Rotary and reciprocating actuator

Abstract

To facilitate assembly while ensuring the rigidity of a core, suppress manufacturing costs, and drive a movable object with higher amplitude.SOLUTION: A rotary reciprocating actuator includes a movable body having a shaft to which a movable object is connected and a magnet fixed to the shaft, and a fixed body including a core assembly including a magnetic pole core having an integral structure including a plurality of magnetic poles, a plurality of coils arranged adjacent to each of the plurality of magnetic poles, and a magnetic path core to which the magnetic pole cores are assembled, and in which the core assembly is arranged so as to face the outer periphery of the plurality of magnetic poles, and due to energization of the plurality of coils, a magnetic flux is generated that passes through a magnetic path composed of the magnetic pole core and the magnetic path core of the integrated structure, and the electromagnetic interaction between the magnetic flux and the magnet causes the movable body to reciprocate around the axis of the shaft.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a rotary reciprocating drive actuator. [Background technology]

[0002] Conventionally, rotary actuators have been used as actuators for scanners in multifunction devices, laser beam printers, etc. Specifically, rotary reciprocating actuators rotate the mirror of the scanner back and forth to change the reflection angle of laser light and realize optical scanning of an object.

[0003] A galvanometer motor is used as this type of rotary reciprocating actuator, and is disclosed in Patent Document 1. There are various types of galvanometer motors known, including those with the structure disclosed in Patent Document 1 and movable coil types in which a coil is attached to a mirror.

[0004] Patent document 1 discloses a beam scanner in which four permanent magnets are provided on a rotating shaft to which a mirror is attached so as to be magnetized in the radial direction of the rotating shaft, and a core having magnetic poles around which a coil is wound is arranged on either side of the rotating shaft. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 4727509 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in a moving coil type rotary reciprocating actuator, heat generated by the coil during operation may adversely affect the surface condition of the mirror, the state of attachment of the mirror to the rotation axis, and the shape of the mirror including warping. In addition, in a moving coil type rotary reciprocating actuator, it is difficult to increase the input current to the coil when heat generated by the coil during current flow is taken into consideration, which makes it difficult to increase the size and amplitude of the mirror, which is the movable body. Furthermore, there is a problem that the wiring to the coil must be drawn to the fixed body side for the mirror, which is the movable body, making it difficult to assemble.

[0007] In addition, in Patent Document 1, the magnet is placed on the movable body side. This solves the above-mentioned problems with the movable coil type, but it requires a total of four magnet poles, two magnet poles for each core pole, to keep the magnet stationary in a neutral position with respect to the core, in other words, to position the switching part of the magnet's magnetic poles in the center of the core.

[0008] Therefore, for example, compared to a case where a similar rotary reciprocating actuator is configured using a two-pole magnet, there is a problem that the amplitude of the movable body is smaller, that is, the oscillation range is reduced. Also, since at least four magnets are used, the number of parts is large, the configuration is complex, and assembly is difficult.

[0009] In recent years, there has been a demand for rotary reciprocating actuators for use in scanners that are rigid, shock-resistant, and vibration-resistant, and that are easy to assemble and can achieve even higher amplitudes, in anticipation of larger moving bodies such as mirrors.

[0010] Also, in Patent Document 1, the salient pole yoke, which is the core, is arranged parallel to each other, and from each of the tips of the parts around which the coil is wound, multiple slots, which are magnetic poles, protrude in curved directions facing each other and are formed to sandwich the magnet of the rotating shaft. In the case of a core having a complicated shape such as a salient pole yoke, the machining is time-consuming and the cost of the device itself is high.

[0011] The present invention has been made in consideration of the above points, and provides a rotary reciprocating drive actuator that is easy to assemble while ensuring the rigidity of the core, has low manufacturing costs, and can drive a movable object with higher amplitude. [Means for solving the problem]

[0012] One embodiment of the rotary reciprocating actuator of the present invention comprises: A movable body having a shaft portion to which a movable object is connected and a magnet fixed to the shaft portion; a fixed body having a core assembly including a magnetic pole core of an integral structure including a plurality of magnetic poles, a plurality of coils arranged adjacent to each of the plurality of magnetic poles, and a magnetic path core to which the magnetic pole core is assembled, the core assembly being arranged with the plurality of magnetic poles facing the outer periphery of the magnet; having By energizing the plurality of coils, The above A magnetic flux is generated that passes through a magnetic path formed by a magnetic pole core and the magnetic path core, and the movable body is rotated back and forth about the axis of the shaft portion by electromagnetic interaction between the magnetic flux and the magnet. Effect of the Invention

[0013] According to the present invention, assembly is easy while ensuring the rigidity of the core, and the manufacturing cost can be reduced, and a movable object can be driven with a higher amplitude. [Brief description of the drawings]

[0014] [Figure 1] 1 is an external perspective view of a rotary reciprocating actuator according to an embodiment; [Diagram 2] FIG. 2 is an exploded perspective view of the rotary reciprocating actuator. [Diagram 3]FIG. 2 is a left side view showing the main configuration of a drive unit of the rotary reciprocating actuator. [Figure 4] FIG. 2 is a perspective view showing a configuration of a core assembly. [Diagram 5] FIG. 4 is a left side perspective view showing the configuration of a core portion of a core body. [Figure 6] FIG. 6 is an exploded view of the core part shown in FIG. 5. [Figure 7] 4A and 4B are diagrams illustrating the operation of a magnetic circuit of the rotary reciprocating actuator. [Figure 8] 4A and 4B are diagrams illustrating the operation of a magnetic circuit of the rotary reciprocating actuator. [Figure 9] FIG. 1 is a diagram showing a configuration of a main part of a scanner system using a rotary reciprocating actuator. [Figure 10] FIG. 13 is a perspective view showing a configuration of a first modified example of a core assembly. [Figure 11] 11 is a perspective view showing a state in which a first case is removed from a coil body in the first modified example shown in FIG. [Figure 12] FIG. 13 is a perspective view of a first case of the first modified example. [Figure 13] FIG. 11 is a perspective view showing a configuration of a second modified example of a core assembly. [Figure 14] 13 is a perspective view showing a state in which a second case is removed from a coil body in a core assembly according to Modification 2. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0016] Fig. 1 is an external perspective view of a rotary reciprocating actuator according to an embodiment. Fig. 2 is an exploded perspective view of the rotary reciprocating actuator. Fig. 3 is a left side view showing the main configuration of a drive unit of the rotary reciprocating actuator, with a first case removed in the drive unit.

