Work transfer device, work transfer method

Abstract

Narrow the range for moving the holding member and the tray for aligning the holding member that holds the workpiece and the accommodation part of the tray. 【Solution means】The workpiece transfer device 10 includes a tray 20, a suction nozzle 12, a nozzle driving means 13, a counting means 14, a rotating means, and a tray conveying means 17. The nozzle driving means 13 drives the suction nozzle 12. The counting means 14 counts the number of workpieces 5 accommodated in the accommodation part 21. The rotating means rotates the tray 20 about an axis in a direction non-parallel to the horizontal direction. When the number counted by the counting means 14 reaches 1 / n of the total number of the accommodation part 21, the rotating means rotates the tray 20 by 360° / n. When the number counted by the counting means 14 reaches the total number of the accommodation part 21, the tray conveying means 17 conveys the tray 20 from the workpiece accommodation position P2 and conveys another tray 20 to the workpiece accommodation position P2, and the counting means 14 is reset.

Description

Technical Field

[0001] The present disclosure relates to a work transfer device and a work transfer method.

Background Art

[0002] A work transfer device is known that transfers a work such as a chip to each of a plurality of accommodating portions provided in a tray. The tray containing a plurality of works is conveyed to the next process such as a bonding process.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When transferring a work to an accommodating portion provided in a tray, alignment is performed between a holding member that holds the work and the accommodating portion. By performing the alignment, the work can be appropriately accommodated in the accommodating portion. The larger the tray, the wider the range for moving the holding member or the tray for the alignment. In order to secure a space for the holding member or the tray to move, the work transfer device becomes larger. The cost related to the work transfer device increases. The present disclosure aims to narrow the range for moving the holding member or the tray for alignment between the holding member that holds the work and the accommodating portion of the tray.

Means for Solving the Problems

[0005] The work transfer device of the present disclosure is a tray having a plurality of accommodating portions for accommodating works, a suction nozzle that sucks and holds the work and is driven to accommodate the work in the accommodating portion in which the work is not accommodated, When the tray is located at the work accommodation position, nozzle driving means for driving the suction nozzle; counting means for counting the number of the workpieces accommodated in the accommodation section; rotating means for rotating the tray about an axis in a direction non-parallel to the horizontal direction; tray conveying means for conveying the tray, and when the number counted by the counting means reaches 1 / n of the total number of the accommodation section for a predetermined number n, the rotating means rotates the tray by 360° / n; when the number counted by the counting means reaches the total number of the accommodation section, the tray conveying means conveys the tray from the work accommodation position and conveys another tray to the work accommodation position, and the number counted by the counting means is reset.

Advantages of the Invention

[0006] According to the present disclosure, the range for moving the holding member and the tray for aligning the holding member for holding the workpiece and the accommodation section of the tray can be narrowed.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Embodiments for Carrying Out the Invention

[0008] In the drawings attached to this specification, for the convenience of illustration and easier understanding, the scale, the aspect ratio of vertical and horizontal dimensions, etc. are appropriately changed and exaggerated from those of the actual object. In some of the drawings, the configurations shown in some of the drawings may be omitted in other drawings.

[0009] In this specification, terms that specify the shape, geometric conditions, and their degrees, such as "parallel", "orthogonal", "identical", etc., and values such as lengths and angles are not limited to their strict meanings, but are interpreted to include ranges where similar functions can be expected.

[0010] To clarify the relationship of directions between the drawings, in some of the drawings, the X direction, the Y direction, and the Z direction are shown as common directions by arrows with common reference signs. In the following examples, the X direction and the Y direction are parallel to the horizontal direction, and the Z direction is parallel to the vertical direction. The X direction, the Y direction, and the Z direction are orthogonal to each other. An arrow pointing forward from the paper surface along a direction perpendicular to the paper surface of the drawing is shown by a symbol with a dot in a circle, as shown in FIG. 1 for example. An arrow pointing backward into the paper along a direction perpendicular to the paper surface of the drawing is shown by a symbol with an "×" in a circle, as shown in FIG. 4 for example.

