Actuator

Abstract

To provide an actuator capable of greatly tilting a driven member.SOLUTION: An actuator 100 includes a case member 1, movable members MB, an upper support member 2U, and a lower support member 2D. The upper support member 2U includes: an upper fixation-side portion 2U3 that is connected to the upper end of the case member 1; an upper movable-side portion 2U1 that is connected to respective upper ends of four movable members MB in a rotatable manner; and an upper intermediate portion 2U2 connecting the upper fixation-side portion 2U3 and the upper movable-side portion 2U1. The lower support member 2D includes: a lower fixation-side portion 2D3 that is connected to the lower end of the case member 1; a lower movable-side portion 2D1 that is connected to respective lower ends of the four movable members MB in a rotatable manner; and a lower intermediate portion 2D2 connecting the lower fixation-side portion 2D3 and the lower movable-side portion 2D1. The actuator 100 moves, in a driving direction, at least one of the four movable members MB to tilt an optical element OE which is fixed to the upper movable-side portion 2U1.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an actuator.

Background Art

[0002] Conventionally, a device for tilting an optical element by utilizing a Lorentz force generated between four magnets connected to a movable member including a mirror and four coils connected to a fixed member is known (see Patent Document 1). Further, a device for tilting a mirror by utilizing a Lorentz force generated between four coils connected to a movable member including a mirror and eight magnets connected to a fixed member is known (see Patent Document 2).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] The above-described device can tilt a mirror in a desired direction. However, in such a device, if the mirror is tilted greatly, there is a risk that the magnet and the coil will interfere with each other.

[0005] Therefore, it is desirable to provide an actuator that can tilt a driven member such as a mirror greatly.

Means for Solving the Problems

[0006] The actuator according to an embodiment of the present invention includes a fixed member, a plurality of movable members, a driving device that moves each of the plurality of movable members in a predetermined driving direction with respect to the fixed member, and a first support member and a second support member that support each of the plurality of movable members so as to be movable in the driving direction with respect to the fixed member. The first support member includes a first fixed-side portion connected to one end portion of the fixed member in the driving direction, a first movable-side portion rotatably connected to one end portion of each of the plurality of movable members in the driving direction, and a first intermediate portion that elastically connects between the first fixed-side portion and the first movable-side portion. The second support member includes a second fixed-side portion connected to the other end portion of the fixed member in the driving direction, a second movable-side portion rotatably connected to the other end portion of each of the plurality of movable members in the driving direction, and a second intermediate portion that elastically connects between the second fixed-side portion and the second movable-side portion. The driving device is configured to drive a driven member fixed to the first movable-side portion by moving at least one of the plurality of movable members in the driving direction. , the first intermediate portion includes a pair of shaft portions constituting a rotation axis, the second intermediate portion includes another pair of shaft portions constituting another rotation axis parallel to the rotation axis, and the driving device rotates the first support member around the rotation axis and rotates the second support member around the other rotation axis by moving at least one of the plurality of movable members in the driving direction. 。

Advantages of the Invention

[0007] The above-described actuator can greatly tilt the driven member.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Figure 18

Embodiments for Carrying out the Invention

[0009] Hereinafter, with reference to the drawings, the actuator 100 according to an embodiment of the present invention will be described. FIG. 1 is a perspective view of the actuator 100. FIG. 2 is a perspective view of the actuator 100 with the illustration of some members (the case member 1 and the fastening member 3) omitted. In FIG. 1, X1 represents one direction of the X-axis constituting the three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X-axis. Also, Y1 represents one direction of the Y-axis constituting the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y-axis. Similarly, Z1 represents one direction of the Z-axis constituting the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z-axis. In the present embodiment, the X1 side of the actuator 100 corresponds to the front side (front face side) of the actuator 100, and the X2 side of the actuator 100 corresponds to the rear side (rear face side) of the actuator 100. Also, the Y1 side of the actuator 100 corresponds to the left side of the actuator 100, and the Y2 side of the actuator 100 corresponds to the right side of the actuator 100. And the Z1 side of the actuator 100 corresponds to the upper side of the actuator 100, and the Z2 side of the actuator 100 corresponds to the lower side of the actuator 100. The same applies to other figures. The same also applies to the members constituting the actuator 100.

[0010] In the illustrated example, the actuator 100 is configured to be able to move the optical element OE as a driven member. Specifically, the actuator 100 is configured to translate the optical element OE along the central axis CX of the actuator 100 extending parallel to the Z-axis direction, and to rotate the optical element OE around the rotation axis AX in a plane perpendicular to the central axis CX. More specifically, the rotation axis AX includes a first rotation axis AX1 parallel to the X-axis and a second rotation axis AX2 parallel to the Y-axis. The central axis CX, the first rotation axis AX1, and the second rotation axis AX2 are perpendicular to each other and intersect orthogonally at the center point CP of the optical element OE. The center point CP of the optical element OE may be a point on the upper surface (the surface on the Z1 side) of the optical element OE, may be a point on the lower surface (the surface on the Z2 side) of the optical element OE, or may be a point on a virtual plane located in the middle between the upper surface and the lower surface of the optical element OE. In the illustrated example, the center point CP of the optical element OE is a point on the upper surface (the surface on the Z1 side) of the optical element OE. In this case, the actuator 100 can tilt the optical element OE without changing the position of the intersection of the central axis CX and the upper surface of the optical element OE.

[0011] Specifically, as shown in FIG. 1, the actuator 100 includes a case member 1 as a fixed member FB, a movable member MB (first movable member MB1 to fourth movable member MB4), a support member 2 that movably supports the movable member MB with respect to the case member 1, and a fastening member 3 for fastening the support member 2 to the case member 1.

[0012] The case member 1 is a member that constitutes the main body of the actuator 100. In the illustrated example, the case member 1 is formed of a magnetic material that constitutes a part of the magnetic circuit described later. However, the case member 1 may be formed of a non-magnetic material. In this case, a part of the magnetic circuit described later may be embedded in the case member 1 as a member separate from the case member 1, or may be fixed to the case member 1. Specifically, the case member 1 may be formed of synthetic resin, may be formed of metal, or may be formed of ceramics, rubber, glass, or the like. Alternatively, the case member 1 may be formed of two or more materials. For example, the case member 1 may include a portion formed of synthetic resin and a portion formed of metal. In this case, the case member 1 may be formed by insert molding.

[0013] The movable member MB is a member that can move relative to the fixed member FB. In the illustrated example, the movable member MB is configured to be movable in the driving direction, which is a direction parallel to the Z-axis direction, by a driving device DM (see FIGS. 11, 12, and 15). Specifically, the movable member MB includes a first movable member MB1 to a fourth movable member MB4, and the driving device DM includes a first driving device DM1 to a fourth driving device DM4. And the first movable member MB1 to the fourth movable member MB4 are configured to be movable independently of each other by the first driving device DM1 to the fourth driving device DM4. More specifically, the first movable member MB1 is configured to be movable in the driving direction by the first driving device DM1 (see FIG. 11), the second movable member MB2 is configured to be movable in the driving direction by the second driving device DM2 (see FIG. 11), the third movable member MB3 is configured to be movable in the driving direction by the third driving device DM3 (see FIG. 12), and the fourth movable member MB4 is configured to be movable in the driving direction by the fourth driving device DM4 (see FIG. 15). And the first movable member MB1 and the second movable member MB2 are arranged to be line-symmetrical with respect to the second rotation axis AX2 in a top view, and the third movable member MB3 and the fourth movable member MB4 are arranged to be line-symmetrical with respect to the second rotation axis AX2 in a top view. Also, the first movable member MB1 and the fourth movable member MB4 are arranged to be line-symmetrical with respect to the first rotation axis AX1 in a top view, and the second movable member MB2 and the third movable member MB3 are arranged to be line-symmetrical with respect to the first rotation axis AX1 in a top view.

[0014] The support member 2 includes an upper support member 2U fixed to the upper end portion (the end portion on the Z1 side) of the case member 1 and a lower support member 2D fixed to the lower end portion (the end portion on the Z2 side) of the case member 1. In the illustrated example, the upper support member 2U and the lower support member 2D are the same component formed of a leaf spring and have the same shape and the same size.

[0015] Specifically, as shown in FIG. 3, the upper support member 2U includes an upper movable-side portion 2U1 located innermost, an upper fixed-side portion 2U3 located outermost, and an upper intermediate portion 2U2 located between the upper movable-side portion 2U1 and the upper fixed-side portion 2U3.

[0016] FIG. 3 is a top view of the upper support member 2U to which the optical element OE is attached. In FIG. 3, for clarity, a rough dot pattern is applied to the upper movable-side portion 2U1 and the upper fixed-side portion 2U3, and a fine dot pattern is applied to the upper intermediate portion 2U2.

