Coating system, coating method, and holding device for workpieces

Abstract

The present invention relates to an apparatus (10) for holding a workpiece (30) in a process chamber. The invention also relates to a coating system (20) and a method for coating a workpiece (30). To accurately and stably support the workpiece (30) while accurately adjusting its height, the holding apparatus (10) includes a tray (72) for the workpiece (30), a height-adjustable first support element (22), and a height-adjustable second support element (48), each of the support elements (22, 48) including at least one first and second leg element (26, 56), each of the first and second leg elements (26, 56) pivotally coupled to each other about a pivot axis (X, Y), the pivot axis (X) of the first support element (22) being disposed at an angle to the pivot axis (Y) of the second support element (48).

Description

Technical Field

[0001] The present invention relates to an apparatus for holding a workpiece within a process chamber. The present invention also relates to a coating system and method for coating a workpiece.

Background Art

[0002] An apparatus for holding a workpiece is used to receive the workpiece so as to be held at a specific position within a process chamber. For example, the workpiece can be held within a coating system such as a CVD or PVD system so as to be exposed to a coating method.

[0003] Apparatuses for holding workpieces are known from the prior art in various designs.

[0004] DE10156615B4 discloses a substrate holding table including a tabletop (top plate) having a scissor mechanism. The substrate holding table can be moved or rotated in various directions.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] It is possible to consider that an object of the present invention is to provide an apparatus for holding a workpiece, a coating system including the same, and a method for coating a workpiece, which can accurately adjust the height position of the workpiece while supporting the workpiece in a safe and stable manner.

Means for Solving the Problems

[0007] The present invention relates to the coating system according to claim 1, Claim 12 to the coating method according to, and Claim 13 to the holding device according to, solve this object. Advantageous forms of the present invention are described in the respective dependent claims.

[0008] The device according to the present invention for holding a workpiece includes a tray for the workpiece, and a height-adjustable first support element and a height-adjustable second support element for the tray, and each support element as a pair of leg elements includes a first leg element and a second leg element, a first leg element and the second leg elements are pivotally coupled to each other about a pivot axis, and the pivot axis of the first support element is arranged at an angle to the pivot axis of the second support element.

[0009] Also, the tray may be of different designs. For example, the tray may be designed to provide an area that can receive the workpiece to hold it in a predetermined position. In order to ensure a high degree of flexibility so that a number of different workpieces can be held in the tray, the tray is preferably designed to be substantially flat so that, for example, a workpiece-specific holder holding the workpiece can be positioned thereon. Further, the tray area may additionally include holding means, such as notches or grooves, for the workpiece-specific holder.

[0010] The tray is arranged on the first support element and the second support element. The support elements are designed so as to be able to stably hold the tray in a predetermined position. In this connection, the support elements are designed so as to be able to adjust their height so that the position of the tray in the height direction can be changed. The height direction should be understood to mean the direction of the distance between the tray and the boundary arranged thereunder, for example the floor of the process chamber. In the following, the boundary arranged under the tray is called a standing surface without being limited to a specific embodiment. Typically, in this context, the height direction is directed (oriented) perpendicular to the standing surface, and preferably, the substantially planar tray is directed perpendicular to the height direction.

[0011] The two support elements each comprising a pair of leg elements, which are referred to as a first leg element and a second leg element. The first support element includes a first pair of leg elements (the first pair of leg elements), and the second support element includes a second pair of leg elements (the second pair of leg elements). Each pair of leg elements help to enable adjustment of the height of the corresponding support element. For this purpose, each pair the leg elements are arranged at a variable pivot angle relative to each other. Thus, due to the change in the pivot angle, the overall height of the support element including both leg elements changes. For this purpose, the leg elements are preferably designed to be rigid. They are pivotally coupled in the region of the pivot axis, for example in a common connection section, and preferably can move independently of each other about the pivot axis, and thus the pivot angle can be changed. The pivotable coupling enables continuous adjustment of the pivot angle, and as a result, continuous height adjustment is possible. The pivot axis may be defined by a straight line about which the leg elements perform a rotational movement. Further, the pivot axis may be designed as a shaft element such that the leg elements surround the shaft element in their connection section.

[0012] The first support element and the second support element are positioned relative to each other such that the pivot axis of the first support element forms an angle with the pivot axis of the second support element. The above arrangement at an angle enables the tray to be supported in at least two directions. For example, rotation of the tray about the first pivot axis can be prevented by the support element having the second pivot axis. The angle may be an acute angle or an obtuse angle. Preferably, the two pivot axes are arranged perpendicular to each other such that each support element is directed perpendicular to the movement allowed by the other support element.

