Tantalum carbide coating material

Abstract

To provide a tantalum carbide coating material in which problems including stress reduction, bending, exfoliation and the like of a tantalum carbide coating layer and a carbon substrate have been solved.SOLUTION: A tantalum carbide coating material of this invention comprises: a carbon substrate; and a tantalum carbide coating formed on the carbon substrate, wherein a thermal expansion coefficient difference between the carbon substrate and the tantalum carbide coating is 1.0×10-6 / °C or more.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a tantalum carbide coating material.

Background Art

[0002] In a high-temperature environment, a carbon material exposed to an atmosphere of a reducing gas such as nitrogen gas or ammonia gas is deteriorated or damaged by reaction with the reducing gas, and if it is not frequently replaced, there is a problem that the original function required of the carbon material cannot be fulfilled.

[0003] For example, when a product made of a carbon material is placed in a furnace, ammonia gas is introduced into the furnace, and the inside of the furnace is heated at about 1200 ° C while forming an ammonia atmosphere, the product made of the carbon material is consumed in a short time.

[0004] To solve such a problem of lifespan, a tantalum carbide complex in which tantalum carbide is coated on the surface of a carbon material is used. However, in order to reduce the stress between the carbon base material and tantalum carbide and prevent peeling of the coating layer, a carbon base material having a thermal expansion coefficient similar to that of tantalum carbide has been applied and used.

[0005] However, since the types of carbon base materials having a thermal expansion coefficient similar to that of tantalum carbide are limited, there is a problem in applying them to tantalum carbide coating materials. Further, even if a carbon base material having a thermal expansion coefficient similar to that of tantalum carbide is applied, problems such as stress generation and bending may occur.

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present invention is for solving the above-described problems, and an object of the present invention is to provide a tantalum carbide coating material in which problems such as stress reduction, bending, and peeling between the tantalum carbide coating layer and the carbon base material are solved.

[0007] However, the problems to be solved by the present invention are not limited to those mentioned above, and additional problems not mentioned will be clearly understood by those skilled in the art from the following description.

Means for Solving the Problems

[0008] The tantalum carbide coating material according to an embodiment of the present invention includes a carbon substrate and a tantalum carbide coating formed on the carbon substrate, and the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating is 1.0×10 -6 / °C or more.

[0009] According to one aspect, the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating can be 1.5×10 -6 / °C or more.

[0010] According to one aspect, the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating can be 2.0×10 -6 / °C or more.

[0011] According to one aspect, the coefficient of thermal expansion of the carbon substrate can be 4.0×10 -6 / °C to 6.0×10 -6 / °C.

[0012] According to one aspect, the coefficient of thermal expansion of the tantalum carbide coating can be 7.0×10 -6 / °C to 7.8×10 -6 / °C.

[0013] According to one aspect, the carbon substrate can Graphene include at least one selected from the group consisting of graphite and fullerene.

[0014] According to one aspect, the tantalum carbide coating can include cracks having a width of 0.1 μm to 1.5 μm.

[0015] According to one aspect, the bending of the tantalum carbide coating material can be 20 μm or less.

Advantages of the Invention

[0016] The tantalum carbide coating material according to the present invention has a difference in thermal expansion coefficient between the carbon substrate and the tantalum carbide coating, which causes fine defects (micro cracks) to occur in the tantalum carbide coating layer and the stress to decrease. As a result, peeling and bending occurring in the tantalum carbide coating material can be minimized.

Brief Description of the Drawings

[0017]

Figure 1

Figure 2

Embodiments for Carrying Out the Invention

[0018] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The same reference numerals presented in each drawing indicate the same members.

[0019] In the embodiments described below, various modifications can be made, and the scope of patent application rights shall not be restricted or limited by such embodiments. All modifications, equivalents, or alternatives thereto must be understood to be included within the scope of rights. The terms used in this specification are merely for the purpose of describing specific embodiments and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "including" or "having" indicate the existence of the features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and it should not be understood as precluding the possibility of the existence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0020] Also, when explaining with reference to the accompanying drawings, the same components are given the same reference numerals regardless of the reference signs in the drawings, and duplicate explanations thereof are omitted. When it is determined that a specific explanation of the related known technology in the description of the embodiment makes the gist of the embodiment unnecessarily ambiguous, the detailed explanation thereof is omitted.

