Millimeter-wave communication components

Abstract

To provide a millimeter wave dielectric waveguide having desired dispersion characteristics and a system.SOLUTION: A millimeter wave dielectric waveguide 150 used in a communication system has a first section 136B having a first material and a first cladding material 130 and a second section 136A having a second material and a second cladding 132. The first material is a solid material and the second material includes a longitudinal opening 134 inside.SELECTED DRAWING: Figure 11A

Description

[Background technology]

[0001] Communication systems typically involve the transmission of electromagnetic signals over a suitable medium. Some conventional systems involve electrical signaling over copper wiring or optical signaling over optical fibers. [Brief explanation of the drawings]

[0002]

[0013] Embodiments will be readily understood by reading the following detailed description in conjunction with the accompanying drawings, in which:

[0014] To facilitate this description, like reference numerals refer to like structural elements, and in which embodiments are shown by way of example, and not by way of limitation, and in which:

[0003] [Figure 1] 1 illustrates a millimeter wave communication system in accordance with various embodiments.

[0004] [Figure 2] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments. [Figure 3] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments. [Figure 4] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments.

[0005] [Figure 5A] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 5B] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 5C] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments.

[0006] [Figure 6]1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 7] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 8] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments.

[0007] [Figure 9A] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments. [Figure 9B] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments. [Figure 9C] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments.

[0008] [Figure 10A] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments. [Figure 10B] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments. [Figure 10C] 1 is a cross-sectional view of an exemplary waveguide bundle that may be used in a communication system according to various embodiments.

[0009] [Figure 11A] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 11B] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 11C] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments.

[0010] [Figure 12]1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 13] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 14] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 15] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 16] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 17] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 18] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 19] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 20] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 21] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 22] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system. [Figure 23] 1 is a cross-sectional view of an exemplary portion of a waveguide bundle that may be used in a communication system.

[0011] [Figure 24] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 25] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 26] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments. [Figure 27] 1 is a cross-sectional view of an exemplary dielectric waveguide that may be used in a communication system according to various embodiments.

[0012] [Figure 28A] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 28B] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 29A] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 29B] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 30] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 31A] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 31B] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 32] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 33A] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 33B] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 34] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments. [Figure 35] 1 is a cross-sectional view of an exemplary waveguide connector composite that may be used in a communication system according to various embodiments.

[0013] [Figure 36A] 1 is a cross-sectional view of an exemplary substrate-integrated waveguide that may be used in a communication system according to various embodiments. [Figure 36B] 1 is a cross-sectional view of an exemplary substrate-integrated waveguide that may be used in a communication system according to various embodiments. [Figure 36C] 1 is a cross-sectional view of an exemplary substrate-integrated waveguide that may be used in a communication system according to various embodiments.

[0014] [Figure 37] 1 is a cross-sectional view of an exemplary microelectronic package that may include one or more substrate-integrated waveguides according to various embodiments. [Figure 38] 1 is a cross-sectional view of an exemplary microelectronic package that may include one or more substrate-integrated waveguides according to various embodiments. [Figure 39] 1 is a cross-sectional view of an exemplary microelectronic package that may include one or more substrate-integrated waveguides according to various embodiments.

[0015] [Figure 40] 1 is a cross-sectional view of an exemplary microelectronic package that may include one or more transmission line transitions according to various embodiments. [Figure 41] 1 is a cross-sectional view of an exemplary microelectronic package that may include one or more transmission line transitions according to various embodiments. [Figure 42] 1 is a cross-sectional view of an exemplary microelectronic package that may include one or more transmission line transitions according to various embodiments.

[0016] [Figure 43] 1 is a cross-sectional view of a microelectronic support that may include a transmission line with one or more stubs, according to various embodiments.

[0017] [Figure 44A]44 is a plan view of a metal layer in the microelectronic support of FIG. 43 in accordance with various embodiments. [Figure 44B] 44 is a plan view of a metal layer in the microelectronic support of FIG. 43 in accordance with various embodiments. [Figure 44C] 44 is a plan view of a metal layer in the microelectronic support of FIG. 43 in accordance with various embodiments. [Figure 44D] 44 is a plan view of a metal layer in the microelectronic support of FIG. 43 in accordance with various embodiments. [Figure 44E] 44 is a plan view of a metal layer in the microelectronic support of FIG. 43 in accordance with various embodiments.

[0018] [Figure 45] 1 is a cross-sectional view of a microelectronic support that may include a transmission line with one or more stubs, according to various embodiments.

[0019] [Figure 46A] 46 is a plan view of a metal layer in the microelectronic support of FIG. 45 in accordance with various embodiments. [Figure 46B] 46 is a plan view of a metal layer in the microelectronic support of FIG. 45 in accordance with various embodiments. [Figure 46C] 46 is a plan view of a metal layer in the microelectronic support of FIG. 45 in accordance with various embodiments. [Figure 46D] 46 is a plan view of a metal layer in the microelectronic support of FIG. 45 in accordance with various embodiments. [Figure 46E] 46 is a plan view of a metal layer in the microelectronic support of FIG. 45 in accordance with various embodiments.

[0020] [Figure 47] 1 is a cross-sectional view of a microelectronic support that may include a transmission line with one or more stubs, according to various embodiments.

[0021] [Figure 48A] 48 is a plan view of a metal layer in the microelectronic support of FIG. 47 according to various embodiments. [Figure 48B]48 is a plan view of a metal layer in the microelectronic support of FIG. 47 according to various embodiments. [Figure 48C] 48 is a plan view of a metal layer in the microelectronic support of FIG. 47 according to various embodiments. [Figure 48D] 48 is a plan view of a metal layer in the microelectronic support of FIG. 47 according to various embodiments.

[0022] [Figure 49] FIG. 2 is a plan view of an exemplary metal layer in a transmission line including one or more stubs, in accordance with various embodiments. [Figure 50] FIG. 2 is a plan view of an exemplary metal layer in a transmission line including one or more stubs, in accordance with various embodiments. [Figure 51] FIG. 2 is a plan view of an exemplary metal layer in a transmission line including one or more stubs, in accordance with various embodiments. [Figure 52] FIG. 2 is a plan view of an exemplary metal layer in a transmission line including one or more stubs, in accordance with various embodiments. [Figure 53] FIG. 2 is a plan view of an exemplary metal layer in a transmission line including one or more stubs, in accordance with various embodiments.

[0023] [Figure 54] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line having one or more stubs, according to various embodiments. [Figure 55] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line having one or more stubs, according to various embodiments. [Figure 56] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line having one or more stubs, according to various embodiments.

[0024] [Figure 57] FIG. 2 is a plan view of an exemplary metal layer in a transmission line including one or more stubs, in accordance with various embodiments.

[0025] [Figure 58A] FIG. 2 is a plan view of an exemplary metal layer within a transmission line including portions with different trace widths, in accordance with various embodiments. [Figure 58B] FIG. 2 is a plan view of an exemplary metal layer within a transmission line including portions with different trace widths, in accordance with various embodiments.

[0026] [Figure 59] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line that includes portions with different trace widths, according to various embodiments. [Figure 60] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line that includes portions with different trace widths, according to various embodiments. [Figure 61] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line that includes portions with different trace widths, according to various embodiments. [Figure 62] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line that includes portions with different trace widths, according to various embodiments.

[0027] [Figure 63] FIG. 2 is a plan view of an exemplary metal layer within a transmission line including portions with different trace widths, in accordance with various embodiments.

[0028] [Figure 64] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line that includes portions with different trace widths, according to various embodiments. [Figure 65] 1 is a cross-sectional view of an exemplary microelectronic package that may include a transmission line that includes portions with different trace widths, according to various embodiments.

[0029] [Figure 66] FIG. 1 is a plan view of a wafer and die that may be included in a transceiver or other microelectronic component according to any of the embodiments disclosed herein.

[0030] [Figure 67] FIG. 1 is a cross-sectional side view of a microelectronic device that may be included in a transceiver or other microelectronic component according to any of the embodiments disclosed herein.

[0031] [Figure 68] 1 is a cross-sectional side view of a microelectronic package that may be included in a communication system according to various embodiments.

[0032] [Figure 69] FIG. 1 is a cross-sectional side view of a microelectronic assembly that may include a microelectronic package and / or a waveguide cable according to any of the embodiments disclosed herein.

[0033] [Figure 70] FIG. 1 is a block diagram of an exemplary computing device that may include a communication system, a microelectronic package, and / or a waveguide cable according to any of the embodiments disclosed herein. DETAILED DESCRIPTION OF THE INVENTION

[0034] Components for millimeter-wave communications and related methods and systems are disclosed herein. Data-intensive computing applications, such as deep learning, autonomous vehicle management, and virtual and augmented reality, are placing unprecedented demands on computing systems. Existing conventional interconnection technologies, such as baseband copper cables or optical communication components, may not be able to achieve the goals of low latency, low cost, and low power for high-data-rate communications. Components disclosed herein, such as dielectric waveguides, waveguide bundles, waveguide connectors, and / or transmission line structures, may be useful in enabling high-data-rate millimeter-wave communications in a high-density, low-latency, and power-saving manner.

[0035] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof. In the accompanying drawings, where like reference numerals refer to like parts throughout, there are shown by way of illustration embodiments that may be practiced. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present disclosure. Therefore, the following detailed description is not to be taken in a limiting sense.

[0036] Various operations may be described sequentially as multiple separate acts or operations in a manner that is most helpful in understanding the claimed subject matter. However, the order of description should not be construed as implying that these operations are necessarily order dependent. In particular, these operations need not be performed in the order presented. The described operations may be performed in a different order than in the described embodiment. Various additional operations may be performed and / or described operations may be omitted in additional embodiments.

[0037] For purposes of this disclosure, the phrase "A and / or B" means (A), (B), or (A and B). For purposes of this disclosure, the phrase "A, B and / or C" means (A), (B), (C), (A and B), (A and C), (B and C), or (A, B and C). The phrase "A or B" means (A), (B), or (A and B). The drawings are not necessarily to scale. While many of the drawings show rectilinear structures with flat walls and square corners, this is for ease of illustration only; actual devices made using these techniques will exhibit rounded corners, surface roughness, and other features.

[0038] The description uses the phrases "in one embodiment" or "in an embodiment." Each of these phrases may refer to one or more of the same or different embodiments. Furthermore, terms such as "comprising," "including," and "having" when used with respect to embodiments of the present disclosure are synonymous. When used to describe a range of dimensions, the phrase "between X and Y" represents a range that includes X and Y. For convenience, for example, the phrase "Figure 5" may be used to refer to the set of drawings, Figures 5A to 5C, and the phrase "Figure 9" may be used to refer to the set of drawings, Figures 9A to 9C.

[0039] FIG. 1 illustrates a millimeter-wave communication system 100 according to various embodiments. Any one or more of the elements of the communication system 100 of FIG. 1 may include novel embodiments of elements disclosed herein. The millimeter-wave communication system 100 may include one or more microelectronic packages 102. While two microelectronic packages 102-1 and 102-2 are shown in FIG. 1, this is for illustrative purposes only, and the millimeter-wave communication system 100 may include one microelectronic package 102 or more than two microelectronic packages 102. The microelectronic package 102 may include a microelectronic support 104 and one or more microelectronic components 106. While two microelectronic components 106 are shown disposed on each opposing side of the microelectronic support 104 in FIG. 1, this is for illustrative purposes only, and the microelectronic package 102 may include one microelectronic component 106 or more than two microelectronic components 106 disposed on any one or more sides of the microelectronic support 104. In some embodiments, the microelectronic component 106 may be coupled to conductive contacts on the surface of the microelectronic support 104 by solder, metal-to-metal interconnect, wire bonding, or another suitable interconnect.

[0040] The microelectronic package 102 may also include a package connector 112 that may mate with a cable connector 114 of a waveguide cable 118. The waveguide cable 118 may include cable connectors 114 at either end of a cable body 116 and may enable millimeter-wave communication between the microelectronic package 102-1 and the microelectronic package 102-2. In some embodiments, the total length of the waveguide cable 118 may be less than 2 meters. In some embodiments, the total length of the waveguide cable 118 may be less than 20 meters (e.g., between 1 meter and 20 meters, less than 10 meters, or less than 5 meters). The microelectronic support 104 may include one or more transmission lines 120 between different ones of the microelectronic components 106 and / or between the microelectronic components 106 and the package connector 112. As further described below, the microelectronic package 102 may also include a launch / filter structure 110 between the transmission line 120 and the package connector 112, which provides the desired launch and filter functions.

[0041] A transmission line 120 within the microelectronic support 104 may include one or more horizontal portions 124 and / or one or more vertical portions 126. As used herein, a "horizontal portion" may refer to a portion of the transmission line 120 that is confined to a particular metal layer within the microelectronic support, while a "vertical portion" may refer to a portion of the transmission line 120 that extends between multiple metal layers. As described in more detail below, a horizontal portion 124 may include one or more traces (and via pads), while a vertical portion 126 may include one or more vias (and via pads). A transmission line 120 that includes at least one horizontal portion 124 and at least one vertical portion 126 may also include a transition 122 between the horizontal portion 124 and the vertical portion 126, with several exemplary transitions 122 highlighted in FIG. 1 . The particular arrangement of the transmission line 120 within the microelectronic support 104 of FIG. 1 is exemplary only, and numerous embodiments of the transmission line 120 are disclosed herein. In some embodiments, the microelectronic support 104 may include between 2 and 30 metal layers.

[0042] The microelectronic support 104 may include a dielectric material (e.g., the dielectric material 182 described below with reference to Figures 36 through 65) and a conductive material. The conductive material is disposed within the dielectric material (e.g., within the traces, vias, via pads, and metal planes described below) to provide transmission lines 120 through the dielectric material. In some embodiments, the dielectric material (e.g., the dielectric material 182) may include an organic material, such as an organic build-up film. In some embodiments, the dielectric material may include, for example, a ceramic (e.g., a low-temperature co-fired ceramic or a high-temperature co-fired ceramic), an epoxy film with filler particles therein, glass, an inorganic material, or a combination of organic and inorganic materials. In some embodiments, the conductive material of the microelectronic support 104 may include a metal (e.g., copper). In some embodiments (e.g., as described below with reference to Figures 36 through 65), the microelectronic support 104 may include layers of dielectric material / conductive material. Traces of conductive material in one metal layer are electrically coupled to traces of conductive material in an adjacent metal layer by vias of the conductive material. A microelectronic support 104 including such layers may be formed using, for example, printed circuit board (PCB) manufacturing techniques. While particular numbers and arrangements of layers of dielectric / conductive material are shown in various of the accompanying drawings, these particular numbers and arrangements are exemplary only, and any desired number and arrangement of dielectric / conductive material may be used in the microelectronic support 104. In some embodiments, the microelectronic support 104 may include a packaging substrate. In some embodiments, the microelectronic support 104 may include an interposer.

[0043] 2-4 are cross-sectional views of exemplary waveguide bundles 148 that may be used in communication system 100 according to various embodiments. The longitudinal axes of the dielectric waveguides 150 shown in FIGS. 2-4 may extend into and out of the plane of the page. The waveguide bundles 148 of FIGS. 2-4 may be included in cable body 116 and / or may be part of transmission line 120. Although FIGS. 2-4 show a particular number of dielectric waveguides 150 in waveguide bundle 148, waveguide bundle 148 may include any desired number of dielectric waveguides 150. For example, in some embodiments, a waveguide bundle 148 included in a cable body 116 for a server interconnect application may include up to 16 dielectric waveguides 150 within the waveguide bundle 148 (e.g., 5 to 15 dielectric waveguides 150 or 8 to 16 dielectric waveguides 150), while in other embodiments, a waveguide bundle 148 included in a cable body 116 for a server interconnect application may include more than 16 dielectric waveguides 150. As another example, in some embodiments, a waveguide bundle 148 included in a cable body 116 for a backplane interconnect application may include up to 72 dielectric waveguides 150 within the waveguide bundle 148, while in other embodiments, a waveguide bundle 148 included in a cable body 116 for a backplane interconnect application may include more than 72 dielectric waveguides 150. In another example, in some embodiments, the waveguide bundle 148 included in the cable body 116 for automotive communication applications may include two dielectric waveguides 150 within the waveguide bundle 148, and in other embodiments, the waveguide bundle 148 included in the cable body 116 for automotive communication applications may include more than two dielectric waveguides 150.

[0044] Within the waveguide bundle 148 of FIG. 2, one or more dielectric waveguides 150 may be arranged in a cluster and may be surrounded by a cable body encasement 128. The cable body encasement 128 may hold the dielectric waveguides 150 together and may provide mechanical, thermal, and / or electromagnetic protection for the waveguide bundle 148. The cable body encasement 128 may comprise any suitable material, such as polyethylene terephthalate (PET), other plastic materials, and / or metal foil (e.g., copper foil, aluminum foil, and / or biaxially oriented polyethylene terephthalate foil). Within the waveguide bundle 148 of FIG. 3, multiple dielectric waveguides 150 may be arranged along a metal plane 146 (e.g., provided by a sheet of metal foil within the waveguide cable 118 or by a metal plane within the microelectronic support 104). The waveguide bundle 148 of FIG. 3 may also be surrounded by a cable body encasement 128 (not shown). The waveguide bundle 148 of Figure 3 may be referred to as a grounded dielectric waveguide bundle. Within the waveguide bundle 148 of Figure 4, multiple dielectric waveguides 150 may be disposed between two metal surfaces 146 (e.g., provided by a sheet of metal foil within the waveguide cable 118 or by a metal surface within the microelectronic support 104). The waveguide bundle 148 of Figure 4 may also be surrounded by a cable body encasement 128 (not shown). The waveguide bundle 148 of Figure 4 may be referred to as a non-radiating dielectric waveguide bundle. The waveguide bundles 148 of Figures 2-4 may include any of the dielectric waveguides 150 disclosed herein.

[0045] 5 through 27 illustrate exemplary dielectric waveguides 150 and waveguide bundles 148 that may be used in the millimeter-wave communication system 100 (e.g., may be included in the cable body 116 and / or part of the transmission line 120). Many elements of FIG. 5 are shared with FIGS. 6 through 27, and for simplicity of explanation, the description of these elements will not be repeated. These elements may take the form of any of the embodiments disclosed herein. The dielectric waveguides 150 and waveguide bundles 148 disclosed herein may offer significant advantages over baseband copper cables in terms of bandwidth density and transmission distance, without incurring the complex and expensive integration of optical components required by optical interconnection links.

[0046] As described below, the dielectric waveguide 150 may include a cladding material 130. In some embodiments, the cladding material 130 may not include a metal, and the dielectric waveguide 150 may not have a separate metal coating. Utilizing a metal cladding or coating may advantageously eliminate crosstalk and energy leakage between adjacent dielectric waveguides 150, thereby allowing for increased bandwidth density because the dielectric waveguides 150 may be tightly bundled within a waveguide bundle 148 (e.g., within a waveguide cable 118). However, metal cladding or metal coatings can impair communications at millimeter-wave frequencies by introducing even greater signal attenuation as frequencies extend beyond 60 gigahertz, by introducing large group delay dispersion that spreads transmitted symbols in time and creates inter-symbol interference (ISI) that must be overcome with very complex and expensive equalization / dispersion compensation schemes, and / or by reducing signal integrity due to imperfections in the metal cladding or metal coating that arise due to the difficulty of encasing the dielectric waveguide 150, whose cross section decreases with increasing frequency. The dielectric waveguides 150 and waveguide bundles 148 disclosed herein that do not include metal cladding or metal coatings can overcome one or more of the challenges resulting from the absence of such metal cladding or metal coatings (e.g., achieving adequate bandwidth density and reducing crosstalk) to enable high-density, low-latency, low-weight, and low-power interconnects that can support millimeter-wave communications at high data rates (e.g., greater than 100 gigabits per second).

[0047] 5A-5C are cross-sectional views of an exemplary dielectric waveguide 150 that may be used in the millimeter-wave communication system 100 according to various embodiments. In particular, FIG. 5A is a side cross-sectional view along the longitudinal axis of the dielectric waveguide 150, FIG. 5B is a cross-sectional view of the dielectric waveguide 150 of FIG. 5A at cross section BB, and FIG. 5C is a cross-sectional view of the dielectric waveguide 150 of FIG. 5A at cross section CC. As shown, the dielectric waveguide 150 of FIG. 5 may include a core material 132 having an opening 134 therein, the opening 134 extending in the longitudinal direction. A cladding material 130 may wrap around the core material 132. The cladding material 130 may have a dielectric constant that is less than that of the core material 132. The opening 134 in the core material 132 may be filled with air or another material having a dielectric constant that is less than that of the core material 132. In some embodiments, the core material 132 may have a dielectric constant greater than 2, while the cladding material 130 may have a dielectric constant less than 2. In some embodiments, the core material 132 may include polytetrafluoroethylene (PTFE), another fluoropolymer, low-density polyethylene, high-density polyethylene, another plastic, a ceramic (e.g., alumina), a cyclic olefin polymer (COP), a cyclic olefin copolymer (COC), or any combination thereof. In some embodiments, the core material 132 may include a plastic material having a dielectric constant less than 10 (e.g., a dielectric constant less than 4). In some embodiments in which the core material 132 includes a ceramic, the dielectric constant of the ceramic used may be less than 10. Such embodiments may be particularly advantageous in data center applications. In other embodiments in which the core material 132 includes a ceramic, the dielectric constant of the ceramic used may be between 10 and 50. Such embodiments may be particularly advantageous in very small and / or short dielectric waveguides 150. In some embodiments, the cladding material 130 may include a dielectric material such as a dielectric foam (e.g., a foam having a dielectric constant between 1.05 and 1.8), any of the materials described above with reference to the core material 132, or any other suitable dielectric material.

[0048] The dielectric waveguide 150 of FIG. 5 may include sections having openings 134 with different diameters. For example, FIG. 5A shows a dielectric waveguide 150 having two sections: section 136A, in which the openings 134 have a smaller diameter, and section 136B, in which the openings 134 have a larger diameter. The depiction of two different sections 136 in FIG. 5 is for illustrative purposes only; the dielectric waveguide 150 may have more than two sections 136 having openings 134 with diameters different from the diameter of the adjacent section 136. For example, the dielectric waveguide 150 may include section 136A, followed by section 136B, followed by another section 136A. The placement of the sections 136 within the dielectric waveguide 150 and the relative lengths of the sections 136 may be selected to achieve the desired performance of the dielectric waveguide 150.

[0049] The dimensions of the dielectric waveguide 150 of FIG. 5 (and each of the other dielectric waveguides 150 disclosed herein) may take any suitable values. For example, in some embodiments, the outer diameter 138 of the dielectric waveguide 150 may be between 1 millimeter and 10 millimeters. In some particular embodiments, the outer diameter 138 of the dielectric waveguide 150 may be between 1.5 millimeters and 3 millimeters. Such embodiments may be particularly advantageous in data center applications. In some embodiments, the outer diameter 142 of the core material 132 may be less than 3 millimeters (e.g., between 0.3 millimeters and 3 millimeters, or less than 2 millimeters). In some particular embodiments, the outer diameter 142 of the core material 132 may be between 1 millimeter and 2 millimeters. Such embodiments may be particularly advantageous in data center applications. In some embodiments, the thickness 145 of the core material 132 may be between 0.15 millimeters and 1.5 millimeters. In some embodiments, the outer diameter 140 of the opening 134 may be between 0 millimeters (e.g., in the section 136 where no opening 134 is present) and 2 millimeters. In some embodiments, the outer diameter 140 of the opening 134 may be between 0.2 millimeters and 0.5 millimeters. Such an embodiment may be particularly advantageous in data center applications. In some embodiments, the thickness 144 of the cladding material 130 may be between 1 millimeter and 5 millimeters.

[0050] In the dielectric waveguide 150 of FIG. 5, the transition from section 136A to section 136B is a gradual increase in the diameter of the aperture 134. In some embodiments, a gap may exist between sections 136A and 136B. This gap may have a width of up to 1 millimeter, which in some embodiments still allows for proper wave propagation. In other embodiments, the transition between sections 136A and 136B having apertures 134 with different diameters may be smoother. For example, FIG. 6 is a side cross-sectional view of a dielectric waveguide 150 including a tapered transition section 136C between sections 136A and 136B. FIGS. 6 through 8 share a common perspective with FIG. 5A. In transition section 136C, the diameter of opening 134 at the interface between sections 136A and 136C may match the diameter of opening 134 in section 136A, and the diameter may increase linearly along the longitudinal length of section 136C until it reaches the interface between sections 136C and 136B, where it may match the diameter of opening 134 in section 136B. In some embodiments, transition section 136C may have a length that is less than 10 millimeters. In some embodiments, as described above, a gap may exist between section 136A and section 136C and / or between section 136C within section 136B.

[0051] In some embodiments, the different sections 136 having different diameters 140 of the openings 134 may not be distinct. Instead, the diameters 140 of the openings 134 may vary smoothly over the longitudinal length of the dielectric waveguide 150. Figure 7 is a cross-sectional side view of such a dielectric waveguide 150. Utilizing a core material 132 having openings 134 with smoothly varying diameters 140 may reduce any undesirable amplitude effects that may result from non-smooth transitions between the different sections 136, but may be more difficult to manufacture.

[0052] In the embodiments of FIGS. 5-7 , the outer diameter 138 of the dielectric waveguide 150 remains constant throughout the length of the dielectric waveguide 150. Similarly, the outer diameter 142 of the core material 132 of the dielectric waveguide 150 remains constant. Embodiments in which the outer diameter 138 is constant throughout the length of the dielectric waveguide 150 may enable easier assembly and may eliminate or minimize the use of additional matching transitions. However, in other embodiments, the outer diameter 138 and / or the outer diameter 142 may vary throughout the length of the dielectric waveguide 150. For example, FIG. 8 illustrates an embodiment in which the outer diameter 138 of the dielectric waveguide 150 is different in each of the different sections 136. Similarly, the outer diameter 142 of the core material 132 of the dielectric waveguide 150 is different in each of the different sections 136. More generally, in some embodiments, the thickness 144 of the cladding material 130 may remain constant over the length of the dielectric waveguide 150 (e.g., as shown in FIGS. 5-8), while in other embodiments, the thickness 144 of the cladding material 130 may not remain constant over the length of the dielectric waveguide 150. Similarly, in some embodiments, the thickness 145 of the core material 132 may remain constant over the length of the dielectric waveguide 150 (e.g., as shown in FIG. 8), while in other embodiments, the thickness 145 of the core material 132 may not remain constant over the length of the dielectric waveguide 150 (e.g., as shown in FIGS. 5-7).

