Load port module

Abstract

The substrate mounting apparatus includes a frame configured to connect the substrate mounting apparatus to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate mounting apparatus and the substrate processing apparatus; at least one substrate cassette container, the cassette support connected to the frame for holding the at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening; and a cassette support purge port having two or more purge port nozzle positions disposed on the cassette support, each of the two or more purge port nozzle positions configured to purge a small amount of the at least one substrate cassette container. and a cassette support purge port configured to couple to at least one purge port, each purge port nozzle location defining an interchangeable purge port nozzle interface, whereby different interchangeable purge port nozzles correspond to different interchangeable purge port nozzle modules, each having a different predetermined purge nozzle configuration, and different interchangeable purge port nozzles are adapted to, and provide coupling with, different ports of, the at least one purge port, having different purge port characteristics, of different substrate cassette receptacles of the at least one substrate cassette receptacle, and are removably attached to the purge port nozzle interface of each of the two or more purge port nozzle locations, corresponding to the different predetermined purge nozzle configurations of the interchangeable purge port nozzle modules.

Description

Technical Field

[0001] [Cross - Reference to Related Applications] This non - provisional patent application claims priority and the benefit thereof from U.S. Provisional Patent Application No. 62 / 772,481, filed on November 28, 2018, the entire disclosure of which is incorporated herein by reference.

[0002] Aspects of the present disclosure generally relate to a substrate processing apparatus, and more particularly, to an improved load port module for a substrate processing apparatus.

Background Art

[0003] [Brief Description of Related Developments] Generally, clean dry air / gas - compatible load ports used in semiconductor manufacturing are utilized to purge substrate carrier containers (referred to herein as containers), such as front - opening unified pods (FOUPs). FOUPS with purge options generally include port locations at the front and / or rear (e.g., for the passage openings of the container substrate). As an example, 300 - mm FOUPS with purge options are manufactured by different manufacturers including, but not limited to, Entegris, Inc., Shin - Etsu Polymer Co., Ltd., and Miraial Co., Ltd., but there is no industry standard regarding the purge port locations of FOUPs on the containers.

[0004] Given that there is no industry standard regarding the purge port location, the purge port location can vary from manufacturer to manufacturer. As an example, among the aforementioned manufacturers, there can be three different locations for the front purge port and two different locations for the rear purge port. The number of purge ports can also vary from manufacturer to manufacturer. The number of purge ports can also vary between different products from the same manufacturer. For example, some FOUPS have only two front purge ports, while others have two front purge ports and two rear purge ports. The flow of purge gas into and out of the FOUPS can also vary in that the destinations of the input ports and / or exhaust ports of the purge ports on the FOUPS can be various.

[0005] The purge port mating interface (i.e., the portion of the purge port that mates with the purge nozzle of the load port) is another variable among manufacturers. For example, some FOUPS have a rigid plastic purge port mating interface, while others have a purge port mating interface of other types, such as fluororubber (e.g., those sold under the trade name Viton by DuPont Performance Elastomers LLC). SUMMARY OF THE INVENTION

[0006] The foregoing aspects and other features of the present disclosure are described in the following description obtained in connection with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0007]

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Mode for Carrying Out the Invention

[0008] Referring to FIG. 1A, a perspective view of a substrate processing apparatus 10 embodying the features of the present disclosure is illustrated. Although the present disclosure is described with reference to the drawings, it should be understood that it can be embodied in many alternative forms of the aspects. Further, any suitable size, shape, or type of element or material can be used.

[0009] In the embodiment illustrated in FIG. 1A, the substrate processing apparatus 10 is shown as having the configuration of a general substrate batch processing tool, for example, for illustrative purposes only. In alternative embodiments, the features of the present invention are equally applicable to any substrate processing tool configuration, including tools for processing individual substrates and / or linear tool stations, such as those described in U.S. Patent Application No. 11 / 442,511, filed May 26, 2006, titled "Linearly Distributed Semiconductor Workpiece Processing Tool," which is illustrated in FIGS. 1B and 1C and incorporated herein by reference in its entirety. Thus, the substrate processing apparatus may have any other suitable configuration. The apparatus 10 can handle and process any desired type of flat panel or substrate, such as 200 mm or 300 mm semiconductor wafers, semiconductor packaging substrates (e.g., high density interconnects), semiconductor manufacturing process imaging plates (e.g., masks or reticles), and substrates for flat panel displays. The apparatus 10 may generally comprise a front section 12 and a rear section 14. The front section 12 (the term "front" is used herein for convenience to identify an exemplary reference frame; in alternative embodiments, the front of the substrate processing apparatus may be established on any desired side of the substrate processing apparatus). The front section 12 has a system (as described in more detail below) that provides an interface to allow the transfer of substrates from the fab into the interior of the substrate processing apparatus 10. The front section 12 also generally has an automatic component disposed within the housing processing substrate, between the housing 16 and the front section interface with the rear section 14 and the exterior. The rear section 14 is connected to the housing 16 of the front section. The rear section 14 of the substrate processing apparatus may have a controlled atmosphere (e.g., vacuum, inert gas) and generally comprises a processing system for processing substrates.For example, the post-section may generally include a central transfer chamber equipped with a substrate transfer device and peripheral processing modules for performing desired manufacturing processes (e.g., etching, material film formation, cleaning, firing, inspection, etc.) on substrates within the substrate processing apparatus. Substrates can be transported within the fab to the substrate processing apparatus 10 within a container T (also known as a carrier). The container T can be on or positioned proximate to the pre-section interface. From the container, the substrates can enter the pre-section 12 using automated components in the pre-section through an interface such as a BOLTS (Box Opener / Loader Two-to-Tool Standard) interface. The substrates can be transported through a load lock to the atmosphere-controlled post-section for processing in one or more of the peripheral processing modules. Thereafter, the processed substrates can be returned to the pre-section 12 in a substantially reverse manner and then returned to the transport container T for movement.

[0010] The front section 12, which may be referred to as an environmental front-end module or EFEM, may have a shell or casing that defines a protected environment or mini-environment, in which the substrate can be accessed and handled with minimal possibility of contamination between the transfer container T used to transfer the substrate within the FAB and the load lock 14L that provides an inlet to the controlled atmosphere in the post-processing section 14. A load port or load port module 24 (the number being one or more, as further described below) is disposed on one or more of the sides of the front section, providing an interface between the front section and the FAB. The load port module may be somewhat similar to that described in U.S. Patent No. 8,821,099, entitled "Load Port Module," which received a patent allowance on September 2, 2014, the entire disclosure of which is incorporated herein by reference. The load port module 24 may have a closable port 30P that forms a closable interface, such as a BOLTS interface, between the inside and outside of the EFEM. As seen in FIG. 1A, the load port module may have a support area for the substrate transfer container T. A secondary holding area may also be provided under the support area, where the transfer container can be temporarily buffered. The transfer container support area may enable the automatic movement of the transfer container T supported thereon to its final or docked position. The port door of the load port module engages the transfer container when in the docked position to open the transfer container and simultaneously open the access port 30P within the load port frame, providing access to the substrate within the transfer container and also providing access for transferring the substrate between the transfer container and the interior of the EFEM. As described in U.S. Patent No. 8,821,099, the engagement between the port door and the transfer container can be effected by independently operable keys.

[0011] According to aspects of the present disclosure, the (one or more) load port modules 24 described herein are clean dry air / gas compatible load port modules that provide a reconfigurable purge nozzle configuration (see FIG. 8, which illustrates different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B). The purge nozzle configuration can be selected from several different purge nozzle configurations, for example, depending on the configuration of the container T coupled to the load port module 24. Conventionally, load port manufacturers provide a single purge nozzle configuration on a load port that is tailored to a single type of container having a predetermined purge port configuration. The (one or more) load ports 24 according to aspects of the present disclosure provide a flexible load port 24 in that the purge nozzles 900-903 (FIG. 9A) of the load port module 24 can be reconfigured modularly so that semiconductor manufacturers are not limited to using only a single type of container from a single container manufacturer. The (one or more) load port modules 24 of the present disclosure provide the use of containers having different purge port configurations without the cost and logistics of manufacturing different load port modules for each container purge port configuration. The (one or more) load port modules 24 of the present disclosure can also provide an on-the-fly (or otherwise referred to herein as high-speed switching) reconfiguration of the position of the purge nozzles 900-903 (FIG. 9A), several of the purge nozzles 900-903, and the designation of the purge nozzles as input or output nozzles.It should be noted that the on-the-fly reconfiguration is such that the purge nozzles 900 - 903 are reconfigured / relocated as desired by the load port manufacturer and / or end user / customer according to the type of container used at a specific time within the semiconductor manufacturing environment. The purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TAFLU, 1910TBFLU, 1910TCFLU, 1910TDFLU, 1910TEFLU, 1910TFFLU, 1910TGFLU, 1910THFLU, 1910TIFLU, 1910TJFLU (generally referred to herein as purge nozzle module 1910; see FIGS. 9B, 9C, 9F, 9G) and the purge nozzle modules 910T, 910TA, 910TB, 910TC, 910TD, 910TE, 910TF, 910TG, 910TH, 910TI, 910TJ, 910T1, 910TA1, 910TB1, 910TC1, 910TD1, 910TE1, 910TF1, 910TG1, 910TH1, 910TI1, 910TJ1 (generally referred to herein as purge nozzle module 910; see FIG. 9A) are rapidly exchanged and are arranged at a predetermined fixed position corresponding to a predetermined purge nozzle configuration of the container T without repositioning the original locations of the purge nozzles 900 - 903 on the load port 24 after connecting the purge nozzle modules 1910, 910 to the load port 24. As described herein, each of the replaceable purge port nozzle interfaces and each one of the different replaceable purge port nozzle modules 1910, 910 with one different predetermined purge nozzle configuration are configured to effect a rapid exchange attachment of each one of the different replaceable purge port nozzle modules 1910, 910 with another one of the different replaceable purge port nozzle modules 1910, 910.Suitable containers T (see also containers TA - TJ) that can be used in aspects of the present disclosure are FOUPS manufactured by Entegris, Inc., Shin-Etsu Polymer Co., Ltd., and Miraial Co., Ltd. (for example, in one aspect, containers T - TJ can correspond to CT - CF - S_SHIN_ETSY, T - CF - S_SHIN_ETSY, CF - A_SHIN - ENSY, OB - CB_SHIN_ETSY of Shin-Etsu Polymer Co., Ltd., Spectra (trademark), A300, F300 of Entegris, Inc., and 4 - port and 2 - port FOUPS of Miraial Co., Ltd., etc.).

[0012] As described herein, each purge nozzle 900 - 903 of the load port 24 can be moved by an operator to any one of several predetermined purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B (FIG. 8). Flexible fluid hoses 10020 - 10023 (FIG. 10) selectively connect each purge nozzle 900 - 903 (FIG. 9) to either the input gas manifold 10030 (FIG. 10) or the exhaust gas manifold 10040 (FIG. 10) at least in part. The type of purge nozzle configuration (for interface connection with, for example, the purge port of the rigid plastic construction of container T, the purge port of the fluororubber (such as those sold under the trade name Viton by DuPont Performance Elastomers LLC) construction of container T, or any other suitably configured purge port of container T) can also be selected from several different interchangeable purge nozzle configurations depending on the purge nozzle mating interface of container T selected for use with the load port 24. It is noted that although aspects of the present disclosure are described with respect to a front - opening - unified - pod (FOUP) type container T, it can be equally deployed for use in any desired type of transport container, including but not limited to SMIF containers.

[0013] Referring now to FIG. 1B, a schematic plan view of a linear substrate processing system 2010 is shown, where a tool interface section 2012 is generally mounted to a transfer chamber module 3018 so as to face (e.g., inwardly) along the longitudinal axis X of the transfer chamber 3018, but offset therefrom. The transfer chamber module 3018 can extend in any suitable direction by attaching other transfer chamber modules 3018A, 30181, 3018J to interfaces 2050, 2060, 2070, as described in U.S. patent application Ser. No. 11 / 442,511, which is hereby incorporated by reference. Each transfer chamber module 3018, 3019A, 3018I, 3018J includes a substrate transfer device 2080 for transporting substrates to and from, for example, a processing module PM throughout the processing system 2010. As can be appreciated, each chamber module can be capable of maintaining an isolated, controlled or sealed atmosphere (e.g., N2, clean air, vacuum).

[0014] Referring to FIG. 1C, a schematic elevation view of a typical processing tool 410 that can be obtained along the longitudinal axis X of the linear transfer chamber 416 is shown. In one aspect, as shown in FIG. 1C, the tool interface section 12 can typically be connected to the transfer chamber 416. In this aspect, the interface section 12 can define one end of the tool transfer chamber 416. As seen in FIG. 1C, the transfer chamber 416 can have, for example, another workpiece inlet / outlet station 412 at the end opposite the interface section 12. In other aspects, other inlet / outlet stations for inserting / removing workpieces from the transfer chamber can be provided, such as between the ends of the tool transfer chamber 416. In one aspect of the present disclosure, the interface section 12 and the inlet / outlet station 412 can enable the placement and removal of workpieces from the tool. In other aspects, the workpiece can be placed on the tool from one end and removed from the other end. In one aspect, the transfer chamber 416 can have one or more transfer chamber modules 18B, 18i. Each chamber module can maintain an isolation atmosphere, a controlled atmosphere, or a sealed atmosphere (e.g., N2, clean air, vacuum). As described above, the configuration / arrangement of the workpiece stations forming the transfer chamber modules 18B, 18i, the load lock modules 56A, 56B, and the transfer chamber 416 shown in FIG. 1C is merely exemplary, and in other aspects, the transfer chamber can have more or fewer modules arranged in any module configuration. In one aspect, the station 412 can be a load lock. In other aspects, a load lock module can be arranged between the end inlet / outlet stations (similar to station 412), or an adjacent transfer chamber module (similar to module 18i) can be configured to operate as a load lock. Also as described above, the transfer chamber modules 18B, 18i have one or more corresponding transfer devices 26B, 26i disposed therein. The transfer devices 26B, 26i of each transfer chamber module 18B, 18i can cooperate to provide a workpiece transfer system 420 that is linearly distributed within the transfer chamber.In other aspects, the transfer chamber module 18B can be configured such that any suitable transport cart (not shown) can move between the transfer chamber modules 18B along at least a portion of the full length of the linear transfer chamber 416. As can be understood, the transport cart 900 can include any suitable transport device attached thereto and substantially similar to these transport devices described herein. As shown in FIG. 1C, in one aspect, the arm of the transport device 26B can be arranged to provide what can be referred to as a high-speed exchange arrangement that enables the transport device to quickly exchange wafers from a pick / place position, as will be described in more detail below. The transport arm 26B can have a suitable drive section to provide each arm with three degrees of freedom (e.g., independent rotations about the joints of the shoulder and elbow in Z-axis motion) from a simplified drive system compared to conventional drive systems. In other aspects, the drive section can provide more than three or less than three degrees of freedom to the arm. As seen in FIG. 1C, in one aspect, the modules 56A, 56, 30i can be arranged in the gaps between the transfer chamber modules 18B, 18i and can define a suitable (one or more) processing module, load lock, buffer station, measurement station, or any other desired station. For example, intervening modules such as load locks 56A, 56 and workpiece stations 30i can each have fixed workpiece supports / shelves 56S, 56S1, 56S2, 30S1, 30S2 that cooperate with the transport arm to effect transport or workpieces over the full length of the transfer chamber along the linear axis X of the transfer chamber. As an example, the (one or more) workpieces can be placed in the transfer chamber 416 by the interface section 12. The (one or more) workpieces can be placed on the (one or more) supports of the load lock module 56A by the transport arm 15 of the interface section.One or more workpieces within load lock module 56A may be moved between load lock module 56A and load lock module 56 by transfer arm 26B within module 18B, and in a similar and continuous manner, by arm 26i (within module 18i) between load lock 56 and workpiece station 30i and by arm 26i within module 18i between station 30i and station 412. This process may be reversed, in whole or in part, to move one or more workpieces in the opposite direction. Thus, in one aspect, a workpiece may move in any direction along axis X and to any position along the transfer chamber, and may be placed on and removed from any desired module (processing module or other module) communicating with the transfer chamber. In other aspects, an intervening transfer chamber module with a static workpiece support or shelf may not be provided between transfer chamber modules 18B, 18i. In such aspects of the present disclosure, the transfer arms of adjacent transfer chamber modules may pass a workpiece directly (or via use of a buffer station) from an end effector or one transfer arm to an end effector of another transfer arm to move the workpiece through the transfer chamber. Processing station modules may operate on a substrate via various film deposition, etching, or other types of processes to form an electrical circuit or other desired structure on the substrate. Processing station modules are connected to transfer chamber modules to enable passage of substrates to and from the processing stations. A suitable example of a processing tool having general features similar to the processing apparatus shown in FIG. 1C is described in U.S. Patent Application No. 11 / 442,511, which is hereby incorporated by reference in its entirety.

