Sensors and Sensor Systems

Abstract

To provide a sensor and a sensor system capable of stable detection.SOLUTION: According to one embodiment, a sensor includes a detection device, a switch circuit, and a detection circuit. The detection device includes a first detection section and a second detection section. The first detection section includes a first detection element. The first detection element includes a first conductive member and a first resistance member. The second detection section includes a second detection element. The second detection element includes a second conductive member and a second resistance member. In a first operation, the switch circuit is configured to supply a first current to the first conductive member and not to supply the first current to the second conductive member, and the detection circuit is configured to output a first signal corresponding to a difference between a first electrical resistance of the first resistance member and a second electrical resistance of the second resistance member. In a second operation, the switch circuit is configured to supply a second current to the second conductive member and not to supply the second current to the first conductive member, and the detection circuit is configured to output a second signal corresponding to the difference between the first electrical resistance and the second electrical resistance.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to sensors and sensor systems. [Background technology]

[0002] For example, there are sensors that use MEMS (Micro Electro Mechanical Systems) elements, etc. Stable detection is desired for sensors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-41893 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments provide a sensor and a sensor system capable of stable detection. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a detection device, a switch circuit, and a detection circuit. The detection device includes a first detection unit and a second detection unit. The first detection unit includes a first detection element. The first detection element includes a first conductive member and a first resistive member. The second detection unit includes a second detection element. The second detection element includes a second conductive member and a second resistive member. In a first operation, the switch circuit supplies a first current to the first conductive member and does not supply the first current to the second conductive member, and the detection circuit is capable of outputting a first signal corresponding to the difference between a first electrical resistance of the first resistive member and a second electrical resistance of the second resistive member. In a second operation, the switch circuit supplies a second current to the second conductive member and does not supply the second current to the first conductive member, and the detection circuit is capable of outputting a second signal corresponding to the difference between the first electrical resistance and the second electrical resistance. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a circuit diagram illustrating a sensor according to the first embodiment. [Figure 2] FIG. 2 is a circuit diagram illustrating the sensor according to the first embodiment. [Figure 3] FIG. 3 is a flowchart illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a flowchart illustrating the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. [Figure 6] 6A and 6B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 8] 8A and 8B are schematic plan views illustrating a part of the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic cross-sectional view illustrating the sensor according to the second embodiment. [Figure 10] FIG. 10 is a schematic cross-sectional view illustrating the sensor according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) 1 and 2 are circuit diagrams illustrating the sensor according to the first embodiment. As shown in FIGS. 1 and 2, a sensor 110 according to the embodiment includes a detection device 10, a switch circuit 71, and a detection circuit 72.

[0009] The detection device 10 includes a first detection unit 10A and a second detection unit 10B. The first detection unit 10A includes a first detection element 11E. The first detection element 11E includes a first conductive member 21 and a first resistance member 11. The second detection unit 10B includes a second detection element 12E. The second detection element 12E includes a second conductive member 22 and a second resistance member 12.

[0010] The switch circuit 71 and the detection circuit 72 are capable of a first operation OP1 and a second operation OP2. Fig. 1 corresponds to the first operation OP1. Fig. 2 corresponds to the second operation OP2.

[0011] 1, in a first operation OP1, the switch circuit 71 supplies a first current i1 to the first conductive member 21, but does not supply the first current i1 to the second conductive member 22. In the first operation OP1, the detection circuit 72 can output a first signal Sg1 corresponding to the difference between the first electrical resistance Rs1 of the first resistive member 11 and the second electrical resistance Rs2 of the second resistive member 12.

[0012] 2, in the second operation OP2, the switch circuit 71 supplies the second current i2 to the second conductive member 22, but does not supply the second current i2 to the first conductive member 21. In the second operation OP2, the detection circuit 72 can output a second signal Sg2 corresponding to the difference between the first electrical resistance Rs1 and the second electrical resistance Rs2. The magnitude of the second current i2 may be the same as the magnitude of the first current i1.

[0013] In the first operation OP1, the first detection element 11E detects the detection target. In the first operation OP1, the second detection element 12E functions as a reference element for the detection by the first detection element 11E. By using the reference element, more accurate detection results can be obtained.

[0014] In the second operation OP2, the detection target is detected by the second detection element 12E. In the second operation OP2, the first detection element 11E functions as a reference element in the detection by the second detection element 12E. By using the reference element, more accurate detection results can be obtained.

[0015] As will be described later, when a current is supplied to the conductive member, the temperature of the detection element rises. The temperature drop characteristics after the temperature rise of the detection element depend on the state of the detection object around the detection object. The detection object can be detected by detecting the temperature drop characteristics using the resistive member.

[0016] Thus, in the embodiment, when a current is supplied to the conductive member, Supplied The temperature of the sensing element rises. For example, temperature changes (both rising and falling) can cause the characteristics of the resistor material to change. For example, temperature changes (both rising and falling) can cause the resistor material to undergo chemical changes (such as oxidation). vinegar For example, changes in temperature (rising and falling) may cause changes in the arrangement of atoms (such as the crystalline state) in the resistive material. Changes in temperature (rising and falling) may also cause changes in the characteristics of the conductive material. This may cause changes in the detection characteristics while the sensor is in use. Excessive changes in the detection characteristics may shorten the life of the sensor.

[0017] As described above, in the embodiment, a first operation OP1 in which a first current i1 is supplied to the first conductive member 21, and a second operation OP2 in which a second current i2 is supplied to the second conductive member 22 are performed. This reduces the time (and frequency) of temperature changes (rise and fall) compared to the reference example in which current is supplied to only one conductive member. In the embodiment, changes in detection characteristics can be suppressed. Changes in detection characteristics can be suppressed while maintaining high accuracy. According to the embodiment, a sensor capable of stable detection can be provided.

[0018] In the first operation OP1, for example, a first current i1 is supplied to the first conductive member 21, causing the temperature of the first detection element 11E to rise. This causes the temperature of the first resistance member 11 to rise. After the temperature of the first resistance member 11 rises, the temperature of the first resistance member 11 drops. The degree of the drop in the temperature of the first resistance member 11 is affected by the detection target (such as the detection target gas) present around the first detection element 11E. For example, the thermal conductivity differs depending on the type and concentration of the detection target. The detection target can be detected by detecting the characteristics of the drop in the first electrical resistance Rs1 of the first resistance member 11.

