Inspection device and method

Abstract

An inspection apparatus is disclosed for adjusting the working height of a substrate relative to multiple target heights. The inspection apparatus includes a radiation source configured to provide a radiation beam and a beam splitter configured to split the radiation beam into multiple beamlets, each of which reflects off the substrate. Each beamlet includes multiple wavelengths of light. The inspection apparatus includes multiple optical reflecting components, each associated with one of the beamlets that reflect off the substrate, configured to support different target heights relative to the substrate by detecting the height or levelness of the substrate based on the beamlet that reflects off the substrate.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to U.S. Patent Application No. 63 / 086,293, filed October 1, 2020, the entire contents of which are incorporated herein by reference.

[0002] FIELD OF THE INVENTION

[0002] Embodiments provided herein relate to level sensors in charged particle beam inspection devices, and more particularly to multi-action height level sensors.

[0003]

[0003] In the integrated circuit (IC) manufacturing process, unfinished and finished circuit components are inspected to ensure they are manufactured according to design and are free of defects. Inspection systems utilizing optical microscopes or charged particle (e.g., electron) beam microscopes, such as scanning electron microscopes (SEMs), can be employed. As the physical size of IC components continues to shrink, accuracy and yield in defect detection become more important.

[0004] However, as inspection tools struggle to keep up with the shrinking features of IC components, their imaging resolution and throughput can be limited by a lack of precision in detecting wafer displacements. Summary of the Invention

[0005]

[0005] The embodiments provided herein disclose a particle beam inspection system, and more particularly, an inspection system that uses multiple charged particle beams.

[0006]

[0006] In some embodiments, the inspection apparatus includes a radiation source configured to provide a radiation beam, a beam splitter configured to split the radiation beam into a plurality of beamlets that each reflect off the substrate, each beamlet comprising light of a plurality of wavelengths, and a plurality of optically reflecting components, each optically reflecting component associated with one of the beamlets that reflect off the substrate and configured to support different target heights relative to the substrate by detecting the height or levelness of the substrate based on the beamlet that reflects off the substrate.

[0007] In some embodiments, a multi-action height inspection apparatus includes a stage configured to hold a substrate at one of a plurality of target heights, a level sensor, and a controller circuit. The level sensor includes: (a) a radiation source configured to provide a radiation beam; (b) a beam splitter configured to split the radiation beam into a plurality of beamlets, each beamlet reflecting off the substrate, where each beamlet includes light of a plurality of wavelengths; a plurality of optical reflecting components, each optical reflecting component associated with one of the beamlets reflecting off the substrate and configured to support different target heights for the substrate by detecting the height or levelness of the substrate based on the beamlet reflecting off the substrate; and (c) a detector configured to detect an image from each of the beamlets reflecting off the substrate. The controller circuit is configured to compare a first one of the target heights to a reference image corresponding to a first target height to determine a deviation of the substrate from the first target height.

[0008]

[0008] In some embodiments, a method for adjusting the working height of a substrate in an inspection system including a level sensor includes projecting a pattern onto the substrate by a radiation beam from a radiation source of the level sensor, the radiation beam being split into a plurality of beamlets that each reflect off the substrate, each beamlet comprising light of a plurality of wavelengths; generating a plurality of images of the pattern by receiving the beamlets that reflect off the substrate, each image being formed by a different beamlet and supporting measurement of deviation values ​​of the substrate from a different target height; and determining a first deviation value of the substrate from the first target height based on a first image of the images that supports measurement of deviation values ​​of the substrate from the first target height.

[0009]

[0009] In some embodiments, a non-transitory computer-readable medium storing a set of instructions executable by at least one processor of a computing device to cause the computing device to perform the above-described method.

[0010]

[0010] Other advantages of embodiments of the present disclosure will become apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0010] In the following description, by way of illustration and example, specific embodiments of the invention are set forth. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a schematic diagram illustrating an exemplary electron beam inspection (EBI) system consistent with an embodiment of the present disclosure. [Figure 2]

[0012] 2 is a schematic diagram illustrating an example electron beam tool that may be part of the electron beam inspection system of FIG. 1 consistent with an embodiment of the present disclosure. [Figure 3A]

[0013] FIG. 1 is a schematic diagram illustrating an exemplary inspection system including an exemplary leveling sensor consistent with embodiments of the present disclosure. [Figure 3B]

[0014] FIG. 10 is a schematic diagram illustrating the operation of a leveling sensor as a function of wafer height, consistent with an embodiment of the present disclosure. [Figure 4A]

[0015] 1 illustrates an inspection system with a multi-action height leveling sensor consistent with an embodiment of the present disclosure. [Figure 4B]

[0016] 10 illustrates a second multi-action height leveling sensor consistent with an embodiment of the present disclosure. [Figure 4C]

[0017] 10 illustrates a third multi-action height leveling sensor consistent with an embodiment of the present disclosure. [Figure 4D]

[0018] 10 illustrates a fourth multi-action height leveling sensor consistent with an embodiment of the present disclosure. [Figure 5]

[0019] FIG. 1 is a schematic diagram illustrating the operation of a leveling sensor to determine the level of a wafer, consistent with an embodiment of the present disclosure. [Figure 6]

[0020] FIG. 10 is a flow diagram of a process for determining the deviation or vertical displacement of a wafer relative to multiple target heights, consistent with an embodiment of the present disclosure. [Figure 7]

[0021] FIG. 1 is a flow diagram of a process for determining wafer levelness consistent with an embodiment of the present disclosure. [Figure 8]

[0022] FIG. 1 is a block diagram illustrating a computer system that can assist in implementing the methods, flows, modules, components, or devices disclosed herein. DETAILED DESCRIPTION OF THE INVENTION

[0012]

[0023] Electronic devices are built with circuits formed on a piece of silicon called a substrate. Many circuits can be formed together on the same piece of silicon and are called integrated circuits, or ICs. The size of these circuits has decreased dramatically, allowing more circuits to fit on a substrate. For example, a smartphone IC chip may be about the size of a thumbnail, yet it can contain over two billion transistors, each less than one-thousandth the size of a human hair. Creating these tiny ICs is a time-consuming, complex, and expensive process, often involving hundreds of individual steps. An error in even a single step can result in a defect in the finished IC, rendering it useless. Therefore, one of the goals of a manufacturing process is to avoid such defects in order to maximize the number of functioning ICs produced by the process—that is, to increase the overall process yield.

[0013]

[0024] One factor in improving yield is monitoring the chip creation process to ensure it produces a sufficient number of functioning integrated circuits. One way to monitor the process is to inspect the chip circuit structures at various stages of their formation. Inspection can be done using a scanning electron microscope (SEM). An SEM can be used to image these tiny structures, effectively taking a "picture" of the structure. The image can be used to determine if the structure was formed correctly and if the structure was formed in the correct location. If the structure is defective, the process can be adjusted to make the defect less likely to recur.

[0014]

[0025] In electron beam inspection systems, a leveling sensor (or Z sensor) detects height variations (e.g., in the Z axis) of a test sample (e.g., a substrate or wafer) to maintain the test sample at a target height and keep the test sample at the focus of the primary electron beam (e.g., 102 in FIG. 2 ). As the physical size of IC components decreases, the quality of the test image (e.g., an SEM image) can be significantly degraded by small variations (e.g., tens of nanometers) between the beam focus and the sample height, making highly sensitive detection of sample height variations necessary. As electron beam inspection systems evolve, electron beams with various landing energies may be used to image the test sample. A change in landing energy changes the focus of the electron beam, which in turn requires adjusting the target height of the test sample (e.g., the distance between the test sample and the objective lens of the inspection system). These multi-landing energy systems require height variation detection at multiple target heights to support various landing energies. For example, the target height may be 1.5 mm at one LE and 4.5 mm at a second LE, and at each of these target heights, detection of the height displacement and level of the test sample may be required.

[0015]

[0026] Conventional Z sensors have various limitations. For example, some existing Z sensors can detect changes in a single target height within a narrow dynamic range (e.g., ≤±0.1 mm). Although several multi-target height Z sensors have been proposed, these Z sensors also have drawbacks. For example, some Z sensors are not designed for a broadband spectrum at multiple target heights because they split the wavelength at different target heights. This splitting of wavelengths can cause inaccurate measurements of test samples with materials that are sensitive to narrowband spectra. Some other Z sensors are designed to use a broadband spectrum, but this is not ideal because the components used may not be suitable for a broad spectrum, reducing the aperture number and therefore the sensitivity. Furthermore, such Z sensors are very complex to build. Some Z sensors use moving parts to detect the height of the test sample relative to different target heights, and such moving components can cause system instability. Furthermore, some conventional Z sensors are not useful for detecting the level of the test sample relative to the reference plane of the inspection system (e.g., the test sample is parallel to the column of the electron beam tool). Such Z sensors may not ensure that the test sample is parallel to the column, which can result in potential scratches and arcing of the test sample.

[0016]

[0027] Embodiments of the present disclosure provide a multi-effect height Z sensor for detecting the height (or deviation from a target height) of an inspection sample relative to multiple target heights with high accuracy. The Z sensor may include a configurable broadband radiation source (e.g., a light source), an optical lens group, a light-reflecting component (e.g., a beam splitter or dichroic mirror), and one or more detectors (e.g., a camera based on a charge-coupled device (CCD) / complementary metal-oxide semiconductor (CMOS) sensor). One advantage of such a multi-effect height Z sensor is that it enables measurement of the deviation of the inspection sample relative to different target heights, thereby facilitating detection of a wider range of height variations than a single target height Z sensor. Another advantage is that the multi-effect height Z sensor may enable the use of electron beams with multiple landing energies in the same electron beam inspection system, enabling high-quality imaging of the inspection sample. Yet another advantage is that the use of radiation of any wavelength (e.g., broadband radiation from 250 nm to 10 μm) may minimize the effect of materials on the substrate on the deviation measurement, thereby increasing the accuracy of the inspection sample height measurement. Yet another advantage is that the multi-acting height Z sensor allows for detection of test sample tilt, which can be used in aligning the test sample so that it is parallel to a reference surface. Furthermore, it is easy to build such a Z sensor (e.g., with no moving parts) and to retrofit or integrate the Z sensor into modern electron beam inspection systems.

[0017]

[0028] Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. In the following description, reference will be made to the accompanying drawings, in which like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the following description of exemplary embodiments do not represent all implementations. Rather, they are merely examples of apparatus and methods consistent with aspects related to embodiments of the disclosure recited in the appended claims. For example, although some embodiments are described in the context of utilizing electron beams, the disclosure is not so limited. Other types of charged particle beams may be applied as well. Furthermore, other imaging systems, such as optical imaging, light detection, and X-ray detection, may also be used.

