Vibration sensor inspection system

The vibration sensor inspection system addresses the challenge of accurately inspecting sensor attachment states by applying impacts during device stops, using frequency analysis of resonance changes, enhancing accuracy and enabling remote monitoring and power operation.

JP7702811B2Active Publication Date: 2025-07-04EBARA CORP
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Patent Information

Application Number
JP2021093790
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-06-03
Publication Date
2025-07-04
Estimated Expiration
2041-06-03

AI Technical Summary

Technical Problem

Existing vibration sensor inspection technologies struggle to accurately determine the attachment state of sensors during device operation or when devices are stationary, particularly in emergency equipment with long stop periods, due to varying accuracy depending on frequency band division methods and the inability to inspect during non-vibration states.

Method used

A vibration sensor inspection system that includes an impact device applying an impact to the sensor at arbitrary timings independent of the device's operation, utilizing frequency analysis of resonance changes to inspect attachment states, with components like electromagnets and iron pieces for impact application, and a vibration sensor inspection device for data analysis.

Benefits of technology

Enables accurate inspection of vibration sensor attachment states at any time, independent of device operation, improving accuracy by applying impacts during device stops, and allowing remote monitoring and power operation from device-generated power.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a vibration sensor inspection system capable of inspecting a vibration sensor attached to a device to be measured at arbitrary timing without depending on the operation situation of the device to be measured, with constant accuracy.SOLUTION: A vibration sensor inspection system 10 comprises: a device to be measured; a vibration sensor 20 attached to the device to be measured; an impact device 30 that operates at timing independent from the device to be measured, and impacts the vibration sensor 20; and a vibration sensor inspection device 40 that inspects the vibration sensor 20 based on measurement data output from the vibration sensor 20 when the vibration sensor 20 is impacted by the impact device 30.SELECTED DRAWING: Figure 5
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Description

Technical Field

[0001] The present invention relates to a vibration sensor inspection system.

Background Art

[0002] In recent years, with the development of IoT and ICT technologies, inexpensive vibration sensors have become widespread for checking the soundness of machinery and equipment. The measurement data of vibration sensors is automatically stored in a data collection device such as a cloud server. After attaching a vibration sensor to the device to be measured, the measurement data is automatically stored, so it is rare for a person to go to the installation location of the device to be measured to check the attachment status of the vibration sensor. For this reason, if the vibration sensor is subjected to some impact and falls off from the device to be measured or the attachment to the device to be measured becomes loose, there is a possibility that the vibration sensor is not accurately measuring the vibration of the object to be measured.

[0003] Patent Document 1 below discloses a vibration sensor attached to an object to be measured for measuring the vibration of the object to be measured, and an abnormality diagnosis device for a vibration sensor that detects the presence or absence of detachment of the vibration sensor from the object to be measured based on the vibration data measured by the vibration sensor. This abnormality diagnosis device divides the frequency spectrum obtained by frequency-analyzing the vibration data into at least three frequency bands, calculates the vibration values of the divided frequency bands, and based on the change in the vibration values of the frequency bands with respect to the reference vibration value, detects the presence or absence of detachment of the vibration sensor from the object to be measured.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Incidentally, the technology disclosed in Patent Document 1 is to detect the detachment of a vibration sensor during the operation of a device under measurement, and to distinguish it from the vibration during operation by "identifying the lowest frequency band among the frequency bands exceeding a threshold value for a plurality of divided frequency bands, and then comparing the other frequency bands with a reference to determine whether it is due to sensor detachment or external disturbance" (see paragraphs

[0043] and

[0044] of Patent Document 1). That is, it is necessary to "identify the lowest frequency band among the frequency bands exceeding the threshold value" in advance. Also, regarding "dividing the frequency band into a plurality of parts", it is at least three, and no details about the division are written. Therefore, the accuracy of the determination varies depending on the number of divisions and the division method. Furthermore, in principle, the technology of Patent Document 1 cannot inspect the attachment state of the vibration sensor during the stop of the device under measurement where no vibration occurs. For example, it is difficult to apply it to emergency equipment etc. with a long stop period.

[0006] The present invention has been made in view of the above problems, and an object thereof is to provide a vibration sensor inspection system that can inspect a vibration sensor attached to a device under measurement at an arbitrary timing without depending on the operating status of the device under measurement.

