Circuit module having front interposer terminals and heat dissipation structure through the module

Abstract

To solve such a problem that a thermal path formed by a power transistor die requires different constitution extending in a direction away from a system PCB.SOLUTION: A power amplifier module 200 comprises: a module substrate 210 comprising one or a plurality of thermal dissipation structures 316 extending between a top surface 209 and a bottom surface 211 of the module substrate; and dies 234, 254 that are physically and electrically coupled to the surface of the thermal dissipation structure 316 exposed on the top surface 209 of the module substrate 210. Bottom surfaces 318 of the thermal dissipation structures 316 are exposed on the bottom surface 211 of the module substrate 210 or covered by a bottom conductor layer 304. The thermal dissipation structures 316 provide thermal paths between the dies 234, 254 and the bottom surfaces 318 of the thermal dissipation structures 316.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the subject matter described herein relate generally to circuit modules, and more particularly to power amplifier modules that include power transistor dies. [Background technology]

[0002] Wireless communication systems utilize power amplifier modules for increasing the power of radio frequency (RF) signals. The power amplifier module comprises a module substrate and amplifier circuitry coupled to a mounting surface of the module substrate. A typical module substrate includes input and output (I / O) terminals on the bottom side of the module (i.e., the side opposite the module and the mounting surface) and may also include conductive signal routing structures extending through and across the module substrate between the I / O terminals and bond pads. Additionally, one or more ground / heat dissipation structures may extend through the module substrate between the mounting surface and the bottom side.

[0003] Amplifier circuits often include a power transistor die having one or more integrated power transistors with a bottom conductive ground plane. The bottom conductive ground plane of the power transistor die is directly connected to an exposed surface of a ground / heat dissipation structure on the mounting side of the module substrate. Along with functioning to remove heat from the power transistor die, the ground / heat dissipation structure may function to provide a ground reference for the power transistor die.

[0004] Electrical connections are made between bond pads on the mounting surface of the module and I / O bond pads on the power transistor die to transmit RF signals between the module substrate and the power transistor die. When the integrated power transistor is a field effect transistor (FET), the input bond pad on the die is connected to the gate terminal of the FET, and the output bond pad on the die is connected to the drain terminal of the FET. The source terminal of the FET is coupled through the die to a bottom conductive ground plane, which is also connected to the ground / heat dissipation structure of the module substrate as described above.

[0005] To integrate the above-described power amplifier module into a communications system, the module is typically coupled to the mounting surface of a printed circuit board (PCB). More specifically, the bottom surface of the module substrate is connected to the top surface of a system PCB such that the bottom surface module signal I / O terminals are aligned with corresponding signal I / O pads on the PCB mounting surface. In addition, the module substrate is connected to the system PCB such that the module's ground / heat dissipation structure contacts a PCB heat spreader that extends through the system PCB. Thus, the combination of the module's ground / heat dissipation structure and the system PCB heat spreader may serve the dual functions of providing a thermal path for removing heat generated by the power transistor die and providing a ground reference for the power transistor die.

[0006] In operation, the power transistor amplifies an input RF signal received through the input bond pad of the transistor die and transfers the amplified RF signal to the output bond pad of the transistor die, all the while heat generated by the power transistor die is dissipated through ground / heat dissipation structures embedded in the module substrate and through the system PCB heat spreader, and a ground reference is also provided through the ground / heat dissipation structures and the system PCB heat spreader.

[0007] The above configuration works well for many applications. However, other applications require a different configuration in which the thermal path for the heat generated by the power transistor die extends away from the system PCB rather than through it. However, such a different configuration creates new challenges, including challenges associated with providing input / output signals, bias voltages, and an adequate ground reference to the power transistor die.

[0008] A more complete understanding of the subject matter can be obtained by reference to the detailed description and claims when considered in conjunction with the following drawings, in which like reference numbers refer to like elements throughout the drawings. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] U.S. Patent No. 7,755,186 [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic diagram of a Doherty power amplifier in a power amplifier module. [Figure 2] 2 is a top view of a power amplifier module embodying the Doherty power amplifier of FIG. 1 in accordance with an exemplary embodiment. [Figure 3] 3 is a side cross-sectional view of the power amplifier module of FIG. 2 taken along line 3-3. [Figure 4] 1 is a front view of a power amplifier module according to an exemplary embodiment. [Figure 5A] 1A-1C are top views of terminal interposers, according to two exemplary embodiments. [Figure 5B] 1A-1C are top views of terminal interposers, according to two exemplary embodiments. [Figure 5C] 1A-1C are side views of terminal interposers, according to two exemplary embodiments. [Figure 6A] FIG. 10 is a top view of a terminal interposer according to yet another exemplary embodiment. [Figure 6B] FIG. 10 is a side view of a terminal interposer according to yet another exemplary embodiment. [Figure 7A] FIG. 2 is a top view of a shield / ground interposer according to an exemplary embodiment. [Figure 7B] 2 is a side view of a shield / ground interposer according to an exemplary embodiment. [Figure 8] FIG. 10 is a perspective view of a shield / ground interposer according to another exemplary embodiment. [Figure 9A] FIG. 10 is a top view of a shield / ground interposer according to yet another exemplary embodiment. [Figure 9B] FIG. 10 is a side view of a shield / ground interposer according to yet another exemplary embodiment. [Figure 10] 3 is a cross-sectional side view of an amplifier system including the power amplifier module of FIG. 2 coupled to a system board and a heat sink according to an exemplary embodiment. [Figure 11] 4 is a flowchart of a method for making a power amplifier module and an amplifier system according to an example embodiment. [Figure 12] 1 is a top view of a panel of a module substrate in a first stage of manufacture according to an exemplary embodiment. [Figure 13] 10 is a top view of a panel of a module substrate in a second stage of manufacture according to an exemplary embodiment. [Figure 14A] 14 is a side view of the module substrate panel of FIG. 13 during a third stage of manufacture, according to an exemplary embodiment. [Figure 14B] 14 is a side view of the module substrate panel of FIG. 13 during a fourth stage of manufacture, according to an exemplary embodiment. [Figure 15A] 14 is a side view of a panel of the module substrate of FIG. 13 during a third stage of manufacture, according to another exemplary embodiment. [Figure 15B] 14 is a side view of the module substrate panel of FIG. 13 during a fourth stage of manufacture, according to an exemplary embodiment. [Figure 15C]14 is a side view of the module substrate panel of FIG. 13 at a fifth stage of manufacture in accordance with an exemplary embodiment. [Figure 16A] 14A-14C are side views of a panel of the module substrate of FIG. 13 at third, fourth, and fifth stages of manufacture, according to yet another exemplary embodiment. [Figure 16B] 14A-14C are side views of a panel of the module substrate of FIG. 13 at third, fourth, and fifth stages of manufacture, according to yet another exemplary embodiment. [Figure 17] 14B, 15C, and 16B after performing a singulation operation, according to an exemplary embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] Embodiments of the inventive subject matter described herein include an amplifier system comprising a system substrate (e.g., a printed circuit board (PCB)) and a power amplifier module coupled to the system substrate. The power amplifier module comprises one or more of: a module substrate having a mounting surface; an embedded heat dissipation structure extending through the module substrate; a power amplifier die located on the mounting surface and connected to the embedded heat dissipation structure; one or more terminals; a shield; and a ground interposer connected to the mounting surface. The power amplifier module is mounted to the system substrate in a "flipped orientation" such that the embedded heat dissipation structure is away from the system substrate, in contrast to conventional systems in which the embedded heat dissipation structure is coupled to a heat spreader on the system substrate. Accordingly, in one embodiment, a heat sink may be directly connected to the exposed surface of the embedded heat dissipation structure of the power amplifier module.

[0012] The power amplifier module embodiments described herein may be utilized to implement any of a variety of different types of power amplifiers. An example Doherty power amplifier module is utilized herein to provide a concrete example that helps convey details of the inventive subject matter. However, those skilled in the art will understand, based on the description herein, that the inventive subject matter may likewise be utilized in power amplifier modules that implement other types of amplifiers and / or in electronic circuit modules other than power amplifier modules. Thus, the use of a Doherty power amplifier in the following exemplary embodiments is not intended to limit the application of the inventive subject matter, as the inventive subject matter may likewise be used in other types of power amplifier modules or electronic circuit modules.

[0013] Before describing various physical implementations of a power amplifier module, reference is made to Figure 1, which is a schematic diagram of a Doherty power amplifier 110 implemented in a power amplifier module 100. Power amplifier module 100 essentially comprises a Doherty amplifier 110 mounted on a module substrate (e.g., module substrate 210, Figure 2). Doherty amplifier 110, in one embodiment, comprises an RF input terminal 112, an RF output terminal 114, a power splitter 120, a carrier amplifier path 130 having one or more carrier amplifier dies (e.g., dies 233 and 234, Figure 2), a peak amplifier path 150 having one or more peak amplifiers (e.g., dies 253 and 254, Figure 2), a phase delay and impedance inverting element 170, and a combining node 172.

[0014] As discussed in more detail below, in one embodiment, RF input terminal 112 and RF output terminal 114 may each be implemented by an embodiment of a terminal interposer (e.g., terminal interposers 241, 246, FIG. 2). Additionally, as discussed in more detail below, power amplifier module 100 also includes one or more ground terminals 148 configured to provide an external ground reference for the power amplifier dies of carrier amplifier path 130 and peak amplifier path 150, according to various embodiments. As described in more detail below, according to various embodiments, ground terminal 148 may be implemented by an embodiment of a shield / ground interposer (e.g., ground terminal 248 of shield / ground interposer 247, FIG. 2) located in close proximity to the power amplifier die to optimize the ground return loop for the die.

[0015] When incorporated into a larger RF system, RF input terminal 112 is coupled to an RF signal source, and RF output terminal 114 is coupled to a load 190 (e.g., an antenna or other load). The RF signal source provides an input RF signal, which is typically an analog signal containing spectral energy centered around one or more carrier frequencies. Essentially, Doherty amplifier 110 is configured to amplify the input RF signal and to produce an amplified RF signal at RF output terminal 114.

[0016] In one embodiment, the power splitter 120 has one input 122 and two outputs 124, 126. The power splitter input 122 is coupled to the RF input terminal 112 to receive an input RF signal. The power splitter 120 is configured to split the RF input signal received at the input 122 into first and second RF signals (or carrier and peak signals) that are provided to the carrier and peak amplifier paths 130, 150 via the outputs 124, 126, respectively. According to one embodiment, the power splitter 120 includes a first phase shift element configured to impart a first phase shift (e.g., a phase shift of approximately 90 degrees) to the peak signal before the peak signal is provided to the output 126. Thus, at the outputs 124 and 126, the carrier and peak signals are approximately 90 degrees out of phase with each other.

[0017] When Doherty amplifier 110 has a symmetrical configuration (i.e., a configuration in which the carrier and peak amplifier power transistors are nearly identical in size), power splitter 120 may, in some embodiments, divide or split the input RF signal received at input 122 into two very similar signals with equal power. In contrast, when Doherty amplifier 110 has an asymmetrical configuration (i.e., a configuration in which one of the amplifier power transistors, typically the peak amplifier transistor, is much larger), power splitter 120 may output carrier and peak signals with unequal power.