[0017] The rotary reciprocating actuator 1 is used in, for example, a LiDAR (Laser Imaging Detection and Ranging) device. The rotary reciprocating actuator 1 can also be applied to optical scanning devices such as multifunction peripherals and laser beam printers.

[0018] The rotary reciprocating actuator 1 mainly comprises a movable body 10, a base unit 21 that rotatably supports the movable body 10, and a drive unit 30 that drives the movable body 10 to rotate back and forth relative to the base unit 21. The base unit 21 and the drive unit 30 constitute a fixed body 20 that supports the movable body 10 to rotate back and forth.

[0019] The movable body 10 has a rotation shaft 13, a mirror section 12, and a movable magnet (hereinafter simply referred to as a "magnet") 32. The magnet 32 ​​will be described in detail together with the drive section 30 described later.

[0020] The mirror section 12 is a movable object in the rotary reciprocating actuator 1, and is connected to the rotary shaft 13. The mirror section 12 is formed, for example, by attaching a mirror 121 to one surface of a mirror holder 122. The rotary shaft 13 is inserted into an insertion hole 122a of the mirror holder 122 and fixed thereto.

[0021] The base portion 21 has a pair of walls 211, 212. The pair of walls 211, 212 are erected so as to face each other at both axial ends of a flat bottom portion 213. The base portion 21 is formed so as to have a substantially U-shaped cross section.

[0022] The pair of walls 211, 212 are respectively formed with insertion holes 211a, 212a through which the rotating shaft 13 is inserted. The pair of walls 211, 212 are also respectively formed with cutout holes 211b, 212b that communicate between the insertion holes 211a, 212a and the outer edges of the pair of walls 211, 212.

[0023] With this, in a state in which the mirror portion 12 is fixed to the rotating shaft 13, the rotating shaft 13 can be disposed at the positions of the insertion holes 211a, 212a via the cutout holes 211b, 212b. In the absence of the cutout holes 211b, 212b, the rotating shaft 13 is inserted through both the insertion holes 211a, 212a of the pair of wall portions 211, 212 and the insertion hole 122a of the mirror holder 122 with the mirror portion 12 disposed between the pair of wall portions 211, 212. Furthermore, a complicated assembly operation such as fixing the rotating shaft 13 and the mirror holder 122 is required. In contrast to this, in this embodiment, the cutout holes 211b, 212b are formed, so that the rotation shaft 13 to which the mirror portion 12 is fixed in advance can be easily inserted into the insertion holes 211a, 212a.

[0024] Bearings 22 and 23 are attached to mounting portions (not shown) provided in insertion holes 211a and 212a of the pair of wall portions 211 and 212. The bearings 22 and 23 may be rolling bearings (e.g., ball bearings) or sliding bearings for the base portion 21. For example, if the bearings 22 and 23 are rolling bearings, the coefficient of friction is low and the rotating shaft 13 can be rotated smoothly, improving the driving performance of the rotary reciprocating drive actuator 1. As a result, the rotating shaft 13 is rotatably attached to the base portion 21 via the bearings 22 and 23, and the mirror portion 12, which is a movable object, is disposed between the pair of wall portions 211 and 212.

[0025] The bearings 22 and 23 are inserted from both axial sides of the rotating shaft 13, and after the rotating shaft 13 is placed in the insertion holes 211a and 212a, the rotating shaft 13 is attached to bearing attachment portions provided in the insertion holes 211a and 212a. In this manner, the rotating shaft 13 is attached to the base portion 21 via the bearings 22 and 23 in a freely rotatable manner.

[0026] A magnet 32 ​​is fixed to one end of the rotating shaft 13. The magnet 32 ​​is disposed within a driving unit 30, which will be described later, and is driven to rotate back and forth by a magnetic flux generated by the driving unit 30.

[0027] As described above, in this embodiment, the rotating shaft 13 to which the mirror section 12, which is a movable object, is attached is supported so as to support the mirror section 12 from both sides by a pair of walls 211, 212 of the base section 21. This provides stronger support for the mirror section 12 than if the rotating shaft 13 were supported at one end, improving impact resistance and vibration resistance.

[0028] <Drive unit 30> As shown in FIGS. 2 and 3, the driving section 30 has a core assembly 4 including a core body 40 and coils 44, 45, and a magnet 32.

[0029] <Core assembly 4> FIG. 4 is a perspective view showing the configuration of the core assembly 4 (excluding the first case 51, the second case 52, and the first bearing 53).

[0030] The core assembly 4 shown in FIGS. 3 and 4 includes a core body 40, coils 44, 45, as well as a rotational angle position retainer 48, a first case 51, a second case 52, a first bearing 53, and the like.

[0031] The core assembly 4 is fixed to the base portion 21 and constitutes a part of the fixed body 20. In this embodiment, the core assembly 4 is formed in a rectangular plate shape with magnetic poles 411a, 412a disposed on the inside.

[0032] <Core Body 40> The core body 40 has a magnetic pole core 41 having an integral structure including a plurality of magnetic poles 411a, 412a, and a magnetic path core 42 which is magnetically coupled to the magnetic pole core 41 to form a magnetic path together with the magnetic pole core 41.

[0033] The magnetic pole core 41 and the magnetic path core 42 allow the magnetic flux generated when the coils 44, 45 are energized to pass through the multiple magnetic poles 411a, 412a. The magnetic pole core 41 and the magnetic path core 42 are laminated cores formed by laminating electromagnetic steel sheets (laminated members) such as silicon steel sheets. By making the core body 40 have a laminated structure, the magnetic pole core 41 and the magnetic path core 42 can be formed at low cost and with a complex shape.

[0034] FIG. 5 is a left side perspective view showing the configuration of the core part of the core body, and FIG. 6 is an exploded view of the core part shown in FIG.

[0035] <Magnetic pole core 41> The magnetic pole core 41 has a plurality of rod-shaped bodies 411, 412 each having a plurality of magnetic poles 411a, 412a at its tip, and a connecting body 413 in an integral structure.

[0036] The rod-shaped bodies 411, 412 extend in parallel to each other from base ends 411b, 412b to tip ends (including magnetic poles 411a, 412a), and a plurality of coils 44, 45 are respectively attached to the exterior of the intermediate portions.

