Grinding wheel removal jig

Abstract

To provide a grinding wheel removal jig which enables easy removal of a grinding wheel fastened to a mount.SOLUTION: A grinding wheel removal jig is used to remove a grinding wheel, which is attached to a mount fixed to a spindle of a grinding device by a fastening bolt, from the mount. The grinding wheel removal jig includes: a wrench including an insertion part into which the fastening bolt fastened to the grinding wheel through a through hole provided at the mount is inserted; and a spacer which is fixed to the wrench and contacts with a contact part of the grinding device which faces the mount.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a grinding wheel removal jig for removing a grinding wheel mounted on a mount fixed to a spindle of a grinding device by a fastening bolt.

Background Art

[0002] In the manufacturing process of device chips, a wafer in which devices are formed in a plurality of regions partitioned by a plurality of streets (division planned lines) intersecting each other is used. By dividing this wafer along the streets, a plurality of device chips each having a device are obtained. The device chips are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] In recent years, with the miniaturization of electronic devices, there has been a demand for thinner device chips. Therefore, before dividing the wafer, a process of preliminarily grinding and thinning the wafer may be performed. For thinning the wafer, for example, a grinding device is used. The grinding device includes a chuck table for holding a workpiece and a grinding unit for performing grinding on the workpiece, and an annular grinding wheel including a grinding stone is mounted on the grinding unit. The wafer is held by the chuck table, and the grinding stone is brought into contact with the wafer while rotating the chuck table and the grinding wheel, whereby the wafer is ground and thinned.

[0004] The grinding unit of the grinding device includes a spindle (rotating shaft) and a disk-shaped mount fixed to the tip of the spindle, and the grinding wheel is mounted on the mount by a fastening bolt (see Patent Document 1 and Patent Document 2). Then, when the grinding stone wears due to grinding of the workpiece, the grinding wheel is replaced. At that time, the used grinding wheel is removed from the mount by loosening the fastening bolt.

Prior Art Documents

Patent Documents

[0005] Patent Document 1 Japanese Unexamined Patent Application Publication No. 2011-121128 Patent Document 2 Japanese Unexamined Patent Application Publication No. 2018-69344 Summary of the Invention Problems to be Solved by the Invention

[0006] When machining a workpiece such as a wafer with a grinding device, while supplying a grinding fluid such as pure water to the workpiece and the grinding wheel, the grinding wheel rotating at high speed is brought into contact with the workpiece. Therefore, in the processing chamber where the grinding of the workpiece is carried out, the grinding fluid mixed with the chips (grinding chips) generated by grinding becomes mist and scatters, and enters the gap between the mount of the grinding unit and the grinding wheel.

[0007] If a long time elapses with the grinding fluid containing grinding chips entering between the mount and the grinding wheel, the grinding chips are dried and hardened while being sandwiched between the mount and the grinding wheel, and the mount and the grinding wheel are firmly fixed via the grinding chips. As a result, even when the fastening bolt is loosened and removed when replacing the grinding wheel, the grinding wheel may not separate from the mount, making it difficult to remove the grinding wheel.

[0008] The present invention has been made in view of such problems, and an object thereof is to provide a grinding wheel removal jig capable of easily removing a grinding wheel fixed to a mount. Means for Solving the Problems

[0009] According to one aspect of the present invention, there is provided a grinding wheel removal jig for removing a grinding wheel attached to a mount fixed to a spindle of a grinding device by a fastening bolt from the mount. The grinding wheel removal jig includes a wrench having an insertion portion into which the fastening bolt fastened to the grinding wheel is inserted through a through hole provided in the mount, and a spacer fixed to the wrench and contacting a contact portion of the grinding device facing the mount. When the fastening bolt fastened to the grinding wheel is rotated in a direction to loosen the fastening by the wrench with the fastening bolt inserted into the insertion portion, the fastening bolt moves toward the contact portion side the spacer contacts the contact portion, from the spacer pressed by the contact portion and a grinding wheel removal jig is provided that applies a force to the grinding wheel in a direction away from the mount.

[0010] Preferably, the contact portion is a housing that houses the spindle, and the spacer contacts the housing. Also preferably, the wrench is a ratchet wrench.