[0019] In the first operation OP1, the first current i1 is not supplied to the second conductive member 22. Therefore, the temperature of the second detection element 12E does not change substantially. The second electrical resistance Rs2 of the second resistive member 12 is not affected by the detection object and does not change substantially. By detecting a value corresponding to the difference between the first electrical resistance Rs1, which changes, and the second electrical resistance Rs2, which does not change, the detection object can be detected more accurately.

[0020] In the second operation OP2, for example, a second current i2 is supplied to the second conductive member 22, causing the temperature of the second detection element 12E to rise. This causes the temperature of the second resistance member 12 to rise. After the temperature of the second resistance member 12 rises, the temperature of the second resistance member 12 drops. The degree of the drop in the temperature of the second resistance member 12 is affected by the detection target (such as the detection target gas) present around the second detection element 12E. For example, the thermal conductivity differs depending on the type and concentration of the detection target. The detection target can be detected by detecting the characteristics of the drop in the second electrical resistance Rs2 of the second resistance member 12.

[0021] In the second operation OP2, the second current i2 is not supplied to the first conductive member 21. Therefore, the temperature of the first detection element 11E does not change substantially. The first electrical resistance Rs1 of the first resistive member 11 is not affected by the detection object and does not change substantially. By detecting a value corresponding to the difference between the changing second electrical resistance Rs2 and the unchanged first electrical resistance Rs1, the detection object can be detected more accurately.

[0022] The detection target is contained in the atmosphere surrounding the first detection element 11E and the second detection element 12E. During the first operation OP1, the first electrical resistance Rs1 changes according to the concentration of the detection target. During the first operation OP1, the second electrical resistance Rs2 does not change according to the concentration of the detection target.

[0023] Alternatively, the change in the second electrical resistance Rs2 in response to the concentration in the first operation OP1 is smaller than the change in the first electrical resistance Rs1 in response to the concentration in the first operation OP1.

[0024] In the second operation OP2, the second electrical resistance Rs2 changes in accordance with the concentration of the detection target. In the second operation OP2, the first electrical resistance Rs1 does not change in accordance with the concentration of the detection target.

[0025] Alternatively, the change in the first electrical resistance Rs1 depending on the concentration in the second operation OP2 is smaller than the change in the second electrical resistance Rs2 depending on the concentration in the second operation OP2.

[0026] In the embodiment, the detection target may be gaseous or liquid. The detection target may include, for example, at least one selected from the group consisting of hydrogen, helium, argon, carbon monoxide, carbon dioxide, methane, propane, butane, and sulfur hexafluoride (SF6). The detection target may include, for example, at least one selected from the group consisting of nitrogen, oxygen, ammonia, acetone, and chlorine (Cl2). The detection target may include, for example, alcohol.

[0027] 1 and 2, in this example, the sensor 110 includes a first resistive element 16a and a second resistive element 16b. The first resistive element 16a and the second resistive element 16b may be provided in the sensing device 10. The first resistive element 16a and the second resistive element 16b may be provided separately from the sensing device 10.

[0028] The first resistance element 11, the second resistance element 12, the first resistance element 16a, and the second resistance element 16b are bridge-connected. The detection circuit 72 can output a signal (first signal Sg1 or second signal Sg2) corresponding to the potential difference between the first connection point CP1 and the second connection point CP2. The first connection point CP1 is the connection point of the bridge-connected first resistance element 11 and the second resistance element 16b. The second connection point CP2 is the connection point of the bridge-connected second resistance element 12 and the first resistance element 16a. The use of a bridge circuit enables more accurate detection.

[0029] As shown in FIGS. 1 and 2, the switch circuit 71 may include a first switch Sw1, a second switch Sw2, a third switch Sw3, a fourth switch Sw4, a fifth switch Sw5, and a sixth switch Sw6.

[0030] The first switch Sw1 is electrically connected to the first conductive member 21. The second switch Sw2 is electrically connected to the second conductive member 22. For example, the first switch Sw1 is provided in a current path between the conductive member terminal TM3 and the first conductive member 21. For example, the second switch Sw2 is provided in a current path between the conductive member terminal TM3 and the second conductive member 22. A conductive member voltage Vh is applied to the conductive member terminal TM3. The conductive member voltage Vh generates a first current i1 and a second current i2.

[0031] The third switch Sw3 is electrically connected to the first resistance element 11. The fourth switch Sw4 is electrically connected to the second resistance element 12. The fifth switch Sw5 is electrically connected to the first resistance element 11. The sixth switch Sw6 is electrically connected to the second resistance element 12.

[0032] The fifth switch Sw5 is provided in the current path between the first terminal TM1 and the first resistance element 11. The third switch Sw3 is provided in the current path between the second terminal TM2 and the first resistance element 11. The sixth switch Sw6 is provided in the current path between the first terminal TM1 and the second resistance element 12. The fourth switch Sw4 is provided in the current path between the second terminal TM2 and the second resistance element 12.

[0033] The first terminal TM1 is set to, for example, a fixed potential Va (for example, ground potential), and the second terminal TM2 is applied with, for example, a detection voltage Vs.

[0034] 1, when the third switch Sw3 is in a non-conductive state, the fourth switch Sw4 is in a conductive state, the fifth switch Sw5 is in a conductive state, and the sixth switch Sw6 is in a non-conductive state, the first switch Sw1 is in a conductive state, and the second switch Sw2 is in a non-conductive state.

[0035] 2, when the third switch Sw3 is in a conductive state, the fourth switch Sw4 is in a non-conductive state, the fifth switch Sw5 is in a non-conductive state, and the sixth switch Sw6 is in a conductive state. At this time, the first switch Sw1 is in a non-conductive state, and the second switch Sw2 is in a conductive state. The switch circuit 71 described above switches between the first operation OP1 and the second operation OP2.

[0036] 1 and 2, the operation control unit 74 may be provided in the sensor 110. The operation control unit 74 may be included in the sensor 110. The operation control unit 74 may also be provided separately from the sensor 110.