[0037] When the coils 44, 45 are excited by passing a current through them, the magnetic poles 411a, 412a at the tips of the rod-shaped bodies 411, 412 produce a polarity according to the direction of current flow. The rod-shaped bodies 411, 412 have the same thickness as the core body 40 (the length in the extending direction of the rotating shaft 13), and are flush with the connecting body 413 on the left side surface, but are provided so as to protrude beyond the connecting body 413 on the right side surface. The protruding portion of the rod-shaped body 411 on the right side surface is disposed inside the magnetic path core 42.

[0038] The magnetic poles 411a, 412a have portions that face the magnet 32 ​​and are curved along the outer circumferential surface of the magnet 32. These curved portions are disposed, for example, so as to face each other in a direction perpendicular to the extension direction of the rod-shaped bodies 411, 412. The magnetic poles 411a, 412a have external dimensions that allow, for example, the bobbins 46, 47 around which the coils 44, 45 are wound to be inserted from the tip side. This allows the bobbins 46, 47 to be inserted from the tip side in the extension direction of the rod-shaped bodies 411, 412, that is, from the tip of the magnetic poles 411a, 412a, to a position surrounding the rod-shaped bodies 411, 412.

[0039] The connecting body 413 extends in a direction intersecting the parallel direction of the rod-shaped bodies 411, 412 at the base ends of the rod-shaped bodies 411, 412, and connects the rod-shaped bodies 411, 412 to each other. The connecting body 413 is formed in a rectangular column shape, extends in a direction perpendicular to the parallel direction of the rod-shaped bodies 411, 412, and is formed so as to protrude perpendicularly to the side from the base ends 411b, 412b of the rod-shaped bodies 411, 412, respectively.

[0040] The connecting body 413 mainly forms a magnetic path that connects the base ends 411b, 412b of the rod-shaped bodies 411, 412 and the base ends 421b, 422b of the legs 421, 422 of the magnetic path core . The tip of the protruding portion of the connecting body 413 has a core fixing piece portion 413b for fixing the magnetic pole core 41 and the magnetic path core 42, and the core fixing piece portion 413b is provided with a mounting hole 40a.

[0041] The fastening material 61 is inserted into the mounting hole 40a, and then passed through the mounting holes of the magnetic path core 42, and ultimately the first case 51 or the second case 52, which will be described later, for fixing. The connecting body 413 has a planar magnetic pole side contact surface 413a that is in surface contact with the magnetic path side contact surface 424a of the magnetic path core 42. The magnetic pole side contact surface 413a is provided on the entire surface of a portion of the connecting body 413 that faces the magnetic path core 42. The connecting body 413 is joined in a state in which it is entirely stacked on the magnetic path side connecting body 424 of the magnetic path core 42 by joining the magnetic pole side contact surface 413a in surface contact with the magnetic path side contact surface 424a of the magnetic path core 42.

[0042] In the magnetic pole core 41, the rod-shaped bodies 411, 412 and the connecting body 413 have an integral structure, so that when the rotary reciprocating drive actuator 1 is assembled, the positional relationship between the multiple magnetic poles 411a, 412a does not change.

[0043] In other words, when the driving unit 30 is arranged by positioning the magnetic poles 411a, 412a facing the magnet 32 ​​together with the magnetic path core 42 as the core body of the core assembly 4, the magnetic poles 411, 412 can be positioned accurately facing each other without any misalignment with each other.

[0044] <Magnetic core 42> The magnetic path core 42 is connected to the magnetic pole core 41, and forms a magnetic path through which magnetic flux passes to the magnetic poles 411a and 412a when current is applied to the coils 44 and 45.

[0045] The magnetic path core 42 faces the connecting body 413 in the extending direction of the rotating shaft 13 and is in surface contact with the connecting body 413, and is assembled with the magnetic pole core 41 with the magnetic poles 411a, 412a positioned with the rotating shaft 13 at the center.

[0046] The magnetic path core 42, together with the connecting body 413, constitutes a magnetic path arranged around the rotating shaft 13 so as to surround the magnetic poles 411a, 412a and the coils 44, 45. That is, the magnetic path core 42 has an enclosing portion that encloses the coils 44, 45, and a part of the enclosing portion (magnetic path side connecting body 424) comes into surface contact with the connecting body 413 of the magnetic pole core 41. With this configuration, the magnetic path core 42 has high strength and can stably position the magnetic poles 411a, 412a. In addition, since the magnetic path core 42 surrounds the coils 44, 45 in an annular shape, it is possible to prevent contact with the coils 44, 45 from the outside.

[0047] The magnetic path core 42 is connected to the connecting body 413 to connect the base ends 411b, 412b of the rod-shaped bodies 411, 412 of the magnetic pole core 41 to the base ends 421b, 422b of the legs 421, 422. Due to this connection, the surrounding portion of the magnetic path core 42, together with the connecting body 413, surrounds the magnetic poles 411a, 412a between the magnetic poles 411a, 412a, the coils 44, 45, and further the magnet 32, and forms a magnetic circuit connecting the magnetic poles 411a, 412a.

[0048] The surrounding portion of the magnetic path core 42 has a magnetic path side connecting body 424 that is in surface contact with the magnetic pole side contact surface 413a of the connecting body 413, legs 421, 422, and a bridge portion 423. The magnetic path side connecting body 424 connects between the base ends 421b, 422b of the pair of legs 421, 422. In the connecting body 413 and the magnetic path side connecting body 424, a pair of legs 421, 422 are connected to the portions extending outward from the rod-shaped bodies 411, 421, particularly to both end portions, in a state of contact and rising from one surface of both connecting bodies 413, 424. This allows the magnetic flux to pass mainly from both end portions through the pair of legs, the bridge portion 423, the rod-shaped body 411, the magnet 32, and the rod-shaped body 412 in the connecting body 413.

[0049] The magnetic path side connecting body 424 has a magnetic path side contact surface 424a facing the connecting body 413, and this magnetic path side contact surface 424a comes into contact with and entirely overlaps the magnetic pole side contact surface 413a of the connecting body 413. The magnetic path side connecting body 424 can reduce magnetic resistance at the joint portion of the magnetic pole side contact surface 413a of the connecting body 413.

