Non-volatile memory device, operation method thereof, controller for controlling the same, and storage device including the same

By reading and utilizing wear-out patterns to select optimized operating modes, the reliability and lifespan of non-volatile memory devices are improved, addressing the challenge of maintaining data integrity in memory blocks.

JP7684104B2Active Publication Date: 2025-05-27SAMSUNG ELECTRONICS CO LTD
View PDF 10 Cites 0 Cited by

Patent Information

Application Number
JP2021093841
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2020-08-14
Filing Date
2021-06-03
Publication Date
2025-05-27
Estimated Expiration
2041-06-03

AI Technical Summary

Technical Problem

Existing non-volatile memory devices face challenges in maintaining data reliability due to wear-out patterns in memory blocks, leading to potential operational failures and reduced lifespan.

Method used

The implementation of a method where a controller reads the wear-out pattern of a memory block when reusing it, selects an optimized operating mode based on this information, and transmits this mode to the non-volatile memory device, thereby improving data reliability and extending the lifespan of the memory block.

Benefits of technology

This approach enhances the reliability of memory blocks by selecting an optimized operating mode based on wear-out information, leading to improved performance and extended lifespan of the non-volatile memory device.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007684104000001
    Figure 0007684104000001
  • Figure 0007684104000002
    Figure 0007684104000002
  • Figure 0007684104000003
    Figure 0007684104000003
Patent Text Reader

Abstract

To provide a non-volatile memory device that improves reliability of data, an operating method thereof, a controller for controlling the same, and a storage device including the same.SOLUTION: An operating method of a storage device includes reading a wear-out pattern of a memory block using a controller, when re-using the memory block of a non-volatile memory device; selecting an operation mode corresponding to the read wear-out pattern using the controller; and transmitting the selected operation mode to the non-volatile memory device using the controller.SELECTED DRAWING: Figure 1
Need to check novelty before this filing date? Find Prior Art

Description

[Technical field]

[0001] The present invention relates to a non-volatile memory device, a method of operating the same, a controller for controlling the same, and a storage device including the same. [Background technology]

[0002] In general, a flash memory, which is a non-volatile memory, can maintain stored data even when the power is cut off. In recent years, storage devices including flash memory, such as eMMC (embedded multi-media card), UFS (universal flash storage), SSD (solid state drive), and memory cards, have been widely used. Storage devices are useful for storing or transferring large amounts of data. There is a continuing demand for technology to improve the reliability of storage devices. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-114679 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention has been made in consideration of the above-mentioned conventional technology, and an object of the present invention is to provide a non-volatile memory device that improves data reliability, an operating method thereof, a controller for controlling it, and a storage device including the same. [Means for solving the problem]

[0005] In order to achieve the above object, one aspect of the present invention provides an operating method of a memory device, comprising the steps of: a controller reading a wear-out pattern of a memory block when reusing the memory block of a non-volatile memory device; the controller selecting an operating mode corresponding to the read wear-out pattern; and the controller transmitting the selected operating mode to the non-volatile memory device.

[0006] In order to achieve the above object, a nonvolatile memory device according to one aspect of the present invention includes a memory cell region having a first metal pad, and a peripheral circuit region having a second metal pad and vertically connected to the first metal pad and the second metal pad, wherein the memory cell region includes a memory cell array including a plurality of memory blocks having a plurality of memory cells connected to a plurality of word lines and a plurality of bit lines, a row decoder in the peripheral circuit region for selecting one of the plurality of word lines, a page buffer circuit in the peripheral circuit region having a plurality of page buffers connected to the plurality of bit lines, and a control logic in the peripheral circuit region for receiving a command latch enable (CLE) signal, an address latch enable (ALE) signal, a chip enable (CE) signal, a write enable (WE) signal, a read enable (RE) signal, and a data strobe (DQS) signal via a control pin, and latching a command or address at an edge of the WE signal in response to the CLE signal and the ALE signal, the high-level operation including a program operation, a read operation, or an erase operation in a high-level operation mode different from a normal operation mode for improving reliability.

[0007] In order to achieve the above object, a controller according to one aspect of the present invention includes: control pins for providing a command latch enable (CLE) signal, an address latch enable (ALE) signal, a chip enable (CE) signal, a write enable (WE) signal, a read enable (RE) signal, and a DQS signal to at least one nonvolatile memory device; an error correction circuit for receiving data of a patrol read operation for a memory block from the at least one nonvolatile memory device and correcting errors in the received data; and at least one processor for reclaiming the memory block if a number of errors corrected by the error correction circuit is equal to or greater than a reference value, determining a reason for wear-out of the memory block, recording a wear-out pattern corresponding to the reason for wear-out in the memory block, reading the wear-out pattern when reusing the memory block, selecting an operation mode corresponding to the wear-out pattern, and performing a program operation, a read operation, or an erase operation on the memory block of the at least one nonvolatile memory device according to the selected operation mode.

[0008] In order to achieve the above object, according to one aspect of the present invention, a storage device includes at least one nonvolatile memory device; and a controller connected to the at least one nonvolatile memory device via control pins that provide a command latch enable (CLE) signal, an address latch enable (ALE) signal, a chip enable (CE) signal, a write enable (WE) signal, a read enable (RE) signal, and a DQS signal, and configured to read data from the at least one nonvolatile memory device, wherein the at least one nonvolatile memory device performs a core operation for improving reliability by latching a command or address at an edge of the WE signal in response to the CLE signal and the ALE signal, and the controller checks a wearout pattern of a memory block of the nonvolatile memory device in which the core operation is to be performed, selects a word line recovery mode using the wearout pattern, and performs the core operation in response to the selected word line recovery mode. Effect of the Invention

[0009] The non-volatile memory device, its operating method, controller controlling the same, and storage device including the same according to the present invention can improve the reliability of the memory block by selecting an optimized operating mode using wearout information of the memory block and performing core operations according to the selected optimized operating mode.

[0010] The non-volatile memory device, the operating method thereof, the controller for controlling the non-volatile memory device, and the storage device including the controller according to the present invention can improve the reliability of the memory block, thereby extending the lifespan. [Brief description of the drawings]

[0011] [Figure 1] 1 is a diagram illustrating an exemplary storage device according to an embodiment of the present invention; [Diagram 2] 2 is a diagram illustrating an example of the nonvolatile memory device shown in FIG. 1. [Figure 3a]2 is a diagram illustrating an example of a memory block according to an embodiment of the present invention; [Figure 3b] 13 is a diagram illustrating a memory block according to another embodiment of the inventive concept; [Figure 4] 2 is a diagram illustrating an example of a circuit diagram of one of the memory blocks illustrated in FIG. 1; FIG. [Diagram 5] 1 is a diagram conceptually illustrating a block management method of a nonvolatile memory device according to an embodiment of the present invention; [Figure 6] 4 is a flowchart illustrating an operation mode of a storage device according to an embodiment of the present invention. [Figure 7a] FIG. 13 is an exemplary diagram illustrating a method for storing wear-out patterns according to an embodiment of the present invention. [Figure 7b] FIG. 13 is an exemplary diagram illustrating a method for storing wear-out patterns according to an embodiment of the present invention. [Figure 8a] FIG. 2 conceptually illustrates mode selection of an operational mode management module according to one embodiment of the present invention. [Figure 8b] FIG. 2 conceptually illustrates mode selection of an operational mode management module according to one embodiment of the present invention. [Figure 9a] 13 is a diagram illustrating an example of an erase command transmitted together with an operation mode. [Figure 9b] 13 is a diagram illustrating an example of a program command transmitted together with an operation mode. [Figure 9c] 13 is a diagram illustrating an example of a read command transmitted together with an operation mode. FIG. [Figure 10] FIG. 2 is a diagram conceptually illustrating selection of an operation mode according to a type of program according to an embodiment of the present invention. [Figure 11a] 1 is a diagram conceptually illustrating a word line recovery operation of a nonvolatile memory device according to an embodiment of the present invention; [Figure 11b] 1 is a diagram conceptually illustrating a word line recovery operation of a nonvolatile memory device according to an embodiment of the present invention; [Figure 12]13 is a diagram illustrating a word line recovery control operation of a read operation according to an embodiment of the present invention. [Figure 13a] 13 is a diagram illustrating a method for performing a word line recovery control operation. FIG. [Figure 13b] 13 is a diagram illustrating a method for performing a word line recovery control operation. FIG. [Figure 13c] 13 is a diagram illustrating a method for performing a word line recovery control operation. FIG. [Figure 14] 1 is a diagram illustrating an example of a discharge path of a word line recovery current according to an embodiment of the present invention. [Figure 15] 10 is a diagram illustrating a word line recovery mode table of a nonvolatile memory device according to an embodiment of the present invention; [Figure 16] 1 is a flowchart illustrating an example of a method of operating a storage device according to an embodiment of the present invention. [Figure 17a] 1 is a flowchart illustrating a reclaim operation of a storage device according to an embodiment of the present invention. [Figure 17b] 4 is a flowchart illustrating an example of a method of operating a nonvolatile memory device according to an embodiment of the present invention. [Figure 18] 13 is a diagram illustrating a storage device according to another embodiment of the present invention; FIG. [Figure 19] 11 is a ladder diagram illustrating an example process of performing an operation according to an optimal operation mode based on wear-out information in a storage device according to an embodiment of the present invention. [Figure 20] 1 is a diagram illustrating a non-volatile memory device implemented in a C2C structure according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the following, the present invention will be described clearly and in detail with reference to the drawings so that those skilled in the art can easily carry out the present invention.

