Light source system, unit, and laser device

Abstract

Provided is a light source system with which an adjustment of the light axis between units can be performed easily.　This light source system includes a second unit for detecting a light axis and adjusting and / or monitoring a laser light, and a third unit for adjusting the light axis. The third unit is configured so as to be capable of being arranged on the light-incidence side of the second unit, and a control device controls the light axis adjustment of the third unit on the basis of the light axis detection result.

Description

Technical Field

[0001] The present disclosure relates to a light source system, a unit, and a laser device.

Background Art

[0002] Laser devices such as laser processing devices and inspection devices are used in various fields. The specifications of laser processing devices vary depending on the type of processing such as welding, cutting, drilling, and marking, and the material of the object to be processed. Also, the specifications of inspection devices vary depending on the type of inspection object. For this reason, conventional laser devices are made from scratch. Therefore, conventional laser devices usually do not have versatility.

[0003] Therefore, in order to solve the above problems, a laser device in which units constituting the system can be replaced has been proposed (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in conventional laser devices, since skilled techniques are required for adjusting the optical axis between units, it is difficult for the user side to adjust the optical axis between units.

[0006] An object of the present disclosure is to provide a light source system, a unit, and a laser device capable of easily adjusting the optical axis between units.

Means for Solving the Problems

[0007] In order to solve the above problems, a first disclosure is, A light source module comprising a plurality of recombinable units, a control device for controlling the light source module, and comprises, the plurality of units are, a first unit that oscillates laser light, a second unit that detects an optical axis and performs at least one of adjustment and monitoring of the laser light, and a third unit that performs optical axis adjustment including, the third unit is configured to be disposed on the light incident side of the second unit, The control device is a light source system that controls the optical axis adjustment of the third unit based on the detection result of the optical axis.

[0008] The second disclosure is a laser device including the light source system of the first disclosure.

[0010] The 3 disclosure is, a recombinable unit used for a light source module, a first mirror and a second mirror disposed opposite to each other, a third mirror and a fourth mirror disposed opposite to each other, a first driving unit and a second driving unit that rotatably support the first mirror and the second mirror respectively with a first axis parallel to the perpendicular line of the unit arrangement surface as a rotation axis, a third driving unit and a fourth driving unit that rotatably support the third mirror and the fourth mirror respectively with a second axis perpendicular to the first axis as a rotation axis and a unit comprising.

Brief Description of the Drawings

[0011]

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Embodiments for Carrying Out the Invention

[0012] Embodiments of the present disclosure will be described in the following order. In all the drawings of the following embodiments, the same or corresponding parts are denoted by the same reference numerals. 1 First Embodiment 1.1 Configuration of Laser Processing Apparatus 1.2 Method for Correcting Optical Axis 1.3 Operational Effects 2 Second Embodiment 2.1 Configuration of Laser Processing Apparatus 2.2 Operational Effects 3 Modified Example

[0013] <1 First Embodiment> [1.1 Configuration of Laser Processing Apparatus] FIG. 1 is a schematic diagram showing an example of the configuration of a laser processing apparatus 1 according to the first embodiment of the present disclosure. The laser processing apparatus 1 is capable of corresponding to various processing applications, and includes a light source module 20M, a control device 20N, and a device-side controller 3.

[0014] (Light Source System) FIG. 2 is a block diagram showing an example of the configuration of a light source system 2. The light source system 2 includes a light source module 20M and a control device 20N.

[0015] (Light Source Module) FIG. 3 is a block diagram showing an example of the configuration of a light source module 20M. The light source module 20M includes a plurality of functional units 21A1, 21A3, ···, 21A n and a plurality of optical axis adjustment units 21A2, 21A4, ···, 21A n-1 and a base 21D. Here, n is an odd number of 3 or more or 5 or more.

[0016] In the following description, when the functional units 21A1, 21A3, ···, 21A n and the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 are generically referred to without particular distinction, they are called unit 21A.

[0017] The plurality of units 21A are configured to be recombinable on the base 21D. In the plurality of units 21A, in the state of being arranged on the base 21D, the optical axes of adjacent units 21A are connected. The optical axis positions on the incident side, the optical axis positions on the emission side, and the optical axis heights of the plurality of units 21A are unified. Also, the arrangement positions of the plurality of units 21A on the base 21D may be defined in advance.

[0018] The plurality of units 21A are arranged in series such that the functional unit 21A n and the optical axis adjustment unit 21A n-1 alternate with each other. The functional unit 21A1 is arranged at one end of the arrangement, and the functional unit 21A n is arranged at the other end. On the incident side of each of the functional units 21A3, ···, 21A n excluding the functional unit 21A1, the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 are arranged.

[0019] The functional unit 21A1 is an example of the first unit, and the functional units 21A3, 21A5, ···, 21A n are examples of the second unit. The optical axis adjustment units 21A2, 21A4, ···, 21A n-1 are examples of the third unit.

[0020] (Functional unit) The functional unit 21A1 is configured to be arranged on the incident side of the optical axis adjustment unit 21A2. The functional unit 21A1 includes a laser oscillator that oscillates laser light of a specified wavelength irradiated onto the workpiece.

[0021] The functional units 21A3, 21A5, ···, 21An detects the optical axis and performs at least one of adjustment and monitoring of the laser light oscillated by the functional unit 21A1. The functional units 21A3, 21A5, ···, 21A n are respectively configured to be arranged on the light output side of the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 The optical components respectively included in the functional units 21A3, 21A5, ···, 21A n may be adjusted based on a predetermined reference axis.

[0022] The functional units 21A3, 21A5, ···, 21A n include a functional part 211 and a detection part 212. The functional part 211 is provided on the light output side of the functional units 21A3, 21A5, ···, 21A n The functional part 211 performs at least one of adjustment and monitoring of the laser light oscillated by the functional unit 21A1. The functional parts 211 of the respective functional units 21A3, 21A5, ···, 21A n may have different functions. The functional part 211 may include, for example, at least one of an amplifier, a power adjustment unit, a wavelength conversion unit, a shutter, a beam diameter change unit, a polarization state change unit, a branching unit, an optical axis height change unit, an optical axis direction change unit, and a laser profile monitoring unit, or may include any one of them. Thereby, the user side can freely select the functional units 21A3, 21A5, ···, 21A n as required and according to the specifications.

[0023] The amplifier amplifies and outputs the input laser light. The power adjustment unit adjusts and outputs the power of the input laser light. The shutter unit blocks the optical path of the input laser light. The beam diameter change unit changes and outputs the beam diameter of the input laser light. The beam diameter change unit is, for example, a beam expander.

