Fe-based alloy strip processed product and method for manufacturing the same

Abstract

To provide a method for producing a processed Fe-alloy ribbon with high process efficiency, and a processed Fe-alloy ribbon.SOLUTION: A method for producing a processed Fe-alloy ribbon includes the step of emitting long-pulse laser light to an Fe-alloy ribbon at an irradiation density of 2 J / cm2 to 3600 J / cm2 to drill or cut it. There is also provided a processed Fe-alloy ribbon.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a processed product of an Fe-based alloy ribbon and a method for manufacturing the same.

Background Art

[0002] For example, processed products of Fe-based alloy ribbons are used in transformers, electronic components, etc. When manufacturing a processed product of an Fe-based alloy ribbon, laser processing is widely used, and hole drilling, cutting, etc. are performed on the Fe-based alloy ribbon by laser light.

[0003] For example, Non-Patent Document 1 describes laser processing technology.

Prior Art Documents

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Laser processing technology has been conventionally studied, including the technology of Non-Patent Document 1 and the like. However, at present, the technology capable of processing an Fe-based alloy ribbon with low irradiation energy (hereinafter sometimes referred to as "high processing efficiency") is insufficient.

[0006] The present disclosure has been made in view of such a situation, and the problem to be solved by one embodiment of the present invention is to provide a method for manufacturing a processed product of an Fe-based alloy ribbon with high processing efficiency. Another problem to be solved by an embodiment of the present invention is to provide a processed product of an Fe-based alloy ribbon obtained by the above manufacturing method.

Means for Solving the Problems

[0007] This disclosure includes the following aspects. <1> A method for manufacturing a processed product of an Fe-based alloy ribbon, including a step of irradiating the Fe-based alloy ribbon with laser light having a long pulse at an irradiation density of 2 J / cm 2 ~3600 J / cm 2 to perform drilling or cutting. <2> The method for manufacturing a processed product of an Fe-based alloy ribbon according to <1>, wherein the light source of the laser light is a Nd:YAG laser. <3> The method for manufacturing a processed product of an Fe-based alloy ribbon according to <1> or <2>, wherein the irradiation energy per pulse of the laser light is 0.5 mJ or more and less than 100 mJ. <4> The method for manufacturing a processed product of an Fe-based alloy ribbon according to any one of <1> to <3>, wherein the height of the laser irradiation mark from the surface of the processed product of the Fe-based alloy ribbon is 10 μm or less. <5> The method for manufacturing a processed product of an Fe-based alloy ribbon according to any one of <1> to <4>, wherein the above irradiation is performed with a plurality of Fe-based alloy ribbons stacked. <6> The method for manufacturing a processed product of an Fe-based alloy ribbon according to any one of <1> to <5>, wherein the Fe-based alloy ribbon is an Fe-based amorphous alloy ribbon. <7> A processed product of an Fe-based alloy ribbon having a hole or a cut portion by laser irradiation, and the height of the laser irradiation mark from the surface is 10 μm or less. <8> The processed product of an Fe-based alloy ribbon according to <7>, which is a processed product of an Fe-based amorphous alloy ribbon.

Advantages of the Invention

[0008] According to an embodiment of the present invention, a method for manufacturing a processed product of an Fe-based alloy ribbon with high processing efficiency is provided. According to another embodiment of the present invention, a processed product of an Fe-based alloy ribbon obtained by the above manufacturing method is provided.

Brief Description of the Drawings

[0009]

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Mode for Carrying Out the Invention

[0010] Hereinafter, the details of the Fe-based alloy strip processed product and its manufacturing method according to the present disclosure will be described.

[0011] In the present disclosure, the numerical range indicated by using "~" means a range including the numerical values described before and after "~" as the minimum value and the maximum value, respectively. In the numerical ranges described step by step in the present disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the upper limit value or the lower limit value of the numerical range of other step-by-step descriptions. Also, in the numerical ranges described in the present disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the value shown in the examples. In the present disclosure, a combination of two or more preferred embodiments is a more preferred embodiment. In the present disclosure, the amount of each component means the total amount of a plurality of substances when there are a plurality of substances corresponding to each component, unless otherwise specified. In the present disclosure, the term "step" includes not only an independent step but also a step that cannot be clearly distinguished from other steps, as long as the intended purpose of the step is achieved.

[0012] The drawings referred to in the following description are shown illustratively and schematically, and the present disclosure is not limited to these drawings. Also, the reference numerals in the drawings may be omitted.

[0013] <Manufacturing Method of Fe-based Alloy Strip Processed Product> The manufacturing method of the Fe-based alloy strip processed product according to the present disclosure uses a long-pulse laser beam of 2 J / cm 2 ~3600 J / cm 2A step of irradiating a Fe-based alloy ribbon with an irradiation density to perform drilling or cutting (hereinafter sometimes referred to as "laser light irradiation step") is included.

[0014] Laser processing irradiates a workpiece such as a Fe-based alloy ribbon with laser light, and by applying locally high-density irradiation energy, the irradiated portion is heated to perform processing such as drilling and cutting. Conventionally, techniques using laser light with a short pulse width have been studied in order to improve processing efficiency. For example, a laser with a short pulse width obtained by a Q-switch, as described in Non-Patent Document 1, is used at a high irradiation density. However, even such laser light of Q-switch pulses has not been able to sufficiently increase the processing efficiency. When irradiating a workpiece with laser light at a high irradiation density, the plasma generated from the irradiated portion increases, so the absorption of laser light by the plasma (hereinafter sometimes referred to as "plasma shielding") becomes large, making it difficult to apply sufficient irradiation energy to the irradiated portion.

