Crystal oscillator probe structure

Abstract

The utility model belongs to the technical field of vacuum evaporators, and discloses a crystal oscillator probe structure which comprises a crystal oscillator water pipe, a probe assembly is arranged at the bottom of the crystal oscillator water pipe, an installation structure is arranged on the inner wall of the probe assembly, and a driving assembly located outside the probe assembly is arranged at the top of the installation structure. A clamping structure is arranged in the probe assembly, the probe assembly comprises a mounting frame, and a detection head is movably sleeved with the mounting frame. According to the utility model, the detection head and the connecting plate are arranged, the reverse rotating block is rotated, and the whole detection head is limited through the clamping block, so that the screw rod is screwed out of the detection head, and the connecting plate, the protection plate, the limiting frame and the supporting frame are driven to move upwards and a wafer in the limiting frame is driven to move out of the mounting frame through the elastic force of the spring I; therefore, the wafer can be conveniently replaced by an operator, and the replacement efficiency of the wafer is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum evaporation machines, in particular to a crystal oscillator probe structure. Background Art

[0002] The crystal oscillator probe is a tool used to measure the crystal oscillator frequency and the film thickness on the substrate surface. By setting the crystal oscillator probe above the plating pot, the signal is transmitted to the vacuum evaporation machine host through the wafer measurement, which is used to control the process flow and parameters of the coating.

[0003] When the crystal oscillator probe in the prior art is in use, there are generally multiple chips inside. After measuring one chip, it needs to be rotated to another chip for measurement again. After all chips are measured, the chips will be coated and need to be replaced. However, when replacing the coated chips, it is generally necessary to disassemble the crystal oscillator probe, and then disassemble the chips inside the probe. When removing the chips, the chips need to be removed one by one. The operation is relatively complicated and time-consuming, so multiple chips cannot be quickly removed, which affects the processing efficiency of the probe. Therefore, it needs to be improved. Utility Model Content

[0004] In order to solve the problems raised in the above background technology, the utility model provides a crystal oscillator probe structure.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a crystal oscillator probe structure, comprising a crystal oscillator water pipe, a probe assembly being provided at the bottom of the crystal oscillator water pipe, a mounting structure being provided on the inner wall of the probe assembly, a drive assembly being provided on the top of the mounting structure and being located outside the probe assembly, and a clamping structure being provided inside the probe assembly;

[0006] Wherein, the probe assembly includes a mounting frame, and the detection head is movably sleeved inside the mounting frame;

[0007] The mounting structure includes a connecting plate, an outer wall of the connecting plate is movably connected to the inner cavity of the detection head, a supporting frame is provided on the outer side of the connecting plate, and the top of the supporting frame is connected to a limiting frame.

[0008] Preferably, the driving assembly includes a rotary block, the bottom of which is movably connected to the top of the mounting frame, the bottom of which is provided with a screw located in the inner cavity of the detection head, and the outer surface of the screw is threadedly sleeved with the inner wall of the detection head.

[0009] Preferably, the outer surface of the screw is movably connected to the inner wall of the connecting plate.

[0010] Preferably, a spring 1 is sleeved on the outer surface of the screw rod, and the upper and lower parts of the spring 1 are respectively connected to the mounting frame and the connecting plate.

[0011] Preferably, a protective plate is provided on the top of the screw rod, the bottom of the protective plate is movably connected to the top of the mounting frame, and the protective plate is movably connected to the crystal oscillator water pipe.

[0012] Preferably, the clamping structure includes a slot provided in the detection head, an inner wall of the slot is movably connected with a clamping block, an outer side of the clamping block extends to the inside of the mounting frame, and a curved surface is provided on one side of the clamping block.

[0013] Preferably, a second spring is provided on the inner side of the clamping block, and the other end of the second spring is connected to the inner wall of the slot.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0015] The utility model provides a detection head and a connecting plate, and by rotating the reverse rotating block, the detection head as a whole is limited by the clamping block, so that the screw is screwed out of the detection head, and the elastic force of the spring drives the connecting plate, the protective plate, the limiting frame and the supporting frame to move upward, and drives the chip inside the limiting frame to move out from the inside of the mounting frame, so that the limitation on the chip is released, thereby facilitating the operator to replace the chip and improving the replacement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the utility model;

[0017] Figure 2 This is a schematic cross-sectional view of the mounting bracket of the present invention;

[0018] Figure 3 This is a schematic cross-sectional view of the detection head of the utility model;

[0019] Figure 4 This is a schematic structural diagram of the limit frame of the utility model;

[0020] Figure 5 This is a structural diagram of the support frame of the utility model.

