Composite material

The use of a composite material containing a fluoropolyether group-containing silane compound and a depolymerizable polymer simplifies the thin film formation process by eliminating the need for container recovery, enhancing efficiency and operational simplicity.

JP7691630B2Active Publication Date: 2025-06-12DAIKIN INDUSTRIES LTD
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Patent Information

Application Number
JP2024002783
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2023-01-12
Filing Date
2024-01-11
Publication Date
2025-06-12
Estimated Expiration
2044-01-11

AI Technical Summary

Technical Problem

Existing methods for forming thin films on substrates require the use of containers filled with vapor deposition substances, which necessitate collection and replacement after each deposition process, making the process cumbersome and inefficient.

Method used

A composite material comprising a fluoropolyether group-containing silane compound and a depolymerizable polymer, where the fluoropolyether group-containing silane compound is impregnated in the depolymerizable polymer, allowing for simpler and more efficient thin film formation through vapor deposition without the need for container recovery.

Benefits of technology

The composite material enables the formation of thin films in a more streamlined process, eliminating the need for container recovery and allowing for continuous vapor deposition processes, thereby improving efficiency and reducing operational complexity.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide a composite material which enables the formation of a thin film through a simplified process.SOLUTION: The present disclosure provides a composite material which contains a fluoropolyether group-containing silane compound and a depolymerizable polymer.SELECTED DRAWING: None
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Description

Technical Field

[0001] The present disclosure relates to a composite material.

Background Art

[0002] Various studies have been conducted on methods for forming a thin film on the surface of a substrate. The thin film on the substrate surface may be formed, for example, by vapor-depositing an organic material and / or a metal material on the substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In Patent Documents 1 and 2, for forming a thin film on the substrate surface, a container filled with a vapor deposition substance or an inorganic material or the like is used. The thin film is formed on the substrate surface by vaporizing the vapor deposition substance from the container or the inorganic material and vapor-depositing the vapor deposition substance on the substrate surface. After the vapor deposition, the container or the inorganic material remains. In order to fill new vapor deposition substance, it is necessary to collect the container or the inorganic material each time. Therefore, there is a demand for a material that can form a thin film in a simpler process.

[0005] An object of the present disclosure is to provide a composite material capable of forming a thin film in a simpler process.

Means for Solving the Problems

[0006] The present disclosure includes the following aspects. [1] A composite material including a fluoropolyether group-containing silane compound and a depolymerizable polymer. [2] The composite material according to [1] above, wherein the fluoropolyether group-containing silane compound is impregnated in the depolymerizable polymer. [3] The composite material according to [1] or [2] above, wherein the depolymerizable polymer has a monovalent organic group or a halogen atom bonded to a carbon atom located at the α-position. [4] The composite material according to any one of [1] to [3] above, wherein the depolymerizable polymer has an alkyl group having 1 to 6 carbon atoms or a halogen atom bonded to a carbon atom located at the α-position. [5] The depolymerizable polymer has the following formula: CR 1 R 2 =CR 3 R 4 [wherein, R 1 is a hydrogen atom or a halogen atom, R 2 is a hydrogen atom or a halogen atom, R 3 is a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a halogen atom, R 4 is an aryl group, COOR 5 or a halogen atom, R 5 is an alkyl group having 1 to 20 carbon atoms, -R 6 -Rf, or a halogen atom, R 6 is a single bond or an alkylene group having 1 to 20 carbon atoms, Rf is an alkyl group having 1 to 20 carbon atoms which may be substituted by one or more fluorine atoms.] The composite material according to any one of [1] to [4] above, comprising monomer units derived from an ethylenically unsaturated monomer represented by the formula: [6] The composite material according to [5] above, wherein R 1 , R 2 , R 3 and R 4 are fluorine atoms. [7] R 1 and R 2 are hydrogen atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, R 4 is an aryl group or COOR 5 and R 5 is an alkyl group having 1 to 20 carbon atoms, The composite material according to [5] above. [8]R 1 and R 2 are hydrogen atoms, R 3 is a methyl group, R 4 is COOR 5 and R 5 is a methyl group, the composite material according to [7]. [9]R 1 and R 2 are hydrogen atoms, R 3 is a methyl group, R 4 is a phenyl group, the composite material according to [5].

[10] R 1 , R 2 and R 3 are hydrogen atoms, R 4 is a phenyl group, the composite material according to [5].

[11] R 1 and R 2 are hydrogen atoms, R 3 is a methyl group, R 4 is COOR 5 and R 5 is -R 6 -Rf, R 6 is an alkylene group having 2 carbon atoms, Rf is a perfluoroalkyl group having 6 carbon atoms, the composite material according to [5].

[12] The composite material according to any one of [1] to

[11] above, wherein the fluoropolyether group-containing silane compound is contained in an amount of 30% by mass or more with respect to the depolymerizable polymer.

[13] The composite material according to any one of [1] to

[12] above, wherein the depolymerizable polymer is porous.

[14] The composite material according to any one of [1] to

[13] above, wherein the depolymerizable polymer is in tablet form or powder form.

[15] The composite material according to

[14] above, wherein the depolymerizable polymer is in powder form, and the average particle diameter of the depolymerizable polymer is 0.1 μm to 100 μm.

[16] The composite material according to any one of [1] to

[15] above, wherein the ceiling temperature of the depolymerizable polymer is 500 °C or lower.

[17] The fluoropolyether group-containing silane compound is represented by the following formula (A1) or (A2):

Chemical formula

[16] , which is a compound represented by the formula.

[18] In formulas (A1) and (A2), R F Each is independently a group represented by the formula: -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 R Fa 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [wherein: R Fa Each is independently a hydrogen atom, a fluorine atom or a chlorine atom. a, b, c, d, e and f are each independently an integer from 0 to 200, and the sum of a, b, c, d, e and f is 1 or more. The order of existence of each repeating unit enclosed in parentheses with a, b, c, d, e or f attached is arbitrary in the formula. However, when all R Fa are hydrogen atoms or chlorine atoms, at least one of a, b, c, e and f is 1 or more.] The composite material according to the above

[17] , which is a group represented by the formula.

[19] In formulas (A1) and (A2), Rf 1 is a C 1-16 perfluoroalkyl group, Rf 2 is a C 1-6 perfluoroalkylene group, R F are each independently a group of the formula: -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [wherein: a, b, c, d, e and f are each independently an integer from 0 to 200, and the sum of a, b, c, d, e and f is 1 or more, and the order of existence of each repeating unit enclosed in parentheses with a, b, c, d, e or f is arbitrary in the formula.] a group represented by the above

[18] or

[19] .

[20] In formulas (A1) and (A2), R F are each independently the following formula (f1), (f2), (f3), (f4), (f5), or (f6): -(OC 3 F 6 ) d -(OC 2 F 4 ) e - (f1) [wherein, d is an integer from 1 to 200, and e is 0 or 1.], -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F4 ) e -(OCF 2 ) f - (f2) [wherein c and d are each independently an integer from 0 to 30, e and f are each independently an integer from 1 to 200, the sum of c, d, e and f is an integer from 10 to 200, the order of presence of each repeating unit enclosed in parentheses with c, d, e or f is arbitrary in the formula.], -(R 6 -R 7 ) g - (f3) [wherein R 6 is OCF 2 or OC 2 F 4 and R 7 is OC 2 F 4 、OC 3 F 6 、OC 4 F 8 、OC 5 F 10 and OC 6 F 12 is a group selected from these groups, or a combination of 2 or 3 groups selected from these groups, and g is an integer from 2 to 100.], -(R 6 -R 7 ) g -R r -(R 7’ -R 6’ ) g’ - (f4) [wherein R 6 is OCF 2 or OC 2 F 4 and R 7 is OC 2 F 4 、OC 3 F 6 、OC 4 F 8 、OC 5 F10 and OC 6 F 12 is a group selected from these groups, or a combination of two or three groups independently selected from these groups, R 6’ is OCF 2 or OC 2 F 4 and is R 7’ is OC 2 F 4 、OC 3 F 6 、OC 4 F 8 、OC 5 F 10 and OC 6 F 12 is a group selected from these groups, or a combination of two or three groups independently selected from these groups, g is an integer from 2 to 100, g’ is an integer from 2 to 100, R r is

Chemical formula

[17] to

[19] , which is a group represented by

[21] R Si is any of the following formulas (S1), (S2), (S3), (S4), or (S5):

Chemical formula

[17] to

[20] , which is a group represented by

[22] α1, β1, and γ1 are 1, and X A is a single bond or a divalent group, the composite material according to any one of the above

[17] to

[21] .

[23] X A is a single bond or the following formula: -(R 51 ) p5 -(X 51 ) q5 - [wherein: R 51 is a single bond, -(CH 2 ) s5 - or an o-, m- or p-phenylene group, s5 is an integer from 1 to 20, X 51 is -(X 52 ) l5 -, X 52 is, independently of one another, -O-, -S-, o-, m- or p-phenylene group, -C(O)O-, -Si(R 53 ) 2 -, -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -, -CONR 54 -, -O-CONR 54 -, -NR 54 - and -(CH 2 ) n5 - and is a group selected from the group consisting of, R 53 is, independently of one another, a phenyl group, C 1-6 alkyl group or C 1-6 alkoxy group, R54 is, independently of each other, a hydrogen atom, a phenyl group or a C 1-6 alkyl group, m5 is, independently of each other, an integer from 1 to 100, n5 is, independently of each other, an integer from 1 to 20, l5 is an integer from 1 to 10, p5 is 0 or 1, q5 is 0 or 1, wherein at least one of p5 and q5 is 1, and the order of presence of each repeating unit enclosed in parentheses with p5 or q5 is arbitrary, with the right side bonded to R Si .] The composite material according to any one of

[17] to

[22] above, which is a divalent group represented by

[24] X A is the following formula:

Chemical formula

[17] to

[23] above, which is a group represented by

[25] In formulas (A1) and (A2), R FA1 is, independently of each other, Rf 1 -R F -O q -, R FA2 is -Rf 2 p -R F -O q -, R F is, independently of each other, the following formula (f1) or (f2): -(OC 3 F 6 ) d -(OC 2 F 4 ) e - (f1) [In the formula, d is an integer from 1 to 200, and e is 0 or 1.], -(OC4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f2) [wherein c and d are each independently an integer of 0 to 30, e and f are each independently an integer of 1 to 200, the sum of c, d, e and f is an integer of 10 to 200, the order of existence of each repeating unit enclosed in parentheses with c, d, e or f is arbitrary in the formula. It is a group represented by] Rf 1 are each independently a C 1-6 perfluoroalkyl group, Rf 2 are each independently a C 1-6 perfluoroalkylene group, p is 1, q is 1, R Si is the following formula (S1-b), (S3) or (S4): TIFF0007691630000005.tif2989 JPEG0007691630000006.jpg2491 [wherein: R 11 are each independently a hydroxyl group or a hydrolyzable group, R 12 are each independently a hydrogen atom or a monovalent organic group, n1 is, for each (SiR 11 n1 R 12 3-n1 ) unit, each independently an integer of 0 to 3, X 11 are each independently a single bond or a divalent group, R 13 are each independently a hydrogen atom or a monovalent organic group, t is, independently of each other, an integer of 2 or more, R a1 is, independently of each other, -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 and; Z 1 is, independently of each other, a divalent group, R 21 is, independently of each other, -Z 1’ -SiR 21’ p1’ R 22’ q1’ R 23’ r1’ and; R 22 is, independently of each other, a hydroxyl group or a hydrolyzable group, R 23 is, independently of each other, a hydrogen atom or a monovalent organic group, p1 is, independently of each other, an integer of 0 to 3, q1 is, independently of each other, an integer of 0 to 3, r1 is, independently of each other, an integer of 0 to 3, The sum of p1, q1 and r1 is 3 in the (SiR 21 p1 R 22 q1 R 23 r1 ) unit, Z 1’ is, independently of each other, a divalent group, R 21’ is, independently of each other, -Z 1” -SiR 22” q1” R 23” r1” and; R 22’ is, independently of each other, a hydroxyl group or a hydrolyzable group, R 23’ is, independently of each other, a hydrogen atom or a monovalent organic group, p1’ is, independently of each other, an integer from 0 to 3, q1’ is, independently of each other, an integer from 0 to 3, r1’ is, independently of each other, an integer from 0 to 3, The sum of p1’, q1’ and r1’ is 3 in terms of (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) units, Z 1” is, independently of each other, a divalent group, R 22” is, independently of each other, a hydroxyl group or a hydrolyzable group, R 23” is, independently of each other, a hydrogen atom or a monovalent organic group, q1” is, independently of each other, an integer from 0 to 3, r1” is, independently of each other, an integer from 0 to 3, The sum of q1” and r1” is 3 in terms of (SiR 22” q1” R 23” r1” ) units, R b1 is, independently of each other, a hydroxyl group or a hydrolyzable group, R c1 is, independently of each other, a hydrogen atom or a monovalent organic group, k1 is, independently of each other, an integer from 0 to 3, l1 is, independently of each other, an integer from 0 to 3, m1 is, independently of each other, an integer from 0 to 3, The sum of k1, l1 and m1 is 3 in terms of (SiR a1 k1 R b1 l1 R c1 m1 ) units, R d1 is, independently of each other, -Z 2 -CR 31 p2 R 32 q2 R33 r2 and; Z 2 is, independently of each other, a single bond, a divalent group; R 31 is, independently of each other, -Z 2’ -CR 32’ q2’ R 33’ r2’ and; R 32 is, independently of each other, -Z 3 -SiR 34 n2 R 35 3-n2 and, R 33 is, independently of each other, a hydrogen atom, a hydroxyl group or a monovalent organic group, p2 is, independently of each other, an integer from 0 to 3, q2 is, independently of each other, an integer from 0 to 3, r2 is, independently of each other, an integer from 0 to 3, The sum of p2, q2 and r2 is 3 in the (CR 31 p2 R 32 q2 R 33 r2 ) unit, Z 2’ is, independently of each other, a single bond, or a divalent group; R 32’ is, independently of each other, -Z 3 -SiR 34 n2 R 35 3-n2 and, R 33’ is, independently of each other, a hydrogen atom, a hydroxyl group or a monovalent organic group, q2’ is, independently of each other, an integer from 0 to 3, r2’ is, independently of each other, an integer from 0 to 3, The sum of q2’ and r2’ is 3 in the (CR 32’ q2’ R 33’ r2’ ) unit, Z3 are each independently a single bond or a divalent group; R 34 are each independently a hydroxyl group or a hydrolyzable group, R 35 are each independently a hydrogen atom or a monovalent organic group, n2 are each independently an integer from 0 to 3, R e1 are each independently -Z 3 -SiR 34 n2 R 35 3-n2 and are, R f1 are each independently a hydrogen atom, a hydroxyl group or a monovalent organic group, k2 are each independently an integer from 0 to 3, l2 are each independently an integer from 0 to 3, m2 are each independently an integer from 0 to 3, The sum of k2, l2 and m2 is 3 in the (CR d1 k2 R e1 l2 R f1 m2 ) unit. It is a group represented by, X A are each independently, a single bond, -(CH 2 ) s5 -O-(CH 2 ) t5 - or -CONR 54 -(CH 2 ) t5 - [wherein, R 54 are each independently a hydrogen atom, a phenyl group or a C 1-6 alkyl group, s5 is an integer from 1 to 20, t5 is an integer from 1 to 20). and, α1 is 1, β1 is 1, γ1 is the composite material described in any one of

[17] to

[24] , which is 1. In

[26] , formulas (A1) and (A2), R Si is the following formula (S1-b):

Chemical formula

[25] .

[27] In formulas (A1) and (A2), R Si is the following formula (S3): JPEG0007691630000008.jpg1293[where: k1 is independently 3 for each, l1 is independently 0 for each, m1 is independently 0 for each, R a1 is independently -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 and Z 1 is a C 1-3 alkylene group, p1 is 0, q1 is 3, r1 is 0, R 22 is -OCH 3 and is the composite material described in

[25] .

[28] In formulas (A1) and (A2), R Si is the following formula (S4): JPEG0007691630000009.jpg1095[where: k2 is, independently of each other, 0, l2 is, independently of each other, 3, m2 is, independently of each other, 0, R e1 is, independently of each other, -Z 3 -SiR 34 n2 R 35 3-n2 and Z 3 is an alkylene group, 1-3 R is -OCH 34 and 3 n2 is, independently of each other, 3] and is a group represented by, the composite material according to

[25] .

[29] In formulas (A1) and (A2), R is, independently of each other, F -(OCF CF 2 CF 2 CF 2 ) d -OCF 2 CF 2 - [wherein d is an integer from 10 to 30.] and Rf 1 is, independently of each other, C 1-3 a perfluoroalkyl group, Rf 2 is, independently of each other, C 1-3 a perfluoroalkylene group, the composite material according to claim 25.

[30] In formulas (A1) and (A2), R F is, independently of each other, -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF2 ) f - [wherein c and d are each independently 0 or 1, e and f are each independently an integer from 10 to 30, the sum of c, d, e and f is an integer from 20 to 45, the order of presence of each repeating unit enclosed in parentheses with c, d, e or f is arbitrary in the formula.], Rf 1 is each independently a C 1-3 perfluoroalkyl group, Rf 2 is each independently a C 1-3 perfluoroalkylene group, the composite material according to

[25] .

[31] The composite material according to any one of the above [1] to

[30] , which is a vapor deposition material.

[32] A depolymerizable polymer which is a carrier material used in combination with a liquid material for vapor deposition, when the depolymerizable polymer is heated from 25°C to 600°C at a heating rate of 10°C / min in a nitrogen atmosphere in TG-DTA measurement, the residue amount of the depolymerizable polymer at 500°C is 5% or less of the initial weight of the depolymerizable polymer, a depolymerizable polymer for vapor deposition.

[33] A vapor deposition material containing a fluoropolyether group-containing silane compound and the depolymerizable polymer according to

[32] .

[34] A depolymerizable polymer used in combination with a fluoropolyether group-containing silane compound in the vapor deposition of the fluoropolyether group-containing silane compound.

[35] Preparing a vapor deposition material by combining a depolymerizable polymer and a fluoropolyether group-containing silane compound, heating the vapor deposition material and vapor-depositing the fluoropolyether group-containing silane compound on a substrate, a vapor deposition method comprising.

[36] The vapor deposition method according to

[35] above, wherein the combination is impregnating the depolymerizable polymer with the fluoropolyether group-containing silane compound. [Advantages of the Invention]

[0007] According to the present disclosure, a composite material capable of forming a thin film in a simpler process can be provided.

Embodiments for Carrying Out the Invention

[0008] The composite material of the present disclosure includes a fluoropolyether group-containing silane compound and a depolymerizable polymer.

[0009] The fluoropolyether group-containing silane compound is a compound containing a fluoropolyether group and a hydrolyzable silane group.

[0010] The depolymerizable polymer is a polymer obtained by reacting an ethylenically unsaturated monomer and having depolymerization characteristics. Here, the ethylenically unsaturated monomer means a monomer having an ethylenically unsaturated bond (i.e., a carbon-carbon double bond) and forming a polymer by a polymerization reaction such as radical polymerization.

[0011] More specifically, the depolymerizable polymer is a polymer containing a structural unit derived from an ethylenically unsaturated monomer and having a chemical structure derived from an ethylenically unsaturated group in the main chain. The depolymerizable polymer has depolymerization characteristics such that the main chain is cleaved by heating and thermally decomposed into ethylenically unsaturated monomers.

[0012] The ethylenically unsaturated monomer is not particularly limited as long as it is a monomer containing an ethylenically unsaturated bond, and examples thereof include monomers having an ethylenically unsaturated group such as a vinyl group, a vinylene group, a vinylidene group, a (meth)acryloyl group, or a (meth)acrylamide group. The hydrogen atom bonded to the carbon atom forming the ethylenically unsaturated bond may be substituted by a halogen atom and / or a substituent.

[0013] As used herein, the term "(meth)acryloyl group" means "acryloyl group" and "methacryloyl group". The same applies to the expression "(meth)acrylate". The term "(meth)acrylamide group" means "acrylamide group" and "methacrylamide group".

[0014] By including the above configuration, the composite material of the present disclosure can form a thin film on the surface of the substrate in a simpler process for the following reasons.

[0015] By applying heat or the like to the composite material of the present disclosure, the depolymerizable polymer is vaporized to deposit the fluoropolyether group-containing silane compound on the substrate surface, thereby forming a layer derived from the fluoropolyether group-containing silane compound on the substrate. The depolymerizable polymer can undergo depolymerization and decomposition due to the applied heat. The decomposition products generated by the decomposition, such as low molecular weight compounds such as ethylenically unsaturated monomers that constituted the depolymerizable polymer, can be gasified by heat and released from the system because of their low binding ability to the substrate. Therefore, after the vapor deposition treatment, the depolymerizable polymer is unlikely to remain as a residue in the system, and the step of recovering the depolymerizable polymer can be omitted.

[0016] In one embodiment, the composite material of the present disclosure may contain the fluoropolyether group-containing silane compound as a liquid compound. For example, the composite material of the present disclosure may contain a solution containing the fluoropolyether group-containing silane compound.

[0017] Since the depolymerizable polymer is unlikely to remain as a residue after the vapor deposition treatment, the composite material of the present disclosure can be suitably used, for example, in a vapor deposition method including a continuous vapor deposition process. In particular, when the composite material of the present disclosure is used in a vapor deposition method including a continuous vapor deposition process, the vapor deposition substance of the liquid compound can be suitably used in the continuous vapor deposition process.

