Processing device

Abstract

To provide a processing device that can properly fasten a cut blade.SOLUTION: A processing device positively rotates a nut holding part 116 to screw a nut 64 to a male screw of a boss part, reversely rotates the nut holding part 116 with a position at which torque reaches a threshold of fastening-completion as a reference position, and then positively rotates the nut holding part 116, which when the torque reaches the threshold at the reference position, determines that a cutting blade 54 is properly fastened and unless the torque reaches the threshold, determines that the cutting blade 54 is not properly fastened.SELECTED DRAWING: Figure 12

Description

Technical Field

[0001] The present invention relates to a processing apparatus including holding means for holding a workpiece, cutting means equipped with a cutting blade for cutting the workpiece held by the holding means, and cutting blade mounting means for mounting the cutting blade on the cutting means.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are partitioned by a dicing line and formed on the surface is diced into individual device chips by a processing apparatus equipped with a cutting blade, and each diced device chip is used in electrical devices such as mobile phones and personal computers.

[0003] The applicant has proposed a processing apparatus equipped with cutting blade mounting means for automatically replacing the cutting blade (see, for example, Patent Document 1).

[0004] The cutting means of this processing apparatus includes a rotating shaft, a fixed flange disposed at the tip of the rotating shaft for supporting the back of the cutting blade, a boss portion protruding from the central portion of the fixed flange and fitting into an opening formed in the central portion of the cutting blade, and a male screw formed at the tip of the boss portion.

[0005] Further, the cutting blade mounting means includes a nut holding portion for detachably holding a nut that sandwiches the cutting blade fitted to the boss portion between the fixed flange, and the cutting blade can be automatically mounted on the cutting means.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] However, if the nut is not properly screwed onto the male thread of the boss portion, if there is debris between the nut and the male thread, or if the thread is worn, etc., a load is applied to the nut, and before the cutting blade is properly fastened to the fixed flange, the torque (load current value) of the nut holding portion reaches a predetermined threshold value, resulting in the problem that the fastening operation is completed.

[0008] An object of the present invention is to provide a processing apparatus capable of properly fastening a cutting blade.

Means for Solving the Problems

[0009] According to the present invention, the following processing apparatus for solving the above problems is provided. That is, 「A processing apparatus including holding means for holding a workpiece, cutting means having a cutting blade for cutting the workpiece held by the holding means, and cutting blade mounting means for mounting the cutting blade on the cutting means, The cutting means includes a rotating shaft, a fixed flange disposed at the tip of the rotating shaft for supporting the back of the cutting blade, a boss portion protruding from the central portion of the fixed flange and fitting into an opening formed in the central portion of the cutting blade, and a male thread formed at the tip of the boss portion. The cutting blade mounting means includes a nut holding portion for detachably holding a nut that sandwiches the cutting blade fitted on the boss portion between the nut and the fixed flange. Based on the position where the nut is screwed onto the male thread of the boss portion by rotating the nut holding portion forward and the torque reaches the threshold value for completion of fastening as a reference position, the nut holding portion is rotated backward, and then the nut holding portion is rotated forward. If the torque reaches the threshold value at the reference position, it is determined that the cutting blade is properly fastened, and otherwise, it is determined that the cutting blade is not properly fastened. A "processing apparatus" is provided.

Effects of the Invention

[0010] The processing apparatus of the present invention A processing apparatus includes holding means for holding a workpiece, cutting means having a cutting blade for cutting the workpiece held by the holding means, and cutting blade mounting means for mounting the cutting blade on the cutting means. The cutting means includes a rotating shaft, a fixed flange disposed at the tip of the rotating shaft for supporting the back of the cutting blade, a boss portion protruding from the central portion of the fixed flange and fitting into an opening formed in the central portion of the cutting blade, and a male screw formed at the tip of the boss portion. The cutting blade mounting means includes a nut holding portion for detachably holding a nut that sandwiches the cutting blade fitted onto the boss portion between the fixed flange. With the nut holding portion rotated forward to screw the nut onto the male screw of the boss portion, the nut holding portion is rotated backward with the position where the torque reaches the threshold value for completion of fastening as the reference position, and then the nut holding portion is rotated forward. If the torque reaches the threshold value at the reference position, it is determined that the cutting blade is properly fastened; otherwise, it is determined that the cutting blade is not properly fastened. Thus, the cutting blade can be properly fastened.

Brief Description of the Drawings

[0011]

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DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, a preferred embodiment of a processing apparatus configured according to the present invention will be described with reference to the drawings.

[0013] (Processing apparatus 2) As shown in FIG. 1, a processing apparatus indicated as a whole by reference numeral 2 includes a holding means 4 for holding a workpiece, a cutting means 6 equipped with a cutting blade for cutting the workpiece held by the holding means 4, and a cutting blade mounting means 8 for mounting the cutting blade on the cutting means 6.

[0014] (Holding means 4) Referring to FIGS. 2 and 3 for explanation, the holding means 4 includes an X-axis movable plate 12 movably provided in the X-axis direction on the upper surface of a base 10 (see FIG. 2), a support column 14 fixed to the upper surface of the X-axis movable plate 12, and a cover plate 16 fixed to the upper end of the support column 14. A circular opening 16a is formed in the cover plate 16, and a chuck table 18 extending upward through the circular opening 16a is rotatably mounted on the upper end of the support column 14.

[0015] Note that the X-axis direction is the direction indicated by arrow X in FIG. 1. Also, the Y-axis direction indicated by arrow Y in FIG. 1 is a direction orthogonal to the X-axis direction, and the Z-axis direction indicated by arrow Z in FIG. 1 is the vertical direction orthogonal to both the X-axis direction and the Y-axis direction. The XY plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

[0016] At the upper end portion of the chuck table 18, a porous circular suction chuck 20 connected to a suction means (not shown) is disposed. A plurality of clamps 22 are provided at intervals in the circumferential direction on the periphery of the chuck table 18.