[0017] In the illustrated example, the optical element OE is adhesively fixed to the center of the upper movable-side portion 2U1 of the upper support member 2U with an adhesive. However, the optical element OE may be fitted into a through hole formed in the center of the upper movable-side portion 2U1. Also, in the illustrated example, the optical element OE is configured to be rectangular in a top view, but it may be configured to have other shapes such as circular, elliptical, or polygonal in a top view. Further, in the illustrated example, the optical element OE is configured to be flat, but it may be configured to have a three-dimensional shape such as spherical, frustum of a cone, frustum of a pyramid, cylindrical, elliptical cylindrical, or polygonal cylindrical.

[0018] Specifically, the upper support member 2U includes an upper fixed-side portion 2U3 connected to the upper end portion of the case member 1, an upper movable-side portion 2U1 rotatably connected to the upper end portions of the four movable members MB (first movable member MB1 to fourth movable member MB4), and an upper intermediate portion 2U2 that elastically connects between the upper fixed-side portion 2U3 and the upper movable-side portion 2U1.

[0019] The fact that the upper movable-side portion 2U1 is rotatable with respect to the upper end portion of the first movable member MB1 means that, for example, a virtual plane including the upper surface of the upper movable-side portion 2U1 can be inclined at an inclination angle within a predetermined angle range in an arbitrary direction with respect to the center line of the first movable member MB1 (a line parallel to the Z-axis) extending in the driving direction of the first movable member MB1. In the illustrated example, the predetermined angle range is from -20 degrees to +20 degrees.

[0020] The upper middle portion 2U2 includes a shaft portion 2S and an annular portion 2M. The shaft portion 2S includes a rear shaft portion 2SB, a front shaft portion 2SF, a left shaft portion 2SL, and a right shaft portion 2SR. The rear shaft portion 2SB and the front shaft portion 2SF, which are a pair of shaft portions, constitute a first rotation axis AX1, and the left shaft portion 2SL and the right shaft portion 2SR, which are another pair of shaft portions, constitute a second rotation axis AX2.

[0021] Specifically, the left shaft portion 2SL and the right shaft portion 2SR are configured to elastically connect the annular portion 2M and the upper movable portion 2U1, and the rear shaft portion 2SB and the front shaft portion 2SF are configured to elastically connect the annular portion 2M and the upper fixed portion 2U3. The annular portion 2M is configured not to elastically deform. This is to ensure that the shaft portion 2S can elastically deform reliably when the movable member MB moves. However, the annular portion 2M may be configured to elastically deform slightly.

[0022] In the illustrated example, the upper fixed portion 2U3 has a rear side portion 2U3B, a front side portion 2U3F, a left side portion 2U3L, and a right side portion 2U3R. The rear shaft portion 2SB is configured to elastically connect the annular portion 2M and the rear side portion 2U3B of the upper fixed portion 2U3, and the front shaft portion 2SF is configured to elastically connect the annular portion 2M and the front side portion 2U3F of the upper fixed portion 2U3. Also, the left shaft portion 2SL is configured to elastically connect the annular portion 2M and the left side portion of the upper movable portion 2U1, and the right shaft portion 2SR is configured to elastically connect the annular portion 2M and the right side portion of the upper movable portion 2U1. However, the left shaft portion 2SL may be configured to elastically connect the annular portion 2M and the left side portion 2U3L of the upper fixed portion 2U3, and the right shaft portion 2SR may be configured to elastically connect the annular portion 2M and the right side portion 2U3R of the upper fixed portion 2U3. In this case, the rear shaft portion 2SB may be configured to elastically connect the annular portion 2M and the rear side portion of the upper movable portion 2U1, and the front shaft portion 2SF may be configured to elastically connect the annular portion 2M and the front side portion of the upper movable portion 2U1.

[0023] In the illustrated example, the four shaft portions 2S are arranged such that the first rotation axis AX1 and the second rotation axis AX2 are orthogonal to each other. However, they may be arranged such that the first rotation axis AX1 and the second rotation axis AX2 intersect each other at an angle other than a right angle. Further, the four shaft portions 2S may be arranged such that the first rotation axis AX1 extends along one of the two diagonals of the rectangular optical element OE and the second rotation axis AX2 extends along the other of the two diagonals.

[0024] Further, the upper movable side portion 2U1 and the upper fixed side portion 2U3 may be elastically connected by four shaft portions 2S (rear shaft portion 2SB, front shaft portion 2SF, left shaft portion 2SL, and right shaft portion 2SR). That is, the upper intermediate portion 2U2 may be constituted by the rear shaft portion 2SB, the front shaft portion 2SF, the left shaft portion 2SL, and the right shaft portion 2SR, and the annular portion 2M may be omitted. In this case, the upper movable side portion 2U1 and the upper fixed side portion 2U3 may be elastically connected by two or three shaft portions, or may be elastically connected by five or more shaft portions.

[0025] In the illustrated example, each of the four shaft portions 2S is configured to have a meander shape. This is to suppress breakage of each of the rear shaft portion 2SB and the front shaft portion 2SF when the upper movable side portion 2U1 rotates around the first rotation axis AX1 and torsional stress acts on each of them. Also, this is to suppress breakage of each of the left shaft portion 2SL and the right shaft portion 2SR when the upper movable side portion 2U1 rotates around the second rotation axis AX2 and torsional stress acts on each of them. However, the shaft portion 2S may have a shape other than the meander shape, such as a linear shape.

[0026] The lower support member 2D is configured in the same manner as the upper support member 2U, except for the point where the optical element OE is attached. That is, as shown in FIG. 4, the lower support member 2D includes a lower fixed-side portion 2D3 connected to the lower end portion of the case member 1, a lower movable-side portion 2D1 rotatably connected to the lower end portion of each of the four movable members MB (first movable member MB1 to fourth movable member MB4), and a lower intermediate portion 2D2 that elastically connects between the lower fixed-side portion 2D3 and the lower movable-side portion 2D1. And the lower movable-side portion 2D1 is configured to be able to translate along the central axis CX and to be able to rotate around the rotation axis BX in a plane perpendicular to the central axis CX. Specifically, as shown in FIG. 2, the rotation axis BX includes a first rotation axis BX1 parallel to the X axis and a second rotation axis BX2 parallel to the Y axis. The central axis CX, the first rotation axis BX1, and the second rotation axis BX2 are perpendicular to each other and are orthogonal to each other on the central axis CX. Also, the first rotation axis AX1 and the first rotation axis BX1 are parallel to each other, and the second rotation axis AX2 and the second rotation axis BX2 are parallel to each other.

[0027] The fastening member 3 is configured to be able to fasten the support member 2 to the case member 1. In the illustrated example, the fastening member 3 is a bolt, and includes six upper fastening members 3U for fastening the upper support member 2U to the upper end portion of the case member 1 and six lower fastening members 3D for fastening the lower support member 2D to the lower end portion of the case member 1. Note that in FIG. 1, three of the six lower fastening members 3D at the rear side are hidden behind the case member 1 and are not visible. As shown in FIG. 3, a through hole 2H through which the upper fastening member 3U is inserted is formed in the upper fixed-side portion 2U3 of the upper support member 2U. The same applies to the lower fixed-side portion 2D3.

[0028] Next, referring to FIG. 4, the details of the movable member MB will be described. FIG. 4 is an exploded perspective view of the movable member MB and the support member 2.

[0029] As shown in FIG. 4, the movable member MB includes a fixing member 4, an elastic member 5, and a coil assembly CA.

[0030] The fixing member 4 is a member for fixing the elastic member 5 to the support member 2. The elastic member 5 is an example of a connecting member for connecting the end portion of the movable member MB (coil assembly CA) in the driving direction to the support member 2 so that the end portion of the movable member MB (coil assembly CA) is rotatable with respect to the support member 2. The connecting member provides a function of converting the linear motion of the movable member MB (coil assembly CA) into the rotational motion of the driven member (optical element OE).

[0031] In the illustrated example, the fixing member 4 is formed of a synthetic resin, and the elastic member 5 is formed of rubber. The fixing member 4 includes an upper fixing member 4U and a lower fixing member 4D, and the elastic member 5 includes an upper elastic member 5U and a lower elastic member 5D. Note that the fixing member 4 may be configured to have elasticity. For example, the fixing member 4 may be formed of a thermosetting elastomer or a thermoplastic elastomer or the like.

[0032] Specifically, the upper elastic member 5U is configured to be able to connect the upper end portion of the movable member MB (coil assembly CA) to the upper movable side portion 2U1 of the upper support member 2U so that the upper end portion of the movable member MB (coil assembly CA) is rotatable with respect to the upper movable side portion 2U1 of the upper support member 2U. Similarly, the lower elastic member 5D is configured to be able to connect the lower end portion of the movable member MB (coil assembly CA) to the lower movable side portion 2D1 of the lower support member 2D so that the lower end portion of the movable member MB (coil assembly CA) is rotatable with respect to the lower movable side portion 2D1 of the lower support member 2D.

