Method for processing flexible substrates and vacuum processing apparatus for carrying out the method

Abstract

The present invention relates to a method for processing a flexible substrate (18) and a vacuum processing device for carrying out the method, and is based on the problem of providing a solution that allows reliable and uniform processing with sufficient quality. This problem is solved by a method for processing a flexible substrate (18), characterized in that the flexible substrate (18) is a flexible matrix- or lattice-type structural material (18), a first layer of the flexible substrate (18) is transported in a first transport direction (64), at least one second layer of the flexible substrate (18) is transported parallel to and closely spaced from the first layer of the flexible substrate (18) through a free area (26) in a depressurizable process area in a second transport direction (65) opposite to the first transport direction (64), and at least one effective flux (13) of at least one processing tool (11) simultaneously penetrates the first and second layers of the flexible substrate (18) during their opposite transports through the free area (26). Furthermore, this problem is solved by an arrangement in which a first group of rolls (20) and a second group of rolls (21) are arranged, in each group of rolls (20, 21) a plurality of rolls (24) with small diameters and a plurality of rolls (23) with large diameters are arranged for deflecting the flexible substrate (18), at least one free area (26) with at least one processing device (11) is arranged between the first group of rolls (20) and the second group of rolls (21), through which the flexible substrate (18) is transported in opposite directions without turning, and the groups of rolls (20, 21) are arranged such that the flexible substrate (18) is transported in at least two closely spaced layers in a first transport direction (64) and a second transport direction (65) parallel to and opposite to each other.

Description

[Technical field]

[0001] The present invention relates to a method for processing a flexible substrate, and more particularly to a method for moving a flexible substrate within a process area in a vacuum processing apparatus where pressure can be reduced, and processing the substrate with a processing tool.

[0002] The present invention also relates to a vacuum processing apparatus for carrying out a flexible substrate processing method, the vacuum processing apparatus comprising a decompressible processing area having at least an unwinding module, a winding module, and one or more processing tools arranged between the modules.

[0003] The invention relates in particular to a vacuum processing device for processing flexible film-like substrates, characterized in that it has a very high proportion of free open volume. It is about interactions and their optimization. [Background technology]

[0004] So-called band-form or band-like flexible substrates can consist of the most diverse materials, such as plastics, metals, paper, textiles, etc. Such flexible tape-like substrates are usually wound into rolls, also called coils, and therefore are called coils or spools. For processing, the flexible tape-like substrate is unwound from a first reel supported by an unwinding device or unwinding module, treated in a depressurizable (drainable) process area of ​​a vacuum processing device consisting of one or more successive modules, and then rewound onto another reel supported by a winding device or winding module.

[0005] Such equipment is collectively referred to as "roll-to-roll" ("roll-to-roll") systems or "roll-to-roll" winding equipment or "roll-to-roll" banding equipment. When used in vacuum technology, it is called modular "roll-to-roll" vacuum processing equipment. When the coating process is carried out in a modular process area of ​​a "roll-to-roll" system, the term "roll-to-roll" vacuum coating equipment is used.

[0006] Typically, multiple different processing steps are required to convert a flexible substrate into a band, with requirements arising from the respective physical and / or chemical process conditions in the processing areas that may be completely different for each module of the vacuum processing equipment.

[0007] The physical and / or chemical process conditions refer in particular to the pressure, temperature, amount of gas flow, type and composition of gas in the process area of ​​the flexible substrate, as well as the physical or chemical mode of action of the process media (also called process equipment or process tool or process unit) used to process the strip material, mainly to modify or coat its surface. These process requirements and process conditions also necessitate the adoption of a modular structure for the "roll-to-roll" vacuum coating equipment.

[0008] In modular vacuum processing equipment, there are effective ways to substantially prevent pressure equalization and gas exchange between the individual modules or chambers of the vacuum processing equipment. For this reason, in many applications, it is necessary to install a locking device as a connection device between the individual modules or chambers (unwinding and winding devices are also recognized as modules in this framework), which allows the transportation of the flexible strip-shaped substrate while preventing pressure equalization and / or gas exchange as much as possible. Gas exchange and pressure equalization between adjacent spaces such as modules or chambers is not completely prevented by this, but is significantly limited and, in principle, reduced to a state close to zero.

[0009] Airlocks, which prevent as much as possible pressure equalization and gas exchange between the individual modules, chambers or chamber sections, can be used as airlock assemblies or so-called airlock chambers in modular vacuum deposition systems.

[0010] The airlock assembly is the embodiment of a so-called roll airlock. The roll lock presses two D together with a predefined force. The rolls rotate in opposite directions and are usually not driven. The rolls are advantageously provided with additional support for their rotational movement. The rolls are inserted into a housing that ensures only a connection path between the roll and two adjacent chambers of the vacuum processing device. Such rolls are usually coated with a material that ensures that the surface of the flexible band-like substrate is not or is not significantly affected.

[0011] In WO001999050472A1 an airlock assembly is known, which is shown as a roll airlock and which in a first embodiment consists of two rolls. In this assembly, a first and a second roll are pre-arranged and generate a contact pressure between the two rolls, whereby a very good sealing is achieved between two adjacent chambers in the connection area where the pair of airlock rolls is integrated. In the wall area sealing elements are arranged, the side of these elements facing the respective rolls being cylindrical. The aim is to make the gap as small as technically possible and thus to prevent pressure equalization and gas exchange almost completely.

[0012] An alternative embodiment is also described in WO001999050472A1, in which a roll is opposed to two corresponding seal members, and the band-like flexible material on the roll surface is conveyed from one chamber to the other chamber through a gap between the roll and one of the seal members.

[0013] Another type of airlock is the so-called slit airlock. The band-shaped material is guided in a freely floating manner through the slit lock. In the case of band-shaped material, the gap width, i.e. the distance between the top and bottom of the space expanded by the slit lock and into which the belt material is drawn, must be no more than 10 times the thickness of the band-shaped material. Preferably, it is within 2 to 3 times the thickness of the band-shaped material. The length of such a slit airlock is usually about 10 to 40 cm.

[0014] If a particularly effective prevention of gas exchange and thus pressure equalization is required and / or the operating pressures in adjacent modules or chambers differ by more than one order of magnitude, it is known to separate the individual chambers of a system using so-called lock chambers. The lock chambers offer the possibility of independent pump-out connections to which pumps or pumping systems can be connected, whereby different pressure conditions or gas supplies can be realized in the two modules or chambers adjacent to the lock chamber.

[0015] DE102005042762A1 discloses a vacuum coating device for continuous coating of films. The vacuum coating device consists of a vacuum chamber with a coating roll. The interior of the vacuum chamber is divided into various sub-chambers by partition walls, which have a modular function. The sub-chambers can be evacuated by independent vacuum pumps. The film material transported in the sub-chambers can be coated on the film surface by a vacuum process.

[0016] WO2019 / 141303A1 describes film-like functional materials that perform at least one predetermined function and can be applied to target specific physical, chemical, physicochemical, biological or other technical or technological purposes.

[0017] These functional materials are arranged as a film-like carrier medium consisting of at least one constituent material and a total carrier volume with a cross-sectional area of ​​≦100 μm (≦100 μm).

[0018] A foil-like material is a thin material in sheet or web form that, like a film, has a large extent in two dimensions but a relatively small extent in the third dimension.

[0019] The difference between a foil-like material and a film is that a body of foil-like material is characterized by x, y, and z, where x and y are the areal extent of the body, z is the direction of cross-sectional extent, i.e., the measurable distance from one side of the body to the other, and Δx is the length, Δy is the width, and Δz are the cross-sectional area of ​​the sheet-like material within which the material is continuously dispersed but does not fill the space, i.e., the material that the sheet-like material comprises does not completely fill the three-dimensional space spanned by the body on a macroscopic level.

[0020] In the context of the present invention, the volume of free space is at least as large as the volume occupied by the structural elements of the material of construction, although, as a rule, the volume of free space can usually be much larger and even much larger.

[0021] The constituent material is considered to be a matrix or grid-like material, consisting of linear and nodal supports, which form the material components of the carrier medium, passing through the total carrier volume, where partial volumes of the total carrier volume are interconnected to form band-like extensions, and are constituted by supports located around the periphery.

[0022] Such matrix or lattice-type materials are gaining importance as structural components of functional materials. Such functional materials are characterized, for example, by electrical, magnetic, optical, acoustic, biochemical, or other properties. Such matrix or lattice-type building blocks are often used as a starting point for further processing into functional materials. These matrix or lattice-type building blocks, which are usually characterized by specific mechanical properties such as stiffness, strength, density, hardness, and wear resistance, are composed of thermally stable base materials such as glass and high-temperature plastics. Such high-temperature plastics include, for example, thermally stable plastics such as aramid, polyimide (PI), polyaryletherketone (PEAK), polyetheretherketone (PEEK), and polytetrafluoroethylene (PTFE).

[0023] However, the matrix or lattice-like constituent material can also be made of other substances, for example metals, commonly called metal wires, such as copper wires, aluminum wires, steel wires, metal alloy wires or metal-coated metal wires, or mineral fibres, for example rock wool fibres. [Prior art documents] [Patent documents]

[0024] [Patent Document 1] WO1999 / 050472A1 [Patent Document 2] DE102005042762A1 [Patent Document 3] WO2019 / 141303A1 Summary of the Invention [Problem to be solved by the invention]

[0025] According to the state of the art, a drawback in the processing or machining of components with a matrix or lattice structure is that the coating process is often not sufficiently reliable and effective in all areas of such components. This effect is particularly evident in coating processes, which usually result in a lack of effective process control and in large variations in the quality of the coating.

[0026] Therefore, there is a need for a method for processing a flexible substrate and a vacuum processing apparatus for performing such a method for processing a flexible substrate that overcomes the shortcomings known from the prior art.

[0027] The present invention is based on the task of defining a method for processing a flexible substrate and a vacuum processing device for carrying out the method for processing a flexible substrate, which allows a reliable and uniform processing with sufficient quality in all areas of a flexible matrix or grid-like substrate, in particular during the coating process. Solving this task becomes particularly important when carrying out vacuum coating processes.

[0028] In particular, the processing of foil-like, flexible matrix-like or grid-like materials, which are starting materials or intermediate stages in the processing of materials in the sense of the production of functional materials, should be improved. [Means for solving the problem]

[0029] This problem is solved by a method for processing a flexible substrate having the features of independent claim 1. Further developments are indicated in the dependent claims.

[0030] This problem is solved by a vacuum processing device for performing a method for processing a flexible substrate having the features of independent claim 11. Further embodiments are given in the dependent claims.

[0031] In the following, the term flexible, matrix-like or lattice-like material will be used both for the so-called starting material and for the material at all intermediate processing stages of the manufacturing process.

[0032] In particular, the starting material is a component having a matrix or lattice shape and consisting of a plurality of individual supports (support elements). Here, the supports are linear, so that one dimension is large and the second and third dimensions are small. The supports may also be nodal. The first dimension may be, for example, elongation in the x direction, the second dimension in the y direction and the third dimension in the z direction. Here, the x direction may correspond to the transport direction of the flexible matrix or lattice component.

[0033] Such a linear support is a support having approximately the same extension in two dimensions in which the linear support is small, which can be, for example, the y-direction and the z-direction.

[0034] The ratio of the large first dimension (x-direction) to the two smaller second and third dimensions (y-direction, z-direction) is at least a ratio of 50: 1. In this example, the extension of the support in the first dimension will be 50 times greater than the extension of the support in the second and third dimensions.

