Micro material irradiation device

Abstract

The utility model discloses a miniature material irradiation device which mainly provides a vacuum environment, a driving assembly and a rotating shaft assembly are matched to drive an object to be irradiated to move, rapid batch irradiation is achieved, the size is small, installation is easy, a detector is high in detection flow intensity, the moving speed of the object to be irradiated is controlled according to the flow intensity, and self-feedback control is achieved. According to the main technical scheme, the micro material irradiation device comprises a device body, the device body comprises a vacuum cavity and a beam inlet, and the vacuum cavity is used for containing objects to be irradiated; the vacuum extraction device is communicated with the vacuum cavity; the rotating shaft assembly is located in the vacuum cavity and used for being connected with an object to be irradiated, and the driving assembly is connected with the rotating shaft assembly; the detector is located in the vacuum cavity and located on one side, opposite to the beam inlet, of the to-be-irradiated object, and the detector is used for detecting the intensity of the beam. The film irradiation device is mainly used for film irradiation.

Description

Technical Field

[0001] The utility model relates to the technical field of micro material irradiation, in particular to a micro material irradiation device. Background Art

[0002] Heavy ion microporous membranes are hailed as the world's most sophisticated microporous membranes. Compared to traditional mesh filter membranes, their most significant feature is their extremely small pore size, which can be strictly controlled between 0.01 and 15 microns, with nearly uniform pore size. Heavy ion microporous membranes offer unique technical advantages and broad application prospects in sewage treatment, household water purification, biomedicine, and chemical testing.

[0003] Heavy ion microporous membranes can be perforated using heavy ions provided by an accelerator. However, existing technology lacks a device capable of rapidly mass-producing heavy ion microporous membranes, resulting in low yields. Furthermore, there is no feedback during the production process, requiring post-production testing of finished products, which in turn leads to low production efficiency and reduced yield rates. Utility Model Content

[0004] In view of this, in order to solve at least one of the above technical problems, an embodiment of the present invention provides a micro material irradiation device.

[0005] In order to achieve the above-mentioned purpose, the present invention mainly provides the following technical solutions:

[0006] The utility model provides a micro material irradiation device, comprising:

[0007] The device body includes a vacuum cavity and a beam inlet, the beam inlet is connected to the vacuum cavity, and the vacuum cavity is used to accommodate the object to be irradiated;

[0008] A vacuum extraction device, the vacuum extraction device being connected to the vacuum cavity;

[0009] The material transmission device includes a drive assembly and a shaft assembly. The shaft assembly is located in the vacuum chamber and is used to connect the object to be irradiated. The drive assembly is connected to the shaft assembly.

[0010] The beam detector assembly includes at least one detector, which is located in the vacuum chamber and on the side of the object to be irradiated opposite to the beam inlet. The detector is used to detect the intensity of the beam.

[0011] Among them, the rotating shaft assembly includes at least a discharge shaft and a receiving shaft, and the driving assembly includes a first driving member and a second driving member. The first driving member is connected to the discharge shaft, and the second driving member is connected to the receiving shaft. The discharge shaft and the receiving shaft are respectively used to wind the object to be irradiated from both ends of the object to be irradiated.

[0012] Wherein, the rotating shaft assembly further comprises a first end steering shaft and a second end steering shaft;

[0013] The discharge shaft and the receiving shaft are located on the side of the beam detector assembly opposite to the beam inlet. The first end steering shaft and the second end steering shaft are arranged at intervals and are located between the beam detector assembly and the beam inlet. The first end steering shaft and the second end steering shaft are used to slide or roll against the object to be irradiated in front of the discharge shaft and the receiving shaft.

[0014] The beam detector assembly further includes a beam isolation plate, which is located on a side of the detector opposite to the beam inlet and is used to block the beam.

[0015] Among them, the micro material irradiation device also includes:

[0016] A beam blocking device, the beam blocking device comprising at least a third driving member and a blocking body, wherein the blocking body has a blocking position and a yielding position, wherein the blocking body blocks the beam inlet in the blocking position and opens the beam inlet in the yielding position;

[0017] The third driving member is connected to the blocking body and is used to drive the blocking body to move between the blocking position and the yielding position.

[0018] Among them, the micro material irradiation device also includes

[0019] The image acquisition device faces the vacuum chamber and is at least used to acquire an image of the object to be irradiated.

[0020] The image acquisition device includes a top image acquisition component and a side image acquisition component, and the top image acquisition component and the side image acquisition component are located on different sides of the object to be irradiated.

[0021] Among them, the micro material irradiation device also includes:

[0022] The lighting device is opposite to the vacuum cavity and is used to provide light to the vacuum cavity.