[0015] On the other hand, the method for manufacturing a Fe-based alloy ribbon processed product according to the present disclosure uses long-pulse laser light without using Q-switch pulses, and controls the irradiation density in the range of 2 J / cm 2 ~3600 J / cm 2 Therefore, when irradiating a Fe-based alloy ribbon with laser light, plasma shielding can be reduced, and it is possible to perform drilling or cutting on the Fe-based alloy ribbon with low irradiation energy (that is, the processing efficiency is high).

[0016] [Laser light] The laser light of the long pulse has a long pulse width of about 100 microseconds, and the irradiation density is extremely small, about 1 / 10,000 or less, compared with the laser light of the Q-switch pulse (for example, the pulse width is on the order of nanoseconds). In addition, the laser light of the long pulse contains a plurality of sub-pulses (for example, having a pulse width on the order of 100 nanoseconds and a small irradiation density) continuously in one pulse. An example of the pulse of the laser light of the long pulse is shown in FIG. 1. When such laser light of the long pulse is irradiated on the Fe-based alloy ribbon, it will be irradiated with a plurality of sub-pulses having a small irradiation density. Since each sub-pulse has a small irradiation density, when irradiated on the Fe-based alloy ribbon, the generation of plasma is suppressed, and the processing of the Fe-based alloy ribbon is promoted by irradiating a plurality of sub-pulses continuously. In addition, the irradiation density of the laser light of the long pulse is 2 J / cm 2 ~3600 J / cm 2 . By setting the irradiation density to 2 J / cm 2 or more, while ensuring the energy required for processing the Fe-based alloy ribbon, by setting the irradiation density to 3600 J / cm 2 or less, the generation of plasma can be suppressed. From the above, it is presumed that by using the laser light of the long pulse and setting the irradiation density in the range of 2 J / cm 2 ~3600 J / cm 2 , high processing efficiency can be obtained, but the scope of the present disclosure is not limited by the above presumption at all.

[0017] From the viewpoint of processing efficiency, the irradiation density of the laser light of the long pulse is preferably 18 J / cm 2 or more, and more preferably 32 J / cm 2 or more. In addition, the irradiation density of the laser light of the long pulse may be 1800 J / cm 2 or less.

[0018] The laser oscillator that irradiates laser light is not particularly limited as long as it can output long-pulse laser light. As a general laser oscillator, those including an excitation source (a light source for applying energy to the laser medium), a laser medium (a substance containing an element that absorbs the light of the excitation source), and a resonator (a structure surrounded by mirrors that reflect light of a specific wavelength) can be mentioned. When the laser oscillator includes a Q-switch (a structure for obtaining a high peak output by changing the light transmittance in the resonator), long-pulse laser light can be output by turning off the Q-switch.

[0019] Examples of the laser oscillator include, for example, a Nd:YAG laser (wavelength: 1064 nm), a Nd:YLF laser (wavelength: 1050 nm), etc., and a Nd:YAG laser can be preferably used. As the Nd:YAG laser, commercially available products can be used well. For example, the Nd:YAG laser "GCR-200" manufactured by Spectra Physics can be mentioned.

[0020] The irradiation energy per pulse of the long-pulse laser light is preferably 0.5 mJ or more and less than 100 mJ. Thereby, it becomes easy to reduce the height of the laser irradiation mark from the surface of the Fe-based alloy strip processed product. Details of the laser irradiation mark will be described later. The irradiation energy per pulse of the long-pulse laser light is more preferably 0.5 mJ to 50 mJ, still more preferably 0.5 mJ to 20 mJ, and even more preferably 0.5 mJ to 10 mJ. Also, the laser light may be irradiated with only one pulse or may be irradiated with a plurality of pulses.

[0021] Here, the depth of the hole or recess formed in the Fe-based alloy strip when irradiating 1 mJ of long-pulse laser light from the planar shape of the Fe-based alloy strip is defined as the processing amount. The higher the processing amount, the better the processing efficiency, and the processing amount is preferably 50 μm or more, and more preferably 200 μm or more. The depth of the hole is the total thickness of the Fe-based alloy ribbons for which a through-hole can be formed by performing a drilling process on a plurality of stacked Fe-based alloy ribbons as in Example 3 described later, and is defined as the depth of the hole. The depth of the recess is the maximum value of the depth of the profile obtained by measuring the profile of the recess using a white light interference microscope. The white light interference microscope may be a commercially available product, and examples thereof include VS1800 manufactured by Hitachi High-Technologies Corporation. The cross-sectional profile of the recess may be obtained along a randomly selected straight line passing through the center of the recess from the three-dimensional profile of the recess measured by the white light interference microscope, and the depth of the recess may be determined.

[0022] [Irradiation with laser light] By irradiating the Fe-based alloy ribbon with laser light, a drilling process or a cutting process can be performed. When performing a drilling process, by irradiating laser light from the surface of the Fe-based alloy ribbon, a drilling process can be performed on the Fe-based alloy ribbon, and a hole can be provided in the Fe-based alloy ribbon. When continuously performing the drilling process, for example, the Fe-based alloy ribbon is placed on a stage movable in the in-plane direction, and the Fe-based alloy ribbon is moved in the in-plane direction while intermittently irradiating laser light from the surface of the Fe-based alloy ribbon. Thereby, the drilling process can be continuously performed on the Fe-based alloy ribbon. When performing a cutting process, for example, the Fe-based alloy ribbon is placed on a stage movable in the surface direction, and the Fe-based alloy ribbon is moved in the surface direction while continuously irradiating laser light from the surface of the Fe-based alloy ribbon. Thereby, a cutting process can be performed on the Fe-based alloy ribbon, and a cut portion can be provided in the Fe-based alloy ribbon.