[0018] Outputs 124, 126 of power splitter 120 are connected to carrier and peak amplifier paths 130, 150, respectively. Carrier amplifier path 130 is configured to amplify the carrier signal from splitter 120 and provide the amplified carrier signal to power combining node 172. Similarly, peak amplifier path 150 is configured to amplify the peak signal from power splitter 120 and provide the amplified peak signal to power combining node 172, with paths 130, 150 designed so that the amplified carrier and peak signals arrive in phase with each other at power combining node 172.

[0019] According to one embodiment, the carrier amplifier path 130 comprises an input circuit 131 (e.g., including an impedance matching circuit), a carrier amplifier 132 implemented using one or more carrier amplifier dies (e.g., dies 233, 234, FIG. 2), and a phase shift and impedance inversion element 170.

[0020] Carrier amplifier 132, in various embodiments, comprises an RF input terminal 134, an RF output terminal 138, and one or more amplification stages coupled between the input and output terminals 134, 138. RF input terminal 134 is coupled to first output 124 of power splitter 120 through input circuitry 131, and thus RF input terminal 134 receives the carrier signal generated by power splitter 120.

[0021] Each amplification stage of the carrier amplifier 132 comprises a power transistor. In a single stage carrier amplifier 132, a single power transistor may be implemented on a single power amplifier die. In a two stage carrier amplifier 132, two power transistors may be implemented on a single power amplifier die, or each power amplifier may be implemented on a separate die (e.g., dies 233 and 234, FIG. 2), as illustrated in the power amplifier module shown in FIG.

[0022] In any event, each power transistor has a control terminal (e.g., a gate terminal) and first and second current-carrying terminals (e.g., a drain terminal and a source terminal). In a single-stage device comprising a single power transistor, the control terminal is electrically connected to the RF input terminal 134, one of the current-carrying terminals (e.g., the drain terminal) is electrically connected to the RF output terminal 138, and the other current-carrying terminal (e.g., the source terminal) is electrically connected to a ground reference (or another voltage reference) through a ground terminal 148. In contrast, a two-stage amplifier comprises two power transistors coupled in series, with the first transistor functioning as a driver amplifier transistor having a relatively low gain and the second transistor functioning as a final stage amplifier transistor having a relatively high gain. In such an embodiment, the control terminal of the driver amplifier transistor is electrically connected to the RF input terminal 134, one of the current carrying terminals (e.g., drain terminal) of the driver amplifier transistor may be electrically connected to the control terminal of the final stage amplifier transistor, and the other current carrying terminal (e.g., source terminal) of the driver amplifier transistor may be electrically connected to ground reference through ground terminal 148. In addition, one of the current carrying terminals (e.g., drain terminal) of the final stage amplifier transistor may be electrically connected to the RF output terminal 138, and the other current carrying terminal (e.g., source terminal) of the final stage amplifier transistor may be electrically connected to ground reference (or another voltage reference) through ground terminal 148.

[0023] In addition to the power transistors, portions of input and output impedance matching networks and bias circuitry (not shown in FIG. 1) may be included within and / or electrically coupled to carrier amplifier 132. In one embodiment, the bias voltage may be provided, for example, through an embodiment of a terminal interposer (e.g., terminal interposer 244, FIG. 2). Furthermore, in embodiments in which carrier amplifier 132 is a two-stage device, an inter-stage matching network (not shown in FIG. 1) may be included within carrier amplifier 132 between the driver amplifier transistor and the final stage amplifier transistor.

[0024] The RF output terminals 138 of the carrier amplifiers 132 are coupled, in one embodiment, to a power combining node 172 through a phase shift and impedance inverting element 170. According to one embodiment, the impedance inverting element is a lambda / 4 (λ / 4) transmission line phase shift element that imparts a relative phase shift of approximately 90 degrees to the carrier signals after amplification by the carrier amplifiers 132. A first end of the impedance inverting element 170 is coupled to the RF output terminals 138 of the carrier amplifiers 132, and a second end of the phase shift element 170 is coupled to the power combining node 172.

[0025] Reference is now made to peak amplifier path 150, which in one embodiment comprises a peak amplifier 152 and input circuitry 151 (e.g., an impedance matching circuit). Peak amplifier 152, in various embodiments, comprises an RF input terminal 154, an RF output terminal 158, and one or more amplification stages coupled between the input and output terminals 154, 158. RF input terminal 154 is coupled to second output 126 of power splitter 120, and thus receives the peak signal generated by power splitter 120.

[0026] Similar to the carrier amplifier 132, each amplification stage of the peak amplifier 152 comprises a power transistor having a control terminal and first and second current-carrying terminals. The power transistors of the peak amplifier 152 may be electrically coupled between RF input and output terminals 154, 158 in a manner similar to that described above in conjunction with the description of the carrier amplifier 132. Additional details discussed in conjunction with the description of the carrier amplifier 132 also apply to the peak amplifier 152, and those additional details will not be repeated here for the sake of brevity. However, one important point to reiterate is that the current-carrying terminals of each peak amplifier transistor (e.g., the source terminals of the driver and / or final stage peak amplifier transistors) may be electrically connected to a ground reference (or another voltage reference) through one embodiment of the ground terminal 148, as described above in conjunction with the description of the carrier amplifier 132.

[0027] The RF output terminals 158 of the peak amplifiers 152 are coupled to a power combining node 172. According to one embodiment, the RF output terminals 158 of the peak amplifiers 152 and the power combining node 172 are implemented by a common element. More specifically, in one embodiment, the RF output terminals 158 of the peak amplifiers 152 are configured to function as both the combining node 172 and the output terminal 158 of the peak amplifiers 152. To provide for the combining of the amplified carrier and peak signals, and as described above, the RF output terminals 158 (and therefore the combining node 172) are connected to the second ends of the phase shifting and impedance inverting elements 170. In other embodiments, the combining node 172 may be a separate element from the RF output terminals 158.

[0028] In either case, the amplified carrier and peak RF signals are combined in phase at a combining node 172. The combining node 172 is electrically coupled to an RF output terminal 114 to provide an amplified combined RF output signal at the RF output node 114. In one embodiment, an output impedance matching network 174 between the combining node 172 and the RF output node 114 functions to present an appropriate load impedance to each of the carrier and peak amplifiers 132, 152. The resulting amplified RF output signal is produced at the RF output node 114, to which an output load 190 (e.g., an antenna) is connected.

[0029] Amplifier 110 is configured to operate in combination such that carrier amplifier path 130 provides amplification for relatively low-level input signals, and both amplifier paths 130, 150 provide amplification for relatively high-level input signals. This may be achieved, for example, by biasing carrier amplifier 132 to operate in a Class AB mode and by biasing peak amplifier 152 to operate in a Class C mode.

[0030] In the embodiment shown in FIG. 1 and described above, the first phase shift element in splitter 120 may impart an approximately 90-degree phase shift to the peak signal before amplification, and phase shift and impedance inverting element 170 may similarly impart an approximately 90-degree phase shift to the amplified carrier signal, such that the amplified carrier and peak signals are combined in phase at combining node 172. Such an architecture is referred to as a non-inverting Doherty amplifier architecture. In an alternative embodiment, the first phase shift element in splitter 120 may impart an approximately 90-degree phase shift to the carrier signal rather than to the peak signal before amplification, and phase shift and impedance inverting element 170 may instead be provided at the output of the peak amplifier. Such an alternative architecture is referred to as an inverting Doherty amplifier architecture. In yet other alternative embodiments, other combinations of phase shift elements may be implemented in the carrier and / or peak paths 130, 150 before amplification to achieve a phase difference of approximately 90 degrees between the carrier and peak signals before amplification, and the phase shift imparted to the amplified carrier and peak signals may be selected accordingly to ensure that the signals are combined at the combining node 172 in phase.

[0031] Figure 2 is a top view of a power amplifier module 200 embodying the Doherty amplifier circuit of Figure 1, according to an exemplary embodiment. For improved understanding, Figure 2 should be viewed in conjunction with Figure 3, which is a cross-sectional side view of module 200 of Figure 2 taken along line 3-3. Essentially, power amplifier module 200 comprises a Doherty power amplifier (e.g., power amplifier 110, Figure 1) mounted on a multi-layer module substrate 210, multiple power transistor dies 233, 234, 253, 254, and other electrical components. Additionally, power amplifier module 200 includes multiple interposers 241-247, each of which includes one or more terminals (e.g., terminals 212, 214, 261, 262, 265, 266, 267-1, 267-2, 267-3, 268-1, 268-2, and 269-3) for carrying signals or bias voltages or for connection to a ground reference, as discussed in more detail below. Note that various components of power amplifier module 200 correspond to components shown in Figure 1, and corresponding components between Figures 1 and 2-3 have the same last two digits (e.g., components 120 and 220 are corresponding components).

[0032] The power amplifier module 200 includes a module substrate 210 in the form of a multilayer printed circuit board (PCB) or other suitable substrate. The module substrate 210 has a top surface 209 (also referred to as the "front" or "mounting" surface) and a bottom surface 211 (also referred to as the "rear" or "heat sink mounting" surface). As described in more detail below, a plurality of components and interposers 241-247 are coupled to the mounting surface 209 of the module substrate 210, and a non-conductive encapsulant 380 (e.g., a plastic encapsulant) is disposed on the mounting surface 209 and around the components and interposers 241-247 to form a top surface 382 (also referred to as the "contact surface") of the module 200. As shown in FIG. 3 , the encapsulant 380 has a thickness 384 that is greater than the maximum height of the components (e.g., the splitter 220 and the power transistor dies 233, 234, 253, 254) covered by the encapsulant 380. In some embodiments, the thickness 384 is approximately equal to the height 385 of the interposers 241-247, while in other embodiments, the thickness 384 may be slightly less than or greater than the height 385 of the interposers 241-247.

[0033] As also described in more detail below, the bottom or base surfaces of interposers 241-247, and more particularly the proximal ends of the terminals (e.g., terminals 212, 214, 248, 261, 262, 265, 266, 267-1, 267-2, 267-3, 268-1, 268-2, 268-3, 269) embedded within interposers 241-247, are coupled to conductive features on mounting surface 209 of module substrate 210. The top or tip surfaces of interposers 241-247, and more particularly the distal ends of the terminals, are exposed at contact surface 382 of encapsulant 380. Conductive attachment material 383 (e.g., solder balls, solder paste, or conductive adhesive) is disposed on the exposed tips of the terminals to facilitate electrical and mechanical attachment of module 200 to a system board (e.g., system board 1010, FIG. 10), as described in more detail below. Various features and embodiments of interposers 241-247 and their embedded terminals are discussed in more detail below.

[0034] 3, module substrate 210 includes multiple dielectric layers 305, 306, and 307 (e.g., formed from FR-4, ceramic, or other PCB dielectric material) alternating with multiple conductor layers 301, 302, 303, and 304, with top surface 209 of module substrate 210 formed by patterned conductor layer 301 and bottom surface 211 of module substrate 210 formed by conductor layer 304. While module substrate 210 is shown as including three dielectric layers 305-307 and four conductor layers 301-304, it should be noted that other embodiments of the module substrate may include more or fewer dielectric and / or conductor layers.

