Conveyor device and electron beam irradiation device

Abstract

To provide a conveyance device and an electron beam irradiation device that achieve simplification of a configuration about a shield member and can shorten a time required for conveyance of a workpiece passing through the shield member.SOLUTION: First shield parts 14x and 15x and second shield parts 14y and 15y are integrally provided in shield members 14 and 15 to be used in a conveyance device 13. The first shield parts 14x and 15x and the second shield parts 14y and 15y of the shield members 14 and 15 are configured to alternately work in conjunction with a conveyance movement of a workpiece W. In a state of allowing the conveyance movement of the workpiece W in the first shield parts 14x and 15x, the second shield parts 14y and 15y are configured to put a carry-in inlet 12a and carry-out outlet 12b of an X-line segment 12x into a closed state. In a state of allowing the conveyance movement of the workpiece W in the second shield parts 14y and 15y, the first shield parts 14x and 15x are configured to put the carry-in inlet and carry-out outlet thereof into the closed state. Further, in a process of alternately working, the closed state is maintained by at least one side of the first shield parts 14x and 15x and the second shield parts 14y and 15y.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transport device and an electron beam irradiation device that transports articles into and out of an X-ray compartment. [Background technology]

[0002] For example, in an electron beam irradiation device or other device that has a compartment where X-rays may be generated, it is necessary to provide an X-ray compartment to prevent X-rays from leaking outside. In this electron beam irradiation device, the X-ray compartment is also the compartment where the electron beam is irradiated onto the irradiation target. Therefore, a transport device is used to transport the object to be irradiated with the electron beam into and out of the X-ray compartment while preventing X-rays from leaking outside.

[0003] For example, the transport device used in the X-ray inspection apparatus disclosed in Patent Document 1 has four shields in total, two on the inlet side and two on the outlet side. The shields on the inlet side and outlet side are independent of each other and are configured to open and close vertically one by one from their lower end. Transport is performed such that at least one shield on each of the inlet side and outlet side is kept closed. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2020-134298 Summary of the Invention [Problem to be solved by the invention]

[0005] In the above-described disclosed techniques, in which independent shields are opened and closed one by one at the entrance and exit, i.e., the opening operation of the downstream shield must be started after the closing operation of the upstream shield is completed, it takes a long time to transport the articles. Furthermore, since the multiple shields are independent from each other, there is a concern that the number of components related to the shields may increase. The inventors have been studying ways to simplify the configuration of the shielding members and to shorten the time required to transport articles passing through the shielding members. [Means for solving the problem]

[0006] A conveying device that solves the above problem is a conveying device that transports items into and out of an X-ray section where X-rays may be generated through an inlet and an outlet, and is equipped with a shielding member on at least one side of the inlet and the outlet to allow the items to be transported and move while maintaining a closed state to block the X-rays, and the shielding member has a first shielding section on the upstream side in the transport direction and a second shielding section on the downstream side in the transport direction, and the first and second shielding sections operate alternately in accordance with the transport movement of the items so that when the first shielding section is in a state where the items are allowed to be transported and move, the second shielding section closes the inlet or the outlet, and when the second shielding section is in a state where the items are allowed to be transported and move, the first shielding section closes the inlet or the outlet, and further configured so that the closed state of the inlet or the outlet is maintained by at least one side of the first and second shielding sections during this operation process.

[0007] According to the above configuration, the first and second shielding sections integrally provided on the shielding member alternately operate in accordance with the movement of an article. When the first shielding section allows the article to be transported, the second shielding section closes the entrance or exit of the X-ray section. When the second shielding section allows the article to be transported, the first shielding section closes the entrance or exit. Furthermore, even during this operation, the entrance or exit is kept closed by at least one of the first and second shielding sections. In other words, the coordinated operation of the first and second shielding sections of the shielding member constantly maintains the entrance or exit closed, preventing X-ray leakage to the outside while enabling efficient transport of an article. A significant reduction in the time required to transport an article can be expected. Furthermore, since the first and second shielding sections are integrally provided on the shielding member, a significant simplification of the configuration can be expected.

