Stacking device and stacking method

Abstract

To provide a lamination apparatus which manufactures a laminate of high adhesiveness by modifying surfaces of sheets more easily and without surface destruction under atmospheric air.SOLUTION: The present invention relates to a lamination apparatus 10 for successively laminating sheets L1-L5, in which a polymer sheet is exposed, to be modified by UV irradiation in at least a portion of an adhesive surface. The lamination apparatus 10 comprises: an alignment stage 50 for aligning the sheets L1-L5; a lamination stage 80 on which the aligned sheets L1-L5 are laminated; a transfer holder 60 for moving the sheets L1-L5 from the alignment stage 50 to the lamination stage 80; and a UV irradiation device 100 for performing UV irradiation upon the sheets L1-L5 with a wavelength equal to or less than 350 nm. The UV irradiation device 100 is provided in front of the alignment stage 50, and the UV irradiation is performed in prior to the alignment.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a lamination device equipped with an ultraviolet (UV) irradiation device and a method for manufacturing a laminate. [Background technology]

[0002] Ceramic green sheets (printed polymer sheets) with printed conductor patterns are used in the manufacture of electronic components such as multilayer ceramic capacitors and ceramic substrates. Printed polymer sheets are formed by applying a dielectric material to a carrier film and then screen-printing a metal paste onto the applied dielectric material. Electronic devices are created by precisely stacking the printed polymer sheets, pressing them together, and firing them.

[0003] However, if the adhesion between the stacked sheets is weak, misalignment may occur during the stacking process or during transport, which may lead to poor contact such as broken wires or short circuits in the manufactured electronic components.

[0004] Therefore, as a pretreatment for the lamination and pressure bonding step of printed polymer sheets, the sheets have been subjected to plasma treatment to modify the surface and improve adhesion (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-171151 Summary of the Invention [Problem to be solved by the invention]

[0006] However, to improve adhesion using plasma treatment, the treatment must generally be carried out under vacuum, which increases the installation area, labor, and cost of the equipment. Furthermore, the plasma treatment produces strong light, which may deteriorate the properties of some sheet materials.

[0007] In response to this, UV irradiation is considered to be a more gentle modification method than plasma treatment, but the inventors have found that if the UV irradiation time is extended in order to sufficiently modify the sheet, the sheet will undergo thermal deformation and the lamination accuracy will decrease.

[0008] Therefore, an object of the present invention is to provide a lamination device and a lamination method using the same that can modify the surface of a polymer sheet more easily and without surface destruction in the atmosphere, and produce a laminate with high adhesion without reducing lamination accuracy due to thermal deformation. [Means for solving the problem]

[0009] In order to solve the above problem, a stacking device according to one embodiment of the present invention includes: A lamination device for sequentially laminating sheets each having a polymer sheet that is modified by UV irradiation exposed on at least a portion of its adhesive surface, an alignment stage that aligns the sheet; a stacking stage on which the aligned sheets are stacked; a conveying holder that moves a sheet from the alignment stage to the stacking stage; a UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less, The UV irradiation device is a lamination device that is provided in front of the alignment stage and performs the UV irradiation before the alignment.

[0010] In addition, a lamination method according to another embodiment of the present invention includes: providing a sheet having a polymer sheet that is modified by UV irradiation exposed on at least a portion of its adhesive surface to a UV irradiation stage; irradiating the sheet with UV light at a wavelength of 350 nm or less using a UV irradiation device; providing the UV-irradiated sheet to an alignment stage; aligning the sheet on the alignment stage; a step of transporting the aligned sheet from the alignment stage to a stacking stage by a transport holder; The lamination method includes a step of laminating the aligned sheets on the lamination stage. [Effects of the Invention]

[0011] The present invention can provide a lamination device and lamination method that can modify the surface of a sheet more easily and without surface damage in the atmosphere, and produce a laminate with high adhesion without reducing lamination accuracy due to thermal deformation. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a perspective view showing a stacking device according to an embodiment of the present invention. [Figure 2] 1 is an XZ side view showing a stacking device according to an embodiment of the present invention. [Figure 3] FIG. 10 is a perspective view showing a stacking device according to a modified example of an embodiment of the present invention. [Figure 4] FIG. 10 is an XZ side view showing a stacking device according to a modified example of the embodiment of the present invention. [Figure 5] FIG. 2 is a diagram illustrating a lamination step in a first embodiment using a lamination device according to one embodiment of the present invention. [Figure 6] 3 is a schematic diagram of an adsorption plate used in the stacking device according to one embodiment of the present invention. FIG. [Figure 7] FIG. 10 is a diagram illustrating a lamination step in the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments of the present invention will be described in detail, but the present invention is not limited to these.

[0014] <Overall configuration of stacking device> 1 is a perspective view of a stacking device 10 according to an embodiment of the present invention. In this embodiment, the stacking device 10 includes a controller 20, a sheet stocker 30L1, f~30L5 f The stacking device 10 includes a stocker transport holder 40, an alignment stage 50, a stacking transport holder 60, a stacking stage 80, a pressure bonding device 90, a UV irradiation device 100, and a UV irradiation stage 110 equipped with an inversion mechanism. The stacking device 10 may also include a charging unit, such as a stage charger 68, a holder charger 70, a stage static eliminator 72, and a holder static eliminator 74.