[0021] Hereinafter, the tantalum carbide coating material of the present invention will be specifically described with reference to embodiments and drawings. However, the present invention is not limited to such embodiments and drawings.

[0022] The tantalum carbide coating material according to an embodiment of the present invention includes a carbon substrate and a tantalum carbide coating formed on the carbon substrate, and the difference between the thermal expansion coefficient of the carbon substrate and the thermal expansion coefficient of the tantalum carbide coating is 1.0×10 -6 / °C or more.

[0023] The tantalum carbide coating material according to the present invention can minimize peeling and bending occurring in the tantalum carbide coating material by reducing stress due to the generation of fine defects in the tantalum carbide coating layer caused by the difference in the coefficient of thermal expansion between the carbon substrate and the tantalum carbide coating.

[0024] According to one aspect, the tantalum carbide coating includes cracks having a width of 0.1 μm to 1.5 μm.

[0025] Generally, in order to protect the carbon substrate, tantalum carbide is coated on the carbon substrate for use. When a carbon substrate having a lower coefficient of thermal expansion than tantalum carbide is applied, cracks having a width of the order of microns are generated in the tantalum carbide coating layer.

[0026] The gap between the tantalum carbide coating layers due to the above cracks expands again at high temperatures, so that the process gas does not affect the life of the carbon substrate, and the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating is 1.0×10 -6 / °C or more. Rather, an effect of stress relief can be realized.

[0027] According to one aspect, the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating can be 1.5×10 -6 / °C or more.

[0028] When the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating is 1.5×10 -6 / °C or more, a tantalum carbide coating material with a bend of 15 μm or less can be realized.

[0029] According to one aspect, the difference between the coefficient of thermal expansion of the carbon substrate and the coefficient of thermal expansion of the tantalum carbide coating can be 2.0×10 -6 / °C or more.

[0030] When the difference between the thermal expansion coefficient of the carbon base material and the thermal expansion coefficient of the tantalum carbide coating is 2.0×10 -6 / °C or more, a tantalum carbide coating material with a bend of 20 μm or less can be realized.

[0031] According to one aspect, the thermal expansion coefficient of the carbon base material can be 4.0×10 -6 / °C to 6.0×10 -6 / °C.

[0032] According to one aspect, the thermal expansion coefficient of the tantalum carbide coating can be 7.0×10 -6 / °C to 7.8×10 -6 / °C.

[0033] That is, by applying a general carbon base material and a general tantalum carbide coating, it is possible to realize a tantalum carbide coating material with excellent life characteristics, excellent peeling characteristics, and minimized bending in a high-temperature gas process.

[0034] According to one aspect, the carbon base material may include Graphene at least one selected from the group consisting of graphite and fullerene.

[0035] According to one aspect, the bend of the tantalum carbide coating material may be 20 μm or less.

[0036] Due to the difference in thermal expansion coefficient, the tantalum carbide coating material of the present invention having microcracks expands again under high-temperature conditions, and the process gas does not cause deformation and damage to the carbon base material. At the same time, a tantalum carbide coating material with stress relieved can be realized.

[0037] Hereinafter, the present invention will be described in more detail by way of embodiments and comparative examples.

[0038] However, the following embodiments are illustrative of the present invention, and the content of the present invention is not limited to the following embodiments.

[0039] Embodiment Graphite substrates with thermal expansion coefficients of 4.15×10 -6 / °C, 5.09×10 -6 / °C and 6.0×10 -6 / °C were coated with tantalum carbide having a thermal expansion coefficient of 7.0×10 -6 / °C to 7.8×10 -6 / °C to produce tantalum carbide coating materials. (Hereinafter, these are respectively referred to as "Embodiment 1", "Embodiment 2" and "Embodiment 3".)