[0035] The ratio of the extension of the two smaller second and third dimensions to each other is, for example, greater than or equal to 1:5 and less than or equal to 5:1. Thus, the extension of the third dimension is, for example, in the range between 5 times that of the second dimension and 5 times that of the second dimension.

[0036] If the distance between the linear supports is at least partially large, it is also possible to exceed the indicated limits of the linear supports: the linear supports are spaced apart from one another at least in cross section by such a large distance that the proportion of the surface effect of the linear supports relative to the geometric plane in which the surfaces of the linear supports lie is almost negligible, and therefore almost the complete area of ​​the overlapping partial volumes is not affected by the linear supports.

[0037] In this way, the supports passing through the overall support volume are partially spaced apart from one another such that partial volumes span between adjacent supports, the mutually spanning partial volumes being designed as interconnected open free spaces.

[0038] In particular, within the component material, the total volume of the free partial volumes is not smaller than the total volume occupied by the support. Preferably, the ratio of the total volume of the free partial volumes to the total volume occupied by the support is at least 2:1 or at least 5:1, more preferably at least 10:1.

[0039] In simplification, this type of construction material can be described as a matrix or lattice spanning band-like structures, which are traversed by several linear supports, which may also intersect at different angles with respect to the extracted unit surface lying in the band-like plane, thereby forming nodes, i.e. nodal supports, which may meet in nodal support structures. The remaining volume regions located within the band-like matrix correspond to voids (empty spaces) with respect to the vacuum process.

[0040] When the matrix or lattice-like constituent material is viewed from above or below the band, one can see the structural characteristics of the material, which is that it has more open voids than filled voids.

[0041] This consideration is necessary when treating a matrix or lattice-like component on the top or bottom side, where the proportion of solid components in the matrix or lattice-like component is low, making conventional treatment methods very inefficient.

[0042] The situation is even more serious when solid components, i.e. linear and nodal supports, are coated with the material to be deposited: the coating units arranged above and / or below the belt-like structure face only a few surfaces of the solid components of the matrix- or lattice-like constituent material, on which material deposition can be carried out by the action of the coating units.

[0043] The invention provides that a first layer of a flexible substrate or a matrix- or lattice-like component material is transported in a first transport direction, and at least one second layer of the flexible substrate is transported in a second transport direction opposite to the first transport direction through a first free area of ​​a depressurizable process area parallel or at least quasi-parallel to the first layer of the flexible substrate and closely spaced therefrom. Preferably, more layers, for example 4 or 6 layers, are also transported through a depressurizable process area in which at least one process source is arranged, in each case closely spaced in opposite directions, preferably parallel to each other. If a band-like structure of a flexible substrate or a matrix- or lattice-like component material is traversed by a particularly small number of linear supports relative to the removal unit area lying in the band plane, the number of layers transported in each case in opposite directions through a depressurizable process area in which at least one process source is arranged can be even more than 6 and in some cases even increased. It is envisaged that up to 15 layers can be transported in opposite directions in the depressurizable process area in each case.

[0044] In an alternative embodiment, it is provided that a first layer of the flexible substrate is transported in a first transport direction through a first free area and then in a third transport direction different from the first transport direction through a second free area. The flexible substrate is then deflected and transported closely spaced at least one second layer, preferably parallel to the first layer, through the second free area in a fourth transport direction opposite to the third transport direction and then in a process area where the pressure can be reduced, through the first free area in a second transport direction opposite to the first transport direction. It is also contemplated that at least one process source is arranged in the free area, thereby allowing the processing of matrix or lattice-like construction materials. Also in this alternative, up to 15 layers can be transported in the opposite direction through the free area.

[0045] Further, there is provided a vacuum processing apparatus, characterized in that a first roll group and a second roll group are arranged in the vacuum processing apparatus, and each roll group includes a plurality of rolls having a small diameter and a plurality of rolls having a large diameter (hereinafter referred to as small rolls and large rolls), respectively, for deflecting the flexible substrate. A free area having at least one processing tool is arranged between the first roll group and the second roll group, and the flexible substrate is transported in the opposite direction without changing direction.

[0046] In this case, the rolls are arranged such that the flexible substrate is transported in at least two opposing, preferably parallel layers in a first transport direction and in a second transport direction.

[0047] Alternatively, it is specified that a first group of rolls, a second group of rolls and a third group of rolls are arranged, a second free area is arranged between the first group of rolls and the third group of rolls, and a third free area is arranged between the second group of rolls and the third group of rolls, and the rolls are arranged such that the flexible substrate is transported through the second free area and the third free area with at least two layers arranged parallel to each other. At least one processing tool is arranged in the first and / or second free area, and the flexible substrate is transported in the free area in the opposite direction without turning.

[0048] In this case, it is also provided that the transport direction of the flexible substrate through the second free area is oblique (at an angle) to the transport direction of the flexible substrate through the third free area.

[0049] The vacuum processing apparatus and associated methods for processing flexible substrates described herein offer the following possibilities and advantages: With the aid of surface treatments such as ion beam etching, it is possible to prepare the surfaces of the elements to be treated, i.e. linear and nodal supports (support elements), for subsequent coating. The linear and nodal supports can be provided with an envelope coating, i.e. the linear and nodal supports are completely covered with the material to be coated. - Furthermore, the free areas between the linear and nodal supports can be filled with materials based on special vacuum coating processes. In special regions of a linear support, such as its inner edge or in regions of a nodal support which are already provided with an enveloping coating of the same or another material, layers can be built up which can be used to cover the matrix or lattice-like component material or the free space of a flexible substrate. Furthermore, the surface of the deposited material can be suitably functionalized, for example by ion treatment.

[0050] This characteristic, which is reflected in particular in the distinctive selling points of the structural composition of the matrix or lattice-like constituent materials mentioned above, means that in order to enable effective processing, significant changes in processing technology are required compared to conventional film processing in vacuum (reduced pressure) chambers or vacuum (reduced pressure) equipment.

[0051] Therefore, the configuration and design of the vacuum device require different, sometimes significantly different, solutions to be found.

[0052] The description should begin with some preliminary considerations: Various physical quantities resulting from the product of a field and an area are called flux Φ. Particularly important in practical terms is the scalar flux of a vector field (the scalar product of a vector field and an area). Important examples of scalar flux of a vector field include volume flow, magnetic flow, and electric flow. In simple terms, flux Φ can be understood as the number, mass, energy, etc. of particles moving through an area in a certain period of time. This state can be confirmed, for example, at the following link: https: / / de.wikipedia.org / wiki / Fluss_(Physics).

[0053] It is also known that current is generally defined as the quantity of electricity passing through a given cross-sectional area per unit time, i.e.,

number

[0054] Charge Q in a certain time unit t 電荷 The current or current intensity of the current is also expressed as the flux Φ, i.e. the current density Φ 電流密度 is the flux.

number

[0055] Further examples are volumetric flow rate, i.e. volume per time, mass flow rate, i.e. weight-related mass per time, particle flow rate, i.e. number of particles per time, e.g. sputter particles in a vacuum coating process, radiation flow rate, i.e. electromagnetic radiation per time, or luminous flux, i.e. light or photons per time. This can be seen, for example, at the following link: https: / / www.chemie.de / lexikon / Fluss_(Physics).html.

[0056] In contrast to particle flows, electrical flows do not carry any material: electric current has mathematical properties similar to a real flow in a flow field, for example, but it does not carry material things like charge carriers, it only conveys the effect of an underlying force field from one point to another.

[0057] In the case of the surface treatment techniques in vacuum devices considered here, the flux Φ includes all processes, i.e. both material, e.g. particle transport, and non-material, e.g. field propagation.

[0058] The basic idea is that a matrix or lattice of components overlapping each other at some distance so that the components move in a meandering manner relative to each other are acted upon by a flux Φ, which represents a current or propagating field originating from the processing tool.

[0059] The flux Φ is discharged through the surface of the processing medium, the so-called flux outlet surface, into space, i.e. into the vacuum chamber.

[0060] In the space through which the flux propagates, it can exert effects by interacting with matter. In technical applications of vacuum processing equipment, this means targeted influence on solid objects, i.e. on their surfaces or in areas close to their surfaces. The effect obtained by the flux Φ decreases the further the emitted field is from the processing tool. In technical applications, this leads to narrowing the range of the flux Φ, which is of course an arbitrary step. This division is done by determining whether the spatial range (spatial spread) of the flux Φ is defined by the coordinates x, y, z for each location lying within this range, and whether the effect I at each location is determined by the spatial extent of the flux Φ. 効果 This means that the intensity of the flux Φ is only understood as being such that in engineering applications, the extent of the flux Φ is limited, and of course, this is an arbitrary approach. This delimitation means that the spatial extent of the flux Φ is understood only at each location within this area, and at each location, the effect I 効果 This means that the intensity of I(x,y,z)=I 効果 ±ΔI (3) Here, I 効果 means the average effect of the flux Φ emitted from the surface of the treatment medium on the surface or near-surface region of the solid, and ΔI represents the maximum amount by which the average effect can be small or large. 有効 In vacuum technology, the term treatment or process space is often used instead of the term effective flux.

[0061] The top and bottom of the matrix or lattice component cross a plane and must also be considered as a surface. The small ratio of the surface area of ​​the support to the total area of ​​the available flux Φ emitted from the surface of the treatment medium makes it unlikely or extremely unlikely that the supports of the individual layers of the matrix or lattice component will cover or overlap each other in the areas where these layers move over each other.

[0062] This also means that the more layers of matrix or lattice material overlap, the more the solid surface portion of the support will fill the field of view when looking above or below the matrix or lattice material. If the overlapping layers move in opposite directions, the effect is even stronger, making persistent overlap even less likely.

[0063] This effect also means that with such a case the number of superimposed layers in the treatment area can be further increased.

[0064] In any case, however, the smaller the area of ​​the matrix or lattice-like component material support relative to the area visible from above or below the belt-like structure, the more layers can be arranged on top of each other in order to carry out the processing steps efficiently and effectively.

[0065] On this basis, the surface treatment process of the support can be realized much more effectively, since the effective flux Φ 有効 That is, due to the formation of a matrix or lattice of layers of constituent materials in the spatial region in which the field or current generated by the treatment tool develops its useful effect, there is significantly more solid material present through this region than would be the case with the transport of a single layer.

[0066] According to the present invention, an apparatus such as a vacuum processing apparatus for processing a flexible matrix or lattice-like substrate is provided, the apparatus including an unwinding and winding module for the flexible substrate, an apparatus for processing, and a means for guiding the flexible substrate from the unwinding module to the winding module.

[0067] The flexible matrix or lattice substrate to be treated has in particular a structure consisting of several linear and nodal supports passing through it and remaining volume regions located inside the substrate and representing voids.

[0068] In this case, the vacuum processing apparatus has a modular structure in which a module for transporting a flexible matrix or lattice-like substrate, also called the winding material, is provided between the unwinding module and the winding module, or in adjacent modules.

[0069] The residual gas pressure in the processing chamber or process space of a vacuum processing device is generally 10 -4 mbar or less is preferable, but in any case the process conditions must be met, so -4 It can be up to mbar or even higher. In the case of treatment processes it can be significantly higher due to the determined contamination with process gases.