Advantages of the Invention

[0011] The grinding wheel removal jig according to one aspect of the present invention includes a spacer fixed to a wrench and contacting a contact portion of the grinding device. As a result, when the fastening bolt is loosened and removed by the wrench, a force is applied to the grinding wheel in a direction away from the mount. As a result, the grinding wheel can be easily removed from the mount.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments according to an aspect of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a grinding apparatus to which the grinding wheel removal jig according to the present embodiment can be applied will be described. FIG. 1 is a perspective view showing a grinding apparatus 2. In FIG. 1, the X-axis direction (first horizontal direction, front-rear direction) and the Y-axis direction (second horizontal direction, left-right direction) are perpendicular to each other. The Z-axis direction (machining feed direction, vertical direction, up-down direction, height direction) is perpendicular to the X-axis direction and the Y-axis direction.

[0014] The grinding apparatus 2 includes a rectangular parallelepiped base 4 that supports or houses each component constituting the grinding apparatus 2. On the upper surface side of the base 4, a rectangular opening 4a whose longitudinal direction is along the X-axis direction is provided. Further, at the rear end portion of the base 4, a rectangular parallelepiped support structure 6 that protrudes upward from the upper surface of the base 4 is provided along the Z-axis direction.

[0015] Inside the opening 4a, a first movement mechanism (first movement unit) 8 is provided. For example, the first movement mechanism 8 is a ball screw type movement mechanism, and includes a ball screw (not shown) arranged along the X-axis direction and a flat movement table (not shown) including a nut portion screwed to the ball screw. When the ball screw is rotated by a pulse motor or the like, the movement table moves along the X-axis direction.

[0016] On the upper surface of the moving table of the first moving mechanism 8, a chuck table (holding table) 10 for holding the workpiece 11 is provided. Further, the first moving mechanism 8 includes a table cover 8a provided so as to surround the chuck table 10. Furthermore, bellows-shaped dust and splash covers 12 that can be expanded and contracted along the X-axis direction are provided in front of and behind the table cover 8a. The table cover 8a and the dust and splash covers 12 cover the components (such as guide rails and moving tables) of the first moving mechanism 8 disposed inside the opening 4a.

[0017] The upper surface of the chuck table 10 is a flat surface that is generally parallel to the horizontal direction (XY plane direction), and constitutes a holding surface 10a for holding the workpiece 11. The holding surface 10a is formed of a porous member such as porous ceramics, and is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), etc. formed inside the chuck table 10. In FIG. 1, an example is shown in which the holding surface 10a is formed in a circular shape assuming the holding of a disk-shaped workpiece 11, but the shape of the holding surface 10a can be appropriately changed according to the shape of the workpiece 11, etc.

[0018] The first moving mechanism 8 moves the chuck table 10 together with the table cover 8a along the X-axis direction. Further, a rotation drive source (not shown) such as a motor for rotating the chuck table 10 around a rotation axis that is generally parallel to the Z-axis direction is connected to the chuck table 10.

[0019] A second moving mechanism (second moving unit) 14 is provided on the front side of the support structure 6. The second moving mechanism 14 includes a pair of guide rails 16 disposed along the Z-axis direction. A flat moving table 18 is slidably mounted on the pair of guide rails 16 along the guide rails 16.

[0020] A nut portion (not shown) is provided on the rear surface (back surface) of the moving table 18, and a ball screw 20 arranged along the Z-axis direction is screwed into this nut portion between a pair of guide rails 16. Further, a pulse motor 22 is connected to an end portion of the ball screw 20. When the ball screw 20 is rotated by the pulse motor 22, the moving table 18 moves in the Z-axis direction along the pair of guide rails 16.

[0021] On the front surface (front side) of the moving table 18, a support member 24 that protrudes forward from the front surface of the moving table 18 is fixed. The support member 24 supports a grinding unit 26 that performs grinding on the workpiece 11. Then, the movement (lifting and lowering) of the grinding unit 26 in the Z-axis direction is controlled by the second moving mechanism 14.

[0022] The grinding unit 26 includes a hollow cylindrical housing 28. The housing 28 is made of metal or the like and is supported by the support member 24. And a cylindrical spindle (rotating shaft) 30 arranged along the Z-axis direction is accommodated in the housing 28. The tip end portion (lower end portion) of the spindle 30 protrudes downward from the lower surface of the housing 28, and a rotational drive source (not shown) such as a motor is connected to the base end portion (upper end portion) of the spindle.