[0013] The device according to the invention for holding a workpiece enables the workpiece to be held in a particularly reliable and secure manner. The support elements each prevent the tray, and thus the workpiece, from moving with a certain degree of freedom. The arrangement of the pivot axes at an angle advantageously increases the restriction (constraint) of movement because the restriction (constraint) of movement caused by the first support element overlaps with the restriction (constraint) of movement caused by the second support element. At the same time, the height adjustment function is maintained, and for example, the workpiece in the coating system can be appropriately positioned in the process chamber for the coating method. Therefore, the height of the tray can be individually adapted to workpieces of various sizes, for example.

[0014] The height adjustment functions of the first support element and / or the second support element may be designed differently. According to an advantageous development, the first support element and / or the second support element includes an adjustment element designed to change the height of the support element. For this purpose, the adjustment element may, for example, cause movement of the support element. The adjustment element may act on the entire support element or on individual components, such as leg elements. Preferably, the adjustment element may include a drive unit that can be designed as a linear or rotary drive. For example, the rotary drive unit may be a crank or a motor, and the linear drive unit may be a push rod or a traction cable, preferably a spindle drive unit.

[0015] For example, to adjust the height, the adjustment element may displace the first leg element and the second leg element relative to each other in opposite directions or relative to each other. In a preferred embodiment, the adjustment element is designed to change the pivot angle between the first leg element and the second leg element. For this purpose, the adjustment element may be coupled to the first leg element and / or the second leg element such that the first leg element and / or the second leg element pivot about a pivot axis and change their positions relative to each other. as a pair of leg elements In another advantageous embodiment, the adjustment element is designed to displace the pivot axis laterally with respect to the height direction. The direction oriented laterally with respect to the height direction may be understood as the adjustment direction and may preferably be oriented horizontally. Preferably, when the pivot axis is displaced (shifted), the end of the leg element spaced apart from the pivot axis remains substantially unmoved in the adjustment direction. More preferably, the end of the leg element is articulated to the tray and particularly preferably is also articulated to the facade. As a result, the change in the pivot angle can cause a change in the angle between the leg element and the tray and / or between the leg element and the facade. In this way, the tray can change its height while maintaining its orientation, for example remaining arranged parallel to the facade.

[0016] In another advantageous embodiment, the adjustment element is designed to displace the pivot axis laterally with respect to the height direction. The direction oriented laterally with respect to the height direction may be understood as the adjustment direction and may preferably be oriented horizontally. Preferably, when the pivot axis is displaced (shifted), the end of the leg element spaced apart from the pivot axis remains substantially unmoved in the adjustment direction. More preferably, the end of the leg element is articulated to the tray and particularly preferably is also articulated to the facade. As a result, the change in the pivot angle can cause a change in the angle between the leg element and the tray and / or between the leg element and the facade. In this way, the tray can change its height while maintaining its orientation, for example remaining arranged parallel to the facade.

[0017] In a preferred embodiment, the first support element and / or the second support element includes at least one axial spring element for applying a force in the direction of its pivot axis. The axial spring element can preferably be attached to a shaft element arranged along the pivot axis. The axial spring element can be designed as a torsion spring, a bending spring, a tension spring, or a compression spring, and is preferably a compression spring. In the case of a helical spring, the axial spring element can be advantageously arranged by being disposed around the shaft element. The axial spring element can preferably be arranged to act between the leg element and the shaft element with one end in contact with the leg element and the other end in contact with a first locking element on the shaft element. Preferably, the leg element is clamped between the axial spring element and, for example, a second locking element on the shaft element. In this way, the axial spring element can preferably act on the leg element with its spring force to reduce the backlash between the leg element and the shaft element by a preload and to impart inertia to the movement of the leg element by an additional frictional force. In this way, the stability of the tray can be improved. Further, it may be advantageous for the support element to include a plurality of axial spring elements for applying the effect of the force. For example, at least two axial spring elements may act in opposite directions with respect to the leg element and clamp it. Due to the opposite spring effects of the plurality of axial spring elements, the axial backlash can be particularly advantageously reduced between the first leg element and / or the second leg element and the shaft element.

[0018] In a preferred embodiment, a cone element (conical element) is arranged around a pivot axis, and an axial spring element acts on the cone element. The cone element is preferably arranged between the axial spring element and the leg element, whereby the axial spring element acts on the cone element in the axial direction on the one hand, and on the other hand, the cone element positions the leg element and the shaft element centrally with respect to each other. The axial spring element is attached to the shaft element adjacent to the cone element in the axial direction and abuts against the cone element. Preferably, the cone element includes a lock notch (depression) for receiving one end of the axial spring element, thereby ensuring that the axial spring element is centered on the cone element. The leg element preferably includes a conical bore for receiving the cone element at least partially in a form-fitting manner, whereby the leg element and the cone element abut against each other with as little backlash as possible. In this way, the cone element concentrates the force effect (biasing force) of the axial spring element on the leg element, as a result of which the backlash between the leg element and the shaft element in the radial and axial directions is reduced to a certain extent. Particularly preferably, at least two cone elements are arranged between the leg element and one axial spring element in each case, and the conical shapes are oriented so as to face each other in mirror symmetry, and the axial spring element and the cone elements apply forces to the leg element from two opposite sides. Furthermore, it is preferable that the cone element closely surrounds the shaft element, whereby friction imparts inertia to the relative movement between the cone element and the shaft element.