[0023] [Laser irradiation mark] When laser light is irradiated on the Fe-based alloy ribbon to perform a drilling process or a cutting process, a laser irradiation mark is formed on the irradiated portion (which may also include the vicinity thereof) of the Fe-based alloy ribbon irradiated with the laser light. Therefore, the Fe-based alloy ribbon processed product has a laser irradiation mark resulting from the irradiation of the laser light. When the Fe-based alloy ribbon is drilled, for example, as shown in Fig. 2, the laser irradiation mark 10 is a region composed of a hole 11 penetrating the Fe-based alloy ribbon processed product 100 and a portion 12 surrounding the hole 11 in a circumferential shape (hereinafter sometimes referred to as "debris"). Also, when the Fe-based alloy ribbon is cut, for example, as shown in Fig. 3, the laser irradiation mark 20 is a region composed of a cut portion 21 penetrating the Fe-based alloy ribbon processed product 200 and a portion 22 along the cut portion 21 (hereinafter sometimes referred to as "debris"). Debris is formed by solidification of the melted portion of the Fe-based alloy ribbon irradiated with laser light, and protrudes from the surface of the Fe-based alloy ribbon processed product.

[0024] By irradiating with laser light, compared with the processing method of applying physical external force, as shown in Figs. 2 and 3, the generation of processing debris such as metal fragments can be suppressed. Further, as shown in Figs. 2 and 3, holes and cut portions with good shapes can be formed in the Fe-based alloy ribbon.

[0025] From the viewpoint of reducing the unevenness on the surface of the Fe-based alloy ribbon processed product, the height of the laser irradiation mark from the surface of the Fe-based alloy ribbon processed product (that is, the height of the debris, hereinafter sometimes referred to as "the height of the laser irradiation mark") is preferably 10 μm or less. Thereby, for example, when a plurality of Fe-based alloy ribbons are stacked and stored, it becomes easier to suppress damage, distortion, etc. of the Fe-based alloy ribbon processed product caused by debris.

[0026] From the viewpoint of further reducing the unevenness on the surface of the Fe-based alloy ribbon processed product, the height of the laser irradiation mark from the surface of the Fe-based alloy ribbon processed product is more preferably 5 μm or less.

[0027] The height of the laser irradiation mark is the maximum value of the height of the obtained profile by measuring the three-dimensional profile of the laser irradiation mark using a white interference microscope. The white interference microscope may be a commercially available product, for example, VS1800 manufactured by Hitachi High-Technologies Corporation. When measuring the height of a laser irradiation mark on a hole formed by drilling, the height of the laser irradiation mark may be determined from the relative height of the laser irradiation mark with respect to the non-laser-irradiated portion by obtaining a cross-sectional profile passing through the center of the laser irradiation mark from the three-dimensional profile of the laser irradiation mark obtained by a white light interference microscope. When measuring the height of a laser irradiation mark on a cut portion formed by cutting, the height of the laser irradiation mark may be determined from the relative height of the laser irradiation mark with respect to the non-laser-irradiated portion by obtaining a cross-sectional profile along a randomly selected straight line perpendicular to the cutting direction from the three-dimensional profile of the cut portion (laser irradiation mark) obtained by a white light interference microscope.

[0028] The diameter of a hole obtained by drilling may be measured using, for example, a scanning electron microscope. For example, after obtaining a scanning electron microscope image including the hole using a scanning electron microscope, the diameter may be measured based on a randomly selected straight line passing through the center of the hole.

[0029] When performing drilling on an Fe-based alloy ribbon, by setting the irradiation energy per pulse of a long-pulse laser beam to be in the range of 0.5 mJ to 20 mJ, the diameter of the hole can be easily controlled in the range of 20 μm to 80 μm, and the height of the laser irradiation mark can be easily made small, 10 μm or less.

[0030] From the viewpoint of improving production efficiency, a plurality of Fe-based alloy ribbons may be stacked and irradiated with laser light. As a result, since laser processing can be performed on a plurality of Fe-based alloy ribbons at once, for example, as shown in FIG. 4, a plurality of processed Fe-based alloy ribbon products 100 (100A, 100B) subjected to drilling can be obtained simultaneously.

[0031] From the viewpoint of further improving production efficiency, it is preferable to stack four or more Fe-based alloy ribbons and irradiate them with laser light.

[0032] By irradiating laser light onto a plurality of stacked Fe-based alloy ribbons, the height of the laser irradiation marks on the Fe-based alloy ribbons other than the topmost Fe-based alloy ribbon that first receives the laser light irradiation can be reduced compared to the topmost Fe-based alloy ribbon. For example, in FIG. 4, the height of the laser irradiation marks on other Fe-based alloy ribbon products 100 (100B) can be kept lower compared to the topmost Fe-based alloy ribbon product 100A that is most affected by the laser irradiation. Therefore, Fe-based alloy ribbon products 100 (100B) with smaller surface irregularities can be easily manufactured.