[0033] The upper fixing member 4U is configured to be able to fix the upper elastic member 5U to the upper movable side portion 2U1 of the upper support member 2U, and the lower fixing member 4D is configured to be able to fix the lower elastic member 5D to the lower movable side portion 2D1 of the lower support member 2D.

[0034] More specifically, the upper fixing member 4U includes a first upper fixing member 4U1 to a fourth upper fixing member 4U4, and the lower fixing member 4D includes a first lower fixing member 4D1 to a fourth lower fixing member 4D4. Further, the upper elastic member 5U includes a first upper elastic member 5U1 to a fourth upper elastic member 5U4, and the lower elastic member 5D includes a first lower elastic member 5D1 to a fourth lower elastic member 5D4. Further, the coil assembly CA includes a first coil assembly CA1 to a fourth coil assembly CA4.

[0035] And the first movable member MB1 is composed of a first upper fixing member 4U1, a first upper elastic member 5U1, a first coil assembly CA1, a first lower fixing member 4D1, and a first lower elastic member 5D1. Further, the second movable member MB2 is composed of a second upper fixing member 4U2, a second upper elastic member 5U2, a second coil assembly CA2, a second lower fixing member 4D2, and a second lower elastic member 5D2. Further, the third movable member MB3 is composed of a third upper fixing member 4U3, a third upper elastic member 5U3, a third coil assembly CA3, a third lower fixing member 4D3, and a third lower elastic member 5D3. Further, the fourth movable member MB4 is composed of a fourth upper fixing member 4U4, a fourth upper elastic member 5U4, a fourth coil assembly CA4, a fourth lower fixing member 4D4, and a fourth lower elastic member 5D4.

[0036] Regarding the first movable member MB1, for the first upper elastic member 5U1, a cylindrical central annular portion MR (see FIGS. 13 and 14) is fitted into a through round hole 2T (first through round hole 2T1, see FIG. 3) formed in the upper movable side portion 2U1 of the upper support member 2U. The first upper fixing member 4U1 is adhesively fixed to the upper support member 2U and the first upper elastic member 5U1 with an adhesive in a state where the upper movable side portion 2U1 of the upper support member 2U is sandwiched between the first upper fixing member 4U1 and the first upper elastic member 5U1. Similarly, for the first lower elastic member 5D1, a cylindrical central annular portion MR (not shown) is fitted into a through round hole 2T (first through round hole 2T1, not shown) formed in the lower movable side portion 2D1 of the lower support member 2D. The first lower fixing member 4D1 is adhesively fixed to the lower support member 2D and the first lower elastic member 5D1 with an adhesive in a state where the lower movable side portion 2D1 of the lower support member 2D is sandwiched between the first lower fixing member 4D1 and the first lower elastic member 5D1. The same applies to the second movable member MB2 to the fourth movable member MB4.

[0037] In the illustrated example, the movable member MB is configured such that the upper fixing member 4U is disposed above the upper support member 2U and the upper elastic member 5U is disposed below the upper support member 2U. However, it may be configured such that the upper elastic member 5U is disposed in an upside-down state above the upper support member 2U and the upper fixing member 4U is disposed in an upside-down state below the upper support member 2U. Also, in the illustrated example, the movable member MB is configured such that the lower fixing member 4D is disposed above the lower support member 2D and the lower elastic member 5D is disposed below the lower support member 2D. However, it may be configured such that the lower elastic member 5D is disposed in an upside-down state above the lower support member 2D and the lower fixing member 4D is disposed in an upside-down state below the lower support member 2D.

[0038] Next, referring to FIG. 5, the coil assembly CA will be described. FIG. 5 is an exploded perspective view of the coil assembly CA.

[0039] As shown in FIG. 5, the coil assembly CA includes a coil 6, a coil holding member 7, a substrate 8, a lower plate member 9, and a lower cylindrical member 10.

[0040] The coil 6 is a component of the drive device DM. In the illustrated example, the coil 6 is a winding coil formed by winding a conductive wire whose surface is coated with an insulating material, and is fixed to the coil holding member 7. FIG. 5 omits the illustration of the detailed winding state of the conductive wire for clarity. The same applies to other figures showing the coil 6.

[0041] The coil holding member 7 is a member for holding the coil 6. In the illustrated example, the coil holding member 7 is formed of a synthetic resin.

[0042] The substrate 8 is a member for realizing the connection between the coil 6 and a control unit (not shown) disposed outside the movable member MB. In the illustrated example, the substrate 8 is an insulating substrate fixed to the coil holding member 7. Both ends of the conductive wire constituting the coil 6 are connected to terminals provided on the substrate 8.

[0043] The control unit is a device including an electronic circuit, a non-volatile memory device, etc., and is configured to be able to control the direction and magnitude of the current flowing through the coil 6. The control unit may be configured to control the direction and magnitude of the current flowing through the coil 6 in response to a control command from an external device such as a computer, or may be configured to control the direction and magnitude of the current flowing through the coil 6 without receiving a control command from an external device. Note that in the illustrated example, the control unit is installed outside the case member 1, but it may be installed inside the case member 1.

[0044] The lower plate member 9 is a member attached to the lower end portion of the coil holding member 7. In the illustrated example, the lower plate member 9 is a disc-shaped member extending along a plane parallel to the XY plane, and is formed of a synthetic resin.

[0045] The lower cylindrical member 10 is a member attached to the lower side of the lower plate member 9. In the illustrated example, the lower cylindrical member 10 is a two-stage cylindrical member extending in the driving direction (Z-axis direction) and is formed of a synthetic resin.

[0046] Also, in the illustrated example, the coil 6 includes the first coil 6A to the fourth coil 6D, the coil holding member 7 includes the first coil holding member 7A to the fourth coil holding member 7D, and the substrate 8 includes the first substrate 8A to the fourth substrate 8D. Further, the lower plate member 9 includes the first lower plate member 9A to the fourth lower plate member 9D, and the lower cylindrical member 10 includes the first lower cylindrical member 10A to the fourth lower cylindrical member 10D.

[0047] And the first coil assembly CA1 is composed of the first coil 6A, the first coil holding member 7A, the first substrate 8A, the first lower plate member 9A, and the first lower cylindrical member 10A, and the second coil assembly CA2 is composed of the second coil 6B, the second coil holding member 7B, the second substrate 8B, the second lower plate member 9B, and the second lower cylindrical member 10B. Also, the third coil assembly CA3 is composed of the third coil 6C, the third coil holding member 7C, the third substrate 8C, the third lower plate member 9C, and the third lower cylindrical member 10C, and the fourth coil assembly CA4 is composed of the fourth coil 6D, the fourth coil holding member 7D, the fourth substrate 8D, the fourth lower plate member 9D, and the fourth lower cylindrical member 10D.

[0048] Next, referring to FIG. 6, the coil holding member 7 will be described. FIG. 6 is a perspective view of the coil holding member 7. Specifically, FIG. 6 is a perspective view of the first coil holding member 7A. The following description with reference to FIG. 6 relates to the first coil holding member 7A, but is similarly applicable to each of the second coil holding member 7B to the fourth coil holding member 7D.

[0049] As shown in FIG. 6, the first coil holding member 7A includes a first upper cylindrical portion 7AT, a first upper plate portion 7AU, a first central cylindrical portion 7AS, a first substrate holding portion 7AF, and a first leg portion 7AL.

[0050] The first upper cylindrical portion 7AT is a cylindrical portion extending in the driving direction (Z-axis direction) and corresponds to the first lower cylindrical member 10A.

[0051] The first upper plate portion 7AU is a disk-shaped portion extending along a plane parallel to the XY plane and corresponds to the first lower plate member 9A. In the illustrated example, the first upper plate portion 7AU constitutes the upper lid of the first central cylindrical portion 7AS.

[0052] The first central cylindrical portion 7AS is a portion to which the first coil 6A is fixed. In the illustrated example, the first central cylindrical portion 7AS has a cylindrical shape. Also, the first central cylindrical portion 7AS is configured to define a space inside for accommodating the first magnetic member 11A and the first magnet 12A (see FIG. 7) that constitute the first driving device DM1.

[0053] The first substrate holding portion 7AF is a portion to which the first substrate 8A is attached. In the illustrated example, the first substrate holding portion 7AF is configured to protrude from the lower end portion of the first central cylindrical portion 7AS to the left side (Y1 side).

[0054] The first leg portion 7AL is a portion that connects the first central cylindrical portion 7AS of the first coil holding member 7A and the first lower plate member 9A. In the illustrated example, the first leg portion 7AL has three extending portions (the first extending portion 7AL1 to the third extending portion 7AL3) extending in the driving direction (Z-axis direction). The first lower plate member 9A is configured to be able to connect the lower ends of these three extending portions (the first extending portion 7AL1 to the third extending portion 7AL3).