[0017] In the holding means 4, by generating a suction force on the upper surface of the suction chuck 20 with the suction means, the workpiece placed on the upper surface of the suction chuck 20 is suction-held. Thus, the upper surface of the suction chuck 20 serves as a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane.

[0018] Also, the chuck table 18 of the holding means 4 is rotated about the Z-axis direction by a chuck table motor (not shown) built in the support column 14 and is processed and fed in the X-axis direction by an X-axis feed means 24.

[0019] The X-axis feed means 24 includes a ball screw 26 that is connected to the X-axis movable plate 12 and extends in the X-axis direction, and a motor 28 that rotates the ball screw 26. The X-axis feed means 24 converts the rotational motion of the motor 28 into a linear motion by the ball screw 26 and transmits it to the X-axis movable plate 12, moves the X-axis movable plate 12 in the X-axis direction along the guide rail 10a on the base 10, and feeds the chuck table 18 in the X-axis direction for machining.

[0020] As shown in FIG. 2, the machining apparatus 2 includes a portal frame 30 disposed across the holding means 4. The frame 30 has a pair of columns 32 that extend upward from the upper surface of the base 10 at intervals in the Y-axis direction, and a beam 34 that is spanned between the upper ends of the pair of columns 32 and extends in the Y-axis direction.

[0021] (Cutting means 6) A pair of cutting means 6 are provided at intervals in the Y-axis direction on one side surface of the beam 34 (the back side surface in FIG. 2). In the illustrated embodiment, the pair of cutting means 6 are provided such that the cutting blades face each other, and the workpiece held by the holding means 4 can be simultaneously machined by the pair of cutting blades. Note that only one cutting means 6 may be provided.

[0022] As shown in FIG. 4, the cutting means 6 includes a rectangular Y-axis movable member 36 that is movably supported on one side surface of the beam 34 in the Y-axis direction, a Y-axis feed means 38 that indexes and feeds the Y-axis movable member 36 in the Y-axis direction, an L-shaped Z-axis movable member 40 that is supported on the Y-axis movable member 36 so as to be movable up and down in the Z-axis direction, a Z-axis feed means 42 that feeds the Z-axis movable member 40 in the Z-axis direction for cutting, and a housing 44 fixed to the lower end of the Z-axis movable member 40.

[0023] On one side surface of the Y-axis movable member 36 (the front side surface in FIG. 4), a pair of guided grooves 36a that extend in the Y-axis direction at intervals in the Z-axis direction are formed, and the guided grooves 36a are slidably connected to a pair of guide rails (not shown) that extend in the Y-axis direction at intervals in the Z-axis direction on one side surface of the beam 34.

[0024] The Y-axis feed means 38 has a ball screw 46 that is connected to the Y-axis movable member 36 and extends in the Y-axis direction, and a motor 48 that rotates the ball screw 46. The Y-axis feed means 38 converts the rotational motion of the motor 48 into linear motion by the ball screw 46 and transmits it to the Y-axis movable member 36, and indexes and feeds the Y-axis movable member 36 in the Y-axis direction along a guide rail attached to one side surface of the beam 34.

[0025] On the other side surface of the Y-axis movable member 36 (the back side surface in FIG. 4), a pair of guide rails (not shown) that extend in the Z-axis direction with a space in the Y-axis direction are formed, and the Z-axis movable member 40 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 36.

[0026] The Z-axis feed means 42 has a ball screw (not shown) that is connected to the Z-axis movable member 40 and extends in the Z-axis direction, and a motor 50 that rotates this ball screw. The Z-axis feed means 42 converts the rotational motion of the motor 50 into linear motion by the ball screw and transmits it to the Z-axis movable member 40, and feeds the Z-axis movable member 40 in the Z-axis direction along the guide rail of the Y-axis movable member 36.

[0027] Referring to FIGS. 5 and 6 for explanation, the cutting means 6 further includes a rotating shaft 52, a fixed flange 56 (see FIG. 6) that is disposed at the tip of the rotating shaft 52 and supports the back of the cutting blade 54, a boss portion 58 (see FIG. 6) that protrudes from the central portion of the fixed flange 56 and fits into an opening 54a formed in the central portion of the cutting blade 54, and a male screw 58a (see FIG. 6) formed at the tip of the boss portion 58.

[0028] (Rotating shaft 52) The rotating shaft 52 is rotatably supported by the housing 44 with the Y-axis direction as the axis. Further, a motor (not shown) that rotates the rotating shaft 52 is housed in the housing 44.

[0029] (Cutting blade 54) As shown in FIG. 6, the cutting blade 54 has an annular base 60 and an annular cutting edge 62 fixed to the outer peripheral portion of the base 60. The base 60 can be formed from an appropriate metal material such as an aluminum alloy. The opening 54a of the cutting blade 54 is circular and is located at the central portion of the base 60. The cutting edge 62 is formed to a predetermined thickness (for example, about 10 to 30 μm) from abrasive grains such as diamond and a binder such as metal or resin, and protrudes radially outward from the outer peripheral edge of the base 60.

[0030] (Fixed flange 56) The fixed flange 56 annularly protrudes radially outward from the outer peripheral surface of the rotary shaft 52. An annular recess 56a is formed in the radially inner portion of the tip surface of the fixed flange 56. The outer peripheral side portion of the tip surface of the fixed flange 56 forms an annular receiving portion 56b protruding in the axial direction.

[0031] Continuing the description with reference to FIG. 6, the opening 54a of the cutting blade 54 is fitted into the boss portion 58, and the nut 64 is attached to the male screw 58a of the boss portion 58, whereby the cutting blade 54 is sandwiched between the receiving portion 56b of the fixed flange 56 and the nut 64 and is detachably fixed to the boss portion 58. Note that a plurality of pin holes 64a into which the pins 138 of the nut holding portion 116 described later are inserted are formed at equal intervals in the circumferential direction on the side surface of the nut 64.