[0013] A non-volatile memory device according to an embodiment of the present invention, a controller for controlling the same, a storage device including the same, and an operating method thereof select an optimized operating mode based on wear-out information when reusing a memory block, and perform a core operation (such as a program operation, a read operation, an erase operation, etc.) according to the selected optimized operating mode to improve reliability.

[0014] 1 is a diagram showing a storage device according to an embodiment of the present invention. Referring to FIG. 1, a storage device 10 includes at least one non-volatile memory device (NVM(s)) 100 and a controller (CNTL) 200.

[0015] At least one nonvolatile memory device 100 is implemented to store data. The nonvolatile memory device 100 may be a NAND flash memory, a vertical NAND flash memory, a NOR flash memory, a resistive random access memory (ReRAM), a phase-change memory (PRAM), a magnetoresistive random access memory (MRAM), a ferroelectric random access memory (FeRAM), a spin transfer torque random access memory (STT-RAM), or the like. The nonvolatile memory device 100 may also be implemented in a three-dimensional array structure. The present invention may also be applied to a charge trap flash (CTF) in which a charge storage layer is made of an insulating film. Hereinafter, for convenience of explanation, the nonvolatile memory device 100 is referred to as a vertical NAND flash memory device (VNAND).

[0016] The non-volatile memory device 100 is embodied to include a plurality of memory blocks BLK1 to BLKz (z is an integer equal to or greater than 2) and a control logic 150.

[0017] Each of the memory blocks BLK1 to BLKz includes a plurality of pages Page 1 to Page m (m is an integer equal to or greater than 2). Each of the pages Page 1 to Page m includes a plurality of memory cells. Each of the memory cells stores at least one bit.

[0018] Also, each of the memory blocks BLK1 to BLKz is embodied to store wear-out information when it is treated as an invalid block. In one embodiment, the wear-out information includes a specific pattern. Here, the wear-out information of the specific pattern is stored in a predetermined location (cell area or spare area) inside the corresponding memory block. However, the wear-out information of the present invention is not necessarily limited thereto. The wear-out information of the memory block does not have to be stored including a specific pattern. For example, the wear-out information includes structural characteristic information, word line profile information, or cycle characteristic information.

[0019] The control logic 150 receives a command CMD and an address ADD from the controller (CNTL) 200, and performs an operation (program operation, read operation, erase operation, etc.) corresponding to the received command CMD on a memory cell corresponding to the address ADD.

[0020] The control logic 150 also includes an advanced operation circuit 155. The advanced operation circuit 155 is embodied to perform an operation (program operation, read operation, erase operation) according to an advanced operation mode different from a normal operation mode. Here, the advanced operation mode is an optimized operation mode for improving reliability received from the controller 200.

[0021] The controller (CNTL) 200 is connected to at least one nonvolatile memory device 100 via a plurality of control pins transmitting control signals (e.g., CLE, ALE, CE(s), WE, RE, etc.). The controller (CNTL) 200 is also embodied to control the nonvolatile memory device 100 using the control signals (CLE, ALE, CE(s), WE, RE, etc.). For example, the nonvolatile memory device 100 performs a program operation / read operation / erase operation by latching a command CMD or an address ADD at an edge of a write enable (WE) signal in response to a command latch enable (CLE) signal and an address latch enable (ALE) signal.

[0022] The controller 200 also includes an operation mode management module 211. When reusing a memory block, the operation mode management module 211 reads wear-out information of the corresponding memory block from the nonvolatile memory device 100, selects an optimized operation mode of the memory block based on the read wear-out information, and transmits the selected optimized operation mode to the nonvolatile memory device 100. In one embodiment, the operation mode management module 211 is embodied in hardware, software, or firmware. In one embodiment, the operation mode management module 211 is executed by at least one processor inside the controller 200, although not shown.

[0023] In general, when a memory block is reused, a storage device operates according to the same operation mode regardless of the reliability characteristics of the memory block, which may cause reliability problems for the reused memory block.

[0024] In contrast, a storage device 10 according to one embodiment of the present invention, when reusing a memory block, first reads out wear-out information indicating the reliability characteristics of the memory block, selects an optimized operating mode that improves reliability based on the wear-out information, and performs operation according to the selected optimized operating mode, thereby significantly improving the reliability of the memory block after reuse.

[0025] Fig. 2 is a diagram illustrating an example of the non-volatile memory device 100 shown in Fig. 1. Referring to Fig. 2, the non-volatile memory device 100 includes a memory cell array 110, a row decoder 120, a page buffer circuit 130, an input / output buffer circuit 140, a control logic 150, a voltage generator 160, and a cell counter 170.

[0026] The memory cell array 110 is connected to a row decoder 120 via word lines WLs or selection lines SSL, GSL. The memory cell array 110 is connected to a page buffer circuit 130 via bit lines BLs. The memory cell array 110 includes a plurality of cell strings. Each channel of the cell strings is formed in a vertical or horizontal direction. Each cell string includes a plurality of memory cells. Here, the plurality of memory cells are programmed, erased, or read by voltages provided to the bit lines BLs or word lines WLs. Generally, a program operation is performed in units of a page, and an erase operation is performed in units of a block.

[0027] The row decoder 120 is embodied to select one of the memory blocks BLK1 to BLKz of the memory cell array 110 in response to an address ADD. The row decoder 120 selects one of the word lines of the selected memory block in response to the address ADD. The row decoder 120 transmits a word line voltage VWL corresponding to an operation mode to the word lines of the selected memory block. During a program operation, the row decoder 120 applies a program voltage and a verify voltage to the selected word lines and applies a pass voltage to the unselected word lines. During a read operation, the row decoder 120 applies a read voltage to the selected word lines and applies a read pass voltage to the unselected word lines.

[0028] The page buffer circuit 130 is embodied to operate as a write driver or a sensing amplifier. The page buffer circuit 130 applies a bit line voltage corresponding to data to be programmed to a bit line of the memory cell array 110 during a program operation. The page buffer circuit 130 senses data stored in a selected memory cell through a bit line BL during a read operation or a verify read operation. Each of a plurality of page buffers PB1 to PBn (n is an integer equal to or greater than 2) included in the page buffer circuit 130 is connected to at least one bit line.

