Dicing tape tension abnormality detection device and method

Abstract

To provide an apparatus and method for detecting abnormal tension of a dicing tape capable of quantitatively determining whether the tension of a dicing tape is appropriate or not, and accurately detecting abnormality in the tension of the dicing tape.SOLUTION: A tension abnormality detection device 4 includes an air micrometer 41 that measures the tension of the dicing tape DT at a measuring point P on the basis of the displacement of the dicing tape DT when air is blown to the measuring point P where a workpiece W is not attached in the dicing tape DT, and a determination unit 42 that determines that the tension of the dicing tape DT is appropriate when the tension of the dicing tape DT at the measurement point P falls within a preset appropriate range of the tension of the dicing tape DT, and determines that the tension of the dicing tape DT is abnormal when the tension of the dicing tape DT at the measurement point P does not belong to the appropriate range.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a device and method for detecting abnormal tension of a dicing tape.

Background Art

[0002] In the semiconductor manufacturing field, there is a process of dicing a semiconductor substrate such as a silicon wafer (hereinafter referred to as "work") into chips. In this process, the dicing tape attached to the work restrains the positions of individual chips, enabling efficient dicing of the chips.

[0003] Patent Document 1 describes attaching an expand tape E to a wafer W adsorbed and fixed to a table 211 by the pressing force of an attaching roller. The reference numerals are those of Patent Document 1.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, when using a new dicing tape, at present, a sample work is attached to the dicing tape, and the operator visually checks the attachment state to adjust parameters including the tension of the dicing tape. Also, in the production process, the operator regularly visually checks that the parameters are properly maintained from the attachment state of the dicing tape to which the work is attached.

[0006] When the tension of the dicing tape is visually checked by the operator in this way, there is a risk that the tension of the dicing tape may become insufficient depending on the skill level of the operator or the like. When the tension of the dicing tape is not appropriate, an appropriate interval between chips cannot be ensured during expansion, and there is a problem that it becomes difficult to detect the position of the chips.

[0007] Therefore, a technical problem to be solved arises in order to quantitatively determine whether the tension of the dicing tape is appropriate and accurately detect an abnormality in the tension of the dicing tape. The present invention aims to solve this problem.

Means for Solving the Problem

[0008] In order to achieve the above object, a device for detecting an abnormality in the tension of a dicing tape according to the present invention is a device for detecting an abnormality in the tension of a dicing tape to which a workpiece is attached, Based on the displacement of the dicing tape when gas is blown onto the measurement point on the dicing tape where the workpiece is not attached, at the measurement point a measuring unit that measures the tension of the dicing tape, and when the tension of the dicing tape belongs to a preset appropriate range of the tension of the dicing tape, it is determined that the tension of the dicing tape is appropriate, and when the tension of the dicing tape does not belong to the appropriate range, a determination unit that determines that the tension of the dicing tape is abnormal.

[0009] According to this configuration, since the measuring unit measures the tension of the dicing tape and the determination unit quantitatively determines whether the tension of the dicing tape is appropriate based on the tension of the dicing tape, an abnormality in the tension of the dicing tape can be accurately detected.

[0010] Also, in order to achieve the above object, a method for detecting an abnormality in the tension of a dicing tape according to the present invention is a method for detecting an abnormality in the tension of a dicing tape to which a workpiece is attached, Based on the displacement of the dicing tape when gas is blown onto the measurement point on the dicing tape where the workpiece is not attached, at the measurement point A step of measuring the tension of the dicing tape, and when the tension of the dicing tape belongs to the proper range of the tension of the dicing tape set in advance, it is determined that the tension of the dicing tape is appropriate, and when the tension of the dicing tape does not belong to the proper range, it is determined that the tension of the dicing tape is abnormal.

[0011] According to this configuration, since the measuring unit measures the tension of the dicing tape and the determination unit quantitatively determines the propriety of the tension of the dicing tape based on the tension of the dicing tape, it is possible to accurately detect an abnormality in the tension of the dicing tape.

Effect of the Invention

[0012] The present invention can quantitatively determine the propriety of the tension of the dicing tape and accurately detect an abnormality in the tension of the dicing tape.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Mode for Carrying Out the Invention

[0014] Embodiments of the present invention will be described with reference to the drawings. In the following, when referring to the number of components, numerical values, amounts, ranges, etc., unless otherwise specifically stated or limited to a specific number in principle, it is not limited to that specific number, and it may be more or less than the specific number.

[0015] In addition, when referring to the shape, positional relationship, etc. of components, etc., unless otherwise specifically stated or considered not to be so in principle, it includes those substantially similar or analogous to the shape, etc.