[0015] (FIG. 1A and 2 are perspective views of a load port module 24 of a processing apparatus according to this exemplary aspect of the present disclosure.) Referring to FIGS. 1A and 2, the load port module 24 has a frame 29 configured to connect the load port module 24 to any suitable processing apparatus. The frame 29 of the load port module 24 may generally define a carrier container holding or supporting area 28 and a closable port 30P (or transfer opening) (as described above), through which a substrate enters and exits and is transferred to a mini-environment within the housing 16 of the front section. (In other aspects, the closable port 30P is a transfer opening, through which a substrate is transferred between the load port module 24 and any suitable processing apparatus such as an EFEM, a processing module, a transfer chamber, etc.) The load port module 24 may be substantially similar to that described in U.S. Patent No. 8,821,099, titled "Load Port Module," which was issued a patent examination on September 2, 2014, the entire disclosure of which is incorporated herein by reference. The housing 16 of the load port module 24 and the EFEM are connected, as further described below, to form a chamber or space 25 that is substantially closed from the outside and provides a control environment or a mini-environment within the front section 12 (also referred to as the EFEM) as described above. For example, the front section may include a controlled air flow system (not shown) such as a vent, a louver, a laminar flow system, etc. to avoid particle contamination from entering the mini-environment of the front section 12. As seen in FIGS. 1A and 2, the carrier container holding area 28 of the load port module 24 may have a primary or first station 36 and a secondary station 34. In this aspect, each station 36, 34 of the carrier container holding area 28 is capable of holding a carrier container T, but in alternative embodiments, the carrier container holding area may have more or fewer holding stations, and each holding station may be capable of supporting any desired number of substrate carrier containers.The transport container T (FIG. 1A) shown seated on the hold (or cassette support) stations 36, 34 is shown as a front-opening unified pod (FOUP)-type container for illustrative purposes, but in alternative embodiments, the hold stations in the load port hold area may be capable of supporting any desired type of transport container, such as a SMIF container.

[0016] In the aspect shown in FIG. 1A, the front section 12 has, for illustrative purposes, a load port module 24 disposed on the front face 12F of the front section 12. In this position, the load port module 24 can be positioned to facilitate the placement and removal of the transport container T onto at least one of the hold (or cassette support) stations 34, 36 of the load port module hold area 28 using any suitable automated material handling system (AMHS) (not shown). As seen in FIGS. 1A-2, the load port module hold area 28 projects forwardly from the front face 12F of the front section, and access for removal / placement of the transport container T onto the hold area 28 using the AMHS can be from above or from the front. In alternative embodiments, the load port module can be disposed on other sides of the front section as required. In yet other alternative embodiments, the load port module can be disposed on two or more sides of the front section 12. As seen in FIG. 2, the load port module 24 in this exemplary aspect can have an extension zone 38 that projects outwardly from the base plate of the load port module 24.

[0017] Referring also to FIGS. 1A - 3, the carrier container holding area 28 of the load port module 24 may have both upper 36 and lower 34 support stations, and each support station 36, 34 may be capable of holding or supporting the carrier container T as shown in FIG. 1A. In this aspect, the lower station 34 is generally disposed below the upper station 36. The lower station 34 may include opposing members 34L (only one of which is shown in FIG. 3) that can conformally engage the structure of the carrier container T, whereby the carrier container is supported by the opposing members 34L when disposed on the lower station 34. FIGS. 6A - 6B are perspective views of the front and bottom surfaces, respectively, of a typical substrate carrier container T. The substrate carrier container T in FIGS. 6A - 6B is shown as having a FOUP - type configuration. In an alternative embodiment, the substrate container may have any other desired configuration, as optimally seen in FIG. 6A, and the carrier container T generally has a casing T2 and a casing cover or door T4 removably connected to the casing. The casing T4 has an upper surface T6 with fixtures T8 protruding therefrom. The fixtures T8 may include a lateral flange offset a distance from the upper surface T6 of the casing or an outwardly protruding seating surface T10. The seating surface T10 may be part of a handling flange compliant with SEMI; E47.1 - 1001. The seating surface T10 engages a coupling (not shown) of a container transfer device of an automated material handling system and thereby functions to support the container from the container transfer device. Referring also to FIGS. 2 - 3, the support member 34L of the lower station 34 on the load port module holding area 28 is shown in this aspect as having an angled or generally L - shaped configuration. The member 34L has an inwardly protruding flange 34F as shown. In an alternative embodiment, the support member 34L may have any other suitable shape. The support member 34L may be, for example, metal, plastic, or any other suitable material and may be connected to the support structure 296 of the load port frame 29 as shown in FIG. 3. The inward flange 34F is dimensioned to fit between the seating surface T10 (see FIG. 6A) on the carrier container and the upper surface T6 of the container.The flange 34F of the opposing member 34L is sufficiently separated to allow insertion of the support fixture T8 of the container T between the flanges, and the seating surface T10 that protrudes outward (at least partially) protrudes onto the corresponding flange 34F. Thus, when the transport container T is placed on the lower station 34, it is supported by the seating surface T10 that seats on the flange 34F.

[0018] In this embodiment, the transport container T can be manually positioned on the lower station 34 by an operator by inserting the container (in the direction indicated by arrow I in FIG. 2) so that the fixture T8 is moved between the flanges 34F. In an alternative embodiment, the support member of the lower support station can have any other desired orientation that allows the transport container to be positioned from any other desired direction. Removal of the transport container T from the lower station 34 may be accomplished in a substantially reverse manner, and the user manually pulls the container out in a direction opposite to installation. The lower support station 34 provides another container storage location in the load port module, where the user can place the transport container T in some conditions (such as testing) where the upper support station 36 is occupied by another transport container or the placement of the transport container T on the upper station is prevented. As described above, in an alternative embodiment, the load port module may not have a lower support station within the transport container holding area 28.

[0019] Referring now again to FIG. 2, the upper support station 36 of the carrier container holding area 28 on the load port module 24 generally includes a base support or shelf 50 and a carriage or shuttle 52 movably attached to the shelf 50. A shuttle drive system 54 operably connects the shuttle 52 to the shelf 50 and enables the shuttle 52 to move thereon. The drive system 54 moves the shuttle between a first position and a second position (in the direction indicated by arrow M in FIG. 2). As will be further described below, the shuttle 52 is configured to receive a carrier container T thereon. The first shuttle position may be arranged such that the carrier container T can be automatically positioned (or picked off) onto the carriage by an automated material handling system (not shown). The second position to which the shuttle 52 can move is arranged such that the carrier container T on the shuttle can be docked to the door 30D (see FIG. 1A), as will be further described below. When the shuttle is in this second position, the carrier container T thereon is disposed at a position, for convenience, referred to as the docking position. The control device 400 is communicably connected to sensors on the shuttle and the drive system, as will be further described below.

[0020] As shown in FIG. 1A, the transport container T is disposed on the shuttle 52, and the bottom surface of the transport container seats on the shuttle. Thus, the shuttle 52 is configured to conformally engage the bottom of the transport container T, as will be further described below. FIG. 6B is a bottom view illustrating the features of the bottom T3 of a typical substrate transport container T. In this aspect, the bottom T3 of the transport container has a function generally compliant with the SEMI; E47.1 specification. In alternative embodiments, the bottom of the substrate transport container may have any other desired features. In this case, the bottom T3 generally includes one each of the container sense pads T12, the information pads T14, T16 for the front-end-of-line (FEOL) and back-end-of-line (BEOL) processes of the substrate, the information pad T18 for the container capacity (i.e., the number of substrate holding positions), and the information pad T20 for the box or cassette. The container bottom T3 may further include slots T22 for coupling by the positioning / dynamic coupling pins 66 on the shuttle 52. As can be understood, the dynamic coupling pins 66 define a definitive positioning datum between the transport container holding area around the load port module 24 and the container features engaged thereby. A first recess T24 in the bottom surface is provided as a first holding feature. The bottom of the container also has a second holding feature T26 formed therein. The second holding feature is generally formed in the bottom having an outer opening T32 substantially square partitioned (forming a coupling lip T36) with an edge T34 and includes a generally circular recess T30.

[0021] Figures 4A-4D are respective schematic perspective, plan, front, and side views of shuttle 52 and a part of the support shelf structure on which the shuttle is placed (support shelf structure 50 is only seen in FIGS. 4C-4D). Shuttle 52 generally includes a chassis or frame 55 and a cover 56 positioned on top of the chassis. Shuttle 52 may also generally have positioning features 58 for assisting in properly placing container T on the shuttle, connection features 60 for secure connection of the seated container T to the shuttle, and a detection system 62 for detecting the presence and accurate placement of container T on shuttle 52. Referring also to FIG. 5, which shows a partial cross-sectional view of shuttle 52, chassis 55 may have any suitable shape, may be made of any suitable material, and can support static and dynamic loads associated with the placement and removal of transport container T on the shuttle, as well as the movement of the container and shuttle between a first position and a second position. Chassis 55 may have a motion system (not shown), such as rollers or slides, that allows for free movement of shuttle 52 relative to support shelf 50 of the load port module frame (in the direction indicated by arrow M in FIG. 2). Support shelf 50, partially shown in FIG. 5 (see also FIG. 2), may be formed by support structure 296 of frame 29 (see FIG. 3). Support shelf 50 may include tracks or rails (not shown) formed on or depending on frame structure 296 (e.g., upper plate 296H or side plate 296E) on which the motion system of chassis 55 rides. Container positioning features 58, connection features 60, detection system 62, and cover 56 are attached to chassis 55.

[0022] As can be best seen in FIGS. 4A-4B, in this aspect, the container positioning feature 58 on the shuttle 52 may include a protruding engagement member 64. In this aspect, the engagement member 64 may have a generally frustopyramidal shape that generally conforms to the shape of the positioning recess T24 (see FIG. 6B) at the bottom T3 of the container. The engagement member 64 may be fixed to the chassis 55 and project through a suitable opening in the cover 56 well above the upper surface 56U of the cover, and may engage the positioning recess T24 within the container when the container T is seated on the shuttle 52. The engagement member 64 may have a cam surface 64C for cooperating with the edge of the container positioning feature to assist in the proper automatic positioning of the container T onto the shuttle. In an alternative embodiment, the shuttle may not have an engagement member such as the engagement member 64. In this aspect, the shuttle 52 may have a positioning post (also called a dynamic coupling pin) 66. The positioning post 66 may function not only as a positioning feature to assist in the proper positioning of the container T on the shuttle 52, but also as a means for ensuring the coupling (i.e., dynamic coupling) of the container T to the shuttle 52. As can be understood from FIGS. 4B and 6B, the positioning post 66 is positioned on the shuttle 52 to cooperate with the slot T22 at the bottom T3 of the container. The post 66, which may be formed from any suitable material such as metal or plastic, may be fixed directly to the chassis 54 of the shuttle as shown in FIG. 5. The post 66 may project through the cover 56 (through a suitable hole therein) and engage the bottom of the container within the slot T22 (see FIG. 6B). In this aspect, the post 66 may define a support surface for the transport container T on the shuttle. The end or tip 66T of the post 66 may generally have a conical or rounded shape as seen in FIGS. 4D and 5. This provides three desired contact points between the shuttle 52 and the bottom of the container for an accurate and reproducible definition of the support surface for the container on the shuttle. As can be understood, the post 66 has a configuration such as the radial flange shown in FIG. 5 that supports the weight of the container T and thus distributes the weight of the container to the chassis.The conical upper portion 66T of the post 66 also operates as a cam surface against the inclined side of the slot T22 at the bottom of the container, and mechanically guides the container along the support surface until the desired position (resulting from the geometric shapes of the slot T22 and the upper portion 66T of the post 66) of the container on the shuttle is established.

[0023] The detection system 62 of the shuttle 52 generally comprises a number of switches 68 that are distributed across the entire area of the shuttle. The switches 68 are disposed on the shuttle 52 and can cooperate with the container sensing pads T12, FEOL and BEOL information pads T14, T16, and container capacity and cassette information pads T18, T20 at the bottom of the container. FIG. 4B illustrates the positions of the pads T12-T20 at the bottom of the container T that is overlaid on the cover 56 and the switches 68 of the shuttle 52. In this aspect, the switches 68 are generally of the same type, similar to each other, and will be described below with reference to a typical switch. In an alternative embodiment, different types of switches can be used at different positions on the shuttle corresponding to different information pads T16-T20 of the container T for different types of information that can be relayed to a given switch. The architecture 68 of a typical switch is best seen in FIG. 5. In this aspect, the switch 68 can generally be an electro-optical switch comprising a base or sensor portion 680 and an actuating portion 68I. The actuating portion 68I is spring-loaded and is actuated by contact with the corresponding pad at the bottom of the container, as will be further described below. The sensor portion 680 detects the actuation of the actuating portion that transmits a signal to the control system. As seen in FIG. 5, the sensor portion 680 can be attached to a PCB 74 positioned on the chassis 55 of the shuttle. The PCB 74 can have traces 68E formed therein for both power and signal transmission. The traces 68E can terminate at suitable surface contacts (not shown) to which the contact terminals of the electronic components can be connected as required (using any suitable means for attaching electronic components on the PCB, including flash wave soldering). The contact terminals (both power and signal) of the sensor portion 680 can be connected to the traces 68E in the PCB 74 in a similar manner. Attaching electronic components such as the sensor portion 680 of the switch 68 to a PCB (such as PCB 74) with an integrated trace serves to eliminate not only the individual conductors but also their costly and time-consuming installation to the chassis, which would otherwise be used to connect the components to the power supply and control system.The trace 68E of the PCB may extend to a terminal connector (not shown), and a connectorized end of a flexible wire harness 72 (see also FIG. 4D), for example, may be fitted to the terminal connector. As can be understood, the wire harness may link the trace 68E in the PCB74, and thus, electronic components such as the sensor part of the detector switch 68 may be linked to the control system 400 (see FIG. 2) and a power supply (not shown). The sensor part 680 may have a suitable light source such as an LED and a light detector such as a photocell, for example. In the non - active state of the switch, the light source irradiates, for example, the photocell, and causes the sensor part 680 to transmit (via the trace 68E) a signal interpreted by the control system as the non - active state of the switch 68 to the control system 400. When the light source is blocked, for example, by a part of the actuator 68I of the switch, the signal from the photocell changes, and in turn, the control system reads that the switch is in the active state. In an alternative embodiment, the sensor part 680 may be configured such that the light source is blocked when the switch 68 is in the non - active state and irradiates the light detector when in the active state.

[0024] As shown in FIG. 5, the actuating portion 68I of the switch 68 is integrated with the cover 56 of the shuttle 52. In this embodiment, the spring that biases the actuating portion 68I is formed by a part of the cover 56. The cover 56 of the shuttle 52 can be made of, for example, plastic, sheet metal, or any other suitable material. In this embodiment, the cover 56 can be an integral member (i.e., of a single structure). When the cover 56 is made of plastic, it can be formed, for example, by injection molding or any other suitable process. As shown in FIGS. 4A - 4D, the cover 56 of this embodiment can have a substantially hexahedral shape with an upper surface 56U and an outer peripheral wall 56W protruding from the upper surface. In an alternative embodiment, the shuttle cover can have any other suitable shape. As optimally shown in FIG. 2, when the cover 56 is attached to the chassis 55, it functions to substantially surround the chassis therein, while providing a small gap between the lower end of the outer peripheral wall 56W of the cover and the shelf 50 to facilitate the free relative movement of the shuttle while minimizing the ingress of dust and other particles into the shuttle system. The upper surface 56U of the cover has a through - hole 56H formed therein, as shown in FIG. 4A. As optimally shown in FIG. 5, the post 66 can extend through the cover 56 via the hole 56H. The hole 56H of this embodiment also functions to position the cover 56 on the shuttle chassis 55 (since the clearance between the edge of the hole and the corresponding post 66 is small enough, the post 66 provides accurate positioning of the cover 56 with respect to the chassis 55). Further, in this embodiment, the edge of the hole 56H seats on the collar 66C of the post 66, as shown in FIG. 5, thereby supporting the cover 56 from the post. In an alternative embodiment, the cover can have any other desired attachment system for attaching the cover and the chassis. As shown in FIGS. 4A - 4B, the upper surface 56U of the cover has several elastically flexible tabs or fingers 70 formed therein. The tabs 70 can be formed by any suitable means, such as cutting the upper surface 56U of the cover 56. The number of tabs 70 can match the number of switches 68 of the detection system 62. In this embodiment, eight tabs 70 are formed on the upper surface of the cover.In an alternative embodiment, the cover may have any other desired number of flexible tabs formed therein. In other alternative embodiments, the flexible tabs may be formed on any other desired surface of the cover. In the aspect shown in FIGS. 4A-4B, the tabs 70 are substantially similar to each other and thus may have similar elastically flexible characteristics. In alternative embodiments, the shapes (i.e., lengths, cross-sections) of the various tabs may be varied to provide different flexible characteristics to different tabs. In this aspect, the tips 70E of the tabs 70 are disposed on the cover such that when the cover is attached to the chassis, each tip 70E is positioned substantially over the sensor portion 680 of the corresponding switch 68 (see FIG. 5). In alternative embodiments, the tabs may be arranged such that any other desired portion of the tab (i.e., the tab central section) is positioned over the sensor portion of the corresponding switch. The orientation of the tabs on the upper surface 56U of the cover may be selected, as needed, to provide the tabs with the flexibility of an unconstrained cantilever. The orientation of the tabs 70 shown in FIGS. 4A-4B is merely exemplary, and the tabs may have any other desired orientation.

[0025] As can be optimally seen in FIG. 5, in this aspect, the actuating part 68I of the switch 68 is attached to or disposed at the tip 70E of the corresponding tab 70. The actuating part 68I can be an integral structure with the tab 70 (formed, for example, during the molding process of the upper surface of the cover), or can be attached to the tab 70 by suitable coupling means such as an adhesive. The actuating part 68I protrudes sufficiently from the upper surface 56U of the cover to contact the corresponding pads T12 - T20 of the container disposed on the post 66, and this contact generates sufficient deflection of the tab 70 to move the breaker flag part 68F of the actuating part (for example, interfering with the light source), causing the switch 68 to operate. When the container T is removed from the shuttle 52, the flexible tab 70 springs back to a non - deflected position, returning the switch to an inactive state. As can be understood, when the container T is not properly placed on the shuttle, there may be some misalignment between the pads T12 - T20 of the container and at least a part of the actuating part 68I of the switch 68, whereby at least a part of the switch does not become active. A combination of signals where some switches are made active and other switches are inactive can be interpreted by the control system 400 as an indication of improper placement of the container T on the shuttle. Thereafter, the programming of the control system can prevent the operation of the shuttle 52 and instruct corrective measures to correct the placement or removal of the container from the shuttle.