[0011] In this specification, when a plurality of upper limit value candidates and a plurality of lower limit value candidates are listed for a parameter, the parameter may be a numerical range obtained by combining any one of the upper limit value candidates and any one of the lower limit value candidates.

[0012] One embodiment of the present disclosure relates to the following [1] to [7]. [1] A tray having a plurality of accommodating portions for accommodating workpieces, An adsorption nozzle that adsorbs and holds the workpiece and is driven to accommodate the workpiece in the accommodating portion where the workpiece is not accommodated, Nozzle driving means for driving the adsorption nozzle when the tray is in the workpiece accommodation position, Counting means for counting the number of the workpieces accommodated in the accommodation section; Rotating means for rotating the tray about an axis in a direction non-parallel to the horizontal direction; Tray conveying means for conveying the tray, and comprising: When the number counted by the counting means reaches 1 / n of the total number of the accommodation section for a predetermined number n, the rotating means rotates the tray by 360° / n; When the number counted by the counting means reaches the total number of the accommodation section, the tray conveying means conveys the tray from the workpiece accommodation position and conveys another tray to the workpiece accommodation position, and the number counted by the counting means is reset. A workpiece transfer device. [2] The workpiece transfer device according to [1], wherein n is 2. [3] The tray has a mark indicating the orientation of the tray, The workpiece transfer device according to [1] or [2], further comprising detection means for detecting the mark. [4] While the rotating means is rotating the tray, the nozzle driving means stops driving the suction nozzle. The workpiece transfer device according to any one of [1] to [3]. [5] The workpiece transfer device according to any one of [1] to [4], further comprising confirmation means for confirming that the workpiece does not protrude from the accommodation section in the tray. [6] A step of conveying a tray to a workpiece accommodation position by tray conveying means; A step of sucking and holding a workpiece by a suction nozzle; A step of accommodating the workpiece held by the suction nozzle in an accommodation section in the tray where the workpiece is not accommodated by driving the suction nozzle by nozzle driving means; A step of counting the number of the workpieces accommodated in the accommodation section by counting means; For a specified number n, when the number counted by the counting means reaches 1 / n of the total number in the storage section, a step of rotating the tray 360° / n times about an axis in a direction non-parallel to the horizontal direction by the rotating means; When the number counted by the counting means reaches the total number in the storage section, a step of the tray conveying means conveying the tray from the work storage position and conveying another tray to the work storage position; A step of resetting the number counted by the counting means, a work transfer method comprising. [7] The work transfer method according to [6], further comprising a step of confirming by a confirmation means that the work does not protrude from the storage section.

[0013] An embodiment of the present disclosure will be described with reference to the drawings. FIG. 1 is a top view schematically showing a work transfer device 10 according to an embodiment of the present disclosure. The work transfer device 10 transfers the work 5 so as to be accommodated in the accommodation section 21 of the tray 20 described later.

[0014] The work 5 may be, for example, an electronic component. As a more specific example, the work 5 may be a diced semiconductor chip. The shape of the work 5 may be a rectangular parallelepiped shape. The work 5 may have a rotationally symmetric shape in a top view. For example, the work 5 may be rectangular or square in a top view.

[0015] As shown in FIG. 1, the work transfer device 10 includes a work supply unit 11, a suction nozzle 12, nozzle driving means 13, counting means 14, a tray table 15, tray conveying means 17, detection means 18, a tray 20, and confirmation means 30. As shown in FIG. 4 described later, the work transfer device 10 further includes rotation means 16.

[0016] The work supply unit 11 supplies the work 5 to the suction nozzle 12. The work supply unit 11 may be a linear feeder that supplies the work 5 from, for example, a parts feeder (not shown) in a state where the work 5 is arranged in a line. The work supply unit 11 may convey and supply the work 5 by vibrating. The work supply unit 11 may supply the work 5 one by one.

