Semiconductor package and manufacturing method thereof

Abstract

To provide a semiconductor package and a method for manufacturing the same that improves structural reliability by effectively dispersing stress applied during molding by means of a three-dimensional clip structure.SOLUTION: A semiconductor package includes one or more three-dimensional clip structures 140 structurally bonded to each metal pattern of a first substrate 110 or a second substrate 120 or the first and second substrates, one or more terminal leads 150 bonded to the first substrate or the second substrate or the first and second substrates, and a package housing 160 that is molded over the semiconductor chip 130, and the three-dimensional clip structure 140 effectively disperses stress applied during molding to improve structural reliability.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a semiconductor package and a manufacturing method thereof, and more particularly to a semiconductor package and a manufacturing method thereof that can effectively disperse stress applied during molding using a three-dimensional clip structure to improve structural reliability. [Background technology]

[0002] Generally, a semiconductor package includes a semiconductor chip mounted on a lower or upper substrate, a conductor which is a metal post that acts as a spacer attached to the semiconductor chip, a lead frame made of Cu for applying an external electrical signal, and a package housing molded with an encapsulant. The semiconductor chip is mounted on the lead frame pads, and the lead frame leads are electrically connected to the pads of the semiconductor chip by bonding wires which are signal lines via a plating layer made of Ag.

[0003] For example, as shown in FIG. 1(a), in a conventional semiconductor package, a semiconductor chip 14 is bonded onto a lower metal insulating substrate 11A via a primary joint 12, and a vertically structured hexahedral or cylindrical conductor 17, which is a metal spacer, is bonded onto the semiconductor chip 14 via a secondary joint 16 and onto an upper metal insulating substrate 11B via a tertiary joint 13, thereby forming a vertically structured metal bridge for electrical connection between the lower metal insulating substrate 11A and the upper metal insulating substrate 11B.

[0004] However, since the semiconductor chip is bonded to the substrate and the conductor through solder, different coefficients of thermal expansion (CTE) between the substrates 11A and 11B, the conductor 17, the primary joint 12, and the secondary joint 16 may cause cracks in the primary joint 12 or the secondary joint 16, as shown in FIG. 1(b), resulting in reliability problems.

[0005] That is, the main cause of cracks at the joint due to the difference in CTE is that the metal spacer bonded to the surface of the semiconductor chip is bonded directly and vertically to the upper metal insulating substrate. During molding to form the package housing, the molding die presses the upper metal insulating substrate and the metal spacer, giving a direct impact to the semiconductor chip and reducing the product yield.

[0006] Meanwhile, in order to minimize the CTE difference with the semiconductor chip, a material similar to the CTE of the semiconductor chip is selected and used instead of the metal spacer or metal post, but this is much more expensive than the existing metal spacer or metal post, which reduces the price competitiveness of the product. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Korean Patent Registration No. 10-1643332 (Clip-bonding semiconductor chip package using ultrasonic bonding and its manufacturing method, announced on July 27, 2016) [Patent Document 2] Korean Patent Registration No. 10-0867573 (Power module package with improved heat dissipation capability and manufacturing method thereof, published on November 10, 2008) [Patent Document 3] Korean Patent Publication No. 10-2001-0111736 (Power module package with insulating heat sink directly attached to the back of the lead frame, 2001.12.20.) Summary of the Invention [Problem to be solved by the invention]

[0008] The present invention has been made in consideration of the above circumstances, and its object is to provide a semiconductor package and a manufacturing method thereof that can effectively distribute stress applied during molding using a three-dimensional clip structure, thereby improving structural reliability. [Means for solving the problem]

[0009] In order to achieve the above-mentioned object, one embodiment of the present invention provides a semiconductor package including: one or more first and second substrates on which a specific metal pattern is formed to enable electrical connection; one or more semiconductor chips bonded to one side of the first substrate or the second substrate, or one of the first and second substrates; one or more three-dimensional clip structures having one side bonded to one side of the one or more semiconductor chips and the other side bonded to the metal pattern of the first substrate or the second substrate, or one of the first and second substrates; one or more terminal leads bonded to each of the first substrate or the second substrate, or one of the first and second substrates; and a package housing molded to cover the semiconductor chips, wherein one side of the three-dimensional clip structure bonded to one side of the semiconductor chip extends in an X-axis direction, and the other side of the three-dimensional clip structure bonded to the metal pattern of the first substrate or the second substrate, or one of the first and second substrates extends in a Y-axis direction perpendicular to the X-axis direction.