[0032] As shown in FIG. 5, a blade cover 66 for covering the cutting blade 54 is attached to the tip of the housing 44. The blade cover 66 has a first cover member 66a fixed to the tip of the housing 44 and a second cover member 66b movably attached to the tip of the first cover member 66a. The second cover member 66b is moved in the X-axis direction by an appropriate actuator (not shown) such as an air cylinder, and is positioned at the open position shown in FIG. 5 when replacing the cutting blade 54, and is positioned at the closed position shown in FIG. 4 during cutting.

[0033] Further, as shown in FIG. 2, on the other side surface of the beam 34 (the front side surface in FIG. 2), a pair of imaging means 68 for imaging the workpiece held by the holding means 4 is provided so as to be movable in the Y-axis direction, and a pair of moving means 70 for moving the imaging means 68 in the Y-axis direction is mounted.

[0034] The moving means 70 includes a ball screw 72 connected to the imaging means 68 and extending in the Y-axis direction, and a motor 74 for rotating the ball screw 72. The moving means 70 converts the rotational motion of the motor 74 into a linear motion and transmits it to the imaging means 68, and moves the imaging means 68 in the Y-axis direction along a guide rail 34a attached to the other side surface of the beam 34. Note that there may be only one imaging means 68.

[0035] (Cutting blade mounting means 8) As shown in FIG. 7, the cutting blade mounting means 8 includes a cutting blade storage means 76 for storing a plurality of cutting blades 54, a loading / unloading means 78 for loading and unloading the cutting blades 54 from and to the cutting blade storage means 76, a Y-axis positioning means 80 for positioning the loading / unloading means 78 at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means 76, a Z-axis moving means 82 for moving the loading / unloading means 78 in the Z-axis direction, and an X-axis moving means 84 for moving the loading / unloading means 78 in the X-axis direction and acting on the cutting blade 54 mounted on the rotating shaft 52 of the cutting means 6.

[0036] (Cutting blade storage means 76) Referring to FIG. 8 for explanation, the cutting blade storage means 76 includes a driving gear 88 having a rotating shaft 86 extending in the Y-axis direction, a driven gear 92 having a rotating shaft 90 extending in the Y-axis direction and spaced apart from the driving gear 88 in the Z-axis direction, an endless track 94 wound around the driving gear 88 and the driven gear 92, and a support shaft 96 extending in the Y-axis direction and disposed at a predetermined interval on the endless track 94 and fitted into the opening 54a of the cutting blade 54 to support the cutting blade 54.

[0037] As shown in FIGS. 7 and 8, the cutting blade storage means 76 of the illustrated embodiment includes a base plate 98 (see FIG. 7), a support wall 100 extending upward from the upper surface of the base plate 98, and a motor 102 fixed to one side of the support wall 100. As shown in FIG. 8, a rotating shaft 86 of a drive gear 88 is connected to the motor 102, and the motor 102 is configured to rotate the drive gear 88 about the Y-axis direction.

[0038] The driven gear 92 is disposed above the drive gear 88, and a rotating shaft 90 of the driven gear 92 is supported by the support wall 100 so as to be rotatable about the Y-axis direction and vertically movable in the Z-axis direction. The support wall 100 is provided with lifting means (not shown) for lifting the driven gear 92 in the Z-axis direction. The lifting means may have a configuration including a ball screw connected to the rotating shaft 90 of the driven gear 92 and extending in the Z-axis direction, and a motor for rotating this ball screw.

[0039] The endless track 94 is composed of a large number of link pieces (reference numerals omitted) connected to each other, and is wound around the drive gear 88 and the driven gear 92. The endless track 94 is configured to rotate as the drive gear 88 rotates by the motor 102.

[0040] A plurality of support shafts 96 are arranged on the endless track 94 at predetermined intervals. As can be understood by referring to FIG. 9 together with FIG. 8, the support shaft 96 has a cylindrical base portion 104 connected to the endless track 94 and a cylindrical shaft portion 106 extending in the Y-axis direction from the end surface of the base portion 104.

[0041] In the support shaft 96, an opening 54a of the cutting blade 54 is fitted to the shaft portion 106, and a plurality (for example, five) of cutting blades 54 are supported by the shaft portion 106. In the illustrated embodiment, as can be understood by referring to FIG. 8, the cutting blades 54 are supported by half of the plurality of support shafts 96. Further, as shown in FIG. 9, a plurality of ball plungers 108 for preventing the cutting blade 54 supported by the shaft portion 106 from protruding are mounted at intervals in the circumferential direction on the tip side of the shaft portion 106.

[0042] As shown in Fig. 10, a flow path 104a is formed inside each base portion 104 of the support shaft 96, and a plurality of flow paths 94a communicating with one end portion of each flow path 104a are formed in the endless track 94. The other end portion of each flow path 104a opens at the end face of the base portion 104 radially outside the shaft portion 106, as shown in Fig. 9.

[0043] Also, as shown in Fig. 8, an air nozzle 110 protruding in the Y-axis direction is provided on the support wall 100 below the drive gear 88. The air nozzle 110 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the support shaft 96 located at the lowermost end in the track of the support shaft 96 accompanying the rotation of the endless track 94 faces the tip of the air nozzle 110.

[0044] When the cutting blade 54 located on the tip side of the shaft portion 106 is carried out, by supplying high-pressure air from the air nozzle 110 to the flow path 104a of the base portion 104 of the support shaft 96 located at the lowermost end through the flow path 94a of the endless track 94, the cutting blade 54 left on the shaft portion 106 can be pushed out to the tip side of the shaft portion 106. However, the cutting blade 54 does not fall from the shaft portion 106 due to the action of the ball plunger 108.