[0037] The operation control unit 74 is capable of controlling the switch circuit 71. The operation control unit 74 is capable of controlling at least one of the transition from the first operation OP1 to the second operation OP2 and the transition from the second operation OP2 to the first operation OP1 in the switch circuit 71. The operation control unit 74 controls, for example, the operations of the first switch Sw1, the second switch Sw2, the third switch Sw3, the fourth switch Sw4, the fifth switch Sw5, and the sixth switch Sw6.

[0038] 1 and 2, the sensor 110 may include an AD converter 73. The outputs of the detection circuit 72 (first signal Sg1 and second signal Sg2) are converted into digital signals by the AD converter 73. The outputs of the AD converter 73 are supplied to an operation control unit 74. The operation control unit 74 may be able to perform control operations based on the output of the AD converter 73.

[0039] The following describes an example of the operation of the sensor 110. The operation described below may be controlled by the operation control unit 74, for example.

[0040] FIG. 3 is a flowchart illustrating the sensor according to the first embodiment. As shown in FIG. 3, a first operation OP1 is performed (step S110). A second operation OP2 is performed (step S120). The number of times n0 that the first operation OP1 and the second operation OP2 are performed is compared with a predetermined number N0. The number of times n0 is an integer equal to or greater than 1. Alternatively, an elapsed time t0 is compared with a predetermined value T0 (step S105). If the number of times n0 does not exceed the number N0 and the elapsed time t0 does not exceed the value T0, the process returns to step S110.

[0041] If the number of times n0 exceeds the number N0 or the elapsed time t0 exceeds the value T0, a third operation is performed (step S130). In the third operation, for example, information (e.g., an alarm) indicating that the end of the life is approaching is output. The output of the information is performed, for example, by the operation control unit 74.

[0042] In this way, the switch circuit 71 and the detection circuit 72 may be able to repeatedly perform the set of the first operation OP1 and the second operation OP2. The performance of the set of the first operation OP1 and the second operation OP2 may be terminated based on at least one of the number of repetitions (number of times n0) and the elapsed time t0.

[0043] FIG. 4 is a flowchart illustrating the sensor according to the first embodiment. As shown in FIG. 4, a first operation OP1 is performed (step S110). The number of times n1 the first operation OP1 is performed is compared with a first number N1. The number of times n1 is an integer equal to or greater than 1. Alternatively, a first period t1 during which the first operation OP1 is performed is compared with a first value T1 (step S115). If the number of times n1 does not exceed the first number N1 and the first period t1 does not exceed the first value T1, the process returns to step S110.

[0044] If the number of times n1 performed exceeds the first number N1, or if the first period t1 exceeds the first value T1, the second operation OP2 is performed (step S120).

[0045] In this way, the switch circuit 71 and the detection circuit 72 can repeatedly perform the first operation OP1. When the number of times n1 that the first operation OP1 is repeatedly performed exceeds the first number N1, or when the first period t1 during which the first operation OP1 is repeatedly performed exceeds the first value T1, the switch circuit 71 and the detection circuit 72 perform the second operation OP2.

[0046] As shown in FIG. 4, the second operation OP2 is performed (step S120). The number of times n2 the second operation OP2 is performed is compared with a second number N2. The number of times n2 is an integer equal to or greater than 1. Alternatively, the second period t2 during which the second operation OP2 is performed is compared with a second value T2 (step S125). If the number of times n2 does not exceed the second number N2 and the second period t2 does not exceed the second value T2, the process returns to step S120.

[0047] If the number of times n2 is performed exceeds the second number N2, or if the second period t2 is greater than the second value T2, step S128 is performed. In step S128, the number of times n3 the first operation OP1 and the second operation OP2 are performed is compared with a third number N3. The number of times n3 is an integer greater than or equal to 1. The number of times n3 is performed corresponds to the number of loops including a plurality of first operations OP1 and a plurality of second operations OP2. Alternatively, a third period t3 during which the first operation OP1 and the second operation OP2 are performed is compared with a third value T3. The third period t3 corresponds to the elapsed time of the loop including a plurality of first operations OP1 and a plurality of second operations OP2. If the number of times n3 is not greater than the third number N3 and the third period t3 is not greater than the third value T3, the process returns to step S110.

[0048] When the number of executions n3 exceeds the third number N3 or the third period t3 exceeds the third value T3, the third operation (step S130) is performed. As already described, in the third operation, for example, information (e.g., an alarm) indicating that the end of the life is approaching is output. The output of the information is performed, for example, by the operation control unit 74.

[0049] In this way, the switch circuit 71 and the detection circuit 72 can repeatedly perform the second operation OP2. When the number of times n2 that the second operation OP2 is repeatedly performed exceeds the second number N2, or when the second period t2 during which the second operation OP2 is repeatedly performed exceeds the second value T2, the switch circuit 71 and the detection circuit 72 may be able to perform the first operation OP1.

[0050] In the embodiment, stable detection can be performed for a long period of time, a long life can be achieved, and highly accurate detection can be achieved for a long period of time.

[0051] 1 and 2, a sensor system 210 according to the embodiment includes a sensor 110 according to the embodiment and an operation control unit 74. The operation control unit 74 can control at least one of a transition from a first operation OP1 to a second operation OP2 and a transition from the second operation OP2 to the first operation OP1 in the switch circuit 71. The operation control unit 74 may be provided in a location different from a location where the sensor 110 is provided. The operation control unit 74 may be provided in a location different from a location where the switch circuit 71 is provided. Transmission and reception of information (signals) between the operation control unit 74 and the switch circuit 71 may be performed by any method, such as wired or wireless.

[0052] An example of the detection device 10 will now be described. 5, 6A, and 6B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. FIG. 7 is a schematic plan view illustrating a part of the sensor according to the first embodiment. Fig. 5 is a cross-sectional view taken along line A1-A2 in Fig. 7. Fig. 6(a) is a cross-sectional view taken along line B1-B2 in Fig. 7. Fig. 6(b) is a cross-sectional view taken along line C1-C2 in Fig. 7.

[0053] As shown in FIGS. 5, 6(a), 6(b), and 7, in the sensor 110, the detection device 10 includes a first detection unit 10A and a second detection unit 10B.