[0053] The dielectric waveguides 150 of FIGS. 5-7 (as well as other dielectric waveguides 150 and waveguide bundles 148 disclosed herein) may be manufactured using any suitable technique. For example, in some embodiments, an extrusion head may be used to extrude the core material 132 with the desired opening 134. The extrusion head may be controlled to adjust the diameter 140 of the opening 134 in embodiments in which the diameter 140 varies smoothly over the length of the dielectric waveguide (e.g., as described above with reference to FIG. 7 ), or different sections 136 may be extruded separately and then assembled using heat fusion or simply held together by pressure from the cladding material 130. The cladding material 130 may be applied using heat shrink tubing techniques with a suitable polymer through spiral wrapping or by using another technique. The common portion of the cladding material 130 may be applied to the entire dielectric waveguide 150 or to different sections 136 separately.

[0054] Dielectric waveguides 150 having apertures 134 of varying diameter may also be utilized in grounded dielectric waveguide bundles 148 similar to that of FIG. 3 and in non-radiating dielectric waveguide bundles 148 similar to that of FIG. 4. For example, FIGS. 9 and 10 show grounded and non-radiating dielectric waveguide bundles 148, respectively, having apertures 134 of varying diameter along the longitudinal length of the dielectric waveguides 150 within the waveguide bundle 148. In particular, FIGS. 9A and 10A are side cross-sectional views taken along the longitudinal axis of the dielectric waveguide 150, FIGS. 9B and 10B are cross-sectional views of the dielectric waveguide 150 of FIGS. 9A and 10A at section BB, respectively, and FIGS. 9C and 10C are cross-sectional views of the dielectric waveguide 150 of FIGS. 9A and 10A at section CC, respectively.

[0055] In the waveguide bundle 148 of Figure 9, the bottom surface of the core material 132 may be in contact with the metal surface 146, as shown, and the cladding material 130 may be present on the top and side surfaces of the core material 132. In the waveguide bundle 148 of Figure 10, the bottom and top surfaces of the core material 132 may be in contact with the metal surface 146, as shown, and the cladding material 130 may be present on the side surfaces of the core material 132. The openings 134 in the core material 132 of the dielectric waveguides 150 of the waveguide bundles 148 of Figures 9 and 10 may have different diameters (e.g., gaps, straight transitions, smoothly varying diameters, etc.) along the longitudinal length of the dielectric waveguide 150 according to any of the embodiments disclosed herein.

[0056] The dimensions of the waveguide bundles 148 in FIGS. 9 and 10 may have any suitable values. For example, in some embodiments, the height 154 of the grounded dielectric waveguide bundle 148 (similar to that of FIG. 9 ) may be between 0.5 and 5 millimeters. In some embodiments, the thickness 156 of the cladding material 130 above the core material 132 may be between 1 and 3 millimeters. In some embodiments, the height 158 ​​of the non-radiating dielectric waveguide bundle 148 (similar to that of FIG. 10 ) may be between 0.5 and 3 millimeters. In some embodiments, the thickness 152 of the metal surface 146 may be between 0.002 and 1 millimeter. In some embodiments, the height 166 of the core material 132 in the grounded dielectric waveguide bundle (similar to that of FIG. 9 ) or the non-radiating dielectric waveguide bundle 148 (similar to that of FIG. 10 ) may be between 0.2 and 2 millimeters. In some embodiments, the width 164 of the core material 132 in the grounded dielectric waveguide bundle 148 (similar to that of FIG. 9) or the non-radiating dielectric waveguide bundle 148 (similar to that of FIG. 10) may be between 0.2 millimeters and 2 millimeters.

[0057] The dielectric waveguide 150 and waveguide bundle 148 of FIGS. 5 through 10 may have significant advantages over conventional dielectric waveguides and waveguide bundles. Conventional dielectric waveguides may exhibit undesirable dispersion, in which group delay is not constant across a frequency range but varies as a function of frequency, leading to ISI. Conventional approaches to addressing such dispersion include complex baseband equalizers or predistorters using finite impulse response filters (e.g., implemented using mixed-signal circuits or in the digital domain), signaling schemes based on the Hilbert transform, and / or analog dispersion compensation circuits (e.g., implemented at millimeter-wave, baseband, or intermediate frequencies). These approaches incur significant costs in terms of circuit complexity, silicon area, noise, power consumption, and spurious responses resulting from non-ideal Hilbert transforms, insertion loss, and / or limited real-time adjustability of the circuit response. The dielectric waveguides 150 and waveguide bundles 148 of Figures 5-10 can correct the undesirable dispersion characteristics of conventional dielectric waveguides by achieving overall compensation dispersion. In particular, section 136A, which has an aperture 134 with a smaller diameter 140, may exhibit "anomalous" dispersion, in which the group delay decreases with frequency, while section 136B, which has an aperture 134 with a larger diameter 140, may exhibit "normal" dispersion, in which the group delay increases with frequency. Including anomalous dispersion sections 136A and 136B within a single dielectric waveguide 150 / waveguide bundle 148 can result in a dielectric waveguide 150 / waveguide bundle 148 with little dispersion (i.e., a group delay that is more constant as a function of frequency), which can improve signaling fidelity and reduce the need for expensive compensation circuitry. The specific proportion of different sections 136 within the dielectric waveguide 150 required to achieve the desired dispersion can depend on the geometry of the sections 136, the operating frequency, and the particular materials used. A specific ratio can then be determined as a function of these variables.

[0058] In some embodiments, absorber material may be present around the cladding material 130 along each portion of the dielectric waveguide 150. The absorber material 160 may include low-loss particles or fibers due to the poor conductors and / or high loss of magnetic materials such as ferrite. In some embodiments, the absorber material 160 may be an absorbing coating or other material based on a polymer composite containing ferrite powder (e.g., ferrite powder mixed with a non-conductive epoxy) or fillers that may include carbon particles, fibers, and / or nanotubes (e.g., carbon nanotube powder mixed with polyurethane). For example, FIGS. 11A-11C are cross-sectional views of an exemplary dielectric waveguide 150 including a section with absorber material 160. In particular, FIG. 11A is a side cross-sectional view along the longitudinal axis of the dielectric waveguide 150, FIG. 11B is a cross-sectional view of the dielectric waveguide 150 of FIG. 11A at cross-section BB, and FIG. 11C is a cross-sectional view of the dielectric waveguide 150 of FIG. 11A at cross-section CC. The embodiment of Figure 11 shows three distinct sections 136: section 136B, where there are no openings 134 in the core material 132 and absorber material 160 is present around the cladding material 130; section 136A, where there are openings 134 in the core material 132 and no absorber material 160 around the cladding material 130; and transition section 136C, where the outer diameter of the core material 132 transitions linearly from the outer diameter in section 136A to section 136B and the openings 134 transition linearly from no openings in section 136B to the diameter of the openings 134 in section 136A, where there are no absorber material 160 around the cladding material 130. In some embodiments, transition section 136C can have a length 162 between 1 millimeter and 50 millimeters. In other embodiments, the presence or absence of openings 134 can occur smoothly (e.g., as described above with reference to Figure 7). In some embodiments, an opening 134 may be present in section 136B, but the diameter of the opening 134 may be smaller than the diameter of the opening 134 in section 136A. In some embodiments, the absorber material 160 may extend over the cladding material 130 in section 136C.In some embodiments, the thickness of the absorber material 160 can be between 0.1 and 2 millimeters.

[0059] In some embodiments, section 136B of dielectric waveguide 150 of FIG. 11 may be a single-mode waveguide, while section 136A of dielectric waveguide 150 of FIG. 11 may be a multimode waveguide. As used herein, a “single-mode” waveguide may be one in which only the fundamental mode of a signal is guided primarily along the core material 132. For any cross-section with 90-degree rotational symmetry, such as square and circular waveguides, this fundamental mode may exist at two orthogonal polarizations with identical propagation properties. A “multimode” waveguide may be one in which the fundamental mode and higher-order modes are guided along the core material 132. These higher-order modes may be excited due to imperfections along the link. In dielectric waveguide 150 of FIG. 11, single-mode section 136B may exhibit normal dispersion (group delay increasing with frequency), while multimode section 136A may exhibit anomalous dispersion (group delay decreasing with frequency). The dielectric waveguide 150 of FIG. 11 may also achieve dispersion compensation by alternating normal-dispersion single-mode sections 136B and anomalous-dispersion multimode sections 136A, as described above with reference to FIGS. 5 through 10. Furthermore, the absorber material 160 on the single-mode sections 136B may absorb higher-order modes arising in the multimode sections 136A. Thus, the single-mode sections 136B may function as mode filters to eliminate such higher-order modes, thereby reducing inter-modal dispersion that can impair signaling. Undesirable higher-order modes may arise in the dielectric waveguide 150 and waveguide bundle 148 of FIGS. 5 through 10 and propagate along the dielectric waveguide 150 and waveguide bundle 148. Such higher-order modes may be filtered out in the connectors 112 / 114 and / or the launch filter structure 110.

[0060] A dielectric waveguide 150 similar to that of FIG. 11 can be fabricated using the techniques described above with reference to FIGS. 5 through 10. In some embodiments, the single-mode section 136B and the multimode section 136A can be independently extruded, and the transition section 136C can be 3D printed or 3D molded using a suitable polymer having a dielectric constant similar to that of the core material 132 in sections 136A and 136B. These independent sections 136 can then be heated and bonded together. In other embodiments, the tapered shape of the transition section 136C can be achieved during extrusion as described above with reference to FIGS. 5 through 10. In some embodiments, the single-mode section 136B can be formed by first forming the multimode section 136A and then applying heat and pressure to part or all of the multimode section 136A to collapse the multimode section 136A into the single-mode section 136B. The absorber material 160 can be applied to the cladding material 130 using any of the techniques described herein, or can be applied as a coating.

[0061] In some embodiments, a waveguide bundle 148 may include dielectric waveguides 150 with different structures that prevent electromagnetic modes in adjacent dielectric waveguides 150 from completely shunting energy, thereby reducing crosstalk due to mismatched phase. In particular, adjacent dielectric waveguides 150 with different phase constants (also known as propagation constants) within a frequency range of interest resulting from such different structures may result in imperfect photonic transitions between out-of-phase states. Because perturbations of electromagnetic modes in such adjacent dielectric waveguides 150 are not structurally increased, crosstalk may be reduced. Consequently, waveguide bundles 148 incorporating such out-of-phase dielectric waveguides 150 may be spaced closer together than previously possible while keeping crosstalk at manageable levels. Utilizing such dielectric waveguides 150 with different structures in such a manner may cause data in each dielectric waveguide 150 to arrive at a receiver at different times. However, this effect may be only weakly frequency-dependent unless the dielectric waveguides 150 are dramatically different and can be easily compensated for in the receiver or transmitter. For example, an equalizer circuit (e.g., included in a millimeter-wave transceiver in microelectronic component 106) may perform this correction in the digital domain (e.g., using a deskew buffer) or as a mixed-signal circuit (e.g., by adding additional analog delays to some lanes). Such correction may alternatively or additionally be implemented at various stages in the radio frequency (RF) front end using analog circuits such as inductive / capacitive delay lines or all-pass filters (e.g., included in microelectronic component 106 and / or microelectronic support 104).

[0062] 12 through 23 illustrate examples of waveguide bundles 148 in which adjacent dielectric waveguides 150 have different structures. Any of the features described herein with reference to any of FIGS. 12 through 23 may be combined with any other feature to form a waveguide bundle 148. For example, as described further below, FIG. 12 illustrates an embodiment in which adjacent dielectric waveguides 150 have openings 134 with different diameters 140, and FIG. 13 illustrates an embodiment in which adjacent dielectric waveguides 150 have core materials 132 with different dielectric constants. These features of FIGS. 12 and 13 may be combined such that a waveguide bundle 148 according to the present disclosure has adjacent dielectric waveguides 150 that include openings 134 with different diameters 140 and core materials 132 with different dielectric constants. This particular combination is merely an example, and any combination may be used. Additionally, waveguide bundles 148 including dielectric waveguides 150 having different structures (described below with reference to Figures 12-23) may optionally include dielectric waveguides 150 having any of the structures described above with reference to Figures 5-11.

[0063] 12 illustrates a waveguide bundle 148 in which adjacent dielectric waveguides 150 have openings 134 with different diameters 140. Dielectric waveguides 150 with openings 134 with different diameters 140 (e.g., alternating dielectric waveguides 150 with openings 134 with diameters 140-1 and 140-2 as shown) may alternate throughout the waveguide bundle 148, although more generally, the diameters 140 of the dielectric waveguides 150 within the waveguide bundle 148 may vary in any desired pattern.

[0064] 13 illustrates a waveguide bundle 148 in which adjacent dielectric waveguides 150 have core materials 132 with different dielectric constants (e.g., due to different material compositions). Dielectric waveguides 150 with different core materials 132 (e.g., alternating dielectric waveguides 150 with core material 132-1 and dielectric waveguides 150 with different core materials 132-2 as shown) may alternate across the waveguide bundle 148, but more generally, the material composition of the core materials 132 of the dielectric waveguides 150 within the waveguide bundle 148 may vary in any desired pattern.

[0065] 14 illustrates a waveguide bundle 148 in which adjacent dielectric waveguides 150 have cladding materials 130 with different dielectric constants (e.g., due to different material compositions). Dielectric waveguides 150 with different cladding materials 130 (e.g., alternating dielectric waveguides 150 with cladding material 130-1 and dielectric waveguides 150 with different cladding material 130-2 as shown) may alternate throughout the waveguide bundle 148, but more generally, the material composition of the cladding materials 130 of the dielectric waveguides 150 within the waveguide bundle 148 may vary in any desired pattern.

[0066] 15 illustrates a waveguide bundle 148 in which adjacent dielectric waveguides 150 have core materials 132 with different diameters 142. Dielectric waveguides 150 having core materials 132 with different diameters 142 (e.g., alternating dielectric waveguides 150 having core materials 132 with diameters 142-1 and 142-2 as shown) may alternate throughout the waveguide bundle 148, but more generally, the diameters 142 of the core materials 132 of the dielectric waveguides 150 within the waveguide bundle 148 may vary in any desired pattern.

[0067] Waveguide bundles 148 including adjacent dielectric waveguides 150 having different structures may also be utilized in grounded dielectric waveguide bundles 148 similar to that of Figure 3 and in non-radiating dielectric waveguide bundles 148 similar to that of Figure 4. For example, Figures 16 and 17 show grounded and non-radiating dielectric waveguide bundles 148, respectively, including adjacent dielectric waveguides 150 having openings 134 of different diameters 140 as described above with reference to Figure 12. Figures 18 and 19 show grounded and non-radiating dielectric waveguide bundles 148, respectively, including adjacent dielectric waveguides 150 having core materials 132 with different dielectric constants (e.g., due to different material compositions) as described above with reference to Figure 13. Figures 20 and 21 show a grounded dielectric waveguide bundle 148 and a non-radiating dielectric waveguide bundle 148, respectively, including adjacent dielectric waveguides 150 having cladding materials 130 with different dielectric constants (e.g., due to different material compositions), as described above with reference to Figure 14. Figures 22 and 23 show a grounded dielectric waveguide bundle 148 and a non-radiating dielectric waveguide bundle 148, respectively, including adjacent dielectric waveguides 150 having core materials 132 with different widths 164, as described above with reference to the different diameters 140 of Figure 15. While Figures 12 through 23 show a one-dimensional array of dielectric waveguides 150, this is for ease of illustration only, and the waveguide bundles 148 disclosed herein can include a two-dimensional array of dielectric waveguides 150, if desired.

[0068] Although the various elements of the dielectric waveguide 150 and waveguide bundle 148 disclosed herein are shown in the accompanying drawings as having particular shapes, these shapes are exemplary only, and any suitable shape may be used. For example, the opening 134 in the core material 132 may have any desired cross-sectional shape (e.g., circular, elliptical, square, rectangular, triangular, etc.). The core material 132 may have any desired cross-sectional shape (e.g., circular, elliptical, square, rectangular, triangular, etc.). The cladding material 130 may have any desired cross-sectional shape (e.g., circular, elliptical, square, rectangular, triangular, etc.) in a waveguide bundle similar to that of FIG. 2 . The cross-sectional shapes of the various elements of the dielectric waveguide 150 need not all be the same; for example, the core material 132 may have a rectangular cross-section, while the cladding material 130 may have a circular cross-section. 24 and 25 show exemplary dielectric waveguides 150 in which the openings 134, core material 132, and cladding material 130 have various shapes. In FIG. 24, the openings 134 have an elliptical cross-section, the core material 132 has a substantially rectangular cross-section, and the cladding material 130 has a substantially square cross-section, while in FIG. 25, the openings 134 have a circular cross-section, the core material 132 has a circular cross-section, and the cladding material 130 has a circular cross-section. Furthermore, the dielectric waveguides 150 and waveguide bundles 148 disclosed herein may include more than one of the various elements. For example, FIGS. 26 and 27 show an embodiment in which the core material 132 includes multiple openings 134 (i.e., two elliptical openings 134 in FIG. 26 and four circular openings 134 in FIG. 27). Any of the dielectric waveguides 150 disclosed herein may include multiple openings 134 in the core material 132. A dielectric waveguide 150 with 90-degree rotational symmetry may have identical responses to horizontal and vertical polarization modes. Polarization multiplexing may be used to double the supported data rate. Furthermore, polarization-dependent waveguide structures may be used with any of the dielectric waveguides 150 and / or waveguide bundles 148 disclosed herein.

[0069] As mentioned above, any of the dielectric waveguides 150 / waveguide bundles 148 disclosed herein may be included in a waveguide cable 118. In particular, the dielectric waveguides 150 / waveguide bundles 148 may be included in a cable body 116 and may have cable connectors 114 at either end coupled to package connectors 112. In some embodiments, the dielectric waveguides 150 / waveguide bundles 148 disclosed herein, to achieve the benefits of compensated intra-modal group delay dispersion, may be vulnerable to spurious excitation of undesired higher-order modes that travel at a different velocity than the signaling mode, potentially leading to ISI resulting from inter-modal dispersion. The cable connector 114 / package connector 112 may be designed to attenuate these higher-order modes that arise along the cable body 116, allowing a less dispersive dielectric waveguide 150 (e.g., any of the dielectric waveguides 150 of Figures 5-11) to be included in the cable body 116 and for the ISI arising from such less dispersive dielectric waveguide 150 to be handled by the structure of the connector composite 114 / 112.

[0070] 28A and 28B, 29A and 29B, 30, 31A and 31B, 32, 33A and 33B, and 34 and 35 are cross-sectional views of exemplary waveguide connector composites that may be used in millimeter-wave communication system 100 according to various embodiments. While certain portions of the composites in FIGS. 28 through 35 are identified as package connector 112 and cable connector 114, the roles of these connectors may be reversed (i.e., a structure identified as cable connector 114 may be used as package connector 112, and vice versa). In FIGS. 28 through 35, the waveguide connector composites shown include cable connector 114 (at the end of cable body 116 of waveguide cable 118) that mates with package connector 112. Package connector 112 is shown on microelectronic support 104. The core material 132 is coupled to a transmission line 120 between a surface of the microelectronic support 104 and a microelectronic component 106 (e.g., a millimeter-wave transceiver). Not shown is a launch / filter structure 110 that may be included in the microelectronic support 104 between the package connector 112 and the transmission line 120. While the microelectronic component 106 is shown as being coupled to the microelectronic support 104 with solder 168, this is by way of example only, and any type of interconnect (e.g., metal-to-metal interconnect) may be used. Additionally, while FIGS. 28-35 show a single dielectric waveguide (and thus a single "lane" of communication) within the cable body 116, this is for ease of illustration only, and the cable connector 114 / package connector 112 may include multiple waveguides for multi-lane communication (e.g., as described above with reference to waveguide bundle 148).

[0071] 28A and 28B (as well as in FIGS. 29 through 35 ), a small portion of the cable body 116 leading to the cable connector 114 is shown, but this structure of the cable body 116 is merely exemplary, and the cable body 116 could take the form of any of the dielectric waveguides 150 disclosed herein. The cable connector 114 is merely an end of the cable body 116 and is received in a recess in the package connector 112. As shown, the package connector 112 includes a core material 132 (which may be the same core material 132 as included in the cable body 116 or a different core material 132) with a flared portion 228, thereby increasing in diameter toward the interface between the package connector 112 and the cable connector 114. Narrowing the diameter of the core material 132 from the cable body 116 to the core material 132 of the package connector 112 may allow higher-order modes to decay more rapidly relative to the decay of the fundamental signaling mode, effectively filtering the higher-order modes and reducing inter-modal dispersion. Such embodiments may support high operating bandwidths and may be less susceptible to manufacturing variations than direct transitions to transmission lines. A cladding material 130 may surround the core material 132 of the package connector 112. This cladding material 130 may be the same cladding material 130 or a different cladding material 130 as included in the cable body 116. In some embodiments, the length of the core material 132 within the package connector 112 may be between 5 millimeters and 50 millimeters.

[0072] As shown, absorber material 160 may be disposed around a portion of the cladding material 130 of the package connector 112 and may be spaced laterally from the flared portion 228 of the core material 132 and from the microelectronic support 104. The absorber material 160 may take the form of any of the embodiments disclosed herein and may absorb energy of undesired higher-order modes propagating along the waveguide cable 118, filtering out these higher-order modes before they reach the microelectronic support 104 without reflecting the higher-order modes back into the waveguide cable 118. A connector body 170 may wrap around the cladding material 130 and absorber material 160. The exposed surfaces of the cladding material 130 and the core material 132 are recessed from the end of the connector body 170 to provide a socket for the cable connector 114. In some embodiments, the connector body 170 may be formed of a plastic material. 28A illustrates an embodiment in which the interface between the package connector 112 and the cable connector 114 is parallel to the interface between the package connector 112 and the microelectronic support 104, while FIG. 28B illustrates an embodiment in which the core material 132, cladding material 130, and absorber material 160 of the package connector 112 are curved such that the interface between the package connector 112 and the cable connector 114 is rotated 90 degrees relative to the interface between the package connector 112 and the microelectronic support 104. The core material 132, cladding material 130, and absorber material 160 of the package connector 112 may be curved in any desired manner to achieve a desired relative angle between the interface between the package connector 112 and the cable connector and the interface between the package connector 112 and the microelectronic support 104. A curved cable connector 114 and / or package connector 112 may be advantageous in, for example, server rack interconnections and may provide improved connector performance with respect to increased radiation of higher-order modes (due to weaker confinement) into the absorber material 160.

[0073] 29A and 29B respectively illustrate a waveguide connector composite that shares many features with the waveguide connector composite of FIGS. 28A and 28B , but in which the flared portion 228 is part of the core material 132 of the cable connector 114 rather than part of the core material 132 of the package connector 112. In the embodiment of FIG. 29 , the flared portion 228 of the core material 132 of the package connector 112 may extend beyond the cladding material 130 of the cable body 116. As shown, in the package connector 112, the cladding material 130 may be recessed from the end of the connector body 170, and the core material 132 may be recessed from the end of the cladding material 130.

[0074] The particular embodiment of the waveguide connector composite shown in the accompanying drawings may be subject to numerous variations. For example, FIG. 30 illustrates a waveguide connector composite similar to that of FIG. 29A , except that the cable connector 114 includes a connector body 170 and the absorber material 160 is part of the cable connector 114 rather than the package connector 112. The core material 132 and cladding material 130 of the package connector 112 are recessed from the connector body 170 of the package connector 112 to receive (extend past) the core material 132 and cladding material 130 of the cable connector 114. FIG. 31A illustrates a waveguide connector composite similar to that of FIG. 30 , except that the absorber material 160 is included in both the cable connector 114 and the package connector 112. 31B is similar to that of FIG. 31A but shows a waveguide connector composite in which the core material 132 and cladding material 130 of the package connector 112 extend past the connector body 170 of the package connector 112 to mate with a socket in the waveguide cable 118 formed by the cladding material 130 and core material 132 recessed from the connector body 170 of the cable connector 114. Any of the waveguide connector composites disclosed herein can include such variations.

[0075] In some embodiments, the end of the core material 132 at the interface between the cable connector 114 and the package connector 112 may be angled (e.g., at an angle between 30 and 60 degrees). For example, FIG. 32 shows a waveguide connector composite similar to that of FIG. 29A , but in which the ends of the core material 132 of the package connector 112 and the cable connector 114 have complementary beveled core cut surfaces (e.g., relative to the surface of the microelectronic support 104 to which the package connector 112 is bonded). Such angled ends of the core material 132 may be advantageous when the core material 132 of the cable connector 114 has a different dielectric constant than the core material 132 of the package connector 112. Any of the waveguide connector composites disclosed herein may include an angled core material 132.

[0076] In some embodiments, a waveguide connector composite can include a metal layer around the core material 132 in the package connector 112. FIGS. 33A and 33B show a waveguide connector composite including such a metal structure 176. As shown, the metal structure 176 can be disposed between the core material 132 and the connector body 170 of the package connector 112 and can have a flared portion 230. The flared portion 230 can reduce reflections of signaling modes to improve signal integrity. Without the flared portion 230, the transition between the cable connector 114 and the package connector 112 would be abrupt, which could reflect a large portion of the signal and potentially create standing waves inside the package connector 112. Higher-order modes can be reflected with or without the flared portion 230, which may be desirable to reduce inter-modal dispersion. In some embodiments, the flared portion 230 can have a length 174 that is between the wavelength of the frequency of interest and five times the wavelength of the frequency of interest. Although the waveguide connector composite of Figures 33A and 33B includes angled core material 132, this need not be the case.

[0077] In the embodiment of FIG. 33A , the diameter of the core material 132 of the cable connector 114 may be the same as the diameter of the core material 132 of the package connector 112, so there may be no flared portion. In the embodiment of FIG. 33B , the diameter of the core material 132 of the cable connector 114 is larger than the diameter of the core material 132 of the package connector 112, so a flared portion 228 is present in the cable connector 114 (or package connector 112) to match the diameter of the core material 132 of the package connector 112. A waveguide connector composite including a metal structure 176 with a flared portion 230 may provide anomalous dispersion and therefore may be used to compensate for normal dispersion that may occur in the cable body 116. Furthermore, the anomalous dispersion provided by the package connector 112 of FIGS. 33A and 33B may be large, allowing a moderate amount of normal dispersion resulting from the cable body 116 to be compensated for in the significantly smaller package connector 112.