[0010] Here, one side of the three-dimensional clip structure includes a first surface forming a first bonding contact with the semiconductor chip, and the other side of the three-dimensional clip structure includes a second surface forming a second bonding contact with the metal pattern of the first substrate or the second substrate, and a third surface forming two separated third bonding contacts with the metal pattern of the second substrate or the first substrate, and the first and second surfaces can be bent to form a step.

[0011] In this case, the other side of the three-dimensional clip structure may extend from both sides of the second side and be bent into a semicircular arch shape.

[0012] In addition, the three-dimensional clip structure may include an upper surface and a lower surface opposite to the upper surface, and the first surface and the second surface or the third surface may be formed on the same surface of the upper surface or the lower surface.

[0013] Furthermore, the three-dimensional clip structure can be formed by laminating two or more layers of different metals.

[0014] Also, the terminal lead may be formed by laminating two or more layers of different metals.

[0015] Additionally, the first substrate or the second substrate may include one or more insulating layers.

[0016] Also, the first substrate or the second substrate may be formed of a single metal layer, or a mixed metal layer in the form of an alloy or a plating.

[0017] Furthermore, the first substrate or the second substrate may be formed by stacking one or more lower metal layers, one or more upper metal layers, and one or more insulating layers interposed between the lower metal layers and the upper metal layers.

[0018] Also, the semiconductor chip can be a power semiconductor including an IGBT, a MOSFET or a diode.

[0019] Furthermore, one side of the three-dimensional clip structure may form a lower structure that contacts one side of the semiconductor chip, and the other side of the three-dimensional clip structure may form an upper structure that contacts the metal pattern of the first substrate or the second substrate, resulting in a three-dimensional structure.

[0020] Also, the terminal leads may be joined to the first substrate, or the second substrate, or to each of the first substrate and the second substrate, by soldering, sintering or ultrasonic bonding.

[0021] Further, a part or the whole of the other side of the first substrate or the second substrate may be exposed to one side or the other side of the package housing.

[0022] Here, a heat dissipation fin may be further formed on another side of the first substrate or the second substrate exposed from the package housing.

[0023] Also, a metal layer containing 50% or more of Ni may be applied to 80% or more of a total surface area of ​​the other side of the first substrate or the second substrate exposed from the package housing.

[0024] Furthermore, a heat sink may be bonded to the other side of the first substrate or the second substrate using a heat transfer material.

[0025] Here, the heat transfer material may be bonded to the other side of the first substrate or the second substrate by hardening a solder containing Sn or a paste containing Ag or Cu.

[0026] The surface of one side of the semiconductor chip to be joined to the three-dimensional clip structure may contain 50% or more of Ag or Au.

[0027] Further, the three-dimensional clip structure may be bonded to an area of ​​30% or more of one side of the semiconductor chip, and one or more electrical connection members may be ultrasonically bonded to the remaining area of ​​70% or less of the non-overlapping one side of the semiconductor chip.

[0028] In addition, the number of the three-dimensional clip structures may be two or more, and the two or more three-dimensional clip structures may be formed separately or integrally.

[0029] Furthermore, the semiconductor package can be used in a power conversion device that converts power through the power semiconductor.

[0030] Also, a hole may be formed in the first bonding contact or the second bonding contact.

[0031] Here, the first bonding contact may further include one or more stepped bonding portions formed around the hole.

[0032] Also, the gap distance between the opposing other side surfaces of the upper stage of the semicircular arch may be 10 μm to 10 mm.

[0033] Meanwhile, another embodiment of the present invention provides a method for manufacturing a semiconductor package, the method including the steps of: preparing one or more first and second substrates on which a specific metal pattern is formed to enable electrical connection; bonding one or more semiconductor chips to one side of the first substrate or the second substrate, or one of the first and second substrates; bonding one side of one or more three-dimensional clip structures to one side of the one or more semiconductor chips and bonding the other side of the three-dimensional clip structure to the metal pattern of the first substrate or the second substrate, or one of the first and second substrates; bonding one or more terminal leads to the first substrate or the second substrate, or one of the first and second substrates; and molding a package housing to cover the semiconductor chips, wherein one side of the three-dimensional clip structure bonded to one side of the semiconductor chip extends in an X-axis direction, and the other side of the three-dimensional structure bonded to the metal pattern of the first substrate or the second substrate, or one of the first and second substrates extends in a Y-axis direction perpendicular to the X-axis direction.