[0026] As described above, the shuttle 52 can have the coupling feature 60 for reliable connection of the transport container T to the shuttle. Also as described above, the post 66 functions as a dynamic connection means between the shuttle and the container during shuttle movement. In this aspect, the shuttle coupling feature 60 can also include a container clamp system 61 that is generally similar to that described in U.S. Patent No. 8,821,099, which is already incorporated herein by reference in its entirety.

[0027] Referring again to FIGS. 2 and 4A-4D here, shuttle 52 can be moved by drive system 54 between the first or placement position of the shuttle and the docked position (in the direction indicated by arrow M in FIG. 2). As best seen in FIGS. 4C-4D, the shuttle drive system 54 of this aspect generally includes an electric motor 53 that drives a lead screw 57. In alternative embodiments, the shuttle can have any suitable type of drive system, such as a pneumatic or hydraulic drive system. The electric motor 53 of this aspect can be any suitable type of motor, such as an AC or DC motor, a stepper motor or a servo motor. The motor 53 can be fixedly attached to the shelf structure 50. The lead screw 57 is connected to the output shaft of the motor. The motor can rotate the lead screw both clockwise and counterclockwise. The lead screw 57 is also drivingly engaged with the chassis 55 of the shuttle 52 that operates along the (one or more) linear bearings 283 (FIG. 3). The engagement between the lead screw and the chassis can be provided by any suitable means, such as a threaded bushing that is fixed to the chassis and threaded by the lead screw. The rotation of the lead screw 57 by the motor 53 results in the axial movement of the bushing on the lead screw and thus the axial movement of the chassis and the shuttle 52 relative to the shelf 50 to which the motor 53 is fixed. As seen in FIG. 4C, the motor 53 is communicatively connected to the control device 400 by a suitable circuit 91. The control device 400 can provide both a command signal (from a suitable power source) and power to the motor 53 via the circuit 91. The motor 54 can include a motor encoder 58E (see FIG. 4D) for transmitting position indication data to the control device. The control device 400 can process the motor encoder data to identify the position of the shuttle on the load port. In alternative embodiments, a linear encoder can be attached between the shuttle and the support shelf to identify the position of the moving shuttle. As seen in FIG. 4C, in this aspect, the circuit 91 can also include a pinch protection circuit 90 that can detect an obstacle to shuttle movement.The pinch protection circuit may include any suitable type of current sensor 92, and a current sensor 92 of a desired sensitivity capable of measuring current changes to the motor 53. The current sensor 92 is configured to monitor the current supplied to the motor 53 via the circuit 91, if necessary. The measurement signal from the sensor 92 is transmitted to the control device 400 by the circuit 90. The pinch protection circuit 90 may be a closed-loop or open-loop system as required. As can be understood, when the shuttle is advanced by the drive motor 53 and encounters an obstacle, the current supplied to the motor (via the circuit 91) increases substantially proportionally to the level of resistance to the shuttle movement provided by the obstacle. An "excessive" current is detected by the sensor 92, and that information is relayed to the control device 400 via the circuit 90. The sensor 92 may transmit raw sensor data, or unprocessed sensor data, to the control device 400. The control device may be programmed (with an appropriate algorithm, etc.) to process the data from the sensor to identify when an excessive current of a level and duration sufficient to indicate an obstacle is supplied to the motor 53 from the noise. The control device 400 has an automatic reverse program 402 (see Figure 1A), whereupon identifying an excessive current (and thus an obstacle to shuttle movement), the control device stops the previously commanded operation and transmits a command signal to reverse the direction of the motor to the motor 53. Accordingly, the rotation of the lead screw 57 that enables the movement of the shuttle 52 is also reversed, thereby reversing the movement of the shuttle away from the obstacle. The shuttle may be reversed by a predetermined distance established from the encoder 53E information. In an alternative embodiment, the current sensor 92 may be programmable to select a desired setpoint for detecting excessive current. In this case, the current sensor may transmit an appropriate signal to the control device when it detects an excessive current having a level and duration exceeding the programmed setpoint. When the control device receives a signal from the current sensor, it accesses the automatic reverse program 402 in the memory of the control device. This provides a low-cost and superior obstacle detection and recovery system compared to conventional systems that utilize a flexible (i.e., pinch) bar.

[0028] Referring now again to FIG. 2, the load port module of the illustrated embodiment may have a carrier container forward detection system 110 (schematically shown in FIG. 2). The container forward detection system 110 is attached to the shuttle 52 and thereby detects features of the forward moving container T and causes the shuttle to stop such that when the container is in the docking position, the front face of the container is in a desired repeatable position regardless of variations in tolerance between different containers. It is a non-contact system. It is desirable to stop the forward movement of the load port shuttle such that there is minimal clearance between the container and the load port frame 29 without the two actually contacting. Since the dimensions of the containers vary especially between manufacturers, in conventional systems the movement of the shuttle is generally adjusted for the "worst case" and in most cases anticipates an unduly large clearance. The container forward detection system 110 of the load port module 24 overcomes the problems of conventional systems and allows different containers to stop in a state where the front face is in position L1 providing minimal clearance. The container forward detection system 110 of the present embodiment has a "through beam" sensor configuration with an emitter or source of radiant energy and a detector for detecting the radiant energy from the emitter. For example, in the present embodiment, the container forward detection system 110 may have a light source 112 such as an LED or laser diode at the end of an optical fiber connected to a suitable remote light source. The container forward detection system 110 may also have a suitable light sensing portion 114 such as a photocell for sensing the light beam from the light source 112. As seen in FIG. 2, the light source 112 and the sensor 114 are positioned on opposite sides and at a desired height of the shuttle 52 such that the container T attached and carried by the shuttle 52 blocks the light beam B emitted by the light source 112 and irradiating at least the sensing portion of the sensor 114. Although not shown in FIG. 2, the light source 112 and the sensor 114 may be housed in a suitable cover for contact and particle protection and to prevent unintentional blocking of the beam by objects other than the container carried by the shuttle 52.As shown in FIG. 2, sensors 112, 114 are positioned at an offset distance in the shuttle movement direction (indicated by arrow M in FIG. 2) such that when the container T moves to the position where it is docked by the shuttle, the light beam B is separated by a desired distance d from the position L1 on the front surface of the container T. As can be understood, the front surface of the container T advanced by the shuttle blocks the beam B when it is at a distance d from the docking position L1. The control device 400 is programmed with the distance d. The control device 400 also uses an algorithm (program module 401 in FIG. 1A) that uses shuttle movement information, such as that which may be provided to the control device by the motor encoder 53E (see also FIG. 4D), and is programmed with the distance d to determine when the forward movement of the shuttle should be stopped so that the front surface of the container T on the shuttle is at the position L1. Thus, when the front surface of the advancing container T blocks the beam B, the sensor 114 sends an appropriate signal to the control device 400 to notify the control device of the detection of the container front surface. Thereafter, the control device 400 may determine when to command the shuttle to stop advancing as described above and send a command to the shuttle drive section 54 at the correct time. In this way, each container T conveyed by the shuttle is properly positioned at its docking position so as to have its front surface at the position L1 regardless of dimensional variations between the containers.

[0029] When the container T is in the position where it is docked, as shown in Figure 1A, the door T4 of the container can be coupled to the door 30D of the load port module access port 30P. The door T4 on the front of the container is schematically illustrated in Figure 6A. The door T4 may include latch systems T40, T42 that hold the door T4 within the container box when coupling. An example of a latch system for a container door is disclosed in U.S. Patent No. 5,772,386, which was granted a patent examination on June 30, 1998, and is hereby incorporated by reference in its entirety. The door latch systems T40, T42 may include a rotatable hub T44, and the latch tab T46 may be articulated and connected to the hub T44. The rotation of the hub T44 causes the actuation of the latch tab T46 to couple and decouple the container housing. The latch hub T44 is accessible through the latch key access hole T50 in the door T4. The container door T4 may also have a locator pin hole T52, as shown in Figure 6A. Referring also to Figure 2, the access port door 30D of the load port module has locator pins 120 and latch keys 122 in a complementary or matching configuration with the locator pin hole T52 and the latch key access hole T50 in the container door T4. The locator pins 120 and latch keys 122 in the port door 30D may be similar to the locator pins and latch keys of U.S. Patent No. 5,772,386 (which was previously incorporated herein by reference). The latch key 122 of the port door 30D matches the shape of the key access hole T50 in the container door and the key hole in the hub T44 of the latch system. When the port door 30D is coupled to the container door T4, the latch key 122 on the access door 30D enters the key hole formed in the hub T44 of the container through the key access hole T50. The rotation of the latch key 122 causes the rotation of the hub T44 and the actuation of the latch system, which couples / decouples the latch tab, thereby locking or unlocking the container door T4 from the container. The latch key 122 is rotatably mounted and operated in the structure of the access door in a manner substantially similar to the method described in U.S. Patent No. 8,821,099, the entire disclosure of which has already been incorporated herein by reference.

[0030] Referring now to FIGS. 7A and 7B, there is shown a schematic elevation view of a substrate processing apparatus or tool 1002, and one or more containers T connected to the substrate processing apparatus or tool 1002, according to another exemplary embodiment. In the exemplary embodiment shown in FIG. 7A, the substrate processing apparatus 1002 is generally similar to the substrate processing tools illustrated in FIGS. 1A, 1B, and 1C. The substrate processing tool 1002 may generally include a processing section 1006 and an EFEM 1004 (for illustrative purposes only, continue to refer to the convention that the wafer may be considered to be placed on the tool from the front). In an exemplary embodiment, the processing section 1006 and the EFEM 1004 may share a common control environment or atmosphere (e.g., an inert gas (N2), (Ar), or very clean dry air). The processing section 1006 is schematically shown and may include one or more processing sections or modules connected to the EFEM 1004 (the arrangement shown in FIG. 7A is merely exemplary, and the modules of the EFEM and the processing section may be connected to each other in any desired arrangement in alternative embodiments). The one or more processing sections or modules 1006 may be isolated from the EFEM 1004 using a closable opening (e.g., a gate valve), etc. Thus, a processing atmosphere different from the EFEM atmosphere may also be provided in the processing section. In an alternative embodiment, the processing section 1006 may include a load lock that allows a processing module having a non-similar atmosphere or maintaining a vacuum to be connectable to the EFEM, as further described below.

[0031] In a typical embodiment shown in FIG. 7A, the EFEM 1004 may be similar to those described above, unless otherwise specified. The EFEM 1004 may include an appropriate environmental control unit to maintain a desired control environment or control atmosphere within the EFEM when the substrate is transported between the processing sections 1006. For example, the EFEM 1004 may include a control device 31000 (which may be substantially similar to the control device 400 described above), one or more fluid control valves 31010, 31020, a pressure relief valve or check valve 31030, and sensors such as, for example, a pressure sensor 31040, a contamination sensor 31041, and a temperature sensor 31042. The control device may be configured to adjust or regulate attributes such as the temperature, pressure, and gas flow rate 31050 of the control environment within the EFEM (and the processing section 1006). For example, the control device 31000 may receive signals from the pressure sensor 31040, the temperature sensor 31042, and the environmental contamination sensor 31041. In response to the environmental information in these signals, the control device may release or increase the pressure within the EFEM and increase or decrease the air flow 31050 within the EFEM by actuating the appropriate valves 31010, 31030. The control device 31000 may also be configured to increase or decrease the temperature of the gas within the EFEM (e.g., by adjusting the flow of coolant through the radiator 31060) based on the temperature reading provided by the temperature sensor 31042. As can be understood, the control device 31000 and the associated valves and sensors are described with respect to FIGS. 7A and 7B, but the control device 31000 may be used to control the environment(s) of other embodiments disclosed herein.

[0032] The EFEM 1004 can include a substrate transfer device or robot 1004R (the robot can be of any desired type, as will be appreciated) that can hold and transfer substrates. Similarly to the above, the EFEM 1004 can include a load port 24 (as described herein) to interface one or more containers T to the tool 1002 and enable placement of substrates onto and removal from the tool 1002. The load port 24 of the EFEM 1004 and the corresponding complementary interface portion of the (one or more) containers T (as described herein) can be configured to enable placement and removal of substrates between the container and the EFEM without degrading the control environment within the EFEM and the processing section 1006. The EFEM load port 24 and the complementary interface portion of the container T, which can collectively be referred to as the interface from the container to the EFEM, can be arranged such that the (one or more) containers T interfaced to the EFEM are integrated with the tool. As an example, the (one or more) containers T integrated through the load port 24 in this manner can share the same control atmosphere as the EFEM and thus can define (one or more) chambers capable of holding substrates in the same control atmosphere as the EFEM, whereby the substrates can be transferred directly from the container T to the processing section or processing module by the EFEM transfer robot 1004R. Similar to the foregoing aspects of the present disclosure, the interface from the container to the EFEM in the exemplary embodiment shown in FIG. 7A defines what can be referred to as a clean tunnel (already having substantially the same cleanliness as the EFEM and the entire processing section) from within the container chamber, through the interface to the EFEM, and throughout the processing section. The clean tunnel can be closed (such as when the (one or more) containers are removed from the load port) and can be freely opened without degradation to the clean tunnel.In the embodiment shown in FIG. 7A, the interface from the container to the EFEM can be arranged in a manner substantially similar to the method described in U.S. Patent No. 9,105,673, titled "Side Opening Unified Pod," which was issued a patent examination on August 11, 2015, and the entire disclosure of which is incorporated herein by reference, to enable direct integration of the container T and the tool independently of the container environment (substantially as described above) prior to interface connection. Thus, in the embodiment illustrated in FIG. 7A, the container(s) T can interface and directly integrate with processing tools having different or dissimilar environments (e.g., from clean air to an inert gas environment, or from clean air to a vacuum), as further described below, and then be directly transported between tools with different or dissimilar environments, interface and integrate with the tools again. Thus, the substrate(s) in one tool having a controlled environment can be directly transported from a processing section (similar to processing section 1006) through a clean tunnel to the container(s) T using the EFEM robot 1004R, and the container(s) T can be directly transported to and interface with an EFEM (similar to EFEM 1004) in another tool that may have a dissimilar / different controlled environment, and the substrate(s) can be directly transferred to the processing section through a clean tunnel defined in the other tool using the EFEM robot without degradation of the controlled environment in the other processing tool. In effect, the interface between the container and the EFEM in combination with the container can be considered to define an external load lock, i.e., a container load lock.

[0033] Referring further to FIG. 7A, in the aspect illustrated in FIG. 7A, load port 24 is shown interfacing with one container T for illustrative purposes, but in alternative embodiments, the load port may be arranged to interface with any desired number of containers. For example, in an alternative aspect, the load port may have a typically stacked configuration that interfaces with a number of containers arranged in a stack similar to that described in U.S. Patent No. 9,105,673, the entire disclosure of which is hereby incorporated by reference herein. According to the present disclosure, load port 24 may have a vacuum source 1010V that is communicatively connectable to the (one or more) containers T held at the load port to pump down the containers, for example, to remove molecular contaminants from inside the containers and the substrates therein when the containers are on the load port. Conversely, the containers may be communicatively interfaced with the vacuum source 1010V at the load port and arranged in any suitable manner to withstand the atmospheric pressure within the container case when the containers are pumped down to vacuum, as described in U.S. Patent No. 9,105,673.

[0034] When the container T is connected or coupled to the load port 24, the vacuum source 1010V of the load port is automatically coupled to the container housing and may have suitable passages and (one or more) openings or ports 776 (which may be ports common to both a vacuum port, a purge gas port, or both a vacuum and a purge gas source) for communicating with the interior of the container. As can be appreciated, the container seal (see, e.g., door seal 940 of FIG. 9) has the desired integrity to withstand the vacuum across the seal.

[0035] As shown in FIG. 7A, in the exemplary embodiment illustrated, container T may also be configured to be communicatively connected to a gas source, such as a source of vent or purge gas. In the exemplary embodiment shown in FIG. 7A, container T may be communicatively connected to gas source / supply 1010G when seated on the container support of load port 24. As can be appreciated, container T may have a suitable inlet port 776 (a suitable gas channel connecting the plug and the interior of the container) for connecting (e.g., automatically) to the nozzle of gas supply source 1010G when the container is positioned on the support surface of the load port. The arrangement of the gas source interface between the load port and the container shown in FIG. 7A is merely exemplary, and in alternative embodiments, the gas source interface between the container and the load port may have any other desired location and configuration. As described above, gas source 1010G may provide purge and / or vent gas to a container seated or positioned at load port 24, for example. By way of example, when container T is properly positioned at load port 24 (from overhead conveyance, etc.) and a gas supply nozzle is connected to the container and gas is supplied to the container housing, purge gas (e.g., N2) may be supplied to the container as needed (depending on the internal atmosphere of the container when positioned at the load port and the environment maintained in the EFEM). Thus, if the container blocks some processing atmosphere (from an interface with a previous tool, etc.), and the EFEM 1004 is maintained in an atmosphere of inert gas or very clean air, which may be dissimilar to the atmosphere of the container, a desired purge gas may be supplied to the container via a gas supply source 1010G, etc., to purge the atmosphere of the container as the container is interfaced with the load port opening and integrated into the tool 1002 as described above.Also, when positioning the container at the load port (however, for example, before opening the interior of the container to the EFEM environment), if it is considered that the atmosphere inside the container may be incompatible with the EFEM environment or introduce contaminants undesirable in the EFEM environment, the interior of the container is pumped down to a sufficient vacuum via the vacuum source 1010V and filled with an inert gas (e.g., N2, very clean air) similar to the environment in the EFEM, which can remove potential contaminants from the container T and enable the integration of the container T into the tool as described above. As can be understood, one or more of the ports 776 may be connected to the vacuum source 1010V, and one or more other ports 776 may be connected to the purge gas source 1010G, which can effect a purge of the container T.