[0024] The polarization state changing unit changes the polarization state using a polarization element. The branching unit branches and outputs the input laser beam. The optical axis height changing unit changes the optical axis height of the input laser beam. The optical axis direction changing unit changes the optical axis direction of the light source module 20M. For example, it changes the direction of the optical axis of the light source module 20M from the horizontal direction to the vertical direction, or from the vertical direction to the horizontal direction. The laser profile monitoring unit monitors the profile of the input laser beam and outputs it to the control device 20N.

[0025] The detection unit 212 is provided on the light incident side of the functional units 21A3, 21A5, ···, 21A n . The detection unit 212 detects the angle and shift amount of the optical axis and outputs the detection result to the control device 20N. The detection unit 212 includes a mirror 212A and a detection device 212B. The mirror 212A is, for example, a half mirror, which reflects a part of the laser beam incident on the functional unit 21A and makes it incident on the detection device 212B, and transmits the rest and makes it incident on the functional unit 211.

[0026] Based on the laser beam incident from the mirror 212A, the detection device 212B detects the angle and shift amount of the optical axis and outputs the detection result to the control device 20N.

[0027] As shown in FIG. 4, the detection device 212B includes a light receiving element 212C for position detection and a light receiving element 212D for angle detection. In FIG. 4, the illustration of the functional unit 211 is omitted. The light receiving element 212C for position detection detects the shift amount of the optical axis. The light receiving element 212D for angle detection detects the angle of the optical axis of the laser beam incident on the functional unit 21A. The light receiving element 212C and the light receiving element 212D are constituted by, for example, CMOS (Complementary Metal Oxide Semiconductor), CCD (Charge Coupled Device) or PSD (Position Sensitive Device), etc.

[0028] The functional unit 21A1 further includes a window (second window) 217B. The functional units 21A3, 21A5, ···, 21A n further include a window (first window) 217A and a window (second window) 217B. The window 217A is provided on the light incident side of the functional units 21A3, 21A5, ···, 21A n Laser light enters the functional units 21A3, 21A5, ···, 21A through the window 217A. The window 217B is provided on the light exit side of the functional units 21A3, 21A5, ···, 21A n Laser light exits from the functional units 21A3, 21A5, ···, 21A through the window 217B. n As described above, by the functional unit 21A1 including the window 217A, the functional unit 21A1 can have a dust-proof and airtight structure in which no dust enters inside. Also, by the functional units 21A3, 21A5, ···, 21A n including the window 217A and the window 217B, the functional units 21A3, 21A5, ···, 21A

[0029] can have a dust-proof and airtight structure in which no dust enters inside. Therefore, during the use or storage of the functional units 21A1, 21A3 ···, 21A n the adhesion of dust to the optical components inside the functional units 21A1, 21A3 ···, 21A n can be suppressed. Therefore, the maintenance time of the functional units 21A1, 21A3 ···, 21A n can be shortened. Also, the optical components inside the functional units 21A1, 21A3 ···, 21A n can have an extended service life. n Therefore, the maintenance time of the functional units 21A1, 21A3 ···, 21A n can be shortened. Also, the optical components inside the functional units 21A1, 21A3 ···, 21A

[0030] (Optical axis adjustment unit) The optical axis adjustment units 21A2, 21A4, ···, 21A n-1 are each configured to be disposed on the light incident side of the functional units 21A3, 21A5, ···, 21A n Laser light enters the functional units 21A3, 21A5, ···, 21A through the window 217A. The window 217B is provided on the light exit side of the functional units 21A3, 21A5, ···, 21A n-1Each of them performs optical axis adjustment based on the control of the control device 20N. That is, the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 corrects the deviation of the optical axis based on the control of the control device 20N. More specifically, it corrects the deviation of the angle (tilt amount) of the optical axis and the deviation of the position of the optical axis (shift amount). The optical axis adjustment units 21A2, 21A4, ···, 21A n-1 The optical components each of them has may be adjusted based on a predetermined reference axis.

[0031] As shown in FIG. 4, the optical axis adjustment unit 21A n-1 includes four optical axis adjustment parts 213, 214, 215, and 216. The optical axis adjustment part 213 includes a mirror 213A and a drive part 213B. The optical axis adjustment part 214 includes a mirror 214A and a drive part 214B. The optical axis adjustment part 215 includes a mirror 215A and a drive part 215B. The optical axis adjustment part 216 includes a mirror 216A and a drive part 216B.

[0032] The mirror 213A and the mirror 214A are arranged such that their reflecting surfaces face each other. The mirror 215A and the mirror 216A are arranged such that their reflecting surfaces face each other. The mirror 213A reflects the laser light incident on the optical axis adjustment unit 21A n-1 towards the mirror 214A. The mirror 214A reflects the incident laser light towards the mirror 215A. The mirror 215A reflects the incident laser light towards the mirror 216A. The mirror 216A reflects the incident laser light and emits it towards the functional unit 21A n The drive parts 213B, 214B, 215B, and 216B are, for example, uniaxial motors.

[0033] FIG. 5A is a perspective view for explaining an example of the movement of mirrors 213A, 214A, 215A, and 216A. Drive units 213B and 214B respectively support mirrors 213A and 214A so as to be rotatably driven about the α-axis (first axis) as a rotation axis. Drive units 215B and 216B respectively support mirrors 215A and 216A so as to be rotatably driven about the β-axis (second axis) as a rotation axis. The α-axis is an axis perpendicular to the placement surface 21S of the base 21D. The β-axis is an axis horizontal to the placement surface 21S of the base 21D. That is, the β-axis is an axis perpendicular to the α-axis.

[0034] In this specification, the direction orthogonal to both the perpendicular line of the placement surface 21S of the base 21D and the specified optical axis of the light source module 20M is referred to as the x-axis direction, the direction of the perpendicular line of the placement surface 21S of the base 21D is referred to as the y-axis direction, and the direction of the specified optical axis of the light source module 20M is referred to as the z-axis direction. Also, the angle of the optical axis in the xz plane (plane including the x-axis and the z-axis) with respect to the specified optical axis of the light source module 20M is called the angle θ x and the angle of the optical axis in the yz plane (plane including the y-axis and the z-axis) with respect to the specified optical axis of the light source module 20M is called the angle θ y Also, the shift amount in the x-axis direction with respect to the reference optical axis of the light source module 20M is called the shift amount S x and the shift amount in the y-axis direction with respect to the reference optical axis of the light source module 20M is called the shift amount S y Note that the position and specified angle of the specified optical axis of the light source module 20M are stored in advance in the storage units of the unit controllers 21C2, 21C4, ···, 21C of the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 respectively. n

[0035] FIG. 5B is a diagram for explaining a method of angle correction and position correction using the mirrors 213A, 214A, 215A, and 216A. Based on the detection result of the angle of the optical axis, the control device 20N rotates the mirror 214A about the α-axis as a rotation axis and rotates the mirror 215A about the β-axis as a rotation axis, thereby adjusting the angle θ x of the optical axis and the angle θ yThe position correction can be performed.