[0034] Here, one side of the three-dimensional clip structure includes a first surface forming a first bonding contact with the semiconductor chip, and the other side of the three-dimensional clip structure includes a second surface forming a second bonding contact with the metal pattern of the first substrate or the second substrate, and a third surface forming two separated third bonding contacts with the metal pattern of the second substrate or the first substrate, and the first surface and the second surface can be bent to form a step.

[0035] In this case, the three-dimensional clip structure can be formed by a first step of preparing a flat clip structure formed in an orthogonal semi-cross shape, and a second step of bending both sides of the second surface into a semicircular arch shape to form a third joining contact point of the flat clip structure.

[0036] Here, after the first step, the method may further include bending the first surface and the second surface to form a step.

[0037] Also, the method may further include, after the first step, drilling holes for the first and second joining contacts on the first and second surfaces, respectively. Effect of the Invention

[0038] According to the present invention, the three-dimensional clip structure effectively distributes the CTE stress applied during molding of the package housing, elastically absorbs the compression stress so that it is not directly transmitted to the semiconductor chip, and minimizes the occurrence of cracks at the joint, thereby improving structural reliability.

[0039] In addition, by physically dividing the bonding surface of the three-dimensional clip structure that is bonded to the substrate, quality defects due to voids can be minimized and bonding strength can be improved.

[0040] Furthermore, the three-dimensional clip structure in which two semicircular arches are formed symmetrically has the effect of more effectively absorbing and dispersing pressure stress, and dispersing it in a balanced manner between the left and right sides without being biased to either side. [Brief description of the drawings]

[0041] [Figure 1] FIG. 1 illustrates a semiconductor package according to the prior art. [Diagram 2] 1 is a diagram showing a cross-sectional structure of a semiconductor package according to an embodiment of the present invention; [Diagram 3]It is a diagram showing the internal structure of the semiconductor package in FIG. 2 separated. [Figure 4] It is a diagram showing the exploded view of FIG. 3. [Diagram 5] It is a diagram showing the three-dimensional clip structure of the semiconductor package in FIG. 2 separated. [Figure 6] It is a diagram showing the bonding structure of the three-dimensional clip structure in FIG. 5. [Figure 7] It is a diagram showing another example of the three-dimensional clip structure in FIG. 5. [Figure 8] They are diagrams showing the heat dissipation structures of the semiconductor package in FIG. 2 respectively. [Figure 9] It is a diagram showing a flowchart of a method for manufacturing a semiconductor package according to another embodiment of the present invention.

Embodiments for Carrying Out the Invention

[0042] Hereinafter, with reference to the accompanying drawings, embodiments of the present invention having the above-described features will be described in more detail.

[0043] A semiconductor package according to an embodiment of the present invention includes one or more first substrates 110 and second substrates 120 on which specific metal patterns are formed to enable electrical connection; one or more semiconductor chips 130 bonded to one side of each of the first substrate 110 or the second substrate 120, or the first substrate 110 and the second substrate 120; one or more three-dimensional clip structures 140 having one side bonded to one side of the one or more semiconductor chips 130 and the other side bonded to the metal patterns of each of the first substrate 110 or the second substrate 120, or the first substrate 110 and the second substrate 120; The three-dimensional clip structure 140 includes one or more terminal leads 150 bonded to each of the semiconductor chip 130, and a package housing 160 molded to cover the semiconductor chip 130. One side of the three-dimensional clip structure 140 bonded to one side of the semiconductor chip 130 is formed to extend in the X-axis direction, and the other side of the three-dimensional clip structure 140 bonded to the metal patterns of the first substrate 110, the second substrate 120, or the first substrate 110 and the second substrate 120 is formed to extend in the Y-axis direction perpendicular to the X-axis direction, so that the three-dimensional clip structure 140 effectively distributes stress applied during molding, thereby improving structural reliability.

[0044] The semiconductor package having the above-mentioned configuration will now be described in detail with reference to the accompanying drawings.