[0029] Each of the page buffers PB1 to PBn is embodied to perform sensing and latching for performing an on-chip valley search (OVS) operation. That is, each of the page buffers PB1 to PBn performs a plurality of sensing operations to identify one of the states stored in a selected memory cell under the control of the control logic 150. Also, each of the page buffers PB1 to PBn stores data sensed by the plurality of sensing operations, and then selects one of the data under the control of the control logic 150. That is, each of the page buffers PB1 to PBn performs a plurality of sensing operations to identify one of the states. Also, each of the page buffers PB1 to PBn selects or outputs optimal data from the plurality of sensed data under the control of the control logic 150.

[0030] The I / O buffer circuit 140 provides data provided from the outside to the page buffer circuit 130. The I / O buffer circuit 140 provides a command CMD provided from the outside to the control logic 150. The I / O buffer circuit 140 provides an address ADD provided from the outside to the control logic 150 and the row decoder 120. In addition, the I / O buffer circuit 140 outputs data sensed and latched by the page buffer circuit 130 to the outside.

[0031] The control logic 150 is embodied to control the row decoder 120 and the page buffer circuit 130 in response to a command CMD transmitted from the outside.

[0032] The control logic 150 includes an advanced operation circuit 155 that operates in an optimized operation mode to improve reliability. The advanced operation circuit 155 is embodied to control the page buffer circuit 130 and the voltage generator 160 for an optimized operation to improve reliability. For example, the advanced operation circuit 155 performs word line recovery control to set the floating state of the word line to an optimal state to improve reliability.

[0033] Meanwhile, the control logic 150 is embodied to perform a process for selecting optimal data from among a plurality of sensed data. In order to select the optimal data, the control logic 150 refers to the count result nC provided from the cell counter 170.

[0034] The voltage generator 160 is embodied to generate various word line voltages to be applied to each word line and well voltages to be supplied to a bulk (e.g., well region) in which the memory cells are formed, under the control of the control logic 150. The word line voltages applied to each word line include a program voltage, a pass voltage, a read voltage, a read pass voltage, etc.

[0035] The cell counter 170 is embodied to count the number of memory cells corresponding to a specific threshold voltage range from the data sensed by the page buffer circuit 130. For example, the cell counter 170 counts the number of memory cells having a threshold voltage in a specific threshold voltage range by processing the data sensed by each of the plurality of page buffers PB1 to PBn.

[0036] The nonvolatile memory device 100 according to an embodiment of the present invention performs program / read / erase operations according to an optimized operation mode for improving reliability received from the controller 200, thereby improving reliability.

[0037] 3A is a diagram illustrating an example of a memory block according to an embodiment of the present invention. Referring to FIG. 3A, a memory block BLK1 is formed in a direction perpendicular to a substrate SUB. An n+ doping region is formed in the substrate SUB.

[0038] A gate electrode layer and an insulation layer are alternately deposited on the substrate SUB. An information storage layer is formed between the gate electrode layer and the insulation layer. The gate electrode layer and the insulation layer are vertically patterned to form a V-shaped pillar. The pillar penetrates the gate electrode layer and the insulation layer and is connected to the substrate SUB. The inside of the pillar is made of a filling dielectric pattern and is made of an insulating material such as silicon oxide. The outside of the pillar is made of a vertical active pattern and is made of a channel semiconductor.

[0039] A gate electrode layer of the memory block BLK1 is connected to a ground selection line GSL, a plurality of word lines WL1-WL8, and a string selection line SSL. And, pillars of the memory block BLK1 are connected to a plurality of bit lines BL1-BL3. In FIG. 3a, one memory block BLK1 is shown having two selection lines (GSL, SSL), eight word lines WL1-WL8, and three bit lines BL1-BL3, but the present invention is not limited thereto.

[0040] 3b is a diagram illustrating a memory block according to another embodiment of the present invention. Referring to FIG. 3b, for convenience of explanation, the memory block BLKb has four layers of word lines. The memory block BLKb is implemented as a bit cost scalable (BiCS) structure in which the lower ends of adjacent serially connected memory cells are connected by pipes. The memory block BLKb includes a plurality of strings NS.

[0041] Each string NS includes memory cells MC1 to MC8 connected in series. Here, first upper ends of the memory cells MC1 to MC8 are connected to a string selection line SSL, second upper ends of the memory cells MC1 to MC8 are connected to a ground selection line GSL, and lower ends of the memory cells MC1 to MC8 are pipe-connected. The memory cells constituting the string NS are formed by stacking a plurality of semiconductor layers. Each string NS includes a first pillar PL11, a second pillar PL12, and a pillar connection part PL13 connecting the first pillar PL11 and the second pillar PL12. The first pillar PL11 is connected to a bit line (e.g., BL1) and the pillar connection part PL13, and is formed by penetrating between the string selection line SSL and the word lines WL5 to WL8. The second pillar PL12 is connected to a common source line CSL and the pillar connection part PL13, and is formed by penetrating between the ground selection line GSL and the word lines WL1 to WL4. As shown in FIG. 3b, the strings NS are embodied in the form of U-shaped pillars.

[0042] In this embodiment, the back gate BG is formed on a substrate, and the pillar connector PL13 is implemented inside the back gate BG. In this embodiment, the back gate BG is common to the block BLKb. The back gate BG is separated from the back gates of other blocks.

[0043] 4 is a diagram illustrating an example of a circuit diagram of one of the memory blocks illustrated in FIG. 1. Referring to FIG. 4, a memory block BLK1 having a three-dimensional structure is illustrated. The memory block BLK1 includes a plurality of cell strings (CS11, CS12, CS21, CS22). The plurality of cell strings (CS11, CS12, CS21, CS22) are arranged along a row direction and a column direction to form rows and columns.

[0044] In this embodiment, the cell strings CS11 and CS12 are connected to the string selection lines SSL1a and SSL1b to form a first row. The cell strings CS21 and CS22 are connected to the string selection lines SSL2a and SSL2b to form a second row. For example, the cell strings CS11 and CS21 are connected to the first bit line BL1 to form a first column. The cell strings CS12 and CS22 are connected to the second bit line BL2 to form a second column.

[0045] Each of the cell strings (CS11, CS12, CS21, CS22) includes a plurality of cell transistors. For example, each of the cell strings (CS11, CS12, CS21, CS22) includes string selection transistors (SSTa, SSTb), a plurality of memory cells MC1 to MC8, ground selection transistors (GSTa, GSTb), and dummy memory cells (DMC1, DMC2). For example, each of the cell transistors included in the cell strings (CS11, CS12, CS21, CS22) is a charge trap flash (CTF) memory cell.

[0046] The memory cells MC1 to MC8 are connected in series and stacked in a height direction perpendicular to a plane formed by the row and column directions. The string selection transistors SSTa, SSTb are connected in series and are provided between the memory cells MC1 to MC8 and a bit line BL. The ground selection transistors GSTa, GSTb are connected in series and are provided between the memory cells MC1 to MC8 and a common source line CSL.

[0047] In this embodiment, a first dummy memory cell DMC1 is provided between the memory cells MC1 to MC8 and the ground selection transistors (GSTa, GSTb). For example, a second dummy memory cell DMC2 is provided between the memory cells MC1 to MC8 and the string selection transistors (SSTa, SSTb).

[0048] The ground selection transistors (GSTa, GSTb) of the cell strings (CS11, CS12, CS21, CS22) are commonly connected to a ground selection line GSL. For example, the ground selection transistors of the same row are connected to the same ground selection line, and the ground selection transistors of the other rows are connected to the other ground selection lines. For example, the first ground selection transistors GSTa of the cell strings (CS11, CS12) of the first row are connected to the first ground selection line. Similarly, the string selection transistors of the second string selection transistors SSTb of the same height in the same row are connected to the same string selection line, and the string selection transistors of the other rows are connected to the other string selection lines. For example, the second string selection transistors SSTb of the cell strings (CS11, CS12) of the first row are commonly connected to a string selection line SSL1b, and the second string selection transistors SSTb of the cell strings (CS21, CS22) of the second row are commonly connected to a string selection line SSL2b.