[0035] Each of the different conductor layers 301-304 may have a primary purpose and may include conductor features that provide signal and / or voltage / ground routing between other layers. While the following description indicates a primary purpose for each of the conductor layers 301-304, it is understood that the layers (or their functions) may be arranged differently than the specific arrangement best shown in FIG. 3 and discussed below.

[0036] For example, in one embodiment, patterned conductor layer 301 on mounting surface 209 of module substrate 210 may function primarily as a signal conductor layer. More specifically, layer 301 includes a plurality of conductor features (e.g., conductor pads or traces) that serve as attachment points for dies 233, 234, 253, 254 and other discrete components, and further provide electrical connectivity between dies 233, 234, 253, 254 and other discrete components.

[0037] Additionally, as discussed below, layer 301 may include a plurality of conductive pads (e.g., pads 312, 361, and 362; FIG. 3) specifically designated for attachment of electrical conductor signal, bias, and / or ground terminals (e.g., terminals 212, 214, 248, 261, 262, 265, 266, 267-1, 267-2, 267-3, 268-1, 268-2, and 268-3) within interposers 241-247. Embodiments of interposers 241-247 are described in more detail in conjunction with FIGS. 5A-5C, 6A-6B, 7A-7B, 8, and 9A-9B. Layer 301 may also include a plurality of "dummy" pads (e.g., pad 369) to which "dummy" terminals (e.g., terminal 269) may be attached. As used herein, a "dummy" terminal of an interposer is a terminal that is not assigned any specific function in the amplifier and is not coupled to any dynamic circuitry. In various embodiments, dummy terminals 269 and dummy pads 369 may be left electrically floating (i.e., not coupled to ground or other circuitry) or may alternatively be coupled to a ground plane (i.e., ground plane 302, as indicated by optional dashed via 312).

[0038] In one embodiment, second patterned conductor layer 302 functions as an RF ground layer. RF ground layer 302 also includes a plurality of conductor features (e.g., conductor traces) that may be electrically coupled to conductor features of signal conductor layer 301 and to system ground layer 304 (described below) by conductor vias 311, 313, and 315 that extend through dielectric layers 305-307. For example, conductor ground terminal pads 361 and 362 are electrically coupled to RF ground layer 302 through via 311, and RF ground layer 302 is in turn electrically coupled to system ground layer 304 through vias 313 and 315 (and routing features of conductor layer 303).

[0039] The third patterned conductor layer 303 functions to convey bias voltages to the power transistors 236, 237, 256, and 257 in the dies 233, 234, 253, and 254, and may also function as a routing layer, as described above. Finally, the fourth conductor layer 304 functions as a system ground layer and as a heat sink attachment layer, as will be described in more detail in conjunction with FIG.

[0040] According to one embodiment, the module substrate 210 may include one or more heat dissipation structures 316 extending between the top and bottom surfaces 209, 211 of the module substrate 210. The dies 233, 234, 253, 254 are physically and electrically coupled to a surface of the heat dissipation structure 316 exposed at the top surface 209 of the module substrate 210. The bottom surface 318 of the heat dissipation structure 316 may be exposed at the bottom surface 211 of the module substrate 210, or the bottom surface 318 of the heat dissipation structure 316 may be covered by the bottom conductor layer 304, as shown in FIG. 3 . In either case, the heat dissipation structure 316 is configured to provide a thermal path between the dies 233, 234, 253, 254 and the bottom surface 318 of the heat dissipation structure 316 (and thus the bottom surface of the module substrate 210). In various embodiments, the heat dissipation structures 316 may comprise conductive metal coins press-fit and / or attached into through holes extending between the surfaces 209, 211 of the module substrate 210. In an alternative embodiment, each of the heat dissipation structures 316 may comprise a plurality (or a set) of conductive thermal vias (e.g., round or bar-shaped vias) extending between the surfaces 209, 211 of the module substrate 210. As described in more detail in conjunction with FIG. 10 , the exposed bottom surfaces 318 of the heat dissipation structures 316 (or portions of the conductive layer 304 overlying those surfaces 318) are physically and thermally coupled to a heat sink (e.g., heat sink 1016, FIG. 10 ) when the module 200 is integrated into a larger electrical system.

[0041] The power amplifier module 200 further comprises an RF signal input terminal 212 (e.g., RF input node 112, FIG. 1), a power splitter 220 (e.g., power splitter 120, FIG. 1), a two-stage carrier amplifier 232 (e.g., amplifier 132, FIG. 1), a two-stage peak amplifier 252 (e.g., amplifier 152, FIG. 1), various phase shifting and impedance inverting elements, a combining node 272 (e.g., combining node 172, FIG. 1), an output impedance matching network 274 (e.g., network 174, FIG. 1), and an RF signal output terminal 214 (e.g., RF output node 114, FIG. 1).

[0042] Terminal 212 serves as an RF signal input terminal for module 200. According to one embodiment, terminal 212 is embedded within terminal interposer 241 and is coupled to an RF signal input pad 312 on mounting side 209 of module substrate 210. Through one or more conductor structures (e.g., vias, traces, and / or wirebonds as shown), RF signal input pad 312 is electrically coupled to input 222 to power splitter 220.

[0043] Similarly, terminal 214 functions as an RF signal output terminal for module 200. According to one embodiment, terminal 214 is embedded within terminal interposer 246 and is coupled to an RF signal output pad (not shown) on mounting side 209 of module substrate 210. Through one or more conductor structures (e.g., vias, traces, and / or wirebonds), the RF signal output pad is electrically coupled (through network 274) to composite node 272.

[0044] According to one embodiment, ground terminals 261, 262, 265, 266 are also embedded within terminal interposer 241 "next to" and in "close proximity" to RF input and output terminals 212, 214 to provide GSG (ground-signal-ground) terminal structures 260, 264 for the RF input and RF output of module 200. More specifically, a first ground terminal is located next to one side of RF input terminal 212, and a second ground terminal 262 is located next to the other side of RF input terminal 212. Similarly, a third ground terminal 265 is located next to one side of RF output terminal 214, and a fourth ground terminal 266 is located next to the other side of RF output terminal 214. As used herein, the phrase "close proximity" in the above context means that the physical distance (e.g., distance 387, FIG. 3) between the side of a ground terminal (e.g., ground terminal 261, 262, 265, or 266) and the nearest side of a signal terminal (e.g., signal terminal 212 or 214) is less than twice the width of the signal terminal. The phrase "adjacent" in the above context means that there are no other terminals or intervening electrical structures between the ground terminal (e.g., ground terminal 265 or 266) and the signal terminal (e.g., signal terminal 212 or 214). Instead, only the dielectric material of the interposer (e.g., interposer 260 or 264) exists between the ground terminal and the signal terminal.

[0045] Each of the ground terminals 261, 262, 265, and 266 has a proximal end coupled to a ground pad (e.g., ground pads 361 and 362, FIG. 3 ), which in turn is electrically coupled to ground layers 302 and / or 304 and thus “grounded” to the ground terminal of each GSG terminal structure 260 and 264. By implementing GSG terminal structures at the RF input and RF output of module 200, the length of the return current loop associated with the terminal structure may be significantly reduced. Additionally, radiated electromagnetic energy from the RF input and output terminals 212 and 214 may be terminated to ground by the adjacent ground terminals 261, 262, 265, and 266, avoiding potential performance issues that may arise when radiated electromagnetic energy is able to reach other portions of the module.

[0046] Although discrete dies and / or components are shown as a single element in Figure 2, power splitter 220 (e.g., power splitter 120, Figure 1) connected to mounting surface 209 of system substrate 210 may comprise one or more discrete dies and / or components. Power splitter 220 comprises one input terminal 222 and two output terminals (not numbered but corresponding to terminals 124 and 126 in Figure 1). Input terminal 222 is electrically coupled to RF signal input pad 312 and to RF signal input terminal 212 through one or more conductor structures (e.g., vias, traces, and / or wirebonds as shown) and thus configured to receive an input RF signal. The output terminals of the power splitter 220 are electrically coupled to inputs 235, 255 for the carrier and peak amplifiers 232, 252, respectively, through one or more conductor structures (e.g., vias, traces, and / or wire bonds) and input circuits 231, 251 (e.g., input circuits 131, 151, FIG. 1).

[0047] Power splitter 220 splits the power of an input RF signal received through RF input terminal 212 into first and second RF signals produced at the output terminals of power splitter 220. In addition, power splitter 220 may include one or more phase shift elements configured to impart an approximately 90 degree phase difference between the RF signals provided at the splitter output terminals. The first and second RF signals produced at the output of power splitter 220 may have equal or unequal power, as described above.

[0048] A first output of the power splitter is electrically coupled to the carrier amplifier path (i.e., to carrier amplifier 232 or carrier amplifier path 130 in FIG. 1 ), and a second output of the power splitter is electrically coupled to the peak amplifier path (i.e., to peak amplifier 252 or peak amplifier path 150 in FIG. 1 ). The RF signal generated at the second power splitter output may be delayed by approximately 90 degrees from the RF signal generated at the first power splitter output. In other words, the RF signal provided to the peak amplifier path may be delayed by approximately 90 degrees from the RF signal provided to the carrier amplifier path. In either case, the first RF signal generated by power splitter 220 is amplified through carrier amplifier path 232, and the second RF signal generated by power splitter 220 is amplified through peak amplifier path 252.

[0049] In the particular embodiment of FIG. 2 , each of the carrier amplifier path and the peak amplifier path includes a two-stage power amplifier 232, 252, where a driver stage transistor 236, 256 is implemented on a driver stage die 233, 253 and a final stage transistor 237, 257 is implemented on a separate final stage die 234, 254. For example, each of the transistors 236, 237, 256, 257 may be a field-effect transistor (FET), such as a laterally diffused metal-oxide semiconductor (LDMOS) FET or a high-electron-mobility transistor (HEMT). The specification and claims may refer to each transistor with a control terminal and two current-conducting terminals. For example, using terminology related to FETs, the “control terminal” refers to the gate terminal of the transistor, and the first and second current-conducting terminals refer to the drain and source terminals (or source and drain terminals) of the transistor. Although the following description may use terminology commonly used in conjunction with FET devices, it is intended that the various embodiments are not limited to implementations utilizing FET devices, but instead apply to implementations utilizing bipolar junction transistor (BJT) devices or other suitable types of transistors.

[0050] Carrier amplifier 232, more particularly, comprises a silicon driver stage die 233 and a gallium nitride (GaN) final stage die 234, according to an exemplary embodiment, and peak amplifier 252 also comprises a silicon driver stage die 253 and a GaN final stage die 254. In other embodiments, carrier and peak amplifiers 232, 252 may each comprise a two-stage power amplifier implemented on a single die, or carrier and peak amplifiers 232, 252 may each comprise a single-stage power amplifier implemented on a single die. In yet other embodiments, carrier and peak amplifiers may each comprise a two-stage power amplifier implemented on separate driver and final stage dies, but the driver die and final stage die may be formed using the same semiconductor technology (e.g., both driver and final stage dies may be silicon dies or GaN dies), or the driver and / or final stage dies may be formed using a different semiconductor technology (e.g., the driver die and / or final stage dies may be silicon germanium (SiGe) and / or gallium arsenide (GaAs) dies).