[0045] First, the first substrate 110 and the second substrate 120 are each composed of one or more substrates, facing each other and separated by a three-dimensional clip structure 140, and specific metal patterns for gates, phases, collector contacts, cathodes, anodes, etc. are formed on the first substrate 110 and the second substrate 120 to enable electrical connection, and the semiconductor chip 130 is mounted on the first substrate 110 and the second substrate 120.

[0046] Here, the first substrate 110 and the second substrate 120 may be DBC (Direct Bonding Copper) substrates.

[0047] Also, although not shown, the first substrate 110 and / or the second substrate 120 may include one or more insulating layers, or the first substrate 110 and / or the second substrate 120 may be composed of a single metal layer or a mixed metal layer in alloy or plating form, or the first substrate 110 and / or the second substrate 120 may be formed by stacking one or more lower metal layers, one or more upper metal layers, and one or more insulating layers interposed between the lower metal layers and the upper metal layers.

[0048] For example, the insulating layer is Al 2 O 3 , AlN, Si 3 N 4 Or it is made of a single material of PI, or Al 2 O 3 , AlN, Si 3 N 4 Alternatively, it may be made of a composite material containing one or more of PIs.

[0049] Next, one or more semiconductor chips 130 are formed and bonded to one side of the first substrate 110, the second substrate 120, or both the first substrate 110 and the second substrate 120 with a conductive adhesive.

[0050] Meanwhile, the semiconductor chip 130 is a power semiconductor chip such as an IGBT (Insulated Gate Bipolar Transistor), a MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor), a diode, or a JFET (Junction Field Effect Transistor), and can be used to drive devices such as an inverter, converter, or OBC (On Board Charger) that convert or control power.

[0051] As a result, the semiconductor package according to an embodiment can be used in a power converter that converts power through a power semiconductor, for example, in a high-power power converter used for switching and controlling a motor drive that converts power from DC to AC in electric and hybrid electric vehicles.

[0052] In addition, the surface of one side of the semiconductor chip 130 that is joined to the three-dimensional clip structure 140 contains 50% or more of Ag or Au components, which can increase thermal conductivity while maintaining good electrical conductivity.

[0053] Furthermore, the three-dimensional clip structure 140 may be electrically bonded to an area of ​​30% or more of one side of the semiconductor chip 130, and the remaining area of ​​70% or less of the non-overlapping side of the semiconductor chip 130 may be electrically connected to one or more electrical connection members (e.g., conductive wires) (not shown) by ultrasonic bonding to the metal pattern.

[0054] Next, the three-dimensional clip structure 140 has a three-dimensional structure and is configured to disperse CTE (Coefficient of Thermal Expansion) stress applied from the first substrate 110 and / or the second substrate 120 during molding, and one side of the three-dimensional clip structure 140 is electrically connected to one side of one or more semiconductor chips 130, and the other side is structurally connected to the metal pattern of the first substrate 110 and / or the second substrate 120.

[0055] That is, referring to Figures 5 and 6, one side of the three-dimensional clip structure 140 joined to one side of the semiconductor chip 130 is formed to extend in the X-axis direction, and the other side of the three-dimensional clip structure 140 joined to the first substrate 110, the second substrate 120, or both the first substrate 110 and the second substrate 120 is formed to extend in the Y-axis direction, thereby effectively dispersing the CTE stress applied during molding of the package housing 160 and elastically absorbing the compression stress so that it is not directly transmitted to the semiconductor chip 130, thereby minimizing the occurrence of cracks at the joint and improving structural reliability.

[0056] Meanwhile, as shown in FIG. 4, the three-dimensional clip structure 140 can be coupled between the first substrate 110 and the second substrate 120 by alternating between an unflip state and a flip state. For example, one side of the three-dimensional clip structure 140A in the unflip state can be bonded to the first substrate 110 on which the semiconductor chip 130 is mounted, and the other side can be bonded to the second substrate 120 on which the semiconductor chip 130 is not mounted, and one side of the three-dimensional clip structure 140B in the flip state can be bonded to the second substrate 120 on which the semiconductor chip 130 is mounted, and the other side can be bonded to the first substrate 110 on which the semiconductor chip 130 is not mounted.

[0057] In this way, the three-dimensional clip structures 140A, 140B in the unflipped and flipped states are bonded between the first substrate 110 and the second substrate 120, so that the CTE stress is not concentrated on one substrate but is evenly distributed to the left and right, ensuring structural reliability.