[0033] Also, when laser light is irradiated onto a plurality of stacked Fe-based alloy ribbons, for example, as shown in FIG. 4, the topmost Fe-based alloy ribbon product 100A has the largest hole diameter, and the closer to the bottom surface, the smaller the hole diameter of the Fe-based alloy ribbon product 100 becomes, and the bottommost Fe-based alloy ribbon product 100B has the smallest hole diameter. Here, the difference (D - D') between the hole diameter D on the surface of the topmost Fe-based alloy ribbon product 100A and the hole diameter D' on the back surface of the bottommost Fe-based alloy ribbon product 100B is defined as dD, and the total thickness of the Fe-based alloy ribbon product is defined as dL. dD / dL represents the inclination of the holes from the topmost to the bottommost, that is, the taper degree. The smaller dD / dL is, the smaller the change in the hole diameter per unit thickness of the Fe-based alloy ribbon product, and a plurality of Fe-based alloy ribbon products with a small difference in hole diameter can be obtained simultaneously. It is preferably 0.2 or less, and more preferably 0.15 or less.

[0034] [Fe-based alloy ribbon] The Fe-based alloy ribbon may be amorphous or crystalline. In the method for manufacturing an Fe-based alloy ribbon product according to the present disclosure, since the irradiation density of the laser light irradiated onto the Fe-based alloy ribbon can be reduced, the influence of heat on the Fe-based alloy ribbon can be reduced. Therefore, the method for manufacturing an Fe-based alloy ribbon product according to the present disclosure can be suitably used for amorphous Fe-based alloy ribbons that are easily embrittled due to a decrease in toughness caused by the influence of heat.

[0035] An Fe-based alloy refers to an alloy with Fe (iron) as the main component. Here, the main component refers to the component with the highest content ratio (mass%). An Fe-based alloy ribbon refers to a ribbon made of an Fe-based alloy.

[0036] The chemical composition of the Fe-based alloy ribbon is not particularly limited, and any chemical composition of the Fe-based alloy (i.e., a chemical composition with Fe (iron) as the main component) is acceptable. For example, the chemical composition of the Fe-based alloy ribbon may consist of Fe as the main component, selected elements other than Fe, and impurity elements that may be contained. The content of Fe may be, for example, 75 mass% to 99.8 mass%, preferably 80 mass% to 96 mass%, based on the total content of 100 mass% of Fe and the selected elements. The selected elements may be only one kind or two or more kinds. The types and contents of the selected elements will be described later by giving examples of chemical compositions. Impurity elements may be mixed into or added to the Fe-based alloy ribbon depending on the conditions of manufacturing equipment, raw materials, etc. The impurity elements may be only one kind or two or more kinds. The types of impurity elements will be described later by giving examples of chemical compositions. The total content of the impurity elements is preferably 1.5 mass% or less based on the total content of 100 mass% of Fe and the selected elements. The total content of the impurity elements is more preferably 1.0 mass% or less, still more preferably 0.8 mass% or less, and even more preferably 0.75 mass% or less.

[0037] Examples of the Fe-based alloy ribbon include Fe-Co alloys (e.g., FeCo, FeCoV, etc.), Fe-Ni alloys (e.g., FeNi, FeNiMo, FeNiCr, FeNiSi, etc.), Fe-Al alloys or Fe-Si alloys (e.g., FeAl, FeAlSi, FeAlSiCr, FeAlSiTiRu, FeAlO, etc.), Fe-Ta alloys (e.g., FeTa, FeTaC, FeTaN, etc.), and Fe-Zr alloys (e.g., FeZrN, etc.). For Fe-based alloy ribbons other than those described above, further examples of Fe-based amorphous alloy ribbons and Fe-based crystalline alloy ribbons will be described below.

[0038] (Fe-based amorphous alloy ribbon) Examples of Fe-based amorphous alloy ribbons include amorphous alloys such as Fe-B-based alloys, Fe-Si-C-based alloys, Fe-Si-B-based alloys, Fe-Si-B-P-based alloys, Fe-Si-B-C-P-based alloys, Fe-P-B-based alloys, Fe-P-C-based alloys, Fe-Si-P-based alloys, Fe-Zr-based alloys, Fe-Hf-based alloys, and Fe-Ti-based alloys. Fe-based amorphous alloy ribbons may contain Co, Ni, Mn, Cr, V, Mo, Nb, Ta, Hf, Zr, Ti, Cu, Au, Ag, Sn, Ge, Re, Ru, Zn, In, Ga, etc.

[0039] The following specific examples of the chemical composition of Fe-based amorphous alloy ribbons include the following chemical composition examples (1) to (3). Note that in chemical composition examples (1) to (5), some chemical compositions may overlap with each other.

[0040] - Chemical composition example (1)- As a chemical composition example (1) of an Fe amorphous-based alloy ribbon, for example, when the total amount of Fe, Si, and B is 100 atomic%, a chemical composition in which Si is 0 atomic% to 10 atomic% or less and B is 10 atomic% to 20 atomic% or less, with the balance being Fe, can be cited. In chemical composition example (1), as additives or impurities, elements other than Fe, Si, and B, such as Mn, S, C, Al, etc., may be included. When additives or impurities are included, the total proportion of Fe, Si, and B may be 95 mass% or more, and may be 98 mass% or more.