[0023] A disk-shaped mount (wheel mount) 32 is fixed to the tip end portion of the spindle 30. The mount 32 is made of metal or the like and is arranged such that the radial direction is substantially parallel to the horizontal direction (XY plane direction). And a grinding wheel 34 for grinding the workpiece 11 is mounted on the lower surface side of the mount 32.

[0024] The grinding wheel 34 is made of metal or the like and includes an annular base 36 formed to have substantially the same diameter as the mount 32. A plurality of grinding wheels 38 are fixed to the lower surface side of the base 36. For example, the plurality of grinding wheels 38 are formed in a rectangular parallelepiped shape and are arranged at substantially equal intervals along the outer periphery of the base 36. The grinding wheel 38 is formed by fixing abrasive grains made of diamond, cBN (Cubic Boron Nitride), or the like with a binder such as a metal bond, a resin bond, or a vitrified bond. However, there are no restrictions on the material, shape, size, number, arrangement, etc. of the grinding wheel 38.

[0025] The grinding wheel 34 rotates around a rotation axis substantially parallel to the Z-axis direction by the power transmitted from the rotation drive source via the spindle 30 and the mount 32. Further, inside or near the grinding unit 26, a grinding fluid supply path (not shown) such as a nozzle for supplying a liquid (grinding fluid) such as pure water to the workpiece 11 held by the chuck table 10 and the grinding wheel 38 is provided.

[0026] The grinding apparatus 2 further includes a control unit (control unit, control device) 40 that controls the grinding apparatus 2. The control unit 40 is connected to each component of the grinding apparatus 2 (the first moving mechanism 8, the chuck table 10, the second moving mechanism 14, the grinding unit 26, etc.) and generates a control signal for controlling the operation of each component.

[0027] For example, the control unit 40 is configured by a computer and includes a processing unit that performs processes such as calculations necessary for controlling the grinding apparatus 2, and a storage unit that stores various types of information (data, programs, etc.) used for controlling the grinding apparatus 2. The processing unit includes a processor such as a CPU (Central Processing Unit). The storage unit includes memories such as a ROM (Read Only Memory) and a RAM (Random Access Memory).

[0028] The workpiece 11 is ground by the grinding device 2 described above. For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor such as silicon, and includes a front surface 11a and a back surface 11b. The workpiece 11 is partitioned into a plurality of rectangular regions by a plurality of streets (division planned lines) arranged in a grid pattern so as to intersect each other. And devices (not shown) such as IC (Integrated Circuit), LSI (Large Scale Integration), and LED (Light Emitting Diode) are formed in each of the plurality of regions partitioned by the streets on the front surface 11a side of the workpiece 11.

[0029] By dividing the workpiece 11 along the streets by cutting, laser processing, or the like, a plurality of device chips each having a device are manufactured. Further, before dividing the workpiece 11, if the back surface 11b side of the workpiece 11 is ground using the grinding device 2 to thin the workpiece 11, a thinned device chip can be obtained.

[0030] However, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer (substrate) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), sapphire, glass, ceramics, resin, metal, or the like. Also, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the devices formed on the workpiece 11, and the workpiece 11 may not have any devices formed thereon.

[0031] For example, the workpiece 11 is placed on the chuck table 10 such that the front surface 11a side faces the holding surface 10a and the back surface 11b side is exposed upward. When the suction force (negative pressure) of the suction source is applied to the holding surface 10a in this state, the workpiece 11 is suction-held by the chuck table 10. Note that a protective tape made of resin or the like and protecting the front surface 11a side (devices) of the workpiece 11 may be attached to the front surface 11a side of the workpiece 11. In this case, the workpiece 11 is held by the holding surface 10a via the protective tape.

[0032] The workpiece 11 held by the chuck table 10 is disposed below the grinding unit 26 by the first moving mechanism 8. Then, while rotating the chuck table 10 and the grinding wheel 34 at predetermined rotational speeds respectively, the grinding wheel 34 is lowered at a predetermined speed. As a result, the grinding wheel 38 contacts the back surface 11b of the workpiece 11 and the back surface 11b side of the workpiece 11 is scraped off. In this way, the back surface 11b side of the workpiece 11 is ground and the workpiece 11 is thinned.