[0008] In the above-described transport device, the shielding members are an entrance-side shielding member and an exit-side shielding member provided at the carry-in entrance and the carry-out exit, respectively. According to the above configuration, the entrance and exit are provided with an entrance-side shielding member and an exit-side shielding member, respectively. The first and second shielding portions of each shielding member operate in conjunction with each other to constantly maintain the entrance and exit closed, thereby preventing X-ray leakage to the outside, and allowing efficient transport of articles at the entrance and exit.

[0009] In the above-mentioned conveying device, the shielding member is made using a plate-shaped member capable of shielding the X-rays at least in the first and second shielding portions, and is configured to be supported so as to be swingable relative to the conveying device so that the first and second shielding portions operate alternately.

[0010] According to the above configuration, the shielding member is made of a plate-like member capable of blocking X-rays at least in the first and second shielding portions. The shielding member is supported so as to be swingable relative to the transport device so as to perform the above-mentioned alternating operations of the first and second shielding portions. In other words, the configuration related to the shielding member can be realized with a simple configuration.

[0011] In the above-mentioned conveying device, the shielding member is supported so that in an initial state, the first shielding portion is stored below the conveying surface of the conveying device and the second shielding portion protrudes in an inclined position facing diagonally upward downstream in the conveying direction, and when the item is placed on the second shielding portion as it is conveyed, the weight of the item causes the second shielding portion to be stored below the conveying surface and the first shielding portion to perform a swinging motion to protrude from the conveying surface.

[0012] According to the above configuration, in the initial state, the first shielding portion of the shielding member is stored below the conveying surface, and the second shielding portion protrudes in an inclined position facing diagonally upward toward the downstream side in the conveying direction. When an item is placed on the second shielding portion during conveying, the second shielding portion is stored below the conveying surface due to the weight of the item, and the first shielding portion protrudes from the conveying surface. In other words, the above-mentioned swinging motion of the shielding member is performed using the weight of the item being conveyed, so the configuration related to the shielding member can be realized with a simple configuration. Furthermore, because the second shielding portion on which the item is placed waits in an inclined position facing diagonally upward toward the downstream side in the conveying direction, a series of operations from the placement of the conveyed item to the subsequent swinging of the shielding member can be performed smoothly.

[0013] The above-mentioned transport device is configured so that an auxiliary member for assisting the swinging movement of the shielding member can be attached. According to the above configuration, an auxiliary member can be attached to assist the swinging motion of the shielding member, which allows the shielding member to swing smoothly. This is particularly effective when the weight of the object is used to swing the shielding member.

[0014] The electron beam irradiation device that solves the above problem is an electron beam irradiation device that includes a conveying device that carries items in and out of an X-ray section through an inlet and an outlet, where X-rays may be generated due to the irradiation of electron beams, and irradiates the items transported by the conveying device with the electron beams, and is configured using any of the conveying devices described above.

[0015] According to the above configuration, the configuration of the shielding member in the transport device of the electron beam irradiation device can be simplified, and the time required to transport the article can be shortened, which in turn shortens the time required to irradiate the article with the electron beam. [Effects of the Invention]

[0016] According to the conveying device and electron beam irradiation device of the present invention, the configuration related to the shielding member can be simplified, and the time required to convey an article passing through the shielding member can be reduced. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a side view showing a configuration of an electron beam irradiation apparatus having a transport device according to an embodiment. [Figure 2] 10 is a side view for explaining the operation of the transport device in the same embodiment. FIG. [Figure 3] 10 is a side view for explaining the operation of the transport device in the same embodiment. FIG. [Figure 4] 10 is a side view for explaining the operation of the transport device in the same embodiment. FIG. [Figure 5] 10 is a side view for explaining the operation of the transport device in the same embodiment. FIG. [Figure 6] FIG. 10 is a side view showing the configuration of a transport device in a modified example. [Figure 7] FIG. 10 is a side view showing the configuration of a transport device according to another modified example. DETAILED DESCRIPTION OF THE INVENTION

[0018] An embodiment of the transport device and the electron beam irradiation device will be described below. [Overall configuration of electron beam irradiation equipment] The electron beam irradiation apparatus 10 of this embodiment shown in FIG. 1 includes an electron beam generation unit 11, a shielding chamber 12, and a transport device 13. The electron beam generation unit 11 generates an electron beam e from thermoelectrons emitted by heating a filament in a vacuum chamber. The electron beam e is emitted after passing through a metal window foil attached to an exit window of the electron beam generation unit 11. The electron beam generation unit 11 emits the generated electron beam e downward, in this case, toward the shielding chamber 12. Inside the shielding chamber 12, an article W transported by the transport device 13 is irradiated with the electron beam e. The article W irradiated with the electron beam e obtains irradiation effects such as improving material properties, adding functions, and sterilizing.

