Micromechanical components for angular rate sensors

Abstract

The present invention provides a micromechanical component comprising a first rotor (12a) having a first seismic mass (16a) on a first side and a second seismic mass (16b) on a second side, the micromechanical component comprising a first lever portion (22a) connected at a first end of the first side to the first seismic mass (16a) via a first lever connecting spring (22a), the first lever portion (22a) extending from the first end to a second end on a third side located between the first side and the second side of the first rotor (12a). a second lever member (20b) whose first end on the second side is connected to the second vibration mass (16b) via a second lever connecting spring (22b) and which extends from the first end to the second end on the third side of the first rotor (12a), and a first lever member spring (24a) which interconnects the first lever member (20a) and the second lever member (20b).

Description

Technical Field

[0001] The present invention relates to a micromechanical component for an angular velocity sensor and an angular velocity sensor. Further, the present invention relates to a method for manufacturing a micromechanical component for an angular velocity sensor.

Background Art

[0002] German Patent Application Publication No. 102010062095 describes an angular velocity sensor including a substrate having a substrate surface, a first rotor attached to the substrate surface, and a second rotor also attached to the substrate surface. The first rotor is capable of a first harmonic vibration motion about a first rotation axis oriented perpendicular to the substrate surface, and the second rotor is capable of a second harmonic vibration motion extending in a direction opposite to the first harmonic vibration motion about a second rotation axis oriented perpendicular to the substrate surface.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Means for Solving the Problems

[0004] The present invention provides a micromechanical component for an angular velocity sensor having the features of claim 1, an angular velocity sensor according to claim 11, and a method for manufacturing a micromechanical component for an angular velocity sensor having the features of claim 12.

[0005] The present invention can be used to detect a rotational movement about a first axis of rotation oriented perpendicular to the substrate surface, to detect a rotational movement about a first and second axis of rotation oriented parallel to the substrate surface, and / or to detect a rotational movement about a third axis of rotation oriented parallel to the substrate surface and perpendicular to the second axis of rotation. The present invention provides a micromechanical component or an angular velocity sensor configured with the same. Despite its versatile applicability, the micromechanical component according to the present invention or the angular velocity sensor realized with the same is relatively resistant to vibration. Further, the micromechanical component according to the present invention has a design that effectively utilizes space, and this design prevents energy from being output during the operation of each micromechanical component. In particular, the design of each micromechanical component according to the present invention does not have an asymmetry that leads to false signals when linear vibration or rotational vibration is applied. A further advantage of the design of the micromechanical component according to the present invention is that it does not have a mechanical bridge, and thus, the manufacture of the micromechanical component according to the present invention can be carried out relatively easily and is relatively inexpensive. A further advantage of the micromechanical component according to the present invention is that it is less sensitive to electrical measurement pulses despite having a relatively high measurement sensitivity.

[0006] In an advantageous embodiment of the micromechanical component, the first lever member is connected to the first rotor via a first lever support spring locked to the first lever member, and the second lever member is connected to the first rotor via a second lever support spring locked to the second lever member. By connecting at least the first lever member to the first rotor via the first lever support spring and at least the second lever member to the first rotor via the second lever support spring, the desired lever action between the first lever member and the second lever member is improved.

[0007] Preferably, the micro mechanical component is configured such that a first end portion on a first side is connected to a first vibrating mass via a third lever connecting spring, and a fourth side located between a first side and a second side of a first rotor, and a third lever member extending from the first end portion to a second end portion, and a first end portion on a second side is connected to a second vibrating mass via a fourth lever connecting spring, and a fourth side of the first rotor, and a fourth lever member extending from the first end portion to a second end portion, and a second lever member spring connecting the third lever member and the fourth lever member to each other. The configuration of the first rotor including the first lever member, the second lever member, the third lever member, the fourth lever member, the first lever member spring, and the second lever member spring described herein realizes a lever structure in the first rotor, and the lever structure is mirror-symmetric about a first axis of symmetry intersecting the centers of the first vibrating mass and the second vibrating mass, and is mirror-symmetric about a second axis of symmetry extending between the first vibrating mass and the second vibrating mass.

[0008] As a favorable improvement configuration, the micromechanical component is a second rotor disposed on a third side of the first rotor, and on a first side, includes a third vibrating mass body connected to the second rotor via at least one third mass body connecting spring, and on a second side, includes a fourth vibrating mass body connected to the second rotor via at least one fourth mass body connecting spring, and the second rotor includes the third vibrating mass body and the fourth vibrating mass body, is oriented perpendicular to the substrate surface, and is connected to the substrate surface via at least one second rotor connecting spring so as to be capable of performing a second harmonic vibration motion centered on a second rotation axis parallel to the first rotation axis; a first end portion on the first side is connected to the third vibrating mass body via a fifth lever connecting spring, and a fifth lever member extending from the first end portion to a second end portion is provided on a side of the second rotor facing the first rotor; a first end portion on the second side is connected to the fourth vibrating mass body via a sixth lever connecting spring, and a sixth lever member extending from the first end portion to a second end portion is provided on a side of the second rotor facing the first rotor; and a third lever member spring connecting the fifth lever member and the sixth lever member may be further provided. The configuration form of the micromechanical component described herein thus has two rotors configured to be mirror-symmetric to each other and capable of being excited to vibrate in opposite phases. Therefore, when detecting the rotational motion of the embodiment of the micromechanical component described herein, the advantage of differential signal evaluation may be used.