[0078] Figures 34 and 35 show exemplary variations of the embodiment of Figures 33A and 33B. Figure 34 shows an embodiment in which the cladding material 130 of the cable connector 114 is tapered to match the flared portion 230 of the metal structure 176 of the package connector 112. Figure 34 shows an embodiment in which the cable connector 114 also includes the metal structure 176 and the connector body 170. Any of the waveguide connector composites disclosed herein can include such variations.

[0079] In some embodiments, the launch / filter structure 110 included in the microelectronic support 104 may include one or more substrate-integrated waveguides to provide dispersion compensation, in addition to or instead of other dispersion-compensating structures disclosed herein. FIG. 36 shows a substrate-integrated waveguide 178. FIG. 36A is a perspective view, FIG. 36B is a side cross-sectional view through section BB of FIG. 36A, and FIG. 36C is a side cross-sectional view through section CC of FIG. 36A. The substrate-integrated waveguide 178 may include two metal plates 184 coupled through a dielectric material 182 between them by a metal post 186. In some embodiments, the metal plate 184 may be provided by a metal surface in a metal layer of the microelectronic support 104, while the metal post 186 may be provided by a via between the metal surfaces. The substrate-integrated waveguide 178 may have anomalous dispersion and thus may be used to compensate for normal dispersion in the dielectric waveguide 150 / waveguide bundle 148.

[0080] The substrate-integrated waveguide 178 may be disposed within the microelectronic support 104 in any of a number of ways. For example, Figure 37 shows a microelectronic support 104 including a substrate-integrated waveguide 178 coupled between a patch launcher 180 (which may be part of the launch / filter structure 110) and the transmission line 120 to the microelectronic component 106. The patch launcher 180 may be communicatively coupled to the package connector 112, and the substrate-integrated waveguide 178 may be slot-coupled to the patch launcher 180 via a slot 188 below the patch launcher 180.

[0081] 38 illustrates a microelectronic support 104 including multiple substrate-integrated waveguides 178. These substrate-integrated waveguides 178 may be coupled between a multiplexer 190 and different transmission lines 120 (which may lead to one microelectronic component 106 as shown, or to multiple microelectronic components 106 as needed). A patch launcher 180 may be communicatively coupled to the package connector 112, and the multiplexer 190 may be coupled between the patch launcher 180 and the substrate-integrated waveguides 178. The multiplexer 190 may separate different frequency bands and direct them to different ones of the substrate-integrated waveguides 178 for dispersion compensation. In some embodiments, the multiplexer 190 may be a diplexer or an N-plexer, where N is equal to 3 or more.

[0082] FIG. 39 illustrates an embodiment similar to that of FIG. 38 , but in which the microelectronic support 104 includes a first portion 104A and a second portion 104B. The first portion 104A may be, for example, a package substrate, while the second portion 104B may be, for example, a silicon-based interposer, another semiconductor-based interposer, or another interposer (e.g., one comprising an organic, ceramic, or glass material). In the embodiment of FIG. 39 , the package connector 112, patch launcher 180, multiplexer 190, and substrate-integrated waveguide 178 are included in the second portion 104B, while the microelectronic component 106 is coupled to the first portion 104A. The first portion 104A and the second portion 104B may be coupled together in any suitable manner, such as by using solder, metal-to-metal interconnects, or other interconnects. The second portion 104B may be, for example, a dedicated passive interposer, and the material 192 of the second portion 104B may have a higher dielectric constant than the dielectric material 182 of the first portion 104A. This provides greater dispersion compensation per unit length and reduces the width of the substrate-integrated waveguide 178 relative to the substrate-integrated waveguide 178 included in the first portion 104A. In some embodiments, the material 192 may include silicon (e.g., high-resistivity silicon), aluminum nitride, or any other suitable material (e.g., a material with a high dielectric constant and low loss tangent). While a patch launcher 180 is shown in FIGS. 37-39, this is by way of example only, and any suitable launcher structure may be included in the launch / filter structure 110 (e.g., one or more antennas, a horn-shaped launcher, a Vivaldi-type launcher, a dipole-based launcher, or a slot-based launcher).

[0083] As described above, the transmission line 120 within the microelectronic support 104 may include one or more horizontal portions 124, one or more vertical portions 126, and one or more transitions 122 between the horizontal and vertical portions 124, 126. The transmission line 120 within the microelectronic support 104 may be formed of metal planes, vias, and traces and may optionally be shielded by a shielding structure 194 that generally surrounds the transmission line 120. FIGS. 40-42 show exemplary arrangements of the transmission line 120 within the microelectronic package 102. In these figures, the transmission line 120 is communicatively coupled between two microelectronic elements 196 on opposite sides of the microelectronic support 104. The microelectronic elements 196 may include, for example, any of the microelectronic components 106 disclosed herein or any of the package connectors 112 disclosed herein. For simplicity of illustration, the launch / filter structure 110 is not shown in FIGS. 40-42, but may be present.

[0084] In the embodiment of FIG. 40 , a single transition 122 couples the surface horizontal portion 124 and the vertical portion 126. In some embodiments, the horizontal portion 124 of FIG. 40 may be a microstrip including a trace spaced from an underlying ground plane by a dielectric material, and the vertical portion 126 of FIG. 40 may include one or more vias with via pads therebetween. While FIG. 40 and other figures in the accompanying drawings show the vertical portion 120 as being completely top-to-bottom, this is merely exemplary, and the vertical portion 126 may include a staggered stack of vias or any other suitable structure. In the embodiment of FIG. 41 , a single horizontal portion 124 is coupled between the two vertical portions 126, so that the transmission line 120 includes two transitions 122. In some embodiments, the horizontal portion 124 in Figure 41 may be a stripline including a trace positioned vertically between two ground planes and spaced apart from the ground planes by a dielectric material, or a coplanar waveguide including a trace positioned horizontally between two ground planes (or ground traces) and spaced apart from the ground planes (or ground traces) by a dielectric material. In the embodiment of Figure 42, the transmission line 120 includes two horizontal portions 124, two vertical portions 126, and three transition sections 122.

[0085] Transitions in a transmission line can compromise the signal integrity of communications along the transmission line. For example, a conventional transition between a conventional horizontal section and a conventional vertical section can introduce parasitic capacitance (e.g., surface / metal capacitance) and inductance that can cause reflections of the signal waveform, which can limit the operating bandwidth and corresponding achievable data rate. Disclosed herein and described below with reference to FIGS. 40 through 65 are transmission lines 120 having various features that can be implemented in the vertical and / or horizontal sections 126, 124, around the transitions 122 to achieve desired impedance matching at these transitions 122 and improve the consistency of signal propagation through the transitions 122, thereby improving the operating bandwidth.

[0086] In some embodiments, the transmission line 120 may include one or more stubs 206 of a conductive material (e.g., metal) that may short the transmission line 120 to the grounded shield structure 194. When communicating using baseband signaling techniques, shorting the transmission line 120 to the grounded shield structure 194 may eliminate the ability to transmit data over the transmission line 120. However, at millimeter-wave frequencies using bandpass signaling techniques, the stubs 206 providing such a short may behave as a reactive impedance, thereby changing the impedance of the transmission line 120 without impeding communication. Thus, the stubs 206 may be selectively utilized to achieve desired impedances for different portions of the transmission line 120 around the transition 122 and improve impedance matching between the different portions. The stub 206 may be included in any desired metal layer of the transmission line 120, and the dimensions of the transmission line 120 (including the dimensions of the stub 206 and associated features) may be selected to achieve high signal integrity and wide transmission bandwidth within the operating frequency range of interest.

[0087] 43 and 44 illustrate an exemplary microelectronic substrate 104 including a transmission line 120 having multiple stubs 206. In particular, FIG. 43 is a cross-sectional view of the microelectronic support 104 with metal layers labeled K, K+1, K+2, K+3, and K+4, while FIGS. 44A through 44E are plan views of the metal layers within the microelectronic support 104. The transmission line 120 of FIGS. 43 and 44 includes a single vertical portion 126 (and thus includes two transitions 122) coupled between two horizontal portions 124. The horizontal portion 124 includes a trace 202, and the vertical portion 126 includes a via 198 and a via pad 200. A shielding structure 194 surrounds the transmission line 120 and is grounded during operation. The shielding structure 194 includes a metal plane 204 and a via 198.

[0088] As shown in Figures 43 and 44E, metal layer K may include traces 202, via pads 200, stubs 206 contacting via pads 200, and metal surfaces 204 of shield structures 194. While different shading is used for transmission lines 120 and shield structures 194 in various of the accompanying drawings, this is merely to improve understanding of the drawings; the materials of transmission lines 120 and shield structures 194 may be the same. The components of transmission lines 120 and shield structures 194 included in a single metal layer are fabricated together. The traces 202 and via pads 200 of metal layer K (Figure 44E) may be separated from the metal surfaces 204 by an intervening dielectric material 182. The area of ​​dielectric material 182 between trace 202 and the nearest portion of metal plane 204 may be referred to as anti-trace 226, while the area of ​​dielectric material 182 between via pad 200 and the nearest portion of metal plane 204 may be referred to as anti-pad 224. Anti-pad 224 may have a substantially circular footprint (or may have a footprint having substantially another shape, such as a polygonal shape), but may include an anti-pad extension 208 into which stub 206 extends. Dimensions of trace 202, anti-trace 226, via pad 200, anti-pad 224, stub 206, and anti-pad extension 208 may be selected to achieve desired impedances of different portions of transmission line 120. In some embodiments, anti-pad 224 may include anti-pad extension 208 without including an extending stub 206 therein.

[0089] 43 and 44D, metal layer K+1 may include a via pad 200 spaced from metal surface 204 by dielectric material 182 in antipad 224. A via 198 may couple via pad 200 in metal layer K+1 to via pad 200 in metal layer K (FIG. 44E).

[0090] 43 and 44C, metal layer K+2 may include a via pad 200, a stub 206 in contact with the via pad 200, and a metal surface 204 of a shield structure 194. Similar to FIG. 44E, the via pad 200 of metal layer K+2 may be spaced from the metal surface 204 by an intervening dielectric material 182 in an antipad 224 having a substantially circular footprint. The antipad 224 may include an antipad extension 208 into which the stub 206 extends. A via 198 may couple the via pad 200 in metal layer K+2 to the via pad 200 in metal layer K+1 (FIG. 44D).

[0091] As shown in FIGS. 43 and 44B, metal layer K+3 may include a via pad 200, a stub 206 in contact with the via pad 200, and a metal surface 204 of a shield structure 194. Similar to FIGS. 44E and 44C, the via pad 200 of metal layer K+2 may be spaced from the metal surface 204 by an intervening dielectric material 182 in an antipad 224 having a substantially circular footprint. The antipad 224 may include an antipad extension 208 into which the stub 206 extends. The stub 206 of metal layer K+3 may extend in an opposite direction relative to the stub 206 in metal layers K+2 and K. A via 198 may couple the via pad 200 in metal layer K+3 to the via pad 200 in metal layer K+2 (FIG. 44C).

[0092] 43 and 44A, metal layer K+4 may include traces 202 and via pads 200, as well as metal plane 204 of shield structure 194. Traces 202 and via pads 200 of metal layer K+4 may be spaced from metal plane 204 by intervening dielectric material 182 in anti-traces 226 and anti-pads 224, respectively. Vias 198 may couple via pads 200 in metal layer K+4 to via pads 200 in metal layer K+3 ( FIG. 44B ).

[0093] 45 and 46 illustrate an exemplary microelectronic substrate 104 including a transmission line 120 having multiple stubs 206. In particular, FIG. 45 is a cross-sectional view of the microelectronic support 104 with metal layers labeled K, K+1, K+2, K+3, and K+4, while FIGS. 46A-46E are plan views of the metal layers within the microelectronic support 104. The transmission line 120 of FIGS. 45 and 46 includes a single vertical portion 126 (and therefore includes two transitions 122) coupled between two horizontal portions 124. The horizontal portion 124 includes a trace 202, and the vertical portion 126 includes a via 198 and a via pad 200. A shielding structure 194 surrounds the transmission line 120 and is grounded during operation. The shielding structure 194 includes a metal plane 204 and a via 198.

[0094] As shown in Figures 45 and 46E, metal layer K may have the same structure as metal layer K in the embodiment of Figures 43 and 44E. As shown in Figures 45 and 46D, metal layer K+1 may have the same structure as metal layer K+1 in the embodiment of Figures 43 and 44D. Vias 198 may couple via pads 200 in metal layer K+1 to via pads 200 in metal layer K (Figure 46E).

[0095] 45 and 46C, metal layer K+2 may have a structure similar to that of metal layer K+2 of the embodiment of FIGS. 43 and 44C, but may include an additional antipad extension 208 and an associated additional stub 206. Although the stub 206 and antipad extension 208 in FIGS. 45 and 46C are shown as being positioned opposite one another relative to the intervening via pad 200 and antipad 224, two or more stubs 206 (which may have associated antipad extensions 208) on a via pad 200 may be positioned relative to one another in any desired manner. A via 198 may couple the via pad 200 in metal layer K+2 to the via pad 200 in metal layer K+1 (FIG. 46D).

[0096] 45 and 46B, metal layer K+3 may have the same structure as metal layer K+1 of FIGS. 43 and 44D. Vias 198 may couple via pads 200 in metal layer K+3 to via pads 200 in metal layer K+2 (FIG. 46C). As shown in FIGS. 45 and 46A, metal layer K+4 may have the same structure as metal layer K+4 of FIGS. 43 and 44A. Vias 198 may couple via pads 200 in metal layer K+4 to via pads 200 in metal layer K+3 (FIG. 46B).

[0097] 47 and 48 illustrate an exemplary microelectronic substrate 104 including a transmission line 120 having multiple stubs 206. In particular, FIG. 47 is a cross-sectional view of the microelectronic support 104 with metal layers labeled K, K+1, K+2, and K+3, while FIGS. 48A-48D are plan views of the metal layers within the microelectronic support 104. The transmission line 120 of FIGS. 47 and 48 includes a single vertical portion 126 (and thus includes two transitions 122) coupled between two horizontal portions 124. The horizontal portion 124 includes a trace 202, and the vertical portion 126 includes a via 198 and a via pad 200. A shielding structure 194 surrounds the transmission line 120 and is grounded during operation. The shielding structure 194 includes a metal plane 204 and a via 198.

[0098] As shown in Figures 47 and 48D, metal layer K may have the same structure as metal layer K in the embodiment of Figures 43 and 44E. As shown in Figures 47 and 48C, metal layer K+1 may have the same structure as metal layer K+1 in the embodiment of Figures 43 and 44D. Vias 198 may couple via pads 200 in metal layer K+1 to via pads 200 in metal layer K (Figure 48D). As shown in Figures 47 and 48B, metal layer K+2 may have the same structure as metal layer K+3 in the embodiment of Figures 43 and 44B. Vias 198 may couple via pads 200 in metal layer K+2 to via pads 200 in metal layer K+1 (Figure 48C). As shown in Figures 47 and 48A, metal layer K+3 may have the same structure as metal layer K+4 in Figures 43 and 44A. A via 198 may couple a via pad 200 in metal layer K+3 to a via pad 200 in metal layer K+2 (FIG. 48B).

[0099] FIG. 49 shows a specific example of a stub 206 in the metal layer of the microelectronic support 104, with various dimensions labeled. Any of the dimensions described with reference to FIG. 49 may apply to any of the embodiments disclosed herein. In some embodiments, the width 210 of the trace 202 may be between 5 microns and 400 microns. In some embodiments, the spacing 212 between the trace 202 and the adjacent portion of the metal surface 204 may be between 5 microns and 400 microns. In some embodiments, the width 214 of the stub 206 may be between 5 microns and 400 microns. In some embodiments, the dimensions of the stub 206 may be selected based on the wavelength or frequency range of operation. Multiple stubs 206 may resonate at multiple frequencies, and each stub 206 may behave as either an inductive or capacitive element near these resonant frequencies. Increasing the length of the stub 206 may accommodate a decrease in the resonant frequency. In some embodiments, the length of stub 206 can be between 150 microns and 12,000 microns (e.g., between 150 microns and 300 microns, between 300 microns and 1,000 microns, or between 1,000 microns and 12,000 microns). In some embodiments, diameter 216 of via pad 200 can be between 50 microns and 300 microns. In some embodiments, diameter 218 of anti-pad 224 can be between 100 microns and 600 microns. Any other suitable dimensions of the elements disclosed herein can be varied as design parameters.

[0100] In some embodiments, the anti-pad extension 208 may not be associated with a stub 206 in the metal layer; instead, the stub 206 extending from the via pad 200 may contact the metal surface 204 of the shield structure 194 at the edge of the anti-pad 224. An example of such an embodiment including two stubs 206 is shown in FIG. 50. As mentioned above, the dimensions of the trace 202, anti-trace 226, via pad 200, anti-pad 224, stub 206, and anti-pad extension 208 may be selected to achieve desired impedances for different portions of the transmission line 120. FIG. 51 shows an example metal layer in which the stub 206 has a width 220 and is spaced laterally from the metal surface 204 by a distance 222. In some embodiments, the width 220 may be between 5 microns and 400 microns, and the distance 222 may be between 5 microns and 400 microns.

[0101] Although stubs 206 having a substantially rectangular shape and antipads 224 having a substantially circular shape are shown in various of the foregoing figures, traces 202, antitraces 226, via pads 200, antipads 224, stubs 206, and antipad extensions 208 may have any desired shape (e.g., as may be possible through the use of lithographic via techniques). For example, Figure 52 shows a metal layer having a bifurcated stub 206, while Figure 53 shows a metal layer having a substantially square antipad 224.

[0102] Figures 54-56 show additional examples of transmission lines 120 that include stubs 206 for shorting the transmission lines 120 to a grounded shield structure 194. In the embodiments of Figures 54 and 55, the transmission lines 120 are coupled between the microelectronic components 106 and the patch launcher 180. In the embodiment of Figure 56, the transmission lines 120 are coupled between the microelectronic components 106 on opposite sides of the microelectronic support 104.

[0103] Although the foregoing figures show the transmission line 120 as being shorted to the shielding structure 194, in other embodiments, the transmission line 120 may include a stub 206 and / or an anti-pad extension 208, where the stub 206 does not short the transmission line 120 to the shielding structure 194. In such embodiments, the stub 206 may be electrically coupled to the shielding structure 194 to change the impedance of the transmission line 120, but may be spaced apart from the shielding structure 194. An example of such an embodiment is shown in FIG. 57. In embodiments where the stub 206 does not short the transmission line 120 to the shielding structure 194, the size and shape of the gap separating the stub 206 from the shielding structure 194 may be another parameter that can be adjusted to achieve a desired impedance.

[0104] As described above, the size or shape of the trace 202 (and / or anti-trace 226) can be adjusted to achieve a desired impedance around the transition 122. For example, FIGS. 58A and 58B show a metal layer that may be part of the microelectronic support 104 and includes a trace 202 having a narrow portion 202A and a wide portion 202B. In the embodiment of FIG. 58A, the width of the anti-trace 226 adjacent to the trace 202 is constant, while in the embodiment of FIG. 58B, the anti-trace 226 includes a narrow portion 226A and a wide portion 226B. The widths of the narrow and wide portions 202A and 202B of the trace 202, the placement of the one or more narrow portions 202A and the one or more wide portions 202B, and the widths of the narrow and wide portions 226A and 226B of the anti-trace 226 can be adjusted to achieve a desired impedance.

[0105] 59-62 and 64-65 are cross-sectional views of an exemplary microelectronic package 102 that may include a transmission line 120 including portions 202A and 202B with different trace widths, according to various embodiments. In the embodiment of FIG. 59, the trace 202 included in the horizontal portion 124 includes a narrow portion 202A and a wide portion 202B between the transition 122. In the embodiment of FIG. 60, three traces 202 of the transmission line 120 (between the microelectronic component 106 and the patch launcher 180) may include narrow portions 202A and wide portions 202B. In the embodiment of FIG. 61 and 62, two traces 202 of the transmission line 120 (between the microelectronic component 106 and the patch launcher 180) may include narrow portions 202A and wide portions 202B. In the embodiment of FIG. 61, one of the traces 202 includes a narrow portion 202A between the wide portion 202B and the transition 122. In the embodiments of Figures 61 and 62, one of the traces 202 includes a wide portion 202B between two narrow portions 202A. The embodiment of Figure 62 also shows a trace 202 that includes a narrow portion 202A between two wide portions 202B. Such an embodiment is also shown in Figure 63 (which also shows the wide anti-trace portion 226B and narrow anti-trace portion 226A therebetween).

[0106] 64 and 65, two traces 202 of a transmission line 120 (between two microelectronic components 106 on opposite sides of a microelectronic support 104) include a narrow portion 202A and a wide portion 202B. In FIG. 64, one of the traces 202 has a narrow portion 202A between the wide portion 202B and the transition 122, while in FIG. 65, one of the traces 202 has a wide portion 202B between the narrow portion 202A and the transition 122. In some embodiments of a microelectronic support 104 disclosed herein, the wide portion 202B of a trace 202 may be located on the trace at either end of a vertical portion 126 (e.g., near the end of a via stack). In some embodiments, a via pad 200 adjacent to the wide portion 202B of a trace 202 may have an antipad 224 having an antipad extension 208 into which a stub 206 does not extend. Embodiments of transmission line 120 may include any desired combination of narrow portion 202A, wide portion 202B, stubs 206, and / or any of the other features disclosed herein.

[0107] Communication system 100, microelectronic package 102, waveguide cable 118, and / or any of the components disclosed herein may be included in any suitable electronic component. Figures 66 through 70, where appropriate, illustrate various examples of devices that may include communication system 100, microelectronic package 102, waveguide cable 118, and / or any of the components disclosed herein, or that may be included in communication system 100, microelectronic package 102, waveguide cable 118, and / or any of the components disclosed herein.

[0108] FIG. 66 is a plan view of a wafer 1500 and die 1502 that may be included in a microelectronic package 102 (e.g., a microelectronic component 106 or a microelectronic element 196) according to any of the embodiments disclosed herein. The wafer 1500 may be composed of a semiconductor material and may include one or more die 1502 having IC structures formed on the surface of the wafer 1500. Each of the die 1502 may be a repeating unit of a semiconductor product, including any suitable IC. After fabrication of the semiconductor product is complete, the wafer 1500 may undergo a singulation process in which the die 1502 are separated from one another to provide separate "chips" of the semiconductor product. The die 1502 may include one or more transistors (e.g., some of the transistors 1640 in FIG. 67, described below) and / or support circuitry for transferring electrical signals to the transistors and any other IC components. In some embodiments, wafer 1500 or die 1502 may include memory devices (e.g., random access memory (RAM) devices such as static RAM (SRAM) devices, magnetic RAM (MRAM) devices, resistive RAM (RRAM) devices, conductive bridge RAM (CBRAM) devices, etc.), logic devices (e.g., AND gates, OR gates, NAND gates, or NOR gates), or any other suitable circuit elements. Multiple of these devices may be combined on a single die 1502. For example, a memory array formed by multiple memory devices may be formed on the same die 1502 as a processing device (e.g., processing device 1802 of FIG. 70 ) or other logic configured to store information in the memory devices or execute instructions stored in the memory array.

[0109] FIG. 67 is a side cross-sectional view of a microelectronic device 1600 that may be included in the microelectronic package 102 (e.g., the microelectronic component 106 or the microelectronic element 196) according to any of the embodiments disclosed herein. One or more of the microelectronic devices 1600 may be included in one or more dies 1502 ( FIG. 66 ) or other electronic components. The microelectronic devices 1600 may be formed on a substrate 1602 (e.g., the wafer 1500 of FIG. 66 ) or may be included in a die (e.g., the die 1502 of FIG. 66 ). The substrate 1602 may be a semiconductor substrate composed of a semiconductor material system, including, for example, an n-type or p-type material system (or a combination of both). The substrate 1602 may include, for example, a crystalline substrate formed using bulk silicon or a silicon-on-insulator (SOI) substructure. In some embodiments, the substrate 1602 may be formed using alternative materials. Such materials may or may not be combined with silicon, including, but not limited to, germanium, indium antimonide, lead telluride, indium arsenide, indium phosphide, gallium nitride, gallium arsenide, or gallium antimonide. Additional materials classified as II-VI, III-V, or IV may also be used to form the substrate 1602. A few examples of materials from which the substrate 1602 may be formed are described here, but any material that can serve as the foundation for the microelectronic device 1600 may be used. The substrate 1602 may be part of a singulated die (e.g., die 1502 of FIG. 66) or a wafer (e.g., wafer 1500 of FIG. 66).

[0110] The microelectronic device 1600 may include one or more device layers 1604 disposed on a substrate 1602. The device layer 1604 may include features of one or more transistors 1640 (e.g., metal oxide semiconductor field effect transistors (MOSFETs)) formed on the substrate 1602. The device layer 1604 may include, for example, one or more source and / or drain (S / D) regions 1620, a gate 1622 for controlling the flow of current in the transistor 1640 between the S / D regions 1620, and one or more S / D contacts 1624 for transferring electrical signals to / from the S / D regions 1620. The transistor 1640 may include additional features not shown for clarity, such as device isolation regions, gate contacts, etc. The transistor 1640 is not limited to the types and configurations shown in FIG. 67 and may include a variety of other types and configurations, such as, for example, planar transistors, non-planar transistors, or a combination of both. Planar transistors may include bipolar junction transistors (BJTs), heterojunction bipolar transistors (HBTs), or high electron mobility transistors (HEMTs). Non-planar transistors may include FinFET transistors, such as double-gate or tri-gate transistors, and wrap-around or all-around gate transistors, such as nanoribbon and nanowire transistors.

[0111] Each transistor 1640 may include a gate 1622 formed of at least two layers, a gate dielectric, and a gate electrode. The gate dielectric may include one layer or a stack of layers. One or more layers may include silicon oxide, silicon dioxide, silicon carbide, and / or high-k dielectric materials. The high-k dielectric materials may include elements such as hafnium, silicon, oxygen, titanium, tantalum, lanthanum, aluminum, zirconium, barium, strontium, yttrium, lead, scandium, niobium, and zinc. Examples of high-k materials that may be used in the gate dielectric include, but are not limited to, hafnium oxide, hafnium silicon oxide, lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, and lead zinc niobate. In some embodiments, an annealing process may be performed on the gate dielectric to improve the quality of the gate dielectric when high-k materials are used.

