Linear motor and method for manufacturing the motor

Abstract

The linear motor (100) includes a rotor (1) having teeth (11 to 13) covered by a resin (15) and an exposed surface (161) where a part of the teeth (11 to 13) is exposed from the resin (15), and a rotor (3) having teeth (31 to 33) covered by a resin (35) and an exposed surface (361) where a part of the teeth (31 to 33) is exposed from the resin (35). When the rotor (1) is disposed on the stator (2), the exposed surface (161) is formed such that a perpendicular line of the exposed surface (161) is perpendicular to the direction in which the thrust of the rotor (1) is generated and the direction in which the magnetic gap is generated. When the rotor (3) is disposed on the stator (2), the exposed surface (361) is formed such that a perpendicular line of the exposed surface (361) is perpendicular to the direction in which the thrust of the rotor (3) is generated and the direction in which the magnetic gap is generated. The rotor (1) and the rotor (3) can be connected in the direction in which the thrust is generated.

Description

Technical Field

[0001] The present disclosure relates to a linear motor in which a plurality of armatures can be connected and a method for manufacturing the motor.

Background Art

[0002] A modular linear motor that varies thrust by connecting a plurality of armature blocks is known. In the linear motor of Patent Document 1, a positioning convex portion is provided on one of the teeth at both ends in the traveling direction of the core constituting the armature block, and a positioning concave portion is provided on the other tooth. When the armature blocks of this linear motor are connected, the positioning convex portion of one of the two armature blocks and the positioning concave portion of the other armature block are fitted together, thereby positioning the two armature blocks in the traveling direction.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the technique of Patent Document 1, positioning in the direction perpendicular to the magnetic gap direction and the traveling direction cannot be performed, and there is a problem that the thrust pulsation caused by the displacement between the cores of the armature increases.

[0005] The present disclosure has been made in view of the above, and an object thereof is to obtain a linear motor capable of improving the positioning accuracy when connecting armature blocks and suppressing the thrust pulsation caused by the displacement between the cores of the armature.

Means for Solving the Problems

[0006] To solve the above-described problems and achieve the object, the linear motor of the present disclosure includes a first armature having a first core provided with first teeth around which a first coil is wound, the first core being covered with a first resin and having a first exposed surface from which a part of the first teeth is exposed. Further, the linear motor of the present disclosure includes a second armature having a second core provided with second teeth around which a second coil is wound, the second core being covered with a second resin and having a second exposed surface from which a part of the second teeth is exposed, and a field magnet having a plurality of permanent magnets. When the first armature is disposed on the field magnet, the first exposed surface is formed such that a perpendicular line to the first exposed surface is perpendicular to a first thrust generation direction in which a thrust of the first armature is generated and a direction in which a magnetic gap is generated. When the second armature is disposed on the field magnet, the second exposed surface is formed such that a perpendicular line to the second exposed surface is perpendicular to a second thrust generation direction in which a thrust of the second armature is generated and a direction in which a magnetic gap is generated. The first armature and the second armature can be connected in the first thrust generation direction.

Effect of the Invention

[0007] The linear motor according to the present disclosure has an effect that it is possible to improve the positioning accuracy when connecting the armature blocks and suppress the thrust pulsation caused by the displacement between the cores of the armature.

Brief Description of the Drawings

[0008]

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Embodiments for Carrying Out the Invention

[0009] Hereinafter, the linear motor and the motor manufacturing method according to the embodiments of the present disclosure will be described in detail with reference to the drawings.

[0010] Embodiment 1. FIG. 1 is a perspective view showing the configurations of the mover and the stator included in the linear motor according to Embodiment 1. The linear motor 100 is a modular motor including a mover 1 which is an armature (armature block), and a stator 2 which is a field magnet facing the mover 1 with a gap therebetween.

[0011] Note that the linear motor 100 includes a mover 3 which will be described later, but the illustration of the mover 3 is omitted in FIG. 1. In Embodiment 1, the mover 1 is the first mover, and the mover 3 is the second mover. Since the mover 3 has the same configuration as the mover 1, the configurations of the mover 1 and the stator 2 will be described here.

[0012] Hereinafter, when the mover 1 is driven by the thrust generated by the linear motor 100, the traveling direction of the mover 1 is defined as the X direction. Also, the direction in which the magnetic gap (the gap between the core of the mover 1 and the core of the stator 2) is generated between the mover 1 and the stator 2 is defined as the Z direction, and the direction perpendicular to the magnetic gap and the traveling direction, that is, the direction perpendicular to the Z direction and the X direction is defined as the Y direction.

[0013] Hereinafter, the case where the Z direction is parallel to the vertical direction and the XY plane is parallel to the horizontal plane will be described. Hereinafter, the traveling direction of the mover 1 is defined as the plus X direction, and the vertical direction (the direction toward the center of the earth) is defined as the minus Z direction. Also, the direction in which the positioning groove (positioning portion) 16 is formed in the mover 1 is defined as the plus Y direction.

[0014] Also, hereinafter, there may be cases where the configurations of the mover 1 and the stator 2 in the state where the mover 1 is disposed on the stator 2 are described, but the mover 1 is detachable from the stator 2.

[0015] The stator 2 extends in the X direction. The mover 1 has, for example, a shape in which positioning grooves 16 are provided in a rectangular parallelepiped. That is, the mover 1 has groove wall surfaces that serve as the positioning grooves 16. Specifically, the mover 1 has a front surface and a rear surface parallel to the YZ plane, a right side surface and a left side surface parallel to the XZ plane, an upper surface and a bottom surface parallel to the XY plane, and groove wall surfaces. In the linear motor 100, the mover 1 is arranged such that the bottom surface of the mover 1 faces the upper surface of the stator 2.

[0016] The stator 2 has a plurality of permanent magnets 21 and a mounting seat 23 to which the plurality of permanent magnets 21 are fixed. The mounting seat 23 extends along the traveling direction of the mover 1. The upper surface of the mounting seat 23 is, for example, a surface parallel to the XY plane, and the permanent magnets 21 are mounted on the upper surface of the mounting seat 23. The permanent magnets 21 are arranged on the mounting seat 23 at equal intervals along the traveling direction of the mover 1.

[0017] The mover 1 is arranged above the stator 2 (in the positive Z direction) and moves on the stator 2 along the arrangement direction of the permanent magnets 21 (in the positive X direction). The mover 1 has teeth 11 to 13 formed by stacking a plurality of electromagnetic steel sheets.

[0018] Note that FIG. 1 is a perspective view, and the teeth 11 to 13 are hatched. Also, in the following perspective views, the teeth (teeth 11 to 13 and teeth 31 to 33 described later) are hatched. The teeth 11 to 13 are the core (first core) of the mover 1, and the teeth 31 to 33 are the core (second core) of the mover 3. The teeth 11 to 13 are the first teeth, and the teeth 31 to 33 are the second teeth.

[0019] The teeth 11 to 13 are formed by laminating comb-shaped tooth-like plate-shaped electromagnetic steel sheets parallel to the XZ plane when the mover 1 is arranged on the stator 2 in the Y direction. Each tooth of the teeth 11 to 13 extends in the negative Z direction when the mover 1 is arranged on the stator 2. The tooth portions of the teeth 11 to 13 become winding portions described later.

[0020] Teeth 11 to 13 are arranged in the order of tooth 11, tooth 12, and tooth 13 along the plus X direction. That is, tooth 12 is sandwiched between teeth 11 and 13.

[0021] Each of teeth 11 to 13 forms a T shape when viewed from the X direction. Among teeth 11 to 13, the plate-like region exposed on the upper surface side of the mover 1 is the yoke, and a winding portion (not shown) is arranged below the yoke. Each of teeth 11 to 13 has a rod-shaped member thinner than the yoke, which is the upper surface portion, extending in the minus Z direction, and this extended portion serves as the winding portion. A coil (not shown), which is an electric wire with an insulating film, is wound around each winding portion of teeth 11 to 13 via a holding member (not shown) having an insulating function. The coil wound around teeth 11 to 13 is the first coil, and the coil wound around teeth 31 to 33 is the second coil.

[0022] When current flows through the coil, a thrust is generated to move the mover 1 due to the interaction with the magnetic field generated by the permanent magnet 21. As a result, the mover 1 generates a thrust in the plus X direction in which teeth 11 to 13 are arranged.

[0023] Also, on the upper surface of the outer wall surface of the mover 1, a screw hole 14 for attaching the mover 1 to a device top plate 4 described later is provided. The screw hole 14 is provided, for example, on the upper surface of any one of teeth 11 to 13. FIG. 1 shows a case where the screw holes 14 are provided on the upper surfaces of teeth 11 and 13.

[0024] Also, teeth 11 to 13 are covered with a rectangular parallelepiped resin 15, and the resin 15 forms the outer shell of the mover 1. The resin 15 is not arranged at the location on the upper surface of the resin 15 that becomes the upper surface of teeth 11 to 13, and the upper surfaces of teeth 11 to 13 are exposed.

[0025] In addition, the resin 15 is provided with positioning grooves 16 in the rectangular parallelepiped region, and a part of the side surfaces of the teeth 11 to 13 (a part of the yoke) is exposed from the positioning grooves 16 to the outside of the teeth 11 to 13. Note that the teeth 11 to 13 may or may not be exposed from the front and rear surfaces parallel to the YZ plane of the mover 1.

[0026] The shape of the positioning groove 16 is such that a part of the rectangular parallelepiped positioning member 5 described later can be fitted. The positioning groove 16 has a bottom surface 162 and an upper surface 163 parallel to the XY plane, and an exposed surface 161 which is a side surface parallel to the XZ plane. The exposed surface 161 is the exposed portion of the teeth 11 to 13. The exposed surface 161 is the surface from which the teeth 11 to 13 are discharged from the resin 15 due to the formation of the positioning groove 16.

[0027] The bottom surface 162 and the upper surface 163 of the positioning groove 16 are surfaces parallel to the upper and lower surfaces of the mover 1, and the exposed surface 161 of the positioning groove 16 is a surface parallel to the left and right side surfaces of the mover 1. The exposed surface 161 of the positioning groove 16 serves as the positioning surface in the Y direction when connecting the movers 1 and 3. The groove wall surfaces forming the positioning groove 16 have front and rear surfaces perpendicular to the thrust generation direction (positive X direction) as open surfaces, one side surface as a side open surface, and the other side surface as the exposed surface 161.

[0028] The linear motor 100 of Embodiment 1 includes a plurality of connected movers. That is, the linear motor 100 is configured such that the thrust can be varied by connecting a plurality of movers. Hereinafter, in the linear motor 100, the case where two movers are connected will be described, but in the linear motor 100, three or more movers may be connected.

[0029] FIG. 2 is a perspective view showing the configuration of the linear motor according to Embodiment 1. FIG. 2 shows a perspective view of the linear motor 100 when the mover 1 and the mover 3 are connected in the thrust generation direction.

[0030] The mover 3 has the same configuration as the mover 1. The mover 3 has teeth 31 to 33. The teeth 11 to 13 and the teeth 31 to 33 have the same configuration. The resin 15 covering the teeth 11 to 13 is the first resin, and the resin 35 covering the teeth 31 to 33 is the second resin.

[0031] The teeth 31 to 33 are covered by a rectangular parallelepiped-shaped resin 35, and the resin 35 forms the outer shell of the mover 3. The resin 35 is not arranged at the locations on the upper surface of the resin 35 that become the upper surfaces of the teeth 31 to 33, and the upper surfaces of the teeth 31 to 33 are exposed.

[0032] Similar to the mover 1, the mover 3 is arranged above the stator 2 and moves along the arrangement direction of the permanent magnets 21 on the stator 2. The movers 1 and 3 are connected along the positive X direction and move along the arrangement direction of the permanent magnets 21 on the stator 2 in the connected state. Note that the mover 1 and the mover 3 may be the same mover or movers with some different configurations.

[0033] Also, the teeth 31 to 33 have positioning grooves 36 (not shown in FIG. 2) and screw holes 34. The positioning grooves 36 have the same shape as the positioning grooves 16. That is, the shape and arrangement position of the positioning grooves 16 in the mover 1 are the same as the shape and arrangement position of the positioning grooves 36 in the mover 3. The positioning groove 16 is the first positioning groove, and the positioning groove 36 is the second positioning groove.

[0034] Also, the screw holes 34 have the same shape as the screw holes 14. That is, the shape and arrangement position of the screw holes 14 with respect to the mover 1 are the same as the shape and arrangement position of the screw holes 34 with respect to the mover 3.