[0009] Preferably, the micro-mechanical component has a first end on the first side connected to the third vibrating mass via a seventh lever connecting spring, and on the side away from the first rotor of the second rotor, a seventh lever member extending from the first end to the second end; a first end on the second side connected to the fourth vibrating mass via an eighth lever connecting spring, and on the side away from the first rotor of the second rotor, an eighth lever member extending from the first end to the second end; and a fourth lever member spring connecting the seventh lever member and the eighth lever member to each other. Thus, the second rotor may be configured by a lever structure including a fifth lever member, a sixth lever member, a seventh lever member, an eighth lever member, a third lever member spring, and a fourth lever member spring. This lever structure is mirror-symmetrical about a first axis of symmetry intersecting the centers of the third and fourth vibrating masses and also about a second axis of symmetry extending between the third and fourth vibrating masses.

[0010] As a further advantageous improvement, the first lever member spring and the third lever member spring may be connected to each other via a spring member. The spring member can be used to ensure a desired anti-phase between the second harmonic vibration motion of the second rotor provided with the third and fourth vibrating masses and the first harmonic vibration motion of the first rotor provided with the first and second vibrating masses.

[0011] Alternatively or complementarily, the first and third vibrating masses may be connected to each other via a first rocking member, and the second and fourth vibrating masses may be connected to each other via a second rocking member. Also, the first and second rocking members can be used to ensure a desired anti-phase between the second harmonic vibration motion of the second rotor provided with the third and fourth vibrating masses and the first harmonic vibration motion of the first rotor provided with the first and second vibrating masses.

[0012] Preferably, exactly four mounting structures are attached to the substrate surface, and these mounting structures are formed from at least one material layer that at least partially covers the substrate surface. Among the four mounting structures, the first mounting structure protrudes into a first notch formed in a first rotor, and the first rotor is connected to the first mounting structure via at least one first rotor connecting spring. Among the four mounting structures, the second mounting structure protrudes into a second notch formed in a second rotor, and the second rotor is connected to the second mounting structure via at least one second rotor connecting spring. The first oscillating member is connected to the third mounting structure among the four mounting structures via a first oscillating support spring locked to the first oscillating member, and the second oscillating member is connected to the fourth mounting structure among the four mounting structures via a second oscillating support spring locked to the second oscillating member. As a result, by vertically arranging the two rotors exactly on the four mounting structures, the desired displacement of the two rotors and their vibrating masses corresponding to the rotational movement of the micro-mechanical component is ensured, and at the same time, the coupling of mechanical stress is prevented.

[0013] In a preferred embodiment of the micro-mechanical component, the first vibrating mass performing the first harmonic vibration motion can be shifted in a first displacement direction parallel to the substrate surface with respect to the first rotor by the rotational motion of the micro-mechanical component about a first rotation axis oriented perpendicular to the substrate surface. On the other hand, the second vibrating mass performing the first harmonic vibration motion can be shifted in a second displacement direction parallel to the substrate surface with respect to the first rotor and opposite to the first displacement direction by the rotational motion of the micro-mechanical component about the first rotation axis. Alternatively or complementarily, during the rotational motion of the micro-mechanical component about a second rotation axis oriented parallel to the substrate surface, the first rotor performing the first harmonic vibration motion may be inclined with respect to the substrate about a first inclination axis oriented parallel to the substrate surface and perpendicular to the second rotation axis. On the other hand, during the rotational motion of the micro-mechanical component about a third rotation axis oriented parallel to the substrate surface and perpendicular to the second rotation axis, the first rotor performing the first harmonic vibration motion may be inclined with respect to the substrate about a second inclination axis oriented parallel to the substrate surface and perpendicular to the first inclination axis. Therefore, at least the first rotor (and in some cases the second rotor as well) can advantageously be used to detect the rotational motion of the micro-mechanical component.

[0014] Similarly, an angular velocity sensor provided with such a micro-mechanical component realizes the above-described advantages. The above-described advantages are also guaranteed when implementing the corresponding manufacturing method of the micro-mechanical component for the angular velocity sensor. It is clarified that the manufacturing method can be further improved according to the embodiments of the micro-mechanical component described above.

Brief Description of the Drawings

[0015] Hereinafter, further features and advantages of the present invention will be described with reference to the drawings.