[0018] When a liquid compound is used as a vapor deposition material to be vapor-deposited on a substrate, the vapor deposition material can be filled in a container or carrier made of a porous material such as metal, metal oxide, and / or ceramic and used for vapor deposition. Vapor deposition on the substrate can usually be carried out by heating the container in a chamber under vacuum conditions to vaporize the vapor deposition material. After the vapor deposition process, the container can be recovered. Here, in order to recover the container after the vapor deposition process, it is necessary to return the pressure in the chamber from vacuum to normal pressure. Therefore, when carrying out a continuous vapor deposition process in which a plurality of different vapor deposition materials are vapor-deposited on a substrate, it is necessary to return the pressure in the chamber to vacuum or normal pressure again each time the container is installed and recovered.

[0019] Regarding this point, when a liquid compound is used as a vapor deposition material in a vapor deposition method including a continuous vapor deposition process, it is difficult to carry out efficient vapor deposition from the viewpoint of pressure adjustment during installation and recovery of the above container. For example, in a vapor deposition method including a continuous vapor deposition process, a plurality of chambers communicating with each other are used, and the vacuum state in the chamber can be maintained for several weeks, so it may be difficult to recover the container after the vapor deposition process. When a liquid material is used as a vapor deposition material without using a container, for example, it is conceivable to provide a supply unit for the liquid material, but it may require significant changes to the vapor deposition method and equipment, etc.

[0020] As described above, the composite material of the present disclosure can omit the step of recovering the depolymerizable polymer remaining as a residue after the vapor deposition process. Therefore, when the composite material of the present disclosure is used in a vapor deposition method including a continuous vapor deposition process, a liquid compound can be preferably used as the vapor deposition material.

[0021] Examples of the vapor deposition method including a continuous vapor deposition process include a manufacturing method of an OLED (Organic Light-Emitting Diode).

[0022] The composite material of the present disclosure can further adopt the following embodiments.

[0023] In one embodiment, the fluoropolyether group-containing silane compound may be impregnated in the depolymerizable polymer. "Impregnation" means that the fluoropolyether group-containing silane compound is retained in the structure and / or tissue of the depolymerizable polymer. The fluoropolyether group-containing silane compound may be impregnated in a part of the depolymerizable polymer (for example, the surface or the central part of the depolymerizable polymer), or may be impregnated throughout. By impregnating the depolymerizable polymer with the fluoropolyether group-containing silane compound, more fluoropolyether group-containing silane compound can be contained in the composite material, and the fluoropolyether group-containing silane compound can be more efficiently vapor-deposited on the base material.

[0024] In one embodiment, the depolymerizable polymer has a monovalent organic group or a halogen atom bonded to a carbon atom located at the α-position. By having such a feature, the residue of the depolymerizable polymer after the vapor deposition treatment can be less. The carbon atom located at the α-position means the carbon atom to which the functional group is bonded among the carbon atoms forming the ethylenic unsaturated bond. The type of the functional group is not particularly limited, and may be, for example, one functional group selected from the group consisting of an ester group, a carboxy group, a halogenated carboxy group, a hydroxy group, a ketone group, an amine group, an amide group, an aryl group, and a halogen. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the functional group may preferably be an ester group, an aryl group, or a halogen, more preferably an ester group.

[0025] The "monovalent organic group" means a monovalent group containing carbon. The monovalent organic group is not particularly limited, but may be a hydrocarbon group or a derivative thereof. The derivative of the hydrocarbon group means a group having one or more N, O, S, Si, amide, sulfonyl, siloxane, carbonyl, carbonyloxy, etc. at the terminal or in the molecular chain of the hydrocarbon group.

[0026] In one embodiment, the monovalent organic group is an alkyl group having 1 to 6 carbon atoms. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the alkyl having 1 to 6 carbon atoms is preferably an alkyl group having 1 to 3 carbon atoms, and more preferably a methyl group. The alkyl having 1 to 6 carbon atoms may be linear or branched. The halogen atom includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the halogen atom is preferably a fluorine atom.

[0027] In one embodiment, the depolymerizable polymer has the following formula: CR 1 R 2 =CR 3 R 4 [wherein, R 1 is a hydrogen atom or a halogen atom, R 2 is a hydrogen atom or a halogen atom, R 3 is a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a halogen atom, R 4 is an aryl group, COOR 5 or a halogen atom, R 5 is an alkyl group having 1 to 20 carbon atoms, -R 6 -Rf, or a halogen atom, R 6 is a single bond or an alkylene group having 1 to 20 carbon atoms, Rf is an alkyl group having 1 to 20 carbon atoms which may be substituted by one or more fluorine atoms.] and contains a monomer unit derived from an ethylenically unsaturated monomer represented by

[0028] R 1 is a hydrogen atom or a halogen atom, and may preferably be a hydrogen atom or a fluorine atom. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, R 1 may be a hydrogen atom.

[0029] R 2 is a hydrogen atom or a halogen atom, and may preferably be a hydrogen atom or a fluorine atom. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, R 2 may be a hydrogen atom.

[0030] R 3 is a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a halogen atom, and may preferably be an alkyl group having 1 to 6 carbon atoms or a fluorine atom. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the alkyl group having 1 to 6 carbon atoms may be an alkyl group having 1 to 3 carbon atoms, preferably a methyl group.

[0031] R 4 is an aryl group, COOR 5 or a halogen atom, and may preferably be an aryl group, COOR 5 or a fluorine atom. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the aryl group may be a phenyl group.

[0032] R 5 is an alkyl group having 1 to 20 carbon atoms, -R 6 -Rf, or a halogen atom, and may preferably be an alkyl group having 1 to 20 carbon atoms, -R 6 -Rf, or a fluorine atom. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the alkyl group having 1 to 20 carbon atoms may be an alkyl group having 1 to 6 carbon atoms, preferably an alkyl group having 1 to 3 carbon atoms, more preferably a methyl group.

[0033] R 6 is a single bond or an alkylene group having 1 to 20 carbon atoms, and may preferably be an alkylene group having 1 to 10 carbon atoms, more preferably an alkylene group having 1 to 5 carbon atoms, particularly preferably an alkylene group having 1 to 2 carbon atoms. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, R 6 may be an alkylene group having 2 carbon atoms.

[0034] Rf is an alkyl group having 1 to 20 carbon atoms which may be substituted by one or more fluorine atoms. Rf may preferably be a perfluoroalkyl group having 1 to 20 carbon atoms.

[0035] The above perfluoroalkyl group may be linear or branched, preferably a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, more preferably a linear or branched perfluoroalkyl group having 1 to 6 carbon atoms, particularly preferably a linear perfluoroalkyl group having 1 to 6 carbon atoms. From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, Rf may be a linear perfluoroalkyl group having 6 carbon atoms.

[0036] In one embodiment, the depolymerizable polymer is in the above formula R 1 and R 2 are hydrogen atoms, R 3 is a methyl group, R 4 is COOR 5 and R 5 is -R 6 -Rf, R 6 is an alkylene group having 2 carbon atoms, Rf is a perfluoroalkyl group having 6 carbon atoms. The depolymerizable polymer represented by such a formula is 2-(perfluorohexyl)ethyl polymethacrylate, CH 2 =CHCH 3 COOC 2 H 4 C 6 F 13 and is a compound represented by.

[0037] The depolymerizable polymer may be a homopolymer of an ethylenically unsaturated monomer or a copolymer of an ethylenically unsaturated monomer and another monomer. In one embodiment, the depolymerizable polymer may be a homopolymer of an ethylenically unsaturated monomer. In another embodiment, the depolymerizable polymer may be a copolymer of an ethylenically unsaturated monomer and another monomer.

[0038] The above-mentioned other monomers may be at least one monomer selected from the group consisting of ethylene, vinylidene fluoride, hexafluoropropylene, perfluoro(alkyl vinyl ether), and chlorotrifluoroethylene.

[0039] In one embodiment, R 1 , R 2 , R 3 and R 4 are fluorine atoms. That is, the depolymerizable polymer may contain monomer units derived from tetrafluoroethylene. The depolymerizable polymer may include polytetrafluoroethylene (PTFE) or a copolymer of tetrafluoroethylene and other monomers. The depolymerizable polymer may consist of PTFE, and may include at least one resin selected from the group consisting of tetrafluoroethylene (TFE)-ethylene copolymer, TFE-polyvinylidene fluoride (VFD) copolymer, TFE-polyhexafluoropropylene copolymer, TFE-perfluoro(alkyl vinyl ether) copolymer, and TFE-chlorotrifluoroethylene (CTFE) copolymer.

[0040] In one embodiment, R 1 and R 2 are hydrogen atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, R 4 is an aryl group or COOR 5 , and R 5may be an alkyl group having 1 to 20 carbon atoms. That is, the depolymerizable polymer is a halogen-free resin, i.e., a non-fluorine resin, and specifically may be a methacrylate resin or a styrene resin.

[0041] From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, R 1 and R 2 are hydrogen atoms, R 3 is an alkyl group having 1 to 6 carbon atoms, and R 4 may be an aryl group. That is, the depolymerizable polymer may contain a styrene resin. From the viewpoint of further reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the alkyl group having 1 to 6 carbon atoms of R 3 may be an alkyl group having 1 to 3 carbon atoms, preferably a methyl group. R 4 is a phenyl group (that is, a group obtained by removing one hydrogen atom from a benzene ring and means C 6 H 5 ). That is, the depolymerizable polymer may contain poly(α-methylstyrene) (PαMS).

[0042] In one embodiment, the depolymerizable polymer is polystyrene, and the above formula is R 1 , R 2 and R 3 are hydrogen atoms, R 4 is a phenyl group.

[0043] In one embodiment, the depolymerizable polymer is poly(α-methylstyrene), and the above formula is R 1 and R 2 are hydrogen atoms, R 3 is a methyl group, R 4 is a phenyl group.

[0044] From the viewpoint of reducing the residue of the depolymerizable polymer after the vapor deposition treatment, R 1 and R 2is a hydrogen atom, and R 3 is an alkyl group having 1 to 6 carbon atoms, and R 4 is COOR 5 and R 5 may be a methyl group. That is, the depolymerizable polymer may contain a methacrylate resin. From the viewpoint of further reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the alkyl group having 1 to 6 carbon atoms of R 3 may be an alkyl group having 1 to 3 carbon atoms, preferably a methyl group. That is, the depolymerizable polymer may contain polymethyl methacrylate (PMMA).

[0045] In one embodiment, the depolymerizable polymer is polymethyl methacrylate, and the above formula is R 1 and R 2 are hydrogen atoms,[[]] R 3 is a methyl group,[[]] R 4 is COOR 5 and R 5 is a methyl group.[[]]

[0046] In one embodiment, in the composite material of the present disclosure, the fluoropolyether group-containing silane compound may be contained in an amount of 30% by mass or more based on the depolymerizable polymer. From the viewpoint of efficiently vapor-depositing the fluoropolyether group-containing silane compound on the substrate, the fluoropolyether group-containing silane compound may be contained in an amount of 35% by mass or more based on the depolymerizable polymer, preferably 40% by mass or more, more preferably 45% by mass or more, and still more preferably 50% by mass or more. From the viewpoint of making the composite material easier to handle, the fluoropolyether group-containing silane compound may be contained in an amount of 90% by mass or less, preferably 80% by mass or less, and more preferably 70% by mass or less based on the depolymerizable polymer.[[]]

[0047] The content of the fluoropolyether group-containing silane compound contained in the depolymerizable polymer can be quantified, for example, by the extraction weight by solvent extraction. The solvent used for solvent extraction may be, for example, water, an organic solvent, or a mixture thereof. The organic solvent may be an alcohol-based, ether-based, ketone-based, ester-based, halogen-based, or hydrocarbon-based solvent. Examples of the halogen-based solvent include a chlorine-based solvent or a fluorine-based solvent. The extraction weight may be obtained by removing the solvent after extraction and measuring the weight of the fluoropolyether group-containing silane compound, or may be obtained by analyzing the content of the fluoropolyether group-containing silane compound by instrumental analysis of the solvent after extraction.

[0048] In one embodiment, the depolymerizable polymer may be porous. Porous means a state having a large number of pores on the surface and / or inside. The pores may have a diameter observable by, for example, a scanning electron microscope. When the depolymerizable polymer is porous, it becomes possible to include more of the fluoropolyether group-containing silane compound in the depolymerizable polymer, and the fluoropolyether group-containing silane compound can be efficiently vapor-deposited on the substrate. Note that when the depolymerizable polymer is porous, the composite material of the present disclosure may also be porous.

[0049] In one embodiment, the depolymerizable polymer may be in the form of a tablet or powder.

[0050] When the depolymerizable polymer is in powder form, the average particle size of the depolymerizable polymer may be from 0.1 μm to 100 μm. From the viewpoint of efficiently vaporizing the fluoropolyether group-containing silane compound from the depolymerizable polymer, the average particle size of the depolymerizable polymer may be from 1 μm to 80 μm, preferably from 3 μm to 50 μm. Note that when the particle size of the depolymerizable polymer is within the above range, the composite material of the present disclosure may also have a substantially similar particle size. The average particle size of the depolymerizable polymer in the present disclosure means the primary particle size.

[0051] The method for producing the depolymerizable polymer in powder form is not particularly limited and may be conventional means. For example, a powder-form depolymerizable polymer may be produced by pulverizing a lump-form, granular, or pellet-form depolymerizable polymer with a pulverizer. As another method for producing a powder-form depolymerizable polymer, there may be mentioned a method of obtaining particles by growing atoms or molecules by a chemical reaction and forming aggregates. For example, the powder-form depolymerizable polymer may be produced by emulsion polymerization, suspension polymerization, or the like.

[0052] The average particle diameter of the depolymerizable polymer may be the particle diameter D50 when the cumulative particle volume from the small particle diameter side reaches 50% of the total particle volume in the particle size distribution determined by the laser diffraction / scattering method.

[0053] "Tablet form" means a solid having a certain shape, for example, a tablet-shaped mass. The shape of the tablet-form depolymerizable polymer is not particularly limited and may be a cube, rectangular parallelepiped, sphere, cylinder, prism, cone, pyramid, ellipsoid, circular cylinder, or a combination thereof. By being processed into tablet form, the handleability can be further improved. Note that when the depolymerizable polymer is in tablet form or powder form, the composite material of the present disclosure can be in the same tablet form or powder form as the depolymerizable polymer.

[0054] The tablet-form depolymerizable polymer may be, for example, a product obtained by compressing and molding a powder-form depolymerizable polymer. For example, the tablet-form depolymerizable polymer may be a formed body shaped to have a predetermined shape by tableting and molding at high pressure. In other words, the tablet-form depolymerizable polymer may be an aggregate in which powders are solidified. The tablet-form depolymerizable polymer may be produced by firing a powder-form depolymerizable polymer. Or, it may be dissolved in a solvent or the like and molded into a predetermined shape.

[0055] The size of the tablet-form depolymerizable polymer is, for example, 10 mm 3 ~1000 mm 3It may be. From the perspective of making the composite material of the present disclosure easier to handle, the size of the tablet-shaped depolymerizable polymer is 30 mm 3 ~700 mm 3 It may be, preferably 50 mm 3 ~500 mm 3 More preferably 100 mm 3 ~300 mm 3 Even more preferably 130 mm 3 ~200 mm 3 It may be.

[0056] From the perspective of improving handleability, as the depolymerizable polymer, in addition to the tablet shape, those obtained by compacting and granulating primary particles may also be used. Regarding the granulation method, the primary particles may be compressed and / or fired. From the perspective of efficiently performing granulation, the primary particles may be granulated in combination with a solvent and / or a binder. The particles after granulation may be spherical or non-spherical. The particle diameter of the particles after granulation may be in the size range of 0.1 to 10 mm, more preferably in the size range of 0.5 to 5 mm. When the particles after granulation are non-spherical, the particle diameter of the particles after granulation may be the long diameter. As the particles after granulation, particles having the same particle size may be used after classification is performed after granulation.

[0057] In one embodiment, the ceiling temperature of the depolymerizable polymer may be 500 °C or lower. From the perspective of further reducing the residue of the depolymerizable polymer after vapor deposition treatment, the ceiling temperature of the depolymerizable polymer may preferably be 400 °C or lower, more preferably 300 °C or lower, and even more preferably 250 °C or lower. The ceiling temperature of the depolymerizable polymer may be 100 °C or higher, 200 °C or higher, or 300 °C or higher.

[0058] "Ceiling temperature" means the temperature at which the polymerization rate from monomer to polymer and the depolymerization rate from polymer to monomer are in an equilibrium relationship. When the ceiling temperature is exceeded, the depolymerization rate becomes greater than the polymerization rate. When the depolymerizable polymer reaches a temperature exceeding the ceiling temperature, for example, the decomposition of the polymer by depolymerization becomes more dominant than polymerization, and more monomers or oligomers that constituted the polymer are generated, and the monomers or oligomers can be released from the polymer by gasification or the like, so the mass of the depolymerizable polymer can decrease.

[0059] Note that the decrease in the mass of the depolymerizable polymer does not necessarily occur when the ceiling temperature is exceeded. For example, it can occur at a temperature ranging from -20% to +20% of the ceiling temperature, -10% to +10% of the ceiling temperature, or -5% to +5% of the ceiling temperature.

[0060] In one embodiment, the depolymerizable polymer may have a decomposition start temperature of 100°C to 400°C. From the viewpoint of facilitating the control of the depolymerization of the depolymerizable polymer, the depolymerizable polymer may have a decomposition start temperature of 150°C to 350°C, preferably 180°C to 300°C, more preferably 200°C to 260°C. "Decomposition start temperature" means the temperature at which 1 mass% of the depolymerizable polymer decomposes (or decreases) when the depolymerizable polymer is heated from 25°C to 600°C at a heating rate of 10°C / min under a nitrogen atmosphere using thermogravimetric differential thermal measurement.

[0061] In one embodiment, the depolymerizable polymer may have a decomposition end temperature of 300°C to 600°C. From the viewpoint of facilitating the control of the depolymerization of the depolymerizable polymer, the depolymerizable polymer may have a decomposition end temperature of 350°C to 550°C, preferably 400°C to 520°C, more preferably 430°C to 490°C. "Decomposition end temperature" means the temperature at which 99 mass% of the depolymerizable polymer decomposes (or decreases) when the depolymerizable polymer is heated from 25°C to 600°C at a heating rate of 10°C / min under a nitrogen atmosphere using thermogravimetric differential thermal measurement.

[0062] In one embodiment, the glass transition temperature (Tg) of the depolymerizable polymer may be 0 °C or higher and 300 °C or lower, preferably 50 °C or higher and 250 °C or lower, more preferably 70 °C or higher and 200 °C or lower, still more preferably 80 °C or higher and 150 °C or lower, and particularly preferably 85 °C or higher and 125 °C or lower. When the Tg of the depolymerizable polymer is within these ranges, the residue of the depolymerizable polymer after the vapor deposition treatment can be made less. The Tg of the depolymerizable polymer can be obtained by a differential scanning calorimeter (DSC) or the like.

[0063] The average molecular weight of the depolymerizable polymer may be 1,000 or more, 10,000 or more, or 50,000 or more, up to 100,000. The average molecular weight of the depolymerizable polymer may be 500,000 or less, 250,000 or less, or 150,000 or less. The above average molecular weight may be a weight average molecular weight or a number average molecular weight.

[0064] [Silane compound containing a fluoropolyether group] The silane compound containing a fluoropolyether group is a compound containing a fluoropolyether group and a hydrolyzable silane group.

[0065] In one aspect, the silane compound containing a fluoropolyether group has the following formula (A1) or (A2): [Chemical formula] [wherein: R FA1 is, independently of each other, Rf 1 -R F -O q -, R FA2 is -Rf 2 p -R F -O q -, R F is, independently of each other, a divalent fluoropolyether group, Rf 1is a C alkyl group which may be substituted by one or more fluorine atoms, 1-16 and Rf 2 is a C alkylene group which may be substituted by one or more fluorine atoms, 1-6 and p is 0 or 1, and q is independently 0 or 1, R Si is independently a hydroxyl group, a hydrolyzable group, a hydrogen atom or a monovalent group containing a Si atom to which a monovalent group is bonded, and at least one R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded, X A is independently a single bond or a divalent to decavalent group, α1 is an integer from 1 to 9, β1 is an integer from 1 to 9, and γ1 is independently an integer from 1 to 9.] It is a fluoropolyether group-containing silane compound represented by

[0066] In formula (A1), R FA1 is independently Rf 1 -R F -O q -.

[0067] In formula (A2), R FA2 is -Rf 2 p -R F -O q -.

[0068] In formulas (A1) and (A2), Rf 1 is independently a C alkyl group which may be substituted by one or more fluorine atoms, 1-16 and

[0069] In the C alkyl group which may be substituted by one or more fluorine atoms, the "C" in 1-16 the "C alkyl group"1-16 The "alkyl group" may be linear or branched, preferably a linear or branched C 1-6 alkyl group, particularly a C 1-3 alkyl group, more preferably a linear C 1-6 alkyl group, particularly a C 1-3 alkyl group.

[0070] Rf 1 is preferably a C 1-16 alkyl group substituted by one or more fluorine atoms, more preferably a CF 2 H-C 1-15 perfluoroalkylene group, even more preferably a C 1-16 perfluoroalkyl group.