[0035] As shown in Fig. 2, in the linear motor 100, the rotors 1 and 3, which are armatures, are connected in the thrust generation direction (positive X direction), so that the thrust can be improved. That is, the linear motor 100 can increase the thrust lineup according to the number of connected units. Thereby, the manufacturer of the linear motor 100 can reduce the number of production models of the linear motor 100, improve the production efficiency, and realize cost reduction. The direction in which the thrust of the rotor 1 is generated is the first thrust generation direction, and the direction in which the thrust of the rotor 3 is generated is the second thrust generation direction. Both the first thrust generation direction and the second thrust generation direction are the positive X direction.

[0036] One of the characteristics of the linear motor 100 is the positional relationship between the teeth 11 to 13 of the rotor 1 and the teeth 31 to 33 of the rotor 3 when the rotors 1 and 3 are connected. Generally, in a linear motor having teeth as components, thrust pulsation may occur due to the magnetic attractive force acting on the teeth and the magnets. Since this thrust pulsation increases according to the positional error between the teeth, within the same armature, the armature is manufactured so that the positions of the teeth arranged in the armature are aligned.

[0037] Also in Embodiment 1, the armature is manufactured so that the positions of the teeth 11 to 13 arranged in the rotor 1 are aligned and the positions of the teeth 31 to 33 arranged in the rotor 3 are aligned.

[0038] In addition, when the armatures are connected, it is desirable that the positions of the teeth be aligned between the armatures. In the linear motor 100 of Embodiment 1, the rotors 1 and 3 are manufactured so that the positions of the teeth are aligned between the rotors 1 and 3. The state where the positions of the teeth are aligned is a state where the teeth are aligned on the same plane in each of the Y direction and the Z direction, and in the X direction, there is no gap between the teeth.

[0039] In the linear motor 100, the rotors 1 and 3 are connected so that the teeth 11 to 13 and 31 to 33 are aligned on the same plane in each of the Y direction and the Z direction, and there is no gap between the teeth 11 to 13 and the teeth 31 to 33 in the X direction.

[0040] For the mover 1, when the mover 1 is disposed on the stator 2, the exposed surface 161 of the mover 1 is formed such that a perpendicular line to the exposed surface 161 is perpendicular to the direction in which the thrust of the mover 1 is generated and the direction in which the magnetic gap is generated.

[0041] Similarly, for the mover 3, when the mover 3 is disposed on the stator 2, the exposed surface 361 of the mover 3 is formed such that a perpendicular line to the exposed surface 361 is perpendicular to the direction in which the thrust of the mover 3 is generated and the direction in which the magnetic gap is generated. The exposed surface 161 of the mover 1 is the first exposed surface, and the exposed surface 361 (described later) of the mover 3 is the second exposed surface.

[0042] In the linear motor 100, the movers 1 and 3 are connected such that the exposed surface 161 of the mover 1 and the exposed surface 361 of the mover 3 are in the same plane. Specifically, when the connected movers 1 and 3 are disposed on the stator 2, the movers 1 and 3 are connected such that perpendicular lines to the exposed surfaces 161 and 361 of the movers 1 and 3 are perpendicular to the direction in which the thrust of the movers 1 and 3 is generated and the direction in which the magnetic gap is generated. That is, the exposed surface 161 of the mover 1 and the exposed surface 361 of the mover 3 are in the same plane parallel to the plane including the vector in the direction in which the thrust of the movers 1 and 3 is generated (the advancing direction of the movers 1 and 3) and the vector in the direction in which the magnetic gap is generated when the connected movers 1 and 3 are disposed on the stator 2.

[0043] Also, the movers 1 and 3 are connected such that the upper surfaces of the teeth 11 to 13 exposed from the upper surface of the mover 1 and the upper surfaces of the teeth 31 to 33 exposed from the upper surface of the mover 3 are in the same plane. Further, the space between the movers 1 and 3 is connected such that the gap in the X direction between the tooth 13 of the mover 1 and the tooth 31 of the mover 3 disappears.

[0044] Hereinafter, a method for positioning the mover 1 and the mover 3 in Embodiment 1 will be described with reference to FIGS. 3 to 6. The manufacturing process of the linear motor 100 in Embodiment 1 includes the connection process of the movers 1 and 3, and the positioning of the mover 1 and the mover 3 is performed during the connection process of the movers 1 and 3. Note that the manufacturing process of the linear motor 100 may include the manufacturing processes of the movers 1 and 3, the manufacturing process of the stator 2, the arrangement process of the stator 2, and the like.

[0045] When the manufacturing process of the linear motor 100 includes the manufacturing processes of the movers 1 and 3 and the stator 2, after the movers 1 and 3 and the stator 2 are manufactured, the connection process of the movers 1 and 3 is performed. Note that the manufacturing processes of the movers 1 and 3 and the stator 2 and the connection process of the movers 1 and 3 may be executed at different locations. For example, the manufacturing processes of the movers 1 and 3 and the stator 2 may be executed by the manufacturers of the movers 1 and 3 and the stator 2, and the connection process of the movers 1 and 3 may be executed by the merchant who purchased the movers 1 and 3 and the stator 2. In Embodiment 1, the connection process of the movers 1 and 3 will be mainly described as the manufacturing process of the linear motor 100.

[0046] FIG. 3 is a diagram for explaining the first process when the linear motor according to Embodiment 1 is manufactured. In FIG. 3, a perspective view shows the mover 1 and the apparatus top plate 4 in a state where the mover 1, which is the first (the first one) mover in the linear motor 100, is attached to the apparatus top plate 4. Hereinafter, the case where the bottom surface of the apparatus top plate 4 is parallel to the XY plane will be described.

[0047] The apparatus top plate 4 is the top plate of the movers 1 and 3. When the linear motor 100 is manufactured, the mover 1 serving as a reference for positioning is attached to the apparatus top plate 4 with guaranteed flatness. Specifically, the upper surface of the mover 1 is attached to the bottom surface of the apparatus top plate 4. At this time, the upper surfaces of the teeth 11 to 13 of the mover 1 are brought into contact with the bottom surface of the apparatus top plate 4 so as to have no gap.

[0048] After that, the mover 1 is moved parallel to the XY plane along the bottom surface of the device top plate 4 so that the mounting hole 41 provided in the device top plate 4 and the screw hole 14 provided in the mover 1 are aligned in the coaxial direction. Then, the mover 1 is fixed to the device top plate 4 by fastening the mounting hole 41 and the screw hole 14 with a screw 42.

[0049] FIG. 4 is a diagram for explaining a second process when the linear motor according to Embodiment 1 is manufactured. In FIG. 4, a perspective view shows the mover 1, 3 and the device top plate 4 in a state where the upper surface of the mover 3, which is the second (second) mover in the linear motor 100, is in contact with the bottom surface of the device top plate 4. The mover 3 is provided with an exposed surface 361 similar to the exposed surface 161.

[0050] After the mover 1 is fastened to the device top plate 4, the upper surfaces of the teeth 31 to 33 of the mover 3 are brought into contact with the device top plate 4 so that there is no gap with the bottom surface of the device top plate 4. Thereby, in the Z direction, the mover 1 and the mover 3 can be arranged in the same plane. That is, the upper surface of the mover 1 and the upper surface of the mover 3 can be arranged in the same plane. In other words, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 can be arranged in the same plane. Thereby, the positioning in the Z direction between the teeth 11 to 13 and the teeth 31 to 33 is completed. The positioning in the Z direction is the positioning of the upper surfaces of the teeth 31 to 33 with respect to the upper surfaces of the teeth 11 to 13.

[0051] Next, in the Y direction, the mover 1 and the mover 3 are aligned in the same plane. Here, the process (third process and fourth process) of aligning the mover 1 and the mover 3 in the same plane in the Y direction will be described. The positioning of the mover 1, 3 in the Y direction is the positioning of the exposed surface 361 of the teeth 31 to 33 with respect to the exposed surface 161 of the teeth 11 to 13.

[0052] FIG. 5 is a diagram for explaining a third process when the linear motor according to Embodiment 1 is manufactured. FIG. 5 shows, in a perspective view, the rotors 1 and 3, the device top plate 4, and the positioning member 5 in a state where the positioning member 5 is inserted into the positioning groove 16 of the rotor 1. The rectangular parallelepiped positioning member 5 has a shape that can be fitted into the rectangular parallelepiped positioning groove 16.

[0053] In the third process, as a preparation process for positioning the rotor 3 in the Y direction, the positioning member 5 is inserted into the positioning groove 16 of the rotor 1. The positioning groove 16 has three surfaces, and the positioning member 5 has six surfaces. In the third process, the positioning member 5 is fitted into the positioning groove 16 so that the side surface 51 of the positioning member 5 abuts against the exposed surface 161 of the positioning groove 16.

[0054] For example, one side surface 51 of the positioning member 5 abuts against the exposed surface 161 of the positioning groove 16 shown in FIG. 1, the bottom surface 162 of the positioning groove 16 shown in FIG. 1 and the bottom surface 52 of the positioning member 5 face each other, and the upper surface 163 of the positioning groove 16 shown in FIG. 1 and the upper surface 53 of the positioning member 5 face each other, and the positioning member 5 is inserted into and fitted into the positioning groove 16.

[0055] Since the teeth 11 to 13 of the rotor 1 are exposed on the exposed surface 161 from the positioning groove 16, the positioning groove 16 is fitted into the positioning member 5 so that the positioning member 5 abuts against the exposed surfaces 161 of the teeth 11 to 13. Thus, by inserting the positioning member 5 into the positioning groove 16, the positioning member 5 can be pressed against the exposed surfaces 161 of the teeth 11 to 13.

[0056] Thereby, it becomes possible to form the same plane as the teeth 11 to 13 of the rotor 1 on the positioning member 5. Specifically, the side surface 51 of the positioning member 5 and the exposed surfaces 161 of the teeth 11 to 13 can be arranged in the same plane.

[0057] Thereafter, the positioning member 5 is also fitted into the positioning groove 36 of the mover 3. FIG. 6 is a diagram for explaining a fourth process when the linear motor according to the first embodiment is manufactured. In FIG. 6, the movers 1 and 3, the apparatus top plate 4, and the positioning member 5 in a state where the positioning member 5 is inserted into the positioning groove 16 of the mover 1 and the positioning groove 36 of the mover 3 are shown in a perspective view. The rectangular parallelepiped positioning member 5 has a shape that can be fitted into the rectangular parallelepiped positioning grooves 16 and 36.

[0058] In the fourth process, the positioning groove 36 of the mover 3 is brought into contact with the positioning member 5. The fitting process between the positioning groove 36 and the positioning member 5 is the same as the fitting process between the positioning groove 16 and the positioning member 5. That is, in the fourth process, the positioning member 5 is fitted into the positioning groove 36 so that the side surface 51 of the positioning member 5 and the exposed surface 361 of the positioning groove 36 are in contact with each other.

[0059] Since the teeth 31 to 33 of the mover 3 are exposed on the exposed surface 361 which is the bottom surface from the positioning groove 36, the positioning groove 36 is fitted to the positioning member 5 so that the positioning member 5 is in contact with the exposed surface 361 of the teeth 31 to 33. In this way, by inserting the positioning member 5 into the positioning groove 36, the positioning member 5 can be pressed against the exposed surface 361 of the teeth 31 to 33.

[0060] Thereby, in the Y direction, the mover 1 and the mover 3 can be arranged in the same plane. That is, the side surface of the mover 1 and the side surface of the mover 3 can be arranged in the same plane. In other words, the exposed surface 161 of the teeth 11 to 13 and the exposed surface 361 of the teeth 31 to 33 can be arranged in the same plane. Thereby, the positioning in the Y direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0061] After the Z-direction and Y-direction of the teeth 11 to 13 and 31 to 33 are positioned, the mover 3 is moved in the X-direction while the Z-direction position and Y-direction position of the mover 3 are maintained, and the mover 3 is pressed against the mover 1. As a result, the gap in the X-direction between the mover 1 and the mover 3 disappears. Thereby, the positioning in the X-direction between the teeth 11 to 13 and the teeth 31 to 33 is completed, and the gap in the X-direction between the mover 1 and the mover 3 can be eliminated.

[0062] With the mover 3 pressed against the mover 1, the mounting hole 41 and the screw hole 34 are fastened with a screw 42, whereby the mover 3 is fixed to the apparatus top plate 4. In this way, when the linear motor 100 is manufactured, the movers 1 and 3 are connected by mounting the movers 1 and 3 on the apparatus top plate 4.

