Auxiliary device

Abstract

To provide an auxiliary device which is capable of automatically exchanging a cutting blade and which can be retrofit to a cutting device already delivered to a user.SOLUTION: An auxiliary device 2 to be connected to a cutting device includes, at least: cutting blade storage means 4 for storing a plurality of cutting blades 36; carrying in / out means 6 for carrying in and carrying out a cutting blade 36 from the cutting blade storage means 4; Y-axis direction positioning means 8 for positioning the carrying in / out means 6 at an action position and a retreat position in the Y-axis direction relative to the cutting blade storage means 4; Z-axis movement means 10 for moving the carrying in / out means 6 in the Z-axis direction; and X-axis movement means 12 that moves the carrying in / out means 6 in the X-axis direction and acts on a cutting blade 36 installed on a spindle of the cutting means of the cutting device.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an auxiliary device connected to a cutting device.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are formed on the surface and partitioned by a planned division line is divided into individual device chips by a cutting device, and each of the divided device chips is used in an electric device such as a mobile phone or a personal computer.

[0003] The cutting device includes a chuck table having a holding surface for holding a wafer, a cutting means in which a cutting blade for cutting the wafer held on the chuck table is attached with a fixing nut, an X-axis feeding means for machining and feeding the chuck table in the X-axis direction, a Y-axis feeding means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and a Z-axis feeding means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The holding surface is defined in the X-axis direction and the Y-axis direction, and the wafer can be divided into individual device chips with high precision.

[0004] In addition, the applicant has proposed an automatic exchange device that can automatically exchange the cutting blade attached to the cutting means (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, there is a problem that it is difficult to attach an automatic exchange device to a cutting device that has already been delivered to a user.

[0007] In view of the above facts, an object of the present invention is to provide an auxiliary device capable of automatically replacing a cutting blade and being retrofitted to a cutting device already delivered to a user.

Means for Solving the Problem

[0008] According to the present invention, the following auxiliary device for solving the above problems is provided. That is, a chuck table having a holding surface for holding a workpiece, cutting means for cutting the workpiece held on the chuck table with a cutting blade attached by a fixing nut, X-axis feed means for machining and feeding the chuck table in the X-axis direction, Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The holding surface is an auxiliary device connected to a cutting device defined in the X-axis direction and the Y-axis direction, and includes cutting blade storage means for storing a plurality of cutting blades, loading / unloading means for loading and unloading a cutting blade from the cutting blade storage means, Y-axis positioning means for positioning the loading / unloading means at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means, Z-axis moving means for moving the loading / unloading means in the Z-axis direction, and X-axis moving means for moving the loading / unloading means in the X-axis direction to align the X-axis position of the cutting blade attached to the spindle of the cutting means with the X-axis position of the cutting blade From the cutting blade storage means unloaded by the loading / unloading means. , position the cutting blade carried out from the cutting blade storage means by the loading / unloading means at a position where it can be exchanged with the cutting blade mounted on the spindle of the cutting means An auxiliary device is provided which includes at least the above, and the loading / unloading means includes at least a Z-rotation axis extending in the Z-axis direction, a blade holding portion radially connected to the Z-rotation axis for sucking and holding a cutting blade, and a fixing nut holding portion for screwing and unscrewing the fixing nut onto and from a male screw formed at the tip of the spindle. The auxiliary device is provided with two blade holding portions for one fixing nut holding portion.

[0009] Preferably, the cutting blade storage means includes a driving gear having a rotation axis extending in the Y-axis direction, a driven gear spaced apart from the driving gear in the Z-axis direction and having a rotation axis extending in the Y-axis direction, an endless track wound around the driving gear and the driven gear, and a support shaft extending in the Y-axis direction that is disposed at a predetermined interval on the endless track and inserted into the central opening of the cutting blade to support the cutting blade. It is preferable that the distance between the driving gear and the driven gear in the Z-axis direction can be adjusted and the length of the endless track can also be adjusted. 。 The The loading / unloading means is disposed on the frame body, and the frame body is slidably supported by a guide rail extending in the Y-axis direction disposed on the lifting table, and is preferably positioned at the working position and the retracted position in the Y-axis direction with respect to the cutting blade storage means by the Y-axis positioning means. The loading / unloading means is disposed on a first moving body disposed inside the frame body, and the first moving body is slidably supported in a suspended state by a first guide rail extending in the X-axis direction disposed below a second moving body. The second moving body is slidably supported in a suspended state by a second guide rail extending in the X-axis direction disposed on the ceiling portion of the frame body. The loading / unloading means is preferably configured to be able to freely move in and out in the X-axis direction by the first moving body and the second moving body. A dressing board storage portion for storing a dressing board for dressing the cutting blade is disposed at the bottom of the frame body, and it is preferable that holding means for holding the dressing board stored in the dressing board storage portion is disposed on the first moving body. An end face correction jig storage portion for storing an end face correction jig for aligning the outer peripheral end face of a mount flange formed at the tip of the spindle of the cutting means and supporting the back of the cutting blade is disposed at the bottom of the frame body, and it is convenient that the end face correction jig is held by the holding means disposed on the first moving body.

Advantages of the Invention

[0010] The auxiliary device of the present invention includes a chuck table having a holding surface for holding a workpiece, cutting means in which a cutting blade for cutting the workpiece held on the chuck table is attached with a fixing nut, X-axis feeding means for machining and feeding the chuck table in the X-axis direction, Y-axis feeding means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and Z-axis feeding means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The holding surface is an auxiliary device connected to a cutting device defined in the X-axis direction and the Y-axis direction, and includes cutting blade storage means for storing a plurality of cutting blades, loading / unloading means for loading and unloading a cutting blade from the cutting blade storage means, Y-axis positioning means for positioning the loading / unloading means at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means, Z-axis moving means for moving the loading / unloading means in the Z-axis direction, and X-axis moving means for moving the loading / unloading means in the X-axis direction to align the X-axis position of the cutting blade mounted on the spindle of the cutting means with the X-axis position of the cutting blade unloaded by the loading / unloading means. From the cutting blade storage means and at least includes X-axis moving means for aligning the X-axis position of the cutting blade mounted on the spindle of the cutting means with the X-axis position of the cutting blade unloaded by the loading / unloading means. , position the cutting blade carried out from the cutting blade storage means by the loading / unloading means at a position where it can be exchanged with the cutting blade mounted on the spindle of the cutting means The loading / unloading means includes at least a Z-rotation axis extending in the Z-axis direction, a blade holding portion radially connected to the Z-rotation axis for sucking and holding a cutting blade, and a fixing nut holding portion for screwing and unscrewing the fixing nut onto and from a male screw formed at the tip of the spindle. Since there are two blade holding portions for one fixing nut holding portion, it can be retrofitted to a cutting device that has already been delivered to the user.

Brief Description of the Drawings

[0011]

Figure 1

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Embodiments for Carrying Out the Invention

[0012] Hereinafter, a preferred embodiment of the auxiliary device configured according to the present invention will be described with reference to the drawings.