[0071] In the above C 1-16 perfluoroalkyl group may be linear or branched, preferably a linear or branched C 1-6 perfluoroalkyl group, particularly a C 1-3 perfluoroalkyl group, more preferably a linear C 1-6 perfluoroalkyl group, particularly a C 1-3 perfluoroalkyl group, specifically -CF 3 , -CF 2 CF 3 , or -CF 2 CF 2 CF 3 .

[0072] In one embodiment, Rf 1 is a C 1-6 perfluoroalkyl group.

[0073] In one embodiment, Rf 1 is a C 1-3 perfluoroalkyl group.

[0074] In formulas (A1) and (A2), Rf 2 may be a C 1-6 alkylene group optionally substituted by one or more fluorine atoms.

[0075] C which may be substituted by the above one or more fluorine atoms 1-6 In the alkylene group, "C 1-6 The "alkylene group" may be linear or branched, preferably a linear or branched C 1-3 alkylene group, more preferably a linear C 1-3 alkylene group.

[0076] Rf 2 is preferably a C 1-6 alkylene group substituted by one or more fluorine atoms, more preferably a C 1-6 perfluoroalkylene group, even more preferably a C 1-3 perfluoroalkylene group.

[0077] The above C 1-6 perfluoroalkylene group may be linear or branched, preferably a linear or branched C 1-3 perfluoroalkylene group, more preferably a linear C 1-3 perfluoroalkylene group, specifically -CF 2 -, -CF 2 CF 2 -, or -CF 2 CF 2 CF 2 -.

[0078] In one embodiment, Rf 2 is a C 1-6 perfluoroalkylene group.

[0079] In one embodiment, Rf 2 is a C 1-3 perfluoroalkylene group.

[0080] In the above formula, p is 0 or 1. In one embodiment, p is 0. In another embodiment, p is 1.

[0081] In the above formula, q is, independently of each other, 0 or 1. In one embodiment, q is 0. In another embodiment, q is 1.

[0082] In formulas (A1) and (A2), R F is, independently of each other, a divalent fluoropolyether group.

[0083] R F is preferably a group of the formula: -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 R Fa 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [wherein: R Fa is, independently of each other, a hydrogen atom, a fluorine atom or a chlorine atom, a, b, c, d, e and f are, independently of each other, integers from 0 to 200, and the sum of a, b, c, d, e and f is 1 or more. The order of existence of each repeating unit enclosed in parentheses with a, b, c, d, e or f is arbitrary in the formula. However, when all R Fa are hydrogen atoms or chlorine atoms, at least one of a, b, c, e and f is 1 or more.] is a group represented by.

[0084] R Fa is preferably a hydrogen atom or a fluorine atom, more preferably a fluorine atom. However, when all R Fa are hydrogen atoms or chlorine atoms, at least one of a, b, c, e and f is 1 or more.

[0085] a, b, c, d, e, and f may each independently be, preferably, an integer from 0 to 100, more preferably an integer from 0 to 50.

[0086] The sum of a, b, c, d, e, and f is preferably 5 or more, more preferably 10 or more, still more preferably 20 or more, and may be, for example, 25 or more or 30 or more. The sum of a, b, c, d, e, and f is preferably 200 or less, more preferably 100 or less, still more preferably 60 or less, and may be, for example, 50 or less or 30 or less.

[0087] These repeating units may be linear, branched, or may contain a ring structure. For example, -(OC 6 F 12 )- may be -(OCF 2 CF 2 CF 2 CF 2 CF 2 CF 2 )-, -(OCF(CF 3 )CF 2 CF 2 CF 2 CF 2 )-, -(OCF 2 CF(CF 3 )CF 2 CF 2 CF 2 )-, -(OCF 2 CF 2 CF(CF 3 )CF 2 CF 2 )-, -(OCF 2 CF 2 CF 2 CF(CF 3 )CF 2 )-, -(OCF 2 CF 2 CF 2 CF 2 CF(CF 3 ))- etc. may be used. -(OC 5 F 10 )- is -(OCF 2 CF 2 CF 2 CF 2 CF2 )-, -(OCF(CF 3 )CF 2 CF 2 CF 2 )-, -(OCF 2 CF(CF 3 )CF 2 CF 2 )-, -(OCF 2 CF 2 CF(CF 3 )CF 2 )-, -(OCF 2 CF 2 CF 2 CF(CF 3 ))-, etc. may be used. -(OC 4 F 8 )- is -(OCF 2 CF 2 CF 2 CF 2 )-, -(OCF(CF 3 )CF 2 CF 2 )-, -(OCF 2 CF(CF 3 )CF 2 )-, -(OCF 2 CF 2 CF(CF 3 ))-, -(OC(CF 3 ) 2 CF 2 )-, -(OCF 2 C(CF 3 ) 2 )-, -(OCF(CF 3 )CF(CF 3 ))-, -(OCF(C 2 F 5 )CF 2 )- and -(OCF 2 CF(C 2 F 5 ))- may be either. -(OC 3 F 6 )-(That is, in the above formula, R Fa is a fluorine atom) is -(OCF 2 CF 2 CF 2 )-, -(OCF(CF 3 )CF 2 )- and -(OCF2 CF(CF 3 )) - may be any of them. - (OC 2 F 4 ) - is - (OCF 2 CF 2 ) - and - (OCF(CF 3 )) - may be any of them.

[0088] The above ring structure may be a three - membered ring, four - membered ring, five - membered ring, or six - membered ring below.

Chemical formula

[0089] The above ring structure may preferably be a four - membered ring, five - membered ring, or six - membered ring, more preferably a four - membered ring or six - membered ring.

[0090] The repeating unit having a ring structure may preferably be the following unit.

Chemical formula

[0091] In one aspect, the above repeating unit is linear.

[0092] In one aspect, the above repeating unit is branched.

[0093] In one aspect, R F are each independently a group represented by any of the following formulas (f1) to (f6). -(OC 3 F 6 ) d -(OC 2 F 4 ) e - (f1) [In the formula, d is an integer from 1 to 200, and e is 0 or 1, preferably 0.], -(OC 4 F 8 ) c -(OC3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f2) [wherein, c and d are each independently an integer of 0 or more and 30 or less, e and f are each independently an integer of 1 or more and 200 or less, the sum of c, d, e and f is 2 or more, the order of existence of each repeating unit enclosed in parentheses with c, d, e or f attached is arbitrary in the formula.], -(R 6 -R 7 ) g - (f3) [wherein, R 6 is OCF 2 or OC 2 F 4 and R 7 is OC 2 F 4 OC 3 F 6 OC 4 F 8 OC 5 F 10 and OC 6 F 12 is a group selected from these groups, or a combination of 2 or 3 groups independently selected from these groups, g is an integer of 2 to 100.], -(R 6 -R 7 ) g -R r -(R 7’ -R 6’ ) g’ - (f4) [wherein, R 6 is OCF 2 or OC 2 F 4 and R 7 is OC 2 F 4 OC 3 F 6 OC4 F 8 、 OC 5 F 10 and OC 6 F 12 is a group selected from these groups, or a combination of two or three groups independently selected from these groups, R 6’ is OCF 2 or OC 2 F 4 ; R 7’ is OC 2 F 4 、 OC 3 F 6 、 OC 4 F 8 、 OC 5 F 10 and OC 6 F 12 is a group selected from these groups, or a combination of two or three groups independently selected from these groups, g is an integer from 2 to 100, g’ is an integer from 2 to 100, R r is [Chemical formula] (In the formula, * indicates the bonding position.) ; -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f5) [In the formula, e is an integer of 1 or more and 200 or less, and a, b, c, d, and f are each independently an integer of 0 or more and 200 or less. The order of existence of each repeating unit enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula.] -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f6) [In the formula, f is an integer of 1 or more and 200 or less, and a, b, c, d, and e are each independently an integer of 0 or more and 200 or less. The order of existence of each repeating unit enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula.]

[0094] In the above formula (f1), d is preferably an integer of 5 to 200, more preferably 10 to 100, still more preferably 15 to 50, for example 25 to 35. OC 3 F 6 in the above formula (f1) is preferably (OCF 2 CF 2 CF 2 ), (OCF(CF 3 )CF 2 ), or (OCF 2 CF(CF 3 )) and more preferably (OCF 2 CF 2 CF 2 ). In one aspect, e is 0. In another aspect, e is 1. OC 2 F 4 ) in the above formula (f1) is preferably (OCF 2 CF 2 ) or (OCF(CF 3 )) and more preferably (OCF2 CF 2 ) is.

[0095] In one aspect, in formula (f1), d is an integer of 5 to 50, preferably 10 to 30.

[0096] In one aspect, in formula (f1), e is 1.

[0097] In one aspect, formula (f1) is -(OCF 2 CF 2 CF 2 ) d -OCF 2 CF 2 - [wherein, d is an integer of 10 to 30.] is.

[0098] In the above formula (f2), e and f are each independently preferably an integer of 5 to 200, more preferably 10 to 200. Also, the sum of c, d, e and f is preferably 5 or more, more preferably 10 or more, and may be, for example, 15 or more or 20 or more. In one aspect, the above formula (f2) is preferably -(OCF 2 CF 2 CF 2 CF 2 ) c -(OCF 2 CF 2 CF 2 ) d -(OCF 2 CF 2 ) e -(OCF 2 ) f -represented group. In another aspect, formula (f2) may be -(OC 2 F 4 ) e -(OCF 2 ) f -represented group.

[0099] In one aspect, in formula (f2), e and f are each independently an integer of 5 to 40, preferably 10 to 30.

[0100] In one embodiment, in formula (f2), the sum of c, d, e, and f is an integer from 20 to 60, preferably from 20 to 45, and the order of presence of each repeating unit enclosed in parentheses with c, d, e, or f is arbitrary in the formula.

[0101] In one embodiment, formula (f2) is -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [wherein c and d are each independently 0 or 1, e and f are each independently an integer from 10 to 30, the sum of c, d, e, and f is an integer from 15 to 45, the order of presence of each repeating unit enclosed in parentheses with c, d, e, or f is arbitrary in the formula.]

[0102] In the above formula (f3), R 6 is preferably OCF 2 F 4 . In the above (f3), R 7 is preferably a group selected from OCF 2 F 4 , OCF 3 F 6 and OCF 4 F 8 , or a combination of 2 or 3 groups independently selected from these groups, more preferably OCF 3 F 6 or OCF 4 F 8 . OCF 2 F 4 , OCF 3 F 6 and OCF 4 F 8The combination of two or three groups independently selected from, although not particularly limited, for example, -OC 2 F 4 OC 3 F 6 -,-OC 2 F 4 OC 4 F 8 -,-OC 3 F 6 OC 2 F 4 -,-OC 3 F 6 OC 3 F 6 -,-OC 3 F 6 OC 4 F 8 -,-OC 4 F 8 OC 4 F 8 -,-OC 4 F 8 OC 3 F 6 -,-OC 4 F 8 OC 2 F 4 -,-OC 2 F 4 OC 2 F 4 OC 3 F 6 -,-OC 2 F 4 OC 2 F 4 OC 4 F 8 -,-OC 2 F 4 OC 3 F 6 OC 2 F 4 -,-OC 2 F 4 OC 3 F 6 OC 3 F 6 -,-OC 2 F 4 OC 4 F 8 OC 2 F 4 -,-OC 3 F6 OC 2 F 4 OC 2 F 4 -, -OC 3 F 6 OC 2 F 4 OC 3 F 6 -, -OC 3 F 6 OC 3 F 6 OC 2 F 4 -, and -OC 4 F 8 OC 2 F 4 OC 2 F 4 - etc. are included. In the above formula (f3), g is preferably an integer of 3 or more, more preferably 5 or more. The above g is preferably an integer of 50 or less. In the above formula (f3), OC 2 F 4 , OC 3 F 6 , OC 4 F 8 , OC 5 F 10 and OC 6 F 12 can be either linear or branched, preferably linear. In this embodiment, the above formula (f3) is preferably -(OC 2 F 4 -OC 3 F 6 ) g - or -(OC 2 F 4 -OC 4 F 8 ) g -.

[0103] In the above formula (f4), R 6 , R 7 and g have the same meanings as described in the above formula (f3) and have the same embodiments. R 6’ , R 7’ and g' are respectively the R 6 , R 7and has the same meaning as g and has a similar aspect. R r is preferably [Chemical formula] [In the formula, * indicates the bonding position.] and more preferably [Chemical formula] [In the formula, * indicates the bonding position.] is.

[0104] In the above formula (f5), e is preferably an integer of 1 or more and 100 or less, more preferably 5 or more and 100 or less. The sum of a, b, c, d, e and f is preferably 5 or more, more preferably 10 or more, for example 10 or more and 100 or less.

[0105] In the above formula (f6), f is preferably an integer of 1 or more and 100 or less, more preferably 5 or more and 100 or less. The sum of a, b, c, d, e and f is preferably 5 or more, more preferably 10 or more, for example 10 or more and 100 or less.

[0106] In one aspect, R F is a group represented by the above formula (f1).

[0107] In one aspect, R F is a group represented by the above formula (f2).

[0108] In one aspect, R F is a group represented by the above formula (f3) or (f4).

[0109] In one aspect, the above R F is a group represented by the above formula (f3).

[0110] In one aspect, the above R F is a group represented by the above formula (f4).

[0111] In one aspect, R F is a group represented by the above formula (f5).

[0112] In one aspect, R F is a group represented by the above formula (f6).

[0113] In one aspect, R F is a group represented by the above formula (f1) or (f2).

[0114] R F In R, the ratio of e to f (hereinafter referred to as "e / f ratio") is preferably from 0.1 to 10, more preferably from 0.2 to 5, still more preferably from 0.2 to 2, even more preferably from 0.2 to 1.5, and particularly preferably from 0.2 to 0.85. By setting the e / f ratio to 0.1 or more, the stability of the compound can be further improved. The greater the e / f ratio, the more the stability of the compound can be improved.

[0115] In one aspect, from the viewpoint of heat resistance, the e / f ratio may preferably be 1.0 or more, more preferably from 1.0 to 2.0.

[0116] In the above fluoropolyether group-containing silane compound, R FA1 and R FB2 The number average molecular weight of the part is not particularly limited, but is, for example, from 500 to 30,000, preferably from 1,500 to 30,000, more preferably from 2,000 to 10,000. In the present specification, the number average molecular weight of R FA1 and R FA2 is 19 The value measured by 19F-NMR.

[0117] In the formulas (A1) and (A2), R Si are each independently a hydroxyl group, a hydrolyzable group, a hydrogen atom or a monovalent group containing a Si atom to which a monovalent group is bonded, and at least one R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

[0118] In a preferred embodiment, R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded, more preferably a monovalent group containing a Si atom to which a hydrolyzable group is bonded.

[0119] In a preferred embodiment, R Si is the following formula (S1), (S2), (S3), (S4) or (S5):

Chemical formula

[0120] In the above formula, R 11 is each independently a hydroxyl group or a hydrolyzable group.

[0121] R 11 is preferably each independently a hydrolyzable group.

[0122] R 11 is preferably each independently -OR h1 、-OCOR h1 、-O-N=CR h1 、-NR h1 2 、-NHR h1 、-NCO, or a halogen (in these formulas, R h1 represents a substituted or unsubstituted C 1-4 alkyl group), more preferably -OR h1 (i.e., an alkoxy group). R h1 Examples of R h1 include unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group; and substituted alkyl groups such as chloromethyl group. Among them, alkyl groups, especially unsubstituted alkyl groups, are preferred, and methyl group or ethyl group is more preferred. In one embodiment, R h1 is a methyl group. In another embodiment, R

[0123] In the above formula, R 12Each is independently a hydrogen atom or a monovalent group. Such a monovalent group is a monovalent group excluding the above hydrogen atom, hydroxyl group, and hydrolyzable group.

[0124] The above monovalent group is preferably a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0125] R 12 In, the monovalent group is preferably a C 1-20 alkyl group, more preferably a C 1-6 alkyl group, still more preferably a methyl group.

[0126] In the above formula, n1 is independently an integer of 0 to 3 for each (SiR 11 n1 R 12 3-n1 ) unit. However, when R Si is a group represented by the formula (S1) or (S2), in the R Si portion at the ends of the formula (A1) and the formula (A2) (hereinafter, also simply referred to as the "terminal portion" of the formula (A1) and the formula (A2)), n1 is 1 to 3 and at least one (SiR 11 n1 R 12 3-n1 ) unit exists. That is, in such a terminal portion, all n1 do not simultaneously become 0. In other words, in the terminal portions of the formula (A1) and the formula (A2), there is at least one Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

[0127] n1 is independently, for each (SiR 11 n1 R 12 3-n1 ) unit, preferably an integer of 1 to 3, more preferably 2 or 3, still more preferably 3.

[0128] In the above formula, X 11is, independently of each other, a single bond or a divalent group. Such a divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group. The divalent group is preferably a divalent organic group. Such a divalent organic group is preferably -R 28 -O x -R 29 -(wherein R 28 and R 29 are, independently of each other, a single bond or a C 1-20 alkylene group, and x is 0 or 1.) Such a C 1-20 alkylene group may be linear or branched, but is preferably linear. Such a C 1-20 alkylene group is preferably a C 1-10 alkylene group, more preferably a C 1-6 alkylene group, still more preferably a C 1-3 alkylene group.)

[0129] In one embodiment, X 11 is, independently of each other, -C 1-6 alkylene - O - C 1-6 alkylene - or - O - C 1-6 alkylene -. Note that X 11 is bonded to Si on the right side.)

[0130] In a preferred embodiment, X 11 is, independently of each other, a single bond or a linear C 1-6 alkylene group, preferably a single bond or a linear C 1-3 alkylene group, more preferably a single bond or a linear C 1-2 alkylene group, still more preferably a linear C 1-2 alkylene group.)

[0131] In the above formula, R 13 is, independently of each other, a hydrogen atom or a monovalent organic group. Such a monovalent organic group is preferably a C 1-20 alkyl group. Such a C 1-20 alkyl group may be linear or branched, but is preferably linear.)

[0132] In a preferred embodiment, R 13 is, independently of each other, a hydrogen atom or a linear C 1-6 alkyl group, preferably a hydrogen atom or a linear C 1-3 alkyl group, preferably a hydrogen atom or a methyl group.

[0133] In the above formula, t is, independently of each other, an integer of 2 or more.

[0134] t is, independently of each other, preferably an integer of 2 to 10, more preferably an integer of 2 to 6.

[0135] In the above formula, R 14 is, independently of each other, a hydrogen atom, a halogen atom or -X 11 -SiR 11 n1 R 12 3-n1 is. Such a halogen atom is preferably an iodine atom, a chlorine atom or a fluorine atom, more preferably a fluorine atom. In a preferred embodiment, R 14 is a hydrogen atom.

[0136] In the above formula, R 15 is, in each occurrence, independently of each other, a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkyleneoxy group having 1 to 6 carbon atoms. The alkyleneoxy group is bonded to the carbon atom having R 13 attached thereto.

[0137] In one embodiment, R 15 is, in each occurrence, independently of each other, an oxygen atom, an alkylene group having 1 to 6 carbon atoms or an alkyleneoxy group having 1 to 6 carbon atoms.

[0138] In a preferred embodiment, R 15 is a single bond.

[0139] In one embodiment, formula (S1) is the following formula (S1-a).

Chemical formula

[0140] In a preferred embodiment, the formula (S1) is the following formula (S1-b).

Chemical formula

[0141] In one embodiment, n1 is 3. That is, in one embodiment, the above formula (S1) has R 11 and does not have R 12 .

[0142] In one embodiment, R 11 is -OR h1 (that is, an alkoxy group). Examples of R h1 include unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, and isobutyl group; and substituted alkyl groups such as chloromethyl group.

[0143] R h1 is preferably a methyl group or an ethyl group.

[0144] R h1 is preferably a methyl group. That is, R 11 is -OCH 3is preferred.

[0145] In one aspect, R 13 is a hydrogen atom or a linear C 1-3 alkyl group, preferably a hydrogen atom or a methyl group.

[0146] In one aspect, R 13 is preferably a hydrogen atom.

[0147] In one aspect, X 11 is each independently a single bond or a linear C 1-6 alkylene group, preferably a single bond or a linear C 1-3 alkylene group, more preferably a single bond or a linear C 1-2 alkylene group.

[0148] In one aspect, X 11 is preferably a single bond.

[0149] In one aspect, formula (S1-b) is n1 is 3, R 11 is -OCH 3 and R 13 is a hydrogen atom, X 11 is a single bond, t is an integer from 1 to 6.

[0150] In the above formula, R a1 are each independently -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 wherein.

[0151] Z 1 are each independently a divalent group. Incidentally, the structure described as Z 1 below has the right side as (SiR 21 p1 R 22 q1 R 23r1 is bonded to

[0152] The divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0153] In a preferred embodiment, Z 1 is a divalent organic group.

[0154] In a preferred embodiment, Z 1 is such that it does not form a siloxane bond with the Si atom to which Z 1 is bonded. Preferably, in formula (S3), (Si-Z 1 -Si) does not contain a siloxane bond.

[0155] The above Z 1 is preferably a C 1-6 alkylene group, -(CH 2 ) z1 -O-(CH 2 ) z2 -(wherein z1 is an integer from 0 to 6, for example an integer from 1 to 6, and z2 is an integer from 0 to 6, for example an integer from 1 to 6) or -(CH 2 ) z3 -phenylene-(CH 2 ) z4 -(wherein z3 is an integer from 0 to 6, for example an integer from 1 to 6, and z4 is an integer from 0 to 6, for example an integer from 1 to 6). Such a C 1-6 alkylene group may be linear or branched, but is preferably linear. These groups may be substituted by one or more substituents selected from, for example, a fluorine atom, a C 1-6 alkyl group, a C 2-6 alkenyl group, and a C 2-6 alkynyl group, but is preferably unsubstituted.