[0050] The legs 421, 422 are spaced apart from each other and extend along the parallel direction of the pair of rod-shaped bodies 411, 412 so as to sandwich the pair of rod-shaped bodies 411, 412. The legs 421, 422 are joined at their base ends 421b, 422b, extending from both ends of the magnetic path side connector 424 in a direction intersecting with the magnetic path side connector 424. A bridge 423 is provided between the tip ends of the legs 421, 422.

[0051] The thickness of each of the legs 421, 422 (the length in the extending direction of the rotating shaft 13) is formed to be, for example, the same as the combined thickness of the bridge 423, the rod-shaped bodies 411, 412, the connecting body 413 and the magnetic path side connecting body 424. In the legs 421, 422, the end faces of the base ends 421b, 422b rising from the magnetic path side connecting body 424 are preferably formed to abut against the connecting body 413 with a surface.

[0052] The bridging portion 423 is disposed in parallel to the magnetic path side connecting body 424. The bridging portion 423 is formed in a rectangular frame shape together with the magnetic path side connecting body 424 joined to the connecting body 413, and the legs 421 and 422 whose base ends are joined to the magnetic path side connecting body 424 and disposed in parallel to each other.

[0053] In addition, in magnetic path core 42, corners (connecting parts between legs 421, 422 and bridge 423) which are bent parts of the magnetic path may have a rounded R shape or a linearly bent shape. In the present embodiment, bridge 423 is provided with rotation angle position holder 48.

[0054] In this embodiment, the legs 421, 422 are connected so as to abut against the bridge 423. The bridge 423 has mounting holes 40b at portions protruding on both sides from the joint of the legs 421, 422. The mounting holes 40b have fastening materials 61 inserted therein together with the mounting holes 40a, and the core assembly 4 is fixed to the base portion 21 via these fastening materials 61 when the rotary reciprocating drive actuator 1 is assembled.

[0055] When the rotary reciprocating drive actuator 1 is assembled, the rotary shaft 13 is inserted into the space surrounded by the magnetic poles 411a, 412a. The magnet 32 ​​attached to the rotary shaft 13 is positioned in this space, and the magnetic poles 411a, 412a face the magnet 32 ​​at a precise position with the air gap G interposed between them.

[0056] The coils 44, 45 are wound around cylindrical bobbins 46, 47. A coil body consisting of the coils 44, 45 and the bobbins 46, 47 is extrapolated onto the rod-shaped bodies 411, 412 of the magnetic pole core 41, so that the coils 44, 45 are arranged to wind around the rod-shaped bodies 411, 412. In this way, the coils 44, 45 are arranged adjacent to the magnetic poles 411a, 412a at the tips of the rod-shaped bodies 411, 412.

[0057] The winding direction of the coils 44, 45 is set so that a magnetic flux is suitably generated from one of the magnetic poles 411a, 412a of the magnetic pole core 41 to the other when a current is applied.

[0058] <Rotation angle position holding unit (magnet position holding unit) 48> When the rotary reciprocating drive actuator 1 is assembled, the rotational angle position holder 48 is incorporated into the core assembly 4 so as to face the magnet 32 ​​via an air gap G. The rotational angle position holder 48 is attached, for example, to the bridge portion 423 of the magnetic path core 42 (the portion above the rod-shaped bodies 411, 412 of the magnetic pole core 41) in a position where the magnetic pole faces the magnet 32.

[0059] The rotation angle position holder 48 is formed of, for example, the magnet 32, and generates a magnetic attraction force between itself and the magnet 32, thereby attracting the magnet 32. That is, the rotation angle position holder 48, together with the rod-shaped bodies 411, 412, forms a magnetic spring between itself and the magnet 32. Due to this magnetic spring, in a normal state in which no current is passed through the coils 44, 45 (when no current is passed), the rotation angle position of the magnet 32, i.e., the rotation angle position of the rotating shaft 13, is held in a neutral position.

[0060] The neutral position is the reference position for the rotational reciprocating motion of the magnet 32, i.e., the center of oscillation. When the magnet 32 ​​is held in the neutral position, the boundary portions 32c and 32d of the magnet 32 ​​directly face the magnetic poles 411a and 412a of the rod-shaped bodies 411 and 412. The mounting posture of the mirror unit 12 is adjusted based on the state in which the magnet 32 ​​is in the neutral position. The rotation angle position holder 48 may be made of a magnetic material that generates a magnetic attraction force between itself and the magnet 32.

[0061] The first case 51 and the second case 52 are made of an electrically conductive material and function as an electromagnetic shield. The first case 51 and the second case 52 are disposed on both axial sides of the core body 40. The first case 51 and the second case 52 can suppress the entrance of noise from the outside to the core body 40 and the emission of noise from the core body 40 to the outside.

[0062] The first case 51 and the second case 52 are preferably made of an aluminum alloy. Aluminum alloys offer a high degree of freedom in design and can easily impart the desired rigidity. Therefore, they are suitable for use when the first case 51 functions as a support for supporting the rotating shaft 13.

[0063] The rotating shaft 13 is rotatably attached to the first case 51 via the first bearing 53. The first bearing 53 is disposed in a bearing attachment portion that is continuous with the through hole 51a formed in the first case 51. The bearing attachment portion is, for example, formed in a concave shape on the back side of the first case 51 that is continuous with the through hole 51a, and is fitted into this concave shape. The first bearing 53 easily and rotatably attaches the end of the rotating shaft 13 on the side where the magnet 32 ​​is disposed to the first case 51. The first bearing 53 is, for example, a rolling bearing or a sliding bearing, and has the same function as the bearings 22 and 23. The first bearing 53, together with the bearing 22 of the wall portion 211, supports the rotating shaft 13 on both sides of the magnet 32 ​​so as to be reciprocally rotatable.

[0064] The second case (joint body) 52 positions and joins the core assembly 4 to the wall portion 211 of the base portion 21. The second case 52 is fixed together with the first case 51 via a fastening material 61, sandwiching the core body 40 therebetween, and is positioned and fixed to the wall portion 211 via a fastening material 62.

[0065] The second case 52 has an insertion hole 52a that is larger than the outer shape of the magnet 32. The rotating shaft 13 on which the magnet 32 ​​is attached is inserted into the core assembly 4 through the insertion hole 52a of the second case 52.