[0054] In this example, the detection device 10 includes a substrate 41. The substrate 41 includes a first substrate region 41a and a second substrate region 41b. The first detection unit 10A is provided in the first substrate region 41a. The second detection unit 10B is provided in the second substrate region 41b.

[0055] In this example, the first substrate region 41a is continuous with the second substrate region 41b. The boundary between the first substrate region 41a and the second substrate region 41b may be clear or unclear. The first substrate region 41a may be separated from the second substrate region 41b.

[0056] In this example, the base 41 includes a substrate 41s and an insulating film 41i. The substrate 41s may be, for example, a semiconductor substrate (e.g., a silicon substrate). The substrate 41s may include, for example, a semiconductor circuit. The substrate 41s may include a connection member such as a via electrode.

[0057] The direction from the first substrate region 41a to the first detection unit 10A is the Z-axis direction. One direction perpendicular to the Z-axis direction is the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is the Y-axis direction. The direction from the second substrate region 41b to the second detection unit 10B is along the Z-axis direction.

[0058] As already described, the first detection unit 10A includes a first detection element 11E. The first detection element 11E includes a first conductive member 21 and a first resistive member 11. The first resistive member 11 may include a first resistive portion 11a and a first other resistive portion 11b. The first conductive member 21 may include a first conductive portion 21a and a first other conductive portion 21b.

[0059] In this example, the first detection unit 10A further includes a first connection portion 31C and a first support portion 31S. The first support portion 31S is fixed to the base 41. A portion of the first connection portion 31C is supported by the first support portion 31S. Another portion of the first connection portion 31C supports the first detection element 11E at a distance from the first base region 41a. A first gap g1 is provided between the first base region 41a and the first detection element 11E.

[0060] In this example, the first detection unit 10A further includes a first other connection portion 31aC and a first other support portion 31aS. The first other support portion 31aS is fixed to the base 41. A portion of the first other connection portion 31aC is supported by the first other support portion 31aS. Another portion of the first other connection portion 31aC supports the first detection element 11E away from the first base region 41a. In this example, at least a portion of the first detection element 11E is located between the first connection portion 31C and the first other connection portion 31aC.

[0061] As already described, the second detection unit 10B includes a second detection element 12E. The second detection element 12E includes a second resistive member 12 and a second conductive member 22. The second resistive member 12 may include a second resistive portion 12a and a second other resistive portion 12b. The second conductive member 22 may include a second conductive portion 22a and a second other conductive portion 22b.

[0062] In this example, the second detection unit 10B further includes a second connection portion 32C and a second support portion 32S. The second support portion 32S is fixed to the base 41. A portion of the second connection portion 32C is supported by the second support portion 32S. Another portion of the second connection portion 32C supports the second detection element 12E at a distance from the second base region 41b. A second gap g2 is provided between the second base region 41b and the second detection element 12E.

[0063] In this example, the second detection unit 10B further includes a second other connection portion 32aC and a second other support portion 32aS. The second other support portion 32aS is fixed to the base 41. A portion of the second other connection portion 32aC is supported by the second other support portion 32aS. Another portion of the second other connection portion 32aC supports the second detection element 12E away from the second base region 41b. In this example, at least a portion of the second detection element 12E is located between the second connection portion 32C and the second other connection portion 32aC.

[0064] By supporting the first detection element 11E and the second detection element 12E at a distance from the base 41, heat from these detection elements is prevented from being conducted via the base 41. This facilitates stable detection of the detection target with high sensitivity.

[0065] As shown in FIG. 7, in this example, the detection device 10 includes a first resistive terminal 51, a second resistive terminal 52, a third resistive terminal 53, a first conductive terminal 61 and a second conductive terminal 62.

[0066] The first resistor terminal 51 is electrically connected to the first resistor portion 11a. In this example, the second resistor terminal 52 is electrically connected to the first resistor portion 11b and the second resistor portion 12a. The third resistor terminal 53 is electrically connected to the second resistor portion 12b.

[0067] In this example, a connecting conductive member 25 is provided. The connecting conductive member 25 is provided on the base 41. The connecting conductive member 25 electrically connects the first resistor other portion 11b and the second resistor portion 12a. In this example, the second resistor terminal 52 is electrically connected to the first resistor other portion 11b and the second resistor portion 12a via the connecting conductive member 25.

[0068] The first conductive terminal 61 is electrically connected to the first conductive portion 21a, and the second conductive terminal 62 is electrically connected to the first other conductive portion 21b.

[0069] 7, the sensor 110 may be provided with a control unit 70. The control unit 70 includes a switch circuit 71 and a detection circuit 72. The control unit 70 is electrically connected to the first resistance terminal 51, the second resistance terminal 52, the third resistance terminal 53, the first conductive terminal 61, and the second conductive terminal 62. The control unit 70 performs the first operation OP1 and the second operation OP2 described above.

[0070] As shown in FIG. 5, the first detection unit 10A (and the first detection element 11E) may include a first insulating portion 18A. The second detection unit 10B (and the second detection element 12E) may include a second insulating portion 18B. At least a portion of the first insulating portion 18A is provided around the first resistance member 11 and the first conductive member 21. A portion of the first insulating portion 18A is provided between the first resistance member 11 and the first conductive member 21. At least a portion of the second insulating portion 18B is provided around the second resistance member 12 and the second conductive member 22. A portion of the second insulating portion 18B is provided between the second resistance member 12 and the second conductive member 22. The second insulating portion 18B has substantially the same structure as the first insulating portion 18A. The length, width, thickness, and material of the second insulating portion 18B are substantially the same as the length, width, thickness, and material of the first insulating portion 18A.

[0071] As shown in FIG. 5, the first detection unit 10A may further include a first conductive layer 51L. The first conductive layer 51L is electrically connected to the first resistance portion 11a of the first resistance member 11. At least a portion of the first conductive layer 51L may be provided on the first support unit 31S. In this example, the first conductive layer 51L is electrically connected to a wiring layer 51M provided on the base 41. The wiring layer 51M is electrically connected to the first resistance terminal 51 (see FIG. 7).