[0041] - Chemical composition example (2)- As a chemical composition example (2) of an Fe-based amorphous alloy ribbon, a chemical composition containing 50 atomic% or more of Fe can be cited, a chemical composition containing 60 atomic% or more of Fe may be used, and a chemical composition containing 70 atomic% or more of Fe may be used. In Chemical Composition Example (2), the ratio of Si may be 2 atomic % to 25 atomic %, the ratio of B may be 2 to 25 atomic %, and the balance may be Fe and impurities. The ratio of Si may be 2 atomic % to 22 atomic %, the ratio of B may be 5 to 16 atomic %, and the balance may be Fe and impurities. The ratio of Si may be atomic % to 10 atomic %, the ratio of B may be 10 to 16 atomic %, and the balance may be Fe and inevitable impurities. In Chemical Composition Example (2), examples of the impurities include C, Al, Cr, W, P, Mn, Zn, Ti, and Cu. In Chemical Composition Example (2), the content of the impurities is preferably less than 2 atomic %, and particularly preferably 1 atomic % or less.

[0042] - Chemical Composition Example (3)- As a chemical composition example (3) of the Fe-based amorphous alloy ribbon, there is a chemical composition containing 1 atomic % to 15 atomic % of Si and 8 atomic % to 20 atomic % of B, with the balance being Fe and impurities. As Chemical Composition Example (3), an Fe-Si-B-C system alloy may be mentioned, which may have a chemical composition containing 1 atomic % to 15 atomic % of Si, 8 atomic % to 20 atomic % of B, and 3 atomic % or less of C, with the balance being Fe and impurities. In Chemical Composition Example (3), at least one selected from the group consisting of Co, Ni, P, Mn, Cr, V, Mo, Nb, Ta, Hf, Zr, Ti, Au, Ag, Sn, Ge, Re, Ru, Zn, In, and Ga may be included in a total ratio of 5 atomic % or less with respect to the amount of Fe. Also, examples of the impurities include S, O, N, Al, etc.

[0043] - Chemical Composition Example (4)- As a chemical composition example (4) of the Fe-based amorphous alloy ribbon, the general formula: Fe 100-a-b-c-d B a Si b C c M dIt is represented by, where M is at least one element of Al, Sn, Cr, Mn, Ni, and Cu, a, b, c, and d are atomic percentages, and chemical compositions satisfying 7 ≤ a ≤ 20, 1 ≤ b ≤ 19, 0 ≤ c ≤ 4, and 7 ≤ d ≤ 2 are exemplified. It may satisfy 75 ≤ 100 - a - b - c - d. Also, the Si content may be 1 atomic percentage or more, or 3.5 atomic percentages or more. The B content may be 7 atomic percentages to 20 atomic percentages. C is an optional component, but when C is included, the C content may be 0.2 atomic percentages to 4 atomic percentages. M is an optional component, but when M is included, the M content may be more than 0 atomic percentage and 2 atomic percentages or less. In Chemical Composition Example (4), impurities may be included. For example, impurities such as S and P may be substituted for Fe within a range of 1 atomic percentage or less.

[0044] - Chemical Composition Example (5) - As a chemical composition example (5) of an Fe-based crystalline alloy ribbon, the general formula: Fe 100-a-b-c M a Si b B c (atomic percentage) (However, M is at least one element selected from Cr, Mn, Ti, V, Zr, Nb, Mo, Hf, Ta, W, and Sn, and 0 ≤ a ≤ 10, 0 ≤ b ≤ 20, 4 ≤ c ≤ 20, and 10 ≤ a + b + c + d ≤ 35). Chemical compositions represented thereby are exemplified. Less than 50 atomic percentages of Fe may be substituted with at least one of Co and Ni. Less than 50 atomic percentages of M may be substituted with at least one selected from the group consisting of Zn, As, Se, Sb, In, Cd, Ag, Bi, Mg, Sc, Re, Au, platinum group elements, Y, and rare earth elements. Less than 50 atomic percentages of the total amount of Si and B may be substituted with at least one selected from C, Al, P, Ga, and Ge.

[0045] (Fe-based crystalline alloy ribbon) Examples of Fe-based crystalline alloy ribbons include, for example, Fe-Cu-B alloys, Fe-Cu-Si-B alloys, Fe-Cu-Si-B-P alloys, Fe-Ni-Cu-Si-B alloys, Fe-Si-B-Cu-Nb alloys, and the like. Examples of the Fe-based crystalline alloy ribbon include Fe-B-Cu-Nb alloys, Fe-Zr-B-(Cu) alloys, Fe-Zr-Nb-B-(Cu) alloys, Fe-Zr-P-(Cu) alloys, Fe-Zr-Nb-P-(Cu) alloys, Fe-Ta-C alloys, Fe-Al-Si-Nb-B alloys, Fe-Al-Si-Ni-Nb-B alloys, and the like. Furthermore, examples of the Fe-based crystalline alloy ribbon include Fe-Cu-Si-B-C alloys, Fe-Cu-Si-B-C-P alloys, Fe-Cu-P-B alloys, Fe-Cu-P-C alloys, and the like. The Fe-based crystalline alloy ribbon may contain Co, Ni, Mn, Cr, V, Mo, Nb, Ta, Hf, Zr, Ti, Au, Ag, Sn, Ge, Re, Ru, Zn, In, Ga, and the like.

[0046] Hereinafter, as specific examples of the chemical composition of the Fe-based crystalline alloy ribbon, the following chemical composition examples (6) to (8) are given. Note that some of the chemical compositions in chemical composition examples (6) to (8) may overlap with each other.

