Position measurement device
The position measuring device addresses non-uniform coolant distribution by redirecting coolant flows in opposite directions through passage openings, ensuring uniform temperature and improved measurement accuracy.
Patent Information
- Application Number
- JP2021017361
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2020-04-29
- Filing Date
- 2021-02-05
- Publication Date
- 2025-08-20
- Estimated Expiration
- 2041-02-05
AI Technical Summary
Existing position measuring devices suffer from non-uniform coolant temperature distribution, leading to reduced position measurement accuracy due to inadequate cooling of the scale.
A position measuring device with a housing featuring first and second passage openings and a connecting passage that redirects coolant flow in opposite directions through these openings, ensuring uniform temperature distribution along the scale.
This design achieves accurate longitudinal position measurement by maintaining uniform coolant temperature across the scale, enhancing measurement precision.
Smart Images

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Abstract
Description
[Technical Field]
[0001] The invention relates to a position measuring device according to the preamble of claim 1. [Background technology]
[0002] Japanese Patent Application Laid-Open Publication No. 2001-174247 discloses a position measuring device, particularly a length measuring device. The position measuring device includes a housing having a hollow section disposed within the housing extending in a vertical direction, a scale disposed within the housing, and a scanning device for scanning the scale. The housing includes a plurality of passage openings used as cooling passages. Each passage opening extends vertically through the hollow section.
[0003] A drawback of known position measuring devices is that the temperature distribution of the coolant flowing through the passage openings is not uniform over the length of the scale, which prevents optimal cooling of the scale, resulting in a position measurement accuracy that is reduced or at least not maintained compared to optimal cooling of the scale. [Prior art documents] [Patent documents]
[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-174247 Summary of the Invention [Problem to be solved by the invention]
[0005] The problem underlying the present invention is to provide a position measuring device which allows for accurate measurement of the longitudinal position of a scale arranged in a housing of the position measuring device. [Means for solving the problem]
[0006] This problem is solved according to the invention by a position measuring device with the features of claim 1.
[0007] The position measuring device according to the present invention comprises a housing having a first section in the form of a hollow section extending in the longitudinal direction, a scale arranged in the housing, and a scanning device for scanning the scale. The housing has at least one first passage opening and one second passage opening, each of which extends longitudinally at least partially through the first section. The position measuring device has a connecting passage, which connects the two passage openings to each other.
[0008] Preferably, a connecting passage is used as a fluid connection between the cross sections of both passage openings.
[0009] The connecting passage extends in particular between the cross section of the first passage opening and the cross section of the second passage opening.
[0010] It is advantageous if the connecting passage is formed in such a way that a fluid flowing through the cross section of the first passage opening in a first direction parallel to the longitudinal direction is redirected after the redirection so that it flows through the cross section of the second passage opening in a second direction opposite to the first direction.
[0011] Preferably, the connecting passage is constituted by structures in the cover element and / or in the sealing element, these structures including in particular recesses and passage openings.
[0012] Furthermore, the position measuring device can comprise a U-shaped diverting element, which has an inlet or outlet associated with the first passage opening and an inlet or outlet associated with the second passage opening.
[0013] According to the present invention, a uniform temperature distribution of the coolant (fluid) over the length of the scale is achieved. This in turn allows for accurate measurement of the scale's longitudinal position. For this purpose, in particular, connecting passages are provided as fluid connection means for diverting the fluid on one side of the position measuring device. The first and second passage openings are preferably used as cooling passages for generating fluid flows extending in the first and second directions (i.e., opposite directions), respectively. It is further advantageous if inlet (fluid inlet) and outlet (fluid outlet) connections are provided on the other side of the position measuring device. Additionally, this allows for a simple assembly of the fluid inlets and outlets for connection to the cooling circuit or a reduction in the space required for the position measuring device.
[0014] Preferably, the connections for the fluid inlet and the fluid outlet are provided on only one, in particular freely selectable, side of the position measuring device.