[0015] In FIG. 1, the X-axis, Y-axis, and Z-axis are appropriately used as directional axes for explaining the layout of the stacking device 10. The X-axis is an axis along the movement direction of the stacking conveying holder 60. The Y-axis is an axis perpendicular to the X-axis on a horizontal plane. The Z-axis is a vertical axis perpendicular to the X-axis and Y-axis, and is equal to the stacking direction of the sheets L1 to L5 (see FIGS. 2 and 5) to be stacked. In addition, in explaining the arrangement of each mechanism of the stacking device 10, the sheet stocker 30L1 f ~30L5 f The side facing the stacking stage 80 along the X axis is the downstream side.

[0016] (sheet) The sheets L1 to L5 are sheets to be laminated by the lamination device 10. Each of the sheets L1 to L5 has a polymer sheet that is modified by UV irradiation exposed on at least a part of the surface where the sheets contact each other when bonded (hereinafter referred to as the bonding surface). In one embodiment of the present invention, the bonding surface of the sheets L1 to L5 is provided with a protective film f. In this specification, the sheets L1 to L5 that are provided with the protective film are respectively referred to as L1. f ~L5 f As will be described later, the protective films are preferably peeled off after the sheets L1 to L5 are irradiated with UV light and before the alignment step.

[0017] The polymer sheets forming the sheets L1 to L5 are heat-resistant. The polymer sheets are formed by applying a dielectric material containing a polymer that is modified by UV irradiation onto a carrier film. For example, the polymer sheets may be ceramic green sheets formed by laminating a ceramic precursor onto a carrier film using a doctor blade method or the like. The carrier film can be used as a protective sheet for the sheets L1 to L5.

[0018] Furthermore, the sheets L1 to L5 may be printed polymer sheets in which a metal pattern is formed on an applied dielectric material. The printed polymer sheets are formed, for example, by applying a dielectric material containing a polymer that is modified by UV irradiation onto a carrier film, and then screen-printing a metal paste. The printed polymer sheets have at least 20% or more of the adhesive surface exposed, and preferably 50% or more of the adhesive surface exposed. The sheets L1 to L5 laminated by the lamination device 10 may each be a printed polymer sheet, or a polymer sheet without a metal pattern.

[0019] The polymer used for the polymer sheets of sheets L1 to L5 may be any polymer that can be modified by UV irradiation and has heat resistance, and preferably includes liquid crystal polymer (LCP), cycloolefin polymer (COP), polyethylene terephthalate (PET), polyimide (PI), polyethylene (PE), and polycarbonate (PC).

[0020] The sheets L1 to L5 may each have an adhesive layer. The sheets L1 to L5 may also each have a protective film for the adhesive layer, which is peeled off after the UV irradiation step.

[0021] The protective film f may be any film having sufficient heat resistance and abrasion resistance to protect the adhesive surface. As will be described later, when UV irradiation is performed from the protective film f side, the protective film f is preferably UV-transparent. For example, a PET film can be used as the protective film f.

[0022] (sheet stocker) Sheet Stocker 30L1 f ~30L5 f Includes sheet L1 with protective film f ~L5 f In this embodiment, the sheet L1 provided with the protective film is accommodated. f ~L5 f The explanation will be given using the sheet stocker 30L1. f ~30L5 f A sheet without a protective film may be housed in the container, and various steps described below may be carried out even in the absence of the protective film f.

[0023] In FIG. 1, the sheet L1 provided with the protective film f ~L5 f is shown as a so-called branch-type sheet, and the sheet stocker 30L1 f ~30L5 f Sheet L1 with a protective film of the branched type f ~L5 f However, the laminating device 10 according to the present embodiment is not limited to this form. For example, a sheet roll on which a plurality of sheets are continuously formed may be formed by laminating a sheet L1 having a protective film thereon. f ~L5 f In this case, the sheet stocker 30L1 may be provided with a cutter for cutting the sheet roll. f ~30L5 f Sheet L1 with protective film f ~L5 f The roll holders are configured to hold the sheet rolls corresponding to the rolls.

[0024] (Transport holder for stocker) The stocker conveying holder 40 is a sheet stocker 30L1 f ~30L5 f and the UV irradiation stage 110. The stocker transport holder 40 is provided upstream of the stacking transport holder 60, and is therefore also called the "pre-stage holder."

[0025] The stocker transport holder 40 is movable in the X-axis direction and the Y-axis direction, and the sheet stockers 30L1, 30L2, 30L3, 30L4, 30L5, 30L6, 30L7, 30L8, 30L9, 30L10, 30L11, 30L12, 30L13, 30L14, 30L15, 30 f ~30L5 f Sheet L1 with protective film from f ~L5 f The stocker transport holder 40 is movable, for example, along an X-axis stage and a Y-axis stage (not shown).

[0026] An attraction plate 44 is provided at the lower end of the lift mechanism 42. The lift mechanism 42 moves the attraction plate 44 in the Z-axis direction (vertical direction).