[0066] The core body 40 consisting of the magnetic pole core 41 and the magnetic path core 42 is sandwiched between the first case 51 and the second case 52, and fixed by a fastening material 61 to be integrated as the core assembly 4. The core assembly 4 is also fixed to the left wall portion 211 of the base portion 21 by a fastening material 62 to be integrated with the base portion 21.

[0067] The magnet 32 ​​is a ring-shaped magnet in which the S poles 32a and the N poles 32b are alternately arranged in the circumferential direction. The magnet 32 ​​is attached to the circumferential surface of the rotating shaft 13 so as to be located in the space surrounded by the magnetic poles 411a, 412a of the core body 40 when the rotary reciprocating drive actuator 1 is assembled. When the coils 44, 45 are energized, the rod-shaped bodies 411, 412 and the magnetic path core 42 are excited, and the magnetic poles 411a, 412a have a polarity according to the energization direction, and a magnetic force (attraction force and repulsion force) is generated between the magnetic poles 411a, 412a and the magnet 32.

[0068] In this embodiment, magnet 32 ​​is magnetized with different polarities with a plane along the axial direction of rotating shaft 13 as the boundary. That is, magnet 32 ​​is a two-pole magnet magnetized so as to be equally divided into S pole 32a and N pole 32b. The number of magnetic poles of magnet 32 ​​(two in this embodiment) is equal to the number of magnetic poles 411a, 412a of core body 40. Magnet 32 ​​may be magnetized with two or more poles depending on the amplitude during movement. In this case, the magnetic pole portions of core body 40 are provided corresponding to the magnetic poles of magnet 32.

[0069] The polarity of the magnet 32 ​​is switched at boundary portions 32c and 32d (hereinafter referred to as "magnetic pole switching portions") between the S pole 32a and the N pole 32b. When the magnet 32 ​​is held in the neutral position, the magnetic pole switching portions 32c and 32d directly face the magnetic poles 411a and 412a, respectively.

[0070] In the neutral position, the magnetic pole switching sections 32c and 32d of the magnet 32 ​​directly face the magnetic poles 411a and 412a, so that the driving section 30 can generate maximum torque and drive the movable body 10 stably. Furthermore, by configuring the magnet 32 ​​as a two-pole magnet, it becomes easier to drive a movable object with high amplitude and improve driving performance in cooperation with the core body 40. Note that, although the embodiment has been described with respect to a case where the magnet 32 ​​has a pair of magnetic pole switching parts 32c, 32d, the magnet 32 ​​may have two or more pairs of magnetic pole switching parts.

[0071] In the drive unit 30, the portion of the rotating shaft 13 where the magnet 32 ​​is arranged is supported at two points by the first case 51 and the left wall 211, so that the linearity of the rotating shaft 13 can be ensured even if the magnetic attractive force between the magnet 32 ​​and the rotation angle position holder 48 becomes large. In other words, if the portion of the rotating shaft 13 where the magnet 32 ​​is arranged is supported as a cantilever only by the left wall 211, there is a risk that the rotating shaft 13 will bend toward the rotation angle position holder 48 and the linearity will decrease when the magnetic attractive force between the magnet 32 ​​and the rotation angle position holder 48 becomes large, but this problem does not occur.

[0072] Next, the operation of the rotary reciprocating actuator 1 will be described with reference to Figures 3, 7 and 8. Figures 7 and 8 are diagrams for explaining the operation of the magnetic circuit of the rotary reciprocating actuator 1.

[0073] The two magnetic poles 411a, 412a of the core body 40 of the core assembly 4 are disposed to sandwich the magnet 32 ​​with an air gap G therebetween. When the coils 44, 45 are not energized, the magnet 32 ​​is held in a neutral position by the magnetic attraction force between the magnet 32 ​​and the rotation angle position holder 48, as shown in FIG.

[0074] In this neutral position, one of the S pole 32a and the N pole 32b of the magnet 32 ​​(S pole 32a in FIG. 7) is attracted to the rotation angle position holder 48 (see the magnetic spring torque FM in FIG. 7). At this time, the magnetic pole switching units 32c and 32d face the centers of the magnetic poles 411a and 412a of the core body 40.

[0075] When the coils 44 and 45 are energized, the core body 40 is excited, and the magnetic poles 411a and 412a have polarities according to the energizing direction. As shown in FIG. 7, when the coils 44 and 45 are energized, a magnetic flux is generated inside the core body 40, and the magnetic pole 411a becomes an S pole and the magnetic pole 412a becomes an N pole. As a result, the magnetic pole 411a magnetized to an S pole attracts the N pole 32b of the magnet 32, and the magnetic pole 412a magnetized to an N pole attracts the S pole 32a of the magnet 32. Then, a torque in the F direction is generated in the magnet 32 ​​around the axis of the rotating shaft 13, and the magnet 32 ​​rotates in the F direction. Accordingly, the rotating shaft 13 also rotates in the F direction, and the mirror section 12 fixed to the rotating shaft 13 also rotates in the F direction.

[0076] Next, as shown in Fig. 8, when current is applied to coils 44 and 45 in the opposite direction, the flow of magnetic flux generated inside core body 40 is reversed, and magnetic pole 411a becomes an N pole, and magnetic pole 412a becomes an S pole. Magnetic pole 411a magnetized to an N pole attracts S pole 32a of magnet 32, and magnetic pole 412a magnetized to an S pole attracts N pole 32b of magnet 32. Then, torque -F in the opposite direction to the F direction is generated in magnet 32 ​​around the axis of rotating shaft 13, and magnet 32 ​​rotates in the -F direction. Accordingly, rotating shaft 13 also rotates, and mirror section 12 fixed to rotating shaft 13 also rotates. The rotary reciprocating actuator 1 rotates and reciprocates the mirror portion 12 by repeating the above operations.

[0077] In practice, the rotary reciprocating actuator 1 is driven by an AC wave input to the coils 44, 45 from a power supply unit (e.g., equivalent to the drive signal supply unit 103 in FIG. 9). That is, the current flow direction of the coils 44, 45 is switched periodically. When the current flow direction is switched, the magnet 32 ​​is urged to return to the neutral position by the magnetic attraction force between the rotation angle position holder 48 and the magnet 32, that is, the restoring force of the magnetic spring (magnetic spring torques FM, -FM shown in FIGS. 7 and 8). As a result, a torque in the F direction and a torque in the opposite direction to the F direction (-F direction) act alternately on the movable body 10 around the axis. As a result, the movable body 10 is rotary reciprocatingly driven.