[0049] Although not shown, the string selection transistors of the cell strings in the same row are commonly connected to the same string selection line. For example, the first and second string selection transistors SSTa, SSTb of the cell strings CS11, CS12 in the first row are commonly connected to the same string selection line. The first and second string selection transistors SSTa, SSTb of the cell strings CS21, CS22 in the second row are commonly connected to the same string selection line.

[0050] In this embodiment, dummy memory cells of the same height are connected to the same dummy word line, and dummy memory cells of different heights are connected to different dummy word lines, for example, a first dummy memory cell DMC1 is connected to a first dummy word line DWL1, and a second dummy memory cell DMC2 is connected to a second dummy word line DWL2.

[0051] In the first memory block BLK1, erasure is performed in units of memory blocks or sub-blocks. When erasure is performed in units of memory blocks, all memory cells MC in the first memory block BLK1 are erased simultaneously in response to one erase request. When erasure is performed in units of sub-blocks, some of the memory cells MC in the first memory block BLK1 are erased simultaneously in response to one erase request, and the remaining some are prohibited from being erased. A low voltage (e.g., ground voltage) is supplied to word lines connected to memory cells to be erased, and word lines connected to memory cells prohibited from being erased are made floating.

[0052] Meanwhile, the first memory block BLK1 shown in Fig. 4 is merely an example, and the number of cell strings, rows, columns, cell transistors (GST, MC, DMC, SST, etc.), and lines (GSL, WL, DWL, SSL, etc.) connected to the cell transistors according to the number of cell transistors are not limited thereto.

[0053] 5 is a diagram conceptually illustrating a block management method of a nonvolatile memory device according to an embodiment of the present invention. Referring to FIG. 5, a normal operation is performed on an initial valid block. Thereafter, the memory block is worn out, and the valid block is treated as an invalid block according to a block management policy of the storage device 10. At this time, when the memory block is treated as an invalid block, wear-out information is stored. Then, the storage device 10 reuses the invalid block according to the block management policy. At this time, the storage device 10 performs an advanced operation for improving reliability on the reused memory block using the wear-out information. As the advanced operation, a core operation (program operation, read operation, erase operation) different from the normal operation is performed.

[0054] In one embodiment, the high-level operation includes a WL Recovery Control operation after a program operation, a verify operation, or a read operation. In one embodiment, the WL Recovery Control includes WL Recovery Time control / Level control / Slope control via a Path. In one embodiment, an ERASE level of a Shallow Erase operation or a Deep Erase operation is determined based on the wearout information.

[0055] In one embodiment, the verify levels of the program states are changed based on the wearout information, for example, the verify levels of the higher program states are reduced for higher level operations.

[0056] In one embodiment, based on the wearout information, the multi-bit program operation is altered, for example, a TLC program operation is performed in normal operation, but an MLC / SLC program operation is performed in advanced operation.

[0057] In one embodiment, based on the wearout information, the program scheme is changed, for example, a high speed program (HSP) is used for normal operation and a SUN WHO PGM is used for advanced operation.

[0058] 6 is a flow chart illustrating an operation mode of a memory device according to an embodiment of the present invention. Referring to FIG. 6, the controller 200 (see FIG. 1) of the memory device 10 determines whether a memory block to be operated on is a reuse block (step S110). If the memory block is a reuse block, the controller 200 selects an advanced operation mode for improving reliability and transmits the selected advanced operation mode to the non-volatile memory device 100 (see FIG. 1) as an optimized operation mode (step S120). On the other hand, if the memory block is not a reuse block, the controller 200 selects a normal operation mode and transmits the selected normal operation mode to the non-volatile memory device 100 as an optimized operation mode (step S125).

[0059] Meanwhile, the storage device 10 according to an embodiment of the present invention stores a wear-out pattern corresponding to the wear-out information when the memory block is invalidated (left alone).

[0060] 7a and 7b are diagrams illustrating an exemplary method for storing a wearout pattern according to an embodiment of the present invention.

[0061] Referring to FIG. 7a, the wear-out pattern is stored in at least one single level cell (SLC). If the wear-out characteristic is charge loss, the wear-out pattern is recorded as an erased state (E). Conversely, if the wear-out characteristic is charge gain, the wear-out pattern is recorded as a programmed state (P). In one embodiment, the at least one SLC that stores the wear-out pattern is a cell that is coupled to a predetermined word line of a memory block that is to be reused. In another embodiment, the at least one SLC that stores the wear-out pattern is a cell that is coupled to a predetermined word line of a valid memory block that is not a memory block that is to be reused. In one embodiment, the at least one SLC that stores the wear-out pattern is included in a user block. In another embodiment, the at least one SLC that stores the wear-out pattern is included in a metablock.

[0062] Referring to FIG. 7b, a wearout pattern is stored in at least one flag cell. Through a main cell program operation, user data is stored in a triple level cell (TLC) as shown in FIG. 7b. Through a flag cell program operation, a wearout pattern is stored in the flag cell as shown in FIG. 7b. For example, a fourth verify level Vvr4 is a level that distinguishes the state of the wearout pattern. If the flag cell is an on-cell due to the fourth verify level Vvr4, the wearout pattern indicates a charge loss. On the other hand, if the flag cell is an off-cell due to the fourth verify level Vvr4, the wearout pattern indicates a charge gain.

[0063] It should be understood that the number of bits or verify levels of memory cells used to distinguish the wearout patterns of the present invention is merely one embodiment.

[0064] In addition, the operation mode management module 211 (see FIG. 1) of the storage device 10 of the present invention has been described as selecting the advanced operation mode when the memory block is a reused block, but this is not limited to the selection of the advanced operation mode when the memory block of the present invention is reused from an invalid block. The present invention selects the normal operation mode or the advanced operation mode based on wear-out information of the memory block.

[0065] 8a and 8b are diagrams conceptually illustrating a mode selection of an operation mode management module according to an embodiment of the present invention. Referring to FIG. 8a, the operation mode management module 211 receives wear-out information of a memory block to be operated, and selects a normal operation mode NOM or an advanced operation mode AOM based on the wear-out information. Referring to FIG. 8b, the operation mode management module 211 receives wear-out information and environmental information (P / E cycle, read cycle, elapsed time information, temperature information, block position information, etc.), and selects a normal operation mode NOM or an advanced operation mode AOM by comprehensively reflecting the received wear-out information and environmental information.

[0066] Meanwhile, the controller 200 of the storage device 10 according to an embodiment of the present invention transmits an optimized operation mode at the same time as transmitting a command.

[0067] 9a, 9b, and 9c are diagrams showing exemplary erase, program, and read commands transmitted along with operation modes.

[0068] 9a, when a normal operation mode NOM and an erase command are received, the nonvolatile memory device 100 performs a normal erase operation. When an advanced operation mode AOM and an erase command are received, the nonvolatile memory device 100 performs an advanced erase operation.

[0069] 9b, when a normal operation mode NOM and a program command are received, the nonvolatile memory device 100 performs a normal program operation. When an advanced operation mode AOM and a program command are received, the nonvolatile memory device 100 performs an advanced program operation.

[0070] 9c, when a normal operation mode NOM and a read command are received, the nonvolatile memory device 100 performs a normal read operation. When an advanced operation mode AOM and a read command are received, the nonvolatile memory device 100 performs an advanced read operation.

[0071] The advanced erase operation, advanced program operation, and advanced read operation shown in FIGS. 9a, 9b, and 9c include operations that improve reliability more than those in the normal mode.

[0072] Meanwhile, the storage device 10 according to an embodiment of the present invention selects an advanced operation mode depending on the type of program.

[0073] 10 is a conceptual diagram illustrating the selection of an operation mode according to a program type according to an embodiment of the present invention. Referring to FIG. 10, a default program operation is performed in a normal operation mode. In contrast, a reprogram operation or a reclaim operation is performed in an advanced operation mode using wear-out information.