[0027] The suction plate 44 is made of a metal plate such as an aluminum plate, and has a structure in which a plurality of air holes are provided. The lower ends of the air holes are exposed, and the upper ends are connected to an air pipe 46. Air at negative pressure (Vac) and static pressure (Prs) is supplied to the air pipe 46. The sheet L1 provided with a protective film f ~L5 f When the sheet L1 is attached to the protective film, the air pipe 46 is evacuated. f ~L5 f When the sheet L1 is removed, pressurized air is supplied from the air pipe 46. f ~L5 f A soft porous sheet may be provided on the contact surface of the adsorption plate 44 that comes into contact with the object.

[0028] (UV irradiation device) The laminating device 10 is equipped with a UV irradiation device 100 that activates the sheets by UV irradiation and improves the adhesiveness between the sheets when they are laminated. f ~30L5 f Sheet L1 with protective film shipped from f ~L5 f In order to perform UV irradiation, the substrate is placed on a UV irradiation stage 110 facing the UV irradiation device 100. In one embodiment, the UV irradiation stage 110 may include an inversion mechanism, which will be described later.

[0029] UV irradiation is sheet L1 f ~L5 f While irradiating a part of the UV irradiated surface (irradiation surface) of the sheet L1 equipped with a protective film, f ~L5 f Alternatively, the entire irradiation surface can be irradiated by moving either one of the UV irradiation devices 100 (see FIGS. 1 and 2). In a modified example of this embodiment, the entire irradiation surface may be irradiated at once (see FIGS. 3 and 4). The UV irradiation is performed by irradiating the sheet L1 with the protective film. f ~L5 f As long as the UV rays can be irradiated in a direction opposite to each other, the UV irradiation may be performed in any direction (for example, from the positive Z-axis direction to the negative Z-axis direction, or from the negative Z-axis direction to the positive Z-axis direction). Note that the following description will be given of the embodiment shown in FIGS. 1 and 2.

[0030] In one embodiment of the present invention, as shown in FIG. 1, the UV irradiation device 100 is installed opposite to the UV irradiation stage 110, and the sheet L1 with the protective film installed on the UV irradiation stage 110 is f ~L5 f The UV light source is installed facing the irradiation surface from above.

[0031] In one embodiment, the width of the UV light source of the UV irradiation device 100 is the width of the sheet L1 f ~L5 f Sheet L1 is narrower in the X-axis direction than sheet L1, which is equipped with a protective film. f ~L5 f The UV irradiation device 100 moves above the sheet L1 f ~L5 f In another embodiment, the UV irradiation device is a sheet L1 with a protective film. f ~L5 f The sheet L1 has a UV light source (not shown) large enough to expose the irradiation surface of the sheet L1 at once, and is provided with a protective film. f ~L5 f is placed opposite to the light source of the UV irradiation device 100 and is irradiated with UV.

[0032] For example, in Fig. 1, the UV irradiation device 100 irradiates UV light downward (negative direction of the Z axis). f ~L5 f is placed on a UV irradiation stage 110, and when the UV irradiation device 100 moves in the X-axis direction while irradiating UV light, the polymer sheet placed on the UV irradiation stage 110 is modified by the UV light.

[0033] In many cases, UV irradiation is performed from the side where the polymer sheet is exposed, but this is not limited thereto, and if UV modification of the polymer sheet is possible, it may be performed from the side of the protective film f. When UV modification of the polymer sheet is performed from the side of the protective film f, it is preferable that the protective film f be made of a material that transmits the irradiated UV.

[0034] The UV light source of the UV irradiation device may be any light source that generates UV light with a wavelength of 350 nm or less. For example, an excimer lamp with a wavelength of 172 nm, a low-pressure mercury lamp with a wavelength of 185 nm or 254 nm, or a UV-LED with a wavelength of 265 nm, 280 nm, or 310 nm can be used. By using a UV light source with a wavelength of 350 nm or less, chemical bonds are broken and oxygen species are activated on the sheet surface, resulting in surface modification of sheets L1 to L5, although this is not limited to these.

[0035] The cumulative dose of UV irradiation by the UV irradiation device 100 depends on the material of the sheets L1 to L5, but is preferably set to a level that improves the adhesion of the sheets L1 to L5 and does not damage the surfaces of the sheets L1 to L5. Preferably, it is set to 1000 mJ / cm. 2 More than 1000000mJ / cm 2 or less, more preferably 20,000 mJ / cm 2 More than 1000000mJ / cm 2 or less, and more preferably 20,000 mJ / cm 2 More than 200000mJ / cm 2By irradiating UV rays under these conditions, the surfaces of the sheets L1 to L5 are modified, and the adhesive strength when stacked is improved. The integrated irradiation dose of the UV irradiation device 100 onto the sheets L1 to L5 is 1000 mJ / cm 2 2 If it is less than 100,000 mJ / cm 2 , the effect of improving adhesion is insufficient. 2 If the thickness is larger, the irradiation time will be longer, which will reduce productivity. In addition, if plasma irradiation is performed, the surface of the sheet may be destroyed to a depth of 1 μm or more, which may have a negative effect on the properties.

[0036] As described above, the UV irradiation device 100 is placed opposite the sheet surface at a distance such that UV from the UV irradiation device 100 is sufficiently irradiated onto the sheets L1 to L5. The distance (WD) between the UV light source and the sheet surface can be adjusted as appropriate depending on the optical system used. For example, if the UV light source is an excimer lamp (wavelength 172 nm), the WD can be set to approximately 1 mm or more and 5 mm or less, and if the UV light source is a UV-LED lamp (wavelength 250 nm or more and 365 nm or less), the WD can be set to approximately 5 mm or more and 50 mm or less. If the distance between the UV light source and the sheet surface is too close, uneven illuminance is likely to occur. Furthermore, if the distance between the UV light source and the sheet surface is too far, the illuminance from the UV light source will be low, and sufficient surface modification will not be achieved.