[0051] The carrier amplifier path includes the above-described driver stage die 233, final stage die 234, and phase shift and impedance inverting element 270 (e.g., element 170, FIG. 1). Driver stage die 233 and final stage die 234 of carrier amplifier path 232 are electrically coupled to each other in a cascade arrangement between input terminal 235 of driver stage die 233 (corresponding to the carrier amplifier input) and output terminal 238 of final stage die 234 (corresponding to the carrier amplifier output).

[0052] Driver stage die 233 comprises multiple integrated circuits. In one embodiment, the integrated circuits of die 233 comprise a series-coupled arrangement of input terminals 235 (e.g., input terminal 135, FIG. 1 ), an input impedance matching circuit (not numbered), a silicon power transistor 236, an integrated portion of an inter-stage impedance matching circuit (not numbered), and an output terminal (not numbered). More specifically, the gate of transistor 236 is electrically coupled to input terminal 235 through the input impedance matching circuit, and the drain of transistor 236 is electrically coupled to the output terminal of die 233 through the output impedance matching circuit. The source of transistor 236 is electrically coupled to a conductor layer (or source terminal) on the bottom surface of die 233, and the bottom conductor layer is physically, electrically, and thermally coupled to the exposed top surface of heat dissipation structure 316.

[0053] The output terminals of driver stage die 233 are electrically connected to input terminals of last stage die 234 by a wire bond array (not numbered) or another type of electrical connection. Last stage die 234 may also include multiple integrated circuits. In one embodiment, the integrated circuit of die 234 includes a series-coupled arrangement of input terminals (not numbered), a GaN power transistor 237, and an output terminal 238 (e.g., output terminal 138, FIG. 1 ). More specifically, the gate of transistor 237 is electrically coupled to the input terminal of die 234, and the drain of transistor 237 is electrically coupled to output terminal 238 of die 234. The source of transistor 237 is electrically coupled to a conductor layer on the bottom surface of die 234, and the bottom conductor layer is physically, electrically, and thermally coupled to the exposed top surface of heat dissipation structure 316.

[0054] The peak amplifier path comprises the above-mentioned driver stage die 253 and final stage die 254. The driver stage die 253 and final stage die 254 of the peak amplifier path 252 are electrically coupled to each other in a cascade arrangement between an input terminal 255 of the driver stage die 253 (corresponding to the peak amplifier input) and an output terminal 258 of the final stage die 254 (corresponding to the peak amplifier output).

[0055] Driver stage die 253 comprises multiple integrated circuits. In one embodiment, the integrated circuits of die 253 comprise a series-coupled arrangement of input terminals 255 (e.g., input terminal 155, FIG. 1 ), an input impedance matching circuit (not numbered), a silicon power transistor 256, an integrated portion of an inter-stage impedance matching circuit (not numbered), and an output terminal, which in one embodiment is not numbered. More specifically, the gate of transistor 256 is electrically coupled to input terminal 255 through the impedance matching circuit, and the drain of transistor 256 is electrically coupled to the output terminal of die 253 through the output impedance matching circuit. The source of transistor 256 is electrically coupled to a conductor layer at the bottom surface of die 253, and the bottom conductor layer is physically, electrically, and thermally coupled to the exposed top surface of heat dissipation structure 316.

[0056] The output terminals of driver stage die 253 are electrically connected to input terminals of last stage die 254 by a wire bond array (not numbered) or another type of electrical connection. Last stage die 254 may also include multiple integrated circuits. In one embodiment, the integrated circuit of die 254 includes a series-coupled arrangement of input terminals (not numbered), a GaN power transistor 257, and an output terminal 258 (e.g., output terminal 158, FIG. 1 ). More specifically, the gate of transistor 257 is electrically coupled to the input terminal of die 254, and the drain of transistor 257 is electrically coupled to output terminal 258 of die 254. The source of transistor 257 is electrically coupled to a conductor layer on the bottom surface of die 254, and the bottom conductor layer is physically, electrically, and thermally coupled to the exposed top surface of the heat dissipation structure.

[0057] As previously mentioned, for proper Doherty operation, the carrier amplifier 232 may be biased to operate in Class AB mode, and the peak amplifier 252 may be biased to operate in Class C mode. To achieve this biasing, multiple gate and drain bias voltages may be provided by external bias voltage sources. According to one embodiment, bias voltages are provided through bias terminals 267-1, 268-1, 267-2, 268-2, 267-3, and 268-3 of one or more additional interposers 243 and 244. More specifically, gate bias voltages for the driver stage transistors 236 and 256 may be provided through driver gate bias terminals 267-1 and 268-2, drain bias voltages for the driver stage transistors 236 and 256 may be provided through driver drain bias terminals 267-2 and 268-2, and gate bias voltages for the final stage transistors 237 and 257 may be provided through gate bias terminals 267-3 and 268-3. Each of terminals 267-1, 268-1, 267-2, 268-2, 267-3, 268-3 has a proximal end coupled to a conductor structure (e.g., pad and trace) on conductor layer 301, which is electrically coupled (e.g., via wirebonds, as shown) to bias pads on the driver stage die and last stage die. In the embodiment shown, the gate bias pads and drain bias pads for both driver stage transistors 236, 237, 256, 257 are on driver stage die 233, 253, and the gate bias voltage for last stage die 234, 254 "hops" from driver stage die 233, 253 to last stage die 234, 254 via wirebond connections, as shown.

[0058] According to a further embodiment, module 200 also includes a “shield / ground” interposer 247 coupled to mounting surface 209 of module substrate 210 between carrier and peak amplifiers 232, 252. As described in more detail in conjunction with FIGS. 7A, 7B, 9, 9A, and 9B, shield / ground interposer 247 provides a continuous or near-continuous conductive “wall” that functions to deflect electromagnetic energy generated by driver stage die and / or end stage die 233, 234, 253, 254 (and / or wirebonds or other conductors coupled to those dies). Thus, shield / ground interposer 247 may improve amplifier performance by reducing electromagnetic coupling between carrier and peak amplifiers 232, 252.

[0059] 2 (and described in more detail below in conjunction with FIGS. 7A and 7B), shield / ground interposer 247 includes two staggered rows of ground terminals 248, with the base ends of ground terminals 248 coupled to conductive ground pads 348 of conductive layer 301. Ground pads 348 are in turn electrically coupled to ground layers 302 and / or 304, one or both of which intersect and are physically and electrically coupled to heat dissipation structure 316. Thus, the source terminals (e.g., the bottom conductive layers of dies 233, 234, 253, and 254) are "grounded" through layers 302 and 304, heat dissipation structure 316, ground pads 348, and terminals 248. Thus, in addition to providing electromagnetic shielding, the ground terminals 248 of the shield / ground interposer 247 may be located relatively close (physically and electrically) to the source terminals (or conductive bottom layers) of the dies 233, 234, 253, and 254, thus providing relatively short ground current loops for the dies 233, 234, 253, and 254. This may also help improve amplifier gain, among other performance metrics.

[0060] Returning again to the operation of amplifier module 200, an amplified carrier signal is produced at output terminal 238 of last stage die 234, and an amplified peak signal is produced at output terminal 258 of last stage die 254, which also serves as a combining node 272 (e.g., node 172, FIG. 1 ) for the amplifier. According to one embodiment, output terminal 238 of carrier last stage die 234 is electrically coupled (e.g., by a wirebond (not numbered) or another type of electrical connection) to a first end of phase shifting and impedance inverting element 270, and output terminal 258 of peak last stage die 254 is electrically coupled (e.g., by a wirebond (not numbered) or another type of electrical connection) to a second end of phase shifting and impedance inverting element 270.

[0061] According to one embodiment, phase shift and impedance inverting element 270 may be implemented by a quarter wavelength or lambda / 4 (λ / 4) or shorter transmission line (e.g., a microstrip transmission line having an electrical length up to about 90 degrees) formed from a portion of conductor layer 301. As used herein, lambda is the wavelength of an RF signal at the fundamental frequency of operation of the amplifier (e.g., a frequency in the range of about 600 megahertz (Mz) to about 10 gigahertz (GHz) or higher). The combination of phase shift and impedance inverting element 270 and wirebond (or other) connections to output terminals 238, 258 of dies 234, 254 may impart a relative phase shift of about 90 degrees to the amplified carrier signal as the signal travels from output terminal 238 to output terminal 258 / combining node 272. When the various phase shifts applied separately to the carrier RF signal and the peak RF signal through the carrier and peak paths, respectively, are approximately equal, the amplified carrier RF signal and the peak RF signal are combined approximately in phase at output terminal 258 / combining node 272.

[0062] The output terminal 258 / combined node 272 is electrically coupled (e.g., by wirebond or another type of electrical connection) to the RF output terminal 214 (e.g., node 114, FIG. 1) through an output impedance matching network 274 (e.g., network 174, FIG. 1). The output impedance matching network 274 functions to present an appropriate load impedance to each of the carrier and peak end stage dies 234, 254. Although shown in overly simplified form in FIG. 2, the output impedance matching network 274 may include various conductor traces and additional discrete components (e.g., capacitors, inductors, and / or resistors) between the output terminal 258 / combined node 272 and the RF output terminal 214 to provide the desired impedance match. As described above, and according to one embodiment, output terminal 214 and ground terminals 265, 266 are embedded within terminal interposer 246, with ground terminals 265, 266 positioned "next to" and "in close proximity" to RF output terminal 214 to provide GSG terminal structure 264 for the RF output of module 200.

[0063] In the example module 200 of FIG. 2, one or two “perimeter” interposers 241-246 are disposed on each of the four sides (or edges) of substrate 210. In other embodiments, there may be zero interposers, or more than two interposers disposed on a given side of module 200. Moreover, while each of the perimeter interposers 241-246 is shown as being identical in module 200, in other embodiments, the various perimeter interposers 241-246 may be different. Still further, while each of the perimeters of perimeter interposers 241-246 is shown as including a single row of five terminals, some of the perimeter interposers 241-246 may have more terminals (e.g., up to 20 or more terminals), fewer terminals (e.g., only one terminal), and / or rows of different numbers of terminals.

[0064] For ease of explanation and understanding, FIG. 2 shows module 200 with encapsulation material 380 removed. A front view of power amplifier module 200 including encapsulation material 380 is shown in FIG. 4. More specifically, FIG. 4 shows contact surface 382 of encapsulation material 380, where the tips of terminals 212, 214, 261, 262, 265, 266, 267-1, 267-2, 267-3, 268-1, 268-2, and 268-3 are exposed as essentially a land grid array (LGA) of conductive contact pads. FIG. 4 also shows the placement of interposers 241-247 (enclosed in dashed lines) below contact surface 382.