[0074] Meanwhile, the non-volatile memory device 100 (see FIG. 1) according to an embodiment of the present invention performs a wordline recovery control operation to improve reliability. Here, the wordline recovery control operation includes an operation of setting a wordline voltage that is floated when performing a wordline recovery operation. Generally, a flash memory device using a floating channel has an optimum retention characteristic depending on the wordline to channel potential. Therefore, reliability can be improved by wordline recovery control.

[0075] 11a and 11b are diagrams conceptually illustrating a word line recovery operation of a nonvolatile memory device according to an embodiment of the present invention.

[0076] 11a, electrons in the information storage layer of the memory cell are lost to the channel or flowed in from the channel depending on the environment. Such charge movement means deterioration of the memory cell. However, if the floating state of the word line WL is changed according to the state of the memory cell, the deterioration level of the memory cell in the future is improved.

[0077] As shown in Figure 11b, when indicating a charge loss state of a memory cell, a word line recovery operation is performed at a first higher recovery level ARL1. In this case, the floating word line WL has a word line level (ARL1>NRL) that is set higher than the normal operation recovery level NRL. By setting the voltage of the floating word line WL relatively high, charge loss is relatively reduced compared to the case where it is not set higher.

[0078] Conversely, as shown in FIG. 11b, when indicating the charge gain state of the memory cell, a word line recovery operation is performed at the second highest recovery level ARL2. In this case, the floating word line WL has a word line level (ARL2 < NRL) set lower than the recovery level NRL of the normal operation. By setting the voltage of the floating word line WL relatively low, the charge gain is relatively reduced compared to the case where it is not. Such a word line recovery control operation is a reliability improvement operation tailored to the needs based on the wear-out information.

[0079] On the other hand, the word line recovery control operation according to an embodiment of the present invention is implemented in various ways to control the level of the final floating word line.

[0080] FIG. 12 is a diagram exemplarily showing the word line recovery control operation of the read operation according to an embodiment of the present invention. Referring to FIG. 12, the word line recovery control operation includes control of the recovery level, control of the recovery slope, or control of the recovery time.

[0081] FIGS. 13a, 13b, and 13c are diagrams exemplarily showing ways of performing the word line recovery control operation.

[0082] Referring to FIG. 13a, a word line recovery control operation for adjusting the word line two-potential by changing the recovery level is shown. When the wear-out information of the memory block indicates the charge gain, as shown in FIG. 13a, the recovery level of the selected word line is set lower than that in the normal operation mode. Also, the recovery level of the selected word line is set higher than the recovery level of the non-selected word line. On the other hand, such a change in the recovery level is only one embodiment.

[0083] Referring to Fig. 13b, a word line recovery control operation is shown, which adjusts the word line to potential by changing the recovery time. As shown in Fig. 13b, when the recovery time is shortened, the floating word line level is lowered more than when the recovery time is not shortened. However, such a change between the recovery time and the recovery level is only one embodiment.

[0084] Referring to FIG. 13c, a word line recovery control operation is shown in which a word line potential is adjusted by changing a recovery path. As shown in FIG. 13c, the level of the floating word line changes depending on how the discharge path of the word line recovery current is set. For example, when the word line recovery current is discharged toward the memory cell array, the recovery level is lowered compared to when the word line recovery current is discharged toward the row decoder. However, such a change between the recovery discharge path and the recovery level is merely one embodiment.

[0085] 14 is a diagram illustrating an example of a discharge path of a word line recovery current according to an embodiment of the present invention. Referring to FIG. 14, the word line recovery current is discharged in the direction of i) the address decoder (X-DEC) or ii) the stacked memory block (MAT) (i.e., the peripheral region). The recovery level of the floating word line changes depending on the discharge path of the recovery current.

[0086] The nonvolatile memory device 100 according to an embodiment of the present invention is configured to select a discharge path in a recovery operation.

[0087] Meanwhile, the word line recovery control operation according to an embodiment of the present invention is performed based on a word line recovery mode table.

[0088] 15 is a diagram illustrating a word line recovery mode table of a non-volatile memory device according to an embodiment of the present invention. Referring to FIG. 15, the word line recovery mode table includes a recovery time, a recovery path, and a recovery level based on the recorded wear-out information. A word line recovery control operation is performed based on the word line recovery mode table.

[0089] The non-volatile memory device 100 according to an embodiment of the present invention checks the abandoned pattern of an invalid block and performs a word line recovery level control operation based on a word line recovery mode table during a reprogram or reclaim write operation. As a result, the non-volatile memory device 100 according to the present invention can significantly improve reliability characteristics compared to the conventional memory device.

[0090] 16 is a flow chart illustrating an exemplary method of operating a storage device according to an embodiment of the present invention. Referring to FIG. 1 to FIG. 16, the storage device 10 operates as follows.

[0091] The controller 200 (see FIG. 1) reads out wear-out information of a memory block on which an operation is to be performed (step S210). The controller 200 selects an optimized operation mode based on the wear-out information (step S220). The controller 200 transmits the optimized operation mode and an operation command to the non-volatile memory device 100 (step S230).

[0092] 17a is a flow chart showing an example of a reclaim operation of a storage device according to an embodiment of the present invention. Referring to FIG. 1 through FIG. 17a, a reclaim operation of the storage device 10 proceeds as follows.

[0093] The controller 200 of the storage device 10 (see FIG. 1) performs a patrol read operation on a block (or a valid block) that has been written periodically or aperiodically (step S310). Here, the patrol read operation includes a read operation on a predetermined location of a memory block. In one embodiment, the patrol read operation is performed as a background operation.

[0094] As a result of the patrol read operation, the controller 200 determines whether the number of errors (ECC_N) in the error correction circuit is greater than the reference value (REF) (step S320). If the number of errors (ECC_N) is not greater than the reference value (REF), the process proceeds to step S310. On the other hand, if the number of errors (ECC_N) is greater than the reference value (REF), the controller 200 performs a reclaim operation on the memory block (step S330). As a result, valid data of the memory block is programmed into the new block. Thereafter, the controller 200 determines whether it is necessary to check the wear-out characteristics of the original memory block (step S340). If it is necessary to determine the wear-out characteristics of the original memory block, the controller 200 determines the retention characteristics of the original memory block. Such retention characteristics are determined based on the distribution characteristics of memory cells connected to a particular word line in the memory block. In one embodiment, the retention characteristics are determined based on cell count information corresponding to a threshold voltage distribution. The controller 200 then writes a wear-out pattern corresponding to the determined retention characteristic into the original memory block (step S350). Then, the reclaim operation is completed. Alternatively, if there is no need to determine the wear-out characteristic of the original memory block, the reclaim operation is immediately completed.

[0095] 17b is a flow chart illustrating an exemplary method of operating a non-volatile memory device according to an embodiment of the present invention. Referring to FIGs. 1 to 17b, the non-volatile memory device 100 operates as follows.

[0096] The nonvolatile memory device 100 checks the wear-out pattern of the memory block in response to a request from the controller 200 (step S410). Here, the wear-out pattern is checked based on the state of the memory cells or the state of the flag cells. Thereafter, the nonvolatile memory device 100 selects a word line recovery mode based on the checked wear-out pattern (step S420). Here, the word line recovery mode is variously set by time / slope / level control. In one embodiment, the word line recovery mode is set by the controller 200. In another embodiment, the word line recovery mode is internally set in the nonvolatile memory device 100 based on the checked wear-out information.

[0097] Thereafter, the non-volatile memory device 100 performs an erase / program / read operation using the selected word line recovery mode (step S430).

[0098] 18 is a diagram illustrating a storage device according to another embodiment of the present invention. Referring to FIG. 18, a storage device 20 includes at least one non-volatile memory device 100 and a controller 200a for controlling the non-volatile memory device 100.