[0070] As treatment medium, also called treatment source or process source, various types of vacuum treatment equipment or process sources can be used, by which surface treatment steps such as pretreatment, cleaning, drying, surface activation and / or polymerization are carried out on the one hand, and coating on the other hand. Typical process sources for surface treatment are of many kinds, for example electron sources, ion sources, special laser devices, etc. Process sources are devices that are usually used for physical or chemical coatings. Physical coatings are called PVD (Physical Vapour Deposition) and chemical coatings are called CVD (Chemical Vapour Deposition). Typical sources are for example sputter sources, especially magnetron sputter sources, deposition, plasma physical deposition or chemical deposition sources (PVD or CVD sources), of which there are many unit types and devices. These process sources can also be used, with limitations, for pretreatment, cleaning, drying, surface activation and / or polymerization of the building materials.

[0071] Another form of coating is thermal spraying under vacuum conditions, vacuum spraying refers to all technically possible variations of thermal spraying that can be used under vacuum conditions, the most common being vacuum arc spraying.

[0072] One challenge in the vacuum processing of the already mentioned matrix- or lattice-type components is to treat the surface of the linear and nodal supports or to coat them with one or more substances, for example when the components are starting materials for further processing. Very often, the surrounding coating of the linear and nodal supports with this or these substances is provided in such a way that the matrix- or lattice-like morphology of the coated components is preserved, i.e. the free and interconnected partial volumes continue to be present in the support medium, but are reduced by the substance or amount of substance that envelops the support.

[0073] In order to be able to effectively solve these problems, the solution of the present invention is to form a band-shaped component material by repeatedly, for example meandering, at small distances from each other, while maintaining an effective flux Φ 有効 It is proposed to guide the at least one process source through or through the process space or through the process space in which the at least one process source is active.

[0074] For example, when ion-treating the surface of a matrix or lattice-like component, the contribution of the energetic ions in the effective flux is approximately equal, i.e., ΔI in equation (3) is negligible. In the case of a coating process, the deposition rate, i.e., the amount of material deposited during the time interval during which a given section / area of ​​the material to be coated is in the process space, is approximately equal for any given section / area of ​​the layer of matrix or lattice-like component after the layer leaves the process space again. The roll of material, i.e., the multiple shuttles of the component material closely spaced apart from each other through the process space, ensures that a relatively uniform treatment is achieved after the matrix or lattice-like component finally leaves the process space.

[0075] This treatment method can be achieved by guiding the wound material, i.e. the component material, over corresponding deflection rolls and passing it through the process space several times, making the distance between opposing layers of the component material as small as technically possible.

[0076] As already explained, process spaces that can achieve comparable action intensities are often characterized by the fact that their depth, understood as the length perpendicular to the belt plane or the direction of transport of the component material, does not exhibit significant values, i.e. the extent of the process space is relatively small. This situation is due to the mean free path length of the particles that produce the effect, i.e. the length that a particle (atom, molecule, ion, electron, etc.) travels on average in a substance before it undergoes any collision with another particle. For this reason, it is often necessary to make the distance between the individual winding layers of the component material, where adjacent layers always move in opposite directions, as small as possible, i.e. as small as technical and technological conditions allow.

[0077] It is therefore envisaged to integrate a winding system into the vacuum coating machine which allows for the provision of small distances between the individual layers of matrix- or lattice-like constituent material moving in opposite directions in each case.

[0078] The winding device and the process space are designed in such a way that the matrix or lattice construction material used in each case can withstand the thermal loads imposed by the treatment process and is not deformed beyond the permissible limits or destroyed.

[0079] To this end, it is contemplated to use deflection rolls that reverse or invert the direction of travel of the component material conveyance.

[0080] Furthermore, it is intended that these deflection rolls are equipped with or connected to a cooling device in order to be able to dissipate again at least a part of the energy introduced by the treatment of the linear and nodal supports.

[0081] A further challenge in the vacuum processing of the already described matrix- or lattice-type components is the filling of the free space opened up by the linear and nodal supports or by linear and nodal supports already coated with material with further material, the filling procedure being to be understood in the sense of "bringing in" material into the matrix-type free space so that the free space areas or free spaces of the band-like matrix- or lattice-type components used for coating are filled with this further material.

[0082] It should be further understood that this does not necessarily mean that the additional material fills the entire volume, and that although the distribution of the deposited additional material takes place within the entire free space region, this does not mean that the additional material fills the entire volume. In other words, the additional material introduced into the free space region can be characterized by the fact that it embodies a porous, generally open-porous structure.

[0083] For this purpose, the winding material, i.e. the component material, is passed through or in the process space at an effective flux Φ 有効 The winding material is then passed several times through the propagation field, or current induced by the process source, so that the winding material flows through the process space at a flux Φ 有効 In order to enhance the treatment effect, the material is moved in a serpentine manner through the treatment field, so that the material moves in the acute angle of the flux's basic direction of action and is pulled by the flux, so that the material is also transported at an acute angle.

[0084] In most process sources, the effects considered for interaction are characterized by a preferred direction. This can be understood to mean that the flux propagates primarily in a certain direction. This direction is called the principal flux direction or primary direction. Although the majority of interactions act in a given direction, effects also occur in an angular distribution. That is, there is a distribution of effects in different directions in space, which can be described as a variance of the angular distribution of effects.

[0085] For example, in ion processing, interaction refers to the interaction between energetic ions and the surface of the medium being processed, such as a construction material, which causes the ions to move in a preferred, predefined direction. For example, collisions with neutral particles and interactions with particles of the same charge result in an angular distribution of moving ions that is evident during surface processing.

[0086] Therefore, an angular distribution of effects is observed in this case too. In the case of coating, the movement of the particles of the material to be deposited also preferably runs in a given direction, which represents the basic flow direction of the coating process. In the coating process, this direction is determined by the thermal conditions. The flux Φ 有効 and that preferred direction always extends from the energetically highest state, i.e. from the light emitting surface of the process medium or process source, through which the deposited material, e.g. vaporized material or vaporized particles, generated in the process tool passes, i.e. from the region having the highest temperature, to the energetically lower state, i.e. the region where the lowest temperature exists.

[0087] Thus, the substrate to be coated is intended to be in its lowest energy state, as is the material of construction. Collisions with other neutral particles, e.g. gas atoms, or charged particles or photons, will create an angular distribution of particles that will deposit on the substrate surface, again exhibiting an angular distribution of effects.

[0088] Furthermore, it is envisaged to close existing free space areas of the matrix-like or lattice-like component material used as winding material, which is covered by linear and nodal supports or by linear and nodal supports already coated with a material covering, but closing with a material that covers the surface but does not fill the volume, and which does not require the covering layer of material to be completely closed, but which may have a porosity, preferably an open porosity in many applications.

[0089] In many applications, the porosity of the deposited layer is even a very important requirement. The deposited layer is therefore important in the sense that it covers, in the sense that it covers, the free space area of ​​the component material. It is therefore quite possible that the layer covering the free space area consists of several components, which together completely cover the free space area. This layer does not have to completely cover the support or the already coated support, but can be incorporated into partial areas of the support, for example the inner edge of a linear support.

[0090] In this process, it is envisaged that the component material passes once through a treatment field generated in a process space or process source, whereby the component material is drawn through the treatment field at an acute or very acute angle to the determined flux direction (flow direction), and the material used for coating is deposited in particular in the area of ​​the linear supports, but also in the area of ​​the nodal supports. This coating step is carried out to such an extent that the free space areas of the component material are completely covered by the layer, without necessarily completing the direct connection to the adjacent linear supports.

[0091] In this way, the matrix or lattice-like component material, which is characterized by a large free space area, is converted into a film-like material that can be further processed using conventional prior art film processing techniques.

[0092] Such a covering of the free space areas of the matrix or lattice-like component usually serves the purpose that in a further step, i.e. in a second coating step which is technically different from the first coating step, a layer of one or more materials can be built up on the upper and / or lower side of the rolled material by vacuum technology, i.e. by a vacuum coating step. The covering layer (cover layer) is useful for achieving an overall coating comparable to the coating of a film. Furthermore, in the second coating step, it is also possible to fill the empty spaces of the matrix or lattice-like component with the material deposited in this coating step.

[0093] These coating processes produce components or films of functional materials surrounded by a usually porous but compact coating that look similar or only slightly different from the functional materials in film form, and are therefore often referred to as functional foils, e.g. electrode foils for electrode applications, even though this name does not reflect the actual facts.

[0094] The above-described features and advantages of the present invention will be better understood after careful consideration of the following detailed description of the presently preferred, non-limiting exemplary embodiments of the invention, taken together with the accompanying drawings. [Brief description of the drawings]

[0095] [Figure 1] FIG. 1 shows in principle two different prior art process sources. [Diagram 2] FIG. 2 shows an exemplary winding device according to the invention in a vacuum coating plant for matrix or lattice-like construction materials. [Diagram 3] FIG. 3 shows a further exemplary winding device according to the invention. [Figure 4]Fig. 4a shows a winding device for a matrix or lattice of components, while Fig. 4b shows a further exemplary winding device according to the invention in a vacuum processing device with a two-zone or space design. [Diagram 5] 5a-5f are snapshots of a top view of a matrix or lattice of increasing layers of component material moving relative to one another. [Figure 6] FIG. 6 shows a view of the winding device according to the present invention installed in a process space. [Figure 7] FIG. 7 shows a diagram illustrating a further exemplary winding device. [Figure 8] Figure 8a shows a schematic diagram of the processing step, in particular the coating step, and Figure 8b shows a principle diagram of the processing, in particular the coating, by means of a winding device according to Figure 4b. [Figure 9] FIG. 9 shows a schematic diagram of a coating to explain the layer structure. [Figure 10] 10a-c show an exemplary vacuum processing apparatus having different process sources. [Figure 11] 11a-c show an example block diagram of a vacuum processing apparatus having different process sources in different modules. [Figure 12] FIG. 12 shows schematic diagrams of layer structures of matrix- or lattice-like constituent materials 18 on linear supports in two variations. [Figure 13] FIG. 13 is a schematic diagram showing the filling of free space with a matrix or lattice-like component material 18. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0096] Figure 1 is a principle drawing of two different treatment media 11 or process sources from the prior art, which is useful for defining in more detail the terms treatment tool 11, field, current, flux, effect and effect intensity, as well as the terms effective flux 13, given direction of effect of the flux, principle flow propagation direction or flow propagation. In Figure 1, two different geometries of treatment tools 11 or process sources used in vacuum technology are shown diagrammatically and generally. One of the diagrammatically generalized treatment tools 11 has a cylindrical design, the other a cubic design.

[0097] Also, in principle, the treatment tool 11 can have any other shape. The schematic and general shape shown in Fig. 1 reflects the most common design of such equipment. However, it is not uncommon to use other shapes, for example composite shapes combining cubic and cylindrical elements. The treatment tool 11 represents an assembly that emits a field or a current, i.e. it is the source from which a flux is generated.

[0098] The flux 13, which is often a field or current generated by the processing tool 11 or process source 11, flows from the surface into the free space of the vacuum chamber. The spatial region where the effect of the flux 13 is felt and leads to a yield by interaction with the substrate to be coated is designated as the effective range of the flux. The surface 12 through which this flux 13 extends is highlighted in FIG. 1 and is designated as the effect surface 12. Its existence is due to the fact that the process source 11 does not represent the size of a point, but is always an object with a finite geometrical extent in three dimensions, and therefore the emission of the effect always takes place from a surface structure (planar structure), i.e. a surface.

[0099] The effect caused by the flux represents a physical and / or chemical interaction process acting on a solid, or on an area close to its surface, called the substrate for its special application in vacuum technology. This effect is always associated with an energetic influence on the substrate, i.e. the transfer of energy, and therefore we denote this effect as energy input to the substrate.