[0017] The suction nozzle 12 is a holding member that holds the work 5 by sucking it. The suction nozzle 12 holds the work 5 supplied by the work supply unit 11 one by one. The work transfer device 10 may have a plurality of suction nozzles 12. In the example shown in FIG. 1, the work transfer device 10 has eight suction nozzles 12. The suction nozzle 12 is driven to accommodate the work 5 in the accommodating portion 21 of the tray 20 in which the work 5 is not accommodated. The suction nozzle 12 is movable in the Z direction. In FIG. 2, the portion where the suction nozzle 12 holds the work 5 is shown enlarged. As shown in FIG. 2, the suction nozzle 12 is driven to move downward in the Z direction to suck and hold the work 5. The suction nozzle 12 moves upward in the Z direction while holding the work 5. By moving the suction nozzle 12, the work 5 can be conveyed. The suction nozzle 12 is driven to release the suction of the work 5 and release the work 5 above the accommodating portion 21 of the tray 20 in which the work 5 is not accommodated.

[0018] The nozzle driving means 13 drives the suction nozzle 12 when the tray 20 is located at the workpiece accommodation position P2. The nozzle driving means 13 is circular in top view. Along the outer periphery of the nozzle driving means 13, the suction nozzle 12 is provided. The nozzle driving means 13 moves the suction nozzle 12 by rotating. The nozzle driving means 13 moves the suction nozzle 12 holding the workpiece 5 above the accommodation portion 21 of the tray 20 where the workpiece 5 is not accommodated by driving the suction nozzle 12, and releases the workpiece 5. By the nozzle driving means 13 moving the suction nozzle 12, the suction nozzle 12 may be aligned with the position for accommodating the workpiece in the accommodation portion 21. The nozzle driving means 13 moves the suction nozzle 12 that has released the workpiece 5 to the position where the workpiece 5 is supplied by the workpiece supply unit 11 by driving the suction nozzle 12, and holds the workpiece 5.

[0019] The counting means 14 counts the number of workpieces 5 accommodated in the accommodation portion 21. The counting means 14 may be included in an electronic computer. In the example shown in FIG. 1, the counting means 14 is connected to the nozzle driving means 13. The counting means 14 may count the number by receiving from the nozzle driving means 13 the number of times the nozzle driving means 13 has released the workpiece 5 to the suction nozzle 12. The counting means 14 may also count the number by observing the tray 20 with an imaging device (not shown) or the like. When the number counted by the counting means 14 reaches the full number of the accommodation portion 21, the number counted by the counting means 14 is reset.

[0020] The tray table 15 has the tray 20 placed thereon. The upper surface of the tray table 15 in the Z direction is a flat surface. The dimensions of the upper surface of the tray table 15 in the Z direction are larger than the dimensions of the tray 20 in top view. The tray table 15 may have fixing means for fixing the tray 20. By the tray table 15 being rotated or conveyed, the tray 20 placed on the tray table 15 is also rotated or conveyed accordingly. The tray table 15 is conveyed to the tray set position P1, the workpiece accommodation position P2, and the confirmation position P3.

[0021] The tray 20 has a plurality of accommodating portions 21 for accommodating the workpiece 5. The tray 20 is placed on the tray stand 15 and is rotated and conveyed together with the tray stand 15. The tray 20 may have any shape. In the illustrated example, the tray 20 is disk-shaped. FIG. 3 is an enlarged top view of the tray 20. As shown in FIG. 3, the plurality of accommodating portions 21 are arranged in one direction and another direction non-parallel to the one direction. The accommodating portions 21 are two-dimensionally arranged. The accommodating portion 21 is a recess formed on the surface of the tray 20. The accommodating portion 21 has a shape and dimensions corresponding to the workpiece 5 so that the workpiece 5 can be appropriately accommodated. The accommodating portion 21 has a depth that can accommodate the workpiece 5 without protruding. The number of the accommodating portions 21 may be a multiple of a predetermined number n. The number n is a natural number of 2 or more. The number n may be 6 or less. The number n may be 2 or may be 4.

