Optical Height Sensor Integration in Mask Inspection Tools

Abstract

A photomask inspection system includes a vacuum chamber and a stage disposed within the vacuum chamber to support a photomask and translate the photomask horizontally and vertically. The system also includes an EUV objective disposed within the vacuum chamber to collect EUV light from the photomask and inspect the photomask for defects, and an optical height sensor disposed at least partially within the vacuum chamber to measure a height above a surface of the photomask. The system further includes a stage controller that translates the stage horizontally and vertically according to a focal map associated with the photomask that is created using the measured height above the surface of the photomask.

Description

[Technical Field]

[0001] TECHNICAL FIELD This disclosure relates to the inspection of photomasks (or reticles), and more particularly to the integration of optical height sensors for focal mapping in photomask inspection tools. [Background technology]

[0002] [Related Applications] This application claims priority to U.S. Provisional Patent Application No. 63 / 128,183, filed December 21, 2020, which is incorporated by reference in its entirety for all purposes.

[0003] Controlling the focal length between the photomask and imaging optics in photomask inspection is important for defect sensitivity and repeatability. Focal length control is particularly important for the inspection of extreme ultraviolet (EUV) photomasks. For example, different defects can have different through-focus behavior, making focus control crucial for optimal and consistent defect detection in reticle inspection tools.

[0004] To control for focus variations, the photomask's features are mapped prior to inspection. This process, called focal mapping, creates a focal map that provides the focal length control the trajectory to be followed during inspection. For example, a servo control system can be used to adjust the imaging optics so that the imaging optics follows that trajectory during inspection.

[0005] However, focal mapping of modern (e.g., EUV) photomasks faces significant challenges. Traditional focal mapping processes use candidate locations within the non-patterned areas of the photomask. The small size and high pattern density of pattern features on modern photomasks makes it difficult to find suitable non-patterned candidate locations. Furthermore, three-dimensional electromagnetic effects associated with high pattern density can lead to inaccurate focus offsets measured relative to the patterned areas on the photomask, resulting in inaccurate focal maps and trajectories. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] U.S. Patent Application Publication No. 2004 / 0217287 [Patent Document 2] U.S. Patent Application Publication No. 2014 / 0002826 Summary of the Invention [Problem to be solved by the invention]

[0007] Thus, there is a need for a photomask inspection system that can implement accurate and fast focal mapping techniques. [Means for solving the problem]

[0008] In some embodiments, a photomask inspection system includes a vacuum chamber and a stage disposed within the vacuum chamber to support a photomask and translate the photomask horizontally and vertically. The system also includes an EUV objective disposed within the vacuum chamber to collect EUV light from the photomask and inspect the photomask for defects, and an optical height sensor disposed at least partially within the vacuum chamber to measure the height of the photomask above its surface. The system further includes a stage controller that translates the stage horizontally and vertically in accordance with a focal map associated with the photomask, the focal map being created using the measured heights of the photomask above its surface.

[0009] In some embodiments, a method includes positioning a photomask on a stage within a vacuum chamber, measuring heights of patterned areas on a surface of the photomask using an optical height sensor disposed at least partially within the vacuum chamber, and creating a focal map for the photomask using the measured heights on the surface of the photomask. The method further includes inspecting the photomask for defects using an EUV objective disposed within the vacuum chamber. To inspect the photomask, the stage is translated horizontally and vertically according to the focal map.

[0010] For a better understanding of the various implementations described, please refer to the following drawings in conjunction with the detailed description below. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 illustrates a broadband optical interferometer used to image a photomask to determine the height of individual areas on the surface of the photomask, according to some embodiments. [Figure 2] 1 is a cross-sectional view of a patterned area on the surface of a photomask. [Figure 3]1 is a plan view of a pattern on the surface of a photomask illuminated by a spot of light from a broadband optical interferometer, according to some embodiments. [Figure 4] 1 is a graph showing measured reflectance dispersion curves for a multilayer material and an absorber material on the surface of a photomask. [Figure 5] 1 is a graph illustrating calculated height correction amount versus fill factor curves according to some embodiments. [Figure 6] 1A and 1B show a plan view of a height image of a photomask and a corresponding curve showing the height in the form of a cross-sectional profile of the photomask, as well as a focal map locus associated with the cross-sectional profile, according to some embodiments. [Figure 7] 1 is a graph illustrating average reflectance amplitude versus fill factor curves for various wavelength bands, according to some embodiments. [Figure 8] 1 is a flowchart illustrating a photomask inspection method according to some embodiments. [Figure 9] FIG. 1 is a schematic block diagram of a photomask inspection tool according to some embodiments. [Figure 10A] FIG. 1 is a side view of a photomask inspection tool according to some embodiments. [Figure 10B] FIG. 1 is a perspective view of a photomask inspection tool according to some embodiments. [Figure 11] FIG. 1 is a schematic block diagram of a photomask inspection system having an image processing computer, a height sensor controller, and a stage controller according to some embodiments. [Figure 12] 1 is a flowchart illustrating a photomask inspection method according to some embodiments. [Figure 13] FIG. 1 is a block diagram of a photomask inspection system according to some embodiments. [Figure 14] FIG. 2 is a block diagram of a height sensor controller according to some embodiments. [Figure 15] FIG. 1 is a block diagram of an image processing computer according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0012] Like reference characters refer to corresponding parts throughout the drawings and specification.