[0100] Quite different physical and / or chemical effects or reactions can occur at or near the surface of the substrate as a result of the effects of the flux 13. At this point, we list a few of the many possible effects or reactions in order to understand the meaning of the effects or reactions.

[0101] The effect of the propagated flux 13 can, for example, cause cleaning of the substrate surface. Activation processes can be induced at the substrate surface or in areas close to the substrate surface by individual effects. Furthermore, in this substrate area, special effects can be utilized to perform physical and / or chemical etching. Furthermore, again depending on the properties of the flux 13, specially designed effects such as oxidation processes or other chemical reactions can be induced in the surface area or on the surface of the substrate. Furthermore, the substrate surface can be coated with one or more materials. In this case, the evaporated material of the coating process represents the flux and the layer deposited on the solid part of the substrate constitutes the special effect. According to the invention, a matrix-like or lattice-like constituent material 18 constitutes the flexible substrate 18.

[0102] The effective flux 13 is to be understood as that spatial extent 13 of the flow that can affect the substrate, i.e. cause a physical and / or chemical effect or reaction with the substrate, i.e. bring its effects to fruition at its surface or in areas close to the surface. In technical applications, such as those used in vacuum devices, the spatial extent of the effective flux 13 is usually limited so that the intensity has approximately the same magnitude or the same order of magnitude at all points in space. This limitation can be given with the help of equation (3) and is therefore an arbitrary definition, but it means a sensible measure from the technical point of view. The length 15 of the extent of the confined action field, determined in a direction perpendicular to the flux outlet face 12, is denoted the flux extent 15.

[0103] Very often, between the flux exit surface 12, from which the field or current of the process tool 11 is emitted, and the available flux 13, there exists a spatial region 14 of finite and therefore limited extent, which is characterized in that the desired effect may already be in force, i.e. already usable, but in which the field or current still acts, the forces of which, when interacting with the substrate, may cause reactions in the process source 11 or damage and irreversibly affect the substrate. For this reason, the substrate must not enter this area during processing. This spatial region therefore constitutes a forbidden spatial region 14 of the substrate, and is therefore denoted the forbidden band 14.

[0104] The flux 13 propagates in a preferred direction 16 determined by the process source 11 and the flux exit surface 12, which can be considered as the main direction 16 of propagation of the flux 13, i.e. the propagation takes place in a fixed and predetermined direction given by the source and the flow exit surface 12. In principle, when the flux 13 interacts with the surface of the solid components of the substrate or with those regions close to the surface, an effect arises from this preferred direction 16, i.e. the main direction 16. Due to scattering processes, reflection and similar processes, this effect can be subject to an angular distribution 17 that can weaken but not eliminate the strength of the effect. Thus, interactions occur that are influenced by the angular distribution 17.

[0105] In Fig. 2 an exemplary winding device 1 according to the invention is shown in a vacuum processing device for a matrix or lattice-like component material 18 moving through the winding device 1, a so-called "roll-to-roll" system 1. The flexible matrix or lattice-like component material 18 moves in the winding direction 19 on two roll groups 20 and 21 or roll groups 20 and 21 consisting of a number of large rolls 23 or large rolls 23 and a number of small rolls 24 or small rolls 24. This design with large rolls 23 and small rolls 24 is exemplary and can be adapted accordingly by the skilled person. For example, it is also possible to use only small rolls 24 for space reasons.

[0106] In a free area 26 of a decompressible process space or area, located between the first roll group 20 and the second roll group 21, where no rolls or rollers are required, the flexible matrix or lattice-like components 18 move in opposite directions, one on top of the other, at a small distance 25. The amount of length 25 indicated by two arrows pointing in opposite directions indicates the distance 25 between the top and bottom layers of the matrix or lattice-like components 18 conveyed in opposite directions.

[0107] It is envisaged that at least one effective flux 13 of at least one treatment tool 11 arranged in one of the free areas 26 simultaneously penetrates the first and second layers of the flexible substrate 18, i.e. the flexible matrix- or lattice-like constituent material 18, during their opposite parallel transport through the free area 26 at a small distance 25 from each other, the treatment tool 11 and the effective flux 13 are not shown in Fig. 2. If two or more layers of the flexible substrate 18 are simultaneously transported parallel to each other and closely spaced apart through the free area 26, then the two or more layers are also penetrated by the effective flux 13 of the treatment tool 11, i.e. all layers of the flexible substrate 18 are penetrated.

[0108] Moreover, such a small distance between two adjacent and oppositely conveyed layers of the matrix or lattice-like component material 18 ranges between about 1 mm and 10 mm, in particular this distance is about 2.5 mm.

[0109] The guidance of the flexible matrix or lattice-like component 18 over the five smaller rolls 24 and three larger rolls 23 of the first roll group 20 and over the four smaller rolls 24 and four larger rolls 23 of the second roll group 21 is shown in Figure 2 by corresponding directional arrows shown on the matrix or lattice-like component 18. It can be seen, for example, that a first layer (top layer) of the matrix or lattice-like component 18 is transported in a first transport direction 64 from roll 24a of the first roll group 20 to roll 24b of the second roll group 21. In the second roll group 21, the matrix or lattice-like constituent material 18 is deflected via the small roll 24b, the large roll 23a and the small roll 24c so that the matrix or lattice-like constituent material 18 is transported in a second transport direction 65 from the roll 24c of the second roll group 21 to the roll 24d of the first roll group 20 in a second layer closely spaced from the first layer of the matrix or lattice-like constituent material 18.

[0110] In the first roll group 20, the matrix or lattice-like component material 18 is deflected via the small roll 24d and the large roll 23b so that the matrix or lattice-like component material 18 is transported again in the first transport direction 64 from the large roll 23b of the first roll group 20 to the small roll 24e of the second roll group 21 in a third layer of the matrix or lattice-like component material 18 closely spaced from the second layer of the matrix or lattice-like component material 18.

[0111] In the second roll group 21, the matrix or lattice-like component material 18 is deflected via the small roll 24e and the large roll 23c so that the matrix or lattice-like component material 18 is transported again in the second transport direction 65 from the large roll 23c of the second roll group 21 to the small roll 24f of the first roll group 20 in a fourth layer of the matrix or lattice-like component material 18 closely spaced from the third layer of the matrix or lattice-like component material 18.

[0112] In the first roll group 20, the matrix or lattice-like component material 18 is deflected via the small roll 24f, the large roll 23d and the small roll 24g so that the matrix or lattice-like component material 18 is transported again in the first transport direction 64 from the small roll 24g of the first roll group 20 to the large roll 23e of the second roll group 21 in the fifth layer of the matrix or lattice-like component material 18 closely spaced from the fourth layer of the matrix or lattice-like component material 18.

[0113] In the second roll group 21, the matrix or lattice-like component material 18 is deflected via the large roll 23e and the small roll 24h so that the matrix or lattice-like component material 18 is transported again in the second transport direction 65 from the small roll 24h of the second roll group 21 to the small roll 24i of the first roll group 20 in a fifth layer of the matrix or lattice-like component material 18 closely spaced from the fourth layer of the matrix or lattice-like component material 18.

[0114] The matrix or lattice-like component 18 is then transported, either directly or by further rolls (not shown), towards a winding module 39 (not shown) which takes in the matrix or lattice-like component 18. In the example of Fig. 2, this is done in such a way that the matrix or lattice-like component 18 is deflected via the small roll 24i and the large roll 23f and is further transported to the large roll 23g without passing through the free area 26.

[0115] An unwinding module 38, not shown in FIG. 2, is arranged, for example, such that the matrix or lattice-like component material 18 is fed to the first small roll 24a, either directly or by a further roll, not shown.

[0116] The process of deflecting the matrix or lattice-like component 18 and transporting it between the first roll group 20 and the second roll group 21 and vice versa is carried out, for example, six times in FIG. 2, so that the matrix or lattice-like component 18 moves in closely spaced layers through the free area 26 in the process space or process area. In a six-layer guide direction of the matrix or lattice-like component 18, as seen from the processing tool 11 or process source 11, not shown in FIG. 2, an image result corresponding to the illustration in FIG. 5f is obtained. Compared to a single-layer coating, in which the process source "sees" the matrix or lattice-like component 18 as shown in FIG. 5a, the free space of the matrix or lattice-like component 18 from the "view" of the process source 11 is significantly reduced. It should be noted that the illustrations in FIG. 5 correspond to snapshots respectively and therefore cannot fully illustrate the dynamics of the process that actually takes place.

[0117] Thus, the material to be coated or the material used in the surface treatment of the solid matrix or lattice-like component 18 will encounter six layers of matrix or lattice-like component 18, allowing the treatment or coating to be carried out much more effectively than would be possible with only one layer of matrix or lattice-like component 18.

[0118] There is no intention to limit the number of layers to six. The number of layers as well as the corresponding adjustment of the first roll group 20 and the second roll group 21 can be appropriately performed by a person skilled in the art.

[0119] Likewise, the winding device 1 does not necessarily have to be arranged horizontally, but can also be arranged vertically or at an angle. If necessary, the layers of the matrix or lattice of the component material 18 do not necessarily have to be stacked one on top of the other, but can be arranged side by side.

[0120] Although not shown here, it is envisaged to arrange corresponding processing tools 11 or process sources 11 in the free area 26 of the process space, by means of which it is possible, for example, to apply a material suitable for coating to the matrix- or lattice-like building material 18. Such processing tools 11 can be arranged in the free area 26 on both first sides of the closely spaced layers of the matrix- or lattice-like building material 18, preferably parallel to each other and running in opposite directions (e.g. upwards), or they can also be arranged in the free area 26 on both second sides (e.g. downwards). The number of processing tools 11 arranged in the free area 26 can also vary.

[0121] The winding device 1 according to the invention is suitable for surface treatment processes, such as, for example, ion treatment with high-energy ions, as well as for coating processes which result in an enveloping coating of the linear and nodal supports of a matrix or lattice-like component 18 and, if necessary, serve to fill in the free spaces of the matrix or lattice-like component 18, with possible limitations.

[0122] In Fig. 3, another exemplary "roll-to-roll" device 2 that meets the object of the present invention is shown diagrammatically. The winding device 2 comprises three roll groups 20, 21, 22. The winding device 2 comprises two free areas in the process space, a first free area 27 and a second free area 28, through which the matrix or lattice-like component 18 is transported back and forth several times. A shielding plate 29, shown here only in one place by way of example, serves to shield possible influences of the flux Φ generated by the fields or currents of the treatment device 11 and serves to protect the roll or rolls arranged behind the matrix or lattice-like component 18 that would be directly influenced from said influences.

[0123] The matrix or lattice-like component material 18 is guided back and forth several times both in the free area 26 in FIG. 2 and in the first and second free areas 27 and 28 in FIG. 3. In the process, the matrix or lattice-like component material 18 moves in opposite directions, one above the other, at a small distance 25 from each other. Thus, in FIG. 3, the matrix or lattice-like component material 18 is guided in a first direction, such as a first conveying direction 64', through the first free area 27 and in a second conveying direction 65' opposite to the first conveying direction 64'. Furthermore, in FIG. 3, the matrix or lattice-like component material 18 is conveyed in a third direction, such as a third conveying direction 66, through the second free area 28 and in a fourth conveying direction 67 opposite to the third conveying direction 66. This process can be continued with further layers of the matrix or lattice-like component material 18, as exemplarily depicted in FIG. 3. An angle is provided between the first and third conveying directions (64', 66) and the second and fourth conveying directions (65', 67), which angle can be in the range of more than 0 degrees and less than 180 degrees, and in particular in the range of more than 30 degrees and less than 150 degrees. In the example of FIG. 3, an angle of about 60 degrees is selected.