[0022] As shown in FIG. 3, the tray 20 may further have marks 23. The tray 20 may have a plurality of marks 23. The plurality of marks 23 may be different from each other. The mark 23 indicates the orientation of the tray 20. More specifically, the mark 23 indicates which part when the tray 20 is divided into n parts. In the example shown in FIG. 3, the first mark 23A indicates the first part 20A when the tray 20 is divided into two parts, and the second mark 23B indicates the second part 20B when the tray 20 is divided into two parts. The first part 20A and the second part 20B are different parts of the tray 20. The first part 20A and the second part 20B may have the same shape as each other. By detecting the mark 23, it is possible to determine which part of the tray 20 is facing near the suction nozzle 12. The mark 23 may be, for example, a two-dimensional barcode.

[0023] The rotating means 16 rotates the tray table 15 in a direction non-parallel to the horizontal direction, for example, about the Z direction as an axis. When the tray table 15 rotates, the tray 20 placed on the tray table 15 also rotates. Therefore, the rotating means 16 rotates the tray 20 about an axis in a direction non-parallel to the horizontal direction. FIG. 4 is a side view of the workpiece transfer device 10 observed from the Y direction when the tray table 15 and the tray 20 are located at the workpiece accommodation position P2. As shown in FIG. 4, the rotating means 16 is located between the tray table 15 and the tray conveying means 17 in the Z direction.

[0024] The rotating means 16 rotates the tray 20 by a predetermined angle at a predetermined timing. Specifically, for a predetermined number n, when the number counted by the counting means 14 reaches 1 / n of the total number of the storage section 21, the rotating means 16 rotates the tray 20 by 360° / n. For example, when n is 2, when the number counted by the counting means 14 reaches 1 / 2 of the total number of the storage section 21, the rotating means 16 rotates the tray 20 by 180°.

[0025] The tray conveying means 17 conveys the tray table 15 in the X direction and the Y direction. When the tray table 15 is conveyed, the tray 20 placed on the tray table 15 is also conveyed. Therefore, the tray conveying means 17 conveys the tray 20. The tray conveying means 17 conveys the tray 20 from the tray set position P1 to the workpiece accommodation position P2 and from the workpiece accommodation position P2 to the confirmation position P3. The tray conveying means 17 includes an X-direction tray conveying means 17X and a Y-direction tray conveying means 17Y. In the example shown in FIG. 4, the X-direction tray conveying means 17X is provided above the Y-direction tray conveying means 17Y. The X-direction tray conveying means 17X conveys the tray table 15, the rotating means 16, and the tray 20 in the X direction. The Y-direction tray conveying means 17Y conveys the tray table 15, the rotating means 16, the tray 20, and the X-direction tray conveying means 17X in the Y direction. By the tray conveying means 17 conveying the tray 20 in the X direction and the Y direction, the suction nozzle 12 may be aligned with the position where the workpiece is accommodated in the storage section 21.

[0026] When the tray 20 is placed on the tray table 15 at the tray set position P1, the tray conveying means 17 conveys the tray table 15 and the tray 20 from the tray set position P1 to the work storage position P2. When the work 5 is stored in the storage portion 21 of the tray 20 at the work storage position P2, in other words, when the number counted by the counting means 14 reaches the total number of the storage portion 21, the tray conveying means 17 conveys the tray 20 from the work storage position P2 to the confirmation position P3. When the tray 20 is removed from the tray table 15 at the confirmation position P3, the tray conveying means 17 conveys the tray table 15 without the tray 20 placed thereon from the confirmation position P3 to the tray set position P1. The tray conveying means 17 conveys another tray 20 without the work 5 stored in the storage portion 21 from the tray set position P1 to the work storage position P2 at the tray set position P1.

[0027] The detection means 18 detects the mark 23 provided on the tray 20. The detection means 18 is located, for example, above the tray 20 in the Z direction at the work storage position P2 so that the mark 23 can be observed at the work storage position P2. By detecting the mark 23 by the detection means 18, the orientation of the tray 20 is detected. By detecting the mark 23 by the detection means 18, it is possible to determine which part of the tray 20 is facing near the suction nozzle 12. The detection means 18 may be, for example, a combination of an imaging device that images the mark 23 and a determination unit that determines the orientation of the tray 20 based on the image captured by the imaging device.