[0019] According to a preferred development, only the first support element includes an adjustment element for adjusting the height of the tray. The second support element may preferably follow the movement defined by the first support element. More preferably, the second support element may include a damping element for damping the movement, for example, to apply a preload.

[0020] According to an advantageous development, the shaft element is arranged along the pivot axis, and a radial spring element is arranged in the radial direction between one leg element of the first pair of leg elements and between the shaft element or one leg element of the second pair of leg elements and the shaft elementis arranged to act on. The radial spring element reduces the radial play thereby reducing between the leg element and the shaft element, generating additional frictional force to increase the inertia of the movement of the leg element with respect to the shaft element 。Ra The dial spring element can be designed as a torsion spring, a bending spring, a tension spring, or a compression spring, preferably a compression spring. It is attached, for example, between the first leg element and / or the second leg element and the shaft element. Preferably, the radial spring element is partially or preferably completely disposed within the bore of the leg element. Particularly preferably, the radial spring element is adapted in each case between the first leg element and the shaft element and between the second leg element and the shaft element, so that the play in the radial direction of the entire support element can be further avoided.

[0021] In an advantageous exemplary embodiment, one of a pair of leg elements The first leg element has a fork shape with a first fork arm and a second fork arm, the other of a pair of leg elements The second leg element engages between the first fork arm and the second fork arm so as to be coupled to the first leg element. forming a single extension . The first leg element includes, for example, a body that follows at least two fork arms on at least one side. Preferably, each fork arm includes a bore, and the bores are aligned with each other and disposed around the shaft element. The fork arms are spaced apart from each other in the axial direction, providing a space for the second leg element to engage therebetween. Preferably, the second leg element is disposed around the shaft element and includes a bore disposed to be aligned with the bores of the fork arms, whereby the first leg element and the second leg element are pivotably coupled to each other via the shaft element. The second leg element includes an extension designed to be disposed between the fork arms. For this purpose, the width of the extension is adapted, for example, to the distance between the fork arms, and the width is at least 95%, particularly preferably at least 98% of the said distance, so that the playis minimized. The fork arms, for example, provide support at two spaced positions of two fork arms that are immovable relative to each other, thus providing the advantage of reducing the inclination of the leg elements in the axial direction of the shaft element.

[0022] The first leg element and the second leg element particularly preferably have the same shape such that they include two fork arms and one extension disposed on each leg element away from the fork arms in the axial direction. In this way, the extension of the second leg element can be arranged to engage between the fork arms of the first leg element, and the extension of the first leg element can be arranged to engage between the fork arms of the second leg element. In this case, the shaft element is simultaneously disposed in the bores of the extensions of both leg elements and the bores of the fork arms such that the first leg element and the second leg element are pivotally coupled at two mutually spaced positions.

[0023] In an advantageous further development, the tray is at least partially laterally adjustable in the lateral direction across the height direction. For this purpose, the tray may preferably be divided into at least partially laterally adjustable sections. For example, at least one section may be attached to the support element in a stationary state, and the other sections may be designed to be laterally adjustable. The laterally adjustable sections may be movably connected to the first support element and / or the second support element, or to the stationary section. For this purpose, the laterally adjustable sections may be, for example, displaceably mounted on rails or mounted on rollers. Preferably, the laterally adjustable sections are attached to rollers that are eccentrically mounted so as to engage with recesses, and the rollers can roll laterally within the recesses to move the laterally linearly adjustable sections. Preferably, an actuating element designed to adjust the laterally adjustable sections is attached to the tray. For example, the actuating element may be a slide that pushes the laterally adjustable section on the rail. Furthermore, the actuating element may be, for example, a crank or a rotary knob for moving the roller or the eccentrically mounted roller. The tray may comprise a plurality of laterally adjustable sections that can move independently of each other. In this regard, the tray may be laterally adjustable in one or more directions across the height direction, whereby the tray can, for example, individually adapt and position the workpiece within the process chamber.

[0024] According to a preferred embodiment, at least the first leg element and the second leg element of the first support element and / or the second support element are made of graphite. The leg element may be composed of a plurality of sections made of graphite or, preferably, may be integrally formed. Due to the low coefficient of friction, graphite as the material of the leg element particularly has a positive effect on the ability of the adjacent leg elements to slide and move (slide), thus eliminating the need for lubrication, for example. Also, the low coefficient of friction of graphite is advantageous for other components of the holding device that move relative to each other while in contact. For example, when two components move relative to each other while in contact, one can be made of graphite and the other can be made of another material such as stainless steel. Particularly preferably, both components are made of graphite. Thus, in addition to the leg elements, the tray to which the support element is pivotally attached and is laterally movable may also be formed of graphite. Similarly, the facade pivotally connected to the support element may also be made of graphite. In this way, the surface properties of graphite advantageously improve the pivotability of the support element.