[0013] Referring to FIG. 1, an auxiliary device indicated as a whole by reference numeral 2 includes a cutting blade storage means 4 for storing a plurality of cutting blades, a loading / unloading means 6 for loading and unloading the cutting blades from and to the cutting blade storage means 4, a Y-axis positioning means 8 for positioning the loading / unloading means 6 at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means 4, a Z-axis moving means 10 for moving the loading / unloading means 6 in the Z-axis direction, and an X-axis moving means 12 for moving the loading / unloading means 6 in the X-axis direction to act on a cutting blade mounted on a spindle of a cutting means of a cutting device. The X-axis direction is the direction indicated by arrow X in FIG. 1, the Y-axis direction is the direction indicated by arrow Y in FIG. 1 and is perpendicular to the X-axis direction, and the Z-axis direction is the vertical direction indicated by arrow Z in FIG. 1 and is perpendicular to the X-axis direction and the Y-axis direction. Also, the plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

[0014] As shown in FIG. 2, the cutting blade storage means 4 includes a driving gear 16 having a rotating shaft 14 extending in the Y-axis direction, a driven gear 20 having a rotating shaft 18 spaced apart from the driving gear 16 in the Z-axis direction and extending in the Y-axis direction, an endless track 22 wound around the driving gear 16 and the driven gear 20, and a support shaft 24 extending in the Y-axis direction which is disposed at a predetermined interval on the endless track 22 and inserted into a central opening of the cutting blade to support the cutting blade.

[0015] Referring to FIGS. 1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a base plate 26 (see FIG. 1), a support wall 28 extending upward from the upper surface of the base plate 26, and a motor 30 fixed to one side of the support wall 28. As shown in FIG. 2, a rotating shaft 14 of the driving gear 16 is connected to the motor 30, and the motor 30 is configured to rotate the driving gear 16 about the Y-axis direction.

[0016] As shown in Fig. 2, the driven gear 20 is disposed above the driving gear 16, and the rotation axis 18 of the driven gear 20 is supported by a support wall 28 so as to be rotatable about the Y-axis direction and vertically movable in the Z-axis direction. The support wall 28 is provided with lifting means (not shown) for lifting the driven gear 20 in the Z-axis direction. The lifting means may have a configuration including a ball screw connected to the rotation axis 18 of the driven gear 20 and extending in the Z-axis direction, and a motor for rotating this ball screw.

[0017] The endless track 22 is composed of a number of link pieces (reference signs omitted) connected to each other, and is wound around the driving gear 16 and the driven gear 20. The endless track 22 is adapted to rotate as the driving gear 16 rotates by the motor 30.

[0018] In the cutting blade storage means 4 of the illustrated embodiment, by changing the position of the driven gear 20 in the Z-axis direction by the lifting means, the interval between the driving gear 16 and the driven gear 20 in the Z-axis direction can be adjusted. Further, in the cutting blade storage means 4, the length of the endless track 22 can also be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

[0019] As shown in Fig. 2, a plurality of support shafts 24 are arranged on the endless track 22 at a predetermined interval. Also, as can be understood by referring to Fig. 3 together with Fig. 2, the support shaft 24 has a columnar base portion 32 connected to the endless track 22 and a columnar shaft portion 34 extending in the Y-axis direction from the end face of the base portion 32. The diameter of the shaft portion 34 is smaller than the diameter of the base portion 32.

[0020] Figure 3 also shows a cutting blade 36 supported by a support shaft 24. The cutting blade 36 has an annular base 38 and an annular cutting edge 40 fixed to the outer peripheral portion of the base 38. The base 38 can be formed from an appropriate metal material such as an aluminum alloy. A circular central opening 38a is provided in the central portion of the base 38. The cutting edge 40 is formed to a predetermined thickness (for example, about 10 to 30 μm) from abrasive grains such as diamond and a binder such as metal or resin, and projects radially outward from the outer peripheral edge of the base 38.

[0021] In the support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the cutting blade 36, and a plurality (for example, five) of cutting blades 36 are supported by the shaft portion 34. In the illustrated embodiment, as can be understood by referring to FIG. 2, the cutting blades 36 are supported by half of the plurality of support shafts 24. Also, as shown in FIG. 3, a plurality of ball plungers 42 for preventing the cutting blade 36 supported by the shaft portion 34 from protruding are mounted at intervals in the circumferential direction on the tip side of the shaft portion 34.

[0022] As shown in FIG. 4, a flow path 32a is formed inside each base portion 32 of the support shaft 24, and a plurality of flow paths 22a communicating with one end portion of each flow path 32a are formed in the endless track 22. The other end portion of each flow path 32a opens at the end face of the base portion 32 radially outside the shaft portion 34 as shown in FIG. 2. Also, as shown in FIG. 2, an air nozzle 44 protruding in the Y-axis direction is provided on the support wall 28 below the drive gear 16, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the support shaft 24 located at the lowermost end in the track of the support shaft 24 accompanying the rotation of the endless track 22 faces the tip of the air nozzle 44.

[0023] When the cutting blade 36 located on the tip side of the shaft portion 34 is carried out, high-pressure air is supplied from the air nozzle 44 through the flow path 22a of the endless track 22 to the flow path 32a of the base portion 32 of the support shaft 24 located at the lowermost end, so that the cutting blade 36 left on the shaft portion 34 can be pushed out to the tip side of the shaft portion 34. However, the cutting blade 36 does not fall from the shaft portion 34 due to the action of the ball plunger 42.

[0024] The loading / unloading means 6 will be described with reference to FIG. 5. The loading / unloading means 6 includes at least a Z rotation shaft 46 extending in the Z-axis direction, a blade holding portion 48 radially connected to the Z rotation shaft 46 and sucking and holding the cutting blade 36, and a fixed nut holding portion 50 that screws and unscrews a fixed nut onto a male screw formed at the tip of the spindle of the cutting device.

[0025] As shown in FIG. 5, the loading / unloading means 6 of the illustrated embodiment further includes a casing 52. The casing 52 has a regular hexagonal top plate 54 and six rectangular plate-like side walls 56 hanging from the periphery of the top plate 54. The Z rotation shaft 46 projects from the upper surface of the top plate 54. Inside the casing 52, a motor (not shown) connected to the Z rotation shaft 46 is accommodated.

[0026] In the illustrated embodiment, among the six side walls 56 of the casing 52, the blade holding portions 48 are mounted on four side walls 56, and the fixed nut holding portions 50 are mounted on two side walls 56. The two fixed nut holding portions 50 are provided on a pair of opposing side walls 56. In this way, the loading / unloading means 6 includes two blade holding portions 48 for one fixed nut holding portion 50.

[0027] The blade holding portion 48 is formed in a cylindrical shape. On the end face 58 of the blade holding portion 48, a circular central opening 60 capable of receiving the shaft portion 34 of the support shaft 24 and the tip portion of the spindle of the cutting device, and a plurality of suction holes 62 arranged at equal intervals in the circumferential direction around the central opening 60 are provided. Each suction hole 62 is connected to a suction means (not shown).

