Vapor deposition material distributor and vacuum deposition equipment

Abstract

The present invention provides a material distributor for vapor deposition material and a vacuum vapor deposition device. The material distributor includes a material distributor and a housing with the material distributor at its bottom, the material distributor has a plurality of through holes spaced apart from each other at the middle of the bottom of the material distributor along the longitudinal direction of the material distributor, and a plurality of load passages are respectively provided between each of the holes and the corresponding edge of the material distributor. Compared with the prior art, the material distributor for vapor deposition material can uniformly introduce the material to be vapor deposited into each crucible through the plurality of passages and the plurality of through holes.

Description

[Technical Field]

[0001] The present invention relates to the technical field of vacuum deposition, and in particular to a material dispenser for deposition materials and a vacuum deposition device. [Background technology]

[0002] Vacuum deposition refers to the process of placing the material to be deposited into a crucible under vacuum conditions and then heating the crucible. Traditional vacuum deposition requires simultaneous deposition in multiple crucibles. However, in the conventional technology, the material to be deposited is placed into each crucible one by one, which not only results in low efficiency but also makes it difficult to place equal amounts of material into each crucible, resulting in uneven deposition of the material on the thin film and negatively impacting product quality. Summary of the Invention [Problem to be solved by the invention]

[0003] In view of the above-mentioned drawbacks and deficiencies of the prior art, the present invention provides a material distributor for vapor deposition materials that solves the technical problem that, when placing the material to be vapor deposited into the crucibles in the prior art, it is difficult to place equal amounts of the material to be vapor deposited into each crucible, resulting in uneven deposition of the material onto the thin film. [Means for solving the problem]

[0004] To achieve the above objectives, the main technical solutions adopted in the present invention are as follows:

[0005] In a first aspect, the present invention provides a method for producing a composition comprising: a material distribution mechanism; a housing having the material dispensing mechanism at its bottom, the material distribution mechanism comprises a plurality of through holes disposed inside the material distribution mechanism at spaced intervals along the length of the material distribution mechanism; A material distributor for vapor deposition material is provided with a plurality of load passages respectively provided on both sides of the material distribution mechanism, each of the load passages corresponding to one of the holes, and each of the load passages communicating with the corresponding hole.

[0006] Optionally, the plurality of through holes are arranged in two rows at an intermediate position of the material dispensing mechanism.

[0007] Optionally, said material distribution mechanism further comprises a plurality of conduits, one at the bottom of each said hole.

[0008] Optionally, the material distribution mechanism further comprises a plurality of positioning tubes respectively fitted into the inner walls of the conduits, the length of the positioning tubes being greater than the length of the conduits, and the positioning tubes having one end connected to the hole and the other end communicating with the crucible.

[0009] Optionally, gaps are provided at tangent lines between the plurality of through holes and the plurality of load passages, and the material distributor further comprises a barrier, the barrier comprising a top plate and a barrier plate, the barrier plate being vertically connected to the top plate, the barrier plate being inserted into the gaps respectively, and the width of the barrier plate being equal to the depth of the load passage.

[0010] Optionally, the top plate is provided with a handle.

[0011] Optionally, the material distribution mechanism further includes a slider provided in each of the load passages, a hollow positioning lever threadedly attached to a side wall of the material distribution mechanism via a bolt and corresponding to each of the load passages, and an adjustment screw fixedly connected to the slider through the hollow positioning rod.

[0012] Optionally, said material distribution mechanism further comprises a shield plate provided above each said load passage, an edge of said shield plate proximal to said hole being fixedly connected to said slider.

[0013] Optionally, said housing is horn-shaped.

[0014] In another aspect, the present invention further provides a vacuum deposition apparatus comprising the material dispenser for a deposition material described above. [Effects of the Invention]