Figure 1

Figure 2a

Figure 2b

Figure 2c

Figure 2d

Figure 2e

Figure 3

Embodiments for Carrying Out the Invention

[0016] FIG. 1 is a schematic diagram of a first embodiment of a micro mechanical component. The micro mechanical component schematically shown in FIG. 1 includes at least one substrate having a substrate surface 10 and a first rotor 12a. Preferably, the micro mechanical component is further configured to include a second rotor 12b. On the first side of the first rotor 12a and, in some cases, on the first side of the second rotor 12b, a first vibrating mass body 16a connected to the first rotor 12a via at least one first mass body connecting spring 14a is configured on the first rotor 12a. On the second side away from the first side of the first rotor 12a and, in some cases, also on the second side away from the first side of the second rotor 12b, the first rotor 12a further has a second vibrating mass body 16b connected to the first rotor 12a via at least one second mass body connecting spring 14b. When present, the second rotor 12b is disposed on a third side located between the first side and the second side of the first rotor 12a. In some cases, the second rotor 12b includes, on the first side, a third vibrating mass body 16c connected to the second rotor 12b via at least one third mass body connecting spring 14c and, on the second side, a fourth vibrating mass body 16d connected to the first rotor 12a via at least one fourth mass body connecting spring 14d.

[0017] The first rotor 12a is connected to the substrate surface 10 via at least one first rotor connecting spring 18a such that the first rotor 12a can perform a first harmonic vibration motion centered on a first rotation axis oriented perpendicular to the substrate surface 10 together with the first vibration mass 16a and the second vibration mass 16b. Also, the second rotor 12b may be connected to the substrate surface 10 via at least a second rotor connecting spring 18b such that the second rotor 12b can perform a second harmonic vibration motion centered on a second rotation axis oriented perpendicular to the substrate surface 10 and parallel to the first rotation axis together with the third vibration mass 16c and the fourth vibration mass 16d.

[0018] The first rotor 12a includes at least a first lever member 20a and a second lever member 20b. The first lever member 20a is formed to extend from a first end on the first side to a second end located on the third side of the first rotor 12a. Similarly, the second lever member 20b extends from a first end on the second side to a second end located on the third side of the first rotor 12a. The first end of the first lever member 20a is connected to the first vibration mass 16a via a first lever connecting spring 22a, and the first end of the second lever member 20b is connected to the second vibration mass 16b via a second lever connecting spring 22b. On the other hand, the first lever member 20a and the second lever member 20b are connected to each other via a first lever member spring 24a. In particular, the second end of the first lever member 20a may be connected to the second end of the second lever member 20b via the first lever member spring 24a. At least the first lever member 20a, the second lever member 20b, and the first lever member spring 24a realize the lever structure of the first rotor 12a, whereby the desired maintenance of the first harmonic vibration motion of the first rotor 12a is surely ensured together with the first vibration mass 16a and the second vibration mass 16b.

[0019] Preferably, the lever structure of the first rotor 12a further includes a third lever member 20c, a fourth lever member 20d, and a second lever member spring 24b. In some cases, the third lever member 20c extends from a first end on the first side to a second end on the fourth side located between the first side and the second side of the first rotor 12a. The fourth lever member 20d may also be formed to extend from a first end on the second side to a second end located on the fourth side of the first rotor 12a.

[0020] Furthermore, the first end of the third lever member 20c may be connected to the adjacent vibration mass 16a or 16b via the third lever connecting spring 22c, and the first end of the fourth lever member 20d may be connected to the adjacent vibration mass 16a or 16b via the fourth lever connecting spring 22d. The third lever member 20c and the fourth lever member 20d, specifically the second ends of the third lever member 20c and the fourth lever member 20d in this embodiment, are connected to each other via the second lever member spring 24b. Therefore, the lever structure of the first rotor 12a is mirror-symmetrical about the symmetry axis 26a of the first rotor 12a that intersects the first vibration mass 16a and the second vibration mass 16b, and about the first common symmetry axis 28 of the first rotor 12a and the second rotor 12b that intersects the first rotor 12a and the second rotor 12b.

[0021] The second rotor 12b may also include a fifth lever member 20e, a sixth lever member 20f, and a third lever member spring 24c. In some cases, the fifth lever member 20e in this case extends from the first end on the first side to the second end on the side facing the first rotor 12a of the second rotor 12b. Similarly, the sixth lever member 20f may also be configured to extend from the first end on the second side to the second end on the side facing the first rotor 12a of the second rotor 12b. Preferably, the first end of the fifth lever member 20e is connected to the third vibration mass 12c via the fifth lever connecting spring 22e, while the first end of the sixth lever member 20f may be connected to the fourth vibration mass 12d via the sixth lever connecting spring 22f. Further, the fifth lever member 20e and the sixth lever member 20f, particularly their second ends, may be interconnected via the third lever member spring 24c. Thus, the second rotor 12b may be configured to include a lever structure composed of at least the fifth lever member 20e, the sixth lever member 20f, and the third lever member spring 24c, and this lever structure contributes to reliably maintaining the second harmonic vibration motion of the second rotor 12b together with the third vibration mass 16c and the fourth vibration mass 16d. Preferably, the fifth lever member 20e, the sixth lever member 20f, and the third lever member spring 24c are mirror-symmetrical with respect to the first lever member 20a, the second lever member 20b, and the first lever member spring 24a about the second common symmetry axis 30 of the first rotor 12a and the second rotor 12b, which extends between the first rotor 12a and the second rotor 12b.