[0023] The micro-material irradiation device proposed in this utility model primarily provides a vacuum environment for irradiation, delivers a beam to the object to be irradiated through a beam inlet, and uses a drive assembly and a rotating shaft assembly to drive the object to be irradiated, enabling rapid batch irradiation. The device is compact and can be easily installed on various beam terminals. A detector is used to detect the intensity of the heavy ion beam, and the movement speed of the object to be irradiated is then controlled based on the detection results, achieving self-feedback control. Furthermore, the control software can simulate the on-site irradiation process and irradiation status in real time and provide irradiation recommendations. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1A schematic structural diagram of a micro material irradiation device provided by an embodiment of the present utility model at a first viewing angle;

[0025] Figure 2 A schematic structural diagram of a micro material irradiation device provided by an embodiment of the present utility model at a second viewing angle;

[0026] Figure 3 A schematic diagram of the partial structure of a micro material irradiation device provided in an embodiment of the present utility model;

[0027] Figure 4 A schematic diagram of an interactive interface in a micro material irradiation device provided in an embodiment of the present utility model. DETAILED DESCRIPTION

[0028] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the following is a detailed description of the specific implementation method, structure, characteristics and effects of a micro material irradiation device proposed according to the present invention in combination with the accompanying drawings and preferred embodiments.

[0029] On the one hand, if Figure 1-4 As shown, the embodiment of the present invention provides a micro material irradiation device, comprising:

[0030] The device body 100 includes a vacuum cavity and a beam inlet, the beam inlet is connected to the vacuum cavity, and the vacuum cavity is used to accommodate the object to be irradiated 10;

[0031] A vacuum extraction device 200, the vacuum extraction device 200 is connected to the vacuum cavity;

[0032] The material transmission device 300 includes a drive assembly and a shaft assembly. The shaft assembly is located in the vacuum chamber and is used to connect to the object to be irradiated 10. The drive assembly is connected to the shaft assembly.

[0033] The beam detector assembly 400 includes at least one detector 401 . The detector 401 is located in the vacuum chamber and on the side of the object to be irradiated 10 opposite to the beam inlet. The detector 401 is used to detect the intensity of the beam.

[0034] The device body 100 is a hollow structure, and the interior is used to accommodate at least part of the structure of the object to be irradiated 10 and the material transmission device 300. The device body 100 is connected to an accelerator, which is used to generate the ion beam required for irradiation. The beam inlet can be located on the side wall of the device body 100, and the ion beam outlet of the accelerator is opposite to the beam inlet, and then the object to be irradiated 10 is irradiated through the beam inlet. The object to be irradiated 10 can be a variety of materials, and any basic material that needs to be irradiated by beam irradiation to become a finished product can be used. For example, the object to be irradiated 10 can be a base membrane material for the production of heavy ion microporous membranes. The device body 100 can be provided with an observation window to facilitate the staff to check the status inside the vacuum chamber in real time, such as whether the object to be irradiated 10 is transmitted normally and the remaining amount.

[0035] The number of vacuum extraction devices 200 can be one or more. The vacuum extraction device 200 can further include a guide tube 210 and a vacuum pump 220. The vacuum pump 220 is connected to the vacuum chamber through the guide tube 210. Activating the vacuum pump 220 can evacuate the vacuum chamber, thereby allowing the irradiation process to be carried out in a vacuum environment, thereby preventing environmental factors such as pressure and air flow from affecting the irradiation accuracy.

[0036] The material transmission device 300 is used to drive the object to be irradiated 10 to move, or to make different areas of the object to be irradiated pass through the beam inlet in sequence and receive irradiation, thereby realizing batch rapid irradiation production of the object to be irradiated 10. The material transmission device 300 can drive the object to be irradiated 10 in a variety of ways, such as using a reel to release and wind up the object to be irradiated 10. For example, the material transmission device 300 includes a drive assembly and a rotating shaft assembly, the rotating shaft assembly is located in the vacuum chamber, and the rotating shaft assembly is used to connect the object to be irradiated 10, such as for winding up the object to be irradiated 10. The drive assembly is connected to the rotating shaft assembly, and is used to drive part of the structure of the rotating shaft assembly to rotate, and then gradually release the wound object to be irradiated 10. The material transmission device 300 will be described in conjunction with more specific embodiments below.