[0016] Also, the drawings may exaggerate by omitting some components or enlarging characteristic parts in order to make the features easier to understand, and the dimensional ratios of the components are not necessarily the same as the actual ones. Also, in cross-sectional views, the hatching of some components may be omitted in order to make the cross-sectional structure of the components easier to understand. In this embodiment, expressions indicating directions such as up and down, left and right, etc. are not absolute, and are appropriate when each component is in the posture depicted in the drawing, but should be interpreted as being changed according to the change in the posture when the posture changes.

[0017] FIG. 1 is a perspective view showing a tape sticking system 1. The tape sticking system 1 integrally sticks a dicing tape DT to a work W and a dicing frame DF. The work W is, for example, a semiconductor substrate such as a silicon wafer, but is not limited thereto. The dicing tape DT is an ultraviolet curable tape or the like.

[0018] The tape sticking system 1 includes a conveying device 2, a sticking device 3, and a tension abnormality detection device (hereinafter simply referred to as the "tension abnormality detection device") 4 for the dicing tape DT.

[0019] The transfer device 2 includes an inner peripheral table 21 that holds the workpiece W on its upper surface at the center, an outer peripheral table 22 on which the dicing frame DF is placed, and a slider 23 that slides the inner peripheral table 21 and the outer peripheral table 22 along the transfer direction D1.

[0020] An adsorbent made of a porous material having innumerable pores is embedded in the surface of the inner peripheral table 21. The roughness of the pores of the adsorbent is, for example, #400 or #800, etc.

[0021] The inner peripheral table 21 is switchably connected to a vacuum source and a compressed air source (not shown). When the vacuum source is activated, a negative pressure is supplied between the workpiece W placed on the inner peripheral table 21 and the upper surface (adsorption surface) of the adsorbent, and the workpiece W is adsorbed and held on the adsorption surface. Also, when the compressed air source is activated, compressed air (release air) is supplied between the workpiece W and the adsorption surface, and the adsorption between the workpiece W and the adsorption surface is released.

[0022] The pasting device 3 is a tape pasting device for a dicing tape DT having a known configuration. The pasting device 3 includes a feed roller 31 that supports the dicing tape DT so as to be feedable, a take-up roller 32 that imparts a feed output to the dicing tape DT and winds it up, first to sixth guide rollers 33a to 33f that apply tension to the dicing tape DT and regulate the trajectory of the dicing tape DT, a pressing roller 34 that pastes the dicing tape DT onto the workpiece W, and a knife plate 35 that regulates the trajectory of the separator S peeled from the dicing tape DT.

[0023] The tension abnormality detection device 4 includes an air micrometer 41 as a measurement unit that measures the tension of the dicing tape DT.

[0024] The air micrometer 41 is disposed above the passing area of the slider 23. The air micrometer 41 is connected to a slide mechanism (not shown) that is slidable in the width direction D2 perpendicular to the conveyance direction D1 of the air micrometer 41. The air micrometer 41 is, for example, an air micrometer (Delta 22H) manufactured by Tokyo Seimitsu Co., Ltd.

[0025] As shown in FIG. 2, four measurement points P where the air micrometer 41 measures the tension are set at locations on the dicing tape DT where the work W is not attached. Hereinafter, when distinguishing each measurement point P, reference numerals P1, P2, P3, and P4 are attached for distinction. The measurement point P1 is set in front of the work W in the conveyance direction D1, and the measurement point P2 is set behind the work W in the conveyance direction D1. Further, the measurement points P3 and P4 are set on the sides of the work W in the width direction D2, respectively.

[0026] As shown in FIG. 3, the air micrometer 41 ejects air at a constant pressure from the air nozzle 41a toward the measurement point P to deflect the dicing tape DT, and the air flow rate changes due to the change in the gap dimension between the air nozzle 41a and the dicing tape DT, causing the position of the float 41b to change. Then, based on the relationship between the tension of the dicing tape DT obtained in advance through experiments or the like and the position of the float 41b that moves up and down according to the tension of the dicing tape DT, the tension of the dicing tape DT is measured from the position of the float 41b.

[0027] The operation of the tape attachment system 1 is controlled via the controller 5 shown in FIG. 4. The controller 5 controls each component constituting the tape attachment system 1. The controller 5 is, for example, a computer and is composed of a CPU, a memory, etc. Note that the function of the controller 5 may be realized by controlling using software or may be realized by an operation using hardware.

[0028] Next, the operation of the tape attachment system 1 will be described based on the drawings.

[0029] <Work transfer> First, the dicing frame DF is transferred onto the outer peripheral table 22 by a transfer hand (not shown) or the like.