[0037] The UV-LEDs may also be installed in a line (straight line) as shown in Figure 1. In this case, they may be sized to be 30 mm or more wide in the conveyance direction (X-axis) and several mm longer in the direction perpendicular to the conveyance direction (Y-axis) than the Y-axis dimension of the sheets L1 to L5. Using a UV light source of this size makes it possible to provide uniform and sufficient illuminance while maintaining productivity.

[0038] As already mentioned, UV irradiation may cause thermal expansion of the UV-irradiated sheets L1 to L5. Since thermal expansion may deform the sheets and cause the four corners to lift, it is preferable that the UV irradiation stage 110 has a sheet fixing mechanism. The sheet fixing mechanism may be configured using vacuum suction with multiple suction ports, a mechanical chuck, magnetic force, or a combination of these. When vacuum suction with suction ports is used as the sheet fixing mechanism, the suction ports are provided on a suction plate 110a provided on the top surface of the UV irradiation stage 110. Examples of suction plates 110a with suction ports on their surfaces are shown in Figures 6(a) to 6(c).

[0039] The suction plate 110a may be configured so that the entire suction surface has a constant suction force, or may have areas with stronger suction force than other parts of the suction surface. For example, in Figures 6(a) to 6(c), corner areas of the UV irradiation stage 110 are provided with areas (A) with stronger suction force than other areas (B), allowing the four corners of the sheet L to be more firmly fixed.

[0040] The suction force may be adjusted, for example, by changing the distribution of the suction port holes provided on the suction plate 110a. In FIGS. 6(a) and 6(b), areas (A) with a large number of suction ports within a single area are provided at the four corners of the suction plate 110a. Area A can have a stronger suction force than area (B) with a small number of suction ports within a single area. As shown in FIGS. 6(a) and 6(b), sheet L can be fixed to the suction plate 110a regardless of the size of the sheet L, as long as it is large enough to be placed in area B. In a modified version of the suction plate 110a shown in FIG. 6(c), area A is arranged in a diagonal strip shape, and the area A in contact with a smaller sheet L is larger, allowing for stronger fixation of the sheet L. To increase the suction force, the suction force of the suction lines connected to the areas with increased suction force may be increased. Furthermore, both of these may be used in combination to improve the suction force.

[0041] (reversal mechanism) The reversing mechanism uses a sheet L1 with a UV-irradiated protective film.f ~L5 f In one embodiment of the present invention, the UV irradiation stage 110 may be provided with a reversing mechanism (see FIGS. 1 to 5). f ~L5 f After being irradiated with UV light by a UV irradiation device 100, the substrate is inverted by a UV irradiation stage 110 equipped with an inversion mechanism (see FIG. 5).

[0042] In another embodiment, the inversion mechanism is incorporated into the apparatus as a separate component from the UV irradiation stage. f ~L5 f is irradiated with UV on a separate UV irradiation stage (not shown), and then placed on the inversion stage of the inversion mechanism and inverted.

[0043] Furthermore, in other embodiments of the present invention, the device may not include a flip mechanism. For example, the sheet L1 with the protective film f ~L5 f When UV irradiation is performed from the protective film side, the polymer sheets L1 to L5 can be laminated without turning the sheets over.

[0044] The inversion mechanism includes an inversion stage and an inversion unit drive mechanism (not shown) that moves the inversion unit in the X-axis direction, moves it in the Z-axis direction, and rotates it around the Y-axis. The rotation axis of the inversion stage may be located at any position as long as it can rotate around the Y-axis. For example, it may be an axis extending from the center of the inversion stage in the X-axis direction in the Y-axis direction, or it may be an axis extending from one of the ends of the inversion stage in the X-axis direction in the Y-axis direction.

[0045] The inversion mechanism places sheet L1 on the inversion stage. f ~L5 fThe sheet fixing mechanism may be configured by vacuum suction using a plurality of suction ports provided on the inversion stage, a mechanical chuck, magnetic force, or a combination of these. Note that the holding force of the sheet fixing mechanism is such that when the inversion stage is inverted, the sheet L1 is removed from the inversion stage. f ~L5 f is preset to a value that will prevent it from falling.

[0046] (Alignment stage) The alignment stage 50 is a stage for aligning the UV-irradiated sheets L1 to L5. In one embodiment of the present invention, the polymer sheets L1 to L5 are provided with a protective film f, and the protective film f is peeled off from the sheets L1 to L5 before alignment. The protective film f may be peeled off while the sheets L1 to L5 are placed on the alignment stage 50. In another embodiment, the sheet L1 with the protective film f ~L5 f After the UV irradiation, the protective film f may be peeled off on a separate peeling stage (not shown), and then the sheets L1 to L5 may be placed on the alignment stage 50.

[0047] The alignment stage 50 includes a moving mechanism 52, a stage plate 53 serving as a mounting base, and an alignment camera 56.