[0156] In a preferred embodiment, Z 1 is a C 1-6 alkylene group or -(CH 2 ) z3 -phenylene-(CH2 ) z4 -, preferably -phenylene-(CH 2 ) z4 -. When Z is such a group, the light resistance, especially the ultraviolet resistance, can be higher. 1 When Z is such a group, the light resistance, especially the ultraviolet resistance, can be higher.

[0157] In another preferred embodiment, the above Z 1 is a C 1-3 alkylene group. In one embodiment, Z 1 is -CH 2 CH 2 CH 2 -. In another embodiment, Z 1 is -CH 2 CH 2 -.

[0158] R 21 are each independently -Z 1’ -SiR 21’ p1’ R 22’ q1’ R 23’ r1’ .

[0159] The above Z 1’ are each independently divalent groups. Incidentally, the structures described below as Z 1’ are bonded to the right side to (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ).

[0160] The above divalent groups are preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0161] In a preferred embodiment, Z 1’ is a divalent organic group.

[0162] In a preferred embodiment, Z 1’ is Z 1’does not include those that form a siloxane bond with the Si atom to which it is bonded. Preferably, in formula (S3), (Si-Z 1’ -Si) does not include a siloxane bond.

[0163] The above Z 1’ is preferably a C 1-6 alkylene group, -(CH 2 ) z1’ -O-(CH 2 ) z2’ -(wherein z1' is an integer from 0 to 6, for example, an integer from 1 to 6, and z2' is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH 2 ) z3’ -phenylene-(CH 2 ) z4’ -(wherein z3' is an integer from 0 to 6, for example, an integer from 1 to 6, and z4' is an integer from 0 to 6, for example, an integer from 1 to 6). Such a C 1-6 alkylene group may be linear or branched, but is preferably linear. These groups may be substituted by one or more substituents selected from, for example, a fluorine atom, a C 1-6 alkyl group, a C 2-6 alkenyl group, and a C 2-6 alkynyl group, but is preferably unsubstituted.

[0164] In a preferred embodiment, Z 1’ is a C 1-6 alkylene group or -(CH 2 ) z3’ -phenylene-(CH 2 ) z4’ -, preferably -phenylene-(CH 2 ) z4’ -. When Z 1’ is such a group, the light resistance, especially the ultraviolet resistance, can be higher.

[0165] In another preferred embodiment, the above Z 1’ is a C 1-3 alkylene group. In one embodiment, Z 1’ is -CH 2 CH 2CH 2 - can be. In another aspect, Z 1’ is, -CH 2 CH 2 - can be.

[0166] R 21’ are each independently, -Z 1” -SiR 22” q1” R 23” r1” is.

[0167] The above Z 1” are each independently a divalent group. Incidentally, the structure described below as Z 1” is bonded to the right side to (SiR 22” q1” R 23” r1” ).

[0168] The above divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0169] In a preferred aspect, Z 1” is a divalent organic group.

[0170] In a preferred aspect, Z 1” does not include those that form a siloxane bond with the Si atom to which Z 1” is bonded. Preferably, in formula (S3), (Si-Z 1” -Si) does not include a siloxane bond.

[0171] The above Z 1” is preferably a C 1-6 alkylene group, -(CH 2 ) z1” -O-(CH 2 ) z2” -(wherein, z1” is an integer from 0 to 6, for example, an integer from 1 to 6, and z2” is an integer from 0 to 6, for example, an integer from 1 to 6) or, -(CH 2 ) z3” -phenylene-(CH 2 )z4” -(wherein, z3” is an integer from 0 to 6, for example, an integer from 1 to 6, and z4” is an integer from 0 to 6, for example, an integer from 1 to 6). Such C 1-6 The alkylene group may be linear or branched, but is preferably linear. These groups are, for example, a fluorine atom, C 1-6 alkyl group, C 2-6 alkenyl group, and C 2-6 alkynyl group, and may be substituted by one or more substituents selected therefrom, but is preferably unsubstituted.

[0172] In a preferred embodiment, Z 1” is a C 1-6 alkylene group or -(CH 2 ) z3” -phenylene-(CH 2 ) z4” -, preferably -phenylene-(CH 2 ) z4” -. When Z 1” is such a group, the light resistance, particularly the ultraviolet resistance, can be higher.

[0173] In another preferred embodiment, the above Z 1” is a C 1-3 alkylene group. In one embodiment, Z 1” is -CH 2 CH 2 CH 2 -. In another embodiment, Z 1” is -CH 2 CH 2 -.

[0174] R 22” are each independently a hydroxyl group or a hydrolyzable group.

[0175] R 22” are preferably each independently a hydrolyzable group.

[0176] R 22” are preferably each independently -OR h1 , -OCOR h1, -O-N=CR h1 2 , -NR h1 2 , -NHR h1 , -NCO, or a halogen (in these formulas, R h1 represents a substituted or unsubstituted C 1-4 alkyl group), more preferably -OR h1 (i.e., an alkoxy group). R h1 Examples of R include unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group; and substituted alkyl groups such as chloromethyl group. Among them, alkyl groups, especially unsubstituted alkyl groups, are preferred, and methyl group or ethyl group is more preferred. In one embodiment, R h1 is a methyl group, and in another embodiment, R h1 is an ethyl group.

[0177] R 23” are each independently a hydrogen atom or a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0178] In one embodiment, the monovalent organic group is a C 1-20 alkyl group, more preferably a C 1-6 alkyl group, still more preferably a methyl group.

[0179] q1” are each independently an integer from 0 to 3, and the above r1” are each independently an integer from 0 to 3. Incidentally, the sum of q1” and r1” is 3 in the (SiR 22” q1” R 23” r1” ) unit.

[0180] The above q1” are each independently preferably an integer from 1 to 3, more preferably 2 to 3, still more preferably 3, for each (SiR 22” q1” R 23” r1” ) unit.

[0181] R22’ is, independently of each other, a hydroxyl group or a hydrolyzable group.

[0182] R 22’ is preferably, independently of each other, a hydrolyzable group.

[0183] R 22’ is preferably, independently of each other, -OR h1 , -OCOR h1 , -O-N=CR h1 2 , -NR h1 2 , -NHR h1 , -NCO, or a halogen (in these formulas, R h1 represents a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR h1 (that is, an alkoxy group). As R h1 , there may be mentioned unsubstituted alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group; and substituted alkyl groups such as a chloromethyl group. Among them, an alkyl group, particularly an unsubstituted alkyl group, is preferable, and a methyl group or an ethyl group is more preferable. In one aspect, R h1 is a methyl group, and in another aspect, R h1 is an ethyl group.

[0184] R 23’ is, independently of each other, a hydrogen atom or a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above-mentioned hydrolyzable group.

[0185] In one aspect, the monovalent organic group is a C 1-20 alkyl group, more preferably a C 1-6 alkyl group, still more preferably a methyl group.

[0186] The above p1' is, independently of each other, an integer of 0 to 3, q1' is, independently of each other, an integer of 0 to 3, and r1' is, independently of each other, an integer of 0 to 3. Incidentally, the sum of p', q1' and r1' is (SiR 21’p1’ R 22’ q1’ R 23’ r1’ ) In the unit, it is 3.

[0187] In one aspect, p1' is 0.

[0188] In one aspect, p1' is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) For each unit, it may be independently an integer from 1 to 3, an integer from 2 to 3, or 3. In a preferred aspect, p1' is 3.

[0189] In one aspect, q1' is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) For each unit, it is independently an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0190] In one aspect, p1' is 0 and q1' is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) For each unit, it is independently an integer from 1 to 3, preferably 2 or 3, even more preferably 3.

[0191] R 22 are each independently a hydroxyl group or a hydrolyzable group.

[0192] R 22 are preferably each independently a hydrolyzable group.

[0193] R 22 are preferably each independently -OR h1 , -OCOR h1 , -O-N=CR h12 、 -NR h1 2 、 -NHR h1 、 -NCO, or a halogen (in these formulas, R h1 represents a substituted or unsubstituted C 1-4 alkyl group), more preferably -OR h1 (i.e., an alkoxy group). As R h1 , examples include unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group; and substituted alkyl groups such as chloromethyl group. Among them, alkyl groups, especially unsubstituted alkyl groups, are preferred, and methyl group or ethyl group is more preferred. In one embodiment, R h1 is a methyl group, and in another embodiment, R h1 is an ethyl group.

[0194] In one embodiment, R 22 is -OR h1 (i.e., an alkoxy group). As R h1 , examples include unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group; and substituted alkyl groups such as chloromethyl group.

[0195] As R h1 , methyl group or ethyl group is preferred.

[0196] As R h1 , methyl group is preferred. That is, R 22 is preferably -OCH 3 .

[0197] Each R 23 is independently a hydrogen atom or a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above hydrolyzable groups.

[0198] In one embodiment, the monovalent organic group is a C 1-20 alkyl group, more preferably a C 1-6 alkyl group, still more preferably a methyl group.

[0199] Each of the above p1 is independently an integer from 0 to 3, each of q1 is independently an integer from 0 to 3, and each of r1 is independently an integer from 0 to 3. Incidentally, the sum of p1, q1 and r1 is 3 in terms of (SiR 21 p1 R 22 q1 R 23 r1 ) units.

[0200] In one embodiment, p1 is 0.

[0201] In one embodiment, p1 may be independently an integer from 1 to 3, an integer from 2 to 3, or 3 for each (SiR 21 p1 R 22 q1 R 23 r1 ) unit. In a preferred embodiment, p1 is 3.

[0202] In one embodiment, q1 is independently an integer from 1 to 3 for each (SiR 21 p1 R 22 q1 R 23 r1 ) unit, preferably 2 or 3, more preferably 3.

[0203] In one embodiment, p1 is 0 and q1 is independently an integer from 1 to 3 for each (SiR 21 p1 R 22 q1 R 23 r1 ) unit, preferably 2 or 3, even more preferably 3.

[0204] In the above formula, each R b1 is independently a hydroxyl group or a hydrolyzable group.

[0205] R b1 is preferably independently a hydrolyzable group.

[0206] R b1 is preferably, each independently, -OR h1 , -OCOR h1 , -O-N=CR h1 2 , -NR h1 2 , -NHR h1 , -NCO, or a halogen (in these formulas, R h1 represents a substituted or unsubstituted C 1-4 alkyl group), more preferably -OR h1 (i.e., an alkoxy group). As R h1 , there may be mentioned unsubstituted alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group; substituted alkyl groups such as a chloromethyl group. Among them, an alkyl group, particularly an unsubstituted alkyl group, is preferred, and a methyl group or an ethyl group is more preferred. In one embodiment, R h1 is a methyl group, and in another embodiment, R h1 is an ethyl group.

[0207] In the above formula, R c1 is each independently a hydrogen atom or a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0208] In one embodiment, the monovalent organic group is a C 1-20 alkyl group, more preferably a C 1-6 alkyl group, still more preferably a methyl group.

[0209] The above k1 is each independently an integer from 0 to 3, l1 is each independently an integer from 0 to 3, and m1 is each independently an integer from 0 to 3. Incidentally, the sum of k1, l1, and m1 is 3 in the (SiR a1 k1 R b1 l1 R c1 m1 ) unit.

[0210] In one aspect, k1 is, for each (SiR a1 k1 R b1 l1 R c1 m1 ) unit, independently of one another, an integer from 1 to 3, preferably 2 or 3, more preferably 3. In a preferred aspect, k1 is 3.

[0211] In formulas (A1) and (A2), when R Si is a group represented by formula (S3), preferably, at least two Si atoms bonded to a hydroxyl group or a hydrolyzable group are present at the terminal portions of formulas (A1) and (A2).

[0212] In a preferred aspect, the group represented by formula (S3) is -Z 1 -SiR 22 q1 R 23 r1 (wherein q1 is an integer from 1 to 3, preferably 2 or 3, more preferably 3, and r1 is an integer from 0 to 2), -Z 1’ -SiR 22’ q1’ R 23’ r1’ (wherein q1' is an integer from 1 to 3, preferably 2 or 3, more preferably 3, and r1' is an integer from 0 to 2), or -Z 1” -SiR 22” q1” R 23” r1” (wherein q1'' is an integer from 1 to 3, preferably 2 or 3, more preferably 3, and r1'' is an integer from 0 to 2). Z 1 、Z 1’ 、Z 1” 、R 22 、R 23 、R 22’ 、R 23’ 、R 22” 、and R 23” have the same meanings as described above.

[0213] In a preferred aspect, in formula (S3), R 21’When it exists, at least one, preferably all, of the Rs 21’ In this case, q1” is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0214] In a preferred embodiment, in formula (S3), when R 21 exists, at least one, preferably all, of the Rs 21 In this case, p1’ is 0, and q1’ is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0215] In a preferred embodiment, in formula (S3), when R a1 exists, at least one, preferably all, of the Rs a1 In this case, p1 is 0, and q1 is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0216] In a preferred embodiment, in formula (S3), k1 is 2 or 3, preferably 3, p1 is 0, and q1 is 2 or 3, preferably 3.

[0217] In one embodiment, k1 is, independently of each other, 3, and l1 and m1 are, independently of each other, 0.

[0218] In one embodiment, formula (S3) does not contain a siloxane bond.

[0219] In one embodiment, the above formula of formula (S3) is k1 is, independently of each other, 3, l1 is, independently of each other, 0, m1 is, independently of each other, 0, R a1 is, independently of each other, -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 and Z 1 is C1-3 is an alkylene group, p1 is 0, q1 is 3, r1 is 0, R 22 is -OCH 3 .

[0220] R d1 are each independently -Z 2 -CR 31 p2 R 32 q2 R 33 r2 .

[0221] Z 2 are each independently a single bond or a divalent group. Note that the structure described as Z 2 below is bonded on the right side to (CR 31 p2 R 32 q2 R 33 r2 ).

[0222] The above divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0223] Z 2 are each independently preferably an oxygen atom or a divalent organic group, more preferably a divalent organic group.

[0224] The above Z 2 is preferably a C 1-6 alkylene group, -(CH 2 ) z5 -O-(CH 2 ) z6 -(wherein z5 is an integer from 0 to 6, for example an integer from 1 to 6, and z6 is an integer from 0 to 6, for example an integer from 1 to 6) or, -(CH 2 ) z7 -phenylene-(CH 2 ) z8-(wherein, z7 is an integer from 0 to 6, for example, an integer from 1 to 6, and z8 is an integer from 0 to 6, for example, an integer from 1 to 6). Such C 1-6 The alkylene group may be linear or branched, but is preferably linear. These groups are, for example, a fluorine atom, C 1-6 alkyl group, C 2-6 alkenyl group, and C 2-6 alkynyl group, and may be substituted with one or more substituents selected therefrom, but is preferably unsubstituted.

[0225] In a preferred embodiment, Z 2 is a C 1-6 alkylene group or -(CH 2 ) z7 -phenylene-(CH 2 ) z8 -, preferably -phenylene-(CH 2 ) z8 -. When Z 2 is such a group, the light resistance, particularly the ultraviolet resistance, can be higher.

[0226] In another preferred embodiment, the above Z 2 is a C 1-3 alkylene group. In one embodiment, Z 2 is -CH 2 CH 2 CH 2 -. In another embodiment, Z 2 is -CH 2 CH 2 -.

[0227] R 31 are each independently -Z 2’ -CR 32’ q2’ R 33’ r2’ .

[0228] Z 2’ are each independently a single bond or a divalent group. Incidentally, the structure described as Z 2’ below has the right side as (CR 32’ q2’R 33’ r2’ ) is bonded to

[0229] The divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0230] Z 2’ is each independently preferably an oxygen atom or a divalent organic group, more preferably a divalent organic group.

[0231] The above Z 2’ is preferably C 1-6 alkylene group, -(CH 2 ) z5’ -O-(CH 2 ) z6’ -(wherein, z5’ is an integer from 0 to 6, for example, an integer from 1 to 6, and z6’ is an integer from 0 to 6, for example, an integer from 1 to 6) or, -(CH 2 ) z7’ -phenylene-(CH 2 ) z8’ -(wherein, z7’ is an integer from 0 to 6, for example, an integer from 1 to 6, and z8’ is an integer from 0 to 6, for example, an integer from 1 to 6). Such C 1-6 alkylene group may be linear or branched, but is preferably linear. These groups may be substituted by one or more substituents selected from, for example, a fluorine atom, a C 1-6 alkyl group, a C 2-6 alkenyl group, and a C 2-6 alkynyl group, but is preferably unsubstituted.

[0232] In a preferred embodiment, Z 2’ is a C 1-6 alkylene group or -(CH 2 ) z7’ -phenylene-(CH 2 ) z8’ -, preferably -phenylene-(CH 2 ) z8’ -. When Z 2’ is such a group, the light resistance, particularly the ultraviolet resistance, can be higher.

[0233] In another preferred embodiment, the above Z 2’ is a C 1-3 alkylene group. In one embodiment, Z 2’ is -CH 2 CH 2 CH 2 -. In another embodiment, Z 2’ is -CH 2 CH 2 -.

[0234] R 32’ are each independently -Z 3 -SiR 34 n2 R 35 3-n2 .

[0235] The above Z 3 are each independently a single bond or a divalent group. Note that the structure described as Z 3 below is bonded to the right side to (SiR 34 n2 R 35 3-n2 ).

[0236] The above divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0237] Z 3 are each independently preferably an oxygen atom or a divalent organic group, more preferably a divalent organic group.

[0238] In one embodiment, Z 3 is an oxygen atom.

[0239] In one embodiment, Z 3 is a divalent organic group.

[0240] The above Z 3 is preferably a C 1-6 alkylene group, -(CH 2 )z5” -O-(CH 2 ) z6” -(wherein, z5” is an integer from 0 to 6, for example, an integer from 1 to 6, and z6” is an integer from 0 to 6, for example, an integer from 1 to 6) or -(CH 2 ) z7” -phenylene-(CH 2 ) z8” -(wherein, z7” is an integer from 0 to 6, for example, an integer from 1 to 6, and z8” is an integer from 0 to 6, for example, an integer from 1 to 6). Such a C 1-6 alkylene group may be linear or branched, but is preferably linear. These groups may be substituted by one or more substituents selected from, for example, a fluorine atom, a C 1-6 alkyl group, a C 2-6 alkenyl group, and a C 2-6 alkynyl group, but is preferably unsubstituted.

[0241] In a preferred embodiment, Z 3 is a C 1-6 alkylene group or -(CH 2 ) z7” -phenylene-(CH 2 ) z8” -, preferably -phenylene-(CH 2 ) z8” -. When Z 3 is such a group, the light resistance, particularly the ultraviolet resistance, can be higher.

[0242] In another preferred embodiment, the above Z 3 is a C 1-3 alkylene group. In one embodiment, Z 3 can be -CH 2 CH 2 CH 2 -. In another embodiment, Z 3 can be -CH 2 CH 2 -.

[0243] Each R 34 is independently a hydroxyl group or a hydrolyzable group.

[0244] R 34 is preferably, each independently, a hydrolyzable group.

[0245] R 34 is preferably, each independently, -OR h1 , -OCOR h1 , -O-N=CR h1 2 , -NR h1 2 , -NHR h1 , -NCO, or halogen (in these formulas, R h1 represents a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR h1 (i.e., an alkoxy group). As R h1 , there may be mentioned unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group; substituted alkyl groups such as chloromethyl group. Among them, alkyl groups, particularly unsubstituted alkyl groups, are preferred, and methyl group or ethyl group is more preferred. In one aspect, R h1 is a methyl group, and in another aspect, R h1 is an ethyl group.

[0246] In one aspect, R 34 is -OR h1 (i.e., an alkoxy group). As R h1 , there may be mentioned unsubstituted alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group; substituted alkyl groups such as chloromethyl group.

[0247] R h1 is preferably a methyl group or an ethyl group.

[0248] R h1 is preferably a methyl group. That is, R 34 is preferably -OCH 3 .

[0249] R 35Each is independently a hydrogen atom or a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0250] R 35 In, the monovalent organic group is preferably a C 1-20 alkyl group, more preferably a C 1-6 alkyl group, still more preferably a methyl group.

[0251] In the above formula, n2 is independently an integer of 0 to 3 for each (SiR 34 n2 R 35 3-n2 ) unit. However, when R Si is a group represented by the formula (S4), at the terminal portions of the formulas (A1) and (A2), n2 is 1 to 3 and at least one (SiR 34 n2 R 35 3-n2 ) unit exists. That is, in such a terminal portion, all n2 do not simultaneously become 0. In other words, at the terminal portions of the formulas (A1) and (A2), at least one Si atom to which a hydroxyl group or a hydrolyzable group is bonded exists.

[0252] n2 is independently preferably an integer of 1 to 3 for each (SiR 34 n2 R 35 3-n2 ) unit, more preferably 2 or 3, still more preferably 3.

[0253] R 33’ Each is independently a hydrogen atom, a hydroxyl group or a monovalent organic group. Such a monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0254] R 33’ In, the monovalent organic group is preferably a C 1-20 alkyl group or R 41’ -(OR 42’ ) y1’ -O y2’ -(wherein R 41’is a hydrogen atom or a C 1-6 alkyl group, and R 42’ are each independently a C 1-6 alkylene group, y1’ is an integer from 1 to 30, and y2’ is 0 or 1. It may be a group represented by).

[0255] In one embodiment, R 41’ is a hydrogen atom.