[0028] In the blade holding part 48, in a state where the end face 58 of the blade holding part 48 contacts the base 38 of the cutting blade 36 stored in the cutting blade storage means 4, the cutting blade 36 is sucked and held by generating a suction force in each suction hole 62 by the suction means.

[0029] Continuing the description with reference to FIG. 5, the fixed nut holding part 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, an annular rotating body 66 rotatably accommodated inside the housing 64, and a motor (not shown) for rotating the rotating body 66.

[0030] The rotating body 66 is formed with a central opening 68 capable of receiving the tip of the spindle of the cutting device. On the end face 66a of the rotating body 66, a plurality of suction holes 70 and a plurality of pins 72 are alternately provided at intervals in the circumferential direction. Each suction hole 70 is connected to a suction means (not shown). The pin 72 is positioned at a position protruding from the end face 66a of the rotating body 66 by a spring (not shown) built in the rotating body 66 (the position shown in FIG. 5), and when pushed toward the inside of the rotating body 66, the spring contracts and the pin 72 is accommodated inside the rotating body 66. Further, the pin 72 is arranged corresponding to the position of the pin hole formed in the fixed nut.

[0031] In the fixed nut holding part 50, while generating a suction force in each suction hole 70 by the suction means to suck and hold the fixed nut, and with the pin 72 inserted into the pin hole formed in the fixed nut, the rotating body 66 is rotated by the motor so that the fixed nut for fixing the cutting blade 36 to the spindle of the cutting device can be screwed onto and unscrewed from the male screw formed at the tip of the spindle.

[0032] When removing (detaching) the fixed nut from the spindle, even if the position of the pin 72 of the fixed nut holding portion 50 is misaligned with the position of the pin hole of the fixed nut, the end face 66a of the rotating body 66 is positioned on the end face of the fixed nut attached to the spindle. After the pin 72 is accommodated inside the rotating body 66, when the motor is rotated by the rotating body 66, when the position of the pin 72 aligns with the position of the pin hole, the pin 72 is pushed out by the spring and the pin 72 is inserted into the pin hole.

[0033] As described above, the loading and unloading means 6 configured as such is disposed inside the frame body 74 as shown in FIG. 1 in the illustrated embodiment. The frame body 74 is movably supported in the Y-axis direction on the lifting table 76, and the lifting table 76 is movably supported in the Z-axis direction on the base stand 78.

[0034] Referring to FIG. 6 together with FIG. 1 for explanation, the frame body 74 includes a rectangular plate-shaped bottom portion 80, four columns 82 extending upward from the four corners of the upper surface of the bottom portion 80, and a plate-shaped ceiling portion 84 (see FIG. 1) fixed to the upper ends of the respective columns 82. On the lower surface of the bottom portion 80, a pair of guided members 86 having grooves 86a extending in the Y-axis direction are provided at intervals in the X-axis direction.

[0035] The lifting table 76 includes a rectangular plate-shaped top plate 88 and four columnar legs 90 extending downward from the four corners of the lower surface of the top plate 88. On the upper surface of the top plate 88, a pair of guide rails 92 extending in the Y-axis direction at intervals in the X-axis direction are provided, and the pair of guide rails 92 are slidably fitted into the grooves 86a of the pair of guided members 86 of the frame body 74.

[0036] Further, a Y-axis direction positioning means 8 is provided on the upper surface of the top plate 88 of the lifting table 76. The Y-axis direction positioning means 8 has a ball screw 94 extending in the Y-axis direction between the pair of guide rails 92 and a motor 96 for rotating the ball screw 94. The nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom portion 80 of the frame body 74.

[0037] In the Y-axis positioning means 8, the rotational motion of the motor 96 is converted into linear motion by the ball screw 94 and transmitted to the frame body 74, and the frame body 74 is moved in the Y-axis direction along the pair of guide rails 92. In this way, the frame body 74 provided with the loading and unloading means 6 is slidably supported by the guide rails 92 extending in the Y-axis direction provided on the lifting table 76, and is positioned at the working position and the retracted position in the Y-axis direction with respect to the cutting blade storage means 4 by the Y-axis positioning means 8.

[0038] The above working position is a position where the blade holding portion 48 of the loading and unloading means 6 approaches the cutting blade storage means 4, and is a position where the cutting blade 36 supported by the cutting blade storage means 4 can be sucked and held by the blade holding portion 48. Further, the above retracted position is a position where the blade holding portion 48 of the loading and unloading means 6 is separated from the cutting blade storage means 4 more than the above working position.

[0039] As shown in FIG. 6, the base pedestal 78 includes a frame 98 and a rectangular base plate 100 fixed to the upper part of the frame 98. Four circular holes 102 into which the leg portions 90 of the lifting table 76 are slidably inserted are formed at the four corners of the base plate 100. Further, a female screw 104 is formed at the central portion of the base plate 100.

[0040] Continuing the description with reference to FIG. 6, the Z-axis moving means 10 is connected to the lifting table 76 and the base pedestal 78. The Z-axis moving means 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is screwed into the female screw 104 of the base plate 100. The connecting plate 110 is fixed to the lower surface of the top plate 88 of the lifting table 76 by appropriate connecting means such as bolts (not shown).

[0041] In the Z-axis moving means 10, the rotational motion of the motor 108 is converted into linear motion by the ball screw 106, and the lifting table 76 is moved up and down with respect to the base pedestal 78, thereby moving the frame body 74 provided with the loading and unloading means 6 in the Z-axis direction.

[0042] Referring to FIG. 7, the loading and unloading means 6 is disposed on a first moving body 112 disposed inside the frame body 74. The first moving body 112 is slidably supported in a suspended state on a first guide rail 116 extending in the X-axis direction disposed below the second moving body 114. The second moving body 114 is slidably supported in a suspended state on a second guide rail 118 extending in the X-axis direction disposed on the ceiling portion 84 of the frame body 74.

[0043] The first moving body 112 has a rectangular plate-shaped main body 120. A circular hole 122 is formed in the central portion of the main body 120. The Z-rotation shaft 46 of the loading and unloading means 6 is inserted into the circular hole 122, and the Z-rotation shaft 46 is fixedly and non-rotatably attached to the main body 120. When the motor of the loading and unloading means 6 connected to the Z-rotation shaft 46 is driven, the casing 52 of the loading and unloading means 6 rotates with respect to the first moving body 112, and the blade holding portion 48 and the fixed nut holding portion 50 are positioned in an arbitrary orientation.

[0044] On the upper surface of the main body 120 of the first moving body 112, a pair of guide members 124 having grooves 124a extending in the X-axis direction are provided at intervals in the Y-axis direction, and a block 126 having through holes 126a extending in the X-axis direction is fixed.

[0045] The second moving body 114 has a rectangular plate-shaped main body 128, and a pair of first guide rails 116 are provided on the lower surface of the main body 128 at intervals in the Y-axis direction. The first guide rails 116 are slidably fitted into the grooves 124a of the pair of guide members 124 of the first moving body 112, and the first moving body 112 is slidably supported in a suspended state on the first guide rails 116 disposed on the second moving body 114.