[0072] As shown in FIG. 5, the second detection unit 10B may further include a second conductive layer 52L. The second conductive layer 52L is electrically connected to the second resistive portion 12a of the second resistive member 12. At least a portion of the second conductive layer 52L may be provided on the second support portion 32S. In this example, the second conductive layer 52L is electrically connected to a wiring layer 52M provided on the base 41. The wiring layer 52M is electrically connected to the second resistive terminal 52 (see FIG. 7).

[0073] The current flowing between the first resistor terminal 51 and the first resistor portion 11a flows through the first conductive layer 51L. The current flowing between the second resistor terminal 52 and the second resistor portion 12a flows through the second conductive layer 52L.

[0074] The first detection unit 10A may further include a first other conductive layer 51aL. The first other conductive layer 51aL is electrically connected to the first resistor other portion 11b of the first resistor member 11. At least a portion of the first other conductive layer 51aL may be provided on the first other support portion 31aS. In this example, the first other conductive layer 51aL is electrically connected to a wiring layer 51aM provided on the base 41. The wiring layer 51aM is electrically connected to the second resistor terminal 52 (see FIG. 7).

[0075] The second detection unit 10B may further include a second other conductive layer 52aL. The second other conductive layer 52aL is electrically connected to the second resistor other portion 12b of the second resistor member 12. At least a portion of the second other conductive layer 52aL may be provided on the second other support portion 32aS. In this example, the second other conductive layer 52aL is electrically connected to a wiring layer 52aM provided on the base 41. The wiring layer 52aM is electrically connected to the third resistor terminal 53 (see FIG. 7).

[0076] 6(a) and 7, in this example, the first detection unit 10A includes a third connection portion 33C and a third support portion 33S. The third support portion 33S is fixed to the base 41. A portion of the third connection portion 33C is supported by the third support portion 33S. Another portion of the third connection portion 33C supports the first detection element 11E away from the first base region 41a.

[0077] In this example, the first detection unit 10A includes a third other connection portion 33aC and a third other support portion 33aS. The third other support portion 33aS is fixed to the base 41. A portion of the third other connection portion 33aC is supported by the third other support portion 33aS. Another portion of the third other connection portion 33aC supports the first detection element 11E away from the first base region 41a.

[0078] As shown in FIG. 6(a), the first detection unit 10A may further include a third conductive layer 53L. At least a portion of the third conductive layer 53L is provided on the third support portion 33S. In this example, the third conductive layer 53L is electrically connected to a wiring layer 53M provided on the base 41. The wiring layer 53M is electrically connected to a first conductive terminal 61 (see FIG. 7). A first current i1 flowing between the first conductive terminal 61 and the first conductive portion 21a flows through the third conductive layer 53L.

[0079] As shown in FIG. 6(a), the first detection unit 10A may further include a third other conductive layer 53aL. At least a portion of the third other conductive layer 53aL is provided on the third other support portion 33aS. In this example, the third other conductive layer 53aL is electrically connected to a wiring layer 53aM provided on the base 41. The wiring layer 53aM is electrically connected to the second conductive terminal 62 (see FIG. 7). A first current i1 flowing between the second conductive terminal 62 and the first conductive other portion 21b flows through the third other conductive layer 53aL.

[0080] 6(b) and 7, in this example, the second detection unit 10B includes a fourth connection portion 34C and a fourth support portion 34S. The fourth support portion 34S is fixed to the base 41. A portion of the fourth connection portion 34C is supported by the fourth support portion 34S. Another portion of the fourth connection portion 34C supports the second detection element 12E away from the second base region 41b.

[0081] In this example, the second detection unit 10B includes a fourth other connection portion 34aC and a fourth other support portion 34aS. The fourth other support portion 34aS is fixed to the base 41. A portion of the fourth other connection portion 34aC is supported by the fourth other support portion 34aS. Another portion of the fourth other connection portion 34aC supports the second detection element 12E away from the second base region 41b.

[0082] 6(b), the second detection unit 10B may further include a fourth conductive layer 54L. At least a portion of the fourth conductive layer 54L is provided on the fourth support portion 34S. In this example, the fourth conductive layer 54L is electrically connected to a wiring layer 54M provided on the base 41. The fourth conductive layer 54L is electrically connected to the second conductive portion 22a.

[0083] 6(b), the second detection unit 10B may further include a fourth other conductive layer 54aL. At least a portion of the fourth other conductive layer 54aL is provided on the fourth other support portion 34aS. In this example, the fourth other conductive layer 54aL is electrically connected to the wiring layer 54aM provided on the base 41. The fourth other conductive layer 54aL is electrically connected to the second other conductive portion 22b.

[0084] 8A and 8B are schematic plan views illustrating a part of the sensor according to the first embodiment. These figures are plan views of the layer including the first resistive member 11 and the second resistive member 12. 8(a), the first detection element 11E may include a first layer 15a and a second layer 15b. The first layer 15a and the second layer 15b have the same material and thickness as the first resistance member 11. The first resistance member 11 is provided between the first layer 15a and the second layer 15b. By providing these layers, warping (deformation) of the first detection element 11E is suppressed.

[0085] 8(b), the second detection element 12E may include a third layer 15c and a fourth layer 15d. The third layer 15c and the fourth layer 15d have the same material and thickness as the second resistance member 12. The second resistance member 12 is provided between the third layer 15c and the fourth layer 15d. By providing these layers, warping (deformation) of the second detection element 12E is suppressed.

[0086] (Second embodiment) 9 and 10 are schematic cross-sectional views illustrating the sensor according to the second embodiment. 9, the sensor 120 according to the embodiment includes a detection device 10, a switch circuit 71, and a detection circuit 72. The detection device 10 includes a first detection unit 10A and a second detection unit 10B. In the sensor 120, the configurations of the first detection unit 10A and the second detection unit 10B are different from the configurations of the first detection unit 10A and the second detection unit 10B in the sensor 110. Except for this, the configuration of the sensor 120 may be the same as the configuration of the sensor 110.

[0087] 9, in the sensor 120, the first detection unit 10A includes a first detection element 11E and a first fixed electrode 11F. The first detection element 11E includes a first conductive member 21 and a first movable electrode 11A. The second detection unit 10B includes a second detection element 12E and a second fixed electrode 12F. The second detection element 12E includes a second conductive member 22 and a second movable electrode 12A.