[0015] The beneficial effects of the present invention are as follows: The present invention provides a material distributor for vapor deposition material, comprising a material distributor and a housing with the material distributor mounted at its bottom, the material distributor having a plurality of through-holes spaced apart along the longitudinal direction of the material distributor at an intermediate position at the bottom of the material distributor, and a plurality of load passages respectively provided between the holes and corresponding edges of the material distributor.Compared to the prior art, this material distributor for vapor deposition material can uniformly introduce the material to be vapor deposited into each crucible through the plurality of passages and the plurality of through-holes. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is a schematic diagram of the overall structure of a material distributor for vapor deposition material according to a specific embodiment of the present invention; [Figure 2] FIG. 2 is a schematic diagram of the overall structure of another vapor deposition material dispenser according to a specific embodiment of the present invention. [Figure 3] FIG. 2 is a right side view of a material dispenser for vapor deposition material according to a specific embodiment of the present invention. [Figure 4] FIG. 2 is a bottom view of a material dispenser for vapor deposition materials according to a specific embodiment of the present invention. [Figure 5] 1 is a structural schematic diagram of a conduit and a positioning tube in a specific embodiment of the present invention; [Figure 6] 1 is a schematic diagram of the overall structure of a barrier in a specific embodiment of the present invention; [Figure 7] FIG. 2 is a top view of a material dispenser for vapor deposition materials in a specific embodiment of the present invention. [Figure 8] FIG. 2 is a perspective view of a material dispenser for vapor deposition materials according to a specific embodiment of the present invention. [Figure 9] FIG. 2 is a front view of a material dispenser for vapor deposition material according to a specific embodiment of the present invention. [Figure 10] 3 is a partial enlarged view of a material distributor for vapor deposition materials according to a specific embodiment of the present invention; FIG. [Figure 11] 1 is a schematic diagram of a connection structure between a shielding plate and a slider in a specific embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0017] In order to better understand the above technical solutions, exemplary embodiments of the present invention will be described in more detail below with reference to the drawings. Although exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be realized in various forms without being limited to the embodiments described herein. On the contrary, these embodiments are provided to enable a clearer and more complete understanding of the present invention and to comprehensively convey the scope of the present invention to those skilled in the art.

[0018] As shown in FIG. 1 , a specific embodiment of the present invention provides a material distributor for vapor deposition materials, comprising a material distributor 1 and a housing 2 with the material distributor 1 disposed at its bottom. The material distributor 1 has a plurality of through-holes 10 and a plurality of loading passages 11. The through-holes 10 are spaced apart along the longitudinal direction of the material distributor 1 at a midpoint of the material distributor 1, and the loading passages 11 are located on both sides of the material distributor 1 and correspond to the through-holes 10. Each loading passage 11 communicates with its corresponding hole 10. In this embodiment, a row of holes 10 is disposed at the midpoint of the material distributor 1, so that each loading passage 11 is located on both sides of a hole 10, and each hole 10 corresponds to two loading passages 11. The material to be vapor deposited is first introduced into the loading passage 11, passes through the loading passage 11, and enters the through-holes 10. The material to be vapor deposited then enters the crucible through the through-holes 10. In this embodiment, each of the holes 10 corresponds to two loading passages 11, which can quickly and uniformly distribute the material to be deposited. The number of holes 10 can be set according to the number of crucibles.

[0019] The material distributor for vapor deposition materials according to the present invention can uniformly feed the materials to be vapor deposited into each crucible at the same time, making the material to be vapor deposited into the film uniform, thereby not only improving production efficiency but also improving product quality.

[0020] As shown in FIG. 2 , in some embodiments, the plurality of through-holes 10 may be arranged in two rows at the middle of the material distribution mechanism 1. In this manner, a corresponding load passage 11 is provided between each row of holes 10 and the corresponding edge of the material distribution mechanism 1. The plurality of through-holes 10 may be arranged in one or two rows depending on the number of crucibles and the size of the material distribution mechanism 1, such as its length and width. When the material distribution mechanism 1 is long and narrow, the plurality of through-holes 10 may be arranged in one row. In this case, a load passage 11 is provided between each row of holes 10 and each edge of the material distribution mechanism 1, i.e., each hole 10 corresponds to two load passages 11. When the material distribution mechanism 1 is short and wide, the plurality of through-holes 10 may be arranged in two rows. In this case, a load passage 11 is provided between each row of holes 10 and the corresponding edge of the material distribution mechanism 1, i.e., each hole 10 corresponds to one load passage 11. The embodiment of the present invention allows flexibility in setting the location of the holes 10 depending on the size of the material distribution mechanism 1.

