Optical modulator and optical transceiver

Abstract

To provide an optical modulator and an optical transceiver which can increase the efficiency of propagating a light signal.SOLUTION: An optical modulator 10 includes: a substrate 50; a coplanar line path 40 having a first ground line 41, a second ground line 42, and a signal line 43; a waveguide 20 located between the first ground line 41 and the signal line 43, the waveguide having an input unit 21 and an output unit 22 for a light signal; and an adjustment member 30 located between a second ground line 42 and the signal line 43, the adjustment member not having an input unit and an output unit for a light signal.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an optical modulator and an optical transceiver. [Background technology]

[0002] A structure is known in which one optical waveguide is located between one ground line and a common signal line of a coplanar line, and no optical waveguide is located between the other ground line and the common signal line (see, for example, Fig. 1(a) of Non-Patent Document 1). [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] Jianfeng Ding, Hongtao Chen, Lin Yang, Lei Zhang, Ruiqiang Ji, Yonghui Tian, Weiwei Zhu, Yangyang Lu, Ping Zhou, Rui Min, and Mingbin Yu, Ultra-low-power carrier-depletion Mach-Zehnder silicon optical modulator, Optics Express, Vol. 20, No. 7 (2012) Summary of the Invention [Problem to be solved by the invention]

[0004] In a coplanar line, when an optical waveguide is located on one side of a ground line but not on the other side of the ground line, resonance occurs, reducing the propagation efficiency of an optical signal propagating through the optical waveguide. There is a need to improve the propagation efficiency of optical signals in optical waveguides.

[0005] An object of the present disclosure is to provide an optical modulator and an optical transceiver that can improve the propagation efficiency of an optical signal. [Means for solving the problem]

[0006] An optical modulator according to an embodiment of the present disclosure includes a substrate, a coplanar waveguide located on the substrate, a waveguide, and an adjustment member. The coplanar waveguide has a first ground line, a second ground line, and a signal line located between the first and second ground lines and coupled to the first and second ground lines. The waveguide is located on the substrate between the first ground line and the signal line along the coplanar waveguide in a planar view of the substrate. The waveguide has an input section for an optical signal and an output section that modulates the optical signal input from the input section with a signal propagating through the coplanar waveguide and outputs the modulated optical signal. The adjustment member is located on the substrate between the second ground line and the signal line along the coplanar waveguide in a planar view of the substrate. The adjustment member does not have an input section or an output section for an optical signal.

[0007] An optical transceiver according to an embodiment of the present disclosure includes an optical modulator and a light source that inputs an optical signal to the optical modulator. The optical modulator includes a substrate, a coplanar waveguide located on the substrate, a waveguide, and an adjustment member. The coplanar waveguide has a first ground line, a second ground line, and a signal line located between the first and second ground lines and coupled to the first and second ground lines. The waveguide is located on the substrate along the coplanar waveguide between the first ground line and the signal line in a planar view of the substrate. The waveguide has an input section for an optical signal and an output section that modulates the optical signal input from the input section with a signal propagating through the coplanar waveguide and outputs the modulated optical signal. The adjustment member is located on the substrate along the coplanar waveguide between the second ground line and the signal line in a planar view of the substrate. The adjustment member does not have an input section or an output section for an optical signal. [Effects of the Invention]

[0008] According to an optical modulator and an optical transceiver according to an embodiment of the present disclosure, the propagation efficiency of an optical signal can be improved. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a plan view illustrating an example of the configuration of an optical modulator according to an embodiment. [Figure 2] 2 is a cross-sectional view taken along the line AA in FIG. 1. [Figure 3] 10 is a graph showing frequency characteristics of S parameters of an optical modulator according to a comparative example. [Figure 4] 10 is a graph showing an example of frequency characteristics of S parameters of the optical modulator according to the present embodiment. [Figure 5] FIG. 10 is a plan view showing an example of a configuration in which the adjustment member is divided and arranged. [Figure 6] 10 is a graph showing an example of the relationship between the filling rate of the adjusting member and the effective refractive index of the coplanar line. [Figure 7] 6 is a cross-sectional view of FIG. 5 taken along line B-B. [Figure 8] 1 is a block diagram illustrating an example of the configuration of an optical transceiver according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] (Configuration example of optical modulator 10) 1 and 2, an optical modulator 10 according to one embodiment includes a coplanar line 40, a waveguide 20, an adjustment member 30, and a substrate 50. The optical modulator 10 is held by the substrate 50. The optical modulator 10 further includes a first dielectric layer 51 and a second dielectric layer 52 located on the substrate 50. The optical modulator 10 further includes a semiconductor layer 53 located on the first dielectric layer 51.