[0055] Next, with reference to FIGS. 7 to 9, the fixing member FB will be described. FIG. 7 is an exploded perspective view of the fixing member FB. The upper view of FIG. 8 is a top view of the fixing member FB, and the lower view of FIG. 8 is a bottom view of the fixing member FB. FIG. 9 is a cross-sectional view of the fixing member FB. Specifically, FIG. 9 is a view when looking at the cross-section of the actuator 100 in a plane parallel to the XZ plane including the cutting line (broken line IX-IX) shown in FIG. 8 from the Y2 side. In FIGS. 8 and 9, for clarity, the case member 1 is provided with a dot pattern. Also, in the upper view of FIG. 8, for clarity, the magnetic member 11 is provided with a cross pattern.

[0056] As shown in FIG. 7, the fixing member FB includes the case member 1, the magnetic member 11, and the magnet 12.

[0057] The case member 1 is a magnetic body that constitutes the main body of the actuator 100. In the illustrated example, the case member 1 has a prismatic upper concave portion 1P (see the upper figure in FIG. 8) and a prismatic lower concave portion 1Q (see the lower figure in FIG. 8).

[0058] As shown in the upper figure of FIG. 8, a cylindrical concave portion 1V for accommodating the upper part of the movable member MB and a prismatic concave portion 1R for accommodating the substrate 8 are formed in the upper concave portion 1P.

[0059] As shown in the lower figure of FIG. 8, the cylindrical concave portion 1V has a circular bottom portion 1K. Around the bottom portion 1K, three through holes 1H (see the upper figure in FIG. 8) and three bridging portions 1J (see the lower figure in FIG. 8) are formed.

[0060] Specifically, the cylindrical concave portion 1V includes a first cylindrical concave portion 1VA for accommodating the upper part of the first movable member MB1, a second cylindrical concave portion 1VB for accommodating the upper part of the second movable member MB2, a third cylindrical concave portion 1VC for accommodating the upper part of the third movable member MB3, and a fourth cylindrical concave portion 1VD for accommodating the upper part of the fourth movable member MB4.

[0061] Also, a first bottom portion 1KA is formed in the first cylindrical concave portion 1VA, and around the first bottom portion 1KA, three first through holes 1HA (first hole 1HA1 to third hole 1HA3) and three first bridging portions 1JA (first crossbar 1JA1 to third crossbar 1JA3) are formed. The same applies to the second cylindrical concave portion 1VB to the fourth cylindrical concave portion 1VD.

[0062] Also, the prismatic concave portion 1R includes a first prismatic concave portion 1RA for accommodating the first substrate 8A, a second prismatic concave portion 1RB for accommodating the second substrate 8B, a third prismatic concave portion 1RC for accommodating the third substrate 8C, and a fourth prismatic concave portion 1RD for accommodating the fourth substrate 8D.

[0063] In the lower concave portion 1Q, as shown in the lower diagram of FIG. 8, a prismatic concave portion 1W for accommodating the lower part of the movable member MB is formed.

[0064] The magnetic member 11 is a component of the drive device DM. In the illustrated example, the magnetic member 11 is a cylindrical magnetic body (soft iron) fixed to the upper end portion of the magnet 12, and functions as a yoke for increasing the density of the magnetic flux generated by the magnet 12.

[0065] The magnet 12 is a component of the drive device DM. In the illustrated example, the magnet 12 is a permanent magnet magnetized with two poles in the vertical direction (Z-axis direction), and is fixed to the upper surface of the bottom 1K of the cylindrical concave portion 1V of the case member 1. In FIG. 9, for clarity, a thick cross pattern is attached to the S-pole portion of the magnet 12, and a fine dot pattern is attached to the N-pole portion of the magnet 12 and the magnetic member 11 fixed to the N-pole portion. Also, the dotted line in FIG. 9 represents a part of the magnetic flux generated by the magnet 12. That is, the dotted line in FIG. 9 represents that a magnetic circuit is formed by the case member 1, the magnetic member 11, and the magnet 12.

[0066] Specifically, the magnetic member 11 includes a first magnetic member 11A to a fourth magnetic member 11D, and the magnet 12 includes a first magnet 12A to a fourth magnet 12D.

[0067] And the first magnetic member 11A and the first magnet 12A are accommodated in the first cylindrical concave portion 1VA, the second magnetic member 11B and the second magnet 12B are accommodated in the second cylindrical concave portion 1VB, the third magnetic member 11C and the third magnet 12C are accommodated in the third cylindrical concave portion 1VC, and the fourth magnetic member 11D and the fourth magnet 12D are accommodated in the fourth cylindrical concave portion 1VD.

[0068] The first coil 6A, the first magnetic member 11A, and the first magnet 12A accommodated in the first cylindrical recess 1VA constitute the first driving device DM1. The second coil 6B, the second magnetic member 11B, and the second magnet 12B accommodated in the second cylindrical recess 1VB constitute the second driving device DM2. The third coil 6C, the third magnetic member 11C, and the third magnet 12C accommodated in the third cylindrical recess 1VC constitute the third driving device DM3. The fourth coil 6D, the fourth magnetic member 11D, and the fourth magnet 12D accommodated in the fourth cylindrical recess 1VD constitute the fourth driving device DM4.

[0069] Also, the three first through holes 1HA (first hole 1HA1 to third hole 1HA3) formed around the first bottom portion 1KA of the first cylindrical recess 1VA are configured to correspond to the three extending portions (first extending portion 7AL1 to third extending portion 7AL3) that constitute the first leg portion 7AL (see FIG. 6) of the first coil holding member 7A. Specifically, the first hole 1HA1 is arranged to receive the first extending portion 7AL1, the second hole 1HA2 is arranged to receive the second extending portion 7AL2, and the third hole 1HA3 is arranged to receive the third extending portion 7AL3. The same applies to the second coil holding member 7B to the fourth coil holding member 7D.

[0070] Next, with reference to FIGS. 10 to 12, the driving device DM will be described. FIG. 10 is a top view of the actuator 100. FIGS. 11 and 12 are cross-sectional views of the actuator 100. Specifically, FIG. 11 is a view of the cross-section of the actuator 100 in a plane parallel to the XZ plane including the cutting line (broken line XI-XI) shown in FIG. 10 as viewed from the Y2 side. FIG. 12 is a view of the cross-section of the actuator 100 in a plane parallel to the YZ plane including the cutting line (broken line XII-XII) shown in FIG. 10 as viewed from the X1 side. In FIGS. 10 to 12, for clarity, the case member 1 is provided with a dot pattern.

[0071] The drive device DM is composed of a coil 6, a magnetic member 11, and a magnet 12. Specifically, the drive device DM is configured to be able to reciprocate the movable member MB in the driving direction (Z-axis direction) by utilizing the Lorentz force acting on the current (charged particles) flowing through the coil 6 in the magnetic field generated by the magnet 12. The magnet 12 has its magnetic flux density enhanced by the magnetic member 11 functioning as a yoke, and its magnetic flux is configured to perpendicularly cross the conductive wires constituting the coil 6.

[0072] Specifically, as shown in FIG. 11, the first drive device DM1 is composed of a first coil 6A held by a first coil holding member 7A, a first magnet 12A fixed to the upper surface of the first bottom portion 1KA of the case member 1, and a first magnetic member 11A fixed to the upper surface of the first magnet 12A. And the first drive device DM1 is configured to be able to reciprocate the first movable member MB1 along the driving direction (Z-axis direction) as indicated by the double arrow AR1. Also, the upper end portion of the first movable member MB1 is rotatably connected to the upper movable side portion 2U1 of the upper support member 2U via a first upper fixing member 4U1 and a first upper elastic member 5U1, and its lower end portion is rotatably connected to the lower movable side portion 2D1 of the lower support member 2D via a first lower fixing member 4D1 and a first lower elastic member 5D1.

[0073] Also, as shown in FIG. 11, the second drive device DM2 is composed of a second coil 6B held by a second coil holding member 7B, a second magnet 12B fixed to the upper surface of the second bottom portion 1KB of the case member 1, and a second magnetic member 11B fixed to the upper surface of the second magnet 12B. And the second drive device DM2 is configured to be able to reciprocate the second movable member MB2 along the driving direction (Z-axis direction) as indicated by the double arrow AR2. Also, the upper end portion of the second movable member MB2 is rotatably connected to the upper movable side portion 2U1 of the upper support member 2U via a second upper fixing member 4U2 and a second upper elastic member 5U2, and its lower end portion is rotatably connected to the lower movable side portion 2D1 of the lower support member 2D via a second lower fixing member 4D2 and a second lower elastic member 5D2.