[0018]

[0029] While specific reference may be made herein to the manufacture of ICs, it should be expressly understood that the description herein has many other possible applications. For example, the description herein may be used in the manufacture of integrated optics, guidance and detection patterns for magnetic domain memories, liquid crystal display panels, thin film magnetic heads, etc. Those skilled in the art will understand that, in the context of such alternative applications, any use of the terms "reticle," "wafer," or "die" herein should be considered interchangeable with the more general terms "mask," "substrate," and "target portion," respectively.

[0019]

[0030] In this document, the terms "radiation" and "beam" are used to encompass all types of electromagnetic radiation, including ultraviolet radiation (e.g., having a wavelength of 365, 248, 193, 157, or 126 nm) and EUV (extreme ultraviolet radiation, e.g., having a wavelength in the range of 5-20 nm).

[0020]

[0031] Reference is now made to FIG. 1 , which illustrates an exemplary electron beam inspection (EBI) system 100 consistent with embodiments of the present disclosure. As shown in FIG. 1 , the charged particle beam inspection system 100 includes a main chamber 10, a load and lock chamber 20, an electron beam tool 40, and a front-end equipment module (EFEM) 30. The electron beam tool 40 is located within the main chamber 10. While the description and drawings are directed to an electron beam, it is understood that the embodiments are not intended to limit the present disclosure to any particular charged particle.

[0021]

[0032] EFEM 30 includes a first load port 30a and a second load port 30b. EFEM 30 may include additional load ports. First load port 30a and second load port 30b receive wafer front-opening integrated pods (FOUPs) containing wafers (e.g., semiconductor wafers or wafers made of other materials) or samples to be inspected (hereinafter, wafers and samples are collectively referred to as "wafers"). One or more robotic arms (not shown) of EFEM 30 transfer wafers to load-lock chamber 20.

[0022]

[0033] The load / lock chamber 20 is connected to a load / lock vacuum pumping system (not shown), which removes gas molecules from the load / lock chamber 20 to a first pressure below atmospheric pressure. After the first pressure is reached, one or more robot arms (not shown) transfer the wafer from the load / lock chamber 20 to the main chamber 10. The main chamber 10 is connected to a main chamber vacuum pumping system (not shown), which removes gas molecules from the main chamber 10 to a second pressure below the first pressure. After the second pressure is reached, the wafer is inspected using an electron beam tool 40. In some embodiments, the electron beam tool 40 may include a single-beam inspection tool. In other embodiments, the electron beam tool 40 may include a multi-beam inspection tool.

[0023]

[0034] The controller 50 may be electronically connected to the electron beam tool 40 and may also be electronically connected to other components. The controller 50 may be a computer configured to perform various controls of the charged particle beam inspection system 100. The controller 50 may also include processing circuitry configured to perform various signal and image processing functions. While the controller 50 is shown in FIG. 1 as being external to the structure including the main chamber 10, the load lock chamber 20, and the EFEM 30, it is understood that the controller 50 may also be part of the structure.

[0024]

[0035] While this disclosure provides an example of a main chamber 10 housing an electron beam inspection system, it should be noted that aspects of this disclosure, in its broadest sense, are not limited to chambers housing electron beam inspection systems. Rather, it is understood that the principles described above may be applied to other chambers.

[0025]

[0036] Referring now to FIG. 2 , FIG. 2 illustrates a schematic diagram of an exemplary electron beam tool 40 that may be part of the exemplary charged particle beam inspection system 100 of FIG. 1 , consistent with an embodiment of the present disclosure. The electron beam tool 40 (also referred to herein as the apparatus 40) includes an electron source 101, a gun aperture plate 171 having a gun aperture 103, a pre-beamlet forming mechanism 172, a condenser lens 110, a source conversion unit 120, a primary projection optics 130, a sample stage (not shown in FIG. 2 ), a secondary imaging system 150, and an electron detection device 140. The primary projection optics 130 may include an objective lens 131. The electron detection device 140 may include multiple detection elements 140_1, 140_2, and 140_3. A beam separator 160 and a deflection scanning unit 132 may be disposed within the primary projection optics 130. It may be understood that other commonly known components of the apparatus 40 may be added or omitted as needed.

[0026]

[0037] The electron source 101, the gun aperture plate 171, the condenser lens 110, the source conversion unit 120, the beam separator 160, the deflection scanning unit 132 and the primary projection optics 130 may be aligned with a main optical axis 100_1 of the apparatus 100. The secondary imaging system 150 and the electron detection device 140 may be aligned with a secondary optical axis 150_1 of the apparatus 40.

[0027]

[0038] The electron source 101 may include a cathode, an extractor, or an anode, and primary electrons may be emitted from the cathode and then extracted or accelerated to form a primary electron beam 102 that forms a primary beam crossover (virtual or real image) 101s. The primary electron beam 102 may be visualized as it emerges from the crossover 101s.

[0028]

[0039] The source conversion unit 120 may include an image forming element array (not shown in FIG. 2 ), an aberration compensator array (not shown), a beam-limiting aperture array (not shown), and a pre-bending micro-deflector array (not shown). The image forming element array may include multiple micro-deflectors or micro-lenses to form multiple parallel images (virtual or real images) of the crossover 101s using multiple beamlets of the primary electron beam 102. FIG. 2 shows three beamlets 102_1, 102_2, and 102_3 as an example, and it will be understood that the source conversion unit 120 can process any number of beamlets.

[0029]

[0040] In some embodiments, the source conversion unit 120 may include a beam-limiting aperture array and an image-forming element array (both not shown). The beam-limiting aperture array may include a beam-limiting aperture. It is understood that any number of apertures may be used as needed. The beam-limiting aperture may be configured to limit the size of the beamlets 102_1, 102_2, and 102_3 of the primary electron beam 102. The image-forming element array may include an image-forming deflector (not shown) configured to deflect the beamlets 102_1, 102_2, and 102_3 by changing their angle toward the main optical axis 100_1. In some embodiments, the deflector may deflect the beamlets more the farther they are from the main optical axis 100_1. Furthermore, the image-forming element array may include multiple layers (not shown), and the deflectors may be provided in separate layers. The deflectors may be configured to be individually controlled independently of each other. In some embodiments, the deflector may be controlled to adjust the pitch of the probe spots (e.g., 102_1S, 102_2S, and 102_3S) formed on the surface of the sample 1. As referred to herein, the pitch of the probe spots may be defined as the distance between two immediately adjacent probe spots on the surface of the sample 1.

[0030]

[0041] A deflector located at the center of the array of image-forming elements may be aligned with the main optical axis 100_1 of the electron beam tool 40. Thus, in some embodiments, the central deflector may be configured to maintain the trajectory of the beamlet 102_1 in a straight line. In some embodiments, the central deflector may be omitted. However, in some embodiments, the primary electron source 101 may not necessarily be aligned with the center of the source conversion unit 120. Furthermore, while FIG. 2 shows a side view of the apparatus 40 with the beamlet 102_1 on the main optical axis 100_1, it is understood that the beamlet 102_1 may deviate from the main optical axis 100_1 when viewed from a different side. That is, in some embodiments, the beamlets 102_1, 102_2, and 102_3 may all be off-axis. The off-axis components may be offset with respect to the main optical axis 100_1.

[0031]

[0042] The deflection angles of the deflected beamlets may be set based on one or more criteria. In some embodiments, the deflector may deflect the off-axis beamlets radially outward or away from the main optical axis 100_1 (not illustrated). In some embodiments, the deflector may be configured to deflect the off-axis beamlets radially inward or toward the main optical axis 100_1. The deflection angles of the beamlets may be set so that the beamlets 102_1, 102_2, and 102_3 land perpendicularly on the sample 1. Off-axis aberrations in an image caused by lenses, such as the objective lens 131, can be reduced by adjusting the paths of the beamlets through the lenses. Thus, the deflection angles of the off-axis beamlets 102_2 and 102_3 may be set so that the probe spots 102_2S and 102_3S have small aberrations. To reduce aberrations in the off-axis probe spots 102_2S and 102_3S, the beamlets may be deflected to pass through or near the front focal point of the objective lens 131. In some embodiments, the deflectors may be set so that the beamlets 102_1, 102_2, and 102_3 land perpendicularly on the sample 1, while the probe spots 102_1S, 102_2S, and 102_3S have small aberrations.

[0032]

[0043] The condenser lens 110 is configured to focus the primary electron beam 102. The currents of the beamlets 102_1, 102_2, and 102_3 downstream of the source transformation unit 120 can be varied by adjusting the focusing power of the condenser lens 110 or by changing the radial size of the corresponding beam-limiting aperture in the beam-limiting aperture array. The currents can be varied by changing both the radial size of the beam-limiting aperture and the focusing power of the condenser lens 110. The condenser lens 110 can be an adjustable condenser lens that can be configured so that its first principal plane is movable. The adjustable condenser lens can be configured to be magnetic, so that the off-axis beamlets 102_2 and 102_3 can illuminate the source transformation unit 120 with a rotation angle. The rotation angle can vary depending on the focusing power or the position of the first principal plane of the adjustable condenser lens. Accordingly, condenser lens 110 may be an anti-rotation condenser lens that may be configured to keep the rotation angle constant while the focusing power of condenser lens 110 is changed. In some embodiments, condenser lens 110 may be an adjustable anti-rotation condenser lens, where the rotation angle does not change when the focusing power and the position of the first principal plane of condenser lens 110 are changed.

[0033]

[0044] The electron beam tool 40 may include a pre-beamlet forming mechanism 172. In some embodiments, the electron source 101 may be configured to emit primary electrons and form the primary electron beam 102. In some embodiments, the gun aperture plate 171 may be configured to block electrons on the periphery of the primary electron beam 102 to reduce Coulomb effects. In some embodiments, the pre-beamlet forming mechanism 172 may further cut off electrons on the periphery of the primary electron beam 102 to further reduce Coulomb effects. After passing through the pre-beamlet forming mechanism 172, the primary electron beam 102 may be trimmed into three primary electron beamlets 102_1, 102_2, and 102_3 (or any other number of beamlets). The electron source 101, the gun aperture plate 171, the pre-beamlet forming mechanism 172, and the condenser lens 110 may be aligned with a main optical axis 100_1 of the electron beam tool 40.