[0037] The detector 401 is located on the side of the object to be irradiated 10 opposite to the beam inlet, with the detection end of the detector 401 facing the beam inlet or the object to be irradiated 10. After the beam generated by the accelerator punches a hole in the object to be irradiated 10, it will pass through the object to be irradiated 10 and be received by the detector 401. The detector 401 detects the intensity of the heavy ion beam. If the intensity decreases, the speed at which the material transmission device 300 drives the object to be irradiated 10 to move can be reduced, thereby increasing the time that the object to be irradiated 10 currently receives irradiation in the corresponding beam inlet area, thereby avoiding the impact on product accuracy and consistency caused by intensity fluctuations. There can be multiple detectors 401, such as four or more. The four detectors 401 can be arranged at intervals in the longitudinal direction to obtain the beam intensity at different positions, thereby enabling more comprehensive monitoring of the beam.

[0038] The micro-material irradiation device proposed in this utility model primarily provides a vacuum environment for irradiation, delivers a beam to the object to be irradiated through a beam inlet, and uses a drive assembly and a rotating shaft assembly to drive the object to be irradiated, enabling rapid batch irradiation. The device is compact and can be easily installed on various beam terminals. A beam detector is used to detect the intensity of the heavy ion beam, and the movement speed of the object to be irradiated is then controlled based on the detection results, achieving self-feedback control. Furthermore, the control software can simulate the on-site irradiation process and irradiation status in real time and provide irradiation recommendations.

[0039] In one embodiment, the rotating shaft assembly includes at least a discharge shaft 301 and a receiving shaft 302, and the driving assembly includes a first driving member 306 and a second driving member 307. The first driving member 306 is connected to the discharge shaft 301, and the second driving member 307 is connected to the receiving shaft 302. The discharge shaft 301 and the receiving shaft 302 are respectively used to wind the object to be irradiated 10 from both ends of the object to be irradiated 10.

[0040] The discharge shaft 301 and the receiving shaft 302 are both roller-shaped and located in the vacuum chamber. The discharge shaft 301 and the receiving shaft 302 are arranged in parallel and spaced apart, and can be arranged vertically up and down. The first drive member 306 and the second drive member 307 can be motors and can be arranged outside the vacuum chamber to prevent the heavy ion beam inside the vacuum chamber from affecting the operation of the motors. The object to be irradiated 10 is a flexible film, one end of which is wound around the discharge shaft 301 and the other end is wound around the receiving shaft 302. The area of ​​the object to be irradiated 10 between the discharge shaft 301 and the receiving shaft 302 is located between the detector 401 and the beam inlet. During production, the unloading shaft 301 and the receiving shaft 302 rotate in the same direction, the receiving shaft 302 gradually winds the object to be irradiated 10, and the object to be irradiated 10 on the unloading shaft 301 is gradually released, so that different areas to be irradiated on the object to be irradiated 10 are opposite to the beam inlet in turn, realizing automatic sustainable production without manual movement and installation of the object to be irradiated 10.

[0041] In one embodiment, the beam detector assembly 400 further includes a beam isolation plate 402 . The beam isolation plate 402 is located on a side of the detector 401 opposite to the beam inlet. The beam isolation plate 402 is used to block the beam.

[0042] The detector 401 can be connected to the beam isolation plate 402, which is vertically arranged and has an extended area that can be adapted to the beam entrance or slightly larger than the beam entrance. The beam isolation plate 402 serves to prevent the heavy ion beam from splashing backward after passing through the object to be irradiated 10, thereby protecting the rear components.

[0043] In one embodiment, Figure 3As shown, the rotating shaft assembly further includes a first end steering shaft 303 and a second end steering shaft 304. The discharge shaft 301 and the receiving shaft 302 are located on the side of the beam detector assembly 400 opposite the beam inlet. The first end steering shaft 303 and the second end steering shaft 304 are spaced apart and located between the beam detector assembly 400 and the beam inlet. The first end steering shaft 303 and the second end steering shaft 304 are used to slide or roll against the object 10 to be irradiated in front of the discharge shaft 301 and the receiving shaft 302.

[0044] The discharge shaft 301 and the take-up shaft 302 are located on the side of the beam detector assembly 400 opposite the beam inlet. This, on the one hand, allows for a compact distribution of components within the vacuum chamber and effectively utilizes the space within the vacuum chamber. On the other hand, the beam isolation plate 402 prevents the beam from striking the remaining irradiated object 10 on the discharge shaft 301 and the take-up shaft 302, preventing the object 10 from being irradiated prematurely or again. The first-end steering shaft 303 and the second-end steering shaft 304 are used to allow a portion of the object 10 to pass between the beam detector assembly 400 and the beam inlet.