[0015] The first passage opening and the second passage opening may also be referred to as cooling holes.
[0016] Advantageous developments of the invention are set forth in the dependent claims.
[0017] A first gaze direction is understood below to be a gaze direction towards the first part. A second gaze direction is understood below to be a gaze direction away from the first part.
[0018] Further details and advantages of the position measuring device according to the invention can be seen from the following description of an embodiment with the aid of the accompanying drawings. [Brief explanation of the drawings]
[0019] [Figure 1a] 1 is an exploded perspective view of a position measuring device according to a first embodiment; [Figure 1b] 1 is a perspective view of a position measuring device according to a first embodiment; [Figure 2a] 1 is a perspective view of one side of a position measuring device according to a first embodiment; FIG. [Figure 2b]1 shows a perspective exploded view of a first side of a position measuring device according to a first embodiment, viewed in a first viewing direction; [Figure 2c] 1 is a perspective cross-sectional view of a first side of a position measuring device according to a first embodiment; [Figure 2d] 1 shows a perspective exploded view of a first side of a position measuring device according to a first embodiment, viewed in a second viewing direction; [Figure 2e] 1 shows a perspective view of a second side of a position measuring device according to a first embodiment; [Figure 2f] 1 shows a perspective exploded view of a second side of a position measuring device according to a first embodiment, viewed in a first viewing direction; [Figure 2g] 1 shows a perspective cross-sectional view of a second side of a position measuring device according to a first embodiment; [Figure 2h] 1 shows a perspective exploded view of a second side of the position measuring device according to the first embodiment, viewed in a second viewing direction; [Figure 3a] 1 shows a perspective view of a first side of a position measuring device according to a second embodiment; [Figure 3b] 1 shows a perspective exploded view of a first side of a position measuring device according to a second embodiment, viewed in a first viewing direction; [Figure 3c] 1 shows a perspective cross-sectional view of a first side of a position measuring device according to a second embodiment; [Figure 3d] 1 shows a perspective exploded view of a first side of a position measuring device according to a second embodiment, viewed in a second viewing direction; [Figure 4a] 1 shows a perspective view of a first side of a position measuring device according to a third embodiment; [Figure 4b] 1 shows a perspective exploded view of a first side of a position measuring device according to a third embodiment, viewed in a first viewing direction; [Figure 4c] 10 is a perspective cross-sectional view of a first side of a position measuring device according to a third embodiment; FIG. [Figure 4d] 1 shows a perspective exploded view of a first side of a position measuring device according to a third embodiment, viewed in a second viewing direction; [Figure 5a] 10 is a perspective view of a first side of a position measuring device according to a fourth embodiment; [Figure 5b] 1 shows a perspective exploded view of a first side of a position measuring device according to a fourth embodiment, viewed in a first viewing direction; [Figure 5c] 10 is a perspective cross-sectional view of a first side of a position measuring device according to a fourth embodiment; [Figure 5d] 1 shows a perspective exploded view of a first side of a position measuring device according to a fourth embodiment, viewed in a second viewing direction; [Figure 6a] 10 is a perspective view of a first side of a position measuring device according to a fifth embodiment; [Figure 6b] 1 shows a perspective exploded view of a first side of a position measuring device according to a fifth embodiment, viewed in a first viewing direction; [Figure 6c] 10 is a perspective cross-sectional view of a first side of a position measuring device according to a fifth embodiment; [Figure 6d] 10 is a perspective exploded view of a first side of a position measuring device according to a fifth embodiment, viewed in a second viewing direction; [Figure 7a] 1 is a perspective view of a second side of a position measuring device according to the first to fifth embodiments; FIG. [Figure 7b] 1 is a perspective exploded view of a second side of a position measuring device according to the first to fifth embodiments, viewed in a first viewing direction; FIG. [Figure 7c] 1 is a perspective cross-sectional view of a second side of a position measuring device according to the first to fifth embodiments; FIG. [Figure 7d] 1 is a perspective exploded view of a second side of the position measuring device according to the first to fifth embodiments, viewed in a second viewing direction; FIG. DETAILED DESCRIPTION OF THE INVENTION
[0020] Identical or functionally identical elements are provided with the same reference numerals in the various figures.