[0019] [Shielded room configuration] The shielding chamber 12 is surrounded by walls that have an X-ray shielding function. Here, when the electron beam e emitted from the electron beam generation unit 11 travels through the air after emission or when it hits the object W on the conveying device 13 or the conveying device 13 itself, X-rays are emitted to the surrounding area. In other words, the inner space of the shielding chamber 12 is an X-ray section 12x where X-rays are present. The shielding chamber 12 prevents X-rays from leaking to the outside, which may occur as a result of the emission of the electron beam e. The object W is carried in and out of the shielding chamber 12 by the conveying device 13. The shielding chamber 12 has an inlet 12a on the upstream side of the conveying device 13 in the conveying direction and an outlet 12b on the downstream side in the conveying direction. The inlet 12a and the outlet 12b have, for example, a rectangular opening shape when viewed from the conveying direction.

[0020] [Conveyor system configuration] The conveying device 13 is provided in association with the shielding chamber 12. The conveying device 13 is, for example, a roller conveyor. The conveying device 13 has a conveying mode in which the conveying surface 13a on the upper surface thereof is horizontal. The conveying device 13 conveys the object W to be irradiated with the electron beam e while it is placed on the conveying surface 13a. The conveying device 13 is larger than the horizontal opening width of the inlet 12a and the outlet 12b. The conveying device 13 conveys the object W from outside the shielding chamber 12 into the inlet 12a, and after irradiation with the electron beam e inside the shielding chamber 12, conveys it from the outlet 12b to outside the shielding chamber 12. In other words, the conveying device 13 carries the object W in and out of the X-ray section 12x via the inlet 12a and the outlet 12b of the shielding chamber 12.

[0021] The transport device 13 has an entrance-side shielding member 14 integrally attached to the entrance 12a side and an exit-side shielding member 15 integrally attached to the exit 12b side. This is because the entrance 12a and the exit 12b are paths along which X-rays can travel from the X-ray section 12x to the outside. The entrance-side shielding member 14 and the exit-side shielding member 15 allow the transport movement of the article W at the entrance 12a and the exit 12b, while closing the entrance 12a and the exit 12b each time to block X-rays from traveling to the outside.

[0022] [Configuration of the entrance shielding member] The entrance-side shielding member 14 is made of, for example, an iron-based metal material that can block X-rays. The entrance-side shielding member 14 is made by using, for example, a rectangular metal plate material and bending one end of the rectangle in the first direction at a right angle.

[0023] 2, entrance-side shielding member 14 is L-shaped in a side view and has rectangular flat plate portion 14a and bent portion 14b. Entrance-side shielding member 14 is arranged so that the base end side having bent portion 14b faces upstream in the conveying direction of conveyor device 13, and the tip end side faces downstream in the conveying direction. Entrance-side shielding member 14 is also arranged so that bent portion 14b is located near inlet 12a. Entrance-side shielding member 14 having bent portion 14b and flat plate portion 14a has a width in a second direction perpendicular to the first direction of the rectangle (in this case, the direction perpendicular to the conveying direction) that is set to be approximately equal to that of inlet 12a (or outlet 12b).

[0024] The entrance-side shielding member 14 has a shaft portion 14c at approximately the middle of the flat plate portion 14a in the conveying direction. A pair of shaft portions 14c is provided on both sides of the flat plate portion 14a in the direction perpendicular to the conveying direction. The entrance-side shielding member 14 is supported by the pair of shaft portions 14c with respect to the conveying device 13. The support position of the entrance-side shielding member 14 by the shaft portions 14c is set near the conveying surface 13a, slightly below the conveying surface 13a of the conveying device 13. In addition, the entrance-side shielding member 14 is swingable with respect to the conveying device 13 by the pair of shaft portions 14c.