[0028] The confirmation means 30 confirms that the workpiece 5 does not protrude from the accommodation portion 21 in the tray 20. The confirmation means 30 confirms whether the workpiece 5 protrudes from the accommodation portion 21, for example, by irradiating the tray 20 with a laser. FIG. 5 is a side view of the workpiece transfer device 10 observed from the X direction when the tray base 15 and the tray 20 are located at the confirmation position P3. As shown in FIG. 5, the confirmation means 30 includes a laser irradiation unit 31, a sensor unit 32, and a determination unit 33. The laser irradiation unit 31 irradiates the accommodation portion 21 in which the workpiece 5 of the tray 20 is accommodated with a laser. The sensor unit 32 detects the laser irradiated from the laser irradiation unit 31 and reflected by the workpiece 5 accommodated in the accommodation portion 21 of the tray 20. The determination unit 33 is connected to the sensor unit 32, and the data of the laser detected by the sensor unit 32 is sent thereto. The determination unit 33 determines whether the workpiece 5 protrudes from the accommodation portion 21 based on the data sent from the sensor unit 32. The confirmation means 30 may confirm whether a plurality of workpieces 5 do not protrude from the accommodation portion 21 at the same time. Not limited to the illustrated example, the confirmation means 30 may be, for example, a combination of an imaging device and a determination unit.

[0029] An example of a workpiece transfer method by the workpiece transfer device 10 will be described.

[0030] The tray base 15 on which the tray 20 is not placed is conveyed to the tray set position P1. The tray 20 in which the workpiece 5 is not accommodated in the accommodation portion 21 is placed on the tray base 15. The tray 20 may be placed on the tray base 15 by being adsorbed and held by, for example, tray placement means (not shown).

[0031] The tray table 15 and the tray 20 placed on the tray table 15 are conveyed from the tray set position P1 to the work accommodation position P2 by the tray conveying means 17. The tray conveying means 17 conveys the tray table 15 and the tray 20 at the work accommodation position P2, and aligns the accommodation portion 21 of the tray 20 so that the work 5 is accommodated in the accommodation portion 21 from the suction nozzle 12. The detection means 18 detects the orientation of the tray 20 by the mark 23 of the tray 20. For example, it is detected that the work 5 is aligned to be accommodated in the accommodation portion 21 of the first portion 20A of the tray 20.

[0032] The work 5 is supplied by the work supply unit 11 to a position where the suction nozzle 12 can hold it. The suction nozzle 12 is driven by the nozzle driving means 13. By being driven by the nozzle driving means 13, the suction nozzle 12 that is not holding the work 5 moves in the Z direction and approaches the work 5. The suction nozzle 12 sucks and holds the work 5. The nozzle driving means 13 rotates, and moves the suction nozzle 12 holding the work 5 above the accommodation portion 21 of the tray 20 in which the work 5 is not accommodated. The nozzle driving means 13 releases the work 5 to the suction nozzle 12 above the accommodation portion 21. The released work 5 is accommodated in the accommodation portion 21.

[0033] The alignment of the accommodation portion 21 of the tray 20 by driving the tray conveying means 17 and the accommodation of the work 5 into the accommodation portion 21 by driving the nozzle driving means 13 are repeated. The work 5 is sequentially accommodated in the accommodation portion 21 at a certain location of the tray 20. For example, the accommodation portion 21 is aligned so that the work 5 is sequentially accommodated in the accommodation portion 21 of the first portion 20A of the tray 20, and the work 5 held by the suction nozzle 12 is accommodated in the aligned accommodation portion 21.

[0034] The number of the work 5 accommodated in the accommodation portion 21 is counted by the counting means 14. The counting means 14 counts the number of the work 5 accommodated in the accommodation portion 21, for example, based on the number of times the nozzle driving means 13 releases the work 5 to the suction nozzle 12.