[0013] Reference will now be made in detail to various embodiments, examples of which are illustrated in the accompanying drawings. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the various described embodiments. However, those skilled in the art will appreciate that the various described embodiments may practice without these specific details. In other instances, well-known methods, procedures, components, circuits, and networks have not been described in order to avoid unnecessarily obscuring aspects of the embodiments.

[0014] FIG. 1 illustrates a broadband optical interferometer 100 that, according to some embodiments, can be used to image (i.e., generate an interferogram associated with) a photomask 120 and thereby determine the height of individual areas on the surface of the photomask 120. Depending on the patterning and warping of the photomask 120, different areas on the surface of the photomask 120 have different heights. The broadband optical interferometer 100 has a low numerical aperture (NA). In one example, the NA of the broadband optical interferometer 100 is less than 0.15 (e.g., equal to 0.10 or 0.075). The broadband optical interferometer 100 performs Mirau interferometry. Alternatively, another type of broadband optical interferometer, such as a Michelson interferometer, can be used to image the photomask 120.

[0015] The broadband optical interferometer 100 includes a broadband light source 102. The broadband optical interferometer 100 may also be referred to as a white light interferometer (the term "white" in this context simply indicates that the corresponding light has a wavelength band, and does not imply a specific wavelength band). The use of broadband light (i.e., white light) reduces the temporal coherence of the light, making it suitable for fringe cancellation purposes. In some embodiments, the broadband light source 102 provides visible light. In some embodiments, the wavelength band (e.g., color) of the light provided by the broadband light source 102 can be adjusted. For example, the wavelength band can be changed by changing the light-emitting diodes (LEDs) and / or filters within the broadband light source 102. For example, the broadband optical interferometer 100 may include multiple broadband light sources 102, each providing a separate wavelength band that is multiplexed along the optical path.

[0016] Condenser lens 104 focuses the light from broadband light source 102 onto objective 112 (i.e., an interferometer objective), which in the example of FIG. 1 is a Mirau-type objective. A beam splitter 110 is positioned in the optical path between condenser lens 104 and objective 112, thereby reflecting the light from broadband light source 102 onto objective 112. Objective 112 includes, in order, lens 114, mirror 116, and beam splitter 118. Beam splitter 118 illuminates the surface of photomask 120 with a portion of the light from broadband light source 102 while, in cooperation with mirror 116, reflects the other portion of the light from broadband light source 102. This reflected portion serves as a reference beam for broadband optical interferometer 100. Objective 112 collects the light from photomask 120. The collected and reference beams interfere, are collimated by lens 114, and transmitted via beam splitter 110 to tube lens 108, from which they are focused onto camera 106 (eg, a digital camera).

[0017] The image (i.e., interferogram) generated by camera 106 contains interference effects due to interference between the collected light from the photomask and the reference light. These interference effects vary as a function of the height of objective 112 above photomask 120. The height of objective 112 above photomask 120 is adjustable. For example, objective 112 can be placed on a z-scanning stage, which can move objective 112 up and down along the z-axis (i.e., adjust the z-height). The z-height can also be adjusted by moving the photomask below the objective with the z-scanning stage. By capturing multiple images (i.e., interferograms) of photomask 120 with objective 112 at different heights (i.e., z-values) above photomask 120 and comparing the images using interferogram analysis (e.g., known 3-, 4-, or 5-step interferogram-based analysis algorithms), the height of individual areas on the surface of photomask 120 can be determined.

[0018] However, height measurements of patterned areas on the surface of a photomask are inaccurate due to three-dimensional electromagnetic effects and cannot be used directly to create focal maps for defect inspection. For example, assuming a broadband light source 102 (which is an extended spatial incoherent light source) with an NA of 0.10 and a center wavelength of 500 nm, the minimum pitch that can be resolved by broadband optical interferometer 100 is λ / (2*NA) = 2.5 μm. This value significantly exceeds the pitch of patterns on photomasks for modern deep submicron semiconductor devices. Below this pitch limit, broadband optical interferometer 100 does not resolve features, and only the zeroth-order diffracted light from photomask 120 interferes with the reference beam, resulting in inaccurate height measurements. The error in the measured height varies as a function of the fill factor (e.g., defined as the percentage of the area not covered by absorber material 204 in FIG. 2) of the patterned area on photomask 120. Correction determination techniques, described in the discussion below, are applied to this inaccurate (i.e., uncorrected) height measurement to generate corrected height values ​​that can be used in focal maps for defect inspection. These corrections can be determined based on the fill factor. In some embodiments, the generated height values ​​for the focal map are substantially pattern-independent, i.e., dependent on fill factor corrections but not on pattern details.

[0019] 2 is a vertical cross-sectional view of a patterned area 200 on the surface of photomask 120. A portion of patterned area 200 is covered with an absorber material (Ab) 204 that absorbs ultraviolet light (e.g., extreme ultraviolet light). The absorber material 204 is disposed above a multilayer material (ML) 202. The remainder of patterned area 200 is not covered by absorber material 204, revealing multilayer material 202, which reflects light (incompletely).