[0036] As described above, the purge gas supply unit 1010G can operate the actuator 5000 in a manner substantially similar to that described above, either in addition to or instead of the vacuum source 1010V. Information regarding the atmosphere of the container can be recorded on an RFID (Radio Frequency Identification) tag, or other suitable data storage device, that can be read (or otherwise accessed) by a reader appropriate to be at or proximate to the load port 24 on which the container is placed. Thus, appropriate information regarding the interior of the container can be obtained by the tool control device, considered in a desired protocol, and, if necessary, the container can be evacuated and discharged as described above when positioned at the load port 24. Information regarding the atmosphere of the container can be recorded, for example, in a container-mounted storage device when the container docks at the load port or at other appropriate times. Such information can also be tracked, if necessary, by the FAB wide area control device. As can be understood, the container T can also be interfaced with an EFEM that may not have vacuum and gas supply connections. In an alternative embodiment, the container can include an internal or on-board source of purge gas, such as that described in U.S. Patent No. 9,105,673, to effect purging of the container when positioned at the load port. As can be understood, in other aspects, the load port interface that interfaces with the container may be provided with a vacuum connection and no gas supply source is provided, where the gas is supplied, for example, from a gas source mounted on the container. Thus, as can be understood, the container may here function as a substrate cleaning chamber of the tool, and by storing the substrate in the tool, the substrate can be cleaned. As can be understood, evacuation / discharge of the container can also be performed prior to removing the container T from the load port 24, such as when repositioning the container T to another tool.

[0037] As described above, the arrangement of the load port and the interface from the container to the tool shown in FIG. 7A is merely exemplary, and in other embodiments, the interface may have any other desired configuration. For example, the gas supply source may be positioned to discharge gas from the EFEM environment into the container after the interior of the container has been evacuated, if necessary.

[0038] Referring now to FIGS. 2, 6, 8, and 9A, the support station 36 of the load port module 24 includes selectably configurable cassette support purge ports 810, 811, and two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are disposed on the support of the container T such as the support station 36. Each of the two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is configured such that the purge nozzles 900 - 903 at the respective purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are connected to at least one purge port 600 - 609 of the container(s) T - TJ. Each purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B defines exchangeable purge port nozzle interfaces 820 - 831 (FIGS. 8 and 9A) such that different exchangeable purge nozzles 900 - 903 corresponding to different exchangeable purge port nozzle modules 1910, 910 are exchanged rapidly between different nozzle positions and the load port module is reconfigured on - the - fly with the purge nozzles at a desired position (to fit different containers having different characteristics in the same load port module). Each of the different exchangeable purge port nozzle modules 1910, 910 has a different predetermined purge nozzle configuration (e.g., this corresponds to a predetermined purge port configuration of the container T connected to the load port 24). Each of the different exchangeable purge port nozzle modules 1910, 910 is removably attached to one or more respective purge nozzle interfaces 820 - 831 of the purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B corresponding to the different predetermined purge nozzle configurations of the exchangeable purge port nozzle modules 1910, 910.Each of the different replaceable purge port nozzle modules 1910, 910 has different purge port 600-609 characteristics, different containers T-TJ (FIG. 6B), different purge ports 600-603 of at least one container T-TJ, is adapted to at least one of the purge ports 600-609, and provides connection to different purge ports 600-603 of at least one container T-TJ, to at least one of the purge ports 600-609.

[0039] Still referring to FIGS. 2, 6, 8, and 9A, each of the replaceable purge port nozzle modules 1910, 910 has at least one purge nozzle 900 - 903 and is selectable from several different replaceable purge port nozzle modules 1910, 910. Each of the purge nozzle modules 1910, 910 has a different predetermined purge nozzle configuration for modular attachment to the replaceable purge port nozzle interfaces 820 - 831. As a result, by the selectable attachment of the replaceable purge port nozzle modules 1910, 910, the configuration of the cassette support purge ports 810, 811 is changed from a first configuration having at least one purge nozzle 900 - 903 at the purge nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B that is adapted to a first container of the container T - TJ having a first predetermined purge port characteristic and provides connection with the first container, to a second configuration having purge nozzles 900 - 903 at the purge nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B that is adapted to a second container of the container T - TJ having a second predetermined purge port characteristic different from the first predetermined purge port characteristic and provides connection with the second container. For example, as seen in FIG. 6B, the different purge port characteristics of the containers T - TJ are the position / configuration of the purge ports 600 - 609 relative to the dynamic positioning features (e.g., slots T22) of the respective containers T - TJ. For example, the purge ports 600, 601 of the containers T, TA, TD are herein referred to as narrow outer front purge ports (such as those found in Shin-Etsu Polymer Co., Ltd.'s OB - CB_SHIN_ETSY FOUP) and correspond to the purge nozzle positions 801A, 801B of the load port 24.The purge ports 606, 607 of the containers TG, TH, TJ are referred to herein as wide outer front purge ports (such as those found in Entegris, Inc.'s Spectra™ and F300 FOUPS, those found in Miraial Co., Ltd.'s 4-port and 2-port FOUPS, and those found in Shin-Etsu Polymer Co., Ltd.'s CT-CF_SHIN_ETSY and T-CF-S_SHIN_ETSY FOUP), and correspond to the purge port nozzle positions 802A, 802B of the load port 24. The purge ports 608, 609 of the containers TE, TF, TI are referred to herein as inner front purge ports (such as those found in Entegris, Inc.'s A300 FOUP and those found in Shin-Etsu Polymer Co., Ltd.'s CF-A_SHIN-ENSY FOUP), and correspond to the purge port nozzle positions 800A, 800B of the load port 24. The purge ports 602, 603 of the containers T, TB, TE, TJ are referred to herein as front-back purge ports (such as those found in Entegris, Inc.'s Spectra™ FOUP, those found in Miraial Co., Ltd.'s 4-port FOUPS, and those found in Shin-Etsu Polymer Co., Ltd.'s CT-CF_SHIN_ETSY and T-CF-S_SHIN_ETSY FOUP), and correspond to the purge port nozzle positions 803A, 803B of the load port 24. The purge ports 604, 605 of the containers TC, TD, TH, TI are referred to herein as back-back purge ports (such as those found in Entegris, Inc.'s A300 FOUP and those found in Shin-Etsu Polymer Co., Ltd.'s CF-A_SHIN-ENSY FOUP), and correspond to the purge port nozzle positions 804A, 804B of the load port 24. Thus, each of the containers T - TJ has a respective purge port configuration that is different from the purge port configuration of another container of the containers T - TJ.

[0040] The interchangeable purge port nozzle modules 1910, 910 can be a physical purge nozzle module, a virtual purge nozzle module, or a combination of both a physical purge nozzle module and a virtual purge nozzle module. Each different purge port nozzle module 1910, 910 (the virtual module 910 has a configuration similar to that of the physical module 1910 and is similarly numbered except as noted) corresponds to different predetermined purge port characteristics of different purge port nozzle modules of at least one substrate cassette container T-TJ (generally referred to herein as container T unless a specific aspect of container T-TJ is being referred to), such as the location of the purge ports 600-609 of the container T (e.g., wide outer front purge port, narrow outer front purge port, inner front purge port, front rear purge port, rear rear purge port) and / or the configuration (e.g., rigid plastic purge port fitting interface, fluoroelastomer purge port interface).

[0041] Referring to FIGS. 9A - 9G, examples of the physical purge nozzle modules 1900 are purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, 1910TJ, and purge nozzle modules 1910TFLU, 1910TAFLU, 1910TBFLU, 1910TCFLU, 1910TDFLU, 1910TEFLU, 1910TFFLU, 1910TGFLU, 1910THFLU, 1910TIFLU, 1910TJFLU (note that purge nozzle modules 1910TFLU, 1910TAFLU, 1910TBFLU, 1910TCFLU, 1910TDFLU, 1910TEFLU, 1910TFFLU, 1910TGFLU, 1910THFLU, 1910TIFLU, 1910TJFLU are substantially similar to one of the corresponding ones of purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, 1910TJ (for example, 1910TFLU corresponds to 1910T, 1910TAFLU corresponds to 1910TA, etc.), but have a different type of purge nozzle coupler portion (see coupler portions 934A, 934B in FIG. 9A) from the corresponding one of purge nozzle modules 1910T, 1910TA, 1910TB, 1910TC, 1910TD, 1910TE, 1910TF, 1910TG, 1910TH, 1910TI, 1910TJ). Referring to purge nozzle modules 1910TB, 1910TC in FIGS. 9A and 9B, purge nozzle modules 1910TB, 1910TC can be removably arranged on the adjacent rear side of the shuttle 52 (the side opposite the opening 300 of the frame 29 of the load port 24) to interface and connect with the corresponding front - rear purge ports 602, 603 or rear - rear purge ports 604, 605 of the corresponding containers TB, TC respectively.The different physical purge port nozzle modules 1910TB, 1910TC have a module frame (see, e.g., base / frame 950 not present in the virtual purge port nozzle module 910), and their respective corresponding purge port nozzles 902, 903 are attached to their respective bases 950 such that the base 950 is common to their respective corresponding purge port nozzles 902, 903. The base 950 defines a common removable attachment connection to the support station 36 such that the removable connection of the base 950 to the support station 36 results in the attachment of each purge port nozzle 902, 903 to its respective purge port nozzle interface 826 - 830 as a common module unit. In other aspects, the base 950 may be fixed to the container support 36 for use with the virtual purge port nozzle module 910 as described herein, and the base 950 remains fixed to the support station 36.

[0042] It should be noted that the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU are described with respect to the purge nozzle module 1910TB. The purge nozzle modules 1910TC, 1910TBFLU, and 1910TCFLU are substantially similar to the purge nozzle module 1910TB, unless otherwise specified. The base 950 of each different purge port nozzle module 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU having the corresponding purge port nozzle(s) 902, 903 thereon is interchangeable as a module unit having a different module frame 950 of the different purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, and 1910TCFLU having the corresponding different purge port nozzles 902, 903 thereon, as described herein. The purge nozzle module 1910TB includes a base 950 and a nozzle support 951 movably coupled to the base 950. The nozzle support 951 can be movably coupled to the base 950 in any suitable manner (such as one or more linear guides 955) so as to move at least in a direction 999 (which is a direction substantially perpendicular to the support surface of the container T as defined by the positioning / dynamic coupling pin 66). To limit the height 1200 (FIG. 12A) of the purge nozzles 902, 903 above the shuttle surface 52S, any suitable physical limit stops 946, 947 can be provided on the base 950 and / or the nozzle support 951 (note that the height 1200 is representative and one or more of the purge nozzle modules can have corresponding different heights). A linear actuator 985 is provided and communicably coupled to the control device 400, where, upon command from the control device 400, the linear actuator 985 raises (or lowers) the nozzle support 951 and the purge port nozzles 902, 903 thereon so that the purge port nozzles 902, 903 engage or disengage the container T.The control device 400 may be taught the engagement / disengagement poses of the actuator in any suitable manner, which may vary between the purge nozzle modules 1910TB, 1910TC (and 1910TBFLU, 1910TBTCFLU) and the containers TB, TC in some aspects. Each of the engagement / disengagement poses of different actuators, when the different purge nozzle modules 1910TB, 1910TC (and 1910TBFLU, 1910TCFLU) are replaced, the newly installed purge nozzle module is detected / identified by the control device (or the operator inputs the identification of the newly installed purge nozzle module to the control device), and the control device 400 is taught to select the corresponding engagement / disengagement pose of the actuator from the selector table 403 of the control device, and may be programmed into the selector table 403 (see FIG. 1A) of the control device. At least one purge nozzle 902, 903 connected to the purge nozzle module 1910TB is separated from the front and rear purge ports 602, 603 of the respective container TB (here, the linear actuator 985 lifts the nozzle support 951 towards the container T, etc.), or biased against it (here, the linear actuator 985 separates the nozzle support 951 from the container T and lowers it, etc.), and any suitable biasing member 954 may be provided. When the biasing member 954 biases at least one purge nozzle 902, 903 against the front and rear purge ports 602, 603, the biasing member 954 may provide a predetermined engagement force (it is noted that at least one purge nozzle 902, 903 of the purge nozzle module 1910TC is biased against the rear and rear purge ports 604, 605 of the container TC).

[0043] Each of the interchangeable purge port nozzle interfaces 820 - 831 (Figs. 8 and 9A) is arranged to have a predetermined position relative to a predetermined datum (e.g., dynamic positioning pin 66) of the cassette support station 36, whereby each purge port nozzle interface 820 - 831 is deterministically positioned relative to a predetermined datum (such as slot T22, etc.) of each different substrate cassette container T. In other words, the interchangeable purge port nozzle interfaces 826 - 830 are arranged to have a predetermined position relative to a predetermined datum (e.g., pin 66, etc.) of the support station 36, whereby each purge port nozzle 902, 903 of the different interchangeable purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU attached to the interchangeable purge port nozzle interfaces 826 - 830 is deterministically positioned relative to a predetermined datum (such as slot T22, etc.) of each different substrate cassette container T. For example, the base 950 includes any suitable positioning feature 956, such as a hole / aperture, that mates with a corresponding pin 957 of the shuttle 52 so that the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU can be interchangeably and repeatedly positioned relative to any suitable (one or more) datum (e.g., dynamic positioning pin 66) of the shuttle 52. In other aspects, the base 950 may be coupled to the shuttle 52 and may be interchangeably and repeatedly positioned relative to any suitable (one or more) datum (e.g., dynamic positioning pin 66) of the shuttle 52 in any suitable manner using any suitable positioning jig 967, etc., that interfaces with the positioning pin 66 and the positioning feature 956 (or other suitable positioning feature) of the base 950 for positioning the base 950 on the shuttle 52 relative to the positioning pin 66.By the repeatable positioning of the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU relative to the dynamic positioning pin 66, substantially connect the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU to the shuttle 52 (i.e., without further positioning the purge nozzles 902, 903 or the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU after connection to the shuttle 52), position the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU, and at least one purge nozzle 902, 903 connected thereto relative to the purge ports 602-604. Thus, the purge nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU can be rapidly exchanged so that the arrangement of the load port 24 can be reconfigured on-the-fly between each of the different purge nozzle module configurations corresponding to the purge port configurations of the containers TB, TC.

[0044] Referring to FIGS. 9A, 9B, 13 and 14, each of the replaceable purge port nozzles interfaces 826-829 defines a nozzle positioning datum (or purge nozzle datum) 952, 953 and deterministically indicates each of at least one purge port 602-605 of different substrate cassette containers TB, TC having different purge port characteristics (e.g., inlet, outlet, position, etc.). For example, the nozzle support 951 includes purge nozzle datums 952, 953 coupled to the nozzle support 951 so as to define purge port nozzle positions 803A, 803B, 804A, 804B. The datums 952, 953 include any suitable purge nozzle positioning feature 1300 (such as a hole / aperture, etc.) to which the purge nozzles 902, 903 are coupled (such as with appropriate pins 1400 (FIG. 9A) inserted into respective purge nozzle positioning features 1300). The fit between the pins 1400 and the purge nozzle positioning features 1300 can be such that the purge nozzles 902, 903 are held on the shuttle 52 as the load port 24 operates to load and remove the container T to and from the processing apparatus. In other embodiments, the purge nozzles 902, 903 can be held on the shuttle 52 by any suitable means (such as fasteners, clips, tabs, etc.).

[0045] Referring also to FIG. 10, the purge nozzles 902, 903 can be connected to the input gas manifold 10030 or the exhaust gas manifold 10040 in any suitable manner. In one aspect, the purge nozzles 902, 903 may each have a respective fluid rigid / rigid line, or a fluid pipe 990, 991 connected thereto, and respective connections 992 of the fluid pipes 990, 991 extend under the container support station 36. Each flexible hose (see hoses 1020 - 1023) can connect the respective connection 992 to the fluid pipes 990, 991 to connect the purge nozzles 902, 903 to the input gas manifold 10030 or the exhaust gas manifold 10040. In other aspects, each flexible hose can connect the purge nozzles 902, 903 to the input gas manifold 10030 or the exhaust gas manifold 10040 without intervening fluid pipes 990, 991.

[0046] The purge nozzle module can be configured as a purge nozzle module 1910TB, 1910TBFLU that interfaces with the front and rear purge ports 602, 603 or a purge nozzle module 1910TC, 1910TCFLU that interfaces with the rear and rear purge ports 604, 605, according to the purge nozzle characteristics of the (one or more) containers TB, TC connected to the load port 24. Each purge nozzle 902, 903 is removably attached to a replaceable purge port nozzle interface 826 - 829 as an independent unit from another purge port nozzle 902, 903 of the corresponding purge port nozzle module 1910TB, 1910TC, 1910TBFLU, 1910TCFLU. The purge port nozzles 902, 903 that are independently attached to each of the corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU are exchanged independently of different corresponding purge port nozzles 902, 903 of different corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU to effect an exchange with different corresponding purge port nozzle modules 1910TB, 1910TC, 1910TBFLU, 1910TCFLU. For example, each purge nozzle datum 952, 953 includes a series of slots 1305 that define datum stops 1302, 1303 that interface with the respective positioning fasteners 905, 906. To move the purge nozzle datum 952, 953 to a position (e.g., a forward position) for interfacing with the purge ports 602, 603 and configure the purge nozzle module as a purge nozzle module 1910TB, 1910TBFLU, the positioning fasteners 905, 906 can be relaxed to effect sliding of the purge nozzle datum 952, 953 in the direction 1401 such that the datum stop 1303 substantially contacts and rests against the positioning fastener 905 (as shown in FIG. 14).Here, the purge nozzles 902, 903 of the purge nozzle modules 1910TB, 1910TBFLU at the front position are arranged at the purge port nozzle positions 803A, 803B. Similarly, for configuring the purge nozzle modules as the purge nozzle modules 1910TC, 1910TCFLU to interface with the purge ports 604, 605, the positioning fasteners 905, 906 are relaxed to effect sliding of the purge nozzle datums 952, 953 to positions (e.g., the rear position) for interfacing with the purge ports 604, 605, where the purge nozzle datums 952, 953 move in the direction 1301 such that the datum stop 1302 (as shown in FIG. 13) substantially contacts and is stationary with respect to the positioning fastener 906. Here, the purge nozzles 902, 903 of the purge nozzle modules 1910TC, 1910TCFLU at the rear position are arranged at the purge port nozzle positions 803A, 803B.