[0046] Below the main body 128 of the second moving body 114, first X-axis moving means for moving the first moving body 112 in the X-axis direction with respect to the second moving body 114 is provided. The first X-axis moving means in the illustrated embodiment is composed of an air cylinder 130. The cylinder tube 130a of the air cylinder 130 is fixed to the lower surface of the main body 128 and extends in the X-axis direction between a pair of first guide rails 116. The tip of the piston rod 130b of the air cylinder 130 is fitted and connected to the through hole 126a of the block 126 of the first moving body 112.

[0047] The air cylinder 130 as the first X-axis moving means moves the first moving body 112 in the X-axis direction along the first guide rail 116 with respect to the second moving body 114 by advancing and retracting the piston rod 130b.

[0048] On the upper surface of the main body 128 of the second moving body 114, a pair of guided members 132 having grooves 132a extending in the X-axis direction are provided at intervals in the Y-axis direction, and a block 134 having a female screw 134a extending in the X-axis direction is fixed.

[0049] A pair of second guide rails 118 are provided at intervals in the Y-axis direction on the lower surface of the ceiling portion 84 of the frame body 74. The second guide rails 118 are slidably fitted into the grooves 132a of the pair of guided members 132 of the second moving body 114, and the second moving body 114 is The second guide rail 118 disposed on the ceiling portion 84 of the frame body 74 supported slidably in a suspended state.

[0050] Below the ceiling portion 84 of the frame body 74, second X-axis moving means 136 for moving the second moving body 114 in the X-axis direction with respect to the ceiling portion 84 is provided. The second X-axis moving means 136 in the illustrated embodiment has a ball screw 138 extending in the X-axis direction between a pair of second guide rails 118 and a motor 140 for rotating the ball screw 138. The ball screw 138 is screwed into the female screw 134a of the block 134 of the second moving body 114, and the motor 140 is fixed to the lower surface of the ceiling portion 84.

[0051] The second X-axis moving means 136 converts the rotational motion of the motor 140 into linear motion by means of a ball screw 138 and transmits it to the second moving body 114, moving the second moving body 114 in the X-axis direction along the second guide rail 118 with respect to the ceiling portion 84.

[0052] The X-axis moving means 12 of the illustrated embodiment includes an air cylinder 130 as the first X-axis moving means and a second X-axis moving means 136 having a ball screw 138 and a motor 140. In the illustrated embodiment, by moving the first moving body 112 with the air cylinder 130 as the first X-axis moving means, the loading and unloading means 6 can be quickly advanced in the X-axis direction, and by moving the second moving body 114 with the second X-axis moving means 136, the X-axis direction position of the loading and unloading means 6 can be easily finely adjusted. Thus, the loading and unloading means 6 is configured to be able to freely move in and out in the X-axis direction by the first moving body 112 and the second moving body 114.

[0053] Note that the auxiliary device 2 is not limited to the above-described form, and may further have a configuration as shown in FIGS. 8 and 9. In the configuration shown in FIGS. 8 and 9, a dressing board accommodating portion 144 (see FIG. 9) for accommodating a dressing board 142 for dressing the cutting blade 36 is provided at the bottom 80 of the frame body 74, and holding means 146 (see FIG. 8) for holding the dressing board 142 accommodated in the dressing board accommodating portion 144 is provided on the first moving body 112.

[0054] The dressing board 142 may be formed by using a bonding material such as a resin bond to form green carbide and an alumina-based abrasive grain in a rectangular plate shape. One side of the dressing board 142 is, for example, about 5 cm. The dressing board accommodating portion 144 of the illustrated embodiment is composed of rectangular recesses provided in three on both ends in the Y-axis direction on the upper surface of a rectangular tray 148 as shown in FIG. 9, and the tray 148 is disposed on the upper surface of the bottom 80 of the frame body 74.

[0055] As shown in FIG. 8, a pair of holding means 146 of the illustrated embodiment are provided on both end portions in the Y-axis direction of the first moving body 112. The holding means 146 includes a fixing piece 150 fixed to the end portion in the Y-axis direction of the main body 120 of the first moving body 112, a lifting piece 152 supported so as to be movable up and down in the Z-axis direction on the lower surface of the fixing piece 150, a lifting means (not shown) for lifting the lifting piece 152, and a plurality of suction pads 154 arranged on the lower surface of the lifting piece 152. The lifting means can be composed of an appropriate actuator such as an air cylinder. Each suction pad 154 is connected to a suction means.

[0056] In the holding means 146, the lifting piece 152 is lowered by the lifting means, and each suction pad 154 is brought into contact with the dressing board 142 accommodated in the dressing board accommodating portion 144. At the same time, a suction force is generated in each suction pad 154 by the suction means, and the dressing board 142 is sucked and held by each suction pad 154.

[0057] Further, on the bottom portion 80 of the frame body 74, an end face correction jig accommodating portion 158 (see FIG. 9) for accommodating an end face correction jig 156 for adjusting the outer peripheral end face of a mount flange that supports the back portion of the cutting blade 36 formed at the tip of the spindle of the cutting means is provided. The end face correction jig 156 has a rectangular substrate 160 and a grindstone 162 fixed to the upper surface of the substrate 160. The end face correction jig accommodating portion 158 of the illustrated embodiment is composed of a pair of rectangular recesses provided at both end portions in the Y-axis direction on the upper surface of the tray 148 as shown in FIG. 9.

[0058] The end face correction jig 156 accommodated in the end face correction jig accommodating portion 158 is sucked and held by the suction pads 154 of the holding means 146 disposed on the first moving body 112.

[0059] Next, with reference to FIGS. 10 to 15, the cutting device 170 to which the auxiliary device 2 described above is connected will be described.

[0060] As shown in FIG. 10, the cutting device 170 includes a chuck table 172 having a holding surface for holding a workpiece, a cutting means 174 in which a cutting blade for cutting the workpiece held by the chuck table 172 is attached with a fixing nut, an X-axis feed means 176 for machining feed of the chuck table 172 in the X-axis direction, a Y-axis feed means 178 for indexing feed of the cutting means 174 in the Y-axis direction orthogonal to the X-axis direction, and a Z-axis feed means 180 for plunge feed of the cutting means 174 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.

[0061] Referring to FIGS. 10 and 11 for explanation, the cutting device 170 includes an X-axis movable plate 184 movably provided in the X-axis direction on the upper surface of a base 182 (see FIG. 10), a support column 186 fixed to the upper surface of the X-axis movable plate 184, and a cover plate 188 fixed to the upper end of the support column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through the circular opening 188a of the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built in the support column 186.