[0020] In some embodiments, the photomask 120 is for EUV (e.g., 13.5 nm) photolithography. The absorber material 204 absorbs EUV (e.g., 13.5 nm) light, and the multilayer material 202 partially reflects EUV (e.g., 13.5 nm) light. The multilayer material 202 includes alternating layers of molybdenum (Mo) and silicon (Si) over a substrate (e.g., a blank photomask) and a capping layer covering the alternating Mo and Si layers. The capping layer can be ruthenium (Ru). Each pair of adjacent Mo and Si layers is referred to as a MoSi bilayer. The Mo layer thickness can be 2.8 nm, the Si layer thickness can be 4.2 nm, and the capping layer thickness can be 2.5 nm. The number of MoSi bilayers in the multilayer material 202 can be 40 or more, or 35 or more. The absorber material 204 includes a tantalum boron nitride (TaBN) layer and a tantalum boron oxide (TaBO) capping layer overlying the TaBN layer. The TaBO capping layer is 2 nm thick. The TaBN layer 310 may be 50-70 nm or 70-80 nm thick. These are merely specific examples of absorber materials and materials underlying the absorber material (i.e., the underlying material exposed in the absence of the absorber material). Other absorber and / or underlying materials may also be used according to some embodiments.

[0021] 3 is a plan view of a pattern 300 on the surface of photomask 120 illuminated by a spot 306 of light from broadband optical interferometer 100 (FIG. 1), according to some embodiments. Within pattern 300, there are areas where multilayer material 202 is exposed and areas where multilayer material 202 is covered by absorber material 204. Pattern 300 is periodic. However, the focal mapping techniques described herein do not require periodic patterning and can also be used for photomasks with non-periodic (e.g., random) patterning.

[0022] A patterned area, such as patterned area 200 (FIG. 2) or area within pattern 300 (FIG. 3), has a fill factor a equal to the fraction of the area not covered by absorber material 204 (i.e., a is the fill factor of the exposed multilayer material 202). As shown in FIG. 1r 0 is the electric field reflected by the absorber material 204 (E 1r 0 is non-zero), E 2r 0 is the electric field reflected by the multilayer material 202 (which is not a perfect reflector). The zeroth order diffracted light emerging from the patterned area 200 is E r 0 =(1-a)E 1r 0 +aE 2r 0 (1) E r 0 The wavelength-dependent phase factor of φ(λ)=φ(E r 0 (λ)) (2) This becomes:

[0023] Assuming that w(λ) is the spectrum of light from broadband light source 102 (FIG. 1) and that λ spans the wavelength band of the light, the measured height (i.e., the effective height obtained through broadband optical interferometry, which is different from the actual height) is

number

[0024] The absorber material 204 and the multilayer material 202 are selected to absorb and reflect light, respectively, at the appropriate photolithography wavelength (e.g., at 13.5 nm for EUV photolithography). However, the absorber material 204 and the multilayer material 202 are dispersive, meaning that their reflectance varies as a function of wavelength. FIG. 4 is a graph 400 showing measured reflectance dispersion curves 402 and 404 (i.e., curves showing reflectance versus wavelength) for the multilayer material 202 and the absorber material 204. In the example of FIG. 4, the multilayer material 202 and the absorber material 204 are for 13.5 nm photolithography. The multilayer material 202 has a MoSi bilayer as described above. The absorber material 204 has a TaBO capping layer with TaBN as described above.

[0025] FIG. 5 is a graph 500 illustrating height correction curves calculated according to some embodiments. These height correction curves indicate the amount of height correction to be applied to a measured photomask height (e.g., a photomask height measured using broadband optical interferometry) versus fill factor a (i.e., the fill factor of ML 202). These height correction curves are calculated according to Equation 3 and Equation 4 and vary as a function of the phase change of light upon reflection from multilayer material 202. FIG. 5 shows a first curve 502 for a −20° phase change, a second curve 504 for a 0° phase change, and a third curve 506 for a +20° phase change. The actual phase change can be measured offline (e.g., using a calibration photomask), and the height correction curves for the actual phase change can be calculated accordingly. In the example of FIG. 5 , the height correction amount is defined as a negative quantity, so that subtracting it from the photomask height measured using broadband optical interferometry can create a focal map that provides a locus for focusing the inspection optics (e.g., EUV optics 1334 in FIG. 13 ) onto the top of absorber material 204. Alternatively, the height correction amount can be defined as a positive quantity and added to the measured photomask height. According to yet another example, the height correction amount can be a correction factor that can be multiplied or divided by the measured photomask height. By applying the height correction amount, a focal map can be created that provides a locus for focusing the inspection optics onto the top of absorber material 204, the top of multilayer material 202 (i.e., the bottom of absorber material 204), or some predetermined surface between or outside of those two surfaces.