[0048] The movement mechanism 52 is configured to be able to move the stage plate 53 in the X-axis and Y-axis and to rotate the stage plate 53 about the Z-axis as a rotation axis. The stage plate 53 includes a light-transmitting plate 54, which is a light-transmitting member. The light-transmitting plate 54 is provided in at least a portion of the sheet placement area where the sheets L1 to L5 are placed. For example, as shown in FIG. 1, the portions of the stage plate 53 corresponding to the four corners of the sheets L1 to L5 may be made of the light-transmitting plate 54. Alternatively, two diagonally opposite corners of the four corners of the sheets L1 to L5 may be made of the light-transmitting plate 54, or a single light-transmitting plate 54 may be provided on the stage plate 53, including the portions corresponding to the four corners of the sheets L1 to L5.

[0049] A plurality of alignment cameras 56 are provided below the stage plate 53. For example, the alignment cameras 56 are arranged at positions where they can capture images of the four corners or two diagonal corners of the sheets L1 to L5. The alignment cameras 56 are capable of capturing images of the sheets L1 to L5 placed on the stage plate 53 through a light-transmitting plate 54 (light-transmitting member). Based on the images from the alignment cameras 56, the alignment stage 50 is moved to align the sheets L1 to L5.

[0050] After UV irradiation, sheets L1 to L5 are cooled to the ambient temperature (the temperature of sheets L1 to L5 before UV irradiation) before they are aligned. By cooling sheets L1 to L5 to the temperature before UV irradiation, expansion due to heat or contraction due to cooling of sheets L1 to L5 after they are placed on alignment stage 50 is suppressed.

[0051] The UV-irradiated sheets L1 to L5 may be cooled by placing the sheets on the UV irradiation stage or the alignment stage 50 and leaving them there for a certain period of time. In another embodiment, a cooling mechanism (not shown) may be used to cool the sheets L1 to L5 on the UV irradiation stage or the alignment stage 50. The cooling mechanism may be an air-cooling mechanism. An air-cooling mechanism is preferred because it allows the cooling process to be controlled by controlling the airflow intensity, airflow time, etc. An air-blowing mechanism, a fan-equipped ionizer, or the like may be used as the air-cooling mechanism.

[0052] (Stacking transport holder) The stacking conveying holder 60 holds the sheets L1 to L5 aligned on the alignment stage 50 by vacuum suction and conveys them to the stacking stage 80. For example, if the alignment stage 50 and the stacking stage 80 are arranged on the X axis, the stacking conveying holder 60 can move only along the X axis.

[0053] 2, the stacking conveying holder 60 has substantially the same structure as the stocker conveying holder 40. That is, the stacking conveying holder 60 includes a lift mechanism 62, a suction plate 64 provided at the lower end of the lift mechanism 62, and an air pipe 66 connected to the suction plate 64.

[0054] The lift mechanism 62 moves the attraction plate 64 in the Z-axis direction (vertical direction).

[0055] The suction plate 64 has a structure in which a plurality of air holes are formed in a metal plate, such as an aluminum plate. The lower ends of the air holes are exposed, and the upper ends are connected to an air pipe 66. Air at negative pressure (Vac) and static pressure (Prs) is supplied to the air pipe 66. When the sheets L1 to L5 are suctioned, the air pipe 66 is evacuated. When the sheets L1 to L5 are released, pressurized air is supplied from the air pipe 66. A soft porous sheet may be provided on the contact surface of the suction plate 64 that comes into contact with the sheets L1 to L2. The suction plate 64 may have improved suction power at the four corners, as shown in FIG. 6.

[0056] (Stacking stage) As described above, sheets L1 to L5 are transported from alignment stage 50 to stacking stage 80 by stacking transport holder 60 and stacked. Suction holes (not shown) for holding the bottom sheet L5 may be formed on the mounting surface of stacking stage 80, where the final stack is formed. These suction holes are connected to air pipes 82, as shown in FIG. 2. Negative pressure is drawn from air pipes 82, thereby holding the bottom sheet L5 on stacking stage 80. Alternatively, instead of vacuum suction, an adhesive sheet may be provided on the mounting surface of stacking stage 80.

[0057] (Fixed unit) The sheets L1 to L5 are aligned on the alignment stage 50 and stacked on the stacking stage 80, and are preferably fixed so that the stacked sheets L1 to L5 do not shift before being pressed together. The stacked sheets can be fixed using a common method, such as mechanical fixing, fixing with an adhesive, fixing by thermal welding, or fixing by electrostatic lamination.

[0058] In one embodiment of the present invention, the sheet stack is fixed by electrostatic stacking. The stacking device 10 includes, as a charged stacking fixing unit, a stacking conveying holder 60, a charger and a static eliminator that irradiate charged particles onto the sheets L1 to L5 conveyed by the holder, and the stack intermediate body that is stacked on the stacking stage 80.

[0059] Specifically, the lamination device 10 includes a stage charger 68, a holder charger 70, a stage static eliminator 72, and a holder static eliminator 74. These chargers and static eliminators are configured by, for example, ionizers.

[0060] The stage charger 68 irradiates charged particles toward the mounting surface of the stacking stage 80 and the exposed surfaces of the sheets L1 to L5 stacked on the stacking stage 80. The stage charger 68 may be movable relative to the stacking stage 80. For example, as illustrated in FIG. 1, the stage charger 68 is attached to the downstream end of the stacking conveying holder 60 (at a position closer to the stacking stage 80), and is movable on the X-axis together with the transfer conveying holder 60.