[0022] In an advantageous improvement configuration, the lever structure of the second rotor 12b may further include a seventh lever member 20g extending from the first end on the first side to the second end on the side away from the first rotor 12a of the second rotor 12b, an eighth lever member 20h extending from the first end on the second side to the second end on the side away from the first rotor 12a of the second rotor 12b, and a fourth lever member spring 24d. The first end of the seventh lever member 20g is connected to the third vibration mass 16c via a seventh lever connecting spring 22g, while the first end of the eighth lever member 20h may be connected to the fourth vibration mass 16d via an eighth lever connecting spring 22h. Further, the seventh lever member 20g and the eighth lever member 20h, particularly their second ends, may be interconnected via the fourth lever member spring 24d. The seventh lever member 20g, the eighth lever member 20h, and the fourth lever member spring 24d may be mirror-symmetrical with respect to the symmetry axis 26b of the second rotor 12b intersecting the third vibration mass 16c and the fourth vibration mass 16d, relative to the fifth lever member 20e, the sixth lever member 20f, and the third lever member spring 24c. Preferably, the lever structure of the second rotor 12b is also mirror-symmetrical with respect to the first common symmetry axis 28 of the first rotor 12a and the second rotor 12b, which intersects the first rotor 12a and the second rotor 12b. Further, the lever structure of the second rotor 12b may be mirror-symmetrical with respect to the second common symmetry axis 30 of the first rotor 12a and the second rotor 12b, which extends between the first rotor 12a and the second rotor 12b, relative to the lever structure of the first rotor 12a.

[0023] All the lever members 20a - 20h advantageously mechanically couple the vibration masses 16a - 16d connected thereto to the respective rotors 12a or 12b. Preferably, at least one of the lever member springs 24a - 24d is a flexible spring, such as a flexible plate spring, respectively.

[0024] Preferably, each of the lever members 20a to 20h is additionally connected to the associated rotor 12a or 12b via lever support springs 32a to 32h respectively locked to the respective lever members 20a to 20h. Each of the lever support springs 32a to 32h improves the lever function of the lever members 20a to 20h provided therewith. As at least one of the lever support springs 32a to 32h, for example, flexible springs, particularly flexible plate springs, may be used respectively.

[0025] As at least one of the lever connection springs 22a to 22h, flexible springs, particularly flexible plate springs, may also be used respectively. Preferably, in each of the lever members 20a to 20h, the lever connection springs 22a to 22h locked to the respective lever members 20a to 20h and the lever support springs 32a to 32h locked to the same lever members 20a to 20h are inclined to each other at an inclination angle between 30° and 90°, particularly facing each other perpendicularly. Thereby, the lever effect of the lever members 20a to 20h is improved.

[0026] Also, it is advantageous when the first lever member spring 24a and the third lever member spring 24c are connected to each other via a spring member 34. By the spring member 34, it is possible to ensure the desired maintenance of a 180° phase shift between the first harmonic vibration motion of the first rotor 12a and the second harmonic vibration motion of the second rotor 12b. In this case, the first harmonic vibration motion of the first rotor 12a is out of phase with the second harmonic vibration motion of the second rotor 12b. The spring member 34 may be composed of, for example, two torsion flexible springs, particularly two plate springs, facing parallel to the second common symmetry axis 30, and the first end of the torsion flexible spring / plate spring and the second end of the torsion flexible spring / plate spring are connected to each other via a connection portion respectively.

[0027] Alternatively or complementarily, the first vibrating mass 12a and the third vibrating mass 12c may be interconnected via the first rocking member 36a, and the second vibrating mass 12b and the fourth vibrating mass 12d may be interconnected via the second rocking member 36b. By using the rocking members 36a and 36b, a desired 180° phase shift can be achieved between the first harmonic vibration motion of the first rotor 12a and the second harmonic vibration motion of the second rotor 12b. For example, the first rocking member 36a may be connected to the first vibrating mass 12a via the first rocking connecting spring 38a and to the third vibrating mass 12c via the third rocking connecting spring 38c. Similarly, the second rocking member 36b may be connected to the second vibrating mass 12b via the second rocking connecting spring 38b and to the fourth vibrating mass 12d via the fourth rocking connecting spring 38d. Each of the rocking connecting springs 38a to 38d is preferably a flexible spring or a torsion-flexible spring, such as a flexible plate spring or a torsion-flexible plate spring. To improve their rocking function, the first rocking member 36a may be connected to the substrate surface 10 via at least the first rocking support spring 40a locked to the first rocking member 36a, and the second rocking member 36b may be connected to the substrate surface 10 via at least the second rocking support spring 40b locked to the second rocking member 36b. As the rocking support springs 40a and 40b, one torsion-flexible spring each, particularly one torsion-flexible plate spring each, may be used.

[0028] Preferably, the first rotor 12a is vertically provided on the substrate surface 10 at the center (i.e., at its center of gravity) via at least one first rotor connecting spring 18a. Specifically, in the embodiment described in this specification, the first mounting structure 42a is attached to the substrate surface 10, and this mounting structure 42a protrudes into a first notch formed in the first rotor 12a. Then, the first rotor 12a can be attached to the first mounting structure 42a via at least one first rotor connecting spring 18a locked to the edge of the first notch. For example, the first mounting structure 42a may be located kardanisch between two first rotor connecting springs 18a of the first rotor 12a. The second mounting structure 42b attached to the substrate surface 10 may protrude into a second notch of the second rotor 12b such that the second rotor 12b is connected to the second mounting structure 42b via at least one second rotor mounting spring 18b locked to the edge of the second notch. The second mounting structure 42b may also be located kardanisch between two second rotor connecting springs 18b of the second rotor 12b.