[0026] FIG. 6 illustrates a planar view of a height image of photomask 120 and a corresponding curve showing the height in the form of a cross-sectional profile 608 of photomask 120, according to some embodiments. This height image was generated using an optical height sensor. For example, the height image is generated by performing broadband optical interferometry (e.g., using broadband optical interferometer 100 of FIG. 1 ) to generate interferograms with an objective (e.g., objective 112 of FIG. 1 ) at multiple discrete heights (i.e., z-positions) above photomask 120 and analyzing the interferograms to determine a measured height. In the example of FIG. 6 , photomask 120 includes unpatterned areas 602 where multilayer material 202 is covered by absorber material 204, areas 604 (e.g., target areas) where the absorber material 204 is absent and the multilayer material 202 is exposed, and patterned areas 606 where portions of multilayer material 202 are covered by absorber material 202. If patterning is ignored, height variations across the photomask 120 are primarily due to warpage of the photomask 120. For example, height variations in the non-patterned area 602 are primarily due to warpage. The height (i.e., z-component) on each side of the area 604 corresponds to the height (i.e., thickness) of the absorber material 204. The height in the patterned area 606 should similarly step up / down by an amount equal to the height (i.e., thickness) of the absorber material 204, since each point in the patterned area 606 has and does not have the absorber material 204. However, broadband optical interferometry (or other optical height sensing) cannot resolve features in the patterned area 606 (e.g., because the patterning pitch is below the resolution limit). As a result, the measured height in the patterned area 606 will be inaccurate and have intermediate values. Therefore, the raw height measured through broadband optical interferometry cannot be used for focal mapping. Height corrections (eg, height corrections in FIG. 5) can be applied to these raw heights, and the corrected heights can then be used for focal mapping.6, application of height corrections in patterned area 606 for profile 608 results in locus 610, which can be used in a focal map for cross sections of profile 608 through patterned area 606, unpatterned areas 602, and / or area 604. Based on the focal map, inspection optics (e.g., EUV optics 1334 in FIG. 13) can be focused on the top of absorber material 204 during defect inspection. In some embodiments, the focal map can specify a focal point that is offset from the top of absorber material 204 by a specified vertical distance (i.e., z-distance).

[0027] To obtain height corrections from a height correction curve (e.g., one of the curves in FIG. 5), the fill factor for an individual photomask area is first determined. In some embodiments (e.g., for die-to-database inspection), a database of designs for the photomask is available, and the fill factor is determined from that database (e.g., as in step 806 of method 800 of FIG. 8).

[0028] In other embodiments (e.g., for die-to-die inspection) (e.g., where a database of designs for the photomask is not available), the fill factor can also be determined based on the average reflectance. Each z-position (i.e., z-height) of the objective (or photomask) is associated with a different phase index i. Capturing an interferogram with the objective at a different z-position corresponds to stepping through the phase index i, where the interferogram intensity is I i =a+b cos(φ i +Δ) (5) where Δ is the phase (i.e., height) associated with the specimen (i.e., photomask area) of interest, and the coefficients a and b are associated with the reflected light from the reference surface and specimen (i.e., photomask) surface in the broadband optical interferometer. The coefficients a and b can be obtained through known interferogram analysis. Once a and b are known, the reference surface reflectance r r and the test surface reflectance r t(i.e., the ratio of the reflectance of a certain area of ​​the photomask surface to the reflectance of the specimen surface) |r r / r t | is deduced through interference analysis, which is also known. The reference surface reflectance r r is a known characteristic of the broadband optical interferometer, so the test surface reflectance r t The amplitude (i.e., magnitude) of the signal is then determined accordingly.

[0029] 7 is a graph 700 illustrating curves of average reflectance amplitude versus fill factor a (i.e., versus the fill factor of the multilayer material 202) for different wavelength bands (e.g., colors), according to some embodiments. The curves in graph 700 are calculated, i.e., predicted. The first of these curves, curve 702, represents the case where the ratio of the reflectance of the multilayer material 202 to the reflectance of the absorber material 204 is 1.17 (i.e., R ML / R Ab =1.17), and the second curve 704 corresponds to a first wavelength band where the ratio of the reflectance of the multilayer material 202 to the reflectance of the absorber material 204 is 0.89 (i.e., R ML / R Ab =0.89). In calculating curves 702 and 704, it was assumed that the phase change upon reflection from multilayer material 202 was 0 degrees (e.g., as in curve 504 of FIG. 5). Similar curves can be calculated for other phase changes.

[0030] As shown by curves 702 and 704, the reflectance for a single wavelength band does not identify a single fill factor, i.e., the correlation between reflectance and fill factor is not one-to-one. Curves 702 and 704 show a one-to-two correlation between reflectance and fill factor (i.e., each individual reflectance value corresponds to two different fill factors). However, multiple (e.g., two) distinct wavelength bands (e.g., colors) can be used together to determine a unique fill factor for the measured reflectance. For example, broadband optical interferometer 100 can be configured to generate an interferogram using each of two distinct wavelength bands (e.g., by changing the LED in broadband light source 102, changing the filter in broadband light source 102, or multiplexing with multiple broadband light sources 102). Given the resulting reflectance data, curves 702 and 704 can be used to identify a unique fill factor for each individual photomask area.