[0021] In the figure: 1. Crystal oscillator water pipe; 2. Probe structure; 201. Mounting frame; 202. Detection head; 3. Mounting structure; 301. Connecting plate; 302. Support frame; 303. Limiting frame; 4. Driving assembly; 401. Rotating block; 402. Screw; 403. Spring 1; 404. Protective plate; 5. Clamping structure; 501. Notch; 502. Clamping block; 503. Spring 2. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] like Figures 1 to 5 As shown, the utility model provides a crystal oscillator probe structure, including a crystal oscillator water pipe 1, a probe assembly 2 is provided at the bottom of the crystal oscillator water pipe 1, a mounting structure 3 is provided on the inner wall of the probe assembly 2, a driving assembly 4 located outside the probe assembly 2 is provided on the top of the mounting structure 3, and a clamping structure 5 is provided inside the probe assembly 2;

[0024] The probe assembly 2 includes a mounting frame 201, and a detection head 202 is movably sleeved inside the mounting frame 201;

[0025] The mounting structure 3 includes a connecting plate 301, the outer wall of the connecting plate 301 is movably connected to the inner cavity of the detection head 202, a support frame 302 is provided on the outer side of the connecting plate 301, and the top of the support frame 302 is connected to the limit frame 303;

[0026] By rotating the drive assembly 4, the connecting plate 301 is driven to release the fixation on the detection head 202, and then the connecting plate 301 is driven to move upward through the elastic force of the spring 1 403. At the same time, the supporting frame 302 and the limiting frame 303 are driven to move upward through the connecting plate 301, so that the limiting frame 303 is moved out from the inside of the mounting frame 201, so that it contacts the chip clamped inside the limiting frame 303. Therefore, by lifting the limiting frame 303, it is convenient to replace the chips in all probes, thereby improving the replacement efficiency and bringing convenience to personnel.

[0027] The driving assembly 4 includes a rotary block 401, the bottom of which is movably connected to the top of the mounting frame 201. A screw 402 is provided at the bottom of the rotary block 401 and is located in the inner cavity of the detection head 202. The outer surface of the screw 402 is threadedly sleeved with the inner wall of the detection head 202.

[0028] By rotating the rotary block 401, the screw 402 is moved out from the inside of the detection head 202, so that the connection plate 301 can be released from fixing the detection head 202, so that the connection plate 301 can be driven to move up and down in the inner cavity of the detection head 202, thereby facilitating the replacement of all the wafers of the probe.

[0029] The outer surface of the screw 402 is movably connected to the inner wall of the connecting plate 301;

[0030] Due to the threaded connection between the screw 402 and the detection head 202, the screw 402 and the detection head 202 are fixed, and then the rotary block 401 is rotated clockwise, so that the detection head 202 is driven by the screw 402 to rotate as a whole. Through the design of the detection head 202 and the clamping structure 5, the wafers at different positions can be clamped when the wafer is rotated, so as to prevent position deviation from affecting the lens measurement effect.

[0031] The outer surface of the screw rod 402 is covered with a spring 1 403, and the upper and lower parts of the spring 1 403 are connected to the mounting bracket 201 and the connecting plate 301 respectively;

[0032] The elastic force of spring 1 403 drives the connecting plate 301 to move upward as a whole, and then drives the wafer inside the limiting frame 303 to move through the support frame 302, so that it is moved out of the mounting frame 201 for replacing the coated lens.

[0033] A protective plate 404 is provided on the top of the screw 402, the bottom of the protective plate 404 is movably connected to the top of the mounting frame 201, and the protective plate 404 is movably connected to the crystal oscillator water pipe 1;

[0034] When the rotary block 401 is rotating, the crystal oscillator water pipe 1 limits the protective plate 404 to prevent the screw 402 from moving during rotation. Then, when the connecting plate 301 is acted upon by the elastic force of the spring 1 403, the screw 402, the mounting structure 3 and the protective plate 404 are driven to move upward, thereby releasing the protection on the top of the mounting frame 201. At the same time, the chip inside the limiting frame 303 is also moved out from the inside of the detection head 202 for replacement, so that the top of the chip is protected by the protective plate 404 to prevent it from being damaged.

[0035] The clamping structure 5 includes a slot 501 formed in the detection head 202. A clamping block 502 is movably connected to the inner wall of the slot 501. The outer side of the clamping block 502 extends into the interior of the mounting frame 201. A curved surface is provided on one side of the clamping block 502.