[0065] Various embodiments of interposers that may be suitable for terminal, shield / ground, and dummy interposers 241-247 of module 200 of FIG. 2 will now be discussed in conjunction with FIGS. 5A-5C, 6A-6B, 7A-7B, 8, and 9A-9B. More specifically, FIGS. 5A and 5B show top views of two embodiments of terminal interposers 500, 520 (e.g., interposers 241-246, FIG. 2), while FIG. 5C shows a side cross-sectional view of either of terminal interposers 500, 520, taken along FIGS. 5A and 5B. FIG. 5A shows interposer 500 in more detail, including a single row 571 of interposer terminals 501-505, while FIG. 5B shows interposer 520, including two rows 571, 573 of interposer terminals 501-505. 5A and 5B include five terminals, in other embodiments, a row of interposer terminals may include more or fewer terminals (e.g., each row may include from 1 to 20 terminals or more). Additionally, the interposer may include three or more rows of terminals in yet other embodiments.

[0066] As best shown in the side cross-sectional view of FIG. 5C , each interposer 500, 520 includes a dielectric 592 (e.g., formed from FR-4, ceramic, or other suitable dielectric material) having top and bottom surfaces 593, 594, and the terminals 501-510 are embedded within the dielectric 592. Each interposer terminal 501-510 includes a conductive via 595 extending through the dielectric 592 between the top and bottom surfaces 593, 594 of the dielectric 592. Additionally, conductive pads 596, 597 are disposed on the top and bottom surfaces 593, 594, respectively, in contact with the first and second ends (or base and tip ends) of each conductive via 595. As shown in FIGS. 5A and 5B , each conductive via 595 may have a circular cross-sectional shape. However, in other embodiments, each conductive via 595 may instead have a square, rectangular, or bar shape. In either case, interposer terminals 501-510 provide conductive paths through vias 595 between pads 596-597. To incorporate interposer 500-520 into a module (e.g., module 200, FIG. 2), contact pads 597 on bottom surface 594 may be soldered or otherwise attached to one or more contact pads (e.g., pads 312, 361, 362, 369, FIG. 3) on the surface of the module substrate, which may be electrically coupled to a single layer (e.g., layer 301, FIG. 3), to a ground layer (e.g., layers 302 and / or 304, FIG. 3), to a layer configured to carry a bias voltage (e.g., layer 303, FIG. 3), or may be left electrically floating in the case of a "dummy" pad. Essentially, interposer 500-520 may be utilized with any of terminal interposers 241-246 of FIG. 2.

[0067] When the vias 595 have a square or circular cross-section, the vias 595 may have a width 586 (or diameter) in the range of about 300 micrometers to about 800 micrometers (e.g., about 500 micrometers), although the width 586 may be smaller or larger. According to one embodiment, the total length 581 and the portion of the widths 582, 583 of the interposers 500, 520 occupied by each terminal 501-510 are in the range of about 500 micrometers to about 2000 micrometers, such that the total length 581 of the interposers 500, 520 is in the range of about 2500 micrometers to 10000 micrometers, the width 582 of the single-row interposers 500 is in the range of about 500 micrometers to about 2000 micrometers, and the width 583 of the dual-row interposers 520 is in the range of about 1000 to about 4000 micrometers. As can be seen most clearly with reference to FIG. 2, in some embodiments, the length 581 of the interposer 500, 520 may be significantly shorter (e.g., less than half or a quarter) than the length of one side of the module substrate (e.g., module substrate 210) to which the interposer abuts, while in other embodiments, the length of the interposer may be the same length as the side of the module substrate. In yet other embodiments, each terminal 501-510 may occupy a smaller or larger portion of the interposer 500, 520 in which the interposer is embedded. The height 585 of the interposer 500, 520 (and thus the combined height of the via 595 and pads 596, 597) may range from about 500 micrometers to about 1500 micrometers (e.g., about 1000 micrometers), although each interposer 500, 520 may also be shorter or taller, for example.

[0068] As previously mentioned, when interposer terminals 500, 520 are assembled into a module (e.g., module 200, FIG. 2), height 585 of interposers 500, 520 may be approximately equal to the thickness (e.g., thickness 384, FIG. 3) of the encapsulation material (e.g., encapsulation material 380), such that top contact pads 596 of each interposer terminal 501-510 may be approximately flush with the contact surface (e.g., surface 382, ​​FIG. 3) of the module. In other embodiments, top contact pads 596 of each interposer terminal may be recessed below or extend above the contact surface of the module.

[0069] 6A and 6B are top and side views of a terminal interposer 600 according to yet another illustrative embodiment. Terminal interposer 600 essentially comprises two instances of terminal interposer 500 (FIG. 5) in a stacked configuration, with an intermediate patterned conductor layer 606. As best shown in the side cross-sectional view of FIG. 6B, interposer 600 comprises first and second dielectrics 692-1 and 692-2 (e.g., formed from FR-4, ceramic, or other suitable dielectric material) stacked together with a patterned conductor layer 606 between the two dielectrics 692-1 and 692-2. A top surface 693 of dielectric 692-1 forms the top surface of interposer 600, and a bottom surface 694 of dielectric 692-2 forms the bottom surface of interposer 600.

[0070] Terminals 601-605 are embedded within dielectric layers 692-1 and 692-2. Each interposer terminal 601-605 includes a first conductive via 695-1 extending through dielectric layer 692-1 and a second conductive via 695-2 extending through dielectric layer 692-2. Conductive traces 611-615 formed from portions of patterned conductor layer 606 serve to electrically connect the stacked vias of each terminal 601-605. Additionally, conductor traces 611-615 may extend to one or both sides 698, 699 of dielectric layers 692-1 and 692-2, as shown in FIG. 6A, with the exposed ends of traces 611-615 at those sides 698, 699 serving as additional connections to terminals 601-605.

[0071] Additionally, conductive pads 696, 697 are deposited on the top and bottom surfaces 693, 694 of the interposer 600, respectively, in contact with the first and second ends (or base and tip ends) of each set of stacked conductive vias 695-1, 695-2. As shown in FIG. 6A, each conductive via 695-1, 695-2 may have a circular cross-sectional shape. However, in other embodiments, each conductive via 695-1, 695-2 may instead have a square, rectangular, or bar shape. In either case, the interposer terminals 601-605 provide conductive paths between the pads 696, 697 through the vias 695-1, 695-2, and include additional connections through the exposed ends of the conductive traces 611-615, as described above.

[0072] To incorporate interposer 600 into a module (e.g., module 200, FIG. 2), contact pads 697 on bottom surface 694 may be soldered or otherwise attached to one or more contact pads (e.g., pads 312, 361, 362, 369, FIG. 3) on the surface of the module substrate, which may be electrically coupled to a single layer (e.g., layer 301, FIG. 3), to a ground layer (e.g., layers 302 and / or 304, FIG. 3), to a layer configured to carry a bias voltage (e.g., layer 303, FIG. 3), or may be left electrically floating in the case of a "dummy" pad. Essentially, interposer 600 may be utilized for any of terminal interposers 241-246 of FIG. 2. Furthermore, the dimensions of the interposer and vias may be substantially identical to those discussed with interposer 520 (FIG. 5B). Interposer 600 is shown as including five terminals 601-605, although in other embodiments interposer 600 may include more or fewer terminals.

[0073] 7A and 7B are top and side views of a shield / ground interposer 700 (e.g., interposer 247, FIG. 2) according to an exemplary embodiment. Shield / ground interposer 700 is similar to the two-row interposer 520 of FIG. 5B, except that rows 771, 773 of terminals 701-710 within interposer 700 are offset from one another. Thus, as best shown in the side view of FIG. 7B, the combination of terminals 701-710 forms a continuous or nearly continuous “wall” of conductive material that functions to capture and deflect to ground electromagnetic energy generated by nearby electrical components (e.g., driver stage die and / or end stage die 233, 234, 253, 254 of FIG. 2, and / or wirebonds or other conductors coupled to those die).

[0074] Once again, interposer 700 comprises a dielectric 792 (e.g., formed from FR-4, ceramic, or other suitable dielectric material) having top and bottom surfaces 793, 794, with terminals 701-710 embedded within dielectric 792. Each interposer terminal 701-710 extends through dielectric 792 between its top and bottom surfaces 793, 794. Additionally, conductive pads 796, 797 are deposited on the top and bottom surfaces 793, 794 in contact with first and second ends (or base and tip ends) of each conductive via 795, respectively. To incorporate interposer 700 into a module (e.g., module 200, FIG. 2), conductor pads 797 on bottom surface 794 may be soldered or attached to one or more ground pads (e.g., pads 348, FIG. 3) on the surface of the module substrate, which may be electrically coupled to a ground layer (e.g., layers 302 and / or 304, FIG. 3).

[0075] As shown in FIG. 7A, each conductor via 795 may have a circular cross-sectional shape. However, in other embodiments, each conductor via 795 may instead have a square, rectangular, or bar shape. In either case, interposer terminals 701-710 provide conductive paths between pads 796, 797 through vias 795. The dimensions of the interposer and vias may be substantially the same as those discussed with interposer 520 (FIG. 5B). While each row 771, 773 of interposer terminals in FIGS. 7A and 7B includes five terminals, in other embodiments, a row of interposer terminals may include more or fewer terminals. Additionally, the shield / ground interposer may include three or more rows of terminals in yet other embodiments.

[0076] FIG. 7 illustrates a shield / ground interposer 700 that forms a conductive “wall” with multiple conductor terminals 701-710. Other embodiments of the shield / ground interposer may have any of several alternative configurations. For example, FIG. 8 is a perspective view of a shield / ground interposer 800 according to another exemplary embodiment. The shield / ground interposer 800 includes a dielectric 892 (e.g., formed from FR-4, ceramic, or other suitable dielectric material) having a top surface, a bottom surface, and side surfaces 893, 894, and 895. Additionally, a conductor layer 896 is disposed (e.g., sputtered or attached) on one or more of the multiple side surfaces 895. The conductor layer 896 may be considered a “terminal” in the same sense that a conductor via and its associated pad may be considered a terminal (e.g., the conductor layer 896 allows current to flow between the top and bottom surfaces of the interposer 700). Additional conductor layers 897, 898 rest against the top and bottom surfaces 893, 894 of dielectric 892 to facilitate attachment of a module substrate (e.g., module substrate 210, FIG. 2). For example, to incorporate interposer 800 into a module (e.g., module 200, FIG. 2), conductor layer 898 on bottom surface 894 may be soldered or attached to one or more conductive ground pads (e.g., pad 348, FIG. 3) on the surface of the module substrate, which may be electrically coupled to a ground layer (e.g., layers 302 and / or 304, FIG. 3). Desirably, shield / ground interposer 800 is positioned in a location (e.g., the same location as interposer 247 in FIG. 2) so that shield / ground interposer 800 captures and deflects to ground electromagnetic energy generated by nearby electrical components (e.g., driver stage die and / or end stage die 233, 234, 253, 254, FIG. 2, and / or wirebonds or other conductors coupled to those die). Interposer dimensions may be approximately the same as those discussed with interposer 520 (FIG. 5B).