[0074] Further, as shown in FIG. 12, the third driving device DM3 is composed of a third coil 6C held by a third coil holding member 7C, a third magnet 12C fixed to the upper surface of the third bottom portion 1KC of the case member 1, and a third magnetic member 11C fixed to the upper surface of the third magnet 12C. And the third driving device DM3 is configured to be able to reciprocate the third movable member MB3 along the driving direction (Z-axis direction) as indicated by the double-headed arrow AR3. Further, the upper end portion of the third movable member MB3 is rotatably connected to the upper movable side portion 2U1 of the upper support member 2U via a third upper fixing member 4U3 and a third upper elastic member 5U3, and the lower end portion thereof is rotatably connected to the lower movable side portion 2D1 of the lower support member 2D via a third lower fixing member 4D3 and a third lower elastic member 5D3.

[0075] Similarly, as shown in FIG. 15, the fourth driving device DM4 is composed of a fourth coil 6D held by a fourth coil holding member 7D, a fourth magnet 12D fixed to the upper surface of the fourth bottom portion 1KD of the case member 1, and a fourth magnetic member 11D fixed to the upper surface of the fourth magnet 12D. And the fourth driving device DM4 is configured to be able to reciprocate the fourth movable member MB4 along the driving direction (Z-axis direction). Further, the upper end portion of the fourth movable member MB4 is rotatably connected to the upper movable side portion 2U1 of the upper support member 2U via a fourth upper fixing member 4U4 and a fourth upper elastic member 5U4, and the lower end portion thereof is rotatably connected to the lower movable side portion 2D1 of the lower support member 2D via a fourth lower fixing member 4D4 and a fourth lower elastic member 5D4.

[0076] The control unit can separately move the first to fourth movable members MB1 to MB4 up and down along the driving direction (Z-axis direction) by operating the first to fourth driving devices DM1 to DM4 separately. Therefore, the control unit can realize the rotation of the upper movable side portion 2U1 of the upper support member 2U to which the upper end portions of the first to fourth movable members MB1 to MB4 are connected around the first rotation axis AX1, the rotation around the second rotation axis AX2, and the parallel movement along the central axis CX. Further, the control unit can realize the rotation of the lower movable side portion 2D1 of the lower support member 2D to which the lower end portions of the first to fourth movable members MB1 to MB4 are connected around the first rotation axis BX1, the rotation around the second rotation axis BX2, and the parallel movement along the central axis CX.

[0077] Next, with reference to FIGS. 13 and 14, the details of the elastic member 5 will be described. FIG. 13 is a perspective view of the first upper elastic member 5U1, and FIG. 14 is a top view of the first upper elastic member 5U1. The following description with reference to FIGS. 13 and 14 relates to the first upper elastic member 5U1, but is similarly applicable to each of the second to fourth upper elastic members 5U2 to 5U4 and the first to fourth lower elastic members 5D1 to 5D4 having the same size and the same shape.

[0078] The first upper elastic member 5U1 is a member (rubber bush) formed of an elastically deformable material such as synthetic rubber. In the illustrated example, the first upper elastic member 5U1 includes a connecting portion SP, an inner annular portion IR, a central annular portion MR, and an outer annular portion OR.

[0079] The connecting portion SP is a part that connects the inner annular portion IR and the central annular portion MR. In the illustrated example, the connecting portion SP includes six spoke portions (first spoke portion SP1 to sixth spoke portion SP6) that extend radially from the outer peripheral surface of the inner annular portion IR in a top view and are connected to the inner peripheral surface of the central annular portion MR. However, the connecting portion SP may be composed of five or fewer spoke portions, or may be composed of seven or more spoke portions. Also, in the illustrated example, the connecting portion SP is composed of six linearly extending spoke portions, but may be composed of a plurality of spoke portions extending in a spiral shape, or may be composed of a plurality of spoke portions having other shapes. Alternatively, the connecting portion may be composed of an annular thin film portion that spreads in the entire circumferential direction from the outer peripheral surface of the inner annular portion IR in a top view and is connected to the inner peripheral surface of the central annular portion MR. In this case, the thin film portion may be flat, may be dome-shaped convex upward, or may be dome-shaped convex downward.

[0080] The inner annular portion IR is a portion fixed to the upper end portion of the first upper cylindrical portion 7AT (see FIG. 6) of the first coil holding member 7A. In the illustrated example, the inner annular portion IR is fastened to the first upper cylindrical portion 7AT by bolts BT and nuts NT (see FIG. 17 described later).

[0081] The central annular portion MR is a portion fixed to the inner peripheral surface of the first upper fixing member 4U1. In the illustrated example, as shown in FIG. 17 described later, the central annular portion MR is formed so as to protrude above the upper surface of the outer annular portion OR, and when the upper surface of the outer annular portion OR and the lower surface of the upper movable portion 2U1 of the upper support member 2U are in contact, it is formed so as to protrude above the upper surface of the upper movable portion 2U1.

[0082] The outer annular portion OR is a portion fixed to the lower surface of the upper movable portion 2U1 of the upper support member 2U. In the example shown in FIG. 17, the upper surface and the outer peripheral surface of the central annular portion MR and the ceiling surface and the inner peripheral surface of the first upper fixing member 4U1 are adhesively fixed by an adhesive in a state where the upper movable portion 2U1 is sandwiched between the lower surface of the first upper fixing member 4U1 and the upper surface of the outer annular portion OR.

[0083] Next, with reference to FIGS. 15 to 18, the states of the respective members when the optical element OE is moved will be described. Specifically, FIGS. 15 to 18 show the states of the respective members when the first movable member MB1 and the fourth movable member MB4 are moved downward by the same distance, and the second movable member MB2 and the third movable member MB3 are moved upward by the same distance.

[0084] More specifically, FIG. 15 is a right side view of the movable member MB and the support member 2. FIG. 16 is a view of a cross section of the actuator 100 as seen from the right side (Y2 side), and the position of the cutting line corresponds to the position of the cutting line in FIG. 11. FIG. 17 is an enlarged view of the range R1 surrounded by the broken line in FIG. 16. FIG. 18 is a perspective view of the upper support member 2U.

[0085] The control unit can move the optical element OE attached to the upper support member 2U by driving the drive device DM. In the example shown in FIGS. 15 and 16, the control unit drives each of the first drive device DM1 and the fourth drive device DM4 to move each of the first movable member MB1 and the fourth movable member MB4 downward by a distance HT1 (see FIG. 16), and drives each of the second drive device DM2 and the third drive device DM3 to move each of the second movable member MB2 and the third movable member MB3 upward by a distance HT2 (see FIG. 16). As a result, as shown in FIG. 15, the control unit rotates the optical element OE counterclockwise by an inclination angle θ1 about the second rotation axis AX2. In the illustrated example, the distance HT1 and the distance HT2 are of the same magnitude. However, the distance HT1 and the distance HT2 may be of different magnitudes from each other.

[0086] The first plane PL1 represented by the broken line in FIG. 15 is a virtual plane parallel to the upper movable side portion 2U1 of the upper support member 2U and including the second rotation axis AX2. The second plane PL2 represented by the broken line in FIG. 15 is a virtual plane parallel to the lower movable side portion 2D1 of the lower support member 2D and including the second rotation axis BX2.

[0087] As shown in FIG. 15, the lower movable portion 2D1 of the lower support member 2D is configured to rotate in the same manner as the upper movable portion 2U1 of the upper support member 2U. Specifically, the lower movable portion 2D1 of the lower support member 2D and the upper movable portion 2U1 of the upper support member 2U are configured to be interlocked such that the angle (tilt angle θ1) formed between the second plane PL2 and the XY plane is equal to the angle (tilt angle θ2) formed between the first plane PL1 and the XY plane.

[0088] Further, as shown in FIG. 16, the drive device DM is configured to move the movable member MB up and down while maintaining the distance between the inner peripheral surface of the columnar recess 1V formed in the case member 1 and the coil 6.

[0089] In the illustrated example, the control unit controls the second drive device DM2 so that a current of a predetermined magnitude is supplied to the second coil 6B via a lead wire (not shown), and raises the second movable member MB2 by a distance HT2. Similarly, the control unit controls the third drive device DM3 so that a current of a predetermined magnitude is supplied to the third coil 6C via a lead wire (not shown), and raises the third movable member MB3 by a distance HT2. On the other hand, the control unit controls the first drive device DM1 so that a current of a predetermined magnitude is supplied to the first coil 6A via a lead wire (not shown), and lowers the first movable member MB1 by a distance HT1. Similarly, the control unit controls the fourth drive device DM4 so that a current of a predetermined magnitude is supplied to the fourth coil 6D via a lead wire (not shown), and lowers the fourth movable member MB4 by a distance HT1.