[0256] In another embodiment, R 41’ is a C 1-6 alkyl group, preferably a C 1-3 alkyl group.

[0257] R 42’ are each independently a C 1-6 alkylene group, preferably a C 1-3 alkylene group, more preferably a C 2-3 alkylene group.

[0258] y1’ is an integer from 1 to 30, preferably an integer from 1 to 20, more preferably an integer from 1 to 10, even more preferably an integer from 2 to 10, for example, an integer from 2 to 6, an integer from 2 to 4, an integer from 3 to 6, or an integer from 4 to 6.

[0259] In one embodiment, R 33’ is a hydroxyl group.

[0260] In another embodiment, R 33’ is a C 1-20 alkyl group, more preferably a C 1-6 alkyl group.

[0261] In another embodiment, R 33’ is R 41’ -(OR 42’ ) y1’ -O y2’ -.

[0262] Each of the above q2’ is independently an integer from 0 to 3, and each of the above r2’ is independently an integer from 0 to 3. In addition, the sum of q2’ and r2’ is 3 in terms of the (CR 32’ q2’ R 33’ r2’ ) unit.

[0263] q2’ is, independently for each (CR 32’ q2’ R 33’ r2’ ) unit, preferably an integer from 1 to 3, more preferably 2 or 3, and even more preferably 3.

[0264] R 32 is, independently for each, -Z 3 -SiR 34 n2 R 35 3-n2 is. Such -Z 3 -SiR 34 n2 R 35 3-n2 is synonymous with the description in the above R 32’ .

[0265] R 33 is, independently for each, a hydrogen atom, a hydroxyl group or a monovalent organic group. Such monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0266] R 33 in, the monovalent organic group is preferably a C 1-20 alkyl group or R 41 -(OR 42 ) y1 -O y2 -(wherein R 41 is a hydrogen atom or a C 1-6 alkyl group, and R 42 are, independently for each, C 1-6 alkylene groups, y1 is an integer from 1 to 30, and y2 is 0 or 1.) may be a group represented by.

[0267] In one aspect, R41 is a hydrogen atom.

[0268] In another embodiment, R 41 is C 1-6 alkyl group, preferably C 1-3 alkyl group.

[0269] R 42 are each independently C 1-6 alkylene group, preferably C 1-3 alkylene group, more preferably C 2-3 alkylene group.

[0270] y1 is an integer from 1 to 30, preferably an integer from 1 to 20, more preferably an integer from 1 to 10, even more preferably an integer from 2 to 10, for example, an integer from 2 to 6, an integer from 2 to 4, an integer from 3 to 6, or an integer from 4 to 6.

[0271] In one embodiment, R 33 is a hydroxyl group.

[0272] In another embodiment, R 33 is C 1-20 alkyl group, more preferably C 1-6 alkyl group.

[0273] In another embodiment, R 33 is R 41 -(OR 42 ) y1 -O y2 -.

[0274] Each of the above p2 is independently an integer from 0 to 3, each of q2 is independently an integer from 0 to 3, and each of r2 is independently an integer from 0 to 3. Note that the sum of p2, q2, and r2 is 3 in the (CR 31 p2 R 32 q2 R 33 r2 ) unit.

[0275] In one aspect, p2 is 0.

[0276] In one aspect, p2 may be, independently for each (CR 31 p2 R 32 q2 R 33 r2 ) unit, an integer from 1 to 3, an integer from 2 to 3, or 3. In a preferred aspect, p2 is 3.

[0277] In one aspect, q2 is, independently for each (CR 31 p2 R 32 q2 R 33 r2 ) unit, an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0278] In one aspect, p2 is 0 and q2 is, independently for each (CR 31 p2 R 32 q2 R 33 r2 ) unit, an integer from 1 to 3, preferably 2 or 3, even more preferably 3.

[0279] R e1 is, independently for each, -Z 3 -SiR 34 n2 R 35 3-n2 such that -Z 3 -SiR 34 n2 R 35 3-n2 is as defined for the above R 32’ above.

[0280] R f1 is, independently for each, a hydrogen atom, a hydroxyl group, or a monovalent organic group. Such monovalent organic group is a monovalent organic group excluding the above hydrolyzable group.

[0281] R f1In this case, the monovalent organic group is preferably C 1-20 an alkyl group or R 43 -(OR 44 ) y3 -O y4 -(wherein R 43 is a hydrogen atom or a C 1-6 alkyl group, and R 44 are each independently a C 1-6 alkylene group, y3 is an integer from 1 to 30, and y4 is 0 or 1.) It may be a group represented by.

[0282] In one embodiment, R 43 is a hydrogen atom.

[0283] In another embodiment, R 43 is a C 1-6 alkyl group, preferably a C 1-3 alkyl group.

[0284] R 44 are each independently a C 1-6 alkylene group, preferably a C 1-3 alkylene group, more preferably a C 2-3 alkylene group.

[0285] y3 is an integer from 1 to 30, preferably an integer from 1 to 20, more preferably an integer from 1 to 10, even more preferably an integer from 2 to 10, for example, an integer from 2 to 6, an integer from 2 to 4, an integer from 3 to 6, or an integer from 4 to 6.

[0286] In one embodiment, R f1 is a hydroxyl group.

[0287] In another embodiment, R f1 is a C 1-20 alkyl group, more preferably a C 1-6 alkyl group.

[0288] In another embodiment, R f1 is R 43 -(OR 44 ) y3 -Oy4 - is.

[0289] The above k2 are each independently an integer from 0 to 3, l2 are each independently an integer from 0 to 3, and m2 are each independently an integer from 0 to 3. Incidentally, the sum of k2, l2 and m2 is (CR d1 k2 R e1 l2 R f1 m2 ) unit is 3.

[0290] In one embodiment, k2 are each independently 0, l2 are each independently 3, and m2 are each independently 0.

[0291] In formulas (A1) and (A2), when R Si is a group represented by formula (S4), preferably, at least two Si atoms bonded to a hydroxyl group or a hydrolyzable group are present at the terminal portions of formulas (A1) and (A2).

[0292] In one embodiment, when R Si is a group represented by formula (S4), n2 is 1 to 3, preferably 2 or 3, more preferably 3 (SiR 34 n2 R 35 3-n2 ) units are present in each terminal portion of formulas (A1) and (A2) in two or more, for example, 2 to 27, preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 3, particularly preferably 3.

[0293] In a preferred embodiment, in formula (S4), when R 32’ is present, in at least one, preferably all, of R 32’ , n2 is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0294] In a preferred embodiment, in formula (S4), when R 32 is present, in at least one, preferably all, of R32 In this case, n2 is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0295] In a preferred embodiment, in formula (S4), R e1 when present, at least one, preferably all, of the R a1 In this case, n2 is an integer from 1 to 3, preferably 2 or 3, more preferably 3.

[0296] In a preferred embodiment, in formula (S4), k2 is 0, l2 is 2 or 3, preferably 3, and n2 is 2 or 3, preferably 3.

[0297] In one embodiment, formula (S4) does not contain a siloxane bond.

[0298] In one embodiment, the above formula of formula (S4) is k2 is, independently of each other, 0, l2 is, independently of each other, 3, m2 is, independently of each other, 0, R e1 is, independently of each other, -Z 3 -SiR 34 n2 R 35 3-n2 where Z 3 is a C 1-3 alkylene group, R 34 is -OCH 3 where n2 is, independently of each other, 3

[0299] R g1 and R h1 are, independently of each other, -Z 4 -SiR 11 n1 R 12 3-n1 -Z 4 -SiR a1 k1 R b1 l1R c1 m1 ,-Z 4 -CR d1 k2 R e1 l2 R f1 m2 is as follows. Here, R 11 , R 12 , R a1 , R b2 , R c1 , R d1 , R e1 , R f1 , n1, k1, l1, m1, k2, l2, and m2 have the same meanings as defined above.

[0300] In a preferred embodiment, R g1 and R h1 are each independently, -Z 4 -SiR 11 n1 R 12 3-n1 .

[0301] The above Z 4 is each independently a single bond or a divalent group. Note that the structure described as Z 4 below is bonded to the right side at (SiR 11 n1 R 12 3-n1 ).

[0302] The above divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group.

[0303] Z 4 is each independently preferably an oxygen atom or a divalent organic group, more preferably a divalent organic group.

[0304] In one embodiment, Z 4 is an oxygen atom.

[0305] In one embodiment, Z 4 is a divalent organic group.

[0306] The above Z 4 is preferably a C 1-6 alkylene group, -(CH 2 ) z5” -O-(CH 2 ) z6” -(wherein, z5” is an integer from 0 to 6, for example, an integer from 1 to 6, and z6” is an integer from 0 to 6, for example, an integer from 1 to 6) or, -(CH 2 ) z7” -phenylene-(CH 2 ) z8” -(wherein, z7” is an integer from 0 to 6, for example, an integer from 1 to 6, and z8” is an integer from 0 to 6, for example, an integer from 1 to 6). Such a C 1-6 alkylene group may be linear or branched, but is preferably linear. These groups may be substituted by one or more substituents selected from, for example, a fluorine atom, a C 1-6 alkyl group, a C 2-6 alkenyl group, and a C 2-6 alkynyl group, but is preferably unsubstituted.

[0307] In a preferred embodiment, Z 4 is a C 1-6 alkylene group or -(CH 2 ) z7” -phenylene-(CH 2 ) z8” -, preferably -phenylene-(CH 2 ) z8” -. When Z 3 is such a group, the light resistance, especially the ultraviolet resistance, can be higher.

[0308] In another preferred embodiment, the above Z 4 is a C 1-3 alkylene group. In one embodiment, Z 4 can be -CH 2 CH 2 CH 2 -. In another embodiment, Z 4 can be -CH 2 CH 2 -.

[0309] In one embodiment, R Si is a group represented by formula (S2), (S3), (S4) or (S5).

[0310] In one embodiment, R Si is a group represented by formula (S1), (S3), (S4) or (S5). Since these compounds have a plurality of hydrolyzable groups at one end, they can adhere strongly to the substrate.

[0311] In one embodiment, R Si is a group represented by formula (S1), (S3) or (S4). Since these compounds have a plurality of hydrolyzable groups at one end, they can adhere strongly to the substrate.

[0312] In one embodiment, R Si is a group represented by formula (S3) or (S4).

[0313] In one embodiment, R Si is a group represented by formula (S1).

[0314] In one embodiment, R Si is a group represented by formula (S2).

[0315] In one embodiment, R Si is a group represented by formula (S3).

[0316] In one embodiment, R Si is a group represented by formula (S4).

[0317] In one embodiment, R Si is a group represented by formula (S5).

[0318] In one embodiment, R Si is a group represented by formula (S1-b), (S3) or (S4).

[0319] In formulas (A1) and (A2), X Ais a linker that connects the fluoropolyether moiety (R FA1 and R FA2 ) and the moiety (R Si ) that provides the binding ability to the substrate. Therefore, the X A may be a single bond or any group as long as the compounds represented by the formulas (A1) and (A2) can stably exist.

[0320] In formula (A1), α1 is an integer from 1 to 9, and β1 is an integer from 1 to 9. These α1 and β1 can vary according to the valence of X A . The sum of α1 and β1 is the same as the valence of X A . For example, when X A is a 10-valent group, the sum of α1 and β1 is 10. For example, α1 can be 9 and β1 can be 1, α1 can be 5 and β1 can be 5, or α1 can be 1 and β1 can be 9. Also, when X A is a divalent group, α1 and β1 are 1.

[0321] In formula (A2), γ is an integer from 1 to 9. γ can vary according to the valence of X A . That is, γ is the value obtained by subtracting 1 from the valence of X A .

[0322] X A are each independently a single bond or a group with a valence of 2 to 10.

[0323] X A are each independently preferably a single bond or an organic group with a valence of 2 to 10.

[0324] In one aspect, X A does not contain a siloxane bond (-Si-O-Si-).

[0325] The above X AThe divalent to decavalent groups herein are preferably divalent to octavalent groups. In one embodiment, such divalent to decavalent groups are preferably divalent to tetravalent groups, more preferably divalent groups. In another embodiment, such divalent to decavalent groups are preferably trivalent to octavalent groups, more preferably trivalent to hexavalent groups.

[0326] In one embodiment, X A is a single bond or a divalent group, α1 is 1, and β1 is 1.

[0327] In one embodiment, X A is a single bond or a divalent group, and γ is 1.

[0328] The above divalent group is preferably an oxygen atom, a sulfur atom, NH, CO, or a divalent organic group, more preferably an oxygen atom or a divalent organic group, still more preferably a divalent organic group.

[0329] In one embodiment, X A is a trivalent to hexavalent group, preferably a trivalent to hexavalent organic group, α1 is 1, and β1 is 2 to 5.

[0330] In one embodiment, X A is a trivalent to hexavalent group, preferably a trivalent to hexavalent organic group, and γ is 2 to 5.

[0331] In one embodiment, X A is a trivalent group, preferably a trivalent organic group, α1 is 1, and β1 is 2.

[0332] In one embodiment, X A is a trivalent group, preferably a trivalent organic group, and γ is 2.

[0333] When X A is a single bond or a divalent group, formulas (A1) and (A2) are represented by the following formulas (A1') and (A2').

Chemical formula

[0334] In one embodiment, X A is a single bond.

[0335] In another embodiment, X A is a divalent organic group.

[0336] In one embodiment, X A is, for example, a single bond or the following formula: -(R 51 ) p5 -(X 51 ) q5 - [wherein: R 51 is a single bond, -(CH 2 ) s5 -, or an o-, m-, or p-phenylene group, preferably -(CH 2 ) s5 -, s5 is an integer from 1 to 20, preferably an integer from 1 to 6, more preferably an integer from 1 to 3, and even more preferably 1 or 2, X 51 is -(X 52 ) l5 -, X 52 are each independently, -O-, -S-, o-, m-, or p-phenylene group, -C(O)O-, -Si(R 53 ) 2 -, -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -, -CONR 54 -, -O-CONR 54 -, -NR 54 -, and -(CH 2 ) n5 - represents a group selected from the group consisting of, R 53 are each independently, a phenyl group, C 1-6 alkyl group or C 1-6 alkoxy group, preferably a phenyl group or C 1-6 alkyl group, more preferably a methyl group, R 54 each independently represents a hydrogen atom, a phenyl group or a C 1-6 alkyl group (preferably a methyl group), m5, in each occurrence, is each independently an integer from 1 to 100, preferably an integer from 1 to 20; n5, in each occurrence, is each independently an integer from 1 to 20, preferably an integer from 1 to 6, more preferably an integer from 1 to 3; l5 is an integer from 1 to 10, preferably an integer from 1 to 5, more preferably an integer from 1 to 3; p5 is 0 or 1; q5 is 0 or 1; wherein at least one of p5 and q5 is 1, and the order of presence of each repeating unit enclosed in parentheses with p5 or q5 is arbitrary, and the right side is bonded to R Si .] Examples of the divalent organic group represented by include X A (typically the hydrogen atom of X A ) which may be substituted with one or more substituents selected from a fluorine atom, a C 1-3 alkyl group and a C 1-3 fluoroalkyl group. In a preferred embodiment, X A is not substituted with these groups.

[0337] In a preferred embodiment, the above X A each independently is -(R 51 ) p5 -(X 51 ) q5 -R 52 -. R 52 represents a single bond, -(CH 2 ) t5 - or an o-, m- or p-phenylene group, preferably -(CH 2 ) t5 -. t5 is an integer from 1 to 20, preferably an integer from 2 to 6, more preferably an integer from 2 to 3. Here, R 52 (typically the hydrogen atom of R 52 ) is a fluorine atom, a C1-3 An alkyl group and C 1-3 It may be substituted with one or more substituents selected from fluoroalkyl groups. In a preferred embodiment, R 56 is not substituted with these groups.

[0338] Preferably, the above X A are each independently A single bond, C 1-20 An alkylene group, -R 51 -X 53 -R 52 -, or -X 54 -R 5 - [wherein, R 51 and R 52 are as defined above, X 53 is -O-, -S-, -C(O)O-, -CONR 54 -, -O-CONR 54 -, -Si(R 53 ) 2 -, -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -, -O-(CH 2 ) u5 -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -, -O-(CH 2 ) u5 -Si(R 53 ) 2 -O-Si(R 53 ) 2 -CH 2 CH 2 -Si(R 53 ) 2-O-Si(R 53 ) 2 -、 -O-(CH 2 ) u5 -Si(OCH 3 ) 2 OSi(OCH 3 ) 2 -、 -CONR 54 -(CH 2 ) u5 -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -、 -CONR 54 -(CH 2 ) u5 -N(R 54 )-、 or -CONR 54 -(o-, m- or p-phenylene)-Si(R 53 ) 2 - (wherein, R 53 , R 54 and m5 have the same meanings as above, u5 is an integer from 1 to 20, preferably an integer from 2 to 6, more preferably an integer from 2 to 3.) represents, X 54 is, -S-, -C(O)O-, -CONR 54 -、 -O-CONR 54 -、 -CONR 54 -(CH 2 ) u5 -(Si(R 54 ) 2 O) m5 -Si(R 54 ) 2 -、 -CONR 54 -(CH 2 ) u5 -N(R 54 )-、 or -CONR 54 -(o-, m- or p-phenylene)-Si(R54 ) 2 - (wherein each symbol has the same meaning as described above.) represents.] can be.

[0339] More preferably, the above X A are each independently a single bond, C 1-20 an alkylene group, -(CH 2 ) s5 -X 53 -, -(CH 2 ) s5 -X 53 -(CH 2 ) t5 -, -X 54 -, or -X 54 -(CH 2 ) t5 - [wherein X 53 , X 54 , s5 and t5 have the same meaning as described above.] is.

[0340] More preferably, the above X A are each independently a single bond, C 1-20 an alkylene group, -(CH 2 ) s5 -X 53 -(CH 2 ) t5 -, or -X 54 -(CH 2 ) t5 - [wherein each symbol has the same meaning as described above.] can be.

[0341] In a preferred embodiment, the above X A are each independently a single bond C 1-20An alkylene group, -(CH 2 ) s5 -X 53 -, or -(CH 2 ) s5 -X 53 -(CH 2 ) t5 - [In the formula, X 53 is -O-, -CONR 54 -, or -O-CONR 54 -, and R 54 each independently represents a hydrogen atom, a phenyl group, or a C 1-6 alkyl group, s5 is an integer from 1 to 20, t5 is an integer from 1 to 20.] It can be.

[0342] In a preferred embodiment, the above X A each independently is -(CH 2 ) s5 -O-(CH 2 ) t5 - -CONR 54 -(CH 2 ) t5 - [In the formula, R 54 each independently represents a hydrogen atom, a phenyl group, or a C 1-6 alkyl group, s5 is an integer from 1 to 20, t5 is an integer from 1 to 20.] It can be.

[0343] In one embodiment, the above X A each independently is a single bond, C 1-20 alkylene group, -(CH 2 ) s5 -O-(CH 2 ) t5 -, -(CH 2 ) s5 -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -(CH 2 ) t5 -, -(CH 2 ) s5 -O-(CH 2 ) u5 -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 -(CH 2 ) t5 -or -(CH 2 ) s5 -O-(CH 2 ) t5 -Si(R 53 ) 2 -(CH 2 ) u5 -Si(R 53 ) 2 -(C v H 2v )- [In the formula, R 53 m5, s5, t5 and u5 are the same as defined above, and v5 is an integer of 1 to 20, preferably an integer of 2 to 6, and more preferably an integer of 2 to 3.] It is.

[0344] In the above formula, -(C v H 2v )- may be a straight chain or a branched chain, for example, -CH 2 CH 2 -, -CH 2 CH 2 CH 2 -, -CH(CH 3 )-, -CH(CH 3 )CH 2 --It could be.

[0345] Above X A are each independently a fluorine atom, C 1-3An alkyl group and C 1-3 A fluoroalkyl group (preferably a C 1-3 perfluoroalkyl group) may be substituted by one or more substituents selected therefrom. In one embodiment, X A is unsubstituted.

[0346] In one embodiment, X A each independently may be other than an -O-C 1-6 alkylene group.