[0035] When the number counted by the counting means 14 reaches 1 / n of the total number of the storage parts 21, the workpieces 5 are sequentially stored in 1 / n of the total number of the storage parts 21. The example shown in FIG. 6 is the case where n is 2. The workpieces 5 are stored in all the storage parts 21 of the first part 20A of the tray 20. When the number counted by the counting means 14 reaches 1 / n of the total number of the storage parts 21, the rotating means 16 rotates the tray base 15 and the tray 20 by 360° / n about an axis in a non-parallel direction in the horizontal direction. In the example shown in FIG. 7, the tray 20 shown in FIG. 6 is rotated by 180°. The first part 20A of the tray 20 in which the workpieces 5 are stored moves away from the suction nozzle 12. The second part 20B of the tray 20 in which no workpiece 5 is stored approaches the suction nozzle 12. That the tray 20 is properly rotated is confirmed by the detection means 18 detecting the orientation of the tray 20 by the mark 23. While the rotating means 16 rotates the tray 20, the nozzle driving means 13 stops driving the suction nozzle 12.

[0036] After rotating the tray 20, the alignment of the storage parts 21 of the tray 20 by driving the tray conveying means 17 and the storage of the workpiece 5 into the storage parts 21 by driving the nozzle driving means 13 are repeated again. The workpieces 5 are sequentially stored in the storage parts 21 at another location of the tray 20. For example, the storage parts 21 are aligned so that the workpieces 5 are sequentially stored in the storage parts 21 of the second part 20B of the tray 20, and the workpieces 5 held by the suction nozzle 12 are stored in the aligned storage parts 21. When the workpiece 5 is rotationally symmetric by n times in a top view, the workpiece 5 can be stored in the storage part 21 without changing the orientation of the workpiece 5 even after rotating the tray 20 by 360° / n.

[0037] Until the number counted by the counting means 14 reaches the total number of the storage section 21, for a natural number m smaller than the number n, when the number counted by the counting means 14 reaches m / n of the total number of the storage section 21, the rotating means 16 repeatedly rotates the tray base 15 and the tray 20 by 360° / n about an axis in a direction non-parallel to the horizontal direction. After rotating the tray 20, the alignment of the storage section 21 of the tray 20 by driving the tray conveying means 17 and the accommodation of the workpiece 5 into the storage section 21 by driving the nozzle driving means 13 are repeated (n - 1) times, so that the number counted by the counting means 14 reaches the total number of the storage section 21. The workpiece 5 is accommodated in all of the storage sections 21. When the number counted by the counting means 14 reaches the total number of the storage section 21, the tray conveying means 17 conveys the tray base 15 and the tray 20 from the workpiece accommodation position P2 to the confirmation position P3. When the number counted by the counting means 14 reaches the total number of the storage section 21, the number counted by the counting means 14 is reset.

[0038] At the confirmation position P3, the confirmation means 30 confirms that the workpiece 5 does not protrude from the storage section 21. An example of a specific method of this process will be described. The laser irradiation unit 31 irradiates the storage section 21 in which the workpiece 5 is accommodated with a laser. The laser is reflected by the workpiece 5. The workpiece 5 protruding from the storage section 21 is inclined in the storage section 21 as shown in FIG. 5 compared to the workpiece 5 properly accommodated in the storage section 21. The direction of the laser reflected by the workpiece 5 protruding from the storage section 21 is different from the direction of the laser reflected by the workpiece 5 properly accommodated in the storage section 21. The laser reflected by the workpiece 5 is detected by the sensor unit 32. Based on the laser data detected by the sensor unit 32, the determination unit 33 determines whether the workpiece 5 protrudes from the storage section 21. If there is a workpiece 5 determined to protrude from the storage section 21, the tray 20 may be shaken by the tray conveying means 17 to properly accommodate the workpiece 5 in the storage section 21.

[0039] The tray 20, which has been confirmed that the workpiece 5 does not protrude from the accommodating portion 21 at the confirmation position P3, is taken out from the tray table 15. The tray 20 may be taken out from the tray table 15 by being adsorbed and held by, for example, tray taking-out means (not shown).

[0040] The tray table 15 without the tray 20 placed thereon is conveyed to the tray setting position P1. Another tray 20 in which the workpiece 5 is not accommodated is placed on the tray table 15. By repeating the above steps, a tray 20 in which the workpiece has been transferred so as to be accommodated in the accommodating portion 21 can be obtained.