[0031] FIG. 8 is a flowchart illustrating a photomask inspection method 800 according to some embodiments. The method 800 can be performed by a photomask inspection system (e.g., photomask inspection system 1100 of FIG. 11, 1300 of FIG. 13) that includes a broadband optical interferometer (e.g., broadband optical interferometer 100 of FIG. 1) (e.g., broadband optical interferometers of FIGS. 9 and / or 10A-10B). In the method 800, heights on a surface of a photomask (e.g., photomask 120 of FIG. 1, 930 of FIG. 9, 1030 of FIGS. 10A-10B, 1118 of FIG. 11) are measured 802 using broadband optical interferometry (e.g., using Mirau interferometry or Michelson interferometry). The heights include the heights of patterned areas of the photomask (e.g., areas patterned with absorber material 204 above multilayer material 202 in FIGS. 2-3). In some embodiments, the broadband optical interferometry uses visible light. In some embodiments, a height image (e.g., that shown in FIG. 6) of the photomask (e.g., z-height frame 1126 in FIG. 11) is generated (804) using broadband optical interferometry. The height image may include measured heights across the entire photomask or a portion of it. For example, the height image may include measured heights across a cross section of the photomask (e.g., profile 608 in FIG. 6).

[0032] In some embodiments, a fill factor for the patterned area (e.g., fill factor a for multilayer material 202) is calculated (806) based on a database of designs for the photomask. For example, the database may be a gds file or may include design data provided in a gds file. The design data in the database identifies areas on the photomask that have and do not have absorber material (e.g., absorber material 204 in FIG. 2 ), allowing the fill factor to be calculated. When performing this fill factor calculation, for example, for die-to-database inspection, later in step 820, defect inspection compares results produced by inspecting the photomask with results produced by a simulated inspection of the designs in the database.

[0033] Alternatively, the fill factor (e.g., fill factor a for multilayer material 202) can be determined without using a database of photomask designs. In some embodiments, the reflectance (e.g., average reflectance) of the patterned area is determined (808) using broadband optical interferometry (e.g., according to Equation 5). In the broadband optical interferometry, individual instances of broadband optical interferometry are performed using individual wavelength bands (e.g., colors) of a plurality of wavelength bands (e.g., two wavelength bands), and reflectance is determined for each of the individual wavelength bands. The reflectances may be identified in intensity frame 1128 ( FIG. 11 ). Fill factors are determined (810) based on the reflectances using a predetermined reflectance-to-fill factor correspondence (e.g., a non-one-to-one correspondence) for the plurality of wavelength bands. For example, the fill factors may be determined using a correspondence similar to that shown in FIG. 7. The plurality of wavelength bands may include a first color and a second color. The predetermined correspondences can include a first correspondence between reflectance and fill factor for a first color and a second correspondence between reflectance and fill factor for a second color, neither of which is a one-to-one correspondence. When performing this reflectance-based fill factor determination, for example, for die-to-die inspection, later in step 820, defect inspection compares results produced by inspecting die areas on the photomask with results produced by inspecting die areas on a reference photomask.

[0034] A focal map (e.g., focal map 1108 in FIG. 11 ) is created (812) based on the measured heights on the surface of the photomask. In creating the focal map, the measured heights of the patterned areas are adjusted based on the fill factors associated with the patterned areas. In some embodiments, the height image is adjusted based on the fill factors to offset the measured heights of the patterned areas (e.g., including the measured heights at a cross-section of the photomask, such as profile 608 in FIG. 6 ) (814). Height corrections for the individual measured heights of the patterned areas can be determined based on the fill factor using a predetermined measurement height-to-fill factor correspondence (e.g., similar to that shown in FIG. 5 ). The height corrections can be applied (818) to the individual measured heights (e.g., to generate locus 610 in FIG. 6 ). The resulting focal map can be substantially pattern-independent (e.g., the light used for photomask inspection in step 820 can be focused onto the top of absorber material 204, onto the top of multilayer material 202, or onto any predetermined surface between or outside those two surfaces).

[0035] The photomask is inspected 820 for defects using the focal map (i.e., the photomask is inspected by focusing the light with photomask inspection optics according to the focal map). In some embodiments, the photomask is inspected 822 using ultraviolet (UV) light. For example, extreme ultraviolet (EUV) (e.g., 13.5 nm) light is used. EUV is a common, well-known, and recognized technical term that refers to light having wavelengths in the range from 124 nm down to 10 nm. Using the focal map during inspection causes the EUV focal plane to follow the focal map. The focal map can be pattern independent.

[0036] Attention is now directed to photomask inspection systems. EUV optics used to inspect photomasks for defects include an EUV objective, which may be located within a vacuum chamber. At least a portion of an optical height sensor used to create a focal map for photomask inspection is also located within the vacuum chamber. By positioning the optical height sensor off-axis with respect to the EUV objective, the optical axis associated with the EUV light in the EUV objective is different from the optical axis associated with the light in the optical image sensor. Examples of optical height sensors include interferometers (e.g., broadband interferometers, also known as white light interferometers), chromatic confocal sensors, laser triangulation sensors, and structured light sensors.