[0036] Based on the detection result of the position of the optical axis, the control device 20N rotates the opposing mirrors 213A and 214A in synchronization with each other about the α axis as the rotation axis, thereby shifting the optical axis by an amount S x In addition, the control device 20N rotates the opposing mirrors 215A, 215A in synchronization with each other about the β axis as a rotation axis based on the detection result of the position of the optical axis, thereby correcting the shift amount S of the optical axis. y can be corrected.

[0037] Optical axis adjustment units 21A2, 21A4, . . . , 21A n-1 The optical axis adjusting unit 21A further includes a window (first window) 218A and a window (second window) 218B. The window 218A is connected to the optical axis adjusting units 21A2, 21A4, . . . , 21A n-1 The optical axis adjustment units 21A2, 21A4, . . . , 21A n-1 The laser beam enters the window 218B. n-1 The optical axis adjustment units 21A2, 21A4, . . . , 21A n-1 As described above, the laser beam is emitted from the optical axis adjustment units 21A2, 21A4, . . . , 21A n-1 The functional units 21A3, 21A5, . . . , 21A n It is possible to obtain the same effect as when the window 217A and the window 217B are provided.

[0038] (base) The base 21D has an arrangement surface 21S for arranging the multiple units 21A. The base may have a plate shape. As shown in FIG. 8A, the arrangement surface 21S is provided with multiple areas 21R. The multiple units 21A are arranged in the multiple areas 21R, respectively. The shape and area of ​​each area 21R are standardized to correspond to the shape and footprint of the unit 21A.

[0039] (Control device) The control device 20N, based on the detection results of the optical axis detected by the functional units 21A3, 21A5, ···, 21A n Specifically, based on the detection results of the angle and shift amount of the optical axis, the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 are feedback-controlled to correct the deviation of the optical axis (specifically, the angle and shift amount of the optical axis).

[0040] As shown in FIG. 1, the control device 20N includes a plurality of devices 21B1, 21B3, ···, 21B for functional units n and a plurality of devices 21B2, 21B4, ···, 21B for optical axis adjustment units n-1 and a plurality of unit controllers 21C1, 21C2, ···, 21C n and a system controller 22.

[0041] As shown in FIG. 2, the functional block 20BK n is composed of the functional unit 21A n and the device 21B for the functional unit n and the unit controller 21C n . The optical axis adjustment block 20BK n-1 is composed of the optical axis adjustment unit 21A n-1 and the device 21B for the optical axis adjustment unit n-1 and the unit controller 21C n-1 . The recombination of the functional unit 21A n is performed in units of the functional block 20BK n . The recombination of the optical axis adjustment unit 21A n-1 is performed in units of the optical axis adjustment block 20BK n-1 .

[0042] In the following description, when the functional blocks 20BK1, 21BK3, ···, 21BK n and the optical axis adjustment blocks 20BK2, 20BK4, ···, 20BK n-1 are not particularly distinguished and are collectively referred to, they are called the block 20BK.

[0043] (Device for functional unit) Devices for functional units 21B1, 21B3, ···, 21B n are devices such as drivers for driving and controlling drive units etc. within functional units 21A1, 21A3, ···, 21A n Also, devices for functional units 21B1, 21B3, ···, 21B n may be equipped with devices such as thermostats for temperature control.

[0044] (Device for optical axis adjustment unit) Devices for optical axis adjustment units 21B2, 21B4, ···, 21B n-1 are devices such as drivers for driving and controlling drive units 213B, 214B, 215B, 216B etc. within optical axis adjustment units 21A2, 21A4, ···, 21A n-1

[0045] (Unit controller) Unit controllers 21C1, 21C3, ···, 21C n respectively control functional units 21A1, 21A3, ···, 21A via devices for functional units 21B1, 21B3, ···, 21B based on the commands of system controller 22. n n

[0046] Unit controllers 21C2, 21C4, ···, 21C n-1 respectively control optical axis adjustment units 21A2, 21A4, ···, 21A via devices for optical axis adjustment units 21B2, 21B4, ···, 21B based on the commands of system controller 22. n-1 n-1

[0047] Unit controllers 21C1, 21C2, ···, 21C n respectively have a storage unit (not shown). Unit controllers 21C1, 21C3, ···, 21C nEach memory unit stores information on the reference axes for adjusting the optical components of the functional units 21A1, 21A3, ···, 21A n In addition, the unit controllers 21C1, 21C3, ···, 21C n Each memory unit stores the adjustment values when adjusting the optical components based on the above reference axis information.

[0048] The unit controllers 21C2, 21C4, ···, 21C n-1 Each memory unit stores information on the reference axes for adjusting the optical components (specifically, mirrors 213A, 214A, 215A, 216A) of the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 In addition, the unit controllers 21C2, 21C4, ···, 21C n-1 Each memory unit stores the adjustment values when adjusting the optical components based on the above reference axis information.

[0049] The unit controllers 21C1, 21C3, ···, 21C n Based on the commands of the system controller 22 and the reference axis information stored in the memory unit, via the devices for functional units 21B1, 21B3, ···, 21B n adjust the optical components of the functional units 21A1, 21A3, ···, 21A n This eliminates the need for the user to care about the optical components inside the functional units 21A1, 21A3, ···, 21A n and makes it easier to handle the light source system 2.

[0050] The unit controllers 21C2, 21C4, ···, 21C n-1 Based on the commands of the system controller 22 and the reference axis information stored in the memory unit, via the devices for optical axis adjustment units 21B2, 21B4, ···, 21B n-1 adjust the optical axis adjustment units 21A2, 21A4, ···, 21A n-1Adjust the optical components (specifically, the optical axis adjustment units 213, 214, 215, 216) it has. As a result, it becomes unnecessary for the user to care for the optical components inside, and the handling of the light source system 2 becomes easier. Note that the above-described process of adjusting the optical components is performed, for example, when an instruction for optical axis correction is given by an operation unit (not shown). n-1 The system controller 22 is a higher-level controller of the unit controllers 21C1, 21C2, ···, 21C

[0051] (System controller) The system controller 22 exchanges commands and the like with the device-side controller 3 and outputs control signals to the unit controllers 21C1, 21C2, ···, 21C n . n The system controller 22 cooperatively controls a plurality of function blocks 20BK1, 20BK3, ···, 20BK

[0052] and the optical axis adjustment blocks 20B2, 20B4, ···, 20B n . For this reason, the system controller 22 can absorb the influence of the increase or decrease of the function blocks 20BK1, 20BK3, ···, 20BK n-1 and the optical axis adjustment blocks 20B2, 20B4, ···, 20B n . Since the control target of the device-side controller 3 is the system controller 22, it is possible to provide a command that does not make the device-side aware of the function blocks 20BK1, 20BK3, ···, 20BK n-1 and the optical axis adjustment blocks 20B2, 20B4, ···, 20B n . n-1 The device-side controller 3 exchanges commands and the like with the system controller 22 and, via the system controller 22, the function blocks 20BK1, 21BK3, ···, 21BK

[0053] (Device-side controller) and the optical axis adjustment blocks 20BK2, 20BK4, ···, 20BK n ​n-1 Control the following.

