Sensors and Sensor Systems

Abstract

To provide a sensor and a sensor system that can improve detection accuracy.SOLUTION: According to an embodiment, a sensor includes a housing, a sensor unit, and a film member. The housing includes a first housing member including an opening. The first housing member includes a first inner face and a first side face inside the opening. The sensor unit includes a sensor member including holes, and a sensor element. The sensor element and the sensor member have a first gap therebetween. The film member is porous. The film member includes an inside area and an outside area around the inside area. The outside area is opposite to the first inner face. The sensor member is between the sensor element and the inside area. The sensor member is opposite to the inside area. In a second direction intersecting a first direction from the sensor element to the sensor member, at least part of the inside area overlaps the first side face.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to sensors and sensor systems. [Background technology]

[0002] In gas sensors and the like, it is desirable to improve the detection accuracy. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-121910 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION Embodiments of the present invention provide sensors and sensor systems that allow for improved detection accuracy. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes a housing, a sensor unit, and a film member. The housing includes a first housing member including an opening. The first housing member includes a first inner surface and a first side surface inside the opening. The sensor unit includes a sensor member including a hole and a sensor element. A first gap is present between the sensor element and the sensor member. The film member is porous. The film member includes an inner region and an outer region around the inner region. The outer region faces the first inner surface. The sensor member is between the sensor element and the inner region. The sensor member faces the inner region. In a second direction intersecting a first direction from the sensor element to the sensor member, at least a portion of the inner region overlaps the first side surface. [Brief explanation of the drawings]

[0006] [Figure 1]FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. [Figure 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. FIG. 2 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. Fig. 2 is an enlarged view of a part of Fig. 1. As shown in Fig. 1 and Fig. 2, the sensor 110 according to the embodiment includes a housing 40, a sensor unit 10, and a film member 31.

[0009] The housing 40 includes a first housing member 41. The first housing member 41 includes an opening 41h. The first housing member 41 includes a first inner surface 41f and a first side surface 41s. The first side surface 41s is the inner surface of the opening 41h. The first side surface 41s intersects with the first inner surface 41f.

[0010] The sensor unit 10 includes a sensor element 11 and a sensor member 12. The sensor member 12 includes a hole 12h. The number of holes 12h is arbitrary. A first gap G1 is present between the sensor element 11 and the sensor member 12. The sensor member 12 is, for example, a lid portion. The film member 31 is porous. For example, the film member 31 is flexible. For example, the film member 31 may include a fluororesin. For example, the film member 31 may include polytetrafluoroethylene.

[0011] The film member 31 includes an inner region 31i and an outer region 31o. The outer region 31o is a region surrounding the inner region 31i. The boundary between these regions may be clear or unclear. The outer region 31o faces the first inner surface 41f. For example, the outer region 31o contacts the first inner surface 41f. The sensor member 12 is located between the sensor element 11 and the inner region 31i. The sensor member 12 is located between the first gap G1 and the inner region 31i. The sensor member 12 faces the inner region 31i. For example, the sensor member 12 contacts the inner region 31i.

[0012] A first direction D1 from the sensor element 11 to the sensor member 12 is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0013] 2, at least a portion of the inner region 31i overlaps with the first side surface 41s in the second direction D2. The second direction D2 is, for example, the X-axis direction. The second direction D2 may also be the Y-axis direction. The second direction D2 may be, for example, any direction along a plane (XY plane) that intersects with the Z-axis direction.

[0014] For example, a portion of the inner region 31i protrudes toward the outside space at the opening 41h. A portion of the inner region 31i may face a portion of the first side surface 41s. For example, a portion of the inner region 31i may contact a portion of the first side surface 41s.

[0015] As shown in FIG. 2, for example, the film member 31 includes a first film surface 31a and a second film surface 31b. The second film surface 31b faces the sensor member 12. The second film surface 31b is an inner surface. The first film surface 31a faces the space outside the opening 41h. The first film surface 31a is an outer surface. The second film surface 31b is located between the sensor member 12 and the first film surface 31a. At least a portion of the first film surface 31a is convexly curved. For example, at least a portion of the second film surface 31b is concave.