[0062] As shown in FIG. 11, a porous circular suction chuck 190 connected to a suction means (not shown) is disposed at the upper end portion of the chuck table 172. In the chuck table 172, by generating a suction force on the upper surface of the suction chuck 190 with the suction means, the workpiece placed on the upper surface of the suction chuck 190 is suction-held. Thus, in the chuck table 172, the upper surface of the suction chuck 190 serves as a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane defined in the X-axis direction and the Y-axis direction. Further, a plurality of clamps 192 are arranged at intervals in the circumferential direction on the periphery of the chuck table 172.

[0063] Continuing the description with reference to FIG. 11, a pair of rectangular sub-tables 194 are arranged on the upper surface of the cover plate 188 at intervals in the Y-axis direction. A plurality of suction holes 196 connected to a suction means (not shown) are formed on the upper surface of each sub-table 194. In the sub-table 194, by generating a suction force in each suction hole 196 by the suction means, the dressing board 142 or the end face correction jig 156 sucked and held by the suction pad 154 of the holding means 146 disposed on the first moving body 112 is sucked and held.

[0064] As shown in FIG. 11, the X-axis feed means 176 has a ball screw 198 connected to the X-axis movable plate 184 and extending in the X-axis direction, and a motor 200 for rotating the ball screw 198. The X-axis feed means 176 converts the rotational motion of the motor 200 into a linear motion by the ball screw 198 and transmits it to the X-axis movable plate 184, moves the X-axis movable plate 184 along the guide rail 182a of the base 182, and feeds the chuck table 172 in the X-axis direction for machining.

[0065] As shown in FIG. 10, the cutting device 170 includes a gantry-shaped frame 202 disposed across the chuck table 172. The frame 202 has a pair of columns 204 extending upward from the upper surface of the base 182 at intervals in the Y-axis direction, and a beam 206 spanning between the upper ends of the pair of columns 204 and extending in the Y-axis direction. The cutting means 174 are provided in a pair at intervals in the Y-axis direction on one side surface (the back side surface in FIG. 10) of the beam 206. In the cutting device 170 of the illustrated embodiment, a pair of cutting means 174 are provided so that the cutting blades 36 face each other, and the workpiece held on the chuck table 172 can be simultaneously cut by the pair of cutting blades 36. Note that the number of cutting means 174 may be one.

[0066] As shown in FIG. 12, each cutting means 174 includes a rectangular Y-axis movable member 208 supported on one side surface of the beam 206 so as to be movable in the Y-axis direction, a Z-axis movable member 210 having an L-shaped cross section supported on the Y-axis movable member 208 so as to be movable up and down in the Z-axis direction, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

[0067] On one side surface of the Y-axis movable member 208 (the front side surface in FIG. 12), a pair of guided grooves 208a extending in the Y-axis direction with a space in the Z-axis direction are formed, and the guided grooves 208a are slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction with a space in the vertical direction on one side surface of the beam 206.

[0068] The Y-axis feed means 178 has a ball screw 214 extending in the Y-axis direction on one side surface of the beam 206 and a motor 216 for rotating the ball screw 214. The ball screw 214 is connected to the Y-axis movable member 208. The Y-axis feed means 178 converts the rotational motion of the motor 216 into a linear motion by the ball screw 214 and transmits it to the Y-axis movable member 208, and indexes and feeds the Y-axis movable member 208 in the Y-axis direction along the guide rail attached to one side surface of the beam 206.

[0069] On the other side surface of the Y-axis movable member 208 (the back side surface in FIG. 12), a pair of guide rails (not shown) extending in the Z-axis direction with a space in the Y-axis direction are formed, and the Z-axis movable member 210 has a pair of guided grooves (not shown) slidably connected to the pair of guide rails of the Y-axis movable member 208.

[0070] The Z-axis feed means 180 has a ball screw (not shown) connected to the Z-axis movable member 210 and extending in the Z-axis direction and a motor 218 for rotating this ball screw. The Z-axis feed means 180 converts the rotational motion of the motor 218 into a linear motion by the ball screw and transmits it to the Z-axis movable member 210, and cuts and feeds the Z-axis movable member 210 in the Z-axis direction along the guide rail of the Y-axis movable member 208.

[0071] Referring to FIG. 13, a cylindrical spindle 220 is rotatably supported about the Y-axis in a spindle housing 212, and a motor (not shown) for rotating the spindle 220 is housed therein. At the tip of the spindle 220, a cutting blade 36 for cutting a workpiece is detachably fixed by a fixing nut 222.

[0072] At the tip of the spindle housing 212, a blade cover 224 for covering the cutting blade 36 is attached. The blade cover 224 has a first cover member 224a fixed to the tip of the spindle housing 212 and a second cover member 224b movably attached to the tip of the first cover member 224a. The second cover member 224b is moved in the X-axis direction by an appropriate actuator (not shown) such as an air cylinder, and is positioned at the open position shown in FIG. 13 when replacing the cutting blade 36, and is positioned at the closed position shown in FIG. 12 during cutting.

[0073] As shown in FIG. 14, an annular mounting flange 226 protruding radially outward is provided on the outer peripheral surface of the tip side of the spindle 220. An annular recess 226a is formed in the radially inner part of the tip surface of the mounting flange 226, and the outer peripheral side part of the tip surface of the mounting flange 226 is an annular receiving part 226b protruding in the axial direction. Further, a male thread 228 is formed on the outer peripheral surface of the spindle 220 on the tip side of the mounting flange 226.

[0074] The central opening 38a of the cutting blade 36 fits onto the tip of the spindle 220, and the male thread 228 of the spindle 220 and the fixing nut 222 are screwed (fastened) together, so that the cutting blade 36 is sandwiched between the receiving part 226b of the mounting flange 226 and the fixing nut 222 and is detachably fixed to the tip of the spindle 220. Further, a plurality of pin holes 222a into which the pins 72 of the fixing nut holding part 50 of the carry-in / carry-out means 6 are inserted are formed at equal intervals in the circumferential direction on the side surface of the nut 222.

[0075] As shown in FIG. 10, a pair of imaging means 230 for imaging a workpiece held by the chuck table 172 is movably mounted in the Y-axis direction on the other side surface (the front side surface in FIG. 10) of the beam 206 of the frame 202, and a pair of moving means 232 for moving the imaging means 230 in the Y-axis direction is mounted. The moving means 232 has a ball screw 234 extending in the Y-axis direction on the other side surface of the beam 206 and a motor 236 for rotating the ball screw 234. The ball screw 234 is connected to the imaging means 230. Then, the moving means 232 converts the rotational motion of the motor 236 into a linear motion and transmits it to the imaging means 230, and moves the imaging means 230 in the Y-axis direction along the guide rail 206a attached to the other side surface of the beam 206. Note that there may be only one imaging means 230.

[0076] When performing cutting on a workpiece such as a wafer using the cutting device 170, first, the workpiece is adsorbed to the chuck table 172. Next, the chuck table 172 is moved below the imaging means 230 by the X-axis feed means 176, and the Y-axis position of the imaging means 230 is adjusted by the moving means 232. Next, the imaging means 230 images the workpiece from above to detect the cutting area of the workpiece.