[0090] In the illustrated example, the first movable member MB1 and the case member 1 are configured such that the distance GP1 (see FIG. 16) in the X-axis direction between the inner peripheral surface of the first columnar recess 1VA formed in the case member 1 and the first coil 6A is within a predetermined range when the first movable member MB1 is in the initial state or in the driving state.

[0091] The initial state of the first movable member MB1 means the state of the first movable member MB1 when no current is supplied to the first coil 6A. In the initial state, the first movable member MB1 is supported by the upper support member 2U and the lower support member 2D so that the first movable member MB1 and the case member 1 are not in contact with each other. Specifically, the first movable member MB1 is supported by the upper support member 2U and the lower support member 2D such that the distance (height) in the Z-axis direction between the lower end of the first central cylindrical portion 7AS of the first coil holding member 7A and the upper surface of the first bottom portion 1KA of the case member 1 becomes a height ST (see FIG. 11).

[0092] The driving state of the first movable member MB1 means the state of the first movable member MB1 when current is supplied to the first coil 6A. In the driving state, the first movable member MB1 is driven such that the distance (height) between the lower end of the first central cylindrical portion 7AS and the upper surface of the first bottom portion 1KA becomes a height different from the height ST.

[0093] When the supply of current to the first coil 6A of the first movable member MB1 in the driving state is stopped, the first movable member MB1 returns to the initial state. Specifically, the first movable member MB1 is returned to the position in the initial state by the restoring force of the elastically deformed support member 2 (leaf spring).

[0094] Similarly, the second movable member MB2 and the case member 1 are configured such that the distance GP2 (see FIG. 16) in the X-axis direction between the inner peripheral surface of the second columnar recess 1VB formed in the case member 1 and the second coil 6B remains within a predetermined range whether the second movable member MB2 is in the initial state or the driven state. Also, the third movable member MB3 and the case member 1 are configured such that the distance GP3 (not shown) in the X-axis direction between the inner peripheral surface of the third columnar recess 1VC formed in the case member 1 and the third coil 6C remains within a predetermined range whether the third movable member MB3 is in the initial state or the driven state. Further, the fourth movable member MB4 and the case member 1 are configured such that the distance GP4 (not shown) in the X-axis direction between the inner peripheral surface of the fourth columnar recess 1VD formed in the case member 1 and the fourth coil 6D remains within a predetermined range whether the fourth movable member MB4 is in the initial state or the driven state.

[0095] In the illustrated example, the actuator 100 is configured such that each of the distances GP1 to GP4 falls within a range of the same magnitude. However, the actuator 100 may be configured such that each of the distances GP1 to GP4 falls within a range of different magnitudes from each other. Typically, the distance GP1 becomes the minimum value when the movement amount of the first movable member MB1 is maximum, and becomes the maximum value when the first movable member MB1 is in the initial state. The same applies to the distances GP2 to GP4. Also, the actuator 100 is configured such that, as long as the movable member MB and the case member 1 do not contact each other, the maximum value of each of the distances GP1 to GP4 is made as small as possible. This is to increase the density of the magnetic flux passing through the coil 6 by making the distance between the case member 1 as the magnetic body and the magnetic member 11 as small as possible. That is, it is to efficiently utilize the driving force by the driving device DM. Also, it is to reduce the size of the actuator 100.

[0096] As shown in FIGS. 15 and 16, when the upper movable portion 2U1 of the upper support member 2U is inclined with respect to the XY plane, the connecting portion SP of the first upper elastic member 5U1 is elastically deformed as shown in FIG. 17. FIG. 17 shows a state in which the first spoke portion SP1 and the fourth spoke portion SP4 among the six connecting portions SP are elastically deformed. However, in reality, the second spoke portion SP2, the third spoke portion SP3, the fifth spoke portion SP5, and the sixth spoke portion SP6, which are not visible in FIG. 17, are also elastically deformed in the same manner. The same applies to the connecting portion SP in each of the second upper elastic member 5U2 to the fourth upper elastic member 5U4.

[0097] Further, when the upper movable portion 2U1 of the upper support member 2U is inclined with respect to the XY plane, the lower movable portion 2D1 of the lower support member 2D is also inclined with respect to the XY plane. Therefore, the connecting portion SP of the first lower elastic member 5D1 is elastically deformed in the same manner as the connecting portion SP of the first upper elastic member 5U1 shown in FIG. 17. The same applies to the connecting portion SP in each of the second lower elastic member 5D2 to the fourth lower elastic member 5D4.

[0098] With this configuration, each of the first movable member MB1 to the fourth movable member MB4 can be translated in the driving direction (Z-axis direction) without being inclined with respect to the center line extending along the driving direction even when the upper movable portion 2U1 of the upper support member 2U is inclined with respect to the XY plane.

[0099] Also, in the examples shown in FIGS. 15 to 18, the control unit rotates the optical element OE counterclockwise in the right side view around the second rotation axis AX2 by simultaneously lowering the first movable member MB1 and the fourth movable member MB4 and simultaneously raising the second movable member MB2 and the third movable member MB3. However, the control unit may tilt the optical element OE in an arbitrary direction by raising or lowering at least one of the first movable member MB1 to the fourth movable member MB4. That is, the control unit can direct the normal vector NL (see FIGS. 15 and 18) perpendicular to the surface of the optical element OE in an arbitrary direction. Further, the control unit may translate the optical element OE upward by raising all of the first movable member MB1 to the fourth movable member MB4 by the same distance in the Z-axis direction, or may translate the optical element OE downward by lowering all of the first movable member MB1 to the fourth movable member MB4 by the same distance in the Z-axis direction.

[0100] For example, the control unit can rotate the optical element OE clockwise in the right side view around the second rotation axis AX2 by simultaneously raising the first movable member MB1 and the fourth movable member MB4 and simultaneously lowering the second movable member MB2 and the third movable member MB3.

[0101] Also, the control unit can rotate the optical element OE counterclockwise in the front view around the first rotation axis AX1 by simultaneously lowering the first movable member MB1 and the second movable member MB2 and simultaneously raising the third movable member MB3 and the fourth movable member MB4.

[0102] Also, the control unit can rotate the optical element OE clockwise in the front view around the first rotation axis AX1 by simultaneously raising the third movable member MB3 and the fourth movable member MB4 and simultaneously lowering the first movable member MB1 and the second movable member MB2.

[0103] Further, without moving the second movable member MB2 and the fourth movable member MB4, the control unit can rotate the optical element OE around the third rotation axis AX3 (see FIG. 3) by raising the first movable member MB1 and lowering the third movable member MB3, or by lowering the first movable member MB1 and raising the third movable member MB3. The third rotation axis AX3 is a rotation axis extending along one of the two diagonals of the rectangular optical element OE.

[0104] Further, without moving the first movable member MB1 and the third movable member MB3, the control unit can rotate the optical element OE around the fourth rotation axis AX4 (see FIG. 3) by raising the second movable member MB2 and lowering the fourth movable member MB4, or by lowering the second movable member MB2 and raising the fourth movable member MB4. The fourth rotation axis AX4 is a rotation axis extending along the other of the two diagonals of the rectangular optical element OE.

[0105] Further, without moving the first movable member MB1 and the fourth movable member MB4, the control unit can rotate the optical element OE counterclockwise in a right side view around a rotation axis parallel to the Y-axis by simultaneously raising the second movable member MB2 and the third movable member MB3.

[0106] Further, without moving the first movable member MB1 and the fourth movable member MB4, the control unit can rotate the optical element OE clockwise in a right side view around a rotation axis parallel to the Y-axis by simultaneously lowering the second movable member MB2 and the third movable member MB3.

[0107] Further, without moving the second movable member MB2 and the third movable member MB3, the control unit can rotate the optical element OE clockwise in a right side view around a rotation axis parallel to the Y-axis by simultaneously raising the first movable member MB1 and the fourth movable member MB4.

[0108] Further, the control unit can rotate the optical element OE counterclockwise in a right-side view about a rotation axis parallel to the Y-axis by simultaneously lowering the first movable member MB1 and the fourth movable member MB4 without moving the second movable member MB2 and the third movable member MB3.

[0109] Further, the control unit can rotate the optical element OE counterclockwise in a front view about a rotation axis parallel to the X-axis by simultaneously raising the third movable member MB3 and the fourth movable member MB4 without moving the first movable member MB1 and the second movable member MB2.

[0110] Further, the control unit can rotate the optical element OE clockwise in a front view about a rotation axis parallel to the X-axis by simultaneously lowering the third movable member MB3 and the fourth movable member MB4 without moving the first movable member MB1 and the second movable member MB2.

[0111] Further, the control unit can rotate the optical element OE clockwise in a front view about a rotation axis parallel to the X-axis by simultaneously raising the first movable member MB1 and the second movable member MB2 without moving the third movable member MB3 and the fourth movable member MB4.

