Head for additional processing and processing machine

Abstract

Provided are an additional processing head and a processing machine having a simple configuration. 【Solution means】The additional processing head (200) melts metal by supplying the metal and irradiating it with a laser beam to perform additional processing. The additional processing head (200) includes a head portion (211) that is movable relative to the workpiece, a surface light emitting portion (300) mounted on the head portion (211) and including a plurality of PCSEL (Photonic-Crystal Surface-Emitting Laser) elements, and a condensing lens (221) disposed on a straight line (210) that is the emission direction of the laser beam in order to condense the laser beam from the surface light emitting portion (300) onto the surface of the workpiece.

Description

Technical Field

[0001] This invention relates to a head for additive processing and a processing machine.

Background Art

[0002] For example, Japanese Unexamined Patent Application Publication No. 2018-24006 (Patent Document 1) discloses a processing machine including a head for additive processing that can relatively move while supplying a material powder to a workpiece and irradiating a laser beam. A laser beam is guided to the head for additive processing through an optical fiber.

[0003] In addition, Japanese Patent No. 6132995 (Patent Document 2), Japanese Patent No. 7384349 (Patent Document 3), and Japanese Patent No. 7086501 (Patent Document 4) disclose various laser processing machines including a plurality of PCSEL (Photonic-Crystal Surface-Emitting Laser) elements.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the processing machine disclosed in Patent Document 1, in order to obtain the energy required for metal melting, a large laser oscillator such as a fiber laser, a fiber-coupled semiconductor laser, or a CO2 laser is installed outside the machine, and the laser light is transmitted to the additional processing head in the processing area using an optical fiber. Further, since laser light with poor beam quality (large beam divergence) is used, the additional processing head is provided with optical components such as a collimating lens for appropriately shaping the laser light. In these cases, there is a problem that the structure of the additional processing head becomes complicated.

[0006] An object of the present invention is to provide an additional processing head and a processing machine having a simple configuration.

Means for Solving the Problems

[0007] The additional processing head according to the present invention melts metal by supplying metal and irradiating laser light to perform additional processing. The additional processing head includes a head portion movable relative to the workpiece, a surface light emitting portion mounted on the head portion and including a plurality of PCSEL (Photonic-Crystal Surface-Emitting Laser) elements, and a condensing lens arranged on a straight line in the emission direction of the laser light for condensing the laser light from the surface light emitting portion onto the surface of the workpiece.

[0008] The processing machine according to the present invention includes the above-described additional processing head and a tool spindle movable in the processing area for rotating a tool. Either a tool or the additional processing head is selectively mounted on the tool spindle. The additional processing head has a shank portion provided on the head portion and clamped by the tool spindle.

Effects of the Invention

[0009] According to the present invention, it is possible to provide an additional processing head and a processing machine having a simple configuration.

Brief Description of the Drawings

[0010]

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Embodiments for Carrying Out the Invention

[0011] Embodiments of this invention will be described with reference to the drawings. In the drawings referred to below, the same or corresponding members are denoted by the same reference numerals.

[0012] (Embodiment 1) FIG. 1 is a front view showing a processing machine. In FIG. 1, the interior of the processing machine is shown by seeing through a cover body forming the appearance of the processing machine.

[0013] Referring to FIG. 1, the processing machine 100 is an AM / SM hybrid processing machine capable of additive processing (AM (Additive Manufacturing) processing) of a workpiece and subtractive processing (SM (Subtractive Manufacturing) processing) of the workpiece. The processing machine 100 has, as functions of the SM processing, a turning function using a fixed tool and a milling function using a rotary tool.

[0014] The processing machine 100 is an NC (Numerically Controlled) processing machine in which various operations for workpiece processing are automated by numerical control by a computer.

[0015] In this specification, an axis parallel to the left - right direction (width direction) of the processing machine 100 and extending in the horizontal direction is referred to as the "Z - axis", an axis parallel to the front - rear direction (depth direction) of the processing machine 100 and extending in the horizontal direction is referred to as the "Y - axis", and an axis extending in the vertical direction is referred to as the "X - axis". The X - axis, Y - axis, and Z - axis are three mutually orthogonal axes.

[0016] First, the overall structure of the processing machine 100 will be described. The processing machine 100 has a cover body 161. The cover body 161 forms a processing area 150 and forms the appearance of the processing machine 100.

[0017] The processing area 150 is a space where workpiece processing is performed. The processing area 150 is sealed by the cover body 161 so that chips and coolant (mist) associated with subtractive processing of the workpiece and fumes associated with additive processing of the workpiece do not leak outside the processing area 150.

[0018] The processing machine 100 has a bed 141, a first work spindle 111, a second work spindle 116, a tool spindle 121, and a tool rest 131.

[0019] The bed 141 is a base member for supporting the first work spindle 111, the second work spindle 116, the tool spindle 121, the tool rest 131, etc., and is installed on the floor surface of a factory or the like.

[0020] The first work spindle 111 and the second work spindle 116 are arranged to face each other in the Z-axis direction. Each of the work spindles of the first work spindle 111 and the second work spindle 116 can hold a work. A chuck mechanism for detachably holding the work is provided on each of the work spindles of the first work spindle 111 and the second work spindle 116. The first work spindle 111 rotates the held work around a rotation center axis 101 parallel to the Z-axis. The second work spindle 116 rotates the held work around a rotation center axis 102 parallel to the Z-axis.

[0021] The first work spindle 111 is fixed to the bed 141. The second work spindle 116 is movable in the Z-axis direction by various feed mechanisms, guide mechanisms, servo motors, etc. The second work spindle 116 may be configured to be fixed to the bed 141.

[0022] Instead of the second work spindle 116, a center rest for supporting the rotation center of the work held by the first work spindle 111 may be provided, or a work vibration damping device for supporting the work held by the first work spindle 111 from the outer periphery thereof to prevent vibration of the work may be provided.

[0023] The tool spindle 121 is provided in the machining area 150. The tool spindle 121 can hold a tool for removing material from the workpiece. The tool spindle 121 can hold a rotary tool for milling the workpiece. The tool spindle 121 is provided with a clamping mechanism 126 (see FIG. 3 described later) for detachably holding the tool. When milling the workpiece using the rotary tool, the tool spindle 121 rotates the held rotary tool about a rotation center axis 105 parallel to the X-axis - Z-axis plane.

[0024] The tool spindle 121 can further swing about a predetermined axis 104 (B-axis swing). The predetermined axis 104 is parallel to the Y-axis. As an example, the swing range of the tool spindle 121 is in the range of ±120° with respect to the reference posture (the posture shown in FIG. 1) in which the spindle end face 123 of the tool spindle 121 faces downward.

[0025] The tool spindle 121 is supported on the bed 141 by a column or the like (not shown). The tool spindle 121 is movable in the machining area 150. The tool spindle 121 is movable in the X-axis direction, Y-axis direction, and Z-axis direction by various feed mechanisms, guide mechanisms, servo motors, etc. provided on the column or the like. The machining position by the rotary tool mounted on the tool spindle 121 moves three-dimensionally.

[0026] Although not shown in FIG. 1, around the first workpiece spindle 111, an automatic tool changer (ATC: Automatic Tool Changer) for automatically exchanging the tool held by the tool spindle 121 and a tool magazine for accommodating the replacement tool held by the tool spindle 121 are provided.

[0027] The tool post 131 mounts a plurality of fixed tools for turning. The tool post 131 is of a so-called turret type, and a plurality of fixed tools are radially attached and perform indexing by swinging.

[0028] The tool rest 131 has a swivel part 132. The swivel part 132 is rotatable about a swivel center axis 106 parallel to the Z axis. Tool holders for holding fixed tools are attached at positions spaced in the circumferential direction about the swivel center axis 106. When the swivel part 132 rotates about the swivel center axis 106, the fixed tools held by the tool holders move in the circumferential direction, and the fixed tools used for turning are indexed.

[0029] The tool rest 131 is supported on the bed 141 by a saddle (not shown) or the like. The tool rest 131 is movable in the X-axis direction and the Z-axis direction by various feed mechanisms, guide mechanisms, servo motors, etc. provided on the saddle or the like. The tool rest 131 may have a milling function for rotating a rotary tool.

[0030] Next, the structure of the additional processing head 200 will be described. FIG. 2 is a front view showing the additional processing head held by the tool spindle in FIG. 1. Referring to FIGS. 1 and 2, the processing machine 100 further has an additional processing head 200.

[0031] The additional processing head 200 performs additive processing by melting metal by supplying metal and irradiating laser light (Directed Energy Deposition). The additional processing head 200 performs additive processing by supplying material powder to the workpiece and irradiating laser light. As the material powder, metal powders such as stainless steel, nickel-based alloys, cobalt-based alloys, or titanium are used. Note that the material supplied from the additional processing head 200 toward the workpiece may be any metal, for example, a linear metal wire.

[0032] The additional processing head 200 has a head part 211. The head part 211 is movable relative to the workpiece. The head part 211 is composed of a housing that forms the appearance of the additional processing head 200. The head part 211 is made of metal.