[0041] In the workpiece transfer device, when transferring the workpiece to the accommodating portion provided in the tray, alignment is performed between the holding member that holds the workpiece and the accommodating portion. For alignment, the holding member and the tray are moved. In a conventional workpiece transfer device, the larger the tray, the wider the range for moving the holding member and the tray for the alignment. In order to secure the space for the holding member and the tray to move and the space for providing the mechanism for the movement, the workpiece transfer device becomes larger. When the workpiece transfer device becomes larger, the costs for transportation, installation, etc. increase. It is required to narrow the range for moving the holding member and the tray for alignment between the holding member that holds the workpiece and the accommodating portion.

[0042] In the work transfer device 10 of the present embodiment, for a predetermined number n, when the number counted by the counting means 14 reaches 1 / n of the total number of the storage unit 21, the rotating means 16 rotates the tray 20 by 360° / n. When 1 / n of the total number of the storage unit 21 is filled with the work 5, the tray 20 rotates by 360° / n. By rotating the tray 20, the storage unit 21 not filled with the work 5 can be moved close to the suction nozzle 12. Even if the range in which the suction nozzle 12 and the tray 15 on which the tray 20 is placed, which are holding members of the work 5, are moved is not expanded to the entire tray 20, specifically, even if it is 1 / n of the entire tray 20, the work 5 can be stored in all of the storage units 21 of the tray 20. The range in which the suction nozzle 12 and the tray 20 are moved for alignment between the suction nozzle 12, which is a holding member for holding the work 5, and the storage unit 21 of the tray 20 can be narrowed. In the example shown in FIG. 1, since the range in the Y direction in which the tray 20 is moved may be about half that of the conventional work transfer device, the length of the Y-direction tray transfer means 17Y of the tray transfer means 17 in the Y direction is about half that of the conventional work transfer device.

[0043] The larger the number n, the narrower the range in which the suction nozzle 12 and the tray 20 are moved for alignment between the suction nozzle 12, which is a holding member for holding the work 5, and the storage unit 21 of the tray 20. On the other hand, as the number n increases, the number of times the tray 20 is rotated increases. While the tray 20 is rotating, it is difficult for the suction nozzle 12 to store the work 5 in the storage unit 21. As the number of times the tray 20 is rotated increases, the time required to store the work 5 in the storage unit 21 increases. The efficiency of transferring the work 5 to the storage unit 21 decreases. The smaller the number n, the less likely the efficiency of transferring the work 5 to the storage unit 21 is to decrease. It is preferable that the number n is within an appropriate range. Specifically, the number n is preferably 2 or 4, particularly 2.

[0044] Since the work 5 has an n-fold symmetric shape, the work 5 can be stored in the storage unit 21 without changing the orientation of the work 5. When the number n is 2, even if the work 5 has a rectangular shape in a top view, the work 5 can be stored in the storage unit 21 without changing the orientation of the work 5.

[0045] While the tray 20 is rotating, it is difficult for the suction nozzle 12 to accommodate the workpiece 5 in the accommodating portion 21. If the suction nozzle 12 is driven while the tray 20 is rotating, the workpiece 5 may fall to an unintended position without being accommodated in the accommodating portion 21 from the suction nozzle 12. The workpiece 5 that has fallen to an unintended position may cause an unintended malfunction in the workpiece transfer device 10. In order to avoid such a malfunction, it is preferable that the nozzle driving means 13 stops driving the suction nozzle 12 while the rotating means 16 is rotating the tray 20.

[0046] The workpiece transfer device 10 has a detection means 18 for detecting a mark 23 indicating the orientation of the tray 20. By detecting the mark 23 of the tray 20, the orientation of the tray 20 can be recognized. It can be confirmed that the orientation of the tray 20 has changed by rotating the tray 20. The workpiece 5 may be accommodated in the accommodating portion 21 while changing the orientation of the workpiece 5 according to the orientation of the tray 20.