[0054] (Unit arrangement form) Figures 7A, 7B, and 7C are perspective views showing examples of the shape of unit 21A. Figures 8A and 8B are perspective views showing an example of the arrangement form of unit 21A. The shape and footprint of unit 21A are standardized. Also, the shape and area of area 21R of base 21D are standardized. As a result, the user can easily replace and expand unit 21A later.

[0055] The shape of unit 21A is cubic, and the shape of base 21D is rectangular. In this specification, the rectangular shape shall include the square shape. The footprint of unit 21A and the area of area 21R are of multiple types. Each of the multiple types of footprints corresponds to the area of multiple types of area 21R and is, for example, equal. In Figures 7A, 7B, 7C, 8A, and 8B, an example where the footprint of unit 21A and the area of area 21R are of three types is shown. Area 21R may have a grid layout. Here, the footprint of unit 21A means the exclusive area of unit 21A on the placement surface 21S of base 21D.

[0056] The bottom surface of unit 21A and area 21R each have a rectangular shape. The footprint of unit 21A is n times the reference area S (where n is an integer of 1 or more). Similarly, the area of area 21R of base 21D is n times the reference area S (where n is an integer of 1 or more). In the examples shown in Figures 7A, 7B, 7C, 8A, and 8B, the reference area S is a×b.

[0057] [1.2 Method for correcting optical axis] Hereinafter, with reference to Figure 6, an example of a method for correcting the optical axis of the light source system 2 will be described.

[0058] First, in step S11, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A n respectively detect the angle θ of the optical axis x , angle θ y and output it to the unit controllers 21C2, 21C4, ···, 21C n-1 .

[0059] Next, in step S12, the unit controllers 21C2, 21C4, ···, 21C n-1 respectively, based on the detection results of the angle θ of the optical axis x , control the optical axis adjustment unit devices 21B2, 21B4, ···, 21B n-1 via the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 to correct the angle θ of the optical axis x . After correction, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A n respectively detect the angle θ of the corrected optical axis x and output it to the unit controllers 21C2, 21C4, ···, 21C n-1 .

[0060] Next, in step S13, the unit controllers 21C2, 21C4, ···, 21C n-1 determine whether the angle θ of the corrected optical axis x falls within the allowable value. If it is determined in step S13 that the angle θ of the optical axis x falls within the allowable value, the process proceeds to step S14. On the other hand, if it is determined in step S13 that the angle θ of the optical axis x does not fall within the allowable value, the process returns to step S12.

[0061] Next, in step S14, the unit controllers 21C2, 21C4, ···, 21C n-1 respectively, based on the detection results of the angle θ of the optical axis y , control the optical axis adjustment unit devices 21B2, 21B4, ···, 21B n-1 via the optical axis adjustment units 21A2, 21A4, ···, 21An-1 controls the angle θ of the optical axis y and corrects it. After the correction, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A n respectively detect the angle θ of the corrected optical axis y and output it to the unit controllers 21C2, 21C4, ···, 21C n-1 .

[0062] Next, in step S15, the unit controllers 21C2, 21C4, ···, 21C n-1 judge whether the angle θ of the corrected optical axis y is within the allowable value. If it is determined in step S15 that the angle θ of the optical axis y is within the allowable value, the process proceeds to step S16. On the other hand, if it is determined in step S15 that the angle θ of the optical axis y is not within the allowable value, the process returns to step S14. Note that the processes in steps S12 to S15 are performed by feedback control.

[0063] Next, in step S16, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A n respectively detect the shift amount S of the optical axis x , the shift amount S y and output it to the unit controllers 21C2, 21C4, ···, 21C n-1 .

[0064] Next, in step S17, the unit controllers 21C2, 21C4, ···, 21C n-1 respectively control the optical axis adjustment unit devices 21B2, 21B4, ···, 21B x based on the detection results of the shift amount S of the optical axis n-1 to control the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 and correct the shift amount S of the optical axis x . After the correction, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A n respectively detect the corrected shift amount S of the optical axis xDetect and output to unit controllers 21C2, 21C4, ···, 21C n-1 Output to

[0065] Next, in step S18, unit controllers 21C2, 21C4, ···, 21C n-1 determine whether the shift amount S of the corrected optical axis x is within the allowable value. If it is determined in step S18 that the shift amount S of the optical axis x is within the allowable value, the process proceeds to step S19. On the other hand, if it is determined in step S18 that the shift amount S of the optical axis x is not within the allowable value, the process returns to step S17.

[0066] Next, in step S19, unit controllers 21C2, 21C4, ···, 21C n-1 control the optical axis adjustment units 21A2, 21A4, ···, 21A y through the devices 21B2, 21B4, ···, 21B for the optical axis adjustment unit based on the detection result of the shift amount S of the optical axis n-1 to correct the shift amount S of the optical axis n-1 After the correction, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A y each detect the shift amount S of the corrected optical axis n and output it to unit controllers 21C2, 21C4, ···, 21C y Output to n-1

[0067] Next, in step S20, unit controllers 21C2, 21C4, ···, 21C n-1 determine whether the shift amount S of the corrected optical axis y is within the allowable value. If it is determined in step S20 that the shift amount S of the optical axis y is within the allowable value, the process proceeds to step S21. On the other hand, if it is determined in step S20 that the shift amount S of the optical axis y ​If it is determined that the value does not fall within the allowable value, the process returns to step S19. Note that the processes in steps S17 to S20 are performed by feedback control. Next, the detection devices 212B of the functional units 21A3, 21A5, ···, 21A n each detect the shift amount S of the optical axis x again and output it to the unit controllers 21C2, 21C4, ···, 21C n-1 .

[0068] Next, in step S21, the unit controllers 21C2, 21C4, ···, 21C n-1 determine whether the shift amount S of the optical axis detected again x falls within the allowable value. If it is determined in step S21 that the shift amount S of the optical axis x falls within the allowable value, the optical axis correction process ends. On the other hand, if it is determined in step S21 that the shift amount S of the optical axis x does not fall within the allowable value, the process returns to step S17. Note that the reason for determining again whether the shift amount S x falls within the allowable value in step S21 is that the shift amount S y may deviate from the allowable value while correcting the shift amount S of the optical axis in step S19 x .