Means for Solving the Problems

[0007] A vibration sensor inspection system according to an aspect of the present invention includes a device under measurement, a vibration sensor attached to the device under measurement, an impact device that operates at a timing independent of the device under measurement and applies an impact to the vibration sensor, and a vibration sensor inspection device that inspects the vibration sensor based on measurement data output from the vibration sensor when the impact device applies an impact to the vibration sensor.

[0008] In the above vibration sensor inspection system, the vibration sensor inspection device may perform frequency analysis on the measurement data and inspect the attachment state of the vibration sensor based on a change in the resonance frequency of the vibration sensor.

[0009] In the vibration sensor inspection system, the impact device may apply an impact to the vibration sensor at the timing when the device under measurement stops.

[0010] In the vibration sensor inspection system, it includes a rotating machine provided in the device under measurement, a power generation device connected to the rotating machine, and a power supply device for storing the power generated by the power generation device. At least one of the vibration sensor, the impact device, and the vibration sensor inspection device may operate by receiving power supply from the power supply device.

[0011] In the vibration sensor inspection system, a second vibration sensor having a different attachment position from the vibration sensor is attached to the device under measurement, and the second vibration sensor may also operate by receiving power supply from the power supply device.

[0012] In the vibration sensor inspection system, the impact device includes at least an electromagnet and an iron piece, and may apply a certain impact to the vibration sensor by utilizing the movement of the iron piece magnetically attracted by the electromagnet.

[0013] In the vibration sensor inspection system, it may include a display unit for displaying the inspection result of the vibration sensor.

[0014] In the vibration sensor inspection system, it may include a communication unit for remotely operating the impact device.

[0015] In the vibration sensor inspection system, the vibration sensor and the impact device may be housed in a common case.

[0016] In the vibration sensor inspection system, the device under measurement may include a pump device and piping connected to the pump device.

Advantages of the Invention

[0017] According to one aspect of the present invention, it is possible to provide a vibration sensor inspection system that can inspect a vibration sensor attached to a device under measurement at an arbitrary timing without depending on the operating status of the device under measurement.

Brief Description of the Drawings

[0018]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Modes for Carrying Out the Invention

[0019] Hereinafter, a vibration sensor inspection system according to an embodiment of the present invention will be described with reference to the drawings. In the following description, a pump device is exemplified as a device under measurement to which a vibration sensor is attached.

[0020] FIG. 1 is a side view of a device under measurement 1 according to one embodiment. FIG. 2 is a front view of the device under measurement 1 according to one embodiment. As shown in FIG. 1, the device under measurement 1 includes a pump unit 2, a motor unit 3 (rotary machine), and a shaft coupling unit 4.

[0021] The pump section 2 is a volute pump having a suction port 2a on the front and a discharge port 2b on the upper surface. On the back of the pump section 2, a bearing section 2c that houses a bearing for pivotally supporting the pump shaft protrudes. The pump shaft protrudes from the bearing section 2c toward the back side and is connected via a shaft coupling section 4 to the rotating shaft of the motor section 3. A power generation device 5 is connected to the end of the motor section 3 on the side opposite to the pump section 2. The power generation device 5 generates electricity by the rotation of the motor section 3.

[0022] A plurality of vibration detection units 11 are attached to the measurement target device 1. The vibration detection unit 11 shown in FIG. 1 is attached to the bearing section 2c and the motor section 3. The vibration detection unit 11 is attached at the 12 o'clock direction and the 3 o'clock direction in the bearing section 2c and the motor section 3, respectively, as shown in FIG. 2. Note that the number of installed vibration detection units 11, installation locations, installation angles, etc. described above are merely examples and can be changed as appropriate. For example, the vibration detection unit 11 may be installed in piping connected to the pump section 2 (pump device).

[0023] As shown in FIG. 1, the vibration detection unit 11 is attached to the measurement target device 1 via an attachment base 12. The attachment base 12 is attached to the measurement target device 1 by screw fixation with screws, magnetic attachment with a magnet, or adhesion with an adhesive. The attachment base 12 supports a vibration sensor 20 and an impact device 30. The impact device 30 is housed in the case 13 together with the vibration sensor 20 in a state of being fixed to the vibration sensor 20.