[0077] Next, based on the cutting area of the workpiece detected by the imaging means 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of the workpiece with respect to the cutting blade 36 of the cutting means 174. Next, the chuck table 172 is moved in the X-axis direction by the X-axis feed means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178 to position the pair of cutting blades 36 above the cutting area of the workpiece.

[0078] Next, the spindle housing 212 is lowered by the Z-axis feed means 180, and the cutting edge 40 of the cutting blade 36 rotating at high speed is inserted into the cutting area of the workpiece. While supplying cutting fluid to the portion where the cutting edge 40 of the cutting blade 36 is inserted, the chuck table 172 is fed in the X-axis direction for machining, thereby performing a predetermined cutting operation on the cutting area of the workpiece. While indexing and feeding the spindle housing 212 in the Y-axis direction by the Y-axis feed means 178, the above cutting operation is appropriately repeated to perform cutting on all of the cutting areas of the workpiece. The machined workpiece after the cutting process is completed is conveyed to the next process.

[0079] When the cutting process is repeatedly performed, the cutting blade 36 wears. When the wear of the cutting blade 36 reaches a predetermined amount, the cutting accuracy cannot be maintained. Therefore, it is necessary to replace the cutting blade 36 mounted on the spindle 220 with a new cutting blade 36. Also, even when the wear of the cutting blade 36 mounted on the spindle 220 has not reached a predetermined amount, when performing cutting on a workpiece made of a material different from that of the workpiece previously machined, it may be necessary to replace the cutting blade 36 with one corresponding to the material of the workpiece.

[0080] In the illustrated embodiment, as shown in FIG. 15, an auxiliary device 2 capable of automatically replacing the cutting blade 36 of the cutting device 170 is connected to the cutting device 170. Hereinafter, a method of replacing the cutting blade 36 using the auxiliary device 2 will be described.

[0081] As shown in FIG. 15, the auxiliary device 2 is disposed on the back side in the X-axis direction of the cutting device 170 and can be mounted on the cutting device 170 that has already been delivered to the user at a later time. When replacing the cutting blade 36 mounted on the cutting device 170 using the auxiliary device 2, first, the endless track 22 of the cutting blade storage means 4 is rotated to position the support shaft 24 supporting the new cutting blade 36 to be carried into the cutting device 170 at a predetermined position (for example, the lowermost position of the support shaft 24 on the track).

[0082] Next, as shown in FIG. 16, the motor connected to the Z-rotation shaft 46 of the loading / unloading means 6 rotates the casing 52 so that the side wall 56 of the casing 52 to which the blade holding portion 48 is attached is aligned along the X-axis direction, and the blade holding portion 48 faces the cutting blade storage means 4. Also, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis direction position and the Z-axis direction position of the blade holding portion 48 so that the shaft portion 34 of the support shaft 24 at the above-mentioned predetermined position can be inserted into the central opening 60 (see FIG. 5) of the blade holding portion 48.

[0083] Next, as shown in FIG. 17, the frame body 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the loading / unloading means 6 is positioned at an operating position where the cutting blade 36 supported by the support shaft 24 can be held by the blade holding portion 48. As a result, the shaft portion 34 of the support shaft 24 at the above-mentioned predetermined position is inserted into the central opening 60 of the blade holding portion 48, and the end face 58 of the blade holding portion 48 is brought into contact with the end face of the cutting blade 36 located on the tip side of the shaft portion 34. Next, a suction force is generated in each suction hole 62 of the blade holding portion 48, and the cutting blade 36 located on the tip side of the shaft portion 34 is suction-held by the blade holding portion 48.

[0084] Next, the Y-axis positioning means 8 is operated to position the loading / unloading means 6 at a retracted position spaced apart from the cutting blade storage means 4 in the Y-axis direction. Next, the casing 52 of the loading / unloading means 6 is rotated 180°, and the blade holding portion 48 on the opposite side of the blade holding portion 48 that suction-holds the cutting blade 36 faces the cutting blade storage means 4. Next, the Y-axis positioning means 8 is operated to position the loading / unloading means 6 at an operating position where the cutting blade 36 of the support shaft 24 can be held by the blade holding portion 48 on the opposite side. Next, a suction force is generated in each suction hole 62 of the blade holding portion 48 on the opposite side, and the cutting blade 36 located on the tip side of the shaft portion 34 is suction-held by the blade holding portion 48. As a result, a new cutting blade 36 is suction-held by a pair of opposing blade holding portions 48 among the four blade holding portions 48.

[0085] Next, as shown in FIG. 18, the frame body 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the lifting table 76 is moved in the Z-axis direction by the Z-axis moving means 10. Thereby, the loading / unloading means 6 is separated from the cutting blade storage means 4 and positioned at the retracted position, and the Y-axis position and the Z-axis position of the loading / unloading means 6 with respect to the cutting device 170 are adjusted. The Y-axis position of the loading / unloading means 6 after the position adjustment is between the pair of cutting means 174 of the cutting device 170, and the Z-axis position of the loading / unloading means 6 after the position adjustment is above the holding surface of the chuck table 172.

[0086] Next, as shown in FIG. 19, the first moving body 112 is moved in the X-axis direction by the air cylinder 130 as the first X-axis moving means, and the loading / unloading means 6 is advanced toward between the pair of cutting means 174 of the cutting device 170. Next, as shown in FIG. 20, the second moving body 114 is moved in the X-axis direction by the second X-axis moving means 136, and the X-axis position of the loading / unloading means 6 with respect to the pair of cutting means 174 is adjusted. Specifically, the X-axis position of the centers of the new pair of cutting blades 36 held by suction by the pair of blade holding portions 48 of the loading / unloading means 6 is aligned with the X-axis position of the centers of the pair of cutting blades 36 mounted on the pair of cutting means 174. Further, the Z-axis moving means 10 of the auxiliary device 2 or the Z-axis feed means 180 of the cutting device 170 is operated to align the Z-axis position of the center of the cutting blade 36 of the blade holding portion 48 with the Z-axis position of the center of the cutting blade 36 of the cutting means 174.

[0087] Next, the casing 52 of the loading / unloading means 6 is rotated by 60°, and the pair of fixed nut holding portions 50 are faced to the cutting blades 36 of the pair of cutting means 174. Note that the casing 52 may be rotated by 60° before advancing the first and second moving bodies 112 and 114.

[0088] Next, position the second cover member 224b of each blade cover 224 of the pair of cutting means 174 in the open position (see FIG. 13). Next, move the cutting means 174 in the Y-axis direction by the Y-axis feed means 178 of the cutting device 170, and bring the fixing nut 222 that fixes the cutting blade 36 to the spindle 220 into contact with the end face 66a of the rotating body 66 of the fixing nut holder 50. Then, the pin 72 of the fixing nut holder 50 is pushed by the fixing nut 222 and housed inside the rotating body 66, and the tip of the spindle 220 is housed in the central opening 68 of the rotating body 66.