[0025] Components (parts) made of graphite can be press-molded into their shapes from, for example, graphite powder. Preferably, they are integrally manufactured into one part from a graphite plate, for example, by a milling machine.

[0026] Furthermore, graphite has the advantage that, due to its low coefficient of expansion, its shape only changes slightly under the influence of a temperature gradient or temperature fluctuations. The holding device can preferably be used in a process chamber for a coating method, in particular a plasma-assisted coating method at temperatures in the high temperature range. The "high temperature range" should be understood to mean a temperature range including temperatures above 300°C, preferably above 400°C. In this context, a uniform temperature may extend throughout the process chamber, and preferably, for example, there is a temperature gradient between the immediate vicinity of the workpiece and the floor of the process chamber. The temperature gradient can be, for example, between the temperature from the high temperature range and the room temperature to which the holding device is exposed. Similarly, the holding device may be exposed to a number of large temperature fluctuations, for example, when it is used in a number of coating processes that are carried out at high temperatures. When the temperature in the process chamber drops between two coating processes and / or when the holding device is removed from the process chamber, the holding device is exposed to large temperature fluctuations.

[0027] Therefore, the property of graphite with a low coefficient of expansion means that components made of graphite, such as leg elements, only distort slightly under the influence of a temperature gradient and temperature fluctuations. As a result, for example, in the case of a tight fit, the components do not exert pressure on each other or cause backlash between each other. When used in a number of coating methods, the risk that the movement of the components is restricted by jamming is kept low, so that the low warping and low frictional effect bring an advantageous effect to the holding device. Thus, graphite as a material can be advantageous for the service life of the holding device because the shape of the holding device is only slightly affected even when the number of cycles in the coating process is large.

[0028] A holding device substantially made of graphite has only a slight influence on the atmosphere in the process chamber and is thus particularly advantageous for carbon-based deposition processes such as, for example, a hot wire activated CVD coating process.

[0029] Thus, the above-described aspect of manufacturing the mutually moving components of a holding device for holding a workpiece in a process chamber from graphite may also prove to be advantageous when considered alone.

[0030] According to an alternative aspect of the present invention, Claim 13 The device for holding workpieces in a process chamber according to the present invention comprises a tray for the workpieces and a height-adjustable support element for the tray, the support element comprising at least two elements movable relative to each other, in contact with each other and made of graphite. Claim 8 The advantages arising from the features according to claim 1 also apply to this alternative aspect of the invention.

[0031] In a preferred embodiment, the first support element and / or the second support element are a first leg element and a second leg element. a pair of leg elements including In addition, as a further pair of leg elements The support includes a third leg element and a fourth leg element, which are pivotally connected to each other about a pivot axis, the pivot axis of the third leg element and the fourth leg element being arranged parallel to and at a distance from the pivot axis of the first leg element and the second leg element. Preferably, the third leg element is designed in the same way as the first leg element and the fourth leg element is designed in the same way as the second leg element. Particularly preferably, all four leg elements have the same shape. Furthermore, the third leg element and the fourth leg element are preferably arranged mirror-symmetrically to the first leg element and the second leg element, the symmetry plane of which extends parallel to the pivot axis. The support elements can be arranged with respect to each other in various ways. For example, they can be arranged side by side. Preferably, their pivot axes form a quadrangle, particularly preferably a rectangle. Thus, for example, a tray may be designed as a rectangle and placed on the support element, such that the support element is arranged to extend substantially along the side of the tray.

[0032] The coating system according to the invention comprises a process chamber having associated coating means for generating a coating on a workpiece, and a holding device arranged to be adjustable between a first position and a second position, the holding device being arranged inside the process chamber in the first position and at least partially outside the process chamber in the second position.

[0033] In this regard, the process chamber is preferably designed to be tightly sealable, for example to enable a vacuum state. The coating means can change the dominant gas composition, the temperature and / or the pressure inside the process chamber, for example to enable a coating method. For example, the coating means includes a vacuum pump, one or preferably a plurality of gas supply units, a heating device, a device for evaporating substances, and / or a device for enabling surface reactions on the workpiece, such as a device for igniting a plasma or heating the surface of the workpiece to 150 °C or more. Under these conditions, a coating can be applied to the workpiece, for example to improve the stability, hardness, or lifespan of the workpiece. For this purpose, it is preferable that a crystalline material, preferably a hard and stable material such as diamond, is deposited on the workpiece.

