Sample pouch cell and fluorescent X-ray analysis method

Abstract

To provide a fluorescent x-ray analysis method and sample pouch cell, which enable liquid sample measurement and x-ray irradiation while avoiding air bubbles generated during measurement.SOLUTION: A sample pouch cell for a liquid sample designed to be placed upright on a side-illuminated fluorescent x-ray analysis device is provided, the sample pouch cell comprising a first resin film disposed on an irradiation side of primary x-rays and a second resin film bonded to the first resin film in an area excluding a liquid sample inlet.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a sample pouch cell and a fluorescent X-ray analysis method.

Background Art

[0002] As an apparatus for measuring elements contained in a sample and the concentration of the elements, a fluorescent X-ray analyzer is known. The fluorescent X-ray analyzer can perform analysis even if the sample to be analyzed is a liquid. As a method for measuring a liquid sample, there are a direct method in which X-rays are directly irradiated onto the liquid sample and a dropping method in which X-rays are irradiated onto a sample dried on a filter (see Non-Patent Document 1 below).

[0003] When the direct method is used, a container for containing the liquid sample is used. For example, Patent Document 1 below discloses a liquid sample container used in a bottom-irradiation type fluorescent X-ray analyzer. Further, Patent Documents 2 to 4 below disclose liquid sample containers used in a top-irradiation type fluorescent X-ray analyzer. Patent Document 5 below discloses a dropping drying filter paper used in the dropping method.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Patent Document 5

Non-Patent Documents

[0005]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the drop method, there is a risk that the elements contained in the sample may volatilize, and it is not suitable for measuring samples with a large matrix effect or non-volatile samples. Also, when using a top-surface irradiation type fluorescent X-ray analyzer, bubbles may occur at the position where the X-ray of the sample is irradiated during measurement, and the bubbles may interfere with the irradiation of the primary X-ray to the liquid sample. Furthermore, when using a bottom-surface irradiation type fluorescent X-ray analyzer, the film or the like for holding the sample may be damaged, and there is a risk of damage and contamination inside the fluorescent X-ray analyzer. Also, it may be affected by the sedimentation of the sample components.

[0007] The present disclosure has been made in view of the above problems, and its object is to provide a fluorescent X-ray analysis method and a sample pouch cell that can measure a liquid sample regardless of its volatility or non-volatility, and can irradiate X-rays while avoiding the influence of bubbles and sediment components generated during measurement.

Means for Solving the Problems

[0008] (1) The sample pouch cell according to one aspect of the present disclosure is a sample pouch cell for a liquid sample that is arranged upright in a side-surface irradiation type fluorescent X-ray analyzer, and includes a first resin film arranged on the primary X-ray irradiation side, and a second resin film in which a region excluding the injection port of the liquid sample is adhered to the first resin film.

[0009] (2) In the above aspect of the present disclosure, it has a frame-shaped shape surrounding the position where the primary X-ray is irradiated, and further includes a frame body that is arranged between the first resin film and the second resin film and maintains the distance between the first resin film and the second resin film.

[0010] (3) In the above aspect of the present disclosure, the first resin film has an analysis window that transmits primary X-rays in a region overlapping with the inside of the frame body in plan view, which is characterized in that.

[0011] (4) In the above aspect of the present disclosure, the analysis window is provided below the center of the first resin film, and the injection port is provided above the center of the sample pouch cell, which is characterized in that.

[0012] (5) In the above aspect of the present disclosure, the analysis window has a polyimide film disposed in a hole provided in the first resin film, which is characterized in that.

[0013] (6) In the above aspect of the present disclosure, the region where the injection port is provided further has a linear openable and closable fastener, which is characterized in that.

[0014] (7) A fluorescent X-ray analysis method according to one aspect of the present disclosure is a fluorescent X-ray analysis method using a sample pouch cell having a first resin film and a second resin film, including a step of introducing a liquid sample from the injection port into the inside of the first resin film and the second resin film where regions other than the injection port are adhered, a step of sealing the first resin film and the second resin film in the region where the injection port is provided to complete the sample pouch cell, a step of arranging the sample pouch cell upright in a side-irradiation type fluorescent X-ray analyzer, and a step of performing fluorescent X-ray analysis based on the fluorescent X-rays emitted by irradiating primary X-rays from the side of the sample pouch cell, which is characterized by including these steps.