[0112] A gate electrode may be formed on the gate dielectric and may include at least one p-type work function metal or n-type work function metal depending on whether the transistor 1640 is to be a p-type metal oxide semiconductor (PMOS) or n-type metal oxide semiconductor (NMOS) transistor. In some implementations, the gate electrode may consist of a stack of two or more metal layers, where one or more metal layers are work function metal layers and at least one metal layer is a fill metal layer. Additional metal layers, such as barrier layers, may be included for other purposes. For PMOS transistors, metals that may be used in the gate electrode include, but are not limited to, ruthenium, palladium, platinum, cobalt, nickel, conductive metal oxides (e.g., ruthenium oxide), and any of the metals described below with reference to NMOS transistors (e.g., for work function tuning). For NMOS transistors, metals that may be used in the gate electrode include, but are not limited to, hafnium, zirconium, titanium, tantalum, aluminum, alloys of these metals, carbides of these metals (e.g., hafnium carbide, zirconium carbide, titanium carbide, tantalum carbide, and aluminum carbide), and any of the metals mentioned above with reference to PMOS transistors (e.g., for work function tuning).

[0113] In some embodiments, when viewed as a cross-section of transistor 1640 along the source-channel-drain direction, the gate electrode can comprise a U-shaped structure including a bottom portion substantially parallel to the surface of the substrate and two sidewall portions substantially perpendicular to the top surface of the substrate. In other embodiments, at least one of the metal layers forming the gate electrode can simply be a planar layer that is substantially parallel to the top surface of the substrate and does not include sidewall portions substantially perpendicular to the top surface of the substrate. In other embodiments, the gate electrode can comprise a combination of a U-shaped structure and a planar, non-U-shaped structure. For example, the gate electrode can comprise one or more U-shaped metal layers formed on one or more planar, non-U-shaped layers.

[0114] In some embodiments, a pair of sidewall spacers may be formed on opposing sides of the gate stack to surround the gate stack. The sidewall spacers may be formed from materials such as silicon nitride, silicon oxide, silicon carbide, carbon-doped silicon nitride, or silicon oxynitride. Processes for forming sidewall spacers are well known in the art and generally include deposition and etching steps. In some embodiments, multiple spacer pairs may be used, for example, two, three, or four pairs of sidewall spacers may be formed on opposing sides of the gate stack.

[0115] The S / D regions 1620 may be formed in the substrate 1602 adjacent to the gate 1622 of each transistor 1640. The S / D regions 1620 may be formed using, for example, an implantation / diffusion process or an etching / deposition process. In the former process, dopants such as boron, aluminum, antimony, phosphorus, or arsenic may be ion-implanted into the substrate 1602 to form the S / D regions 1620. The ion-implantation process may be followed by an annealing process to activate the dopants and diffuse them further into the substrate 1602. In the latter process, the substrate 1602 may first be etched to form recesses at the locations of the S / D regions 1620. An epitaxial deposition process may then be performed to fill the recesses with the material used to fabricate the S / D regions 1620. In some implementations, the S / D regions 1620 may be fabricated using silicon germanium or a silicon alloy such as silicon carbide. In some embodiments, the epitaxially deposited silicon alloy may be doped in situ with dopants such as boron, arsenic, or phosphorus. In some embodiments, the S / D regions 1620 may be formed using one or more alternative semiconductor materials, such as germanium or a III-V material or alloy. In further embodiments, one or more layers of metal and / or metal alloy may be used to form the S / D regions 1620.

[0116] Electrical signals, such as power and / or input / output (I / O) signals, may be transferred to and / or from devices (e.g., transistor 1640) in device layer 1604 through one or more interconnect layers (shown in FIG. 67 as interconnect layers 1606-1610) disposed on device layer 1604. For example, conductive features (e.g., gate 1622 and S / D contacts 1624) in device layer 1604 may be electrically coupled with interconnect structures 1628 in interconnect layers 1606-1610. One or more interconnect layers 1606-1610 may form a metallization stack (also referred to as an "ILD" stack) 1619 of microelectronic device 1600.

[0117] The interconnect structures 1628 may be arranged within the interconnect layers 1606-1610 to transfer electrical signals according to a variety of designs (notably, such arrangements are not limited to the particular configuration of the interconnect structures 1628 shown in Figure 67). Although a particular number of interconnect layers 1606-1610 are shown in Figure 67, embodiments of the present disclosure include microelectronic devices having more or fewer interconnect layers than those shown.

[0118] In some embodiments, the interconnect structures 1628 may include lines 1628a and / or vias 1628b filled with a conductive material, such as a metal. The lines 1628a may be arranged to transfer electrical signals in a plane that is substantially parallel to the surface of the substrate 1602 on which the device layer 1604 is formed. For example, the lines 1628a may transfer electrical signals in a direction into and out of the page from the perspective of FIG. 67. The vias 1628b may be arranged to transfer electrical signals in a plane that is substantially perpendicular to the surface of the substrate 1602 on which the device layer 1604 is formed. In some embodiments, the vias 1628b may electrically couple together the lines 1628a of different interconnect layers 1606-1610.

[0119] 67, the interconnect layers 1606-1610 can include a dielectric material 1626 disposed between interconnect structures 1628. In some embodiments, the dielectric material 1626 disposed between the interconnect structures 1628 in different ones of the interconnect layers 1606-1610 can have different compositions. In other embodiments, the composition of the dielectric material 1626 between different interconnect layers 1606-1610 can be the same.

[0120] A first interconnect layer 1606 may be formed over the device layer 1604. As shown, in some embodiments, the first interconnect layer 1606 may include lines 1628a and / or vias 1628b. The lines 1628a of the first interconnect layer 1606 may be coupled to contacts (e.g., S / D contacts 1624) of the device layer 1604.

[0121] A second interconnect layer 1608 may be formed over the first interconnect layer 1606. In some embodiments, the second interconnect layer 1608 may include vias 1628b for coupling lines 1628a of the second interconnect layer 1608 with lines 1628a of the first interconnect layer 1606. Although the lines 1628a and vias 1628b are structurally depicted as lines within each interconnect layer (e.g., within the second interconnect layer 1608) for clarity, in some embodiments, the lines 1628a and vias 1628b may be structurally and / or materially continuous (e.g., filled simultaneously during a dual damascene process).

[0122] The third interconnect layer 1610 (and additional interconnect layers, if desired) may be formed successively on the second interconnect layer 1608 according to techniques and configurations similar to those described in connection with the second interconnect layer 1608 or the first interconnect layer 1606. In some embodiments, interconnect layers "higher" in the metallization stack 1619 in the microelectronic device 1600 (i.e., farther away from the device layer 1604) may be thicker.

[0123] The microelectronic device 1600 may include a solder resist material 1634 (e.g., polyimide or similar material) and one or more conductive contacts 1636 formed on the interconnect layers 1606-1610. In FIG. 67, the conductive contacts 1636 are shown to take the form of bond pads. The conductive contacts 1636 may be electrically coupled to the interconnect structure 1628 and may be configured to transfer electrical signals of the transistor 1640 to other external devices. For example, solder bonds may be formed on the one or more conductive contacts 1636 to mechanically and / or electrically couple a chip including the microelectronic device 1600 to another component (e.g., a circuit board). The microelectronic device 1600 may include additional or alternative structures for transferring electrical signals from the interconnect layers 1606-1610. For example, the conductive contacts 1636 may include other similar features (e.g., posts) that transfer electrical signals to external components.

[0124] 68 is a side cross-sectional view of an exemplary microelectronic package 1650 that may function as the microelectronic package 102. In some embodiments, the microelectronic package 1650 may be a system-in-package (SiP).

[0125] The package substrate 1652 may be formed of a dielectric material (e.g., ceramic, build-up film, epoxy film with filler particles therein, glass, organic, inorganic, a combination of organic and inorganic, embedded portions formed of different materials, etc.) and may have conductive paths extending through the dielectric material between the face 1672 and the face 1674, or between different locations on the face 1672 and / or between different locations on the face 1674. These conductive paths may take the form of any of the interconnects 1628 described above with reference to FIG. 67 . In some embodiments, the package substrate 1652 may be the microelectronic support 104 or may be included in the microelectronic support 104 according to any of the embodiments disclosed herein.

[0126] The package substrate 1652 may include conductive contacts 1663 that are coupled to conductive paths (not shown) through the package substrate 1652, thereby enabling circuitry within the die 1656 and / or interposer 1657 to be electrically coupled to various of the conductive contacts 1664 (or to other devices (not shown) included in the package substrate 1652).

[0127] The microelectronic package 1650 may include an interposer 1657 coupled to a package substrate 1652 via conductive contacts 1661 of the interposer 1657, first-level interconnects 1665, and conductive contacts 1663 of the package substrate 1652. The first-level interconnects 1665 shown in FIG. 68 are solder bumps, although any suitable first-level interconnects 1665 may be used. In some embodiments, the interposer 1657 may not be included in the microelectronic package 1650; instead, the die 1656 may be directly coupled to the conductive contacts 1663 at the surface 1672 by the first-level interconnects 1665. More generally, one or more die 1656 may be coupled to the package substrate 1652 via any suitable structure (e.g., a silicon bridge, an organic bridge, one or more waveguides, one or more interposers, wire bonds, etc.). In some embodiments, the interposer 1657 may be a microelectronic support 104 or may be included in a microelectronic support 104 according to any of the embodiments disclosed herein.

[0128] The microelectronic package 1650 may include one or more dies 1656 coupled to an interposer 1657 via conductive contacts 1654 of the die 1656, first-level interconnects 1658, and conductive contacts 1660 of the interposer 1657. The conductive contacts 1660 may be coupled to conductive paths (not shown) through the interposer 1657, allowing circuitry within the die 1656 to be electrically coupled to various of the conductive contacts 1661 (or to other devices (not shown) included in the interposer 1657). The first-level interconnects 1658 shown in FIG. 68 are solder bumps, although any suitable first-level interconnects 1658 may be used. As used herein, “conductive contacts” may refer to portions of a conductive material (e.g., a metal) that serve as an interface between different components. The conductive contacts may be recessed into, flush with, or extend away from a surface of a component, and may take any suitable form (e.g., conductive pads or sockets). The die 1656 may take the form of any of the microelectronic components 106 disclosed herein (e.g., may include one or more millimeter-wave communications transceivers).

[0129] In some embodiments, an underfill material 1666 may be disposed between the package substrate 1652 and the interposer 1657 around the first-level interconnect 1665, and a molding compound 1668 may be disposed around the die 1656 and the interposer 1657 and in contact with the package substrate 1652. In some embodiments, the underfill material 1666 may be the same as the molding compound 1668. An exemplary material that may be used for the underfill material 1666 and the molding compound 1668 is an epoxy molding material, if desired. The second-level interconnect 1670 may be coupled to the conductive contacts 1664. The second-level interconnect 1670 shown in FIG. 68 is a solder ball (e.g., for a ball grid array configuration), although any suitable second-level interconnect 1670 (e.g., a pin in a pin grid array configuration or a land in a land grid array configuration) may be used. The second level interconnect 1670 may be used to couple the microelectronic package 1650 to another component, such as a circuit board (e.g., a motherboard), an interposer, or another microelectronic package as known in the art and described below with reference to FIG. 69.

[0130] The die 1656 may take the form of any of the embodiments of die 1502 described herein (e.g., may include any of the embodiments of microelectronic device 1600). In embodiments in which the microelectronic package 1650 includes multiple die 1656, the microelectronic package 1650 may be referred to as a multi-chip package (MCP). The die 1656 may include circuitry for performing any desired function. For example, one or more of the die 1656 may be logic die (e.g., silicon-based die) and one or more of the die 1656 may be memory die (e.g., high-bandwidth memory).

[0131] Although the microelectronic package 1650 shown in FIG. 68 is a flip-chip package, other package architectures can be used. For example, the microelectronic package 1650 can be a ball grid array (BGA) package, such as an embedded wafer-level ball grid array (eWLB) package. In another example, the microelectronic package 1650 can be a wafer-level chip-scale package (WLCSP) or a panel fan-out (FO) package. Although two dies 1656 are shown in the microelectronic package 1650 of FIG. 68, the microelectronic package 1650 can include any desired number of dies 1656. The microelectronic package 1650 can include additional passive components, such as surface-mount resistors, capacitors, and inductors, disposed on either the first side 1672 or the second side 1674 of the package substrate 1652 or on the interposer 1657. The microelectronic package 1650 can include, for example, any of the package connectors 112 disclosed herein. More generally, microelectronic package 1650 may include any other active or passive components known in the art.

[0132] FIG. 69 is a side cross-sectional view of a microelectronic assembly 1700 that may include one or more microelectronic packages 102 according to any of the embodiments disclosed herein. Additionally, although not shown in FIG. 69 , the microelectronic assembly 1700 may include one or more waveguide cables 118 for communicatively coupling different elements of the microelectronic assembly 1700 and / or for communicatively coupling elements of the microelectronic assembly 1700 with external elements. The microelectronic assembly 1700 includes multiple components disposed on a circuit board 1702 (which may be, for example, a motherboard). The microelectronic assembly 1700 includes components disposed on a first side 1740 of the circuit board 1702 and an opposing second side 1742 of the circuit board 1702. Generally, components may be disposed on one or both of the sides 1740 and 1742. Any of the microelectronic packages described below with reference to the microelectronic assembly 1700 may take the form of any of the embodiments of the microelectronic package 1650 described above with reference to FIG. 68 .

[0133] In some embodiments, circuit board 1702 may be a PCB including multiple metal layers separated from one another by layers of dielectric material and interconnected by conductive vias, any one or more of which may be formed with a desired circuit pattern to transfer electrical signals (optionally in conjunction with other metal layers) between components coupled to circuit board 1702. In other embodiments, circuit board 1702 may be a non-PCB substrate.

[0134] The microelectronic assembly 1700 shown in FIG. 69 includes a package-on-interposer structure 1736 coupled to a first surface 1740 of a circuit board 1702 by coupling components 1716. The coupling components 1716 may electrically and mechanically couple the package-on-interposer structure 1736 to the circuit board 1702 and may include solder balls (shown in FIG. 69), male and female portions of a socket, adhesive, underfill material, and / or any other suitable electrical and / or mechanical coupling structure.

[0135] The package-on-interposer structure 1736 may include a microelectronic package 1720 coupled to a package interposer 1704 by a bonding component 1718. The bonding component 1718 may take any suitable form for the application, such as those described above with reference to the bonding component 1716. While a single microelectronic package 1720 is shown in FIG. 69, multiple microelectronic packages may be coupled to the package interposer 1704, and in fact, additional interposers may be coupled to the package interposer 1704. The package interposer 1704 may provide an intervening substrate used to bridge the circuit board 1702 and the microelectronic package 1720. The microelectronic package 1720 may be or include, for example, a die (such as the die 1502 in FIG. 66), a microelectronic device (such as the microelectronic device 1600 in FIG. 67), or any other suitable component. In general, the package interposer 1704 may spread connections to a wider pitch or reroute certain connections to different connections. For example, the package interposer 1704 may couple a microelectronic package 1720 (e.g., a die) to a set of BGA conductive contacts of the mating component 1716 for coupling to the circuit board 1702. In the embodiment shown in FIG. 69, the microelectronic package 1720 and the circuit board 1702 are attached to opposite sides of the package interposer 1704. In other embodiments, the microelectronic package 1720 and the circuit board 1702 may be attached to the same side of the package interposer 1704. In some embodiments, three or more components may be interconnected by the package interposer 1704.

[0136] In some embodiments, the package interposer 1704 may be formed as a PCB including multiple metal layers separated from each other by layers of dielectric material and interconnected by conductive vias. In some embodiments, the package interposer 1704 may be formed from a polymeric material such as epoxy, fiberglass-reinforced epoxy, epoxy with inorganic fillers, ceramic material, or polyimide. In some embodiments, the package interposer 1704 may be formed from alternative rigid or flexible materials. Such materials may include the same materials mentioned above for semiconductor substrates, such as silicon, germanium, and other III-V and IV materials. The package interposer 1704 may include metal lines 1710 and vias 1708, including, but not limited to, through-silicon vias (TSVs) 1706. The package interposer 1704 may further include embedded devices 1714, including both passive and active devices. Such devices may include, but are not limited to, capacitors, decoupling capacitors, resistors, inductors, fuses, diodes, transformers, sensors, electrostatic discharge (ESD) devices, and memory devices. More complex devices such as RF devices, power amplifiers, power management devices, antennas, arrays, sensors, and microelectromechanical systems (MEMS) devices may also be formed on the package interposer 1704. The package-on-interposer structure 1736 may take the form of any package-on-interposer structure known in the art. In some embodiments, the package interposer 1704 may be a microelectronic support 104.

[0137] Microelectronic assembly 1700 may include a microelectronic package 1724 coupled to a first surface 1740 of circuit board 1702 by a coupling component 1722. Coupling component 1722 may take the form of any of the embodiments described above with reference to coupling component 1716, and microelectronic package 1724 may take the form of any of the embodiments described above with reference to microelectronic package 1720.

[0138] 69 includes a package-on-package structure 1734 coupled to a second surface 1742 of a circuit board 1702 by a coupling component 1728. The package-on-package structure 1734 may include a microelectronic package 1726 and a microelectronic package 1732 coupled together by a coupling component 1730 such that the microelectronic package 1726 is disposed between the circuit board 1702 and the microelectronic package 1732. The coupling components 1728 and 1730 may take the form of any of the embodiments of the coupling component 1716 described above, and the microelectronic packages 1726 and 1732 may take the form of any of the embodiments of the microelectronic package 1720 described above. The package-on-package structure 1734 may be configured according to any of the package-on-package structures known in the art.

[0139] FIG. 70 is a block diagram of an exemplary computing device 1800 that may include one or more communication systems 100, microelectronic packages 102, waveguide cables 118, and / or components thereof, according to any of the embodiments disclosed herein. For example, any suitable number of the components of computing device 1800 may include one or more of the microelectronic devices, I-assemblies 1700, microelectronic packages 1650, microelectronic devices 1600, or die 1502 disclosed herein. While numerous components are shown in FIG. 70 as being included in computing device 1800, any one or more of these components may be omitted or duplicated, as appropriate for the application. In some embodiments, some or all of the components included in computing device 1800 may be mounted on one or more motherboards. In some embodiments, some or all of these components are fabricated on a single system-on-chip (SoC) die.

[0140] Additionally, in various embodiments, computing device 1800 may not include one or more of the components shown in FIG. 70, but may include interface circuitry for coupling one or more components. For example, computing device 1800 may not include display device 1806, but may include display device interface circuitry (e.g., connectors and driver circuits) to which display device 1806 may be coupled. In another set of examples, computing device 1800 may not include audio input device 1824 or audio output device 1808, but may include audio input or output device interface circuitry (e.g., connectors and supporting circuits) to which audio input device 1824 or audio output device 1808 may be coupled.

[0141] Computing device 1800 may include a processing device 1802 (e.g., one or more processing devices). As used herein, the terms “processing device” or “processor” may refer to any device or portion of a device that processes electronic data from registers and / or memory and converts the electronic data into other electronic data that can be stored in registers and / or memory. Processing device 1802 may include one or more digital signal processors (DSPs), application-specific integrated circuits (ASICs), central processing units (CPUs), graphics processing units (GPUs), cryptographic processors (dedicated processors that execute cryptographic algorithms in hardware), server processors, or any other suitable processing devices. Computing device 1800 may include memory 1804. Memory 1804 may itself include one or more memory devices, such as volatile memory (e.g., dynamic random access memory (DRAM)), non-volatile memory (e.g., read-only memory (ROM)), flash memory, solid-state memory, and / or a hard drive. In some embodiments, memory 1804 may include memory that shares a die with processing device 1802. This memory may be used as cache memory and may include embedded dynamic random access memory (eDRAM) or spin transfer torque magnetic random access memory (STT-MRAM).

[0142] In some embodiments, computing device 1800 may include a communications chip 1812 (e.g., one or more communications chips). For example, communications chip 1812 may be configured to manage wireless communications for the transfer of data to and from computing device 1800. The term "wireless" and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc. that may communicate data through the use of modulated electromagnetic radiation over a non-solid medium. Although the associated devices may not include wiring in some embodiments, the term does not imply that the associated devices do not include any wiring.

[0143] The communications chip 1812 may implement any of a number of wireless standards or protocols, including, but not limited to, Institute of Electrical and Electronics Engineers (IEEE) standards, including Wi-Fi® (IEEE 802.11 family), the IEEE 802.16 standard (e.g., the IEEE 802.16-2005 amendment), the Long Term Evolution (LTE) project with any amendments, updates, and / or revisions (e.g., the Advanced LTE project, the Ultra Mobile Broadband (UMB) project (also referred to as "3GPP2"), etc.). Broadband Wireless Access (BWA) networks compatible with IEEE 802.16 are commonly referred to as WiMAX® networks. This acronym stands for Worldwide Interoperability for Microwave Access and is a certification mark for products that have passed IEEE 802.16 standard compliance and interoperability testing. The communications chip 1812 may operate according to Global System for Mobile Communications (GSM), General Packet Radio Service (GPRS), Universal Mobile Telecommunications System (UMTS), High Speed ​​Packet Access (HSPA), Evolved HSPA (E-HSPA or LTE network). The communications chip 1812 may operate according to Enhanced Data for GSM Evolution (EDGE), GSM EDGE Radio Access Network (GERAN), Universal Terrestrial Radio Access Network (UTRAN), or Evolved UTRAN (E-UTRAN). The communications chip 1812 may operate according to Code Division Multiple Access (CDMA), Time Division Multiple Access (TDMA), Digital Enhanced Cordless Telecommunications (DECT), Evolution Data Optimized (EV-DO), and their derivatives, as well as any other wireless protocols designated as 3G, 4G, 5G, and beyond. In other embodiments, the communications chip 1812 may operate according to other wireless protocols. The computing device 1800 may include an antenna 1822 for facilitating wireless communication and / or for receiving other wireless communications (such as AM or FM radio transmissions).The communications chip 1812 may include, for example, a millimeter-wave communications transceiver (e.g., as the microelectronic component 106) for supporting millimeter-wave communications (e.g., along a waveguide cable 118 or transmission line 120 through the microelectronic support 104).

[0144] In some embodiments, the communications chip 1812 may manage wired communications, such as electrical, optical, or any other suitable communications protocol (e.g., Ethernet). As noted above, the communications chip 1812 may include multiple communications chips. For example, a first communications chip 1812 may be dedicated to shorter-range wireless communications, such as Wi-Fi or Bluetooth, and a second communications chip 1812 may be dedicated to longer-range wireless communications, such as Global Positioning System (GPS), EDGE, GPRS, CDMA, WiMAX, LTE, EV-DO, or others. In some embodiments, the first communications chip 1812 may be dedicated to wireless communications, and the second communications chip 1812 may be dedicated to wired communications.

[0145] Computing device 1800 may include battery / power circuitry 1814. Battery / power circuitry 1814 may include one or more energy storage devices (e.g., batteries or capacitors) and / or circuitry for coupling components of computing device 1800 to an energy source (e.g., AC line power) separate from computing device 1800.

[0146] Computing device 1800 may include a display device 1806 (or corresponding interface circuitry as described above). Display device 1806 may include any visual indicator, such as a heads-up display, a computer monitor, a projector, a touchscreen display, a liquid crystal display (LCD), a light-emitting diode display, or a flat panel display.

[0147] The computing device 1800 may include an audio output device 1808 (or corresponding interface circuitry as described above). The audio output device 1808 may include any device that generates an audible indicator, such as a speaker, a headset, or earbuds.

[0148] The computing device 1800 may include an audio input device 1824 (or corresponding interface circuitry as described above). The audio input device 1824 may include any device that generates a signal representing sound, such as a microphone, a microphone array, or a digital device (e.g., a device with a Musical Instrument Digital Interface (MIDI) output).

[0149] Computing device 1800 may include a GPS device 1818 (or corresponding interface circuitry as described above), which may communicate with a satellite-based system and receive the location of computing device 1800 in a manner known in the art.

[0150] The computing device 1800 may include another output device(s) 1810 (or corresponding interface circuitry as described above). Examples of other output devices 1810 may include an audio codec, a video codec, a printer, a wired or wireless transmitter for providing information to other devices, or an additional storage device.

[0151] The computing device 1800 may include other input devices 1820 (or corresponding interface circuitry as described above). Examples of other input devices 1820 may include an accelerometer, a gyroscope, a compass, an imaging device, a keyboard, a cursor control device such as a mouse, a stylus, a touchpad, a barcode reader, a quick response (QR) code reader, any sensor, or a radio frequency identification (RFID) reader.

[0152] Computing device 1800 may have any desired form factor, such as a handheld or mobile computing device (e.g., a mobile phone, smartphone, mobile internet device, music player, tablet computer, laptop computer, netbook computer, ultrabook computer, personal digital assistant (PDA), ultra-mobile personal computer, etc.), desktop computing device, server device or other networked computing component, printer, scanner, monitor, set-top box, entertainment control unit, vehicle control unit, digital camera, digital video recorder, or wearable computing device. In some embodiments, computing device 1800 may be any other electronic device that processes data.

[0153] The following paragraphs provide various examples of the embodiments disclosed herein.

[0154] Example A1 is a millimeter-wave dielectric waveguide comprising: a first material, an opening in the first material extending longitudinally along the millimeter-wave dielectric waveguide, the opening including a first cross-section at a first location along the longitudinal direction of the millimeter-wave dielectric waveguide, and the opening including a second cross-section at a second location along the longitudinal direction of the millimeter-wave dielectric waveguide; and a second material, the first cross-section different from the second cross-section, the first location different from the second location, the first material between the second material and the opening, and the second material having a dielectric constant less than the dielectric constant of the first material.

[0155] Example A2 includes the subject matter of Example A1, and further provides that the opening includes a circular cross-section in the first position and the opening includes a circular cross-section in the second position.

[0156] Example A3 includes the subject matter of Example A1, and further specifies that the opening includes a non-circular cross-section at the first location and the opening includes a non-circular cross-section at the second location.