[0030] Next, the work W is transferred onto the inner peripheral table 21 by a transfer hand (not shown) or the like. Then, when negative pressure is supplied between the work W and the adsorption surface from a compressed air source, the work W is adsorbed to the inner peripheral table 21. The upper surface of the work W and the upper surface of the dicing frame DF are set to be substantially flush.

[0031] <Tape attachment> Next, as shown in FIG. 5, the slider 23 is driven to move the inner peripheral table 21 and the outer peripheral table 22 so that one end (attachment start position) of the dicing frame DF is disposed below the attachment device 3. The moving speeds of the inner peripheral table 21 and the outer peripheral table 22 are set to, for example, 10 mm / second.

[0032] Next, the take-up roller 32 rotates to pay out the dicing tape DT, and the pressing roller 34 presses the dicing tape DT against one end of the dicing frame DF and attaches it with a predetermined pressing force. The rotation speed of the take-up roller 32 is set to, for example, 10 mm / second.

[0033] Thereafter, the inner peripheral table 21 and the outer peripheral table 22 move along the conveyance direction D1, the dicing tape DT is gradually advanced, and when the dicing tape DT reaches the other end (attachment end position) of the dicing frame DF, the work W and the dicing frame DF are integrally attached via the dicing tape DT.

[0034] <Tension determination> Next, as shown in FIG. 6, the slider 23 is driven to move the inner peripheral table 21 and the outer peripheral table 22 so that the dicing tape DT is positioned below the air micrometer 41.

[0035] Further, while moving the inner peripheral table 21 and the outer peripheral table 22 in the conveyance direction D1, the air micrometer 41 is moved in the width direction D2, so that the air micrometer 41 measures the tension of the dicing tape DT at the measurement points P1, P2, P3, and P4. The measurement data of the air micrometer 41 is sent to the determination unit 42 shown in FIG. 4.

[0036] By the way, the tension distribution in the dicing tape DT is formed such that the center in the width direction D2 is the highest and gradually decreases toward the outside in the width direction D2. That is, in the tension distribution in the dicing tape DT, the tension at the measurement points P1 and P2 is the maximum, and the tension at the measurement points P3 and P4 is smaller than that at the measurement points P1 and P2.

[0037] Next, the determination unit 42 determines whether each measured value of the tension of the dicing tape DT at the measurement point P belongs to the appropriate range.

[0038] Specifically, when the tension of the dicing tape DT at the measurement point P is within the appropriate range, it is determined that the tension of the dicing tape DT is appropriate, and when the tension of the dicing tape DT at the measurement point P does not belong to the appropriate range, it is determined that the tension of the dicing tape DT is abnormal. The appropriate range of the tension of the dicing tape DT is calculated in advance by experiments or the like and stored in the storage unit 43 shown in FIG. 4.

[0039] Also, when it is determined that the tension of the dicing tape DT is abnormal, the tension abnormality detection device 4 may notify the tension abnormality via the notification unit 44 shown in FIG. 4. The notification by the notification unit 44 may be any of light, sound, or a text message.

[0040] Also, when it is determined that the tension of the dicing tape DT is abnormal, the tension abnormality detection device 4 may control the moving speed of the slider 23 and the winding speed of the winding roller 32 so that the tension of the dicing tape DT to be attached to the next work W of the work W whose tension has been measured by the correction unit 45 shown in FIG. 4 falls within the appropriate range.

[0041] Generally, the tension of the dicing tape DT is set according to the relative speed between the slider 23 and the take-up roller 32. That is, when the moving speed of the slider 23 is relatively high with respect to the take-up speed of the take-up roller 32, the tension acting on the dicing tape DT increases. On the other hand, when the moving speed of the slider 23 is relatively low with respect to the take-up speed of the take-up roller 32, the tension acting on the dicing tape DT decreases.

[0042] Therefore, when the determination unit 42 determines that the tension of the dicing tape DT is below the appropriate range, the correction unit 45 increases the moving speed of the slider 23 or decreases the take-up speed of the take-up roller 32 so as to increase the tension of the dicing tape DT.

[0043] On the other hand, when the determination unit 42 determines that the tension of the dicing tape DT exceeds the appropriate range, the correction unit 45 decreases the moving speed of the slider 23 or increases the take-up speed of the take-up roller 32 so as to decrease the tension of the dicing tape DT.

[0044] In addition, although the tension abnormality detection device 4 according to the above-described embodiment has been described by taking the configuration using the air micrometer 41 as the measurement unit as an example, the measurement unit may be any device that non-contact measures the tension of the dicing tape DT based on the displacement amount of the dicing tape DT when gas is blown onto the dicing tape DT. For example, as shown in FIG. 7, a measuring instrument 46 including an air nozzle 46a and a laser displacement meter 46b may be used.