[0088] In the sensor 120, for example, the first detection element 11E is deformable in response to the detection target. For example, the first detection element 11E takes in the detection target (such as gas). This causes a change in the volume of the first detection element 11E, and the distance between the first detection element 11E and the first fixed electrode 11F changes. The first capacitance Cs1 between the first movable electrode 11A and the first fixed electrode 11F changes in response to the detection target.

[0089] For example, when a first current i1 is supplied to the first conductive member 21, the temperature of the first detection element 11E rises and then falls. For example, as the temperature rises, the detection target captured by the first detection element 11E is separated from the first detection element 11E. Alternatively, the capture characteristics of the detection target in the first detection element 11E change in response to the change in the temperature of the first detection element 11E. The change in the first capacitance Cs1 corresponding to the detection target changes depending on whether or not the first current i1 is supplied to the first conductive member 21.

[0090] Similarly, for example, the second detection element 12E can deform in response to the detection target. For example, the second detection element 12E takes in the detection target (such as gas). This causes a change in the volume of the second detection element 12E, and the distance between the second detection element 12E and the second fixed electrode 12F changes. The second capacitance Cs2 between the second movable electrode 12A and the second fixed electrode 12F changes in response to the detection target.

[0091] For example, when the second current i2 is supplied to the second conductive member 22, the temperature of the second detection element 12E rises and then falls. For example, as the temperature rises, the detection target captured by the second detection element 12E is released from the second detection element 12E. Alternatively, the capture characteristics of the detection target in the second detection element 12E change in response to the change in the temperature of the second detection element 12E. The change in the second capacitance Cs2 corresponding to the detection target changes depending on whether or not the second current i2 is supplied to the second conductive member 22.

[0092] For example, the detection target can be detected with high accuracy by detecting the difference between the first capacitance Cs1 when the first current i1 is not supplied and the second capacitance Cs2 when the second current i2 is supplied. The detection target can be detected with high accuracy by detecting the difference between the first capacitance Cs1 when the first current i1 is supplied and the second capacitance Cs2 when the second current i2 is not supplied.

[0093] In the embodiment, the switch circuit 71 and the detection circuit 72 can perform a first operation OP1 and a second operation OP2. Fig. 9 corresponds to the first operation OP1. Fig. 10 corresponds to the second operation OP2.

[0094] In the first operation OP1, the switch circuit 71 supplies the first current i1 to the first conductive member 21 and does not supply the first current i1 to the second conductive member 22. In the first operation OP1, the detection circuit 72 can output a first signal Sg1 corresponding to the difference between the first capacitance Cs1 between the first movable electrode 11A and the first fixed electrode 11F and the second capacitance Cs2 between the second movable electrode 12A and the second fixed electrode 12F.

[0095] In the second operation OP2, the switch circuit 71 supplies the second current i2 to the second conductive member 22 and does not supply the second current i2 to the first conductive member 21. In the second operation OP2, the detection circuit 72 can output a second signal Sg2 corresponding to the difference between the first capacitance Cs1 and the second capacitance Cs2.

[0096] When the temperature change of the first detection element 11E is repeated, the characteristics of the detection target taken in by the first detection element 11E change. When the temperature change of the second detection element 12E is repeated, the characteristics of the detection target taken in by the second detection element 12E change. By performing the first operation OP1 and the second operation OP2, the temperature change is leveled in the first detection element 11E and the second detection element 12E. For example, the change in characteristics over time is suppressed. A sensor capable of stable detection can be provided. For example, the lifespan can be extended.

[0097] In the second embodiment as well, the switch circuit 71 and the detection circuit 72 can repeatedly perform the set of the first operation OP1 and the second operation OP2.

[0098] The switch circuit 71 and the detection circuit 72 may be capable of repeatedly performing the first operation OP1. When the number of times n1 that the first operation OP1 is repeatedly performed exceeds a first number N1, or when a first period t1 during which the first operation OP1 is repeatedly performed exceeds a first value T1, the switch circuit 71 and the detection circuit 72 may perform the second operation OP2.

[0099] The switch circuit 71 and the detection circuit 72 may be capable of repeatedly performing the second operation OP2. When the number of times n2 that the second operation OP2 is repeatedly performed exceeds a second number N2, or when a second period t2 during which the second operation OP2 is repeatedly performed exceeds a second value T2, the switch circuit 71 and the detection circuit 72 may perform the first operation OP1.

[0100] The sensor 120 may be provided with an operation control unit 74. The operation control unit 74 can control at least one of the transition from the first operation OP1 to the second operation OP2 and the transition from the second operation OP2 to the first operation OP1 in the switch circuit 71.

[0101] For example, the sensor system 220 according to the embodiment includes the sensor 120 according to the embodiment and an operation control unit 74. The operation control unit 74 may be provided in a location different from where the sensor 120 is provided. The operation control unit 74 may be provided in a location different from where the switch circuit 71 is provided. Transmission and reception of information (signals) between the operation control unit 74 and the switch circuit 71 may be performed by any method, such as wired or wireless.

[0102] 9 and 10, in a sensor 120, a detection device 10 may include a substrate 41. The substrate 41 includes a first substrate region 41a and a second substrate region 41b. A first detection unit 10A is provided in the first substrate region 41a. A second detection unit 10B is provided in the second substrate region 41b.

[0103] The first detection unit 10A includes a first connection unit 31C and a first support unit 31S. The first support unit 31S is fixed to the base 41. A portion of the first connection unit 31C is supported by the first support unit 31S. Another portion of the first connection unit 31C supports the first detection element 11E at a distance from the first base region 41a. A first gap g1 is provided between the first base region 41a and the first detection element 11E.

[0104] The second detection unit 10B includes a second connection portion 32C and a second support portion 32S. The second support portion 32S is fixed to the base 41. A portion of the second connection portion 32C is supported by the second support portion 32S. Another portion of the second connection portion 32C supports the second detection element 12E at a distance from the second base region 41b. A second gap g2 is provided between the second base region 41b and the second detection element 12E.

[0105] In one example, the first connecting portion 31C and the second connecting portion 32C may include a layer containing Pd. The layer containing Pd is capable of capturing, for example, hydrogen. When the detection target contains hydrogen, the volume of the layer containing Pd changes in response to the detection target, causing the shapes of the first connecting portion 31C and the second connecting portion 32C to change. This effectively facilitates capacitance changes.