[0034]

[0045] The pre-beamlet forming mechanism 172 may include a Coulomb aperture array. A central aperture, also referred to herein as an on-axis aperture, of the pre-beamlet forming mechanism 172 and a central deflector of the source conversion unit 120 may be aligned with the main optical axis 100_1 of the electron beam tool 40. The pre-beamlet forming mechanism 172 may include multiple pre-trimming apertures (e.g., a Coulomb aperture array). In FIG. 2 , the three beamlets 102_1, 102_2, and 102_3 are generated when the primary electron beam 102 passes through the three pre-trimming apertures while most of the remaining primary electron beam 102 is blocked. That is, the pre-beamlet forming mechanism 172 can trim many or most of the electrons from the primary electron beam 102 that do not form the three beamlets 102_1, 102_2, and 102_3. The pre-beamlet forming mechanism 172 can block electrons that will not ultimately be used to form the probe spots 102_1S, 102_2S, and 102_3S before the primary electron beam 102 enters the source conversion unit 120. In some embodiments, a gun aperture plate 171 is provided near the electron source 101 to block electrons early, while a pre-beamlet forming mechanism 172 is also provided to further block nearby electrons of multiple beamlets. While Figure 2 shows three apertures in the pre-beamlet forming mechanism 172, it will be understood that there can be any number of apertures as needed.

[0035]

[0046] In some embodiments, the pre-beamlet forming mechanism 172 may be located below the condenser lens 110. By locating the pre-beamlet forming mechanism 172 closer to the electron source 101, the Coulomb effect may be more effectively reduced. In some embodiments, if the pre-beamlet forming mechanism 172 can be located close enough to the electron source 101 and still be manufacturable, the gun aperture plate 171 may be omitted.

[0036]

[0047] The objective lens 131 may be configured to focus the beamlets 102_1, 102_2, and 102_3 onto the sample 1 for inspection, forming three probe spots 102_1s, 102_2s, and 102_3s on the surface of the sample 1. To reduce Coulomb interaction effects, the gun aperture plate 171 may block peripheral electrons of the primary electron beam 102 that are not used. Coulomb interaction effects may increase the size of each of the probe spots 102_1s, 102_2s, and 102_3s, thus degrading the inspection resolution.

[0037]

[0048] Beam separator 160 may be a Wien filter-type beam separator that includes electrostatic deflectors that generate an electrostatic dipole field E1 and a magnetic dipole field B1 (both not shown in FIG. 2 ). When these fields are applied, the force exerted on electrons in beamlets 102_1, 102_2, and 102_3 by electrostatic dipole field E1 is equal in magnitude and opposite in direction to the force exerted on electrons by magnetic dipole field B1. Thus, beamlets 102_1, 102_2, and 102_3 can pass through beam separator 160 in a straight line with zero deflection angle.

[0038]

[0049] The deflection scanning unit 132 can deflect the beamlets 102_1, 102_2, and 102_3 to scan the probe spots 102_1s, 102_2s, and 102_3s over three small scanning areas of a section of the surface of the sample 1. In response to the incidence of the beamlets 102_1, 102_2, and 102_3 at the probe spots 102_1s, 102_2s, and 102_3s, three secondary electron beams 102_1se, 102_2se, and 102_3se can be emitted from the sample 1. Each of the secondary electron beams 102_1se, 102_2se, and 102_3se can include electrons having an energy distribution including secondary electrons (energy ≦50 eV) and backscattered electrons (energy between 50 eV and the landing energy of the beamlets 102_1, 102_2, and 102_3). The beam separator 160 can direct the secondary electron beams 102_1se, 102_2se, and 102_3se towards the secondary imaging system 150. The secondary imaging system 150 can focus the secondary electron beams 102_1se, 102_2se, and 102_3se onto the detection elements 140_1, 140_2, and 140_3 of the electron detection device 140. The detection elements 140_1, 140_2, and 140_3 can detect the corresponding secondary electron beams 102_1se, 102_2se, and 102_3se and generate corresponding signals, for example, to construct an image of a corresponding scanned area of ​​the sample 1.

[0039]

[0050] 2, three secondary electron beams 102_1se, 102_2se, and 102_3se generated by three probe spots 102_1S, 102_2S, and 102_3S, respectively, move upward along a main optical axis 100_1 toward the electron source 101 and successively pass through an objective lens 131 and a deflection scanning unit 132. The three secondary electron beams 102_1se, 102_2se, and 102_3se are redirected by a beam separator 160 (such as a Wien filter) to enter a secondary imaging system 150 along a secondary optical axis 150_1. The secondary imaging system 150 focuses the three secondary electron beams 102_1se to 102_3se onto an electron detection device 140 including three detection elements 140_1, 140_2, and 140_3. Therefore, the electron detection device 140 can simultaneously generate images of the three scanning regions scanned by the three probe spots 102_1S, 102_2S, and 102_3S, respectively. In some embodiments, the electron detection device 140 and the secondary imaging system 150 form one detection unit (not shown). In some embodiments, electron optical elements on the path of the secondary electron beam, such as (but not limited to) the objective lens 131, the deflection scanning unit 132, the beam separator 160, the secondary imaging system 150, and the electron detection device 140, can form one detection system.

[0040]

[0051] In some embodiments, the controller 50 may include an image processing system, which includes an image acquirer (not shown) and storage (not shown). The image acquirer may include one or more processors. For example, the image acquirer may include a computer, a server, a mainframe host, a terminal, a personal computer, any type of mobile computing device, and the like, or a combination thereof. The image acquirer may be communicatively coupled to the electronic detection device 140 of the apparatus 40 through a medium such as electrical conductors, a fiber optic cable, a portable storage medium, IR, Bluetooth, the Internet, a wireless network, a wireless radio, or a combination thereof, among others. In some embodiments, the image acquirer may receive signals from the electronic detection device 140 and construct an image. Thus, the image acquirer may acquire an image of the sample 1. The image acquirer may also perform various post-processing functions, such as generating contours, superimposing indicators on the acquired image, and the like. The image acquirer may be configured to perform adjustments, such as brightness and contrast, of the acquired image. In some embodiments, the storage may be a storage medium such as a hard disk, a flash drive, cloud storage, random access memory (RAM), other types of computer-readable memory, and the like. The storage may be coupled to an image acquirer and may be used to store raw scanned image data as original images and post-processed images.

[0041]

[0052] In some embodiments, the image acquirer can acquire one or more images of the sample based on one or more imaging signals received from the electronic detection device 140. The imaging signals can correspond to a scanning operation to perform charged particle imaging. The acquired image can be a single image including multiple imaging areas or can involve multiple images. The single image can be stored in storage. The single image can be an original image that can be divided into multiple regions. Each region can include an imaging area that includes a feature of the sample 1. The acquired image can include multiple images of a single imaging area of ​​the sample 1 sampled multiple times over a time series, or multiple images of different imaging areas of the sample 1. The multiple images can be stored in storage. In some embodiments, the controller 50 can be configured to perform image processing steps using multiple images of the same location on the sample 1.

[0042]

[0053] In some embodiments, the controller 50 may include measurement circuitry (e.g., an analog-to-digital converter) to obtain a distribution of detected secondary electrons. The electron distribution data collected during the detection time window, combined with the corresponding scan path data for each of the primary beamlets 102_1, 102_2, and 102_3 incident on the wafer surface, can be used to reconstruct an image of the wafer structure under inspection. The reconstructed image can be used to reveal various features of the internal or external structure of the sample 1, and thus, any defects that may be present in the wafer.

[0043]

[0054] In some embodiments, the controller 50 can control a motorized stage (not shown) to move the sample 1 during inspection. In some embodiments, the controller 50 can cause the motorized stage to continuously move the sample 1 in one direction at a constant speed. In other embodiments, the controller 50 can cause the motorized stage to vary the speed at which the sample 1 moves over time depending on the step in the scanning process. In some embodiments, the controller 50 can adjust the configuration of the primary projection optics 130 or the secondary imaging system 150 based on images of the secondary electron beams 102_1se, 102_2se, and 102_3se.

[0044]

[0055] 2 shows that the electron beam tool 40 uses three primary electron beams, it is understood that the electron beam tool 40 may use two or more primary electron beams, and the present disclosure does not limit the number of primary electron beams used in the apparatus 40.

[0045]

[0056] Reference is now made to FIG. 3A , which illustrates an inspection system 300 including an exemplary leveling sensor consistent with embodiments of the present disclosure. As shown in FIG. 3A , the inspection system 300 includes an electron beam tool 310, a stage 320 on which a sample to be inspected (e.g., a substrate 321 or wafer 321) is positioned, and a leveling sensor 330. The electron beam tool 310 may emit a primary electron beam 312 onto a region of interest (ROI) on the wafer 321 and collect secondary electrons resulting from the wafer 321 to form an image of the ROI on the wafer 321. The inspection system 300 may be part of the EBI system 100 of FIG. 1 , or the electron beam tool 310 may be the electron beam tool 40 of FIG. 2 . It should be understood that, in the context of the present disclosure, charged particles and electrons may be used interchangeably. Similarly, elements of the claimed apparatus or methods describing a charged particle beam may be used interchangeably with an electron beam, where appropriate.

[0046]

[0057] In practice, the wafer 321 may be viewed at high magnification in the inspection system 300 while the stage 320 stably supports the wafer 321 and smoothly moves it, for example, along the horizontal X- and Y-axes, the vertical Z-axis, stage tilt, or stage rotation. Movement in the X- and Y-axes may be used to select the field of view (FOV), while movement in the Z-axis may be required to change image resolution, depth of focus, etc. In some embodiments, the vertical displacement of the stage 320 may be routinely determined for instrument calibration based on height measurements or height sensing of a standard specimen. For example, a wafer containing patterned standard features, such as metal lines, a photoresist layer, or a reflective film deposited on the wafer, may be used to calibrate the instrument, sensors, motors, or stage. Because the wafer 321 contains patterned features, the surface of the wafer 321 is typically uneven, and therefore, the height of the wafer 321 may be adjusted for image resolution during inspection of the wafer 321.

[0047]

[0058] In some embodiments, the leveling sensor 330 may be used to determine the vertical displacement of the wafer 321. As referred to herein, the vertical displacement of the wafer 321 may correspond to the difference between a target position and the actual position of the wafer 321 in the Z-axis. The leveling sensor 330 may be in communication with a height controller 340 (described in more detail below) such that the output of the leveling sensor 330 is analyzed and used to further adjust the wafer height or the focal plane of the electron beam 312. One or more optical height sensors, such as the leveling sensor 330, may be used based on the complexity and accuracy of the height sensing desired.

[0048]

[0059] In some embodiments, the leveling sensor 330 may include a light source 331 that projects a primary light beam 332 onto the wafer 321 through a selectively light-transmitting object 333, and a detector 336 that captures an image of a secondary light beam 335 from the wafer 321. A projection pattern formed by the primary light beam 332 that has passed through the selectively light-transmitting object 333 is projected onto the wafer 321. The secondary light beam 335 may include a light beam scattered from the surface of the wafer 321, a light beam diffracted from the surface of the wafer 321, or a combination of a light beam scattered from the surface of the wafer 321 and a light beam diffracted from the surface of the wafer 321. The image of the secondary light beam 335 may correspond to the projection pattern on the wafer 321.