[0016] For example, the film member 31 is pushed outward by the sensor member 12. In this state, the film member 31 is fixed to the first housing member 41. The film member 31 is in close contact with the first housing member 41. The film member 31 is in close contact with the sensor member 12.

[0017] The film member 31 does not need to be adhered to other members. The film member 31 allows the gas to be detected to pass through. The film member 31 does not substantially allow liquid to pass through. The film member 31 prevents liquid (such as water) from entering the sensor unit 10.

[0018] A film member 31 having such properties has low adhesiveness. The film member 31 is fixed mechanically by another member, not by adhesion. In the embodiment, the film member 31 is fixed in a state in which it is pressed outward by the sensor member 12. This allows the film member 31 to be in close contact with the first housing member 41 and the sensor member 12. This prevents liquid from entering the sensor unit 10 from the outside. This allows the sensor unit 10 to operate stably. High detection accuracy can be maintained. According to the embodiment, a sensor capable of improving detection accuracy can be provided.

[0019] 2, for example, the sensor unit 10 may further include an element substrate 15. The sensor element 11 is located between the element substrate 15 and the sensor member 12. The element substrate 15 includes an element substrate surface 15f. The element substrate surface 15f faces the sensor element 11. The element substrate surface 15f is the upper surface of the element substrate 15.

[0020] The sensor member 12 includes a sensor member surface 12f. The sensor member surface 12f faces the inner region 31i. For example, the sensor member surface 12f is the upper surface of the sensor member 12.

[0021] The first inner surface 41f is the bottom surface of the first housing member 41. The distance along the first direction D1 between the element substrate surface 15f and the first inner surface 41f is defined as a first distance d1. The distance along the first direction D1 between the element substrate surface 15f and the sensor member surface 12f is defined as a second distance d2. The thickness along the first direction D1 of the inner region 31i is defined as a first thickness t1. The first distance d1 is shorter than the sum of the second distance d2 and the first thickness t1. Due to this relationship, the inner region 31i protrudes toward the outside space at the opening 41h.

[0022] For example, the absolute value of the difference between the first distance d1 and the above sum is not less than 0.001 times and not more than 1 time the first thickness t1.

[0023] 2, the sensor unit 10 may further include a support portion 13. The support portion 13 is fixed to the element substrate 15. The support portion 13 is located between the element substrate 15 and the sensor member 12. The support portion 13 supports the sensor member 12. This provides a first gap G1 between the sensor element 11 and the sensor member 12.

[0024] 2, the support portion 13 is located around the sensor element 11 in a plane (e.g., an XY plane) intersecting the first direction D1. A space (first space) surrounded by the element substrate 15, the support portion 13, the sensor member 12, and the film member 31 is substantially waterproof.

[0025] In the embodiment, the detection target gas can reach the first gap G1 through the opening 41h and the hole 12h. The film member 31 can prevent liquid from passing from the opening 41h to the first gap G1. The film member 31 can prevent water (liquid) from passing from the opening 41h to the first gap G1.

[0026] 1, for example, the housing 40 may include a second housing member 42 and a third housing member 43. In the first direction D1, the sensor unit 10 is located between the third housing member 43 and the first housing member 41. The second housing member 42 is connected to the first housing member 41 and the third housing member 43. The second housing member 42 is located around the sensor unit 10 in a plane (e.g., an XY plane) that intersects with the first direction D1. A space 40S inside the housing 40 is substantially waterproof.

[0027] The space (first space) surrounded by the element substrate 15, the support portion 13, the sensor member 12, and the film member 31 may be connected to a space 40S inside the housing 40. The space 40S is the portion inside the housing 40 excluding the first space.