[0025] That is, when the entrance-side shielding member 14 swings around the shaft 14c as a fulcrum, the tip and base ends are displaced alternately in the vertical direction. In the unloaded state, the base end side of the entrance-side shielding member 14, including the bent portion 14b, is stored below the conveying surface 13a, and the tip side of the shaft 14c protrudes above the conveying surface 13a. The entrance-side shielding member 14 is in a position where the flat portion 14a is inclined, with its tip pointing diagonally upward toward the downstream side in the conveying direction, and this is the swing end position on one side of its swing process. In other words, the entrance-side shielding member 14 is supported so as to be maintained at the swing end position on one side. The height of the tip end of the entrance-side shielding member 14 protruding from the conveying surface 13a at the swing end position on one side is set sufficiently higher than the height of the inlet 12a.

[0026] On the other hand, when an article W is placed on the tip end side of the entrance-side shielding member 14, the weight of the article W causes the tip end side of the shaft 14c to displace downward. Eventually, the entrance-side shielding member 14 reaches the other swing end position where the tip end side of the shaft 14c is stored below the conveying surface 13a. In this case, the entire flat plate portion 14a of the entrance-side shielding member 14 is located below the conveying surface 13a, and the plate surface of the flat plate portion 14a is in a substantially horizontal state along the conveying surface 13a. Also in this case, the entire bent portion 14b protrudes above the conveying surface 13a. The tip end of the bent portion 14b is oriented substantially vertically upward. The protruding height of the bent portion 14b of the entrance-side shielding member 14 from the conveying surface 13a at the other swing end position is set sufficiently higher than the height of the inlet 12a.

[0027] In this embodiment, the entrance-side shielding member 14 has the bent portion 14b functioning as the first shielding portion 14x, and the portion from the shaft portion 14c to the tip end functioning as the second shielding portion 14y. When the entrance-side shielding member 14 is at one of the swing end positions in an unloaded state, the first shielding portion 14x, which is the bent portion 14b, is stored below the conveying surface 13a. In other words, conveyance and movement of the article W on the conveying surface 13a where the first shielding portion 14x is located is permitted. In this case, the tip of the second shielding portion 14y, which is the portion further tip than the shaft portion 14c of the entrance-side shielding member 14, is located higher than the carry-in entrance 12a when viewed in the conveying direction, and the second shielding portion 14y closes the carry-in entrance 12a. When the entrance-side shielding member 14 is displaced to the other swing end position, the second shielding portion 14y is stored below the conveying surface 13a. That is, the transport movement of the article W on the transport surface 13a where the second shielding portion 14y is located is permitted. In this case, the tip of the first shielding portion 14x is located higher than the entrance 12a when viewed in the transport direction, and the first shielding portion 14x closes the entrance 12a.

[0028] Furthermore, during the swinging motion of the entrance-side shielding member 14, there is a swing position where the first shielding portion 14x and the second shielding portion 14y are at the same height (see FIG. 3). Even in this case, the leading ends of the first and second shielding portions 14x, 14y are both set to be slightly higher than the carry-in entrance 12a when viewed in the conveying direction. In other words, regardless of the position within the swing range of the entrance-side shielding member 14, at least one of the first and second shielding portions 14x, 14y closes the carry-in entrance 12a. In other words, the shape of the entrance-side shielding member 14 and the manner in which it is supported by the conveying device 13 are set accordingly.

[0029] [Configuration of the exit-side shielding member] The exit-side shielding member 15 is made of the same material and has the same shape as the entrance-side shielding member 14. As shown in Fig. 2, the exit-side shielding member 15, like the entrance-side shielding member 14, has a flat portion 15a, a bent portion 15b, and an axis portion 15c.