[0011] The coplanar line 40 includes a first ground line 41 and a second ground line 42 that are grounded, and a signal line 43 to which an electrical signal is input. The first ground line 41, the second ground line 42, and the signal line 43 extend in the X-axis direction. The first ground line 41 is electrically connected to the semiconductor layer 53 through a via wiring 411. The second ground line 42 is electrically connected to the semiconductor layer 53 through a via wiring 421. The signal line 43 is electrically connected to the semiconductor layer 53 through a via wiring 431. The first ground line 41, the second ground line 42, and the signal line 43 are insulated from each other by a second dielectric layer 52. The signal line 43 is located between the first ground line 41 and the second ground line 42. The signal line 43 is electrically coupled to each of the first ground line 41 and the second ground line 42.

[0012] The waveguide 20 extends in the X-axis direction on the semiconductor layer 53. The waveguide 20 is electrically connected to the semiconductor layer 53. The waveguide 20 is located between a first ground line 41 and a signal line 43 of the coplanar line 40. In a cross-sectional view (see FIG. 2 ) of a plane (YZ plane) perpendicular to the direction in which the waveguide 20 extends (the X-axis direction), the waveguide 20 is electrically connected to the first ground line 41 on the positive side of the Y-axis and to the signal line 43 on the negative side of the Y-axis. As a result, an electrical signal between the signal line 43 and the first ground line 41 is applied to the waveguide 20 in a direction intersecting the direction in which the waveguide 20 extends (the X-axis direction).

[0013] The waveguide 20 has an input section 21 and an output section 22. The waveguide 20 propagates an optical signal input from the input section 21 and outputs the optical signal from the output section 22. While the optical signal propagates through the waveguide 20 located between the first ground line 41 and the signal line 43, the optical signal is affected by an electrical signal applied to the waveguide 20 by the first ground line 41 and the signal line 43. The amplitude of the optical signal changes due to the influence of the electrical signal while propagating through the waveguide 20. In other words, the optical signal is modulated by the electrical signal propagating through the coplanar line 40 and is output from the output section 22.

[0014] The adjustment member 30 extends in the X-axis direction on the semiconductor layer 53. The adjustment member 30 may be electrically connected to the semiconductor layer 53 or may be insulated from the semiconductor layer 53. The adjustment member 30 is located between the second ground line 42 and the signal line 43 of the coplanar line 40.

[0015] In this embodiment, the substrate 50 is configured to include silicon (Si), but is not limited to this and may be configured to include other semiconductor materials such as GaAs. The substrate 50 may be configured to include a conductor such as metal or a dielectric such as glass or resin. The substrate 50 is not limited to these examples and may be configured to include various other materials.

[0016] The first dielectric layer 51 is assumed to be configured to include a silicon oxide film (SiO2), but is not limited to this and may be configured to include various other dielectric materials or insulating materials.

[0017] The second dielectric layer 52 is assumed to be composed of silicon oxide (SiO2), but is not limited to this and may be composed of various other dielectric materials or insulating materials. The second dielectric layer 52 may be composed of a gas such as air, or may be composed as a vacuum.

[0018] The semiconductor layer 53 is assumed to be composed of silicon (Si). The semiconductor layer 53 may be composed of a material obtained by doping a semiconductor with a dopant. The semiconductor layer 53 may be replaced with a layer of a conductor such as a metal.

[0019] The first ground line 41, the second ground line 42, and the signal line 43 may be made of a metal such as aluminum, but are not limited to this and may be made of various other conductive materials. The via wirings 411, 421, and 431 may be made of a metal such as tungsten, but are not limited to this and may be made of various other conductive materials.

[0020] The waveguide 20 and the adjustment member 30 are assumed to be made of silicon (Si), but are not limited to this and may be made of various other dielectric materials. The waveguide 20 and the adjustment member 30 may be made of the same material or different materials.

[0021] A portion of the waveguide 20 is surrounded by the second dielectric layer 52. The material of the waveguide 20 is determined so that the relative dielectric constant of the waveguide 20 is larger than the relative dielectric constant of the second dielectric layer 52. In other words, the materials of the waveguide 20 and the second dielectric layer 52 are determined so that the refractive index of the second dielectric layer 52 is larger than the refractive index of the waveguide 20. In this way, the optical signal propagating through the waveguide 20 can be totally reflected at the boundary with the second dielectric layer 52. As a result, the loss of the optical signal propagating through the waveguide 20 can be reduced.