[0058] More specifically, as shown in Fig. 5 and Fig. 6, one side of the three-dimensional clip structure 140 includes a first surface 141a forming a first bonding contact with the semiconductor chip 130, and the other side includes a second surface 141b forming a second bonding contact with the metal pattern of the first substrate 110 or the second substrate 120, and a third surface 142 forming a third bonding contact with the metal pattern of the opposing second substrate 120 or the first substrate 110. In this case, the third bonding contact may be formed in two separate forms. In addition, the first surface 141a and the second surface 141b may be bent to form a step corresponding to the difference in height between the first substrate 110 or the second substrate 120 and the semiconductor chip 130.

[0059] Referring to (b) of FIG. 5, a hole h1 is formed at the first bonding point, and a portion of the adhesive 143 (see FIG. 6) interposed between the semiconductor chip 130 and the first surface 141a of one side of the three-dimensional clip structure 140 overflows through the hole h1 and hardens, forming a passage through which air bubbles remaining in the adhesive 140 can escape, thereby increasing the adhesive strength.

[0060] Similarly, a hole h2 is formed in the second bonding contact, and a portion of the adhesive interposed between the metal pattern of the first substrate 110 or the second substrate 120 and the second surface 141b of the other side of the three-dimensional clip structure 140 overflows through the hole h2 and hardens, forming a passage through which air bubbles remaining in the adhesive can escape, thereby increasing the adhesive strength.

[0061] In addition, a bonding portion 141c having one or more stepped layers is further formed around the hole h1 at the first bonding contact point, thereby increasing the adhesive strength with the adhesive 143 that has overflowed through the hole h1 and making it possible to more effectively respond to shear stress.

[0062] Also, the third surface 142 on the other side of the three-dimensional clip structure 140 is composed of two separated third bonding contacts, and while increasing the number of bonding surfaces and expanding the bonding area to increase adhesive strength, it is possible to minimize the occurrence of voids (voids, air bubbles, or microscopic gaps) due to the characteristics of the adhesive such as solder or sintering, compared to the same single bonding area. That is, the larger the bonding area, the higher the possibility of void occurrence, but by dividing it into two bonding surfaces while maintaining the same bonding area, the area of ​​each individual bonding surface is reduced by half, making it possible to suppress the occurrence of voids.

[0063] 5(b), the other side of the three-dimensional clip structure 140 extends from both sides of the second surface 141b and is bent into a semi-circular arch to form two opposing semi-circular arches, which can disperse pressure stress more effectively than a single semi-circular arch and can disperse the pressure stress in a balanced manner, without being biased to one side. Here, the gap distance d between the opposing other side of the upper part of the semi-circular arches can be 10 μm to 10 mm.

[0064] Specifically, the three-dimensional clip structure 140 may include an upper surface and a lower surface opposite to the upper surface, and in this case, the first surface 141a forming the first bonding contact with the semiconductor chip 130 and the second surface 141b forming the second bonding contact with the metal pattern of the first substrate 110 or the second substrate 120 may be formed on the same surface, i.e., on the same surface among the upper surface and the lower surface, and the third surface 142 forming the third bonding contact with the metal pattern of the second substrate 120 or the first substrate 110 facing the first substrate 110 or the second substrate 120 forming the second bonding contact may also be formed on the same surface as the surface on which the first surface 141a and the second surface 141b are formed, i.e., on the same surface among the upper surface and the lower surface. This is because the third surface 142 extends from both sides of the second surface 141b and is bent into a semicircular arch shape.

[0065] In addition, since the three-dimensional clip structure 140 is formed by laminating two or more layers of different metals such as Cu and Al, it has good ductility and malleability properties and can effectively absorb compression stress. As a whole, it can be made of a single material of Cu or Al, or a composite material containing 50% or more of Cu or Al.

[0066] Furthermore, one side of the three-dimensional clip structure 140 forms a lower structure that contacts one side of the semiconductor chip 130, and the other side of the three-dimensional clip structure 140 forms an upper structure that contacts the metal pattern of the first substrate 110 or the second substrate 120, thereby having a three-dimensional structure, so that depending on the unflipped or flipped state, the lower structure can be bonded to the semiconductor chip 130 mounted on the first substrate 110 or the second substrate 120, and the upper structure can be bonded to the first substrate 110 or the second substrate 120 on which the semiconductor chip 130 is not mounted.