[0099] The controller (CNTL) 200a is connected to at least one nonvolatile memory device 100 via a plurality of control pins transmitting control signals (CLE, ALE, CE(s), WE, RE, etc.). The controller (CNTL) 200a is also embodied to control the nonvolatile memory device 100 using the control signals (CLE, ALE, CE(s), WE, RE). For example, the nonvolatile memory device 100 performs a program operation / read operation / erase operation by latching a command or address at an edge of a write enable (WE) signal in response to a command latch enable (CLE) signal and an address latch enable (ALE) signal.

[0100] The controller 200a is embodied to control the overall operation of the storage device 20. The controller 200a performs various management operations such as cache / buffer management, firmware management, garbage collection management, wear leveling management, data deduplication management, read refresh / reclamation management, bad block management, multi-stream management, host data and non-volatile memory mapping management, quality of service (QoS) management, system resource allocation management, non-volatile memory queue management, read voltage level management, erase / program management, hot / cold data management, power loss protection management, dynamic thermal management, initialization management, and RAID (redundant array of inexpensive disk) management.

[0101] The controller 200a also includes an artificial intelligence processor 212 and an error correction (ECC) circuit 230. The artificial intelligence processor 212 uses artificial intelligence to optimally manage the operation mode of the memory block using wear-out information of the memory block as described in Figures 1 to 17b.

[0102] The ECC circuit 230 is embodied to generate an error correction code during a program operation and to recover data (DATA) using the error correction code during a read operation. That is, the ECC circuit 230 generates an error correction code (ECC) for correcting a fail bit or an error bit of the data (DATA) received from the nonvolatile memory device 100. The ECC circuit 230 performs error correction encoding of data provided to the nonvolatile memory device 100 to form data (DATA) to which a parity bit is added. The parity bit is stored in the nonvolatile memory device 100. The ECC circuit 230 also performs error correction decoding on the data (DATA) output from the nonvolatile memory device 100. The ECC circuit 230 corrects errors using the parity. The ECC circuit 230 corrects errors using coded modulation such as a low density parity check (LDPC) code, a BCH code, a turbo code, a Reed-Solomon code, a convolution code, a recursive systematic code (RSC), a trellis-coded modulation (TCM), or a block coded modulation (BCM).

[0103] 19 is a ladder diagram illustrating an example of a process of performing an operation according to an optimized operation mode based on wear-out information in a storage device according to an embodiment of the present invention. Referring to FIG. 1 to FIG. 19, the operation of the storage device 10 proceeds as follows.

[0104] The controller CNTL of the storage device 10 requests the non-volatile memory device NVM to perform a patrol read operation on any one of the memory blocks according to an internal policy (step S11). The non-volatile memory device NVM transmits data corresponding to the patrol read operation to the controller CNTL (step S12).

[0105] The controller CNTL then performs an error correction (ECC) operation on the read data received from the nonvolatile memory device NVM (step S13). Then, as a result of the error correction operation, it is determined whether a reclaim operation is necessary (step S14). If a reclaim operation is not necessary, a patrol read operation is performed on another memory block.

[0106] On the other hand, if a reclaim operation is necessary, the controller CNTL transmits a reclaim request for the memory block to the non-volatile memory device NVM (step S15). The controller CNTL receives a reclaim completion notification (step S16) and requests the non-volatile memory device NVM to check the reason for wear-out of the memory block (step S17). The controller CNTL receives information corresponding to the wear-out reason from the non-volatile memory device NVM (step S18) and requests the non-volatile memory device NVM to write a wear-out pattern corresponding to the received wear-out information into the memory block (step S19). Thereafter, the memory block is left alone.

[0107] Thereafter, when the abandoned memory block is to be reused, the controller CNTL requests the nonvolatile memory device NVM to read out the wear-out pattern of the memory block (step S20). Then, the controller CNTL receives the wear-out pattern from the nonvolatile memory device NVM (step S21). Then, the controller CNTL requests the nonvolatile memory device NVM to perform an operation using the wear-out pattern of the memory block (step S22). Then, the controller CNTL receives a completion of the operation from the nonvolatile memory device NVM (step S23).

[0108] Meanwhile, the operation mode management operation for the non-volatile memory device according to an embodiment of the present invention is performed by a separate processor for artificial intelligence.

[0109] A nonvolatile memory device according to an embodiment of the present invention is implemented in a C2C (chip to chip) structure.

[0110] 20 is a diagram illustrating a non-volatile memory device having a C2C structure according to an embodiment of the present invention. Here, the C2C structure refers to a structure in which an upper chip including a cell region CELL is fabricated on a first wafer, a lower chip including a peripheral circuit region PERI is fabricated on a second wafer different from the first wafer, and the upper chip and the lower chip are connected to each other by a bonding method. For example, the bonding method is a method of electrically connecting a bonding metal formed on a top metal layer of the upper chip and a bonding metal formed on a top metal layer of the lower chip to each other. In one embodiment, when the bonding metal is formed of copper (Cu), the bonding method is a Cu-Cu bonding method. In another embodiment, the bonding metal may be formed of aluminum or tungsten.

[0111] Each of the peripheral circuit area PERI and the cell area CELL of the nonvolatile memory device 1000 shown in FIG. 20 includes an external pad bonding area PA, a word line bonding area WLBA, and a bit line bonding area BLBA.

[0112] The peripheral circuit region PERI includes a first substrate 1210, an interlayer insulating layer 1215, a plurality of circuit elements (1220a, 1220b, 1220c) formed on the first substrate 1210, a first metal layer (1230a, 1230b, 1230c) connected to each of the plurality of circuit elements (1220a, 1220b, 1220c), and a second metal layer (1240a, 1240b, 1240c) formed on the first metal layer (1230a, 1230b, 1230c). In one embodiment, the first metal layer (1230a, 1230b, 1230c) is made of tungsten having a relatively high resistivity. In one embodiment, the second metal layer (1240a, 1240b, 1240c) is made of copper having a relatively low resistivity.

[0113] As shown in FIG. 20, the first metal layer (1230a, 1230b, 1230c) and the second metal layer (1240a, 1240b, 1240c) are shown, but the present invention is not limited thereto. At least one metal layer may be further formed on the second metal layer (1240a, 1240b, 1240c). At least a part of the one or more metal layers formed on the upper part of the second metal layer (1240a, 1240b, 1240c) may be formed of aluminum or the like having a resistivity different from that of the copper forming the second metal layer (1240a, 1240b, 1240c).

[0114] In one embodiment, an interlayer insulating layer 1215 is disposed on the first substrate 1210 to cover the circuit elements (1220a, 1220b, 1220c), the first metal layer (1230a, 1230b, 1230c), and the second metal layer (1240a, 1240b, 1240c). In one embodiment, the interlayer insulating layer 1215 includes an insulating material such as silicon oxide, silicon nitride, etc.

[0115] Lower bonding metals (1271b, 1272b) are formed on the second metal layer 1240b of the word line bonding region WLBA. In the word line bonding region WLBA, the lower bonding metals (1271b, 1272b) of the peripheral circuit region PERI are electrically connected to the upper bonding metals (1371b, 1372b) of the cell region CELL by a bonding method. In one embodiment, the lower bonding metals (1271b, 1272b) and the upper bonding metals (1371b, 1372b) are formed of aluminum, copper, tungsten, or the like.

[0116] The cell region CELL includes at least one memory block. In one embodiment, the cell region CELL includes a second substrate 1310 and a common source line 1320. A plurality of word lines (1331-1338:1330) are stacked on the second substrate 1310 along a direction perpendicular to the upper surface of the second substrate 1310 (Z-axis direction). In one embodiment, a string selection line and a ground selection line are respectively arranged above and below the word line 1330. In one embodiment, a plurality of word lines 1330 are arranged between the string selection line and the ground selection line.