[0033] Either one of the tool and the additional processing head 200 is selectively mounted on the tool spindle 121. In FIGS. 1 and 2, the tool spindle 121 with the additional processing head 200 mounted thereon is shown. During the additional processing of the workpiece, the additional processing head 200 is held by the tool spindle 121 and moves integrally with the tool spindle 121 in the X-axis direction, Y-axis direction, and Z-axis direction, or pivots about the predetermined axis 104. During the removal processing of the workpiece, the additional processing head 200 is detached from the tool spindle 121.

[0034] Although not shown in FIG. 1, a head stock for accommodating the additional processing head 200 detached from the tool spindle 121 is provided around the second workpiece spindle 116.

[0035] FIG. 3 is a cross-sectional view showing the tool spindle and the additional processing head in the range surrounded by the two-dot chain line III in FIG. 2. Referring to FIG. 3, the tool spindle 121 has a spindle body 122. The spindle body 122 is composed of a cylindrical body centered on the rotation center axis 105. The spindle body 122 is supported so as to be rotatable about the rotation center axis 105. The spindle body 122 has the aforementioned spindle end face 123. The spindle end face 123 is composed of a plane orthogonal to the rotation center axis 105.

[0036] A tool insertion hole 125 is provided in the tool spindle 121 (spindle body 122). The tool insertion hole 125 extends in the axial direction of the rotation center axis 105 and has a hole shape that opens to the spindle end face 123. When a tool is mounted on the tool spindle 121 during the removal processing of the workpiece, the tool (shank portion) is inserted into the tool insertion hole 125.

[0037] The tool spindle 121 further has a clamping mechanism 126. The clamping mechanism 126 is provided on the spindle body 122. The clamping mechanism 126 is a mechanism for holding a tool in the tool spindle 121 during the removal machining of the workpiece. The clamping mechanism 126 is operable between a clamping state for clamping the tool and an unclamping state for unclamping the tool. In the present embodiment, the shank specification of the tool that can be held by the clamping mechanism 126 is a polygon taper shank.

[0038] The additional machining head 200 further has a shank portion 231. The shank portion 231 has a shank shape corresponding to the shank specification (polygon taper shank) of the tool that can be held by the clamping mechanism 126. When the additional machining head 200 is mounted on the tool spindle 121 during the additional machining of the workpiece, the shank portion 231 is inserted into the tool insertion hole 125.

[0039] The clamping mechanism 126 has a drawbar 128, a collet 127, a spring member 129, and an unclamping cylinder (not shown).

[0040] The drawbar 128 is provided on the axis of the rotation center axis 105. The drawbar 128 is provided so as to be slidable in the axial direction of the rotation center axis 105 (in the axial direction of the rotation center axis 105, the side where the spindle end face 123 is located is referred to as the "front side", and the opposite side is referred to as the "rear side").

[0041] The collet 127 is attached to the front end of the drawbar 128. The collet 127 is disposed inside the shank portion 231 having a cylindrical shape. The collet 127 deforms so as to reduce or increase its diameter around the rotation center axis 105 as the drawbar 128 slides in the axial direction of the rotation center axis 105. The spring member 129 is provided on the outer periphery of the drawbar 128. The spring member 129 applies an elastic force to the drawbar 128 toward the rear side in the axial direction of the rotation center axis 105. The unclamp cylinder is provided at the rear end of the drawbar 128. The unclamp cylinder operates to slide the drawbar 128 forward in the axial direction of the rotation center axis 105 when hydraulic pressure is supplied.

[0042] In such a configuration, when the additional processing head 200 is attached to the tool spindle 121, the elastic force of the spring member 129 slides the drawbar 128 rearward in the axial direction of the rotation center axis 105. The collet 127 deforms so as to increase its diameter around the rotation center axis 105 and pulls the shank portion 231 rearward in the axial direction of the rotation center axis 105. Thereby, the clamping state of the shank portion 231 by the clamping mechanism 126 is obtained.

[0043] On the other hand, when the additional processing head 200 is detached from the tool spindle 121, hydraulic pressure is supplied to the unclamp cylinder to slide the drawbar 128 forward in the axial direction of the rotation center axis 105. The collet 127 deforms so as to reduce its diameter around the rotation center axis 105, and the drawbar 128 pushes out the shank portion 231 forward in the axial direction of the rotation center axis 105. Thereby, the unclamping state of the shank portion 231 by the clamping mechanism 126 is obtained.

[0044] Note that the shank specification of the tool that can be held by the clamping mechanism in the tool spindle is not limited to the polygon taper shank, and may be, for example, a hollow taper shank.

[0045] As shown in FIG. 2, the additive processing head 200 further includes a material powder discharge part 217. The material powder discharge part 217 is provided in the head part 211. The material powder discharge part 217 is composed of a pipe member through which the material powder can flow. The material powder discharge part 217 opens at a position radially outward from the central axis 201 described later. The material powder discharge part 217 discharges the material powder toward the workpiece.

[0046] FIG. 4 is a diagram showing the irradiation of laser light from the additive processing head in FIG. 2 toward the workpiece. FIG. 5 is a plan view of the surface light emitting part in FIG. 2 as viewed from the light emitting surface side. FIG. 6 is a circuit diagram showing the surface light emitting part in FIG. 2. In FIG. 6, as well as in FIGS. 14 and 21 described later, two arrows are attached to the PCSEL element 331 that emits laser light. FIG. 7 is a cross-sectional view showing the PCSEL element.

[0047] Referring to FIGS. 2 to 7, the additive processing head 200 further includes a surface light emitting part 300 (300A). The surface light emitting part 300 is mounted on the head part 211. The surface light emitting part 300 is fixed inside the head part 211.

[0048] The surface light emitting part 300 includes a plurality of PCSEL (Photonic-Crystal Surface-Emitting Laser) elements 331 (331-1 to 331-36).

[0049] As shown in FIG. 7, the PCSEL element 331 includes an element main body 310, a surface electrode 321, a back surface electrode 326, and an AR (Anti Reflection) coat (non-reflection coat) layer 322.

[0050] The element body 310 is formed of, for example, GaAs (gallium arsenide). The element body 310 includes a substrate 311, an n-type clad layer 312, an active layer 313, a carrier block layer 314 which is a p-type doped layer, a photonic crystal layer 315, a p-type clad layer 317, a back mirror (distributed Bragg mirror) 319, and a p-type contact layer 318. The substrate 311, the n-type clad layer 312, the active layer 313, the carrier block layer 314, the photonic crystal layer 315, the p-type clad layer 317, the back mirror 319, and the p-type contact layer 318 are laminated in the thickness direction of the element body 310 in the order listed. The photonic crystal layer 315 is provided with a plurality of holes 316 as a periodic structure of about the oscillation wavelength.

[0051] Note that the stacking order of the active layer 313, the carrier block layer 314, and the photonic crystal layer 315 may be reversed.

[0052] The element body 310 has an emission surface 310a and a back surface 310b. The emission surface 310a is the surface of the element body 310 on the substrate 311 side. The back surface 310b is the surface of the element body 310 on the p-type contact layer 318 side and is disposed on the opposite side of the emission surface 310a.

[0053] The surface electrode 321 is provided along the periphery of the emission surface 310a. The surface electrode 321 has a frame shape that opens in a circular shape. The AR coat layer 322 is provided in the opening of the surface electrode 321. The back electrode 326 is provided on the back surface 310b. When a voltage is applied between the surface electrode 321 and the back electrode 326, light emission occurs in the active layer 313. The light generates resonance by the photonic crystal layer 315 and is emitted as laser light from the opening of the surface electrode 321 through the emission surface 310a.

[0054] The emission direction of the laser light from the PCSEL element 331 is perpendicular to the element body 310 (photonic crystal layer 315). The laser light generated in the PCSEL element 331 travels toward the front surface 310a and the back surface 310b. The laser light traveling toward the latter back surface 310b is reflected backward by the back surface mirror 319 and, together with the laser light traveling toward the former front surface 310a, is emitted from the opening of the surface electrode 321 through the front surface 310a.

[0055] The lattice shape (arrangement of a plurality of holes 316) of the photonic crystal layer 315 can be arbitrary, such as a square lattice, a triangular lattice, or an orthogonal lattice. The opening shape of the holes 316 is not particularly limited, and for example, it may be circular, elliptical, or triangular. Also, a circular hole and a hole, or an elliptical hole, may form a pair to constitute each hole 316 (double lattice photonic crystal).

[0056] The opening dimension of the surface electrode 321 that forms the light-emitting surface of the laser light is not particularly limited. For example, it may be 1 mm in diameter, 3 mm in diameter, or 10 mm in diameter. The opening dimension of the surface electrode 321 may be in the range of 3 mm or more and 10 mm or less in diameter. The opening dimension of the surface electrode 321 may be in a range exceeding 10 mm in diameter.

[0057] For example, by condensing the laser light from the PCSEL element 331 (the opening dimension of the surface electrode 321 is 1 mm in diameter), laser irradiation with an output of 10 W and a spot diameter of about 10 μm is possible. By condensing the laser light from the PCSEL element 331 (the opening dimension of the surface electrode 321 is 3 mm in diameter), laser irradiation with an output of 50 W and a spot diameter of about 50 μm is possible.