[0022] The waveguide 20 is configured so as not to short-circuit the signal line 43 and the first ground line 41. In other words, the waveguide 20 may be configured so that the resistance value between the side connected to the signal line 43 through the via wiring 431 and the semiconductor layer 53 and the side connected to the first ground line 41 through the via wiring 411 and the semiconductor layer 53 is equal to or greater than a predetermined value. The resistance value may be adjusted, for example, by the dopant concentration of the semiconductor contained in the waveguide 20, or may be adjusted by the electrical resistance between the waveguide 20 and the coplanar line 40.

[0023] In this embodiment, the waveguide 20 includes an n-type semiconductor located on the side connected to the signal line 43 and a p-type semiconductor located on the side connected to the first ground line 41. The n-type semiconductor and the p-type semiconductor extend along the direction in which the waveguide 20 extends (the X-axis direction) and are positioned side by side in a direction intersecting the direction in which the waveguide 20 extends (the Y-axis direction). The waveguide 20 has a p-n junction where an n-type semiconductor and a p-type semiconductor are joined. The p-n junction is positioned along the direction in which the waveguide 20 extends (the X-axis direction). By having the p-n junction, the waveguide 20 is configured so that a bias becomes a reverse bias when a positive potential relative to the ground potential of the first ground line 41 is applied to the signal line 43. As a result, the waveguide 20 is configured so as not to short-circuit between the signal line 43 and the first ground line 41 when the potential of the signal line 43 is positive relative to the ground potential of the first ground line 41.

[0024] The adjustment member 30 may be configured to have the same pn junction as the waveguide 20, or may be configured solely from an n-type semiconductor, a p-type semiconductor, or an intrinsic semiconductor.

[0025] (Control of the resonance frequency in the optical modulator 10) As described above, the optical modulator 10 modulates light input from the input section 21 to the waveguide 20 by applying an electrical signal to the coplanar line 40, and outputs the modulated light from the output section 22. If a line consisting of a pair of one ground line and one signal line were used instead of the coplanar line 40, signal radiation would increase. The optical modulator 10 according to this embodiment can reduce signal radiation by using the coplanar line 40. In other words, signal loss can be reduced by using the coplanar line 40.

[0026] The propagation characteristics of the waveguide 20 of the optical modulator 10 are expressed as frequency characteristics of S parameters (Scattering Parameters). The S parameters of the waveguide 20 include S12, which represents the proportion of light transmitted from the input portion 21 to the output portion 22, and S11, which represents the proportion of light input to the input portion 21, reflected inside the waveguide 20, and returning to the input portion 21. In other words, the S parameters of the waveguide 20 include the transmittance and reflectance of light input to the waveguide 20.

[0027] Of the light propagating through the waveguide 20, light of a certain frequency may resonate inside the waveguide 20 and result in a large loss. The certain frequency at which light resonates is also called the resonant frequency. The resonant frequency varies depending on the shape of the waveguide 20. For example, the longer the line length of the waveguide 20, the lower the resonant frequency of the waveguide 20.

[0028] The waveguide 20 can be represented by an equivalent circuit including a capacitor and an inductor. The resonant frequency of the waveguide 20 can be associated with the equivalent circuit of the waveguide 20. The equivalent circuit of the waveguide 20 is affected by the arrangement of electrodes or dielectrics around the waveguide 20. Therefore, the resonant frequency changes depending on the arrangement of electrodes or dielectrics around the waveguide 20.

[0029] As a comparative example, an optical modulator is assumed in which the waveguide 20 is located between the first ground line 41 and the signal line 43 but not between the second ground line 42 and the signal line 43. A graph of the frequency characteristics of the S parameters of the waveguide 20 in this case is shown in FIG. 3. In the graph of FIG. 3, the horizontal axis represents the frequency of the optical signal propagating through the waveguide 20. The vertical axis represents the values of S11 and S12. At the resonance frequency represented by FR, the value of S12 is at a minimum. In other words, the transmittance of the signal at the resonance frequency is low. The frequency band of the electrical signal input to the signal line 43 to modulate the optical signal in the optical modulator is represented by SB. When the resonance frequency (FR) is within the frequency band (SB) of the electrical signal input to the signal line 43, loss of part of the signal modulated by the optical modulator increases. As a result, the propagation characteristics of the optical modulator deteriorate.