[0067] On the other hand, comparing Figures 4 and 7, as shown in Figure 4, two or more three-dimensional clip structures 140 for each semiconductor chip 130 can be formed separately, or as shown in Figure 7, two or more three-dimensional clip structures 140 can be connected to each other and formed as an integrated unit.

[0068] Next, the terminal lead 150 is composed of one or more terminal leads, which are structurally joined to the first substrate 110, the second substrate 120, or both the first substrate 110 and the second substrate 120 so that an electrical signal can be applied.

[0069] Furthermore, the terminal lead 150 can be formed by laminating two or more layers of different metals.

[0070] Furthermore, the terminal leads 150 may be joined to the first substrate 110, the second substrate 120, or the first substrate 110 and the second substrate 120, respectively, by soldering, sintering, or ultrasonic welding.

[0071] Next, referring to FIG. 2, the package housing 160 is made of EMC, PBT or PPS material and is molded to cover the semiconductor chip 130 to insulate it and protect the semiconductor chip 130 and the three-dimensional clip structure 140.

[0072] In addition, a portion or all of the other side of the first substrate 110 or the second substrate 120 is formed to be exposed to one side or the other side of the package housing 160, so that heat generated when the semiconductor chip 130 is operated can be transferred to the outside of the package housing 160 and dissipated.

[0073] 8(a), a heat dissipation fin 171 having good thermal conductivity may be formed on the other side of the first substrate 110 or the second substrate 120 exposed from the package housing 160 to effectively dissipate heat through the heat dissipation fin 171. In this case, the heat dissipation fin 171 may have a polygonal or circular cross-sectional structure to have good thermal conductivity.

[0074] In addition, a metal layer containing 50% or more of Ni may be applied to 80% or more of the total surface area of ​​the other side of the first substrate 110 or the second substrate 120 exposed from the package housing 160, so that it can maintain good strength, heat resistance, and corrosion resistance due to its characteristics of being exposed to the outside.

[0075] Alternatively, referring to FIG. 8(b), a heat sink 180 that dissipates heat using a heat transfer material 181 having good thermal conductivity characteristics may be bonded to the other side of the first substrate 110 or the second substrate 120 via a TIM (Thermal Interface Material), and a coolant such as a refrigerant, cooling oil, or cooling water may be circulated to improve cooling efficiency.

[0076] For example, the coolant may be any one of cooling water, a cooling liquid containing cooling water, cold air (air), and nitrogen, or any one or more of cooling water, a cooling liquid containing cooling water, cold air, and nitrogen may be used in combination.

[0077] Also, the heat transfer material 181 may be attached to the other side of the first substrate 110 or the second substrate 120 by hardening a solder containing Sn or a paste containing Ag or Cu.

[0078] Meanwhile, FIG. 9 is a diagram showing a procedure of a method for manufacturing a semiconductor package according to another embodiment of the present invention, which will be briefly described below with reference to this figure.

[0079] Specifically, the method for manufacturing a semiconductor package includes a step of preparing one or more first substrates 110 and second substrates 120 on which specific metal patterns are formed so as to enable electrical connection (S110); a step of bonding one or more semiconductor chips 130 to one side of the first substrate 110 or the second substrate 120, or to one side of each of the first substrate 110 and the second substrate 120 (S120); a step of bonding one side of one or more three-dimensional clip structures 140 to one side of the one or more semiconductor chips 130; The method includes a step of bonding the other side of the upper three-dimensional clip structure 140 to the metal patterns of the first substrate 110, the second substrate 120, or the first substrate 110 and the second substrate 120 (S130), a step of bonding one or more terminal leads 150 to the first substrate 110, the second substrate 120, or the first substrate 110 and the second substrate 120 (S140), and a step of molding a package housing 160 to cover the semiconductor chip 130 (S150).

[0080] Here, one side of the three-dimensional clip structure 140 which is joined to one side of the semiconductor chip 130 is formed to extend in the X-axis direction, and the other side of the three-dimensional clip structure 140 which is joined to the metal patterns of the first substrate 110, the second substrate 120, or the first substrate 110 and the second substrate 120 is formed to extend in the Y-axis direction perpendicular to the X-axis direction.