[0047] - Chemical composition example (6)- As chemical composition example (6) of the Fe-based crystalline alloy ribbon, the general formula: (Fe 1-a M a ) 100-x-y-z-α-β-γ Cu x Si y B z M’ α M” β X γ (atomic %) (where M is Co and / or Ni, M’ is at least one element selected from the group consisting of Nb, Mo, Ta, Ti, Zr, Hf, V, Cr, Mn, and W, M” is at least one element selected from the group consisting of Al, platinum group elements, Sc, rare earth elements, Zn, and Re, X is at least one element selected from the group consisting of C, Ge, P, Ga, Sb, In, Be, and As, and a, x, y, z, α, β, and γ each satisfy 0 ≦ a ≦ 0.5, 0.1 ≦ x ≦ 3, 0 ≦ y ≦ 30, 0 ≦ z ≦ 25, 5 ≦ y + z ≦ 30, 0 ≦ α ≦ 20, 0 ≦ β ≦ 20, and 0 ≦ γ ≦ 20.) The chemical composition represented by this is given. In Chemical Composition Example (6), a, x, y, z, α, β, and γ may each satisfy the ranges of 0 ≦ a ≦ 0.1, 0.7 ≦ x ≦ 1.3, 12 ≦ y ≦ 17, 5 ≦ z ≦ 10, 1.5 ≦ α ≦ 5, 0 ≦ β ≦ 1, and 0 ≦ γ ≦ 1.

[0048] - Chemical Composition Example (7)- As a chemical composition example (7) of an Fe-based crystalline alloy ribbon, there is a chemical composition containing 0.1 atomic % to 3 atomic % of Cu and 10 atomic % to 20 atomic % of B, with the balance being Fe and impurities. As a chemical composition example (7), an Fe-Cu-Si-B-based alloy can be mentioned, which may have a chemical composition containing 0.1 atomic % to 3 atomic % of Cu, 0.1 atomic % to 7 atomic % of Si, and 10 atomic % to 20 atomic % of B, with the total of Si and B being 10 atomic % to 24 atomic %, and the balance being Fe and impurities. In Chemical Composition Example (7), at least one selected from the group consisting of Co, Ni, P, Mn, Cr, V, Mo, Nb, Ta, Hf, Zr, Ti, Au, Ag, Sn, Ge, Re, Ru, Zn, In, and Ga may be contained in a proportion of 5 atomic % or less in total with respect to the amount of Fe. Also, as impurities, S, O, N, Al, etc. can be mentioned.

[0049] - Chemical Composition Example (8)- As a chemical composition example (8) of an Fe-based crystalline alloy ribbon, the general formula: Fe 100-a-b-c-d M a Si b B c Cu d(Atomic %) (where M is at least one element selected from Ti, V, Zr, Nb, Mo, Hf, Ta, and W; 0 ≦ a ≦ 10, 0 ≦ b ≦ 20, 4 ≦ c ≦ 20, 0.1 ≦ d ≦ 3, and 10 ≦ a + b + c + d ≦ 35). Less than 50 atomic % of Fe may be substituted with at least one of Co and Ni. Up to 50 atomic % of M may be substituted with at least one selected from the group consisting of Cr, Mn, Zn, As, Se, Sb, Sn, In, Cd, Ag, Bi, Mg, Sc, Re, Au, platinum group elements, Y, and rare earth elements. Up to 50 atomic % of the total amount of Si and B may be substituted with at least one selected from C, Al, P, Ga, and Ge.

[0050] The thickness of the Fe-based alloy ribbon is not particularly limited and may be, for example, 10 μm to 50 μm. The thickness of the Fe-based alloy ribbon is preferably 20 μm to 30 μm.

[0051] The method for manufacturing the Fe-based alloy ribbon is not particularly limited and may be a known method. For example, an Fe-based alloy ribbon can be manufactured by casting a melt of raw materials formulated to have the above composition.

[0052] Commercially available products may be used as the Fe-based alloy ribbon. Examples of commercially available products of Fe-based amorphous alloy ribbons include 2605HB1M (registered trademark) (Fe-Si-B system), 2605SA1 (Fe-Si-B system), 2605S3A (Fe-Si-B-Cr system), 2705M (Co-Fe-Ni-Si-B-Mo system), 2714A (Co-Fe-Ni-Si-B system), and 2826MB (Ni-Fe-Mo-B system) of the Metglas (registered trademark) series manufactured by Hitachi Metals, Ltd. Examples of commercially available products of Fe-based crystalline alloy ribbons include FT-3M (Fe-Si-B-Cu-Nb system) of the Metglas (registered trademark) series manufactured by Hitachi Metals, Ltd.

[0053] [Other manufacturing processes] The manufacturing method of the Fe-based alloy strip processed product according to the present disclosure may include other processes than the laser light irradiation process. For example, before and / or after irradiating the Fe-based alloy strip with laser light, known processes such as shear cutting, pressing, punching, cutting, etc. may be performed on the Fe-based alloy strip. Also, in the laser light irradiation process, after continuously performing hole drilling on the Fe-based alloy strip, cutting may be performed along the continuous holes.

[0054] <Fe-based alloy strip processed product> The Fe-based alloy strip processed product according to the present disclosure can be preferably manufactured by the manufacturing method of the Fe-based alloy strip processed product according to the present disclosure.