[0028] As shown in FIGS. 1 and 2, the sensor unit 10 may include a first mounting substrate 16a. As shown in FIG. 2, the element substrate 15 is fixed to the first mounting substrate 16a. The first mounting substrate 16a may include various wiring layers. The wiring included in the element substrate 15 may be electrically connected to the wiring layers included in the first mounting substrate 16a by connecting members 17a (e.g., solder). The first mounting substrate 16a is, for example, a sensor substrate. The sensor substrate is provided with a circuit that can output sensor data in response to a request from, for example, a control substrate. The control substrate is, for example, a microcomputer. The sensor substrate may be provided with, for example, an integrated circuit (IC). The IC may include, for example, an analog-to-digital converter 75a, a capacitance-to-digital converter 75b, or a DC / DC converter 75c.

[0029] 1, the sensor unit 10 may further include a second mounting substrate 16b. A first mounting substrate 16a is provided between the second mounting substrate 16b and the element substrate 15. A control circuit may be provided between the second mounting substrate 16b and the first mounting substrate 16a. The control circuit may include, for example, at least one of a microcomputer and a wireless communication circuit. The second mounting substrate 16b may be provided with, for example, a circuit capable of controlling an IC provided on the first mounting substrate 16a.

[0030] As shown in FIG. 1, the first mounting board 16a may be fixed to the first housing member 41 by a structure .

[0031] 2, for example, the sensor member 12 may be fixed to the support portion 13 via an electrode 13e and a sensor fixing portion 13c provided on the support portion 13. The sensor fixing portion 13c is, for example, a conductive paste.

[0032] As shown in FIG. 2, the housing 40 may further include a fourth housing member 44. The outer region 31o is located between the fourth housing member 44 and the first inner surface 41f. The outer region 31o is fixed by the fourth housing member 44 and the first inner surface 41f. For example, a fixing member 47 may be provided. The fixing member 47 fixes the fourth housing member 44 to the first housing member 41. The fixing member 47 is, for example, a screw.

[0033] As shown in FIG. 2, the sensor 110 may further include a first elastic member 46a. The first elastic member 46a is located between the outer region 31o and the first housing member 41. The first elastic member 46a tightly contacts and fixes the outer region 31o to the first housing member 41. The first elastic member 46a may be, for example, an annular member. The first elastic member 46a may be, for example, an O-ring. For example, the first elastic member 46a is made of resin.

[0034] The sensor 110 may further include a second elastic member 46b. The second elastic member 46b is located between the fourth housing member 44 and the outer region 31o. The second elastic member 46b tightly contacts and fixes the outer region 31o to the fourth housing member 44. The second elastic member 46b may be, for example, an annular member. The second elastic member 46b may be, for example, an O-ring. For example, the second elastic member 46b is made of resin.

[0035] In the embodiment, for example, the sensor element 11 may include a capacitive MEMS gas sensor. The sensor element 11 may include a thermal conduction MEMS gas sensor. The sensor element 11 may include a catalytic combustion MEMS gas sensor. The sensor element 11 may include an oxide semiconductor MEMS gas sensor. The sensor element 11 may include at least one of the above gas sensors.

[0036] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 3, the sensor 111 according to this embodiment includes a dehumidifying unit 51. The remaining configuration of the sensor 111 may be the same as that of the sensor 110. The dehumidifying unit 51 can dehumidify the space 40S inside the housing 40. For example, the influence of humidity is suppressed, and the target gas can be detected with higher sensitivity.

[0037] A porous member 32 may be provided between the external space and the dehumidifying unit 51. This can prevent liquid from adhering to the dehumidifying unit 51. The porous member 32 may contain, for example, polytetrafluoroethylene. The porous member 32 may be fixed to the housing 40 by any method.

[0038] In this example, the sensor 111 includes a battery 53. The battery 53 is capable of supplying power to the sensor unit 10.

[0039] In this example, a communication unit 54 is provided. The communication unit 54 is capable of transmitting a signal based on a signal obtained from the sensor element 11 to the outside.

[0040] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. 4, a sensor 112 according to the embodiment may be provided with a plurality of sensor units 10. The remaining configuration of the sensor 112 may be the same as that of the sensor 110 or the sensor 111. At least two of the plurality of sensor units 10 may have different detection targets. For example, one of the plurality of sensor units 10 may detect hydrogen, and another of the plurality of sensor units 10 may detect carbon dioxide.