[0015] (8) In the above aspect of the present disclosure, before completing the sample pouch cell, it further has a step of disposing a frame body having a frame-like shape surrounding the position irradiated with primary X-rays and maintaining the distance between the first resin film and the second resin film between the first resin film and the second resin film, which is characterized in that.

[0016] (9) In the above aspect of the present disclosure, the first resin film has an analysis window that transmits primary X-rays in a region that overlaps the inside of the frame body in a plan view, which is characterized by this.

[0017] (10) In the above aspect of the present disclosure, the analysis window has a polyimide film disposed in a hole provided in the first resin film, which is characterized by this.

[0018] (11) In the above aspect of the present disclosure, a predetermined distance is provided between the position of the liquid surface of the liquid sample and the upper end of the first resin film, which is characterized by this.

[0019] (12) In the above aspect of the present disclosure, the step of performing the fluorescent X-ray analysis includes irradiating primary X-rays to a plurality of locations where the vertical positions of the sample pouch cell are different, and obtaining a spectrum representing the relationship between the intensity and energy of the emitted fluorescent X-rays for each of the plurality of locations, and analyzing the elements contained in the liquid sample based on the plurality of spectra obtained for each of the plurality of locations, which is characterized by including this.

Advantages of the Invention

[0020] According to the present disclosure, a liquid sample can be measured regardless of whether it is volatile or non-volatile, and X-rays can be irradiated while avoiding bubbles generated during the measurement.

Brief Description of the Drawings

[0021]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0022] Hereinafter, preferred embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described. FIG. 1(a) is a plan view of a sample pouch cell 100, and FIG. 1(b) is a bottom view of the sample pouch cell 100. FIGS. 2(a) and 2(b) are diagrams showing a cross section taken along line II-II of FIGS. 1(a) and 1(b). FIG. 2(a) shows the sample pouch cell 100 immediately after being hermetically sealed, and FIG. 2(b) shows the sample pouch cell 100 in a state where air bubbles are generated in the liquid sample 202. The sample pouch cell 100 according to the present embodiment is a sample pouch cell 100 used in a side-irradiation type fluorescent X-ray analyzer 600 (described later), and includes a first resin film 102 and a second resin film 104.

[0023] The sample pouch cell 100 is a sample pouch cell 100 for a liquid sample 202 that is arranged upright in a side-irradiation type fluorescent X-ray analyzer 600. Note that “arranged upright” means that the vertical direction, which is the direction in which gravity acts, is approximately positioned within the surfaces of the first resin film 102 and the second resin film 104. In other words, it means that the liquid surface of the liquid sample 202 arranged between the first resin film 102 and the second resin film 104 is arranged so as to be approximately orthogonal to the first resin film 102 and the second resin film 104. Also, hereinafter, the vertical direction means the direction (i.e., the vertical direction) perpendicular to the liquid surface of the liquid sample 202 in a state where the sample pouch cell 100 is arranged in the fluorescent X-ray analyzer 600. Also, the downward direction (lower side) means the direction pointing to the liquid side when viewed from the liquid surface, for example, with the liquid surface as a reference, and the upward direction (upper side) means the opposite direction.

[0024] The first resin film 102 is disposed on the side irradiated with the primary X-rays. Specifically, for example, the first resin film 102 is a film formed of a resin such as an aluminum laminate, polypropylene, or polyester. The material of the first resin film 102 is preferably a thermoplastic resin.

[0025] The first resin film 102 has an analysis window 108 that transmits the primary X-rays below the center. Specifically, the shape of the first resin film 102 is, for example, rectangular and has a round hole. The round hole is provided such that the upper end is located below the center of the first resin film 102. A very thin resin film 106 such as polyimide is disposed in the hole provided in the first resin film 102 and functions as the analysis window 108 during measurement. Note that the shape of the hole provided as the analysis window 108 may be any shape. Also, it is desirable to leave a predetermined distance between the lower end of the analysis window 108 and the lower end of the first resin film 102. Further, when the first resin film 102 is formed of a material that transmits the primary X-rays, the first resin film 102 may not have the analysis window 108.