[0347] In another embodiment, examples of X A include, for example, the following groups: [Chemical formula] [Chemical formula] [In the formula, R 41 each independently is a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or a C 1-6 alkoxy group, preferably a methyl group, D is -CH 2 O(CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 -, -CF 2 O(CH 2 ) 3 -, -(CH 2 ) 2 -, -(CH 2 ) 3 -, -(CH 2 ) 4 -, -CONH-(CH 2 ) 3 -, -CON(CH 3 )-(CH 2 ) 3 -, -CON(Ph)-(CH 2 ) 3 -(wherein Ph means phenyl), and

Chemical formula

[0348] Specific examples of the above X A are, for example: a single bond, -CH 2 OCH 2 -, -CH 2 O(CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 -, -CH 2 O(CH 2 ) 4 -, -CH 2 O(CH 2 ) 5 -, -CH 2 O(CH 2 ) 6 -, -CH 2 O(CH 2 ) 3 Si(CH 3 ) 2 OSi(CH 3 ) 2 (CH 2 )2 -, -CH 2 O(CH 2 ) 3 Si(CH 3 ) 2 OSi(CH 3 ) 2 OSi(CH 3 ) 2 (CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 2 Si(CH 3 ) 2 (CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 3 Si(CH 3 ) 2 (CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 10 Si(CH 3 ) 2 (CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 20 Si(CH 3 ) 2 (CH2 ) 2 - -CH 2 OCF 2 CHFOCF 2 - -CH 2 OCF 2 CHFOCF 2 CF 2 - -CH 2 OCF 2 CHFOCF 2 CF 2 CF 2 - -CH 2 OCH 2 CF 2 CF 2 OCF 2 - -CH 2 OCH 2 CF 2 CF 2 OCF 2 CF 2 - -CH 2 OCH 2 CF 2 CF 2 OCF 2 CF 2 CF 2 - -CH 2 OCH 2 CF 2 CF 2 OCF(CF 3 )CF 2 OCF 2 - -CH 2 OCH 2 CF 2 CF 2 OCF(CF 3 )CF 2 OCF 2 CF 2 - -CH 2 OCH 2 CF 2 CF 2 OCF(CF 3 )CF 2 OCF 2 CF2 CF 2 - -CH 2 OCH 2 CHFCF 2 OCF 2 - -CH 2 OCH 2 CHFCF 2 OCF 2 CF 2 - -CH 2 OCH 2 CHFCF 2 OCF 2 CF 2 CF 2 - -CH 2 OCH 2 CHFCF 2 OCF(CF 3 )CF 2 OCF 2 - -CH 2 OCH 2 CHFCF 2 OCF(CF 3 )CF 2 OCF 2 CF 2 - -CH 2 OCH 2 CHFCF 2 OCF(CF 3 )CF 2 OCF 2 CF 2 CF 2 - -CH 2 OCF 2 CHFOCF 2 CF 2 CF 2 -C(O)NH-CH 2 - -CH 2 OCH 2 (CH 2 ) 7 CH 2 Si(OCH 3 ) 2 OSi(OCH 3 ) 2 (CH 2) 2 Si(OCH 3 ) 2 OSi(OCH 3 ) 2 (CH 2 ) 2 -, -CH 2 OCH 2 CH 2 CH 2 Si(OCH 3 ) 2 OSi(OCH 3 ) 2 (CH 2 ) 3 -, -CH 2 OCH 2 CH 2 CH 2 Si(OCH 2 CH 3 ) 2 OSi(OCH 2 CH 3 ) 2 (CH 2 ) 3 -, -CH 2 OCH 2 CH 2 CH 2 Si(OCH 3 ) 2 OSi(OCH 3 ) 2 (CH 2 ) 2 -, -CH 2 OCH 2 CH 2 CH 2 Si(OCH 2 CH 3 ) 2 OSi(OCH 2 CH 3 ) 2 (CH 2 ) 2 -, -(CH 2 ) 2 -Si(CH 3 ) 2 -(CH 2 ) 2 -, -CH2 - 、 -(CH 2 ) 2 - 、 -(CH 2 ) 3 - 、 -(CH 2 ) 4 - 、 -(CH 2 ) 5 - 、 -(CH 2 ) 6 - 、 -CO- 、 -CONH- 、 -CONH-CH 2 - 、 -CONH-(CH 2 ) 2 - 、 -CONH-(CH 2 ) 3 - 、 -CONH-(CH 2 ) 4 - 、 -CONH-(CH 2 ) 5 - 、 -CONH-(CH 2 ) 6 - 、 -CON(CH 3 )-CH 2 - 、 -CON(CH 3 )-(CH 2 ) 2 - 、 -CON(CH 3 )-(CH 2 ) 3 - 、 -CON(CH 3 )-(CH 2 ) 4 - 、 -CON(CH 3 )-(CH 2 ) 5 - 、 -CON(CH 3 )-(CH 2 ) 6 - 、 -CON(Ph)-CH 2-(wherein, Ph means phenyl), -CON(Ph)-(CH 2 ) 2 -(wherein, Ph means phenyl), -CON(Ph)-(CH 2 ) 3 -(wherein, Ph means phenyl), -CON(Ph)-(CH 2 ) 4 -(wherein, Ph means phenyl), -CON(Ph)-(CH 2 ) 5 -(wherein, Ph means phenyl), -CON(Ph)-(CH 2 ) 6 -(wherein, Ph means phenyl), -CONH-(CH 2 ) 2 NH(CH 2 ) 3 -、 -CONH-(CH 2 ) 6 NH(CH 2 ) 3 -、 -CH 2 O-CONH-(CH 2 ) 3 -、 -CH 2 O-CONH-(CH 2 ) 6 -、 -S-(CH 2 ) 3 -、 -(CH 2 ) 2 S(CH 2 ) 3 -、 -CONH-(CH 2 ) 3 Si(CH 3 ) 2 OSi(CH 3 ) 2 (CH 2 ) 2 -、 -CONH-(CH 2 ) 3 Si(CH3 ) 2 OSi(CH 3 ) 2 OSi(CH 3 ) 2 (CH 2 ) 2 -, -CONH-(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 2 Si(CH 3 ) 2 (CH 2 ) 2 -, -CONH-(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 3 Si(CH 3 ) 2 (CH 2 ) 2 -, -CONH-(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 10 Si(CH 3 ) 2 (CH 2 ) 2 -, -CONH-(CH 2 ) 3 Si(CH 3 ) 2 O(Si(CH 3 ) 2 O) 20 Si(CH 3 ) 2 (CH 2 ) 2 -, -C(O)O-(CH 2 ) 3 -, -C(O)O-(CH 2 ) 6-, -CH 2 -O-(CH 2 ) 3 -Si(CH 3 ) 2 -(CH 2 ) 2 -Si(CH 3 ) 2 -(CH 2 ) 2 -, -CH 2 -O-(CH 2 ) 3 -Si(CH 3 ) 2 -(CH 2 ) 2 -Si(CH 3 ) 2 -CH(CH 3 )- -CH 2 -O-(CH 2 ) 3 -Si(CH 3 ) 2 -(CH 2 ) 2 -Si(CH 3 ) 2 -(CH 2 ) 3 -, -CH 2 -O-(CH 2 ) 3 -Si(CH 3 ) 2 -(CH 2 ) 2 -Si(CH 3 ) 2 -CH(CH 3 )-CH 2 -, -OCH 2 -, -O(CH 2 ) 3 -, -OCFHCF 2 -,

Chemical formula

[0349] The above X A Specific examples thereof include, for example: A single bond, -CH 2 OCH 2 -, -CH 2 O(CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 -, -CH 2 O(CH 2 ) 4 -, -CH 2 O(CH 2 ) 5 -, -CH 2 O(CH 2 ) 6 -, -CH 2 -, -(CH 2 ) 2 -, -(CH 2 ) 3 -, -(CH 2 ) 4 -, -(CH 2 ) 5 -, -(CH 2 ) 6 -, -CO-, -CONH-, -CONH-CH 2 -, -CONH-(CH 2 ) 2 -, -CONH-(CH 2 ) 3 -, -CONH-(CH 2 ) 4 -, -CONH-(CH 2 ) 5 -, -CONH-(CH 2 )6 -, -CON(CH 3 )-CH 2 -, -CON(CH 3 )-(CH 2 ) 2 -, -CON(CH 3 )-(CH 2 ) 3 -, -CON(CH 3 )-(CH 2 ) 4 -, -CON(CH 3 )-(CH 2 ) 5 -, -CON(CH 3 )-(CH 2 ) 6 -, -CH 2 O-CONH-(CH 2 ) 3 -, -CH 2 O-CONH-(CH 2 ) 6 -, etc.

[0350] Specific examples of the above X A are, for example: single bond, -CH 2 OCH 2 -, -CH 2 O(CH 2 ) 2 -, -CH 2 O(CH 2 ) 3 -, -CH 2 O(CH 2 ) 4 -, -CH 2 O(CH 2 ) 5 -, -CH 2 O(CH 2 ) 6-, -(CH 2 ) 2 -, -(CH 2 ) 3 -, -(CH 2 ) 4 -, -(CH 2 ) 5 -, -(CH 2 ) 6 -, -CONH-, -CONH-CH 2 -, -CONH-(CH 2 ) 2 -, -CONH-(CH 2 ) 3 -, -CONH-(CH 2 ) 4 -, -CONH-(CH 2 ) 5 -, -CONH-(CH 2 ) 6 -, and the like can be mentioned.

[0351] In yet another aspect, X A is, independently of each other, a group represented by the formula: -(R 16 ) x1 -(CFR 17 ) y1 -(CH 2 ) z1 -. In the formula, x1, y1 and z1 are, independently of each other, integers from 0 to 10, the sum of x1, y1 and z1 is 1 or more, and the order of existence of each repeating unit enclosed in parentheses is arbitrary in the formula.

[0352] In the above formula, R 16 is, independently of each other, an oxygen atom, a phenylene, a carbazolylene, -NR 18 -(wherein R 18 represents a hydrogen atom or an organic group) or a divalent organic group. Preferably, R 18is an oxygen atom or a divalent polar group.

[0353] The above "divalent polar group" is not particularly limited, and examples thereof include -C(O)-, -C(=NR 19 )-, and -C(O)NR 19 -(in these formulas, R 19 represents a hydrogen atom or a lower alkyl group). The "lower alkyl group" is, for example, an alkyl group having 1 to 6 carbon atoms, such as methyl, ethyl, n-propyl, and these may be substituted with one or more fluorine atoms.

[0354] In the above formulas, each R 17 is independently a hydrogen atom, a fluorine atom, or a lower fluoroalkyl group, preferably a fluorine atom. The "lower fluoroalkyl group" is, for example, a fluoroalkyl group having 1 to 6 carbon atoms, preferably 1 to 3 carbon atoms, preferably a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably a trifluoromethyl group, a pentafluoroethyl group, and even more preferably a trifluoromethyl group.

[0355] In addition, the above X A is such that the left side of each formula is bonded to R FA1 or R FA2 , and the right side is bonded to R Si .

[0356] In yet another aspect, examples of X A include the following groups:

Chemical formula

Chemical formula

[0357] The radical scavenging group is not particularly limited as long as it can scavenge radicals generated by light irradiation. Examples thereof include residues of benzophenones, benzotriazoles, benzoic acid esters, phenyl salicylates, crotonic acids, malonic acid esters, organoacrylates, hindered amines, hindered phenols, or triazines.

[0358] The ultraviolet absorbing group is not particularly limited as long as it can absorb ultraviolet rays. Examples thereof include benzotriazoles, hydroxybenzophenones, esters of substituted and unsubstituted benzoic acid or salicylic acid compounds, acrylates or alkoxysinnamates, oxamides, oxanilides, benzoxazinones, and residues of benzoxazoles.

[0359] In a preferred embodiment, preferred radical scavenging groups or ultraviolet absorbing groups include

Chemical formula

[0360] In this embodiment, X A can each independently be a group having a valence of 3 to 10.

[0361] In yet another embodiment, examples of X A include the following groups:

Chemical formula

[0362] In one embodiment, R 25 is a single bond, a C 1-20 alkylene group, a C 3-20 cycloalkylene group, a C 5-20 arylene group, -R 57 -X 58 -R 59 -, -X 58 -R 59 -, or -R57 -X 58 - is. Above, R 57 and R 59 are each independently a single bond, C 1-20 alkylene group, C 3-20 cycloalkylene group, or C 5-20 arylene group. Above X 58 is -O-, -S-, -CO-, -O-CO- or -COO-.

[0363] In one embodiment, R 26 and R 27 are each independently a hydrocarbon, or a group having at least one atom selected from N, O and S in the end or main chain of the hydrocarbon, preferably C 1-6 alkyl group, -R 36 -R 37 -R 36 -, -R 36 -CHR 38 2 - etc. are mentioned. Here, R 36 are each independently a single bond or an alkyl group having 1 to 6 carbon atoms, preferably an alkyl group having 1 to 6 carbon atoms. R 37 is N, O or S, preferably N or O. R 38 is -R 45 -R 46 -R 45 -, -R 46 -R 45 - or -R 45 -R 46 -. Here, R 45 are each independently an alkyl group having 1 to 6 carbon atoms. R 46 is N, O or S, preferably O.

[0364] In this embodiment, X A can each independently be a 3- to 10-valent group.

[0365] In yet another embodiment, X A is as follows:

Chemical formula

[0366] The above X a is a single bond or a divalent linking group directly bonded to the isocyanurate ring. X a is preferably a single bond, an alkylene group, or a divalent group containing at least one bond selected from the group consisting of an ether bond, an ester bond, an amide bond, and a sulfide bond, and more preferably a single bond, an alkylene group having 1 to 10 carbon atoms, or a divalent hydrocarbon group having 1 to 10 carbon atoms containing at least one bond selected from the group consisting of an ether bond, an ester bond, an amide bond, and a sulfide bond.

[0367] X a is preferably represented by the following formula: -(CX 121 X 122 ) x1 -(X a1 ) y1 -(CX 123 X 124 ) z1 - (Wherein, X 121 to X 124 are each independently H, F, OH, or -OSi(OR 121 ) 3 (Wherein, the three Rs 121 are each independently an alkyl group having 1 to 4 carbon atoms.) and The above X a1 is -C(=O)NH-, -NHC(=O)-, -O-, -C(=O)O-, -OC(=O)-, -OC(=O)O-, or -NHC(=O)NH- (the left side of each bond is bonded to CX 121 X 122 ). x1 is an integer from 0 to 10, y1 is 0 or 1, and z1 is an integer from 1 to 10.) A group represented by is more preferable.

[0368] The above X a1is preferably -O- or -C(=O)O-.

[0369] Said X a is preferably a group represented by the following formula: -(CF 2 ) m11 -(CH 2 ) m12 -O-(CH 2 ) m13 - (wherein m11 is an integer of 1 to 3, m12 is an integer of 1 to 3, and m13 is an integer of 1 to 3.) a group represented by -(CF 2 ) m14 -(CH 2 ) m15 -O-CH 2 CH(OH)-(CH 2 ) m16 - (wherein m14 is an integer of 1 to 3, m15 is an integer of 1 to 3, and m16 is an integer of 1 to 3.) a group represented by -(CF 2 ) m17 -(CH 2 ) m18 - (wherein m17 is an integer of 1 to 3, and m18 is an integer of 1 to 3.) a group represented by -(CF 2 ) m19 -(CH 2 ) m20 -O-CH 2 CH(OSi(OCH 3 ) 3 )-(CH 2 ) m21 - (wherein m19 is an integer of 1 to 3, m20 is an integer of 1 to 3, and m21 is an integer of 1 to 3.) a group represented by, or -(CH 2 ) m22 - (wherein m22 is an integer of 1 to 3.) a group represented by is particularly preferred.

[0370] The above X a is not particularly limited, but specifically, -CH 2 -、-C 2 H 4 -、-C 3 H 6 -、-C 4 H 8 -、-C 4 H 8 -O-CH 2 -、-CO-O-CH 2 -CH(OH)-CH 2 -、-(CF 2 ) n5 -(n5 is an integer from 0 to 4.)、-(CF 2 ) n5 -(CH 2 ) m5 -(n5 and m5 are each independently an integer from 0 to 4.)、-CF 2 CF 2 CH 2 OCH 2 CH(OH)CH 2 -、-CF 2 CF 2 CH 2 OCH 2 CH(OSi(OCH 3 ) 3 )CH 2 - etc. can be mentioned.

[0371] In this embodiment, X A can each independently be a divalent or trivalent group.

[0372] In one embodiment, the fluoropolyether group-containing silane compound represented by formula (A1) or formula (A2) does not contain a siloxane bond (-Si-O-Si-).

[0373] The fluoropolyether group-containing silane compound represented by formula (A1) or formula (A2) is not particularly limited, but is 5×10 2 ~1×10 5may have a number average molecular weight. Among such ranges, having a number average molecular weight of 2,000 to 32,000, more preferably 2,500 to 12,000 is preferable from the viewpoint of frictional durability. The number average molecular weight of the fluoropolyether group-containing silane compound is 19 a value measured by 19F-NMR.

[0374] In one aspect, the number average molecular weight of the fluoropolyether group-containing silane compound represented by formula (A1) or formula (A2) may be 500 to 30,000, preferably 1,000 to 20,000, more preferably 2,000 to 15,000, even more preferably 2,000 to 10,000, for example 3,000 to 6,000.

[0375] In another aspect, the number average molecular weight of the fluoropolyether group-containing silane compound represented by formula (A1) or formula (A2) may be 4,000 to 30,000, preferably 5,000 to 10,000, more preferably 6,000 to 10,000.

[0376] In one aspect, in the composite material of the present disclosure, the fluoropolyether group-containing silane compound is a compound represented by formula (A1).

[0377] In another aspect, in the composite material of the present disclosure, the fluoropolyether group-containing silane compound is a compound represented by formula (A2).

[0378] In another aspect, in the composite material of the present disclosure, the fluoropolyether group-containing silane compound is a compound represented by formula (A1) and a compound represented by formula (A2).

[0379] In another aspect, in the composite material of the present disclosure, the compound represented by the formula (A1) and the compound represented by the formula (A2) may be partially condensed with each other or with themselves. That is, the compounds represented by the formula (A1) may be partially condensed with each other, the compounds represented by the formula (A2) may be partially condensed with each other, or the compounds represented by the formula (A1) and the compounds represented by the formula (A2) may be partially condensed with each other. Therefore, the composite material of the present disclosure may contain a partial condensate of the compound represented by the formula (A1), a partial condensate of the compound represented by the formula (A2), or a partial condensate of the compound represented by the formula (A1) and the compound represented by the formula (A2).

[0380] In the composite material of the present disclosure, relative to the total of the compound represented by the formula (A1) and the compound represented by the formula (A2), the compound represented by the formula (A2) is preferably 0.1 mol% or more and 35 mol% or less. The lower limit of the content of the compound represented by the formula (A2) relative to the total of the compound represented by the formula (A1) and the compound represented by the formula (A2) is preferably 0.1 mol%, more preferably 0.2 mol%, still more preferably 0.5 mol%, even more preferably 1 mol%, particularly preferably 2 mol%, and especially preferably 5 mol%. The upper limit of the content of the compound represented by the formula (A2) relative to the total of the compound represented by the formula (A1) and the compound represented by the formula (A2) is preferably 35 mol%, more preferably 30 mol%, still more preferably 20 mol%, even more preferably 15 mol% or 10 mol%. The compound represented by the formula (A2) relative to the total of the compound represented by the formula (A1) and the compound represented by the formula (A2) is preferably 0.1 mol% or more and 30 mol% or less, more preferably 0.1 mol% or more and 20 mol% or less, still more preferably 0.2 mol% or more and 10 mol% or less, even more preferably 0.5 mol% or more and 10 mol% or less, particularly preferably 1 mol% or more and 10 mol% or less, for example 2 mol% or more and 10 mol% or less or 5 mol% or more and 10 mol% or less. By setting the compound represented by the formula (A2) within such a range, the friction durability can be improved.

[0381] The compound represented by the above formula (A1) or (A2) can be obtained, for example, by the methods described in WO 2006 / 10708, JP-A-2019-183160, and the like.

[0382] [Other components] The composite material of the present disclosure may contain a solvent, alcohols, a (non-reactive) fluoropolyether compound that can be understood as a fluorinated oil, preferably a perfluoropolyether compound (hereinafter collectively referred to as "fluorinated oil"), a (non-reactive) silicone compound that can be understood as a silicone oil (hereinafter referred to as "silicone oil"), a compatibilizer, a catalyst, a surfactant, a polymerization inhibitor, a sensitizer, and the like.

[0383] Examples of the solvent include aliphatic hydrocarbons such as hexane, cyclohexane, heptane, octane, nonane, decane, undecane, dodecane, and mineral spirit; aromatic hydrocarbons such as benzene, toluene, xylene, naphthalene, and solvent naphtha; esters such as methyl acetate, ethyl acetate, propyl acetate, n-butyl acetate, isopropyl acetate, isobutyl acetate, cellosolve acetate, propylene glycol methyl ether acetate, carbitol acetate, diethyl oxalate, ethyl pyruvate, ethyl 2-hydroxybutyrate, ethyl acetoacetate, amyl acetate, methyl lactate, ethyl lactate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 2-hydroxyisobutyrate, and ethyl 2-hydroxyisobutyrate; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, 2-hexanone, cyclohexanone, methyl aminoketone, and 2-heptanone; glycol ethers such as ethyl cellosolve, methyl cellosolve, methyl cellosolve acetate, ethyl cellosolve acetate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monobutyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monobutyl ether acetate, dipropylene glycol dimethyl ether, and ethylene glycol monoalkyl ether; alcohols such as methanol, ethanol, iso-propanol, n-butanol, isobutanol, tert-butanol, sec-butanol, 3-pentanol, octyl alcohol, 3-methyl-3-methoxybutanol, and tert-amyl alcohol; glycols such as ethylene glycol and propylene glycol; cyclic ethers such as tetrahydrofuran, tetrahydropyran, and dioxane; amides such as N,N-dimethylformamide and N,N-dimethylacetamide; ether alcohols such as methyl cellosolve, cellosolve, isopropyl cellosolve, butyl cellosolve, and diethylene glycol monomethyl ether; and diethylene glycol monoethyl ether acetate.1,1,2-Trichloro-1,2,2-trifluoroethane, 1,2-dichloro-1,1,2,2-tetrafluoroethane, dimethyl sulfoxide, 1,1-dichloro-1,2,2,3,3-pentafluoropropane (HCFC225), 1,1,2,2,3,3,4-heptafluorocyclopentane (e.g., Zeorola H), perfluorobutyl methyl ether (C; 4 F 9 OCH 3 )(e.g., HFE7100), perfluorobutyl ethyl ether (C 4 F 9 OC 2 H 5 )(e.g., HFE7200), perfluorohexyl methyl ether (C 2 F 5 CF(OCH 3 )C 3 F 7 )(e.g., HFE7300), CF 3 CH 2 OH, CF 3 CF 2 CH 2 OH, (CF 3 ) 2 CHOH, 1,1,2,3,3,3-hexafluoropropyl methyl ether (CF 3 CFHCF 2 OCH 3 )(HFE-356mec), etc., fluorine-containing solvents, etc. Or a mixed solvent of two or more of these, etc. may be mentioned.

