the first surface of the magnetic element 30 on the electrode 41 side. In this case, the electrode 41 is transparent to the wavelength range of the light L2 irradiated to the magnetic element 30. The electrode 41 transmits a part of the light L2, so that the magnetic element 30 is irradiated with the light.

[0111] The optical device 105 according to the sixth embodiment is a combination of the characteristic configuration of the optical device 102 according to the third embodiment and the characteristic configuration of the optical device 103 according to the fourth embodiment. Therefore, the optical device 105 according to the sixth embodiment has the same effects as the optical devices 102 and 103.

[0112] Seventh embodiment 17 is a cross-sectional view of a characteristic portion of an optical device 106 according to the seventh embodiment. In the seventh embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0113] In the optical device 106, the substrate 10 supporting the laser diode 20 and the support 70 supporting the magnetic element 30 are separate members. The laser diode 20 is on or above the substrate 10. The magnetic element 30 is on or above the support 70.

[0114] The magnetic element 30 is formed on the support 80. The support 80 is made of, for example, the same material as the support 70. The support 80 is disposed on the support 70 such that the side surface of the support 80 and the top surface of the support 70 face each other when the magnetic element 30 is formed on the support 80.

[0115] 18 is a perspective view of the vicinity of the magnetic element 30 of the optical device 106 according to the seventh embodiment. The magnetic element 30 is sandwiched between an electrode 81 and an electrode 82. The electrode 81 is connected to a first terminal 85 and a second terminal 86. The electrode 82 is connected to the first terminal 85 through a via wiring 83. The electrode 82 is also connected to the second terminal 86 through a via wiring 84. The first terminal 85 and the second terminal 86 are formed on the side surfaces of the support 80.

[0116] 17, the traveling direction of the light L2 emitted from the second emission portion 25 of the laser diode 20 coincides with the stacking direction of the magnetic element 30. The height position of the magnetic element 30 in the z direction coincides with, for example, the height position of the second emission portion 25 of the laser diode 20 in the z direction. The light L2 is irradiated to the magnetic element 30, for example, from the stacking direction of the magnetic element 30. In this case, the electrode 81 is transparent to the wavelength range of the light L2 irradiated to the magnetic element 30. The electrode 81 transmits a part of the light L2, so that the magnetic element 30 is irradiated with the light.

[0117] The optical device 106 according to the seventh embodiment can monitor the change in intensity of at least a part of the light (at least a part of L2) emitted from the laser diode 20, by using the magnetic element 30. That is, the optical device 106 can monitor the change in intensity of the light L1 emitted from the laser diode 20 to the outside.

[0118] As described above, the present invention is not limited to the above-described embodiment, and various modifications and variations are possible within the scope of the gist of the present invention as described in the claims. For example, the characteristic configurations of the above-described embodiment may be combined with each other. [Explanation of symbols]

[0119] 10...substrate, 11...buffer layer, 20...laser diode, 21...n-type cladding layer, 22...active layer, 23...p-type cladding layer, 24...first emission section, 25...second emission section, 30...magnetic element, 31...first ferromagnetic layer, 32...second ferromagnetic layer, 33...spacer layer, 41, 42, 51, 52, 81, 82...electrodes, 43, 44, 83, 84...via wiring, 4 5,85...first terminal, 46,86...second terminal, 48,61...insulating layer, 49...inclined portion, 60...reflector, 70,80...support, 100,101,102,103,104,105,106...optical device, 110...cap, 120...stem, 130...cover glass, 140...adhesive portion, 150...lead, 200...package, L1,L2...optical

Claims

1. a magnetic element including a first ferromagnetic layer, a second ferromagnetic layer, and a spacer layer sandwiched between the first ferromagnetic layer and the second ferromagnetic layer; a laser diode; At least a portion of the light emitted from the laser diode is irradiated onto the magnetic element; An optical device, wherein an output voltage from the magnetic element changes according to the intensity of light irradiated onto the first ferromagnetic layer when the light is irradiated onto the first ferromagnetic layer.

2. the laser diode has a first emission portion and a second emission portion; The optical device according to claim 1 , wherein at least a portion of the light emitted from the first emission portion or the second emission portion is irradiated onto the magnetic element.

3. Further comprising a substrate; 3. An optical device according to claim 1 or 2, wherein the magnetic element and the laser diode are on or above the substrate.

4. Further comprising a substrate and a support; The substrate and the support are separate members, the laser diode is on or above the substrate; 3. An optical device according to claim 1 or 2, wherein the magnetic element is on or above the support.

5. Further comprising a reflector, 5. The optical device according to claim 1, wherein the reflector reflects at least a portion of the light emitted from the laser diode toward the magnetic element.

6. 6. The optical device according to claim 1, wherein at least a part of the light from the laser diode is irradiated onto the magnetic element in a direction intersecting with a stacking direction of the magnetic element.

7. 7. The optical device according to claim 1, wherein at least a part of the light from the laser diode is irradiated onto the magnetic element from a stacking direction of the magnetic element.

8. The magnetic element comprises: a sense current is caused to flow from the first ferromagnetic layer to the second ferromagnetic layer when the magnetizations of the first ferromagnetic layer and the second ferromagnetic layer are parallel in a state where no light is irradiated; An optical device as described in any one of claims 1 to 7, configured to flow a sense current from the second ferromagnetic layer to the first ferromagnetic layer when the magnetization of the first ferromagnetic layer and the magnetization of the second ferromagnetic layer are anti-parallel in a state in which no light is irradiated.

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