[0024] FIG. 3 is a configuration diagram of a vibration sensor inspection system 10 according to an embodiment. The vibration sensor inspection system 10 shown in Fig. 3 includes a vibration sensor 20, an impact device 30, a vibration sensor inspection device 40, and a power supply device 50. The power supply device 50 is connected to the power generation device 5 described above, stores the electricity generated by the power generation device 5, and supplies the stored electricity to the vibration sensor inspection device 40, the impact device 30, and the vibration sensor 20. Note that the power supply device 50 may be a primary battery, a commercial power supply, etc., or a combination of a primary battery, a commercial power supply, etc. and the above-described power storage function may be used.

[0025] The power supply device 50 shown in Fig. 3 includes a charging unit 51, a power storage unit 52, and a power supply unit 53. The charging unit 51 has, for example, a charging circuit that converts the alternating current generated by the power generation device 5 into direct current. The power storage unit 52 is, for example, a secondary battery, a capacitor, etc., and is connected to the charging unit 51 to store electricity. The power supply unit 53 supplies the electricity stored in the power storage unit 52 to the vibration sensor inspection device 40, the impact device 30, and the vibration sensor 20. Also, the power supply unit 53 is connected to another vibration detection unit 11 and can supply power to the vibration sensor 20 (second vibration sensor). Note that the power supply method may be contact power supply by cable connection or non-contact power supply via a coil.

[0026] The vibration sensor inspection device 40 shown in Fig. 3 includes an operation unit 41, a measurement unit 42, a determination unit 43, a display unit 44, a recording unit 45, and a communication unit 46. The operation unit 41 operates the impact device 30 and is, for example, an actuator that turns ON / OFF the switch 53b of the power supply unit 53 shown in Figs. 4 and 5 described later. The measurement unit 42 acquires measurement data from the vibration sensor 20.

[0027] The determination unit 43 determines the mounting state and presence or absence of abnormalities of the vibration sensor 20 based on the measurement data output from the vibration sensor 20 when an impact is applied to the vibration sensor 20 by the impact device 30. The display unit 44 is a display device that displays the determination result of the determination unit 43, etc. Note that the determination result of the determination unit 43 may be displayed on a terminal device (personal computer, smartphone, tablet terminal, etc.) owned by the administrator via the communication unit 46.

[0028] The recording unit 45 includes a hard disk drive (HDD), a solid state drive (SSD), and other flash memories (USB memory, SD card, etc.), and records the measurement data of the vibration sensor 20, the determination result of the determination unit 43, and the like. Further, a program for the determination unit 43 to read and execute is stored in the recording unit 45, and the determination unit 43 determines the attachment state of the vibration sensor 20 and the presence or absence of an abnormality according to the program. The communication unit 46 performs wired or wireless communication directly with the terminal device owned by the administrator or indirectly via a repeater, the Internet, or the like. The administrator can remotely operate the impact device 30 from a remote location at an arbitrary timing by the communication unit 46.

[0029] FIG. 4 is a configuration diagram of the impact device 30 according to an embodiment. FIG. 5 is a diagram showing the state when the impact device 30 according to an embodiment operates. As shown in FIGS. 4 and 5, the impact device 30 applies a certain impact to the vibration sensor 20 by utilizing the movement of an iron piece 32 magnetically attracted by an electromagnet 31. The impact device 30 of the present embodiment applies the operating principle of a relay, but the operating principle of other solenoid actuators may be utilized as long as it can apply a certain impact to the vibration sensor 20.

[0030] The electromagnet 31 includes a cylindrical holder 31a, an iron core 31b accommodated inside the holder 31a, and a coil 31c wound around the outside of the holder 31a. The coil 31c is connected to the power supply circuit of the power supply unit 53 of the power supply device 50. The power supply circuit is provided with a power supply 53a and a switch 53b for switching the energization and non-energization of the coil 31c.

[0031] The iron piece 32 has a plate shape bent in a V shape. The iron piece 32 is rotatably supported by a support member 35 about its bent portion 32a. The iron piece 32 is biased by a biasing member 33 by a hinge spring (not shown), and is separated from the iron core 31b of the electromagnet 31 in the non-energized state shown in FIG. 4. In the energized state shown in FIG. 5, the iron piece 32 is magnetically attached to the iron core 31b of the electromagnet 31, thereby pushing back the biasing member 33 and causing the striking member 34 to collide with the vibration sensor 20.