[0037] FIG. 9 is a schematic block diagram of a photomask inspection tool 900 according to some embodiments. The tool 900 includes a vacuum chamber 902. Disposed within the vacuum chamber 902 are an EUV imaging objective 904 (also known as an EUV objective 904), an objective 906, and a stage 928. The stage 928 supports a photomask 930 and translates the photomask 930 horizontally (i.e., in the x-y plane) and vertically (i.e., up and down along the z-direction) for inspection. The photomask 930 is loaded onto the stage 928 within the vacuum chamber 902 in preparation for inspection, and is unloaded and removed from the vacuum chamber 902 after inspection is complete. The EUV objective 904 collects EUV light (e.g., 13.5 nm light) from the photomask 930 during inspection of the photomask 930 for defects. The EUV objective 904 provides the collected EUV light to an EUV-sensitive sensor (not shown). Objective 906, which may be an infinite conjugate, is part of an optical height sensor used to measure height on the surface of photomask 930. The light used by the optical height sensor is not EUV and has a longer wavelength than EUV light. For example, the optical height sensor may use infrared light, visible light, and / or ultraviolet (non-EUV) light. A focal map for photomask inspection is generated using the measured height (e.g., by step 812 of method 800 of FIG. 8 or by step 1216 of method 1200 of FIG. 12). Objective 906 is positioned off-axis with respect to EUV objective 904. The stroke length of stage 928 is sufficient to allow both EUV objective 904 and objective 906 to view the entire surface of photomask 930, even though their individual fields of view are smaller than the surface of photomask 930.

[0038] In some embodiments, a plate 922 included in the vacuum chamber 902 divides the vacuum chamber 902 into a first subchamber 902-1 and a second subchamber 902-2. The EUV objective 904 and the objective 906 are disposed within the first subchamber 902-1. A stage 928 is disposed within the second subchamber 902-2. The stage 928 is a source of contamination within the vacuum of the second subchamber 902-2, and is blocked by the plate 922 to prevent this contamination from entering the first subchamber 902-1 and thereby contaminating the EUV objective 904 and the objective 906. The plate 922 includes a window 924 that allows light to pass between the objective 906 and the photomask 930. The plate 922 also includes a hole 926 that allows EUV light to pass between the photomask 930 and the EUV objective 904. When measuring height within an area on the surface of photomask 930, stage 928 is translated to position the area below window 924. When inspecting an area on the surface of photomask 930 for defects, stage 928 is translated to position the area below window 924. First subchamber 902-1 and second subchamber 902-2 can be separately pumped using differential pumping, i.e., one or more first vacuum pumps can be used to pump first subchamber 902-1 while one or more second vacuum pumps can be used to pump second subchamber 902-2. In some embodiments, sealing objective 906 (e.g., enclosing it in a sealing assembly) reduces contamination from optical elements and mounts.

[0039] In some embodiments, objective 906 is an interferometric objective that is part of a broadband optical interferometer (i.e., a white light interferometer). Objective 906 is shown in FIG. 9 as a Michelson interferometer objective. Alternatively, objective 906 may be a Mirau interferometer. Thus, the optical height sensor may be (or may comprise) a broadband optical interferometer (e.g., a Michelson interferometer or a Mirau interferometer). Additional components of the broadband optical interferometer, such as a broadband light source 912 (e.g., broadband light source 102 of FIG. 1), a condenser lens 914, a beam splitter 916, a tube lens 918, and an image sensor 920, are disposed outside the vacuum chamber 902. (All active components of the height sensor, including the broadband light source 912 and the image sensor 920, are disposed outside the vacuum chamber 902, while passive components of the height sensor are disposed both inside and outside the vacuum chamber 902 according to some embodiments, thus allowing the in-vacuum optics of the height sensor to be entirely passive.) Light provided by the broadband light source 912 and having a wavelength band (e.g., having a 50 nm bandwidth) is directed by the condenser lens 914 onto the beam splitter 916. Beam splitter 916 directs this light through a window 908 in an outer wall 910 of vacuum chamber 902 (e.g., of first subchamber 902-1) to objective 906. Objective 906 directs some of the light through window 924 to a photomask 930, internally reflecting some of the light as a reference beam and collecting light from photomask 930. The collected light from the photomask interferes with the reference beam. The objective 906 directs the combination of the collected light from photomask 930 and the reference beam through window 908 and beam splitter 916 to tube lens 918, which focuses the light onto image sensor 920. The light received by image sensor 920 creates an interferogram that is captured as an image by image sensor 920. For a given xy (i.e., horizontal) position of the stage 928, i.e., for a corresponding area on the surface of the photomask 930, interferograms are collected at multiple distinct z-heights of the stage 928, i.e., for multiple distinct photomask 930 surface-to-objective 906 distances.These interferograms can be used to measure heights on the surface of photomask 930 (eg, according to step 802 of method 800 of FIG. 8).

[0040] FIGS. 10A and 10B are side and perspective views, respectively, of a photomask inspection tool 100 according to some embodiments. Tool 1000 is an example of photomask inspection tool 900 (FIG. 9). Tool 1000 includes a vacuum chamber 1002 (e.g., vacuum chamber 902 in FIG. 9). An EUV objective 1004 (e.g., EUV objective 904 in FIG. 9), an interferometer objective 1006 (e.g., objective 906 in FIG. 9), and a stage 1028 (e.g., stage 928 in FIG. 9) are disposed within vacuum chamber 1002. Stage 1028 supports and translates a photomask 1030 (e.g., photomask 930 in FIG. 9). In some embodiments, tool 1000 includes a plate, such as plate 922 (FIG. 9), which is not shown in FIGS. 10A and 10B to avoid obscuring other components. The tool 1000 may also include a mirror set 1005 that directs EUV light from an EUV light source onto a photomask 1030. The mirror set 1005 illuminates the photomask 1030 with EUV light, while the EUV objective 1004 collects the EUV light from the photomask 1030.