[0033] Also, during the grinding of the workpiece 11, grinding fluid is supplied to the workpiece 11 and the grinding wheel 38. Thereby, the workpiece 11 and the grinding wheel 38 are cooled, and the chips (grinding chips) generated by the grinding of the workpiece 11 are washed away.

[0034] FIG. 2 is a perspective view showing the mount 32 and the grinding wheel 34. When grinding the workpiece 11 with the grinding apparatus 2, the grinding wheel 34 is attached to the mount 32 by a plurality of fastening bolts 42.

[0035] The mount 32 has a plurality of through holes 32a penetrating the mount 32 in the thickness direction. For example, the plurality of through holes 32a are formed in a columnar shape and are arranged at substantially equal intervals along the circumferential direction of the mount 32. Further, the base 36 of the grinding wheel 34 has a plurality of screw holes 36a opening on the upper surface side of the base 36. The plurality of screw holes 36a are provided in the same number as the through holes 32a of the mount 32 and are arranged at substantially equal intervals along the circumferential direction of the base 36.

[0036] Note that there is no limitation on the number of the through holes 32a and the screw holes 36a, and they are appropriately set according to the size of the grinding wheel 34 and the like. For example, when the diameter of the grinding wheel 34 is 300 mm, eight through holes 32a and screw holes 36a can be provided. Also, when the diameter of the grinding wheel 34 is 200 mm, six through holes 32a and screw holes 36a can be provided.

[0037] When mounting the grinding wheel 34 on the mount 32, first, the upper surface of the base 36 is brought into contact with the lower surface of the mount 32. At this time, the grinding wheel 34 is arranged concentrically with the mount 32 so that the center position of the mount 32 coincides with the center position of the grinding wheel 34. Further, the angle of the grinding wheel 34 is adjusted so that the through-hole 32a and the screw hole 36a overlap and are connected to each other.

[0038] Next, a plurality of fastening bolts 42 are fastened to the grinding wheel 34. The fastening bolt 42 includes a head 42a and a columnar main body 42b connected to the center of the head 42a. For example, the fastening bolt 42 is a hexagon bolt with the head 42a formed in a hexagonal column shape. And, a screw groove that engages with the screw hole 36a of the base 36 is formed on the outer peripheral surface of the main body 42b.

[0039] The fastening bolt 42 is inserted into the through-hole 32a from the upper surface side of the mount 32 and screwed into the screw hole 36a of the base 36 by a tool such as a wrench. As a result, the head 42a is supported by the upper surface of the mount 32, and the main body 42b is screwed into the screw hole 36a. As a result, the mount 32 and the grinding wheel 34 are integrated via the fastening bolt 42, and the grinding wheel 34 is mounted on the mount 32. Although one fastening bolt 42 is shown as a representative example in FIG. 2, actually, a plurality of fastening bolts 42 are respectively inserted into the through-hole 32a of the mount 32 and screwed into the screw hole 36a of the base 36.

[0040] On the other hand, when removing the grinding wheel 34 from the mount 32, the fastening bolt 42 is loosened by a tool such as a wrench and removed from the screw hole 36a. As a result, the grinding wheel 34 is separated from the mount 32.

[0041] In addition, when machining the workpiece 11 with the grinding device 2, while supplying a grinding fluid to the workpiece 11 and the grinding wheel 38, the grinding wheel 38 rotating at high speed is brought into contact with the workpiece 11. Therefore, in the processing chamber where the grinding of the workpiece 11 is performed, the grinding fluid mixed with grinding chips becomes mist and scatters, and enters the gap between the mount 32 and the grinding wheel 34.

[0042] When a long time has passed with a grinding fluid containing grinding chips entering between the mount 32 and the grinding wheel 34, the grinding chips are dried and hardened while being sandwiched between the mount 32 and the grinding wheel 34, and the mount 32 and the grinding wheel 34 are firmly fixed via the grinding chips. As a result, even when the fastening bolt 42 is loosened and removed when replacing the grinding wheel 34, the grinding wheel 34 may not separate from the mount 32, making it difficult to remove the grinding wheel 34.

[0043] Therefore, in the present embodiment, a grinding wheel removal jig for removing the grinding wheel 34 from the mount 32 is used. When the grinding wheel removal jig according to the present embodiment is used, a force directed in a direction away from the mount 32 is applied to the grinding wheel 34 when the fastening bolt 42 is loosened and removed from the grinding wheel 34. Thereby, even when the mount 32 and the grinding wheel 34 are firmly fixed, the grinding wheel 34 can be easily removed.