[0157] Example A4 includes the subject matter of any of Examples A1-3, further specifying that the opening includes a third cross section at a third location along the longitudinal direction of the millimeter-wave dielectric waveguide, the third cross section being different from the first cross section, the third cross section being different from the second cross section, the third location being different from the first location, and the third location being different from the second location.

[0158] Example A5 includes the subject matter of Example A4, and further specifies that the third position is between the first position and the second position, and the third cross-sectional area is between the first cross-sectional area and the second cross-sectional area.

[0159] Example A6 includes the subject matter of any of Examples A1 to A5, and further specifies that the millimeter-wave dielectric waveguide comprises a first section having the opening including the first cross-section, a second section having the opening including the second cross-section, and a transition section between the first section and the second section.

[0160] Example A7 includes the subject matter of Example A6, and further specifies that the transition section has a gradual change within the opening from having the first cross-section to having the second cross-section.

[0161] Example A8 includes the subject matter of Example A6, and further provides that the transition section comprises a gap between the first section and the second section.

[0162] Example A9 includes the subject matter of Example A8, and further provides that the gap includes a width that is less than 1 millimeter.

[0163] Example A10 includes the subject matter of Example A6, and further specifies that the transition section has a smoothly varying transition within the opening from having the first cross-section to having the second cross-section.

[0164] Example A11 includes the subject matter of any of Examples A1-5, further specifying that the opening includes a cross-section that varies smoothly along the longitudinal direction of the millimeter-wave dielectric waveguide.

[0165] Example A12 includes the subject matter of any of Examples A1-11, and further specifies that the opening is a first opening, and the millimeter-wave dielectric waveguide further comprises a second opening in the first material extending longitudinally along the millimeter-wave dielectric waveguide.

[0166] Example A13 includes the subject matter of Example A12, and further specifies that the second opening includes a third cross section at the first location along the longitudinal direction of the millimeter-wave dielectric waveguide, the second opening includes a fourth cross section at the second location along the longitudinal direction of the millimeter-wave dielectric waveguide, the third cross section being different from the fourth cross section, and the first location being different from the second location.

[0167] Example A14 includes the subject matter of any of Examples A1-13, and further includes air within the opening.

[0168] Example A15 includes the subject matter of any of Examples A1-14, further including a third material in the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material.

[0169] Example A16 includes the subject matter of any of Examples A1-15, further providing that the first material comprises polytetrafluoroethylene, a fluoropolymer, low density polyethylene, or high density polyethylene.

[0170] Example A17 includes the subject matter of any of Examples A1-16, and further provides that the first material comprises a plastic.

[0171] Example A18 includes the subject matter of Example A17, and further provides that the plastic includes a dielectric constant that is less than 4.

[0172] Example A19 includes the subject matter of any of Examples A1-18, and further provides that the first material comprises a ceramic.

[0173] Example A20 includes the subject matter of Example A19, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0174] Example A21 includes the subject matter of any of Examples A1-20, further providing that the second material comprises a foam.

[0175] Example A22 includes the subject matter of any of Examples A1-21, further providing that the second material has a dielectric constant that is less than 2.

[0176] Example A23 includes the subject matter of any of Examples A1-22, further providing that the first material has an outer diameter less than or equal to 2 millimeters.

[0177] Example A24 includes the subject matter of any of Examples A1-23, and further provides that the opening is one of an array of openings in the first material.

[0178] Example A25 includes the subject matter of any of Examples A1 to A24, further specifying that the first material has a circular cross-section at the first location and the first material has a circular cross-section at the second location.

[0179] Example A26 includes the subject matter of any of Examples A1 to A24, and further specifies that the first material has a non-circular cross-section at the first location and the first material has a non-circular cross-section at the second location.

[0180] Example A27 includes the subject matter of any of Examples A1 to A26, further specifying that the second material has a circular cross-section at the first location and the second material has a circular cross-section at the second location.

[0181] Example A28 includes the subject matter of any of Examples A1 to A26, further specifying that the second material has a non-circular cross-section at the first location and the second material has a non-circular cross-section at the second location.

[0182] Example A29 includes the subject matter of any of Examples A1-28, and further specifies that the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

[0183] Example A30 includes the subject matter of Example A29, and further specifies that the cable includes an encapsulating material around the plurality of millimeter-wave dielectric waveguides.

[0184] Example A31 includes the subject matter of any of Examples A29-30, further including a connector at an end of the millimeter-wave dielectric waveguide.

[0185] Example A32 includes the subject matter of any of Examples A1-28, and further specifies that the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

[0186] Example A33 includes the subject matter of any of Examples A1-32, and further specifies that the millimeter-wave dielectric waveguide has a length that is less than 5 meters.

[0187] Example A34 includes the subject matter of any of Examples A1-33, further including a metal layer, the first material being between the opening and the metal layer.

[0188] Example A35 includes the subject matter of Example A34, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide further comprises a second metal layer, and the first material is between the first metal layer and the second metal layer.

[0189] Example A36 is a millimeter-wave dielectric waveguide comprising a first material, wherein an opening in the first material varies in cross section along a length of the millimeter-wave dielectric waveguide, and a second material between the first material and the opening, the second material having a dielectric constant that is less than the dielectric constant of the first material.

[0190] Example A37 includes the subject matter of Example A36, and further specifies that the opening includes a circular cross-section at a first location along the longitudinal direction of the millimeter-wave dielectric waveguide, and the opening includes a circular cross-section at a second location along the longitudinal direction of the millimeter-wave dielectric waveguide.

[0191] Example A38 includes the subject matter of Example A36, and further specifies that the opening includes a non-circular cross-section at a first location along the length of the millimeter-wave dielectric waveguide, and the opening includes a non-circular cross-section at a second location along the length of the millimeter-wave dielectric waveguide.

[0192] Example A39 includes the subject matter of any of Examples A36 to A38, further specifying that the outer diameter of the millimeter-wave dielectric waveguide is constant along the length of the millimeter-wave dielectric waveguide.

[0193] Example A40 includes the subject matter of any of Examples A36 to A38, further specifying that the outer diameter of the millimeter-wave dielectric waveguide is not constant along the length of the millimeter-wave dielectric waveguide.

[0194] Example A41 includes the subject matter of any of Examples A36 to A40, and further specifies that the millimeter-wave dielectric waveguide comprises a first section having the opening including a first area, a second section having the opening including a second area, and a transition section between the first section and the second section.

[0195] Example A42 includes the subject matter of Example A41, and further specifies that the transition section has a gradual change within the opening from having the first area to having the second area.

[0196] Example A43 includes the subject matter of Example A41, and further provides that the transition section comprises a gap between the first section and the second section.

[0197] Example A44 includes the subject matter of Example A43, and further provides that the gap includes a width that is less than 1 millimeter.

[0198] Example A45 includes the subject matter of Example A41, and further specifies that the transition section has a smoothly varying change within the opening from having the first area to having the second area.

[0199] Example A46 includes the subject matter of any of Examples A36-40, further specifying that the opening includes an area that smoothly varies along the length of the millimeter-wave dielectric waveguide.

[0200] Example A47 includes the subject matter of any of Examples A36 to A46, and further specifies that the opening is a first opening, and the millimeter-wave dielectric waveguide further comprises a second opening in the first material extending longitudinally along the millimeter-wave dielectric waveguide.

[0201] Example A48 includes the subject matter of Example A47, and further specifies that the second opening varies in cross section along the longitudinal direction of the millimeter-wave dielectric waveguide.

[0202] Example A49 includes the subject matter of any of Examples A36 to A48, and further includes air within the opening.

[0203] Example A50 includes the subject matter of any of Examples A36-49, further including a third material in the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material.

[0204] Example A51 includes the subject matter of any of Examples A36 to A50, and further provides that the first material comprises polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0205] Example A52 includes the subject matter of any of Examples A36 to A51, and further specifies that the first material comprises plastic.

[0206] Example A53 includes the subject matter of Example A52, and further provides that the plastic includes a dielectric constant that is less than 4.

[0207] Example A54 includes the subject matter of any of Examples A36 to A53, and further specifies that the first material comprises a ceramic.

[0208] Example A55 includes the subject matter of Example A54, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0209] Example A56 includes the subject matter of any of Examples A36 to A55, and further specifies that the second material comprises a foam.

[0210] Example A57 includes the subject matter of any of Examples A36 to A56, further providing that the second material has a dielectric constant that is less than 2.

[0211] Example A58 includes the subject matter of any of Examples A36-57, and further provides that the first material has an outer diameter less than or equal to 2 millimeters.

[0212] Example A59 includes the subject matter of any of Examples A36-58, and further provides that the opening is one of an array of openings in the first material.

[0213] Example A60 includes the subject matter of any of Examples A36 to A59, and further specifies that the first material has a circular cross-section at the first location and the first material has a circular cross-section at the second location.

[0214] Example A61 includes the subject matter of any of Examples A36 to A59, and further specifies that the first material has a non-circular cross-section at the first location and the first material has a non-circular cross-section at the second location.

[0215] Example A62 includes the subject matter of any of Examples A36 to A61, and further specifies that the second material has a circular cross-section at the first location and the second material has a circular cross-section at the second location.

[0216] Example A63 includes the subject matter of any of Examples A36 to A61, and further specifies that the second material has a non-circular cross-section at the first location and the second material has a non-circular cross-section at the second location.

[0217] Example A64 includes the subject matter of any of Examples A36 to A63, and further specifies that the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

[0218] Example A65 includes the subject matter of Example A64, and further specifies that the cable includes an encapsulating material around the plurality of millimeter-wave dielectric waveguides.

[0219] Example A66 includes the subject matter of any of Examples A64-65, further including a connector at an end of the millimeter-wave dielectric waveguide.

[0220] Example A67 includes the subject matter of any of Examples A36 to A63, and further specifies that the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

[0221] Example A68 includes the subject matter of any of Examples A36 to A67, and further specifies that the millimeter-wave dielectric waveguide has a length that is less than 5 meters.

[0222] Example A69 includes the subject matter of any of Examples A36-68, further including a metal layer, the first material being between the opening and the metal layer.

[0223] Example A70 includes the subject matter of Example A69, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide further comprises a second metal layer, and the first material is between the first metal layer and the second metal layer.

[0224] Example A71 is a millimeter-wave communication system comprising: a first microelectronic component; a second microelectronic component; and a millimeter-wave dielectric waveguide communicatively coupled between the first microelectronic component and the second microelectronic component, the millimeter-wave dielectric waveguide having a first material, an opening in the first material extending longitudinally along the millimeter-wave dielectric waveguide, the opening including a first area at a first location along the longitudinal direction of the millimeter-wave dielectric waveguide, the opening including a second area at a second location along the longitudinal direction of the millimeter-wave dielectric waveguide, the first area being different from the second area, and the first location being different from the second location; and a second material, the first material being between the second material and the opening, the second material having a dielectric constant that is less than the dielectric constant of the first material.

[0225] Example A72 includes the subject matter of Example A71, and further provides that the opening includes a circular cross-section at the first position and the opening includes a circular cross-section at the second position.

[0226] Example A73 includes the subject matter of Example A71, and further specifies that the opening includes a non-circular cross-section at the first location and the opening includes a non-circular cross-section at the second location.

[0227] Example A74 includes the subject matter of any of Examples A71-73, and further specifies that the opening includes a third area at a third location along the longitudinal direction of the millimeter-wave dielectric waveguide, the third area being different from the first area, the third area being different from the second area, the third location being different from the first location, and the third location being different from the second location.

[0228] Example A75 includes the subject matter described in Example A74, and further specifies that the third position is between the first position and the second position, and the third area is between the first area and the second area.

[0229] Example A76 includes the subject matter of any of Examples A71 to A75, and further specifies that the millimeter-wave dielectric waveguide comprises a first section having the opening including the first area, a second section having the opening including the second area, and a transition section between the first section and the second section.

[0230] Example A77 includes the subject matter described in Example A76, and further specifies that the transition section has a gradual change within the opening from having the first area to having the second area.

[0231] Example A78 includes the subject matter of Example A76, and further provides that the transition section comprises a gap between the first section and the second section.

[0232] Example A79 includes the subject matter of Example A78, and further provides that the gap includes a width that is less than 1 millimeter.

[0233] Example A80 includes the subject matter of Example A76, and further specifies that the transition section has a smoothly varying change within the opening from having the first area to having the second area.

[0234] Example A81 includes the subject matter of any of Examples A71-75, further specifying that the opening includes an area that smoothly varies along the length of the millimeter-wave dielectric waveguide.

[0235] Example A82 includes the subject matter of any of Examples A71-81, and further specifies that the opening is a first opening, and the millimeter-wave dielectric waveguide further comprises a second opening in the first material extending longitudinally along the millimeter-wave dielectric waveguide.

[0236] Example A83 includes the subject matter of Example A82, and further specifies that the second opening includes a third area at the first location along the longitudinal direction of the millimeter-wave dielectric waveguide, and the second opening includes a fourth area at the second location along the longitudinal direction of the millimeter-wave dielectric waveguide, the third area being different from the fourth area, and the first location being different from the second location.

[0237] Example A84 includes the subject matter of any of Examples A71-83, and further specifies that the millimeter-wave dielectric waveguide includes air within the opening.

[0238] Example A85 includes the subject matter of any of Examples A71 to A84, and further specifies that the millimeter-wave dielectric waveguide comprises a third material in the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material.

[0239] Example A86 includes the subject matter of any of Examples A71 to A75, and further provides that the first material comprises polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0240] Example A87 includes the subject matter of any of Examples A71 to A86, and further specifies that the first material comprises plastic.

[0241] Example A88 includes the subject matter of Example A87, and further provides that the plastic includes a dielectric constant that is less than 4.

[0242] Example A89 includes the subject matter of any of Examples A71 to A88, and further specifies that the first material comprises a ceramic.

[0243] Example A90 includes the subject matter of Example A89, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0244] Example A91 includes the subject matter of any of Examples A71 to A90, and further provides that the second material comprises a foam.

[0245] Example A92 includes the subject matter of any of Examples A71-91, further specifying that the second material has a dielectric constant that is less than 2.

[0246] Example A93 includes the subject matter of any of Examples A71-92, and further provides that the first material has an outer diameter less than or equal to 2 millimeters.

[0247] Example A94 includes the subject matter of any of Examples A71-93, and further provides that the opening is one of an array of openings in the first material.

[0248] Example A95 includes the subject matter of any of Examples A71 to A94, and further specifies that the first material has a circular cross-section at the first location and the first material has a circular cross-section at the second location.

[0249] Example A96 includes the subject matter of any of Examples A71 to A94, and further specifies that the first material has a non-circular cross-section at the first location and the first material has a non-circular cross-section at the second location.

[0250] Example A97 includes the subject matter of any of Examples A71 to A96, and further specifies that the second material has a circular cross-section at the first location and the second material has a circular cross-section at the second location.

[0251] Example A98 includes the subject matter of any of Examples A71 to A96, and further specifies that the second material has a non-circular cross-section at the first location and the second material has a non-circular cross-section at the second location.

[0252] Example A99 includes the subject matter of any of Examples A71-98, and further specifies that the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

[0253] Example A100 includes the subject matter of Example A99, and further specifies that the cable includes an encapsulating material around the plurality of millimeter-wave dielectric waveguides.

[0254] Example A101 includes the subject matter of any of Examples A99-100, further specifying that the millimeter-wave dielectric waveguide comprises a connector at an end of the millimeter-wave dielectric waveguide.

[0255] Example A102 includes the subject matter of any of Examples A71-A98, and further specifies that the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

[0256] Example A103 includes the subject matter of any of Examples A71-102, and further specifies that the millimeter-wave dielectric waveguide has a length that is less than 5 meters.

[0257] Example A104 includes the subject matter of any of Examples A71-103, and further specifies that the millimeter-wave dielectric waveguide comprises a metal layer, the first material being between the opening and the metal layer.

[0258] Example A105 includes the subject matter of Example A104, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide further comprises a second metal layer, and the first material is between the first metal layer and the second metal layer.

[0259] Example A106 includes the subject matter of any of Examples A71-105, and further specifies that the first microelectronic component comprises a millimeter wave communications transceiver.

[0260] Example A107 includes the subject matter of any of Examples A71-106, and further specifies that the millimeter wave communication system is a server system.

[0261] Example A108 includes the subject matter of any of Examples A71-106, and further specifies that the millimeter wave communication system is a handheld system.

[0262] Example A109 includes the subject matter of any of Examples A71-106, and further specifies that the millimeter wave communication system is a wearable system.

[0263] Example A110 includes the subject matter of any of Examples A71-106, and further specifies that the millimeter wave communication system is a vehicular system.

[0264] Example A111 is a method of manufacturing a millimeter-wave dielectric waveguide, including any of the methods disclosed herein.

[0265] Example B1 comprises a first section having a first material and a first cladding, and a second section having a second material and a second cladding, wherein the first material is a solid material and the second material is a millimeter-wave dielectric waveguide including a longitudinal opening therein.

[0266] Example B2 includes the subject matter described in Example B1, and further provides that the first material and the second material include the same material composition.

[0267] Example B3 includes the subject matter of any of Examples B1-2, and further provides that the first cladding and the second cladding comprise the same material composition.

[0268] Example B4 includes the subject matter of any of Examples B1-3, and further provides that the opening includes a circular cross-section.

[0269] Example B5 includes the subject matter of any of Examples B1-3, further providing that the opening includes a non-circular cross-section.

[0270] Example B6 includes the subject matter of any of Examples B1 to B5, and further includes a third section between the first section and the second section, the third section having a third material and a third cladding, the third material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as the third section approaches the second section.

[0271] Example B7 includes the subject matter of Example B6, and further provides that the diameter of the third material increases as it approaches the second section.

[0272] Example B8 includes the subject matter of any of Examples B6-7, and further specifies that the outer diameter of the third material is equal to the outer diameter of the first material at an end of the third material adjacent to the first material.

[0273] Example B9 includes the subject matter of any of Examples B6 to B8, and further specifies that the outer diameter of the third material is equal to the outer diameter of the second material at an end of the third material adjacent to the second material.

[0274] Example B10 includes the subject matter of any of Examples B6-9, and further specifies that the length of the third section is between 1 millimeter and 50 millimeters.

[0275] Example B11 includes the subject matter of any of Examples B1 to B10, and further provides that the first section further has a coating, the first cladding is between the coating and the first material, and the coating has a loss tangent greater than the loss tangent of the first cladding.

[0276] Example B12 includes the subject matter of Example B11, and further provides that the coating does not extend into the second section.

[0277] Example B13 includes the subject matter of any of Examples B11-12, and further provides that the coating includes a plurality of conductive particles or fibers, or includes a ferrite material.

[0278] Example B14 includes the subject matter of any of Examples B1-13, and further includes air within the opening.

[0279] Example B15 includes the subject matter of any of Examples B1-14, further including a third material in the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material.

[0280] Example B16 includes the subject matter of any of Examples B1 to B15, and further provides that the first material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0281] Example B17 includes the subject matter of any of Examples B1 to B16, and further provides that the first material includes plastic.

[0282] Example B18 includes the subject matter of Example B17, and further provides that the plastic includes a dielectric constant that is less than 4.

[0283] Example B19 includes the subject matter of any of Examples B1 to B18, and further provides that the first material includes a ceramic.

[0284] Example B20 includes the subject matter of Example B19, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0285] Example B21 includes the subject matter of any of Examples B1-20, and further provides that the first cladding includes a foam.

[0286] Example B22 includes the subject matter of any of Examples B1-21, further providing that the first cladding comprises a dielectric constant that is less than 2.

[0287] Example B23 includes the subject matter of any of Examples B1-22, and further provides that the first material includes an outer diameter less than or equal to 2 millimeters.

[0288] Example B24 includes the subject matter of any of Examples B1-23, and further provides that the opening is one of an array of openings in the second material.

[0289] Example B25 includes the subject matter of any of Examples B1-24, further specifying that the outer diameter of the millimeter-wave dielectric waveguide is constant along the length of the millimeter-wave dielectric waveguide.

[0290] Example B26 includes the subject matter of any of Examples B1 to B24, further specifying that the outer diameter of the millimeter-wave dielectric waveguide is not constant along the length of the millimeter-wave dielectric waveguide.

[0291] Example B27 includes the subject matter of any of Examples B1-26, and further provides that the first cladding includes a circular cross-section.

[0292] Example B28 includes the subject matter of any of Examples B1-26, and further provides that the first cladding includes a non-circular cross-section.

[0293] Example B29 includes the subject matter of any of Examples B1-28, and further specifies that the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

[0294] Example B30 includes the subject matter of Example B29, and further specifies that the cable includes an encapsulating material around the plurality of millimeter-wave dielectric waveguides.

[0295] Example B31 includes the subject matter of any of Examples B29-30, further including a connector at an end of the millimeter-wave dielectric waveguide.

[0296] Example B32 includes the subject matter of any of Examples B1-28, and further specifies that the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

[0297] Example B33 includes the subject matter of any of Examples B1-32, further specifying that the millimeter-wave dielectric waveguide has a length that is less than 5 meters.

[0298] Example B34 includes the subject matter of any of Examples B1-33, further including a metal layer, wherein the second material is between the opening and the metal layer.

[0299] Example B35 includes the subject matter of Example B34, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide further comprises a second metal layer, and the first material is between the first metal layer and the second metal layer.

[0300] Example B36 is a millimeter-wave dielectric waveguide comprising a first section having a first material and a first cladding, and a second section having a second material and a second cladding, the first section having a coating outside the first cladding, the coating not extending onto the second section, and the second material including a longitudinal opening therein.

[0301] Example B37 includes the subject matter of Example B36, and further provides that the first material and the second material include the same material composition.

[0302] Example B38 includes the subject matter of any of Examples B36-37, and further provides that the first cladding and the second cladding include the same material composition.

[0303] Example B39 includes the subject matter of any of Examples B36-38, and further provides that the opening includes a circular cross-section.

[0304] Example B40 includes the subject matter of any of Examples B36-38, and further specifies that the opening includes a non-circular cross-section.

[0305] Example B41 includes the subject matter of any of Examples B36 to B40, and further includes a third section between the first section and the second section, the third section having a third material and a third cladding, the third material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as it approaches the second section.

[0306] Example B42 includes the subject matter of Example B41, and further provides that the diameter of the third material increases as it approaches the second section.

[0307] Example B43 includes the subject matter of any of Examples B41-42, and further specifies that the outer diameter of the third material is equal to the outer diameter of the first material at an end of the third material adjacent to the first material.

[0308] Example B44 includes the subject matter of any of Examples B41 to B43, and further specifies that the outer diameter of the third material is equal to the outer diameter of the second material at an end of the third material adjacent to the second material.

[0309] Example B45 includes the subject matter of any of Examples B41 to B44, and further specifies that the length of the third section is between 1 millimeter and 50 millimeters.

[0310] Example B46 includes the subject matter of any of Examples B36-45, further providing that the coating includes a loss tangent greater than the loss tangent of the first cladding.

[0311] Example B47 includes the subject matter of any of Examples B36-46, and further provides that the coating includes a plurality of conductive particles or fibers.

[0312] Example B48 includes the subject matter of any of Examples B36-47, and further specifies that the coating includes a plurality of conductive particles or fibers, or includes a ferrite material.

[0313] Example B49 includes the subject matter of any of Examples B36-48, further including air within the opening.

[0314] Example B50 includes the subject matter of any of Examples B36-49, further including a third material in the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material.

[0315] Example B51 includes the subject matter of any of Examples B36 to B50, and further provides that the first material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0316] Example B52 includes the subject matter of any of Examples B36 to B51, and further provides that the first material includes plastic.

[0317] Example B53 includes the subject matter of any of Examples B36 to B52, further providing that the plastic comprises a dielectric constant that is less than 4.

[0318] Example B54 includes the subject matter of any of Examples B36 to B53, and further specifies that the first material includes a ceramic.

[0319] Example B55 includes the subject matter of Example B54, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0320] Example B56 includes the subject matter of any of Examples B36 to B55, and further provides that the first cladding includes a foam.

[0321] Example B57 includes the subject matter of any of Examples B36-56, further providing that the first cladding comprises a dielectric constant that is less than 2.

[0322] Example B58 includes the subject matter of any of Examples B36-57, and further provides that the first material includes an outer diameter less than or equal to 2 millimeters.

[0323] Example B59 includes the subject matter of any of Examples B36-58, and further specifies that the opening is one of an array of openings in the second material.

[0324] Example B60 includes the subject matter of any of Examples B36 to B59, and further provides that the first material includes a longitudinal opening therein, and the diameter of the opening in the first material is less than the diameter of the opening in the second material.

[0325] Example B61 includes the subject matter of any of Examples B36-59, and further provides that the first material does not include a longitudinal opening therein.

[0326] Example B62 includes the subject matter of any of Examples B36-61, and further provides that the first cladding includes a circular cross-section.

[0327] Example B63 includes the subject matter of any of Examples B36-61, and further provides that the first cladding includes a non-circular cross-section.

[0328] Example B64 includes the subject matter of any of Examples B36-63, and further specifies that the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

[0329] Example B65 includes the subject matter of Example B64, and further specifies that the cable includes an encapsulating material around the plurality of millimeter-wave dielectric waveguides.

[0330] Example B66 includes the subject matter of any of Examples B64-65, further including a connector at an end of the millimeter-wave dielectric waveguide.

[0331] Example B67 includes the subject matter of any of Examples B36 to B63, and further specifies that the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

[0332] Example B68 includes the subject matter of any of Examples B36-67, and further specifies that the millimeter-wave dielectric waveguide has a length that is less than 5 meters.

[0333] Example B69 includes the subject matter of any of Examples B36-68, further including a metal layer, wherein the second material is between the opening and the metal layer.

[0334] Example B70 includes the subject matter of Example B69, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide further comprises a second metal layer, and the first material is between the first metal layer and the second metal layer.

[0335] Example B71 is a millimeter-wave communication system comprising a first microelectronic component, a second microelectronic component, and a millimeter-wave dielectric waveguide communicatively coupled between the first microelectronic component and the second microelectronic component, the millimeter-wave dielectric waveguide having a first section including a first material and a first cladding and a second section including a second material and a second cladding, the first section including an absorptive coating and the second section not including an absorptive coating.

[0336] Example B72 includes the subject matter of Example B71, and further provides that the first material and the second material include the same material composition.

[0337] Example B73 includes the subject matter of any of Examples B71-72, and further provides that the first cladding and the second cladding include the same material composition.