[0041] In some embodiments, interferometer objective 1006 is positioned off-axis relative to EUV objective 1004 and is mechanically coupled to EUV objective 1004. For example, interferometer objective 1006 is coupled to the bottom surface of interferometer objective 1006, i.e., the surface facing stage 1028 (e.g., facing stage 1028 via a plate, not shown). Interferometer objective 1006 can be an attachment to EUV objective 1004.

[0042] Interferometer objective 1006 is part of a broadband optical interferometer, acting as an optical height sensor, that also includes an image sensor 1020 (e.g., image sensor 920 of FIG. 9) and another objective 1032. Objective 1032 may include a broadband light source 912, a condenser lens 914, a beam splitter 916, and a tube lens 918 (FIG. 9).

[0043] 11 is a schematic block diagram of a photomask inspection system 1100 according to some embodiments, including an image processing computer 1102, an optical height sensor 1120, a height sensor controller 1124, and a stage controller 1110. In some embodiments, the optical height sensor 1120 is a broadband optical interferometer of tool 900 (FIG. 9) and / or tool 1000 (FIGS. 10A-10B). In some embodiments, the optical height sensor 1120 is a broadband optical interferometer 100 (FIG. 1).

[0044] A stage controller 1110 controls a stage 1116 (e.g., stage 928 in FIG. 9 or 1028 in FIGS. 10A-10B) disposed within a photomask inspection tool (e.g., photomask inspection tool 900 in FIG. 9 or 1000 in FIGS. 10A-10B). The stage 1116 supports and translates a photomask 1118 (e.g., photomask 930 in FIG. 9 or photomask 1030 in FIGS. 10A-10B). The stage controller 1110 controls the stage 1116 by sending stage control signals 1114 to the stage 1116. The stage control signals 1114 instruct the stage 1116 to translate horizontally and vertically. In this manner, the stage controller 1110 translates the stage 1116 horizontally and vertically (ie, causes the stage 1116 to translate horizontally and vertically), thereby causing the stage 1116 to translate the photomask 1118 horizontally and vertically.

[0045] During defect inspection of the photomask 1118, the stage controller 1110 translates the stage 1116 horizontally and vertically according to a focal map 1108 (which may also be referred to as a height map). The image processing computer 1102 provides the focal map 1108 to the stage controller 1110. The focal map 1108 specifies discrete z-heights to which the EUV light used to inspect the photomask 1118 should be focused relative to discrete x and y coordinates of the photomask 1118 (e.g., as described with reference to FIG. 6). For example, the focal map 1108 specifies a trajectory 610 associated with the discrete profile 608 (FIG. 6) of the photomask 1118. The stage controller 1110 translates the stage 1116 according to the focal map 1108 to achieve the desired focus (i.e., to get closer to the desired focus than is achievable with the control system for the stage 1116). In some embodiments, the stage controller 1110 controls the stage 1116 using closed-loop control. For example, assume the stage 1116 has mirrored sides. An interferometer (e.g., interferometer 1008 in FIGS. 10A-10B) locates the stage 1116 by shining light onto the mirrored sides and provides feedback to the stage controller 1110 indicating the location of the stage 1116 (the interferometer is separate from the optical height sensor 1120). The stage controller 1110 adjusts the position of the stage 1116 based on the feedback and the focal map 1108 by sending a stage control signal 1114 to the stage 1116.

[0046] An optical height sensor 1120, a height sensor controller 1124, and an image processing computer 1102 are used to generate a focal map 1108. The image processing computer 1102 specifies x and y coordinates 1104 of areas on the surface of a photomask 1118 whose heights (including those of patterned areas) are to be measured. These x and y coordinates 1104 are sent from the image processing computer 1102 to a stage controller 1110. The stage controller 1110 translates a stage 1116 to the specified x and y coordinates and then translates the stage through a series of z-heights (i.e., scans through the z-heights). The stage controller 1110 performs this translation by sending corresponding stage control signals 1114 to the stage 1116. The optical height sensor 1120 generates an interferogram 1122 at each z-height and sends the interferograms to a height sensor controller 1124. The stage controller 1110 controls the operation of the optical height sensor 1120 by sending a synchronization ("sync") signal 1112 to the optical height sensor 1120. The sync signal 1112 (e.g., the pulses it contains) can instruct the optical height sensor 1120 when an interferogram 1122 should be generated (e.g., indicate that the stage 1116 has reached a specified x-y coordinate). For example, the sync signal 1112 can include a trigger signal that causes the optical height sensor 1120 to begin acquiring the interferogram 1122. The sync signal can also provide information corresponding to the vertical (i.e., z-direction) translation of the stage 1116 and photomask 1118 (e.g., specify the z-height). This information can be forwarded by the optical height sensor 1120 to the height sensor controller 1124, or alternatively, can be sent directly from the stage controller 1110 to the height sensor controller 1124.