[0041] (Second embodiment) The second embodiment relates to a sensor system. As shown in Fig. 3, a sensor system 210 according to the embodiment includes a sensor (such as the sensor 110 or the sensor 111) according to the embodiment and a communication unit 54. The sensor may be controlled via the communication unit 54.

[0042] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) a housing including a first housing member including an opening, the first housing member including a first inner surface and a first side surface inside the opening; a sensor unit including a sensor member including a hole and a sensor element, wherein a first gap is present between the sensor element and the sensor member; a porous film member, the film member including an inner region and an outer region around the inner region, the outer region facing the first inner surface, the sensor member being between the sensor element and the inner region, the sensor member facing the inner region, and at least a portion of the inner region overlapping the first side surface in a second direction intersecting a first direction from the sensor element to the sensor member; A sensor equipped with

[0043] (Configuration 2) 2. The sensor of claim 1, wherein the at least a portion of the inner region faces the first side.

[0044] (Configuration 3) the film member includes a first film surface and a second film surface, the second film surface faces the sensor member, the first film surface faces the space outside the opening, 3. The sensor of claim 1 or 2, wherein at least a portion of the first film surface is convexly curved.

[0045] (Configuration 4) the sensor unit further includes an element substrate, the sensor element is located between the element substrate and the sensor member, the element substrate includes an element substrate surface facing the sensor element, the sensor member includes a sensor member surface facing the inner region; The sensor of any one of configurations 1 to 3, wherein a first distance along the first direction between the element substrate surface and the first inner surface is shorter than the sum of a second distance along the first direction between the element substrate surface and the sensor member surface and a first thickness along the first direction of the inner region.

[0046] (Configuration 5) The sensor of configuration 4, wherein the absolute value of the difference between the first distance and the sum is greater than or equal to 0.001 times the first thickness and less than or equal to 1 time.

[0047] (Configuration 6) the sensor unit further includes a support unit; the support portion is fixed to the element substrate, the support portion is located between the element substrate and the sensor member, The sensor of configuration 5, wherein the support portion supports the sensor member.

[0048] (Configuration 7) the support portion is located around the sensor element in a plane intersecting the first direction, 7. The sensor according to configuration 6, wherein a space surrounded by the element substrate, the support portion, the sensor member, and the film member is substantially waterproof.

[0049] (Configuration 8) 8. The sensor according to any one of configurations 1 to 7, wherein the film member is flexible.

[0050] (Configuration 9) 9. The sensor according to any one of aspects 1 to 8, wherein the film member contains a fluororesin.

[0051] (Configuration 10) 10. The sensor according to any one of configurations 1 to 9, wherein the film member contains polytetrafluoroethylene.

[0052] (Configuration 11) 11. The sensor according to any one of configurations 1 to 10, wherein the detection target gas can reach the first gap through the opening and the hole.

[0053] (Configuration 12) 12. The sensor of claim 11, wherein the film member is capable of preventing liquid from passing through the opening to the first gap.

[0054] (Configuration 13) 12. The sensor of claim 11, wherein the film member is capable of preventing water from passing through the opening to the first gap.

[0055] (Configuration 14) the housing includes a second housing member and a third housing member; the sensor unit is located between the third housing member and the first housing member in the first direction; the second housing member is connected to the first housing member and the third housing member, the second housing member is disposed around the sensor unit in a plane intersecting the first direction, 14. The sensor according to any one of configurations 1 to 13, wherein the interior space of the housing is substantially waterproof.

[0056] (Configuration 15) Further comprising a dehumidifying section, 15. The sensor according to claim 14, wherein the dehumidifying unit is capable of dehumidifying the space inside the housing.

[0057] (Configuration 16) Further comprising a first elastic member, 16. The sensor of any one of configurations 1 to 15, wherein the first elastic member is between the outer region and the first housing member.

[0058] (Configuration 17) the housing further includes a fourth housing member; the outer region is between the fourth housing member and the first inner surface, 17. The sensor according to any one of configurations 1 to 16, wherein the outer region is fixed by the fourth housing member and the first inner surface.