[0077] FIG. 9A is a top view of a shield / ground interposer 900 according to yet another illustrative embodiment, and FIG. 9B is a cross-sectional view of the interposer 900 taken along line 9-9 in FIG. 9A. The shield / ground interposer 900 includes a dielectric 992 (e.g., formed from FR-4, ceramic, or other suitable dielectric material) having top and bottom surfaces 993, 994, and an interposer terminal 901 embedded within the dielectric 992. The terminal 901 includes a conductor via 995 extending through the dielectric 992 between the top and bottom surfaces 993, 994 of the dielectric 992. According to one embodiment, and as best shown in FIG. 9A, the via 995 has an elongated "trench" shape (i.e., a shape in which the length of the via is substantially greater than the width of the via) that may extend substantially the entire length 981 of the interposer 900. Additionally, conductor pads 996, 997 are deposited on the top and bottom surfaces 993, 994, respectively, in contact with the first and second ends (or base and tip ends) of conductor via 995. To incorporate interposer 900 into a module (e.g., module 200, FIG. 2), conductor pad 997 on bottom surface 994 may be soldered or attached to one or more ground pads (e.g., pad 348, FIG. 3) on the surface of the module substrate, which may be electrically coupled to a ground layer (e.g., layers 302 and / or 304, FIG. 3). Desirably, shield / ground interposer 900 is positioned in a location (e.g., the same location as interposer 247 in FIG. 2). 9B, trench vias 995 form conductive "walls" that can function to capture and divert to ground electromagnetic energy generated by nearby electrical components (e.g., driver stage die and / or end stage die 233, 234, 253, 254 of FIG. 2, and / or wirebonds or other conductors coupled to those die). Interposer dimensions can be approximately the same as those discussed with interposer 520 (FIG. 5B).

[0078] As previously indicated, to incorporate an embodiment of power amplifier module 200 into a larger electrical system (e.g., a first stage amplifier in a cellular base station), one side of power amplifier module 200 is physically and electrically coupled to a system board, and a heat sink is attached to the opposite side of power amplifier module 200. To illustrate the integration of power amplifier module 200 into such a system, reference is now made to FIG. 10, which is a cross-sectional side view of an amplifier system 1000 comprising power amplifier module 200 of FIG. 2 coupled to a system board 1010 and a heat sink 1016, according to an exemplary embodiment.

[0079] The RF system 1000 generally includes a system board 1010, a power amplifier module 200, and a heat sink 1016. According to one embodiment, the system board 1010 includes a multilayer printed circuit board (PCB) or other suitable substrate. The system board 1010 has a top surface 1009 (also referred to as a "mounting surface") and an opposing bottom surface 1011. The system board 1010 also includes multiple dielectric layers 1005, 1006, 1007 (e.g., FR-4, ceramic, or other PCB dielectric material) alternating with multiple conductor layers 1001, 1002, 1003, with the top surface 1009 of the system board 1010 being formed by the patterned conductor layer 1001. It should be noted that while system substrate 1010 is shown as including three dielectric layers 1005-1007 and three conductor layers 1001-1003, other embodiments of the system substrate may include more or fewer dielectric and / or conductor layers.

[0080] Each of the different conductor layers 1001-1003 may have a primary purpose and may include conductor features that provide signal and / or voltage / ground routing between other layers. While the following description indicates a primary purpose for each of the conductor layers 1001-1004, it is understood that the layers (or their functions) may be arranged differently than the specific arrangement best shown in FIG. 10 and discussed below.

[0081] For example, in one embodiment, the patterned conductor layer 1001 on the mounting surface 1009 of the system substrate 1010 may function primarily as a signal conducting layer. More specifically, the layer 1001 includes a plurality of conductor features (e.g., conductor pads or traces) that serve as attachment points for the module 200, the input RF connector 1091, and the output RF connector 1092. Each of the RF connectors 1091, 1092 may be, for example, a coaxial connector having a center signal conductor 1093 and an outer ground shield 1094. According to one embodiment, the signal conductor 1093 of the RF input connector 1091 is electrically coupled to a first conductor trace on the layer 1001, which in turn is coupled to an input terminal 212 of the module 200, as described in more detail below. Additionally, signal conductor 1093 of RF output connector 1092 is electrically coupled to a second conductive trace 1014 on layer 1001, which in turn is coupled to an output terminal (e.g., terminal 214, FIG. 2) of module 200. Ground shields 1094 of connectors 1091, 1092 are electrically coupled to an additional trace (not numbered), which in turn is electrically coupled to system ground layer 1002 of system board 1010 through conductive via 1095 extending between layers 1001 and 1002.

[0082] As just shown, conductor layer 1002 functions as a system ground layer. In addition to being electrically coupled to ground shields 1094 of connectors 1091 and 1092, system ground layer 1002 is also electrically coupled to additional ground pads 1041 on mounting surface 1009 through additional conductor vias 1096. Additional ground pads 1041 are physically and electrically coupled to various ground terminals of module 200 (e.g., terminals 248, 261, 262, 265, and 266), and in some embodiments, to any "dummy" terminals (e.g., terminal 269).

[0083] Module 200 is coupled to mounting surface 1009 of system substrate 1010 in an inverted (or "flipped") orientation relative to the orientation shown in Figure 3. More specifically, module 200 is coupled to system substrate 1010 so that contact surface 382 of module 200 and mounting surface 1009 of system substrate 1010 face each other. To connect module 200 to system substrate 1010, each of the terminals of module 200 (e.g., terminals 212, 214, 241, 248, 261, 262, 265, 266, 267-1, 267-, 267-3, 268-1, 268-2, 268-3, 269; Figure 2) is aligned and comes into contact with a corresponding pad (e.g., pads 1014, 1041) on mounting surface 1009 of system substrate 1010. In embodiments in which conductor attachment material 383 is placed on the exposed ends of the module terminals, conductor attachment material 383 is reflowed or cured to physically connect the module terminals to their corresponding pads on the mounting surface 1009 of the module substrate 1010. In other embodiments, conductor attachment material may also or alternatively be placed on the conductor pads (e.g., pads 1014, 1041) of the system substrate 1010, and an appropriate reflow or cure process may be performed to connect the module 200 to the system substrate 1010.

[0084] In one embodiment, the heat sink 1016 is physically and thermally coupled to the heat sink mounting surface 211 of the power amplifier module 200, and more particularly to the conductor layer 304 and / or the surface 318 of the embedded heat dissipation structure 316 of the module 200. The heat sink 1016 is formed from a thermally conductive material that may also be electrically conductive. For example, the heat sink 1016 may be formed from copper or another bulk conductor material. To couple the heat sink 1016 to the power amplifier module 200, a thermally conductive material 1098 (e.g., thermal grease) may be dispensed on the heat sink mounting surface 211 of the module 200 (and / or on the surface 318 of the heat dissipation structure 316) and / or on the heat sink 1016, so that the heat sink 1016 comes into contact with the heat sink mounting surface 211. The heat sink 1016 is then clamped, screwed, or fastened in place.

[0085] During operation of RF system 1000, an input RF signal is provided through RF input terminal 1091 and trace / pad 1012 to RF input terminal 212 at contact surface 382 of power amplifier module 200. The input RF signal is transmitted through terminal 212 and additional components (e.g., power splitter 220, FIG. 2) to power transistor dies 233, 234, 253, and 254, which amplify the input RF signal as previously discussed. An amplified output RF signal is generated at output terminal 214 (FIG. 2), which is electrically coupled to trace / pad 1014 and to RF output terminal 1092.

[0086] According to one embodiment, a ground path is provided between each of the power transistor dies 233, 234, 253, and 254 (FIGS. 2 and 10, hidden) and the system ground layer 1002. For example, the ground path for each die 233, 234, 253, and 254 includes a first conductor ground path through the module 200 extending from a ground contact (e.g., a bottom-side source contact) for the die through a portion of the heat dissipation structure 316, the RF ground layer 302 of the module substrate 210, any intervening vias, a ground terminal pad on the mounting surface 209, and one or more ground terminals (e.g., terminal 248 on interposer 247, FIG. 2). The ground path continues to the system substrate 1010, and more specifically, through one or more ground pads 1041 and one or more ground vias 1096 on the mounting surface 1009 of the system substrate 1010, to the system ground layer 1002.

[0087] As discussed in detail previously, the ground terminals 248 in the ground / shield interposer 247 of the module 200 may be located in close proximity to the power transistor dies 233, 234, 253, 254 (e.g., between the carrier path dies 233, 234 and the peak path dies 253, 254), resulting in a relatively short ground return path for the module 200. Desirably, the overall electrical length of the ground path between the ground contact for each die 233, 234, 253, 254 and the system ground layer 1002 is less than about lambda / 5 (λ / 5) in some embodiments, or less than about lambda / 16 (λ / 16) in other embodiments.

[0088] During operation, significant thermal energy (heat) may be generated by the power transistors within the power transistor dies 233, 234, 253, and 254. As indicated by arrows 1099, the thermal energy generated by the power transistors is transferred through the heat dissipation structure 316 to the heat sink 1016, which effectively dissipates the heat into the ambient environment. The heat dissipation structure 316 therefore serves two functions: 1) to transfer the heat generated by the power transistor dies 233, 234, 253, and 254, and 2) to electrically couple the ground contacts of the dies 233, 234, 253, and 254 to the system ground.

[0089] FIG. 11 is a flowchart of a method for fabricating power amplifier modules (e.g., power amplifier module 200, FIG. 2) and assembling the power amplifier modules into an RF system (e.g., RF system 1000, FIG. 10). According to an exemplary embodiment, the power amplifier modules are fabricated in strips or panels of (typically) identical modules that are singulated in a later fabrication step. To illustrate the parallel fabrication process, FIGS. 12-19 show a panel 1200 of four modules 1201-1204 (depicted by dashed lines) at various points in the fabrication process, although one skilled in the art will understand based on the description herein that a strip or panel of modules fabricated in parallel will typically include substantially five or more modules. It is envisioned that panel 1300 may include additional modules (not shown) surrounding modules 1201-1204. Additionally, to concisely convey details of different embodiments, as will be described in more detail in conjunction with Figure 13, different embodiments of terminal interposers (e.g., interposers 1341, 1342, Figure 13) are shown coupled to different ones of four modules fabricated in parallel. In an actual fabrication process, it may be desirable to utilize identical terminal interposers to cost-effectively produce identical modules.