[0034] In the first position, the holding device is positioned inside the process chamber. Preferably, the holding device is completely positioned inside the process chamber, surrounded by the process chamber, and exposed to a defined coating atmosphere. Preferably, the holding device is stationary in the first position so that the tool held thereby does not move as much as possible.

[0035] In the second position, the holding device is positioned at least partially outside the process chamber, whereby the workpiece to be coated can be particularly easily mounted, or the coated workpiece can be removed.

[0036] According to a preferred embodiment of the coating system according to the present invention, the holding device is displaceably mounted on at least one roller made of graphite for adjustment between a first position and a second position. The roller can be mounted directly below or on the side of the holding device, for example, it can be arranged on a support element. Preferably, a base plate is arranged between the support element and the roller. Particularly preferably, the base plate has the same shape as the tray, for example, a rectangular shape. By providing the holding device on the roller, easy and safe movement between the first position and the second position becomes possible. Furthermore, the roller as an adjustment system can be implemented in a simple manner and with few components. Manufacturing the roller from graphite provides the above-mentioned advantages of graphite for components that are mounted and move relative to other components. Particularly preferably, the holding device is mounted on a plurality of rollers, particularly preferably on four rollers mounted at the four outer corners of a rectangular base plate, for example.

[0037] According to a preferred development of the coating system according to the present invention, the coating means includes filaments, i.e., wires designed such that an electric current flows through them to heat them. Preferably, they are designed to reach a temperature exceeding 150°C, particularly preferably exceeding 1000°C. When the filament is close to the surface of the workpiece, the filament preferably enables a surface reaction and heats the surface to chemically deposit a layer, particularly preferably a diamond layer, onto the workpiece from the gas phase of the solid components. Furthermore, the filament is designed, for example, to convert hydrogen gas into free radicals, and the free radicals can react with a carbonaceous gas to deposit carbon onto the workpiece in the form of diamond.

[0038] To enable heating of the surface of the workpiece and activate the hydrogen gas near the surface, the filament is preferably attached to the process chamber such that the height of the tray can be adjusted relative to the filament at the first position. For this purpose, the filament is attached above the tray within the process chamber, and by adjusting the height of the tray, the filament and the tray can be brought closer to or farther away from each other, allowing workpieces of various sizes to be placed on the tray and, at the same time, placed near the filament. Preferably, the filaments are attached within the process chamber such that they are directed perpendicular to the tray. Preferably, a plurality of filaments attached in a plane parallel to each other are disposed within the process chamber. Particularly preferably, two planes provided with filaments are disposed parallel to each other. This attachment of the filaments has proven to be particularly advantageous for heating both sides of a workpiece where the height range is dominant since, for example, the workpiece can be disposed between the planes of the filaments.

[0039] Exemplary embodiments of the present invention will be described in more detail below with reference to the drawings.

Brief Description of the Drawings

[0040]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

DETAILED DESCRIPTION OF THE INVENTION

[0041] FIG. 1 shows a first exemplary embodiment of a device 10 for holding a workpiece, hereinafter referred to as the holding device 10, and includes a lower structure portion 12, a height-adjustable first support element 22, a height-adjustable second support element 48, and a tray 72.

[0042] first Support element 22 and second support elements 48 supports the tray 72 and is fixed to the lower structure portion 12.

[0043] FIG. 2 shows the holding device 10 of FIG. 1, and the illustrated components are displaced in the direction of the arrows for an exploded view.

[0044] The lower structure portion 12 consists of a base plate 14 and four rollers 16. The base plate 14 is a rectangular planar graphite plate having two longitudinal sides and two short sides. Three metal fastening blocks 18a, 18b are attached to the upper side of the base plate at both short sides and in the center for attaching the rollers 16 and the support elements 22, 48. The four rollers 16 are connected so as to be rotatable, and for this purpose, each pair is connected by a shaft. In each case, one shaft is attached to the fastening block 18a at the short side of the base plate 14.

[0045] The first support element 22 includes two longitudinal support units 24 designed to be mirror-symmetrical, one of which is shown in FIG. 4, and as the first pair of leg elements two longitudinal leg elements 26 and as the first shaft elementIt includes a shaft element 34.

[0046] The longitudinal leg elements 26 are each cut from a rectangular graphite plate such that they have extensions at their longitudinal sides. The two fork extensions 28a are arranged close to each other so as to form a fork. The single extension 32a is arranged away from the fork at the longitudinal side.

[0047] In each case, the two longitudinal leg elements 26 are joined via the shaft element 34. In each case, one single extension 32a engages between the fork extensions 28a, and the shaft element 34 extends into a bore (hole) arranged to penetrate the extensions 28a, 32a of both longitudinal leg elements 26. Thus, both longitudinal leg elements 26 are pivotally joined about a longitudinal pivot axis X. In this regard, they are articulated to each other via a shaft element 34 arranged along the longitudinal pivot axis X, and thus the angle between the two can be changed.