[0081] Also, one side of the three-dimensional clip structure 140 includes a first surface 141a forming a first bonding contact with the semiconductor chip 130, and the other side may include a second surface 141b forming a second bonding contact with the metal pattern of the first substrate 110 or the second substrate 120, and a third surface 142 forming a third bonding contact with the metal pattern of the opposing second substrate 120 or the first substrate 110. At this time, the third bonding contact may be formed in two separate forms. Also, the first surface 141a and the second surface 141b may be bent in accordance with the difference in height between the first substrate 110 or the second substrate 120 and the semiconductor chip 130 to form a step.

[0082] Meanwhile, the three-dimensional clip structure 140 can be specifically formed by a first step of preparing a flat clip structure formed into an orthogonal semi-cross shape (or a "T" or inverted "T" shape), and a step of bending both sides of the second surface 141b into a semicircular arch shape to form the other side of the flat clip structure.

[0083] In this case, after the first step, a third step may be further included in which the first surface 141a and the second surface 141b on one side of the flat clip structure are bent to form a step between the first surface 141a and the second surface 141b.

[0084] Alternatively, after the first step, the method may further include a fourth step of drilling holes for the first and second joining contacts on the first surface 141a or the second surface 141b, respectively.

[0085] Here, the order of the third and fourth steps includes both cases where the fourth step is performed after the third step, and where the third step is performed after the fourth step.

[0086] Therefore, with the above-mentioned configuration, the 3D clip structure can effectively distribute the CTE stress applied during molding of the package housing instead of using a metal spacer, elastically absorb the compression stress so that it is not directly transmitted to the semiconductor chip, and minimize the occurrence of cracks at the joint, thereby improving structural reliability. The joint surface of the 3D clip structure that is joined to the substrate can be physically divided to minimize quality defects due to voids and increase joint strength. The 3D clip structure with two semicircular arches formed symmetrically can more effectively absorb and distribute the compression stress, and can distribute it in a balanced manner from left to right, without being biased to either side.

[0087] It should be understood that the embodiments described in this specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and do not represent the entire technical idea of ​​the present invention, and therefore various equivalents and modifications may be available at the time of filing this application. [Explanation of symbols]

[0088] 110 First board 120 Second board 130 Semiconductor Chips 140 3D Clip Structure 141a 1st page 141b 2nd side 141c joint 142 Page 3 143 Adhesive 150 Terminal Lead 160 Package Housing 171 Heat dissipation fin 180 Heatsink 181 Heat Transfer Materials d Gap distance H1, H2 Hall

Claims

1. One or more first and second substrates on which specific metal patterns are formed to enable electrical connection; one or more semiconductor chips bonded to one side of the first substrate, the second substrate, or each of the first substrate and the second substrate; one or more three-dimensional clip structures, one side of which is bonded to one side of the one or more semiconductor chips and the other side of which is bonded to the metal patterns of the first substrate and the second substrate; one or more terminal leads bonded to the first substrate, or the second substrate, or each of the first substrate and the second substrate; a package housing molded to cover the semiconductor chip; one side of the three-dimensional clip structure bonded to one side of the semiconductor chip includes a first surface extending in an X-axis direction and forming a first bonding contact with the semiconductor chip; The other side is formed to extend in a Y-axis direction perpendicular to the X-axis direction, a second surface that forms a second bonding contact with the metal pattern of the first substrate or the second substrate; and a third surface forming two separate third bonding contacts with the second substrate or the metal pattern of the first substrate; The first surface and the second surface are folded to form a step. Semiconductor package.

2. The other side of the three-dimensional clip structure is 2. The semiconductor package of claim 1, wherein the second surface extends from both sides and is bent into a semicircular arch shape.

3. the three-dimensional clip structure includes an upper surface and a lower surface opposite the upper surface; 2. The semiconductor package of claim 1, wherein the first surface and the second surface are formed on one of the upper surface and the lower surface.

4. The three-dimensional clip structure includes:

2. The semiconductor package according to claim 1, wherein the semiconductor package is formed by laminating two or more layers of different metals.

5. The terminal lead is 2. The semiconductor package according to claim 1, wherein the semiconductor package is formed by laminating two or more layers of different metals.

6. The first substrate or the second substrate is 10. The semiconductor package of claim 1, further comprising one or more insulating layers.

7. The first substrate or the second substrate is 2. The semiconductor package according to claim 1, comprising a single metal layer or a mixed metal layer in the form of an alloy or plating.