[0069] As described above, in the optical axis correction method of the light source system 2, with a simple configuration combining four mirrors 213A, 214A, 215A, and 216A, and after correcting the angles θ x , θ y of the optical axis, the shift amounts S x , S yIn the sequential operation control for correction, automatic optical axis alignment can be performed. Therefore, compared with the prior art, complex control such as global optimization is not required, and high-speed and high-precision optical axis alignment becomes possible. In addition, the control system required for system control is also simplified, and total cost compression is also possible. Further, since it has an inexpensive and small configuration combining four mirrors 213A, 214A, 215A, and 216A, it is also possible to incorporate a plurality of alignment mechanisms into the optical system, and effects such as improvement in the stability of the apparatus operation and improvement in manufacturability can be obtained.

[0070] [1.3 Operational Effects] In the laser processing apparatus 1 according to the first embodiment, the light source module 20M is configured to be recombinable with a plurality of units 21A. Therefore, the light source module 20M can be made compatible with various processing applications. Further, it is possible for the user side to easily switch and expand the functions of the light source module 20M. Also, the block 20BK can be recombined according to the type of laser processing (welding, cutting, drilling, marking, etc.) and the material of the object to be laser processed. Therefore, a laser processing apparatus 1 suitable for the type of laser processing and the material of the object to be laser processed can be constructed in a short time. Further, when the light source module 20M fails, it is only necessary to replace the unit 21A in which the failure has occurred, so the downtime during failure can be shortened. Also, inventory management and material procurement can be performed in units of the unit 21A.

[0071] The control device 20N detects the optical axis by the functional units 21A3, 21A5, ···, 21A n and, based on the detection result, feedback-controls the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 to automatically correct the optical axis. As a result, it becomes unnecessary to perform manual optical axis adjustment by an expert. Therefore, the user side can easily perform optical axis adjustment.

[0072] The optical axis adjustment units 21A2, 21A4, ···, 21A n-1The optical axis adjustment by [method] uses four mirrors, corrects the angle (tilt amount) of the optical axis with two mirrors, and corrects the position (shift amount) of the optical axis with the other two mirrors. Therefore, it is possible to correct the angle and position of the optical axis independently. Thus, a light source system 2 with a simple structure, small size, low cost, and high stability can be realized.

[0073] In the light source system 2, each functional unit is composed of a combination of a unit 21A, unit equipment 21B, and a unit controller 21C. A system controller 22 is provided as the upper controller of each unit controller 21C. Thereby, it is possible to easily cope with the increase or decrease of the unit 21A.

[0074] Also, the control of the unit 21A is performed by the unit controller 21C. Therefore, since the device - side controller 3 does not need to directly control each individual unit 21A, the control of the device - side controller 3 can be simplified.

[0075] In a conventional laser processing apparatus (see, for example, Patent Document 1), there is a problem that the degree of freedom in layout, function switching, and expansion are limited. On the other hand, in the laser processing apparatus 1 according to the first embodiment, since the footprint of the unit is standardized, the degree of freedom in layout is improved. Also, function switching and expansion are easy.

[0076] <2 Second Embodiment> [2.1 Configuration of Laser Processing Apparatus] The laser processing apparatus according to the second embodiment is different from the laser processing apparatus 1 according to the first embodiment in that it includes a light source module 120M shown in FIGS. 9A, 9B, and 10 instead of the light source module 20M shown in FIGS. 1, 8A, and 8B.

[0077] (Light Source Module) The light source module 120M has an air-cooled heat dissipation structure. The light source module 120M includes a plurality of units 121A1, 121A2, 121A3, 121A4, 121A5 and a base 122. In the following description, when the units 121A1, 121A2, 121A3, 121A4, 121A5 are collectively referred to without particular distinction, they are called unit 121A. Here, an example where there are five units 121A will be described, but the number of units 121A is not limited to this, and can be, for example, any number of three or more.

[0078] (Unit) The plurality of units 121A are configured to be recombinable on the base 122. The plurality of units 121A are configured to be arranged in a row. The unit 121A includes a unit body 121M, a thermal interface material (TIM) (not shown), and a heat sink 121N. Here, an example where all the units 121A include a heat sink 121N will be described, but some of the units 121A may be configured to include a heat sink 121N.

[0079] The unit bodies 121M of the units 121A1, 121A3, 121A5 each have the same configuration as the functional units 21A1, 21A3, 21A5 in the above-described embodiment. The unit bodies 121M of the units 121A2, 121A4 each have the same configuration as the optical axis adjustment units 21A2, 21A4 in the above-described embodiment.

[0080] The heat sink 121N is provided on the bottom surface of the unit body 121M. The bottom surface of the unit body 121M becomes the surface disposed on the base 122. The heat sink 121N absorbs the heat generated in the unit body 121M and dissipates the heat to the base 122.

[0081] The thermal interface material is provided between the unit body 121M and the heat sink 121N. The thermal interface material efficiently enhances the heat conduction from the unit body 121M to the heat sink 121N.

[0082] (Base) The base 122 has an arrangement surface 122S for arranging a plurality of units 121A. A plurality of holes 122C are provided in the arrangement surface 122S. The holes 122C are configured to be able to insert and remove the heat sink 122N of the unit 121A.

[0083] The base 122 includes a duct 122A and a plurality of fans 122B. Heat generated in the unit 121A is discharged through the heat sink 122N in the duct 122A. The duct 122A has a pair of opposing side wall portions 122SA, 122SB and a pair of opposing end portions 122EA, 122EB. The side wall portions 122SA, 122SB are long. An end portion 122EA is provided between one ends of the side wall portions 122SA, 122SB. An end portion 122EB is provided between the other ends of the side wall portions 122SA, 122SB. The direction from the end portion 122EA to the end portion 122EB is the arrangement direction (i.e., the optical axis direction) of the plurality of units 121A. The duct 122A is connected to a plurality of holes 122C provided in the arrangement surface 122S.

[0084] In a state where the heat sink 121N is inserted into the hole 122C, the heat sink 121N is accommodated in the duct 122A. The duct 122A may have a plurality of partition plates (not shown), and each partition plate spatially separates between adjacent heat sinks 122N in the duct 122A. The duct 122A has a plurality of openings 122D in the side wall portion 122SB. The openings 122D communicate the space inside the duct 122A with the outside.

[0085] A plurality of fans 122B are provided on the side wall portion 122SA of the duct 122A. The fan 122B discharges the heat discharged into the duct 122A through the heat sink 122N to the outside. The fan 122B faces the opening 122D. Since the fan 122B is provided in such a position, when the fan 122B is driven, air flows from the opening 122D toward the fan 122B (from one side wall portion 122SA to the other side wall portion 122SB). A heat sink 121N is located between the fan 122B and the opening 122D.

[0086] The base 122 may further include an elastic body 122E between the duct 122A and the fan 122B. In this case, it is possible to suppress the vibration of the light source module 120M caused by the driving of the fan 122B.