[0021] 3 to 5, in some embodiments, the material distribution mechanism 1 further includes a plurality of conduits 12 provided at the bottom of each hole 10. In the embodiments of the present invention, the material to be evaporated is guided into the crucible through the conduits 12. Typically, the crucible has a circular shape, and all of the material to be evaporated is introduced exactly into each crucible through the circular conduits 12, preventing the material from scattering outside and resulting in different amounts of the material to be evaporated in each crucible.

[0022] As shown in FIGS. 3 to 5 , in some embodiments, the material distribution mechanism 1 further includes a plurality of positioning tubes 13 respectively fitted into the inner wall of each conduit 12. The length of the positioning tubes 13 is longer than the length of the conduits 12, and one end of the positioning tube 13 is connected to the hole 10 and the other end is connected to the crucible. That is, each conduit 12 is fixed below the corresponding hole 10 via the positioning tube 13, and by increasing the positioning tube 13, it is possible to ensure a one-to-one correspondence between the positions of each conduit 12 and the crucible. The positioning tubes 13 are fitted into the inner wall of the conduits 12 and are longer than the length of the conduits 12, so that both ends of the entire structure consisting of the conduits 12 and the positioning tube 13 have protruding steps, one end of which is connected to the crucible and the other end of which is connected to the hole 10 of the material distribution mechanism 1. In this embodiment of the present invention, the conduits 12 are positioned by the positioning tubes 13, and each conduit can be positioned directly to each crucible, making it easier to introduce the material to be evaporated into the crucible.

[0023] As shown in FIGS. 1 , 2 , 6 , 7 , and 8 , in some embodiments, gaps 14 are provided at the tangents between the plurality of through-holes 10 and the plurality of load passages 11. That is, the gaps 14 are provided at the tangents of the plurality of through-holes 10 at the junctions between the plurality of through-holes 10 and the plurality of load passages 11. The material distributor further includes a barrier 3, which includes a top plate 31 and a barrier plate 32. The barrier plate 32 is vertically connected to the top plate 31 and inserted into the gaps 14, and the width of the barrier plate 32 is equal to the depth of the load passages 11, exactly separating the load passages 11 from the holes 10. In embodiments of the present invention, the barrier 3 is installed to block the holes 10 and the load passages 11, preventing the material to be evaporated from prematurely falling through the holes 10 into the crucible during material distribution, resulting in uneven material distribution. Optionally, the top plate 31 may be provided with a handle 33 for easy installation and removal of the barrier 3. Optionally, the barrier plate 32 may be chamfered on both the left and right bottom sides, and the corresponding edges of the gap 14 may also be chamfered, with the chamfer being 30° to 60°, which makes it easier for the barrier plate 32 to be inserted into the gap 14.

[0024] 3 , 4 , 7 , 8 , 9 , and 10 , in some embodiments, the material distribution mechanism 1 further includes a slider 15, a hollow positioning lever 16, a bolt 17, and an adjustment screw 18. The sliders 15 are provided in the respective loading passages 11, the hollow positioning levers 16 are screwed to the side walls of the material distribution mechanism 1 via bolts 17, and correspond to the respective loading passages 11, and the adjustment screws 18 pass through the hollow positioning levers 16 and are fixedly connected to the sliders 15. In the embodiments of the present invention, the sliders 15 can be pulled or pushed in by the adjustment screws 18. When pulled out, the material to be evaporated is introduced into the loading passage 11, and then the slider 15 is pushed in to push the material to be evaporated into the hole 10, and then further introduced into the crucible through the conduit 12. In addition, by rotating the hollow positioning lever 16, the length of time that the hollow positioning lever 16 has entered the load passage 11 can be adjusted, thereby positioning the sliders 15 with the hollow positioning lever 16 so that each slider 15 in each load passage 11 is positioned at the same position, and further, a fixed amount of material to be evaporated is dispensed.

[0025] 4, 7, 8, and 11, in some embodiments, the material distribution mechanism 1 further includes a shielding plate 19 disposed above each load passage 11, and the edge of the shielding plate 19 closer to the hole 10 is fixedly connected to the slider 15. Specifically, the length of the slider 15 is not as long as the length of the load passage 11, so that the slider 15 divides the load passage 11 into two sections, one closer to the hole 10 and the other farther away from the hole 10, and the shielding plate 19 shields the upper part of the load passage 11 farther away from the hole 10. As a result, all of the material to be evaporated falls into the load passage 11 closer to the hole 10 and then passes through the hole 10 and falls into the crucible. In embodiments of the present invention, the shielding plate 19 is provided to shield part of the load passage 11 between the slider 15 and the edge of the material distribution mechanism 1, thereby preventing the material to be evaporated (copper particles or aluminum particles) from falling into the load passage 11 between the slider 15 and the edge of the material distribution mechanism 1 during material distribution.