[0030] The exit-side shielding member 15 is arranged so that its base end having a bent portion 15b faces upstream in the conveying direction of the conveying device 13, and its tip end faces downstream in the conveying direction. The exit-side shielding member 15 is swingably supported by the conveying device 13 at a shaft portion 15c, but its assembly position relative to the conveying device 13 is closer to the carry-in port 12b, unlike the entrance-side shielding member 14 which is closer to the carry-in port 12a described above. The exit-side shielding member 15 is arranged so that its tip end is located near the carry-in port 12b. The width of the exit-side shielding member 15 in the direction perpendicular to the conveying direction is set to be approximately equal to that of the carry-in port 12b (or the carry-in port 12a).

[0031] In the present embodiment, the bent portion 15b of the exit-side shielding member 15 also functions as the first shielding portion 15x, and the portion extending from the shaft portion 15c toward the tip end functions as the second shielding portion 15y. When the exit-side shielding member 15 is at one of the swing end positions in an unloaded state, the first shielding portion 15x is stored below the conveying surface 13a. In other words, the conveying movement of the article W on the conveying surface 13a where the first shielding portion 15x is located is permitted. In this case, the tip of the second shielding portion 15y is located higher than the discharge outlet 12b when viewed in the conveying direction, and the second shielding portion 15y closes the discharge outlet 12b. When the exit-side shielding member 15 is displaced to the other swing end position, the second shielding portion 15y is stored below the conveying surface 13a. In other words, the conveying movement of the article W on the conveying surface 13a where the second shielding portion 15y is located is permitted. In this case, the tip of the first shielding portion 15x is located higher than the outlet 12b when viewed in the conveying direction, and the first shielding portion 15x closes the outlet 12b.

[0032] Furthermore, during the swinging operation of the exit-side shielding member 15, there is a swing position where the first and second shielding portions 15x, 15y are at the same height, and even in this case, the tips of the first and second shielding portions 15x, 15y are both set to a position slightly higher than the discharge port 12b when viewed in the conveying direction. In other words, regardless of the position within the swing range of the exit-side shielding member 15, at least one of the first and second shielding portions 15x, 15y closes the discharge port 12b. In other words, the shape of the exit-side shielding member 15 itself and the manner in which it is supported by the conveying device 13 are also set in this way.

[0033] [Operation of this embodiment] The operation of this embodiment will be described. As shown in FIG. 1, irradiation of an irradiation target by the electron beam irradiation device 10 is performed while an article W to be irradiated with the electron beam e is placed on the conveying surface 13a of the conveying device 13 and is being conveyed. In an initial state, the first shielding portion 14x of the entrance-side shielding member 14 is stored below the conveying surface 13a, and the second shielding portion 14y is in a state where it protrudes most from the conveying surface 13a. The carry-in entrance 12a of the shielding chamber 12 is in a closed state with the second shielding portion 14y in a protruding state. Similarly, the exit-side shielding member 15 is also in a state where the first shielding portion 15x is stored below the conveying surface 13a, and the second shielding portion 15y is in a state where it protrudes most from the conveying surface 13a. The carry-in entrance 12a is in a closed state with the second shielding portion 15y in a protruding state. That is, the X-rays are prevented from fluctuating from the X-ray section 12x in the shielding chamber 12 to the outside via the entrance 12a and the exit 12b.

[0034] When an item W is carried in through the entrance 12a by the operation of the conveying device 13, it passes over the conveying surface 13a where the first shielding portion 14x of the entrance-side shielding member 14 is located (see FIG. 2), and then reaches the tip end portion of the flat portion 14a of the entrance-side shielding member 14, which is the second shielding portion 14y. When the item W rests on the tip end portion of the flat portion 14a of the entrance-side shielding member 14 (see FIG. 3), the entrance-side shielding member 14 swings due to the effect of the item W's own weight, i.e., the tip end of the entrance-side shielding member 14 is displaced downward, and at the same time, the base end is displaced upward. The downward displacement of the second shielding portion 14y causes the entrance 12a to change from the upper side to an open state, and at the same time, the upward displacement of the first shielding portion 14x causes the entrance 12a to change from the lower side to a closed state. When the first and second shielding portions 14x, 14y reach the same height during the swinging process of the entrance-side shielding member 14, the entrance 12a switches from a state in which it is closed mainly by the second shielding portion 14y to a state in which it is closed mainly by the first shielding portion 14x. Even when this switching occurs, the entrance 12a remains closed at all times.