[0087] [2.2 Operational Effects] In the laser processing apparatus according to the second embodiment, the heat generated in each unit 121A is released into the duct 122A of the base 122 by the heat sink 122N. The heat released into the duct 122A is discharged to the outside by the fan 122B. Therefore, the heat generated in the plurality of units 121A can be efficiently discharged to the outside.

[0088] [3. Modifications] [Modification 1] In the second embodiment, an example in which a plurality of fans 122B and a plurality of openings 122D are provided on the side wall portion 122SA and the side wall portion 122SB, respectively, has been described. However, the number of the fans 122B and the openings 122D and the positions where they are provided are not limited to this example. For example, as shown in FIG. 11, the fan 122B and the opening 122D may be provided at the end portions 122EA and 122EB, respectively. In this case, when the fan 122B is driven, air flows from one end portion 122EA toward the other end portion 122EB.

[0089] [Modification 2] In the second embodiment, although the example in which the duct 122A has a plurality of openings 122D in the side wall portion 122SB has been described, the duct 122A may be provided with a plurality of fans for drawing air into the duct instead of the plurality of openings 122D.

[0090] (Modification 3) As shown in FIGS. 12A and 13A, the light source module 20M may have a plurality of positioning mechanism portions. The positioning mechanism portion is for positioning the unit 21A on the base 21D. In FIGS. 12A and 13A, an example of the positioning mechanism of the functional unit 21A1 is shown.

[0091] Each positioning mechanism portion is composed of pins 21P1, 21P2 and holes 21H1, 21H2. The pins 21P1, 21P2 are provided in respective areas 21R of the base 21D. The positioning pins 21P1, 21P2 project from the placement surface 21S of the base 21D. The holes 21H1, 21H2 are provided in the bottom surface of each unit 21A. By fitting or abutting the pins 21P1, 21P2 into the holes 21H1, 21H2, the unit 21A is positioned. Note that the pins 21P1, 21P2 may be provided in the bottom surface of each unit 21A and the holes 21H1, 21H2 may be provided in respective areas 21R. There may be a gap between the pin 21P1 and the hole 21H1 and between the pin 21P2 and the hole 21H2 so that the unit 21A can be easily detached and attached. A clearance fit is preferable for the tolerance between the pin 21P1 and the hole 21H1 and between the pin 21P2 and the hole 21H2.

[0092] Since the unit 21A and the base 21D are provided with the positioning mechanism as described above, the unit 21A can be fixed at a specified position on the base 21D by fitting or abutting the holes 21H1, 21H2 of each unit 21A to the pins 21P1, 21P2 of each area 21R. Therefore, rough adjustment of the optical axis between the units 21A can be performed.

[0093] In addition, the functional unit 21An is provided with an optical axis adjustment unit 21An-1 on the light incident side of the functional unit 21An, and the functional unit 21An is provided with a detection device 212B, so that the unit controller 21C n-1 can perform feedback control on the optical axis adjustment units 213 to 216 within the optical axis adjustment unit 21A n-1 based on the detection result of the detection device 212B. Therefore, fine adjustment of the optical axis between the units 21A can be performed.

[0094] By adjusting the optical axis between the units 21A in two stages of coarse adjustment and fine adjustment, the optical axis deviation between the units 21A that occurs when the unit 21A is arranged on the base 21D can be efficiently corrected. In addition, the work load of the user required for the adjustment of the light source module 20M can be reduced.

[0095] (Modification Example 4) As shown in FIGS. 12A, 12B, 12C, 13A, 13B, and 13C, the light source module 20M may have different positioning mechanism parts for each unit 21A (that is, for each area 21R). In FIGS. 12A, 12B, 12C, 13A, 13B, and 13C, examples of the positioning mechanisms of the functional unit 21A1, the optical axis adjustment unit 21A2, and the functional unit 21A3 are shown.

[0096] As shown in FIGS. 12A, 12B, and 12C, the hole 21H1 is provided at the same position on the bottom surface of the unit 21A regardless of the unit 21A. On the other hand, the hole 2121H2 is provided at different positions on the bottom surface for each unit 21A. The holes 21H1 and 21H2 are provided on a straight line parallel to the arrangement direction (optical axis direction) of the units 21A. The distance D between the holes 21H1 and 21H2 H is different for each unit 21A.

[0097] As shown in FIGS. 13A, 13B, and 13C, the pin 21P1 is provided at the same position in the area 21R regardless of the area 21R. On the other hand, the pin 21P2 is provided at different positions for each area 21R. The pins 21P1 and 21P2 are provided on a straight line parallel to the arrangement direction (optical axis direction) of the unit 21A. The distance D between the pin 21P1 and the pin 21P2 P is different for each area 21R.

[0098] By having the positioning mechanism portion with the above-described configuration, the light source module 20M can suppress the unit 21A from being erroneously arranged in the direction opposite to the specified direction. Further, it is possible to suppress the unit 21A from being arranged in the wrong area 21R.

[0099] Note that the light source module 20M may have different positioning mechanism portions for each of the functional units 21A1, 21A3, ···, 21A n and may have the same positioning mechanism portion regardless of the optical axis adjustment units 21A2, 21A4, ···, 21A n-1 . Further, the base 21D may be configured to be able to change the position of the pin 21P2, that is, the distance D between the pin 21P1 and the pin 21P2 P .

[0100] (Modification 5) In the first and second embodiments, the functional units 21A3, 21A5, ···, 21A n may be provided with the detection unit 220 shown in FIG. 14 instead of the detection unit 212 shown in FIG. 4. The detection unit 220 includes a mirror 221, a mirror 222, a lens 223, a light receiving element 224 for position detection, and a light receiving element 225 for angle detection.

[0101] The mirror 221 is, for example, a half mirror, and the functional unit 21A nPart of the incident laser light is reflected and made incident on mirror 222, and the rest is transmitted and made incident on functional unit 211. Mirror 222 is, for example, a half mirror, which reflects part of the incident laser light and makes it incident on light receiving element 225 via lens 223, and transmits the rest and makes it incident on light receiving element 224.

[0102] Lens 223 is for converting the angular component (angular information) into a position component (position information). Light receiving elements 224 and 225 are light receiving elements (image pickup elements) for images such as CMOS or CCD. By using such light receiving elements for images as light receiving elements 224 and 225, pulsed lasers can also be stably detected.

[0103] (Modification Example 6) In the first and second embodiments, an example in which a plurality of units 21A are configured to be arrayable in the horizontal direction (first direction) has been described, but the arrangement of the plurality of units 21A is not limited to this. For example, as shown in FIG. 15A, a plurality of units 21A include at least one unit 21A configured such that the arrangement direction of the units 21A can be changed from the horizontal direction (first direction) to the vertical direction (second direction). n-1 That is, a plurality of units 21A may be configured such that the arrangement can be changed from the horizontal direction (first direction) to the vertical direction (second direction) in the middle of the arrangement. In this case, unit 21A n-1 may include an optical component such as a mirror that bends the optical axis at a right angle from the horizontal direction to the vertical direction.