[0026] In some embodiments, the housing 2 may be trumpet-shaped, which prevents the material to be deposited from scattering on the ground during material dispensing, thereby wasting material and polluting the environment.

[0027] The present invention further provides a vacuum deposition apparatus, which includes any one of the above-mentioned evaporation material distributors. The evaporation material distributor distributes the materials, thereby not only improving the thin film deposition efficiency but also distributing the materials to be evaporated evenly in each crucible, thereby improving the thin film deposition quality.

[0028] The operation principle of the vapor deposition material distributor according to the present invention is as follows. First, the barrier 3 is placed over the multiple through holes 10 of the material distribution mechanism 1 to isolate the holes 10 from the load passage 11. After the hollow positioning lever 16 is pulled by the adjustment screw 18 to position the slider 15, the material to be evaporated (e.g., copper particles or aluminum particles) begins to be introduced into the load passage 11. The barrier 3 is lifted by the handle 33, and the slider 15 is pushed via the adjustment screw 18 to push the evaporation material in the load passage 11 into the holes 10, and the material to be evaporated is introduced into the crucible via the conduit 12 and the positioning tube 13, completing uniform distribution.

[0029] The beneficial effects of the present invention are as follows: The material distributor for vapor deposition materials according to the present invention can uniformly dispense the material to be vapor deposited into each crucible at the same time, making the material to be vapor deposited into the film uniform, thereby not only improving production efficiency but also improving product quality.

[0030] In the vapor deposition material distributor according to the present invention, the positions of the holes 10 can be flexibly set according to the size of the material distribution mechanism 1 .

[0031] The material distributor for evaporation material according to the present invention guides the material to be evaporated into the crucible through the conduit 12. The crucible is usually circular, and all of the material to be evaporated is precisely introduced into each crucible through the circular conduit 12, thereby preventing the evaporation material from scattering outside and preventing the number of materials to be evaporated from differing in each crucible.

[0032] The material distributor for deposition material according to the present invention positions the conduits 12 by the positioning tubes 13, and positions each conduit directly to each crucible, so that the material to be deposited can be better introduced into the crucible.

[0033] In a specific embodiment of the present invention, a barrier 3 is provided to block the hole 10 and the load passage 11, preventing the material to be deposited from prematurely dropping through the hole 10 into the crucible during material distribution, resulting in uneven material distribution. Optionally, a handle 33 can be provided on the top plate 31 to facilitate installation and removal of the barrier 3.

[0034] In a specific embodiment of the present invention, the slider 15 can be pulled out and pushed in by the adjustment screw 18. When pulled out, the material to be evaporated is placed into the loading passage 11, and then the slider 15 is pushed in, forcing the material to be evaporated into the hole 10, and then introduced into the crucible through the conduit 12. The sliders 15 can also be positioned by the hollow positioning lever 16 so that each slider 15 in each loading passage 11 is positioned at the same position, thereby determining the amount of material to be evaporated.

[0035] In a specific embodiment of the present invention, a shielding plate 19 is provided to shield a portion of the load passage 11 between the slider 15 and the edge of the material distribution mechanism 1, thereby preventing the material to be evaporated (copper particles or aluminum particles) from falling into the load passage 11 between the slider 15 and the edge of the material distribution mechanism 1 during material distribution.

[0036] In a specific embodiment of the present invention, the housing 2 is shaped like a trumpet, which can prevent the material to be evaporated from being scattered on the ground during material distribution, thereby preventing waste of material and environmental pollution.

[0037] In describing the present invention, the terms "first" and "second" are used for descriptive purposes only and should be understood not to indicate or imply the relative importance or the number of technical features indicated. A feature qualified by "first" or "second" may explicitly or implicitly include one or more of said features. In describing the present invention, unless expressly limited otherwise, "plurality" means two or more.