[0058] As shown in FIG. 5, a plurality of PCSEL elements 331 are arranged in a planar manner. The plurality of PCSEL elements 331 are arranged in a flat shape. The plurality of PCSEL elements 331 are arranged at intervals from each other. The plurality of PCSEL elements 331 are arranged at equal intervals. The plurality of PCSEL elements 331 are arranged in a matrix. The plurality of PCSEL elements 331 are arranged in an area having a square plan view.

[0059] A plurality of PCSEL elements 331 (331-1 to 331-36) are arranged in a 6×6 matrix. PCSEL elements 331-1 to 331-6 are arranged in a column in the vertical direction of the paper surface showing FIG. 5, PCSEL elements 331-12 to 331-7 are arranged in a column in the vertical direction, PCSEL elements 331-13 to 331-18 are arranged in a column in the vertical direction, PCSEL elements 331-24 to 331-19 are arranged in a column in the vertical direction, PCSEL elements 331-25 to 331-30 are arranged in a column in the vertical direction, and PCSEL elements 331-36 to 331-31 are arranged in a column in the vertical direction.

[0060] An electrode laminate 371 composed of a p-side electrode 372 and an n-side electrode 373 is electrically connected to each PCSEL element 331.

[0061] The PCSEL element 331-1 is electrically connected to the p-side common terminal 351 via a plurality of wires 366. The PCSEL element 331-36 is electrically connected to the n-side common terminal 352 via a plurality of wires 367. Adjacent PCSEL elements 331 in the vertical direction are electrically connected via a plurality of wires 361. The PCSEL element 331-6 and the PCSEL element 331-7 adjacent to each other in the horizontal direction of the paper surface shown in FIG. 5 are electrically connected via a plurality of wires 361, and the PCSEL element 331-12 and the PCSEL element 331-13 adjacent to each other in the horizontal direction are electrically connected via a plurality of wires 361, and the PCSEL element 331-18 and the PCSEL element 331-19 adjacent to each other in the horizontal direction are electrically connected via a plurality of wires 361, and the PCSEL element 331-24 and the PCSEL element 331-25 adjacent to each other in the horizontal direction are electrically connected via a plurality of wires 361, and the PCSEL element 331-30 and the PCSEL element 331-31 adjacent to each other in the horizontal direction are electrically connected via a plurality of wires 361.

[0062] The p-side common terminal 351 is electrically connected to the positive side of the power supply 341, and the n-side common terminal 352 is electrically connected to the negative side of the power supply 341. With such a configuration, the plurality of PCSEL elements 331 are electrically connected in series. The PCSEL elements 331-1 to 331-36 are arranged in order on a series electrical circuit.

[0063] Note that the electrode structure for connecting adjacent PCSEL elements 331 to each other will be described in detail later.

[0064] The emission directions of the laser light from the plurality of PCSEL elements 331 are parallel to each other. The emission direction of the laser light from the PCSEL element 331 is a direction orthogonal to the virtual plane in which the plurality of PCSEL elements 331 are arranged.

[0065] In theory, the single PCSEL element 331 can output 50 to 100 W. Assuming that the output of the single PCSEL element 331 is 80 W, the above 6×6 PCSEL element array can output approximately 3 kW. This output value meets the laser output performance required for additive manufacturing by the directed energy deposition (DED) method.

[0066] As shown in FIGS. 2 and 4, the additive manufacturing head 200 further includes a condenser lens 221. The condenser lens 221 is mounted on the head portion 211. The condenser lens 221 is fixed inside the head portion 211.

[0067] The condenser lens 221 is arranged on the straight line 210, which is the emission direction of the laser beam, in order to condense the laser beam from the surface light emitting portion 300 onto the surface of the workpiece W. The straight line 210 is the optical axis of the laser beam from each PCSEL element 331. The straight line 210 is a virtual straight line that passes through the opening center of the surface electrode 321 in each PCSEL element 331 and extends in the emission direction of the laser beam from each PCSEL element 331 (the direction of the arrow indicated by the straight line 210). The condenser lens 221 is provided at a position intersecting the straight line 210. The condenser lens 221 is provided at a position intersecting a plurality of straight lines 210 respectively extending from a plurality of PCSEL elements 331.

[0068] The condenser lens 221 condenses the laser beam from the surface light emitting portion 300 (a plurality of PCSEL elements 331) onto the surface of the workpiece W. The laser beam traveling from the condenser lens 221 toward the workpiece W travels around the central axis 201. The central axis 201 is the optical axis of the laser beam traveling from the condenser lens 221 toward the workpiece W. The central axis 201 is parallel to the straight line 210.

[0069] The condensing lens 221 is a convex lens having a convex surface 223 and a flat surface 222. The condensing lens 221 is arranged such that the flat surface 222 is orthogonal to the straight line 210. The condensing lens 221 is arranged around the central axis 201. The convex surface 223 is arranged on the side of the surface light emitting portion 300 on the optical path of the laser light traveling from the surface light emitting portion 300 toward the workpiece W, and the flat surface 222 is arranged on the side of the workpiece W on the optical path of the laser light traveling from the surface light emitting portion 300 toward the workpiece W.

[0070] The condensing lens 221 faces the surface light emitting portion 300 in the emission direction of the laser light from the surface light emitting portion 300. The condensing lens 221 directly faces the surface light emitting portion 300 in the emission direction of the laser light from the surface light emitting portion 300. The emission direction of the laser light from the surface light emitting portion 300 is parallel to the axial direction of the central axis 201. The laser light emitted from the surface light emitting portion 300 enters the condensing lens 221 without passing through optical components such as a reflecting mirror or a collimating lens.

[0071] In addition, in the present embodiment, the configuration in which one condensing lens 221 is provided for a plurality of PCSEL elements 331 has been described, but the present invention is not limited to this, and a configuration in which a condensing lens is provided for each of the plurality of PCSEL elements 331 may be employed. For example, 36 condensing lenses 221 may be arranged to face a surface light emitting portion 300 having PCSEL elements 331-1 to 331-36.

[0072] As shown in FIGS. 1, 2, and 4, the additional processing head 200 further includes a laser light emitting portion 216. The laser light emitting portion 216 is provided in the head portion 211. The laser light emitting portion 216 opens facing the workpiece W. The laser light from the condensing lens 221 travels through the laser light emitting portion 216 and toward the workpiece W.

[0073] The surface light emitting portion 300, the condensing lens 221, and the laser light emitting portion 216 are provided side by side on the axis of the central axis 201. The condensing lens 221 is arranged between the surface light emitting portion 300 and the laser light emitting portion 216.

[0074] In a state where the additional processing head 200 is attached to the tool spindle 121, the central axis 201 is arranged on the same straight line as the rotation central axis 105 of the tool spindle 121. In such a configuration, the shank portion 231 is arranged around the central axis 201. The shank portion 231, the surface light emitting portion 300, the condenser lens 221, and the laser light emitting portion 216 are provided side by side on the axis of the central axis 201. The surface light emitting portion 300 is arranged between the shank portion 231 and the condenser lens 221 in the axial direction of the central axis 201.

[0075] The shank portion 231 is arranged on the opposite side of the condenser lens 221 with the surface light emitting portion 300 interposed therebetween in the axial direction of the central axis 201.

[0076] FIG. 8 is a diagram showing the mutual positional relationship among the surface light emitting portion, the condenser lens, and the workpiece. FIG. 9 is a diagram showing the laser light in the vicinity of the focal point surrounded by the two-dot chain line IX in FIG. 8.

[0077] Subsequently, specific examples of the size of the surface light emitting portion 300, the mutual distances among the surface light emitting portion 300, the condenser lens 221, and the workpiece W, and the spot diameter of the laser light formed on the surface of the workpiece W will be described.

[0078] As shown in FIG. 5, assume a case where the opening dimension D of the surface electrode 321 forming the light emitting surface of the laser light is 3 mm in diameter.

[0079] In this case, each PCSEL element 331 has a square plan view, and the length E of one side thereof is 4.5 mm. The electrode laminate 371 provided corresponding to each PCSEL element 331 has a square plan view, and the length B of one side thereof is 8 mm. The plurality of PCSEL elements 331 are arranged such that the interval C between the adjacent electrode laminates 371 in the vertical and horizontal directions is 1 mm. In such a configuration, the surface light emitting portion 300 has a square plan view, and the length L of one side thereof is 53 mm.

[0080] As shown in FIG. 8, the distance Sa between the surface light emitting portion 300 and the condenser lens 221 (convex surface 223) in the emission direction of the laser light from the surface light emitting portion 300 (axial direction of the central axis 201) is 50 mm. The distance Sb between the flat surface 222 of the condenser lens 221 and the focal position F of the laser light in the emission direction of the laser light from the surface light emitting portion 300 (axial direction of the central axis 201) is 200 mm.

[0081] As shown in FIGS. 8 and 9, the diameter of the laser light from the condenser lens 221 centered on the central axis 201 decreases as it moves away from the condenser lens 221, becomes minimum at the focal position F, and further increases as it moves away from the focal position F. The spot diameter d of the laser light at the focal position F is 3 mm.