[0090] Beginning with step 1102 and referring to the top view of FIG. 12 , the method may begin by fabricating multiple multilayer module substrates 1201, 1202, 1203, and 1204 (e.g., multiple instances of module substrate 210 of FIGS. 2 and 3 ) and attaching different dies to the multiple multilayer module substrates 1201, 1202, 1203, and 1204. As previously discussed, forming module substrates 1201-1204 may include producing a multilayer PCB, where a patterned conductor layer (e.g., layer 301, FIG. 3 ) on mounting surface 1209 (e.g., surface 209, FIG. 3 ) comprises multiple conductor pads and traces arranged according to the circuitry to be housed by the module. As previously discussed, some of the pads correspond to signal, ground, via, or dummy pads (e.g., interposer pads 1241-1247) to which an interposer is connected. Additionally, each module 1201-1204 may include multiple heat dissipation structures (heat dissipation structures 316 in FIGS. 2 and 3, including coins and / or thermal vias). To prepare the various circuit components and interposers for attachment, a solder printing process may be performed in which solder (or solder paste, conductive adhesive, or other conductive attachment material) is deposited on corresponding leads, pads, or terminals of the various circuit components and the interposer's contact pads where the contact pads will be attached. Step 1102 also includes attaching discrete components to the prepared contact pads. For example, component placement processes and machines (e.g., pick-and-place machines such as chipshooters or flexible placers) may be utilized to quickly place the various discrete components (e.g., capacitors, resistors, etc.) in their appropriate locations on the modules 1201-1204.

[0091] In step 1104, a die attach / bonding process may be used to position and attach the power transistor dies 233, 234, 253, 254 to the appropriate locations on their respective modules 1201-1204. For example, the power transistor dies 233, 234, 253, 254 may be attached to the exposed top surfaces of the heat dissipation structures (e.g., heat dissipation structures 316 in FIGS. 2 and 3, e.g., comprising coins and / or thermal vias) using solder, sintering, conductive adhesive, or other attachment means.

[0092] 13, which shows a top view of panel 1200 at a subsequent fabrication stage, multiple terminal and shield / ground interposers 1341, 1342, 1347 are then attached to interposer pads 1241-1247 (FIG. 12) on mounting surface 1209 of panel 1200 using a die attach / bonding process. According to various embodiments, and as discussed above in conjunction with FIGS. 5A-5C, terminal interposer 1341 (e.g., interposer 500, FIG. 5A) includes a single row of terminals (e.g., terminals 501-505, FIG. 5A), and / or terminal interposer 1342 (e.g., interposer 520, FIG. 5B) includes two rows of terminals (terminals 501-510, FIG. 5B). As previously mentioned, it may be desirable to have all of the terminal interposers identical. However, to concisely convey the details of several different embodiments, both single and dual row terminal interposers 1341, 1342 are shown in Figure 13. Single row terminal interposer 1341 is more particularly attached to module 1202 and adjacent interposer pads of adjacent modules 1201, 1204, while dual row terminal interposer 1342 is attached to modules 1201, 1203, and 1204. As can be seen at the outer edges of modules 1201-1204, terminal interposers 1341, 1342 span the boundaries of adjacent modules 1201-1204 (and modules, not shown, that surround modules 1201-1204). Thus, in a two-row terminal interposer 1341, one row of interposer 1341 overlies and connects with the interposer pads for one module (e.g., module 1201), and the other row of the same interposer 1341 overlies and connects with the interposer pads for an adjacent module (e.g., module 1203). In contrast, in a single-row interposer 1342, the interposer terminals are equally divided by the edges (e.g., depicted by dashed lines) of the adjacent modules.Thus, in a single row terminal interposer 1342, half of each interposer terminal is located over and connected to an interposer pad for one module (e.g., module 1202), and the other half of each interposer terminal is located over and connected to an interposer pad for an adjacent module (e.g., module 1204).

[0093] Shield / ground interposer 1347 is coupled to the interposer pads between dies 233 / 234 and 253 / 254 (or between the carrier paths and the peak paths). In various embodiments, shield / ground interposer 1347 may have a configuration similar to shield / ground interposer 700 (FIGS. 7A, 7B), as shown in FIG. 13, or shield / ground interposer 1347 may have a configuration similar to shield / ground interposers 800, 900 (FIGS. 8, 9A, 9B).

[0094] Step 1104 also includes electrically attaching the components and die together to the conductor pads and traces of the top patterned conductor layer. For example, the electrical attachment may be performed using wire bonds (e.g., wire bonds 1350). Finally, the various components, die, and interposers are secured to panel 1200 by heating panel 1200 in a reflow oven for a period of time sufficient to reflow the solder or solder paste previously applied to the substrate pads, die and component pads and terminals, and interposer pads, thus securing the various die, components, and interposers to panel 1200. Panel 1200 may then be de-fluxed and otherwise cleaned to prepare panel 1200 for the next fabrication stage.

[0095] After attachment of the various die, components, interposers, and electrical connections, an encapsulant (e.g., encapsulant 380, FIG. 3) is applied over mounting surface 1209 of panel 1200 to complete fabrication of panel 1200. Any one of several methods may be performed to apply the encapsulant and complete panel 1200, three such methods being identified in FIG. 11 by parallel steps 1106, 1106′, and 1106″.

[0096] Starting with the first embodiment, a film-assisted molding (FAM) process is performed to apply the encapsulant material, as indicated at step 1106 and shown in Figures 14A and 14B. Referring to Figure 14A, which is a side cross-sectional view of panel 1200 taken along line 14-14 (Figure 13), the FAM process involves placing a film 1402 (e.g., a QFN film) on mounting surface 1209 of panel 1200 such that the adhesive surface of film 1402 contacts and protects the tips of interposer terminals (e.g., 212, 214, 248, 261, 262, 265, 266, 269). During the FAM process, interposers 1341, 1342, and 1347 function to support film 1402 above mounting surface 1209 of panel 1200. A viscous encapsulant material 380 is then flowed onto mounting surface 1209 beneath film 1402, resulting in a panel 1410 of encapsulated modules after curing encapsulant material 380 and removing film 1402, as shown in FIG. 14B. Optionally, conductor attachment material 383 (e.g., solder, solder paste, or conductor adhesive) may then be deposited on the exposed tips of the terminals to prepare each module for subsequent attachment to a system board (e.g., system board 1010, FIG. 10). Alternatively, conductor attachment material 383 may be applied during a later step (e.g., step 1110, below).

[0097] In a second embodiment, as shown in step 1106' and illustrated in Figures 15A-15C, an overmolding and encapsulation drilling process is performed to apply the encapsulant material and expose the terminals. Referring to Figure 15A, which is another side cross-sectional view of panel 1200 taken along line 14-14 (Figure 13), the overmolding process includes applying a viscous encapsulant material 380 to mounting surface 1209 such that the encapsulant material 380 entirely covers mounting surface 1209, the components and die, and interposers 1341, 1342, and extends some distance above the top surfaces of interposers 1341, 1342. This results in an encapsulated module panel 1510. After curing the encapsulant material 380, and with reference to FIG. 15B , a plurality of openings 1520 are formed through the top surface 382 of the encapsulant material 382 to expose the tips of the terminals (e.g., terminals 212, 214, 248, 261, 262, 265, 266, 269). For example, the openings may be formed using a laser ablation process (e.g., using a long-pulse laser), a mechanical drilling process, or another suitable process. Referring now to FIG. 15C , a conductor attachment material 383 (e.g., solder, solder paste, or conductor adhesive) may then be deposited into the openings 1520 and onto the exposed tips of the terminals to prepare each module for subsequent attachment to a system board (e.g., system board 1010, FIG. 10). Alternatively, the conductor attachment material 383 may be applied during a later step (e.g., step 1110, below).

[0098] In a third embodiment, as shown in step 1106" and illustrated in FIGS. 16A and 16B, a conductor attachment material dropping process is performed, followed by an overmolding and encapsulation drilling process. Referring to FIG. 16A, which is a side cross-sectional view of panel 1200 taken along line 14-14 (FIG. 13), conductor attachment material 383 (e.g., solder, solder paste, or conductor adhesive) is applied to the exposed tips of the interposer terminals (e.g., 212, 214, 248, 261, 262, 265, 266, 269), followed by an overmolding process. The overmolding process involves applying encapsulation material 380 to the mounting surface 1209, the components and die, the interposers 1341, 1342, and the conductors. 16B , a plurality of openings 1620 are formed through the top surface 382 of the encapsulant 382 to expose the conductor attachment material 383 (e.g., to expose the solder domes). For example, the openings may be formed using a laser ablation process (e.g., using a long-pulse laser), a mechanical drilling process, or another suitable process.

[0099] Referring again to FIG. 11, after the overmolding process is performed in one of steps 1106, 1106′, or 1106″, a singulation process is performed in step 1108 to separate each of the completed circuit modules 1201-1204 from the panel. For example, referring to FIG. 17, the panel may be mechanically, chemically, or laser cut along sawing paths (e.g., dashed lines in FIG. 12) that correspond to the module edges, thereby obtaining a plurality of separate modules 1701, 1702, 1703, 1704, each ready for attachment to a system substrate (e.g., system board 1010, FIG. 10). Additionally, the singulation process ensures that the first, second, third, and fourth sides of each module substrate are flush with the first, second, third, and fourth sides of the encapsulant 380 located over each module substrate.

[0100] As previously described, both the single row and dual row terminal interposers 1341, 1342 are attached to modules 1201-1204. After sawing through each of the single row interposers 1341, and as best seen by carefully viewing module 1702, interposer 1341 is split into two interposer halves (e.g., 1341-1, 1341-2), where one half 1341-1 is coupled to one module 1702 and exposed at a side of module 1702, and the other half 1341-2 is coupled to an adjacent module 1704 and exposed at a side of adjacent module 1704. In addition, the terminals of interposer 1341 are also split into two half terminals (e.g., 1769-1 and 1769-2), such that each half terminal is exposed at a side of one of modules 1702, 1704. In contrast, after sawing through each of the two rows of interposers 1342, and as best seen by carefully viewing module 1703, interposer 1342 is divided into two half interposers (e.g., 1341-1, 1341-2), where one half 1341-1 is coupled to one module 1701 and the other half 1341-2 is coupled to an adjacent module 1703. Additionally, each half of interposers 1342-1, 1342-2 includes a row of intact (e.g., unsawed) interposer terminals (e.g., 1769-3 and 1769-4) (i.e., the interposer terminals are not exposed at the sides of modules 1701, 1703).

[0101] Referring again to FIG. 11 , in step 1110, module 200 (e.g., any one of modules 1701-1704) is prepared for attachment to a system board (e.g., system board 1010, FIG. 10). If a conductor attachment material (e.g., material 383, such as solder, solder paste, or conductor adhesive) has not been previously applied (e.g., in steps 1106 or 1106′), the conductor attachment material is applied during this process. For example, the conductor attachment material is applied to one or both of the module terminals and / or corresponding pads on the mounting surface of the system board (e.g., pads 1012, 1014, 1041, FIG. 10). Module 200 is then inverted so that the module terminals align with and contact the corresponding pads on the mounting surface of the system board. The conductor attachment material (e.g., material 383) is reflowed, cured, or otherwise treated to create mechanical and electrical connections (e.g., solder joints) between the module terminals and the system board pads. This establishes signal, ground and bias voltage paths between the module 200 and the system board 1010 .

[0102] Finally, in block 1112, a heat sink (e.g., heat sink 1016, FIG. 10) is attached to a heat sink mounting surface (e.g., surface 211, FIG. 3) of module substrate 210. For example, the heat sink may be attached to the module substrate using a thermally conductive material (e.g., material 1098 such as thermal grease), clamps, screws, and / or other attachment means. The method then ends.