[0061] The holder charger 70 and the holder static eliminator 74 are movable relative to the stacking transport holder 60 in the X-axis direction, i.e., along the movement direction of the stacking transport holder 60. The holder charger 70 and the holder static eliminator 74 are provided between the alignment stage 50 and the stacking stage 80, and are positioned above where the stacking transport holder 60 passes. Preferably, the charging holder charger 70 and the holder static eliminator 74 are provided downstream of the UV irradiation device 100. By providing them downstream of the UV irradiation device 100, static elimination by UV irradiation can be avoided.

[0062] For example, the holder charger 70 and the holder static eliminator 74 irradiate charged particles upward (positive direction of the Z axis). Therefore, when the stacking transport holder 60 is irradiated with charged particles while moving over the holder charger 70 and the holder static eliminator 74, the charged particles are incident on the exposed surfaces of the sheets L1 to L5 being transported. If the holder charger 70 and the holder static eliminator 74 are provided downstream of the UV irradiation device 100, the charged particles will be incident on the surfaces of the sheets L1 to L5 being transported that have been surface-modified by UV light.

[0063] The holder charger 70 and the holder static eliminator 74 may define an irradiation spot of charged particles on the exposed surfaces in an area smaller than the exposed surfaces of the sheets L1 to L5 held by the stacking conveying holder 60. For example, an area shorter than the length of the sheets L1 to L5 in the X-axis direction becomes the irradiation spot of the holder charger 70 and the holder static eliminator 74 on the exposed surfaces of the sheets L1 to L5. On the other hand, the length of the irradiation spot in the Y-axis direction may be equal to or greater than the length of the sheets L1 to L5 in the Y-axis direction. By moving the stacking conveying holder 60 and the holder charger 70 and the holder static eliminator 74 relative to each other in the X-axis direction, it becomes possible to irradiate the charged particles over the entire exposed surfaces of the sheets L1 to L5 conveyed to the stacking conveying holder 60.

[0064] The stage static eliminator 72 may be fixed to, for example, the stacking stage 80. For example, the stage static eliminator 72 is capable of irradiating the entire surface of the mounting surface of the stacking stage 80 with charged particles.

[0065] These charged stacking and fixing units apply charged particles to the stacking conveying holder 60, the sheets L1 to L5 conveyed by the holder, and the stacking intermediate body stacked on the stacking stage 80, thereby fixing the stacked structure.

[0066] (crimping tool) The laminate thus fixed is compressed vertically, i.e., in the stacking direction, while being heated by a pressure bonding device 90. As a result of this compression process, each layer of the final laminate is fixed. The lamination device 10 may include the pressure bonding device 90 as a part thereof, or may include the pressure bonding device 90 as a separate device.

[0067] (Controller) The controller 20 controls each device of the stacking device 10. For example, the controller 20 includes a stocker transport holder control unit, a reversing unit control unit, an alignment stage control unit, a stacking transport holder control unit, a UV irradiation device control unit, a sheet information storage unit, a charger control unit, a static eliminator control unit, and a pressure bonding device control unit. The controller 20 is configured, for example, by a computer.

[0068] <Lamination step in the first embodiment> Next, a lamination step of the sheets L1 to L5 in a first embodiment using the lamination device 10 of one embodiment of the present invention will be described with reference to FIGS.

[0069] FIG. 5 is a schematic diagram showing the lamination process of the sheet L3.

[0070] Sheet L3 with protective film f Sheet Stocker 30L3 f Then, the polymer sheet L3 is transported onto the UV irradiation stage 110 by the stocker transport holder 40, and is fixed in place so as to face the UV irradiation device 100 (FIG. 5(a)).

[0071] Next, the UV irradiation device 100 f UV light is irradiated towards the target (Figure 5(b)).

[0072] After UV irradiation, the UV-irradiated protective film-equipped sheet L3 is turned over by a reversing mechanism provided on the UV irradiation stage 110. f After the inversion, the sheet L3 with the protective film is f may be placed on the stage plate 53 of the alignment stage 50.

[0073] Before being placed on the stage plate 53 of the alignment stage 50, the sheet L3 is provided with a protective film. f The sheet L3 provided with the protective film is cooled to the ambient temperature (temperature before UV irradiation). The cooling may be performed by a cooling mechanism such as an air cooling mechanism. f Even if the stage plate 53 is placed on the stage plate 53, the stage plate will not expand or contract due to heat or the like.

[0074] Next, the protective film f attached to the surface of the alignment stage 50 L3 opposite to the surface that abuts against the stage plate 53 is peeled off by a peeling unit (not shown) (FIG. 5(d)).

[0075] Next, based on the image of the sheet L3 placed on the stage plate 53 taken by the alignment camera 56, the positional and angular deviation of the sheet L3 is corrected by moving the alignment stage 50 (FIG. 5(e)).

[0076] The sheet L3 whose position has been corrected is conveyed from the alignment stage 50 to the stacking stage 80 by the conveying holder 60 for stacking.

[0077] Furthermore, while the sheet L3 is being transported from the alignment stage 50 to the stacking stage 80, charged particles are incident on the sheet L3 by a charging unit.