[0082] The length L of one side of the surface light emitting portion 300 using the PCSEL element 331 with the opening dimension D of the surface electrode 321 being 3 mm in diameter may be in the range of 50 mm or more and 55 mm or less. The length L of one side of the surface light emitting portion 300 using the PCSEL element 331 with the opening dimension D of the surface electrode 321 being 3 mm or more in diameter may be in the range of 50 mm or more and 100 mm or less, or may be in the range of 50 mm or more and 75 mm or less.

[0083] The distance Sa between the surface light emitting portion 300 and the condenser lens 221 is preferably smaller than the distance Sb between the condenser lens 221 and the focal position F of the laser light (Sa < Sb). The distance Sa between the surface light emitting portion 300 and the condenser lens 221 may be 1 / 2 times or less of the distance Sb between the condenser lens 221 and the focal position F of the laser light (Sa ≦ 1 / 2Sb). The spot diameter d of the laser light at the focal position F may be in the range of 0.5 mm or more and 5 mm or less, or may be in the range of 1.5 mm or more and 3 mm or less.

[0084] The distance Sa between the surface light-emitting portion 300 and the condenser lens 221 may be less than or equal to the distance between the shank portion 231 and the surface light-emitting portion 300 in the emission direction of the laser light from the surface light-emitting portion 300 (the axial direction of the central axis 201), or may be greater than the distance between the shank portion 231 and the surface light-emitting portion 300 in the emission direction of the laser light from the surface light-emitting portion 300 (the axial direction of the central axis 201). The distance between the shank portion 231 and the surface light-emitting portion 300 in the emission direction of the laser light from the surface light-emitting portion 300 (the axial direction of the central axis 201) may be less than or equal to the distance Sb between the condenser lens 221 and the focal position F of the laser light, or may be greater than the distance Sb between the condenser lens 221 and the focal position F of the laser light.

[0085] FIG. 10 is a front view showing a modified example of the additional processing head in FIG. 2. Referring to FIG. 10, in this modified example, in a state where the additional processing head 200 is attached to the tool spindle 121, the central axis 201 corresponding to the optical axis of the laser light from the condenser lens 221 is displaced from the rotation center axis 105 of the tool spindle 121. The central axis 201 is parallel to the rotation center axis 105 of the tool spindle 121.

[0086] FIG. 11 is a top view showing the relationship among the shank portion, the surface light-emitting portion, the condenser lens, and the spot of the laser light in the additional processing head in FIG. 2. FIG. 12 is a top view showing the relationship among the shank portion, the surface light-emitting portion, the condenser lens, and the spot of the laser light in the additional processing head in FIG. 10.

[0087] Referring to FIGS. 2 and 11, when viewed in the axial direction of the central axis 201, the laser light spot SP, the shank portion 231, and the surface light-emitting portion 300 are arranged inside the outer shape of the condenser lens 221. The spot SP and the shank portion 231 are arranged inside the outer shape of the surface light-emitting portion 300. The spot SP is arranged inside the outer shape (the maximum diameter portion centered on the rotation center axis 105) of the shank portion 231.

[0088] When viewed in the axial direction of the central axis 201, the surface light emitting portion 300 may be arranged inside the outer shape of the shank portion 231, or a part of the surface light emitting portion 300 and a part of the shank portion 231 may overlap each other.

[0089] The diameter of the condenser lens 221 centered on the central axis 201 is equal to or greater than the length of the diagonal line of the surface light emitting portion 300. The length of the diagonal line of the surface light emitting portion 300 is equal to or greater than the maximum diameter of the shank portion 231 centered on the rotation center axis 105. The length of the diagonal line of the surface light emitting portion 300 may be less than the maximum diameter of the shank portion 231 centered on the rotation center axis 105.

[0090] Referring to FIGS. 10 and 12, in this modification, the central axis 201 is displaced from the rotation center axis 105 of the tool spindle 121 in the Z-axis direction and the Y-axis direction. The central axis 201 may be displaced only in the Z-axis direction from the rotation center axis 105 of the tool spindle 121, or may be displaced only in the Y-axis direction.

[0091] FIG. 13 is a plan view showing a modification of the surface light emitting portion in FIG. 5. FIG. 14 is a circuit diagram showing the surface light emitting portion in FIG. 13.

[0092] Referring to FIGS. 13 and 14, in the surface light emitting portion 300B in this modification, the PCSEL element 331-1 is electrically connected to the p-side common terminal 351 via a plurality of wires 366. The PCSEL element 331-12 is electrically connected to the n-side common terminal 352 via a plurality of wires 367. The PCSEL element 331-13 is electrically connected to the p-side common terminal 351 via a plurality of wires 366. The PCSEL element 331-24 is electrically connected to the n-side common terminal 352 via a plurality of wires 367. The PCSEL element 331-25 is electrically connected to the p-side common terminal 351 via a plurality of wires 366. The PCSEL element 331-36 is electrically connected to the n-side common terminal 352 via a plurality of wires 367.

[0093] The vertically adjacent PCSEL elements 331 are electrically connected via a plurality of wires 361. The horizontally adjacent PCSEL elements 331-6 and 331-7 are electrically connected via a plurality of wires 361, the horizontally adjacent PCSEL elements 331-18 and 331-19 are electrically connected via a plurality of wires 361, and the horizontally adjacent PCSEL elements 331-30 and 331-31 are electrically connected via a plurality of wires 361.

[0094] The three p-side common terminals 351 are electrically connected to the positive side of the power supply 341, and the three n-side common terminals 352 are electrically connected to the negative side of the power supply 341. With such a configuration, the PCSEL elements 331-1 to 331-12 are electrically connected in series in the order given, the PCSEL elements 331-13 to 331-24 are electrically connected in series in the order given, and the PCSEL elements 331-25 to 331-36 are electrically connected in series in the order given. The PCSEL elements 331-1 to 331-12, the PCSEL elements 331-1 to 331-12, and the PCSEL elements 331-13 to 331-24 are electrically connected in parallel with each other.

[0095] FIG. 15 is a front view showing the additional processing head in the reference example. FIG. 16 is a top view showing the additional processing head in the reference example as viewed in the direction of the arrow on line XVI-XVI in FIG. 15.

[0096] Referring to FIGS. 15 and 16, in this reference example, laser light is oscillated by a laser oscillator installed outside the processing machine 100, and the laser light is introduced into the additional processing head 600 through the optical fiber 611. The laser light is made parallel by passing through the collimating lens 612. The laser light from the collimating lens 612 travels toward the condenser lens 221 while being reflected by the first mirror 613, the second mirror 614, the third mirror 615, the fourth mirror 616, and the fifth mirror 617 inside the additional processing head 600. The laser light condensed by the condenser lens 221 is emitted toward the workpiece through the laser light emitting portion 216.

[0097] In the above reference example, in order to obtain the energy required for metal melting, a large laser oscillator such as a fiber laser, a fiber-coupled semiconductor laser, or a CO2 laser is installed outside the processing area, and the laser light is transmitted to the additional processing head 600 in the processing area using the optical fiber 611. Further, by providing the collimating lens 612 in the additional processing head 600, the laser light from the optical fiber 611 is made parallel light, and further, by providing a plurality of mirrors 613 to 617 in the additional processing head 600, the laser light introduced into the additional processing head 600 by the optical fiber 611 is guided to the condenser lens 221.

[0098] Referring to FIGS. 1 to 14, in contrast, in the additional processing head 200 according to the present embodiment, a surface light emitting portion 300 including a plurality of PCSEL elements 331 and a condenser lens 221 capable of condensing the laser light from the surface light emitting portion 300 on the surface of the workpiece W are mounted on a head portion 211 that is movable relative to the workpiece.

[0099] In such a configuration, the surface light emitting unit 300 using the PCSEL element 331 as the light emitting element is small-sized and capable of high-output laser irradiation, so that the surface light emitting unit 300 can be directly mounted on the additional processing head 200. Thereby, an optical fiber for transmitting the laser light to the additional processing head 200 can be omitted, and the configuration of the additional processing head 200 can be simplified. Further, the PCSEL element 331 has characteristics of high beam quality (small beam divergence). Therefore, optical components for shaping the laser light, such as a collimating lens, can be omitted, and the configuration of the additional processing head 200 can be further simplified.

[0100] Further, the condenser lens 221 is disposed to face the surface light emitting unit 300 in the emission direction of the laser light from the surface light emitting unit 300.

[0101] As described above, the surface light emitting unit 300 is small-sized. Therefore, when the surface light emitting unit 300 is mounted on the additional processing head 200, the surface light emitting unit 300 and the condenser lens 221 can be disposed to face each other regardless of the space limitation in the head unit 211. Thereby, optical components for guiding the laser light, such as a reflecting mirror, can be omitted, and the configuration of the additional processing head 200 can be further simplified.

[0102] Further, when the distance Sa between the surface light emitting unit 300 and the condenser lens 221 is smaller than the distance Sb between the condenser lens 221 and the focal position F of the laser light, the surface light emitting unit 300 and the condenser lens 221 can be disposed in a more compact space in the head unit 211.