[0104] As shown in FIG. 15B, a plurality of units 21A may include at least one unit 21A configured such that the arrangement direction of the units 21A can be changed from the vertical direction (second direction) to the horizontal direction (first direction). n-1 That is, a plurality of units 21A may be configured such that the arrangement can be changed from the vertical direction (second direction) to the horizontal direction (first direction) in the middle of the arrangement. In this case, unit 21A n-1 may include an optical component such as a mirror that bends the optical axis at a right angle from the vertical direction to the horizontal direction.

[0105] Since the light source module 20M has the above-described configuration, the customizability of the layout of the unit 21A on the user side can be improved.

[0106] (Modification Example 7) The system controller 22 may determine whether a plurality of units 21A are correctly arranged (laid out), and if it is determined that the plurality of units 21A are not correctly arranged, the oscillation of the laser light may not be performed. A specific example of such a configuration will be described below.

[0107] The unit 21A has identification information (ID) unique to each unit 21A. The unit 21A has the unique identification information as a two-dimensional code or a barcode.

[0108] The laser processing apparatus 1 has a reader for reading the identification information. The system controller 22 has a storage unit. Information regarding the correct arrangement of the plurality of units 21A (hereinafter referred to as "correct arrangement information") is stored in this storage unit. There may be a plurality of types of correct arrangements. The correct arrangement information is, for example, a table in which the order of arrangement of the units 21A and the identification information of the units 21A are associated. The correct arrangement information may be a table or the like in which the position information of the unit 21A on the placement surface 21S of the base 21D and the identification information of the unit 21A are associated.

[0109] The user reads the identification information of a plurality of units 21A in the order of the array by the reader (specifically, in the order in which the laser light oscillated by the functional unit 21A1 passes). The system controller 22 collates the identification information read in the order of the array with the correct array information stored in the storage unit in advance. When it is determined as a result of the collation that the arrangement of the units 21A is correct, the system controller 22 controls the light source module 20M so that the laser light can be oscillated. On the other hand, when it is determined as a result of the collation that the arrangement of the units 21A is incorrect, the system controller 22 controls the light source module 20M so that the laser light cannot be oscillated.

[0110] A sensor (for example, a proximity sensor or the like) may be provided in the area 21R of the base 21D. In this case, the system controller 22 can determine the presence or absence of the unit 21A on the area 21R by detecting the ON / OFF of the sensor.

[0111] (Modification Example 8) In the first and second embodiments, an example in which the light source system 2 is applied to the laser processing apparatus 1 has been described, but the light source system 2 may be applied to an inspection apparatus. Note that the laser processing apparatus 1 and the inspection apparatus are specific examples of a laser apparatus.

[0112] As described above, the first and second embodiments of the present disclosure and their modification examples have been specifically described, but the present disclosure is not limited to the above-described first and second embodiments and their modification examples, and various modifications based on the technical idea of the present disclosure are possible.

[0113] For example, the configurations, methods, processes, shapes, materials, numerical values, etc. exemplified in the above-described first and second embodiments and their modification examples are merely examples, and different configurations, methods, processes, shapes, materials, numerical values, etc. may be used as necessary.

[0114] In addition, the configurations, methods, steps, shapes, materials, numerical values, etc. of the above-described first and second embodiments and their modifications can be combined with each other as long as they do not depart from the gist of the present disclosure.

[0115] The present disclosure can also adopt the following configurations. (1) A light source module including a plurality of recombinable units, a control device for controlling the light source module, and wherein the plurality of units include a first unit that oscillates laser light, a second unit that detects an optical axis and performs at least one of adjustment and monitoring of the laser light, and a third unit that performs optical axis adjustment, wherein the third unit is configured to be disposed on the light incident side of the second unit, and the control device controls the optical axis adjustment of the third unit based on the detection result of the optical axis. A light source system. (2) The light source module further includes a base, the base has a plurality of areas where the plurality of units are respectively disposed, the footprints of the units are of multiple types, the areas of the areas are of multiple types, and the multiple types of footprints respectively correspond to the multiple types of areas of the areas. The light source system according to (1). (3) The bottom surface of the unit and the area each have a rectangular shape, and each of the multiple types of footprints is n times the reference area (where n is an integer of 1 or more). The light source system according to (2). (4) The optical axis positions on the light incident side, the optical axis positions on the light emitting side, and the optical axis heights of the plurality of units are unified. The light source system according to any one of (1) to (3). (5) The light source module further includes a base, The light source module has a plurality of positioning mechanism parts, Each of the plurality of positioning mechanism parts determines the positions of the plurality of units on the base in the light source system according to (1). (6) The second unit includes at least one of an amplifier, a power adjustment unit, a wavelength conversion unit, a shutter, a beam diameter change unit, a deflection state change unit, a branching unit, an optical axis height change unit, an optical axis direction change unit, and a laser profile monitoring unit in the light source system according to any one of (1) to (5). (7) The light source system according to any one of (1) to (6) further includes a higher-level control device for controlling the control device. (8) The control device cooperatively controls the plurality of units via the control device in the light source system according to (7). (9) The unit includes optical components, The optical components are adjusted based on a predetermined reference axis in the light source system according to any one of (1) to (8). (10) The second unit and the third unit, A first window provided on the light incident side, And a second window provided on the light exit side In the light source system according to any one of (1) to (9). (11) The third unit, A first mirror and a second mirror arranged opposite to each other, A third mirror and a fourth mirror arranged opposite to each other, A first driving part and a second driving part that rotatably support the first mirror and the second mirror respectively with a first axis parallel to the perpendicular line of the arrangement surface of the unit as the rotation axis, A third driving unit and a fourth driving unit that rotatably support the third mirror and the fourth mirror respectively with a second axis perpendicular to the first axis as a rotation axis, and The light source system according to any one of (1) to (10), comprising: (12) The second unit detects the angle of the optical axis and the shift amount of the optical axis, The control device, Based on the detection result of the angle of the optical axis, controls the second driving unit and the third driving unit, rotates the second mirror and the third mirror, Based on the detection result of the position of the optical axis, controls the first driving unit and the second driving unit, rotates the first mirror and the second mirror synchronously, and controls the third driving unit and the fourth driving unit, rotates the third mirror and the fourth mirror synchronously. The light source system according to (11). (13) The second unit, A first light receiving element for detecting the angle of the optical axis, A second light receiving element for detecting the position of the optical axis, and Comprising, The control device controls the third unit based on the outputs of the first light receiving element and the second light receiving element. The light source system according to any one of (1) to (12). (14) The plurality of units are configured to be able to change the array direction from the horizontal direction to the vertical direction, or from the vertical direction to the horizontal direction. The light source system according to any one of (1) to (13). (15) The control device determines whether the arrangement of the plurality of units is correct, and if the arrangement is incorrect, does not oscillate the laser light. The light source system according to any one of (1) to (15). (16) The control of the optical axis adjustment is feedback control. The light source system according to any one of (1) to (15). (17) The light source module further includes a base, The unit further includes a heat sink, The base, a duct through which heat is released from the heat sink, and a fan for exhausting the duct The light source system according to any one of (1) to (16). (18) A laser device including the light source system according to any one of (1) to (17). (19) A recombinable unit used in a light source module, a detection unit for detecting an optical axis, and a functional unit for adjusting or monitoring laser light The unit comprising. (20) A recombinable unit used in a light source module, a first mirror and a second mirror arranged opposite to each other, a third mirror and a fourth mirror arranged opposite to each other, a first drive unit and a second drive unit that rotatably support the first mirror and the second mirror respectively with a first axis parallel to the perpendicular line of the arrangement surface of the unit as a rotation axis, a third drive unit and a fourth drive unit that rotatably support the third mirror and the fourth mirror respectively with a second axis perpendicular to the first axis as a rotation axis The unit comprising.