[0049]

[0060] In some embodiments, the leveling sensor 330 may further include a first optical system 334 between the light source 331 and the wafer 321, and a second optical system 337 between the wafer 321 and the detector 336. The first optical system 334 may include one or more optical lenses configured to focus the primary light beam 332 on the wafer 321. The second optical system 337 may include one or more optical lenses configured to focus the secondary light beam 335 on the detector 336. The detector 360 may be a charge-coupled device (CCD) camera or a complementary metal-oxide semiconductor (CMOS) sensor that detects the secondary light beam 335 to form an image of the secondary light beam 335.

[0050]

[0061] In some embodiments, the leveling sensor 330 can be used to determine the height displacement of the wafer 321 at the position where the primary electron beam 312 is focused so that a high-resolution inspection image of the area of ​​interest (e.g., the probe spot of the primary electrons) can be obtained.

[0051]

[0062] Reference is now made to FIG. 3B, which illustrates the operation of the leveling sensor 330 according to wafer height. In FIG. 3B, the optical axis of the primary electron beam 312 is indicated as a vertical dotted line with reference numeral 312_1, and the probe spot (e.g., 102_1S, 102_2S, or 102_3S) of the primary electron beam 312 is shown as being located at x=0 on the X-axis. As shown in FIG. 3B, when the wafer 321 is positioned at a target height 321_T on the Z-axis, the center of the projection pattern projected onto the wafer 321 coincides with the probe spot of the primary electron beam 312 on the wafer 321 (i.e., x=0). When the wafer 321 is positioned at a position 321_H higher than the target height 321_T, the center of the projection pattern does not coincide with the target probe spot of the primary electron beam 312 (i.e., the target probe spot is at x=0). Rather, the center of the projection pattern may be located at a position x<0. According to an embodiment of the present disclosure, based on the image obtained by the detector 336, it can be determined that the height of the wafer 321 needs to be lowered so that the center of the projection pattern moves to the right, i.e., at x=0, to coincide with the focal point of the targeted primary beam 312. When the wafer 321 is positioned at a position 321_L lower than the target height 321_T, the center of the projection pattern does not coincide with the target probe spot of the primary electron beam 312 (i.e., the target probe spot is at x=0). Rather, the center of the projection pattern may be positioned at a position x>0. According to an embodiment of the present disclosure, based on the image obtained by the detector 336, it can be determined that the height of the wafer 321 needs to be raised so that the center of the projection pattern moves to the left, i.e., at x=0, to coincide with the focal point of the targeted primary beam 312.

[0052]

[0063] 3A , the leveling sensor 330 may be in communication with a height controller 340 such that the output of the leveling sensor 330 is analyzed and used to further adjust the wafer height. It is understood that the height controller 340 may be part of or separate from the charged particle beam inspection system (e.g., the electron beam inspection system 100 of FIG. 1 or the inspection system 300 of FIG. 3A ). In some embodiments, the height controller 340 may be part of the controller 50 and may include an image acquirer, measurement circuitry, storage, or the like. In some embodiments, the height controller 340 may include an image processing system and may include an image acquirer, storage, or the like. It is also understood that in various embodiments, the height controller 340 may be part of or separate from the leveling sensor 330.

[0053]

[0064] 3A , the height controller 340 may include a signal processor 341 and an analyzer 342 according to an embodiment of the present disclosure. The signal processor 341 may include one or more processors. For example, the signal processor 341 may include a computer, a server, a mainframe host, a terminal, a personal computer, any type of mobile computing device, and the like, or a combination thereof. The signal processor 341 may be communicatively coupled to the detector 336 through a medium such as electrical conductors, a fiber optic cable, a portable storage medium, IR, Bluetooth, the Internet, a wireless network, a wireless radio, or a combination thereof, among others. The signal processor 341 may be configured to receive signals from the detector 336 and construct a light intensity image based on the signals from the detector 336.

[0054]

[0065] In some embodiments, the analyzer 342 may be configured to determine whether the wafer 321 is positioned at a target height or whether the wafer 321 is displaced from the target height. The analyzer 342 may further be configured to determine the degree of vertical displacement of the wafer 321. In some embodiments, the analyzer 342 is configured to cross-correlate measurement data of the projection pattern on the wafer 321 with reference data. In some embodiments, the analyzer 342 may be configured to cross-correlate a light intensity image of the projection pattern on the wafer 321 with a predetermined reference light intensity image. According to embodiments of the present disclosure, the reference light intensity image may be a light intensity image obtained by using a projection pattern equivalent to the projection pattern currently being used to inspect the target wafer 321. In some embodiments, the reference light intensity image may be obtained by projecting a projection pattern onto a nominal reference wafer and then measuring the projected pattern of the projection pattern on the nominal reference wafer. Here, the reference wafer may have a flat surface and be positioned at a target position (e.g., at a target height) when taking the reference light intensity image. In some embodiments, the reference light intensity image may be taken before inspecting the target wafer 321 and may be stored in storage (not shown), which may be located internal or external to the inspection system 300. The analyzer 342 may access the reference light intensity image stored in storage or may receive the reference light intensity image from storage as needed.

[0055]

[0066] In some embodiments, the analyzer 342 can determine the vertical displacement of the wafer 321 based on the cross-correlation results between the measured light intensity image corresponding to the gradually decreasing projection pattern and the reference light intensity image. If the center of the projection pattern does not coincide with position x=0 (e.g., the focus of the primary electron beam), the cross-correlation graph has a maximum peak value at x≠0. In some embodiments, the analyzer 342 can determine the vertical displacement of the wafer 321 based on the shift. For example, if the maximum peak value of the cross-correlation graph is at x=5, the analyzer 342 can determine that the wafer 321 should be raised to move the center C of the projection pattern to position x=0. If the maximum peak value of the cross-correlation graph is at x=−5, the analyzer 342 can determine that the wafer 321 should be lowered to move the center C of the projection pattern to position x=0. In some embodiments, the analyzer 342 can determine the vertical displacement of the wafer 321 based on the shift amount of the maximum peak value of the cross-correlation graph. In some embodiments, the relationship between the vertical displacement of the wafer and the shift amount of the projection pattern can be established in advance based on experiments, measurements, tests, etc.

[0056]

[0067] In some embodiments, the height controller 340 can further include a stage motion controller 343 configured to adjust the height of the wafer 321 in response to the determined vertical displacement. The stage motion controller 343 can control the stage 320 to move the wafer 321 based on the vertical displacement determined by the analyzer 342.

[0057]

[0068] In some embodiments, the height controller 340 may further include a beam controller 344 configured to adjust the focal plane of the electron beam 312 in response to the determined vertical displacement. The beam controller 344 may adjust the landing energy (e.g., voltage) of the electron beam 312 to move the focal point of the electron beam 312 up or down the z-axis based on the vertical displacement determined by the analyzer 342.

[0058]

[0069] 3A and 3B describe a leveling sensor 330 that can be used to determine the deviation or vertical displacement of the wafer 321 relative to a single target height (e.g., target height 321_T). The following paragraphs describe leveling sensors that can be used to determine the vertical displacement of the wafer 321 relative to multiple target heights. In some embodiments, the target height is the distance between a reference plane, such as the surface 460, which is the bottom surface of the electron beam tool 310, and the focal point of the electron beam 312 in the Z-axis. In other words, the target height is the distance between the target plane in the Z-axis and the surface 460 of the electron beam tool 310 where the electron beam 312 of a specified landing energy is focused on the wafer 321.

[0059]

[0070] FIG. 4A illustrates an inspection system 400 with a multi-acting height leveling sensor 430 consistent with embodiments of the present disclosure. In some embodiments, the inspection system 400 is similar to the inspection system 300. Some inspection systems, such as the inspection system 400, may use electron beams of various landing energies to inspect the wafer 321. As the landing energy changes, the focus of the electron beam changes, resulting in the need to position the wafer 321 at various heights (e.g., a first target height 421a, a second target height 421b, a third target height 421c, or other target heights). Thus, a multi-landing energy system may require detection of the height displacement of the wafer 321 at each of multiple target heights to support various landing energies. For example, the first target height 421a may be 6 mm at a first landing energy of the electron beam 312, the second target height 421b may be 4.5 mm at a second landing energy of the electron beam 312, and the third target height 421c may be 1.5 mm at a third landing energy of the electron beam 312, and the leveling sensor 430 may have to detect the vertical displacement and level of the wafer 321 at each of these target heights. The leveling sensor 430 may be in communication with a controller circuit, such as a height controller 340, such that the output of the leveling sensor 430 is analyzed and used to further adjust the height of the wafer.

[0060]

[0071] In some embodiments, the leveling sensor 430 may include a radiation source 431, a beam splitter component 404, a light receiving component 408, and a detector 436. The radiation source 431 projects a primary light beam 432 onto the wafer 321 through a selectively light-transmitting object 433. The beam splitter component 404 splits the primary light beam 432 into multiple beamlets, such as beamlets 433a-c, each of which is projected onto the wafer 321 at a different position on the wafer 321. A projection pattern formed by the primary light beam 332 passing through the selectively light-transmitting object 333 is projected onto the wafer 321 at different positions by the primary beamlets 433a-c. When the primary beamlets 433a-c strike the surface of the wafer 321, they are reflected or diffracted from the wafer 321 as secondary beamlets 435a-c, respectively. For example, primary beamlet 433a is reflected or diffracted from wafer 321 positioned at current height 421x as secondary beamlet 435a, primary beamlet 433b is reflected or diffracted as secondary beamlet 435b, primary beamlet 433c is reflected or diffracted as secondary beamlet 435c, and so on. Secondary beamlets 435a-c are received by receiving component 408, which further directs secondary beamlets 435a-c to detector 436 as secondary light beams 435. Detector 436 detects secondary beamlets 435a-c to form multiple images, with each image formed by a different secondary beamlet 435a-c. For example, a first image is formed by secondary beamlet 435a, a second image is formed by secondary beamlet 435b, a third image is formed by secondary beamlet 435c, and so on. Furthermore, each image corresponds to a projected pattern on the wafer 321 in a different region of interest (ROI) on the wafer 321. For example, a first image corresponds to an image of a first ROI 445a, a second image corresponds to a second ROI 445b, a third image corresponds to a third ROI 445c, and so on.