[0030] On the other hand, the optical modulator 10 according to this embodiment includes an adjustment member 30 located between the second ground line 42 and the signal line 43. A graph of the frequency characteristics of the S parameters of the waveguide 20 in this case is shown in FIG. 4. In the graph of FIG. 4, the horizontal axis represents the frequency of the optical signal propagating through the waveguide 20. The vertical axis represents the values of S11 and S12. The value of S12 does not have a minimum value within the frequency band (SB) of the electrical signal input to the signal line 43. In other words, in the optical modulator 10 according to this embodiment, no resonance occurs at least within the frequency band (SB) of the electrical signal. Therefore, the loss of a signal modulated by the optical modulator 10 according to this embodiment is less than the loss of a signal modulated by the optical modulator according to the comparative example. As a result, the propagation characteristics of a signal modulated by the optical modulator 10 according to this embodiment can be improved.

[0031] As described above, the optical modulator 10 according to this embodiment includes the adjustment member 30 located between the second ground line 42 and the signal line 43, thereby making it possible to maintain a high transmittance of the modulated signal within the frequency band (SB) of the electrical signal input to the signal line 43. As a result, the propagation characteristics of the modulated signal can be improved.

[0032] Furthermore, in the optical modulator 10 according to this embodiment, the adjustment member 30 does not have an input / output portion for an optical signal. Specifically, the adjustment member 30 does not have components corresponding to the input portion 21 and output portion 22 of the waveguide 20. If the adjustment member 30 had an input / output portion for an optical signal, the coupling between the waveguide 20 and the adjustment member 30 could be strengthened. Strengthening the coupling between the waveguide 20 and the adjustment member 30 could increase the influence of the adjustment member 30 on the optical signal propagating through the waveguide 20. On the other hand, since the adjustment member 30 of the optical modulator 10 according to this embodiment does not have an input / output portion for an optical signal, the coupling between the waveguide 20 and the adjustment member 30 could be weakened. Weakening the coupling between the waveguide 20 and the adjustment member 30 could reduce the influence of the adjustment member 30 on the optical signal propagating through the waveguide 20. Reducing the influence of the adjustment member 30 could maintain the characteristics of the optical signal modulated in the waveguide 20. As a result, the propagation characteristics of the modulated signal can be improved. Also, since the adjustment member 30 has an input / output portion for an optical signal, the length of the adjustment member 30 is limited. Since the adjustment member 30 does not have an input / output portion for an optical signal, the length of the adjustment member 30 can be adjusted as described below.

[0033] (Control of the effective refractive index in the optical modulator 10) In the optical modulator 10, an optical signal propagates through the waveguide 20, and an electrical signal propagates through the coplanar line 40. Here, in order to efficiently modulate the optical signal with the electrical signal, it is necessary to match the propagation velocity of the electrical signal in the coplanar line 40 with the propagation velocity of the optical signal in the waveguide 20. In order to match the propagation velocity of the electrical signal with the propagation velocity of the optical signal, it is necessary to reduce the difference between the effective refractive index of the waveguide 20 and the effective refractive index of the coplanar line 40.

[0034] The effective refractive index of the coplanar line 40 can be adjusted by the length of the adjustment member 30 in the extension direction (X-axis direction). As illustrated in Fig. 5, the length of the adjustment member 30 in the extension direction (X-axis direction) can be adjusted by dividing the adjustment member 30 into multiple parts. In Fig. 5, the adjustment member 30 includes n divided adjustment members 31, 32, and 3n. The adjustment member 30 may also be shortened without being divided into a single adjustment member 30.

[0035] The effective refractive index of the coplanar line 40 is determined according to the ratio of the length of the adjustment members 30 to the length of the waveguide 20. The ratio of the length of the adjustment members 30 to the length of the waveguide 20 is also referred to as the filling factor of the adjustment members 30. The filling factor is calculated by dividing the total length of the adjustment members 30 by the length of the waveguide 20. The length of the waveguide 20 is represented by L. The lengths of the n adjustment members 30 are represented by L1, L2, . . . , Ln. In this case, the filling factor of the adjustment members 30 is calculated as (L1 + L2 + . . . + Ln) / L. When one adjustment member 30 is shortened, the filling factor of the adjustment member 30 is calculated by dividing the shortened length of the adjustment member 30 by the length of the waveguide 20.