[0103] One embodiment of a circuit module includes a module substrate, a first heat dissipation structure, a first semiconductor die, an encapsulation material, and a first interposer. The module substrate has a mounting surface and a plurality of contact pads on the mounting surface. The first heat dissipation structure extends through the module substrate, the first heat dissipation structure having a first side and a second side, the first side of the first heat dissipation structure being exposed at the mounting surface of the module substrate. The first semiconductor die is bonded to the first side of the first heat dissipation structure. An encapsulation material covers the mounting surface of the module substrate and the first semiconductor die, the first side of the encapsulation material forming a contact surface of the circuit module. The first interposer is embedded in the encapsulation material and includes a first conductive terminal having a base end bonded to a first one of the plurality of contact pads and a tip end exposed at the contact surface of the circuit module.

[0104] According to a further embodiment, the plurality of conductive pads are located on a first side of the module substrate, the first, second, third, and fourth sides of the module substrate are flush with the first, second, third, and fourth sides of the encapsulant, and the first interposer is exposed at the first side of the encapsulant. According to another further embodiment, the first conductive terminal is not exposed at the first side of the encapsulant. According to another further embodiment, the first conductive terminal is exposed at the first side of the encapsulant.

[0105] According to yet another embodiment, the first interposer further comprises a plurality of additional conductive terminals arranged to form a conductive wall between the first semiconductor die and the second semiconductor die. According to yet another embodiment, the first terminal comprises a trench via to form a conductive wall between the first semiconductor die and the second semiconductor die. According to yet another embodiment, the first interposer further comprises a dielectric, and the first conductive terminal comprises a conductive layer on a surface of the dielectric.

[0106] One embodiment of an electronic system includes a system board and an amplifier module. The system board has a first mounting surface and contact pads exposed on the first mounting surface. The circuit module has a contact surface and a heat sink mounting surface. The circuit module is coupled to the system board such that the mounting surface of the system board faces the contact surface of the circuit module. One embodiment of the circuit module includes a module substrate, a heat dissipation structure, a semiconductor die, an encapsulation material, and an interposer. The module substrate has a second mounting surface and a plurality of contact pads on the second mounting surface. A first heat dissipation structure extends through the module substrate. The first heat dissipation structure has a first surface and a second surface, the first surface of the first heat dissipation structure being exposed at the second mounting surface of the module substrate. The first semiconductor die is coupled to the first surface of the first heat dissipation structure. An encapsulation material covers the second mounting surface and the first semiconductor die, the first surface of the encapsulation material forming the contact surface of the circuit module. The first interposer is embedded in the encapsulation material. The first interposer has a first conductive terminal having a base end coupled to a first conductive pad of the plurality of conductive pads and a tip end exposed at the contact surface of the circuit module and electrically coupled to the first conductive pad of the system substrate.

[0107] One embodiment of a method for fabricating a circuit module includes coupling a semiconductor die to a heat dissipation structure extending through a module substrate. The module substrate has a first mounting surface and a plurality of contact pads on the first mounting surface, with a first surface of the heat dissipation structure exposed at the first mounting surface of the module substrate. The method further includes coupling an interposer to the module substrate. The interposer includes a first conductive terminal having a base end coupled to a first conductive pad of the plurality of contact pads. The method includes covering the mounting surface of the module substrate, the first semiconductor die, and the first interposer with an encapsulant, where the first surface of the encapsulant forms a contact surface of the circuit module and a tip end of the first conductive terminal is exposed at the contact surface.

[0108] According to a further embodiment, the method further comprises coupling the circuit module to the system board such that the second mounting surface of the system board faces the contact surface of the circuit module. According to a further embodiment, the circuit module has a heat sink mounting surface opposite the contact surface, and the method further comprises coupling a heat sink to the heat sink mounting surface of the circuit module.

[0109] The foregoing detailed description is merely exemplary in nature and is not intended to limit the embodiments of the present subject matter or the application and uses of such embodiments. As used herein, the word "exemplary" means "serving as an example, instance, or illustration." Any implementation described herein as exemplary is not necessarily to be construed as preferred or advantageous over other implementations. Furthermore, there is no intention to be bound by any expressed or implied theory presented in the preceding technical field, background, or detailed description.

[0110] The connecting lines shown in the various figures contained herein are intended to represent exemplary functional relationships and / or physical couplings between the various elements. It should be noted that many alternative or additional functional relationships or physical connections may be present in an embodiment of the present subject matter. In addition, certain terminology may be used herein for reference purposes only and, therefore, is not intended to be limiting, and the terms "first," "second," and other such number terms referring to structure do not dictate a sequence or order unless clearly indicated by context.

[0111] As used herein, "node" means any internal or external reference point, connection point, link, signal line, conductive element, etc. at which a given signal, logic level, voltage, data pattern, current, or quantity is presented. Furthermore, more than two nodes may be realized by one physical element (and more than two signals may be multiplexed, modulated, or differentiated even if received or output at a common node).

[0112] The foregoing descriptions refer to elements, nodes, or features that are "connected" or "coupled" to one another. As used herein, unless otherwise specified, "connected" means that one element is directly coupled to (or in direct communication with) another element, not necessarily mechanically. Similarly, unless otherwise specified, "coupled" means that one element is directly or indirectly coupled to (or in direct or indirect communication with) another element, not necessarily mechanically. Thus, while the schematics depicted in the drawings are one example arrangement of elements, additional intervening elements, devices, features, or components may be present in an embodiment of the depicted subject matter.

[0113] While one or more exemplary embodiments have been presented in the foregoing detailed description, it will be recognized that many variations exist. It will also be recognized that the exemplary embodiment or embodiments described herein are not intended to limit the scope, applicability, or configuration of the claimed subject matter in any way. Rather, the foregoing detailed description provides those skilled in the art with a convenient road map for implementing the described embodiment or embodiments. It will be understood that various changes can be made in the function and arrangement of elements without departing from the scope defined by the claims, including equivalents known and foreseeable at the time of filing this patent application.

Claims

1. A circuit module comprising: a module substrate having a mounting surface and a plurality of contact pads on the mounting surface; a first heat dissipation structure extending through the module substrate, the first heat dissipation structure having a first side and a second side, the first side of the first heat dissipation structure being exposed at the mounting side of the module substrate; and a first semiconductor die coupled to the first surface of the first heat dissipation structure; an encapsulant covering the mounting surface of the module substrate and the first semiconductor die, a first surface of the encapsulant forming a contact surface of the circuit module; and a first interposer embedded in the encapsulation material, the first interposer including a first conductor terminal having a base end coupled to a first conductor pad of the plurality of conductor pads and a tip end exposed at the contact surface of the circuit module.

2. The first interposer includes: The circuit module of claim 1 , further comprising a dielectric material embedded within the first conductor terminal.

3. 3. The circuit module of claim 2, wherein the first conductor terminal comprises a conductor via extending through the dielectric, a first conductor pad on a first surface of the dielectric in contact with the conductor via, and a second conductor pad on a second surface of the dielectric in contact with the conductor via.

4. The first interposer includes: The circuit module of claim 2 further comprising one or more additional conductor terminals embedded in the dielectric.

5. A circuit module as described in claim 1, wherein the first, second, third, and fourth sides of the module substrate are flush with the first, second, third, and fourth sides of the encapsulating material, the plurality of conductor pads are located on the first side of the module substrate, and the first interposer is exposed on the first side of the encapsulating material.

6. The circuit module of claim 5 , wherein the first conductive terminal is not exposed at the first side of the encapsulant.

7. The circuit module of claim 5 , wherein the first conductive terminal is exposed at the first side of the encapsulant.

8. a second heat dissipation structure extending through the module substrate, the second heat dissipation structure having a first surface and a second surface, the first surface of the second heat dissipation structure being exposed at the mounting surface of the module substrate; and a second semiconductor die coupled to the first surface of the second heat dissipation structure; The circuit module of claim 1 , wherein the plurality of contact pads are located between the first heat dissipation structure and the second heat dissipation structure.

9. The first interposer includes: The circuit module of claim 8 , further comprising a plurality of additional conductive terminals arranged to form a conductive wall between the first semiconductor die and the second semiconductor die.

10. The circuit module of claim 8 , wherein the first conductive terminal comprises a trench via that forms a conductive wall between the first semiconductor die and the second semiconductor die.

11. the first interposer further comprises a dielectric; The circuit module of claim 8 , wherein the first conductive terminal comprises a conductive layer on a surface of the dielectric.

12. a second interposer embedded in the encapsulation material, the second interposer including a second conductor terminal having a base end coupled to a second conductor pad among the plurality of conductor pads and a tip end exposed at the contact surface of the circuit module; 2. The circuit module of claim 1, wherein the first interposer is exposed at a first side of the encapsulant and the second interposer is exposed at a second side of the encapsulant.

13. The circuit module of claim 1 , wherein the first heat dissipation structure comprises a conductive structure selected from a metal coin and a set of thermal vias.

14. The circuit module of claim 1 , wherein a ground plane of the module substrate contacts the first heat dissipation structure.

15. 1. An electronic system comprising: a system substrate having a first mounting surface and contact pads exposed on the first mounting surface; a circuit module having a contact surface and a heat sink mounting surface, the circuit module being coupled to the system board such that the first mounting surface of the system board faces the contact surface of the circuit module, the circuit module comprising: a module substrate having a second mounting surface and a plurality of contact pads on the second mounting surface; a first heat dissipation structure extending through the module substrate, the first heat dissipation structure having a first surface and a second surface, the first surface of the first heat dissipation structure being exposed at the second mounting surface of the module substrate; and a first semiconductor die coupled to the first surface of the first heat dissipation structure; an encapsulant covering the second mounting surface and the first semiconductor die, a first surface of the encapsulant forming the contact surface of the circuit module; and The electronic system further comprises a first interposer embedded in the encapsulation material, the first interposer comprising a first conductor terminal having a base end coupled to a first conductor pad of the plurality of conductor pads and a tip end exposed at the contact surface of the circuit module and electrically coupled to the first conductor pad of the system substrate.

16. The system of claim 15 further comprising a heat sink coupled to the heat sink mounting surface.

17. 1. A method of fabricating a circuit module, comprising: coupling the semiconductor die to a heat dissipation structure extending through the module substrate; the module substrate has a first mounting surface, first, second, third, and fourth side surfaces, and a plurality of contact pads on the first mounting surface; a first surface of the heat dissipation structure exposed at the first mounting surface of the module substrate; coupling a first interposer to the module substrate, the first interposer including a first conductive terminal having a base end coupled to a first conductive pad of the plurality of conductive pads; and covering the first mounting surface of the module substrate, the semiconductor die, and the first interposer with an encapsulant material, the first surface of the encapsulant material forming a contact surface of the circuit module, and tips of the first conductor terminals being exposed at the contact surface.

18. 20. The method of claim 17, further comprising coupling the circuit module to a system board such that a second mounting surface of the system board faces the contact surface of the circuit module.

19. the circuit module has a heat sink mounting surface opposite the contact surface; The method of claim 18 , further comprising coupling a heat sink to the heat sink mounting surface of the circuit module.

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