[0061]

[0072] In some embodiments, the light receiving component 408 includes multiple light reflecting components, such as light reflecting components 408a-c. By way of example, the light reflecting components may include beam splitters, dichroic mirrors, or other light reflecting components. The light reflecting components 408a-c are positioned at specific angles to support different target heights (e.g., determining the vertical displacement of the wafer 321 relative to multiple target heights). That is, each light reflecting component is configured to assist in determining the vertical displacement of the wafer 321 relative to a different target height. For example, the first light reflecting component 408a may be configured to assist in detecting the vertical displacement of the wafer 321 relative to the first target height 421a, the second light reflecting component 408b may be configured to assist in detecting the vertical displacement of the wafer 321 relative to the second target height 421b, the third light reflecting component 408c may be configured to assist in detecting the vertical displacement of the wafer 321 relative to the third target height 421c, and so on.

[0062]

[0073] The image detected by the detector 436 is analyzed using the height controller 340 to detect the vertical displacement of the wafer 321 relative to a particular target height. As described with reference to at least FIGS. 3A and 3B , the height controller 340 may be configured to determine the vertical displacement of the wafer 321 relative to a specified target height by comparing a detected or measured image of a pattern projected onto the wafer 321 with a reference image. For example, to determine a first vertical displacement 451a of the wafer 321 relative to a first target height 421a, the height controller 340 may be configured to compare a first image of the pattern projected onto the wafer 321, formed via a first optical reflecting component 408a configured to support the first target height 421a, with a reference image corresponding to the first target height 421a. In some embodiments, the reference image may be obtained by projecting the projection pattern onto a nominal reference wafer positioned at the specified target height and then measuring the projected pattern of the projection pattern on the nominal reference wafer. In some embodiments, the reference image corresponding to the first target height 421 a may be obtained by projecting a projection pattern onto a nominal reference wafer positioned at the first target height 421 a and then measuring the projected pattern of the projection pattern on the nominal reference wafer. In some embodiments, comparing the detected image with the reference image includes cross-correlating a light intensity image of the detected image with a light intensity image of the reference image, as described with reference to at least Figures 3A and 3B or U.S. Provisional Patent Application No. 62 / 989,488, which is incorporated by reference in its entirety, and determining a vertical displacement of the wafer 321 based on the cross-correlation.

[0063]

[0074] After determining the first vertical displacement 451a, which is the amount of height that the wafer 321 must move along the z-axis from its current height 421x to be positioned at the first target height 421a, the height controller 340 may adjust the height of the stage 320 based on the first vertical displacement 451a so that the wafer 321 may be positioned at the first target height 421a. For example, the height controller 340 may generate a control signal that causes the stage motion controller 343 to control the stage 320 to move the wafer 321 from the current height 421x to the first target height 421a based on the first vertical displacement 451a.

[0064]

[0075] Vertical displacements for the second target height 421b and the third target height 421c may be determined similarly. For example, to determine a second vertical displacement 451b of the wafer 321 relative to the second target height 421b, the height controller 340 may be configured to compare a second image of the pattern projected onto the wafer 321, formed via a second light reflecting component 408b configured to support the second target height 421b, with a reference image corresponding to the second target height 421b. In another example, to determine a third vertical displacement 451c of the wafer 321 relative to a third target height 421c, the height controller 340 may be configured to compare a third image of the pattern projected onto the wafer 321, formed via a third light reflecting component 408c configured to support the third target height 421c, with a reference image corresponding to the third target height 421c.

[0065]

[0076] While the preceding paragraphs describe adjusting the height of the stage 320 based on the vertical displacements 451a-c, in some embodiments, the focus of the electron beam 312 may be adjusted to compensate for the vertical displacement in addition to or instead of adjusting the height of the stage 320. For example, to compensate for the first vertical displacement 451a of the wafer 321 relative to the first target height 421a, the beam controller 344 may be configured to adjust the focus of the electron beam 312 based on the first vertical displacement 451a such that the electron beam 312 is focused at the current height 421x instead of being focused at the first target height 421a. In another example, the beam controller 344 may be configured to adjust the focus of the electron beam 312 based on a portion of the first vertical displacement 451a so that the electron beam 312 focuses at a particular height between the current height 421x and the first target height 421at, and the stage motion controller 343 may be configured to adjust the height of the stage 320 based on the remaining portion of the first vertical displacement 451a so that the stage 320 is positioned at a particular height. In some embodiments, the beam controller 344 may change the focus of the electron beam 312 by adjusting the landing energy (e.g., voltage) of the electron beam 312. Further details regarding adjusting the focus of the electron beam 312 to compensate for vertical displacement are described in International Publication No. WO 2020 / 136094, which is incorporated herein by reference.

[0066]

[0077] In some embodiments, the beam splitter component 404 includes multiple beam splitters, such as, for example, a first beam splitter 404a, a second beam splitter 404b, and a third beam splitter 404c. By way of example, the beam splitters may be prisms, mirrors, or other beam splitting components. In some embodiments, the beam splitters may be non-polarizing beam splitting elements. In some embodiments, the beam splitters may be configured to vary the reflection-to-transmission ratio, for example, to ensure that all beamlets 433a-c have the same energy when they strike the surface of the wafer 321. The beam splitters may be configured at different angles such that each beam splitter directs a corresponding beamlet to a different target height. For example, the first beam splitter 404a may be positioned at an angle such that primary beamlet 433a is directed to the first target height 421a, i.e., when the wafer 321 is positioned at the first target height 421a, primary beamlet 433a is incident and corresponding secondary beamlet 435x is reflected from the wafer 321 and from the desired probe spot 445z on the wafer 321. Continuing the example, the second beam splitter 404b may be positioned at an angle such that primary beamlet 433b is directed to the second target height 421b, i.e., when the wafer 321 is positioned at the second target height 421b, primary beamlet 433b is incident and corresponding secondary beamlet 435y is reflected from the wafer 321 and from the desired probe spot 445z on the wafer 321. Similarly, the third beam splitter 404c can be positioned at an angle such that the primary beamlet 433c is directed to the third target height 421c, i.e., when the wafer 321 is positioned at the third target height 421c, the primary beamlet 433c is incident and the corresponding secondary beamlet 435z is reflected from the wafer 321 and from the desired probe spot 445z on the wafer 321.In some embodiments, the probe spot 445z may be a portion of the wafer 321 onto which the electron beam 312 of a specified landing energy is focused when the wafer 321 is positioned at a specified target height.

[0067]

[0078] In some embodiments, the beam splitter component 404 and the light receiving component 408 may be symmetrically positioned within the inspection system 400. For example, the beam splitter component 404 and the light receiving component 408 may be symmetrically positioned along the optical axis 312_1 of the primary electron beam 312 (e.g., as shown in FIG. 3B).

[0068]

[0079] In some embodiments, detector 436 may be a CCD camera or a CMOS sensor that detects secondary light beam 435 to form multiple images, each image corresponding to a different secondary beamlet 435a-c, similar to detector 336. In some embodiments, detector 436 may include multiple sensors, each sensor detecting a different image of the multiple images.

[0069]

[0080] In some embodiments, radiation source 431 may include a configurable light source that can provide broadband or narrowband radiation. For example, radiation source 431 may combine radiation of different wavelengths to generate primary light beam 432 having a wide wavelength range (e.g., 250 nm to 10 μm, or other range). Such a wavelength range may be obtained by combining radiation from various types of light sources, such as light sources 401 a, 401 b, or 401 c. By way of example, light sources 401 a, 401 b, or 401 c may include light-emitting diodes (LEDs), superluminescent diodes (SLDs), laser diodes, quantum cascade lasers, or other types of light sources. In some embodiments, radiation source 431 may combine radiation from light sources 401 a, 401 b, or 401 c using a radiation combining component (e.g., an X-cube prism or other illumination combining component). After passing through the beam splitter component 404, the primary light beam 432 from the radiation source 431 may be split into multiple primary beamlets 433a-c. In some embodiments, the primary light beam 432 is split into the primary beamlets 433a-c, but the wavelength of the primary light beam 432 is not split among the primary beamlets 433a-c, and each of the primary beamlets 433a-c may have all the wavelengths of the primary light beam 432. Thus, if the primary light beam 432 has a broadband spectrum, each of the primary beamlets 433a-c may include broadband light. In some embodiments, by using broadband light to image the wafer 321, the effect of materials on the surface of the wafer 321 when measuring the vertical displacement of the wafer 321 may be minimized because material variations and their effects on measurements may be compensated for by adjusting the wavelength of the primary light beam 432 within the broadband spectrum.

[0070]

[0081] 3A in that the leveling sensor 430 can be used to determine vertical displacement of the wafer 321 relative to multiple target heights, although the leveling sensor 430 can include at least some components that are similar to the components of the leveling sensor 330. For example, the leveling sensor 430 can include a first optical system 434, such as the first optical system 334, between the light source 431 and the wafer 321, and a second optical system 437, such as the second optical system 337, between the wafer 321 and the detector 436. In some embodiments, the first optical system 434 can include one or more optical lenses configured to focus the primary light beam 432 onto the wafer 321. In some embodiments, the second optical system 437 can include one or more optical lenses configured to focus the secondary light beam 435 onto the detector 436.

[0071]

[0082] In some embodiments, if the wafer 321 is tilted (e.g., not parallel to the surface 460), the wafer 321 may contact the surface 460 of the electron beam tool 310, potentially resulting in scratches and arcing. Such adverse events may be prevented by determining the level of the wafer 321 and correcting the level if the wafer 321 is not parallel to the surface 460. In some embodiments, the leveling sensor 430 may also be used to determine the level of the wafer 321 relative to a reference plane of the inspection system 400. For example, the leveling sensor 430 may be used to determine whether the wafer 321 is parallel to the surface 460 of the electron beam tool 310.

[0072]

[0083] FIG. 5 is a schematic diagram illustrating the operation of a leveling sensor to determine the level of a wafer, consistent with embodiments of the present disclosure. FIG. 5 shows a top view 500 of the electron beam tool 310 with the leveling sensor 430 and optical microscope 502 of the inspection system 400, a front view 525 of the electron beam tool 310 with the leveling sensor 430, and a front view 550 of the electron beam tool 310 with the optical microscope 502. In some embodiments, the inspection system 400 includes the optical microscope 502, which can be used for various purposes, including imaging patterns printed on the wafer 321, aligning the wafer 321, and other purposes. The optical microscope 502 can also be used in conjunction with the leveling sensor 430 to determine the level of the wafer 321.