[0124] In the example of Fig. 3, the matrix or lattice-like component material 18 is first moved in a first transport direction 64' from the large roll 23a of the first roll group 20 through the first free area 27 towards the large roll 23b of the third roll group 22. The matrix or lattice-like component material 18 is then deflected on the large roll 23b and transported for the first time by the third roll group 22 through the free area 28 to another large roll 23c of the second roll group 21 in the third transport direction 66.

[0125] The flexible matrix or lattice-like component material 18 is deflected across the large roll 23c and the small roll 24a and transported a second time in the fourth transport direction 67 through the second free area 28 from the small roll 24a via the small roll 24b of the second roll group 21 to the large roll 23d of the third roll group 22.

[0126] In the third roll group 22, the matrix or lattice-like component material 18 is deflected through the large roll 23d and the small roll 24c and transported a second time from the third roll group 22 through the free area 27 in the second transport direction 65' to the small roll 24d of the first roll group 20.

[0127] Then, in the first roll group 21, the matrix- or lattice-shaped constituent material 18 is deflected via the small roll 24d, the large roll 23e and the small roll 24e, and is transported a third time from the first roll group 20 to the small roll 24f of the third roll group 22, again in the first transport direction 64' through the free region 27.

[0128] In the third roll group 22, the matrix or lattice-like component material 18 is then deflected via the small roll 24f, the large roll 23f as well as another large roll 23g and a small roll 24g and is transported for a third time from the third roll group 22 to the small roll 24h in the second roll group 21, again in the third transport direction 66 through the free area 28.

[0129] In the second roll group 21, the matrix or lattice-like component material 18 is then deflected via the small roll 24h, the large roll 23h and the small roll 24i and transported for a fourth time from the second roll group 21 to the small roll 24k in the third roll group 22 again in the fourth transport direction 67 through the free area 28.

[0130] In the third roll group 22, the matrix or lattice-like component material 18 is then deflected via the small roll 24k, the large roll 23i, as well as the large roll 23k and the small roll 24l, and is transported for a fourth time in the second transport direction 65' from the third roll group 22 to the small roll 24m of the first roll group 20, again through the free area 27.

[0131] After reaching the small roll 24m, the intended processing step, for example a coating step, has been completed and the matrix or lattice-like component material 18 is transported to a winding module 39. In the example of Fig. 3, this transport takes place via the large rolls 23l, 23m, 23n, 23o.

[0132] The number of layers is not intended to be limited to four, and the number of layers can be adjusted as appropriate by one skilled in the art.

[0133] The unwinding module 38, not shown in FIG. 3, is arranged, for example, in such a way that the matrix or lattice-like component material 18 is fed to the first large roll 23a, either directly or by means of a further roll, not shown.

[0134] The winding device 2 is also suitable for surface treatment processes, such as ion treatment with energetic ions, but in particular for coating processes used to fill free spaces of a matrix or lattice-like component 18. If appropriate, it can be applied in coating processes for producing surrounding coatings of linear and nodal supports of a matrix or lattice-like component 18.

[0135] In FIG. 4, two further winding systems are shown diagrammatically, namely a "roll-to-roll" system 3 in FIG. 4a and a "roll-to-roll" system 4 in FIG. 4b. In FIG. 4a, a winding system 3 is shown in which a flexible matrix or lattice-like component material 18 is moved through the roll system in a single layer. The rolls 23 are arranged such that the matrix or lattice-like component material 18 is guided at an acute angle between three rolls in each case. In each case, three rolls 23 are arranged accordingly, two adjacent upper rolls with a lower roll located therebetween or two adjacent lower rolls with a top roll located therebetween. For many applications, this angle is ≦10° (less than or equal to 10°).

[0136] FIG. 4b shows diagrammatically a “roll-to-roll” system 4 consisting of two roll groups 20, 21. In principle, the winding device 4 has four free areas, two free areas 27 and two free areas 28, through which the flexible substrate 18 or the matrix or lattice-like component material 18 is transported back and forth (in one round trip). The matrix or lattice-like component material 18 thus travels in two layers in opposite directions through the free areas 27 and 28. The angle between the layers of the matrix or lattice-like component material 18 is again quite acute. In many applications, this angle is ≦10° (less than 10°).

[0137] The winding devices 3, 4 of Figures 4a, 4b are suitable for surface treatment processes such as ion treatment with high-energy ions, but in particular for coating processes which produce a free-space coating of a matrix or lattice-like component 18. When the angles between the three rolls 23 in Figure 4a and between the layers in Figure 4b are very acute, with the main direction 16 of the particles of coating material released by the treatment tool 11 representing one leg of the acute angle and the moving matrix or lattice-like component 18 representing the other leg, a relatively thin layer is formed during the coating process on the linear and nodal support parts of the matrix or lattice-like component 18, for example at the ends.

[0138] If there is a treatment tool 11 above the top layer or below the bottom layer of the matrix or lattice material 18, it will send its propagation field or its current as a flux Φ at an angle to the matrix or lattice material 18 to interact with the surface or near-surface regions of the solid components of the matrix or lattice material 18. Because the percentage of the surface area of ​​the layer of the matrix or lattice material 18 is small, the percentage of the solid components in the total surface area occupied by the layer is small. Due to the fact that multiple layers of the matrix or lattice material 18 move in close proximity to each other, the flux Φ 有効 The solids fraction of the winding material exposed to the influence of the

[0139] In FIG. 5, the increase in solid content due to the overlap of individual layers of the matrix or lattice-like component 18 is shown diagrammatically. FIG. 5a is a diagram showing a cross-section of a layer of fabric corresponding to the matrix or lattice-like component 18, illustrating a large mesh (mesh) flat weave. FIG. 5b shows a snapshot of two such layers overlapping, FIG. 5c shows a snapshot of three layers overlapping, FIG. 5d shows a snapshot of four layers overlapping, FIG. 5e shows a snapshot of five layers overlapping, and FIG. 5f shows a snapshot of six layers overlapping. It can be clearly seen that the more layers overlap, the more the field of view is filled with the solid surface portion of the support when looking at the top or bottom side of the matrix or lattice-like component 18. On this basis, the effective flux Φ developed by the processing tool 11 as a result of the formation of layers of the matrix or lattice-like component 18 can be calculated. 有効 This allows for surface treatment steps to be performed on the solid components of the roll, since in this spatial region there is significantly more solid material capable of achieving the desired effect than during the transport of a single layer of matrix or lattice-like component material 18 through this region.

[0140] In FIG. 6, the influence of the matrix or lattice-like component 18 moving in the winding system 1 is shown in a schematic and generalized manner by the arrangement 5 based on the winding system 1 of FIG. 2. In many cases, the influence of the treatment of the solid component, i.e. its surface or its near-surface areas, can be equalized. In FIG. 6, the influence of the matrix or lattice-like component 18 is caused by two treatment devices 11, which are the source of the propagation of a flux 30 in the free area 26 between the roll systems 20 and 21. The respective propagation fields or currents, i.e. the fluxes Φ, emitted by the respective treatment devices 11, impinge on the matrix or lattice-like component 18 and act on its surface or on its near-surface areas of the solid component. One of the two treatment devices 11 is arranged above the top layer of the matrix or lattice-like component 18 in the free area 26, and the second one is arranged below the bottom layer of the matrix or lattice-like component 18. The extent of the flux 30 extends from the flow outlet face 12 of the treatment tool 11 towards the matrix or lattice-like component 18, with the forbidden band 14 and the region of available flux 13 being penetrated by the flux 30. The extent of the region traversed by the flux 30 is characterized by its main direction 16 (see FIG. 1 ) so that its action effects occur in those solid components of the layer of the matrix or lattice-like component 18 which the flux is free to strike.

[0141] Furthermore, there is a very high probability of an angular distribution of effects occurring near the surface of the matrix or lattice-like component material 18. This results in a greater number of effects affecting the near surface area.

[0142] The use of two treatment devices 11, which are shown diagrammatically and abstractly in the illustration of FIG. 1, is intended to reflect the technically practical possibility that the matrix or lattice-like building material 18 can in principle be influenced, for example in the form of a treatment, from two qualitatively different directions, i.e. both above and below the matrix or lattice-like building material 18 being transported in layers. By above and below, it is meant that in principle there are two opposite sides on which the matrix or lattice-like building material 18 extends in two dimensions. The treatment devices 11, which are the source of the effect-generating flux, can be arranged in two spaces or free areas 26, which span the opposite directions of the layer package formed by the meandering movement of the matrix or lattice-like building material 18. The treatment devices 11, which are used as the source of the effect-generating flux, can be arranged in two spaces or free areas 26, which span the opposite directions of the layer package formed by the meandering movement of the matrix or lattice-like building material 18. Both sides, i.e. from the top and also from the bottom, can be set at different angles to the main direction of propagation 16 of the effect-generating flux (see FIG. 1). The flux also impinges on solid portions of layers located between the top and bottom layers. The design of the treatment tools 11 used, from which main directions 16 and at what angles they radiate their fields or currents, and how many of them there are, depend on quite a number of different conditions and parameters, including design conditions, the requirements of the particular treatment process being delivered, treatment intensity, prevention of mutual interference between adjacent treatment media, and several other conditions and parameters.

[0143] The arrangement 5 shown in FIG. 6 can be used for surface treatment processes such as cleaning, etching, chemical reaction treatments, such as oxidation, nitridation, polymerization, etc. of the matrix or lattice-like constituent material 18 that constitutes the wound material.

[0144] When implementing a material to be coated as a solid component of a matrix or lattice-like construction material 18, i.e. an enveloping coating of linear and nodal supports, the arrangement 5 shown in FIG. 6 is preferably used in conjunction with a winding system 1.

[0145] Such a treatment medium 11 or treatment tool 11 can be a device for cathodic sputtering, such as a planar magnetron, a tubular magnetron or a sputter ion source, or a thermal evaporation device, such as a resistive evaporator, an electron beam evaporator, an arc evaporator or a laser evaporator, and some other device. In order to ensure the enveloping coating of the linear and nodal supports, it is necessary to select a suitable operating pressure for this purpose, which is usually in the range of 1·10 -3 mbar~5·10 -2 The range is between 100 and 2000 mbar.

[0146] It should be noted that there are treatment devices 11 that can only emit the field or current from bottom to top. Others, on the other hand, have the technical possibilities to send the radiation field in all spatial directions. The units must be arranged taking into account the specific conditions of these devices.

[0147] The core element of the arrangement 6 shown in Figure 7 is again the basic device 1 of Figure 2. With the help of Figure 7, two important aspects regarding the influence of the matrix or lattice-like component material 18 are pointed out.

[0148] First, it is shown, in a schematic and abstract manner, that the influence of the matrix or lattice-like material 18 can be carried out at a very specific fixed angle 31, for example the angle α. When determining the angle α, i.e. the angle 31 formed between the preferred or main direction 16 of the flow and the amount of movement 32 of the layer structure of the matrix or lattice-like material 18, it is essential to ensure that the matrix or lattice-like material 18 moves within the range of the effective flux 13. Therefore, great care must be taken to ensure that the matrix or lattice-like material 18 does not come into contact with the region of the forbidden band 14.