[0045] (Carrying-in and -out means 78) Referring to Fig. 11 for explanation, the carrying-in and -out means 78 includes a Z rotation shaft 112 extending in the Z-axis direction, a blade holding portion 114 radially connected to the Z rotation shaft 112 and sucking and holding the cutting blade 54, and a nut holding portion 116 detachably holding a nut 64 that sandwiches the cutting blade 54 fitted in the boss portion 58 of the cutting means 6 with a fixing flange 56.

[0046] The loading and unloading means 78 of the illustrated embodiment further includes a casing 118. The casing 118 has a regular hexagonal top plate 120 and six rectangular plate-shaped side walls 122 hanging down from the periphery of the top plate 120. The Z-rotation shaft 112 projects from the upper surface of the top plate 120. Inside the casing 118, a motor (not shown) connected to the Z-rotation shaft 112 is accommodated.

[0047] In the illustrated embodiment, among the six side walls 122 of the casing 118, blade holders 114 are attached to four side walls 122, and nut holders 116 are attached to two side walls 122. The two nut holders 116 are provided on a pair of opposing side walls 122. Thus, the loading and unloading means 78 includes two blade holders 114 for one nut holder 116.

[0048] (Blade Holder 114) The blade holder 114 is formed in a cylindrical shape. On the end face 124 of the blade holder 114, there are provided a circular central opening 126 capable of receiving the shaft portion 106 of the support shaft 96 and the boss portion 58 of the cutting means 6, and a plurality of suction holes 128 arranged at equal intervals in the circumferential direction around the central opening 126. The suction holes 128 are connected to a suction means (not shown).

[0049] Then, with the blade holder 114 positioned at a position where the end face 124 of the blade holder 114 contacts the base 60 of the cutting blade 54 stored in the cutting blade storage means 76, a suction force is generated in the suction holes 128 by the suction means to suction and hold the cutting blade 54.

[0050] (Nut Holder 116) Continuing the description with reference to FIGS. 11 and 12, the nut holder 116 includes a cylindrical housing 130 (see FIG. 11) fixed to the side wall 122 of the casing 118, an annular rotating body 132 (see FIG. 11) rotatably accommodated inside the housing 130, and a motor 133 (see FIG. 12) for rotating the rotating body 132.

[0051] The rotating body 132 is formed with a central opening 134 capable of receiving the boss portion 58 of the cutting means 6. On the end face 132a of the rotating body 132, a plurality of suction holes 136 and a plurality of pins 138 are alternately provided at intervals in the circumferential direction. The suction holes 136 are connected to a suction means (not shown). The pin 138 is positioned at a position protruding from the end face 132a of the rotating body 132 by a spring (not shown) built in the rotating body 132 (the position shown in FIG. 11), and when pushed toward the inside of the rotating body 132, the spring contracts and the pin 138 is accommodated inside the rotating body 132. Further, the pin 138 is arranged corresponding to the position of the pin hole 64a formed in the nut 64.

[0052] As shown in FIG. 12, in the nut holding portion 116, while generating a suction force in the suction hole 136 by the suction means to suction and hold the nut 64, and with the pin 138 inserted into the pin hole 64a of the nut 64, by rotating the rotating body 132 by the motor 133, the nut 64 for fixing the cutting blade 54 to the boss portion 58 of the cutting means 6 can be fastened to and removed from the male screw 58a of the boss portion 58.

[0053] When removing the nut 64 from the boss portion 58, even if the position of the pin 138 in the nut holding portion 116 and the position of the pin hole 64a in the nut 64 are displaced, by bringing the end face 132a of the rotating body 132 close to the end face of the nut 64 mounted on the boss portion 58 and accommodating the pin 138 inside the rotating body 132, and then rotating the rotating body 132 by the motor 133, when the position of the pin 138 aligns with the position of the pin hole 64a, the pin 138 is pushed out by the spring and the pin 138 is inserted into the pin hole 64a.

[0054] The loading and unloading means 78 configured as described above is disposed inside the frame body 140 as shown in FIG. 7 in the illustrated embodiment. The frame body 140 is movably supported in the Y-axis direction by the lifting table 142, and the lifting table 142 is movably supported in the Z-axis direction by the base frame 144.

[0055] Referring to FIG. 13 together with FIG. 7, the frame 140 includes a rectangular plate-shaped bottom 146, four columns 148 extending upward from the four corners of the upper surface of the bottom 146, and a plate-shaped ceiling portion 150 (see FIG. 7) fixed to the upper ends of the respective columns 148. On the lower surface of the bottom 146, a pair of guided members 152 having grooves 152a extending in the Y-axis direction are provided at intervals in the X-axis direction.

[0056] As shown in FIG. 13, the elevating table 142 includes a rectangular plate-shaped top plate 154 and four columnar legs 156 extending downward from the four corners of the lower surface of the top plate 154. On the upper surface of the top plate 154, a pair of guide rails 158 extending in the Y-axis direction are provided at intervals in the X-axis direction, and the pair of guide rails 158 are slidably fitted into the grooves 152a of the pair of guided members 152 of the frame 140.

[0057] (Y-axis positioning means 80) On the upper surface of the top plate 154 of the elevating table 142, Y-axis positioning means 80 is provided. The Y-axis positioning means 80 has a ball screw 160 extending in the Y-axis direction between the pair of guide rails 158 and a motor 162 for rotating the ball screw 160. The nut portion (not shown) of the ball screw 160 is fixed to the lower surface of the bottom 146 of the frame 140.

[0058] The Y-axis positioning means 80 converts the rotational motion of the motor 162 into a linear motion by the ball screw 160 and transmits it to the frame 140, and moves the frame 140 in the Y-axis direction along the pair of guide rails 158. In this way, the frame 140 provided with the loading / unloading means 78 is slidably supported by the guide rails 158 extending in the Y-axis direction provided on the elevating table 142, and is positioned at the working position and the retracted position in the Y-axis direction with respect to the cutting blade storage means 76 by the Y-axis positioning means 80.