[0044] FIG. 3(A) is a front view showing a grinding wheel removal jig 50. The grinding wheel removal jig 50 includes a wrench 52 and a spacer 62. The wrench 52 is a tool for tightening and removing the fastening bolt 42 (see FIG. 2). The spacer 62 is a columnar member fixed to the wrench 52.

[0045] The wrench 52 includes a columnar grip portion (handle portion) 54 that is held by an operator when the wrench 52 is used. Note that the grip portion 54 may be curved so that it is easy for the operator to hold. One end side of the grip portion 54 is connected to the head portion 58 via a columnar connection portion 56. The head portion 58 includes a first surface (upper surface) 58a and a second surface (lower surface) 58b that are substantially parallel to each other. A socket 60 for rotating the fastening bolt 42 (see FIG. 2) is provided on the second surface 58b side of the head portion 58.

[0046] FIG. 3(B) is a perspective view showing the head portion 58 of the grinding wheel removal jig 50. The socket 60 is provided with an insertion portion (fitting portion) 60a into which the fastening bolt 42 is inserted. The insertion portion 60a is formed corresponding to the shape of the head portion 42a (see FIG. 2) of the fastening bolt 42 and opens on the lower surface side of the socket 60. For example, when the fastening bolt 42 is a hexagonal bolt, the insertion portion 60a is formed in a hexagonal column shape slightly larger in size than the head portion 42a of the fastening bolt 42, and the head portion 42a is fitted into the insertion portion 60a.

[0047] When the grip portion 54 is grasped and rotated with the head portion 42a of the fastening bolt 42 inserted and fitted into the insertion portion 60a, the head portion 58 and the socket 60 rotate about the center of the insertion portion 60a as the rotation center. As a result, the fastening bolt 42 rotates in conjunction with the socket 60, and the fastening bolt 42 is removed.

[0048] Note that the wrench 52 is preferably a ratchet wrench. In this case, a ratchet mechanism is mounted on the head portion 58. The socket 60 is connected to the ratchet mechanism so that it can rotate in the first direction in conjunction with the head portion 58 and can rotate in the second direction (opposite to the first direction) independently of the head portion 58. The ratchet wrench is provided with a switching lever (not shown) for switching between the first direction and the second direction.

[0049] When a ratchet wrench is used as the wrench 52, it is possible to easily rotate the fastening bolt 42 in only one direction while maintaining the state where the head portion 42a (see FIG. 2) of the fastening bolt 42 is fitted into the insertion portion 60a. Thereby, the operation of removing the fastening bolt 42 is simplified.

[0050] On the side of the first surface 58a of the head portion 58 (the side opposite to the socket 60 and the insertion portion 60a), a columnar spacer 62 is provided. The upper surface of the spacer 62 is formed to be generally flat, and constitutes a contact surface 62a that contacts a predetermined component (contact portion) included in the grinding device 2 (see FIG. 1). Note that the spacer 62 may be formed integrally with the head portion 58, or may be formed separately and independently from the head portion 58 and then fixed to the head portion 58 with an adhesive or the like. Further, the spacer 62 may be detachable from the head portion 58.

[0051] FIG. 4 is a partial cross-sectional front view showing the grinding unit 26 and the grinding wheel removal jig 50. As shown in FIG. 4, the grinding wheel 34 is attached to the mount 32 by a plurality of fastening bolts 42. Then, the grinding wheel removal jig 50 is inserted between the housing 28 and the mount 32, and the fastening bolts 42 are removed from the grinding wheel 34.

[0052] In FIG. 4, H hm represents the height of the region between the housing 28 and the mount 32, and H m represents the height of the mount 32 (the height of the through hole 32a). Also, H b , H b1 , H b2 respectively represent the overall height (length) of the fastening bolt 42, the height (thickness) of the head portion 42a, and the height (length) of the main body portion 42b. Further, H w , H s respectively represent the height of the wrench 52 (the height difference between the upper surface of the head portion 58 and the lower surface of the socket 60) and the height of the spacer 62.