[0026] The second resin film 104 is a resin film disposed opposite to the first resin film 102 with the liquid sample 202 sandwiched therebetween. Specifically, for example, the second resin film 104 is a film formed of the same material as the first resin film 102. Unlike the first resin film 102, the second resin film 104 does not have a hole, but it is desirable that the outer shape corresponds to the shape of the first resin film 102.

[0027] The second resin film 104 is adhered to the first resin film 102. Specifically, the dashed lines in FIGS. 1(a) and 1(b) indicate the region (adhesion region 110) where the first resin film 102 and the second resin film 104 are adhered. Note that the adhesion region 110 may be provided at other positions as long as the liquid sample 202 can be held between the first resin film 102 and the second resin film 104. The means of adhesion is, for example, heat fusion. When the first resin film 102 and the second resin film 104 are made of materials that are difficult to heat-fuse, they may be heat-fused with a filamentous or tape-shaped thermoplastic resin interposed therebetween. Alternatively, the first resin film 102 and the second resin film 104 may be adhered by ultrasonic fusion instead of heat fusion.

[0028] Furthermore, the first resin film 102 and the second resin film 104 may be integrally formed (by a single film). In this case, among the folded single film, the side irradiated with the primary X-rays corresponds to the first resin film 102, and the opposite side corresponds to the second resin film 104.

[0029] Note that FIGS. 1(a) and 1(b) show the sample pouch cell 100 in a state where the liquid sample 202 is disposed between the first resin film 102 and the second resin film 104 and hermetically sealed. Before the liquid sample 202 is disposed, the regions of the first resin film 102 and the second resin film 104 except for the injection port of the liquid sample 202 are adhered. The injection port is provided above the center of the sample pouch cell 100. The injection port is provided, for example, at the upper end of the sample pouch cell 100.

[0030] Specifically, among the dashed lines shown in FIGS. 1(a) and 1(b), the lower part (the lower side of the dashed line in FIG. 1(a)) and the side parts (the left and right sides of the dashed line in FIG. 1(a)) are adhered, and the upper part (the upper side of the dashed line in FIG. 1(a)) is not adhered and serves as the injection port. The liquid sample 202 is introduced from the injection port such that the position of the liquid surface is above the upper end of the analysis window 108 and a predetermined distance is provided between the position of the liquid surface and the upper end of the first resin film 102. The predetermined distance is appropriately set according to the volume of the bubbles generated from the liquid sample 202.

[0031] When the sample pouch cell 100 is irradiated with the primary X-ray, the temperature of the liquid sample 202 rises, and bubbles are generated in the liquid sample 202. Since the sample pouch cell 100 according to the present embodiment is arranged in the side-irradiation type fluorescent X-ray analyzer 600, even if gas is generated in the liquid sample 202, the bubbles move above the upper end of the analysis window 108 (see FIGS. 2(a) and 2(b)). Therefore, it is possible to irradiate the X-ray while avoiding the bubbles generated during the measurement.

[0032] The analysis window 108 of the sample pouch cell 100 is arranged below the center of the first resin film 102, and a predetermined distance is provided between the position of the liquid surface and the upper end of the first resin film 102. Thereby, it is possible to hold a space for the bubbles generated in the sample pouch cell 100 to escape. Further, by providing a predetermined distance between the lower end of the analysis window 108 and the lower end of the first resin film 102, a space for holding the sedimented sample can be secured. Therefore, the primary X-ray can be irradiated to the liquid region of the sample.

[0033] FIGS. 3, 4(a) and 4(b) are diagrams for explaining the sample pouch cell 100 according to a modification of the above embodiment. FIG. 3 is a plan view of the sample pouch cell 100. FIGS. 4(a) and 4(b) are diagrams showing a cross section taken along line VI-VI of FIG. 3. This modification is different from the above embodiment in that it has a frame body 302 for maintaining the distance between the first resin film 102 and the second resin film 104, and the first resin film 102 is formed of a material that transmits X-rays and no analysis window 108 is provided.