[0059] The above working position is a position where the blade holding portion 114 of the loading / unloading means 78 approaches the cutting blade storage means 76, and is a position where the cutting blade 54 supported by the cutting blade storage means 76 can be sucked and held by the blade holding portion 114. Further, the above retracted position is a position where the blade holding portion 114 of the loading / unloading means 78 is separated from the cutting blade storage means 76 more than the above working position.

[0060] As shown in FIG. 13, the base pedestal 144 includes a frame 164 and a rectangular base plate 166 fixed to the upper part of the frame 164. Four circular holes 168 into which the leg portions 156 of the lifting table 142 are slidably inserted are formed at the four corners of the base plate 166. Further, a female screw 170 is formed at the central portion of the base plate 166.

[0061] (Z-axis moving means 82) Continuing the description with reference to FIG. 13, the Z-axis moving means 82 is connected to the lifting table 142 and the base pedestal 144. The Z-axis moving means 82 includes a ball screw 172 extending in the Z-axis direction, a motor 174 for rotating the ball screw 172, and a connecting plate 176 fixed to the upper end of the motor 174. The ball screw 172 is screwed into the female screw 170 of the base plate 166. The connecting plate 176 is fixed to the lower surface of the top plate 154 of the lifting table 142 by appropriate connecting means such as bolts (not shown).

[0062] The Z-axis moving means 82 converts the rotational motion of the motor 174 into a linear motion by the ball screw 172, and moves the frame body 140 provided with the loading / unloading means 78 in the Z-axis direction by raising and lowering the lifting table 142 with respect to the base pedestal 144.

[0063] Referring to FIG. 14, the loading / unloading means 78 is disposed on a first moving body 178 disposed inside the frame body 140. The first moving body 178 is slidably supported in a suspended state on a first guide rail 182 extending in the X-axis direction disposed below a second moving body 180. The second moving body 180 is slidably supported in a suspended state on a second guide rail 184 extending in the X-axis direction disposed on the ceiling portion 150 of the frame body 140.

[0064] The first moving body 178 has a rectangular plate-shaped main body 186. A circular hole 188 is formed in the central portion of the main body 186. The Z-rotation shaft 112 of the loading / unloading means 78 is inserted into the circular hole 188, and the Z-rotation shaft 112 is fixedly and non-rotatably attached to the main body 186. When the motor of the loading / unloading means 78 connected to the Z-rotation shaft 112 is driven, the casing 118 of the loading / unloading means 78 rotates with respect to the first moving body 178, and the blade holding portion 114 and the nut holding portion 116 are positioned in an arbitrary orientation.

[0065] On the upper surface of the main body 186 of the first moving body 178, a pair of guided members 190 having grooves 190a extending in the X-axis direction are provided at intervals in the Y-axis direction, and blocks 192 having through holes 192a extending in the X-axis direction are fixed.

[0066] The second moving body 180 has a rectangular plate-shaped main body 194, and a pair of first guide rails 182 are provided on the lower surface of the main body 194 at intervals in the Y-axis direction. The first guide rails 182 are slidably fitted into the grooves 190a of the pair of guided members 190 of the first moving body 178, and the first moving body 178 is slidably supported in a suspended state on the first guide rails 182 disposed on the second moving body 180.

[0067] (X-axis moving means 84) Below the main body 194 of the second moving body 180, first X-axis moving means for moving the first moving body 178 in the X-axis direction with respect to the second moving body 180 is provided. The first X-axis moving means in the illustrated embodiment is composed of an air cylinder 196. The cylinder tube 196a of the air cylinder 196 is fixed to the lower surface of the main body 194 and extends in the X-axis direction between a pair of first guide rails 182. The tip of the piston rod 196b of the air cylinder 196 is fitted and connected to the through hole 192a of the block 192 of the first moving body 178.

[0068] The air cylinder 196 as the first X-axis moving means moves the first moving body 178 in the X-axis direction along the first guide rail 182 with respect to the second moving body 180 by advancing and retracting the piston rod 196b.

[0069] On the upper surface of the main body 194 of the second moving body 180, a pair of guided members 198 having grooves 198a extending in the X-axis direction are provided at intervals in the Y-axis direction, and a block 200 having a female screw 200a extending in the X-axis direction is fixed.

[0070] A pair of second guide rails 184 are provided at intervals in the Y-axis direction on the lower surface of the ceiling portion 150 of the frame body 140. The second guide rails 184 are slidably fitted into the grooves 198a of the pair of guided members 198 of the second moving body 180, and the second moving body 180 is slidably supported in a state of being suspended by the second guide rails 184 provided on the ceiling portion 150 of the frame body 140.

[0071] Below the ceiling portion 150 of the frame body 140, second X-axis moving means 202 for moving the second moving body 180 in the X-axis direction with respect to the ceiling portion 150 is provided. The second X-axis moving means 202 of the illustrated embodiment includes a ball screw 204 extending in the X-axis direction between a pair of second guide rails 184, and a motor 206 for rotating the ball screw 204. The ball screw 204 is screwed into a female screw 200a of a block 200 of the second moving body 180. The motor 206 is fixed to the lower surface of the ceiling portion 150.

[0072] The second X-axis moving means 202 converts the rotational motion of the motor 206 into linear motion by the ball screw 204 and transmits it to the second moving body 180, and moves the second moving body 180 in the X-axis direction along the second guide rail 184 with respect to the ceiling portion 150.

[0073] The X-axis moving means 84 of the illustrated embodiment includes an air cylinder 196 as the first X-axis moving means, and second X-axis moving means 202 having a ball screw 204 and a motor 206. In the illustrated embodiment, by moving the first moving body 178 with the air cylinder 196 as the first X-axis moving means, the loading / unloading means 78 can be quickly advanced in the X-axis direction, and by moving the second moving body 180 with the second X-axis moving means 202, the X-axis direction position of the loading / unloading means 78 can be easily finely adjusted. Thus, the loading / unloading means 78 is configured to be able to freely advance and retreat in the X-axis direction by the first moving body 178 and the second moving body 180.