[0048] The two longitudinal fastening shafts 36 extend through the outer longitudinal sides of both longitudinal support units 24 for pivotally attaching the first support element 22 to the substructure 12 and the tray 72.

[0049] An axial clamping unit 37 in which a cone 44, an axial spring 38, and a lock ring 46 each cooperate is attached to the shaft element 34 and the longitudinal fastening shaft 36. The axial clamping unit 37 is attached to the shaft element 34 on both outer sides of both forks on the one hand (see FIG. 4), and to the longitudinal fastening shaft 36 on both outer sides of the longitudinal leg elements on the other hand (see FIG. 2). The axial clamping unit 37 exerts a biasing force (preload) on the articulated connection of the longitudinal leg elements on the shaft element 34 and the longitudinal fastening shaft 36 in the axial direction.

[0050] The second support element 48 includes two laterally support units 52 designed to be mirror-symmetrical, and an adjustment element 54. In this regard, FIG. 3 shows a part of the laterally support unit 52 and the adjustment element 54 connected thereto. The adjustment element 54 is designed to be symmetrical, and the two laterally support units 52 are attached in a mirror-symmetrical manner. Each of the laterally support units 52 as the second pair of leg elements includes two laterally leg elements 56, which are identical and provided as graphite plates. Similar to the longitudinal leg element 26, two fork extensions 28b and a single extension 32b are arranged on their longitudinal sides.

[0051] as the second shaft element Two screws 58 are arranged axially apart from each other along the lateral pivot axis Y such that the two fork extensions 28b are pivotally coupled to a single extension 32b via one screw 58 each.

[0052] The adjustment element 54 is designed as a spindle and includes a spindle male thread 64 on each of its two sides, which engages with a female thread nut 66 respectively. Also, on one side of the adjustment element 54, a coupling element 68 (see FIG. 2) is arranged, for example, to rotate the spindle 54 with a wrench.

[0053] The female thread nut 66 is arranged between the two forks of the laterally support unit 52 and is coupled to the laterally support unit 52 by being screwed from both sides by the screw 58. The female thread nut 66 is on the lateral pivot axis Y, thereby being transversely bisected, and the axis of the adjustment element 54 is aligned perpendicular to the axis Y. One of the two female thread nuts 66 includes a clockwise female thread, and the other includes a counterclockwise female thread. Their movements are opposite during the rotation of the adjustment element 54, and they move towards each other or away from each other.

[0054] The two lateral fastening shafts 62 extend through the outer longitudinal side portions of both lateral support units in order to pivotally attach the second support element 48 to the lower structure 12 and the tray 72. 52 and extend through the outer longitudinal side portions of both lateral support units.

[0055] The tray 72 includes a fastening unit 74, an actuating unit 76, and a support unit 78. The support unit 78 is above the fastening unit 74, and both of them house the actuating unit 76 inside them.

[0056] The fastening unit 74 includes a flat rectangular fastening plate 82 made of graphite plate. It includes three elongate recesses 84 extending parallel to its longitudinal side portions. Similar to the base plate 14, on the lower side of the fastening plate 82, two fastening blocks 18a are arranged at the short side portions, and one fastening block 18b is arranged at the center of the fastening plate 82.

[0057] The actuating unit 76 includes three identical eccentric shafts 86, and at both ends thereof, one eccentric wheel 88 is attached respectively. All six eccentric wheels 88 have the same shape.

[0058] The support unit 78 is composed of three separate flat rectangular support plates 92, which are made of graphite plate and have longitudinal recesses (not shown) on their lower sides. A plurality of ridges are provided on all three support plates 92 so as to form longitudinal guide grooves 94.

[0059] The actuating unit 76 lies in the recesses of the fastening unit 84 and the support unit 78 such that the eccentric shaft 86 can rotate and the eccentric wheel 88 can execute rotational and linear motion. In either case, one support plate 92 lies on one eccentric shaft 86 having two eccentric wheels 88, and the eccentric shaft 86 and the eccentric wheels 88 are arranged inside the recess of the support plate 92. Therefore, by rotating one eccentric shaft 86, the support plate 92 resting thereon can be adjusted in the lateral direction with respect to the fastening plate 82.

[0060] The lower structure 12, the two support elements 22, 48, and the tray 72 are interconnected via a longitudinal fastening shaft 36 and a lateral fastening shaft 62 rotatably attached to the fastening blocks 18a, 18b (see FIG. 1). For both the longitudinal support units 24 and both the lateral support units 52, in each case, one longitudinal fastening shaft 36 and one lateral fastening shaft 62 are articulated to the fastening blocks 18a, 18b on the base plate 14 and also to the fastening blocks 18a, 18b on the fastening plate 82, respectively.