[0036] When the adjustment member 30 is divided along a plane perpendicular to the extension direction, the length of each divided portion of the adjustment member 30 coincides with the length in the extension direction. When the adjustment member 30 is divided along a plane tilted from the plane perpendicular to the extension direction, the length of each divided portion of the adjustment member 30 may be calculated as the length in the extension direction in orthogonal projection onto the waveguide 20.

[0037] 6 is a graph showing the relationship between the filling rate of the adjustment member 30 and the effective refractive index of the coplanar line 40. In the graph of FIG. 6, the horizontal axis represents the filling rate of the adjustment member 30. The vertical axis represents the effective refractive index of the coplanar line 40. The smaller the filling rate of the adjustment member 30, the lower the effective refractive index of the coplanar line 40. Therefore, the filling rate of the adjustment member 30 can be adjusted so that the effective refractive index of the coplanar line 40 approaches the effective refractive index of the waveguide 20.

[0038] The total length of the adjustment members 30 (the filling factor of the adjustment members 30) can affect the resonance frequency of the optical signal in the waveguide 20. The total length of the adjustment members 30 in the direction along the coplanar line 40 (the filling factor of the adjustment members 30) may be set so that the resonance frequency of the optical signal propagating through the waveguide 20 is higher than the frequency band (SB) of the electrical signal propagating through the signal line 43. This reduces the loss of the signal modulated in accordance with the electrical signal. As a result, the propagation characteristics of the signal modulated in the optical modulator 10 can be improved.

[0039] When the adjustment member 30 is divided into multiple parts, the arrangement of the divided parts in the X-axis direction has little effect on the effective refractive index of the coplanar line 40. Therefore, the divided parts of the adjustment member 30 may be arranged at any position in the X-axis direction.

[0040] 7, the optical modulator 10 may further include a temperature adjusting unit 54. The temperature adjusting unit 54 may be located inside the substrate 50 or below the substrate 50. The characteristics of the waveguide 20 or the coplanar line 40 may be affected by the temperature of the substrate 50. Therefore, the characteristics of the optical modulator 10 may be stabilized by adjusting the temperature of the substrate 50 using the temperature adjusting unit 54.

[0041] The temperature adjustment unit 54 may be configured to include, for example, a heat sink. The temperature adjustment unit 54 may be configured to include a heater that heats the substrate 50. The temperature adjustment unit 54 may be configured to include a cooling water pipe that cools the substrate 50. The temperature adjustment unit 54 may be configured to include a pipe that circulates water or the like at a predetermined temperature in order to control the temperature of the substrate 50 to a predetermined temperature.

[0042] In the optical modulator 10, the adjustment member 30 can generate heat by absorbing a portion of the optical signal propagating through the waveguide 20. As shown in FIG. 7, at least some of the divided portions of the adjustment member 30 may be arranged to overlap with the temperature adjustment section 54 in a plan view of the substrate 50 (when the substrate 50 is viewed from the positive direction of the Z axis). This makes it easier to adjust the temperature of the substrate 50. As a result, the characteristics of the optical modulator 10 can be stabilized.

[0043] (summary) As described above, the optical modulator 10 according to this embodiment includes the adjusting member 30 in addition to the waveguide 20 located along the coplanar line 40, and thereby can adjust the resonant frequency of the waveguide 20 to a frequency outside the frequency band of the electrical signal (the frequency band of the modulated optical signal). As a result, the propagation characteristics of the signal modulated in the optical modulator 10 can be improved.

[0044] (Configuration example of optical transceiver 100) The optical modulator 10 may be used in combination with a configuration for transmitting and receiving light. As shown in FIG. 8, the optical transceiver 100 includes the optical modulator 10, a light source 110, a signal input unit 120, and an isolator 130. The optical transceiver 100 inputs an optical signal from the light source 110 to the optical modulator 10, modulates light based on the signal input to the signal input unit 120 using the optical modulator 10, and outputs the modulated light from the optical modulator 10 to a receiver 140 via the isolator 130. The isolator 130 is configured so that the transmittance of the optical signal propagating from the light source 110 to the receiver 140 is greater than the transmittance of the optical signal propagating from the receiver 140 to the light source 110. This configuration makes it difficult for the optical signal to be incident on the light source 110. As a result, the light source 110 can be protected.

[0045] The light source 110 may be configured to include a semiconductor laser such as an LD (Laser Diode) or a VCSEL (Vertical Cavity Surface Emitting LASER). The light source 110 may be configured to include a device that emits optical signals of various wavelengths, not limited to visible light. The light source 110 may be formed on the substrate 50 together with the optical modulator 10.