[0021] A first embodiment will be described below with reference to Figures 1a to 2h. The position measuring device according to the first embodiment has a housing 10 with a first part 12.1 in the form of a hollow profile extending in the longitudinal direction X, a scale 16 arranged in the housing 10, and a scanning device for scanning the scale 16. The scanning device is not shown in the figures.
[0022] The position measuring device is in particular a length measuring device, for which the scale 16 and the scanning device are movable relative to one another in the longitudinal direction X (i.e. the measuring direction). During the position measurement, the scanning device scans the measuring graduations of the scale 16 and generates the position measurement value therefrom.
[0023] In the longitudinal direction X, the first part 12.1 has a sealing lip 2. The sealing lip 2 clamps a carrier (not shown) on which the scanning device is fixed. The housing 10 has a second part 12.2 arranged at one end of the first part 12.1. The housing 10 also has a third part 12.3 arranged at the other end of the first part 12.1. The second part 12.2 and the third part 12.3 are each cover elements. In addition, the position measuring device has a first sealing element 14.1 arranged between the first part 12.1 and the second part 12.2. The position measuring device also has a second sealing element 14.2 arranged between the first part 12.1 and the third part 12.3. The first sealing element 14.1 and the second sealing element 14.2 are each plate-shaped and are used to seal the housing 10. The second part 12.2 can be secured to one end of the first part 12.1 by means of a screw 4.1, and the third part 12.3 can be secured to the other end of the first part 12.1 by means of a screw 4.2.
[0024] The housing 10 comprises a first passage opening 18.1 and a second passage opening 18.2. The two passage openings 18.1, 18.2 are arranged one above the other and each extend completely through the first part 12.1 in the longitudinal direction X, i.e. from one side to the other (see Figures 2b and 2f). The two passage openings 18.1, 18.2 are each used as cooling passages (i.e. passages for a coolant) for optimal cooling of the scale 16.
[0025] Additionally, the position measuring device includes a connecting passage 20 (see FIG. 2c). The two passage openings 18.1, 18.2 are connected to each other via the connecting passage 20, which extends between the cross sections of the first passage opening 18.1 and the second passage opening 18.2. The connecting passage 20 is configured so that a fluid flowing through the cross section of the first passage opening 18.1 in a first direction P1 parallel to the longitudinal axis X is redirected to flow through the second passage opening 18.2 in a second direction P2 opposite to the first direction P1. This allows countercurrent fluid flows, i.e., fluid flows proceeding in opposite directions P1, P2. This results in a uniform temperature distribution of the coolant over the length of the scale 16 and thus in an accurate position measurement of the scale 16 in the longitudinal direction X.
[0026] The two passage openings 18.1, 18.2 each extend in a plane S1 which extends perpendicular to the longitudinal direction X. The plane S1 coincides with the side surface A1 of one end of the first part 12.1, as shown in Figure 2c.
[0027] The second part 12.2 comprises a recess 22 associated with both the first passage opening 18.1 and the second passage opening 18.2, i.e. the recess 22 and the two passage openings 18.1, 18.2 are opposite each other in the longitudinal direction X. The recess 22 can be seen best in Figure 2d.
[0028] Furthermore, the first sealing element 14.1 has a passage opening 24.1 associated with the first passage opening 18.1 and a passage opening 24.2 associated with the second passage opening 18.2, i.e. the two passage openings 24.12, 24.2 and the two passage openings 18.1, 18.2 are opposite each other in the longitudinal direction X. The two passage openings 24.1, 24.2 can be seen best in Figures 2b and 2d.