[0149] On the other hand, it shows, in a schematic and abstract manner, that in various applications cases may arise or technical requirements may arise where an effect originating from the treatment tool 11 can be influenced by a second effect, and therefore this effect is called a secondary effect and is understood as an influencing effect. As a source of the secondary effect, a second treatment tool 33 is used, which will be called the effect influencing tool 33. This source emits its flux 34, i.e. a second field or current, which also produces an effect. This second flux 34 also usually originates from the flux outlet face of the effect influencing tool 33. The peculiarity of this emitted special flux 34 interacts with the flux 13, whose origin is the treatment tool 11, and is emitted through its flux outlet face 12, but does not produce, at the surface or near-surface areas of the solid components of the matrix or lattice-like constituent material 18, the reaction that is to be achieved as an effect, i.e. as a treatment. That is, the secondary effect does not give a direct or immediate contribution to affecting the matrix or lattice-like component material 18. Based on the interaction with the flux emitted by the treatment tool 11, the secondary effect causes its influence only on the surface or near-surface regions of the solid component of the matrix or lattice-like component material 18. This interaction can increase, remain unchanged or decrease the strength of the effect. It depends on the parameters of the effect influence tool 33 and the associated flux 34. However, the interaction between the two fluxes 13 and 34 will in any case result in a further additional orientation of the effect affecting the surface or near-surface regions of the solid component of the matrix or lattice-like component material 18. In general, a new angular distribution results from the preferred direction 16 with its angular distribution 17 as a function of the second flux 34 with its angular distribution 36.

[0150] In the extreme case, the secondary directions 35 can dominate or even completely obscure the primary directions 16 in a new angular distribution. In this way, it is possible to influence, so to speak, the interior of the layer stack, i.e. the free areas of the layers of the matrix or lattice-like component material 18 which move in a meandering manner relative to one another, and to influence the solid components located in the layers, so that a correspondingly effective processing of the matrix or lattice-like component material 18 is achieved.

[0151] If the flux is a flow of particles and its effect is the accumulation of layers, then a coating process occurs. The coating components, i.e. the particles to be deposited, can only be deposited where they can penetrate into the free space of the serpentine layers of the winding material, even if they can. The deposition and bonding of the deposited particles can only take place on solid components. In this case, these are linear or nodal supports of the matrix or lattice-like component material 18, which can also already be coated. This means that only this part of the particles generated for the coating contributes to the coating effect. The rest of the particles are mostly lost. For this reason, it is proposed to provide a relatively acute angle α between the layer movement and the primary direction of the main propagation direction of the flux 13 generating the effect, so that as much surface area as possible from the linear elements is available for deposition. Furthermore, the superposition of the individual layers creates a pseudo-wall of solid components, which on the one hand extremely limits the penetration of the coating particles through the entire serpentine layers moving against each other, and on the other hand extremely reduces the loss rate of the coating process. This results in a significantly larger proportion of the deposited particles being deposited in the free space of the matrix or lattice-like component material 18.

[0152] In Figure 7, the treatment tool 11 is positioned above the serpentine layer of matrix or lattice-like component material 18. However, it could also be positioned below it.

[0153] In particular, when coating with one or more materials not only the linear support with or without a surrounding coating, but also the remaining support with or without a surrounding coating, i.e. in such a way that the coating of the free space areas of the matrix or lattice-like component 18 is achieved without the aim of volumetric coverage filling with the substances used for the coating, the arrangements 7 shown diagrammatically and abstractly in FIG. 8 can be used, namely the arrangement 7a in FIG. 8a and the arrangement 7b in FIG. 8b. It should be noted that these figures are exemplary and are used only to clarify the principles of coating. Which coating units, how many, how and how to arrange them are ultimately determined by the respective conditions. Such conditions include, for example, the size of the space available for the aggregates to be placed, the prevention of mutual interference, the material properties of the matrix or lattice-like component 18 to be coated, etc.

[0154] The principle outlined in FIG. 8 is used for coating of supports or envelope-coated supports, in particular linear supports. If the coating process is sufficient, a thin layer is formed, the extension of which can reach the next support, so that contact or bonding with the support does not necessarily occur. However, the extension of this layer causes a coating effect, i.e. the free space between the supports or coated supports is covered by this layer without creating a volume-filled state. However, an envelope coating is formed. In this case, multiple coating layers are formed that entirely cover the free space, allowing the free space area to be completely covered.

[0155] Such a method is always used when forming a layer structure above and / or below the matrix or lattice-like component material 18. This can be achieved by using conventional coating processes.

[0156] In Fig. 9, an arrangement 8 is shown in a schematic and abstract manner, reflecting the construction method of a layer of a matrix or lattice-like component 18. The arrangement 8 is divided into two parts. As shown by the arrangement 7a in Fig. 8, the first sub-arrangement 37a serves to close the free space of the matrix or lattice-like component 18 used as flexible substrate 18 with the material to be coated in the form of a coating. The second sub-arrangement 37b corresponds to a conventional coating structure using a processing tool 11 to enable coating of one or more materials on the upper and / or lower sides in a vacuum, based on the techniques of conventional film processing.

[0157] In FIG. 10, the arrangement 1 shown diagrammatically in FIG. 2 is integrated into a simple embodiment of a "roll-to-roll" vacuum processing device 9. The vacuum processing device 9 has a modular structure and is composed of an unwinding module 38, a processing module 40 and an unwinding module 39. Each module has a pump connection 41 that allows pumping off via a respective pump-out device 42, which can consist of various combinations of valves, high vacuum pumps and back pumps of the individual chambers or modules. Adjacent modules are connected to each other through a common opening, which must be sealed against the outside, i.e. against the atmospheric pressure area. Therefore, there are no locks between each module and only one pumping system consisting of vacuum pump tube feed, valves, pre-vacuum pump and high vacuum pump can evacuate (depressurize) the chamber system.

[0158] In Fig. 10a, four processing tools 11 are installed in a processing module 40 of a vacuum processing device 9, as an example. In the case of Fig. 10a, these assemblies are ion sources 11 that emit linearly accelerated high energy ions for treating the surface of a solid portion of a serpentine matrix or lattice-like component material 18.

[0159] In Fig. 10b, Fig. 10c, two processing tools 11 are used as an example in the processing module 40 of the vacuum processing device 9. In this case, these units are cathode sputtering tools 11, i.e. in Fig. 10b respectively planar magnetron 11 and in Fig. 10c respectively tubular magnetron 11, with the help of which the coating process is carried out above and below the meandering moving matrix or lattice-like component 18. This arrangement is used to realize the surrounding coating of the linear and nodal supports of the matrix or lattice-like component 18. Other conditions necessary for forming the surrounding coating in this process, such as the parameters of the working pressure, must be set according to the requirements of the process.

[0160] In all three modules, namely unwinding module 38, treatment module 40 and winding module 39, substantially equal pressure conditions exist and each chamber can be pumped out separately. The pressure range is determined according to the requirements of the treatment tool 11. Figure 10 is intended to reflect the variability of treatment options possible with the aid of the winding device according to the invention, here representing configuration 1 of Figure 2, for a matrix or lattice-like component material 18.

[0161] In Fig. 11, different equipment configurations 10a, 10b, 10c are shown, all of which represent "roll-to-roll" vacuum processing devices, and the principle of effective processing of matrix or lattice-like construction materials 18 is illustrated by means of different examples. All of the devices have an unwinding module 38 and a winding module 39, each of which has a pump connection 41 to which in each case a pump-out device 42 adapted to the specific function is connected, so that all of the modules can be evacuated separately.

[0162] In FIG. 11a a "roll-to-roll" vacuum processing apparatus 10a for internally filling the free spaces of a matrix or lattice-like component 18 with a coating material is shown diagrammatically and abstractly.

[0163] The first treatment step is carried out in module 43. In this step, ion treatment is carried out. By using the ion source 11, the surface of the solid components of the matrix or lattice-like construction material 18 is treated with energetic ions. At the same time, an activation treatment can take place. In order to be able to transfer the ion source 11 into its operating regime, the operating pressure is increased to 1·10 -04 mbar~8·10 -04 However, in the unwinding module 38, the pressure should be set in the range between 10 -01 Only pressure values ​​of 10 ...

[0164] The winding device for transporting the matrix or lattice-like component 18 in the module 43 corresponds to the winding device 1 shown diagrammatically in Figure 2. With the help of this device, the matrix or lattice-like component 18 can be moved in a serpentine manner past the four ion sources 11 used as an example, i.e. the two above and the two below the layer structure.

[0165] In order to avoid gas exchange between the module 44 and the module 43 as far as possible, a lock chamber 52 (for example a slit lock) is installed between these two chambers. The difference in the working pressure range between the two modules is smaller than the difference between the module 43 and the unwinding module 38. For this reason, the use of a slit lock 52 as shown in FIG. 11a between the modules 43 and 44 is sufficient for a great many applications. Also installed in the module 44 is a winding device 1, which is shown diagrammatically in FIG. 2. With the help of four tubular magnetrons 11, two magnetrons 11 respectively are arranged above and below the layer structure in which the matrix or lattice-like component material 18 is guided in a meandering manner, so that an enveloping coating of the linear and nodal support of the matrix or lattice-like component material 18 is produced. The magnetrons have a 1·10 -03 mbar to approx. 5·10 -01 Being able to operate in the mbar range, it is understandable why the pressure difference between module 44 and module 43 is smaller than between unwinding module 38 and module 43 .

[0166] In module 45, a vacuum arc spraying device 11 is installed as treatment tool 11. With the help of these units, the free spaces between the linear and nodal supports of the matrix or lattice-like component 18 coated in module 44 are filled with material. For this, the matrix or lattice-like component 18 is transported through a winding device 2 of FIG. 3. In this winding device 2, consisting of three roll groups 20, 21, 22, a two-layer pack is formed in which the matrix or lattice-like component 18 passes through the treatment medium in a meandering manner. On each layer side, a vacuum arc spraying device 11 is arranged, with the help of which the coating process for filling the free spaces is carried out. With the help of the second treatment medium 33, which in this application is a gas nozzle 33, in addition to the primary, i.e. preferred, direction of the particle stream generated by the vacuum arc spraying device 11, a further preferred direction is generated for part of the generated particle stream, which is called the secondary direction. Due to further interaction processes occurring near the surface of the matrix or lattice-like component 18, the generated particles develop a further angular distribution. Due to the interactions that occur during the coating process, the free space is filled with the coating material sprayed by the vacuum arc spraying device 11 .

[0167] The working pressure for vacuum arc spraying is 10 +02 mbar~10 +03 mbar, the difference in working pressure between module 44 and module 45, in which the coating unit operates, is also very large. For this reason, a roll airlock, through which the rolled material is transported, is installed between module 44 and module 45. In many applications, a lock chamber 51 with a roll lock is also required and must be installed between these two modules.

[0168] Usually there are no special requirements for the winding module 39, so its pressure range can be adapted to that of the pressure applied in module 45. For this reason, it is perfectly fine to install a slit lock 58 between these two modules.

[0169] In Fig. 11b, a "roll-to-roll" vacuum processing device 10 is shown diagrammatically for coating the top and bottom of the matrix or lattice-like component 18. In the module 46, as shown diagrammatically in Fig. 8, with the help of a winding device 7a, in particular the linear supports without or with a surrounding coating, but also the remaining supports, are coated with one or more substances in such a way that the coverage of the free space areas of the matrix or lattice-like component 18 is achieved without achieving a filling of the volume with the material used for the coating. If the coating process is sufficiently concentrated, a layer is formed, the extension of which can extend to the next support. This extension of the layer represents an object that covers the entire surface. That is to say, the free spaces extending between the supports and the surrounding-coated supports are covered with this layer that is piled up. This coating process often requires a large amount of coating material, so that it is useful to carry out this process by arranging several modules of the type of module 46 one after the other, for example before the module 47 is integrated.