[0074] As shown in FIG. 1, the processing apparatus 2 includes control means 208 for controlling the operation of the processing apparatus 2. The control means 208 is composed of a computer having a central processing unit (CPU) that performs arithmetic processing according to a control program, a read-only memory (ROM) that stores the control program and the like, and a readable and writable random access memory (RAM) that stores the arithmetic results and the like.

[0075] (Cutting process) When performing cutting on a workpiece such as a wafer using the processing device 2, first, the workpiece is adsorbed onto the chuck table 18. Next, the chuck table 18 is moved below the imaging means 68 by the X-axis feeding means 24, and the Y-axis position of the imaging means 68 is adjusted by the moving means 70. Next, the workpiece is imaged from above by the imaging means 68 to detect the cutting area of the workpiece.

[0076] Next, based on the cutting area of the workpiece detected by the imaging means 68, the chuck table 18 is rotated to adjust the orientation of the cutting area of the workpiece with respect to the cutting blade 54 of the cutting means 6. Next, the chuck table 18 is moved in the X-axis direction by the X-axis feeding means 24, and the cutting means 6 is moved in the Y-axis direction by the Y-axis feeding means 38 to position the pair of cutting blades 54 above the cutting area of the workpiece.

[0077] Next, the cutting means 6 is lowered by the Z-axis feeding means 42, and the cutting edge 62 of the cutting blade 54 rotating at high speed is cut into the cutting area of the workpiece. While supplying cutting water to the portion where the cutting edge 62 of the cutting blade 54 is cut in, the chuck table 18 is fed in the X-axis direction for machining to perform predetermined cutting on the cutting area of the workpiece. While the cutting means 6 is indexed and fed in the Y-axis direction by the Y-axis feeding means 38, the above cutting process is appropriately repeated to perform cutting on all of the cutting area of the workpiece. The machined workpiece after the cutting process is transported to the next process.

[0078] (Replacement of the cutting blade 54) When the cutting process is repeatedly performed, the cutting blade 54 wears out. When the wear of the cutting blade 54 reaches a predetermined amount, the cutting accuracy cannot be maintained. Therefore, it is necessary to replace the cutting blade 54 mounted on the cutting means 6 with a new cutting blade 54. Also, even when the wear of the cutting blade 54 mounted on the cutting means 6 has not reached a predetermined amount, when performing cutting on a workpiece made of a material different from the material of the workpiece previously machined, it may be necessary to replace the cutting blade 54 with a cutting blade 54 corresponding to the material of the workpiece.

[0079] When replacing the cutting blade 54 mounted on the cutting means 6, first rotate the endless track 94 of the cutting blade storage means 76 to position the support shaft 96 that supports the new cutting blade 54 to be carried into the cutting means 6 at a predetermined position (for example, the lowermost position on the track of the support shaft 96).

[0080] Next, as shown in FIG. 15, rotate the casing 118 by a motor connected to the Z rotation shaft 112 of the loading / unloading means 78, align the side wall 122 of the casing 118 on which the blade holding portion 114 is mounted along the X-axis direction, and face the blade holding portion 114 to the cutting blade storage means 76. Also, operate the X-axis moving means 84 and the Z-axis moving means 82 to adjust the X-axis direction position and the Z-axis direction position of the blade holding portion 114 so that the shaft portion 106 of the support shaft 96 at the above predetermined position can be inserted into the central opening 126 of the blade holding portion 114.

[0081] Next, as shown in FIG. 16, move the frame body 140 in the Y-axis direction by the Y-axis positioning means 80 to position the loading / unloading means 78 at an operating position where the cutting blade 54 supported by the support shaft 96 can be held by the blade holding portion 114. As a result, the shaft portion 106 of the support shaft 96 at the above predetermined position is inserted into the central opening 126 of the blade holding portion 114, and the end face 124 of the blade holding portion 114 is brought into contact with the end face of the cutting blade 54 located on the tip side of the shaft portion 106. Next, generate a suction force in the suction hole 128 of the blade holding portion 114, and suction-hold the cutting blade 54 located on the tip side of the shaft portion 106 by the blade holding portion 114.

[0082] Next, operate the Y-axis positioning means 80 to move the loading / unloading means 78 away from the cutting blade storage means 76 in the Y-axis direction and position it at a retracted position. Next, rotate the casing 118 of the loading / unloading means 78 by 180°, and face the blade holding portion 114 on the opposite side of the blade holding portion 114 that suction-holds the cutting blade 54 to the cutting blade storage means 76.

[0083] Next, the Y-axis positioning means 80 is actuated to position the loading / unloading means 78 at an operating position where the cutting blade 54 of the support shaft 96 can be held by the opposite blade holding portion 114. Next, a suction force is generated in the suction holes 128 of the opposite blade holding portion 114, and the cutting blade 54 located on the tip side of the shaft portion 106 is suction-held by the blade holding portion 114. As a result, a new cutting blade 54 is suction-held by a pair of opposing blade holding portions 114 among the four blade holding portions 114.

[0084] Next, as shown in FIG. 17, the frame body 140 is moved in the Y-axis direction by the Y-axis positioning means 80, and the lift table 142 is moved in the Z-axis direction by the Z-axis moving means 82. As a result, the loading / unloading means 78 is separated from the cutting blade storage means 76 and positioned at a retracted position, and the Y-axis position and the Z-axis position of the loading / unloading means 78 with respect to the cutting means 6 are adjusted. The Y-axis position of the loading / unloading means 78 after the position adjustment is between the pair of cutting means 6, and the Z-axis position of the loading / unloading means 78 after the position adjustment is above the holding surface of the chuck table 18.