[0063] Note that the mounting hole 41 is formed larger than the screw hole 34. Thereby, when the mounting hole 41 and the screw hole 34 are fastened with the screw 42, the position of the mover 3 in the XY plane is determined without being affected by the position of the mounting hole 41 in the XY plane. That is, the position of the mover 1 in the XY plane is determined by the position of the screw hole 34 in the XY plane. Thereby, the position of the mover 3 in the XY plane in a state where it is positioned in the X-direction and Y-direction with respect to the mover 1 does not shift, and the mover 3 can be attached to the apparatus top plate 4.

[0064] Also, the mounting hole 41 may be formed larger than the screw hole 14. Thereby, even when the mover 3 is attached to the apparatus top plate 4 before the mover 1, the position of the mover 1 in a state where it is positioned with respect to the mover 3 does not shift, and the mover 1 can be attached to the apparatus top plate 4.

[0065] Thereby, in the connection of the movers 1 and 3, the positions in the Z-direction and Y-direction of the teeth 11 to 13 and 31 to 33 are the same. Also, there is no gap in the X-direction between the teeth 11 to 13 and the teeth 31 to 33. Specifically, there is no gap in the X-direction between the tooth 13 and the tooth 31.

[0066] In this way, positioning grooves 16 and 36 are provided in the movers 1 and 3, with a part of the iron cores (teeth 11 to 13, 31 to 33) exposed, and the mover 3 is positioned using the positioning member 5 and the positioning grooves 16 and 36. That is, the positioning grooves 16 and 36 are fitted to the positioning member 5 so that the positioning member 5 abuts against the exposed surfaces 161 of the teeth 11 to 13 and the exposed surfaces 361 of the teeth 31 to 33, thereby positioning the exposed surfaces 161 of the teeth 11 to 13 and the exposed surfaces 361 of the teeth 31 to 33.

[0067] As a result, when connecting the movers 1 and 3, which are the armatures, it is possible to easily align the positions of the teeth 11 to 13 and the teeth 31 to 33 not only in the Y direction but also in the X direction and the Z direction. That is, the positioning accuracy of the teeth 11 to 13 and the teeth 31 to 33 when the movers 1 and 3 are connected is improved.

[0068] Therefore, it is possible to accurately position the position in the direction perpendicular to both the direction of the magnetic gap and the traveling direction of the movers 1 and 3, and it is possible to reduce the thrust pulsation caused by the relative displacement between the movers 1 and 3 when the movers 1 and 3 are connected. In this way, by applying the connection method of the movers 1 and 3 in the manufacturing method of the electric motor according to the first embodiment, it is possible to provide a linear motor 100 with good positioning accuracy that suppresses the thrust pulsation caused by the error during the connection of the movers 1 and 3.

[0069] Also, a temperature measuring device may be attached to the exposed surfaces 161 and 361 of the positioning grooves 16 and 36. In this case, it is possible to directly measure the temperatures of the teeth 11 to 13 and 31 to 33, and it is possible to accurately measure the temperature of the movers 1 and 3, which are the armatures.

[0070] The attachment of the movers 1 and 3 to the device top plate 4 is executed, for example, by an attachment device that holds the object to be attached and attaches the screw 42 to the screw holes 14 and 34. Note that the process of holding the device top plate 4, the process of moving the mover 1 to the attachment position to the device top plate 4 while holding the mover 1, the process of attaching the screw 42 to the screw hole 14 through the attachment hole 41, the process of moving the mover 3 to the attachment position to the device top plate 4 while holding the mover 3, and the process of attaching the screw 42 to the screw hole 34 through the attachment hole 41 may be executed by separate devices or by a plurality of devices.

[0071] FIG. 7 is a flowchart showing the processing procedure of the process of manufacturing the linear motor according to Embodiment 1. When the linear motor 100 is manufactured, the mover 1 and the mover 3 are manufactured in advance. In the description of FIG. 7, the mover 1 in the linear motor 100 is referred to as the first mover 1, and the mover 3 is referred to as the second mover 3. When the first mover 1 and the second mover 3 are manufactured, positioning grooves 16 and 36 are formed in the first mover 1 and the second mover 3 (step S10).

[0072] Thereafter, the upper surface of the first mover 1 is fixed to the bottom surface of the device top plate 4 (step S20). Then, the upper surface of the second mover 3 is brought into contact with the bottom surface of the device top plate 4 (step S30). As a result, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 are in the same plane. That is, when the movers 1 and 3 are installed on the stator 2, the Z-direction positions of the teeth 11 to 13 and the Z-direction positions of the teeth 31 to 33 are the same.

[0073] Thereafter, the positioning member 5 is fitted into the positioning groove 16 of the first mover 1 (step S40). As a result, the side surface 51 of the positioning member 5 and the exposed surface 161 of the teeth 11 to 13 are in the same plane.

[0074] After that, the positioning groove 36 of the second mover 3 is fitted into the positioning member 5 (step S50). As a result, the side surface 51 of the positioning member 5 and the exposed surfaces 361 of the teeth 31 to 33 are in the same plane. Consequently, the exposed surfaces 161 of the teeth 11 to 13 and the exposed surfaces 361 of the teeth 31 to 33 are in the same plane. That is, when the movers 1 and 3 are installed on the stator 2, the positions of the teeth 11 to 13 and the teeth 31 to 33 in the Y direction are the same.

[0075] In this state, the second mover 3 is positioned in the X direction. Specifically, the second mover 3 is moved in the X direction while maintaining its positions in the Z and Y directions, and the second mover 3 is pressed against the first mover 1 (step S60). As a result, the gap between the movers 1 and 3 in the X direction (connection direction) disappears. After that, the upper surface of the second mover 3 is fixed to the bottom surface of the device top plate 4 (step S70).

[0076] In the first embodiment, the armatures are the movers 1 and 3, but the armature may be the stator, and the number of teeth provided in the armature is arbitrary. When the armature is the stator, the movers 1 and 3 are the field magnets.

[0077] Also, in the first embodiment, after the mover 1 is attached to the device top plate 4, the mover 3 is attached to the device top plate 4. However, as in the second embodiment described later, after the positions of the movers 1 and 3 are determined, the movers 1 and 3 may be attached to the device top plate 4. Further, the positioning member 5 may be removed or may not be removed after the positioning of the movers 1 and 3 is completed.

[0078] As described above, since the positioning grooves 16 and 36 are provided in the movers 1 and 3, for the modular linear motor 100 in which a plurality of movers 1 and 3 are connected to vary the thrust, the positioning accuracy of the connection when connecting the movers 1 and 3 can be improved.

[0079] In addition, since the positioning accuracy of the connection when connecting the movers 1 and 3 can be improved, the thrust pulsation caused by the misalignment of the connection can be suppressed. Therefore, the positioning accuracy of the operation by the linear motor 100 can be improved.

[0080] In addition, since the positioning grooves 16 and 36 are provided in the movers 1 and 3, it becomes possible to easily attach a temperature measuring device for measuring the temperatures of the teeth 11 to 13 and 31 to 33 to the positioning grooves 16 and 36.

[0081] Therefore, it is possible to realize a linear motor 100 with high added value in which the positioning accuracy of the connection of the movers 1 and 3 is good, the positioning accuracy of the operation by the linear motor 100 is good, and it is possible to easily attach the temperature measuring device to the positioning grooves 16 and 36.

[0082] As described above, in the linear motor 100 of Embodiment 1, when the movers 1 and 3 are arranged on the stator 2, the exposed surfaces 161 and 361 are formed such that the perpendiculars to the exposed surfaces 161 and 361 are perpendicular to the direction in which the thrust of the movers 1 and 3 is generated and the direction in which the magnetic gap is generated, and the movers 1 and 3 can be connected in the direction in which the thrust is generated. Thereby, the linear motor 100 can improve the positioning accuracy between the movers 1 and 3 when the movers 1 and 3 are connected and suppress the thrust pulsation caused by the misalignment between the iron cores of the movers 1 and 3.

[0083] Embodiment 2. Next, Embodiment 2 will be described with reference to FIGS. 8 to 14. In Embodiment 2, a positioning step is provided in the mover instead of the positioning grooves 16 and 36, and the positioning between the movers is performed using the positioning step and the positioning member.

[0084] FIG. 8 is a perspective view showing the configurations of the mover and the stator included in the linear motor according to Embodiment 2. Among the components in FIG. 8, the components that achieve the same functions as those of the linear motor 100 of Embodiment 1 shown in FIG. 1 are denoted by the same reference numerals, and redundant descriptions are omitted.

[0085] The linear motor 100A includes a mover 1A which is an armature instead of the mover 1 which is an armature as compared with the linear motor 100. That is, the linear motor 100A includes a mover 1A which is an armature and a stator 2 which is a field magnet facing the mover 1A with a gap therebetween.

[0086] Note that the linear motor 100A includes a mover 3A which is an armature instead of the mover 3 which is an armature as compared with the linear motor 100, but the illustration of the mover 3A is omitted in FIG. 8. In Embodiment 2, the mover 1A is the first mover, and the mover 3A is the second mover. Since the mover 3A has the same configuration as the mover 1A, the configuration of the mover 1A will be described here.

[0087] The mover 1A has teeth 11 to 13 in the same manner as the mover 1. The mover 1A has a positioning step 17 instead of the positioning groove 16 as compared with the mover 1. The positioning step 17 is formed in the resin 15 in the same manner as the positioning groove 16. That is, the resin 15 is provided with a positioning step 17 in a rectangular parallelepiped region, and a part of the side surfaces of the teeth 11 to 13 is exposed from the positioning step 17 to the outside of the teeth 11 to 13. The positioning step 17 has a step with the upper surfaces of the teeth 11 to 13 in which the screw holes 14 are provided.

[0088] The shape of the positioning step 17 is such that a part of a rectangular parallelepiped positioning member 5A described later can be brought into contact therewith. The positioning step 17 has an exposed surface 171 parallel to the XZ plane, a step surface 172 parallel to the XY plane, and an open surface parallel to the YZ plane, and the exposed surface 171 is the exposed portion of the teeth 11 to 13. In other words, due to the formation of the positioning step 17, the surface from which the teeth 11 to 13 protrude from the resin 15 is the exposed surface 171.

[0089] In this way, for the positioning step 17, the surface in the thrust generation direction is the open surface. Also, in the positioning step 17, the step surface 172 and the surface perpendicular to the open surface are the exposed surfaces 171. The step surface 172 is a surface parallel to the upper surface of the outer wall surface of the mover 1A that is fastened to the device top plate 4 and provided with a step from this upper surface.

[0090] The step surface 172 of the positioning step 17 is a surface parallel to the upper and lower surfaces of the mover 1A, and the exposed surface 171 of the positioning step 17 is a surface parallel to the left and right side surfaces of the mover 1A. The step surface 172 is the same surface as the bottom surface 162 of the positioning groove 16. The upper surfaces of the teeth 11 to 13 and the step surface 172 of the positioning step 17 are parallel, but different in height in the Z direction.

[0091] In this way, in the mover 1A, the positioning step 17 is provided in the resin 15 so that a step can be formed between the upper surfaces of the teeth 11 to 13 and the step surface 172 of the positioning step 17. And the exposed surface 171 of the positioning step 17 becomes the positioning surface in the Y direction when connecting the movers 1 and 3.

[0092] FIG. 9 is a perspective view showing the configuration of the linear motor according to Embodiment 2. In FIG. 9, a perspective view of the linear motor 100A when the mover 1A and the mover 3A are connected in the thrust generation direction is shown.

[0093] Similar to the mover 1A, the mover 3A is disposed above the stator 2 and moves along the arrangement direction of the permanent magnets 21 on the stator 2. The movers 1A and 3A are connected along the positive X direction.

[0094] The mover 3A has the same configuration as the mover 1A. The mover 1A and the mover 3A may be the same mover, or may be movers with some different configurations. In the movers 1A and 3A, at least the configurations of the teeth 11 to 13 and the teeth 31 to 33 are the same.

[0095] Further, the teeth 31 to 33 have a positioning step 37 and a screw hole 34. The positioning step 37 has the same shape as the positioning step 17. That is, the shape and the arrangement position of the positioning step 17 in the mover 1A are the same as the shape and the arrangement position of the positioning step 37 in the mover 3A. The mover 3A has an exposed surface 371 similar to the exposed surface 171 and a stepped surface 372 similar to the stepped surface 172.

[0096] In the positioning step 37, the stepped surface 372 and the surface perpendicular to the open surface are the exposed surface 371. The stepped surface 372 is a surface parallel to the upper surface to which the device top plate 4 is fastened among the outer wall surfaces of the mover 3A and provided with a step from this upper surface.