[0053] As the fastening bolt 42, a bolt having a length that can be screwed into the screw hole 36a of the base 36 through the through hole 32a of the mount 32 is used. Specifically, the dimensions of the fastening bolt 42 satisfy H b2 > H m . Also, the dimensions of the grinding wheel removal jig 50 are set such that the head portion 42a of the fastening bolt 42 can be inserted into the insertion portion 60a of the socket 60 (see FIG. 3(B)). Specifically, Hw +H s <H hm -H b1 The height H of the spacer is set so as to satisfy s this condition.

[0054] Next, a specific example of a method for removing the grinding wheel 34 using the grinding wheel removal jig 50 will be described. FIGS. 5(A), 5(B) and 6 show the grinding unit 26 and the grinding wheel removal jig 50 when removing the grinding wheel 34.

[0055] When removing the grinding wheel 34, first, some of the plurality of fastening bolts 42 fastened to the grinding wheel 34 are loosened and removed from the grinding wheel 34. For example, when six fastening bolts 42 are fastened to the grinding wheel 34, five fastening bolts 42 are removed from the screw holes 36a of the base 36. Note that there is no limitation on the method of removing some of the fastening bolts 42, and for example, a wrench 52 in a state where the spacer 62 is not fixed can be used.

[0056] Next, the remaining fastening bolts 42 fastened to the grinding wheel 34 are removed using the grinding wheel removal jig 50 with the spacer 62 fixed to the wrench 52. Specifically, first, the head portion 58 of the grinding wheel removal jig 50 is inserted between the housing 28 and the mount 32. Then, the grinding wheel removal jig 50 is positioned so that the head portion 42a of the fastening bolt 42 fastened to the grinding wheel 34 is inserted into the insertion portion 60a (see FIG. 3(B)) of the socket 60. Thereby, the head portion 42a of the fastening bolt 42 is fitted into the insertion portion 60a of the socket 60.

[0057] Next, rotate the fastening bolt 42 in the direction of loosening it with the wrench 52. Specifically, with the head 42a of the fastening bolt 42 inserted into the insertion portion 60a of the socket 60 (see Fig. 3(B)), hold and move the grip portion 54, and rotate the socket 60 so that the fastening bolt 42 moves in the direction away from the screw hole 36a of the base 36 (upward direction). As a result, the fastening bolt 42 loosens and gradually rises.

[0058] Fig. 5(A) is a partial cross-sectional front view showing the grinding unit 26 and the grinding wheel removal jig 50 when the fastening bolt 42 is loosened. When the fastening bolt 42 rotates and moves upward, the wrench 52 in contact with the fastening bolt 42 also moves upward.

[0059] Then, when the rotational speed of the fastening bolt 42 reaches a predetermined value, the spacer 62 contacts a component (contact portion) of the grinding device 2 provided at a position facing the mount 32. Specifically, the upper surface of the mount 32 faces the lower surface 28a of the housing 28, and the contact surface 62a of the spacer 62 contacts the lower surface 28a of the housing 28. In this case, the housing 28 serves as the contact portion.

[0060] Fig. 5(B) is a partial cross-sectional front view showing the grinding unit 26 and the grinding wheel removal jig 50 when the spacer 62 contacts the contact portion (housing 28). When the contact surface 62a of the spacer 62 contacts the lower surface 28a of the housing 28, the upward movement of the fastening bolt 42 and the grinding wheel removal jig 50 is stopped.

[0061] Here, the height H s (see Fig. 4) of the spacer 62 is set such that the lower end of the fastening bolt 42 is positioned below the upper surface of the base 36 when the spacer 62 contacts the contact portion of the grinding device 2 (H w +H s +H b2 >H hm +H m) Therefore, when the spacer 62 contacts the lower surface 28a of the housing 28, the lower end of the fastening bolt 42 slightly enters the threaded hole 36a and contacts the base 36.

[0062] Note that the contact portion where the spacer 62 contacts is not limited to the housing 28. For example, the grinding device 2 may be provided with a dedicated member (contact member) that contacts the spacer 62 to prevent the spacer 62 from rising. However, when the housing 28 is used as the contact portion, the trouble and cost of separately preparing and installing the contact member can be reduced.

[0063] Next, with the spacer 62 in contact with the contact portion (housing 28), the fastening bolt 42 is further rotated in the loosening direction. Then, the spacer 62 is pressed by the housing 28, and a force is applied to the grinding wheel 34 in a direction away from the mount 32 via the spacer 62, the wrench 52, and the fastening bolt 42.