[0338] Example B74 includes the subject matter of any of Examples B71-73, and further provides that the second material includes a longitudinal opening therein, the opening including a circular cross-section.

[0339] Example B75 includes the subject matter of any of Examples B71-73, and further provides that the second material includes a longitudinal opening therein, the opening including a non-circular cross-section.

[0340] Example B76 includes the subject matter of any of Examples B71 to B75, and further includes a third section between the first section and the second section, the third section having a third material and a third cladding, the third material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as it approaches the second section.

[0341] Example B77 includes the subject matter of Example B76, and further provides that the diameter of the third material increases as it approaches the second section.

[0342] Example B78 includes the subject matter of any of Examples B76 to B77, and further specifies that the outer diameter of the third material is equal to the outer diameter of the first material at an end of the third material adjacent to the first material.

[0343] Example B79 includes the subject matter of any of Examples B76 to B78, and further specifies that the outer diameter of the third material is equal to the outer diameter of the second material at an end of the third material that is adjacent to the second material.

[0344] Example B80 includes the subject matter of any of Examples B76-79, and further specifies that the length of the third section is between 1 millimeter and 50 millimeters.

[0345] Example B81 includes the subject matter of any of Examples B71-80, further providing that the absorbing coating includes a loss tangent greater than the loss tangent of the first cladding.

[0346] Example B82 includes the subject matter of Example B81, and further provides that the absorbing coating includes a loss tangent greater than the loss tangent of the second cladding.

[0347] Example B83 includes the subject matter of any of Examples B81-82, and further provides that the absorbing coating includes a plurality of conductive particles or fibers, or includes a ferrite material.

[0348] Example B84 includes the subject matter of any of Examples B71-83, and further specifies that the millimeter-wave dielectric waveguide includes air within the opening.

[0349] Example B85 includes the subject matter of any of Examples B71 to B84, and further specifies that the millimeter-wave dielectric waveguide comprises a third material within the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material.

[0350] Example B86 includes the subject matter of any of Examples B71-75, and further provides that the first material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0351] Example B87 includes the subject matter of any of Examples B71 to B86, and further provides that the first material includes plastic.

[0352] Example B88 includes the subject matter of Example B87, and further provides that the plastic includes a dielectric constant that is less than 4.

[0353] Example B89 includes the subject matter of any of Examples B71-88, and further provides that the first material includes a ceramic.

[0354] Example B90 includes the subject matter of Example B89, and further specifies that the ceramic includes a dielectric constant that is less than 10.

[0355] Example B91 includes the subject matter of any of Examples B71 to B90, and further provides that the first cladding includes a foam.

[0356] Example B92 includes the subject matter of any of Examples B71-91, further providing that the first cladding comprises a dielectric constant that is less than 2.

[0357] Example B93 includes the subject matter of any of Examples B71-92, and further provides that the first material includes a diameter less than or equal to 2 millimeters.

[0358] Example B94 includes the subject matter of any of Examples B71 to B93, and further specifies that the second material includes a longitudinal opening therein, the opening being one of an array of openings in the second material.

[0359] Example B95 includes the subject matter of any of Examples B71 to B94, further specifying that the outer diameter of the millimeter-wave dielectric waveguide is constant along the length of the millimeter-wave dielectric waveguide.

[0360] Example B96 includes the subject matter of any of Examples B71 to B94, further specifying that the outer diameter of the millimeter-wave dielectric waveguide is not constant along the length of the millimeter-wave dielectric waveguide.

[0361] Example B97 includes the subject matter of any of Examples B71-96, and further provides that the first cladding includes a circular cross-section.

[0362] Example B98 includes the subject matter of any of Examples B71-96, and further provides that the first cladding includes a non-circular cross-section.

[0363] Example B99 includes the subject matter of any of Examples B71-98, and further specifies that the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

[0364] Example B100 includes the subject matter of Example B99, and further specifies that the cable includes an encapsulating material around the plurality of millimeter-wave dielectric waveguides.

[0365] Example B101 includes the subject matter of any of Examples B99-100, further specifying that the millimeter-wave dielectric waveguide comprises a connector at an end of the millimeter-wave dielectric waveguide.

[0366] Example B102 includes the subject matter of any of Examples B71-98, and further specifies that the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

[0367] Example B103 includes the subject matter of any of Examples B71-102, and further specifies that the millimeter-wave dielectric waveguide has a length that is less than 5 meters.

[0368] Example B104 includes the subject matter of any of Examples B71-103, and further specifies that the millimeter-wave dielectric waveguide comprises a metal layer, the first material being between the first cladding and the metal layer.

[0369] Example B105 includes the subject matter of any of Examples B71-104, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide further comprises a second metal layer, and the first material is between the first metal layer and the second metal layer.

[0370] Example B106 includes the subject matter of any of Examples B71-105, and further specifies that the first microelectronic component comprises a millimeter wave communications transceiver.

[0371] Example B107 includes the subject matter of any of Examples B71-106, and further specifies that the millimeter wave communication system is a server system.

[0372] Example B108 includes the subject matter of any of Examples B71-106, and further specifies that the millimeter wave communication system is a handheld system.

[0373] Example B109 includes the subject matter of any of Examples B71 to B106, and further specifies that the millimeter wave communication system is a wearable system.

[0374] Example B110 includes the subject matter of any of Examples B71-106, and further specifies that the millimeter wave communication system is a vehicular system.

[0375] Example C1 is a millimeter-wave dielectric waveguide bundle comprising a first dielectric waveguide having a first core material and a first cladding material, and a second dielectric waveguide adjacent to the first dielectric waveguide having a second core material and a second cladding material, wherein at a position along the longitudinal length of the millimeter-wave dielectric waveguide bundle, (1) the first core material comprises a different material composition than the second core material, or (2) the first cladding material comprises a different material composition than the second cladding material.

[0376] Example C2 includes the subject matter of Example C1, and further provides that the first core material includes a different material composition than the second core material.

[0377] Example C3 includes the subject matter of any of Examples C1-2, further providing that the first cladding material comprises a different material composition than the second cladding material.

[0378] Example C4 includes the subject matter of any of Examples C1-3, and further specifies that the first dielectric waveguide has a first longitudinal opening in the first core material, and the second dielectric waveguide has a second longitudinal opening in the second core material.

[0379] Example C5 includes the subject matter of example C4, and further provides that the area of ​​the first longitudinal opening at the location is different from the area of ​​the second longitudinal opening at the location.

[0380] Example C6 includes the subject matter of any of Examples C4-5, and further provides that the material in the first longitudinal opening is different from the material in the second longitudinal opening.

[0381] Example C7 includes the subject matter of Example C6, and further specifies that the material within the first longitudinal opening includes air.

[0382] Example C8 includes the subject matter of any of Examples C1-7, further providing that the first core material and the second core material include different outer diameters at the location.

[0383] Example C9 includes the subject matter of any of Examples C1-7, further providing that the first cladding material and the second cladding material include different outer diameters at the location.

[0384] Example C10 includes the subject matter of any of Examples C1-9, further providing that the first core material and the second core material include different geometries at the location.

[0385] Example C11 includes the subject matter of any of Examples C1-9, further providing that the first cladding material and the second cladding material include different geometries at the location.

[0386] Example C12 includes the subject matter of any of Examples C1 to C11, further including a third dielectric waveguide between the first dielectric waveguide and the second dielectric waveguide, the third dielectric waveguide having the same structure as the first dielectric waveguide.

[0387] Example C13 includes the subject matter of any of Examples C1-12, further providing that the first core material includes polytetrafluoroethylene, a fluoropolymer, low density polyethylene, or high density polyethylene.

[0388] Example C14 includes the subject matter of any of Examples C1-13, and further provides that the first core material includes a plastic.

[0389] Example C15 includes the subject matter of Example C14, and further provides that the plastic includes a dielectric constant that is less than 4.

[0390] Example C16 includes the subject matter of any of Examples C1-15, and further provides that the first core material includes a ceramic.

[0391] Example C17 includes the subject matter of Example C16, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0392] Example C18 includes the subject matter of any of Examples C1-17, and further provides that the first cladding material includes a foam.

[0393] Example C19 includes the subject matter of any of Examples C1-18, further providing that the first cladding material comprises a dielectric constant that is less than 2.

[0394] Example C20 includes the subject matter of any of Examples C1 to C18, and further specifies that the first cladding material has a dielectric constant that is less than the dielectric constant of the first core material, and the second cladding material has a dielectric constant that is less than the dielectric constant of the second core material.

[0395] Example C21 includes the subject matter of any of Examples C1-20, further providing that the first core material includes an outer diameter less than or equal to 2 millimeters.

[0396] Example C22 includes the subject matter of any of Examples C1-21, and further provides that the first core material includes a plurality of openings.

[0397] Example C23 includes the subject matter of any of Examples C1-22, and further specifies that the millimeter-wave dielectric waveguide bundle comprises a one-dimensional array of dielectric waveguides.

[0398] Example C24 includes the subject matter of any of Examples C1-22, and further specifies that the millimeter-wave dielectric waveguide bundle comprises a two-dimensional array of dielectric waveguides.

[0399] Example C25 includes the subject matter of any of Examples C1 to C24, further specifying that the outer diameter of the first dielectric waveguide is constant along the length of the millimeter-wave dielectric waveguide bundle.

[0400] Example C26 includes the subject matter of any of Examples C1 to C24, further specifying that the outer diameter of the first dielectric waveguide is not constant along the length of the millimeter-wave dielectric waveguide bundle.

[0401] Example C27 includes the subject matter of any of Examples C1-26, and further provides that the first cladding material includes a circular cross-section.

[0402] Example C28 includes the subject matter of any of Examples C1-26, and further provides that the first cladding material includes a non-circular cross-section.

[0403] Example C29 includes the subject matter of any of Examples C1-28, further including an envelope surrounding the first dielectric waveguide and the second dielectric waveguide.

[0404] Example C30 includes the subject matter of any of Examples C1-29, further including a connector at an end of the millimeter-wave dielectric waveguide bundle.

[0405] Example C31 includes the subject matter of any of Examples C1-30, and further specifies that the millimeter-wave dielectric waveguide bundle comprises four or more dielectric waveguides.

[0406] Example C32 includes the subject matter of any of Examples C1-28, and further specifies that the millimeter-wave dielectric waveguide bundle is included in a package substrate or an interposer.

[0407] Example C33 includes the subject matter of any of Examples C1-32, further specifying that the millimeter-wave dielectric waveguide bundle has a length that is less than 5 meters.

[0408] Example C34 includes the subject matter of any of Examples C1 to C33, further including a metal layer, wherein the first dielectric waveguide and the second dielectric waveguide are on the same side of the metal layer.

[0409] Example C35 includes the subject matter of Example C34, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide bundle further comprises a second metal layer, and the first dielectric waveguide is between the first metal layer and the second metal layer.

[0410] Example C36 is a millimeter-wave dielectric waveguide bundle comprising a first dielectric waveguide having a first core material and a first cladding material, and a second dielectric waveguide adjacent to the first dielectric waveguide having a second core material and a second cladding material, wherein at a position along the longitudinal length of the millimeter-wave dielectric waveguide bundle, (1) the first core material includes one or more dimensions that are different from the second core material, or (2) the first cladding material includes one or more dimensions that are different from the second cladding material.

[0411] Example C37 includes the subject matter of Example C36, and further provides that the first core material comprises a different material composition than the second core material.

[0412] Example C38 includes the subject matter of any of Examples C36-37, and further provides that the first cladding material comprises a different material composition than the second cladding material.

[0413] Example C39 includes the subject matter of any of Examples C36 to C38, and further specifies that the first dielectric waveguide has a first longitudinal opening in the first core material, and the second dielectric waveguide has a second longitudinal opening in the second core material.

[0414] Example C40 includes the subject matter of example C39, and further provides that an area of ​​the first longitudinal opening at the location is different from an area of ​​the second longitudinal opening at the location.

[0415] Example C41 includes the subject matter of any of Examples C39-40, and further provides that the material in the first longitudinal opening is different from the material in the second longitudinal opening.

[0416] Example C42 includes the subject matter of Example C41, and further specifies that the material within the first longitudinal opening includes air.

[0417] Example C43 includes the subject matter of any of Examples C36-42, further providing that the first core material and the second core material include different outer diameters at the location.

[0418] Example C44 includes the subject matter of any of Examples C36-42, further providing that the first cladding material and the second cladding material include different outer diameters at the location.

[0419] Example C45 includes the subject matter of any of Examples C36-44, and further provides that the first core material and the second core material include different geometries at the location.

[0420] Example C46 includes the subject matter of any of Examples C36-44, and further provides that the first cladding material and the second cladding material include different geometries at the location.

[0421] Example C47 includes the subject matter of any of Examples C36 to C46, ​​further including a third dielectric waveguide, the third dielectric waveguide being between the first dielectric waveguide and the second dielectric waveguide and having the same structure as the first dielectric waveguide.

[0422] Example C48 includes the subject matter of any of Examples C36-47, and further provides that the first core material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0423] Example C49 includes the subject matter of any of Examples C36 to C48, and further provides that the first core material includes a plastic.

[0424] Example C50 includes the subject matter of Example C49, and further provides that the plastic includes a dielectric constant that is less than 4.

[0425] Example C51 includes the subject matter of any of Examples C36 to C50, and further provides that the first core material includes a ceramic.

[0426] Example C52 includes the subject matter of Example C51, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0427] Example C53 includes the subject matter of any of Examples C36-52, and further provides that the first cladding material includes a foam.

[0428] Example C54 includes the subject matter of any of Examples C36-53, further providing that the first cladding material comprises a dielectric constant that is less than 2.

[0429] Example C55 includes the subject matter of any of Examples C36 to C53, and further specifies that the first cladding material has a dielectric constant that is less than the dielectric constant of the first core material, and the second cladding material has a dielectric constant that is less than the dielectric constant of the second core material.

[0430] Example C56 includes the subject matter of any of Examples C36-55, further providing that the first core material includes an outer diameter less than or equal to 2 millimeters.

[0431] Example C57 includes the subject matter of any of Examples C36-56, further providing that the first core material includes a plurality of openings.

[0432] Example C58 includes the subject matter of any of Examples C36-57, and further specifies that the millimeter-wave dielectric waveguide bundle comprises a one-dimensional array of dielectric waveguides.

[0433] Example C59 includes the subject matter of any of Examples C36-57, and further specifies that the millimeter-wave dielectric waveguide bundle comprises a two-dimensional array of dielectric waveguides.

[0434] Example C60 includes the subject matter of any of Examples C36 to C59, further specifying that the outer diameter of the first dielectric waveguide is constant along the length of the millimeter-wave dielectric waveguide bundle.

[0435] Example C61 includes the subject matter of any of Examples C36 to C59, and further specifies that the outer diameter of the first dielectric waveguide is not constant along the longitudinal direction of the millimeter-wave dielectric waveguide bundle.

[0436] Example C62 includes the subject matter of any of Examples C36-61, and further provides that the first cladding material includes a circular cross-section.

[0437] Example C63 includes the subject matter of any of Examples C36-61, and further provides that the first cladding material includes a non-circular cross-section.

[0438] Example C64 includes the subject matter of any of Examples C36-63, further including an envelope surrounding the first dielectric waveguide and the second dielectric waveguide.

[0439] Example C65 includes the subject matter of any of Examples C36 to C64, further including connectors at the ends of the millimeter-wave dielectric waveguide bundle.

[0440] Example C66 includes the subject matter of any of Examples C36-65, and further specifies that the millimeter-wave dielectric waveguide bundle comprises four or more dielectric waveguides.

[0441] Example C67 includes the subject matter of any of Examples C36 to C63, and further specifies that the millimeter-wave dielectric waveguide bundle is included in a package substrate or an interposer.

[0442] Example C68 includes the subject matter of any of Examples C36-67, further specifying that the millimeter-wave dielectric waveguide bundle has a length that is less than 5 meters.

[0443] Example C69 includes the subject matter of any of Examples C36 to C68, further including a metal layer, wherein the first dielectric waveguide and the second dielectric waveguide are on the same side of the metal layer.

[0444] Example C70 includes the subject matter of Example C69, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide bundle further comprises a second metal layer, and the first dielectric waveguide is between the first metal layer and the second metal layer.

[0445] Example C71 is a millimeter-wave communication system comprising a first microelectronic component, a second microelectronic component, and a millimeter-wave dielectric waveguide bundle communicatively coupled between the first microelectronic component and the second microelectronic component, the millimeter-wave dielectric waveguide bundle having a first dielectric waveguide including a first core material and a first cladding material, and a second dielectric waveguide adjacent to the first dielectric waveguide having a second core material and a second cladding material, and at a position along a longitudinal length of the millimeter-wave dielectric waveguide bundle, the first dielectric waveguide includes a different material arrangement than the second dielectric waveguide.

[0446] Example C72 includes the subject matter of Example C71, and further provides that the first core material includes a different material composition than the second core material.

[0447] Example C73 includes the subject matter of any of Examples C71-72, further providing that the first cladding material comprises a different material composition than the second cladding material.

[0448] Example C74 includes the subject matter of any of Examples C71 to C73, and further specifies that the first dielectric waveguide has a first longitudinal opening in the first core material, and the second dielectric waveguide has a second longitudinal opening in the second core material.

[0449] Example C75 includes the subject matter of example C74, and further provides that an area of ​​the first longitudinal opening at the location is different from an area of ​​the second longitudinal opening at the location.

[0450] Example C76 includes the subject matter of any of Examples C74-75, and further provides that the material in the first longitudinal opening is different from the material in the second longitudinal opening.

[0451] Example C77 includes the subject matter of Example C76, and further provides that the material within the first longitudinal opening includes air.

[0452] Example C78 includes the subject matter of any of Examples C71-77, further providing that the first core material and the second core material include different outer diameters at the location.

[0453] Example C79 includes the subject matter of any of Examples C71-77, further providing that the first cladding material and the second cladding material include different outer diameters at the location.

[0454] Example C80 includes the subject matter of any of Examples C71-79, further providing that the first core material and the second core material include different geometries at the location.

[0455] Example C81 includes the subject matter of any of Examples C71-79, further providing that the first cladding material and the second cladding material include different geometries at the location.

[0456] Example C82 includes the subject matter of any of Examples C71 to C81, further including a third dielectric waveguide between the first dielectric waveguide and the second dielectric waveguide, the third dielectric waveguide having the same structure as the first dielectric waveguide.

[0457] Example C83 includes the subject matter of any of Examples C71-82, and further provides that the first core material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0458] Example C84 includes the subject matter of any of Examples C71-83, and further provides that the first core material includes a plastic.

[0459] Example C85 includes the subject matter of Example C84, and further provides that the plastic includes a dielectric constant that is less than 4.

[0460] Example C86 includes the subject matter of any of Examples C71-85, and further provides that the first core material includes a ceramic.

[0461] Example C87 includes the subject matter of Example C86, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0462] Example C88 includes the subject matter of any of Examples C71-87, and further provides that the first cladding material includes a foam.

[0463] Example C89 includes the subject matter of any of Examples C71-88, further providing that the first cladding material comprises a dielectric constant that is less than 2.

[0464] Example C90 includes the subject matter of any of Examples C71 to C88, further specifying that the first cladding material has a dielectric constant that is less than the dielectric constant of the first core material, and the second cladding material has a dielectric constant that is less than the dielectric constant of the second core material.

[0465] Example C91 includes the subject matter of any of Examples C71-90, and further provides that the first core material includes an outer diameter less than or equal to 2 millimeters.

[0466] Example C92 includes the subject matter of any of Examples C71-91, and further provides that the first core material includes a plurality of openings.

[0467] Example C93 includes the subject matter of any of Examples C71-92, and further specifies that the millimeter-wave dielectric waveguide bundle comprises a one-dimensional array of dielectric waveguides.

[0468] Example C94 includes the subject matter of any of Examples C71-92, and further specifies that the millimeter-wave dielectric waveguide bundle comprises a two-dimensional array of dielectric waveguides.

[0469] Example C95 includes the subject matter of any of Examples C71 to C94, further specifying that the outer diameter of the first dielectric waveguide is constant along the length of the millimeter-wave dielectric waveguide bundle.

[0470] Example C96 includes the subject matter of any of Examples C71 to C94, and further specifies that the outer diameter of the first dielectric waveguide is not constant along the longitudinal direction of the millimeter-wave dielectric waveguide bundle.

[0471] Example C97 includes the subject matter of any of Examples C71-96, and further provides that the first cladding material includes a circular cross-section.

[0472] Example C98 includes the subject matter of any of Examples C71-96, and further provides that the first cladding material includes a non-circular cross-section.

[0473] Example C99 includes the subject matter of any of Examples C71-98, further including an envelope surrounding the first dielectric waveguide and the second dielectric waveguide.

[0474] Example C100 includes the subject matter of any of Examples C71-99, further including a connector at an end of the millimeter-wave dielectric waveguide bundle.

[0475] Example C101 includes the subject matter of any of Examples C71-100, and further specifies that the millimeter-wave dielectric waveguide bundle comprises four or more dielectric waveguides.

[0476] Example C102 includes the subject matter of any of Examples C71-98, and further specifies that the millimeter-wave dielectric waveguide bundle is included in a package substrate or an interposer.

[0477] Example C103 includes the subject matter of any of Examples C71-102, further specifying that the millimeter-wave dielectric waveguide bundle has a length that is less than 5 meters.

[0478] Example C104 includes the subject matter of any of Examples C71-103, further including a metal layer, the first dielectric waveguide and the second dielectric waveguide being on the same side of the metal layer.

[0479] Example C105 includes the subject matter of Example C104, and further specifies that the metal layer is a first metal layer, the millimeter-wave dielectric waveguide bundle further comprises a second metal layer, and the first dielectric waveguide is between the first metal layer and the second metal layer.

[0480] Example C106 includes the subject matter of any of Examples C71-105, and further specifies that the first microelectronic component comprises a millimeter wave communications transceiver.

[0481] Example C107 includes the subject matter of any of Examples C71 to C106, and further specifies that the millimeter wave communication system is a server system.

[0482] Example C108 includes the subject matter of any of Examples C71 to C106, and further specifies that the millimeter wave communication system is a handheld system.

[0483] Example C109 includes the subject matter of any of Examples C71 to C106, and further specifies that the millimeter wave communication system is a wearable system.

[0484] Example C110 includes the subject matter of any of Examples C71-106, and further specifies that the millimeter wave communication system is a vehicular system.

[0485] Example C111 is a method of manufacturing a millimeter-wave dielectric waveguide bundle, including any of the methods disclosed herein.

[0486] Example D1 is a millimeter-wave dielectric waveguide connector comprising a first material, a second material at least partially surrounding the first material, the second material having a dielectric constant less than that of the first material, a third material at least partially surrounding the second material, the third material having a loss tangent greater than that of the second material, a first connector interface, where a first end of the first material is exposed at the first connector interface, and a second connector interface, where a second end of the first material is exposed at the second connector interface.

[0487] Example D2 includes the subject matter of Example D1, and further provides that the first connector interface is parallel to the second connector interface.

[0488] Example D3 includes the subject matter of Example D1, and further provides that the first connector interface is not parallel to the second connector interface.

[0489] Example D4 includes the subject matter of Example D1, and further specifies that the first connector interface is perpendicular to the second connector interface.

[0490] Example D5 includes the subject matter of Example D1, and further specifies that the millimeter-wave dielectric waveguide connector is curved.

[0491] Example D6 includes the subject matter of any of Examples D1-5, further including a housing surrounding the first material, the second material, and the third material.

[0492] Example D7 includes the subject matter of example D6, and further provides that the first connector interface is recessed relative to the housing.

[0493] Example D8 includes the subject matter of example D6, and further provides that the housing is recessed relative to the first connector interface.

[0494] Example D9 includes the subject matter of any of Examples D1 to D8, and further specifies that the surface of the first end of the first material is parallel to the surface of the end of the second material at the first connector interface.

[0495] Example D10 includes the subject matter of any of Examples D1 to D8, and further specifies that the surface of the first end of the first material is not parallel to the surface of the end of the second material at the first connector interface.

[0496] Example D11 includes the subject matter of any of Examples D1-10, further providing that the second material is exposed at the first connector interface.

[0497] Example D12 includes the subject matter of any of Examples D1-11, and further provides that the second material is exposed at the second connector interface.

[0498] Example D13 includes the subject matter of any of Examples D1-12, and further provides that the third material is not exposed at the first connector interface.

[0499] Example D14 includes the subject matter of any of Examples D1-13, and further provides that the third material is not exposed at the second connector interface.

[0500] Example D15 includes the subject matter of any of Examples D1-14, and further provides that the second material wraps around the first material.

[0501] Example D16 includes the subject matter of any of Examples D1 to D15, and further provides that the first material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0502] Example D17 includes the subject matter of any of Examples D1 to D16, and further provides that the first material includes plastic.

[0503] Example D18 includes the subject matter of Example D17, and further provides that the plastic includes a dielectric constant that is less than 4.

[0504] Example D19 includes the subject matter of any of Examples D1 to D18, and further provides that the first material includes a ceramic.

[0505] Example D20 includes the subject matter of Example D19, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0506] Example D21 includes the subject matter of any of Examples D1 to D20, and further provides that the second material includes a foam.

[0507] Example D22 includes the subject matter of any of Examples D1-21, further providing that the second material comprises a dielectric constant that is less than 2.

[0508] Example D23 includes the subject matter of any of Examples D1-22, further providing that the second material has an outer diameter that is between 1 millimeter and 5 millimeters.

[0509] Example D24 includes the subject matter of any of Examples D1-23, and further provides that the third material includes a plurality of conductive particles or fibers.

[0510] Example D25 includes the subject matter of any of Examples D1 to D24, and further specifies that the third material includes a ferrite material.

[0511] Example D26 includes the subject matter of any of Examples D1-25, further specifying that the third material has a thickness between 0.1 millimeters and 2 millimeters.

[0512] Example D27 includes the subject matter of any of Examples D1-26, further providing that the diameter of the first material narrows from the first connector interface.

[0513] Example D28 includes the subject matter of any of Examples D1-26, further specifying that the diameter of the first material is constant within the millimeter-wave dielectric waveguide connector.

[0514] Example D29 includes the subject matter of any of Examples D1-28, and further specifies that the length of the first material is between 5 millimeters and 50 millimeters.

[0515] Example D30 includes the subject matter of any of Examples D1-29, and further provides that the second connector interface is coupled to a microelectronic support.