[0078] The following is a brief explanation of the driving principle of the rotary reciprocating drive actuator 1. In the rotary reciprocating drive actuator 1 of this embodiment, the moment of inertia of the movable body (movable body 10) is J [kg m 2 ], the spring constant in the torsional direction of the magnetic spring (magnetic poles 411a, 412a, rotation angle position holder 48, and magnet 32) is K sp In this case, the movable body has a resonant frequency F r It vibrates (reciprocating rotation) at [Hz].

[0079]

number

[0080] Since the movable body constitutes a mass part in the vibration model of the spring-mass system, the resonance frequency F r When an AC wave having a frequency equal to the resonant frequency F of the movable body is input to the coils 44 and 45 from the power supply unit, the movable body is in a resonant state. r By inputting an AC wave having a frequency substantially equal to that of the movable body, the movable body can be vibrated efficiently.

[0081] Below are equations of motion and circuit equations showing the driving principle of the rotary reciprocating actuator 1. The rotary reciprocating actuator 1 is driven based on the equation of motion shown in equation (2) and the circuit equation shown in equation (3).

[0082]

number

[0083]

number

[0084] That is, the moment of inertia of the movable body in the rotary reciprocating actuator 1, J [kg m 2], rotation angle θ(t) [rad], torque constant K t [N·m / A], current i(t) [A], spring constant K sp [N m / rad], damping coefficient D [N m / (rad / s)], load torque T Loss [N m], etc. can be changed as appropriate within the range that satisfies formula (2). In addition, the voltage e(t) [V], resistance R [Ω], inductance L [H], and back electromotive force constant K e [V / (rad / s)] can be changed as appropriate within the range that satisfies formula (3).

[0085] In this way, the rotary reciprocating actuator 1 has a moment of inertia J of the movable body and a spring constant K of the magnetic spring. sp The resonant frequency F is determined by r When the coil is energized with an AC wave corresponding to the above, it is possible to obtain a large vibration output efficiently.

[0086] The rotary reciprocating actuator 1 may include an angle sensor unit 70 (see FIG. 6) that detects the rotation angle of the rotary shaft 13. The angle sensor unit 70 is fixed to the right wall 212 of the base unit 21, for example.

[0087] The angle sensor unit 70 has, for example, an optical sensor and an encoder disk. The encoder disk is attached to the rotating shaft 13 and rotates together with the magnet 32 ​​and the mirror unit 12. In other words, the rotational position of the encoder disk is the same as the rotational position of the rotating shaft 13. The optical sensor emits light to the encoder disk and detects the rotational position (angle) of the encoder disk based on the reflected light. This makes it possible to detect the rotational positions of the magnet 32 ​​and the mirror unit 12.

[0088] By providing the angle sensor unit 70, it becomes possible to detect the rotation angle of the movable body 10 including the magnet 32 ​​and the rotation axis 13, and it is possible to control the rotation angle position and rotation speed of the movable body during operation, specifically, the mirror unit 12, which is the movable object.

[0089] FIG. 9 is a block diagram showing the configuration of a main part of a scanner system 100 using the rotary reciprocating actuator 1. As shown in FIG.

[0090] The scanner system 100 includes, in addition to the rotary reciprocating actuator 1, a laser emission unit 101, a laser control unit 102, a drive signal supply unit 103, and a position control signal calculation unit 104.

[0091] The laser emission unit 101 has, for example, an LD (laser diode) serving as a light source, a lens system for converging the laser light output from the light source, etc. The laser control unit 102 controls the laser emission unit 101. The laser light emitted from the laser emission unit 101 is incident on a mirror 121 of the rotary reciprocating actuator 1.

[0092] The position control signal calculation unit 104 generates and outputs a drive signal for controlling the rotation shaft 13 (mirror 121) to be at the target angular position, with reference to the angular position of the rotation shaft 13 (mirror 121) acquired by the angle sensor unit 70 and the target angular position. For example, the position control signal calculation unit 104 generates a position control signal based on the acquired angular position of the rotation shaft 13 (mirror 121) and a signal indicating the target angular position converted using sawtooth waveform data or the like stored in a waveform memory (not shown), and outputs this position control signal to the drive signal supply unit 103.

[0093] Based on the position control signal, the drive signal supply unit 103 supplies a drive signal to the coils 44, 45 of the rotary reciprocating actuator 1 so that the angular position of the rotary shaft 13 (mirror 121) becomes a desired angular position. This enables the scanner system 100 to emit scanning light from the rotary reciprocating actuator 1 to a predetermined scanning area.

[0094] <Summary> As described above, the rotary reciprocating actuator 1 according to this embodiment has a movable body 10 having a rotary shaft (shaft) 13 to which a mirror section (movable object) is connected, and a magnet 32 ​​fixed to the rotary shaft 13. The magnet 32 ​​is a ring-shaped magnet having S poles 32a and N poles 32b arranged alternately in the circumferential direction on the outer circumferential surface. In addition, the rotary reciprocating actuator 1 has a fixed body 20 having a core assembly 4.

[0095] The core assembly 4 has a core body 40 including a magnetic pole core 41 of an integral structure including a plurality of magnetic poles 411a, 412a, and a magnetic path core 42 which is separate from the magnetic pole core 41 and magnetically coupled to the magnetic pole core 41 to form a magnetic path together with the magnetic pole core 41, and a plurality of coils 44, 45 arranged adjacent to each of the plurality of magnetic poles 411a, 412a. The magnetic pole core 41 is arranged so that the plurality of magnetic poles 411a, 412a face the outer periphery of the magnet 32. The magnetic poles 411a, 412a are arranged to face the outer periphery of the magnet 32 ​​with an air gap G therebetween.

[0096] The core body 40 is constructed of separate magnetic pole core 41 and magnetic path core 42, and in the magnetic pole core 41, the magnetic poles 411a, 412a are integrally formed at a position facing the outer periphery of the magnet 32. Therefore, even if the shape of the core body 40 having the magnetic pole core 41 and the magnetic path core 42 is complex, it can be easily manufactured without reducing the arrangement accuracy of the multiple magnetic poles 411a, 412a.