[0047] Referring to FIGS. 8, 9A, and 9C - 9E, the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU can be removably disposed adjacent to the front surface of the shuttle 52 (adjacent to the opening 300 in the case of the frame 29 of the load port 24) to interface with the corresponding narrow outer front purge ports 600, 601 or wide outer front purge ports 606, 607 or inner front purge ports 608, 609 of the corresponding containers TA, TG, TF. Each different purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU has a module frame (see, e.g., base / frame 970), and each corresponding purge port nozzle 900, 901 is attached to its respective base 970 such that the base 970 is common to each corresponding purge port nozzle 900, 901. The base 970 defines a common removable attachment connection to the support station 36 such that the removable connection of the base 970 to the support station 36 results in the attachment of each purge port nozzle 900, 901 to its respective purge port nozzle interface 820 - 825 as a common module unit. In other aspects, the base 970 can be fixed to the container support 36 for use with a virtual purge port nozzle module as described herein.

[0048] It should be noted that the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU are described with respect to the purge nozzle module 1910TG. The purge nozzle modules 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU are generally similar to the purge nozzle module 1910TG, unless otherwise specified. The bases 970 of the respective different purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU, which have the corresponding purge port nozzles 900, 901 thereon, are interchangeable as module units with another module frame 970 of the respective different purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, and 1910TFFLU having the corresponding different purge port nozzles 900, 901 thereon, as described herein. The purge nozzle module 1910TG includes a base 970, a nozzle support 971 movably coupled to the base 970, and a support bridge 972. The support bridge 972 is coupled to the nozzle support 971 and carried by the nozzle support 971. The nozzle support 971 can be movably coupled to the base 970 in any suitable manner (such as one or more linear guides 975) so as to move at least in a direction 999 (which is a direction substantially perpendicular to the support surface of the container T as defined by the positioning / dynamic connection pin 66). The support bridge 972 can be configured to engage the inner surface 1202 (FIG. 12A) of the shuttle 52 so as to control the height 1201 of the purge nozzles 900, 901 on the surface 52S of the shuttle 52 (it is noted that the height 1201 is representative and one or more of the heights 1201 of the purge nozzle modules can have different corresponding heights). In a similar manner as described above, a linear actuator 985 is provided to raise (or lower) the nozzle support 971 and the purge port nozzles 900, 901 thereon, and is communicably coupled to the control device 400, whereby the purge port nozzles 900, 901 engage or disengage from the container T.In a similar manner as described above, the control device may detect / identify newly installed purge nozzle modules 1910TG, 1910TGFLU, 1910TA, 1910TAFLU, 1910TF, 1910TFFLU (alternatively, the operator may manually input the identification information of the newly installed purge nozzle module), whereby, when replacing the purge nozzle module, the control device 400 selects the engagement / disengagement pose of the corresponding actuator from the selector table 403 of the control device. To move at least one of the purge nozzles 900, 901 connected to the purge nozzle module 1910TG (and the purge nozzle module 1910TGFLU) away from the wide outer front purge ports 606, 607 of the respective container TG (here, the linear actuator 985 lifts the nozzle support 951 towards the container T, etc.) or bias it towards them (here, the linear actuator 985 separates and lowers the nozzle support 951 away from the container T, etc.), any suitable biasing member 974 may be provided. It should be noted that when the biasing member 974 biases at least one of the purge nozzles 900, 901 towards the wide outer front purge ports 606, 607, the biasing member 974 may provide a predetermined engaging force (at least one of the purge nozzles 900, 901 of the purge nozzle modules 1910TA, 1910TAFLU is biased towards the narrow outer front purge ports 600, 601, and at least one of the purge nozzles 900, 901 of the purge nozzle modules 1910TF, 1910TFFLU is biased towards the inner front purge ports 608, 609).

[0049] As described above, each of the replaceable purge port nozzle interfaces 820-831 (Figs. 8 and 9A) is arranged to have a predetermined position relative to a predetermined datum (e.g., the dynamic positioning pin 66) of the cassette support station 36, whereby each purge port nozzle interface 820-831 is deterministically arranged relative to a predetermined datum (such as slot T22) of each different substrate cassette container T. In other words, the replaceable purge port nozzle interfaces 820-825, 831 are arranged to have a predetermined position relative to a predetermined datum (e.g., pin 66, etc.) of the support station 36, whereby each purge port nozzle 900, 901 of the different replaceable purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU attached to the replaceable purge port nozzle interfaces 820-825, 831 is deterministically arranged relative to a predetermined datum (such as slot T22) of each different substrate cassette container T. For example, the base 970 includes any suitable positioning feature 976, such as a hole / aperture, that mates with a corresponding pin 977 of the shuttle 52 so that the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU can be replaced and repeatedly arranged relative to any suitable (one or more) datum (e.g., the dynamic positioning pin 66) of the shuttle 52. In other embodiments, the base 970 may be connected to the shuttle 52 and, using any suitable positioning jig 968, such as any suitable positioning feature 976 (or other suitable positioning feature) of the base 970 for positioning the base 970 relative to the positioning pin 66 on the shuttle 52, can be replaced and repeatedly arranged relative to any suitable (one or more) datum (e.g., the dynamic positioning pin 66) of the shuttle 52 in any suitable manner.By the repeatable positioning of the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU relative to the dynamic positioning pin 66, the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU are substantially connected to the shuttle 52 (i.e., without further positioning the purge nozzles 900, 901 or the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU after connection to the shuttle 52), and the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU and at least one purge nozzle 900, 901 connected thereto are positioned relative to the purge ports 600, 601, 606 - 609. Thus, the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU can be rapidly exchanged so that the arrangement of the load port 24 can be reconfigured on-the-fly between each of the different purge nozzle module configurations corresponding to the purge port configurations of the containers TG, TA, TC.

[0050] Referring to FIGS. 9A, 9C - 9E, 13 and 14, as described above, each of the replaceable purge port nozzles interfaces 820 - 825 defines nozzle positioning datums (or purge nozzle datums) 980A, 980B, 981A, 981B, 982A, 982B, and determinately indicates each of at least one purge port 600, 601, 606 - 609 of different substrate cassette containers T having different purge port characteristics (e.g., inlet, outlet, etc.). For example, the nozzle support 971 includes purge nozzle datums 980A, 980B, 981A, 981B, 982A, 982B coupled to the nozzle support 971 so as to define purge nozzle positions 801A, 801B, 802A, 802B, 800A, 800B. The datums 980A, 980B, 981A, 981B, 982A, 982B include any suitable purge nozzle positioning features 1300 (such as holes / openings, etc.) to which the purge nozzles 900, 901 are coupled (such as by appropriate pins 1400 (FIG. 9A) inserted into respective purge nozzle positioning features 1300). The fit between the pins 1400 and the purge nozzle positioning features 1300 can be such that the purge nozzles 900, 901 are held on the shuttle 52 as the load port 24 operates to load and unload the container T to / from the processing apparatus. In other aspects, the purge nozzles 900, 901 can be held on the shuttle 52 by any suitable means (such as fasteners, clips, tabs, etc.). Referring also to FIG. 10, the purge nozzles 900, 901 can be coupled to the input gas manifold 10030 or the exhaust gas manifold 10040 in any suitable manner. In one aspect, the purge nozzles 900, 901 may each have respective fluid rigid / rigid lines or fluid pipes 993, 994 coupled thereto, and respective connections 995 of the fluid pipes 993, 994 extend under the container support station 36. Respective flexible hoses (refer to hoses 1020 - 1023) can be coupled to respective connections 995 of the fluid pipes 993, 994 to connect the purge nozzles 900, 901 to the input gas manifold 10030 or the exhaust gas manifold 10040.In other embodiments, each flexible hose can connect the purge nozzles 900, 901 to the input gas manifold 10030 or the exhaust gas manifold 10040 without intervening fluid pipes 993, 994.

[0051] The purge nozzle module can be configured as a purge nozzle module 1910TG, 1910TGFLU (interface-connected to the wide outer front purge ports 606, 607), a purge nozzle module 1910TA, 1910TAFLU (interface-connected to the narrow outer front purge ports 600, 601), or a purge nozzle module 1910TF, 1910TFFLU (interface-connected to the inner front purge ports 608, 609), depending on the purge nozzle characteristics of the (one or more) containers T connected to the load port 24. Each purge nozzle 900, 901 is removably attached to a removable purge port nozzle interface 820 - 825 as an independent unit from another purge port nozzle 900, 901 of the corresponding purge port nozzle module 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU, and the purge ports 900, 901 attached independently to each of the corresponding purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU are exchanged independently from different corresponding purge port nozzles 900, 901 of different corresponding purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU so as to effect an exchange with different corresponding purge port nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU. For example, the datum 980A, 980B, 981A, 981B, 982A, 982B and the positioning features 1300 of the purge nozzles 900, 901 are configured such that the purge nozzles 900, 901 can be selectively and interchangeably positioned at any one or more of the purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B defined by the respective datum 980A, 980B, 981A, 981B, 982A, 982B.Here, to configure the purge nozzle modules as purge nozzle modules 1910TG, 1910TGFLU, the purge nozzles 900, 901 are coupled to datums 980A, 980B corresponding to the purge port nozzle positions 802A, 802B, where, for example, the purge nozzles 900, 901 are interchangeably and repeatedly positionable relative to any suitable one or more datums (such as the dynamic positioning pins 66) of the shuttle 52 by an interface between the purge nozzle positioning feature 1300 and the pins 1400 (FIG. 9A). By the repeatable positioning of the purge nozzles 900, 901 relative to the dynamic positioning pins 66, the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU are substantially coupled to the shuttle 52 (i.e., without further positioning the purge nozzles 900, 901 or the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU after coupling to the shuttle 52), and the purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TGFLU, 1910TAFLU, 1910TFFLU and at least one purge nozzle 900, 901 coupled thereto are positioned relative to the purge ports 600, 601, 606 - 609.

[0052] The physically replaceable purge port nozzle modules 1910TA, 1910TF, 1910TG, 1910TB, 1910TC, 1910TAFLU, 1910TFFLU, 1910TGFLU, 1910TBFLU, 1910TCFLU are described as being configured for connection with containers TA, TF, TG, TB, TC having two purge ports, but the physically replaceable purge port nozzle modules 1910T, 1910TD, 1910TE, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TDFLU, 1910TEFLU, 1910THFLU, 1910TIFLU, 1910TJFLU may also include a front portion and a rear portion to effect connection with containers T, TD, TE, TH, TI, TJ having four purge ports as illustrated in FIGS. 9F and 9G. The front and rear portions of the purge nozzle modules 1910T, 1910TD, 1910TE, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TDFLU, 1910TEFLU, 1910THFLU, 1910TIFLU, 1910TJFLU may be separate parts connected to the container support 36 independently of one another / separately, or in other embodiments, the front and rear portions may be a single module connected to the container support 36 as a single unit. The purge nozzle modules 1910T, 1910TD, 1910TE, 1910TH, 1910TI, 1910TJ, 1910TFLU, 1910TDFLU, 1910TEFLU, 1910THFLU, 1910TIFLU, 1910TJFLU may also be rapidly exchanged so that the placement of the load port 24 can be reconfigured on-the-fly between each of the different purge nozzle module configurations corresponding to the purge port configurations of the containers T - TJ.

[0053] The purge nozzle module 1910T (and the purge nozzle module 1910TFLU which is slightly similar to the purge nozzle module 1910T) is configured for connection with four purge ports 600, 601, 602, 603 of the container T. The purge nozzle module 1910T includes a front part 1910T1 which is slightly similar to the purge nozzle module 1910TA for connection with the narrow outer front purge ports 600, 601. The purge nozzle module 1910T also includes a rear part 1910T2 which is slightly similar to the purge nozzle module 1910TB for connection with the front-rear purge ports 602, 603.

[0054] The purge nozzle module 1910TD (and the purge nozzle module 1910TDFLU which is slightly similar to the purge nozzle module 1910TD) is configured for connection with four purge ports 600, 601, 604, 605 of the container TD. The purge nozzle module 1910TD includes a front part 1910TD1 which is slightly similar to the purge nozzle module 1910TA for connection with the narrow outer front purge ports 600, 601. The purge nozzle module 1910TD also includes a rear part 1910TD2 which is slightly similar to the purge nozzle module 1910TC for connection with the rear-rear purge ports 604, 605.

[0055] The purge nozzle module 1910TE (and the purge nozzle module 1910TEFLU which is slightly similar to the purge nozzle module 1910TE) is configured for connection with four purge ports 608, 609, 602, 603 of the container TE. The purge nozzle module 1910TE includes a front part 1910TE1 which is slightly similar to the purge nozzle module 1910TF for connection with the inner front purge ports 608, 609. The purge nozzle module 1910TE also includes a rear part 1910TE2 which is slightly similar to the purge nozzle module 1910TB for connection with the front-rear purge ports 602, 603.

[0056] The purge nozzle module 1910TH (and the purge nozzle module 1910THFLU which is slightly similar to the purge nozzle module 1910TH) is configured for connection with four purge ports 606, 607, 604, 605 of the container TH. The purge nozzle module 1910TH includes a front part 1910TH1 which is slightly similar to the purge nozzle module 1910TG for connection with the wide outer front purge ports 606, 607. The purge nozzle module 1910TH also includes a rear part 1910TH2 which is slightly similar to the purge nozzle module 1910TC for connection with the rear rear purge ports 604, 605.

[0057] The purge nozzle module 1910TI (and the purge nozzle module 1910TIFLU which is slightly similar to the purge nozzle module 1910TI) is configured for connection with four purge ports 608, 609, 604, 605 of the container TI. The purge nozzle module 1910TI includes a front part 1910TI1 which is slightly similar to the purge nozzle module 1910TF for connection with the inner front purge ports 608, 609. The purge nozzle module 1910TI also includes a rear part 1910TI2 which is slightly similar to the purge nozzle module 1910TC for connection with the rear rear purge ports 604, 605.

[0058] The purge nozzle module 1910TJ (and the purge nozzle module 1910TJFLU which is slightly similar to the purge nozzle module 1910TJ) is configured for connection with four purge ports 606, 607, 602, 603 of the container TJ. The purge nozzle module 1910TJ includes a front part 1910TJ1 which is slightly similar to the purge nozzle module 1910TG for connection with the wide outer front purge ports 606, 607. The purge nozzle module 1910TJ also includes a rear part 1910TJ2 which is slightly similar to the purge nozzle module 1910TB for connection with the front rear purge ports 602, 603.

[0059] The purge nozzle module 1910T - 1910TJ (and 1910TFLU - 1910TJFLU which is substantially similar to 1910T - 1910TJ as described herein) is illustrated as having purge nozzles 900 - 903 including a base portion 936 (see, e.g., FIG. 9D) and a coupler portion 934A (see FIGS. 9A and 9B). The base portion 936 may be substantially similar for all purge nozzles 900 - 903. The coupler portion 934A is removably coupled to the base portion 936 in any suitable manner (such as clips, threads, snaps, or any other removable fastener, etc.) and is configured to interface with each purge port 600 - 609 to substantially form a seal between each purge port 600 - 609 and the purge nozzles 900 - 903 (depending on the position of the purge nozzles on the support station 36). The coupler portion 934A may be configured to interface with a purge port made of rigid plastic (or other suitable rigid material), and includes a sealing member 935A (such as a fluoroelastomer O - ring shown in FIGS. 9A and 9B) that substantially contacts and seals the purge port made of rigid plastic (or other suitable rigid material). In other aspects, the coupler portion 934A of the purge nozzle module 1910T - 1910TJ may be replaced with a coupler portion 934B (exchangeable, for example, in a manner similar to the method described below) that includes a substantially hard surface 935B (FIG. 9A) configured to interface with and substantially contact a purge port made of fluoroelastomer to seal it. In yet other aspects, a purge nozzle module 1910TFLU - 1910TJFLU (see FIG. 9G) may be provided, where the purge nozzle module 1910TFLU - 1910TJFLU is substantially similar to the corresponding purge nozzle module 1910T - 1910T1, but the purge nozzle module 1910T1 - 1910TJ is configured with a coupler portion 934B instead of a coupler portion 934A.