[0034] The frame body 302 has a frame-like shape surrounding the position irradiated with the primary X-ray and has a predetermined thickness. The frame body 302 is disposed between the first resin film 102 and the second resin film 104 and maintains the distance between the first resin film 102 and the second resin film 104. Specifically, for example, as shown in FIG. 3, the frame body 302 is disposed between the first resin film 102 and the second resin film 104 such that the irradiation positions 304, 306, and 308 of the primary X-ray are located inside the frame. Further, since the frame body 302 has a predetermined thickness, as shown in FIGS. 4(a) and 4(b), a distance corresponding to the frame-like thickness is generated between the first resin film 102 and the second resin film 104 inside the frame body 302.

[0035] When the frame body 302 is not disposed and the first resin film 102 and the second resin film 104 are adhered, the liquid sample 202 has a substantially equal thickness over the entire region surrounded by the adhesion. In this case, since the thickness of the region irradiated with the primary X-ray of the sample pouch cell 100 becomes thin, there is a possibility that the primary X-ray passes through the second resin film 104 and the analysis accuracy decreases. According to this modification, by maintaining the thickness with the frame body 302, the thickness of the liquid sample 202 in the region irradiated with the primary X-ray can be at least the thickness of the frame body 302. Therefore, a decrease in analysis accuracy can be avoided.

[0036] In this modification, the first resin film 102 is formed of a material that transmits X-rays. Therefore, if there is a region where the liquid sample 202 exists on the back surface of the first resin film 102, the primary X-ray can be irradiated at any position of the first resin film 102 for measurement.

[0037] Next, a fluorescent X-ray analysis method using the sample pouch cell 100 will be described. FIG. 5 is a flowchart showing the fluorescent X-ray analysis method using the sample pouch cell 100. First, a first resin film 102 and a second resin film 104 are prepared. Then, in a state where the outer edges of the first resin film 102 and the second resin film 104 are aligned, the regions of the adhesion area 110 excluding the injection port (the lower side, the left side, and the right side of the adhesion area 110 shown in FIG. 3) are adhered (S502).

[0038] Next, the frame body 302 is placed between the first resin film 102 and the second resin film 104, and the liquid sample 202 is introduced through the injection port (S504). Specifically, the frame body 302 is placed between the first resin film 102 and the second resin film 104 where the regions excluding the injection port are heat-sealed. Further, the liquid sample 202 is introduced through the injection port so that the position of the liquid surface is above the upper end of the frame body 302 between the first resin film 102 and the second resin film 104. At this time, the liquid sample 202 is introduced so that a predetermined distance is left between the position of the liquid surface and the upper end of the first resin film 102.

[0039] Next, while discharging the air between the first resin film 102 and the second resin film 104, the first resin film 102 and the second resin film 104 in the region provided with the injection port are sealed to complete the sample pouch cell 100 (S506). Specifically, the regions of the injection port of the first resin film 102 and the second resin film 104 are heat-sealed. FIG. 4(a) is a cross-sectional view showing the sample pouch cell 100 immediately after being hermetically sealed. As shown in FIG. 4(a), air may be present inside the sample pouch cell 100, but it is desirable to be hermetically sealed while discharging the air so that the air contained inside the sample pouch cell 100 is minimized as much as possible.

[0040] Next, the sample pouch cell 100 is placed upright on a side-illuminated X-ray fluorescence analyzer 600 (S508). FIG. 4 is a diagram showing an overview of the side-illuminated X-ray fluorescence analyzer 600 in which the sample pouch cell 100 is placed. As shown in FIG. 4, the side-illuminated X-ray fluorescence analyzer 600 includes an X-ray source 602, a spectroscopic element 604, a detector 606, a back holder 608, and a front holder 610. The sample pouch cell 100 is placed sandwiched between a metal back holder 608 and a metal front holder 610, and the front holder 610 and the back holder 608 are fixed inside a measurement chamber (not shown). The front holder 610 is provided with holes, and the first irradiation position 304, the second irradiation position 306, and the third irradiation position 308 are exposed from the holes.

[0041] Then, the X-ray source 602 irradiates the sample pouch cell 100 with primary X-rays from the side, and performs X-ray fluorescence analysis based on the emitted X-ray fluorescence (S510). Specifically, primary X-rays are irradiated to a plurality of locations at different vertical positions of the sample pouch cell 100, and spectra representing the relationship between the intensity and energy of the emitted X-ray fluorescence are obtained for each of the plurality of locations. First, the X-ray source 602 irradiates the first irradiation position 304 of the sample pouch cell 100 with primary X-rays. Bubbles are generated from the liquid sample 202 heated by the irradiation of the primary X-rays.