[0097] The number of magnetic poles of magnet 32 ​​is equal to the number of magnetic poles 411a, 412a. Fixed body 20 has a rotation angle position holder (magnet position holder) 48 provided facing magnet 32 ​​across air gap G. Rotation angle position holder 48 holds magnet 32 ​​at a reference position, that is, holds the rotation angle position of rotating shaft 13 or magnet 32 ​​at a neutral position, by magnetic attraction force generated between magnet 32. The reference position is the rotation center position of reciprocating rotation of magnet 32.

[0098] By switching the direction of current flow to the multiple coils 44, 45, the flow of magnetic flux passing through the integral magnetic pole core 41 and magnetic path core 42 is switched and generated in the core assembly 4, and the movable body 10 rotates back and forth around the axis of the rotating shaft 13 due to electromagnetic interaction between the magnetic flux and the magnet 32.

[0099] Since the magnetic pole core 41 and the magnetic path core 42 are laminated members, their manufacturing process is not time-consuming, and the magnetic pole core 41 and the magnetic path core 42 can be formed in a complex shape at low cost. The magnetic pole core 41 has, in an integral structure, a plurality of rod-shaped bodies 411, 412 and a connecting body 413 that connects the rod-shaped bodies 411, 412 to each other. The rod-shaped bodies 411, 412 each have a plurality of magnetic poles 411a, 412a at their tip portions, extend in parallel to each other from their base ends 411b, 412b to their tip portions, and are respectively fitted with a plurality of coils 44, 45 at their intermediate portions. The connecting body 413 extends in a direction that intersects with the parallel direction of the rod-shaped bodies 411, 412 at the base ends 411b, 412b.

[0100] The magnetic path core 42 faces the connecting body 413 in the extension direction of the rotating shaft 13, and they are in surface contact with each other, and the magnetic poles 411a, 412a are positioned with the coils 44, 45 adjacent to each other around the rotating shaft 13, and the magnetic pole core 41 is assembled.

[0101] As a result, even in the case of a core having magnetic poles 411a, 412a arranged to face each other across the magnet 32, it is possible to achieve high output, reduce manufacturing costs, and improve the arrangement accuracy of the magnetic poles 411a, 412a so that they are arranged without variation. Therefore, the reliability of the rotary reciprocating drive actuator 1 can be improved.

[0102] Furthermore, magnetic path core 42 has extensions (legs 421, 422, bridge 423) that extend outward from rod-shaped bodies 411, 412, and the extensions are arranged around rotating shaft 13 so as to surround coils 44, 45 together with connector 413. This makes it possible to suppress electromagnetic noise generated from energized coils 44, 45, and further suppress leakage flux from coils 44, 45 and magnet 32, thereby preventing electromagnetic effects on external devices.

[0103] Furthermore, if the rotation angle position holding units 48, 48A, 48B are magnets, they can be more accurately positioned at a reference position for the movable body when rotating and reciprocating the movable body, and can be reciprocated from that position, thereby ensuring reliable reciprocating motion.

[0104] The movable object is the mirror portion 12 (particularly the mirror 121) that reflects the scanning light. This allows the rotary reciprocating actuator 1 to be used as a scanner that performs optical scanning.

[0105] The invention made by the inventor has been specifically described above based on an embodiment, but the present invention is not limited to the above embodiment and can be modified within the scope of the gist of the invention.

[0106] For example, in the embodiment, the movable object is the mirror unit 12, but the movable object is not limited to this. The movable object may be, for example, an imaging device such as a camera.

[0107] Further, for example, in the embodiment, the case where the rotary reciprocating actuator 1 is resonantly driven has been described, but the present invention can also be applied to the case where it is non-resonantly driven.

[0108] The configuration of the driving unit 30 is not limited to that described in the embodiment. For example, the core may have a magnetic pole portion that is excited by energizing the coil to generate a polarity, and when the rotating shaft is attached to the fixed body, the magnetic pole portion and the outer circumferential surface of the magnet may face each other via an air gap. The coil may have a configuration that generates a magnetic flux suitably from one side of the magnetic pole portion of the core to the other side when energized.

[0109] Furthermore, the rotation angle position holder 48 provided on the fixed body 20 is attached to the bridge portion 423 of the magnetic path core 42 in the core assembly 4, but is not limited thereto, and may be provided on another component of the fixed body 20, as shown in Figs. 10 to 14. In these cases, the rotation angle position holder 48 may be accommodated in the bridge portion 423.

[0110] Fig. 10 is a perspective view showing the configuration of Modification 1 of core assembly 4 (excluding the second case and the auxiliary bearing), Fig. 11 is a perspective view showing a state in which the first case has been removed from the coil body in Modification 1 shown in Fig. 10, and Fig. 12 is a perspective view of the first case of Modification 1 of core assembly 4. Fig. 13 is a perspective view showing the configuration of Modification 2 of core assembly 4 (excluding the first case and the first bearing), and Fig. 14 is a perspective view showing a state in which the second case has been removed from the coil body in Modification 2 of core assembly 4.

[0111] 10 to 14 differ from the core assembly 4 in which the rotation angle position holder 48 is provided on the core body 40 mainly in that the rotation angle position holders 48A and 48B are provided on the first case 51A and the second case 52B, respectively. Therefore, in Figs. 11 to 14, the same components as those in the embodiment are designated with the same names and the same reference numerals with A and B added, and duplicated explanations will be omitted.

[0112] A core assembly 4A shown in FIGS. 10 and 11 is different from the core assembly 4 in the configurations of a magnetic path core 42A, a rotational angle position holder 48A, and a first case 51A.

[0113] As shown in FIGS. 10 and 11, in a core assembly 4A, a rotational angle position holder 48A is provided in a first case 51A disposed adjacent to a core body 40A including a magnetic pole core 41 and a magnetic path core .

[0114] As shown in Figures 11 and 12, the first case 51A has a plate-shaped main body 510A facing the left side of the core body 40B, and a protruding side 58 protruding toward the core body 40A on the surface facing the core body 40A. The rotation angle position holder 48A is attached to this protruding side 58. A bearing attachment portion 51b continuing to the through hole 51a is provided on the surface of the main body 510A facing the core body 40A. A first bearing 53 is fitted into the bearing attachment portion 51b.