[0170] To produce a coating of matrix or lattice-like component material 18, a tubular magnetron 11 is used in module 46 in FIG. 11b, which in each case separates or ejects or sputters off the material to be separated at an acute angle, which is stretched by the moving matrix or lattice-like component material 18, for example by three deflection rolls: the upper left deflection roll 53, the lower left deflection roll 54 and the upper deflection roll 55 adjacent to it on the right. Five tubular magnetrons are shown diagrammatically by way of example in FIG. 11b. The magnetrons are preferably arranged in such a way that the movement of the particles of the material to be sputtered off takes place approximately in the plane stretched by the matrix or lattice-like component material 18. By means of an acute angle, which is preferably ≦10° (less than 10°), it is achieved that in particular a linear support is coated, in such a way that a layer is built up on the solid component in the direction of impact of the particles from the treatment tool 11, i.e. from the tubular magnetron. Depending on the magnitude of the working pressure, this thinly grown layer (the thickness is determined by the width of the support) can also have a relatively pronounced porous structure. If the coating process is sufficiently intensive, the formed layer gradually begins to close the free space formed by the linear support. The working pressure of this module can be, for example, 1·10 -03 mbar ~ approx. 5-10 -01 in the mbar range.

[0171] In the module 47, the free space between the supports is coated with the same or another material, which is evaporated by the electron beam evaporator 11, so that the resulting evaporated particles of material penetrate the thinly covered matrix or lattice-like component 18 or are already coated with a small amount. In any case, the probability that the vapor flow 59 can completely penetrate the meandering matrix or lattice-like component 18 is extremely low, if not close to zero.

[0172] The winding device 1 in FIG. 2 is again used as a transport device for the winding material and executes a meandering movement of the matrix or lattice-like component material 18 in the opposite direction, so that the free spaces of the matrix or lattice-like component material 18 can be filled with the electron beam evaporator 11. The electron beam evaporator 11 is arranged only below the layer structure, since it irradiates the crucible in which the coating material is arranged with an electron beam, and the coating material evaporates from the crucible. The crucible therefore represents the actual source. All additional units, such as hollow cathodes for activating the evaporation cloud with plasma, are not shown.

[0173] The operating pressure range in which the electron beam evaporator 11 operates is 10 -05 mbar~10 -01 Depending on the particular pressure range, it may be preferable to use a lock chamber 51 as shown diagrammatically in Figure 10b, or a connecting device such as a roll lock or a slit lock.

[0174] Module 48 performs a coating process corresponding to conventional film coating, in which each side of matrix or lattice-like component material 18 is coated onto a respective large coating roller 56. In the case of FIG. 10b, the material to be deposited is vaporized by means of an electron beam evaporator 11, whereby a layer of vaporized material is deposited on both sides of matrix or lattice-like component material 18. The operating pressure range of module 48 is again 10 -05 mbar~10 -01 mbar, which is roughly equivalent to the pressure prevailing in module 47 when evaporating the same material. For this reason, there is no need to install a connecting device performing a locking function between modules 47 and 48. At most, a slit lock may be necessary under certain circumstances.

[0175] When the pressure value of the winding module 39 is higher than that of the module 48, it is preferable to set up a lock chamber 51, as shown in Fig. 10b, to cleanly separate the module 48 from the winding module 39. If the pressure value of the winding module 39 is approximately equal to that of the module 48, other connecting devices such as slit locks are sufficient.

[0176] In order to quickly close the free space with the material to be coated and to be able to perform the overcoat coating with another material, a “roll-to-roll” vacuum processing apparatus 10, shown diagrammatically in FIG. 11c, can be used.

[0177] Vacuum arc devices are used to close voids in matrix or lattice-like construction materials 18 based on thermal spraying. In this process, correspondingly large amounts of material need to be deposited. Vacuum arc spraying technology allows deposition rates that meet this requirement. However, in comparison with other vacuum deposition processes, the layers obtained with this coating process have a rather coarse structure, with the dimensions of the structural elements formed during the coating process being up to 10 μm. However, the advantage of this coating technology is the relatively fast closure of free spaces.

[0178] In the vacuum arc spraying process, as used in FIG. 4b, the matrix or lattice-like building material 18 is guided through a winding device 4 into a module 49. The working pressure of the vacuum arc spraying is 10 +02 mbar~10 +03 The operating pressure of the module 50 is typically 10 -05 mbar to 10 -01 mbar range, for this reason it is preferred to install a lock chamber 52 between modules 49 and 50 as a roll lock, allowing separate pumping out. Nevertheless, if large gas throughputs are required in both chambers, it is often necessary to install the lock chamber as a slit lock, as shown in Figure 11c.

[0179] When a roll lock is installed as the lock chamber 52, then in the module 50 various coating methods can be used which are also used for film coating. In the example in Fig. 11c, with the help of a tubular magnetron 11, both sides of the matrix or lattice-like component material 18 are coated.

[0180] FIG. 12 is a schematic diagram showing a layer structure of a matrix-like or lattice-like constituent material 18 on a linear support in two modified examples.

[0181] In the left part of FIG. 12, a matrix or lattice-like component material 18 is shown alone, in this example consisting of so-called weft threads (horizontal threads) 60 and warp threads (vertical threads) 61, from which a fabric is constructed that represents the form of the component material.

[0182] The center part of Fig. 12 shows the application of a matrix or lattice of material 18 from one side by a processing tool 11 (not shown). The main direction 16 of the processing tool 11 is shown. The center part of Fig. 12 shows the progression of the coating or layer growth in a top-to-bottom sequence.

[0183] As shown, the material being coated begins to build up or adhere to the linear supports of the matrix or lattice-like component material 18, here corresponding to weft yarns 60. If the application time is long enough, the entire three-dimensional free space spanning the linear and nodal supports will be covered or overlapped, but the free volume will not be filled in the process.

[0184] The layer 62 starts growing on a linear support. The growth of this layer 62 continues, for example, until the three-dimensional free space (for example the mesh in the case of a fabric) is covered as well. At the bottom of the central illustration, the growth has progressed to such an extent that the layer 62 extends onto the next linear support of the matrix or lattice-like component material 18 without contacting this further support. Meanwhile, on this further support, a separate layer 62 is formed. As can be seen at the bottom of the central illustration of FIG. 12, there is an overlap 63 of the layers 62 and therefore an overlap of the free space of the matrix or lattice-like component material 18.

[0185] In the right part of FIG. 12, the action of the matrix or lattice-like component 18 from two sides is shown by two processing tools 11, not shown. One preferred direction 16 of the two processing tools 11 is shown in each case, for example, from above and from below the matrix or lattice-like component 18. The structure of the layers 62 formed on the linear supports is again shown in a progression from top to bottom. In this case, two layers 62 are formed on each linear support, again corresponding to the weft threads 60. After a corresponding progression of the growth of the layers 62, an overlap 63 also occurs in this second variant.

[0186] Such layer structures with overlap 63 can be realized, for example, in the arrangements according to figures 2, 3 and 8. The matrix or lattice-like component material 18 thus coated can then be further treated or coated, similar to a film, by processes known from the prior art.

[0187] 13 is a schematic diagram of the filling of a free space with a matrix or lattice-like component material 18, which in this example is made up of so-called weft threads 60 and warp threads 61. The free space is therefore the area between the weft threads 60 and the warp threads 61.

[0188] Such filling of the free spaces with a matrix- or lattice-like component material 18 can be realised, for example, in an arrangement according to FIG.

[0189] Here, two processing tools 11 are used, as shown in Fig. 7. Here, the first processing tool 11 is responsible for the actual effect, i.e. the material deposition. The second processing tool 11, having the reference number 33 in Fig. 7, is intended to produce a second effect or a second effect through its second flux 34 aligned in a second direction 35, which influences the effective flux 13, i.e. the particles emitted by the processing tool 11, expanding in the first preferred direction 16, so that their deposition takes place on the matrix or lattice-like construction material 18.