[0061] The tray 72 is aligned parallel to the lower structure 12 and its height can be adjusted by the second support element 48. For this purpose, its height is adjusted by an adjustment element 54 that changes the distance between the lower structure 12 and the tray 72.

[0062] The height adjustment function of the second support element 48 is implemented by a toggle joint. Three shafts, namely, the lateral pivot axis Y and the two lateral fastening shafts 62, are articulated to each other via the lateral leg elements 56. The two lateral leg elements 56 are coupled to each other and to the adjustment element 54 within the lateral pivot axis Y such that the adjustment element 54 can be displaced laterally across the height adjustment direction of the lateral pivot axis Y, and thus, the articulated joints of the lateral leg elements 56 can be bent or extended. In this way, the lower structure 12 part and the tray 72During height adjustment, they remain aligned and parallel to each other.

[0063] Figure 5 shows a cross-section of one of the two longitudinal leg elements 26 with an axial clamping unit 37. The cone 44 has a bore adapted to the shaft element 34 such that the cone 44 fits closely around it. Further, the tapered portion of the cone 44 is positioned to fit closely into a similarly tapered recess in the longitudinal leg element 26, whereby the cone is partially surrounded by the longitudinal leg element. On the outside of the longitudinal leg element 26, in cross-section, the cone 44 includes a notch in which the cone receives it to hold the axial spring 38, ensuring optimal transmission of the force from the axial spring 38 to the longitudinal leg element 26. The other end of the axial spring 38 is held by a stationary locking ring 46. The axial spring 38 is preloaded between the cone 44 and the locking ring 46, generating a force in the direction of the axis X. The two axial clamping units 37 clamp the forks on both sides and position the shaft element 34 at the center of the bore of the longitudinal leg element 26 (see Figure 4). In this way, the backlash of the longitudinal leg element 26, particularly in the direction of the axis X, is reduced, the friction at the joint formed by the two longitudinal leg elements 26 is increased, and the inertia of the movement of the longitudinal leg element 26 is increased.

[0064] Figure 6 shows the arrangement of the radial spring 42 inside the longitudinal leg element 26, more specifically in a single extension 32a. It is oriented perpendicular to the axis X and mounted in a bore, acting between the longitudinal leg element 26 and the shaft element 34. It exerts a biasing force to reduce backlash and increase friction. For the longitudinal support unit 24, the radial springs 42 are attached to both longitudinal leg elements 26 and act on the shaft element 34 from opposite directions.

[0065] Also, the radial spring 42 is inserted in the same way into a single extension 32a of the second support element 48 (not shown).

[0066] The first support element 22 does not have a height adjustment function for the holding device 10, but rather only has a support function along the longitudinal side portions of the tray 72. The second support element 48 has, in addition to the height adjustment function, a support function along the lateral side portions of the tray 72. In this way, the support forces are directed perpendicular to each other, increasing the range of directions in which backlash is reduced. The spacing between the longitudinal support units 24, the spacing between the lateral support units 52, and the damping of the movement of the first support element 22 result in a stable holding of the tray 72 without rattling.

[0067] Figures 7 and 8 schematically show how the holding device 10 can be used in the coating system 20.

[0068] The coating system 20 is designed for the hot-wire activated CVD coating method. The filaments 96 are mounted in two mutually parallel planes and are aligned perpendicular to the tray 72.

[0069] Figure 7 shows a row of workpiece pieces 30 held by the holding device 10 between the planes of the two filaments 96. The guide grooves 94 hold the workpiece holder with the workpiece pieces 30 firmly positioned in the upright position. Due to the above-described height and lateral adjustment functions, the workpiece pieces 30 can be positioned with high precision such that they are accurately arranged between the two planes and are exposed, for example, to a local high temperature of 600 °C locally generated by the filaments. Also, the workpiece pieces can be arranged on other support plates 92.

[0070] To attach the workpiece 30 to the holding device 10 or to remove them after the coating process, the holding device 10 is placed in the mounting position and rolled out onto the withdrawal base from the coating system 20. To coat the workpiece 30, the holding device 10 is fully rolled into the coating system 20 and placed in the coating position. Also, the withdrawal base is pushed in. Due to the arrangement of the support elements 22, 48 and the preloading (preloading) of the articulated joints, the switching between the mounting and coating positions is carried out with a backlash-free movement.