[0045] In some embodiments, the rotating shaft assembly further includes multiple intermediate steering shafts 305, such as two intermediate steering shafts 305 spaced apart between the first end steering shaft 303 and the discharge shaft 301, and two intermediate steering shafts 305 spaced apart between the second end steering shaft 304 and the receiving shaft 302. These shafts support and guide the object 10 to be irradiated, thereby allowing the object 10 to be smoothly extended from the discharge shaft 301 to the receiving shaft 302. The first end steering shaft 303, the second end steering shaft 304, and the intermediate steering shaft 305 can all be polished rods, rollers, or wheels.

[0046] In one embodiment, the micro-material irradiation device further includes a beam blocking device 500, which includes at least a third driving member and a blocking body. The blocking body has two positions: a blocking position and a yielding position. In the blocking position, the blocking body blocks the beam inlet, and in the yielding position, the blocking body opens the beam inlet. The third driving member is connected to the blocking body and is configured to drive the blocking body to move between the blocking position and the yielding position.

[0047] The third driving member can be a drive motor, and the blocking body can be a plate-like structure. The blocking body can be slidably connected to the device body 100. The drive motor and the blocking body can be connected via a gear and rack transmission, thereby driving the blocking body to slide linearly relative to the device body 100, moving between a blocking position and a yielding position. During production, the blocking body opens the beam inlet, allowing the beam to irradiate the object 10 through the beam inlet. During material reloading or in an emergency, the blocking body blocks the beam inlet, temporarily blocking the beam and preventing it from leaking.

[0048] In one embodiment, the micro material irradiation device further includes: an image acquisition device 600 , the image acquisition device 600 faces the vacuum chamber, and the image acquisition device 600 is at least used to acquire an image of the object to be irradiated 10 .

[0049] The image acquisition device 600 can be a camera capable of capturing both video and photographs. The image acquisition device 600 is used to monitor the motion of the object 10 during irradiation. Based on the monitored data, the image acquisition device 600 uses image recognition methods to determine the motion of the object 10. When abnormal motion of the object 10 is detected, the device automatically identifies the abnormal motion and issues a warning message, such as prompting a shutdown. For example, an alarm can be issued if the unwinding shaft 301 and the receiving shaft 302 become out of sync, causing the object 10 to sag, or if the object 10 becomes entangled between the unwinding shaft 301 and the receiving shaft 302, or if the object 10 breaks in the middle. Furthermore, the actual speed of the object 10 can be further determined by combining image analysis performed by the image acquisition device 600. For example, detection marks can be placed on the object 10 at predetermined intervals. By capturing these detection marks, the actual speed of the object 10 can be determined.

[0050] In one embodiment, the image acquisition device 600 includes a top image acquisition component 601 and a side image acquisition component 602 , and the top image acquisition component 601 and the side image acquisition component 602 are located on different sides of the object to be irradiated 10 .

[0051] The top image capture component 601 and the side image capture component 602 can be the same camera, or they can be different cameras, such as one for recording video and the other for capturing photos. The top image capture component 601 and the side image capture component 602 are located on different sides of the object 10 to capture images of the object 10 at different positions, thereby increasing the accuracy of determining abnormal movement of the object 10.

[0052] In one embodiment, the micro material irradiation device further includes: an illumination device 700 , which is opposite to the vacuum cavity and is used to provide light to the vacuum cavity.

[0053] The lighting device 700 may be an LED lamp, which is used for lighting during material change.

[0054] The micro-material irradiation device also includes a control box 800, which houses the control modules and equipment associated with controlling the movement of the irradiated object 10. As described in the aforementioned embodiments, the material movement device 300, the detector 401 of the beam detector assembly 400, the beam blocking device 500, the image acquisition device 600, and the illumination device 700 are all electrically connected to the controller within the control box 800. A human-computer interaction screen can also be provided on the control box 800 to display operating data of the micro-material irradiation device and to issue commands, such as stopping the micro-material irradiation device or turning on the illumination device 700.

[0055] On the other hand, the present application also provides a micro-material irradiation self-feedback control method, which is implemented using any of the micro-material irradiation devices described above, and the method includes:

[0056] S1. Control the driving assembly to drive the object to be irradiated 10 to move via the rotating shaft assembly.

[0057] Prior to step S1, the irradiation process of the object to be irradiated is simulated to determine the corresponding relationship between the beam intensity and the moving speed of the object 10 to be irradiated. Based on the theoretically required density of holes in the object 10 to be irradiated and the beam intensity generated by the accelerator, the moving speed of the object 10 to be irradiated corresponding to different beam intensities is calculated. For example, a beam intensity of 1 uA corresponds to a speed of 10 m / min.

[0058] Before step S1, the device is also powered on, the beam blocking device 500 is moved to the yield position, the vacuum extraction device 200 evacuates the vacuum chamber, and then the first driving member 306 and the second driving member 307 respectively drive the discharge shaft 301 and the receiving shaft 302 to rotate, thereby making different areas of the object to be irradiated 10 face the beam inlet in turn.