[0089] Next, when the rotating body 66 is rotated by the motor of the fixing nut holder 50, when each pin 72 aligns with the pin hole 222a of the fixing nut 222, each pin 72 fits into the pin hole 222a, and the rotational movement of the rotating body 66 is transmitted to the fixing nut 222 via each pin 72, and the fixing nut 222 loosens. As a result, the fixing nut 222 can be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. Further, a suction force is generated in each suction hole 70 of the fixing nut holder 50, and the removed fixing nut 222 is suction-held by the fixing nut holder 50.

[0090] Next, separate the cutting means 174 from the loading / unloading means 6 by the Y-axis feed means 178, rotate the casing 52 of the loading / unloading means 6 by 60°, and face the empty blade holder 48 that does not suction-hold the cutting blade 36 to the cutting blade 36 of the cutting means 174.

[0091] Next, approach the cutting means 174 to the loading / unloading means 6 by the Y-axis feed means 178, insert the spindle 220 of the cutting means 174 into the central opening 60 of the blade holder 48, and bring the end face 58 of the empty blade holder 48 into contact with the end face of the cutting blade 36 of the cutting means 174. Next, generate a suction force in each suction hole 62 of the blade holder 48, and suction-hold the cutting blade 36 of the cutting means 174 by the blade holder 48.

[0092] Next, the Y-axis feed means 178 separates the cutting means 174 from the loading / unloading means 6 and rotates the casing 52 of the loading / unloading means 6 by 60°, causing the blade holding part 48 that suction holds the new cutting blade 36 to face the spindle 220 of the cutting means 174.

[0093] Next, the Y-axis feed means 178 brings the cutting means 174 closer to the loading / unloading means 6, inserts the spindle 220 into the central opening 38a of the new cutting blade 36, and brings the end face of the cutting blade 36 into contact with the receiving part 226b of the mounting flange 226 of the spindle 220. Next, the suction force of the blade holding part 48 is released, and the new cutting blade 36 is transferred from the blade holding part 48 to the spindle 220.

[0094] Next, the Y-axis feed means 178 separates the cutting means 174 from the loading / unloading means 6 and rotates the casing 52 of the loading / unloading means 6 by 60°, causing the fixed nut holding part 50 that suction holds the removed fixed nut 222 to face the spindle 220 of the cutting means 174.

[0095] Next, the Y-axis feed means 178 brings the cutting means 174 closer to the loading / unloading means 6 and fits the fixed nut 222 suction-held by the fixed nut holding part 50 onto the tip of the spindle 220. Next, the motor of the fixed nut holding part 50 is operated in the direction opposite to when the fixed nut 222 was removed to rotate the fixed nut 222, and the fixed nut 222 is screwed (fastened) onto the male thread 228 of the spindle 220. As a result, the new cutting blade 36 to be mounted on the cutting means 174 can be sandwiched between the receiving part 226b of the mounting flange 226 of the spindle 220 and the fixed nut 222 and fixed to the spindle 220. Next, after releasing the suction force of the fixed nut holding part 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned at the closed position. Note that the removal and attachment of the fixed nut 222 and the cutting blade 36 as described above may be performed simultaneously or separately for the pair of cutting means 174.

[0096] Next, the first and second moving bodies 112 and 114 are retracted, and the casing 52 of the loading / unloading means 6 is rotated 60°, and one of the pair of removed cutting blades 36 is faced to the cutting blade storage means 4. Further, the endless track 22 of the cutting blade storage means 4 is rotated to position the empty support shaft 24 that does not support the cutting blade 36 at a predetermined position (for example, the lowermost position in the track of the support shaft 24).

[0097] Next, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis direction position and the Z-axis direction position of the blade holding portion 48 so that the shaft portion 34 of the support shaft 24 at the predetermined position can be inserted into the central opening 38a of one of the cutting blades 36 suction-held by the blade holding portion 48.

[0098] Next, the frame body 74 is moved in the Y-axis direction by the Y-axis positioning means 8, the shaft portion 34 of the support shaft 24 at the predetermined position is inserted into the central opening 38a of one of the cutting blades 36 suction-held by the blade holding portion 48, and the end face of one of the cutting blades 36 is brought into contact with the end face of the base portion 32 of the support shaft 24. Then, the suction force of the blade holding portion 48 is released, and one of the pair of removed cutting blades 36 is delivered to the support shaft 24.

[0099] Also, the loading / unloading means 6 is separated from the cutting blade storage means 4 by the Y-axis positioning means 8, the casing 52 of the loading / unloading means 6 is rotated 180°, and the other blade holding portion 48 that suction-holds the other of the pair of removed cutting blades 36 is faced to the cutting blade storage means 4. Next, the frame body 74 is moved in the Y-axis direction by the Y-axis positioning means 8, the shaft portion 34 of the support shaft 24 at the predetermined position is inserted into the central opening 38a of the other cutting blade 36 suction-held by the other blade holding portion 48, and the end face of the other cutting blade 36 is brought into contact with the end face of the cutting blade 36 supported by the support shaft 24. Then, the suction force of the blade holding portion 48 is released, and the other of the pair of removed cutting blades 36 is delivered to the support shaft 24.

[0100] As described above, in the auxiliary device 2 of the illustrated embodiment, it is possible to later attach to the cutting device 170 that has already been delivered to the user and replace the cutting blade 36 attached to the cutting means 174 of the cutting device 170.

[0101] Next, when the auxiliary device 2 includes the configuration shown in FIGS. 8 and 9, a method of loading the dressing board 142 or the end face correction jig 156 into the cutting device 170 will be described.

[0102] When loading the dressing board 142 into the cutting device 170 using the auxiliary device 2, first, the pair of lifting pieces 152 are lowered by the lifting means of the holding means 146, and the suction pads 154 are brought into contact with two of the dressing boards 142 accommodated in the dressing board accommodating portion 144. Next, a suction force is generated on each suction pad 154 by the suction means, and the dressing board 142 is suction-held by each suction pad 154. Next, the lifting piece 152 that suction-holds the dressing board 142 is lifted.

[0103] Next, after adjusting the Y-axis direction position and the Z-axis direction position of the loading / unloading means 6 with respect to the cutting device 170 by the Y-axis direction positioning means 8 and the Z-axis moving means 10, as shown in FIG. 21, the loading / unloading means 6 is advanced toward the cutting device 170 by the X-axis moving means 12 (the air cylinder 130 as the first X-axis moving means and the second X-axis moving means 136), and the dressing board 142 suction-held by the lifting piece 152 is positioned above the sub-table 194.

[0104] Next, the lifting piece 152 is lowered, and the lower surface of the dressing board 142 is brought into contact with the upper surface of the sub-table 194. Next, a suction force is generated in each suction hole 196 of the sub-table 194, and the dressing board 142 is suction-held by the sub-table 194 while releasing the suction force of the holding means 146. Thus, in the auxiliary device 2, it is possible to later attach to the cutting device 170 that has already been delivered to the user and load the dressing board 142 into the cutting device 170.