[0029] As shown in Figure 2c, the connecting passage 20 is constituted by the two passage openings 24.1, 24.2 and the recess 22. The connecting passage 20 is used to make a fluid connection between the cross sections of the two passage openings 18.1, 18.2 (i.e. the cross sections in the plane S1).
[0030] To provide the fluid inlet and outlet connections, the second sealing element 14.2 has a passage opening 36.1 associated with the first passage opening 18.1 and a passage opening 36.2 associated with the second passage opening 18.2. Furthermore, the third part has a passage opening 38.1 associated with the first passage opening 18.1 and a passage opening 38.2 associated with the second passage opening 18.2. As shown in FIG. 2f, the two passage openings 36.1, 36.2 and the two passage openings 18.1, 18.2 are opposite each other in the longitudinal axis direction X. Furthermore, the two passage openings 38.1, 38.2 and the two passage openings 36.1, 36.2, or the two passage openings 38.1, 38.2 and the two passage openings 18.1, 18.2, are opposite each other in the longitudinal axis direction X. The connection 42 formed by the two passage openings 36.1, 36.2 and the two passage openings 38.1, 38.2 is shown in Figure 2g The connection 42 is arranged at the other end of the first part 12.1.
[0031] 3a to 3d show various views of the first side (turning side) of a position measuring device according to a second embodiment. The position measuring device according to the second embodiment differs from the position measuring device according to the first embodiment in that both passage openings 18.1, 18.2 each extend only partially through the first part 12.1 in the longitudinal direction X. As shown in FIG. 3c, both passage openings 18.1, 18.2 each extend to a plane S1' extending perpendicular to the longitudinal direction X. The plane S1' is offset in the longitudinal direction X relative to a side surface A1 at one end of the first part 12.1. Furthermore, the first part 12.1 has recesses 26 adjacent to the first and second passage openings 18.1, 18.2 (see FIGS. 3b and 3c).
[0032] In addition, with reference to Fig. 3d, the second part 12.2 is formed continuously at least in the area associated with the first passage opening 18.1 and the second passage opening 18.2, i.e., facing the longitudinal direction X. Furthermore, with reference to Fig. 3d, the first sealing element 14.1 is formed continuously at least in the area associated with the first passage opening 18.1 and the second passage opening 18.2, i.e., facing the longitudinal direction X. Formed continuously in this case means that the area is free of recesses and / or passage openings, respectively.
[0033] As shown in Figure 3c, the connecting passage 20 is defined by a recess 26. The recess 26 extends from the plane S1' to the plane A1, which coincides with the side of the first sealing element 14.1 facing the first part 12.1.
[0034] 4a to 4d show various views of the first side (turning side) of a position measuring device according to a third embodiment. The position measuring device according to the third embodiment differs from the position measuring device according to the first embodiment in that the first sealing element 14.1 has a recess 28 associated with both the first and second passage openings 18.1 and 18.2. As shown in FIGS. 4b and 4d, the recess 28 extends completely through the first sealing element 14.1 in the longitudinal direction X. Furthermore, the second part 12.2 is continuous at least in the area associated with the first and second passage openings 18.1 and 18.2, i.e., facing the longitudinal direction X. "Continuous" in this case means that the area does not have a recess and / or a passage opening.
[0035] As shown in Figure 4c, the connecting passage 20 is formed by a recess 28. The recess 28 extends from the plane S1 or A1 to the (inner) side surface of the second part 12.2 facing the first part 12.1. The inner side surface of the second part 12.2 is offset in the longitudinal direction X relative to the plane S1 or A1.
[0036] 5a to 5d show various views of the first side (turning side) of a position measuring device according to a fourth embodiment. The position measuring device according to the fourth embodiment differs from the position measuring device according to the first embodiment in that the first sealing element 14.1 has a recess 28 associated with both the first and second passage openings 18.1 and 18.2. As shown in FIGS. 5b and 5d, the recess 28 extends only partially through the first sealing element 14.1 in the longitudinal direction X. Furthermore, the second part 12.2 is continuous at least in the area associated with the first and second passage openings 18.1 and 18.2, i.e., facing the longitudinal direction X. "Continuous" in this case means that the area does not have a recess and / or a passage opening.