[0059] S2. A heavy ion beam is provided to the object to be irradiated, and the detector 401 obtains the beam current intensity passing through the object to be irradiated 10.

[0060] The accelerator generates a heavy ion beam, and different regions of the object to be irradiated 10 are irradiated in sequence. The detector 401 acquires the flux passing through the object to be irradiated 10 in real time and then sends it to the controller.

[0061] S3. Adjust the driving assembly according to the beam intensity to adjust the moving speed of the object 10 to be irradiated.

[0062] When the beam intensity corresponds to the moving speed of the object 10 to be irradiated, the object 10 continues to be driven at the current speed. When the beam intensity does not correspond to the moving speed of the object 10 to be irradiated, the object 10 is driven to move at a speed corresponding to the beam intensity. The movement of the object 10 to be irradiated is regulated by the first and second drive members 306 and 307. The moving speed of the object 10 to be irradiated can be converted into the rotational speeds of the first and second drive members 306 and 307, and the rotational speeds of the first and second drive members 306 and 307 can be adjusted accordingly.

[0063] In some embodiments, the micro-material irradiation device further includes an interactive interface, such as a touch screen, and the method further includes:

[0064] The monitoring screen is generated in real time according to the beam intensity and the moving speed of the object to be irradiated, and displayed through the interactive interface. Figure 4 The figure in the figure is a schematic diagram of the display image of the interactive interface, wherein the display image simulates the shape and positional relationship of each component in the vacuum chamber, and a speed display box 01 is set on the interface to display the real-time speed of the object to be irradiated 10, a flux display box 02 is set on the interface to display the beam flux intensity obtained by the detector 401, and a progress display box 03 is set on the interface to display the length of the object to be irradiated 10 that has been irradiated.

[0065] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A micro material irradiation device, characterized in that: include: The device body includes a vacuum cavity and a beam inlet, the beam inlet is connected to the vacuum cavity, and the vacuum cavity is used to accommodate the object to be irradiated; a vacuum extraction device, the vacuum extraction device being in communication with the vacuum cavity; A material transmission device, comprising a drive assembly and a shaft assembly, wherein the shaft assembly is located in the vacuum chamber and is used to connect the object to be irradiated, and the drive assembly is connected to the shaft assembly; A beam detector assembly includes at least one detector located in the vacuum chamber and on a side of the object to be irradiated opposite to the beam inlet, and is used to detect the intensity of the beam.

2. The micro material irradiation device according to claim 1, characterized in that: The rotating shaft assembly includes at least a discharge shaft and a receiving shaft, and the driving assembly includes a first driving member and a second driving member, the first driving member is connected to the discharge shaft, and the second driving member is connected to the receiving shaft, and the discharge shaft and the receiving shaft are respectively used to wind the object to be irradiated from both ends of the object to be irradiated.

3. The micro material irradiation device according to claim 2, characterized in that: The rotating shaft assembly further includes a first end steering shaft and a second end steering shaft; The discharge shaft and the receiving shaft are located on the side of the beam detector assembly opposite to the beam inlet, the first end steering shaft and the second end steering shaft are spaced apart and located between the beam detector assembly and the beam inlet, and the first end steering shaft and the second end steering shaft are used to slide or roll against the object to be irradiated in front of the discharge shaft and the receiving shaft.

4. The micro material irradiation device according to claim 1, characterized in that: The beam detector assembly further includes a beam isolation plate, which is located on a side of the detector opposite to the beam inlet and is used to block the beam.

5. The micro material irradiation device according to claim 1, characterized in that: The micro material irradiation device further comprises: a beam blocking device, the beam blocking device comprising at least a third driving member and a blocking body, wherein the blocking body has a blocking position and a yielding position, wherein the blocking body blocks the beam inlet in the blocking position and opens the beam inlet in the yielding position; The third driving member is connected to the blocking body and is used to drive the blocking body to move between the blocking position and the yielding position.

6. The micro material irradiation device according to claim 1, characterized in that: The micro material irradiation device also includes An image acquisition device is directed toward the vacuum chamber and is at least used to acquire an image of the object to be irradiated.

7. The micro material irradiation device according to claim 6, characterized in that: The image acquisition device includes a top image acquisition component and a side image acquisition component, and the top image acquisition component and the side image acquisition component are located on different sides of the object to be irradiated.

8. The micro material irradiation device according to claim 1, characterized in that: The micro material irradiation device further comprises: An illumination device is opposite to the vacuum cavity and is used to provide light to the vacuum cavity.

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