[0516] Example D31 includes the subject matter of Example D30, and further provides that the microelectronic support includes a package substrate or an interposer.

[0517] Example D32 includes the subject matter of any of Examples D1-29, and further specifies that the second connector interface is coupled to a dielectric waveguide cable.

[0518] Example D33 includes the subject matter of any of Examples D1-32, further providing that the first material has a circular outer diameter.

[0519] Example D34 includes the subject matter of any of Examples D1-32, further providing that the first material has a non-circular outer diameter.

[0520] Example D35 includes the subject matter of any of Examples D1 to D34, further providing that the second material has a circular outer diameter.

[0521] Example D36 includes the subject matter of any of Examples D1-34, further providing that the second material has a non-circular outer diameter.

[0522] Example D37 includes the subject matter of any of Examples D1 to D36, and further specifies that the first material, the second material, and the third material are part of a waveguide, and the millimeter-wave dielectric waveguide connector comprises a plurality of waveguides.

[0523] Example D38 includes the subject matter of any of Examples D1 to D37, and further provides that the first end of the first material is recessed relative to the end of the second material at the first connector interface.

[0524] Example D39 includes the subject matter of any of Examples D1 to D37, and further provides that the end of the second material is recessed relative to the first end of the first material at the first connector interface.

[0525] Example D40 includes the subject matter of any of Examples D1 to D37, and further provides that the end of the second material is flush with the first end of the first material at the first connector interface.

[0526] Example D41 is a first connector having a first material, a second material at least partially surrounding the first material, the second material having a dielectric constant that is less than the dielectric constant of the first material, a first connector interface, and a second connector interface opposite the first connector interface; and a second connector mating with the first connector, the second connector having the first material, and a second material at least partially surrounding the first material, the second material having a dielectric constant that is less than the dielectric constant of the first material. the first connector and the second connector contact at a first connector interface of the first connector, the first connector or the second connector having a third material such that the third material at least partially surrounds the second material of the first connector or the second material of the second connector when the first connector and the second connector are mated, and the third material comprises a loss tangent that is greater than the loss tangent of the second material.

[0527] Example D42 includes the subject matter of example D41, and further provides that the first connector interface is parallel to the second connector interface.

[0528] Example D43 includes the subject matter of Example D41, and further provides that the first connector interface is not parallel to the second connector interface.

[0529] Example D44 includes the subject matter of example D41, and further provides that the first connector interface is perpendicular to the second connector interface.

[0530] Example D45 includes the subject matter of Example D41, and further specifies that the millimeter-wave dielectric waveguide connector is curved.

[0531] Example D46 includes the subject matter of any of Examples D41 to D45, and further specifies that the first connector further includes a housing surrounding the first material and the second material.

[0532] Example D47 includes the subject matter of example D46, and further provides that the first connector interface is recessed relative to the housing.

[0533] Example D48 includes the subject matter of example D46, and further provides that the housing is recessed relative to the first connector interface.

[0534] Example D49 includes the subject matter of any of Examples D41 to D48, and further specifies that a surface of the first material of the first connector is parallel to a surface of an end of the second material of the first connector at the first connector interface.

[0535] Example D50 includes the subject matter of any of Examples D41 to D48, and further specifies that the surface of the first material of the first connector is not parallel to the surface of the end of the second material of the first connector at the first connector interface.

[0536] Example D51 includes the subject matter of any of Examples D41-50, further providing that the second material of the first connector is exposed at the first connector interface.

[0537] Example D52 includes the subject matter of any of Examples D41-51, and further provides that the second material of the first connector is exposed at the second connector interface.

[0538] Example D53 includes the subject matter of any of Examples D41 to D52, and further provides that the third material is contained in the first connector and is not exposed at the first connector interface.

[0539] Example D54 includes the subject matter of any of Examples D41 to D53, and further provides that the third material is contained in the first connector and is not exposed to the second connector interface.

[0540] Example D55 includes the subject matter of any of Examples D41-54, and further provides that the second material is wrapped around the first material within the second connector.

[0541] Example D56 includes the subject matter of any of Examples D41 to D55, and further specifies that the first material of the first connector includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0542] Example D57 includes the subject matter of any of Examples D41 to D56, and further provides that the first material of the first connector includes plastic.

[0543] Example D58 includes the subject matter of Example D57, and further provides that the plastic includes a dielectric constant that is less than 4.

[0544] Example D59 includes the subject matter of any of Examples D41 to D58, and further specifies that the first material of the first connector includes ceramic.

[0545] Example D60 includes the subject matter of Example D59, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0546] Example D61 includes the subject matter of any of Examples D41 to D60, and further provides that the second material of the first connector includes foam.

[0547] Example D62 includes the subject matter of any of Examples D41-61, further specifying that the second material of the first connector comprises a dielectric constant that is less than 2.

[0548] Example D63 includes the subject matter of any of Examples D41-62, and further specifies that the second material of the first connector has an outer diameter that is between 1 millimeter and 5 millimeters.

[0549] Example D64 includes the subject matter of any of Examples D41-63, and further provides that the third material includes a plurality of conductive particles or fibers.

[0550] Example D65 includes the subject matter of any of Examples D41 to D64, and further specifies that the third material includes a ferrite material.

[0551] Example D66 includes the subject matter of any of Examples D41 to D65, and further provides that the third material includes a thickness between 0.1 millimeters and 2 millimeters.

[0552] Example D67 includes the subject matter of any of Examples D41 to D66, and further provides that the first connector or the second connector has a tapered portion of the first material.

[0553] Example D68 includes the subject matter of any of Examples D41 to D66, and further provides that the diameter of the first material is constant within the second connector.

[0554] Example D69 includes the subject matter of any of Examples D41 to D68, and further specifies that the length of the first material within the first connector is between 5 millimeters and 50 millimeters.

[0555] Example D70 includes the subject matter of any of Examples D41-69, and further provides that the second connector interface is coupled to a microelectronic support.

[0556] Example D71 includes the subject matter of Example D70, and further provides that the microelectronic support includes a package substrate or an interposer.

[0557] Example D72 includes the subject matter of any of Examples D41 to D69, and further specifies that the second connector interface is coupled to a dielectric waveguide cable.

[0558] Example D73 includes the subject matter of any of Examples D41-72, and further provides that the first material of the first connector includes a circular outer diameter.

[0559] Example D74 includes the subject matter of any of Examples D41-72, and further provides that the first material of the first connector includes a non-circular outer diameter.

[0560] Example D75 includes the subject matter of any of Examples D41 to D74, and further provides that the second material of the first connector includes a circular outer diameter.

[0561] Example D76 includes the subject matter of any of Examples D41-74, and further provides that the second material of the first connector includes a non-circular outer diameter.

[0562] Example D77 includes the subject matter of any of Examples D41 to D76, and further specifies that the first material and the second material of the first connector are part of a waveguide, and the first connector has multiple waveguides.

[0563] Example D78 includes the subject matter of any of Examples D41 to D77, and further provides that the end of the first material of the first connector is recessed relative to the end of the second material of the first connector at the first connector interface.

[0564] Example D79 includes the subject matter of any of Examples D41 to D77, and further provides that the end of the second material of the first connector is recessed relative to the end of the first material of the first connector at the first connector interface.

[0565] Example D80 includes the subject matter of any of Examples D41 to D77, and further provides that an end of the second material of the first connector is flush with an end of the first material of the first connector at the first connector interface.

[0566] Example D81 is a millimeter-wave communications component comprising a microelectronic component and a millimeter-wave dielectric waveguide connector communicatively coupled to the microelectronic component, the millimeter-wave dielectric waveguide connector having a first material, a second material at least partially surrounding the first material, the second material having a dielectric constant less than that of the first material, a third material at least partially surrounding the second material, the third material having a loss tangent greater than that of the second material, a first connector interface, a first end of the first material exposed to the first connector interface, and a second connector interface coupled to the microelectronic component, a second end of the first material exposed to the second connector interface.

[0567] Example D82 includes the subject matter of example D81, and further provides that the first connector interface is parallel to the second connector interface.

[0568] Example D83 includes the subject matter of example D81, and further provides that the first connector interface is not parallel to the second connector interface.

[0569] Example D84 includes the subject matter of example D81, and further provides that the first connector interface is perpendicular to the second connector interface.

[0570] Example D85 includes the subject matter of Example D81, and further specifies that the millimeter-wave dielectric waveguide connector is curved.

[0571] Example D86 includes the subject matter of any of Examples D81 to D85, and further specifies that the millimeter-wave dielectric waveguide connector has a housing surrounding the first material, the second material, and the third material.

[0572] Example D87 includes the subject matter of example D86, and further provides that the first connector interface is recessed relative to the housing.

[0573] Example D88 includes the subject matter of example D86, and further provides that the housing is recessed relative to the first connector interface.

[0574] Example D89 includes the subject matter of any of Examples D81 to D88, and further specifies that a surface of the first end of the first material is parallel to a surface of the end of the second material at the first connector interface.

[0575] Example D90 includes the subject matter of any of Examples D81 to D88, and further specifies that the face of the first end of the first material is not parallel to the face of the end of the second material at the first connector interface.

[0576] Example D91 includes the subject matter of any of Examples D81-90, further providing that the second material is exposed at the first connector interface.

[0577] Example D92 includes the subject matter of any of Examples D81-91, further providing that the second material is exposed at the second connector interface.

[0578] Example D93 includes the subject matter of any of Examples D81-92, and further provides that the third material is not exposed at the first connector interface.

[0579] Example D94 includes the subject matter of any of Examples D81-93, and further provides that the third material is not exposed at the second connector interface.

[0580] Example D95 includes the subject matter of any of Examples D81-94, and further provides that the second material wraps around the first material.

[0581] Example D96 includes the subject matter of any of Examples D81 to D95, and further provides that the first material includes polytetrafluoroethylene, a fluoropolymer, low-density polyethylene, or high-density polyethylene.

[0582] Example D97 includes the subject matter of any of Examples D81 to D96, and further provides that the first material includes plastic.

[0583] Example D98 includes the subject matter of Example D97, and further provides that the plastic includes a dielectric constant that is less than 4.

[0584] Example D99 includes the subject matter of any of Examples D81 to D98, and further provides that the first material includes a ceramic.

[0585] Example D100 includes the subject matter of Example D99, and further specifies that the ceramic includes a dielectric constant that is less than 10.

[0586] Example D101 includes the subject matter of any of Examples D81 to D100, and further provides that the second material includes a foam.

[0587] Example D102 includes the subject matter of any of Examples D81-101, and further provides that the second material comprises a dielectric constant that is less than 2.

[0588] Example D103 includes the subject matter of any of Examples D81-102, further specifying that the second material has an outer diameter that is between 1 millimeter and 5 millimeters.

[0589] Example D104 includes the subject matter of any of Examples D81-103, and further provides that the third material includes a plurality of conductive particles or fibers.

[0590] Example D105 includes the subject matter of any of Examples D81 to D104, and further specifies that the third material includes a ferrite material.

[0591] Example D106 includes the subject matter of any of Examples D81-105, and further specifies that the third material has a thickness between 0.1 millimeters and 2 millimeters.

[0592] Example D107 includes the subject matter of any of Examples D81-106, further providing that the diameter of the first material narrows from the first connector interface.

[0593] Example D108 includes the subject matter of any of Examples D81-106, further specifying that the diameter of the first material is constant within the millimeter-wave dielectric waveguide connector.

[0594] Example D109 includes the subject matter of any of Examples D81-108, and further specifies that the length of the first material is between 5 millimeters and 50 millimeters.

[0595] Example D110 includes the subject matter of any of Examples D81-109, further providing that the second connector interface is coupled to the microelectronic component microelectronic support.

[0596] Example D111 includes the subject matter of Example D110, and further provides that the microelectronic support includes a package substrate or an interposer.

[0597] Example D112 includes the subject matter of any of Examples D81-109, further specifying that the second connector interface is coupled to a dielectric waveguide cable of the microelectronic component.

[0598] Example D113 includes the subject matter of any of Examples D81-112, and further provides that the first material includes a circular outer diameter.

[0599] Example D114 includes the subject matter of any of Examples D81-112, further providing that the first material has a non-circular outer diameter.

[0600] Example D115 includes the subject matter of any of Examples D81 to D114, and further provides that the second material includes a circular outer diameter.

[0601] Example D116 includes the subject matter of any of Examples D81-114, further providing that the second material has a non-circular outer diameter.

[0602] Example D117 includes the subject matter of any of Examples D81 to D116, and further specifies that the first material, the second material, and the third material are part of a waveguide, and the millimeter-wave dielectric waveguide connector has multiple waveguides.

[0603] Example D118 includes the subject matter of any of Examples D81 to D117, and further provides that the first end of the first material is recessed relative to the end of the second material at the first connector interface.

[0604] Example D119 includes the subject matter of any of Examples D81 to D117, and further provides that the end of the second material is recessed relative to the first end of the first material at the first connector interface.

[0605] Example D120 includes the subject matter of any of Examples D81 to D117, and further provides that the end of the second material is flush with the first end of the first material at the first connector interface.

[0606] Example D121 includes the subject matter of any of Examples D81-120, and further provides that the millimeter wave communication component is part of a server system.

[0607] Example D122 includes the subject matter of any of Examples D81-120, and further specifies that the millimeter wave communication component is part of a handheld system.

[0608] Example D123 includes the subject matter of any of Examples D81 to D120, and further provides that the millimeter wave communication component is part of a wearable system.

[0609] Example D124 includes the subject matter of any of Examples D81-120, and further specifies that the millimeter wave communication component is part of a vehicle system.

[0610] Example D125 is a method of manufacturing a millimeter-wave dielectric waveguide connector, including any of the methods disclosed herein.

[0611] Example E1 is a millimeter-wave dielectric waveguide connector comprising a first connector interface, a second connector interface, a dielectric material exposed at the first connector interface and the second connector interface, and a metal structure surrounding the dielectric material, the metal structure having a flared portion at the first connector interface.

[0612] Example E2 includes the subject matter of Example E1, and further specifies that an edge of the dielectric material at the first connector interface is parallel to an edge of the dielectric material at the second connector interface.

[0613] Example E3 includes the subject matter of Example E1, and further specifies that the edge of the dielectric material at the first connector interface is not parallel to the edge of the dielectric material at the second connector interface.

[0614] Example E4 includes the subject matter of any of Examples E1-3, further providing that an end of the dielectric material at the first connector interface is recessed from the flared portion.

[0615] Example E5 includes the subject matter of any of Examples E1-3, and further provides that an end of the dielectric material at the first connector interface extends into the flared portion.

[0616] Example E6 includes the subject matter of Example E1, and further provides that the first connector interface is parallel to the second connector interface.

[0617] Example E7 includes the subject matter of Example E1, and further provides that the first connector interface is not parallel to the second connector interface.

[0618] Example E8 includes the subject matter of Example E1, and further specifies that the first connector interface is perpendicular to the second connector interface.

[0619] Example E9 includes the subject matter of example E1, and further specifies that the millimeter-wave dielectric waveguide connector is curved.

[0620] Example E10 includes the subject matter of any of Examples E1-9, further including a housing surrounding the dielectric material and the metal structure.

[0621] Example E11 includes the subject matter of Example E10, and further provides that the housing comprises plastic.

[0622] Example E12 includes the subject matter of any of Examples E1-11, and further provides that the dielectric material includes polytetrafluoroethylene, a fluoropolymer, low density polyethylene, or high density polyethylene.

[0623] Example E13 includes the subject matter of any of Examples E1-12, and further provides that the dielectric material includes plastic.

[0624] Example E14 includes the subject matter of Example E13, and further provides that the plastic includes a dielectric constant that is less than 4.

[0625] Example E15 includes the subject matter of any of Examples E1-14, and further provides that the dielectric material includes a ceramic.

[0626] Example E16 includes the subject matter of Example E15, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0627] Example E17 includes the subject matter of any of Examples E1-16, further specifying that the length of the dielectric material is between 5 millimeters and 50 millimeters.

[0628] Example E18 includes the subject matter of any of Examples E1-17, and further provides that the second connector interface is coupled to a microelectronic support.

[0629] Example E19 includes the subject matter of example E18, and further provides that the microelectronic support includes a packaging substrate or an interposer.

[0630] Example E20 includes the subject matter of any of Examples E1-17, and further specifies that the second connector interface is coupled to a dielectric waveguide cable.

[0631] Example E21 includes the subject matter of any of Examples E1-20, further providing that the dielectric material includes a circular outer diameter.

[0632] Example E22 includes the subject matter of any of Examples E1-20, further providing that the dielectric material includes a non-circular outer diameter.

[0633] Example E23 includes the subject matter of any of Examples E1 to E22, and further specifies that the dielectric material and the metal structure are part of a waveguide, and the millimeter-wave dielectric waveguide connector comprises a plurality of waveguides.

[0634] Example E24 is a millimeter-wave dielectric waveguide connector composite comprising: a first connector having a first connector interface, a second connector interface opposite the first connector interface, a dielectric material, and a metal structure including a horn portion at the first connector interface; and a second connector mating with the first connector, the second connector having a first material and a second material at least partially surrounding the first material, the second material having a dielectric constant that is less than the dielectric constant of the first material, and the first connector and the second connector mating at the first connector interface of the first connector.

[0635] Example E25 includes the subject matter of example E24, and further provides that an edge of the dielectric material at the first connector interface is parallel to an edge of the dielectric material at the second connector interface.

[0636] Example E26 includes the subject matter of example E24, and further provides that an edge of the dielectric material at the first connector interface is not parallel to an edge of the dielectric material at the second connector interface.

[0637] Example E27 includes the subject matter of any of Examples E24-26, further providing that an end of the dielectric material at the first connector interface is recessed from the horn portion.

[0638] Example E28 includes the subject matter of any of Examples E24-26, further providing that an end of the dielectric material at the first connector interface extends into the horn portion.

[0639] Example E29 includes the subject matter of example E24, and further provides that the first connector interface is parallel to the second connector interface.

[0640] Example E30 includes the subject matter of example E24, and further provides that the first connector interface is not parallel to the second connector interface.

[0641] Example E31 includes the subject matter of example E24, and further provides that the first connector interface is perpendicular to the second connector interface.

[0642] Example E32 includes the subject matter of example E24, and further specifies that the millimeter-wave dielectric waveguide connector is curved.

[0643] Example E33 includes the subject matter of any of Examples E24 to E32, further including a housing surrounding the dielectric material and the metal structure.

[0644] Example E34 includes the subject matter of Example E33, and further provides that the housing comprises plastic.

[0645] Example E35 includes the subject matter of any of Examples E24 to E34, and further provides that the dielectric material includes polytetrafluoroethylene, a fluoropolymer, low density polyethylene, or high density polyethylene.

[0646] Example E36 includes the subject matter of any of Examples E24 to E35, and further provides that the dielectric material includes plastic.

[0647] Example E37 includes the subject matter of Example E36, and further provides that the plastic includes a dielectric constant that is less than 4.

[0648] Example E38 includes the subject matter of any of Examples E24 to E37, and further specifies that the dielectric material includes a ceramic.

[0649] Example E39 includes the subject matter of Example E38, and further provides that the ceramic includes a dielectric constant that is less than 10.

[0650] Example E40 includes the subject matter of any of Examples E24 to E39, further specifying that the length of the dielectric material is between 5 millimeters and 50 millimeters.

[0651] Example E41 includes the subject matter of any of examples E24 to E40, and further provides that the second connector interface is coupled to a microelectronic support.

[0652] Example E42 includes the subject matter of example E41, and further provides that the microelectronic support includes a packaging substrate or an interposer.

[0653] Example E43 includes the subject matter of any of Examples E24 to E40, and further specifies that the second connector interface is coupled to a dielectric waveguide cable.

[0654] Example E44 includes the subject matter of any of Examples E24 to E43, and further provides that the dielectric material includes a circular outer diameter.

[0655] Example E45 includes the subject matter of any of Examples E24 to E43, and further provides that the dielectric material includes a non-circular outer diameter.

[0656] Example E46 includes the subject matter of any of Examples E24 to E45, and further specifies that the dielectric material and the metal structure are part of a waveguide, and the millimeter-wave dielectric waveguide connector comprises a plurality of waveguides.

[0657] Example E47 includes the subject matter of any of Examples E24 to E46, and further provides that the dielectric material and the first material include the same material composition.

[0658] Example E48 includes the subject matter of any of Examples E24 to E47, and further provides that the second material includes a foam.

[0659] Example E49 includes the subject matter of any of Examples E24 to E48, further providing that the second material comprises a dielectric constant that is less than 2.

[0660] Example E50 includes the subject matter of any of Examples E24-49, further providing that the end of the first material is tapered to a smaller diameter.

[0661] Example E51 includes the subject matter of any of Examples E24 to E49, and further provides that the first material includes a diameter.

[0662] Example E52 is a microelectronic support comprising a substrate integrated waveguide, a millimeter-wave dielectric waveguide connector, and a launcher coupled between the substrate integrated waveguide and the millimeter-wave dielectric waveguide connector.

[0663] Example E53 includes the subject matter of example E52, and further specifies that the substrate integrated waveguide has a slot proximate the launcher.

[0664] Example E54 includes the subject matter of any of examples E52-53, and further specifies that the microelectronic support comprises a plurality of substrate-integrated waveguides.

[0665] Example E55 includes the subject matter of example E54, further including a multiplexer coupled between the launcher and the plurality of substrate integrated waveguides.

[0666] Example E56 includes the subject matter of example E55, and further specifies that the multiplexer is an N-plexer and the microelectronic support comprises N substrate-integrated waveguides.

[0667] Example E57 includes the subject matter of any of Examples E52 to E56, and further specifies that the microelectronic support comprises a package substrate coupled to an interposer, and the substrate-integrated waveguide is within the interposer.

[0668] Example E58 includes the subject matter of example E57, and further specifies that the interposer includes silicon or aluminum nitride.

[0669] Example E59 includes the subject matter of any of examples E57-58, further specifying that the millimeter-wave dielectric waveguide connector is coupled to the interposer.

[0670] Example E60 includes the subject matter of any of Examples E57 to E59, and further specifies that a microelectronic component is coupled to the package substrate, and the package substrate includes a transmission line between the interposer and the microelectronic component.

[0671] Example E61 includes the subject matter of any of Examples E57 to E60, and further provides that the package substrate includes an organic dielectric material.

[0672] Example E62 includes the subject matter of any of Examples E52 to E61, and further provides that the launcher includes a patch launcher, a horn launcher, a Vivaldi-type launcher, a dipole-based launcher, or a slot-based launcher.

[0673] Example F1 is a millimeter-wave communication microelectronic support comprising a millimeter-wave communication transmission line having a trace in a metal layer electrically coupled to a via by a via pad in the metal layer, and a ground plane in the metal layer, where one or more metal portions contact the via pad and the ground plane.

[0674] Example F2 includes the subject matter of Example F1 and further specifies that the trace is a portion of a microstrip, stripline, or coplanar waveguide.

[0675] Example F3 includes the subject matter of any of Examples F1-2, further providing that the one or more metal portions include spokes between the via pad and the ground plane.

[0676] Example F4 includes the subject matter of any of Examples F1-3, further providing that the one or more metal portions include a plurality of spokes between the via pad and the ground plane.

[0677] Example F5 includes the subject matter of any of Examples F1-4, further providing that the one or more metal portions include branched spokes between the via pad and the ground plane.

[0678] Example F6 includes the subject matter of any of Examples F1-5, further specifying that the via pad is spaced from the ground plane by an antipad, and the antipad is non-circular.

[0679] Example F7 includes the subject matter of example F6, and further specifies that the antipad includes an extension portion into which a metal portion extends.

[0680] Example F8 includes the subject matter of any of Examples F6-7, and further provides that the antipad includes a plurality of extensions.

[0681] Example F9 includes the subject matter of any of Examples F7-8, and further provides that the extension comprises a length between 150 microns and 12,000 microns.

[0682] Example F10 includes the subject matter of any of Examples F6-9, and further provides that the anti-pad includes a diameter between 100 microns and 600 microns.

[0683] Example F11 includes the subject matter of any of Examples F1-10, further specifying that the via pad is a first via pad, the metal layer is a first metal layer, the one or more metal portions are one or more first metal portions, the transmission line has a second via pad in a second metal layer, and one or more second metal portions contact the second via pad and a second ground plane in the second metal layer.

[0684] Example F12 includes the subject matter of example F11, and further specifies that the one or more second metal portions include spokes between the second via pad and the second ground plane.

[0685] Example F13 includes the subject matter of any of Examples F11-12, and further specifies that the one or more second metal portions include a plurality of spokes between the second via pad and the second ground plane.

[0686] Example F14 includes the subject matter of any of Examples F11-13, and further specifies that the one or more second metal portions include branched spokes between the second via pad and the second ground plane.

[0687] Example F15 includes the subject matter of any of Examples F11-14, further specifying that the second via pad is spaced from the second ground plane by a second antipad, and the second antipad is non-circular.

[0688] Example F16 includes the subject matter of example F15, and further specifies that the second antipad includes an extension into which the second metal portion extends.

[0689] Example F17 includes the subject matter of any of Examples F15-16, and further provides that the second antipad includes a plurality of extensions.

[0690] Example F18 includes the subject matter of any of Examples F11-17, further providing that the first via pad and the second via pad include at least one via therebetween.

[0691] Example F19 includes the subject matter of any of Examples F11-17, and further provides that the first via pad and the second via pad include at least one via therebetween.

[0692] Example F20 includes the subject matter of any of Examples F1-19, further specifying that the trace is a first trace, the transmission line further has a second trace, and the via is between the first trace and the second trace.

[0693] Example F21 includes the subject matter of example F20, and further specifies that the second trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0694] Example F22 includes the subject matter of any of Examples F1-21, further including a launcher structure at the end of the transmission line.

[0695] Example F23 includes the subject matter of any of Examples F1-22, and further specifies that the width of the trace is between 5 microns and 400 microns.

[0696] Example F24 includes the subject matter of any of Examples F1-23, and further specifies that the via pad diameter is between 50 microns and 300 microns.

[0697] Example F25 includes the subject matter of any of Examples F1-24, further providing that the one or more metal portions include metal portions having a length between 150 microns and 12,000 microns.

[0698] Example F26 includes the subject matter of any of Examples F1-25, further providing that the one or more metal portions include metal portions having a width between 5 microns and 400 microns.