[0035] The transport of the item W continues without stopping, and the entrance 12a is closed by the first shielding portion 14x of the entrance-side shielding member 14, and the second shielding portion 14y of the entrance-side shielding member 14 is stored below the transport surface 13a (see FIG. 4). The item W passes over the transport surface 13a where the second shielding portion 14y of the entrance-side shielding member 14 is located. After the item W passes the second shielding portion 14y, the weight of the item W no longer acts on the entrance-side shielding member 14, so the entrance-side shielding member 14 returns to its original swing end position where the first shielding portion 14x is stored below the transport surface 13a and the second shielding portion 14y protrudes (see FIG. 5). In this case, during the swinging process of the entrance-side shielding member 14, the downward displacement of the first shielding portion 14x causes the upper side of the carrying-in entrance 12a to change to an open state, and the upward displacement of the second shielding portion 14y causes the lower side of the carrying-in entrance 12a to change to a closed state, so that the closed state of the carrying-in entrance 12a is maintained by at least one of the first and second shielding portions 14x, 14y.

[0036] When the article W reaches a position below the electron beam generator 11, it is irradiated with the electron beam e emitted from the electron beam generator 11 (see FIG. 1). The article W is irradiated with the electron beam e while being transported. The article W obtains the effects of irradiation, such as improving the properties of the material, adding functions, and sterilizing. After being irradiated with the electron beam e, the article W is transported further downstream on the transport surface 13a.

[0037] After passing over the conveying surface 13a where the first shielding portion 15x of the exit-side shielding member 15 is located, the article W reaches the tip end portion of the flat portion 15a of the exit-side shielding member 15, which is the second shielding portion 15y, and thereafter operates in the same manner as the entrance-side shielding member 14 (see FIGS. 2 to 5). Due to the effect of the weight of the article W, the second shielding portion 15y of the exit-side shielding member 15 is displaced downward, causing the carry-out port 12b to change from the upper side to an open state, and the first shielding portion 15x is displaced upward, causing the carry-out port 12b to change from the lower side to a closed state. The closed state of the carry-out port 12b is maintained by at least one of the first and second shielding portions 15x, 15y. Similarly, even after the article W passes through the second shielding portion 15y, the closed state of the discharge port 12b by at least one of the first and second shielding portions 15x, 15y is maintained during the process of returning the exit-side shielding member 15 to its original swing end position. Then, the article W irradiated with the electron beam e is transported out of the discharge port 12b and becomes available for removal.

[0038] Although the above operation focuses on one article W, the articles W are transported sequentially by the transport device 13, and the articles W are continuously irradiated with the electron beam e. During this operation, the entrance-side shielding member 14 and the exit-side shielding member 15 always maintain the inlet 12a and outlet 12b closed while allowing the articles W to be transported continuously, thereby preventing X-rays from leaking to the outside. In this way, the electron beam irradiation device 10 of this embodiment is capable of efficient transport and electron beam irradiation while preventing X-rays from leaking to the outside.

[0039] [Effects of this embodiment] The effects of this embodiment will be described. (1) The entrance-side shielding member 14 and the exit-side shielding member 15 used in the transport device 13 of this embodiment are integrally provided with first shielding sections 14x, 15x and second shielding sections 14y, 15y, respectively. The first shielding sections 14x, 15x and second shielding sections 14y, 15y provided on each shielding member 14, 15 alternately operate in accordance with the transport movement of the article W. When the first shielding sections 14x, 15x are in a state where the transport movement of the article W is permitted, the second shielding sections 14y, 15y close the carry-in entrance 12a and the carry-out exit 12b of the X-ray section 12x, respectively. When the second shielding sections 14y, 15y are in a state where the transport movement of the article W is permitted, the first shielding sections 14x, 15x close the carry-in entrance 12a and the carry-out exit 12b, respectively. Furthermore, even during this operation, the closed states of the entrance 12a and the exit 12b by at least one of the first shielding portions 14x, 15x and the second shielding portions 14y, 15y are maintained.