[0078] Sheet L3, which has been surface modified and charged by UV irradiation while being transported by the stacking transport holder 60, is then stacked on sheet L2, which is already stacked on sheet L1, on the stacking stage 80 so that the UV-irradiated surface is in contact with the sheet L2 (Figure 5(f)).

[0079] The laminated intermediate body (FIG. 5(g)) obtained in this manner may be further subjected to the lamination process (FIGS. 5(a) to (f)) repeatedly, and after the desired lamination is performed, the laminated intermediate body is heated and pressed by a pressure bonding device 90 (not shown) to provide a laminated body.

[0080] <Lamination step in the second embodiment> The lamination step (FIG. 7) in the second embodiment of the present invention will be described below. In the lamination step of the second embodiment, the sheet L3 provided with the protective film is used in comparison with the lamination step of the first embodiment. f The difference is that the lamination process is carried out in an upside-down state.

[0081] Sheet L3 with protective film f Sheet Stocker 30L3 f Then, the protective film f is transported onto the UV irradiation stage 110 by the stocker transport holder 40, and is fixed in a state in which it faces the UV irradiation device 100 (FIG. 7(a)).

[0082] Next, UV irradiation is performed by a UV irradiation device 100 (FIG. 7(b)). The wavelength of the UV irradiation used here is a wavelength that can be transmitted through the carrier film f. For example, if the carrier film f is made of PET, a UV wavelength longer than 310 nm will be used.

[0083] After UV irradiation, the sheet L3f with the protective film is cooled to the ambient temperature (temperature before UV irradiation). The cooling may be performed by a cooling mechanism such as an air cooling mechanism. f is placed on the stage plate 53 of the alignment stage 50 by the transfer mechanism.

[0084] Next, the protective film f attached to the surface of the alignment stage 50 of L3 opposite to the surface that abuts against the stage plate 53 is peeled off by a peeling unit (FIG. 7(c)).

[0085] After the peeling process, the positional and angular deviations of the sheet L3 are corrected by moving the alignment stage 50 based on the image of the sheet L3 placed on the stage plate 53 taken by the alignment camera 56 (Figure 7(d)).

[0086] The sheet L3 whose position has been corrected is conveyed from the alignment stage 50 to the stacking stage 80 by the conveying holder 60 for stacking.

[0087] Furthermore, while the sheet L3 is being transported from the alignment stage 50 to the stacking stage 80, charged particles are incident on the sheet L3 by a charging unit.

[0088] Sheet L3, which has been surface-modified and charged by UV irradiation while being transported by the transport holder 60 for lamination, is then laminated on the lamination stage 80 so that the surface from which the carrier film f has been peeled faces the opposite side of sheet L2, which has already been laminated on sheet L1 (FIG. 7(e)). An adhesive layer may be provided on the surface of sheet L3 from which the carrier film f has been peeled. In this case, in addition to the adhesion provided by the adhesive layer, the improved adhesion due to UV irradiation allows for a more secure fixation of the laminate.

[0089] The laminated intermediate body thus obtained may be subjected to further lamination steps, and after the desired lamination is achieved, it is heated and pressed using a pressure bonding device 90 (not shown) to provide a laminate (Figure 7(f)).

[0090] (Embodiments of the invention) The first embodiment of the present invention is A lamination device that sequentially stacks sheets having an exposed polymer sheet that can be modified by UV irradiation on at least a portion of the adhesive surface, the lamination device comprising: an alignment stage that aligns the sheets; a lamination stage on which the aligned sheets are stacked; a transport holder that moves the sheets from the alignment stage to the lamination stage; and a UV irradiation device that irradiates the sheets with UV light at a wavelength of 350 nm or less, the UV irradiation device being located in front of the alignment stage, and the UV irradiation being performed before the alignment.

[0091] This brings about the effect that the surface of the sheet can be modified more easily in the atmosphere without surface damage, and a laminate with high adhesiveness can be produced.

[0092] The second embodiment of the present invention is the first embodiment, wherein the integrated dose of the UV irradiation is 1000 mJ / cm 2 . 2 More than 100000mJ / cm 2 The point is that:

[0093] This provides the effect of sufficiently modifying the surface of the sheet even in the atmosphere without damaging the surface, thereby improving adhesion.

[0094] A third embodiment of the present invention is characterized in that, in the first or second embodiment, the distance between the sheet and the UV light source of the UV irradiation device during the UV irradiation is 5 mm or more and 50 mm or less.

[0095] This has the effect of preventing unevenness in illuminance, providing sufficient illuminance from the UV light source, and performing surface modification sufficient to improve adhesion.

[0096] A fourth embodiment of the present invention is characterized in that, in any one of the first to third embodiments, the sheet is a ceramic green sheet.

[0097] This makes it possible to provide a ceramic green sheet laminate with high adhesion, and as a result, it is possible to provide a multilayer ceramic electronic component with little misalignment.

[0098] A fifth embodiment of the present invention is characterized in that in any one of the first to fourth embodiments, the stacking device further comprises a fixing unit that fixes the stacked sheets.

[0099] This has the effect of further fixing the stacked sheets so that they do not slip out of place.

[0100] A sixth embodiment of the present invention is the fifth embodiment, wherein the fixing unit includes a charger and a static eliminator that irradiate charged particles onto the sheets stacked on the stacking stage.