[0699] Example F27 includes the subject matter of any of Examples F1-26, and further specifies that the trace is spaced from the ground plane by a distance between 5 microns and 400 microns.

[0700] Example F28 is a microelectronic package comprising a microelectronic support having a millimeter-wave communication transmission line including a trace in a metal layer, the trace electrically coupled to a via by a via pad in the metal layer, and a ground plane in the metal layer, the ground plane having one or more metal portions contacting the via pad and the ground plane; and a microelectronic component coupled to the microelectronic support, the microelectronic component communicatively coupled to the transmission line.

[0701] Example F29 includes the subject matter of example F28, and further specifies that the trace is a portion of a microstrip, a stripline, or a coplanar waveguide.

[0702] Example F30 includes the subject matter of any of Examples F28-29, further specifying that the one or more metal portions include spokes between the via pad and the ground plane.

[0703] Example F31 includes the subject matter of any of Examples F28-30, further specifying that the one or more metal portions include a plurality of spokes between the via pad and the ground plane.

[0704] Example F32 includes the subject matter of any of Examples F28-31, and further specifies that the one or more metal portions include branched spokes between the via pad and the ground plane.

[0705] Example F33 includes the subject matter of any of examples F28-32, further specifying that the via pad is spaced from the ground plane by an antipad, and the antipad is non-circular.

[0706] Example F34 includes the subject matter of example F33, and further specifies that the antipad includes an extension portion into which a metal portion extends.

[0707] Example F35 includes the subject matter of any of Examples F33-34, and further provides that the antipad includes a plurality of extensions.

[0708] Example F36 includes the subject matter of any of Examples F34-35, and further provides that the extension comprises a length between 150 microns and 12000 microns.

[0709] Example F37 includes the subject matter of any of Examples F34 to F36, and further provides that the antipad includes a diameter between 100 microns and 600 microns.

[0710] Example F38 includes the subject matter of any of Examples F28-37, further specifying that the via pad is a first via pad, the metal layer is a first metal layer, the one or more metal portions are one or more first metal portions, the transmission line has a second via pad in a second metal layer, and one or more second metal portions contact the second via pad and a second ground plane in the second metal layer.

[0711] Example F39 includes the subject matter of example F38, and further specifies that the one or more second metal portions include spokes between the second via pad and the second ground plane.

[0712] Example F40 includes the subject matter of any of Examples F38 to 39, and further specifies that the one or more second metal portions include a plurality of spokes between the second via pad and the second ground plane.

[0713] Example F41 includes the subject matter of any of Examples F38 to F40, and further specifies that the one or more second metal portions include branched spokes between the second via pad and the second ground plane.

[0714] Example F42 includes the subject matter of any of Examples F38 to F41, and further specifies that the second via pad is spaced from the second ground plane by a second antipad, and that the second antipad is non-circular.

[0715] Example F43 includes the subject matter of example F42, and further specifies that the second antipad includes an extension into which the second metal portion extends.

[0716] Example F44 includes the subject matter of any of Examples F42-43, and further provides that the second anti-pad includes a plurality of extensions.

[0717] Example F45 includes the subject matter of any of Examples F38-44, and further provides that the first via pad and the second via pad include at least one via therebetween.

[0718] Example F46 includes the subject matter of any of Examples F38-44, and further provides that the first via pad and the second via pad include at least one via therebetween.

[0719] Example F47 includes the subject matter of any of Examples F28 to F46, and further specifies that the trace is a first trace, the transmission line further has a second trace, and the via is between the first trace and the second trace.

[0720] Example F48 includes the subject matter of example F47, and further specifies that the second trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0721] Example F49 includes the subject matter of any of Examples F28-48, and further specifies that the microelectronic support further comprises a launcher structure at the end of the transmission line.

[0722] Example F50 includes the subject matter of any of examples F28-49, and further specifies that the microelectronic component comprises a millimeter-wave dielectric waveguide connector.

[0723] Example F51 includes the subject matter of any of examples F28-50, and further specifies that the microelectronic component comprises a millimeter wave communications transceiver.

[0724] Example F52 includes the subject matter of any of Examples F28-51, and further specifies that the width of the trace is between 5 microns and 400 microns.

[0725] Example F53 includes the subject matter of any of Examples F28 to F52, and further specifies that the via pad diameter is between 50 microns and 300 microns.

[0726] Example F54 includes the subject matter of any of Examples F28-53, and further specifies that the one or more metal portions include metal portions having a length between 150 microns and 12,000 microns.

[0727] Example F55 includes the subject matter of any of Examples F28-54, and further provides that the one or more metal portions include metal portions having a width between 5 microns and 400 microns.

[0728] Example F56 includes the subject matter of any of Examples F28-55, and further specifies that the trace is spaced from the ground plane by a distance between 5 microns and 400 microns.

[0729] Example F57 is a microelectronic package comprising a microelectronic support having a millimeter-wave communication transmission line including a trace in a metal layer, the trace conductively coupled to a via by a via pad in the metal layer, and a ground plane in the metal layer, the ground plane having one or more metal portions electrically coupling the via pad to the ground plane; and a microelectronic component coupled to the microelectronic support, the microelectronic component communicatively coupled to the transmission line.

[0730] Example F58 includes the subject matter of example F57, and further specifies that the trace is a portion of a microstrip, a stripline, or a coplanar waveguide.

[0731] Example F59 includes the subject matter of any of Examples F57-58, further specifying that the one or more metal portions include spokes between the via pad and the ground plane.

[0732] Example F60 includes the subject matter of any of Examples F57-59, further specifying that the one or more metal portions include a plurality of spokes between the via pad and the ground plane.

[0733] Example F61 includes the subject matter of any of Examples F57-60, further specifying that the one or more metal portions include branched spokes between the via pad and the ground plane.

[0734] Example F62 includes the subject matter of any of examples F57-61, further specifying that the via pad is spaced from the ground plane by an antipad, and the antipad is non-circular.

[0735] Example F63 includes the subject matter of example F62, and further provides that the antipad includes an extension portion into which a metal portion extends.

[0736] Example F64 includes the subject matter of any of Examples F62-63, and further provides that the antipad includes a plurality of extensions.

[0737] Example F65 includes the subject matter of any of Examples F63-64, and further provides that the extension comprises a length between 150 microns and 12000 microns.

[0738] Example F66 includes the subject matter of any of Examples F62 to F65, and further provides that the antipad includes a diameter between 100 microns and 600 microns.

[0739] Example F67 includes the subject matter of any of Examples F57 to F66, and further specifies that the via pad is a first via pad, the metal layer is a first metal layer, the one or more metal portions are one or more first metal portions, the transmission line has a second via pad in a second metal layer, and one or more second metal portions electrically couple the second via pad to a second ground plane in the second metal layer.

[0740] Example F68 includes the subject matter of example F67, and further specifies that the one or more second metal portions include spokes between the second via pad and the second ground plane.

[0741] Example F69 includes the subject matter of any of Examples F67 to F68, and further specifies that the one or more second metal portions include a plurality of spokes between the second via pad and the second ground plane.

[0742] Example F70 includes the subject matter of any of Examples F67 to 69, and further specifies that the one or more second metal portions include branched spokes between the second via pad and the second ground plane.

[0743] Example F71 includes the subject matter of any of Examples F67 to F70, and further specifies that the second via pad is spaced from the second ground plane by a second antipad, and that the second antipad is non-circular.

[0744] Example F72 includes the subject matter of example F71, and further provides that the second antipad includes an extension into which the second metal portion extends.

[0745] Example F73 includes the subject matter of any of Examples F71-72, and further provides that the second antipad includes a plurality of extensions.

[0746] Example F74 includes the subject matter of any of Examples F67-73, and further provides that the first via pad and the second via pad include at least one via therebetween.

[0747] Example F75 includes the subject matter of any of Examples F67-73, and further provides that the first via pad and the second via pad include at least one via therebetween.

[0748] Example F76 includes the subject matter of any of Examples F57 to F75, and further specifies that the trace is a first trace, the transmission line further has a second trace, and the via is between the first trace and the second trace.

[0749] Example F77 includes the subject matter of example F76, and further specifies that the second trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0750] Example F78 includes the subject matter of any of Examples F57-77, and further provides that the microelectronic support further comprises a launcher structure at the end of the transmission line.

[0751] Example F79 includes the subject matter of any of Examples F57-78, and further specifies that the microelectronic component comprises a millimeter-wave dielectric waveguide connector.

[0752] Example F80 includes the subject matter of any of Examples F57-79, and further specifies that the microelectronic component comprises a millimeter wave communications transceiver.

[0753] Example F81 includes the subject matter of any of Examples F57 to F80, and further specifies that the width of the trace is between 5 microns and 400 microns.

[0754] Example F82 includes the subject matter of any of Examples F57 to F80, and further specifies that the via pad diameter is between 50 microns and 300 microns.

[0755] Example F83 includes the subject matter of any of Examples F57-82, and further provides that the one or more metal portions include metal portions having a length between 150 microns and 12,000 microns.

[0756] Example F84 includes the subject matter of any of Examples F57-83, and further specifies that the one or more metal portions include metal portions having a width between 5 microns and 400 microns.

[0757] Example F85 includes the subject matter of any of Examples F57-84, and further specifies that the trace is spaced from the ground plane by a distance between 5 microns and 400 microns.

[0758] Example G1 is a millimeter-wave communications microelectronic support comprising a millimeter-wave communications transmission line having a trace in a metal layer, the trace being electrically coupled to a via by a via pad in the metal layer, the trace including a first portion having a first width and a second portion having a second width different from the first width, and a ground plane in the metal layer spaced apart from the trace.

[0759] Example G2 includes the subject matter of Example G1 and further specifies that the trace is a portion of a microstrip, stripline, or coplanar waveguide.

[0760] Example G3 includes the subject matter of any of Examples G1 to G2, and further specifies that the second portion is between the first portion and the via pad, and the second width is greater than the first width.

[0761] Example G4 includes the subject matter of any of Examples G1 to G3, and further specifies that the second portion is between the first portion and the via pad, and the second width is less than the first width.

[0762] Example G5 includes the subject matter of any of Examples G1-4, and further specifies that the via pad is spaced from the ground plane by an anti-pad.

[0763] Example G6 includes the subject matter of any of Examples G1 to G5, and further specifies that the trace is spaced from the ground plane by an anti-trace, the anti-trace including a third portion having a third width and a fourth portion having a fourth width different from the third width, and the via pad is spaced from the ground plane by an anti-pad.

[0764] Example G7 includes the subject matter of Example G6, and further specifies that the fourth portion is between the third portion and the antipad, or the antipad is between the third portion and the fourth portion.

[0765] Example G8 includes the subject matter of any of Examples G6-7, and further provides that the fourth width is greater than the third width.

[0766] Example G9 includes the subject matter of any of Examples G6 to G8, and further specifies that the fourth width is less than the third width.

[0767] Example G10 includes the subject matter of any of Examples G6-9, and further provides that the first portion of the trace is within the third portion of the anti-trace.

[0768] Example G11 includes the subject matter of any of Examples G6-10, and further provides that the second portion of the trace is within the fourth portion of the anti-trace.

[0769] Example G12 includes the subject matter of any of Examples G5-11, and further specifies that the antipad includes an extension to the ground plane.

[0770] Example G13 includes the subject matter of Example G12, and further provides that the extension comprises a length between 150 microns and 12000 microns.

[0771] Example G14 includes the subject matter of any of Examples G5-13, and further specifies that the anti-pad includes a diameter between 100 microns and 600 microns.

[0772] Example G15 includes the subject matter of any of Examples G1 to G14, and further specifies that the trace is a first trace, the transmission line further has a second trace, and the via is between the first trace and the second trace.

[0773] Example G16 includes the subject matter of Example G15, and further specifies that the second trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0774] Example G17 includes the subject matter of any of Examples G15-16, and further specifies that the second trace includes a first portion having a first width and a second portion having a second width different from the first width.

[0775] Example G18 includes the subject matter of any of Examples G1 to G17, further including a launcher structure at the end of the transmission line.

[0776] Example G19 includes the subject matter of any of Examples G1 to G18, and further specifies that the width of the trace is between 5 microns and 400 microns.

[0777] Example G20 includes the subject matter of any of Examples G1-19, and further specifies that the via pad diameter is between 50 microns and 300 microns.

[0778] Example G21 includes the subject matter of any of Examples G1-20, and further specifies that the trace is spaced from the ground plane by a distance between 5 microns and 400 microns.

[0779] Example G22 is a microelectronic package comprising a microelectronic support having a millimeter-wave communication transmission line including a trace in a metal layer, the trace being electrically coupled to a via by a via pad in the metal layer, the trace including a first portion having a first width and a second portion having a second width different from the first width, and a ground plane in the metal layer spaced apart from the trace; and a microelectronic component coupled to the microelectronic support and communicatively coupled to the transmission line.

[0780] Example G23 includes the subject matter of Example G22 and further specifies that the trace is a portion of a microstrip, stripline, or coplanar waveguide.

[0781] Example G24 includes the subject matter of any of Examples G22 to G23, and further specifies that the second portion is between the first portion and the via pad, and the second width is greater than the first width.

[0782] Example G25 includes the subject matter of any of Examples G22 to G24, and further specifies that the second portion is between the first portion and the via pad, and the second width is less than the first width.

[0783] Example G26 includes the subject matter of any of Examples G22 to G25, and further specifies that the via pad is spaced from the ground plane by an anti-pad.

[0784] Example G27 includes the subject matter of any of Examples G22 to G26, and further specifies that the trace is spaced from the ground plane by an anti-trace, the anti-trace including a third portion having a third width and a fourth portion having a fourth width different from the third width, and the via pad is spaced from the ground plane by an anti-pad.

[0785] Example G28 includes the subject matter described in Example G27, and further specifies that the fourth portion is between the third portion and the antipad, or the antipad is between the third portion and the fourth portion.

[0786] Example G29 includes the subject matter of any of Examples G27 to G28, and further specifies that the fourth width is greater than the third width.

[0787] Example G30 includes the subject matter of any of Examples G27 to G29, and further specifies that the fourth width is less than the third width.

[0788] Example G31 includes the subject matter of any of Examples G27-30, and further provides that the first portion of the trace is within the third portion of the anti-trace.

[0789] Example G32 includes the subject matter of any of Examples G27 to G31, and further provides that the second portion of the trace is within the fourth portion of the anti-trace.

[0790] Example G33 includes the subject matter of any of Examples G26 to G32, and further specifies that the antipad includes an extension to the ground plane.

[0791] Example G34 includes the subject matter of Example G33, and further provides that the extension comprises a length between 150 microns and 12000 microns.

[0792] Example G35 includes the subject matter of any of Examples G26 to G34, and further specifies that the anti-pad includes a diameter between 100 microns and 600 microns.

[0793] Example G36 includes the subject matter of any of Examples G22 to G35, and further specifies that the trace is a first trace, the transmission line further has a second trace, and the via is between the first trace and the second trace.

[0794] Example G37 includes the subject matter of Example G36, and further specifies that the second trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0795] Example G38 includes the subject matter of any of Examples G36 to G37, and further specifies that the second trace includes a first portion having a first width and a second portion having a second width different from the first width.

[0796] Example G39 includes the subject matter of any of Examples G22 to G38, and further includes a launcher structure at the end of the transmission line.

[0797] Example G40 includes the subject matter of any of Examples G22 to G39, and further specifies that the width of the trace is between 5 microns and 400 microns.

[0798] Example G41 includes the subject matter of any of Examples G22 to G40, and further specifies that the via pad diameter is between 50 microns and 300 microns.

[0799] Example G42 includes the subject matter of any of Examples G22-41, and further specifies that the trace is spaced from the ground plane by a distance between 5 microns and 400 microns.

[0800] Example G43 includes the subject matter of any of Examples G22 to G42, and further specifies that the microelectronic component includes a millimeter-wave dielectric waveguide connector.

[0801] Example G44 includes the subject matter of any of Examples G22-43, and further specifies that the microelectronic component comprises a millimeter wave communications transceiver.

[0802] Example G45 is a microelectronic package comprising a microelectronic support having a millimeter-wave communication transmission line including a trace in a metal layer, the trace electrically coupled to a via by a via pad in the metal layer, and a ground plane in the metal layer spaced from the trace by an anti-trace and spaced from the via pad by an anti-pad, the anti-trace including a first portion having a first width and a second portion having a second width different from the first width; and a microelectronic component coupled to the microelectronic support and communicatively coupled to the transmission line.

[0803] Example G46 includes the subject matter of Example G45 and further specifies that the trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0804] Example G47 includes the subject matter of any of Examples G45 to G46, and further specifies that the second portion is between the first portion and the antipad, and the second width is greater than the first width.

[0805] Example G48 includes the subject matter of any of Examples G45 to G47, and further specifies that the second portion is between the first portion and the antipad, and the second width is less than the first width.

[0806] Example G49 includes the subject matter of any of Examples G45 to G48, and further specifies that the trace includes a third portion including a third width and a fourth portion including a fourth width different from the third width.

[0807] Example G50 includes the subject matter of Example G49, and further specifies that the fourth portion is between the third portion and the via pad.

[0808] Example G51 includes the subject matter of any of Examples G49 to G50, and further specifies that the fourth width is greater than the third width.

[0809] Example G52 includes the subject matter of any of Examples G49 to G51, and further specifies that the fourth width is less than the third width.

[0810] Example G53 includes the subject matter of any of Examples G49 to G52, and further provides that the third portion of the trace is within the first portion of the anti-trace.

[0811] Example G54 includes the subject matter of any of Examples G49 to G53, and further provides that the fourth portion of the trace is within the second portion of the anti-trace.

[0812] Example G55 includes the subject matter of any of Examples G45 to G54, and further provides that the antipad includes an extension to the ground plane.

[0813] Example G56 includes the subject matter of Example G55, and further provides that the extension comprises a length between 150 microns and 12000 microns.

[0814] Example G57 includes the subject matter of any of Examples G45-56, and further provides that the anti-pad includes a diameter between 100 microns and 600 microns.

[0815] Example G58 includes the subject matter of any of Examples G45 to 57, and further specifies that the trace is a first trace, the transmission line further has a second trace, and the via is between the first trace and the second trace.

[0816] Example G59 includes the subject matter of Example G58, and further specifies that the second trace is a microstrip, a stripline, or a portion of a coplanar waveguide.

[0817] Example G60 includes the subject matter of any of Examples G58-59, and further specifies that the second trace is within a second anti-trace of the ground plane, the second anti-trace including a first portion including a first width and a second portion including a second width different from the first width.

[0818] Example G61 includes the subject matter of any of Examples G45 to G60, and further includes a launcher structure at the end of the transmission line.

[0819] Example G62 includes the subject matter of any of Examples G45 to G61, and further specifies that the width of the trace is between 5 microns and 400 microns.

[0820] Example G63 includes the subject matter of any of Examples G45 to G62, and further specifies that the via pad diameter is between 50 microns and 300 microns.

[0821] Example G64 includes the subject matter of any of Examples G45-63, and further specifies that the trace is spaced from the ground plane by a distance between 5 microns and 400 microns.

[0822] Example G65 includes the subject matter of any of Examples G45 to G64, and further specifies that the microelectronic component includes a millimeter-wave dielectric waveguide connector.

[0823] Example G66 includes the subject matter of any of Examples G45 to G65, and further specifies that the microelectronic component comprises a millimeter wave communications transceiver. [Other possible items] [Item 1] a first section having a first material and a first cladding; a second section having a second material and a second cladding; Equipped with the first material is a solid material and the second material includes a longitudinal opening therein; Millimeter-wave dielectric waveguide. [Item 2] Item 2. The millimeter-wave dielectric waveguide of item 1, wherein the first material and the second material comprise the same material composition. [Item 3] Item 2. The millimeter-wave dielectric waveguide of item 1, wherein the first cladding and the second cladding comprise the same material composition. [Item 4] a third section between the first section and the second section, the third section having a third material and a third cladding, the third material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as it approaches the second section; Item 1. The millimeter-wave dielectric waveguide of item 1, further comprising: [Item 5] 5. The millimeter-wave dielectric waveguide of claim 4, wherein the diameter of the third material increases as it approaches the second section. [Item 6] 2. The millimeter-wave dielectric waveguide of claim 1, wherein the first section further has a coating, the first cladding being between the coating and the first material, and the coating having a loss tangent greater than the loss tangent of the first cladding. [Item 7] 7. The millimeter-wave dielectric waveguide of claim 6, wherein the coating does not extend into the second section. [Item 8] 7. The millimeter-wave dielectric waveguide of item 6, wherein the coating comprises a plurality of conductive particles or fibers, or comprises a ferrite material. [Item 9] a first section having a first material and a first cladding; a second section having a second material and a second cladding; Equipped with the first section has an outer coating of the first cladding, the coating not extending onto the second section, the second material including a longitudinal opening therein; Millimeter-wave dielectric waveguide. [Item 10] 10. The millimeter-wave dielectric waveguide of claim 9, wherein the coating comprises a loss tangent greater than the loss tangent of the first cladding. [Item 11] Item 10. The millimeter-wave dielectric waveguide of item 9, further comprising air in the opening. [Item 12] a third material in the opening, the third material having a dielectric constant that is less than the dielectric constant of the first material; Item 10. The millimeter-wave dielectric waveguide of item 9, further comprising: [Item 13] 10. The millimeter-wave dielectric waveguide of claim 9, wherein the first material comprises a plastic. [Item 14] 10. The millimeter-wave dielectric waveguide of claim 9, wherein the first material comprises a ceramic. [Item 15] 10. The millimeter-wave dielectric waveguide of claim 9, wherein the first cladding comprises a foam. [Item 16] a first microelectronic component; a second microelectronic component; and a millimeter-wave dielectric waveguide communicatively coupled between the first microelectronic component and the second microelectronic component; Equipped with The millimeter-wave dielectric waveguide is a first section including a first material and a first cladding; a second section including a second material and a second cladding; and the first section includes an absorbent coating and the second section does not include an absorbent coating; Millimeter wave communication systems. [Item 17] Item 17. The millimeter-wave communication system according to item 16, wherein the outer diameter of the millimeter-wave dielectric waveguide is not constant along the longitudinal direction of the millimeter-wave dielectric waveguide. [Item 18] Item 17. A millimeter wave communication system according to item 16, wherein the millimeter wave dielectric waveguide is one of a plurality of millimeter wave dielectric waveguides in a cable. [Item 19] Item 17. The millimeter-wave communication system according to item 16, wherein the millimeter-wave dielectric waveguide is included in a package substrate or an interposer. [Item 20] Item 17. The millimeter wave communication system according to item 16, wherein the first microelectronic component comprises a millimeter wave communication transceiver.

Claims

1. a first section having a first core material and a first cladding; a second section having a second core material and a second cladding; a third section between the first section and the second section, the third section having a third core material and a third cladding, the third core material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as it approaches the second section; and Equipped with the first core material is a solid material and the second core material includes a longitudinal opening therein; the first cladding is wrapped around the first core material; the second cladding is wrapped around the second core material; the third cladding is wrapped around the third core material; Millimeter-wave dielectric waveguide.

2. 10. The millimeter-wave dielectric waveguide of claim 1, wherein the first core material and the second core material comprise the same material composition.

3. The millimeter-wave dielectric waveguide of claim 1 , wherein the first cladding and the second cladding comprise the same material composition.

4. A first section having a first material and a first cladding; a second section having a second material and a second cladding; a third section between the first section and the second section, the third section having a third material and a third cladding, the third material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as it approaches the second section; and Equipped with the first material is a solid material and the second material includes a longitudinal opening therein; A millimeter-wave dielectric waveguide, wherein the diameter of the third material increases as the diameter approaches the second section.

5. A first section having a first material and a first cladding; a second section having a second material and a second cladding; a third section between the first section and the second section, the third section having a third material and a third cladding, the third material including a longitudinal opening therein, the diameter of the longitudinal opening increasing as it approaches the second section; and Equipped with the first material is a solid material and the second material includes a longitudinal opening therein; 1. A millimeter-wave dielectric waveguide, wherein the first section further comprises a coating, the first cladding being between the coating and the first material, the coating comprising a loss tangent greater than the loss tangent of the first cladding.

6. 6. The millimeter-wave dielectric waveguide of claim 5, wherein the coating does not extend into the second section.

7. 6. The millimeter-wave dielectric waveguide of claim 5, wherein the coating comprises a plurality of conductive particles or fibers, or comprises a ferrite material.

8. a first section having a first material and a first cladding; a second section having a second material and a second cladding; Equipped with the first section has an outer coating of the first cladding, the coating not extending onto the second section, and the second material including a longitudinal opening therein; Millimeter-wave dielectric waveguide.

9. 9. The millimeter-wave dielectric waveguide of claim 8, wherein the coating comprises a loss tangent greater than the loss tangent of the first cladding.

10. 9. The millimeter-wave dielectric waveguide of claim 8, further comprising air within said longitudinal opening.

11. a third material within the longitudinal opening, the third material having a dielectric constant that is less than the dielectric constant of the first material; 9. The millimeter-wave dielectric waveguide of claim 8, further comprising:

12. 12. A millimeter-wave dielectric waveguide according to any one of claims 8 to 11, wherein the first material comprises a plastic.

13. 12. A millimeter-wave dielectric waveguide according to any one of claims 8 to 11, wherein the first material comprises a ceramic.

14. 12. The millimeter-wave dielectric waveguide of claim 8, wherein the first cladding comprises a foam.

15. a first microelectronic component; a second microelectronic component; and a millimeter-wave dielectric waveguide communicatively coupled between the first microelectronic component and the second microelectronic component; Equipped with The millimeter-wave dielectric waveguide is a first section including a first material and a first cladding; a second section including a second material and a second cladding; and the first section includes an absorbent coating and the second section does not include an absorbent coating; an outer diameter of the millimeter-wave dielectric waveguide is not constant along the longitudinal direction of the millimeter-wave dielectric waveguide; Millimeter wave communication systems.

16. 16. The millimeter-wave communication system of claim 15, wherein the millimeter-wave dielectric waveguide is one of a plurality of millimeter-wave dielectric waveguides in a cable.

17. The millimeter-wave communication system of claim 15 , wherein the millimeter-wave dielectric waveguide is included in a package substrate or an interposer.

18. 16. The millimeter wave communication system of claim 15, wherein the first microelectronic component comprises a millimeter wave communication transceiver.

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