[0042] As shown in FIG. 4(b), the bubbles move above the analysis window 108, and the upper part of the sample pouch cell 100 in FIG. 4(b) bulges more than the sample pouch cell 100 in FIG. 4(a). Also, when the measurement takes a long time, as shown in FIG. 4(b), a part of the liquid sample 202 may settle, but the settled component 204 exists below the lower end of the frame body 302. Therefore, according to this sample pouch cell 100, the liquid region can be irradiated with primary X-rays without being obstructed by bubbles or the settled component 204. X-ray fluorescence is emitted from the liquid sample 202 irradiated with the primary X-rays.

[0043] The spectroscopic element 604 spectroscopically analyzes fluorescent X-rays. Specifically, for example, the spectroscopic element 604 spectroscopically analyzes only the fluorescent X-rays of a specific wavelength that satisfy the Bragg's conditional formula among the fluorescent X-rays of a plurality of wavelengths generated from the liquid sample 202.

[0044] The detector 606 is, for example, a scintillation counter. The detector 606 measures the intensity of the fluorescent X-rays and outputs a pulse signal having a pulse height value corresponding to the energy of the measured fluorescent X-rays.

[0045] The spectroscopic element 604 and the detector 606 rotate while maintaining a certain angular relationship by a goniometer (not shown). Specifically, for example, let the incident angle formed by the direction in which the fluorescent X-rays generated from the liquid sample 202 travel and the surface of the spectroscopic element 604 be θ. The spectroscopic element 604 rotates by a goniometer so that the incident angle θ of the fluorescent X-rays with respect to the surface of the spectroscopic element 604 changes within a predetermined range. The secondary X-rays are diffracted by the spectroscopic element 604, and fluorescent X-rays (that is, fluorescent X-rays with an emission angle θ) that satisfy the Bragg's conditional formula are emitted from the spectroscopic element 604. The detector 606 is moved by the goniometer to a position where the fluorescent X-rays emitted at the emission angle θ from the spectroscopic element 604 are incident.

[0046] By counting the pulse signal output from the detector 606 according to the pulse height value, the side-irradiation type fluorescent X-ray analyzer 600 obtains a spectrum representing the relationship between the intensity and energy of the fluorescent X-rays. Based on the spectrum, analysis of the elements contained in the liquid sample 202 is performed. When analyzing only a specific element, the side-irradiation type fluorescent X-ray analyzer 600 may not have a goniometer, and the positions of the spectroscopic element 604 and the detector 606 may be fixed.

[0047] As described above, based on the fluorescent X-rays emitted from the first irradiation position 304, the analysis result of the liquid sample 202 is obtained. Similarly, the X-ray source 602 irradiates the first X-rays at the second irradiation position 306 and the third irradiation position 308, obtains spectra based on the emitted fluorescent X-rays respectively, and performs fluorescent X-ray analysis.

[0048] Then, by averaging the analysis results at the first irradiation position 304, the second irradiation position 306, and the third irradiation position 308, the final analysis result of the elements contained in the liquid sample 202 is obtained (S512). Note that, although the above description has been made for the case of performing three measurements, the number of measurements is arbitrary. Also, instead of simple averaging processing, weighted averaging processing (for example, averaging processing that increases the proportion of the analysis results at the measurement locations closer to the center) may be performed. By obtaining the final analysis result based on the analysis results at a plurality of locations, an average result can be obtained even if the liquid sample 202 is heterogeneous.

[0049] Note that FIG. 3 shows the first irradiation position 304, the second irradiation position 306, and the third irradiation position 308 with different vertical positions. If the analysis result at any of the measurement locations is affected by bubbles or sedimentation, it may differ significantly from the analysis results at other measurement locations. In such a case, the analysis result affected by the bubbles or sedimentation may be excluded, and the final analysis result may be obtained based on the analysis results at other measurement locations.

[0050] The present disclosure is not limited to the above-described embodiments and modifications, and various modifications are possible. For example, the region where the injection port is provided may not be adhered, and a linear openable / closable fastener may be provided in the region. Specifically, a rail fastener may be provided in the region where the injection port is provided. By providing an openable / closable fastener, the replacement of the liquid sample 202 can be easily performed.