[0055] The Fe-based alloy strip processed product has holes or cut portions due to laser irradiation marks, and the height of the laser irradiation marks is preferably 10 μm or less. Thereby, for example, when a plurality of Fe-based alloy strips are stacked and stored, it becomes easier to suppress damage, distortion, etc. of the Fe-based alloy strip processed product caused by debris.

[0056] From the viewpoint of further reducing the unevenness on the surface of the Fe-based alloy strip processed product, the height of the laser irradiation marks from the surface of the Fe-based alloy strip processed product is more preferably 5 μm or less.

[0057] As described above, the Fe-based alloy strip may be amorphous or crystalline. The manufacturing method of the Fe-based alloy strip processed product according to the present disclosure is suitable for an amorphous Fe-based alloy strip that is easily embrittled due to a decrease in toughness caused by the influence of heat, and a Fe-based amorphous alloy strip processed product with suppressed embrittlement can be obtained. The chemical composition of the Fe-based alloy strip is also as described above.

Examples

[0058] Hereinafter, the present disclosure will be described more specifically with reference to examples. However, the present disclosure is not limited to these examples.

[0059] <Laser oscillator> The Spectra Physics Nd:YAG laser "GCR-200", which can be used in long-pulse mode and Q-switch mode, was used. The characteristics of the long-pulse laser light are shown below. · Wavelength: 1064 nm · Frequency: 10 Hz · Irradiation density: 3 J / cm 2 ~60 J / cm 2 · Irradiation energy: 1 mJ to 20 mJ per pulse As illustrated in Fig. 1, the pulses of the long-pulse laser light contained a plurality of sub-pulses continuously within one pulse.

[0060] <Fe-based alloy ribbon> As the Fe-based alloy ribbon, "Metglas (registered trademark) 2605HB1M (registered trademark)" manufactured by Hitachi Metals, Ltd. (Fe-based amorphous alloy ribbon, composition: Fe-Si-B, thickness: 25 μm) was used.

[0061] <Observation of laser irradiation marks> The laser irradiation marks were observed at a magnification of 200 times using a scanning electron microscope "JCM-6000Plus" manufactured by JEOL Ltd.

[0062] <Measurement of the height of laser irradiation marks> Regarding the holes formed in the Fe-based alloy ribbon, the profile of the laser irradiation marks was measured using a white light interference microscope "VS1800" manufactured by Hitachi High-Technologies Corporation, and the maximum value of the height of the obtained profile was taken as the height of the laser irradiation marks. From the three-dimensional profile of the laser irradiation mark portion obtained by the white light interference microscope, a cross-sectional profile passing through the center of the laser irradiation mark was obtained, and the height of the laser irradiation mark was determined from the relative height of the laser irradiation mark with respect to the non-laser-irradiated portion. Also, when a plurality of holes were formed on the Fe-based alloy ribbon, the holes to be measured were randomly selected and the height of the laser irradiation marks was measured.

[0063] <Measurement of the diameter of the holes> The diameter of the holes obtained by the drilling process was measured from the scanning electron microscope images obtained during the above observation of the laser irradiation marks. For all the holes on the scanning electron microscope images, the diameter was measured based on a randomly selected straight line passing through the center of the hole, and the average value of the obtained diameters was determined.

[0064] <Comparison between Long Pulse and Q-Switch Pulse> (Example 1) GCR-200 was set to the long pulse mode, an Fe-based alloy ribbon was placed on a stage movable in the plane direction, and a long pulse laser beam was irradiated onto the surface of the Fe-based alloy ribbon with 1 pulse (irradiation energy: 20 mJ). The above irradiation was repeated while moving the Fe-based alloy ribbon in the plane direction at a stage feed rate of 2 mm / s. As a result, as shown in FIG. 5, an Fe-based alloy ribbon processed product of Example 1 with three consecutive hole drilling processes was obtained. As shown in FIG. 6, the height of the laser irradiation marks of the Fe-based alloy ribbon processed product of Example 1 was as low as 5 μm or less, and the surface unevenness was small.

[0065] (Example 2) Hole drilling was performed in the same manner as in Example 1 except that the irradiation energy per pulse was set to 1 mJ. As a result, as shown in FIG. 7, an Fe-based alloy ribbon processed product of Example 2 with three consecutive hole drilling processes was obtained. As shown in FIG. 8, the height of the laser irradiation marks of the Fe-based alloy ribbon processed product of Example 2 was as low as 4 μm or less, and the surface unevenness was small.

[0066] (Example 3) Hole drilling was performed in the same manner as in Example 1 except that the irradiation energy per pulse was 1 mJ and three Fe-based alloy ribbons were stacked. As a result, as shown in FIG. 9, not only the top Fe-based alloy ribbon (Foil 1) but also the second Fe-based alloy ribbon (Foil 2) from the top surface could be subjected to hole drilling. Thus, with an irradiation energy of only 1 mJ, an Fe-based alloy ribbon with a total thickness of 50 μm could be penetrated, and the processing amount was as large as 50 μm.

[0067] As described above, in Examples 1 to 3 using long pulses, Fe-based alloy thin strips could be processed with low irradiation energies of 1 mJ to 20 mJ. Further, the height of the laser irradiation marks could be reduced, and Fe-based alloy thin strip processed products with small surface irregularities were obtained.

[0068] (Comparative Example 1) GCR-200 was set to the Q-switch mode, and drilling was attempted in the same manner as in Example 1 except that Q-switch pulses were used. However, as shown in Fig. 10, holes could not be drilled in the Fe-based alloy thin strip. Note that the height of the laser irradiation marks on the Fe-based alloy thin strip processed product of Comparative Example 1 was 4 μm or less as shown in Fig. 11, but the crater-induced dent was about 3 μm deep and the surface irregularities were large.