[0117] In the bit line bonding region BLBA, the channel structure CH extends in a direction perpendicular to the top surface of the second substrate 1310 and penetrates the word line 1330, the string select line, and the ground select line. The channel structure CH includes a data storage layer, a channel layer, a buried insulating layer, etc., and the channel layer is electrically connected to the first metal layer 1350c and the second metal layer 1360c. For example, the first metal layer 1350c is a bit line contact, and the second metal layer 1360c is a bit line. In one embodiment, the bit line 1360c extends along a first direction (Y-axis direction) parallel to the top surface of the second substrate 1310.

[0118] 20, an area in which the channel structure CH and the bit line 1360c are disposed is defined as a bit line bonding area BLBA. In one embodiment, the bit line 1360c is electrically connected to a circuit element 1220c providing a page buffer 1393 in a peripheral circuit area PERI in the bit line bonding area BLBA. For example, the bit line 1360c is connected to upper bonding metals 1371c and 1372c in the peripheral circuit area PERI. Here, the upper bonding metals 1371c and 1372c are connected to lower bonding metals 1271c and 1272c that are connected to the circuit element 1220c of the page buffer 1393.

[0119] In the word line bonding region WLBA, the word lines 1330 extend along a second direction (X-axis direction) parallel to the top surface of the second substrate 1310. In one embodiment, the word line bonding region WLBA is connected to a plurality of cell contact plugs (1341-1347: 1340). For example, the word lines 1330 and the cell contact plugs 1340 are connected to pads provided by extending at least some of the word lines 1330 to different lengths along the second direction. In one embodiment, a first metal layer 1350b and a second metal layer 1360b are sequentially connected to an upper portion of the cell contact plug 1340 connected to the word line 1330. In one embodiment, the cell contact plug 1340 is connected to the peripheral circuit region PERI through the upper bonding metals (1371b, 1372b) of the cell region CELL and the lower bonding metals (1271b, 1272b) of the peripheral circuit region PERI in the word line bonding region WLBA.

[0120] In one embodiment, the cell contact plug 1340 is electrically coupled to a circuit element 1220b that provides a row decoder 1394 in the peripheral circuit region PERI. In one embodiment, an operating voltage of the circuit element 1220b that provides the row decoder 1394 is different from an operating voltage of the circuit element 1220c that provides the page buffer 1393. For example, an operating voltage of the circuit element 1220c that provides the page buffer 1393 is greater than an operating voltage of the circuit element 1220b that provides the row decoder 1394.

[0121] A common source line contact plug 1380 is disposed in the external pad bonding area PA. In one embodiment, the common source line contact plug 1380 is formed of a conductive material such as metal, metal compound, or polysilicon. The common source line contact plug 1380 is electrically connected to the common source line 1320. A first metal layer 1350a and a second metal layer 1360a are sequentially stacked on the common source line contact plug 1380. For example, a region where the common source line contact plug 1380, the first metal layer 1350a, and the second metal layer 1360a are disposed is defined as the external pad bonding area PA.

[0122] Meanwhile, input / output pads (1205, 1305) are disposed in the external pad bonding region PA. Referring to FIG. 20, a lower insulating layer 1201 is formed on the lower portion of the first substrate 1210 to cover the lower surface of the first substrate 1210. A first input / output pad 1205 is formed on the lower insulating layer 1201. In one embodiment, the first input / output pad 1205 is connected to at least one of a plurality of circuit elements (1220a, 1220b, 1220c) disposed in the peripheral circuit region PERI via a first input / output contact plug 1203. In one embodiment, the first input / output pad 1205 is separated from the first substrate 1210 by the lower insulating layer 1201. In addition, a side insulating layer is disposed between the first input / output contact plug 1203 and the first substrate 1210 to electrically separate the first input / output contact plug 1203 and the first substrate 1210.

[0123] 20, an upper insulating layer 1301 is formed on the upper portion of the second substrate 1310 to cover the upper surface of the second substrate 1310. A second I / O pad 1305 is disposed on the upper insulating layer 1301. In one embodiment, the second I / O pad 1305 is connected to at least one of the plurality of circuit elements (1220a, 1220b, 1220c) disposed in the peripheral circuit region PERI via a second I / O contact plug 1303.

[0124] In one embodiment, the second substrate 1310 and the common source line 1320 are not arranged in the region where the second I / O contact plug 1303 is arranged. Also, the second I / O pad 1305 does not overlap with the word line 1330 in the third direction (Z-axis direction). Referring to FIG. 20, the second I / O contact plug 1303 is separated from the second substrate 1310 in a direction parallel to the top surface of the second substrate 1310. Also, the second I / O contact plug 1303 is connected to the second I / O pad 1305 by penetrating the interlayer insulating layer 1315 of the cell region CELL.

[0125] In one embodiment, the first I / O pad 1205 and the second I / O pad 1305 are selectively formed. For example, the non-volatile memory device 1000 includes only the first I / O pad 1205 disposed on the top of the first substrate 1201, or includes only the second I / O pad 1305 disposed on the top of the second substrate 1301. In other embodiments, the non-volatile memory device 1000 may include both the first I / O pad 1205 and the second I / O pad 1305.

[0126] In each of the external pad bonding area PA and the bit line bonding area BLBA included in the cell area CELL and the peripheral circuit area PERI, the metal pattern of the top metal layer exists as a dummy pattern, or the top metal layer is empty.

[0127] In the non-volatile memory device 1000 according to an embodiment of the present invention, a lower metal pattern 1273a having the same shape as the upper metal pattern 1372a of the cell region CELL is formed in the uppermost metal layer of the peripheral circuit region PERI in response to an upper metal pattern 1372a formed in the uppermost metal layer of the cell region CELL in the external pad bonding region PA. The lower metal pattern 1273a formed in the uppermost metal layer of the peripheral circuit region PERI is not connected to another contact in the peripheral circuit region PERI. Similarly, in the external pad bonding region PA, an upper metal pattern having the same shape as the lower metal pattern of the peripheral circuit region PERI may be formed in the upper metal layer of the cell region CELL in response to the lower metal pattern formed in the uppermost metal layer of the peripheral circuit region PERI.

[0128] Lower bonding metals (1271b, 1272b) are formed on the second metal layer 1240b of the word line bonding region WLBA. In one embodiment, in the word line bonding region WLBA, the lower bonding metals (1271b, 1272b) of the peripheral circuit region PERI are electrically connected to the upper bonding metals (1371b, 1372b) of the cell region CELL by a bonding method.

[0129] In the bit line bonding region BLBA, an upper metal pattern 1392 having the same shape as the lower metal pattern 1252 in the peripheral circuit region PERI is formed in the uppermost metal layer of the cell region CELL in correspondence with the lower metal pattern 1252 formed in the uppermost metal layer of the peripheral circuit region PERI. No contact is formed on the upper metal pattern 1392 formed in the uppermost metal layer of the cell region CELL.

[0130] A non-volatile memory device according to an embodiment of the present invention includes a memory cell region including a memory cell array, and a peripheral circuit region including at least one of a row decoder, a plurality of page buffers, and control logic, and the memory cell region and the peripheral circuit region are electrically connected to each other by pads formed in opposite extending directions.

[0131] In one embodiment, the memory cell region is formed in a first wafer and the peripheral circuit region is formed in a second wafer that is different from the first wafer.

[0132] In general, VNAND (vertical nand flash memory) has different retention characteristics depending on the word line to channel potential (WL to Channel Potential). When the word line to channel potential is high, the charge loss of the upper state is improved, but the charge gain of the lower state may deteriorate. Therefore, there is an optimal window of charge loss and charge gain depending on the word line to channel potential. In addition, controlling the word line to channel potential has the effect of improving reliability. Using this, when reusing an inactive block, reliability can be improved by improving the word line to channel potential by performing WL (word line) recovery control based on the cause of wearout before inactivation.

[0133] The word line to channel potential can be adjusted by WL recovery control. This has the effect of improving retention and reliability. When reusing an inactive block, another read is performed to check the retention characteristics before the inactive block, and if the charge loss is worse or the idle pattern is high, the WL recovery level is increased to improve retention. As a result, the life span is extended.