[0029] Furthermore, the first oscillating member 36a may be connected to the third mounting structure 42c via the first oscillation support spring 40a, and the second oscillating member 36b may be connected to the fourth mounting structure 42d via the second oscillation support spring 40b. Preferably, only the four mounting structures 42a to 42d are attached to the substrate surface 10. By vertically providing the rotors 12a and 12b on the substrate surface 10 only via the four mounting structures 42a to 42d, an advantageous transition of the rotors 12a and 12b and / or their vibrating masses 16 to 16d according to the rotational movement of the micromechanical components is ensured. To achieve an advantageous connection of the four mounting structures 42a to 42d to the substrate surface 10, the mounting structures 42a to 42d may be formed from at least one material layer that at least partially covers the substrate surface 10. The four mounting structures 42a to 42d may be arranged centrally and symmetrically relative to each other. In this case, the micromechanical component is less significantly affected by the bending of the substrate of the micromechanical component.

[0030] The micromechanical components described herein can advantageously be used in angular velocity sensors. For an explanation of the harmonic vibration motion of the rotors 12a, 12b of the micromechanical component and the reaction of the rotors 12a, 12b and / or the vibrating masses 16a to 16d according to the rotational motion of the micromechanical component, reference should be made to the description of the following embodiments.

[0031] Figures 2a to 2e are schematic views of a second embodiment of the micromechanical component. The micromechanical component shown in the stationary position in Figure 2a has the components of the above-described embodiment.

[0032] For the features and advantages of these components, reference should be made to the description of Figure 1. In Figure 2b, the first harmonic vibration motion of the first rotor 12a with the first vibrating mass 16a and the second vibrating mass 16b of the first rotor 12a about the first rotation axis 52a is indicated by the arrow 50a, and the second harmonic vibration motion of the second rotor 12b with the third vibrating mass 16c and the fourth vibrating mass 16d of the second rotor 12b about the second rotation axis 52b is indicated by the arrow 50b. It can be seen that the second harmonic vibration motion of the second rotor 12b with the third vibrating mass 16c and the fourth vibrating mass 16d is out of phase (i.e., shifted by 180° in phase) with respect to the first harmonic vibration motion of the first rotor 12a with the first vibrating mass 16a and the second vibrating mass 16. Therefore, the first rotor 12a and the second rotor 12b form a dual rotor that vibrates out of phase. The first rotor 12a and the second rotor 12b, together with their vibrating masses 16a to 16d, can perform their respective harmonic vibration motions by an actuator device (not shown). Since examples of such actuator devices are known from the prior art, they will not be described in detail herein.

[0033] FIG. 2c shows a micromechanical component in which a first rotor 12a and a second rotor 12b perform respective harmonic vibration motions together with their vibration masses 16a to 16d during a rotational motion of the micromechanical component about a first rotation axis oriented perpendicular to the substrate surface 10. (Since the first rotation axis is oriented perpendicular to the image plane of FIG. 2c representing the substrate surface 10, it is not shown.).

[0034] As illustrated by arrow 54a in FIG. 2c, a rotational motion of a micromechanical component about a first rotation axis oriented perpendicular to the substrate surface 10 causes a first vibration mass 16a, which performs a first harmonic vibration motion, to undergo a transitional motion in a first displacement direction parallel to the substrate surface 10 with respect to the first rotor 12a. On the other hand, as indicated by arrow 54b, a second vibration mass 16b, which performs a first harmonic vibration motion, undergoes a transition in a second displacement direction that is parallel to the substrate surface 10 with respect to the first rotor 12a and opposite to the first displacement direction due to the rotational motion of the micromechanical component about the first rotation axis. Since the displacement directions of the vibration masses 16a and 16b are opposite to each other, the transitional motions of the vibration masses 16a and 16b caused by the rotational motion of the micromechanical component about the first rotation axis can be clearly distinguished from the displacement motions caused by the acceleration of the vibration masses 16a and 16b in a common direction.

[0035] Also, the out-of-phase harmonic vibration motions of the rotors 12a, 12b and their vibration masses 16a to 16d cause, due to the rotational motion of the micromechanical component about the first rotation axis, a third vibration mass 16c, which performs a second harmonic vibration motion, to undergo a transition in the second displacement direction (see arrow 54c) with respect to the second rotor 12b, and similarly, a fourth vibration mass 16d, which performs a second harmonic vibration motion, to undergo a transition in the first displacement direction (see arrow 54d). The mass connecting springs 14a to 14d that connect the vibration masses 16a to 16d to their respective rotors 12a or 12b can be configured to be relatively flexible with respect to the first displacement direction and the second displacement direction. For example, leaf springs can be used for the springs 14a to 14d.