[0064] FIG. 6 is a partial cross-sectional front view showing the grinding unit 26 and the grinding wheel removal jig 50 when a force is applied to the grinding wheel 34. After the spacer 62 contacts the lower surface 28a of the housing 28 and the upward movement of the fastening bolt 42 is stopped, if the rotation of the fastening bolt 42 continues, the force pushing the fastening bolt 42 out of the threaded hole 36a acts as a force for the fastening bolt 42 to press the base 36. As a result, a force (downward force) is applied to the grinding wheel 34 in a direction away from the mount 32. Then, the lower end of the fastening bolt 42 disengages from the threaded hole 36a of the base 36, and the fastening bolt 42 is separated from the grinding wheel 34.

[0065] As described above, the grinding wheel removal jig 50 according to the present embodiment includes a spacer 62 that is fixed to the wrench 52 and contacts the contact portion (such as the housing 28) of the grinding device 2. Thereby, when the fastening bolt 42 is loosened and removed by the wrench 52, a force is applied to the grinding wheel 34 in a direction away from the mount 32. As a result, for example, even when grinding fluid mixed with grinding chips enters between the mount 32 and the grinding wheel 34 and the grinding wheel 34 is firmly fixed to the mount 32, the grinding wheel 34 can be easily removed from the mount 32.

[0066] Note that the entire spacer 62 or at least the region including the contact surface 62a of the spacer 62 is preferably made of a flexible elastic body such as resin or rubber. Thereby, it is possible to prevent the contact portion from being damaged when the spacer 62 contacts the contact portion (such as the housing 28) of the grinding device 2.

[0067] In the above embodiment, the case where the last fastening bolt 42 is removed by the grinding wheel removal jig 50 has been described, but two or more fastening bolts 42 may be removed by the grinding wheel removal jig 50. For example, when the mount 32 and the grinding wheel 34 are particularly firmly fixed, the last two fastening bolts 42 may be sequentially removed by the grinding wheel removal jig 50. Thereby, forces in a direction away from the mount 32 are applied to a plurality of locations of the grinding wheel 34, and the grinding wheel 34 becomes more easily separable from the mount 32.

[0068] In addition, the structures, methods, etc. according to the above embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

Explanation of Reference Numerals

[0069] 11 Workpiece 11a Surface 11b Back surface 2 Grinding device 4 Base 4a Opening 6 Support structure 8 First moving mechanism (first moving unit) 8a Table cover 10 Chuck table (holding table) 10a Holding surface 12 Dust and splash cover 14 Second moving mechanism (second moving unit) 16 Guide rail 18 Moving table 20 Ball screw 22 Pulse motor 24 Support member 26 Grinding unit 28 Housing 28a Bottom surface 30 Spindle (rotating shaft) 32 Mount (wheel mount) 32a Through hole 34 Grinding wheel 36 Base 36a Screw hole 38 Grinding stone 40 Control unit (control unit, control device) 42 Fastening bolt 42a Head 42b Body part 50 Grinding wheel removal jig 52 Wrench 54 Grip part (handle part) 56 Connection part 58 Head part 58a First surface (upper surface) 58b Second surface (lower surface) 60 Socket 60a Insertion part (fitting part) 62 Spacer 62a Contact surface

Claims

1. A grinding wheel removal jig for removing a grinding wheel attached to a mount fixed to a spindle of a grinding device by fastening bolts from the mount, comprising: a wrench having an insertion portion into which the fastening bolts fastened to the grinding wheel are inserted through through-holes provided in the mount; a spacer fixed to the wrench and contacting a contact portion of the grinding device facing the mount; When the fastening bolts fastened to the grinding wheel are inserted into the insertion portion and the fastening bolts are rotated in a direction to loosen the fastening by the wrench, the fastening bolts move toward the contact portion side and the spacer contacts the contact portion, and a force is applied from the spacer pressed by the contact portion to the grinding wheel in a direction away from the mount. The grinding wheel removal jig is characterized by this.

2. The contact portion is a housing that houses the spindle; The grinding wheel removal jig according to claim 1, wherein the spacer contacts the housing.

3. The grinding wheel removal jig according to claim 1 or 2, wherein the wrench is a ratchet wrench.

Images