[0032] The striking member 34 is, for example, a plate member with a protrusion, and is disposed between the biasing member 33 and the vibration sensor 20. In the energized state shown in FIG. 5, the striking member 34 is pressed through the biasing member 33 from the iron piece 32 and elastically deformed, and collides with the vibration sensor 20. In the non-energized state shown in FIG. 4, the striking member 34 is restored and deformed and separated from the vibration sensor 20.

[0033] Subsequently, the operation of the vibration sensor inspection system 10 having the above configuration (inspection of the mounting state of the vibration sensor 20, inspection of abnormalities of the vibration sensor 20) will be described. Note that the following operations are mainly performed by the vibration sensor inspection device 40.

[0034] FIG. 6 is a flowchart for explaining the operation of the vibration sensor inspection system 10 according to an embodiment. As shown in FIG. 6, when the communication unit 46 of the vibration sensor inspection device 40 receives an external signal or a signal from a timer, it switches to the inspection mode (step S1). Note that the external signal is, for example, a signal input from the administrator's terminal device at an arbitrary timing. The signal from the timer is a signal input, for example, every month for the periodic inspection of the vibration sensor 20.

[0035] Next, the vibration sensor inspection device 40 determines whether the device under measurement 1 is operating based on the measurement data output from the vibration sensor 20 (step S2). If the device under measurement 1 is operating, the vibration sensor inspection device 40 returns to the normal measurement mode. Then, the vibration sensor inspection device 40 waits while measuring the vibration of the device under measurement 1 with the vibration sensor 20 until the next external signal or a signal from a timer is input (step S1).

[0036] If the device under measurement 1 is not operating, the vibration sensor inspection device 40 energizes the coil 31c (step S3) and operates the impact device 30 as shown in FIG. 5 described above (step S4). Next, when the vibration sensor inspection device 40 applies an impact to the vibration sensor 20 with the impact device 30, it measures the vibration generated in the vibration sensor 20 with the vibration sensor 20 (step S5). Then, the vibration sensor inspection device 40 temporarily stores the measurement data output from the vibration sensor 20 in the recording unit 45, performs frequency analysis on the measurement data, and calculates the vibration value (step S6).

[0037] Next, the vibration sensor inspection device 40 inspects the vibration sensor 20 by comparing the measurement data measured when the impact device 30 applies an impact to the vibration sensor 20 with the reference data recorded at the time of installation of the vibration sensor 20 (step S7). The reference data is the vibration measured by the vibration sensor 20 when an impact is applied to the vibration sensor 20 by the impact device 30 while the device under measurement 1 is stopped at the time of installation of the vibration sensor 20.

[0038] FIG. 7 is a graph showing the relationship between the mounting state of the vibration sensor 20 according to one embodiment and the resonance frequency. In FIG. 7, "screw fixation" indicates the case where the vibration sensor 20 is fixed to the device 1 to be measured with screws. Also, "magnet" indicates the case where the vibration sensor 20 is magnetically attached to the device 1 to be measured with a magnet. Further, "adhesive" indicates the case where the vibration sensor 20 is adhered to the device 1 to be measured with an adhesive. Also, "probe" indicates the case where the vibration sensor 20 is pressed against the device 1 to be measured by hand.

[0039] As shown in FIG. 7, the resonance frequency of the vibration sensor 20 (the peak of the graph shown in FIG. 7) changes according to the mounting state. Specifically, the resonance frequency of the vibration sensor 20 decreases in the order of "screw fixation" → "magnet" → "adhesive" → "probe" as the mounting strength becomes weaker. That is, generally, it can be seen that when the mounting of the vibration sensor 20 becomes loose, the resonance frequency of the vibration sensor 20 decreases.

[0040] Returning to FIG. 6, in step S7, when the vibration sensor inspection device 40 determines that the resonance frequency of the measurement data is lower than the resonance frequency of the reference data, it determines that the mounting of the vibration sensor 20 may be loose or detached, and determines that there is an abnormality in the mounting of the vibration sensor 20. Also, when the vibration values (amplitude, frequency, phase, etc.) of the measurement data change from the vibration values of the reference data, the vibration sensor inspection device 40 determines that there may be some abnormality other than the mounting state of the vibration sensor 20, and determines that there is an abnormality in the vibration sensor 20. On the other hand, when the resonance frequency and vibration values of the measurement data do not change or hardly change from the reference data, the vibration sensor inspection device 40 determines that it is normal.