[0060] As described above, the replaceable purge port nozzle modules 1910, 910 can be a physical purge nozzle module, a virtual purge nozzle module, or a combination of both a physical purge nozzle module and a virtual purge nozzle module. Examples of the virtual purge nozzle module 910 include the virtual purge nozzle modules 910T, 910TA, 910TB, 910TC, 910TD, 910TE, 910TF, 910TG, 910TH, 910TI, 910TJ, 910T1, 910TA1, 910TB1, 910TC1, 910TD1, 910TE1, 910TF1, 910TG1, 910TH1, 910TI1, 910TJ1 illustrated in FIG. 9A. The virtual purge nozzle module 910 can be a set of purge nozzles 900-903, 900A-903A that are each replaceably coupled to a purge port nozzle interface 820-829 at one of the purge port nozzle positions 801A, 801B, 802A, 802B, 800A, 800B, 803A, 803B, 804A, 804B. For example, the virtual purge nozzle modules 910T, 1910T1 correspond to the purge port configuration of the container T (having narrow outer front purge ports 600, 601 and front rear purge ports 602, 603), the virtual purge nozzle modules 910TD, 910TD1 correspond to the purge port configuration of the container TD (having narrow outer front purge ports 600, 601 and rear rear purge ports 604, 605), the virtual purge nozzle modules 910TE, 910TE1 correspond to the purge port configuration of the container TE (having inner front purge ports 602, 603 and front rear purge ports 602, 603), the virtual purge nozzle modules 910TH, 910TH1 correspond to the purge port configuration of the container TH (having wide outer front purge ports 606, 607 and rear rear purge ports 604, 605), the virtual purge nozzle modules 910TI, 910TI1 correspond to the purge port configuration of the container TI (having inner front purge ports 608, 609 and rear rear purge ports 604, 605), and the virtual purge nozzle modules 910TJ, 910TJ1 correspond to the purge port configuration of the container TJ (having wide outer front purge ports 606, 607 and front rear purge ports 602, 603).

[0061] The virtual purge nozzle modules 910TA, 910TA1 correspond to the purge port configuration of the container TA (having narrow outer front purge ports 606, 607). The virtual purge nozzle modules 910TF, 910TF1 correspond to the purge port configuration of the container TF (having inner front purge ports 608, 609). The virtual purge nozzle modules 910TG, 910TG1 correspond to the purge port configuration of the container TG (having wide outer front purge ports 606, 607).

[0062] The virtual purge nozzle modules 910TB, 910TB1 correspond to the purge port configuration of the container TB (having front-rear purge ports 602, 603). The virtual purge nozzle modules 910TC, 910TC1 correspond to the purge port configuration of the container TC (having rear-rear purge ports 604, 605).

[0063] As can be understood, in one aspect, the purge nozzles 900 - 903, 900A - 903A are interchangeable with each other, such that the purge nozzles 900, 901, 900A, 901A intended for connection to the front container purge ports may be arranged on the container support 36 to interface with the rear container purge ports, and the purge nozzles 902, 903, 902A, 903B intended for connection to the rear container purge ports may be arranged on the container support 36 to interface with the front container purge ports. Additionally, while the frame 950 remains attached to the container support 36, the purge nozzles 902, 903 may be moved between the purge port nozzle positions 803A, 803B, 804A, 804B by moving the purge nozzle datums 952, 953 as described herein.

[0064] In other aspects, different virtual purge nozzle modules 910T - 910TJ, 910T1 - 910TJ1 may exist corresponding to one or more (or each) of the containers T - TJ (as described above), such as when the purge ports 600 - 609 of the containers have different connection characteristics (e.g., purge ports made of rigid plastic or purge ports made of fluoroelastomer). For example, referring to FIGS. 9A and 9B, as described above, each purge nozzle 900 - 903, 900A - 903A includes a base portion 936 (e.g., see FIG. 9D) and coupler portions 934A, 934B (e.g., see FIGS. 9A and 9B). The base portion 936 may be substantially similar for all purge nozzles 900 - 903, 900A - 903A, and thus the different coupler portions 934A, 934B may be interchangeable with each of the purge nozzles 900 - 903, 900A - 903A and the purge nozzle positions 801A, 801B, 802A, 802B, 800A, 800B, 803A, 803B, 804A, 804B. The base portion 936 includes, for example, pins 1400 (FIG. 9A) that are inserted into respective purge nozzle positioning features 1300 as described herein. The base portion 936 is also configured to connect to respective flexible hoses (see hoses 1020 - 1023) and / or respective fluid pipes 990, 991, 993, 994.

[0065] The coupler portions 934A, 934B are removably coupled to the base portion 936 by any suitable method (e.g., clip, threads, snap, or any other removable fastener, etc.) and configured to interface with respective purge ports 600 - 609 to form a substantially seal between the respective purge ports 600 - 609 and the purge nozzles 900 - 903, 900A - 903A (depending on the position of the purge nozzles on the support station 36). The coupler portion 934A may be configured to interface with a purge port made of rigid plastic (or other suitable rigid material), substantially contact the purge port made of rigid plastic (or other suitable rigid material), and include a sealing member 935A (e.g., a fluoroelastomer O-ring shown in FIGS. 9A and 9B) to seal it. The coupler portion 934B may be configured to interface with a purge port made of fluoroelastomer, and include a substantially hard surface 935B (FIG. 9A) that substantially contacts and seals the purge port made of fluoroelastomer. The configurations of the purge nozzles 900 - 903, 900A - 903A described herein are exemplary, and the purge nozzles may have any other suitable configuration for coupling to any suitable purge port of any suitable container.

[0066] Each of the purge nozzles 900 - 903, 900A - 903A of the virtual purge nozzle modules 910T - 910TJ, 910T1 - 910TJ1 is a separate and different purge nozzle (i.e., an individual purge nozzle installed on the container support 36 on the frame and / or removed from the container support 36, similar to the modules 1910TG, 1910TB), whereby each purge port nozzle 900 - 903, 900A - 903A is removably attached to the purge port nozzle interface 820 - 829 as a unit independent of another purge port nozzle 900 - 903, 900A - 903A of the corresponding purge port nozzle module 910T - 910TJ, 910T1 - 910TJ1. The corresponding purge port nozzle modules 910T - 910TJ, 910T1 - 910TJ1 can also be exchanged with different purge port nozzle modules 910T - 910TJ, 910T1 - 910TJ1 having different corresponding purge port nozzles 900 - 903, 900A - 903A. For example, when the virtual purge nozzle module 910TG is connected to the container support 36 instead of the virtual purge nozzle module 910T, each purge nozzle 900 - 903 of the virtual purge nozzle module 910T is individually removed / disconnected from the container support 36 in any suitable order. After removing the purge nozzles 900 - 903 of the virtual purge nozzle module 910T, the purge nozzles 900A, 901A of the virtual purge nozzle module 910TG are individually installed / connected to the container support 36 in any suitable order. In other embodiments, rather than replacing the entire purge nozzles 900, 901, the coupler portion 934A of the virtual purge nozzle module 910T can be removed and exchanged with the coupler portion 934B so as to reconfigure the virtual purge nozzle module 910T as the virtual purge nozzle module 910T1. As described herein, the purge nozzles 900 - 903, 900A - 903A can be connected to the container support 36 at any of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B depending on the purge port characteristics of the container T.

[0067] As described above, the replaceable purge port nozzle interfaces 820-829 to which the purge nozzles 900-903, 900A-903A are connected are arranged to have a predetermined position with respect to a predetermined datum (e.g., pin 66) of the cassette support 36, so that by the selectable attachment of the replaceable purge port nozzle modules 912-914, 912A-914A, the replaceable purge port nozzle modules 910T-910TJ, 910T1-910TJ1 attached to the replaceable purge port nozzle interfaces 820-829 with respect to a predetermined datum (e.g., slot T22) of each different substrate cassette container T, substantially simultaneously with the attachment, a definitive positioning of each purge nozzle 900-903, 900A-903A is achieved.

[0068] Referring to FIGS. 11A - 14, the container support 36 is illustrated with purge nozzles 900 - 903 of different configurations and / or purge nozzle modules 1910TG, 1910TA, 1910TF, 1910TB, 1910TC (although purge nozzles 900 - 903 are illustrated, it should be understood that purge nozzles 900A - 903A can be used instead of, or in combination with, purge nozzles 900 - 903). It is noted that the configurations illustrated in FIGS. 11A - 14 do not cover all the configurations described herein. For example, FIGS. 11A and 11B illustrate purge nozzles 900, 901 disposed at purge nozzle positions 802A, 802B (which interface, for example, with the wide outer front purge ports 606, 607), and purge nozzles 902, 903 disposed at purge nozzle positions 804A, 804B (which interface, for example, with the rear rear purge ports 604, 605). As described above, in one aspect, purge nozzles 900 - 903 can be configured as virtual purge nozzle module 910TH910TH1, or as a combination of virtual purge nozzle modules 910TG, 910TG1 and 910TC, 910TC1. In other aspects, purge nozzles 902 - 903 can be part of physical purge nozzle modules 1910TC, 1910TCFLU (which interface with the rear rear purge ports 604, 605 (see FIG. 6B)), and purge nozzles 900 - 901 can be configured as purge nozzle modules 1910TG, 1910TGFLU (which interface with the wide outer front purge ports 606, 607 (see FIG. 6B)). In yet other aspects, purge nozzles 900, 901 can be configured as virtual purge nozzle modules 910TG, 910TG1, while purge nozzles 902, 903 are configured as physical purge nozzle modules 1910TC, 1910TCFLU. In other aspects, purge nozzles 900, 901 can be configured as physical purge nozzle modules 1910TG, 1910TGFLU, while purge nozzles 902, 903 are configured as virtual purge nozzle modules 910TC, 910TC1.

[0069] Figures 12A and 12B illustrate purge nozzles 900, 901 disposed at purge nozzle positions 800A, 800B (e.g., interfacing with inner front purge ports 600, 601), and purge nozzles 902, 903 disposed at purge nozzle positions 803A, 803B (e.g., interfacing with rear rear purge ports 602, 603). As noted above, in one aspect, purge nozzles 900-903 may be configured as virtual purge nozzle modules 910TE, 910TEFLU, or as a combination of virtual purge nozzle modules 910TF, 910TF1 and 910TB, 910TB1. In other aspects, purge nozzles 902-903 may be part of physical purge nozzle modules 1910TB, 1910TBFLU (interfacing with front rear purge ports 602, 603 (see FIG. 6B)), and purge nozzles 900-901 may be configured as purge nozzle modules 1910TF, 1910TFFLU (interfacing with inner front purge ports 608, 609 (see FIG. 6B)). In yet other aspects, purge nozzles 900, 901 may be configured as virtual purge nozzle modules 910TF, 910TF1 while purge nozzles 902, 903 are configured as physical purge nozzle module 1910TB. In other aspects, purge nozzles 900, 901 may be configured as physical purge nozzle modules 1910TF, 1910TFFLU while purge nozzles 902, 903 are configured as virtual purge nozzle modules 910TB, 910TB1.

[0070] FIG. 13 illustrates purge nozzles 900 - 901 disposed at purge port nozzle positions 801A, 801B (which interface, for example, with the narrow outer front purge ports 600, 601). In this embodiment, the base 950 and nozzle support 951 are illustrated as being fixed to the container support 36 by positioning features 1300 disposed at purge port nozzle positions 804A, 804B (which interface with the rear rear purge ports 604, 605) for use with virtual purge nozzle modules 910TC, 910TC1. However, in the purge nozzle configuration illustrated in FIG. 13, the virtual purge nozzle modules 910TC, 910TC1 are not utilized. As described above, in one aspect, the purge nozzles 900, 901 can be configured as one of the virtual purge nozzle modules 910TA, 910TA1. In other aspects, the purge nozzles 900, 901 can be part of the physical purge nozzles 1910TA, 1910TAFLU (which interface with the narrow outer front purge ports 600, 601 (see FIG. 6B)).

[0071] FIG. 14 illustrates purge nozzles 900 - 901 disposed at purge port nozzle positions 802A, 802B (which interface, for example, with the wide outer front purge ports 606, 607). In this embodiment, the base 950 and nozzle support 951 are illustrated as being fixed to the container support 36 by positioning features 1300 disposed at purge port nozzle positions 803A, 803B (which interface with the front rear purge ports 602, 603) for use with virtual purge nozzle modules 910TB, 910TB1. However, in the purge nozzle configuration illustrated in FIG. 13, the virtual purge nozzle modules 910TB, 910TB1 are not utilized. As described above, in one aspect, the purge nozzles 900, 901 can be configured as one of the virtual purge nozzle modules 910TG, 910TG1. In other aspects, the purge nozzles 900, 901 can be part of the physical purge nozzles 1910TG, 1910TGFLU (which interface with the wide outer front purge ports 606, 607 (see FIG. 6B)).

[0072] Referring to FIGS. 8 and 10, as described above, the flexible fluid hoses 10020-10023 selectively connect at least partially each of the purge nozzles 900-903 to either the input gas manifold 10030 or the exhaust gas manifold 10040. According to aspects of the present disclosure, any one of the purge nozzles 900-903 disposed at any one of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B can be configured as an input nozzle (e.g., for inputting gas / fluid into the container T connected to the container support 36) or an output nozzle (e.g., for outputting gas / fluid from the container T connected to the container support 36) via connection to one of the input gas manifold 10030 or the exhaust gas manifold 10040. For example, the input gas manifold 10030 can include any suitable number of connection ports 10010-10013 for connecting one or more of the purge nozzles 900-903 to any suitable gas source 10031. The output gas manifold 10040 can include any suitable number of connection ports 10001-10004 for connecting one or more of the purge nozzles 900-903 to any suitable vacuum / suction source 10041.

[0073] Each of the input gas manifold 10030 and the output gas manifold is illustrated with four connection ports 10010 - 10013, 1001 - 1004. However, in other embodiments, one or more of the input gas manifold 10030 and the output gas manifold 10040 may be provided with more or fewer than four connection ports, for example, depending on the number of purge nozzles connected to the container support 36. In one embodiment, the number of connection ports of the input gas manifold 10030 may be equal to the number of purge port nozzle positions of the container support 36. In one embodiment, the number of connection ports of the output gas manifold 10040 may be equal to the number of purge port nozzle positions of the container support 36. According to the above, the input gas manifold 10030 and the output gas manifold 10040 are configured to support any suitable combination of input nozzles and output nozzles. For example, the input gas manifold 10030 may include any suitable number of connection ports such that all of the purge nozzles 900 - 901 (again, note that there may be more or fewer than four purge nozzles) disposed at one or more (or all) of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are input nozzles. The output gas manifold 10040 may include any suitable number of connection ports such that all of the purge nozzles 900 - 901 (again, note that there may be more or fewer than four purge nozzles) disposed at one or more (or all) of the different purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are output nozzles. As another example, any suitable combination of input nozzles and output nozzles may be provided by the input gas manifold 10030 and / or the output gas manifold 10040.

[0074] Referring to FIGS. 8, 9A-9C, 10 and 15, exemplary methods are described in accordance with aspects of the present disclosure. In one aspect, at least one replaceable purge port nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 from several different replaceable purge port nozzle modules 1910T-1910TJ, 1910TFLU-1910TJFLU, 910T-910TJ, 910T1-910TJ1 is selectively coupled to the container support 36 of the load port 24 (FIG. 15, block 1500). In one aspect, coupling at least one replaceable purge port nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU to the container support 36 includes coupling two or more purge nozzles 900-903 to the container support 36 as a modular unit (FIG. 15, block 1505), and the two or more purge nozzles 900-903 are mounted on a common frame 950, 970 as described herein. In another aspect, coupling at least one replaceable purge port nozzle module 910T-910TJ, 910T1-910TJ1 to the container support 36 includes coupling two or more purge nozzles 900-903 to the container support 36 nozzle by nozzle (FIG. 15, block 1510), and the two or more purge nozzles 900-903 are separate individual nozzles that are coupled to the container support 36 independently of other purge nozzles of the two or more purge nozzles 900-903 as described above. In one aspect, at least one of the at least one replaceable purge port nozzle module 1910T-1910TJ, 1910TFLU-1910TJFLU is coupled to the container support 36 as a modular unit (FIG. 15, block 1505), while another one of the at least one purge nozzle module 910T-910TJ, 910T1-910TJ1 is coupled to the container support 36 nozzle by nozzle (FIG. 15, block 1510).

[0075] In one aspect, at least one of the two or more purge nozzles 900-901 is communicatively coupled to the input gas manifold 10030 (FIG. 15, block 1515) to configure at least one of the two or more purge nozzles 900-903 as an input nozzle, as described herein. In another aspect, at least one of the two or more purge nozzles 900-901 is communicatively coupled to the output gas manifold 10040 (FIG. 15, block 1520) to configure at least one of the two or more purge nozzles 900-903 as an output nozzle, as described herein. In yet another aspect, at least one of the two or more purge nozzles 900-901 is communicatively coupled to the input gas manifold 10030 (FIG. 15, block 1515), while another one of the two or more purge nozzles 900-901 is communicatively coupled to the output gas manifold 10040 (FIG. 15, block 1520).

[0076] At least one replaceable purge port nozzle module 1910T - 1910TJ, 1910TFLU - 1910TJFLU, 910T - 910TJ, 910T1 - 910TJ1 may be removed / disconnected from the container support 36 (FIG. 15, block 1525), and another one of the different replaceable purge port nozzle modules 1910T - 1910TJ, 1910TFLU - 1910TJFLU, 910T - 910TJ, 910T1 - 910TJ1 may be selected based on the purge port characteristics of the container T connected to the container support 36 (FIG. 15, block 1530). In another aspect, at least one coupler portion 934A, 934B of at least one purge nozzle 900 - 903 of at least one purge nozzle module 1910T - 1910TJ, 1910TFLU - 1910TJFLU, 910T - 910TJ, 910T1 - 910TJ1 may be disconnected / removed from the respective base portion 936 of the respective purge nozzle 900 - 903 (FIG. 15, block 1535), and another different coupler portion 934A, 934B may be selected based on the purge port characteristics of the container T connected to the container support 36 (FIG. 15, block 1540). The different coupler portions 934A, 934B are connected to at least one purge nozzle 900 - 903 and disconnected / removed therefrom (FIG. 15, block 1545). According to an aspect of the present disclosure, each purge nozzle 900 - 901 may be connected, disconnected, and reconnected to / from the input gas manifold 10030 and the output gas manifold 10040 as needed, for example, according to the characteristics of the purge port of the container T.