[0037] As shown in Figure 5c, the connecting passage 20 is formed by a recess 28. The recess 28 extends from the plane S1 or A1 to the (inner) side of the first sealing element 14.1 facing the first part 12.1. The inner side of the first sealing element 14.1 is offset in the longitudinal direction X relative to the plane S1 or A1.
[0038] 6a to 6d show various views of the first side (reversing side) of a position measuring device according to a fifth embodiment. The position measuring device according to the fifth embodiment differs from the position measuring device according to the first embodiment in that the second part 12.2 comprises a passage opening 34.1 associated with the first passage opening 18.1 and a passage opening 34.2 associated with the second passage opening 18.2. The two passage openings 34.1 and 34.2 are opposite each other in the longitudinal direction X of the two passage openings 18.1 and 18.2, respectively. Furthermore, the position measuring device comprises a U-shaped diverting element 30. The diverting element 30 comprises an inlet or outlet 32.1 associated with the first passage opening 18.1 and an inlet or outlet 32.2 associated with the second passage opening 18.2. As shown in Figure 6c, the connecting passage 20 is formed by two passage openings 24.1, 24.2 formed in the first sealing element 14.1 and by a diverting element 30 inserted into two passage openings 34.1, 34.2 in the second part 12.2. The diverting element 30 protrudes from the first part 12.2 in the longitudinal direction X.
[0039] 7a to 7d show various views of the second side (connection side) of a position measuring device according to one of the first to fifth embodiments. The second side of the position measuring device shown in FIGS. 7a to 7d corresponds in particular to that of FIG. 1a. As shown in FIGS. 7a to 7d, the second side of the position measuring device comprises a first fluid inlet or outlet 40.1 and a second fluid inlet or outlet 40.2. The first fluid inlet or outlet 40.1 is associated with the first passage opening 18.1. The second fluid inlet or outlet 40.2 is associated with the second passage opening 18.2. The connected state of the first and second fluid inlets or outlets 40.1, 40.2 is particularly shown in FIG. 7c. The first and second fluid inlets or outlets 40.1, 40.2 enable the position measuring device to be connected to the cooling circuit.
[0040] The first and second fluid inlet or outlet 40.1, 40.2 are, for example, each a connecting hose.
[0041] Preferably, the first fluid inlet or outlet 40.1 is a fluid inlet. The second fluid inlet or outlet 40.2 is preferably a fluid outlet. Advantageously, therefore, the fluid inlet 40.1 and the fluid outlet 40.2 can be provided on only one (same) side of the position measuring device. In that case, the deflection of the fluid flow can take place on the other side of the position measuring device, i.e., on the opposite side in the longitudinal direction X.