[0040] In other words, the first shielding portions 14x, 15x and the second shielding portions 14y, 15y of each shielding member 14, 15 operate in conjunction with each other, thereby maintaining the inlet 12a and the outlet 12b in a closed state at all times, thereby preventing leakage of X-rays to the outside, and allowing efficient transport of the object W. In addition, this embodiment is applied to both the inlet 12a and the outlet 12b, and effects can be obtained at both. By efficiently transporting the object W, it is possible to sufficiently shorten the time required to transport the object W, and therefore the time required to irradiate the object W with the electron beam e. Furthermore, since the first shielding portions 14x, 15x and the second shielding portions 14y, 15y are integrally provided in each shielding member 14, 15, respectively, it is possible to sufficiently simplify the configuration of the transport device 13, and therefore the electron beam irradiation device 10.

[0041] (2) The entrance-side shielding member 14 and the exit-side shielding member 15 are each fabricated using a plate-shaped member capable of shielding against X-rays at least in the first shielding portions 14x, 15x and the second shielding portions 14y, 15y. In this embodiment, the shielding members 14, 15 are each fabricated using a single metal plate capable of shielding against X-rays. Each shielding member 14, 15 is supported so as to be swingable relative to the conveying device 13 so that the first shielding portions 14x, 15x and the second shielding portions 14y, 15y can be alternately operated as described above. In other words, as in this embodiment, the configuration of each shielding member 14, 15 can be realized with a simple configuration. Furthermore, each shielding member 14, 15 can be easily fabricated using a single metal plate.

[0042] (3) In the initial state, the entrance-side shielding member 14 and the exit-side shielding member 15 have first shielding portions 14x and 15x stored below the conveying surface 13a, and second shielding portions 14y and 15y protruding in an inclined position facing diagonally upward toward the downstream side in the conveying direction. When an article W is placed on each of the second shielding portions 14y and 15y during conveying movement, the weight of the article W causes the second shielding portions 14y and 15y to be stored below the conveying surface 13a, and the first shielding portions 14x and 15x to protrude from the conveying surface 13a.

[0043] That is, the above-mentioned swinging motion of each shielding member 14, 15 is performed by utilizing the weight of the article W being transported, and therefore, as in this embodiment, it is possible to realize a simple configuration for each shielding member 14, 15. Furthermore, since the second shielding portions 14y, 15y on which the article W is placed wait in an inclined position facing diagonally upward downstream in the conveying direction, a series of operations from the placement of the transported article W to the subsequent swinging of each shielding member 14, 15 can be performed smoothly.

[0044] [Example of change] This embodiment can be modified as follows: This embodiment and the following modifications can be combined and implemented within the scope of technical compatibility.

[0045] Each of the shielding members 14, 15 may be configured to be able to be fitted with an auxiliary member for assisting its own swinging motion. 6, an example of the auxiliary member is a biasing member 16 that makes it easier to return each of the shielding members 14, 15 to their initial states. By using the biasing member 16, each of the shielding members 14, 15 is maintained in its initial state. Furthermore, each of the shielding members 14, 15 that has been swung quickly returns to its initial state.

[0046] Another example of an auxiliary member is an adjustment weight 17 that facilitates the swinging of each of the shielding members 14, 15. By using the adjustment weight 17, the swinging of each of the shielding members 14, 15 can be performed quickly. This is particularly effective in a mode in which the weight of the article W is used to swing each of the shielding members 14, 15.

[0047] Each of the shielding members 14, 15 is made using a single metal plate capable of blocking X-rays, but at least the first shielding portions 14x, 15x and the second shielding portions 14y, 15y may be configured to have a higher X-ray blocking effect than other portions.

[0048] For example, as shown in FIG. 7, while other parts of each shielding member 14, 15 are made of, for example, iron or stainless steel, the first shielding parts 14x, 15x and the second shielding parts 14y, 15y may be integrally formed with a shielding metal 18 such as lead that has a high X-ray shielding effect.

[0049] Although the shielding members 14 and 15 are configured to be swung directly by the article W, they may also be configured to be swung indirectly by the article W being transported. Although the shielding members 14 and 15 are configured to swing up and down, they may be configured to swing horizontally, for example.