[0045] The measuring instrument 46 as the measurement unit shown in FIG. 7 blows air at a constant pressure from the air nozzle 46a toward the measurement point P to deflect the dicing tape DT, and based on the relationship between the tension of the dicing tape DT and the displacement amount of the dicing tape DT obtained in advance by experiments or the like, the laser displacement meter 46b measures the tension of the dicing tape DT from the displacement amount of the dicing tape DT.

[0046] In addition, regarding the tension abnormality detection device 4 according to the above-described embodiment, the case where the determination unit 42 determines whether each measured value of the tension of the dicing tape DT at the measurement points P1, P2, P3, and P4 belongs to the appropriate range has been described as an example. However, it may be configured to determine only whether the maximum value of the tension of the dicing tape DT at the measurement points P1 and P2 belongs to the appropriate range so that an excessive tension does not act on the dicing tape DT, or it may be configured to determine only whether the minimum value of the tension of the dicing tape DT at the measurement points P3 and P4 belongs to the appropriate range so that an insufficient tension does not act on the dicing tape DT.

[0047] In addition, regarding the tension abnormality detection device 4 according to the above-described embodiment, the measurement points P of the air micrometer 41 are set to four points. However, the number and positions of the measurement points P can be arbitrarily changed as long as the tension within the dicing tape DT can be reasonably grasped. For example, as shown in FIG. 8, the measurement points P may be set to eight points arranged at equal intervals from each other on concentric circles. In this case, a finer tension distribution within the dicing tape DT can be obtained as compared with the case where there are four measurement points P shown in FIG. 8.

[0048] In this way, the tension abnormality detection device 4 according to the present embodiment includes an air micrometer 41 that measures the tension of the dicing tape DT, and when the tension of the dicing tape DT belongs to the preset appropriate range of the tension of the dicing tape DT, it is determined that the tension of the dicing tape DT is appropriate, and when the tension of the dicing tape DT does not belong to the appropriate range, it is determined that the tension of the dicing tape DT is abnormal, and a determination unit 42 is provided.

[0049] According to this configuration, since the air micrometer 41 measures the tension of the dicing tape DT in a non-contact manner and the determination unit 42 can quantitatively determine the appropriateness of the tension of the dicing tape DT based on the tension of the dicing tape DT, the tension abnormality of the dicing tape DT can be accurately detected.

[0050] Furthermore, since the air micrometer 41 can measure the tension of the dicing tape DT without contacting it, it is possible to detect an abnormal tension of the dicing tape DT without damaging the dicing tape DT and the workpiece W.

[0051] In addition, the tension abnormality detection device 4 is configured to measure the tension of the dicing tape DT at the measurement point P based on the displacement of the dicing tape DT when the air micrometer 41 blows air onto the measurement point P on the dicing tape DT where the workpiece W is not attached.

[0052] According to this configuration, since the air micrometer 41 directly measures the tension of the dicing tape DT at the measurement point P without contact, it is possible to accurately detect an abnormal tension of the dicing tape DT.

[0053] In addition, the tension abnormality detection device 4 is further configured to include a correction unit 45 that corrects the tension of the dicing tape DT to which the next workpiece W is to be attached when the tension of the dicing tape DT at the measurement point P deviates from the appropriate range.

[0054] According to this configuration, when an abnormal tension of the dicing tape DT is detected, the correction unit 45 corrects the tension of the dicing tape DT to which the subsequent workpiece W is to be attached, so that it is possible to suppress the outflow of the dicing tape DT with abnormal tension.

[0055] In addition, the tension abnormality detection device 4 is configured such that the measurement points P1 and P2 are set in front of or behind the workpiece W in the conveyance direction D1 in which the dicing tape DT moves relative to the workpiece W in a plan view.

[0056] According to this configuration, since the measurement points P1 and P2 are set at the location where the tension acting on the dicing tape DT is the highest, it is possible to suppress an excessive increase in the tension acting on the dicing tape DT by determining whether the maximum value of the tension acting on the dicing tape DT belongs within the appropriate range.

[0057] Further, the tension abnormality detection device 4 is configured such that the measurement points P3 and P4 are set on the sides of the work W in the width direction D2 of the dicing tape DT in a plan view.

[0058] According to this configuration, since the measurement points P3 and P4 are set at locations where the tension acting on the dicing tape DT tends to be low, by determining whether the minimum value of the tension acting on the dicing tape DT belongs within an appropriate range, it is possible to suppress the tension acting on the dicing tape DT from becoming too small.