[0085] Next, as shown in FIG. 18, the first moving body 178 is moved in the X-axis direction by the air cylinder 196 as the first X-axis moving means, and the loading / unloading means 78 is advanced toward between the pair of cutting means 6. Next, as shown in FIG. 19, the second moving body 180 is moved in the X-axis direction by the second X-axis moving means 202, and the X-axis position of the loading / unloading means 78 with respect to the pair of cutting means 6 is adjusted.

[0086] Specifically, the X-axis direction position of the centers of the new pair of cutting blades 54 suction-held by the pair of blade holding portions 114 of the loading / unloading means 78 is aligned with the X-axis direction position of the centers of the pair of cutting blades 54 mounted on the pair of cutting means 6. Further, the Z-axis moving means 82 of the cutting blade mounting means 8 or the Z-axis feed means 42 of the cutting means 6 is actuated to align the Z-axis direction position of the center of the cutting blade 54 of the blade holding portion 114 with the Z-axis direction position of the center of the cutting blade 54 of the cutting means 6.

[0087] Next, the casing 118 of the loading / unloading means 78 is rotated by 60°, and the pair of nut holders 116 are faced to the cutting blades 54 of the pair of cutting means 6. Note that the casing 118 may be rotated by 60° before advancing the first and second moving bodies 178 and 180.

[0088] Next, the second cover member 66b of each blade cover 66 of the pair of cutting means 6 is positioned at the open position (see FIG. 5). Next, the cutting means 6 is moved in the Y-axis direction by the Y-axis feed means 38, and the nut 64 that fixes the cutting blade 54 to the boss portion 58 is brought into contact with the end face 132a of the rotating body 132 of the nut holder 116 (see FIG. 12). Then, the pin 138 of the nut holder 116 is pushed by the nut 64 and housed inside the rotating body 132, and the boss portion 58 is housed in the central opening 134 of the rotating body 132.

[0089] Next, when the rotating body 132 is rotated by the motor 133 of the nut holder 116, when the pin 138 aligns with the pin hole 64a of the nut 64, the pin 138 fits into the pin hole 64a, and the rotational movement of the rotating body 132 is transmitted to the nut 64 via the pin 138, and the nut 64 is loosened. As a result, the nut 64 can be removed from the male screw 58a of the boss portion 58 of the cutting means 6. Further, a suction force is generated in the suction hole 136 of the nut holder 116, and the removed nut 64 is suction-held by the nut holder 116.

[0090] Next, the cutting means 6 is separated from the loading / unloading means 78 by the Y-axis feed means 38, and the casing 118 of the loading / unloading means 78 is rotated by 60°, and the empty blade holder 114 that does not suction-hold the cutting blade 54 is faced to the cutting blade 54 of the cutting means 6.

[0091] Next, the Y-axis feed means 38 brings the cutting means 6 closer to the loading / unloading means 78, inserts the boss portion 58 of the cutting means 6 into the central opening 126 of the blade holding portion 114, and brings the end face of the blade holding portion 124 of the empty blade holding portion 114 into contact with the end face of the cutting blade 54 of the cutting means 6. Next, a suction force is generated in the suction holes 128 of the blade holding portion 114, and the cutting blade 54 of the cutting means 6 is suction-held by the blade holding portion 114.

[0092] Next, the Y-axis feed means 38 separates the cutting means 6 from the loading / unloading means 78, rotates the casing 118 of the loading / unloading means 78 by 60°, and faces the blade holding portion 114 that suction-holds the new cutting blade 54 to the boss portion 58 of the cutting means 6.

[0093] Next, the Y-axis feed means 38 brings the cutting means 6 closer to the loading / unloading means 78, inserts the boss portion 58 into the opening 54a of the new cutting blade 54, and brings the end face of the cutting blade 54 into contact with the receiving portion 56b of the fixing flange 56 of the rotating shaft 52. Next, the suction force of the blade holding portion 114 is released, and the new cutting blade 54 is transferred from the blade holding portion 114 to the cutting means 6.

[0094] Next, the Y-axis feed means 38 separates the cutting means 6 from the loading / unloading means 78, rotates the casing 118 of the loading / unloading means 78 by 60°, and faces the nut holding portion 116 that suction-holds the removed nut 64 to the boss portion 58 of the cutting means 6 (see FIG. 20).

[0095] Next, the Y-axis feed means 38 brings the cutting means 6 closer to the loading / unloading means 78 and positions the nut 64 suction-held by the nut holding portion 116 at the tip of the boss portion 58. Next, as shown in FIG. 21, the nut holding portion 116 is rotated forward at a predetermined rotational speed (for example, 50 degrees / second) to screw the nut 64 onto the male thread 58a of the boss portion 58. Note that the forward rotation in the illustrated embodiment is rotation in the direction indicated by the arrow R1 in FIG. 21.

[0096] When the tightening torque of the nut 64 reaches the threshold value for completion of fastening (for example, about 4.3 N·m), the rotation of the nut holding portion 116 is stopped. Next, with the position where the rotation of the nut holding portion 116 is stopped as the reference position, as shown in FIG. 22, the nut holding portion 116 is rotated reversely by a predetermined angle (for example, 20 degrees) to loosen the nut 64. The reverse rotation is in the direction indicated by the arrow R2 in FIG. 22.

[0097] Note that the tightening torque of the nut 64 can be calculated from the current value of the motor 133 of the nut holding portion 116. Also, the rotation angle of the nut holding portion 116 can be obtained by an appropriate rotation angle detection sensor such as a rotary encoder.

[0098] Thereafter, as shown in FIG. 23, the nut holding portion 116 is rotated forward in the R1 direction by the same angle as the angle by which the nut holding portion 116 was rotated reversely (20 degrees in the above example). That is, the nut holding portion 116 is rotated forward from the stop position after reverse rotation to the above reference position. And when the tightening torque of the nut 64 reaches the above threshold value for completion of fastening at the reference position, the control means 208 determines that the cutting blade 54 is properly fastened.