[0097] The positioning step 17 is the first positioning step, and the positioning step 37 is the second positioning step. Further, the stepped surface 172 of the positioning step 17 is the first stepped surface, and the stepped surface 372 of the positioning step 37 is the second stepped surface. Further, the upper surface of the outer wall surface of the mover 1A to which the device top plate 4 is fastened is the first upper surface, and the upper surface of the outer wall surface of the mover 3A to which the device top plate 4 is fastened is the second upper surface.

[0098] As shown in FIG. 9, the linear motor 100A can improve the thrust by connecting the movers 1A and 3A, which are armatures, in the thrust generation direction (positive X direction). Similar to the linear motor 100, in the linear motor 100A, the teeth 11 to 13 and 31 to 33 are aligned on the same plane for each of the Y direction and the Z direction, and in the X direction, the positions of the teeth 11 to 13 and 31 to 33 are aligned so that there is no gap between the teeth 13 and 31.

[0099] Hereinafter, with reference to FIGS. 10 to 13, a method for positioning the mover 1A and the mover 3A in the second embodiment will be described. FIG. 10 is a diagram for explaining a first process when the linear motor according to the second embodiment is manufactured. FIG. 10 shows a perspective view of the movers 1A and 3A and the workbench 8 in a state where the movers 1A and 3A are placed on the workbench (surface plate) 8. Hereinafter, a case where the bottom surface of the workbench 8 is parallel to the XY plane will be described.

[0100] When the linear motor 100A is manufactured, the mover 1A serving as a positioning reference is placed on the upper surface side of the workbench 8 with guaranteed flatness. Also, the mover 3A to be positioned with respect to the mover 1A is placed on the upper surface side of the workbench 8.

[0101] As a result, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 are on the same plane. That is, when the movers 1A and 3A are installed in the stator 2, the positions of the teeth 11 to 13 in the Z direction and the positions of the teeth 31 to 33 in the Z direction are the same. Thereby, the positioning in the Z direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0102] Next, regarding the Y direction, the movers 1A and 3A are aligned in the same plane. Here, the process (the second process and the third process) of aligning the movers 1A and 3A in the same plane in the Y direction will be described. The positioning of the movers 1A and 3A in the Y direction is the positioning of the exposed surfaces 371 of the teeth 31 to 33 with respect to the exposed surfaces 171 of the teeth 11 to 13, similar to the positioning of the movers 1 and 3 in the Y direction.

[0103] FIG. 11 is a diagram for explaining the second process when the linear motor according to Embodiment 2 is manufactured. In FIG. 11, a perspective view shows the mover 1A, the mover 3A, the workbench 8, the temperature measuring device 6, and the positioning member 5A in a state where the positioning member 5A is in contact with the positioning step 17 of the mover 1A. The rectangular parallelepiped positioning member 5A has a shape that can be brought into contact with the rectangular parallelepiped positioning step 17.

[0104] In the second process, as a preparatory process for positioning the mover 3 in the Y direction, the positioning member 5A is brought into contact with the positioning step 17 of the mover 1A. Also, the temperature measuring device 6 is disposed at the positioning step 17.

[0105] The positioning step 17 has two surfaces, and the positioning member 5A has six surfaces. In the second process, the positioning member 5A is brought into contact with the positioning step 17 such that the side surface 51A of the positioning member 5A contacts the exposed surface 171 of the positioning step 17.

[0106] For example, one side surface 51A of the positioning member 5A contacts the exposed surface 171 of the positioning step 17 shown in FIG. 8, and the positioning member 5A is arranged on the positioning step 17 such that the step surface 172 of the positioning step 17 shown in FIG. 8 and the bottom surface 52A of the positioning member 5A face each other.

[0107] Further, the temperature measuring device 6 has a rectangular parallelepiped member having six surfaces and a cable joined to the rectangular parallelepiped member. In the temperature measuring device 6, the cable is joined to the rectangular parallelepiped member such that when the temperature measuring device 6 is arranged on the positioning step 17, the cable and the rectangular parallelepiped member are extended in the X direction.

[0108] The temperature measuring device 6 is arranged on the positioning step 17 such that one side surface 610 of the rectangular parallelepiped member contacts the exposed surface 171 of the positioning step 17 and the step surface 172 of the positioning step 17 and the bottom surface 620 of the rectangular parallelepiped member face each other.

[0109] From the positioning step 17, the teeth 11 to 13 of the mover 1A are exposed on the exposed surface 171, so the positioning member 5A is arranged on the positioning step 17 such that the positioning member 5A contacts at least a part of the exposed surface 171 of the teeth 11 to 13. Thereby, the positioning member 5A can be pressed against the exposed surface 171 of the teeth 11 to 13.

[0110] Thereby, it becomes possible to create the same plane as the teeth 11 to 13 of the mover 1A on the positioning member 5A. Specifically, the side surface 51A of the positioning member 5A and the exposed surface 171 parallel to the XZ plane of the teeth 11 to 13 can be arranged in the same plane.

[0111] Further, since the teeth 11 to 13 of the mover 1A are exposed on the exposed surface 171 from the positioning step 17, by arranging the temperature measuring device 6 on the positioning step 17, the temperature measuring device 6 can be brought into direct contact with the exposed surface 171 of the teeth 11 to 13.

[0112] FIG. 12 is a diagram for explaining a third process when the linear motor according to the second embodiment is manufactured. In FIG. 12, the movers 1A and 3A, the temperature measuring device 6, and the workbench 8 in a state where the positioning member 5A is arranged on the positioning step 17 of the mover 1A and the positioning step 37 of the mover 3A are shown in a perspective view. The rectangular parallelepiped positioning member 5A has a shape that can be arranged on the rectangular parallelepiped positioning steps 17 and 37.

[0113] In the third process, the positioning step 37 of the mover 3A is brought into contact with the positioning member 5A, and the positioning step 37 is brought into contact with the positioning member 5A. The process of bringing the positioning step 37 into contact with the positioning member 5A is the same as the process of bringing the positioning member 5A into contact with the positioning step 17. That is, in the third process, the positioning member 5A is arranged on the positioning step 37 so that the side surface 51A of the positioning member 5A and the exposed surface 371 of the positioning step 37 are in contact with each other.

[0114] Since the teeth 31 to 33 of the mover 3A are exposed on the exposed surface 371 similar to the exposed surface 171 from the positioning step 37, the positioning member 5A is arranged on the positioning step 37 so that the positioning member 5A is in contact with at least a part of the exposed surface 371 of the teeth 31 to 33. In FIG. 12, a case where the positioning member 5A is arranged on the positioning step 37 so as to be in contact with the teeth 31 and 32 is shown. Thereby, the positioning member 5A can be pressed against the exposed surface 371 of the teeth 31 to 33.

[0115] As a result, the side surface 51A of the positioning member 5A and the exposed surfaces 371 of the teeth 31 to 33 are on the same plane. That is, the exposed surfaces 171 of the teeth 11 to 13 and the exposed surfaces 371 of the teeth 31 to 33 are on the same plane. In other words, when the rotors 1A and 3A are installed on the stator 2, the positions of the teeth 11 to 13 in the Y direction and the positions of the teeth 31 to 33 in the Y direction are the same. As a result, the positioning of the teeth 11 to 13 and the teeth 31 to 33 in the Y direction is completed.

[0116] After the teeth 11 to 13 and 31 to 33 are positioned in the Z direction and the Y direction, the rotor 3A is moved in the X direction while maintaining its position in the Z direction and the Y direction, and the rotor 3A is pressed against the rotor 1A. As a result, the gap between the rotor 1A and the rotor 3A in the X direction disappears, and the positioning of the teeth 11 to 13 and the teeth 31 to 33 in the X direction is completed.

[0117] FIG. 13 is a diagram for explaining a fourth process when the linear motor according to the second embodiment is manufactured. FIG. 13 shows a perspective view of the rotors 1A and 3A and the apparatus top plate 4 in a state where the rotors 1A and 3A are attached to the apparatus top plate 4.

[0118] When the linear motor 100 is manufactured, the upper surfaces of the rotors 1A and 3A are attached to the bottom surface of the apparatus top plate 4. At that time, the upper surfaces of the teeth 11 to 13 and 31 to 33 of the rotors 1A and 3A are brought into contact with the bottom surface of the apparatus top plate 4 so as to have no gap.

[0119] After that, the rotor 1A is moved parallel to the XY plane along the bottom surface of the apparatus top plate 4 so that the mounting holes 41 provided in the apparatus top plate 4 and the screw holes 34 provided in the rotors 1A and 3A are aligned in the coaxial direction. Then, by fastening the mounting hole 41 and the screw hole 14 with a screw 42, the rotors 1A and 3A are fixed to the apparatus top plate 4.

[0120] In this way, by arranging the positioning steps 17 and 37 on the positioning member 5A so that the positioning member 5A abuts at least a part of the exposed surfaces 171 of the teeth 11 to 13 and at least a part of the exposed surfaces 371 of the teeth 31 to 33, the positioning of the exposed surfaces 171 of the teeth 11 to 13 and the exposed surfaces 371 of the teeth 31 to 33 is performed. As a result, similar to the linear motor 100, the linear motor 100A can easily align the positions of the teeth 11 to 13 and the teeth 31 to 33 in the X direction, Y direction, and Z direction when the rotors 1A and 3A are connected. As a result, the positioning accuracy of the teeth 11 to 13 and the teeth 31 to 33 when the rotors 1A and 3A are connected is improved.

[0121] Therefore, similar to the linear motor 100, the linear motor 100A can reduce the thrust pulsation caused by the relative displacement between the rotors 1A and 3A when the rotors 1A and 3A are connected. In this way, by applying the method for manufacturing an electric motor according to the second embodiment, it is possible to provide a linear motor 100A with good positioning accuracy that suppresses the thrust pulsation caused by the error during the connection of the rotors 1A and 3A.

[0122] Also, simultaneously with the connection of the rotors 1A and 3A, the temperature measuring device 6 can be fixed to the rotor 1A by sandwiching the temperature measuring device 6 between the rotor 1A and the device top plate 4. Further, by attaching the temperature measuring device 6 to the exposed surface 171 of the positioning step 17, it becomes possible to directly measure the temperature of the teeth 11 to 13, and it becomes possible to accurately measure the temperature of the rotor 1A which is the armature. The attachment of the rotors 1A and 3A to the device top plate 4 is performed by the same attachment device as the attachment device for attaching the rotors 1 and 3 to the device top plate 4 described in the first embodiment.

[0123] FIG. 14 is a flowchart showing the processing procedure for manufacturing the linear motor according to Embodiment 2. When the linear motor 100A is manufactured, the mover 1A and the mover 3A are manufactured in advance. In the description of FIG. 14, the mover 1A in the linear motor 100A is referred to as the first mover 1A, and the mover 3A is referred to as the second mover 3A. When the first mover 1A and the second mover 3A are manufactured, positioning steps 17 and 37 are formed on the first mover 1A and the second mover 3A (step S110).

[0124] Thereafter, the first mover 1A and the second mover 3A are placed on the workbench 8 (step S120). As a result, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 are in the same plane. That is, when the movers 1A and 3A are installed in the stator 2, the Z-direction positions of the teeth 11 to 13 and the Z-direction positions of the teeth 31 to 33 are the same.

[0125] Thereafter, the positioning member 5A and the temperature measuring device 6 are arranged at the positioning step 17 of the first mover 1A (step S130). As a result, the exposed surface 171 of the teeth 11 to 13 abuts against the side surface 51A of the positioning member 5A, and the side surface 51A of the positioning member 5A and the exposed surface 171 of the teeth 11 to 13 are in the same plane.

[0126] Furthermore, the positioning step 37 of the second mover 3A is arranged on the positioning member 5A (step S140). As a result, at least a part of the exposed surface 371 of the teeth 31 to 33 abuts against the side surface 51A of the positioning member 5A, and the side surface 51A of the positioning member 5A and the exposed surface 371 are in the same plane. As a result, the exposed surface 171 of the teeth 11 to 13 and the exposed surface 371 of the teeth 31 to 33 are in the same plane. That is, when the movers 1A and 3A are installed in the stator 2, the Y-direction positions of the teeth 11 to 13 and the Y-direction positions of the teeth 31 to 33 are the same.

[0127] In this state, the second mover 3A is positioned in the X direction. Specifically, while the positions of the second mover 3A in the Z direction and the Y direction are maintained, the second mover 3A is moved in the X direction and pressed against the first mover 1A (step S150). As a result, the gap in the X direction (connection direction) between the first mover 1A and the second mover 3A disappears. After that, the upper surfaces of the first mover 1A and the second mover 3A are fixed to the bottom surface of the device top plate 4 (step S160). Note that the process of step S110 and the processes of steps S120 to S160 may be executed at different locations. For example, the process of step S110 may be executed by the manufacturer of the first mover 1A and the second mover 3A, and the processes of steps S120 to S160 may be executed by the merchant who purchased the first mover 1A and the second mover 3A.