[0051] Also, although the case where the X-ray fluorescence analyzer 600 is a wavelength-dispersive X-ray fluorescence analyzer has been described above, the X-ray fluorescence analyzer 600 may be an energy-dispersive X-ray fluorescence analyzer.

[0052] Furthermore, a configuration in which the analysis window 108 is provided and a configuration in which the frame body 302 is arranged may be combined. In this case, it is desirable that the first resin film 102 has an analysis window that transmits the primary X-ray in a region overlapping the inside of the frame body 302 in plan view. That is, it is desirable that all of the analysis windows 108 shown in FIG. 1 are arranged inside the broken line indicating the frame body shown in FIG. 3. Also, in the fluorescent X-ray analysis method shown in FIG. 5, in the step of S504, the frame body 302 is arranged so that the analysis window 108 overlaps the inside of the frame body 302 in plan view.

Explanation of symbols

[0053] 100 Sample pouch cell, 102 First resin film, 104 Second resin film, 106 Resin film, 108 Analysis window, 110 Adhesive region, 202 Liquid sample, 204 Sedimented component, 302 Frame body, 304 First irradiation position, 306 Second irradiation position, 308 Third irradiation position, 600 Fluorescent X-ray analyzer, 602 X-ray source, 604 Spectral element, 606 Detector, 608 Back side holder, 610 Front side holder.

Claims

1. A sample pouch cell for a liquid sample, which is arranged upright with respect to a side-illuminated fluorescent X-ray analyzer, a first resin film arranged on the irradiation side of the primary X-ray, a second resin film, in which a region excluding the injection port of the liquid sample is adhered to the first resin film, a frame having a frame shape surrounding the position irradiated with the primary X-ray, arranged between the first resin film and the second resin film, and maintaining the distance between the first resin film and the second resin film, The sample pouch cell is characterized by having the above.

2. The sample pouch cell according to claim 1, wherein the first resin film has an analysis window that transmits the primary X-ray in a region overlapping the inside of the frame in a plan view.

3. The analysis window is provided below the center of the first resin film, The injection port is provided above the center of the sample pouch cell, The sample pouch cell according to claim 2, characterized by the above.

4. The sample pouch cell according to claim 2 or 3, wherein the analysis window has a polyimide film arranged in a hole provided in the first resin film.

5. The sample pouch cell according to any one of claims 1 to 3, further comprising a linear openable / closable fastener in the region where the injection port is provided.

6. A fluorescent X-ray analysis method using a sample pouch cell having a first resin film and a second resin film, a step of putting a liquid sample through the injection port inside the first resin film and the second resin film, where the region excluding the injection port is adhered; a step of arranging a frame having a frame shape surrounding the position irradiated with the primary X-ray and maintaining the distance between the first resin film and the second resin film between the first resin film and the second resin film; a step of sealing the first resin film and the second resin film in the region where the injection port is provided to complete the sample pouch cell; a step of arranging the sample pouch cell upright with respect to a side-illuminated fluorescent X-ray analyzer; a step of irradiating the sample pouch cell with the primary X-ray from the side and performing fluorescent X-ray analysis based on the emitted fluorescent X-ray; The fluorescent X-ray analysis method is characterized by including the above steps.

7. The fluorescent X-ray analysis method according to claim 6, wherein the first resin film has an analysis window that transmits the primary X-ray in a region overlapping the inside of the frame in a plan view.

8. The fluorescence X-ray analysis method according to claim 7, wherein the analysis window has a polyimide film disposed in a hole provided in the first resin film.

9. The fluorescence X-ray analysis method according to any one of claims 6 to 8, wherein a predetermined distance is provided between the position of the liquid surface of the liquid sample and the upper end of the first resin film.

10. The step of performing the fluorescence X-ray analysis irradiates primary X-rays to a plurality of locations having different vertical positions of the sample pouch cell, and obtains a spectrum representing the relationship between the intensity and energy of the emitted fluorescence X-rays for each of the plurality of locations; analyzing the elements contained in the liquid sample based on the plurality of spectra obtained for each of the plurality of locations; The fluorescence X-ray analysis method according to any one of claims 6 to 8, characterized by including.

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