[0384] Examples of the above alcohols include alcohols having 1 to 6 carbon atoms which may be substituted by one or more fluorine atoms, for example, methanol, ethanol, iso-propanol, tert-butanol, CF 3 CH 2 OH, CF 3 CF 2 CH 2 OH, (CF 3 ) 2 CHOH, H(CF 2 CF 2 )CH 2 OH, H(CF 2 CF2 ) 2 CH 2 OH, H(CF 2 CF 2 ) 3 CH 2 OH may be mentioned. By including these alcohols in the composite material of the present disclosure, the stability of the fluoropolyether group-containing silane compound is improved, and the compatibility of component (A) and component (B) with the solvent is also improved.

[0385] In a preferred embodiment, the composite material of the present disclosure contains a solvent and an alcohol.

[0386] The content of the alcohol is preferably 0.1 to 50% by mass, more preferably 0.5 to 30% by mass, still more preferably 1.0 to 20% by mass, and even more preferably 2.0 to 10% by mass based on the total of the solvent and the alcohol.

[0387] The fluorinated oil is not particularly limited, and examples thereof include compounds (perfluoropolyether compounds) represented by the following general formula (3). Rf 5 -(OC 4 F 8 ) a’ -(OC 3 F 6 ) b’ -(OC 2 F 4 ) c’ -(OCF 2 ) d’ -Rf 6 ···(3) In the formula, Rf 5 represents an alkyl group having 1 to 16 carbon atoms which may be substituted by one or more fluorine atoms (preferably a perfluoroalkyl group of C 1―16 ), Rf 6 represents an alkyl group having 1 to 16 carbon atoms which may be substituted by one or more fluorine atoms (preferably a C 1-16 perfluoroalkyl group), a fluorine atom or a hydrogen atom, Rf 5 and Rf 6is more preferably, each independently, a C 1-3 perfluoroalkyl group. a', b', c' and d' each represent the number of four types of repeating units of the perfluoropolyether constituting the polymer backbone, and are each independently an integer of 0 or more and 300 or less, and the sum of a', b', c' and d' is at least 1, preferably 1 to 300, more preferably 20 to 300. The order of existence of each repeating unit enclosed in parentheses with subscripts a', b', c' or d' is arbitrary in the formula. Among these repeating units, -(OC 4 F 8 )- is -(OCF 2 CF 2 CF 2 CF 2 )-, -(OCF(CF 3 )CF 2 CF 2 )-, -(OCF 2 CF(CF 3 )CF 2 )-, -(OCF 2 CF 2 CF(CF 3 ))-, -(OC(CF 3 ) 2 CF 2 )-, -(OCF 2 C(CF 3 ) 2 )-, -(OCF(CF 3 )CF(CF 3 ))-, -(OCF(C 2 F 5 )CF 2 )- and (OCF 2 CF(C 2 F 5 ))- may be any of them, but preferably -(OCF 2 CF 2 CF 2 CF 2 )-. -(OC 3 F 6 )- is -(OCF 2 CF 2 CF 2 )-, -(OCF(CF 3 )CF 2 )- and (OCF2 CF(CF 3 ))- may be any of them, preferably -(OCF 2 CF 2 CF 2 )-. -(OC 2 F 4 )- may be -(OCF 2 CF 2 )- or (OCF(CF 3 ))-, but preferably -(OCF 2 CF 2 ).

[0388] Examples of the perfluoropolyether compound represented by the above general formula (3) include compounds represented by any of the following general formulas (3a) and (3b) (which may be a mixture of one or more). Rf 5 -(OCF 2 CF 2 CF 2 ) b” -Rf 6 ···(3a) Rf 5 -(OCF 2 CF 2 CF 2 CF 2 ) a” -(OCF 2 CF 2 CF 2 ) b” -(OCF 2 CF 2 ) c” -(OCF 2 ) d” -Rf 6 ···(3b) In these formulas, Rf 5 and Rf 6 are as described above; in formula (3a), b” is an integer of 1 or more and 100 or less; in formula (3b), a” and b” are each independently an integer of 0 or more and 30 or less, and c” and d” are each independently an integer of 1 or more and 300 or less. The order of existence of each repeating unit enclosed in parentheses with subscripts a”, b”, c”, d” is arbitrary in the formula.

[0389] Also, from another perspective, the fluorinated oil may be a compound represented by the general formula Rf 3 -F (wherein Rf 3 is a C 5-16 perfluoroalkyl group.). It may also be a chlorotrifluoroethylene oligomer.

[0390] The above fluorinated oil may have an average molecular weight of 500 to 10,000. The molecular weight of the fluorinated oil can be measured using GPC.

[0391] The fluorinated oil may be contained in the composite material of the present disclosure, for example, in an amount of 0 to 50% by mass, preferably 0 to 30% by mass, more preferably 0 to 5% by mass. In one embodiment, the composite material of the present disclosure is substantially free of the fluorinated oil. Substantially free of the fluorinated oil means that it may contain no fluorinated oil at all or may contain a trace amount of the fluorinated oil.

[0392] In one embodiment, the average molecular weight of the fluorinated oil may be made larger than the average molecular weight of the fluoropolyether group-containing silane compound.

[0393] In one embodiment, the average molecular weight of the fluorinated oil may be made smaller than the average molecular weight of the fluoropolyether group-containing silane compound.

[0394] As the silicone oil, for example, a linear or cyclic silicone oil having a siloxane bond of 2,000 or less can be used. The linear silicone oil may be a so-called straight silicone oil or a modified silicone oil. Examples of the straight silicone oil include dimethyl silicone oil, methylphenyl silicone oil, and methylhydrogen silicone oil. Examples of the modified silicone oil include those obtained by modifying a straight silicone oil with alkyl, aralkyl, polyether, higher fatty acid ester, fluoroalkyl, amino, epoxy, carboxyl, alcohol, etc. Examples of the cyclic silicone oil include cyclic dimethylsiloxane oil.

[0395] In the composite material of the present disclosure, such silicone oil may be contained in an amount of, for example, 0 to 300 parts by mass, preferably 50 to 200 parts by mass, based on 100 parts by mass in total of the fluoropolyether group-containing silane compounds of the present disclosure (in the case of two or more kinds, the total thereof, the same applies hereinafter).

[0396] Examples of the compatibilizer include fluorine-substituted alcohols such as 2,2,2-trifluoroethanol, 2,2,3,3,3-pentafluoro-1-propanol, or 2,2,3,3,4,4,5,5-octafluoro-1-pentanol, preferably a fluorine-substituted alcohol having a terminal of CF 2 H, fluorine-substituted aryls such as 1,3-bis(trifluoromethyl)benzene, preferably fluorine-substituted benzenes, etc.

[0397] Examples of the catalyst include acids (such as acetic acid, trifluoroacetic acid, etc.), bases (such as ammonia, triethylamine, diethylamine, etc.), transition metals (such as Ti, Ni, Sn, etc.).

[0398] The catalyst promotes the hydrolysis and dehydration condensation of the fluoropolyether group-containing silane compound of the present disclosure, and promotes the formation of the layer formed on the substrate by the composite material of the present disclosure.

[0399] As other components, in addition to the above, for example, tetraethoxysilane, methyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, methyltriacetoxysilane and the like can also be mentioned.

[0400] In addition to the above-described components, the composite material of the present disclosure may contain, as impurities, for example, trace amounts of Pt, Rh, Ru, 1,3-divinyltetramethyldisiloxane, triphenylphosphine, NaCl, KCl, condensates of silanes, and the like.

[0401] In one embodiment, the depolymerizable polymer of the present disclosure may be a carrier material used in combination with a liquid material for vapor deposition. Specifically, the depolymerizable polymer of the present disclosure is a depolymerizable polymer that is a carrier material used in combination with a liquid material for vapor deposition, and in TG-DTA measurement, when the depolymerizable polymer is heated from 25°C to 600°C at a heating rate of 10°C / min in a nitrogen atmosphere, the residue amount of the depolymerizable polymer at 500°C is 5% or less of the initial weight of the depolymerizable polymer, and it may be a depolymerizable polymer for vapor deposition.

[0402] The carrier material means a material capable of containing a vapor deposition substance. For example, the carrier material may be a material capable of holding or supporting a vapor deposition substance. In one embodiment, the carrier material may be composed of a depolymerizable polymer. The liquid material for vapor deposition means a vapor deposition substance that is liquid at room temperature and can be vapor deposited on a substrate. The liquid material for vapor deposition may be composed of a single material or a plurality of materials. For example, the liquid material for vapor deposition may be a solution containing a vapor deposition substance.

[0403] By having the above characteristics, the depolymerizable polymer of the present disclosure can provide a composite material in which the residue of the depolymerizable polymer after vapor deposition treatment is reduced, and a thin film can be formed on the surface of the substrate in a simpler process. Further, it becomes difficult for the depolymerizable polymer to be vapor deposited on the surface of the substrate, and it becomes easier for a layer derived from the liquid material to be formed on the surface of the substrate.

[0404] The TG-DTA measurement of the depolymerizable polymer of the present disclosure can be carried out by heating the depolymerizable polymer from 25°C to 600°C at a heating rate of 10°C / min in a nitrogen atmosphere using thermogravimetric differential thermal measurement. The TG-DTA measurement of the depolymerizable polymer of the present disclosure is described in detail in the examples.

[0405] The residue amount of the above depolymerizable polymer at 500°C may be 3% or less of the initial weight of the depolymerizable polymer, preferably 2% or less, more preferably 1% or less, still more preferably 0.5% or less, and particularly preferably 0.3% or less. The initial weight of the depolymerizable polymer means the weight before heating the depolymerizable polymer.

[0406] In one embodiment, the depolymerizable polymer of the present disclosure is used in combination with a liquid material for vapor deposition. When the liquid material for vapor deposition is vapor-deposited on a substrate, the depolymerizable polymer can also be vapor-deposited on the substrate. In this regard, the amount of the depolymerizable polymer vapor-deposited on the substrate is preferably less than the amount of the liquid material for vapor deposition vapor-deposited on the substrate. Specifically, the amount of the depolymerizable polymer vapor-deposited on the substrate may be, for example, 30% by mass or less of the amount of the liquid material for vapor deposition vapor-deposited on the substrate, preferably 10% by mass or less, more preferably 5% by mass or less, still more preferably 1% by mass or less, and particularly preferably 0.1% by mass or less.

[0407] In one embodiment, the vapor deposition material includes a depolymerizable polymer having the above characteristics and a fluoropolyether group-containing silane compound. By including such characteristics, it becomes difficult for the depolymerizable polymer to be vapor-deposited on the substrate during vapor deposition, and it becomes easier to form a thin film derived from the fluoropolyether group-containing silane compound.

[0408] In one embodiment, the depolymerizable polymer of the present disclosure may be a depolymerizable polymer used in combination with a fluoropolyether group-containing silane compound in the vapor deposition of the fluoropolyether group-containing silane compound. By performing vapor deposition by combining the depolymerizable polymer of the present disclosure and the fluoropolyether group-containing silane compound, it becomes difficult for the depolymerizable polymer to be vapor-deposited on the substrate, and a thin film derived from the fluoropolyether group-containing silane compound is more likely to be formed on the substrate.

[0409] In one embodiment, the composite material of the present disclosure may be a vapor deposition material. The "vapor deposition material" means a material used to vapor-deposit a vapor deposition substance on a substrate or the like. In this regard, it can be understood that the fluoropolyether group-containing silane compound is the "vapor deposition substance" that is vapor-deposited on the substrate, and the depolymerizable polymer is the "carrier material" that supports the vapor deposition substance.

[0410] In one embodiment, the composite material of the present disclosure may contain an additive for adjusting the thermal conductivity of the composite material. Such an additive may be, for example, at least one selected from the group consisting of metals, metal oxides, and ceramic powders. Examples of the metal include silver, copper, gold, nickel, or aluminum. Examples of the metal oxide include alumina, zinc oxide, magnesium oxide, or titanium oxide. Examples of the ceramic powder include silicon nitride, aluminum nitride, silicon carbide, titanium nitride, or titanium carbide.

[0411] In one embodiment, the composite material of the present disclosure may contain an additive for promoting the decomposition of the depolymerizable polymer. Such an additive may be, for example, an organic acid compound or an organic base compound. Examples of the organic acid compound include formic acid, acetic acid, citric acid, maleic acid, lactic acid, oxalic acid, or gluconic acid. Examples of the organic base compound include triethylamine, pyridine, sodium ethoxide, or imidazole.

[0412] In one embodiment, the composite material of the present disclosure may include a crosslinking agent for adjusting the solubility of the depolymerizable polymer. Such a crosslinking agent may be, for example, a polyfunctional compound having radical polymerizability. Such polyfunctional compounds may be, for example, (meth)acrylates having polyfunctional groups, vinyl compounds, allyl compounds, etc. Examples of the functional groups of the polyfunctional compound include an amino group, a hydroxy group, an isocyanate group, a vinyl group, or a carboxy group).

[0413] From the viewpoint of stably storing the composite material of the present disclosure, the composite material of the present disclosure may be stored in a container or the like. For example, during transportation, the composite material may be stored in the above container or the like, and the composite material of the present disclosure may be taken out of the container during use. Such a container preferably has one or more performances selected from the group consisting of light shielding properties, airtightness, gas impermeability, and moisture and water vapor impermeability.

[0414] [Deposition method] The deposition method of the present disclosure is preparing a deposition material by combining a depolymerizable polymer and a fluoropolyether group-containing silane compound, heating the deposition material and depositing the fluoropolyether group-containing silane compound on a substrate.

[0415] By the deposition method of the present disclosure, a layer derived from the fluoropolyether group-containing silane compound is formed on the substrate. The thin film of the fluoropolyether group-containing silane compound can provide excellent water repellency, oil repellency, antifouling properties, etc. For example, the thin film of the above fluoropolyether group-containing silane compound can function as a masking for the substrate during metal patterning of the substrate. Specifically, the thin film of the fluoropolyether group-containing silane compound formed on the substrate repels the deposited metal (that is, has metal repellency), and thus the thin film may have a property that it is difficult for the metal to be deposited thereon.

[0416] The depolymerizable polymer and the fluoropolyether group-containing silane compound used in the vapor deposition method of the present disclosure may be the depolymerizable polymer and the fluoropolyether group-containing silane compound described in the specification of the present application.

[0417] Combining the depolymerizable polymer and the fluoropolyether group-containing silane compound may, for example, involve incorporating the fluoropolyether group-containing silane compound into the depolymerizable polymer. The above combination can be achieved, for example, by bringing the depolymerizable polymer into contact with or mixing it with the fluoropolyether group-containing silane compound.

[0418] In one embodiment, the depolymerizable polymer may be dried before combining it with the fluoropolyether group-containing silane compound. Such drying can reduce the moisture contained in the depolymerizable polymer, making it easier for the fluoropolyether group-containing silane compound to exist more stably after the above combination.

[0419] In one embodiment, the combination of the depolymerizable polymer and the fluoropolyether group-containing silane compound may involve impregnating the depolymerizable polymer with the fluoropolyether group-containing silane compound. The impregnation of the depolymerizable polymer with the fluoropolyether group-containing silane compound may use known methods, for example, vacuum impregnation, pressure impregnation, or vacuum-pressure impregnation, etc.

[0420] In the vapor deposition method of the present disclosure, the vapor deposition of the fluoropolyether group-containing silane compound onto the substrate can be carried out by heating the vapor deposition material. The vapor deposition method may be a conventional vapor deposition method, for example, vacuum vapor deposition. Specific examples of vacuum vapor deposition include resistance heating, electron beam, high-frequency heating using microwaves, etc., ion beam, and similar methods.

[0421] The heating of the vapor deposition material may be to heat the vapor deposition material to 100°C to 600°C. From the perspective of further reducing the residue of the depolymerizable polymer after the vapor deposition treatment, preferably, the vapor deposition material may be heated to 150°C to 550°C, more preferably 200°C to 500°C, still more preferably 250°C to 550°C, and particularly preferably 300°C to 500°C.

[0422] From the perspective of further reducing the residue of the depolymerizable polymer after the vapor deposition treatment, the heating of the vapor deposition material may be at a temperature higher than the ceiling temperature of the depolymerizable polymer, preferably at a temperature 10°C or more higher than the ceiling temperature, more preferably 30°C or more higher, and still more preferably 50°C or more higher.

[0423] From the perspective of making it easier to vaporize the fluoropolyether group-containing silane compound from the vapor deposition material, the vapor deposition may be carried out under reduced pressure. For example, the vapor deposition may be carried out under a pressure of 10 -1 Pa to 10 -5 Pa, preferably 10 -1 Pa to 10 -4 Pa, more preferably 10 -2 Pa to 10 -4 Pa.

[0424] The substrates that can be used in the vapor deposition method of the present disclosure can be composed of, for example, glass, resin (natural or synthetic resin, such as common plastic materials, and may be in the form of plates, films, or other forms), metal (a single metal such as aluminum, copper, iron, etc. or a composite such as an alloy), ceramics, semiconductors (such as silicon, germanium, etc.), fibers (such as woven fabrics, non-woven fabrics, etc.), fur, leather, wood, ceramics, stone, etc., building members, etc., any suitable material.

[0425] As the glass, sapphire glass, soda-lime glass, alkali aluminosilicate glass, borosilicate glass, non-alkali glass, crystal glass, and fused silica glass are preferable, and chemically strengthened soda-lime glass, chemically strengthened alkali aluminosilicate glass, and chemically bonded borosilicate glass are particularly preferable. As the resin, acrylic resin and polycarbonate are preferable.

[0426] Such a substrate may be made of a material that originally has hydroxyl groups at least on its surface portion. Examples of such materials include glass, metals (especially base metals) on which a natural oxide film or a thermal oxide film is formed on the surface, ceramics, semiconductors, etc. Alternatively, when it is not sufficient to have hydroxyl groups like resins, etc., or when there are no hydroxyl groups originally, by subjecting the substrate to some pretreatment, hydroxyl groups can be introduced or increased on the surface of the substrate. Examples of such pretreatment include plasma treatment (e.g., corona discharge) and ion beam irradiation. Plasma treatment can be suitably used not only to introduce or increase hydroxyl groups on the substrate surface but also to clean the substrate surface (remove foreign substances, etc.). Another example of such pretreatment is a method in which an interfacial adsorbent having a carbon-carbon unsaturated bond group is formed in the form of a monomolecular film on the substrate surface in advance by the LB method (Langmuir-Blodgett method) or chemical adsorption method, etc., and then the unsaturated bond is cleaved in an atmosphere containing oxygen, nitrogen, etc.

[0427] Or, such a substrate may be made of a material that contains at least on its surface portion another reactive group, for example, a silicone compound having one or more Si-H groups or an alkoxysilane.

[0428] In a preferred embodiment, the substrate is glass.

[0429] The shape of the above substrate is not particularly limited and can be appropriately determined according to the use and specific specifications of the article to be manufactured.

[0430] The thickness of the above-mentioned substrate may be, for example, in the range of 0.1 mm to 30 mm.

[0431] As the above-mentioned substrate, if necessary, a substrate that has been partially protected in advance by masking or the like may be used.

Examples

[0432] Hereinafter, the composite material and the vapor deposition method of the present disclosure will be described with reference to examples, but the present disclosure is not limited to the following examples.

[0433] (Evaluation of carrier materials) Thermogravimetry-Differential Thermal Analysis (TG / DTA) To investigate the thermal decomposition behavior of various carrier materials, TG / DTA measurements were performed on each resin shown in Table 1 using a thermogravimetric differential thermal analyzer (manufactured by Hitachi High-Technologies Corporation, model number: TG / DTA7200). 10 mg of each resin shown in Table 1 was weighed into an aluminum pan, and aluminum oxide powder (Al 2 O 3 ) was used as a reference. Measurements were carried out in a nitrogen atmosphere with a measurement temperature range of 25 to 600 °C, a heating rate of 10 °C / min, and the residue rate of the resin was evaluated after the measurement. The evaluation results are shown in Table 1.

[0434] Evaluation of deposition behavior To investigate the vapor deposition behavior of various carrier materials, vapor deposition tests were performed using the various resins shown in Table 1. Using a vacuum vapor deposition machine with a diameter of 1900 mmφ, 200 mg of the resin was placed on a resistive heating vapor deposition boat, and the inside of the chamber was evacuated with a vacuum pump until it reached 10 -3 Pa, and then an electric current was passed through the vapor deposition boat to heat it. The thickness of the vapor deposition film was measured with a crystal oscillator at the top of the chamber, and the residue amount of the carrier material on the boat after vapor deposition was evaluated. The evaluation results are shown in Table 1.

[0435]

Table 1

[0436] (Vapor deposition evaluation using resin carrier materials) Deposition treatment 160 mg of each of the various resin powders shown in Table 2 was placed in a metal mold and pressed at 5 MPa for 1 minute using a press machine to form a tablet with a diameter of 10 mm, which was used as a carrier material for vapor deposition.