[0134] Generally, since VNAND is a floating body, the word line to channel potential changes depending on the WL recovery level. When the WL recovery level is low, the word line to channel potential decreases, thereby deteriorating the charge loss characteristic and improving the charge gain characteristic. In one embodiment, three WL recovery control methods for adjusting the word line to channel potential are presented. The first method is a method of decreasing the word line to channel potential by changing the WL recovery time. The second method is a method of decreasing the final word line to channel potential by lowering the resistance and improving the recovery slope by using a MAT Cross Recovery method that adjusts the WL recovery path. The third method is a method of decreasing the word line to channel potential by changing the WL recovery level.

[0135] The word line recovery control method of the present invention is not limited to VNAND flash memory, but can be applied to various memory devices having a floating body.

[0136] The above-mentioned contents of the present invention are merely specific embodiments for carrying out the present invention. The present invention includes not only specific and practically usable means themselves, but also technical ideas of abstract and conceptual ideas that can be utilized in future technologies. [Explanation of symbols]

[0137] 10, 20 storage device 100, 1000 Non-volatile memory device 110 Memory cell array 120 Row Decoder (Row DEC) 130 Page Buffer Circuit 140 Input / Output Buffer Circuit 150 Control Logic 155 Advanced operation circuit 160 Voltage Generator 170 Cell Counter 200, 200a Controller 211 Operational Mode Management Module 212 Artificial Intelligence Processor 230 Error Correction Code (ECC) Circuit 1201 Lower insulation layer 1203 First input / output contact plug 1205 (1st) Input / Output Pad 1210 First board 1215 Interlayer insulation layer 1220a, 1220b, 1220c Circuit elements 1230a, 1230b, 1230c, 1350a, 1350b, 1350c First metal layer 1240a, 1240b, 1240c, 1360a, 1360b Second metal layer 1252, 1273a Lower metal pattern 1271b, 1272b, 1271c, 1272c Lower Bonding Metal 1301 Upper insulation layer 1303 Second input / output contact plug 1305 (2nd) I / O pad 1310 Second board 1320 Common Source Line 1330, 1331~1338 Word Line 1340, 1341~1347 Cell Contact Plug 1360c bitline (2nd metal layer) 1371b, 1372b, 1371c, 1372c Upper bonding metal 1372a, 1392 upper metal pattern 1380 Common Source Line Contact Plug 1393 Page Buffer 1394 Raw Decoder

Claims

1. A method of operating a storage device, comprising the steps of: a controller reading a wear-out pattern of a memory block of a non-volatile memory device when the memory block is to be reused; the controller selecting an operation mode corresponding to the retrieved wearout pattern; the controller transmitting the selected operating mode to the non-volatile memory device; The method, wherein the wearout pattern is stored in a meta area of ​​the non-volatile memory device or in the memory block of the non-volatile memory device.

2. 2. The method of claim 1, wherein the wearout pattern comprises information about charge loss or charge gain of the memory block.

3. 2. The method of claim 1, wherein the selected operating mode includes an advanced operating mode for improved reliability.

4. 4. The method of claim 3, wherein in a program, read, or erase operation, the advanced operation mode changes a word line recovery level differently from a normal operation mode based on the wear-out pattern.

5. performing a patrol read operation on the memory block before reusing the memory block; 2. The method of claim 1, further comprising determining a need for a reclaim as a result of the patrol read operation.

6. if a reclamation is required for the memory block, reclaiming the memory block; 6. The method of claim 5, further comprising: storing the wear-out pattern corresponding to the memory block.

7. The non-volatile memory device includes a memory cell region having a first metal pad; a peripheral circuit region having a second metal pad and vertically connected to the first metal pad via the second metal pad; 2. The method of claim 1, wherein the first metal pad and the second metal pad are connected by a bonding method.

8. The memory cell region is formed on a first wafer; 8. The method of claim 7, wherein the peripheral circuit region is formed in a second wafer different from the first wafer.

9. 8. The method of claim 7, wherein a first plug corresponding to the first metal pad and a second plug corresponding to the second metal pad extend in opposite directions.

10. a memory cell region having a first metal pad; a peripheral circuit region having a second metal pad and vertically connected to the first metal pad through the second metal pad; a memory cell array including a plurality of memory blocks having a plurality of memory cells connected to a plurality of word lines and a plurality of bit lines in the memory cell region; a row decoder in the peripheral circuit region for selecting one of the plurality of word lines; a page buffer circuit including a plurality of page buffers connected to the plurality of bit lines in the peripheral circuit region; a control logic for receiving a CLE (command latch enable) signal, an ALE (address latch enable) signal, a CE (chip enable) signal, a WE (write enable) signal, a RE (read enable) signal, and a DQS signal through control pins in the peripheral circuit region, and latching a command or an address at an edge of the WE signal in response to the CLE signal and the ALE signal to perform a high-level operation; The high-level operation includes a program operation, a read operation, or an erase operation in a high-level operation mode different from a normal operation mode in order to improve reliability, The non-volatile memory device is characterized in that the advanced operation mode performs a word line recovery control operation different from that performed in the normal operation mode.

11. 11. The non-volatile memory device of claim 10, wherein the word line recovery control operation includes changing a recovery level based on a wear-out pattern of the memory block.

12. 11. The non-volatile memory device of claim 10, wherein the word line recovery control operation includes changing a recovery time based on a wear-out pattern of the memory block.

13. 11. The non-volatile memory device of claim 10, wherein the word line recovery control operation includes changing a discharge path of a recovery current based on a wearout pattern of the memory block.

14. control pins for providing a command latch enable (CLE) signal, an address latch enable (ALE) signal, a chip enable (CE) signal, a write enable (WE) signal, a read enable (RE) signal, and a DQS signal to at least one non-volatile memory device; an error correction circuit for receiving data of a patrol read operation for a memory block from the at least one non-volatile memory device and correcting an error in the received data; and at least one processor that reclaims the memory block if the number of errors corrected by the error correction circuit is equal to or greater than a reference value, determines a wear-out reason for the memory block, records a wear-out pattern corresponding to the wear-out reason in the memory block, reads the wear-out pattern when reusing the memory block, selects an operation mode corresponding to the wear-out pattern, and performs a program operation, a read operation, or an erase operation on the memory block of the at least one nonvolatile memory device according to the selected operation mode, The controller further comprises a word line recovery control table corresponding to the wear-out pattern.

15. The controller of claim 14 , wherein the at least one processor selects the operating mode based on the wearout pattern and environmental information.

16. 15. The controller of claim 14, wherein the word line recovery control table includes recovery time information, recovery level information, or recovery discharge path information corresponding to a wear-out pattern.

17. at least one non-volatile memory device; a controller connected to the at least one non-volatile memory device via control pins for providing a command latch enable (CLE) signal, an address latch enable (ALE) signal, a chip enable (CE) signal, a write enable (WE) signal, a read enable (RE) signal, and a DQS signal, the controller configured to read data from the at least one non-volatile memory; the at least one non-volatile memory device performs a core operation for improving reliability by latching a command or an address at an edge of the WE signal in response to the CLE signal and the ALE signal; The controller checks a wear-out pattern of a memory block of a non-volatile memory device in which the core operation is to be performed, selects a word line recovery mode using the wear-out pattern, and performs the core operation according to the selected word line recovery mode.

Citation Information

Patent Citations

  • Nonvolatile semiconductor memory device

    JP2009266349A

  • Memory system including wear level control logic

    JP2013114679A

  • Nonvolatile semiconductor storage device, and operation condition control method in nonvolatile semiconductor storage device

    JP2013125574A

  • Error correction coding device and method of flash memory

    JP2015138498A

  • Control circuit, semiconductor storage apparatus, and control method for semiconductor storage apparatus

    JP2018073240A