[0040] Comparative Example Graphite substrates with a thermal expansion coefficient of 7.8×10 -6 / °C were coated with tantalum carbide having a thermal expansion coefficient of 7.0×10 -6 / °C to 7.8×10 -6 / °C to produce tantalum carbide coating materials. (Hereinafter, this is referred to as "Comparative Example 1".)

[0041] The following Table 1 shows the thermal expansion coefficients of the tantalum carbide coating materials produced through the embodiments and comparative examples of the present invention. The thermal expansion coefficients are data measured from room temperature to 1000°C with a thermal expansion coefficient measuring machine (DIL 402C).

[0042]

Table 1

[0043] Graphite substrates with different thermal expansion coefficients were processed into a size of φ150×5t, and tantalum carbide coating was performed to compare the crack phenomenon and the degree of bending.

[0044] Figure 1 is an image for confirming the presence or absence of crack generation in the tantalum carbide coating materials produced through the embodiments and comparative examples of the present invention.

[0045] Referring to FIG. 1, it can be seen that in Embodiment 1, Embodiment 2, and Embodiment 3 where a graphite substrate with a lower coefficient of thermal expansion than tantalum carbide was applied, cracks with a micro-sized width occurred in the tantalum carbide coating layer. On the other hand, in Comparative Example 1 where a graphite substrate with a coefficient of thermal expansion similar to that of tantalum carbide was applied, it can be seen that no cracks occurred.

[0046] Table 2 below is a table showing the width of microcracks in tantalum carbide coating materials manufactured through the embodiments and comparative examples of the present invention.

[0047]

Table 2

[0048] FIG. 2 is a graph showing the bending tendency of each graphite material of the tantalum carbide coating materials manufactured through the embodiments and comparative examples of the present invention. Specifically, it is the value obtained by measuring the bending of the material coated with tantalum carbide using a CMM measuring machine (a measuring machine capable of measuring the dimensions of a three-dimensional shape, geometric deviations, and shape precision).

[0049] Referring to FIG. 2, it can be seen that the bending of the tantalum carbide coating materials in Embodiment 1 and Embodiment 2 where a graphite substrate with a low coefficient of thermal expansion was applied is also at a lower level than the bending of the tantalum carbide coating material in Comparative Example 1 where a graphite substrate with a similar coefficient of thermal expansion was applied. That is, even without applying a graphite substrate with a high coefficient of thermal expansion, a tantalum carbide coating material with low bending can be realized.

[0050] On the other hand, Graphite substrate in the case of the tantalum carbide coating material of Embodiment 3 where the difference between the coefficient of thermal expansion of -6 and the coefficient of thermal expansion of the above tantalum carbide coating is at the level of 1.0×10

[0051] As described above, although the embodiments have been described by way of limited embodiments and drawings, those of ordinary skill in the art can make various modifications and variations from the above-described substrates. For example, the described technology may be executed in an order different from the described method, and / or the described components may be combined or combined in a form different from the described method, or replaced by other components or equivalents, and appropriate results can still be achieved. Therefore, the scope of the present invention is not defined by being limited to the disclosed embodiments, but is defined by the claims and those equivalent to the claims, etc.

Claims

1. a carbon substrate, a tantalum carbide coating formed on the carbon substrate, and the thermal expansion coefficient of the carbon substrate is lower than that of the tantalum carbide coating, the difference between the thermal expansion coefficient of the carbon substrate and that of the tantalum carbide coating is more than 2.0×10−6 / °C, the tantalum carbide coating includes cracks, a tantalum carbide coating material, wherein the width of the crack is 1.5 μm or less.

2. the thermal expansion coefficient of the tantalum carbide coating is 7.0×10 －６ / °C to 7.8×10 －６ / °C, the tantalum carbide coating material according to claim 1.

3. the carbon substrate includes at least one selected from the group consisting of graphene, graphite, and fullerene, the tantalum carbide coating material according to claim 1.

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