[0106] The embodiment may include the following configurations (e.g., technical solutions).

[0107] (Configuration 1) a detection device including a first detection unit and a second detection unit; A switch circuit; a detection circuit; Equipped with the first detection unit includes a first detection element, the first detection element including a first conductive member and a first resistive member; the second detection unit includes a second detection element, the second detection element including a second conductive member and a second resistive member; in a first operation, the switch circuit supplies a first current to the first conductive member and does not supply the first current to the second conductive member, and the detection circuit is capable of outputting a first signal corresponding to a difference between a first electrical resistance of the first resistive member and a second electrical resistance of the second resistive member; In a second operation, the switch circuit supplies a second current to the second conductive member and does not supply the second current to the first conductive member, and the detection circuit is capable of outputting a second signal corresponding to the difference between the first electrical resistance and the second electrical resistance.

[0108] (Configuration 2) 2. The sensor of claim 1, wherein the switch circuit and the detection circuit are capable of repeatedly performing the set of the first operation and the second operation.

[0109] (Configuration 3) the switch circuit and the detection circuit are capable of repeatedly performing the first operation; The sensor of configuration 1, wherein the switch circuit and the detection circuit perform the second operation when the number of times the first operation is repeated exceeds a first number or when a first period during which the first operation is repeatedly performed exceeds a first value.

[0110] (Configuration 4) the switch circuit and the detection circuit are capable of repeatedly performing the second operation; The sensor of configuration 3, wherein the switch circuit and the detection circuit perform the first operation when the number of times the second operation is repeated exceeds a second number or when a second period during which the second operation is repeatedly performed exceeds a second value.

[0111] (Configuration 5) Further comprising an operation control unit, The sensor according to any one of configurations 1 to 4, wherein the operation control unit is capable of controlling at least one of the transition from the first operation to the second operation and the transition from the second operation to the first operation in the switch circuit.

[0112] (Configuration 6) The switch circuit a first switch electrically connected to the first conductive member; a second switch electrically connected to the second conductive member; 6. The sensor according to any one of configurations 1 to 5, comprising:

[0113] (Configuration 7) The switch circuit a third switch electrically connected to the first resistance member; a fourth switch electrically connected to the second resistance member; a fifth switch electrically connected to the first resistance member; a sixth switch electrically connected to the second resistance member; further comprising the fifth switch is provided in a current path between the first terminal and the first resistance member, the third switch is provided in a current path between the second terminal and the first resistance member, the sixth switch is provided in a current path between the first terminal and the second resistance member, the fourth switch is provided in a current path between the second terminal and the second resistance member, 7. The sensor of configuration 6, wherein when the third switch is in a non-conductive state, the fourth switch is in a conductive state, the fifth switch is in the conductive state, and the sixth switch is in the non-conductive state.

[0114] (Configuration 8) Further comprising a first resistor element and a second resistor element, the first resistance member, the second resistance member, the first resistance element, and the second resistance element are bridge-connected, The sensor of any one of configurations 1 to 7, wherein the detection circuit is capable of outputting a signal corresponding to a potential difference between a first connection point of the bridge-connected first resistance member and the second resistance element and a second connection point of the bridge-connected first resistance member and the first resistance element.

[0115] (Configuration 9) In the first operation, the first electrical resistance changes depending on the concentration of the detection target contained in the atmosphere around the first detection element and the second detection element, and in the first operation, the second electrical resistance does not change depending on the concentration; or The sensor according to any one of configurations 1 to 8, wherein the change in the second electrical resistance according to the concentration in the first operation is smaller than the change in the first electrical resistance according to the concentration in the first operation.

[0116] (Configuration 10) In the second operation, the second electrical resistance varies with the concentration, and in the second operation, the first electrical resistance does not vary with the concentration; or 10. The sensor of claim 9, wherein the change in the first electrical resistance as a function of the concentration in the second operation is smaller than the change in the second electrical resistance as a function of the concentration in the second operation.

[0117] (Configuration 11) the detection device further comprises a substrate comprising a first substrate region and a second substrate region; the first detection unit is provided in the first base region, 11. The sensor according to any one of configurations 1 to 10, wherein the second detection section is provided in the second substrate region.

[0118] (Configuration 12) the first detection unit further includes a first connection unit and a first support unit; the first support portion is fixed to the base, a portion of the first connection portion is supported by the first support portion; another part of the first connection portion supports the first detection element away from the first base region; the second detection unit further includes a second connection unit and a second support unit; the second support portion is fixed to the base, a portion of the second connection portion is supported by the second support portion; 12. The sensor of claim 11, wherein another portion of the second connection portion supports the second sensing element away from the second base region.

[0119] (Configuration 13) a first gap is provided between the first substrate region and the first detection element; 13. The sensor of claim 12, wherein a second gap is provided between the second substrate region and the second sensing element.

[0120] (Configuration 14) a detection device including a first detection unit and a second detection unit; A switch circuit; a detection circuit; Equipped with the first detection unit includes a first detection element and a first fixed electrode, and the first detection element includes a first conductive member and a first movable electrode; the second detection unit includes a second detection element and a second fixed electrode, and the second detection element includes a second conductive member and a second movable electrode; in a first operation, the switch circuit supplies a first current to the first conductive member and does not supply the first current to the second conductive member, and the detection circuit is capable of outputting a first signal corresponding to a difference between a first capacitance between the first movable electrode and the first fixed electrode and a second capacitance between the second movable electrode and the second fixed electrode; In a second operation, the switch circuit supplies a second current to the second conductive member and does not supply the second current to the first conductive member, and the detection circuit is capable of outputting a second signal corresponding to the difference between the first capacitance and the second capacitance.

[0121] (Configuration 15) 15. The sensor of claim 14, wherein the switch circuit and the detection circuit are capable of repeatedly performing the set of the first operation and the second operation.

[0122] (Configuration 16) the switch circuit and the detection circuit are capable of repeatedly performing the first operation; The sensor of configuration 14, wherein the switch circuit and the detection circuit perform the second operation when the number of times the first operation is repeated exceeds a first number or when a first period for repeatedly performing the first operation exceeds a first value.