[0103] Further, in the processing machine 100 according to the present embodiment, the additional processing head 200 has a shank portion 231 that is clamped by the tool spindle 121. In such a configuration, by clamping the shank portion 231 with the tool spindle 121, the additional processing head 200 is attached to the tool spindle 121. Thereby, while moving the additional processing head 200 integrally with the tool spindle 121, the workpiece W can be irradiated with the laser light from the additional processing head 200.

[0104] Further, the shank portion 231 is disposed on the opposite side of the condenser lens 221 with the surface light emitting portion 300 interposed therebetween in the axial direction of the central axis 201. According to such a configuration, the shank portion 231 can be provided in the head portion 211 without affecting the traveling of the laser light emitted from the surface light emitting portion 300.

[0105] Subsequently, an electrode structure for electrically connecting a plurality of PCSEL elements 331 to each other will be described.

[0106] FIG. 17 is a view of the surface light emitting portion as seen from the light emitting surface side. FIG. 18 is a cross-sectional view showing the surface light emitting portion as seen in the arrow viewing direction on the XVIII-XVIII line in FIG. 17. In FIGS. 17 and 18, for the sake of simplification, two PCSEL elements 331A and 331B electrically connected in series to each other are shown. FIG. 19 is a perspective view showing the electrode laminate in FIG. 17.

[0107] Referring to FIGS. 17 to 19, the surface light emitting portion 300 further includes an electrode laminate 371 (371A, 371B). The electrode laminate 371A and the electrode laminate 371B are provided corresponding to the PCSEL element 331A and the PCSEL element 331B, respectively. The electrode laminate 371A and the electrode laminate 371B are provided at intervals from each other.

[0108] The electrode laminate 371 has a p-side electrode 372 and an n-side electrode 373. Each of the p-side electrode 372 and the n-side electrode 373 is composed of, for example, a copper frame.

[0109] The p-side electrode 372 is arranged around the PCSEL element 331 when the emission surface 310a of the element body 310 is viewed in plan view (when viewed in the thickness direction of the element body 310). The p-side electrode 372 extends in a frame shape around the PCSEL element 331 when the emission surface 310a of the element body 310 is viewed in plan view. The n-side electrode 373 is arranged around the PCSEL element 331 when the emission surface 310a of the element body 310 is viewed in plan view (when viewed in the thickness direction of the element body 310). The n-side electrode 373 extends in a frame shape around the PCSEL element 331 when the emission surface 310a of the element body 310 is viewed in plan view. The p-side electrode 372 and the n-side electrode 373 are stacked in the thickness direction of the element body 310 with an insulating layer 374 therebetween.

[0110] The p-side electrode 372 is provided at a position orthogonal to the thickness direction of the element body 310 and intersecting with the virtual plane on which the element body 310 is arranged. The p-side electrode 372 extends in a rectangular shape along the outer peripheral edge of the PCSEL element 331 while providing a gap between the p-side electrode 372 and the PCSEL element 331. The n-side electrode 373 is provided at a position orthogonal to the thickness direction of the element body 310 and protruding in the emission direction of the laser light from the PCSEL element 331 more than the virtual plane on which the element body 310 is arranged.

[0111] The cross-sectional area of the p-side electrode 372 when cut by a plane orthogonal to the thickness direction of the element body 310 is larger than the cross-sectional area of the n-side electrode 373 when cut by a plane orthogonal to the thickness direction of the element body 310. When viewed in the thickness direction of the element body 310, the outer peripheral edge of the p-side electrode 372 protrudes in a direction away from the element body 310 more than the outer peripheral edge of the n-side electrode 373. When viewed in the thickness direction of the element body 310, the inner peripheral edge of the p-side electrode 372 and the inner peripheral edge of the n-side electrode 373 are aligned.

[0112] The surface light-emitting portion 300 further includes a submount 381 (381A, 381B) and a conductive layer 382 (382A, 382B).

[0113] The submount 381A and the submount 381B are respectively provided corresponding to the PCSEL element 331A and the PCSEL element 331B. The conductive layer 382A and the conductive layer 382B are respectively provided corresponding to the PCSEL element 331A and the PCSEL element 331B.

[0114] The conductive layer 382 is provided in a layered manner such that the emission direction of the laser light from the element body 310 is the thickness direction. The conductive layer 382 is formed of a conductive material. The PCSEL element 331 and the electrode laminate 371 are mounted on the submount 381 via the conductive layer 382. The back electrode 326 of the PCSEL element 331 and the p-side electrode 372 of the electrode laminate 371 are joined to the conductive layer 382 which is a plating layer. The submount 381 is formed of a material with high thermal conductivity. The submount 381A and the submount 381B are provided at intervals from each other.

[0115] The surface light emitting portion 300 further has a heat sink 386. A refrigerant such as cooling oil is circulated in the heat sink 386. The submount 381 (381A, 381B) is connected to the heat sink 386 via a solder layer 383. The heat sink 386 exhibits a function of promoting heat dissipation from the PCSEL element 331 and a function of integrally holding a plurality of PCSEL elements 331.

[0116] In each PCSEL element 331, the p-side electrode 372 is electrically connected to the PCSEL element 331. The p-side electrode 372 is electrically connected to the back electrode 326 via the conductive layer 382. The p-side electrode 372 is joined to the conductive layer 382 over the entire circumference extending in a frame shape around the PCSEL element 331. The entire surface of the back electrode 326 is joined to the conductive layer 382.

[0117] In each PCSEL element 331, the n-side electrode 373 is electrically connected to the PCSEL element 331. The n-side electrode 373 is electrically connected to the surface electrode 321 via a plurality of wires 362. The wires 362 are connected to the n-side electrode 373 and the surface electrode 321. The plurality of wires 362 are provided at intervals from each other on the n-side electrode 373. The plurality of wires 362 are provided at intervals from each other in the circumferential direction of the n-side electrode 373 that extends in a frame shape around the PCSEL element 331. The plurality of wires 362 are provided over the entire circumference of the n-side electrode 373 that extends in a frame shape around the PCSEL element 331. The plurality of wires 362 are provided on the four sides of the n-side electrode 373 that extends in a rectangular shape.

[0118] Note that the plurality of wires 362 may be provided in a partial section in the circumferential direction of the n-side electrode 373. The plurality of wires 362 may be provided, for example, on two opposite sides of the n-side electrode 373 that extends in a rectangular shape.

[0119] Adjacent PCSEL elements 331A and 331B are electrically connected to each other via a plurality of wires 361. The wires 361 are connected to the n-side electrode 373 of the electrode laminate 371A and the p-side electrode 372 of the electrode laminate 371B. The plurality of wires 361 are provided at intervals from each other in the circumferential direction of the p-side electrode 372 and the n-side electrode 373 that extend in a frame shape around the PCSEL element 331. The plurality of wires 361 are provided on one side of the n-side electrode 373 and one side of the p-side electrode 372 that extends adjacent and parallel to that one side of the n-side electrode 372.

[0120] The p-side electrode 372 of the electrode laminate 371A is electrically connected to the p-side common terminal 351 via a plurality of wires 366. The n-side electrode 373 of the electrode laminate 371B is electrically connected to the n-side common terminal 352 via a plurality of wires 367.

[0121] As shown in FIG. 18, the current from the p-side total terminal 351 flows through the wire 366 to the p-side electrode 372 of the electrode laminate 371A. The current flows from the p-side electrode 372 of the electrode laminate 371A through the conductive layer 382A to the back electrode 326 of the PCSEL element 331A. The current flowing through the PCSEL element 331A flows from the surface electrode 321 through the plurality of wires 362 to the n-side electrode 373 of the electrode laminate 371A.

[0122] The current from the n-side electrode 373 of the electrode laminate 371A flows through the plurality of wires 361 to the p-side electrode 372 of the electrode laminate 371B. The current flows through the electrode laminate 371B and the PCSEL element 331B in the same order as the current flow in the above electrode laminate 371A and PCSEL element 331A. The current from the n-side electrode 373 of the electrode laminate 371B flows through the plurality of wires 367 to the n-side total terminal 352.

[0123] In the surface light emitting portion 300 of the present embodiment, in order to realize the high output required for metal melting, a PCSEL element 331 having a large area when viewed in plan on the emission surface 310a is used. In this case, it is necessary to allow current to flow uniformly in a plane with respect to the large-area PCSEL element 331.

[0124] On the other hand, in the present embodiment, an electrode laminate 371 including a p-side electrode 372 and an n-side electrode 373 laminated via an insulating layer 374 is arranged around the PCSEL element 331 when the emission surface 310a is viewed in plan, and each of the p-side electrode 372 and the n-side electrode 373 is electrically connected to the PCSEL element 331. According to such a configuration, it is possible to allow current to flow into the PCSEL element from the periphery of the PCSEL element 331 when the emission surface 310a is viewed in plan, and to allow current to flow out from the PCSEL element 331 toward the periphery of the PCSEL element 331 when the emission surface 310a is viewed in plan. Therefore, even with respect to the large-area PCSEL element 331, current can flow uniformly in a plane.

[0125] In addition, the stacked structure of the p-side electrode 372 and the n-side electrode 373 can reduce the distance between the plurality of PCSEL elements 331. As a result, the surface light-emitting portion 300 can be further miniaturized.