[0041] Next, the vibration sensor inspection device 40 displays the inspection result of the vibration sensor 20 described above on the display unit 44 (step S8) and records the data in the recording unit 45 (step S9). Also, the vibration sensor inspection device 40 notifies the inspection result of the vibration sensor 20 described above to the administrator's terminal device or the like via the communication unit 46 (step S10). Thus, the inspection of the vibration sensor 20 is completed.

[0042] As described above, the vibration sensor inspection system 10 according to the present embodiment includes the device under measurement 1, the vibration sensor 20 attached to the device under measurement 1, an impact device 30 that operates at a timing independent of the device under measurement 1 and applies an impact to the vibration sensor 20, and a vibration sensor inspection device 40 that inspects the vibration sensor 20 based on the measurement data output from the vibration sensor 20 when the impact device 30 applies an impact to the vibration sensor 20. According to this configuration, the vibration sensor 20 attached to the device under measurement 1 can be inspected at an arbitrary timing without depending on the operating state of the device under measurement 1.

[0043] Further, in the present embodiment, the vibration sensor inspection device 40 frequency-analyzes the measurement data and inspects the attachment state of the vibration sensor 20 based on the change in the resonance frequency of the vibration sensor 20. According to this configuration, it is possible to inspect the attachment state of the vibration sensor 20 such as looseness.

[0044] Further, in the present embodiment, the impact device 30 applies an impact to the vibration sensor 20 at the timing when the device under measurement 1 is stopped. According to this configuration, since the operating vibration of the device under measurement 1 does not become an interference, the inspection accuracy of the vibration sensor 20 can be improved.

[0045] Further, in the present embodiment, the device under measurement 1 includes a motor unit 3, a power generation device 5 connected to the motor unit 3, and a power supply device 50 that stores the power generated by the power generation device 5, and at least one of the vibration sensor 20, the impact device 30, and the vibration sensor inspection device 40 operates by receiving power supply from the power supply device 50. According to this configuration, the vibration sensor inspection system 10 can be operated by the power generation device 5 connected to the device under measurement 1, so that the vibration sensor 20 can be inspected even in a place where it is difficult to draw a wire from a battery recharge or a commercial power supply.

[0046] Also, in the present embodiment, a second vibration sensor 20 with a different attachment position from the vibration sensor 20 is attached to the device under measurement 1, and the second vibration sensor 20 also operates by receiving power supply from the power supply device 50. According to this configuration, a plurality of vibration sensors 20 can be operated by the power generation device 5 connected to the device under measurement 1.

[0047] Also, in the present embodiment, the impact device 30 includes at least an electromagnet 31 and an iron piece 32, and uses the movement of the iron piece 32 magnetically attracted by the electromagnet 31 to apply a certain impact to the vibration sensor 20. According to this configuration, a certain impact can be applied to the vibration sensor 20 with power saving.

[0048] Also, in the present embodiment, a display unit 44 for displaying the inspection result of the vibration sensor 20 is provided. According to this configuration, an administrator or the like can confirm the inspection result of the vibration sensor 20.

[0049] Also, in the present embodiment, a communication unit 46 for remotely operating the impact device 30 is provided. According to this configuration, an administrator can inspect the vibration sensor 20 without going to the installation location of the device under measurement 1.

[0050] Also, in the present embodiment, the vibration sensor 20 and the impact device 30 are housed in a common case 13. According to this configuration, the positioning of the impact device 30 with respect to the vibration sensor 20 and the installation of the vibration sensor 20 and the impact device 30 with respect to the device under measurement 1 are facilitated.

[0051] Also, in the present embodiment, the device under measurement 1 includes a pump device and piping connected to the pump device. For example, since it is unknown when the pump device of the emergency equipment will operate, by applying the above-described vibration sensor inspection system 10, the vibration sensor 20 attached to the pump device or its piping can be inspected at an arbitrary timing.

[0052] The preferred embodiments of the present invention have been described and explained above. However, it should be understood that these are exemplary of the present invention and should not be considered as limiting. Additions, omissions, substitutions, and other modifications can be made without departing from the scope of the present invention. Therefore, the present invention should not be regarded as being limited by the foregoing description, but rather by the scope of the claims.