[0036] When the detection head 202 is rotated clockwise by the screw 402, the block 502 will squeeze the inner wall of the mounting frame 201. At the same time, since the outer side of the block 502 is set to an arc shape, the block 502 moves to the inside of the slot 501 during squeezing, so that it moves to the measurement of the next chip, so that it does not affect the switching of the chips inside the detection head 202. At the same time, when the screw 402 is rotated counterclockwise, the block 502 blocks the inner wall of the mounting frame 201, so that the block 502 cannot move to the inside of the slot 501. Under the continuous rotation of the screw 402, the screw 402 will release the fixation of the detection head 202, thereby releasing the fixation of the connecting plate 301, which is used to pop out the limit frame 303 into the mounting frame 201 to replace the chip.

[0037] Among them, a second spring 503 is provided inside the clamping block 502, and the other end of the second spring 503 is connected to the inner wall of the slot 501;

[0038] At this time, since the spring 2 503 is in an extruded state, it will apply an outward pressure to the clamping block 502, causing the clamping block 502 to be clamped in the mounting bracket 201. When the probe assembly 2 is rotated as a whole, the wafer at the bottom of the crystal oscillator water pipe 1 is clamped by the clamping block 502 to prevent position deviation from affecting the measurement.

[0039] The working principle and use process of this utility model:

[0040] First, when the operator replaces the coated wafer, the rotary block 401 is rotated counterclockwise to drive the screw 402 to rotate. Since the clamping block 502 is clamped to the detection head 202, the bottom of the screw 402 is moved out from the inside of the detection head 202, so that the connection between the screw 402 and the detection head 202 is released. Then, due to the elastic force of the spring 1 403, the connecting plate 301, the support frame 302, the limiting frame 303, the screw 402 and the protective plate 404 are moved upward as a whole, and then the wafer inside the mounting frame 201 is pushed out through the limiting frame 303, making it easier to align the wafer. The chip is replaced, and then when the replacement is completed, press and rotate the rotary block 401 to reset the screw 402, and then rotate the rotary block 401 clockwise. Since the screw 402 thread has reached the innermost part of the detection head 202, the screw 402 drives the detection head 202 to rotate as a whole during rotation, so that different chips are moved to the bottom of the crystal oscillator water pipe 1 for measurement, so that each time it is rotated out, it is clamped and fixed by the clamping block 502, so that the operator can easily eject the chip from the inside of the probe assembly 2, making it easy to replace it, greatly improving the replacement efficiency and bringing convenience to the operator.

[0041] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0042] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A crystal oscillator probe structure, comprising a crystal oscillator water pipe (1), characterized in that: A probe assembly (2) is provided at the bottom of the crystal oscillator water pipe (1), a mounting structure (3) is provided on the inner wall of the probe assembly (2), a driving assembly (4) located outside the probe assembly (2) is provided on the top of the mounting structure (3), and a clamping structure (5) is provided inside the probe assembly (2); The probe assembly (2) comprises a mounting frame (201), and a detection head (202) is movably sleeved inside the mounting frame (201); The mounting structure (3) comprises a connecting plate (301), the outer wall of the connecting plate (301) is movably connected to the inner cavity of the detection head (202), a support frame (302) is provided on the outer side of the connecting plate (301), and the top of the support frame (302) is connected to a limiting frame (303).

2. The crystal oscillator probe structure according to claim 1, characterized in that: The driving assembly (4) comprises a rotary block (401), the bottom of the rotary block (401) being movably connected to the top of the mounting frame (201), the bottom of the rotary block (401) being provided with a screw rod (402) located in the inner cavity of the detection head (202), and the outer surface of the screw rod (402) being threadedly sleeved with the inner wall of the detection head (202).

3. The crystal oscillator probe structure according to claim 2, characterized in that: The outer surface of the screw rod (402) is movably connected to the inner wall of the connecting plate (301).

4. The crystal oscillator probe structure according to claim 2, characterized in that: The outer surface of the screw rod (402) is sleeved with a spring 1 (403), and the upper and lower parts of the spring 1 (403) are respectively connected to the mounting frame (201) and the connecting plate (301).

5. The crystal oscillator probe structure according to claim 2, characterized in that: A protective plate (404) is provided on the top of the screw rod (402), the bottom of the protective plate (404) is movably connected to the top of the mounting frame (201), and the protective plate (404) is movably connected to the crystal oscillator water pipe (1).

6. The crystal oscillator probe structure according to claim 1, characterized in that: The clamping structure (5) comprises a notch (501) provided in the detection head (202); a clamping block (502) is movably connected to the inner wall of the notch (501); the outer side of the clamping block (502) extends to the interior of the mounting frame (201); and a curved surface is provided on one side of the clamping block (502).

7. The crystal oscillator probe structure according to claim 6, characterized in that: A second spring (503) is provided inside the clamping block (502), and the other end of the second spring (503) is connected to the inner wall of the notch (501).

Images