[0115] On the other hand, in the core body 40A, a concave notch 425A is formed in the center of the bridge portion 423A in the magnetic path core 42A, extending in the thickness direction of the core body 40A, which is the rotation axis direction. When the first case 51A is attached to the core body 40A, the protruding side portion 58 is fitted into the notch 425A. The rotation angle position holder 48A attached to the protruding side portion 58 is disposed in the same position as the rotation angle position holder 48 facing the magnet 32. The rotation angle position holder 48A has the same function as the rotation angle position holder 48.

[0116] 13 and 14, a rotation angle position holder 48B is provided on the second case 52 side. That is, the core assembly 4B is configured similarly to the core body 40A. The core body 40B has a magnetic pole core 41 in which coils 44, 45 are wound around rod-shaped bodies 411, 421, and a magnetic path core 42B having a notch 425B similar to the magnetic path core 42A having a notch 425A.

[0117] Similar to the cutout 425A of the magnetic path core 42A, the magnetic path core 42B has a concave cutout 425B in the bridge portion 423B. The protruding side portion 58B is fitted into the cutout 425B, and the rotation angle position holder 48B is attached to the protruding side portion 58B. The protruding side portion 58B is disposed at a predetermined position facing the magnet 32.

[0118] In the core assemblies 4A, 4B of the first and second modifications, the rotation angle position holders 48A, 48B, which are magnetic bodies, are provided in the first case 51A and the second case 52, but not in the magnetic path cores 42A, 42B.

[0119] This allows the rotational angle position holding sections 48A, 48B to be separated from the core bodies 40A, 40B through which the magnetic flux passes, giving them the function of holding the rotational angle without increasing the number of parts, and preventing a decrease in torque characteristics without incurring magnetic saturation of the core body 40, for example, the magnetic path core 42.

[0120] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims, not the above description, and is intended to include all modifications within the meaning and scope of the claims. [Industrial Applicability]

[0121] The present invention is suitable for use in, for example, LiDAR devices and scanner systems. [Explanation of symbols]

[0122] 1 Rotation Reciprocating Actuator 4, 4A, 4B Core Assembly 10 Movable body 12 Mirror part (movable object) 13 Rotating shaft (shaft) 20 Fixed body 21 Base 211, 212 Wall section 22, 23 Bearings 30 Drive unit 32 Magnet 32a S pole 32b N pole 32c, 32d Magnetic pole switching part (boundary part) 40, 40A, 40B core body 40a, 40b Mounting holes 41 Magnetic core 42, 42A, 42B Magnetic core 44, 45 Coil 46,47 Bobbin 48, 48A, 48B Rotation angle position holding part (magnet position holding part) 51, 51A Case 1 51a Through hole 51b Bearing mounting part 52, 52B Second case (joint body) 52a Insertion hole 53 No. 1 bearing 58, 58B Projecting side 70 Sensor section 61, 62 Fastening material 100 Scanner System 101 Laser emission unit 102 Laser control unit 103 Drive signal supply unit 104 Position control signal calculation unit 121 Mirror 122 Mirror Holder 122a, 211a, 212a Insertion holes 211, 212 Wall section 211b, 212b Notched holes 213 Bottom 411, 412 Rod-shaped body 411a, 412a magnetic pole 411b, 412b, 421b, 422b proximal end 413 Connectors 413a Magnetic pole side contact surface 413b Core fixing piece 421, 422 Legs 423, 423A, 423B bridge section 424 Magnetic path side connector 424a Magnetic path side contact surface 425, 425A, 425B Cutout 510A Main Unit

Claims

1. A movable body having a shaft portion to which a movable object is connected and a magnet fixed to the shaft portion; a fixed body having a core assembly including a magnetic pole core of an integral structure including a plurality of magnetic poles, a plurality of coils arranged adjacent to each of the plurality of magnetic poles, and a magnetic path core to which the magnetic pole core is assembled, the core assembly being arranged with the plurality of magnetic poles facing the outer periphery of the magnet; having By energizing the plurality of coils, a magnetic flux is generated that passes through a magnetic path formed by the magnetic pole core and the magnetic path core of the integral structure, and the movable body is rotated back and forth around the axis of the shaft portion by electromagnetic interaction between the magnetic flux and the magnet. Reciprocating rotary drive actuator.

2. The magnetic pole core is A plurality of rod-shaped bodies each having the plurality of magnetic poles at a tip end, extending in parallel to each other from a base end to the tip end, and each having the plurality of coils mounted on an intermediate portion thereof; a connecting body extending in a direction intersecting the parallel direction of the rod-shaped bodies at the base end portion and connecting the rod-shaped bodies to each other; The integral structure has 2. The reciprocating rotary drive actuator of claim 1.

3. the magnetic path core is assembled with the magnetic pole core in a state in which the magnetic path core and the connecting body face each other in the extending direction of the shaft portion, and the magnetic poles are positioned with the shaft portion at the center.

3. The reciprocating rotary drive actuator according to claim 2.

4. The magnetic pole core and the magnetic path core are laminated members. A reciprocating rotary drive actuator according to any one of claims 1 to 3.

5. the magnetic path core has a surrounding portion that surrounds the coil and is in surface contact with the connecting body of the magnetic pole core at a part thereof; 4. The reciprocating rotary drive actuator according to claim 3.

6. The surrounding portion is A pair of legs extending from both ends of the connector along the parallel direction of the rod-shaped bodies; A bridge portion provided between the tip portions of the pair of legs; a magnetic path side connector that connects base ends of the pair of legs and is in surface contact with the connector of the magnetic pole core; having The bridge portion is provided with a magnet position holder that attracts the magnet to a reference position by a magnetic attraction force generated between the magnet and the bridge portion.

6. The reciprocating rotary drive actuator according to claim 5.

7. The magnet position maintaining unit is disposed between the bridge unit and the magnet, at a position between the plurality of magnetic poles, and at a position radially opposed to the magnet.

7. The reciprocating rotary drive actuator according to claim 6.

8. The magnet position holder is a magnet.

8. The reciprocating rotary drive actuator according to claim 6 or 7.

9. The magnet position holder is a magnetic material.

8. The reciprocating rotary drive actuator according to claim 6 or 7.

10. the stationary body has a joining body that positions and joins the core assembly, The magnet position retaining portion is provided on the joint body.

8. The reciprocating rotary drive actuator according to claim 6 or 7.

11. The reciprocating rotary drive actuator according to claim 1 , wherein the movable object is a mirror that reflects a scanning light.

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