[0073]

[0084] In some embodiments, the first height of the stage 320 or wafer 321 at a specified target height can be measured (e.g., using leveling sensor 330 or leveling sensor 430) by measuring the wafer surface profile along the level sensor axis BB' using an equation:

number

number

number

[0074]

[0085] A first tilt angle α between the electron beam tool 310 and the wafer 321 along an axis CC′ orthogonal to the axis BB′ of the leveling sensor 430 is given by:

number

[0075]

[0086] In some embodiments, because the electron beam tool 310 and wafer 321 may rotate along the projection direction BB′, one-dimensional information may not be sufficient to align the wafer 321 with the surface 460. In some embodiments, tilt measurements in other directions may be required to ensure that the wafer 321 is parallel to the surface 460 of the electron beam tool 310. Such additional tilt measurements may be achieved using existing components of the inspection system 400, such as the optical microscope 502, thereby eliminating the need for a new sensor. The top view 500 shows the relative positions of the leveling sensor 430 and the optical microscope 502 in the inspection system 400. In some embodiments, the optical microscope 502 may be positioned along the x-axis of the wafer 321 to obtain tilt measurements along the y-axis of the wafer 321. The height of the stage 320 may be adjusted to align with the focal plane of the optical microscope 502 to obtain a clear image of the wafer 321, and this height is referred to as ZA. A second tilt β of the wafer 321 along the y-axis may be expressed using the equation:

number

[0076]

[0087] Based on the first tilt α along the axis CC′ and the second tilt β along the y-axis, the third tilt γ along the x-axis can be calculated as follows:

number

[0077]

[0088] In some embodiments, the above measurements of various tilts may be obtained using height controller 340. After obtaining one or more of the above tilt measurements, height controller 340 may be configured to adjust the height of stage 320 based on the above tilt measurements so that wafer 321 is parallel to surface 460 of electron beam tool 310.

[0078]

[0089] The height controller 340 can be implemented in various ways. For example, the height controller 340 can be part of the leveling sensor 430. In another example, the height controller 340 can be part of an SEM used to acquire images of the wafer 321. In another example, the height controller 340 can be implemented in a distributed manner, for example, with a first portion within the inspection system 400 and a second portion within a computer system remote from the inspection system 400, such as a cloud-based system. In a cloud-based system implementation, in some embodiments, the first portion of the height controller 340 can send images captured by the detector 436 to the second portion of the height controller 340 within the cloud-based system. The second portion of the height controller 340 can analyze the images to determine the vertical displacement or levelness of the wafer 321 and send control signals to the first portion to adjust the stage 320. The first part may then adjust the stage 320 based on the vertical displacement or levelness of the wafer 321 to ensure that the wafer 321 is at a specified target height or parallel to the surface 460 of the electron beam tool 310.

[0079]

[0090] 4B illustrates a second multi-action height leveling sensor 475 consistent with embodiments of the present disclosure. In some embodiments, the second multi-action height leveling sensor 475 may operate in a manner similar to the multi-action height leveling sensor 430 of FIG. 4A. However, the radiation source 471 of the second multi-action height leveling sensor 475 may be configured differently from the radiation source 431 of the leveling sensor 430. For example, the radiation source 471 may use dichroic mirrors 472a, 472b, or 472c to combine radiation from light sources 401a, 401b, or 401c with different wavelengths to generate the primary light beam 432. Because the other components of the leveling sensor 475 operate similarly to the leveling sensor 430, their description is omitted for the sake of brevity.

[0080]

[0091] 4C illustrates a third multi-action height leveling sensor 480 consistent with embodiments of the present disclosure. In some embodiments, the third multi-action height leveling sensor 480 may operate in a manner similar to the multi-action height leveling sensor 430 of FIG. 4A. However, unlike the leveling sensor 430, which may have a single detector 436, the third multi-action height leveling sensor 480 may have multiple detectors 486a-c. Similarly, unlike the leveling sensor 430, which may have a single optical lens system 437, the third multi-action height leveling sensor 480 may have multiple optical lenses 487a-c between the wafer 321 and the detectors 486a-c. In some embodiments, each secondary beamlet (e.g., secondary beamlets 435a-c) reflected or diffracted from the wafer 321 is directed by the receiving component 408 to a different pair of optical lens and detector within the leveling sensor 480. For example, first optical reflecting component 408a, configured to support first target height 421a, is configured to direct secondary beamlet 435a to optical lens 487a and detector 486a pair. Similarly, second optical reflecting component 408b, configured to support second target height 421b, is configured to direct secondary beamlet 435b to optical lens 487b and detector 486b pair. Similarly, third optical reflecting component 408c, configured to support third target height 421c, is configured to direct secondary beamlet 435c to optical lens 487c and detector 486c pair. Thus, each of detectors 486a-c has a different image corresponding to a different target height.

[0081]

[0092] The light reflecting components 408a-c of the leveling sensor 480 may include beam splitters, dichroic mirrors, or other light reflecting components. In some embodiments, the light reflecting components 408a-c are dichroic mirrors. The other components of the leveling sensor 480 operate similarly to the leveling sensor 430, and therefore their description is omitted for the sake of brevity.

[0082]

[0093] 4D illustrates a fourth multi-action height leveling sensor 490 consistent with embodiments of the present disclosure. In some embodiments, the fourth multi-action height leveling sensor 490 may operate in a manner similar to the multi-action height leveling sensor 430 of FIG. 4A. However, unlike the leveling sensor 430, which may have a single detector 436, the fourth multi-action height leveling sensor 490 may have multiple detectors 496a-c. In some embodiments, each secondary beamlet (e.g., secondary beamlets 435a-c) reflected or diffracted from the wafer 321 is directed by the light receiving component 408 to a different detector within the leveling sensor 480. For example, the first optical reflecting component 408a, configured to support the first target height 421a, is configured to direct the secondary beamlet 435a to the detector 496a. Similarly, second optical reflecting component 408b, configured to support second target height 421b, is configured to direct secondary beamlet 435b to detector 496a. Similarly, third optical reflecting component 408c, configured to support third target height 421c, is configured to direct secondary beamlet 435c to detector 496c. Thus, each of detectors 496a-c has a different image corresponding to a different target height.

[0083]

[0094] The light reflecting components 408a-c of the leveling sensor 490 may include beam splitters, dichroic mirrors, or other light reflecting components. In some embodiments, the light reflecting components 408a-c are dichroic mirrors. The other components of the leveling sensor 490 operate similarly to the leveling sensor 430, and therefore their description is omitted for the sake of brevity.

[0084]

[0095] 6 is a flow diagram of a process 600 for determining the deviation or vertical displacement of a wafer relative to multiple target heights consistent with embodiments of the present disclosure. In operation P601, a radiation beam from a radiation source of a level sensor (e.g., leveling sensor 430) passes through a pattern to project the pattern onto the wafer. For example, primary light beam 432 passes through selectively light-transmissive object 433 to project a corresponding pattern onto wafer 321. In some embodiments, primary light beam 432 is split into multiple beamlets (e.g., primary beamlets 433a-c), each of which reflects off wafer 321. Each beamlet may contain light of multiple wavelengths (e.g., all wavelengths of primary light beam 432, which may have a broadband spectrum). Primary beamlets 433a-c reflect off wafer 321 as secondary beamlets 435a-c, respectively.

[0085]

[0096] In operation P603, multiple images 605 of the pattern are generated based on beamlets reflecting off the wafer 321. In some embodiments, each image is formed by a different beamlet to support measurement of the deviation (or vertical displacement) of the wafer 321 relative to a different target height. For example, the first image 605a is formed based on the secondary beamlet 435a and supports measurement of the first vertical displacement 451a of the wafer 321 relative to the first target height 421a (e.g., as described with reference to at least FIG. 4A ). Similarly, the second image 605b is formed based on the secondary beamlet 435b and supports measurement of the second vertical displacement 451b of the wafer 321 relative to the second target height 421b. Similarly, the third image 605c is formed based on the secondary beamlet 435c and supports measurement of the third vertical displacement 451c of the wafer 321 relative to the third target height 421c.

[0086]

[0097] In operation P605, a first vertical displacement 451a of the wafer 321 from the first target height 421a is determined based on a first image 605a that supports measuring the vertical displacement of the wafer 321 relative to the first target height 421a. For example, the first image 605a is compared to a reference image that corresponds to the first target height 421a (e.g., as described with reference to at least FIGS. 3A, 3B, and 4A), and the first vertical displacement 451a is determined based on the comparison.

[0087]

[0098] After determining the first vertical displacement 451a, which is the amount of height that the wafer 321 must move along the z-axis from its current height 421x to be positioned at the first target height 421a, the height controller 340 can adjust the height of the stage 320 based on the first vertical displacement 451a so that the wafer 321 can be positioned at the first target height 421a. Alternatively, or in addition to adjusting the height of the stage 320, the height controller 340 can adjust the focus of the electron beam 312 based on the first vertical displacement 451a, for example, to focus at the current height 421x rather than the first target height 421a.

[0088]

[0099] 7 is a flow diagram of a process 700 for determining wafer levelness consistent with an embodiment of the present disclosure. In operation P701, a first height of the wafer 321 is obtained using a leveling sensor (e.g., leveling sensor 430). The first height 705z(0) at position "0", which is the center of the electron beam tool 310, is measured using at least equation (1) described with reference to FIG. 5.

[0089]

[0100] In operation P703, a first tilt of the wafer 321 along a first axis is determined based on the first height 705. For example, a first tilt 707α between the electron beam tool 310 and the wafer 321 along an axis CC′ that is orthogonal to the axis BB′ of the leveling sensor 430 is obtained based on the first height 705 using at least equation (2) described with reference to FIG.

[0090]

[0101] In operation P705, a second tilt of the wafer 321 along the y-axis is determined based on the first height 705, a second height of the wafer 321 measured from the x-axis, and the distance between a reference point of the inspection system and the center of the optical microscope of the inspection system on the x-axis. In some embodiments, the second height corresponds to the height at which the wafer 321 is located at the focal plane of the optical microscope 502. Thus, the height of the stage 320 is adjusted until the wafer 321 is located at the focal plane of the optical microscope 502, which is the second height ZA. In some embodiments, the distance L is determined as the distance between the center "O" of the electron beam tool 310 and the center "A" of the optical microscope 502. The second tilt 709β is then determined based on the first height 705, the second height ZA, and the distance L using at least equation (3) described with reference to FIG. 5 .

[0091]

[0102] In operation P707, a third tilt of the wafer 321 along the x-axis is determined based on the first tilt 707, the second tilt 709, and the angle between the x-axis and the axis of the leveling sensor 430. For example, the third tilt 711γ along the x-axis can be obtained based on the first tilt 707α along the axis CC′, the second tilt β along the y-axis, and θ, the angle between the x-axis and the BB′ axis of the leveling sensor 430, using at least equations 4-7 described with reference to FIG.

[0092]

[0103] After obtaining one or more of the above tilt measurements, the height controller 340 can be configured to adjust the height of the stage 320 based on the above tilt measurements so that the wafer 321 is parallel to the surface 460 of the electron beam tool 310.