[0047] The workpiece transfer device 10 has a confirmation means 30 for confirming that the workpiece 5 does not protrude from the accommodating portion 21 in the tray 20. By confirming with the confirmation means 30 that the workpiece 5 does not protrude from the accommodating portion 21, the tray 20 in which the workpiece 5 is accommodated in the accommodating portion 21 can be appropriately processed in a subsequent process such as a bonding process.

[0048] Aspects of the present disclosure are not limited to the above-described embodiments, but also include various modifications that can be conceived by those skilled in the art, and the effects of the present disclosure are not limited to the content related to the above-described embodiments. Various additions, changes, and partial deletions are possible without departing from the conceptual ideas and spirit of each disclosure derived from the content defined in the claims and their equivalents.

Explanation of reference numerals

[0049] 5 Workpiece 10 Workpiece transfer device 11 Workpiece supply unit 12 Suction nozzle 13 Nozzle driving means 14 Counting means 15 Tray stand 16 Rotating means 17 Tray conveying means 17X Tray conveying means in the X direction 17Y Tray conveying means in the Y direction 18 Detection means 20 Tray 21 Storage section 23 Mark 30 Confirmation means 31 Laser irradiation section 32 Sensor section 33 Judgment section P1 Tray set position P2 Work storage position P3 Confirmation position

Claims

1. A disk-shaped tray having a plurality of storage compartments for storing workpieces having n-fold symmetry; a suction nozzle that is driven to suction and hold the workpiece and accommodate the workpiece in the accommodation section in which the workpiece is not accommodated; a nozzle driving means for driving the suction nozzle when the tray is positioned at a work accommodation position; A counting means for counting the number of the works accommodated in the accommodation section; A rotating means for rotating the tray about an axis not parallel to the horizontal direction; A tray conveying means for conveying the tray, When the number counted by the counting means reaches 1 / n of the total number of the storage units for a predetermined number n, the rotating means rotates the tray 360° / n; A work transfer device in which the tray is rotated 360° / n rotations around the axis at the work accommodating position, and when the rotation of the tray around the axis reaches 360° and the number counted by the counting means reaches the total number of the accommodating sections, the tray transporting means transports the tray from the work accommodating position and transports another tray to the work accommodating position, and the number counted by the counting means is reset.

2. The workpiece transfer device according to claim 1 , wherein the n is 2.

3. the tray has a mark indicating an orientation of the tray; The workpiece transfer device according to claim 1 , further comprising a detection means for detecting the mark.

4. 2. The workpiece transfer device according to claim 1, wherein said nozzle driving means stops driving said suction nozzle while said rotating means is rotating said tray.

5. 2. The work transfer device according to claim 1, further comprising a confirmation means for confirming that the work does not protrude from the storage portion in the tray.

6. A work transfer device as described in Claim 3, wherein the nozzle driving means drives the suction nozzle to change the orientation of the workpiece in accordance with the orientation of the tray recognized by the detection means by detecting the mark, and to accommodate the workpiece in the accommodation section in which the workpiece is not accommodated.

7. A step of transporting a disk-shaped tray to a work accommodation position by a tray transport means; a step of suctioning and holding a workpiece having an n-fold symmetric shape by a suction nozzle; a step of accommodating the workpiece held by the suction nozzle in an accommodating portion of the tray in which the workpiece is not accommodated, by driving the suction nozzle with a nozzle driving means; A step of counting the number of the works accommodated in the accommodation section by a counting means; a step of rotating the tray 360° / n around an axis in a direction not parallel to the horizontal direction when the number counted by the counting means reaches 1 / n of the total number of the storage sections for a predetermined number n; a step of rotating the tray around the axis at the work accommodation position by 360° / n rotations, and when the rotation of the tray around the axis reaches 360° and the number counted by the counting means reaches the total number of the accommodation sections, the tray transport means transports the tray from the work accommodation position and transports another tray to the work accommodation position; and resetting the number counted by the counting means.

8. 8. The method for transferring a workpiece according to claim 7, further comprising the step of: confirming by a confirmation means that the workpiece does not protrude from the accommodation portion.

Images