[0042] In all embodiments, more than two passage openings may be provided, each extending longitudinally at least partially through the first part 12.1, in which case the position measuring device may comprise a plurality of connecting passages connecting the passage openings to each other in pairs. The present application relates to the invention described in the claims, but may also include the following as other aspects. 1. 1. A position measuring device comprising a housing (10) with a hollow profile-like first part (12.1) extending in a longitudinal direction (X), a scale (16) arranged in the housing (10), and a scanning device for scanning the scale (16), wherein the housing (10) has at least one first passage opening (18.1) and one second passage opening (18.2), both passage openings (18.1, 18.2) each extending at least partially through the first part (12.1) in the longitudinal direction (X), A position measuring device, characterized in that the position measuring device comprises a connecting passage (20), and both passage openings (18.1, 18.2) are connected to each other via the connecting passage (20). 2. 2. A position measuring device according to claim 1, characterized in that the connecting passage (20) extends between the cross-section of the first passage opening (18.1) and the cross-section of the second passage opening (18.2). 3. 3. The position measuring device according to claim 1 or 2, characterized in that the connecting passage (20) is formed in such a way that a fluid flowing through the cross section of the first passage opening (18.1) in a first direction (P1) parallel to the longitudinal direction (X) is, after the turning, turned in a second direction (P2) opposite to the first direction (P1) through the cross section of the second passage opening (18.2). 4. 4. A position measuring device according to any one of claims 1 to 3, characterized in that both passage openings (18.1, 18.2) each extend to a plane (S1) extending perpendicular to the longitudinal direction (X), and this plane (S1) coincides with a side surface (A1) at one end of the first part (12.1). 5. 4. The position measuring device according to any one of claims 1 to 3, characterized in that both passage openings (18.1, 18.2) each extend to a plane (S1') extending perpendicular to the longitudinal direction (X), and this plane (S1') is offset in the longitudinal direction (X) relative to the side surface (A1) at one end of the first part (12.1). 6. 6. The position measuring device according to claim 5, wherein the first part (12.1) comprises a recess (26) adjacent to the first passage opening (18.1) and the second passage opening (18.2). 7. 7. A position measuring device according to any one of claims 1 to 6, characterized in that the housing (10) comprises a second part (12.2) arranged at one end of the first part (12.1), the second part (12.2) being a cover element. 8. 8. The position measuring device according to claim 7, characterized in that the second part (12.2) comprises a recess (22) attached to the first passage opening (18.1) and the second passage opening (18.2). 9. 8. The position measuring device according to claim 7, wherein the second part (12.2) is formed continuously at least in the area attached to the first passage opening (18.1) and the second passage opening (18.2). 10. 8. The position measuring device according to claim 7, characterized in that the second part (12.2) comprises a passage opening (34.1) attached to the first passage opening (18.1) and a passage opening (34.2) attached to the second passage opening (18.2). 11. 11. A position measuring device according to any one of claims 7 to 10, characterized in that the position measuring device comprises a first sealing element (14.1), the first sealing element (14.1) being arranged between the first part (12.1) and the second part (12.2). 12. 12. The position measuring device according to claim 11, characterized in that the first sealing element (14.1) has a passage opening (24.1) attached to the first passage opening (18.1) and a passage opening (24.2) attached to the second passage opening (18.2). 13. 12. The position measuring device according to claim 11, characterized in that the first sealing element (14.1) is formed continuously at least in the area attached to the first passage opening (18.1) and the second passage opening (18.2). 14. 12. The position measuring device according to claim 11, characterized in that the first sealing element (14.1) comprises a recess (28) attached to the first passage opening (18.1) and the second passage opening (18.2), the recess (28) extending at least partially through the first sealing element (14.1) in the longitudinal direction (X). 15. 15. A position measuring device according to any one of claims 1 to 14, characterized in that the position measuring device comprises a U-shaped deflection element (30) having an inlet or outlet (32.1) attached to the first passage opening (18.1) and an inlet or outlet (32.2) attached to the second passage opening (18.2).
Claims
1. 1. A position measuring device comprising a housing (10) with a hollow profile-like first part (12.1) extending in a longitudinal direction (X), a scale (16) arranged in the housing (10) and extending in the longitudinal direction (X), and a scanning device for scanning the scale (16), wherein the housing (10) has at least one first passage opening (18.1) and one second passage opening (18.2), both passage openings (18.1, 18.2) each extending in the longitudinal direction (X) at least partially through the first part (12.1), the two passage openings (18.1, 18.2) are arranged in the first part (12.1) in a wall extending perpendicular to the mounting surface for the scale (16) and parallel to the mounting surface for the scale (16); the position measuring device has a connecting passage (20) at one end of the first part (12.1), and both passage openings (18.1, 18.2) are connected to each other via the connecting passage (20); a connecting passage (20) extending between the cross-section of the first passage opening (18.1) and the cross-section of the second passage opening (18.2); and the connecting passage (20) is formed in such a way that a fluid flowing through the cross section of the first passage opening (18.1) in a first direction (P1) parallel to the longitudinal direction (X) is redirected after the redirection to flow through the cross section of the second passage opening (18.2) in a second direction (P2) opposite to the first direction (P1); A position measuring device characterized by:
2. 2. The position measuring device according to claim 1, wherein the housing (10) comprises a second part (12.2) arranged at one end of the first part (12.1), the second part (12.2) being a cover element.