[0093]

[0104] 8 is a block diagram illustrating a computer system 800 that can assist in implementing a method, flow, module, component, or apparatus disclosed herein. The computer system 800 includes a bus 802 or other communication mechanism for communicating information and a processor 804 (or multiple processors 804 and 805) coupled with the bus 802 for processing information. The computer system 800 also includes a main memory 806, such as a random access memory (RAM) or other dynamic storage device, coupled to the bus 802 for storing information and instructions to be executed by the processor 804. The main memory 806 may also be used for storing temporary variables or other intermediate information during execution of instructions to be executed by the processor 804. The computer system 800 further includes a read-only memory (ROM) 808 or other static storage device coupled to the bus 802 for storing static information and instructions for the processor 804. A storage device 810, such as a magnetic or optical disk, is provided and coupled to the bus 802 for storing information and instructions.

[0094]

[0105] Computer system 800 may be coupled via bus 802 to a display 812, such as a cathode ray tube (CRT) or flat-panel or touch-panel display, for displaying information to a computer user. An input device 814, including alphanumeric and other keys, is coupled to bus 802 for communicating information and command selections to processor 804. Another type of user input device is a cursor control 816, such as a mouse, trackball, or cursor direction keys, for communicating directional information and command selections to processor 804 and for controlling cursor movement on display 812. This input device typically has two degrees of freedom in two axes—a first axis (e.g., x) and a second axis (e.g., y)—that allow the device to be positioned in a plane. Touch-panel (screen) displays may also be used as input devices.

[0095]

[0106] According to one embodiment, portions of one or more methods described herein may be performed by computer system 800 in response to processor 804 executing one or more sequences of one or more instructions contained in main memory 806. Such instructions may be read into main memory 806 from another computer-readable medium, such as storage device 810. Execution of the sequences of instructions contained in main memory 806 causes processor 804 to perform the process steps described herein. Also, one or more processors in a multi-processing arrangement may be used to execute the sequences of instructions contained in main memory 806. In alternative embodiments, hard-wired circuitry may be used in place of or in combination with software instructions. Thus, the description herein is not limited to any specific combination of hardware circuitry and software.

[0096]

[0107] The term "computer-readable medium," as used herein, refers to any medium that participates in providing instructions to processor 804 for execution. Such media may take many forms, including, but not limited to, non-volatile media, volatile media, and transmission media. Non-volatile media include, for example, optical or magnetic disks, such as storage device(s) 810. Volatile media include dynamic memory, such as main memory 806. Transmission media include coaxial cables, copper wire, and fiber optics, including the wires that comprise bus 802. Transmission media may also take the form of acoustic or light waves, such as those generated during radio frequency (RF) and infrared (IR) data communications. Common forms of computer-readable media include, for example, floppy disks, flexible disks, hard disks, magnetic tape, any other magnetic media, CD-ROMs, DVDs, any other optical media, punch cards, paper tape, any other physical media with a pattern of holes, RAM, PROMs, and EPROMs, FLASH-EPROMs, any other memory chip or cartridge, a carrier wave as described below, or any other medium from which a computer can read.

[0097]

[0108] Various forms of computer-readable media may be involved in carrying one or more sequences of one or more instructions to processor 804 for execution. For example, the instructions may initially be carried on a magnetic disk of a remote computer. The remote computer may load the instructions into a dynamic memory and send the instructions over a telephone line using a modem. A modem local to computer system 800 may receive the data on the telephone line and use an infrared transmitter to convert the data to an infrared signal. An infrared detector coupled to bus 802 may receive the data carried in the infrared signal and place the data on bus 802. Bus 802 carries the data to main memory 806, from which processor 804 retrieves and executes the instructions. The instructions received by main memory 806 may optionally be stored on storage device 810 either before or after execution by processor 804.

[0098]

[0109] Computer system 800 may also include a communication interface 818 coupled to bus 802. The communication interface 818 provides a two-way data communication coupling to a network link 820 that is connected to a local network 822. For example, the communication interface 818 may be an Integrated Services Digital Network (ISDN) card or a modem to provide a data communication connection to a corresponding type of telephone line. As another example, the communication interface 818 may be a local area network (LAN) card to provide a data communication connection to a compatible LAN. A wireless link may also be implemented. In such implementations, the communication interface 818 sends and receives electrical, electromagnetic or optical signals that carry digital data streams representing various types of information.

[0099]

[0110] Network link 820 typically provides data communication through one or more networks to other data devices. For example, network link 820 may provide a connection through local network 822 to a host computer 824 or to data equipment operated by an Internet Service Provider (ISP) 826. ISP 826, in turn, provides data communication services through the world wide packet data communication network (now commonly referred to as the "Internet" 828). Both local network 822 and the Internet 828 use electrical, electromagnetic, or optical signals that carry digital data streams. The signals through the various networks and the signals on network link 820 and through communication interface 818, which carry the digital data to and from computer system 800, are exemplary forms of carrier waves transporting the information.

[0100]

[0111] Computer system 800 can send messages and receive data, including program code, through one or more networks, network link 820 and communication interface 818. In the Internet example, a server 830 might send a requested code for an application program through Internet 828, ISP 826, local network 822 and communication interface 818. Such a downloaded application might, for example, provide all or a portion of the methods described herein. The received code may be executed by processor 804 as received, and / or stored in storage device 810 or other non-volatile storage for later execution. In this manner, computer system 800 may obtain the application code in the form of a carrier wave.

[0101]

[0112] The embodiments may be further described using the following clauses. 1. A radiation source configured to provide a beam of radiation; a beam splitter configured to split the radiation beam into a plurality of beamlets, each beamlet reflecting off the substrate; a plurality of optically reflective components, each optically reflective component associated with one of the beamlets and configured to support different target heights relative to the substrate by enabling detection of the height or levelness of the substrate based on the associated beamlet reflecting off the substrate; 12. An inspection device comprising: 2. The inspection apparatus described in clause 1, further comprising a detector configured to detect multiple images of the pattern projected onto the substrate by receiving beamlets from the optical reflecting component, each image being formed by a different beamlet. 3. The inspection apparatus of clause 2, further comprising a controller circuit configured to compare a first image of the image with a reference image corresponding to a first target height of different target heights, and determine a first deviation value of the substrate from the first target height based on the comparison. 4. An inspection apparatus as described in clause 3, wherein the first image is formed by one of the beamlets associated with one of the optical reflecting components, and the one of the optical reflecting components is configured to enable measurement of a first deviation value of the substrate relative to a first target height. 5. An inspection apparatus as described in clause 3, further comprising a stage motion controller having circuitry configured to adjust the height of a stage configured to hold a substrate to position the substrate at a first target height, wherein the stage height is adjusted based on the first deviation value. 6. The inspection apparatus of clause 3, further comprising a beam controller for adjusting a focus of the charged particle beam incident on the substrate to at least partially compensate for the first deviation value. 7. The controller circuit is generating a first image as a light intensity image of the pattern; cross-correlating the light intensity image with a reference image to determine a first deviation value; 4. The inspection apparatus of claim 3, configured to compare the first image with the reference image by: 8. An inspection apparatus according to clause 3, wherein the reference image is obtained by projecting a pattern onto the surface of a reference substrate. 9. The inspection apparatus of clause 1, wherein the radiation source is configured to provide at least one of broadband radiation or narrowband radiation. 10. An inspection apparatus as described in clause 1, wherein the radiation source is configured to combine radiation from multiple narrowband sources to form broadband radiation, each beamlet comprising light of multiple wavelengths. 11. The inspection apparatus of clause 10, wherein the multiple wavelengths of light facilitate minimizing height detection errors caused by variations in the substrate material. 12. An inspection apparatus as described in clause 1, wherein the radiation source includes a prism for combining radiation from multiple narrowband sources. 13. An inspection apparatus as described in clause 1, wherein the radiation source includes a plurality of dichroic mirrors for combining radiation from a plurality of narrowband sources. 14. The inspection apparatus of clause 1, wherein the beam splitter includes a set of light-splitting components configured to have different reflection-to-transmission ratios to direct each of the beamlets onto the substrate with the same energy. 15. An inspection apparatus as described in clause 1, wherein the plurality of optically reflecting components includes a beam splitter, and at least a portion of all beamlets that reflect off the substrate are received by a single photodetector. 16. An inspection apparatus as described in clause 1, wherein each of the beamlets that reflect from the substrate is received by a different detector. 17. The inspection apparatus of clause 1, wherein the plurality of optically reflective components include mirrors, and each of the beamlets that reflect off the substrate is received by a different detector. 18. The controller circuit is determining a first height of the substrate based on the first deviation value; determining a first tilt of the substrate along a first axis based on the first height, the first axis being orthogonal to a defined axis along which the beam splitter and the light reflecting component are aligned; 4. The inspection device of clause 3, configured to: 19. The controller circuit is an optical microscope of the inspection apparatus, the optical microscope being positioned along an x-axis of the substrate; adjusting the first height to match a second height at which the substrate is located in a focal plane of the optical microscope; Determine a second tilt of the substrate along the y-axis based on the first height, the second height, and a distance along the x-axis between a reference point associated with the inspection device and the center of the optical microscope. 19. The inspection device of clause 18, configured to: 20. The controller circuit is determining a third tilt of the substrate along the x-axis based on the first tilt, the second tilt, and the angle between the x-axis and the prescribed axis; determining a levelness based on the first tilt, the second tilt, or the third tilt, the levelness indicating whether the substrate is parallel to a reference plane of the inspection apparatus; 19. The inspection device of claim 18, configured to: 21. An inspection apparatus as described in clause 1, wherein each of the target heights is a distance between a target plane in the z-axis and a portion of the inspection apparatus at which a charged particle beam of a specified landing energy is focused onto the substrate. 22. A stage configured to hold a substrate at one of a plurality of target heights; A level sensor, a radiation source configured to provide a beam of radiation; a beam splitter configured to split the radiation beam into a plurality of beamlets, each beamlet reflecting off the substrate; a plurality of optically reflective components, each optically reflective component associated with one of the beamlets and configured to support different target heights relative to the substrate by enabling detection of the height or levelness of the substrate based on the beamlet reflecting off the substrate; a detector configured to detect an image from at least one of the beamlets that reflects off the substrate; Including a level sensor and a controller circuit configured to compare a first one of the images to a reference image corresponding to a first one of the target heights to determine a deviation of the substrate from the first target height; Multi-working height inspection device including: 23. A multi-action height inspection apparatus as described in clause 22, configured to generate a control signal for adjusting the stage height based on the deviation value to position the substrate at a first target height. 24. The multi-action height inspection apparatus of clause 22, wherein the controller circuit is configured to generate a control signal for adjusting a focus of the charged particle beam incident on the substrate to at least partially compensate for the deviation value. 25. A multi-action height inspection apparatus as described in clause 22, wherein the first image is formed by one of the beamlets associated with one of the light reflecting components configured to enable measurement of a first deviation value of the substrate relative to a first target height. 26. A multi-action height inspection apparatus as described in clause 22, wherein each of the target heights is a distance between a target plane in the z-axis and a portion of the multi-action height inspection apparatus at which a charged particle beam of a specified landing energy is focused onto the substrate. 27. The controller circuit is determining a first height of the stage based on the deviation value; determining a first tilt of the substrate along a first axis based on the first height, the first axis being orthogonal to the axis of the level sensor; determining a second tilt of the substrate along a y-axis of the substrate based on the first height, a second height, the second height corresponding to a stage height at which the substrate is positioned at a focal plane of the optical microscope, and a distance on an x-axis of the substrate between the center of the charged particle beam and the center of the optical microscope of the multi-action height inspection device; determining a third tilt of the substrate along the x-axis based on the first tilt, the second tilt, and the angle between the x-axis and the axis of the level sensor; 23. The multi-action height inspection apparatus of claim 22, configured to: 28. A multi-action height inspection apparatus as described in clause 27, wherein the controller circuit is configured to determine a levelness based on the first tilt, the second tilt, or the third tilt, the levelness indicating whether the substrate is parallel to a charged particle beam tool of the multi-action height inspection apparatus. 29. A multi-action height inspection apparatus as described in clause 22, wherein the plurality of optically reflecting components includes a beam splitter, and at least a portion of all beamlets that reflect off the substrate are received by a single photodetector. 30. A multi-action height inspection apparatus as described in clause 22, wherein when the plurality of light reflecting components includes dichroic mirrors, each of the beamlets that reflect off the substrate is received by a different photodetector. 31. A multi-action height inspection apparatus as described in clause 22, wherein the radiation source includes a prism for combining radiation from multiple narrowband sources. 32. A multi-action height inspection apparatus as described in clause 22, wherein the radiation source includes a plurality of dichroic mirrors for combining radiation from a plurality of narrowband sources. 33. A multi-action height inspection apparatus as described in clause 22, wherein the detector is configured to detect an image of the substrate from each of the beamlets. 34. A multi-action height inspection apparatus as described in clause 22, wherein the detector includes a camera including a plurality of sensors, each sensor configured to detect an image of the substrate from one of the beamlets. 35. A multi-action height inspection apparatus as described in clause 22, wherein the detector includes a plurality of cameras, each camera configured to detect an image of the substrate from one of the beamlets. 36. A method for adjusting the working height of a substrate in an inspection system including a level sensor, comprising: projecting a pattern onto a substrate with a radiation beam from a radiation source of the level sensor, the radiation beam being split into a plurality of beamlets each of which reflects off the substrate; generating a plurality of images of the pattern by receiving beamlets that reflect off the substrate, each image formed by a different beamlet and supporting measurement of deviations of the substrate from different target heights; determining a first deviation value of the substrate from the first target height based on a first image of the images supporting measurement of the deviation value of the substrate from the first target height; A method comprising: 37. The method of clause 36, further comprising adjusting the height of the substrate based on the first deviation value to position the substrate at a first target height. 38. The method of clause 36, further comprising adjusting a focus of the charged particle beam incident on the substrate to at least partially compensate for the first deviation value. 39. Determining the deviation value is comparing the first image to a reference image corresponding to a first target height; determining a first deviation value for the substrate based on the comparison; and 37. The method of claim 36, comprising: 40. The method of clause 36, wherein generating the plurality of images includes generating the first image from one of the beamlets associated with one of a plurality of optical reflective components of a level sensor configured to enable measurement of a deviation value of the substrate relative to a first target height, each reflective component configured to enable measurement of a deviation value of the substrate relative to a different target height. 41. The method of clause 36, further comprising determining a levelness of the substrate, indicating whether the substrate is parallel to a reference plane of the inspection system. 42. Determining horizontality is determining a first height of the substrate based on the first deviation value; determining a first tilt of the substrate along a first axis based on the first height, the first axis being orthogonal to the axis of the level sensor; determining a second tilt of the substrate along the y-axis based on the first height, a second height, the second height corresponding to a height of the substrate at which the substrate is located in a focal plane of the optical microscope, and a distance on the x-axis of the substrate between a reference point of the inspection system and a center of the optical microscope of the inspection system; determining a third tilt of the substrate along the x-axis based on the first tilt, the second tilt, and an angle between the x-axis and the axis of the level sensor; 42. The method of claim 41, comprising: 43. A non-transitory computer-readable medium having instructions that, when executed by a computer, cause the computer to perform a method for adjusting the working height of a substrate in an inspection system including a level sensor, the method comprising: projecting a pattern onto a substrate with a radiation beam from a radiation source of the level sensor, the radiation beam being split into a plurality of beamlets each of which reflects off the substrate; generating a plurality of images of the pattern by receiving beamlets that reflect off the substrate, each image formed by a different beamlet and supporting measurement of deviations of the substrate from different target heights; determining a first deviation value of the substrate from the first target height based on a first image of the images supporting measurement of the deviation value of the substrate from the first target height; 1. A non-transitory computer-readable medium comprising: 44. A non-transitory computer readable medium having instructions recorded thereon, the instructions, when executed by a computer, performing a method according to any of the preceding clauses.