[0437] As the fluoropolyether group-containing silane compounds used as the vapor deposition substances, the following compounds (A) and (B) were prepared. Compound (A):

Chemical formula

[0438] Compound (B):

Chemical formula

[0439] 80 mg of the above compounds (A) and (B) were impregnated into the resin so as to form the combinations shown in Table 2 to obtain a vapor deposition material. Also, a vapor deposition material in which (A) was impregnated into steel wool was obtained by a conventional method. The obtained vapor deposition material was set on the heating boat of a vacuum vapor deposition machine, glass was placed on the target substrate, and vapor deposition treatment was performed under the same conditions as above.

[0440] The film thickness during vapor deposition, the amount of vapor deposition residue, and the water contact angle of the obtained glass were evaluated. Also, the compatibility with the continuous process was evaluated based on the following criteria from these evaluation results. <Evaluation of compatibility with continuous process> ◎: It is in the form of an individual or powder when set in the vapor deposition machine, and the amount of vapor deposition residue is 1% or less of the amount input. 〇: It is in the form of an individual or powder when set in the vapor deposition machine, and the amount of vapor deposition residue is 5% or less of the amount input. ×: When the above is not satisfied.

[0441]

Table 2

[0442] From the results of Tables 1 and 2, it was found that the composite material of the present disclosure containing a depolymerizable polymer and a fluoropolyether group-containing silane compound has a small amount of residue after vapor deposition treatment and is compatible with a continuous process.

Industrial Applicability

[0443] The composite material of the present disclosure is used for vapor deposition of a vapor deposition substance on a substrate. The composite material of the present disclosure can be used in various fields.

Claims

1. A composite material that is a deposition material, the composite material comprising: The composition includes a fluoropolyether group-containing silane compound and a depolymerizable polymer, The fluoropolyether group-containing silane compound is represented by the following formula (A1) or (A2): 【Chemistry 1】 [In the formula: R FA1 Each independently represents Rf 1 -R F -O q - and R FA2 is -Rf 2 p -R F -O q - and R F teeth, Each independently has the formula: -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 R Fa 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [In the formula: R Fa each independently represents a hydrogen atom, a fluorine atom, or a chlorine atom, a, b, c, d, e, and f each independently represent an integer of 0 to 200, the sum of a, b, c, d, e, and f is 1 or more, and the order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula, provided that all R Fa is a hydrogen atom or a chlorine atom, at least one of a, b, c, e and f is 1 or more; Rf 1 C optionally substituted with one or more fluorine atoms 1-16 is an alkyl group, Rf 2 C optionally substituted with one or more fluorine atoms 1-6 is an alkylene group, p is 0 or 1; Each q is independently 0 or 1; R Si teeth, Each independently represents the following formula (S1), (S2), (S3), (S4) or (S5): 【Chemistry 2】 [In the formula: R 11 are each independently a hydroxyl group or a hydrolyzable group, R 12 each independently represents a hydrogen atom or a monovalent organic group, n1 is (SiR 11 n1 R 12 3-n1 ) each independently represents an integer from 0 to 3; X 11 are each independently a single bond or a divalent group, R 13 each independently represents a hydrogen atom or a monovalent organic group, Each t is independently an integer of 2 or more; R 14 each independently represents a hydrogen atom, a halogen atom, or -X 11 -SiR 11 n1 R 12 3-n1 and R 15 each independently represents a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms, or an alkyleneoxy group having 1 to 6 carbon atoms, R a1 Each independently represents -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 and Z 1 are each independently a divalent group, R 21 Each independently represents -Z 1’ -SiR 21’ p1’ R 22’ q1’ R 23’ r1’ and R 22 are each independently a hydroxyl group or a hydrolyzable group, R 23 each independently represents a hydrogen atom or a monovalent organic group, Each p1 is independently an integer from 0 to 3; Each q1 is independently an integer from 0 to 3, Each r1 is independently an integer from 0 to 3; The sum of p1, q1 and r1 is (SiR 21 p1 R 22 q1 R 23 r1 ) units is 3, Z 1’ are each independently a divalent group, R 21’ Each independently represents -Z 1” -SiR 22” q1” R 23” r1” and R 22’ are each independently a hydroxyl group or a hydrolyzable group, R 23’ each independently represents a hydrogen atom or a monovalent organic group, Each p1' is independently an integer of 0 to 3, Each q1' is independently an integer of 0 to 3, Each r1' is independently an integer of 0 to 3; The sum of p1', q1' and r1' is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) units is 3, Z 1” are each independently a divalent group, R 22” are each independently a hydroxyl group or a hydrolyzable group, R 23” each independently represents a hydrogen atom or a monovalent organic group, Each q1″ is independently an integer from 0 to 3, Each r1″ is independently an integer from 0 to 3; The sum of q1″ and r1″ is (SiR 22” q1” R 23” r1” ) units is 3, R b1 are each independently a hydroxyl group or a hydrolyzable group, R c1 each independently represents a hydrogen atom or a monovalent organic group, Each k1 is independently an integer from 0 to 3; Each l1 is independently an integer from 0 to 3; Each m1 is independently an integer of 0 to 3; The sum of k1, l1 and m1 is (SiR a1 k1 R b1 l1 R c1 m1 ) units is 3, R d1 Each independently represents -Z 2 -CR 31 p2 R 32 q2 R 33 r2 and Z 2 are each independently a single bond or a divalent group; R 31 Each independently represents -Z 2’ -CR 32’ q2’ R 33’ r2’ and R 32 Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and R 33 each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, p2 is independently an integer of 0 to 3, Each q2 is independently an integer from 0 to 3, Each r2 is independently an integer from 0 to 3; The sum of p2, q2 and r2 is (CR 31 p2 R 32 q2 R 33 r2 ) units is 3, Z 2’ are each independently a single bond or a divalent group; R 32’ Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and R 33’ each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, Each q2' is independently an integer of 0 to 3, Each r2' is independently an integer of 0 to 3, The sum of q2' and r2' is (CR 32’ q2’ R 33’ r2’ ) units is 3, Z 3 are each independently a single bond or a divalent group; R 34 are each independently a hydroxyl group or a hydrolyzable group, R 35 each independently represents a hydrogen atom or a monovalent organic group, Each n2 is independently an integer from 0 to 3; R e1 Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and R f1 each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, Each k2 is independently an integer from 0 to 3; Each l2 is independently an integer from 0 to 3; m2 is independently an integer of 0 to 3, The sum of k2, l2 and m2 is (CR d1 k2 R e1 l2 R f1 m2 ) units is 3, R g1 and R h1 Each independently represents -Z 4 -SiR 11 n1 R 12 3-n1 , -Z 4 -SiR a1 k1 R b1 l1 R c1 m1 , or -Z 4 -CR d1 k2 R e1 l2 R f1 m2 and Z 4 are each independently a single bond or a divalent group, However, in formulae (S1), (S2), (S3), (S4) and (S5), at least one Si atom having a hydroxyl group or a hydrolyzable group bonded thereto is present.] is a group represented by X A are each independently A single bond or the following formula: -(R 51 ) p5 -(X 51 ) q5 - [In the formula: R 51 is a single bond, -(CH 2 ) s5 - or an o-, m- or p-phenylene group, s5 is an integer from 1 to 20, X 51 is -(X 52 ) l5 - and X 52 each independently represents -O-, -S-, o-, m- or p-phenylene group, -C(O)O-, -Si(R 53 ) 2 -, -(Si(R 53 ) 2 O) m5 -Si(R 53 ) 2 --, --CONR 54 --, --O-CONR 54 --, --NR 54 - and - (CH 2 ) n5 - is a group selected from the group consisting of R 53 are each independently a phenyl group, C 1-6 Alkyl group or C 1-6 is an alkoxy group, R 54 are each independently a hydrogen atom, a phenyl group, or C 1-6 is an alkyl group, m5 is independently an integer from 1 to 100, Each n5 is independently an integer from 1 to 20; l5 is an integer from 1 to 10, p5 is 0 or 1; q5 is 0 or 1; wherein at least one of p5 and q5 is 1, and the repeating units enclosed in parentheses with p5 or q5 may be present in any order; The right side is R Si Binds to. or a divalent group represented by The following formula: 【Chemistry 3】 [In the formula, X a is a single bond or a divalent group. is a group represented by α1 is an integer of 1 or 2, β1 is an integer of 1 or 2, Each γ1 is independently an integer of 1 or 2. A compound represented by the formula: The depolymerizable polymer has the following formula: CR 1 R 2 =CR 3 R 4 [In the formula, R 1 is a hydrogen atom or a halogen atom, R 2 is a hydrogen atom or a halogen atom, R 3 is a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a halogen atom, R 4 is an aryl group, COOR 5 or a halogen atom, R 5 represents an alkyl group having 1 to 20 carbon atoms; 6 -Rf, or a halogen atom; R 6 is a single bond or an alkylene group having 1 to 20 carbon atoms, Rf is an alkyl group having 1 to 20 carbon atoms which may be substituted with one or more fluorine atoms. A composite material comprising a monomer unit derived from an ethylenically unsaturated monomer represented by the formula:

2. The composite material of claim 1 , wherein the fluoropolyether group-containing silane compound is impregnated into the depolymerizable polymer.

3. 2. The composite material of claim 1, wherein the depolymerizable polymer has a monovalent organic group or a halogen atom bonded to a carbon atom located at the alpha position.

4. The composite material according to claim 3 , wherein the depolymerizable polymer has an alkyl group having 1 to 6 carbon atoms or a halogen atom bonded to a carbon atom located at an α-position.

5. R 1 , R 2 , R 3 and R 4 The composite material of claim 1 , wherein is a fluorine atom.

6. R 1 and R 2 is a hydrogen atom, R 3 is an alkyl group having 1 to 6 carbon atoms, R 4 is an aryl group or COOR 5 and R 5 is an alkyl group having 1 to 20 carbon atoms; 2. The composite material of claim 1.

7. R 1 and R 2 is a hydrogen atom, R 3 is a methyl group, R 4 COOR 5 and R 5 The composite material of claim 6 , wherein is a methyl group.

8. R 1 and R 2 is a hydrogen atom, R 3 is a methyl group, R 4 The composite material of claim 1 , wherein:

9. R 1 , R 2 and R 3 is a hydrogen atom, R 4 The composite material of claim 1 , wherein:

10. R 1 and R 2 is a hydrogen atom, R 3 is a methyl group, R 4 COOR 5 and R 5 Ga-R 6 -Rf, R 6 is an alkylene group having 2 carbon atoms, 2. The composite material according to claim 1, wherein Rf is a perfluoroalkyl group having 6 carbon atoms.

11. The composite material according to claim 1 , wherein the fluoropolyether group-containing silane compound is contained in an amount of 30 mass % or more relative to the depolymerizable polymer.

12. The composite material of claim 1 , wherein the depolymerizable polymer is porous.

13. 2. The composite material of claim 1, wherein the depolymerizable polymer is in tablet or powder form.

14. 2. The composite material according to claim 1, wherein the depolymerizable polymer is in a powder form, and the average particle size of the depolymerizable polymer is 0.1 μm to 100 μm.

15. 2. The composite material of claim 1, wherein the depolymerizable polymer has a ceiling temperature of 500° C. or less.

16. In formulas (A1) and (A2), Rf 1 is C 1-16 is a perfluoroalkyl group, Rf 2 is C 1-6 is a perfluoroalkylene group, R F each independently represents the formula: -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [In the formula: a, b, c, d, e, and f each independently represent an integer of 0 to 200, the sum of a, b, c, d, e, and f is 1 or more, and the order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula, provided that all R Fa is a hydrogen atom or a chlorine atom, at least one of a, b, c, e and f is 1 or more. The composite material according to claim 1 , wherein the group is represented by:

17. In formulae (A1) and (A2), R F are each independently represented by the following formula (f1), (f2), (f3), (f4), (f5), (f6), or (f7): -(OC 3 F 6 ) d -(OC 2 F 4 ) e - (f1) [In the formula, d is an integer of 1 to 200, and e is 0 or 1.] -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f2) [In the formula, c and d each independently represent an integer of 0 to 30, e and f each independently represent an integer from 1 to 200; The sum of c, d, e, and f is an integer from 10 to 200, The order of occurrence of each repeating unit enclosed in parentheses with c, d, e, or f is arbitrary in the formula. -(R 6 -R 7 ) g - (f3) [In the formula, R 6 is O.C.F. 2 Or O.C. 2 F 4 and R 7 , O.C. 2 F 4 , O.C. 3 F 6 , O.C. 4 F 8 , O.C. 5 F 10 and O.C. 6 F 12 or a combination of two or three groups selected from these groups, g is an integer from 2 to 100. -(R 6 -R 7 ) g -R r -(R 7’ -R 6’ ) g’ - (f4) [In the formula, R 6 is O.C.F. 2 Or O.C. 2 F 4 and R 7 , O.C. 2 F 4 , O.C. 3 F 6 , O.C. 4 F 8 , O.C. 5 F 10 and O.C. 6 F 12 or a combination of two or three groups independently selected from these groups; R 6’ is O.C.F. 2 Or O.C. 2 F 4 and R 7’ , O.C. 2 F 4 , O.C. 3 F 6 , O.C. 4 F 8 , O.C. 5 F 10 and O.C. 6 F 12 or a combination of two or three groups independently selected from these groups; g is an integer from 2 to 100; g' is an integer from 2 to 100, R r teeth, 【Chemistry 4】 (In the formula, * indicates the bond position.) is.]; -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f5) [In the formula, e is an integer of 1 or more and 200 or less, a, b, c, d, and f are each independently an integer of 0 or more and 200 or less, and the order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula.] -(OC 6 F 12 ) a -(OC 5 F 10 ) b -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f6) [In the formula, f is an integer of 1 or more and 200 or less, a, b, c, d, and e are each independently an integer of 0 or more and 200 or less, and the order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula.] The composite material according to claim 1 , wherein the group is represented by:

18. α1, β1, and γ1 are 1; X A The composite material according to claim 1 , wherein is a single bond or a divalent group.

19. In formulas (A1) and (A2), R FA1 Each independently represents Rf 1 -R F -O q - and R FA2 is -Rf 2 p -R F -O q - and R F each independently represents the following formula (f1) or (f2): -(OC 3 F 6 ) d -(OC 2 F 4 ) e - (f1) [In the formula, d is an integer of 1 to 200, and e is 0 or 1.] -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - (f2) [In the formula, c and d each independently represent an integer of 0 to 30, e and f each independently represent an integer from 1 to 200; The sum of c, d, e, and f is an integer from 10 to 200, The order of occurrence of each repeating unit enclosed in parentheses with c, d, e, or f is arbitrary in the formula. Rf 1 are each independently 1-6 is a perfluoroalkyl group, Rf 2 are each independently 1-6 is a perfluoroalkylene group, p is 1; q is 1; R Si is represented by the following formula (S1-b), (S3) or (S4): [In the formula: R 11 are each independently a hydroxyl group or a hydrolyzable group, R 12 each independently represents a hydrogen atom or a monovalent organic group, n1 is (SiR 11 n1 R 12 3-n1 ) each independently represents an integer from 0 to 3; X 11 are each independently a single bond or a divalent group, R 13 each independently represents a hydrogen atom or a monovalent organic group, Each t is independently an integer of 2 or more; R a1 Each independently represents -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 and Z 1 are each independently a divalent group, R 21 Each independently represents -Z 1’ -SiR 21’ p1’ R 22’ q1’ R 23’ r1’ and R 22 are each independently a hydroxyl group or a hydrolyzable group, R 23 each independently represents a hydrogen atom or a monovalent organic group, Each p1 is independently an integer from 0 to 3; Each q1 is independently an integer from 0 to 3, Each r1 is independently an integer from 0 to 3; The sum of p1, q1 and r1 is (SiR 21 p1 R 22 q1 R 23 r1 ) units is 3, Z 1’ are each independently a divalent group, R 21’ Each independently represents -Z 1” -SiR 22” q1” R 23” r1” and R 22’ are each independently a hydroxyl group or a hydrolyzable group, R 23’ each independently represents a hydrogen atom or a monovalent organic group, Each p1' is independently an integer of 0 to 3, Each q1' is independently an integer of 0 to 3, Each r1' is independently an integer of 0 to 3; The sum of p1', q1' and r1' is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) units is 3, Z 1” are each independently a divalent group, R 22” are each independently a hydroxyl group or a hydrolyzable group, R 23” each independently represents a hydrogen atom or a monovalent organic group, Each q1″ is independently an integer from 0 to 3, Each r1″ is independently an integer from 0 to 3; The sum of q1″ and r1″ is (SiR 22” q1” R 23” r1” ) units is 3, R b1 are each independently a hydroxyl group or a hydrolyzable group, R c1 each independently represents a hydrogen atom or a monovalent organic group, Each k1 is independently an integer from 0 to 3; Each l1 is independently an integer from 0 to 3; Each m1 is independently an integer of 0 to 3; The sum of k1, l1 and m1 is (SiR a1 k1 R b1 l1 R c1 m1 ) units is 3, R d1 Each independently represents -Z 2 -CR 31 p2 R 32 q2 R 33 r2 and Z 2 are each independently a single bond or a divalent group; R 31 Each independently represents -Z 2’ -CR 32’ q2’ R 33’ r2’ and R 32 Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and R 33 each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, p2 is independently an integer of 0 to 3, Each q2 is independently an integer from 0 to 3, Each r2 is independently an integer from 0 to 3; The sum of p2, q2 and r2 is (CR 31 p2 R 32 q2 R 33 r2 ) units is 3, Z 2’ are each independently a single bond or a divalent group; R 32’ Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and R 33’ each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, Each q2' is independently an integer of 0 to 3, Each r2' is independently an integer of 0 to 3, The sum of q2' and r2' is (CR 32’ q2’ R 33’ r2’ ) units is 3, Z 3 are each independently a single bond or a divalent group; R 34 are each independently a hydroxyl group or a hydrolyzable group, R 35 each independently represents a hydrogen atom or a monovalent organic group, Each n2 is independently an integer from 0 to 3; R e1 Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and R f1 each independently represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, Each k2 is independently an integer from 0 to 3; Each l2 is independently an integer from 0 to 3; m2 is independently an integer of 0 to 3, The sum of k2, l2 and m2 is (CR d1 k2 R e1 l2 R f1 m2 ) units, the number is 3. X A are each independently Single bond, - (CH 2 ) s5 -O-(CH 2 ) t5 -or- -CONR 54 -(CH 2 ) t5 - [In the formula, R 54 are each independently a hydrogen atom, a phenyl group, or C 1-6 represents an alkyl group, s5 is an integer from 1 to 20, t5 is an integer from 1 to 20. and α1 is 1, β1 is 1, The composite material of claim 1 , wherein γ1 is 1.

20. In formulas (A1) and (A2), R Si is represented by the following formula (S1-b): 【Chemistry 5】 [In the formula, n1 is 3; R 11 is -OCH 3 and R 13 is a hydrogen atom, X 11 is a single bond, The composite material according to claim 19, wherein t is an integer of 1 to 6.

21. In formulas (A1) and (A2), R Si is expressed by the following formula (S3): [In the formula: Each k1 is independently 3; Each l1 is independently 0; Each m1 is independently 0; R a1 Each independently represents -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 and Z 1 is C 1-3 is an alkylene group, p1 is 0, q1 is 3; r1 is 0, R 22 is -OCH 3 The composite material according to claim 19 , wherein the group is represented by the formula:

22. In formulas (A1) and (A2), R Si is expressed by the following formula (S4): [In the formula: Each k2 is independently 0; Each l2 is independently 3; Each m2 is independently 0; R e1 Each independently represents -Z 3 -SiR 34 n2 R 35 3-n2 and Z 3 is C 1-3 is an alkylene group, R 34 is -OCH 3 and The composite material according to claim 19 , wherein each n2 is independently 3.

23. In formulas (A1) and (A2), R F are each independently -(OCF 2 CF 2 CF 2 ) d -OCF 2 CF 2 - [wherein d is an integer from 10 to 30] Rf 1 are each independently 1-3 is a perfluoroalkyl group, Rf 2 are each independently 1-3 20. The composite material of claim 19, which is a perfluoroalkylene group.

24. In formulas (A1) and (A2), R F are each independently -(OC 4 F 8 ) c -(OC 3 F 6 ) d -(OC 2 F 4 ) e -(OCF 2 ) f - [In the formula, c and d each independently represent 0 or 1; e and f are each independently an integer from 10 to 30; the sum of c, d, e, and f is an integer from 20 to 45; The order of occurrence of each repeat unit enclosed in parentheses with c, d, e, or f is arbitrary in the formula. Rf 1 are each independently 1-3 is a perfluoroalkyl group, Rf 2 are each independently 1-3 20. The composite material of claim 19, which is a perfluoroalkylene group.

25. A carrier material, which is a depolymerizable polymer, for use in combination with a liquid material for deposition, comprising: the depolymerizable polymer is a depolymerizable polymer for vapor deposition, and in a TG-DTA measurement, when the depolymerizable polymer is heated from 25° C. to 600° C. at a temperature increase rate of 10° C. / min in a nitrogen atmosphere, the amount of residue of the depolymerizable polymer at 500° C. is 5% or less of the initial weight of the depolymerizable polymer.

26. A vapor deposition material comprising a fluoropolyether group-containing silane compound and the depolymerizable polymer according to claim 25.

27. 2. Combining a depolymerizable polymer with a fluoropolyether group-containing silane compound to prepare the composite material of claim 1; heating the composite material to deposit the fluoropolyether group-containing silane compound onto a substrate.

28. 28. The deposition method of claim 27, wherein the combining comprises impregnating the depolymerizable polymer with the fluoropolyether group-containing silane compound.

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