[0126] In addition, the PCSEL element 331 has a surface electrode 321 provided along the periphery of the emission surface 310a. The PCSEL element 331 and the n-side electrode 373 are provided on the n-side electrode 373 with a space therebetween, and are electrically connected by a plurality of wires 362 each extending between the n-side electrode 373 and the surface electrode 321. According to such a configuration, current can flow out from the PCSEL element 331 through the plurality of wires 362 toward the periphery of the PCSEL element 331 when the emission surface 310a is viewed in plan.

[0127] In addition, the PCSEL element 331 has a back surface electrode 326 provided on the back surface 310b of the element body 310. The PCSEL element 331 and the p-side electrode 372 are electrically connected by a conductive layer 382 to which the back surface electrode 326 and the p-side electrode 372 are joined. According to such a configuration, current can flow into the PCSEL element 331 from the periphery of the PCSEL element 331 when the emission surface 310a is viewed in plan through the conductive layer 382.

[0128] In the present embodiment, a configuration in which each of the p-side electrode 372 and the n-side electrode 373 has a frame structure surrounding the four sides of the PCSEL element has been described. However, each of the p-side electrode and the n-side electrode in the present invention may be arranged in at least a partial range around the PCSEL element. For example, each of the p-side electrode and the n-side electrode may have a shape surrounding the PCSEL element from three sides. Further, each of the p-side electrode and the n-side electrode may have a split structure including two portions facing each other with the PCSEL element interposed therebetween, or may have a split structure including four portions arranged at the four corners of the PCSEL element.

[0129] (Embodiment 2) FIG. 20 is a perspective view showing a surface light-emitting device according to Embodiment 2 of the present invention. FIG. 21 is a circuit diagram showing the surface light-emitting device in FIG. 20.

[0130] The surface light-emitting device 300C in the present embodiment basically has the same configuration as the surface light-emitting unit 300A in Embodiment 1. Hereinafter, the description of the overlapping structure will not be repeated.

[0131] Referring to FIGS. 20 and 21, the surface light-emitting device 300C in the present embodiment corresponds to the surface light-emitting unit 300 (300A, 300B) in Embodiment 1. The surface light-emitting device 300C is used for additional processing of a workpiece. More specifically, the surface light-emitting device 300C is used for additional processing of a workpiece by a directed energy deposition method. The surface light-emitting device 300C has a plurality of PCSEL elements 331 (331-1 to 331-36). The plurality of PCSEL elements 331 are electrically connected in series with each other. The PCSEL elements 331-1 to 331-36 are arranged in series on an electrical circuit in the order given.

[0132] The plurality of PCSEL elements 331 (331-1 to 331-36) are arranged in a 6×6 matrix. The plurality of PCSEL elements 331 are arranged in a planar manner in a plane including a first direction 510 and a second direction 520. The plurality of PCSEL elements 331 are arranged along the first direction 510 and the second direction 520 orthogonal to the first direction 510.

[0133] In this specification, it is assumed that the right direction on the paper surface showing FIG. 21 corresponds to the plus direction in the first direction 510, and the left direction on the paper surface showing FIG. 21 corresponds to the minus direction in the first direction 510. Also, it is assumed that the upward direction on the paper surface showing FIG. 21 corresponds to the plus direction in the second direction 520, and the downward direction on the paper surface showing FIG. 21 corresponds to the minus direction in the second direction 520.

[0134] The PCSEL elements 331-1, 331-2, and 331-3 are arranged in the order listed, from the plus side to the minus side in the first direction 510. The PCSEL elements 331-4, 331-5, and 331-6 are arranged in the order listed, from the plus side to the minus side in the first direction 510. The PCSEL elements 331-1 and 331-4 are arranged in the order listed, from the plus side to the minus side in the second direction 520, the PCSEL elements 331-2 and 331-5 are arranged in the order listed, from the plus side to the minus side in the second direction 520, and the PCSEL elements 331-3 and 331-6 are arranged in the order listed, from the plus side to the minus side in the second direction 520.

[0135] In the same order as above, the PCSEL elements 331-7 to 331-9, the PCSEL elements 331-10 to 331-12, the PCSEL elements 331-13 to 331-15, and the PCSEL elements 331-16 to 331-18 are arranged in the first direction 510 and the second direction 520.

[0136] The PCSEL elements 331-19 to 331-36 are respectively provided at positions obtained by moving the PCSEL elements 331-1 to 18 symmetrically with respect to the center of the light emitting surface of the surface light emitting device 300C.

[0137] The plurality of PCSEL elements 331 are mounted on the heat sink 386 for each group of the group of PCSEL elements 331-1 to 331-9, the group of PCSEL elements 331-10 to 331-18, the group of PCSEL elements 331-19 to 331-27, and the group of PCSEL elements 331-28 to 331-36.

[0138] The surface light emitting device 300C further includes a plurality of switching elements 431 (431-1 to 431-36) and a plurality of gate drivers 440.

[0139] The plurality of switching elements 431 are each electrically connected in parallel to the plurality of PCSEL elements 331. The switching elements 431-1 to 431-36 are respectively provided corresponding to the PCSEL elements 331-1 to 331-36. The switching element 431 is composed of a transistor capable of handling a large current. The switching element 431 is, for example, composed of a GaN-FET (Field Effect Transistor).

[0140] The plurality of switching elements 431 are arranged adjacent to the plurality of PCSEL elements 331 arranged in a matrix. The plurality of PCSEL elements 331 are arranged planar in a plane including a first direction 510 and a second direction 520. The plurality of switching elements 431 are linearly arranged along the periphery of the plurality of PCSEL elements 331 arranged in a matrix.

[0141] The switching elements 431-1 to 431-36 are respectively provided corresponding to the PCSEL elements 331-1 to 331-36. The switching elements 431-1 to 431-18 are lined up in the second direction 520 along the PCSEL element 331-1, the PCSEL element 331-4, the PCSEL element 331-7, the PCSEL element 331-10, the PCSEL element 331-13, and the PCSEL element 331-16 in the order listed. The switching elements 431-1 to 431-3 face the PCSEL element 331-1 in the second direction 520, the switching elements 431-4 to 431-6 face the PCSEL element 331-4 in the second direction 520, the switching elements 431-7 to 431-9 face the PCSEL element 331-7 in the second direction 520, the switching elements 431-10 to 431-12 face the PCSEL element 331-10 in the second direction 520, the switching elements 431-13 to 431-15 face the PCSEL element 331-13 in the second direction 520, and the switching elements 431-16 to 431-18 face the PCSEL element 331-16 in the second direction 520.

[0142] The switching elements 431-19 to 431-36 are respectively provided at positions where the switching elements 431-1 to 431-18 are moved point-symmetrically with respect to the center of the light-emitting surface of the surface light-emitting device 300C.

[0143] The plurality of gate drivers 440 are respectively provided corresponding to the plurality of switching elements 431. The gate driver 440 drives and controls the switching element 431 by applying a voltage to the gate of the switching element 431.

[0144] The plurality of gate drivers 440 are arranged to face the plurality of switching elements 431 respectively in the first direction 510. The plurality of switching elements 431 and the plurality of gate drivers 440 are mounted on the printed circuit board 441 for each group of the switching elements 431-1 to 431-18 and the group of the plurality of gate drivers 440 corresponding to the switching elements 431-1 to 431-18, and the switching elements 431-19 to 431-36 and the group of the plurality of gate drivers 440 corresponding to the switching elements 431-19 to 431-36.

[0145] FIG. 22 is a plan view showing one mode of light emission in the surface light-emitting device in FIG. 21. The two arrows attached to each PCSEL element 331 in FIG. 21 correspond to the mode of light emission shown in FIG. 22. Also, in FIG. 21, the current flow is indicated by the arrows. Referring to FIGS. 20 to 22, when the switching element 431 is turned off, the current does not flow through the switching element 431, and the PCSEL element 331 electrically connected in parallel with the switching element 431 is energized. On the other hand, when the switching element 431 is turned on, the current flows through the switching element 431, and the PCSEL element 331 electrically connected in parallel with the switching element 431 is de-energized.

[0146] In the surface light-emitting device 300C shown in FIGS. 21 and 22, the switching elements 431-1, 431-9, 431-12, 431-16, 431-19, 431-27, 431-30, and 431-34 are turned on, and the remaining plurality of switching elements 431 are turned off. As a result, the PCSEL elements 331-1, 331-9, 331-12, 331-16, 331-19, 331-27, 331-30, and 331-34 are made non-luminous, and the remaining plurality of PCSEL elements 331 are emitting light. The light-emitting modes of the plurality of PCSEL elements 331 are symmetric with respect to each straight line passing through the center of the light-emitting surface of the surface light-emitting device 300C and extending in the first direction 510 and the second direction 520.

[0147] FIGS. 23 and 24 are plan views showing another light-emitting mode in the surface light-emitting device. Referring to FIG. 23, all of the switching elements 431-1 to 431-36 are turned off. As a result, all of the PCSEL elements 331-1 to 331-36 are emitting light.