[0128] In addition, in the second embodiment, the armatures are the movers 1A and 3A, but the armature may be a stator, and the number of teeth of the teeth included in the armature is arbitrary. When the armature is a stator, the movers 1A and 3A are field magnets.

[0129] Also, in the second embodiment, the case where the movers 1A and 3A are fixed to the device top plate 4 after the positioning of the movers 1A and 3A is completed has been described. However, as in the first embodiment, after the mover 1A is fixed to the device top plate 4, the positioning of the movers 1A and 3A may be performed. In this case, after the positioning of the movers 1A and 3A is completed, the mover 3A is fixed to the device top plate 4. Further, the positioning member 5A may be removed or may not be removed after the positioning between the movers 1A and 3A is completed.

[0130] As described above, in the movers 1A and 3A of Embodiment 2, a positioning step 17 where a part of the teeth 11 to 13 and 31 to 33 is exposed is provided on the movers 1A and 3A so that a step can be formed between the fastening surfaces of the movers 1A and 3A and the apparatus top plate 4. When the movers 1A and 3A are connected, the positioning in the Y direction of the movers 1A and 3A is performed using the positioning step 17 and the positioning member 5A. Thereby, the positioning accuracy between the movers 1A and 3A when they are connected can be improved, and the thrust pulsation caused by the displacement between the cores of the movers 1A and 3A can be suppressed.

[0131] Further, since the positioning step 17 is provided on the mover 1A, it becomes possible to easily attach the temperature measuring device 6 for measuring the temperatures of the teeth 11 to 13 to the positioning step 17. Thereby, it becomes possible to achieve both the reduction of the thrust pulsation and the reduction of the man-hours for the process of fixing the temperature measuring device 6. Note that the temperature measuring device 6 may be arranged at the positioning step 37. The temperature measuring device 6 may be arranged at at least one of the positioning steps 17 and 37.

[0132] Embodiment 3. Next, Embodiment 3 will be described with reference to FIGS. 15 to 24. In Embodiment 3, a positioning surface that abuts against a positioning member is provided on the resins 15 and 35 of the mover, and the positioning between the movers is performed using the positioning surface and the positioning member.

[0133] FIG. 15 is a perspective view showing the configurations of the mover and the stator included in the linear motor according to Embodiment 3. Among the components in FIG. 15, the components that achieve the same functions as those of the linear motor 100A of Embodiment 2 shown in FIG. 8 are denoted by the same reference numerals, and redundant descriptions are omitted.

[0134] The linear motor 100B includes a mover 1B that is an armature instead of the mover 1A that is an armature as compared with the linear motor 100A. That is, the linear motor 100B includes a mover 1B that is an armature and a stator 2 that is a field magnet facing the mover 1B with a gap therebetween.

[0135] Note that the linear motor 100B includes a mover 3B as an armature instead of the mover 3A which is the armature of the linear motor 100A. However, the illustration of the mover 3B is omitted in FIG. 15. In Embodiment 3, the mover 1B is the first mover, and the mover 3B is the second mover. Since the mover 3B has the same configuration as the mover 1B, the configuration of the mover 1B will be described here.

[0136] The mover 1B has teeth 11 to 13 in the same manner as the mover 1A. Further, the mover 1B has a positioning step 17 in the same manner as the mover 1A. Note that the mover 1B may have a positioning groove 16 in the same manner as the mover 1 in Embodiment 1.

[0137] Compared with the mover 1A, the mover 1B has a positioning surface 18B on the outer wall surface and draw slopes 61 and 62 for releasing from the molding die. The positioning surface 18B and the draw slopes 61 and 62 are formed in the resin 15 in the same manner as the positioning groove 16.

[0138] The positioning surface 18B and the draw slopes 61 and 62 are provided on the left side surface of the mover 1B. The left side surface on which the positioning surface 18B and the draw slopes 61 and 62 are formed is the side surface of the two side surfaces of the mover 1B on the side where the positioning step 17 is formed. The positioning surface 18B is a plane parallel to the XZ plane. That is, the positioning surface 18B is a plane parallel to the exposed surface 171 of the teeth 11 to 13. The positioning surface 18B has a shape formed by a side mold 7C described later that is parallel to the XZ plane.

[0139] FIG. 16 is a perspective view showing the configuration of a mover included in a linear motor of a comparative example. The linear motor of the comparative example has a mover 1X instead of the mover 1B compared with the linear motor 100B.

[0140] The mover 1X is formed with draft gradient surfaces 63 and 64 for releasing from the molding die. The draft gradient surfaces 63 and 64 are provided on the left side surface of the mover 1X. The draft gradient surfaces 63 and 64 are gradients for easily pulling out the resin 15 in the Z direction from the molding die. For this reason, the draft gradient surfaces 63 and 64 are not parallel to the XZ plane but are inclined from the XZ plane.

[0141] On the other hand, the mover 1B is provided with draft gradient surfaces 61 and 62 and a positioning surface 18B on the left side surface of the mover 1B. The draft gradient surfaces 61 and 62 are gradients for easily pulling out the resin 15 in the Z direction from the molding die. For this reason, the draft gradient surfaces 61 and 62 are not parallel to the XZ plane but are inclined from the XZ plane.

[0142] The positioning surface 18B is a surface parallel to the XZ plane. When positioning the movers 1B and 3B in the Y direction, the positioning surface 18B parallel to the XZ plane and the side mold 7C parallel to the XZ plane are used. In this way, the positioning surface 18B serves as the positioning surface in the Y direction when connecting the movers 1B and 3B.

[0143] FIG. 17 is a diagram for explaining a molding die used when molding a mover included in the linear motor according to Embodiment 3. In FIG. 17, a perspective view showing the configuration of the mover 1B and the molding die used when molding the mover 1B is shown.

[0144] The molding die used when molding the mover 1B is the upper and lower molds 7A and 7B and two side molds 7C. The upper and lower mold 7A is a molding die (upper mold) used when molding the upper region of the resin 15, and the upper and lower mold 7B is a molding die (lower mold) used when molding the lower region of the resin 15.

[0145] It is difficult to form the positioning surface 18B, which is a plane parallel to the XZ plane, in the resin 15 only with the upper and lower molds 7A and 7B. Therefore, in Embodiment 3, two side molds 7C are used together with the upper and lower molds 7A and 7B.

[0146] One of the two side molds 7C is used when molding the left side surface of the resin 15, and the other side mold 7C is used when molding the right side surface of the resin 15. The side mold 7C has a plane parallel to the XZ plane, and the plane parallel to the XZ plane of the side mold 7C presses the resin 15 from a direction parallel to the XZ plane. That is, the side mold 7C moves along the direction perpendicular to the exposed surface 171 of the teeth 11 to 13, bringing the resin 15 into a state where it can be molded.

[0147] Thereby, when the resin 15 is formed, an alignment surface 18B parallel to the XZ plane is formed on the resin 15. That is, the alignment surface 18B is formed so as to be parallel to the exposed surface 171 of the teeth 11 to 13.

[0148] FIG. 18 is a perspective view showing the configuration of the linear motor according to Embodiment 3. In FIG. 18, a perspective view of the linear motor 100B when the mover 1B and the mover 3B are connected in the thrust generation direction is shown. Among the components in FIG. 18, the components that achieve the same functions as those of the linear motor 100B shown in FIG. 15 are denoted by the same reference numerals, and duplicate explanations are omitted.

[0149] Similar to the mover 1B, the mover 3B is disposed above the stator 2 and moves on the stator 2 along the arrangement direction of the permanent magnets 21. The movers 1B and 3B are connected along the X direction.

[0150] The mover 3B has the same configuration as the mover 1B. An alignment surface 38B having the same configuration as the alignment surface 18B is formed on the mover 3B. The alignment surface 38B is a plane parallel to the XZ plane. That is, the alignment surface 38B is a plane parallel to the exposed surface 371 of the teeth 31 to 33. The alignment surface 38B has a shape formed by a side mold 7C parallel to the XZ plane. The alignment surface 18B is the first alignment surface, and the alignment surface 38B is the second alignment surface.

[0151] The mover 1B and the mover 3B may be the same mover, or they may be movers with some different configurations. At least the configurations of the teeth 11 to 13 and the teeth 31 to 33 are the same between the mover 1B and the mover 3B.

[0152] As shown in FIG. 18, in the linear motor 100B, the movers 1B and 3B, which are armatures, are connected in the thrust generation direction (plus X direction), so that the thrust can be improved. Similar to the linear motor 100A, in the linear motor 100B, the teeth 11 to 13 and 31 to 33 are aligned on the same plane for each of the Y direction and the Z direction, and in the X direction, the positions of the teeth 11 to 13 and 31 to 33 are aligned so that there is no gap between the teeth 13 and 31.

[0153] Hereinafter, with reference to FIGS. 19 to 22, a method for positioning the mover 1B and the mover 3B in the third embodiment will be described. The positioning procedure of the movers 1B and 3B is the same as the positioning procedure of the movers 1 and 3. In the first embodiment, the positioning members 5 and the positioning grooves 16 and 36 are used for positioning the movers 1 and 3, but in the third embodiment, the positioning member 5B and the positioning steps 17 and 37 are used.

[0154] FIG. 19 is a diagram for explaining the first process when the linear motor according to the third embodiment is manufactured. In FIG. 19, a perspective view of the mover 1B and the apparatus top plate 4 in a state where the mover 1B is attached to the apparatus top plate 4 is shown.

[0155] When the linear motor 100B is manufactured, the mover 1B serving as a positioning reference is attached to the apparatus top plate 4 with guaranteed flatness. Specifically, the upper surface of the mover 1B is fixed to the bottom surface of the apparatus top plate 4. At this time, the upper surfaces of the teeth 11 to 13 of the mover 1B are brought into contact with the bottom surface of the apparatus top plate 4 so as to have no gap.

[0156] Thereafter, the mover 1B is moved parallel to the XY plane along the bottom surface of the apparatus top plate 4 so that the mounting hole 41 provided in the apparatus top plate 4 and the screw hole 14 provided in the mover 1B are aligned in the coaxial direction. Then, by fastening the mounting hole 41 and the screw hole 14 with a screw 42, the mover 1B is fixed to the apparatus top plate 4.

[0157] FIG. 20 is a diagram for explaining a second process when the linear motor according to Embodiment 3 is manufactured. In FIG. 20, a perspective view shows the mover 1B, 3B and the apparatus top plate 4 in a state where the upper surface of the mover 3B, which is the second mover in the linear motor 100B, is in contact with the bottom surface of the apparatus top plate 4.

[0158] After the mover 1B is fastened to the apparatus top plate 4, the upper surfaces of the teeth 31 to 33 of the mover 3B are brought into contact with the apparatus top plate 4 so as to have no gap with the bottom surface of the apparatus top plate 4. Thereby, in the Z direction, the mover 1B and the mover 3B can be arranged in the same plane. That is, the upper surface of the mover 1B and the upper surface of the mover 3B can be arranged in the same plane. In other words, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 can be arranged in the same plane. Thereby, the positioning in the Z direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0159] Next, in the Y direction, the mover 1B and the mover 3B are aligned in the same plane. Here, the process (the third process and the fourth process) of aligning the mover 1B and the mover 3B in the same plane in the Y direction will be described. The positioning of the mover 1B and 3B in the Y direction is the positioning of the exposed surfaces 371 of the teeth 31 to 33 with respect to the exposed surfaces 171 of the teeth 11 to 13.

[0160] FIG. 21 is a diagram for explaining a third process when the linear motor according to Embodiment 3 is manufactured. In FIG. 21, the mover 1B, the mover 3B, the apparatus top plate 4, and the positioning member 5B in a state where the plate-shaped positioning member 5B is in contact with the positioning surface 18B of the mover 1B are shown in a perspective view. The plate-shaped positioning member 5B has a side surface 52B parallel to the XZ plane and is shaped to be able to contact the positioning surface 18B parallel to the XZ plane.

[0161] In the third process, as a preparation process for positioning the mover 3B in the Y direction, the positioning member 5B is pressed against the positioning surface 18B of the mover 1B. As a result, the side surface 52B of the positioning member 5B contacts the positioning surface 18B of the mover 1B. In this state, the positioning member 5B is temporarily fixed perpendicular to the apparatus top plate 4. Specifically, the positioning member 5B is temporarily fixed to the apparatus top plate 4 such that the side surface 52B of the positioning member 5B parallel to the XZ plane and the bottom surface of the apparatus top plate 4 parallel to the XY plane are perpendicular.