3. 3. The position measuring device according to claim 2, characterized in that the position measuring device comprises a first sealing element (14.1), which is arranged between the first part (12.1) and the second part (12.2).
4. 4. A position measuring device according to claim 3, characterized in that both passage openings (18.1, 18.2) each extend to a plane (S1) coinciding with a side surface (A1) at one end of the first part (12.1), the first sealing element (14.1) has a passage opening (24.1) associated with the first passage opening (18.1) and a passage opening (24.2) associated with the second passage opening (18.2), the second part (12.2) has recesses (22) associated with the first passage opening (18.1) and the second passage opening (18.2), and the connecting passage (20) is formed by the both passage openings (24.1, 24.2) of the first sealing element (14.1) and the recess (22) of the second part (12.2).
5. 4. A position measuring device according to claim 3, characterized in that both passage openings (18.1, 18.2) each extend to a plane (S1') parallel to a side surface (A1) at one end of the first part (12.1) and spaced apart from it, the first part (12.1) has recesses (26) between the side surface (A1) and the spaced apart plane (S1') adjacent to the first passage opening (18.1) and the second passage opening (18.2), the first sealing element (14.1) is formed continuously at least in areas attached to the first passage opening (18.1) and the second passage opening (18.2), and the connecting passage (20) is formed by the recesses (26) of the first part (12.1) and the continuous area of the first sealing element (14.1).
6. 4. A position measuring device according to claim 3, characterized in that both passage openings (18.1, 18.2) each extend to a plane (S1) coinciding with a side surface (A1) at one end of the first part (12.1), the first sealing element (14.1) has recesses (28) associated with the first passage opening (18.1) and the second passage opening (18.2), the recesses (28) extending through the first sealing element (14.1) in the longitudinal direction (X), the second part (12.2) being formed continuously at least in the areas associated with the first passage opening (18.1) and the second passage opening (18.2), and the connecting passage (20) being formed by the recesses (28) of the first sealing element (14.1) and the continuous area of the second part (12.2).
7. 4. A position measuring device according to claim 3, characterized in that both passage openings (18.1, 18.2) each extend to a plane (S1) coinciding with a side surface (A1) at one end of the first part (12.1), the first sealing element (14.1) has recesses (28) associated with the first passage opening (18.1) and the second passage opening (18.2), the recesses (28) extending partially through the first sealing element (14.1) in the longitudinal direction (X), and the connecting passage (20) is formed by the recesses (28) of the first sealing element (14.1).
8. Both passage openings (18.1, 18.2) extend to a plane (S1) that coincides with a side surface (A1) at one end of the first part (12.1), the first sealing element (14.1) has a passage opening (24.1) attached to the first passage opening (18.1) and a passage opening (24.2) attached to the second passage opening (18.2), the second part (12.2) has a passage opening (34.1) attached to the first passage opening (18.1) and a passage opening (34.2) attached to the second passage opening (18.2), and the second part (12.2) has a passage opening (34.1) attached to the first passage opening (18.1) and a passage opening (34.2) attached to the second passage opening (18.2).
4. A position measuring device according to claim 3, characterized in that on the side facing away from the element (14.1) there is a U-shaped diverting element (30) with an inlet or outlet (32.1) associated with the first passage opening (18.1) and an inlet or outlet (32.2) associated with the second passage opening (18.2), and the connecting passage (20) is formed by both passage openings (24.1, 24.2) of the first sealing element (14.1) and the diverting element (30) inserted into both passage openings (34.1, 34.2) of the second part (12.2) with both inlets or outlets (32.1, 32.2).
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