[0112] Further, the control unit can rotate the optical element OE counterclockwise in a front view about a rotation axis parallel to the X-axis by simultaneously lowering the first movable member MB1 and the second movable member MB2 without moving the third movable member MB3 and the fourth movable member MB4.

[0113] Further, the control unit may simultaneously execute at least two of the rotation of the optical element OE about a rotation axis parallel to the Y-axis, the rotation of the optical element OE about a rotation axis parallel to the X-axis, and the translational movement of the optical element OE in the Z-axis direction by operating each of the first drive device DM1 to the fourth drive device DM4 separately.

[0114] As described above, the actuator 100 according to the embodiment of the present invention includes a fixed member FB (case member 1), a plurality of movable members MB, a drive device DM that moves each of the plurality of movable members MB in a predetermined drive direction (Z-axis direction) with respect to the fixed member FB (case member 1), and a first support member (upper support member 2U) and a second support member (lower support member 2D) that support each of the plurality of movable members MB movably in the drive direction (Z-axis direction) with respect to the fixed member FB (case member 1). The first support member (upper support member 2U) includes a first fixed-side portion (upper fixed-side portion 2U3) connected to one end portion of the fixed member FB (case member 1) in the drive direction (Z-axis direction), a first movable-side portion (upper movable-side portion 2U1) rotatably connected to one end portion of each of the plurality of movable members MB in the drive direction, and a first intermediate portion (upper intermediate portion 2U2) that elastically connects between the first fixed-side portion (upper fixed-side portion 2U3) and the first movable-side portion (upper movable-side portion 2U1). The second support member (lower support member 2D) includes a second fixed-side portion (lower fixed-side portion 2D3) connected to the other end portion of the fixed member FB (case member 1) in the drive direction, a second movable-side portion (lower movable-side portion 2D1) rotatably connected to the other end portion of each of the plurality of movable members MB in the drive direction, and a second intermediate portion (lower intermediate portion 2D2) that elastically connects between the second fixed-side portion (lower fixed-side portion 2D3) and the second movable-side portion (lower movable-side portion 2D1). The drive device DM is configured to drive a driven member (optical element OE) fixed to the first movable-side portion (upper movable-side portion 2U1) by moving at least one of the plurality of movable members MB in the drive direction.

[0115] This configuration brings about the effect that the driven member can be tilted significantly. In the illustrated example, the actuator 100 brings about the effect that the optical element OE can be tilted at an inclination angle of 20 degrees or more. This is because the actuator 100 is configured such that the members constituting the actuator 100 do not interfere with each other even when the optical element OE is tilted significantly at an inclination angle of 20 degrees or more. Further, the actuator 100 can tilt the driven member while moving the driven member in the driving direction without tilting each of the plurality of movable members MB, or can translate the driven member in the driving direction. Therefore, the actuator 100 can move the driven member while avoiding contact between the movable member MB and the fixed member FB.

[0116] One end portion of each of the plurality of movable members MB in the driving direction may be rotatably connected to the first movable side portion (upper movable side portion 2U1) via an elastic member (upper elastic member 5U) or a connecting member that is a ball joint. Further, the other end portion of each of the plurality of movable members MB in the driving direction may be rotatably connected to the second movable side portion (lower movable side portion 2D1) via an elastic member (lower elastic member 5D) or another connecting member that is a ball joint. Note that the connecting member may be integrated with the leaf spring constituting the support member 2. That is, the connecting member may be a part of the leaf spring. In this case, the connecting member that is a part of the leaf spring may be formed to have a spiral shape, may be formed to have a radial shape, or may be formed to have another shape other than the spiral shape and the radial shape.

[0117] This configuration brings about the effect that the linear motion of each of the plurality of movable members MB can be easily converted into the rotational motion of the driven member.

[0118] The fixed member FB may be a case member 1 formed of a magnetic body having a plurality of recesses (cylindrical recesses 1V) corresponding to the plurality of movable members MB. And each of the plurality of movable members MB may be accommodated in a non-contact state inside a corresponding one of the plurality of recesses (cylindrical recesses 1V).

[0119] This configuration has the effect of suppressing excessive tilting of each of the plurality of movable members MB with respect to the drive shaft (a shaft parallel to the Z-axis). This is because the inner wall of the concave portion (cylindrical concave portion 1V) can function as a stopper. Further, this configuration has the effect of increasing the driving force of the driving device DM. This is because the distance between the case member 1 and the magnetic member 11 constituting the magnetic circuit can be reduced.

[0120] The driven member may be an optical element OE. The optical element OE may be, for example, a mirror, a prism, or an imaging element such as a CCD or CMOS. Alternatively, the driven member may be a light source (laser irradiation device) constituting a LIDAR, a light source constituting an illumination device, or a light source constituting a projector.

[0121] This configuration has the effect that, for example, the actuator 100 can direct the axis (optical axis) of the optical element OE in an arbitrary direction. Alternatively, this configuration has the effect that the actuator 100 can direct the optical axis of a light source such as a LIDAR, an illumination device, or a projection device in an arbitrary direction.

[0122] The first intermediate portion (upper intermediate portion 2U2) may include a pair of shaft portions 2S constituting the rotation axis AX. Further, the second intermediate portion (lower intermediate portion 2D2) may include another pair of shaft portions 2S constituting another rotation axis BX parallel to the rotation axis AX. And the driving device DM may rotate the first support member (upper support member 2U) around the rotation axis AX and rotate the second support member (lower support member 2D) around the rotation axis BX by moving at least one of the plurality of movable members MB in the driving direction.

[0123] This configuration has the effect that the driven member (optical element OE) attached to the upper movable side portion 2U1 of the upper support member 2U can rotate around the rotation axis AX.

[0124] The first intermediate part (upper intermediate part 2U2) may include a pair of first shaft parts (rear shaft part 2SB and front shaft part 2SF of the upper intermediate part 2U2) that constitute the first rotation axis AX1 and a pair of second shaft parts (left shaft part 2SL and right shaft part 2SR of the upper intermediate part 2U2) that constitute the second rotation axis AX2. Further, the second intermediate part (lower intermediate part 2D2) may include a pair of third shaft parts (rear shaft part 2SB and front shaft part 2SF of the lower intermediate part 2D2) that constitute a third rotation axis (first rotation axis BX1) parallel to the first rotation axis AX1 and a pair of fourth shaft parts (left shaft part 2SL and right shaft part 2SR of the lower intermediate part 2D2) that constitute a fourth rotation axis (second rotation axis BX2) parallel to the second rotation axis AX2. In this case, the drive device DM rotates the first support member (upper support member 2U) around at least one of the first rotation axis AX1 and the second rotation axis AX2 and rotates the second support member (lower support member 2D) around at least one of the first rotation axis BX1 and the second rotation axis BX2 by moving at least one of the plurality of movable members MB in the driving direction.

[0125] This configuration brings about the effect that the driven member (optical element OE) attached to the upper movable side portion 2U1 of the upper support member 2U can rotate around each of the first rotation axis AX1 and the second rotation axis AX2.

[0126] As described above, the preferred embodiments of the present invention have been described in detail. However, the present invention is not limited to the above-described embodiments. Various modifications or substitutions etc. can be applied to the above-described embodiments without departing from the scope of the present invention. Also, each of the features described with reference to the above-described embodiments may be appropriately combined as long as there is no technical contradiction.

[0127] For example, in the above-described embodiment, the movable member MB is connected to the support member 2 via the elastic member 5 which is a connecting member formed of synthetic rubber, but it may be directly connected to the support member 2. That is, the connecting member may be a part of the support member 2. In this case, the elastic member 5 may be omitted.

[0128] Further, in the above-described embodiment, the elastic member 5 is fixed to the support member 2 using the fixing member 4, but it may be fixed to the support member 2 by insert molding. In this case, the fixing member 4 may be omitted.

[0129] Further, in the above-described embodiment, the drive device DM is a device using a moving coil type voice coil motor configured by a coil 6 as a movable member MB and a magnetic member 11 and a magnet 12 as a fixed member FB, but it may be a device using a moving magnet type voice coil motor.

[0130] Further, in the above-described embodiment, the drive device DM is a device using a voice coil motor, but it may be a device using a piezoelectric element, a device using a shape memory alloy wire, or a device using a solenoid, etc.