[0162] Since the positioning surface 18B is a surface parallel to the exposed surfaces 171 of the teeth 11 to 13, when the side surface 52B of the positioning member 5B is pressed against the positioning surface 18B, the side surface 52B of the positioning member 5B becomes parallel to the exposed surfaces 171 of the teeth 11 to 13.

[0163] After that, the positioning surface 38B of the mover 3B is pressed against the positioning member 5B. FIG. 22 is a diagram for explaining a fourth process when the linear motor according to Embodiment 3 is manufactured. In FIG. 22, the mover 1B, 3B, the apparatus top plate 4, and the positioning member 5B in a state where the positioning surface 38B of the mover 3B is pressed against the side surface 52B of the positioning member 5B are shown in a perspective view.

[0164] In the fourth process, the positioning surface 38B of the mover 3B abuts against the side surface 52B of the positioning member 5B. As a result, in the Y direction, the mover 1B and the mover 3B can be arranged in the same plane. That is, the plane parallel to the XZ plane of the mover 1B and the plane parallel to the XZ plane of the mover 3B can be arranged in the same plane. In other words, the exposed surfaces 171 of the teeth 11 to 13 and the exposed surfaces 371 of the teeth 31 to 33 can be arranged in the same plane. Thereby, the positioning in the Y direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0165] After the Z direction and the Y direction of the teeth 11 to 13 and 31 to 33 are positioned, the mover 3B is moved in the X direction while the Z direction and the Y direction positions of the mover 3B are maintained, and the mover 3B is pressed against the mover 1B. As a result, the gap in the X direction between the mover 1B and the mover 3B disappears. Thereby, the positioning in the X direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0166] As a result, the mounting hole 41 provided in the device top plate 4 and the screw hole 34 provided in the mover 3B are aligned in the coaxial direction. In this state, when the mounting hole 41 and the screw hole 34 are fastened with the screw 42, the mover 3B is fixed to the device top plate 4.

[0167] Thereby, it becomes possible to connect the movers 1B and 3B with no gap in the X direction between them. In this connection of the movers 1B and 3B, the positions in the Z direction and the Y direction of the teeth 11 to 13 and 31 to 33 are the same. Also, there is no gap in the X direction between the teeth 11 to 13 and the teeth 31 to 33.

[0168] Thereby, when connecting the movers 1B and 3B, the positions in the X direction, Y direction, and Z direction of the teeth 11 to 13 and the teeth 31 to 33 can be easily aligned. As a result, the positioning accuracy between the teeth 11 to 13 and the teeth 31 to 33 when the movers 1B and 3B are connected is improved.

[0169] Note that, similar to Embodiment 2, in Embodiment 3, the temperature measuring device 6 may be fixed to at least one of the movers 1B and 3B simultaneously with the connection of the movers 1B and 3B. The attachment of the movers 1B and 3B to the device top plate 4 is performed by an attachment device similar to the attachment device for attaching the movers 1 and 3 to the device top plate 4 described in Embodiment 1.

[0170] FIG. 23 is a flowchart showing the processing procedure for manufacturing the linear motor according to Embodiment 3. When manufacturing the linear motor 100B, the mover 1B and the mover 3B are manufactured in advance. In the description of FIG. 23, the mover 1B in the linear motor 100B is referred to as the first mover 1B, and the mover 3B is referred to as the second mover 3B. When manufacturing the first mover 1B and the second mover 3B, positioning surfaces 18B and 38B are formed on the first mover 1B and the second mover 3B (step S210).

[0171] Here, the processing procedure for manufacturing the movers 1B and 3B will be described. FIG. 24 is a flowchart showing the processing procedure for manufacturing the mover of the linear motor according to Embodiment 3. Since the movers 1B and 3B are manufactured by the same processing procedure, here, the processing procedure for manufacturing the mover 1B will be described.

[0172] When manufacturing the mover 1B, a draft surface 61, 62 and a positioning surface 18B are formed on the mover 1B using a molding die (step S310). Specifically, the upper and lower dies 7A and 7B and the two side dies 7C are arranged so as to surround the teeth 11 to 13, and a resin material is poured into the region surrounded by the upper and lower dies 7A and 7B and the two side dies 7C. When this resin material solidifies, a draft surface 61, 62 and a positioning surface 18B are formed on the outer wall surface of the resin 15. After that, the mover 1B is released from the molding die (step S320). That is, the mover 1B is removed from the upper and lower dies 7A and 7B and the side die 7C. Thereby, the mover 1B is manufactured. Also, the mover 3B is manufactured in the same manner as the mover 1B.

[0173] After the first mover 1B and the second mover 3B are manufactured, the upper surface of the first mover 1B is fixed to the bottom surface of the apparatus top plate 4 (step S220). Then, the upper surface of the second mover B3 is brought into contact with the bottom surface of the apparatus top plate 4 (step S230). As a result, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 are in the same plane. That is, when the movers 1B and 3B are installed in the stator 2, the Z-direction positions of the teeth 11 to 13 and the Z-direction positions of the teeth 31 to 33 are the same.

[0174] The positioning member 5B is brought into contact with the positioning surface 18B of the first mover 1B (step S240). As a result, the side surface 52B of the positioning member 5B and the exposed surface 171 of the teeth 11 to 13 are parallel.

[0175] After that, the positioning surface 38B of the second mover 3 is brought into contact with the positioning member 5B (step S250). As a result, the side surface 52B of the positioning member 5B and the exposed surface 371 of the teeth 31 to 33 are parallel. As a result, the exposed surface 171 of the teeth 11 to 13 and the exposed surface 371 of the teeth 31 to 33 are in the same plane. That is, when the movers 1B and 3B are installed in the stator 2, the Y-direction positions of the teeth 11 to 13 and the Y-direction positions of the teeth 31 to 33 are the same.

[0176] In this state, the second mover 3B is positioned in the X direction. Specifically, while the Z-direction position and the Y-direction position of the second mover 3B are maintained, the second mover 3B is moved in the X direction and the second mover 3B is pressed against the first mover 1B (step S260). As a result, the gap in the X direction (connection direction) between the mover 1B and the mover 3B disappears. After that, the upper surface of the second mover 3B is fixed to the bottom surface of the apparatus top plate 4 (step S270).

[0177] In the third embodiment, the armatures are the movers 1B and 3B, but the armatures may be the stators, and the number of teeth provided in the armatures is arbitrary. When the armature is the stator, the movers 1B and 3B are the field magnets.

[0178] In Embodiment 3, the mover 1B was attached to the apparatus top plate 4 and then the mover 3B was attached to the apparatus top plate 4. However, as in Embodiment 2, the movers 1B and 3B may be attached to the apparatus top plate 4 after their positions are determined. Further, the positioning member 5B may be removed after the positioning between the mover 1B and the mover 3B is completed, or may not be removed.

[0179] Note that in Embodiment 3, the case where the positioning steps 17 and 37 are provided on the movers 1B and 3B has been described, but the positioning steps 17 and 37 may not be provided on the movers 1B and 3B.

[0180] When the linear motor 100B of Embodiment 3 is manufactured in this way, the positioning surfaces 18B and the positioning member 5B are used to position the movers 1B and 3B in the Y direction. As a result, the positioning accuracy between the movers 1B and 3B when they are connected can be improved, and the thrust pulsation caused by the displacement between the cores of the movers 1B and 3B can be suppressed.

[0181] Further, since the positioning member 5B is disposed outside the movers 1B and 3B, it becomes easier to press the positioning surface 18B against the positioning member 5B, and the workability when manufacturing the linear motor 100B is improved.

[0182] Embodiment 4. Next, Embodiment 4 will be described with reference to FIGS. 25 to 27. In Embodiment 4, the positioning surface is formed by machining.

[0183] FIG. 25 is a perspective view showing the configuration of a mover and a stator included in the linear motor according to Embodiment 4. Among the components in FIG. 25, the components that achieve the same functions as those of the linear motor 100B of Embodiment 3 shown in FIG. 15 are denoted by the same reference numerals, and redundant descriptions are omitted.

[0184] The linear motor 100C has the same configuration as the linear motor 100B. The linear motor 100C includes a mover 1C which is an armature instead of the mover 1B which is an armature as compared with the linear motor 100B. That is, the linear motor 100C includes a mover 1C which is an armature and a stator 2 which is a field magnet facing the mover 1C with a gap therebetween.

[0185] Note that the linear motor 100C includes a mover 3C which is an armature instead of the mover 3B which is an armature as compared with the linear motor 100B, but the illustration of the mover 3C is omitted in FIG. 25. In Embodiment 4, the mover 1C is the first mover, and the mover 3C is the second mover. Since the mover 3C has the same configuration as the mover 1C, the configuration of the mover 1C will be described here.

[0186] The mover 1C has teeth 11 to 13 in the same manner as the mover 1B. Also, the mover 1C has a positioning step 17 in the same manner as the mover 1B. Note that the mover 1C may have a positioning groove 16 in the same manner as the mover 1 in Embodiment 1.

[0187] In the linear motor 100C according to Embodiment 4, a positioning surface 18C is formed on the resin 15. The positioning surface 18C is a positioning surface formed in the same position and in the same shape as the positioning surface 18B described in Embodiment 3. The positioning surface 18C is formed by machining.

[0188] Here, a method for forming the positioning surface 18C will be described. FIG. 26 is a perspective view showing the configuration of the mover before the positioning surface is formed in the linear motor according to Embodiment 4. Among the components in FIG. 26, the components achieving the same functions as the mover 1C shown in FIG. 25 are denoted by the same reference numerals, and redundant explanations are omitted.

[0189] When the mover 1C of Embodiment 4 is manufactured, similar to the mover 1X of the comparative example, draft gradient surfaces 63 and 64 for releasing from the molding die are formed on the resin 15. The molding die used when the mover 1C is manufactured is a different molding die from the molding die used when the mover 1B is manufactured.

[0190] When the mover 1B was manufactured, the side mold 7C was used, but when the mover 1C is manufactured, the side mold 7C is not used. When the mover 1C is manufactured, upper and lower molds for forming the draft gradient surfaces 63 and 64 are used. The upper and lower molds for forming the draft gradient surfaces 63 and 64 are different upper and lower molds from the upper and lower molds 7A and 7B for forming the draft gradient surfaces 61 and 62 of the mover 1B.

[0191] From the resin 15 of the mover 1C, tooth end faces 110, 120, and 130 parallel to the XZ plane of the teeth 11 to 13 are exposed. Here, the mover 1C is configured such that the tooth end faces 110, 120, and 130 are in the same plane.

[0192] The tooth end faces 110, 120, and 130 are the same exposed surfaces as the exposed surface 171 of the positioning step 17 described with reference to FIG. 8. The tooth end face 110 is the exposed surface of the tooth 11, the tooth end face 120 is the exposed surface of the tooth 12, and the tooth end face 130 is the exposed surface of the tooth 13.

[0193] When the positioning surface 18C is formed, the tooth end faces 110, 120, and 130 are used as the reference surface in the Y direction (the reference surface parallel to the XZ plane) of the cutting tool during machining, and the convex portions of the draft gradient surfaces 63 and 64 are cut so that the cutting surface is parallel to this reference surface. That is, by machining, cutting is advanced in the Y direction so that the positioning surface 18C becomes a surface parallel to the tooth end faces 110, 120, and 130. In this way, during cutting in the Y direction, cutting is advanced so that the convex portions, which are the boundary portions of the draft gradient surfaces 63 and 64, become parallel to the tooth end faces 110, 120, and 130.

[0194] FIG. 27 is a flowchart showing the processing procedure for manufacturing the mover included in the linear motor according to Embodiment 4. Note that since the mover 1C which is the first mover and the mover 3C which is the second mover in the linear motor 100C are manufactured by the same processing procedure, the manufacturing processing procedure for the mover 1C will be described here.

[0195] When the mover 1C is manufactured, the draft surfaces 63 and 64 are formed on the mover 1C using a molding die (step S410). Specifically, the upper and lower dies are arranged so as to surround the teeth 11 to 13, and a resin material is poured into the region surrounded by the upper and lower dies. When this resin material solidifies, the draft surfaces 63 and 64 are formed on the resin 15.

[0196] After that, the mover 1C is removed from the molding die (step S420). That is, the mover 1C is removed from the upper and lower dies. Then, the convex portions of the draft surfaces 63 and 64 are cut using the tooth end faces 110, 120, and 130 as the reference surfaces of the cutting tool during machining, thereby forming the positioning surface 18C (step S430).