[0190] This effect has the effect that in Figure 13 the emitted particles of the processing tool 11 can continuously fill the free spaces across the illustrative linear and nodal supports of the matrix or lattice-like building material 18, in which the deposited particles bond at different angles to already bonded particles or layers. This can also result in only partial filling of the free spaces, as shown in Figure 13 by the free spaces remaining in the centers of the meshes of the matrix or lattice-like building material 18. The present invention includes the following items. [Item 1] A method for processing a flexible substrate (18) in a processing tool (11) by moving the flexible substrate (18) through a process region of a vacuum processing device that can be depressurized, comprising the steps of: A method for processing a flexible substrate, characterized in that the flexible substrate (18) is a flexible matrix- or lattice-type component (18), a first layer of the flexible substrate (18) is transported in a first transport direction (64), and at least one second layer of the flexible substrate (18) is transported parallel to and closely spaced from the first layer of the flexible substrate (18) in a second transport direction (65) opposite to the first transport direction (64) through a free area (26) in a depressurizable process area, wherein at least one effective flux (13) of at least one processing tool (11) simultaneously penetrates the first and second layers of the flexible substrate (18) during their opposite transports through the free area (26). [Item 2] A method for processing a flexible substrate (18) in a processing tool (11) by moving the flexible substrate (18) through a process region of a vacuum processing device that can be depressurized, comprising the steps of: the flexible substrate (18) being a flexible matrix- or lattice-type component (18), a first layer of the flexible substrate (18) being transported in a first transport direction (64') through a first free area (27) and then transported in a third transport direction (66) different from the first transport direction (64') through a second free area (28); the flexible substrate (18) is deflected and transported, at least at a second layer of the flexible substrate (18), parallel to the first layer of the flexible substrate (18) in a fourth transport direction (67) opposite the third transport direction (66) through the second free area (28), and subsequently transported in a depressurizable process area in a second transport direction (65') opposite the first transport direction (64') through the first free area (27); A method for processing a flexible substrate, characterized in that at least one active flux (13) of at least one processing tool (11) simultaneously penetrates a first layer and a second layer of the flexible substrate (18) during their opposite transport through a first free area (27) and / or a second free area (28). [Item 3] 3. The method according to item 1 or 2, characterized in that the flexible substrate (18) is deflected several times to transport the flexible substrate (18) through the free area (26) or the free areas (27, 28) in at least four closely spaced, preferably parallel to one another, layers. [Item 4] 4. The method according to any one of items 1 to 3, characterized in that the closely spaced, preferably parallel layers of the flexible substrate (18) have a distance of 1 mm to 10 mm, in particular 2.5 mm. [Item 5] 5. The method according to any one of items 2 to 4, wherein an angle between the first conveying direction and the third conveying direction (64', 66) and an angle between the second conveying direction and the fourth conveying direction (65', 67) are in a range of greater than 0 degrees and less than 180 degrees. [Item 6] A matrix or lattice-like component material (18) consisting of linear and node-like supports is used as a flexible substrate (18); 6. The method according to any one of items 1 to 5, characterized in that such a construction material (18) is characterized by certain mechanical properties such as its stiffness or strength, its density, its hardness or its wear resistance. [Item 7] The method according to any one of items 1 to 5, characterized in that a cloth-like matrix or lattice-like component material (18) consisting of linear and node-like supports formed by weft threads (60) and warp threads (61) is used as the flexible substrate (18). [Item 8] 8. The method according to any one of items 1 to 7, characterized in that the flexible substrate (18) is provided with an enveloping coating of linear and nodal supports and / or filling of the free spaces of the flexible substrate (18) is performed. [Item 9] 9. The method according to any one of items 1 to 8, characterized in that by means of flux propagation (16) on at least one side of the treatment tool (11) in the direction of the flexible substrate (18), a layer (62) grows (starting) from the weft threads (60) of the flexible substrate (18) so as to cover the free space of the flexible substrate (18), which is the area between the weft threads (60) and the warp threads (61). [Item 10] The method according to one of items 1 to 8, characterized in that the filling of the free space of the flexible substrate (18), that is the area between the weft threads (60) and the warp threads (61), is performed by cooperation of a treatment tool (11) with an active flux (13) and an effect influencing device (33) with a secondary flux (34). [Item 11] A vacuum processing apparatus for carrying out a method for processing a flexible substrate, the apparatus having at least one unwinding module (38), a winding module (39), and a decompressible process area arranged between the modules (38, 39) and having one processing tool (11) or a plurality of processing tools (11), A first roll group (20) and a second roll group (21) are arranged, and in each roll group (20, 21), a plurality of small diameter rolls (24) and a plurality of large diameter rolls (23) are arranged to deflect the flexible substrate (18); At least one free area (26) having at least one processing tool (11) is disposed between the first roll group (20) and the second roll group (21), through which the flexible substrate (18) is conveyed in the opposite direction without turning; and wherein the roll groups (20, 21) are arranged such that the flexible substrate (18) is transported in parallel and opposite directions in at least two closely spaced layers in a first transport direction (64) and a second transport direction (65). [Item 12] A vacuum processing apparatus for carrying out a method for processing a flexible substrate, the apparatus having at least one unwinding module (38), a winding module (39), and a decompressible process area arranged between the modules (38, 39) and having one processing tool (11) or a plurality of processing tools (11), a first roll group (20), a second roll group (21), and a third roll group (22) are arranged, a first free region (27) is arranged between the first roll group (20) and the third roll group (22), and a second free region (28) is arranged between the second roll group (21) and the third roll group (22); wherein the rolls (20, 21, 22) are arranged such that the flexible substrate (18) is transported in at least two closely spaced, preferably parallel layers, in opposite directions through the first free area (27) and the second free area (28) without changing direction, and at least one processing tool (11) is arranged in the free areas (27, 28). [Item 13] Item 13. Vacuum processing device according to item 11 or 12, characterized in that in the free area (26, 27, 28) a first processing device (11) is arranged above a first side of closely spaced, preferably parallel counter-rotating layers of the flexible substrate (18) and a further second processing device (11) is arranged above a second side opposite to the first side of closely spaced, preferably parallel counter-rotating layers of the flexible substrate (18). [Item 14] In the free regions (26, 27, 28), a first processing device (11) is arranged on a first side of closely spaced, preferably parallel counter-rotating layers of the flexible substrate (18) and a further second processing device (33) is arranged on the same side of closely spaced, preferably parallel counter-rotating layers of the flexible substrate (18), 14. The vacuum processing apparatus according to any one of items 11 to 13, characterized in that the first processing tool (11) is arranged in a preferred direction (16) at an angle α relative to the surface of the flexible substrate (18), and the second processing tool (33) is arranged in a preferred direction (35) at an angle different from the angle α relative to the surface of the flexible substrate (18). [Item 15] 15. The vacuum processing apparatus according to any one of items 11 to 14, characterized in that the processing tool (11) is an ion source (11a), a planar magnetron (11b), a tubular magnetron (11c), a vacuum arc spraying apparatus (11d), an electron beam evaporator (11e), an electron beam evaporation apparatus (11f) or an arc evaporation apparatus.

[0191] Reference Number List 1 "Roll-to-Roll" system; winding device 2 Further "roll-to-roll" systems; winding equipment; winding systems 3 Further "roll-to-roll" systems; winding equipment; winding systems 4 Further "roll-to-roll" systems; winding equipment; winding systems 5 Placement 6 Placement 7 Winding device, arrangement 8 Placement 9. "Roll-to-roll" vacuum processing equipment 10. Equipment configuration; "Roll-to-roll" vacuum processing equipment 11 Processing equipment; process source. 11a Ion source 11b Planar magnetron 11c Tubular Magnetron 11d Vacuum Arc Spraying Equipment 11e Electron beam evaporator 11f Electron beam evaporation equipment 12 Flux outlet surface 13 Effective flux, spatial extent 14 Forbidden Zone; Forbidden Region of Space 15 Length of the range through which the confined flux propagates; flux range 16 Main direction; preferred direction; river extent 17 Angular distribution 18 Flexible substrates; matrix or lattice-like constituent materials 19 Winding direction 20 First roll group; roll system; roll group 21 Second roll group; roll system; roll group 22 Third roll group; roll system; roll group 23 Large roll; large roll 24 Small roll; Small roll 25 Distance; Small distance; Length 26 Free area 27 First Free Zone 28 Second Free Zone 29 Shielding plate 30 Range of flux Φ; spread of flux Φ 31 angle 32 Direction of movement of layer structure (layer package) of wound material 33 Effect-affecting device; second treatment device; gas nozzle 34 Secondary flux; secondary flux; flux 35 secondary direction; second direction; more preferred direction 36 Significant angular distribution; angular distribution 37a First subsequence 37b Second subsequence 38 Rewind Module 39 Winding module 40 Processing Module 41 Pump connection 42 Pumping equipment 43 Ion Processing Module 44 Module multilayer coating with tubular magnetron 45 Coating module using vacuum arc spray equipment 46 Flat angle coating module with tubular magnetron 47 Multilayer Coating Module Using Electron Beam Evaporation Apparatus 48 Modular Film Coating Configuration with Conventional Electron Beam Deposition Equipment 49 Coating module using vacuum arc spray equipment 50 Modular film coating arrangement with conventional tubular magnetron 51 Lock Chamber, Roll Rock 52 Lock chamber, slit lock 53 Upper left deflection roll 54 Lower left deflection roll 55 Upper right deflection roll 56 Large coating drum 57 Roll Rock 58 Slit Rock 59 Steam Flow 60 Weft 61 Warp threads 62 layers 63 Overlap 64, 64' First conveying direction 65, 65' Second conveying direction 66 Third conveying direction 67 Fourth conveying direction

Claims

1. A method for processing a flexible substrate (18) by moving the flexible substrate (18) through a process region of a vacuum processing device that can be depressurized in order to process the flexible substrate (18) in a processing tool (11), comprising the steps of: the flexible substrate (18) is a flexible matrix- or lattice-type component (18), a first layer of said flexible substrate (18) being transported in a first transport direction (64') through a first free area (27) and then transported in a third transport direction (66) different from said first transport direction (64') through a second free area (28); The flexible substrate (18) is deflected and transported, at least at a second layer of the flexible substrate (18), parallel to the first layer of the flexible substrate (18) in a fourth transport direction (67) opposite the third transport direction (66) through a second free area (28), and subsequently transported in a decompressible process area in a second transport direction (65') opposite the first transport direction (64') through the first free area (27); A method for processing a flexible substrate, characterized in that at least one effective flux (13) of at least one processing tool (11) simultaneously penetrates a first layer and a second layer of the flexible substrate (18) during their opposite transport through a first free area (27) and / or a second free area (28).

2. 2. The method according to claim 1, characterized in that the flexible substrate (18) is deflected several times and transported through the free area (26) or the free areas (27, 28) in at least four, preferably parallel to one another, layers having a distance of 1 mm to 10 mm, in particular 2.5 mm.

3. 3. The method according to claim 1, wherein the angle between the first and third conveying directions (64', 66) and the angle between the second and fourth conveying directions (65', 67) are in the range from greater than 0 degrees to less than 180 degrees.

4. 4. The method according to claim 1, wherein a matrix or lattice-like component (18) of linear and nodal supports is used as the flexible substrate (18).

5. 4. The method according to claim 1, wherein a fabric-like matrix or lattice-like component material (18) is used as the flexible substrate (18), which consists of linear and nodal supports formed by weft threads (60) and warp threads (61).

6. 6. The method according to claim 4 or 5, characterized in that the flexible substrate (18) is provided with an enveloping coating of linear and nodal supports and / or filling of the free spaces of the flexible substrate (18) is performed.

7. 6. The method according to claim 5, characterized in that by flux propagation (16) on at least one side of the treatment tool (11) in the direction of the flexible substrate (18), a layer (62) grows (starting) from the weft threads (60) of the flexible substrate (18) so as to cover the free space of the flexible substrate (18), which is the area between the weft threads (60) and the warp threads (61).

8. 6. The method according to claim 5, characterized in that the filling of the free spaces of the flexible substrate (18), which are the areas between the weft threads (60) and the warp threads (61), is performed by cooperation of a treatment tool (11) with an effective flux (13) and an effect influencing device (33) with a secondary flux (34).

9. 2. A vacuum processing apparatus for carrying out the method for processing a flexible substrate according to claim 1, comprising at least one unwinding module (38), a winding module (39), and a process area arranged between said modules (38, 39) and capable of reducing pressure, said process area having one processing tool (11) or a plurality of processing tools (11), A first roll group (20), a second roll group (21), and a third roll group (22) are arranged, a first free region (27) is arranged between the first roll group (20) and the third roll group (22), and a second free region (28) is arranged between the second roll group (21) and the third roll group (22), wherein the rolls (20, 21, 22) are arranged such that the flexible substrate (18) is transported in opposite directions, without changing direction, through the first free area (27) and the second free area (28), preferably in parallel layers with a distance of at least two layers between 1 mm and 10 mm, in particular 2.5 mm, The vacuum processing device, characterized in that at least one processing tool (11) is arranged in the free area (27, 28).

10. 10. Vacuum treatment device according to claim 9, characterized in that in the free area (26, 27, 28) a first treatment device (11) is arranged above a first side of the counter-rotating layers, preferably parallel to one another, of the flexible substrate (18) with a distance of 1 mm to 10 mm, in particular 2.5 mm, and a further second treatment device (11) is arranged above a second side, opposite to the first side, of the counter-rotating layers, preferably parallel to one another, of the flexible substrate (18) with a distance of 1 mm to 10 mm, in particular 2.5 mm.

11. In the free area (26, 27, 28), a first processing device (11) is arranged on a first side of the counter-rotating layers of the flexible substrate (18), preferably parallel to each other, with a distance of 1 mm to 10 mm, in particular 2.5 mm, and a further second processing device (33) is arranged on the same side of the counter-rotating layers of the flexible substrate (18), preferably parallel to each other, with a distance of 1 mm to 10 mm, in particular 2.5 mm, 11. The vacuum processing apparatus of claim 9 or 10, characterized in that the first processing tool (11) is arranged with its preferred direction (16) at an angle α with respect to the surface of the flexible substrate (18) and the second processing tool (33) is arranged with its preferred direction (35) at an angle different from the angle α with respect to the surface of the flexible substrate (18).

12. The vacuum processing device according to any one of claims 9 to 11, characterized in that the processing tool (11) is an ion source (11a), a planar magnetron (11b), a tubular magnetron (11c), a vacuum arc spray device (11d), an electron beam evaporator (11e), an electron beam evaporation device (11f) or an arc evaporation device.

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