[0105] Then, the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, and after positioning the cutting blade 36 mounted on the cutting means 174 above the dressing board 142, the spindle housing 212 is lowered by the Z-axis feed means 180, and the dressing board 142 is cut with the cutting edge 40 of the cutting blade 36 rotated at high speed. Thereby, dressing (truing) for correcting the cutting edge 40 of the cutting blade 36 can be performed.

[0106] Also, when the end face correction jig 156 is carried into the cutting device 170 using the auxiliary device 2, first, the pair of lifting pieces 152 are lowered by the lifting means of the holding means 146, and the suction pads 154 are brought into contact with the upper surface of the substrate 160 of the pair of end face correction jigs 156 housed in the end face correction jig housing portion 158. Next, a suction force is generated in each suction pad 154 by the suction means, and the end face correction jig 156 is suction-held by each suction pad 154. Next, the lifting piece 152 that suction-holds the end face correction jig 156 is raised.

[0107] Next, after adjusting the Y-axis position and Z-axis position of the loading / unloading means 6 with respect to the cutting device 170 by the Y-axis positioning means 8 and the Z-axis moving means 10, as shown in FIG. 22, the loading / unloading means 6 is advanced toward the cutting device 170 by the X-axis moving means 12, and the end face correction jig 156 suction-held by the lifting piece 152 is positioned above the sub-table 194.

[0108] Next, the lifting piece 152 is lowered, and the lower surface of the substrate 160 of the end face correction jig 156 is brought into contact with the upper surface of the sub-table 194. Next, a suction force is generated in each suction hole 196 of the sub-table 194, and the end face correction jig 156 is suction-held by the sub-table 194 while releasing the suction force of the holding means 146. Thus, in the auxiliary device 2, the end face correction jig 156 can be later mounted on the cutting device 170 that has already been delivered to the user and carried into the cutting device 170.

[0109] Then, after removing the fixing nut 222 and the cutting blade 36 from the spindle 220 of the cutting means 174 by the blade holding portion 48 and the fixing nut holding portion 50 of the loading / unloading means 6, the Z-axis feed means 180 is operated to face the receiving portion 226b of the mounting flange 226 of the spindle 220 to the grinding stone 162 of the end face correction jig 156. Next, the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, and the receiving portion 226b of the mounting flange 226 of the rotated spindle 220 is brought into contact with the grinding stone 162 of the end face correction jig 156. Thereby, the receiving portion 226b (outer peripheral end face) of the mounting flange 226 can be ground and flattened by the grinding stone 162.

[0110] In addition, in the illustrated embodiment, corresponding to the fact that a pair of cutting means 174 are provided in the cutting device 170, an example in which the loading / unloading means 6 of the auxiliary device 2 includes four blade holding portions 48 and two fixing nut holding portions 50 has been described. However, when a single cutting means 174 is provided in the cutting device 170, the loading / unloading means 6 may include two blade holding portions 48 and one fixing nut holding portion 50. Further, when a single cutting means 174 is provided in the cutting device 170, the holding means 146 that holds the dressing board 142 and the end face correction jig 156 may be one.

Explanation of Reference Numerals

[0111] 2: Auxiliary device 4: Cutting blade storage means 6: Loading / unloading means 8: Y-axis positioning means 10: Z-axis moving means 12: X-axis moving means 14: Rotation axis 16: Driving gear 18: Rotation axis 20: Driven gear 22: Infinite track 24: Support shaft 36: Cutting blade 38a: Central opening 46: Z-rotation axis 48: Blade holding portion 50: Fixed nut holding part 74: Frame body 76: Lifting table 80: Bottom (frame body) 84: Ceiling part (frame body) 92: Guide rail (lifting table) 112: First moving body 114: Second moving body 116: First guide rail 118: Second guide rail 142: Dressing board 144: Dressing board storage part 146: Holding means 156: End face correction jig 158: End face correction jig storage part

Claims

1. A chuck table having a holding surface for holding a workpiece, cutting means in which a cutting blade for cutting the workpiece held by the chuck table is mounted with a fixing nut, X-axis feed means for machining and feeding the chuck table in the X-axis direction, Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, wherein the holding surface is an auxiliary device connected to a cutting device defined in the X-axis direction and the Y-axis direction, at least comprising cutting blade storage means for storing a plurality of cutting blades, loading / unloading means for loading and unloading a cutting blade from the cutting blade storage means, Y-axis positioning means for positioning the loading / unloading means at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means, Z-axis moving means for moving the loading / unloading means in the Z-axis direction, and X-axis moving means for moving the loading / unloading means in the X-axis direction to align the X-axis position of the cutting blade mounted on the spindle of the cutting means with the X-axis position of the cutting blade unloaded by the loading / unloading means from the cutting blade storage means, and positioning the cutting blade unloaded by the loading / unloading means from the cutting blade storage means at a position where it can be exchanged with the cutting blade mounted on the spindle of the cutting means. The loading / unloading means at least comprises a Z-rotation axis extending in the Z-axis direction, a blade holding portion radially connected to the Z-rotation axis for sucking and holding a cutting blade, and a fixing nut holding portion for screwing and unscrewing the fixing nut onto and from a male screw formed at the tip of the spindle. An auxiliary device having two blade holding portions for one fixing nut holding portion.

2. The cutting blade storage means according to claim 1, including a driving gear having a rotation axis extending in the Y-axis direction, a driven gear having a rotation axis extending in the Y-axis direction and spaced apart from the driving gear in the Z-axis direction, an endless track wound around the driving gear and the driven gear, and a support axis extending in the Y-axis direction disposed at a predetermined interval on the endless track and inserted into a central opening of the cutting blade to support the cutting blade.

3. The auxiliary device according to claim 2, wherein the Z-axis direction interval between the driving gear and the driven gear can be adjusted and the length of the endless track can also be adjusted.

4. The loading and unloading means is disposed on the frame body, and the frame body is slidably supported by a guide rail extending in the Y-axis direction disposed on the lifting table, and is positioned at the working position and the retracted position in the Y-axis direction with respect to the cutting blade storage means by the Y-axis positioning means. The auxiliary device according to claim 1.

5. The loading and unloading means is disposed on a first moving body disposed inside the frame body, and the first moving body is slidably supported in a suspended state by a first guide rail extending in the X-axis direction disposed below a second moving body, and the second moving body is slidably supported in a suspended state by a second guide rail extending in the X-axis direction disposed on the ceiling portion of the frame body, and the loading and unloading means is configured to be able to move in and out in the X-axis direction by the first moving body and the second moving body. The auxiliary device according to claim 4.

6. A dressing board storage portion for storing a dressing board for dressing the cutting blade is disposed at the bottom of the frame body, and holding means for holding the dressing board stored in the dressing board storage portion is disposed on the first moving body. The auxiliary device according to claim 5.

7. An end face correction jig storage portion for storing an end face correction jig for aligning the outer peripheral end face of a mount flange formed at the tip of the spindle of the cutting means and supporting the back of the cutting blade is disposed at the bottom of the frame body, and the end face correction jig is held by the holding means disposed on the first moving body. The auxiliary device according to claim 6.

Images