[0197] Thereby, the mover 1C as shown in FIG. 25 is obtained. The positioning surface 18C of the mover 1C is formed to be parallel to the tooth end faces 110, 120, and 130 by machining. For this reason, also in Embodiment 4, by using the positioning surface 18C in the same manner as in Embodiment 3, the movers 1C and 3C can be accurately connected in the Y direction. That is, also in Embodiment 4, in the same manner as in Embodiment 3, by using the positioning member 5B to position the movers 1C and 3C in the Y direction, the movers 1C and 3C can be accurately connected in the Y direction.

[0198] In Embodiment 4, the armatures are the movers 1C and 3C, but the armatures may be stators, and the number of teeth included in the armatures is arbitrary. When the armature is a stator, the movers 1C and 3C are the field magnets.

[0199] When the movers 1C and 3C of Embodiment 4 are manufactured in this way, a positioning surface 18C parallel to the tooth end faces 110, 120, and 130 is formed, and the movers 1C and 3C are positioned in the Y direction using the positioning surface 18C and the positioning member 5B. As a result, the positioning accuracy between the movers 1C and 3C when they are connected can be improved, and the thrust pulsation caused by the displacement between the cores of the movers 1C and 3C can be suppressed.

[0200] In addition, since the positioning surface 18C is formed by machining, a complicated molding die as shown in FIG. 17 is not required. As a result, a linear motor 100C with good productivity and low cost can be easily obtained.

[0201] Embodiment 5. Next, Embodiment 5 will be described with reference to FIGS. 28 to 34. In Embodiment 5, on the side surface (right side surface) of the resin 15 and 35 opposite to the exposed surfaces 171 and 371 of the teeth 11 to 13 and 31 to 33, a connecting portion parallel to the exposed surfaces 171 and 371 of the teeth 11 to 13 and 31 to 33 is arranged. Then, the movers are positioned using the connecting portion and the positioning member 5.

[0202] FIG. 28 is a perspective view showing the configuration of the mover and the stator included in the linear motor according to Embodiment 5. Among the components in FIG. 28, the components that achieve the same functions as those of the linear motor 100A of Embodiment 2 shown in FIG. 8 are denoted by the same reference numerals, and redundant descriptions are omitted.

[0203] The linear motor 100D of Embodiment 5 includes a mover 1D that is an armature instead of the mover 1A that is an armature as compared with the linear motor 100A. That is, the linear motor 100D includes a mover 1D that is an armature and a stator 2 that is a field magnet facing the mover 1D with a gap therebetween.

[0204] Note that the linear motor 100D includes a mover 3D as the armature instead of the mover 3A which is the armature in comparison with the linear motor 100A. However, the illustration of the mover 3D is omitted in Fig. 28. In Embodiment 5, the mover 1D is the first mover and the mover 3D is the second mover. Since the mover 3D has the same configuration as the mover 1D, the configuration of the mover 1D will be described here.

[0205] In the mover 1D, connecting parts (connecting members) 19D and 19E protrude in the minus Y direction from the right side surface 151 which is a plane parallel to the XZ plane of the resin 15. The connecting parts 19D and 19E form plate-like members extending in the Z direction, and the thickness direction of the plate-like members is the minus Y direction.

[0206] The upper surface and the bottom surface of the connecting parts 19D and 19E are planes parallel to the exposed surface 171. The upper surface of the connecting parts 19D and 19E is joined to the right side surface 151 of the resin 15. The connecting part 19D protrudes by only the thickness part of the plate-like member in the minus Y direction from one end in the X direction (the end in the minus X direction) of the right side surface 151 of the resin 15. The connecting part 19E protrudes by only the thickness part of the plate-like member in the minus Y direction from the other end in the X direction (the end in the plus X direction) of the right side surface 151 of the resin 15.

[0207] Fig. 29 is a perspective view showing the configuration of the linear motor according to Embodiment 5. Fig. 29 shows a perspective view of the linear motor 100D when the mover 1D and the mover 3D are connected in the thrust generation direction.

[0208] The mover 3D is arranged above the stator 2 and moves along the arrangement direction of the permanent magnets 21 on the stator 2, similar to the mover 1D. The movers 1D and 3D are connected along the X direction.

[0209] The mover 3D has the same configuration as the mover 1D. The mover 1D and the mover 3D may be the same mover, or movers with some different configurations. In the movers 1D and 3D, at least the configurations of the teeth 11 to 13 and the teeth 31 to 33 are the same.

[0210] In the mover 3D, the connecting portions 39D and 39E project in the minus Y direction from the right side surface 351, which is a plane parallel to the XZ plane of the resin 35. The connecting portions 39D and 39E have the same shape as the connecting portions 19D and 19E. Also, the arrangement positions of the connecting portions 19D and 19E with respect to the mover 1D are the same as the arrangement positions of the connecting portions 39D and 39E with respect to the mover 3D.

[0211] The connecting portions 19D and 19E are parallel to the exposed surfaces 171 of the teeth 11 to 13, and the connecting portions 39D and 39E are parallel to the exposed surfaces 371 of the teeth 31 to 33. Therefore, by positioning the movers 1D and 3D so that the connecting portions 19D and 19E and the connecting portions 39D and 39E are on the same plane parallel to the XZ plane, the positioning accuracy in the Y direction between the movers 1D and 3D when the movers 1D and 3D are connected can be improved.

[0212] Hereinafter, a method for positioning the mover 1D and the mover 3D in the fifth embodiment will be described with reference to FIGS. 30 to 33. FIG. 30 is a diagram for explaining a first process when the linear motor 100D according to the fifth embodiment is manufactured. In FIG. 30, the mover 1D and the apparatus top plate 4 in a state where the mover 1D is attached to the apparatus top plate 4 are shown in a perspective view.

[0213] When the linear motor 100D is manufactured, the mover 1D serving as a positioning reference is attached to the apparatus top plate 4 with guaranteed flatness. Specifically, the upper surface of the mover 1D is attached to the bottom surface of the apparatus top plate 4. At that time, the upper surfaces of the teeth 11 to 13 of the mover 1D are brought into contact with the bottom surface of the apparatus top plate 4 so as to have no gap.

[0214] After that, the mover 1D is moved parallel to the XY plane along the bottom surface of the apparatus top plate 4 so that the mounting holes 41 provided in the apparatus top plate 4 and the screw holes 14 provided in the mover 1D are aligned in the coaxial direction. Then, the mover 1D is fixed to the apparatus top plate 4 by fastening the mounting holes 41 and the screw holes 14 with screws 42.

[0215] FIG. 31 is a diagram for explaining a second process when the linear motor according to Embodiment 5 is manufactured. In FIG. 31, a perspective view shows the mover 1D, 3D and the apparatus top plate 4 in a state where the upper surface of the mover 3D, which is the second mover in the linear motor 100D, is in contact with the bottom surface of the apparatus top plate 4.

[0216] After the mover 1D is fastened to the apparatus top plate 4, the upper surface of the mover 3D is attached to the bottom surface of the apparatus top plate 4. At this time, the upper surfaces of the teeth 31 to 33 of the mover 3D are brought into contact with the bottom surface of the apparatus top plate 4 so as to have no gap. Thereby, in the Z direction, the mover 1D and the mover 3D can be arranged in the same plane. That is, a plane parallel to the XY plane of the mover 1D and a plane parallel to the XY plane of the mover 3D can be arranged in the same plane. In other words, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 can be arranged in the same plane.

[0217] Next, in the Y direction, the mover 1D and the mover 3D are aligned in the same plane. Here, the process (the third process and the fourth process) of aligning the mover 1D and the mover 3D in the same plane in the Y direction will be described.

[0218] FIG. 32 is a diagram for explaining a third process when the linear motor according to Embodiment 5 is manufactured. In FIG. 32, a perspective view shows the mover 1D, the mover 3D, the apparatus top plate 4, and the positioning member 5B in a state where the plate-shaped positioning member 5B is in contact with the connecting portions 19D, 19E of the mover 1D. The plate-shaped positioning member 5B has a side surface 52B parallel to the XZ plane and is shaped so as to be able to contact the connecting portions 19D, 19E, 39D, 39E parallel to the exposed surfaces 171, 371.

[0219] In the third process, as a preparatory process for positioning the mover 3D in the Y direction, the positioning member 5B is pressed against the bottom surface parallel to the XZ plane of the connecting portions 19D and 19E. As a result, the positioning member 5B abuts against the bottom surfaces of the connecting portions 19D and 19E. In this state, the positioning member 5B is temporarily fixed perpendicular to the apparatus top plate 4. Specifically, the positioning member 5B is temporarily fixed to the apparatus top plate 4 such that the side surface 52B parallel to the XZ plane of the positioning member 5B and the bottom surface parallel to the XY plane of the apparatus top plate 4 are perpendicular to each other. As a result, since the positioning member 5B is parallel to the bottom surfaces of the connecting portions 19D and 19E, it becomes possible to make the side surface 52B of the positioning member 5B parallel to the exposed surfaces 171 of the teeth 11 to 13.

[0220] After this, the connecting portions 39D and 39E of the mover 3D are pressed against the positioning member 5B. FIG. 33 is a diagram for explaining a fourth process when the linear motor according to Embodiment 5 is manufactured. FIG. 33 shows a perspective view of the movers 1D and 3D, the apparatus top plate 4, and the positioning member 5B in a state where the connecting portions 39D and 39E of the mover 3D are pressed against the side surface 52B of the positioning member 5B.

[0221] In the fourth process, the connecting portions 39D and 39E of the mover 3D are brought into contact with the positioning member 5B. As a result, in the Y direction, the mover 1D and the mover 3D can be arranged in the same plane. That is, the plane parallel to the XZ plane of the mover 1D and the plane parallel to the XZ plane of the mover 3D can be arranged in the same plane. In other words, the exposed surfaces 171 of the teeth 11 to 13 and the exposed surfaces 371 of the teeth 31 to 33 can be arranged in the same plane. As a result, the positioning in the Y direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0222] After the Z direction and the Y direction of the teeth 11 to 13 and 31 to 33 are positioned, the mover 3D is moved in the X direction while maintaining the Z direction position and the Y direction position of the mover 3D, and the mover 3D is pressed against the mover 1D. As a result, the gap in the X direction between the mover 1D and the mover 3D disappears. As a result, the positioning in the X direction between the teeth 11 to 13 and the teeth 31 to 33 is completed.

[0223] As a result, the mounting hole 41 provided in the device top plate 4 and the screw hole 34 provided in the mover 3D are aligned in the coaxial direction. In this state, the mover 3D is fixed to the device top plate 4 by fastening the mounting hole 41 and the screw hole 34 with a screw 42.

[0224] This enables the connection of the movers 1D and 3D with no gap in the X direction between the movers 1D and 3D. In the connection of these movers 1D and 3D, the positions of the teeth 11 to 13 and 31 to 33 in the Z direction and the Y direction are the same. Also, there is no gap in the X direction between the teeth 11 to 13 and the teeth 31 to 33. Specifically, there is no gap in the X direction between the tooth 13 and the tooth 33.

[0225] This makes it possible to easily align the positions of the teeth 11 to 13 and the teeth 31 to 33 in the X direction, Y direction, and Z direction when connecting the movers 1D and 3D. As a result, the positioning accuracy of the teeth 11 to 13 and the teeth 31 to 33 when the movers 1D and 3D are connected is improved.

[0226] When the linear motor 100D is manufactured, by using the connecting portions 19D, 19E, 39D, and 39E as the positioning reference in the Y direction, the relative displacement in the Y direction between the connecting portions 19D, 19E and the connecting portions 39D, 39E can be reduced. Thereby, without providing a mechanism for absorbing the displacement in the Y direction in the connecting portions 19D, 19E, 39D, and 39E, the displacement in the Y direction of the movers 1D and 3D can be suppressed. Therefore, it is possible to provide a small and low-cost linear motor 100D with good positioning accuracy in the Y direction.

[0227] Note that, similar to Embodiment 2, in Embodiment 5 as well, the temperature measuring device 6 may be fixed to at least one of the movers 1D and 3D simultaneously with the connection of the movers 1D and 3D. The attachment of the movers 1D and 3D to the device top plate 4 is performed by an attachment device similar to the attachment device for attaching the movers 1 and 3 to the device top plate 4 described in Embodiment 1.