Explanation of Signs

[0116] 1 Laser processing apparatus 2 Light source system 3 Apparatus side controller 20BK1, 21BK3, ···, 21BK n Functional block 20BK2, 20BK4, ···, 20BK n-1 Optical axis adjustment block 20M Light source module 20N Control equipment 21A1, 21A3, ···, 21A n Functional unit 21A2, 21A4, ···, 21A n-1 Optical axis adjustment unit 21B1, 21B3, ···, 21B n Equipment for functional unit 21B2, 21B4, ···, 21B n-1 Equipment for optical axis adjustment unit 21C1, 21C2, ···, 21C Unit controller 21D Base 21R Area 21P1, 21P2 Pins 21H1, 21H2 Holes 22 System controller 120M Light source module 121A1, 121A2, 121A3, 121A4, 121A5 Units 121M Unit body 121N Heat sink 122 Base 122A Duct 122B Fan 122C Hole part 122D Opening 122E Elastic body 211 Functional part 212 Detection part 212A Mirror 212B Detection device 212C Light receiving element for position detection 212D Light receiving element for angle detection 213, 214, 215, 216 Optical axis adjustment parts 213A, 214A, 215A, 216A Mirrors 213B, 214B, 215B, 216B, 217B Driving parts 217A, 218A Windows (first window) 217B, 218B Windows (second window) 220 Detection part 221, 222 Mirrors 223 Lens 224 Light receiving element for position detection Light receiving element for 225-degree detection

Claims

1. A light source module including a plurality of recombinable units, a control device for controlling the light source module, wherein the plurality of units include: a first unit that oscillates laser light, a second unit that detects an optical axis and performs at least one of adjusting and monitoring the laser light, and a third unit that performs optical axis adjustment, wherein the third unit is configured to be disposed on an incident light side of the second unit, and the control device controls the optical axis adjustment of the third unit based on a detection result of the optical axis. A light source system.

2. The light source module further includes a base, wherein the base has a plurality of areas where the plurality of units are respectively disposed, wherein there are a plurality of types of footprints of the units, wherein there are a plurality of types of areas of the areas, and the plurality of types of footprints respectively correspond to the plurality of types of areas of the areas. The light source system according to claim 1.

3. The bottom surface of the unit and the area each have a rectangular shape, and each of the plurality of types of footprints is n times a reference area (where n is an integer of 1 or more). The light source system according to claim 2.

4. The optical axis positions on the incident light side, the optical axis positions on the outgoing light side, and the optical axis heights of the plurality of units are unified. The light source system according to claim 1.

5. The light source module further includes a base, wherein the light source module has a plurality of positioning mechanism parts, and each of the plurality of positioning mechanism parts determines the positions of the plurality of units on the base. The light source system according to claim 1.

6. The second unit includes at least one of an amplifier, a power adjuster, a wavelength converter, a shutter, a beam diameter changer, a deflection state changer, a branching part, an optical axis height changer, an optical axis direction changer, and a laser profile monitor. The light source system according to claim 1.

7. The light source system according to claim 1 further includes a higher-level control device for controlling the control device.

8. The control device cooperatively controls the plurality of units via the control device. The light source system according to claim 7.

9. The unit includes optical components, and the optical components are adjusted based on a predetermined reference axis. The light source system according to claim 1.

10. The second unit and the third unit, ​ ​ a first window provided on the light incident side, a second window provided on the light emission side, The light source system according to claim 1, comprising:

11. The third unit includes: a first mirror and a second mirror arranged opposite to each other; a third mirror and a fourth mirror arranged opposite to each other; a first driving unit and a second driving unit that rotatably support the first mirror and the second mirror respectively with a first axis parallel to the perpendicular line of the arrangement surface of the unit as the rotation axis; a third driving unit and a fourth driving unit that rotatably support the third mirror and the fourth mirror respectively with a second axis perpendicular to the first axis as the rotation axis; The light source system according to claim 1, comprising:

12. The second unit detects the angle of the optical axis and the shift amount of the optical axis. The control device: Based on the detection result of the angle of the optical axis, controls the second driving unit and the third driving unit to rotate the second mirror and the third mirror. Based on the detection result of the position of the optical axis, controls the first driving unit and the second driving unit to synchronously rotate the first mirror and the second mirror, and controls the third driving unit and the fourth driving unit to synchronously rotate the third mirror and the fourth mirror. The light source system according to claim 11.

13. The second unit includes: a first light receiving element for detecting the angle of the optical axis; a second light receiving element for detecting the position of the optical axis; The light source system according to claim 1, comprising: The control device controls the third unit based on the outputs of the first light receiving element and the second light receiving element.

14. The plurality of units are configured to be able to change the arrangement direction from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction. The light source system according to claim 1.

15. The control device determines whether the arrangement of the plurality of units is correct. If the arrangement is incorrect, the control device does not oscillate the laser light. The light source system according to claim 1.

16. The control of the optical axis adjustment is feedback control. The light source system according to claim 1.

17. The light source module further includes a base. The unit further includes a heat sink. The base includes: a duct through which heat is released from the heat sink; a fan for exhausting the duct. The light source system according to claim 1, comprising:

18. A laser device comprising the light source system according to claim 1.

19. A recombinable unit used in a light source module, a first mirror and a second mirror arranged opposite to each other, a third mirror and a fourth mirror arranged opposite to each other, a first driving part and a second driving part that rotatably support the first mirror and the second mirror respectively with a first axis parallel to the perpendicular line of the arrangement surface of the unit as a rotation axis, a third driving part and a fourth driving part that rotatably support the third mirror and the fourth mirror respectively with a second axis perpendicular to the first axis as a rotation axis and a unit comprising the same.

Images