[0102]

[0113] A non-transitory computer-readable medium may be provided that stores instructions for a processor of a controller (e.g., controller 50 of FIG. 1 ) to, among other things, perform image inspection, image acquisition, stage positioning, beam focusing, field adjustment, beam bending, condenser lens adjustment, charged particle source activation, beam deflection, and at least a portion of methods 600 and 700. Common forms of non-transitory medium include, for example, a floppy disk, a flexible disk, a hard disk, a solid-state drive, magnetic tape or any other magnetic data storage medium, a compact disk read-only memory (CD-ROM), any other optical data storage medium, any physical medium having a pattern of holes, random access memory (RAM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), flash EPROM or any other flash memory, non-volatile random access memory (NVRAM), cache, registers, any other memory chip or cartridge, and network-connected versions thereof.

[0103]

[0114] Relative dimensions of components in the figures may be exaggerated for clarity. In the description of the figures, the same or similar reference numbers refer to the same or similar components or entities, and only differences with respect to individual embodiments are discussed. As used herein, unless otherwise specified, the term "or" encompasses all possible combinations unless it is not feasible. For example, if it is specified that a component may include A or B, it may include A, or B, or A and B, unless otherwise specified or not feasible. As a second example, if it is specified that a component may include A, B, or C, it may include A, or B, or C, or A and B, or A and C, or B and C, or A, B, and C, unless otherwise specified or not feasible.

[0104]

[0115] It will be understood that the embodiments of the present disclosure are not limited to the exact construction described above and illustrated in the accompanying drawings, and that various modifications and changes can be made without departing from the scope thereof. The present disclosure has been described in conjunction with various embodiments, and other embodiments of the present invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.

[0105]

[0116] The above description is intended to be illustrative, not limiting. Thus, it will be apparent to one skilled in the art that modifications may be made as described without departing from the scope of the claims set forth below.

Claims

1. a radiation source configured to provide a beam of radiation; a beam splitter configured to split the radiation beam into a plurality of beamlets, each beamlet reflecting off a substrate, the beam splitter comprising a set of light splitting components; a plurality of optically reflective components, each optically reflective component associated with one of the beamlets and configured to support different target heights relative to the substrate by enabling detection of a height or level of the substrate based on the associated beamlet reflecting off the substrate; 12. An inspection device comprising:

2. The inspection apparatus of claim 1 , further comprising a detector configured to detect multiple images of the pattern projected onto the substrate by receiving the beamlets from the light reflecting component, each image being formed by a different beamlet.

3. comparing a first image of the images to a reference image corresponding to a first target height of the different target heights; determining a first deviation of the substrate from the first target height based on the comparison; 3. The inspection device of claim 2, further comprising a controller circuit configured to:

4. 4. The inspection apparatus of claim 3, wherein the first image is formed by one of the beamlets associated with one of the light reflecting components, the one of the light reflecting components configured to enable measurement of the first deviation value of the substrate relative to the first target height.

5. 4. The inspection apparatus of claim 3, further comprising: a stage motion controller having circuitry configured to adjust a height of a stage configured to hold the substrate to position the substrate at the first target height, the height of the stage being adjusted based on the first deviation value.

6. The inspection apparatus of claim 3 , further comprising a beam controller for adjusting a focus of a charged particle beam incident on the substrate to at least partially compensate for the first deviation value.

7. The controller circuit generating the first image as a light intensity image of the pattern; cross-correlating the light intensity image with the reference image to determine the first deviation value; 4. The inspection apparatus of claim 3, configured to compare the first image with the reference image by:

8. The inspection apparatus of claim 3 , wherein the reference image is obtained by projecting the pattern onto a surface of a reference substrate.

9. The inspection apparatus of claim 1 , wherein the radiation source is configured to provide at least one of broadband radiation or narrowband radiation.

10. The inspection apparatus of claim 1 , wherein the radiation source is configured to combine radiation from multiple narrowband sources to form broadband radiation, each beamlet comprising multiple wavelengths of light.

11. The inspection apparatus of claim 10 , wherein the plurality of wavelengths of light facilitates minimizing errors in detecting the height caused by variations in the material of the substrate.

12. The inspection apparatus of claim 1 , wherein the radiation source includes a prism for combining radiation from multiple narrowband sources.

13. 10. The inspection apparatus of claim 1, wherein the radiation source includes a plurality of dichroic mirrors for combining radiation from a plurality of narrowband sources.

14. The inspection apparatus of claim 1, wherein the set of light splitting components is configured to have different reflection-to-transmission ratios to direct each of the beamlets onto the substrate with the same energy.

15. 1. A non-transitory computer-readable medium having instructions that, when executed by a computer, cause the computer to perform a method for adjusting a working height of a substrate in an inspection system including a level sensor, the method comprising: projecting a pattern onto a substrate with a radiation beam from a level sensor radiation source, the radiation beam being split into a plurality of beamlets each reflecting off the substrate by passing through a beam splitter comprising a set of optical splitting components, each optical splitting component configured at a different angle such that a corresponding beamlet is directed to a different target height; generating a plurality of images of the pattern by receiving each of the beamlets reflecting off the substrate, each image being formed by a different beamlet of the plurality of beamlets; determining a first deviation of the substrate from a first target height based on a first image of the plurality of images, the first image being generated by beamlets reflected from the substrate in response to beamlets being incident on the substrate and directed to the first target height by a first light splitting component; 1. A non-transitory computer-readable medium comprising:

Images