[0101] This provides the effect of causing charged particles to be incident on the transport holder, the sheet transported by the holder, and the sheets stacked on the stacking stage, thereby fixing the stacked structure.

[0102] A seventh embodiment of the present invention is The lamination method includes the steps of providing a sheet having a polymer sheet that is modified by UV irradiation exposed on at least a portion of its adhesive surface to a UV irradiation stage, irradiating the sheet with UV light at a wavelength of 350 nm or less using a UV irradiation device, providing the UV-irradiated sheet to an alignment stage, aligning the sheet on the alignment stage, transporting the aligned sheet from the alignment stage to a stacking stage by a transport holder, and stacking the aligned sheet on the stacking stage.

[0103] This brings about the effect that the surface of the sheet can be modified more easily in the atmosphere without surface damage, and a laminate with high adhesiveness can be produced.

[0104] An eighth embodiment of the present invention is the seventh embodiment, further comprising a step of irradiating the UV-irradiated sheet with charged particles from a charger before the sheet is stacked on the stacking stage.

[0105] This has the effect of further fixing the stacked sheets so that they do not slip out of place.

[0106] A ninth embodiment of the present invention is the seventh or eighth embodiment, wherein the integrated dose of the UV irradiation is 1000 mJ / cm 2 More than 100000mJ / cm 2 The point is that:

[0107] This provides the effect of sufficiently modifying the surface of the sheet even in the atmosphere without damaging the surface, thereby improving adhesion.

[0108] A tenth embodiment of the present invention is any one of the seventh to ninth embodiments, in which the distance between the sheet and the UV light source of the UV irradiation device during the UV irradiation is 5 mm or more and 50 mm or less.

[0109] This has the effect of preventing unevenness in illuminance, providing sufficient illuminance from the UV light source, and performing surface modification sufficient to improve adhesion. [Explanation of symbols]

[0110] 10. Stacking device 20 Controller 30L1 f Sheet Stocker 30L1 f Sheet Stocker 30L3 f Sheet Stocker 30L4 f Sheet Stocker 30L5 f Sheet Stocker 40 Stocker transport holder 42 Lift mechanism 44 Adsorption plate 46 Air piping 50 Alignment Stage 52 Moving mechanism 53 Stage Plate 56 Alignment Camera 60 Stacking transport holder 62 Lift mechanism 64 Adsorption plate 66 Air piping 68 Stage charger 70 Holder charger 72 Stage static eliminator 74 Holder static eliminator 80 Stacking Stage 82 Air piping 90 Crimping Tool 100 UV irradiation device 110 UV irradiation stage with inversion mechanism 110a Suction plate 110b UV irradiation stage main body f Protective film L seat L1 sheet L2 sheet L3 seat L4 seat L5 seat L1 f Sheet with protective film L2 f Sheet with protective film L3 f Sheet with protective film L4 f Sheet with protective film L5 f Sheet with protective film L1': modified part of sheet L1 L2': modified part of sheet L2 L3' Modified part of sheet L3 L4' Modified part of sheet L4 L5' Modified part of sheet L5

Claims

1. A lamination device for sequentially laminating sheets each having a polymer sheet that is modified by UV irradiation exposed on at least a portion of an adhesive surface thereof, an alignment stage that aligns the sheet; a stacking stage on which the aligned sheets are stacked; a conveying holder that moves a sheet from the alignment stage to the stacking stage; a UV irradiation device that irradiates the sheet with UV light at a wavelength of 350 nm or less, The UV irradiation device is provided in front of the alignment stage, and the UV irradiation is performed before the alignment.

2. The cumulative dose of the UV irradiation is 1000 mJ / cm 2 More than 1000000mJ / cm 2 2. The stacking device according to claim 1, wherein:

3. The lamination device according to claim 1 or 2, wherein during the UV irradiation, a distance between the sheet and a UV light source of the UV irradiation device is 5 mm or more and 50 mm or less.

4. 4. The lamination device according to claim 1, wherein the sheets are ceramic green sheets.

5. The stacking device according to claim 1 , further comprising a fixing unit that fixes the stacked sheets.

6. The stacking device according to claim 5, wherein the fixing unit is provided between the UV irradiation device and the stacking stage, and includes a charger and a de-ionizer that irradiate charged particles onto the sheets stacked on the stacking stage after the UV irradiation.

7. providing a sheet having a polymer sheet that is modified by UV irradiation exposed on at least a portion of its adhesive surface to a UV irradiation stage; irradiating the sheet with UV light at a wavelength of 350 nm or less using a UV irradiation device; providing the UV-irradiated sheet to an alignment stage; aligning the sheet on the alignment stage; a step of transporting the aligned sheet from the alignment stage to a stacking stage by a transport holder; and stacking the aligned sheets on the stacking stage.

8. The lamination method according to claim 7 , further comprising the step of irradiating the UV-irradiated sheets with charged particles from a charger before the sheets are laminated on the lamination stage.

9. The cumulative dose of the UV irradiation is 1000 mJ / cm 2 More than 100000mJ / cm 2 9. The lamination method according to claim 7 or 8, wherein:

10. The lamination method according to claim 7 , wherein during the UV irradiation, a distance between the sheet and a UV light source of the UV irradiation device is 5 mm or more and 50 mm or less.

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