[0077] Referring to FIGS. 8, 9A - 9C, 10, and 16, an exemplary method is described in accordance with aspects of the present disclosure. The method 1600 includes providing a frame of a substrate placement apparatus (FIG. 16, block 1601), the frame being configured to connect the substrate placement apparatus to a substrate processing apparatus, having a transfer opening 30P, and through which a substrate is transferred between the substrate placement apparatus and the substrate processing apparatus. A cassette support 36 is provided (FIG. 16, block 1602) and is connected to the frame for holding at least one substrate cassette container T for transfer of substrates between at least one substrate cassette container T via the transfer opening 30P. Different replaceable purge port nozzles 900 - 903 are selectively attached to the substrate placement apparatus (FIG. 16, block 1603), and cassette support purge ports 810, 811 having two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are disposed on the cassette support 36. Each of the two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is configured such that the purge port nozzles 900 - 903 at the purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B are connected to at least one purge port 600 - 609 of at least one substrate cassette container T.Each purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B defines an interchangeable purge port nozzle interface 820 - 831, whereby different interchangeable purge port nozzles 900 - 903, each having a different predetermined purge nozzle configuration, corresponding to different interchangeable purge port nozzle modules 1910 - 910, are adapted to different ports of at least one substrate cassette container T having different purge port characteristics, resulting in a connection with the different ports, and are removably attached to respective purge port nozzle interfaces 820 - 831 of two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B corresponding to different predetermined purge nozzle configurations of the interchangeable purge port nozzle modules 1910 - 910.

[0078] Referring to FIGS. 8, 9A-9C, 10, and 17, an exemplary method 1700 is described in accordance with aspects of the present disclosure. The method 1700 includes a step of providing a frame of a substrate placement apparatus (FIG. 17, block 1701), wherein the frame is configured to connect the substrate placement apparatus to a substrate processing apparatus, has a transfer opening 30P, and through the transfer opening 30P, a substrate is transferred between the substrate placement apparatus and the substrate processing apparatus. A cassette support 36 is provided (FIG. 17, block 1702) and is connected to the frame for holding at least one substrate cassette container T for transfer of substrates between at least one substrate cassette container T via the transfer opening 30P. Selectively configurable cassette support purge ports 810, 811 are provided (FIG. 17, block 1703). The selectively configurable cassette support purge ports 810, 811 have two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B disposed on the cassette support 36. Each of the two or more purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is configured such that a purge port nozzle at the purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B is connected to at least one purge port 600-609 of at least one substrate cassette container T. Each purge port nozzle position 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B defines an interchangeable purge port nozzle interface 820-831.An exchangeable purge port nozzle module having at least one purge port nozzle is selected from several different exchangeable purge port nozzle modules 1910-910, each having a different predetermined purge port nozzle configuration for modular attachment to an exchangeable purge port nozzle interface 820-831 (FIG. 17, block 1704), whereby the selectable attachment of the exchangeable purge port nozzle module can configure the selectable cassette support purge ports 810, 811 to conform to a first container of at least one substrate cassette container T having a first predetermined purge port characteristic and provide connection with the first container of the at least one substrate cassette container T, changing from a first configuration having purge port nozzles at purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B to a second configuration having purge port nozzles at the same purge port nozzle positions 800A, 800B, 801A, 801B, 802A, 802B, 803A, 803B, 804A, 804B that conforms to a second container of the at least one substrate cassette container T having a second predetermined purge port characteristic different from the first predetermined purge port characteristic and provides connection with the at least one substrate cassette container T.

[0079] According to one or more aspects of the present disclosure, a substrate placement device includes a frame configured to connect the substrate placement device to a substrate processing device. The frame has a transfer opening through which a substrate is transferred between the substrate placement device and the substrate processing device. The substrate placement device also includes at least one substrate cassette container, a cassette support connected to the frame for holding the at least one substrate cassette container for transferring substrates to and from the at least one substrate cassette container through the transfer opening, and a cassette support purge port having two or more purge port nozzle positions disposed on the cassette support. Each of the two or more purge port nozzle positions is configured such that a purge port nozzle at the purge port nozzle position is connected to at least one purge port of the at least one substrate cassette container. Each purge port nozzle position defines a replaceable purge port nozzle interface, and different replaceable purge port nozzles, each having a different predetermined purge nozzle configuration and corresponding to different replaceable purge port nozzle modules, are removably attached to the respective purge port nozzle interfaces of the two or more purge port nozzle positions. The different replaceable purge port nozzles are adapted to different ports of at least one purge port of different substrate cassette containers of the at least one substrate cassette container, providing connection to the different ports and corresponding to different predetermined purge nozzle configurations of the replaceable purge port nozzle modules.

[0080] According to one or more aspects of the present disclosure, each of the replaceable purge port nozzle interfaces is arranged to have a predetermined position relative to a predetermined datum of the cassette support, whereby each purge port nozzle interface is deterministically arranged relative to the predetermined datum of each different substrate cassette container.

[0081] According to one or more aspects of the present disclosure, each of the replaceable purge port nozzle interfaces and each of the different predetermined purge nozzle configurations of each of the different replaceable purge port nozzle modules are configured to effect a high-speed exchange attachment of each of the different replaceable purge port nozzle modules with another one of the different replaceable purge port nozzle modules.

[0082] According to one or more aspects of the present disclosure, each of the replaceable purge port nozzle interfaces defines a nozzle positioning datum that deterministically indicates each of at least one purge port of different substrate cassette containers having different purge port characteristics.

[0083] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to the replaceable purge port nozzle interface as an independent unit from another purge port nozzle of the corresponding purge port nozzle module, and each independently attached purge port nozzle of the corresponding purge port nozzle module is exchanged independently of the different purge port nozzles of different corresponding purge port nozzle modules, thereby effecting an exchange of the corresponding purge port nozzle module with a different corresponding purge port nozzle module.

[0084] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to the purge port nozzle interface as an independent unit from another purge port nozzle of the corresponding purge port nozzle module, and the corresponding purge port nozzle module is exchanged nozzle by nozzle with different purge port nozzle modules having different corresponding purge port nozzles.

[0085] According to one or more aspects of the present disclosure, each different purge port nozzle module has a module frame, and each corresponding purge port nozzle is attached to the module frame such that the module frame is common to each corresponding purge port nozzle. The module frame defines a removable attachment connection common to the cassette support, whereby the removable connection of the module frame to the cassette support results in the attachment of each purge port nozzle of each purge port nozzle to its respective purge port nozzle interface as a common module unit.

[0086] According to one or more aspects of the present disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle thereon is interchangeable as a module unit with another module frame of a different purge port nozzle module having different corresponding purge port nozzles thereon.

[0087] According to one or more aspects of the present disclosure, each different purge port nozzle module corresponds to different predetermined purge port characteristics of different substrate cassette containers of at least one substrate cassette container.

[0088] According to one or more aspects of the present disclosure, a substrate placement device includes a frame configured to connect the substrate placement device to a substrate processing device. The frame has a transfer opening through which a substrate is transferred between the substrate placement device and the substrate processing device. The substrate placement device further includes at least one substrate cassette container, a cassette support connected to the frame for holding the at least one substrate cassette container for transferring substrates to and from the at least one substrate cassette container through the transfer opening, a cassette support purge port having two or more purge port nozzle positions disposed on the cassette support, each of the two or more purge port nozzle positions being configured such that a purge port nozzle at the purge port nozzle position is connected to at least one purge port of the at least one substrate cassette container, and each purge port nozzle position defining a replaceable purge port nozzle interface, and a selectably configurable cassette support purge port. The substrate placement device also includes a replaceable purge port nozzle module having at least one purge port nozzle and being selectable from a plurality of different replaceable purge port nozzle modules having different predetermined purge port nozzle configurations for modular attachment to the replaceable purge port nozzle interface. The selectable attachment of the replaceable purge port nozzle module changes the configuration of the selectably configurable cassette support purge port from a first configuration having a purge port nozzle at a purge port nozzle position that conforms to a first container of the at least one substrate cassette container having a first predetermined purge port characteristic and provides connection with the first container to a second configuration having a purge port nozzle at a purge port nozzle position that conforms to a second container of the at least one substrate cassette container having a second predetermined purge port characteristic different from the first predetermined purge port characteristic and provides connection with the second container.

[0089] According to one or more aspects of the present disclosure, an exchangeable purge port nozzle interface is arranged to have a predetermined position relative to a predetermined datum of a cassette support, whereby each purge port nozzle of a different exchangeable purge port nozzle module attached to the exchangeable purge nozzle interface is deterministically positioned relative to a predetermined datum of each different substrate cassette container.

[0090] According to one or more aspects of the present disclosure, an exchangeable purge port nozzle interface is arranged to have a predetermined position relative to a predetermined datum of a cassette support, whereby a selectable attachment of an exchangeable purge port nozzle module provides for a deterministic positioning of each purge port nozzle substantially simultaneously with the attachment of the exchangeable purge port nozzle module attached to the exchangeable purge nozzle interface relative to a predetermined datum of each different substrate cassette container.

[0091] According to one or more aspects of the present disclosure, each of the exchangeable purge port nozzle interfaces is arranged to have a predetermined position relative to a predetermined datum of a cassette support, whereby each of the exchangeable purge port nozzle interfaces is deterministically positioned relative to a predetermined datum of each different substrate cassette container.

[0092] According to one or more aspects of the present disclosure, each of the exchangeable purge port nozzle interfaces and each respective one different predetermined purge nozzle configuration of a different exchangeable purge port nozzle module are configured to provide for a high-speed exchange attachment of each respective one of a different exchangeable purge port nozzle module with another one of a different exchangeable purge port nozzle module.

[0093] According to one or more aspects of the present disclosure, each of the replaceable purge port nozzles interfaces defines a nozzle positioning datum that deterministically indicates each of at least one purge port of a different substrate cassette container having different purge port characteristics.

[0094] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to a replaceable purge port nozzle interface as an independent unit separate from another purge port nozzle of a replaceable purge port nozzle module, and each independently attached purge port nozzle of a replaceable purge port nozzle module is exchanged independently of different purge port nozzles of another different purge port nozzle module from a plurality of different purge port nozzle modules, thereby resulting in an exchange with other different purge port nozzle modules of the replaceable purge port nozzle module.

[0095] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to a replaceable purge port nozzle interface as an independent unit separate from another purge port nozzle of a replaceable purge port nozzle module, and the replaceable purge port nozzle module is exchanged nozzle by nozzle with another different purge port nozzle module having different corresponding purge port nozzles.

[0096] According to one or more aspects of the present disclosure, each different purge port nozzle module from a plurality of different purge port nozzle modules has a module frame, and each corresponding purge port nozzle is attached to the module frame such that the module frame is common to each corresponding purge port nozzle. The module frame defines a removable attachment connection common to the cassette support, whereby the removable connection of the module frame to the cassette support results in the attachment of each purge port nozzle of each purge port nozzle to its respective purge port nozzle interface as a common module unit.

[0097] According to one or more aspects of the present disclosure, the module frame of each different purge port nozzle module having a corresponding purge port nozzle thereon is interchangeable as a module unit with another module frame of each different purge port nozzle module from a plurality of different purge port nozzle modules having a corresponding different purge port nozzle thereon.

[0098] According to one or more aspects of the present disclosure, each different purge port nozzle module from a plurality of different purge port nozzle modules corresponds to different predetermined purge port characteristics of different substrate cassette containers of at least one substrate cassette container.

[0099] According to one or more aspects of the present disclosure, a method is provided. The method includes providing a frame of a substrate placement apparatus, the frame being configured to connect the substrate placement apparatus to a substrate processing apparatus, the frame having a transfer opening through which a substrate is transferred between the substrate placement apparatus and the substrate processing apparatus; providing a cassette support, the cassette support being at least one substrate cassette container and being connected to the frame to hold at least one substrate cassette container for transferring a substrate to and from the at least one substrate cassette container through the transfer opening; and selectively attaching different replaceable purge port nozzles to the substrate placement apparatus, wherein a cassette support purge port having two or more purge port nozzle positions is disposed on the cassette support, each of the two or more purge port nozzle positions being configured such that a purge port nozzle at the purge port nozzle position is connected to at least one purge port of at least one substrate cassette container, each purge port nozzle position defining a replaceable purge port nozzle interface, whereby different replaceable purge port nozzles, each having a different predetermined purge nozzle configuration, are adapted to different ports of at least one purge port of different substrate cassette containers of the at least one substrate cassette container having different purge port characteristics, resulting in connection with different ports, and each of the purge port nozzle interfaces of the two or more purge port nozzle positions is removably attached to a corresponding one of different replaceable purge port nozzle modules having different predetermined purge nozzle configurations.

[0100] According to one or more aspects of the present disclosure, the method comprises arranging each of the replaceable purge port nozzle interfaces to have a predetermined position relative to a predetermined datum of the cassette support, whereby each purge port nozzle interface is deterministically arranged relative to the predetermined datum of each different substrate cassette container.

[0101] According to one or more aspects of the present disclosure, the method further comprises effecting a high-speed exchange of each one of a different replaceable purge port nozzle module with another one of a different replaceable purge port nozzle module.

[0102] According to one or more aspects of the present disclosure, each of the replaceable purge port nozzle interfaces defines a nozzle positioning datum that deterministically indicates each of at least one purge port of a different substrate cassette container having different purge port characteristics.

[0103] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to the replaceable purge port nozzle interface as an independent unit from another purge port nozzle of the corresponding purge port nozzle module, and each independently attached purge port nozzle of the corresponding purge port nozzle module is exchanged independently from different purge port nozzles of different corresponding purge port nozzle modules, and the method further comprises effecting an exchange of a corresponding purge port nozzle module with a different corresponding purge port nozzle module.

[0104] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to a purge port nozzle interface as an independent unit separate from another purge port nozzle of the corresponding purge port nozzle module, and the method further includes the step of exchanging each corresponding purge port nozzle module, nozzle by nozzle, with a different purge port nozzle module having a different corresponding purge port nozzle.

[0105] According to one or more aspects of the present disclosure, each different purge port nozzle module has a module frame, and each corresponding purge port nozzle is attached to the module frame such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a removable attachment connection common to the cassette support, and the method further includes the step of removably connecting the module frame to the cassette support so as to effect attachment of each purge port nozzle to its respective purge port nozzle interface as a common module unit.

[0106] According to one or more aspects of the present disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle thereon is exchangeable as a module unit with another module frame of a different purge port nozzle module having a different corresponding purge port nozzle thereon.

[0107] According to one or more aspects of the present disclosure, each different purge port nozzle module corresponds to different predetermined purge port characteristics of different purge port nozzle modules of at least one substrate cassette container.

[0108] According to one or more aspects of the present disclosure, a method is provided. The method includes providing a frame of a substrate placement device, the frame being configured to connect the substrate placement device to a substrate processing device, the frame having a transfer opening through which a substrate is transferred between the substrate placement device and the substrate processing device; providing a cassette support, the cassette support being at least one substrate cassette container and being connected to the frame to hold at least one substrate cassette container for transfer of a substrate to and from the at least one substrate cassette container through the transfer opening; providing a selectably configurable cassette support purge port having two or more purge port nozzle positions disposed on the cassette support, each of the two or more purge port nozzle positions being configured such that a purge port nozzle at the purge port nozzle position is connected to at least one purge port of at least one substrate cassette container, and each purge port nozzle position defining an exchangeable purge port nozzle interface; selecting an exchangeable purge port nozzle module having at least one purge port nozzle from a plurality of different exchangeable purge port nozzle modules, each having a different predetermined purge port nozzle configuration for modular attachment to the exchangeable purge port nozzle interface, such that selectable attachment of the exchangeable purge port nozzle module changes the configuration of the selectably configurable cassette support purge port from a first configuration having a purge port nozzle at a purge port nozzle position that is adapted to a first container of at least one substrate cassette container having a first predetermined purge port characteristic and provides connection with the first container, to a second configuration having a purge port nozzle at a purge port nozzle position that is adapted to a second container of at least one substrate cassette container having a second predetermined purge port characteristic different from the first predetermined purge port characteristic and provides connection with the second container.

[0109] According to one or more aspects of the present disclosure, an interchangeable purge port nozzle interface is arranged to have a predetermined position relative to a predetermined datum of a cassette support, whereby each purge port nozzle of a different interchangeable purge port nozzle module attached to the interchangeable purge port nozzle interface is deterministically positioned relative to a predetermined datum of each different substrate cassette container.

[0110] According to one or more aspects of the present disclosure, an interchangeable purge port nozzle interface is arranged to have a predetermined position relative to a predetermined datum of a cassette support, whereby a selectable attachment of an interchangeable purge port nozzle module results in a deterministic positioning of each purge port nozzle of the interchangeable purge port nozzle module attached to the interchangeable purge port nozzle interface, substantially simultaneously with the attachment, relative to a predetermined datum of each different substrate cassette container.

[0111] According to one or more aspects of the present disclosure, each of the interchangeable purge port nozzle interfaces is arranged to have a predetermined position relative to a predetermined datum of a cassette support, whereby each of the interchangeable purge port nozzle interfaces is deterministically positioned relative to a predetermined datum of each different substrate cassette container.

[0112] According to one or more aspects of the present disclosure, further includes steps that result in a high-speed exchange attachment of each one of a different interchangeable purge port nozzle module with another one of the different interchangeable purge port nozzle modules.