[0148] Referring to FIG. 24, the switching elements 431-12, 431-15, 431-17, 431-18, 431-20, 431-21, 431-24 and 431-27 are turned on, and the remaining plurality of switching elements 431 are turned off. As a result, the PCSEL elements 331-12, 331-15, 331-17, 331-18, 331-20, 331-21, 331-24 and 331-27 are non-luminous, and the remaining plurality of PCSEL elements 331 are emitting light. The light emission modes of the plurality of PCSEL elements 331 are asymmetric with respect to a straight line passing through the center of the light emitting surface of the surface light emitting device 300C and extending in the first direction 510, while being symmetric with respect to a straight line passing through the center of the light emitting surface of the surface light emitting device 300C and extending in the second direction 52.

[0149] As described above, in the surface light emitting device 300C according to the present embodiment, by selectively turning on and off the plurality of switching elements 431, any one of the plurality of PCSEL elements 331 can be caused to emit light. As a result, the spot shape of the laser light formed on the work surface can be changed according to various processing conditions in additive processing, such as the shape of the work surface, the range in which the work is melted, or the scanning direction of the additive processing head 200 with respect to the work.

[0150] Note that the spot shape of the laser light emitted from the condenser lens 221 changes according to the distance from the focal position. For example, at a position 15 mm closer to the condenser lens 221 side from the focal position, a spot shape close to the light emission mode in the surface light emitting device 300C is obtained. As the laser light spot becomes smaller as it approaches the condenser lens 221 side from the focal position, the corner portions of the spot shape become rounded, and a single-peak type spot shape is obtained at the focal position.

[0151] FIG. 25 is a plan view showing a surface light-emitting device in a range surrounded by a two-dot chain line XXV in FIG. 20. FIG. 26 is a side view showing the surface light-emitting device viewed in the direction indicated by an arrow XXVI in FIG. 25. FIG. 27 is a cross-sectional view showing the surface light-emitting device viewed in the arrow viewing direction on line XXVII-XXVII in FIG. 26. FIG. 28 is a cross-sectional view showing the surface light-emitting device viewed in the arrow viewing direction on line XXVIII-XXVIII in FIG. 26. FIG. 29 is a cross-sectional view showing the surface light-emitting device viewed in the arrow viewing direction on line XXIX-XXIX in FIG. 26.

[0152] FIG. 30 is a cross-sectional view showing the surface light-emitting device viewed in the arrow viewing direction on line XXX-XXX in FIG. 25. FIG. 31 is a diagram schematically showing wiring between the electrode laminate and the switching element in FIG. 30.

[0153] Referring to FIGS. 25 to 31, the surface light-emitting device 300C further includes an electrode laminate 461. Hereinafter, typically, the structure of the electrode laminate 461 provided for the PCSEL elements 331-1, 331-2, and 331-3 arranged in the first direction 510 will be described, but the electrode laminate 461 provided for the PCSEL elements 331-4 to 331-36 has the same structure.

[0154] The electrode laminate 461 constitutes a current path for the PCSEL element 331-1, a current path for the PCSEL element 331-2, and a current path for the PCSEL element 331-3. The electrode laminate 461 has a layer structure in a third direction 530 orthogonal to the first direction 510 and the second direction 520. The third direction 530 is the emission direction of the laser light from the PCSEL element 331 (the thickness direction of the element body 310).

[0155] The electrode laminate 461 has a first layer 471 (471A, 471B, 471C) and a second layer 472 (472A, 472B, 472C).

[0156] The first layer 471 constitutes a current path flowing into the PCSEL element 331. The second layer 472 constitutes a current path flowing out of the PCSEL element 331. The first layer 471 and the second layer 472 are provided in pairs corresponding to each of the PCSELs 331 of the PCSEL elements 331-1, 331-2, and 331-3.

[0157] The first layer 471 has a p-side electrode portion 471p and a first extension portion 471e. The p-side electrode portion 471p has a configuration corresponding to the p-side electrode 372 described in Embodiment 1. The p-side electrode portion 471p extends in a frame shape around the PCSEL element 331 when viewed in the third direction 530. The p-side electrode portion 471p extends in a rectangular shape along the outer peripheral edge of the PCSEL element 331 when viewed in the third direction 530.

[0158] The p-side electrode portion 471p is electrically connected to the PCSEL element 331. The p-side electrode portion 471p is joined to the conductive layer 382, which is a plating layer, via the conductive layer 456. The back electrode 326 of the PCSEL element 331 is joined to the conductive layer 382, which is a plating layer. The p-side electrode 372 is electrically connected to the back electrode 326 via the conductive layer 456 and the conductive layer 382.

[0159] The first extension portion 471e extends in the first direction 510 from the p-side electrode portion 471p toward the switching element 431. The first extension portion 471e extends in the first direction 510 at a position shifted from the PCSEL element 331 in the second direction 520. The first extension portion 471e extends in the first direction 510 on both sides of the PCSEL element 331 in the second direction 520.

[0160] The second layer 472 has an n-side electrode portion 472n and a second extension portion 472e. The n-side electrode portion 472n has a configuration corresponding to the n-side electrode 373 described in Embodiment 1. The n-side electrode portion 472n extends in a frame shape around the PCSEL element 331 when viewed in the third direction 530. The n-side electrode portion 472n extends in a rectangular shape along the outer peripheral edge of the PCSEL element 331 when viewed in the third direction 530. The n-side electrode portion 472n forms a layer structure with the p-side electrode portion 471p via the insulating layer 481 in the third direction 530.

[0161] The n-side electrode portion 472n is electrically connected to the PCSEL element 331. The n-side electrode portion 472n is electrically connected to the surface electrode 321 via a plurality of wires 362. The wires 362 are connected to the n-side electrode portion 472n and the surface electrode 321. The plurality of wires 362 are provided at intervals from each other in the circumferential direction of the n-side electrode 373 that extends in a frame shape around the PCSEL element 331. The plurality of wires 362 are provided on two sides of the n-side electrode portion 472n that extends in a rectangular shape and face each other in the first direction 510.

[0162] The second extension portion 472e extends in the first direction 510 from the n-side electrode portion 472n toward the switching element 431. The second extension portion 472e extends in the first direction 510 at a position shifted from the PCSEL element 331 in the second direction 520. The second extension portion 472e extends in the first direction 510 on both sides of the PCSEL element 331 in the second direction 520. The second extension portion 472e forms a layer structure with the n-side electrode portion 472n via the insulating layer 481 in the third direction 530.

[0163] The first layer 471A and the second layer 472A are provided corresponding to the PCSEL element 331-1. The first layer 471B and the second layer 472B are provided corresponding to the PCSEL element 331-2. The first layer 471C and the second layer 472C are provided corresponding to the PCSEL element 331-3.

[0164] The p-side electrode portion 471p of the first layer 471A extends in a frame shape around the PCSEL element 331-1 when viewed in the third direction 530. The first extension portion 471e of the first layer 471A extends in the first direction 510 from the p-side electrode portion 471p of the first layer 471A toward the switching elements 431-1 to 431-3. The p-side electrode portion 471p of the first layer 471B extends in a frame shape around the PCSEL element 331-2 when viewed in the third direction 530. The first extension portion 471e of the first layer 471B extends in the first direction 510 from the p-side electrode portion 471p of the first layer 471B toward the switching elements 431-1 to 431-3. The p-side electrode portion 471p of the first layer 471C extends in a frame shape around the PCSEL element 331-3 when viewed in the third direction 530. The first extension portion 471e of the first layer 471C extends in the first direction 510 from the p-side electrode portion 471p of the first layer 471C toward the switching elements 431-1 to 431-3.

[0165] As shown in FIGS. 27 and 30, in the range from the PCSEL element 331-1 in the first direction 510 toward the switching elements 431-1 to 431-3, the first layer 471A, the first layer 471B, the first layer 471C, the second layer 472A, the second layer 472B, and the second layer 472C form a layer structure in the third direction 530 via the insulating layer 481. As shown in FIGS. 28 and 30, in the range from the PCSEL element 331-2 in the first direction 510 to in front of the PCSEL element 331-1, the first layer 471B, the first layer 471C, the second layer 472B, and the second layer 472C form a layer structure in the third direction 530 via the insulating layer 481. As shown in FIGS. 29 and 30, in the range from the PCSEL element 331-3 in the first direction 510 to in front of the PCSEL element 331-2, the first layer 471C and the second layer 472C form a layer structure in the third direction 530 via the insulating layer 481.

[0166] As shown in FIG. 31, the surface light-emitting device 300C further includes a first wiring 551, a second wiring 552, a third wiring 553, a fourth wiring 554, a fifth wiring 556, a sixth wiring 557, and a seventh wiring 558. The first wiring 551, the second wiring 552, the third wiring 553, the fourth wiring 554, the fifth wiring 556, the sixth wiring 557, and the seventh wiring 558 are provided on the printed circuit board 441 in FIG. 20.

[0167] The first wiring 551 extends from the positive side of the power supply 341 in FIG. 21 and is connected to the first layer 471A. The second wiring 552 is connected to the second layer 472A and the first layer 471B. The third wiring 553 is connected to the second layer 472B and the first layer 471C. The fourth wiring 554 is connected to the second layer 472C and the first layer 471A provided corresponding to the PCSEL element 331-4 in FIG. 21.