[0036] The transitional movements of the vibrating masses 16a to 16d in their respective displacement directions, indicated by the arrows 54a to 54d, can be reliably detected by using symmetric detection electrodes and evaluating at least one differential signal provided by the detection electrodes, since the micromechanical components have an advantageous symmetry with respect to the common symmetry axes 28, 30. Thus, the micromechanical components can advantageously be used to detect a rotational movement about a first axis of rotation and / or to measure a first angular velocity of a rotational movement about a first axis of rotation.

[0037] FIG. 2d shows the first rotor 12a and the second rotor 12b performing their respective harmonic oscillation movements together with their vibrating masses 16a to 16d during the rotational movement of the micromechanical component about a second axis of rotation D2 oriented parallel to the substrate surface 10. Exemplarily, the second axis of rotation D2 is equal to the first common symmetry axis 28 of the first rotor 12a and the second rotor 12b.

[0038] It can be seen that the rotational movement of the micromechanical component about the second axis of rotation D2 causes the first rotor 12a performing the first harmonic oscillation movement to tilt about a first tilt axis 56a with respect to the substrate. The first tilt axis 56a is parallel to the substrate surface 10 but oriented perpendicular to the second axis of rotation D2. Similarly, the rotational movement of the micromechanical component about the second axis of rotation D2 also causes a tilting movement of the second rotor 12b performing the second harmonic oscillation movement about a second tilt axis 56b, and the second tilt axis 56b is oriented parallel to the first tilt axis 56a. In particular, the first tilt axis 56a of the first rotor 12a can be located on the symmetry axis 26a of the first rotor 12a, while the second tilt axis 56b of the second rotor coincides with the symmetry axis 26b of the second rotor 12b.

[0039] Also, since the harmonic oscillatory motions of the rotors 12a, 12b and their vibrating masses 16a to 16d are in antiphase, the tilting motions of the rotors 12a, 12b about the respective tilting axes 56a, 56b caused by the rotational motion of the micro-mechanical component about the second rotation axis D2 are mirror-symmetrical about the second common symmetry axis 30 of the first rotor 12a and the second rotor 12b extending parallel to the tilting axes 56a, 56b. Therefore, the tilting motions of the rotors 12a, 12b about the respective tilting axes 56a or 56b caused by the rotational motion of the micro-mechanical component about the second rotation axis D2 can be reliably detected by evaluating at least one differential signal provided by symmetrical detection electrodes. Therefore, the micro-mechanical component can be advantageously used for detecting a rotational motion about the second rotation axis D2 and / or for measuring a second angular velocity of the rotational motion about the second rotation axis D2.

[0040] FIG. 2e shows a micro-mechanical component in which the first rotor 12a and the second rotor 12b perform respective harmonic oscillatory motions together with their vibrating masses 16a to 16d during a rotational motion of the micro-mechanical component about a third rotation axis D3 parallel to the substrate surface 10 and perpendicular to the second rotation axis D3. The third rotation axis D3 may be equal to, for example, the second common symmetry axis 30 of the first rotor 12a and the second rotor 12b.

[0041] Due to the rotational movement of the micro-mechanical component about the third rotation axis D3, the first rotor 12a that performs the first harmonic vibration movement and the second rotor 12b that performs the second harmonic vibration movement are each inclined with respect to the substrate about a common inclination axis 58 that is parallel to the substrate surface 10 and perpendicular to the third rotation axis D3. However, since the phases are shifted by 180° between the harmonic vibration movements, the first rotor 12a that performs the first harmonic vibration movement is inclined in the first rotation direction 60a about the inclination axis 58 with respect to the substrate, while the second rotor 12b that performs the second harmonic vibration movement rotates in the second rotation direction 60b opposite to the first rotation direction 60a about the inclination axis with respect to the substrate. Therefore, the inclination movement of the rotors 12a and 12b about the inclination axis 58 caused by the rotational movement of the micro-mechanical component about the third rotation axis D3 can be reliably detected by evaluating at least one differential signal provided by symmetric detection electrodes. Therefore, the micro-mechanical component can be advantageously used for detecting a rotational movement about the third rotation axis D3 and / or for measuring a third angular velocity of the rotational movement about the third rotation axis D3.

[0042] All of the above-described micro-mechanical components can be used to realize a vibration-resistant or highly sensitive angular velocity sensor. Such an angular velocity sensor can be installed particularly in areas with strong vibrations, such as, for example, vehicles, pumps, valve trains, etc. Even when such an angular velocity sensor is used for consumer applications, the angular velocity can be reliably measured despite the presence of vibration alarms or speaker operations. The vibration double rotor with opposite phases realized by the rotors 12a and 12b can be used to detect rotational movements about the three spatial directions D2 and D3 despite its space-saving design.

[0043] The design of the above-mentioned micro-mechanical components also facilitates miniaturization. Since the mode density of this design is significantly lower than that of the prior art, the angular velocity sensor can be realized with significantly fewer and more favorably controllable mode jumps. The closed-loop concept can also be realized with each angular velocity sensor.