[0046] The optical modulator 10 modulates light by changing the intensity of light input from the light source 110 to the waveguide 20 in accordance with a signal input from the signal input unit 120 to the signal line 43 of the coplanar line 40. The optical modulator 10 may be located between the isolator 130 and the receiver 140, rather than between the light source 110 and the isolator 130. The optical modulator 10 may, for example, pulse-modulate an optical signal. The signal input unit 120 accepts input of a signal from an external device or the like. The signal input unit 120 may include, for example, a D / A converter. The signal input unit 120 outputs a signal to the signal line 43 of the coplanar line 40 of the optical modulator 10.

[0047] Although the embodiments according to the present disclosure have been described based on the drawings and examples, it should be noted that those skilled in the art could make various modifications or alterations based on the present disclosure. Therefore, it should be noted that these modifications or alterations are included in the scope of the present disclosure. For example, the functions included in each component can be rearranged so as not to cause logical inconsistencies, and multiple components can be combined into one or divided. It should be understood that these modifications are also included in the scope of the present disclosure.

[0048] In this disclosure, descriptions such as "first" and "second" are identifiers for distinguishing the configuration. In this disclosure, the configurations distinguished by descriptions such as "first" and "second" can have their numbers exchanged. For example, the first ground wire 41 can exchange the identifiers "first" and "second" with the second ground wire 42. The exchange of identifiers is performed simultaneously. The configurations remain distinguished even after the identifier exchange. Identifiers may be deleted. A configuration from which an identifier has been deleted is distinguished by a symbol. The descriptions of identifiers such as "first" and "second" in this disclosure should not be used solely to interpret the order of the configurations or to justify the existence of an identifier with a smaller number.

[0049] In this disclosure, the X-axis, Y-axis, and Z-axis are provided for convenience of explanation and may be interchanged. The configurations according to this disclosure have been described using a Cartesian coordinate system formed by the X-axis, Y-axis, and Z-axis. The positional relationship between the components according to this disclosure is not limited to an orthogonal relationship. [Explanation of symbols]

[0050] 10 Optical Modulator 20 Waveguide (21: input section, 22: output section) 30, 31, 32, 3n adjustment parts 40 Coplanar line (41: first ground line, 42: second ground line, 43: signal line) 50 substrate (51, 52: dielectric layer, 53: semiconductor layer, 54: temperature adjustment unit) 100 optical transceiver (110: light source, 120: signal input section, 130: isolator, 140: receiver)

Claims

1. A substrate; a coplanar line located on the substrate, the coplanar line having a first ground line, a second ground line, and a signal line located between the first ground line and the second ground line and coupled to each of the first ground line and the second ground line; a waveguide located on the substrate along the coplanar line between the first ground line and the signal line in a plan view of the substrate, the waveguide having an input portion for an optical signal and an output portion for modulating the optical signal input from the input portion with a signal propagating through the coplanar line and outputting the modulated optical signal; an adjustment member that is located on the substrate along the coplanar line between the second ground line and the signal line in a plan view of the substrate, and that does not have an input portion or an output portion for an optical signal; An optical modulator comprising:

2. The optical modulator according to claim 1 , wherein the adjustment member is shorter than the waveguide in a direction along the coplanar line.

3. The optical modulator according to claim 2 , wherein the adjustment member is divided into a plurality of portions.

4. Further comprising a temperature adjustment unit located inside or below the substrate, The optical modulator according to claim 3 , wherein at least a part of the divided portion of the adjustment member is positioned so as to overlap the temperature adjustment portion in a plan view of the substrate.

5. 5. The optical modulator according to claim 2, wherein a total length of the adjustment members in a direction along the coplanar line is set so that a resonance frequency of an optical signal propagating through the waveguide is higher than a frequency band of a signal propagating through the signal line.

6. an optical modulator; and a light source for inputting an optical signal to the optical modulator; The optical modulator comprises: A substrate; a coplanar line located on the substrate, the coplanar line having a first ground line, a second ground line, and a signal line located between the first ground line and the second ground line and coupled to each of the first ground line and the second ground line; a waveguide located on the substrate along the coplanar line between the first ground line and the signal line in a plan view of the substrate, the waveguide having an input portion for an optical signal and an output portion for modulating the optical signal input from the input portion with a signal propagating through the coplanar line and outputting the modulated optical signal; an adjustment member that is located on the substrate along the coplanar line between the second ground line and the signal line in a plan view of the substrate, and that does not have an input portion or an output portion for an optical signal; An optical transceiver comprising:

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