Explanation of symbols

[0071] 10 Holding device 12 Lower structure part 14 Base plate 16 Roller 18a Fastening block 18b Fastening block 20 Coating system 22 First support element 24 Longitudinal support unit 26 Longitudinal leg element 28a Fork extension of the first support element 28b Fork extension of the second support element 30 Workpiece 32a Single extension of the first support element 32b Of the second support element single Extension 34 Shaft element 36 Longitudinal fastening shaft 37 Axial clamping unit 38 Axial spring 42 Radial spring 44 Cone 46 Lock ring 48 Second support element 52 Lateral support unit 54 Adjusting element 56 Lateral leg element 58 Screw 62 Lateral fastening shaft 64 Spindle male screw 66 Female screw nut 68 Joint element 72 Tray 74 Fastening unit 76 Actuating unit 78 Support unit 82 Fastening plate 84 Recess of the fastening plate 86 Eccentric shaft 88 Eccentric wheel 92 Support plate 94 Guide groove 96 Filament 98 Junction box X Longitudinal pivot axis Y Lateral pivot axis

Claims

1. A process chamber having associated CVD coating means (96) for generating a CVD coating on a workpiece (30), a holding device (10) for holding the workpiece (30) within the process chamber and displaceable between a first position disposed at least partially inside the process chamber and a second position disposed at least partially outside the process chamber, the holding device (10) including a tray (72) for the workpiece (30) and first and second support elements (22, 48) for adjusting the height of the tray (72), the first support element (22) including a first pair of leg elements (26) pivotally connected to each other about a pivot axis (X) via a first shaft element (34) disposed along the pivot axis (X), the second support element (48) including a second pair of leg elements (56) pivotally connected to each other about a pivot axis (Y) via a second shaft element (58) disposed along a pivot axis (Y) angled with respect to the pivot axis (X), a coating system characterized by the above.

2. The first support element (22) and / or the second support element (48) includes an adjustment element (54) for changing the pivot angle between the first pair of leg elements (26) and / or the second pair of leg elements (56) to adjust the height of the tray (72). The coating system according to claim 1, characterized by the above.

3. The first support element (22) and / or the second support element (48) includes at least one axial spring element (38) for applying a force effect in the direction of the pivot axis (X) and / or the pivot axis (Y). The coating system according to claim 1 or 2, characterized by the above.

4. A cone element (44) is disposed around the pivot axis (X) and / or the pivot axis (Y), and the axial spring element (38) acts on the cone element (44). The coating system according to claim 3, characterized by the above.

5. A radial spring element (42) is disposed to act radially between one leg element (26) of the first pair of leg elements (26) and the first shaft element (34), or between one leg element (56) of the second pair of leg elements (56) and the second shaft element (58). The coating system according to any one of claims 1 to 4, characterized in that...

6. Each of the first pair of leg elements (26) includes a fork extension (28a) and a single extension (32a), wherein one of the fork extensions (28a) of the first pair of leg elements (26) is engaged with the single extension (32a) of the other of the first pair of leg elements (26), and one of the single extensions (32a) of the first pair of leg elements (26) is engaged with the fork extension (32a) of the other of the first pair of leg elements (26). The coating system according to any one of claims 1 to 5, characterized in that...

7. The tray (72) is at least partially adjustable in a lateral direction transverse to the vertical direction. The coating system according to any one of claims 1 to 6, characterized in that...

8. The first pair of leg elements (26) and / or the second pair of leg elements (56) are made of graphite. The coating system according to any one of claims 1 to 7, characterized in that...

9. The first support element (22) includes two longitudinal support units (24, 24) arranged on both sides along the longitudinal direction of the tray (72), the longitudinal support unit (24) includes the first pair of leg elements (26) and the first shaft element (34), the second support element (48) includes two lateral support units (52, 52) arranged on both sides along a lateral direction transverse to the longitudinal direction of the tray (72), and the lateral support unit (52) includes the second pair of leg elements (56) and the second shaft element (58). The coating system according to any one of claims 1 to 8, characterized in that...

10. The holding device (10) is arranged to be displaceable on at least one roller (16) for movement between the first position and the second position, and the roller (16) is manufactured from graphite. The coating system according to any one of claims 1 to 9, characterized in that...

11. The CVD coating means includes a filament (96) arranged in the process chamber, and the height of the tray (72) is adjustable with respect to the filament (96) at the first position. The coating system according to any one of claims 1 to 10, characterized in that...

12. The workpiece (30) to be coated is arranged in the process chamber of the coating system (20) according to any one of claims 1 to 11, and is coated by a plasma method. A coating method for coating a workpiece, characterized in that...

13. A holding device for holding a workpiece (30) in a process chamber, comprising: a tray (72) for the workpiece (30); and a first support element (22) and a second support element (48) for adjusting the height of the tray (72), wherein the first support element (22) is pivotally connected to each other via a first shaft element (34) arranged along a pivot axis (X) so as to be pivotable about the pivot axis (X), and includes a first pair of leg elements (26) made of graphite, and the second support element (48) is pivotally connected to each other via a second shaft element (58) arranged along a pivot axis (Y) angled with respect to the pivot axis (X) so as to be pivotable about the pivot axis (Y), and includes a second pair of leg elements (56) made of graphite. A holding device, characterized in that...

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