[0044] Also, since the total number of mass body members is relatively small, the above-described micro-mechanical components have relatively few interference modes at high frequencies. Therefore, they are less affected by interference. It is hereby expressly stated that the design of the above-mentioned micro-mechanical components does not require a mechanical bridge. Therefore, the micro-mechanical components do not exhibit the asymmetry of the mass body caused by the mechanical bridge. Since they are symmetric about the common symmetry axes 28, 30, no undesirable output of energy or systematic offset shift occurs in any of the above-mentioned micro-mechanical components.

[0045] The symmetric detection electrodes are preferably arranged between the lever members 20a to 20h and the substrate. Therefore, the lever members 20a to 20h can be used as detection surfaces. FIG. 3 is a flowchart for explaining an embodiment of a method for manufacturing a micro-mechanical component for an angular velocity sensor.

[0046] Using the manufacturing method described below, for example, the above-mentioned micro-mechanical components can be manufactured. However, it is pointed out that the feasibility of the manufacturing method here is not limited to the manufacture of one of these components.

[0047] In method step S1, a rotor is formed, which on a first side comprises a first vibrating mass body connected to the rotor via at least one first mass body connecting spring, and on a second side remote from the first side, comprises a second vibrating mass body connected to the rotor via at least one second mass body connecting spring. Further, the rotor is connected to the substrate surface of the substrate via at least one rotor connecting spring such that the rotor can perform a harmonic vibration motion about a rotation axis perpendicular to the substrate surface with the first vibrating mass body and the second vibrating mass body provided.

[0048] In method step S2, a first lever member is formed, a first end of the first side of the first lever member is connected to the first vibrating mass body via a first lever connecting spring, and the first lever member extends from the first end to a second end on a third side located between the first side and the second side of the rotor. Similarly, in method step S3, a second lever member is formed, a first end of the second side of the second lever member is connected to the second vibrating mass body via a second lever connecting spring, and the second lever member extends from the first end to a second end on the third side of the rotor. Using the first lever member spring formed as method step S4, the first lever member and the second lever member are connected to each other.

[0049] The manufacturing method described herein is a manufacturing method that can be easily and inexpensively implemented. Method steps S1 to S4 can be carried out in any order, time-overlappingly, or simultaneously. The micromechanical component manufactured using this manufacturing method is very compact, can be easily miniaturized, and yet can have high measurement sensitivity. Further, the manufacturing method described herein can be improved according to the above-described micromechanical component.

Claims

1. a substrate having a substrate surface (10), a first rotor (12a) configured with a first seismic mass (16a) connected to the first rotor (12a) on a first side via at least one first mass connection spring (14a) and a second seismic mass (16b) connected to the first rotor (12a) on a second side remote from the first side via at least one second mass connection spring (14b), and connected to the substrate surface (10) via at least one first rotor connection spring (18a) such that the first rotor (12a) can perform a first harmonic oscillatory motion together with the first seismic mass (16a) and the second seismic mass (16b) about a first axis of rotation (52a) oriented perpendicularly to the substrate surface (10); Equipped with a first lever member (20a) whose first end on said first side is connected to said first seismic mass (16a) via a first lever connecting spring (22a) and which extends from a first end to a second end on a third side located between said first side and said second side of said first rotor (12a); a second lever member (20b) whose first end on said second side is connected via a second lever connecting spring (22b) to said second seismic mass (16b) and which extends from a first end to a second end on said third side of said first rotor (12a); a first lever member spring (24a) interconnecting said first lever member (20a) and said second lever member (20b); A micromechanical component for an angular velocity sensor comprising:

2. 2. The micromechanical component according to claim 1, wherein the first lever member (20a) is connected to the first rotor (12a) via a first lever support spring (32a) engaged with the first lever member (20a), and the second lever member (20b) is connected to the first rotor (12a) via a second lever support spring (32b) engaged with the second lever member (20b).

3. The micromechanical component comprises: a third lever member (20c) whose first end on said first side is connected to said first seismic mass (16a) via a third lever connecting spring (22c) and which extends from a first end to a second end on a fourth side located between said first side and said second side of said first rotor (12a); a fourth lever member (20d) whose first end on said second side is connected to said second seismic mass (16b) via a fourth lever connecting spring (22d) and which extends from a first end to a second end on said fourth side of said first rotor (12a); a second lever member spring (24b) interconnecting said third lever member (20c) and said fourth lever member (20d); The micromechanical component of claim 1 further comprising:

4. The micromechanical component comprises: a second rotor (12b) arranged on the third side of the first rotor (12a), comprising a third seismic mass (16c) connected on the first side to the second rotor (12b) via at least one third mass connection spring (14c) and a fourth seismic mass (14d) connected on the second side to the second rotor (12b) via at least one fourth mass connection spring (14d), and connected to the substrate surface (10) via at least one second rotor connection spring (18b) such that the second rotor (12b) together with the third seismic mass (16c) and the fourth seismic mass (16d) can perform a second harmonic oscillatory motion about a second axis of rotation (52b) oriented perpendicularly to the substrate surface (10) and parallel to the first axis of rotation (52a); a fifth lever member (20e) whose first end on said first side is connected to said third seismic mass (16c) via a fifth lever connecting spring (22e) and which extends from a first end to a second end on the side of said second rotor (12b) facing said first rotor (12a); a sixth lever member (20f) whose first end on said second side is connected via a sixth lever connecting spring (22f) to said fourth seismic mass (16d) and which extends from a first end to a second end on the side of said second rotor (12b) facing said first rotor (12a); a third lever member spring (24c) interconnecting said fifth lever member (20e) and said sixth lever member (20f); The micromechanical component of claim 1 further comprising:

5. The micromechanical component comprises: a seventh lever member (20g) whose first end on said first side is connected to said third seismic mass (16c) via a seventh lever connecting spring (22g) and which extends from a first end to a second end on the side of said second rotor (12b) remote from said first rotor (12a); an eighth lever member (20h) whose first end on said second side is connected to said fourth seismic mass (16d) via an eighth lever connecting spring (22h) and which extends from a first end to a second end on the side of said second rotor (12b) remote from said first rotor (12a); a fourth lever member spring (24d) interconnecting said seventh lever member (20g) and said eighth lever member (20h); The micromechanical component according to claim 4 , further comprising:

6. 5. The micromechanical component of claim 4, wherein the first lever member spring (24a) and the third lever member spring (24c) are interconnected via a spring member (34).

7. 5. The micromechanical component according to claim 4, wherein the first seismic mass (16a) and the third seismic mass (16c) are connected to each other via a first oscillating member (36a), and the second seismic mass (16b) and the fourth seismic mass (16d) are connected to each other via a second oscillating member (36b).

8. Exactly four mounting structures (42a-42d) are attached to the substrate surface (10), the mounting structures (42a-42d) being formed from at least one layer of material at least partially covering the substrate surface (10), a first mounting structure (42a) of the four mounting structures (42a-42d) protruding into a first cutout portion configured on the first rotor (12a), the first rotor (12a) being connected to the first mounting structure (42a) via the at least one first rotor connecting spring (18a), and a second mounting structure (42b) of the four mounting structures (42a-42d) protruding into a second cutout portion configured on the second rotor (12b).

8. The micromechanical component according to claim 7, wherein the second rotor (12b) protrudes into a cutout portion, the second rotor (12b) is connected to the second mounting structure (42b) via the at least one second rotor connecting spring (18b), the first oscillating member (36a) is connected to a third mounting structure (42c) of the four mounting structures (42a to 42d) via a first oscillating support spring (40a) engaged with the first oscillating member (36a), and the second oscillating member (36b) is connected to a fourth mounting structure (42d) of the four mounting structures (42a to 42d) via a second oscillating support spring (40b) engaged with the second oscillating member (36b).

9. 2. The micromechanical component of claim 1, wherein the first vibration mass (16a) performing the first harmonic vibration motion is movable in a first displacement direction oriented parallel to the substrate surface (10) with respect to the first rotor (12a) by a rotational motion of the micromechanical component about a first rotation axis oriented perpendicular to the substrate surface (10), and the second vibration mass (16b) performing the first harmonic vibration motion is movable in a second displacement direction oriented parallel to the substrate surface (10) with respect to the first rotor (12a) by a rotational motion of the micromechanical component about the first rotation axis and opposite to the first displacement direction.

10. 2. The micromechanical component according to claim 1, wherein during a rotational movement of the micromechanical component about a second axis of rotation (D2) oriented parallel to the substrate surface (10), the first rotor (12a) performing the first harmonic vibration motion is tiltable relative to the substrate about a first tilt axis (56a) oriented parallel to the substrate surface (10) and perpendicular to the second axis of rotation (D2), while during a rotational movement of the micromechanical component about a third axis of rotation (D3) oriented parallel to the substrate surface (10) and perpendicular to the second axis of rotation (D2), the first rotor (12a) performing the first harmonic vibration motion is tiltable relative to the substrate about a second tilt axis (58) oriented parallel to the substrate surface (10) and perpendicular to the first tilt axis (56a).

11. 13. An angular velocity sensor comprising the micromechanical component according to claim 1.

12. (S1), comprising a step of forming a rotor (12a), the rotor (12a) comprising a first seismic mass (16a) connected to the rotor (12a) on a first side via at least one first mass connection spring (14a) and a second seismic mass (16b) connected to the rotor (12a) on a second side remote from the first side via at least one second mass connection spring (14b), the rotor (12a) being connected to the substrate surface (10) of a substrate via at least one rotor connection spring (18a) such that the rotor (12a) together with the first seismic mass (16a) and the second seismic mass (16b) can undergo a harmonic oscillatory motion about a rotation axis (52a) oriented perpendicularly to the substrate surface, - forming (S2) a first lever member (20a), the first end of the first side of the first lever member (20a) being connected to the first seismic mass (16a) via a first lever connecting spring (22a) and the first lever member (20a) extending from the first end to a second end at a third side located between the first side and the second side of the rotor (12a); - forming (S3) a second lever member (20b), the first end of which on the second side is connected to the second seismic mass (16b) via a second lever connecting spring (22b), the second lever member (20b) extending from a first end to a second end on the third side of the rotor (12a); - forming (S4) a first lever member spring (24a) interconnecting said first lever member (20a) and said second lever member (20b); A method for manufacturing a micromechanical component for an angular velocity sensor, comprising:

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