[0050] While each shielding member 14, 15 is fabricated by bending a rectangular plate-like member into an L-shape, the shape and manufacturing method are not limited to this. For example, it is preferable that the first shielding portions 14x, 15x and the second shielding portions 14y, 15y conform to the shape as viewed in the conveying direction in order to close the inlet 12a and the outlet 12b. However, the shape of the base end portions of the flat plate portions 14a, 15a, as other portions, can be changed as appropriate. Because the base end portions of the flat plate portions 14a, 15a are always located below the conveying surface 13a, a shape that prioritizes the conveyance of the article W, for example, may be adopted.

[0051] Although the conveying device 13 is, for example, a roller conveyor, other configurations such as a belt conveyor or a wheel conveyor may also be used. Although the present invention has been described with reference to both the entrance 12a and the exit 12b, the same effect can be expected even if only one of them is used. In other words, only one of the entrance-side shielding member 14 and the exit-side shielding member 15 may be used.

[0052] Although the present invention has been applied to the transport device 13 of the electron beam irradiation device 10, it may also be applied to a transport device used in combination with other devices having an X-ray section, such as an X-ray inspection device. The technical concepts that can be understood from the above-described embodiments and modifications will be described below.

[0053] (i) A conveying device in which the shielding member is made of a single metal plate capable of shielding X-rays. (b) A transport device in which the shielding member is configured such that the first and second shielding portions have a higher X-ray shielding effect than other portions. [Explanation of symbols]

[0054] e...electron beam W…Goods 10...Electron beam irradiation device 12a…Carry-in entrance 12b...Exit 12x X-ray compartment 13...Transportation equipment 13a...Transport surface 14... Entrance side shielding member (shielding member) 14x…1st shielding part 14y…Second shielding part 15...Exit side shielding member (shielding member) 15x…1st shielding part 15y…Second shielding part 16... Urging member (auxiliary member) 17...Adjustment weight (auxiliary member)

Claims

1. A conveying device that carries in and out of an X-ray section where X-rays may be generated through an entrance and an exit, a shielding member provided on at least one side of the entrance and the exit for permitting the transport movement of the article and maintaining a closed state for blocking the X-rays; the shielding member is swingable around a shaft portion, and integrally includes a first shielding portion formed upstream of the shaft portion in the conveying direction and a second shielding portion formed downstream of the shaft portion in the conveying direction, The first and second shielding sections are configured to swing integrally around the shaft section so that, in accordance with the transport movement of the article, when the first shielding section is in a state where the transport movement of the article is permitted, the second shielding section closes the carry-in entrance or the carry-out exit, and when the second shielding section is in a state where the transport movement of the article is permitted, the first shielding section closes the carry-in entrance or the carry-out exit, and further, during the swinging movement process, the closed state of the carry-in entrance or the carry-out exit is maintained by at least one of the first and second shielding sections. Conveying device.

2. The shielding members are an entrance-side shielding member and an exit-side shielding member provided at the inlet and the outlet, respectively. The conveying device according to claim 1 .

3. The shielding member is made using a plate-like material capable of shielding the X-rays at least in the first and second shielding portions, and is configured to be supported so as to be swingable relative to the transport device so that the first and second shielding portions swing integrally around the shaft portion. The conveying device according to claim 1 or 2.

4. The shielding member is supported so that in an initial state, the first shielding portion is stored below the conveying surface of the conveying device and the second shielding portion protrudes in an inclined position facing diagonally upward toward the downstream side of the conveying direction, and when the item is placed on the second shielding portion as the item is conveyed, the second shielding portion is stored below the conveying surface due to the weight of the item and the first shielding portion performs a swinging motion to protrude from the conveying surface. The conveying device according to claim 3 .

5. An auxiliary member for assisting the swinging movement of the shielding member can be attached. The conveying device according to claim 3 or 4.

6. An electron beam irradiation device comprising: a conveying device that carries an article in and out of an X-ray section through an entrance and an exit into and out of an X-ray section where X-rays may be generated due to irradiation with an electron beam; and irradiating the article with the electron beam conveyed by the conveying device, The conveying device is configured using the conveying device according to any one of claims 1 to 5. Electron beam irradiation equipment.

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