[0038] In the present invention, unless otherwise clearly specified or limited, the terms "attached," "coupled," "connected," "fixed," etc. should be understood in a broad sense, and may refer to, for example, a fixed connection, a detachable connection, or integration, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, an internal communication between two elements, or an interactive relationship between two elements. Those skilled in the art can understand the specific meanings of the above terms in the present invention according to specific circumstances.

[0039] In the present invention, unless otherwise clearly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intermediate medium. Furthermore, a first feature being "above," "above," or "upper side" of a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply that the horizontal height of the first feature is higher than that of the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply that the horizontal height of the first feature is lower than that of the second feature.

[0040] In the description herein, the use of terms such as "one embodiment," "some embodiments," "embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described with reference to the embodiment or example are included in at least one embodiment or example of the present invention. In the description herein, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined as appropriate in any one or more embodiments or examples. Furthermore, unless mutually inconsistent, those skilled in the art may combine or combine different embodiments or examples and features of different embodiments or examples described herein.

[0041] While embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are illustrative and not limiting of the present invention, and that those skilled in the art may make modifications, changes, substitutions and variations to the above embodiments within the scope of the present invention. [Explanation of symbols]

[0042] 1 Material distribution mechanism 10 holes 11 Road Passage 12 Conduit 13 Positioning pipe 14 Gap 15 Slider 16 Hollow positioning lever 17 volts 18 Adjustment screw 19 Shield plate 2. Housing 3. Barrier 31 Top plate 32 Barrier Plate 33 Toride

Claims

1. A material distributor for vapor deposition materials, A material distribution mechanism (1); a housing (2) having the material distribution mechanism (1) at its bottom, The material distribution mechanism (1) is rectangular, The material distribution mechanism (1) comprises a plurality of through holes (10) provided inside the material distribution mechanism (1) at intervals along the longitudinal direction of the material distribution mechanism (1); A plurality of load passages (11) are provided on both sides of the material distribution mechanism (1) in a lateral direction thereof so as to extend in the lateral direction, and correspond to the holes (10), and each of the load passages (11) is in communication with a corresponding hole (10); The material distributor for vapor deposition material is characterized in that the plurality of through holes (10) are provided in two rows at a middle position of the material distributor mechanism (1).

2. 2. The material distributor for evaporation material according to claim 1, wherein the material distributor mechanism (1) further comprises a plurality of conduits (12) respectively provided at the bottom of each of the holes (10).

3. The material distribution mechanism (1) further comprises a plurality of positioning tubes (13) fitted into the inner wall of each of the conduits (12), The material distributor for evaporation materials according to claim 2, characterized in that the length of the positioning tube (13) is greater than the length of the conduit (12), and the positioning tube (13) has one end connected to the hole (10) and the other end connected to the crucible.

4. A gap (14) is provided at a tangent between the plurality of through holes (10) and the plurality of load passages (11); The vapor deposition material distributor further comprises a barrier (3), the barrier (3) comprising a top plate (31) and a barrier plate (32), the barrier plate (32) being vertically connected to the top plate (31), and the barrier plate (32) being inserted into the gap (14), respectively; 2. The material distributor for vapor deposition materials according to claim 1, wherein the width of the barrier plate (32) is equal to the depth of the load passage (11).

5. 5. The vapor deposition material dispenser according to claim 4, wherein the top plate (31) is provided with a handle (33).

6. The material distribution mechanism (1) a slider (15) provided in each of the load passages (11); a hollow positioning lever (16) screwed to the side wall of the material distribution mechanism (1) via a bolt (17) and corresponding to each of the load passages (11); 2. The material distributor for vapor deposition materials according to claim 1, further comprising an adjusting screw (18) fixedly connected to the slider (15) through the hollow positioning lever (16).

7. The material distributor for evaporation material according to claim 6, characterized in that the material distribution mechanism (1) further comprises a shielding plate (19) provided above each of the load passages (11), and the edge of the shielding plate (19) close to the hole (10) is fixedly connected to the slider (15).

8. 2. A material distributor for vapor deposition materials according to claim 1, characterized in that the housing (2) is trumpet-shaped.

9. A vacuum deposition device comprising the material distributor for deposition materials according to any one of claims 1 to 8.

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