[0059] (Configuration 18) Further comprising a second elastic member, 18. The sensor of claim 17, wherein the second elastic member is between the fourth housing member and the outer region.

[0060] (Configuration 19) 19. The sensor according to any one of configurations 1 to 18, wherein the sensor element includes at least one of a capacitive MEMS gas sensor, a thermal conduction MEMS gas sensor, a catalytic combustion MEMS gas sensor, and an oxide semiconductor MEMS gas sensor.

[0061] (Configuration 20) The sensor according to any one of configurations 1 to 19, The Communications Department and Equipped with The communication unit is capable of transmitting a signal based on a signal obtained from the sensor element to an external device.

[0062] According to the embodiment, a sensor and a sensor system capable of improving detection accuracy can be provided.

[0063] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor system, such as the housing, sensor unit, sensor element, and film member, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0064] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0065] In addition, all sensors and sensor systems that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensors and sensor systems described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0066] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0067] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0068] 10...sensor portion, 11...sensor element, 12...sensor member, 12f...sensor member surface, 12h...hole, 13...support portion, 13c...sensor fixing portion, 13e...electrode, 15...element substrate, 15f...element substrate surface, 16a, 16b...first and second mounting substrates, 17a...connecting member, 31...film member, 31a, 31b...first and second film surfaces, 31i...inner region, 31o...outer region, 32...porous member, 40...housing, 40S...space, 41-44...first to fourth housing members, 41f...first inner surface, 41h...opening, 41s...first side surface, 46a, 46b...first and second elastic members, 47...fixing member, 48...structure, 51...dehumidifying portion, 53...battery, 54...Communication unit, 75a...Analog-digital converter, 75b...Capacitance-digital converter, 75c...DC / DC converter, 110-112...Sensor, 210...Sensor system, D1, D2...First and second directions, G1...First gap, d1, d2...First and second distances, t1...Thickness

Claims

1. a housing including a first housing member including an opening, the first housing member including a first inner surface and a first side surface inside the opening; a sensor unit including a sensor member including a hole and a sensor element, wherein a first gap is present between the sensor element and the sensor member; a porous film member, the film member including an inner region and an outer region around the inner region, the outer region facing the first inner surface, the sensor member being between the sensor element and the inner region, the sensor member facing the inner region, and at least a portion of the inner region overlapping the first side surface in a second direction intersecting a first direction from the sensor element to the sensor member; Equipped with the housing further includes a fourth housing member; the outer region is between the fourth housing member and the first inner surface, the outer region is fixed by the fourth housing member and the first inner surface, the film member includes a first film surface and a second film surface; the second film surface faces the sensor member, the first film surface faces a space outside the opening, At least a portion of the first film surface is curved convexly by the film member being pressed by the sensor member.

2. the sensor unit further includes an element substrate, the sensor element is located between the element substrate and the sensor member, the element substrate includes an element substrate surface facing the sensor element, the sensor member includes a sensor member surface facing the inner region; 2. The sensor of claim 1, wherein a first distance along the first direction between the element substrate surface and the first inner surface is shorter than a sum of a second distance along the first direction between the element substrate surface and the sensor member surface and a first thickness along the first direction of the inner region.

3. The sensor of claim 1 , wherein the film member comprises polytetrafluoroethylene.

4. The sensor according to claim 1 , wherein the target gas can reach the first gap through the opening and the hole.

5. The sensor according to claim 4 , wherein the film member is capable of preventing a liquid from passing through the opening to the first gap.

6. the housing includes a second housing member and a third housing member; the sensor unit is located between the third housing member and the first housing member in the first direction; the second housing member is connected to the first housing member and the third housing member, the second housing member is disposed around the sensor unit in a plane intersecting the first direction, The sensor of claim 1 , wherein the interior space of the housing is substantially waterproof.

7. Further comprising a first elastic member, The sensor of claim 1 , wherein the first resilient member is between the outer region and the first housing member.

8. A sensor according to any one of claims 1 to 7; The Communications Department and Equipped with The communication unit is capable of transmitting a signal based on a signal obtained from the sensor element to an external device.

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