8. The first substrate or the second substrate is 2. The semiconductor package of claim 1, wherein the semiconductor package is formed by stacking one or more lower metal layers, one or more upper metal layers, and one or more insulating layers interposed between the lower metal layers and the upper metal layers.

9. The semiconductor chip comprises:

2. The semiconductor package according to claim 1, which is a power semiconductor including an IGBT, a MOSFET, or a diode.

10. One aspect of the three-dimensional clip structure is: forming a substructure in contact with one side of the semiconductor chip; The other side of the three-dimensional clip structure is 2. The semiconductor package according to claim 1, further comprising a superstructure in contact with the metal pattern of the first substrate or the second substrate, the superstructure having a three-dimensional structure.

11. The terminal lead is 2. The semiconductor package according to claim 1, wherein the semiconductor package is bonded to the first substrate, the second substrate, or both the first substrate and the second substrate by soldering, sintering, or ultrasonic bonding.

12. A part or the whole of the other side surface of the first substrate or the second substrate is The semiconductor package according to claim 1 , wherein the insulating layer is exposed on one side or the other side of the package housing.

13. 13. The semiconductor package of claim 12, further comprising a heat dissipation fin formed on another side of the first substrate or the second substrate exposed from the package housing.

14. The semiconductor package of claim 12, characterized in that a metal layer containing 50% or more of Ni is applied to more than 80% of the total surface area of ​​the other side of the first substrate or the second substrate exposed from the package housing.

15. On the other side of the first substrate or the second substrate, 2. The semiconductor package according to claim 1, wherein a heat sink is attached using a heat transfer material.

16. The heat transfer material is 16. The semiconductor package according to claim 15, wherein the semiconductor package is bonded to the other side of the first substrate or the second substrate by hardening a solder containing Sn or a paste containing Ag or Cu.

17. The surface of one side of the semiconductor chip that is joined to the three-dimensional clip structure is 2. The semiconductor package according to claim 1, comprising at least 50% of Ag or Au.

18. The semiconductor package of claim 1, wherein the three-dimensional clip structure is bonded to an area of ​​30% or more of one side of the semiconductor chip, and one or more electrical connection members are ultrasonically bonded to the remaining area of ​​70% or less of the non-overlapping one side of the semiconductor chip.

19. The three-dimensional clip structure is two or more; The semiconductor package according to claim 1 , wherein the two or more three-dimensional clip structures are individually formed separately or integrally formed.

20. The semiconductor package includes: The semiconductor package according to claim 9, which is used in a power conversion device that converts power through the power semiconductor.

21. The semiconductor package of claim 1 , wherein the first bonding contact or the second bonding contact has a hole formed therein.

22. 22. The semiconductor package of claim 21, wherein the first bonding contact further comprises one or more stepped bonding portions formed around the hole.

23. 3. The semiconductor package according to claim 2, wherein a gap distance between the opposing side surfaces of the upper stage of the semicircular arch is 10 [mu]m to 10 mm.

24. Providing one or more first and second substrates on which specific metal patterns are formed to allow electrical connection; bonding one or more semiconductor chips to one side of the first substrate, the second substrate, or each of the first substrate and the second substrate; bonding one side of one or more three-dimensional clip structures to one side of the one or more semiconductor chips and bonding other sides of the three-dimensional clip structures to metal patterns of the first substrate and the second substrate; bonding one or more terminal leads to the first substrate, or to the second substrate, or to each of the first substrate and the second substrate; and molding a package housing to cover the semiconductor chip. one side of the three-dimensional clip structure bonded to one side of the semiconductor chip includes a first surface extending in an X-axis direction and forming a first bonding contact with the semiconductor chip; The other side is formed to extend in a Y-axis direction perpendicular to the X-axis direction, a second surface that forms a second bonding contact with the metal pattern of the first substrate or the second substrate; and a third surface forming two separate third bonding contacts with the second substrate or the metal pattern of the first substrate; The first surface and the second surface are folded to form a step.

25. The three-dimensional clip structure includes: A first step of providing a flat clip structure formed into an orthogonal half-cross shape; and 25. The method of claim 24, further comprising a second step of bending the second surface into a semicircular arch shape to form third joining contacts of the flat clip structure.

26. After the first stage, 26. The method of claim 25, further comprising bending the first surface and the second surface to form a step.

27. After the first stage, 26. The method of claim 25, further comprising drilling holes for the first and second bonding contacts on the first and second surfaces, respectively.

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