[0053] For example, the vibration sensor inspection system 10 may adopt a modified example as shown in FIGS. 8 and 9.

[0054] FIG. 8 is a side view of the measurement target device 1 showing the attachment state of the vibration sensor 20 and the impact device 30 according to a modified example of an embodiment. The vibration sensor 20 and the impact device 30 shown in FIG. 8 are attached to a common mounting base 12. That is, as shown in FIG. 8, the vibration sensor 20 and the impact device 30 do not have to be housed in a common case 13 (see FIG. 1). Also, the impact device 30 may be fixed to an existing vibration sensor 20.

[0055] FIG. 9 is a configuration diagram of the vibration sensor inspection system 10 according to a modified example of an embodiment. In the vibration sensor inspection system 10 shown in FIG. 9, the above-described determination unit 43 is provided in an external device 60 such as a cloud server or a personal computer. That is, the vibration sensor inspection device 40 may provide the measurement data of the vibration sensor 20 to the external device 60 through the communication unit 46, and the external device 60 may inspect the vibration sensor 20, for example, on a cloud server.

[0056] Also, for example, in the above embodiment, the pump device is exemplified as the measurement target device 1. However, for example, a generator as shown in Patent Document 1 described above may be used. Also, the measurement target device 1 may be other rotating machines such as an electric motor or an internal combustion engine, or various devices operated by the rotating machine.

Description of Reference Numerals

[0057] 1 Measurement target device 2 Pump section 2a Suction port 2b Discharge port 2c Bearing section 3 Motor section 4 Shaft coupling section 5 Power generation device 10 Vibration sensor inspection system 11 Vibration detection unit 12 Mounting base 13 Case 20 Vibration sensor 30 Impact device 31 Electromagnet 31a Holder 31b Core 31c Coil 32 Iron piece 32a Bending section 33 Biasing member 34 Striking member 35 Supporting member 40 Vibration sensor inspection device 41 Operating section 42 Measuring section 43 Determination section 44 Display section 45 Recording section 46 Communication section 50 Power supply device 51 Charging section 52 Power storage section 53 Power supply section 53a Power source 53b Switch 60 External device

Claims

1. A device under measurement, a vibration sensor attached to the device under measurement, a shock device that operates at a timing independent of the device under measurement and applies a shock to the vibration sensor, a vibration sensor inspection device that inspects the vibration sensor based on measurement data output from the vibration sensor when the shock device applies a shock to the vibration sensor, and comprising: The shock device includes at least an electromagnet and an iron piece, and uses the movement of the iron piece magnetically attracted by the electromagnet to apply a certain shock to the vibration sensor. A vibration sensor inspection system characterized by this.

2. The vibration sensor inspection device frequency-analyzes the measurement data and inspects the mounting state of the vibration sensor based on a change in the resonance frequency of the vibration sensor. The vibration sensor inspection system according to claim 1, characterized by this.

3. The shock device applies a shock to the vibration sensor at the timing when the device under measurement is stopped. The vibration sensor inspection system according to claim 1 or 2, characterized by this.

4. A rotating machine provided in the device under measurement, a power generation device connected to the rotating machine, a power supply device that stores the electric power generated by the power generation device, and comprising: At least one of the vibration sensor, the shock device, and the vibration sensor inspection device operates by receiving power supply from the power supply device. The vibration sensor inspection system according to any one of claims 1 to 3, characterized by this.

5. A second vibration sensor having a mounting position different from that of the vibration sensor is attached to the device under measurement, The second vibration sensor also operates by receiving power supply from the power supply device. The vibration sensor inspection system according to claim 4, characterized by this.

6. Comprising a display unit that displays the inspection result of the vibration sensor. The vibration sensor inspection system according to any one of claims 1 to 5, characterized by this.

7. Comprising a communication unit that remotely operates the shock device. The vibration sensor inspection system according to any one of claims 1 to 6, characterized by this.

8. The vibration sensor and the shock device are housed in a common case. The vibration sensor inspection system according to any one of claims 1 to 7, characterized by this.

9. The vibration sensor inspection system according to any one of claims 1 to 8, wherein the device to be measured includes a pump device and piping connected to the pump device.

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