[0168] The fifth wiring 556 is connected to the first wiring 551 and the second wiring 552. A switching element 431-1 is provided on the path of the fifth wiring 556. The sixth wiring 557 is connected to the second wiring 552 and the third wiring 553. A switching element 431-2 is provided on the path of the sixth wiring 557. The seventh wiring 558 is connected to the third wiring 553 and the fourth wiring 554. A switching element 431-3 is provided on the path of the seventh wiring 558.

[0169] With such a configuration, the PCSEL elements 331-1, 331-2, and 331-3 are electrically connected in series by the first wiring 551, the second wiring 552, the third wiring 553, and the electrode laminate 461. The switching element 431-1 is electrically connected in parallel to the PCSEL element 331-1, the switching element 431-2 is electrically connected in parallel to the PCSEL element 331-2, and the switching element 431-3 is electrically connected in parallel to the PCSEL element 331-3.

[0170] In this embodiment, a plurality of PCSEL elements 331 are arranged in a matrix so as to be aligned in a first direction 510 and a second direction 520 orthogonal to the first direction 510. With such a configuration, by causing any one of the plurality of PCSEL elements 331 to emit light, the spot shape of the laser light formed on the work surface can be freely changed to a shape that matches the conditions for additional processing of the work.

[0171] Also, the plurality of switching elements 431 are linearly arranged along the periphery of the plurality of PCSEL elements 331 extending in the second direction 520. According to such a configuration, the interval between the plurality of PCSEL elements 331 can be kept smaller as compared with the case where the switching elements 431 are installed in the area where the plurality of PCSEL elements 331 are arranged.

[0172] Further, the electrode laminate 461 includes a first layer 471 having a p-side electrode portion 471p and a first extension portion 471e, and a second layer 472 having an n-side electrode portion 472n and a second extension portion 472e. The p-side electrode portion 471p and the n-side electrode portion 472n form a layer structure in a third direction 530, and the first extension portion 471e and the second extension portion 472e form a layer structure in the third direction 530. According to such a configuration, while suppressing the installation area of the electrode laminate 461 in the plane direction in which the plurality of PCSEL elements 331 are arranged, electrical connection between the PCSEL element 331 and the switching element 431 can be made possible through the electrode laminate 461.

[0173] Also, the first layer 471 and the second layer 472 are provided corresponding to each of the PCSEL elements 331 of the plurality of PCSEL elements 331-1 to 331-3 arranged in the first direction 510, and these plurality of sets of the first layer 471 and the second layer 472 form a layer structure in the third direction 530. According to such a configuration, while suppressing the installation area of the electrode laminate 461 in the plane direction in which the plurality of PCSEL elements 331 are arranged, electrical connection between the PCSEL elements 331-1 to 331-3 and the switching elements 431-1 to 431-3 can be made possible through the electrode laminate 461.

[0174] In addition, in the present embodiment, although a plurality of switching elements 431 are linearly arranged along the periphery of a plurality of PCSEL elements 331 extending in the second direction 520, the present invention is not limited thereto. By changing the structure of the electrode laminate, the plurality of switching elements 431 may be linearly arranged along the periphery of the plurality of PCSEL elements 331 extending in the first direction 510, or a part of the plurality of switching elements 431 may be linearly arranged along the first direction 510 and the other part of the plurality of switching elements 431 may be linearly arranged along the second direction 520.

[0175] The embodiments disclosed this time should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is shown not by the above description but by the claims, and it is intended that all modifications within the meaning and scope equivalent to the claims be included.

Description of Reference Numerals

[0176] 100 Processing machine, 101, 102, 105 Rotation center axis, 104 Specified axis, 106 Swivel center axis, 111 First workpiece spindle, 116 Second workpiece spindle, 121 Tool spindle, 122 Spindle body, 123 Spindle end face, 125 Tool insertion hole, 126 Clamping mechanism, 127 Collet, 128 Drawbar, 129 Spring member, 131 Tool rest, 132 Swivel part, 141 Bed, 150 Machining area, 161 Cover body, 200, 600 Additional processing head, 201 Central axis, 210 Straight line, 211 Head part, 216 Laser light emitting part, 217 Material powder discharge part, 221 Condensing lens, 222 Plane, 223 Convex surface, 231 Shank part, 300, 300A, 300B Surface light emitting part, 300C Surface light emitting device, 310 Element body, 310a Emission surface, 310b Back surface, 311 Substrate, 312 n-type clad layer, 313 Active layer, 314 Carrier blocking layer, 315 Photonic crystal layer, 316 Hole, 317 p-type clad layer, 318 p-type contact layer, 319 Back surface mirror, 321 Surface electrode, 322 AR coating layer, 326 Back surface electrode, 331, 331A, 331B PCSEL element, 341 Power supply, 351 p-side total terminal, 352 n-side total terminal, 361, 362, 366, 367 Wire, 371, 371A, 371B, 461 Electrode laminate, 372 p-side electrode, 373 n-side electrode, 374, 481 Insulating layer, 381, 381A, 381B Submount, 382, 382A, 382B, 456 Conductive layer, 383 Solder layer, 386 Heat sink, 431 Switching element, 440 Gate driver, 441 Printed circuit board, 471, 471A, 471B, 471C First layer, 471e First extension part, 471p p-side electrode part, 472n n-side electrode part, 472, 472A, 472B, 472C Second layer, 472e Second extension part, 510 First direction, 520 Second direction, 530 Third direction, 551 First wiring, 552 Second wiring, 553 Third wiring, 554 Fourth wiring, 556 Fifth wiring, 557 Sixth wiring, 558 Seventh wiring, 611 Optical fiber, 612 Collimating lens, 613 First mirror, 614 Second mirror, 615 Third mirror, 616 Fourth mirror, 617 Fifth mirror.

Claims

1. An additional processing head that is detachable from a processing machine and supplies metal and irradiates laser light to melt the metal and perform additional processing, A head portion that is movable relative to a workpiece when attached to the processing machine; a surface light-emitting unit mounted on the head unit, the surface light-emitting unit having (i) a plurality of PCSEL (Photonic-Crystal Surface-Emitting Laser) elements arranged in a plane, and (ii) a heat sink that holds the plurality of PCSEL elements together and dissipates heat from the PCSEL elements; A condenser lens arranged on a straight line that is an emission direction of the laser light in order to condense the laser light from the surface light emitting unit onto the surface of the workpiece; a plurality of switching elements electrically connected to the plurality of PCSEL elements, When viewed along the emission direction of the laser light from the surface light-emitting portion, at least a portion of the heat sink overlaps with a first region in which a plurality of PCSEL elements are arranged in a planar manner, and a plurality of the switching elements are arranged in a second region adjacent to the first region.

2. An additional processing head that is detachable from a processing machine and supplies metal and irradiates laser light to melt the metal and perform additional processing, A head portion that is movable relative to a workpiece when attached to the processing machine; a surface light-emitting unit mounted on the head unit and having a plurality of photonic-crystal surface-emitting laser (PCSEL) elements; A condenser lens arranged on a straight line that is an emission direction of the laser light in order to condense the laser light from the surface light emitting unit onto the surface of the workpiece; a holding portion provided on the head portion and held by the processing machine in a state in which the head portion is attached to the processing machine, The PCSEL elements are arranged in a plane in a predetermined region, An additional processing head, wherein the center of the specified area and the holding portion are separated from each other when viewed along the emission direction of the laser light from the surface light-emitting portion.

3. The additional processing head according to claim 1 or 2, wherein the condenser lens is disposed opposite the surface light-emitting portion in an emission direction of the laser light from the surface light-emitting portion.

4. The additional processing head according to claim 3, wherein a distance between the surface light-emitting unit and the focusing lens in the emission direction of the laser light from the surface light-emitting unit is smaller than a distance between the focusing lens and a focal position of the laser light in the emission direction of the laser light from the surface light-emitting unit.

5. the PCSEL element includes an element body having an emission surface for emitting the laser light; The surface light emitting unit is a p-side electrode that is disposed around the PCSEL element when the emission surface is viewed in plan and is electrically connected to the PCSEL element; 3. The additional processing head according to claim 1, further comprising an n-side electrode that is arranged around the PCSEL element when the emission surface is viewed in a plane, that is laminated with the p-side electrode via an insulating layer, and that is electrically connected to the PCSEL element.

6. The PCSEL element further includes a surface electrode provided along a periphery of the emission surface; The additional processing head according to claim 5 , wherein the surface light-emitting portion further includes a plurality of wires provided on the n-side electrode at intervals from one another, each wire extending between the n-side electrode and the surface electrode.

7. The element body further has a back surface arranged on the back side of the light exit surface, The PCSEL element further includes a back electrode provided on the back surface, The additional processing head according to claim 5 , wherein the surface light emitting section further has a conductive layer to which the back electrode and the p-side electrode are joined.

8. The additional processing head according to claim 1 ; a tool spindle movable in the processing area for rotating the tool; Either the tool or the additional machining head is selectively attached to the tool spindle, The additional machining head is provided on the head portion and has a shank portion that is clamped by the tool spindle.

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