[0228] FIG. 34 is a flowchart showing the processing procedure for manufacturing the linear motor according to Embodiment 5. When the linear motor 100D is manufactured, the mover 1D and the mover 3D are manufactured in advance. In the description of FIG. 34, the mover 1D in the linear motor 100D is referred to as the first mover 1D, and the mover 3D is referred to as the second mover 3D. When the first mover 1D and the second mover 3D are manufactured, connecting portions 19D, 19E, 39D, and 39E are formed on the first mover 1D and the second mover 3D (step S510).

[0229] After the first mover 1D and the second mover 3D are manufactured, the upper surface of the first mover 1D is fixed to the bottom surface of the apparatus top plate 4 (step S520). Then, the upper surface of the second mover 3D is brought into contact with the bottom surface of the apparatus top plate 4 (step S530). As a result, the upper surfaces of the teeth 11 to 13 and the upper surfaces of the teeth 31 to 33 are in the same plane. That is, when the first mover 1D and the second mover 3D are installed in the stator 2, the positions of the teeth 11 to 13 in the Z direction and the positions of the teeth 31 to 33 in the Z direction are the same.

[0230] In this state, the positioning member 5B is brought into contact with the connecting portions 19D and 19E of the first mover 1D (step S540). As a result, the side surface 52B of the positioning member 5B and the exposed surfaces 171 of the teeth 11 to 13 are parallel.

[0231] Thereafter, the connecting portions 39D and 39E of the second mover 3D are brought into contact with the positioning member 5B (step S550). As a result, the side surface 52B of the positioning member 5B and the exposed surfaces 371 of the teeth 31 to 33 are parallel. As a result, the exposed surfaces 171 of the teeth 11 to 13 and the exposed surfaces 371 of the teeth 31 to 33 are in the same plane. That is, when the movers 1D and 3D are installed in the stator 2, the positions of the teeth 11 to 13 in the Y direction and the positions of the teeth 31 to 33 in the Y direction are the same.

[0232] In this state, the second mover 3D is positioned in the X direction. Specifically, while the positions of the second mover 3D in the Z direction and the Y direction are maintained, the second mover 3D is moved in the X direction and pressed against the first mover 1D (step S560). As a result, the gap in the X direction (connection direction) between the first mover 1D and the second mover 3D disappears. After that, the upper surface of the second mover 3D is fixed to the bottom surface of the device top plate 4 (step S570). Note that the process of step S510 and the processes of steps S520 to S570 may be executed at different locations. For example, the process of step S510 may be executed by the manufacturer of the first mover 1D and the second mover 3D, and the processes of steps S520 to S570 may be executed by the merchant who purchased the first mover 1D and the second mover 3D.

[0233] In addition, in Embodiment 5, the armature is used as the movers 1D and 3D, but the armature may be used as the stator, and the number of teeth provided in the armature is arbitrary. When the armature is the stator, the movers 1D and 3D are the field magnets.

[0234] Also, in Embodiment 5, after the mover 1D is attached to the device top plate 4, the mover 3D is attached to the device top plate 4. However, after the positions of the movers 1D and 3D are determined, the movers 1D and 3D may be attached to the device top plate 4. Further, the positioning member 5B may be removed after the positioning of the movers 1D and 3D is completed, or may not be removed.

[0235] When the linear motor 100D of Embodiment 5 is manufactured in this way, the movers 1D and 3D are positioned in the Y direction using the connecting portions 19D, 19E, 39D, 39E and the positioning member 5B. As a result, the positioning accuracy between the movers 1D and 3D when the movers 1D and 3D are connected can be improved, and the thrust pulsation caused by the displacement between the cores of the movers 1D and 3D can be suppressed.

[0236] In addition, since the connecting portions 19D, 19E, 39D, and 39E are disposed outside the movers 1D and 3D, it becomes easier to press the connecting portions 19D, 19E, 39D, and 39E against the positioning member 5B, and the workability in manufacturing the linear motor 100D is improved.

[0237] The configurations shown in the above embodiments are merely examples, and it is possible to combine them with other known techniques, combine the embodiments with each other, or omit or change a part of the configuration without departing from the gist.

Explanation of Reference Numerals

[0238] 1, 1A to 1D, 1X, 3, 3A to 3D movers, 2 stators, 4 apparatus top plate, 5, 5A, 5B positioning members, 6 temperature measuring device, 7A, 7B upper and lower types, 7C side type, 8 workbench, 11 to 13, 31 to 33 teeth, 14, 34 screw holes, 15, 35 resin, 16, 36 positioning grooves, 17, 37 positioning steps, 18B, 18C, 38B positioning surfaces, 19D, 19E, 39D, 39E connecting portions, 21 permanent magnets, 23 mounting seats, 41 mounting holes, 42 screws, 51, 51A, 52B, 610 sides, 52, 52A, 162, 620 bottom surfaces, 53, 163 upper surfaces, 61, 62, 63, 64 taper surfaces, 100, 100A to 100D linear motors, 110, 120, 130 tooth end faces, 151 right side surface, 161, 171, 361, 371 exposed surfaces, 172, 372 step surfaces.

Claims

1. a first armature including a first core covered with a first resin, the first core including first teeth around which a first coil is wound, and a first exposed surface on which a portion of the first teeth is exposed from the first resin; a second armature including a second core covered with a second resin, the second core including second teeth around which a second coil is wound, and a second exposed surface on which a portion of the second teeth is exposed from the second resin; A field magnet having a plurality of permanent magnets; Equipped with the first exposed surface of the first armature is formed such that, when the first armature is disposed on the field magnet, a perpendicular line of the first exposed surface is perpendicular to a first thrust generating direction in which a thrust of the first armature is generated and to a direction in which a magnetic gap is generated; the second armature is formed such that, when the second armature is disposed on the field magnet, a perpendicular line of the second exposed surface is perpendicular to a second thrust generating direction in which a thrust of the second armature is generated and to a direction in which a magnetic gap is generated; The first armature and the second armature are connectable in the first thrust generating direction. A linear motor characterized by:

2. the first armature has a first positioning groove that is fitted into a positioning member when the first exposed surface and the second exposed surface are positioned, the second armature has a second positioning groove that is fitted into the positioning member when the first exposed surface and the second exposed surface are positioned, the first positioning groove has an open surface that is perpendicular to the first thrust generating direction and a bottom surface that is the first exposed surface; the second positioning groove has an open surface that is perpendicular to the second thrust generating direction and a bottom surface that is the second exposed surface; the first exposed surface and the second exposed surface of the first armature and the second armature are positioned by fitting the first positioning groove and the second positioning groove into the positioning member so that the positioning member abuts against the first exposed surface and the second exposed surface, 2. The linear motor according to claim 1 .

3. the first armature has a first positioning step with which a positioning member abuts when the first exposed surface and the second exposed surface are positioned, the second armature has a second positioning step with which the positioning member abuts when the first exposed surface and the second exposed surface are positioned, the first positioning step has a first step surface that is parallel to a first top surface of an outer wall surface of the first armature that is fastened to a device top plate and is stepped from the first top surface, the surface in the first thrust generating direction is an open surface, and a surface perpendicular to the first step surface and the open surface is the first exposed surface; the second positioning step has a second step surface that is parallel to a second top surface of an outer wall surface of the second armature that is fastened to the device top plate and is stepped from the second top surface, the surface in the second thrust generating direction is an open surface, and a surface perpendicular to the second step surface and the open surface is the second exposed surface; the first exposed surface and the second exposed surface of the first armature and the second armature are positioned by arranging the positioning member on the first positioning step and the second positioning step so that the positioning member abuts against the first exposed surface and the second exposed surface, 2. The linear motor according to claim 1 .

4. an outer wall surface of the first resin has a first positioning surface that is parallel to the first exposed surface and against which a positioning member abuts when positioning the first exposed surface and the second exposed surface; an outer wall surface of the second resin has a second positioning surface that is parallel to the second exposed surface and against which the positioning member abuts when positioning the first exposed surface and the second exposed surface; The positioning member is abutted against the first positioning surface and the second positioning surface, thereby enabling positioning of the first exposed surface and the second exposed surface.

2. The linear motor according to claim 1 .

5. the first positioning surface and the second positioning surface are formed by machining; 5. The linear motor according to claim 4.

6. a first connecting member is disposed on an outer wall surface of the first resin, the first connecting member being parallel to the first exposed surface and contacting a positioning member when positioning the first exposed surface and the second exposed surface; a second connecting member is disposed on an outer wall surface of the second resin and is parallel to the second exposed surface, and the second connecting member is brought into contact with the positioning member when the first exposed surface and the second exposed surface are positioned; The positioning member is abutted against the first connecting member and the second connecting member, thereby enabling positioning of the first exposed surface and the second exposed surface.

2. The linear motor according to claim 1 .

7. The first exposed surface extends in the first thrust generation direction.

7. The linear motor according to claim 1, wherein the first and second rotors are arranged in a first direction.

8. a coupling step of coupling the first armature and the second armature while positioning the first armature and the second armature, the first armature having a first iron core, the first teeth around which a first coil is wound, covered with a first resin and having a first exposed surface where a portion of the first teeth is exposed from the first resin, and the second armature having a second iron core, the second teeth around which a second coil is wound, covered with a second resin and having a second exposed surface where a portion of the second teeth is exposed from the second resin, the first exposed surface of the first armature is formed such that, when the first armature is disposed on a field having a plurality of permanent magnets, a perpendicular line of the first exposed surface is perpendicular to a first thrust generating direction in which a thrust of the first armature is generated and to a direction in which a magnetic gap is generated; the second armature is formed such that, when the second armature is disposed on the field magnet, a perpendicular line of the second exposed surface is perpendicular to a second thrust generating direction in which a thrust of the second armature is generated and to a direction in which a magnetic gap is generated; In the connecting step, the first exposed surface and the second exposed surface are positioned using a positioning member so that the first exposed surface and the second exposed surface are in the same plane, while the first armature and the second armature are connected in the first thrust generating direction. A method for manufacturing an electric motor.

9. the first armature has a first positioning groove that is fitted into the positioning member when the first exposed surface and the second exposed surface are positioned, the second armature has a second positioning groove that is fitted into the positioning member when the first exposed surface and the second exposed surface are positioned, the first positioning groove has an open surface that is perpendicular to the first thrust generating direction and a bottom surface that is the first exposed surface; the second positioning groove has an open surface that is perpendicular to the second thrust generating direction and a bottom surface that is the second exposed surface; In the connecting step, the first positioning groove and the second positioning groove are fitted into the positioning member so that the positioning member abuts against the first exposed surface and the second exposed surface, thereby positioning the first exposed surface and the second exposed surface.

9. The method for manufacturing an electric motor according to claim 8.

10. the first armature has a first positioning step with which the positioning member abuts when the first exposed surface and the second exposed surface are positioned, the second armature has a second positioning step with which the positioning member abuts when the first exposed surface and the second exposed surface are positioned, the first positioning step has a first step surface that is parallel to a first top surface of an outer wall surface of the first armature that is fastened to a device top plate and is stepped from the first top surface, the surface in the first thrust generating direction is an open surface, and a surface perpendicular to the first step surface and the open surface is the first exposed surface; the second positioning step has a second step surface that is parallel to a second top surface of an outer wall surface of the second armature that is fastened to the device top plate and is stepped from the second top surface, the surface in the second thrust generating direction is an open surface, and a surface perpendicular to the second step surface and the open surface is the second exposed surface; In the connecting step, the positioning member is disposed on the first positioning step and the second positioning step so that the positioning member abuts against the first exposed surface and the second exposed surface, thereby performing positioning between the first exposed surface and the second exposed surface.

9. The method for manufacturing an electric motor according to claim 8.

11. an outer wall surface of the first resin has a first positioning surface that is parallel to the first exposed surface and against which the positioning member abuts when positioning the first exposed surface and the second exposed surface; an outer wall surface of the second resin has a second positioning surface that is parallel to the second exposed surface and against which the positioning member abuts when positioning the first exposed surface and the second exposed surface; In the connecting step, the positioning member is brought into contact with the first positioning surface and the second positioning surface, thereby positioning the first exposed surface and the second exposed surface.

9. The method for manufacturing an electric motor according to claim 8.

12. a first connecting member is disposed on an outer wall surface of the first resin, the first connecting member being parallel to the first exposed surface and contacting the positioning member when positioning the first exposed surface and the second exposed surface; a second connecting member is disposed on an outer wall surface of the second resin and is parallel to the second exposed surface, and the second connecting member is brought into contact with the positioning member when the first exposed surface and the second exposed surface are positioned; In the connecting step, the positioning member is brought into contact with the first connecting member and the second connecting member, thereby positioning the first exposed surface and the second exposed surface.

9. The method for manufacturing an electric motor according to claim 8.

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