[0113] According to one or more aspects of the present disclosure, each of the interchangeable purge port nozzle interfaces defines a nozzle positioning datum that deterministically indicates each of at least one purge port of a different substrate cassette container having different purge port characteristics.

[0114] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to a replaceable purge port nozzle interface as a unit independent of another purge port nozzle of a replaceable purge port nozzle module, and each independently attached purge port nozzle of the replaceable purge port nozzle module is exchanged independently of different purge port nozzles of different purge port nozzle modules from a plurality of different purge port nozzle modules, thereby resulting in an exchange with other purge port nozzle modules of the replaceable purge port nozzle module.

[0115] According to one or more aspects of the present disclosure, each purge port nozzle is removably attached to a replaceable purge port nozzle interface as a unit independent of another purge port nozzle of a replaceable purge port nozzle module, and the replaceable purge port nozzle module is exchanged nozzle by nozzle with another different purge port nozzle module having different corresponding purge port nozzles.

[0116] According to one or more aspects of the present disclosure, each different purge port nozzle module from a plurality of different purge port nozzle modules has a module frame, and each corresponding purge port nozzle is attached to the module frame such that the module frame is common to each corresponding purge port nozzle. The module frame defines a removable attachment connection common to a cassette support, whereby the removable connection of the module frame to the cassette support results in the attachment of each purge port nozzle of each purge port nozzle as a common module unit to its respective purge port nozzle interface.

[0117] According to one or more aspects of the present disclosure, the module frame of each different purge port nozzle module having the corresponding purge port nozzle thereon is exchangeable as a module unit with another module frame of a different purge port nozzle module having the corresponding different purge port nozzle thereon from a plurality of different purge port nozzle modules.

[0118] According to one or more aspects of the present disclosure, each different purge port nozzle module from a plurality of different purge port nozzle modules corresponds to different predetermined purge port characteristics of different purge port nozzle modules of at least one substrate cassette container.

[0119] It should be understood that the foregoing description is merely illustrative of aspects of the present disclosure. Different alternatives and modifications may be contemplated by those skilled in the art without departing from the aspects of the present disclosure. Accordingly, the aspects of the present disclosure are intended to embrace all such alternatives, modifications, and variations that are within the scope of any of the appended claims herein. Further, the mere fact that different features are described in mutually different dependent or independent claims that may be appended hereto does not indicate that a combination of these features cannot be used to advantage and that such a combination remains within the scope of the aspects of the present disclosure.

Claims

1. A substrate placement device, a frame configured to connect the substrate placement device to a substrate processing device, the frame having a transfer opening through which a substrate is transferred between the substrate placement device and the substrate processing device, and at least one substrate cassette container, and a cassette support connected to the frame for holding the at least one substrate cassette container for transfer of a substrate to and from the at least one substrate cassette container through the transfer opening, and a plurality of selectably variable cassette support purge ports, each of the plurality of selectably variable cassette support purge ports having a variable purge port nozzle disposed on the cassette support, the variable purge port nozzle being variable between two or more selectable predetermined purge nozzle characteristics, the two or more selectable predetermined purge nozzle characteristics being such that the variable purge port nozzle having each selected predetermined purge nozzle characteristic complements and is configured to connect to at least one purge port of the at least one substrate cassette container, and comprising wherein each variable purge port nozzle of each of the plurality of selectably variable cassette support purge ports includes two or more purge port nozzles having variable positions, and the predetermined purge nozzle characteristics of the plurality of selectably variable cassette support purge ports define each of the variable positions of the two or more purge port nozzles corresponding to the selected predetermined purge nozzle characteristic such that the variable purge port nozzle complements and is configured to connect to the at least one purge port of the at least one substrate cassette container. A substrate placement device.

2. The plurality of selectably variable cassette support purge ports each include an exchangeable purge port nozzle module having at least one purge port nozzle, and are selectable from a plurality of different exchangeable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each of the variable positions of the two or more purge port nozzles defines an exchangeable purge port nozzle interface, at which the at least one substrate cassette container is coupled to the exchangeable purge port nozzle module. Each of the exchangeable purge port nozzle interfaces is arranged to have a predetermined position relative to a predetermined datum of the cassette support, whereby each purge port nozzle interface is deterministically arranged relative to the predetermined datum of each different substrate cassette container. The substrate placement device according to claim 1.

3. The plurality of selectably variable cassette support purge ports each include an exchangeable purge port nozzle module having at least one purge port nozzle, and are selectable from a plurality of different exchangeable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each of the variable positions of the two or more purge port nozzles defines an exchangeable purge port nozzle interface, at which the at least one substrate cassette container is coupled to the exchangeable purge port nozzle module. Each of the exchangeable purge port nozzle interfaces and each different one of the different exchangeable purge port nozzle modules having a different predetermined purge nozzle characteristic are configured to effect a quick exchange attachment of each different one of the different exchangeable purge port nozzle modules with another one of the different exchangeable purge port nozzle modules. The substrate placement device according to claim 1.

4. The plurality of selectably variable cassette support purge ports include an exchangeable purge port nozzle module having at least one purge port nozzle, and are selectable from a plurality of different exchangeable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each of the variable positions of the two or more purge port nozzles defines an exchangeable purge port nozzle interface, at which the at least one substrate cassette container is coupled to the exchangeable purge port nozzle module. The substrate mounting apparatus according to claim 1, wherein each of the exchangeable purge port nozzle interfaces defines a nozzle positioning datum that deterministically indicates each of the at least one purge port of different substrate cassette containers having different purge port characteristics.

5. The plurality of selectably variable cassette support purge ports include an exchangeable purge port nozzle module having at least one purge port nozzle, and are selectable from a plurality of different exchangeable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each of the variable positions of the two or more purge port nozzles defines an exchangeable purge port nozzle interface, at which the at least one substrate cassette container is coupled to the exchangeable purge port nozzle module. Each purge port nozzle is removably attached to the exchangeable purge port nozzle interface as an independent unit from another purge port nozzle of the exchangeable purge port nozzle module, and each independently attached purge port nozzle of the exchangeable purge port nozzle module is exchanged independently from different purge port nozzles of another different purge port nozzle module from the plurality of different exchangeable purge port nozzle modules, thereby effecting an exchange of the exchangeable purge port nozzle module with the different exchangeable purge port nozzle modules. The substrate mounting apparatus according to claim 1.

6. The plurality of selectably variable cassette support purge ports include a replaceable purge port nozzle module having at least one purge port nozzle, and are selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each of the variable positions of the two or more purge port nozzles defines a replaceable purge port nozzle interface, at which the at least one substrate cassette container is coupled to the replaceable purge port nozzle module. Each purge port nozzle is removably attached to the replaceable purge port nozzle interface as an independent unit from another purge port nozzle of the replaceable purge port nozzle module, and the replaceable purge port nozzle module is exchanged nozzle by nozzle with another different replaceable purge port nozzle module having different corresponding purge port nozzles. The substrate mounting apparatus according to claim 1.

7. The plurality of selectably variable cassette support purge ports include a replaceable purge port nozzle module having at least one purge port nozzle, and are selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each of the variable positions of the two or more purge port nozzles defines a replaceable purge port nozzle interface, at which the at least one substrate cassette container is coupled to the replaceable purge port nozzle module. Each different replaceable purge port nozzle module has a module frame, and each corresponding purge port nozzle is attached to the module frame such that the module frame is common to each corresponding purge port nozzle. The module frame defines a removable attachment connection common to the cassette support, whereby the removable connection of the module frame to the cassette support results in the attachment of each purge port nozzle of each purge port nozzle as a common module unit to its respective purge port nozzle interface. The substrate placement apparatus according to claim 1.

8. The module frame of each different replaceable purge port nozzle module having a corresponding purge port nozzle thereon is interchangeable as a module unit with another module frame of another different replaceable purge port nozzle module having a different corresponding purge port nozzle thereon. The substrate placement apparatus according to claim 7.

9. The plurality of selectably variable cassette support purge ports includes a replaceable purge port nozzle module having at least one purge port nozzle, and is selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each different replaceable purge port nozzle module corresponds to different predetermined purge port characteristics of different substrate cassette containers of the at least one substrate cassette container. The substrate placement apparatus according to claim 1.

10. A substrate placement apparatus, A frame configured to connect the substrate placement apparatus to a substrate processing apparatus, the frame having a transport opening through which a substrate is transported between the substrate placement apparatus and the substrate processing apparatus, and At least one substrate cassette container, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of a substrate to and from the at least one substrate cassette container through the transport opening. A plurality of selectably variable cassette support purge ports, each of the plurality of selectably variable cassette support purge ports having a variable purge port nozzle disposed on the cassette support, the variable purge port nozzle being variable between two or more selectable purge nozzle characteristics, the two or more selectable purge nozzle characteristics being such that the variable purge port nozzle having each selected purge nozzle characteristic complements and is configured to connect to at least one purge port of the at least one substrate cassette container, the plurality of selectably variable cassette support purge ports and comprising each of the variable purge port nozzles of each of the plurality of selectably variable cassette support purge ports having two or more purge port nozzles having variable positions, each defining an exchangeable purge port nozzle interface each of the plurality of selectably variable cassette support purge ports including an exchangeable purge port nozzle module having the two or more variable purge port nozzles, each selectable from a plurality of different exchangeable purge port nozzle modules defining a corresponding one of the two or more selectable purge nozzle characteristics for modular attachment to the exchangeable purge port nozzle interface, whereby the selectable attachment of the exchangeable purge port nozzle module changes the plurality of selectably variable cassette support purge ports from a first configuration having the purge port nozzle at a purge port nozzle position that conforms to and provides connection with a first container of the at least one substrate cassette container having a first predetermined purge port characteristic, to a second configuration having the purge port nozzle at a purge port nozzle position that conforms to and provides connection with a second container of the at least one substrate cassette container having a second predetermined purge port characteristic different from the first predetermined purge port characteristic, a substrate mounting device. Claim 11 The replaceable purge port nozzle interface is arranged to have a predetermined position relative to a predetermined datum of the cassette support, whereby each purge port nozzle of the different replaceable purge port nozzle modules attached to the replaceable purge port nozzle interface is deterministically arranged relative to a predetermined datum of each different substrate cassette container. The substrate mounting apparatus according to claim 10.

12. The replaceable purge port nozzle interface is arranged to have a predetermined position relative to a predetermined datum of the cassette support, whereby the selectable attachment of the replaceable purge port nozzle module provides for a deterministic positioning of each purge port nozzle substantially simultaneously with the attachment of the replaceable purge port nozzle module attached to the replaceable purge port nozzle interface relative to a predetermined datum of each different substrate cassette container. The substrate mounting apparatus according to claim 10.

13. Each of the replaceable purge port nozzle interfaces is arranged to have a predetermined position relative to a predetermined datum of the cassette support, whereby each of the replaceable purge port nozzle interfaces is deterministically arranged relative to a predetermined datum of each different substrate cassette container. The substrate mounting apparatus according to claim 10.

14. Each of the two or more selectable purge nozzle characteristics of each of the replaceable purge port nozzle interfaces and each of the different replaceable purge port nozzle modules is configured to provide for a high-speed exchange attachment of one of each of the different replaceable purge port nozzle modules with another one of the different replaceable purge port nozzle modules. The substrate mounting apparatus according to claim 10.

15. Each of the replaceable purge port nozzle interfaces defines a nozzle positioning datum that deterministically indicates each of the at least one purge port of different substrate cassette containers having different purge port characteristics. The substrate mounting apparatus according to claim 10.

16. Each purge port nozzle is removably attached to the replaceable purge port nozzle interface as an independent unit separate from another purge port nozzle of the replaceable purge port nozzle module, and each independently attached purge port nozzle of the replaceable purge port nozzle module is exchanged independently from different purge port nozzles of a different replaceable purge port nozzle module from a plurality of different replaceable purge port nozzle modules, thereby effecting an exchange of the replaceable purge port nozzle module with the different other replaceable purge port nozzle module. The substrate mounting apparatus according to claim 10.

17. Each purge port nozzle is removably attached to the replaceable purge port nozzle interface as an independent unit separate from another purge port nozzle of the replaceable purge port nozzle module, and the replaceable purge port nozzle module is exchanged nozzle by nozzle with a different other purge port nozzle module having different corresponding purge port nozzles. The substrate mounting apparatus according to claim 10.

18. Each different replaceable purge port nozzle module from a plurality of different replaceable purge port nozzle modules has a module frame, and each corresponding purge port nozzle is attached to the module frame such that the module frame is common to each corresponding purge port nozzle. The module frame defines a removable attachment connection common to the cassette support, whereby the removable connection of the module frame to the cassette support effects an attachment of each purge port nozzle as a common module unit to its respective purge port nozzle interface. The substrate mounting apparatus according to claim 10.

19. The module frame of each different replaceable purge port nozzle module having a corresponding purge port nozzle thereon is replaceable as a module unit with another module frame of a different replaceable purge port nozzle module having a corresponding different purge port nozzle thereon, for the substrate placement apparatus according to claim 18.

20. Each different replaceable purge port nozzle module from a plurality of different replaceable purge port nozzle modules corresponds to different predetermined purge port characteristics of different substrate cassette containers of the at least one substrate cassette container, for the substrate placement apparatus according to claim 10.

21. Providing a frame of a substrate placement apparatus, the frame being configured to connect the substrate placement apparatus to a substrate processing apparatus, the frame having a transfer opening, through which a substrate is transferred between the substrate placement apparatus and the substrate processing apparatus, and providing a cassette support, the cassette support being at least one substrate cassette container, connected to the frame for holding at least one substrate cassette container for transfer of a substrate to and from the at least one substrate cassette container through the transfer opening, and providing a plurality of selectably variable cassette support purge ports having two or more variable purge port nozzles disposed on the cassette support, the variable purge port nozzles being variable between two or more selectable predetermined purge nozzle characteristics, the two or more selectable purge nozzle characteristics being such that the variable purge port nozzles having each selected predetermined purge nozzle characteristic complement and are configured to connect to at least one purge port of the at least one substrate cassette container, each of the plurality of selectably variable cassette support purge ports having two or more purge port nozzle positions each defining a replaceable purge port nozzle interface. A step of selectively attaching different replaceable purge port nozzles to the substrate placement device, wherein for each selected predetermined purge nozzle characteristic of each of the plurality of selectively variable cassette support purge ports, the variable purge port nozzle at each position complements and is connected to the at least one purge port of the at least one substrate cassette container, defining each of the two or more purge port nozzle positions corresponding to the selected predetermined purge nozzle characteristic. A method comprising. **Claim 22** A step of arranging each of the replaceable purge port nozzle interfaces to have a predetermined position with respect to a predetermined datum of the cassette support, whereby each purge port nozzle interface is deterministically arranged with respect to the predetermined datum of each different substrate cassette container. The method according to claim 21, further comprising the step. **Claim 23** The plurality of selectively variable cassette support purge ports include replaceable purge port nozzle modules each having at least one purge port nozzle, and are selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. The method according to claim 21, further comprising a step of effecting a high-speed exchange of one of each of the different replaceable purge port nozzle modules with another one of the different replaceable purge port nozzle modules. **Claim 24** Each of the replaceable purge port nozzle interfaces defines a nozzle positioning datum that deterministically indicates each of the at least one purge port of the different substrate cassette containers having different purge port characteristics. The method according to claim 21. **Claim 25** The plurality of selectively variable cassette support purge ports include replaceable purge port nozzle modules each having at least one purge port nozzle, and are selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each purge port nozzle is removably attached to the replaceable purge port nozzle interface as an independent unit separate from another purge port nozzle of the replaceable purge port nozzle module, and each independently attached purge port nozzle of the replaceable purge port nozzle module is exchanged independently from different purge port nozzles of another different purge port nozzle module from the plurality of replaceable purge port nozzle modules. The method according to claim 21, further comprising the step of effecting an exchange of the replaceable purge port nozzle module with another different replaceable purge port nozzle module. Claim 26 The plurality of selectably variable cassette support purge ports include replaceable purge port nozzle modules each having at least one purge port nozzle, and are selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each purge port nozzle is removably attached to the purge port nozzle interface as an independent unit separate from another purge port nozzle of the replaceable purge port nozzle module. The method according to claim 21, further comprising the step of exchanging the replaceable purge port nozzle module nozzle-by-nozzle with different purge port nozzle modules having different corresponding purge port nozzles. Claim 27 The plurality of selectably variable cassette support purge ports include replaceable purge port nozzle modules each having at least one purge port nozzle, and are selectable from a plurality of different replaceable purge port nozzle modules, each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics. Each different replaceable purge port nozzle module has a module frame to which each corresponding purge port nozzle is attached such that the module frame is common to each corresponding purge port nozzle, and the module frame defines a removable attachment connection common to the cassette support, the method further comprising removably connecting the module frame to the cassette support so as to effect attachment of each of the purge port nozzles as a common module unit to its respective purge port nozzle interface, the method of claim 21.

28. The module frame of each different replaceable purge port nozzle module having a corresponding purge port nozzle thereon is interchangeable as a module unit with another module frame of another different replaceable purge port nozzle module having a different corresponding purge port nozzle thereon, the method of claim 27.

29. The plurality of selectably variable cassette support purge ports includes a replaceable purge port nozzle module having at least one purge port nozzle, selectable from a plurality of different replaceable purge port nozzle modules each defining a corresponding one of the two or more selectable predetermined purge nozzle characteristics, the at least one substrate cassette container being two or more substrate cassette containers, each different replaceable purge port nozzle module corresponding to a different predetermined purge port characteristic of a different one of the two or more substrate cassette containers, the method of claim 21.

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