[0059] Further, the tension abnormality detection device 4 is configured to further include a notification unit 44 that notifies of a tension abnormality when the determination unit 42 determines that the tension of the dicing tape DT is abnormal.

[0060] According to this configuration, when a tension abnormality of the dicing tape DT is detected, since the notification unit 44 notifies of the tension abnormality of the dicing tape DT, it is possible to suppress the outflow of the dicing tape DT with an abnormal tension.

[0061] Also, the method for detecting an abnormality in the tension of the dicing tape DT to which the work W according to the present embodiment is adhered includes a step in which the air micrometer 41 measures the tension of the dicing tape DT, and when the tension of the dicing tape DT belongs within a preset appropriate range of the tension of the dicing tape DT, it is determined that the tension of the dicing tape DT is appropriate, and when the tension of the dicing tape DT does not belong within the appropriate range, a step in which the determination unit 42 determines that the tension of the dicing tape DT is abnormal.

[0062] According to this configuration, since the air micrometer 41 measures the tension of the dicing tape DT in a non-contact manner and the determination unit 42 can quantitatively determine the propriety of the tension of the dicing tape DT based on the tension of the dicing tape DT, it is possible to accurately detect an abnormality in the tension of the dicing tape DT.

[0063] Furthermore, since the air micrometer 41 can measure the tension of the dicing tape DT without contacting it, it is possible to detect an abnormal tension of the dicing tape DT without damaging the dicing tape DT and the workpiece W.

[0064] In addition, the present invention can be variously modified other than the above as long as it does not depart from the spirit of the present invention, and it is natural that the present invention extends to the modified ones.

[0065] Moreover, the measuring unit is not limited to directly measuring the tension of the dicing tape based on the displacement of the dicing tape as described above, and it may indirectly measure the tension of the dicing tape.

Explanation of Reference Numerals

[0066] 1: Tape sticking system 2: Conveying device 21: Inner peripheral table 22: Outer peripheral table 23: Slider 3: Sticking device 31: Feeding roller 32: Take-up roller 33a~33f: Guide roller 34: Pressing roller 35: Knife plate 4: Tension abnormality detection device 41: Air micrometer (measuring unit) 41a: Air nozzle 41b: Float 42: Judgment unit 43: Storage unit 44: Notification unit 45: Correction unit 46: Measuring instrument (measuring unit) 46a: Air nozzle 46b: Laser displacement meter D1: Conveying direction D2: Width direction DF: Dicing frame DT: Dicing tape W: Workpiece

Claims

1. A device for detecting abnormal tension of a dicing tape to which a workpiece is attached, a measuring unit that measures the tension of the dicing tape at the measurement point based on the displacement of the dicing tape when gas is blown onto a measurement point on the dicing tape where the workpiece is not attached; a determination unit that determines that the tension of the dicing tape is appropriate when the tension of the dicing tape belongs to a preset appropriate range of the tension of the dicing tape, and determines that the tension of the dicing tape is abnormal when the tension of the dicing tape does not belong to the appropriate range; A device for detecting abnormal tension of a dicing tape, comprising the above.

2. The device for detecting abnormal tension of a dicing tape according to claim 1, further comprising a correction unit that corrects the tension of the dicing tape to which the workpiece will be attached next when the tension of the dicing tape at the measurement point deviates from the appropriate range.

3. The device for detecting abnormal tension of a dicing tape according to claim 1 or 2, wherein the measurement point is set in front of or behind the workpiece in the conveyance direction in which the workpiece moves relative to the measurement unit in a plan view.

4. The device for detecting abnormal tension of a dicing tape according to any one of claims 1 to 3, wherein the measurement point is set on the side of the workpiece in the width direction perpendicular to the conveyance direction in which the workpiece moves relative to the measurement unit in a plan view.

5. The device for detecting abnormal tension of a dicing tape according to any one of claims 1 to 4, further comprising a notification unit that notifies of abnormal tension when the determination unit determines that the tension of the dicing tape is abnormal.

6. A method for detecting abnormal tension of a dicing tape to which a workpiece is attached, a step of measuring the tension of the dicing tape at the measurement point based on the displacement of the dicing tape when gas is blown onto a measurement point on the dicing tape where the workpiece is not attached; When the tension of the dicing tape belongs to the appropriate range of the tension of the dicing tape set in advance, it is determined that the tension of the dicing tape is appropriate. When the tension of the dicing tape does not belong to the appropriate range, a step of determining that the tension of the dicing tape is abnormal; A method for detecting abnormal tension of a dicing tape, characterized by including the above.

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