[0099] On the other hand, in other cases, the control means 208 determines that the cutting blade 54 is not properly fastened. That is, (1) when the tightening torque of the nut 64 reaches the above threshold value before the nut holding portion 116 returns to the reference position, or (2) when the tightening torque of the nut 64 does not reach the above threshold value at the reference position, the control means 208 determines that the cutting blade 54 is not properly fastened.

[0100] Thus, in the illustrated embodiment, after the tightening torque of the nut 64 reaches the threshold value, if the above (1) or (2) occurs when the nut 64 is loosened once and then tightened again, the control means 208 is configured to determine that there is a problem with the screw engagement between the male screw 58a of the boss portion 58 and the nut 64. And when a problem occurs, a message for notifying the operator of the problem is issued.

[0101] Thereby, the operator can disassemble the cutting means 6 and find problems such as the nut 64 not being properly screwed onto the male screw 58a, dust being present between the nut 64 and the male screw 58a, or the threads of the nut 64 or the male screw 58a being worn, and can perform various maintenance operations such as cleaning and replacing parts at an appropriate timing. Therefore, in the illustrated embodiment, it is possible to prevent the processing apparatus 2 from operating with the cutting blade 54 not being properly fastened.

[0102] When the cutting blade 54 is properly fastened, after releasing the suction force of the nut holding portion 116, the second cover member 66b of the blade cover 66 of the cutting means 6 is positioned at the closed position. Note that the removal and attachment of the nut 64 and the cutting blade 54 as described above may be performed simultaneously or separately for the pair of cutting means 6.

[0103] Next, the first and second moving bodies 178 and 180 are retracted, and the casing 118 of the carry-in / carry-out means 78 is rotated by 60°, causing one of the removed pair of cutting blades 54 to face the cutting blade storage means 76. Also, the endless track 94 of the cutting blade storage means 76 is rotated to position the empty support shaft 96 that does not support the cutting blade 54 at a predetermined position (for example, the lowermost position of the support shaft 96 in the track).

[0104] Next, the X-axis moving means 84 and the Z-axis moving means 82 are actuated to adjust the X-axis direction position and the Z-axis direction position of the blade holding portion 114 so that the shaft portion 106 of the support shaft 96 at the above-mentioned predetermined position can be inserted into the opening 54a of one of the cutting blades 54 held by suction by the blade holding portion 114.

[0105] Next, the frame body 140 is moved in the Y-axis direction by the Y-axis positioning means 80. The shaft portion 106 of the support shaft 96 at the above-mentioned predetermined position is inserted into the opening 54a of one of the cutting blades 54 held by suction by the blade holding portion 114, and the end face of one of the cutting blades 54 is brought into contact with the end face of the base portion 104 of the support shaft 96. Then, the suction force of the blade holding portion 114 is released, and one of the pair of removed cutting blades 54 is delivered to the support shaft 96.

[0106] Also, the loading / unloading means 78 is separated from the cutting blade storage means 76 by the Y-axis positioning means 80, the casing 118 of the loading / unloading means 78 is rotated 180°, and the blade holding portion 114 on the opposite side that holds the other of the pair of removed cutting blades 54 by suction is faced to the cutting blade storage means 76.

[0107] Next, the frame body 140 is moved in the Y-axis direction by the Y-axis positioning means 80. The shaft portion 106 of the support shaft 96 at the above-mentioned predetermined position is inserted into the opening 54a of the other of the cutting blades 54 held by suction by the blade holding portion 114 on the opposite side, and the end face of the other of the cutting blades 54 is brought into contact with the end face of the cutting blade 54 supported by the support shaft 96. Then, the suction force of the blade holding portion 114 is released, and the other of the pair of removed cutting blades 54 is delivered to the support shaft 96.

[0108] As described above, in the processing apparatus 2 of the illustrated embodiment, the nut holding portion 116 is rotated forward to screw the nut 64 onto the male screw 58a of the boss portion 58, and with the position where the torque reaches the threshold value of the fastening completion as the reference position, the nut holding portion 116 is rotated backward, and then the nut holding portion 116 is rotated forward. When the torque reaches the threshold value at the reference position, it is determined that the cutting blade 54 is properly fastened, and otherwise it is determined that the cutting blade 54 is not properly fastened. Therefore, the cutting blade 54 can be properly fastened.

Explanation of Signs

[0109] 2: Processing apparatus 4: Holding means 6: Cutting means 8: Cutting blade mounting means 52: Rotating shaft 54: Cutting blade 54a: Opening of the cutting blade 56: Fixed flange 58: Boss portion 58a: Male screw 64: Nut 116: Nut holding portion

Claims

【Claim 1】 A processing apparatus including: holding means for holding a workpiece; cutting means having a cutting blade for cutting the workpiece held by the holding means; and cutting blade mounting means for mounting the cutting blade on the cutting means, wherein the cutting means includes a rotating shaft, a fixed flange disposed at the tip of the rotating shaft for supporting the back of the cutting blade, a boss portion protruding from the central portion of the fixed flange and fitting into an opening formed in the central portion of the cutting blade, and a male screw formed at the tip of the boss portion, the cutting blade mounting means includes a nut holding portion for removably holding a nut that sandwiches the cutting blade fitted on the boss portion between the fixed flange, the nut holding portion is rotated forward to screw the nut onto the male screw of the boss portion, and with the position where the torque reaches the threshold value for completion of fastening as a reference position, the nut holding portion is rotated backward, and then the nut holding portion is rotated forward. If the torque reaches the threshold value at the reference position, it is determined that the cutting blade is properly fastened; otherwise, it is determined that the cutting blade is not properly fastened.

Images