Description of Reference Numerals

[0131] 1 ··· Case member 1H ··· Through-hole 1HA ··· First through-hole 1HB ··· Second through-hole 1HC ··· Third through-hole 1HD ··· Fourth through-hole 1HA1, 1HB1, 1HC1, 1HD1 ··· First hole 1HA2, 1HB2, 1HC2, 1HD2 ··· Second hole 1HA3, 1HB3, 1HC3, 1HD3 ··· Third hole 1J ··· Bridging part 1JA ··· First bridging part 1JB ··· Second bridging part 1JC ··· Third bridging part 1JD ··· Fourth bridging part 1JA1, 1JB1, 1JC1, 1JD1 ··· First crossbar 1JA2, 1JB2, 1JC2, 1JD2 ··· Second crossbar 1JA3, 1JB3, 1JC3, 1JD3 ··· Third crossbar 1K ··· Bottom 1KA ··· First bottom 1KB ··· Second bottom 1KC ··· Third bottom 1KD ··· Fourth bottom 1P ··· Upper concave part 1Q ··· Lower concave part 1R ··· Prismatic concave part 1RA ··· First prismatic concave part 1RB ··· Second prismatic concave part 1RC ··· Third prismatic concave part 1RD ··· Fourth prismatic concave part 1V ··· Cylindrical concave part 1VA ··· First cylindrical concave part 1VB ··· Second cylindrical concave part 1VC ··· Third cylindrical concave part 1VD ··· Fourth cylindrical concave part 1W ··· Prismatic concave part 2 ··· Support member 2D ··· Lower support member 2D1 ··· Lower movable part 2D2 ··· Lower middle part 2D3 ··· Lower fixed part 2H ··· Through-hole 2M ··· Ring part 2S ··· Shaft part 2SB ··· Rear shaft part 2SF ··· Front shaft part 2SL ··· Left shaft part 2SR ··· Right shaft part 2T ··· Through-round hole 2T1 ··· First through-round hole 2T2 ··· Second through-round hole 2T3 ··· Third through-round hole 2T4 ··· Fourth through-round hole 2U ··· Upper support member 2U1 ··· Upper movable part 2U2 ··· Upper middle part 2U3 ··· Upper fixed part 2U3B ··· Rear side part 2U3F ··· Front side part 2U3L ··· Left side part 2U3R ··· Right side part 3 ··· Fastening member 3D ··· Lower fastening member 3U ··· Upper fastening member 4 ··· Fixing member 4D ··· Lower fixing member 4D1 ··· First lower fixing member 4D2 ··· Second lower fixing member 4D3 ··· Third lower fixing member 4D4 ··· Fourth lower fixing member 4U ··· Upper fixing member 4U1 ··· First upper fixing member 4U2 ··· Second upper fixing member 4U3 ··· Third upper fixing member 4U4 ··· Fourth upper fixing member 5 ··· Elastic member 5D ··· Lower elastic member5D1 ··· The first lower elastic member 5D2 ··· The second lower elastic member 5D3 ··· The third lower elastic member 5D4 ··· The fourth lower elastic member 5U ··· The upper elastic member 5U1 ··· The first upper elastic member 5U2 ··· The second upper elastic member 5U3 ··· The third upper elastic member 5U4 ··· The fourth upper elastic member 6 ··· Coil 6A ··· The first coil 6B ··· The second coil 6C ··· The third coil 6D ··· The fourth coil 7 ··· Coil holding member 7A ··· The first coil holding member 7AF ··· The first substrate holding part 7AL ··· The first leg part 7AL1 ··· The first extending part 7AL2 ··· The second extending part 7AL3 ··· The third extending part 7AS ··· The first central cylindrical part 7AT ··· The first upper cylindrical part 7AU ··· The first upper plate part 7B ··· The second coil holding member 7C ··· The third coil holding member 7D ··· The fourth coil holding member 8 ··· Substrate 8A ··· The first substrate 8B ··· The second substrate 8C ··· The third substrate 8D ··· The fourth substrate 9 ··· Lower plate member 9A ··· The first lower plate member 9B ··· The second lower plate member 9C ··· The third lower plate member 9D ··· The fourth lower plate member 10 ··· Lower cylindrical member 10A ··· The first lower cylindrical member 10B ··· The second lower cylindrical member 10C ··· The third lower cylindrical member 10D ··· The fourth lower cylindrical member 11 ··· Magnetic member 11A ··· The first magnetic member 11B ··· The second magnetic member 11C ··· The third magnetic member 11D ··· The fourth magnetic member 12 ··· Magnet 12A ··· The first magnet 12B ··· The second magnet 12C ··· The third magnet 12D ··· The fourth magnet 100 ··· Actuator AX ··· Rotation axis AX1 ··· The first rotation axis AX2 ··· The second rotation axis AX3 ··· The third rotation axis AX4 ··· The fourth rotation axis BX ··· Rotation axis BX1 ··· The first rotation axis BX2 ··· The second rotation axis CA ··· Coil assembly CA1 ··· The first coil assembly CA2 ··· The second coil assembly CA3 ··· The third coil assembly CA4 ··· The fourth coil assembly CP ··· Center point CX ··· Central axis DM ··· Driving device DM1 ··· The first driving device DM2 ··· The second driving device DM3 ··· The third driving device DM4 ··· The fourth driving device FB ··· Fixed member GP1, GP2, HT1, HT2 ··· Distance IR ··· Inner annular part MB ··· Movable member MB1 ··· The first movable member MB2 ··· The second movable memberMB3 ··· The 3rd movable member MB4 ··· The 4th movable member MR ··· Central annular part NL ··· Normal vector OE ··· Optical element OR ··· Outer annular part SP ··· Connecting part SP1 ··· The 1st spoke part SP2 ··· The 2nd spoke part SP3 ··· The 3rd spoke part SP4 ··· The 4th spoke part SP5 ··· The 5th spoke part SP6 ··· The 6th spoke part ST ··· Height

Claims

1. A fixed member, a plurality of movable members, a driving device configured to move each of the plurality of movable members in a predetermined driving direction with respect to the fixed member, and a first support member and a second support member that movably support each of the plurality of movable members in the driving direction with respect to the fixed member, wherein the first support member includes a first fixed-side portion connected to one end portion of the fixed member in the driving direction, a first movable-side portion rotatably connected to one end portion of each of the plurality of movable members in the driving direction, and a first intermediate portion elastically connecting between the first fixed-side portion and the first movable-side portion, the second support member includes a second fixed-side portion connected to the other end portion of the fixed member in the driving direction, a second movable-side portion rotatably connected to the other end portion of each of the plurality of movable members in the driving direction, and a second intermediate portion elastically connecting between the second fixed-side portion and the second movable-side portion, the driving device is configured to drive a driven member fixed to the first movable-side portion by moving at least one of the plurality of movable members in the driving direction, the first intermediate portion includes a pair of shaft portions constituting a rotation axis, the second intermediate portion includes another pair of shaft portions constituting another rotation axis parallel to the rotation axis, and the driving device rotates the first support member around the rotation axis and rotates the second support member around the other rotation axis by moving at least one of the plurality of movable members in the driving direction. Actuator.

2. A fixed member, a plurality of movable members, a driving device configured to move each of the plurality of movable members in a predetermined driving direction with respect to the fixed member, and a first support member and a second support member that movably support each of the plurality of movable members in the driving direction with respect to the fixed member, wherein the first support member includes a first fixed-side portion connected to one end portion of the fixed member in the driving direction, a first movable-side portion rotatably connected to one end portion of each of the plurality of movable members in the driving direction, and a first intermediate portion elastically connecting between the first fixed-side portion and the first movable-side portion, The second support member includes a second fixed-side portion connected to the other end of the fixed member in the driving direction, a second movable-side portion rotatably connected to the other end of each of the plurality of movable members in the driving direction, and a second intermediate portion elastically connecting the second fixed-side portion and the second movable-side portion. The driving device is configured to drive a driven member fixed to the first movable-side portion by moving at least one of the plurality of movable members in the driving direction. The first intermediate portion includes a pair of first shaft portions constituting a first rotation axis and a pair of second shaft portions constituting a second rotation axis. The second intermediate portion includes a pair of third shaft portions constituting a third rotation axis parallel to the first rotation axis and a pair of fourth shaft portions constituting a fourth rotation axis parallel to the second rotation axis. The driving device rotates the first support member around at least one of the first rotation axis and the second rotation axis, and rotates the second support member around at least one of the third rotation axis and the fourth rotation axis by moving at least one of the plurality of movable members in the driving direction. Actuator.

3. One end of each of the plurality of movable members in the driving direction is rotatably connected to the first movable-side portion via a connecting member which is an elastic member or a ball joint. The other end of each of the plurality of movable members in the driving direction is rotatably connected to the second movable-side portion via another connecting member which is an elastic member or a ball joint. The actuator according to claim 1 or claim 2.

4. The fixed member is a case member formed of a magnetic body having a plurality of recesses corresponding to the plurality of movable members. Each of the plurality of movable members is accommodated in a corresponding one of the plurality of recesses in a non-contact state. The actuator according to any one of claims 1 to 3.

5. The driven member is an optical element. The actuator according to any one of claims 1 to 4.

Images