[0069] (Comparative Example 2) Drilling was attempted in the same manner as in Comparative Example 1 except that the wavelength of the laser light was set to 266 nm (i.e., the optical energy was increased by a factor of 4). However, as shown in Fig. 12, holes could not be drilled in the Fe-based alloy thin strip. Note that the height of the laser irradiation marks on the Fe-based alloy thin strip processed product of Comparative Example 2 was 1 μm or less as shown in Fig. 13, but the crater-induced dent was about 3 μm deep.

[0070] (Comparative Example 3) Drilling was performed in the same manner as in Comparative Example 1 except that 10 pulses were irradiated at one location (i.e., the irradiation energy was set to 200 mJ). As a result, as shown in Fig. 14, holes could be drilled in the Fe-based alloy thin strip, but the hole diameter was very small. Moreover, in order to drill such small holes, 10 times the irradiation energy compared to Example 1 and 200 times the irradiation energy compared to Example 2 were required, and the processing efficiency was extremely low. Further, the height of the laser irradiation marks on the Fe-based alloy thin strip processed product of Comparative Example 3 was about 20 μm high as shown in Fig. 15, and the crater-induced dent was about 20 μm, resulting in significantly large surface irregularities.

[0071] As described above, in Comparative Example 1 and Comparative Example 2 using the laser light of the Q-switch pulse, it was not possible to perforate the Fe-based alloy ribbon. In addition, in Comparative Example 3 using the laser light of the Q-switch pulse, although it was possible to form small holes in the Fe-based alloy ribbon by increasing the irradiation energy, at the irradiation energy per 1 mJ, only about 0.125 μm of the Fe-based alloy ribbon could be processed, and it can be seen that the processing amount was extremely small, about 0.125 μm. In contrast, in Example 3 using the long-pulse laser light, the processing amount was 50 μm, and it can be seen that when using the long-pulse laser light, the processing amount was significantly larger, about 400 times that of the Q-switch pulse laser light.

[0072] <Batch processing of multiple Fe-based alloy ribbons> (Example 4) Perforation was carried out in the same manner as in Example 1 except that four Fe-based alloy ribbons were stacked. As a result, processed products of four Fe-based alloy ribbons with three consecutive perforations were obtained. Holes as shown in Fig. 16 were formed on the surface of the topmost Fe-based alloy ribbon processed product, and the average diameter of the holes on the surface was 38 μm. In addition, holes as shown in Fig. 17 were formed on the back surface of the bottommost Fe-based alloy ribbon processed product, and the average diameter D' of the holes on the back surface was 27 μm. Also, the total thickness dL of the Fe-based alloy ribbon processed products was 100 μm. dD / dL calculated from the difference dD between D and D' and dL was as small as 0.11, and processed products of four Fe-based alloy ribbons with a small difference in hole diameter could be obtained simultaneously.

[0073] <Relationship between irradiation energy, hole diameter, and height of laser irradiation mark> (Example 5) The irradiation energy per pulse was changed from 1 mJ to 20 mJ, and drilling was performed in the same manner as in Example 1. As a result, as shown in FIG. 18, the diameter of the hole could be changed according to the magnitude of the irradiation energy. Further, as shown in FIG. 19, although the height of the laser irradiation mark increased with an increase in the irradiation energy, even when the diameter of the hole exceeded 60 μm, the height of the laser irradiation mark was only about 6 μm or more, which was within a practical range.

[0074] <Cutting process> (Example 6) GCR-200 was set to the long pulse mode, and an Fe-based alloy strip was placed on a stage movable in the plane direction. While irradiating the Fe-based alloy strip with a long pulse laser beam (irradiation energy: mJ) from the surface of the Fe-based alloy strip, the Fe-based alloy strip was moved in the plane direction at a stage feed rate of 2 mm / s. As a result, as shown in FIG. 20, a processed product of the Fe-based alloy strip of Example 6 subjected to cutting was obtained.

Explanation of symbols

[0075] 10, 20 Laser irradiation marks 11 Hole 21 Cutting part 12, 22 Debris 100, 100A, 100B, 200 Processed products of Fe-based alloy strips D, D’ Diameter of the hole L Total thickness of the Fe-based alloy strip

Claims

1. Irradiating a Fe-based alloy ribbon with a long-pulse laser beam at an irradiation density of 3 J / cm ２ to 60 J / cm ２ and an irradiation energy of 1 mJ to 20 mJ per pulse, and including a step of performing drilling or cutting on the Fe-based alloy ribbon A method for manufacturing a processed product of an Fe-based alloy ribbon, wherein the light source of the laser light is a Nd:YAG laser.

2. The method for manufacturing a processed product of an Fe-based alloy ribbon according to Claim 1, wherein the height of the laser irradiation mark from the surface of the processed product of the Fe-based alloy ribbon is 10 μm or less.

3. The method for manufacturing a processed product of an Fe-based alloy ribbon according to Claim 1 or Claim 2, wherein the irradiation is performed with a plurality of the Fe-based alloy ribbons stacked.

4. The method for manufacturing a processed product of an Fe-based alloy ribbon according to any one of Claims 1 to 3, wherein the Fe-based alloy ribbon is an Fe-based amorphous alloy ribbon.

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