[0123] (Configuration 17) the switch circuit and the detection circuit are capable of repeatedly performing the second operation; The sensor of configuration 16, wherein the switch circuit and the detection circuit perform the first operation when the number of times the second operation is repeated exceeds a second number or when a second period for repeatedly performing the second operation exceeds a second value.

[0124] (Configuration 18) Further comprising an operation control unit, The sensor of any one of configurations 14 to 17, wherein the operation control unit is capable of controlling at least one of the transition from the first operation to the second operation and the transition from the second operation to the first operation in the switch circuit.

[0125] (Configuration 19) the detection device further comprises a substrate comprising a first substrate region and a second substrate region; the first detection unit is provided in the first base region, the second detection unit is provided in the second substrate region, the first detection unit further includes a first connection unit and a first support unit; the first support portion is fixed to the base, a portion of the first connection portion is supported by the first support portion; another part of the first connection portion supports the first detection element away from the first base region; the second detection unit further includes a second connection unit and a second support unit; the second support portion is fixed to the base, a portion of the second connection portion is supported by the second support portion; 19. The sensor according to any one of configurations 14 to 18, wherein another part of the second connection portion supports the second detection element away from the second base region.

[0126] (Configuration 20) The sensor according to any one of configurations 1 to 4, An operation control unit; Equipped with The sensor system, wherein the operation control unit is capable of controlling at least one of a transition from the first operation to the second operation and a transition from the second operation to the first operation in the switch circuit.

[0127] According to the embodiment, a sensor and a sensor system capable of stable detection can be provided.

[0128] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the elements included in the sensor, such as the substrate, detection unit, and circuit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0129] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0130] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor described above as an embodiment of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0131] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0132] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0133] 10...detection device, 10A, 10B...first and second detection portion, 11, 12...first and second resistive members, 11A, 12A...first and second movable electrodes, 11E, 12E...first and second detection elements, 11F, 12F...first and second fixed electrodes, 11a, 12a...first and second resistive portions, 11b, 12b...first and second other resistive portions, 15a-15d...first to fourth layers, 16a, 16b...first and second resistive elements, 18A, 18B...first and second insulating portions, 21, 22...first and second conductive members, 21a, 22a...first and second conductive portions, 21b, 22b...first and second other conductive portions, 25...connecting conductive member, 31C to 34C...first to fourth connecting portions, 31S to 34S...first to fourth supporting portions, 31aC to 34aC...first to fourth other connecting portions, 31aS to 34aS...first to fourth other supporting portions, 41...base, 41a, 41b...first and second base regions, 41i...insulating film, 41s...substrate, 51 to 54...first to fourth resistor terminals, 51L to 54L...first to fourth conductive layers, 51M to 54M...wiring layer, 51aL to 54aL...first to fourth other conductive layers, 51aM to 54aM...wiring layer, 61, 62...first and second conductive terminals, 70...control section, 71...switch circuit, 72...detection circuit, 73...AD converter, 74...operation control section, 110, 120...sensor, 210, 220...sensor system, CP1, CP2...first and second connection points, Cs1, Cs2...first and second capacitances, OP1, OP2...first and second operations, Rs1, Rs2...first and second electrical resistances, Sg1, Sg2...first and second signals, Sw1 to Sw6...first to sixth switches, TM1, TM2...first and second terminals, TM3...conductive member terminal, Va...fixed potential, Vh...conductive member voltage, Vs...detection voltage, g1, g2...first and second air gaps, i1, i2...first and second currents

Claims

1. a detection device including a first detection unit and a second detection unit; A switch circuit; a detection circuit; Equipped with the first detection unit includes a first detection element, the first detection element including a first conductive member and a first resistive member; the second detection unit includes a second detection element, the second detection element including a second conductive member and a second resistive member; in a first operation, the switch circuit supplies a first current to the first conductive member and does not supply the first current to the second conductive member, and the detection circuit is capable of outputting a first signal corresponding to a difference between a first electrical resistance of the first resistive member and a second electrical resistance of the second resistive member; In a second operation, the switch circuit supplies a second current to the second conductive member and does not supply the second current to the first conductive member, and the detection circuit is capable of outputting a second signal corresponding to the difference between the first electrical resistance and the second electrical resistance; the switch circuit and the detection circuit are capable of repeatedly performing the first operation; The sensor, wherein the switch circuit and the detection circuit perform the second operation when a first period during which the first operation is repeatedly performed exceeds a first value.

2. the switch circuit and the detection circuit are capable of repeatedly performing the second operation; The sensor of claim 1 , wherein the switch circuit and the detection circuit perform the first operation when a second period of time during which the second operation is repeatedly performed exceeds a second value.

3. Further comprising an operation control unit, 3. The sensor according to claim 1, wherein the operation control unit is capable of controlling at least one of a transition from the first operation to the second operation and a transition from the second operation to the first operation in the switch circuit.

4. The switch circuit a first switch electrically connected to the first conductive member; a second switch electrically connected to the second conductive member; The sensor of claim 1 , comprising:

5. In the first operation, the first electrical resistance changes depending on the concentration of the detection target contained in the atmosphere around the first detection element and the second detection element, and in the first operation, the second electrical resistance does not change depending on the concentration; or The sensor of claim 1 , wherein the change in the second electrical resistance as a function of the concentration in the first operation is smaller than the change in the first electrical resistance as a function of the concentration in the first operation.

6. the detection device further comprises a substrate comprising a first substrate region and a second substrate region; the first detection unit is provided in the first base region, The sensor according to claim 1 , wherein the second detection portion is provided in the second base region.

7. the first detection unit further includes a first connection unit and a first support unit; the first support portion is fixed to the base, a portion of the first connection portion is supported by the first support portion; another portion of the first connection portion supports the first detection element away from the first base region; the second detection unit further includes a second connection unit and a second support unit; the second support portion is fixed to the base, a portion of the second connection portion is supported by the second support portion; The sensor of claim 6 , wherein another portion of the second connecting portion supports the second sensing element away from the second base region.

8. The sensor of claim 1; An operation control unit; Equipped with The operation control unit is capable of controlling at least one of a transition from the first operation to the second operation and a transition from the second operation to the first operation in the switch circuit.

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