[0047] The height sensor controller 1124 analyzes the data associated with the interferogram 1122 (e.g., using information corresponding to vertical translation of the stage 1116 and photomask 1118) to determine the heights of the patterned areas on the photomask 1118. These heights are uncorrected heights, such as those shown in FIG. 6 for the patterned area 606. For example, the height sensor controller 1124 generates z-height frames 1126 that specify the uncorrected heights of distinct areas of the photomask 1118. Each z-height frame 1126 can correspond to a distinct area on the surface of the photomask 1118 (e.g., a distinct area within the field of view of the optical height sensor 1120). The field of view of each z-height frame 1126 is smaller than the surface of the photomask 1118. The z-height frames 1126 can also cover the entire surface of the photomask 1118 (e.g., with overlapping portions that allow stitching when creating the focal map 1108). Alternatively, the z-height frames 1126 may sample the surface of the photomask 1118, e.g., the z-height frames 1126 may relate to discrete, non-connected areas (e.g., fields of view) on the surface of the photomask 1118. The height sensor controller 1124 sends these z-height frames 1126 (or more generally, uncorrected heights) to the image processing computer 1102.

[0048] The image processing computer 1102 corrects the uncorrected heights of the patterned areas. When correcting the uncorrected heights, the uncorrected heights of the patterned areas are adjusted based on the fill factors associated with those patterned areas (e.g., by step 812 of method 800 of FIG. 8). In some embodiments, the uncorrected heights are also corrected by applying a height offset (i.e., a z-height offset) to the adjusted heights. The height offset accounts for the height difference between the adjusted height determined using the height sensor 1120 and the desired (e.g., best) focus position of the EUV objective (e.g., EUV objective 904 of FIG. 9 or 1004 of FIGS. 10A-10B). The height offset can vary depending on the location of the stage 1116. The height offsets associated with the various locations of the stage 1116 can be stored in a calibrated height offset map. The calibrated height offset map is sometimes referred to as a base map, and the height offset is sometimes referred to as a base map offset or base map correction. The variation in height offset across the stage location comes from the stage interferometer (e.g., interferometer 1008 in FIGS. 10A-10B) and its associated stage mirror. The stage interferometer measures different areas of the interferometer mirror for different locations of the stage 1116 and therefore the photomask 1118. Imperfections in these mirrors and their mounting angles introduce errors in the absolute height position of the height sensor and the location of the EUV objective field of view, resulting in location-dependent variation in the height offset.

[0049] A calibration height offset map (i.e., base map) can be generated using a calibration photomask, in which a fixed grid pattern is printed at known locations (e.g., covering the entire calibration photomask). The calibration photomask is loaded onto the stage 1116. At each location, the z-location of the calibration photomask is measured using the height sensor 1120. The focus position (e.g., best focus position) of the EUV objective system is measured at the same location by capturing multiple frames of EUV images of the pattern at various focuses, thereby determining the desired (e.g., best) focused image. Height offsets are determined for each location based on the individual z-location and focus position, thereby defining the relationship between the measured mask topology and the EUV focus position at those photomask locations. Through interpolation, height offsets can be obtained for every stage location.

[0050] The image processing computer 1102 uses the corrected heights (e.g., per step 812 of method 800 of FIG. 8) to generate a focal map 1108. For example, the image processing computer 1102 stitches the corrected heights across multiple z-height frames 1126. In generating the focal map 1108, the image processing computer 1102 may filter and smooth the corrected heights to reduce noise, remove outlying data points, and perform image calibration corrections.

[0051] The focal map 1108 can be a map of the entire surface of the photomask 1118 or of an area on the photomask 1118 that is to be inspected for defects (i.e., an inspection area). The focal map 1108 can also be a map of a subsection of the inspection area that is inspected for defects using EUV imaging, and after inspection, another focal map 1108 can be created for a different subsection of the inspection area, which is then inspected, so that focal map creation and inspection are performed on the separate subsections in a sequential manner. The focal map 1108 can also be downsampled to a lower spatial resolution before being provided to the stage controller 1110. The focal map 1108 can also be converted (e.g., by the stage controller 1110) into a stage trajectory (e.g., trajectory 610 in FIG. 6 ) for each EUV imaging swath across the photomask 1118. For example, stage trajectories can be generated from the focal map 1108 data using least squares global polynomial fitting and spline interpolation between measurement points (i.e., between individual measured heights), and these stage trajectories can be used to inspect these EUV imaging swaths for defects.

[0052] Height sensor controller 1124 may generate intensity frames 1128, which may be sent to image processing computer 1102. The intensity frames 1128 may be used to determine the reflectivity of individual areas on the surface of photomask 1118 (e.g., by step 808 of method 800 of FIG. 8). The image processing computer 1102 may use the intensity frames 1128 to determine a fill factor (e.g., by step 810 of method 800 of FIG. 8).

[0053] 12 is a flowchart illustrating a photomask inspection method 1200 according to some embodiments. The method 1200 may be performed by a photomask inspection system (e.g., photomask inspection system 1100 of FIG. 11 or 1300 of FIG. 13). The method 1200 may be an example of method 800 or portions thereof.

[0054] In method 1200, a photomask (i.e., reticle) is positioned 1202 on a stage (e.g., stage 928 of FIG. 9, 1028 of FIG. 10A-10B, 1116 of FIG. 11, 1336 of FIG. 13) within a vacuum chamber (e.g., vacuum chamber 902 of FIG. 9, 1002 of FIG. 10A-10B). Heights of patterned areas on the surface of the photomask are measured 1204 using an optical height sensor (e.g., broadband interferometer of FIG. 1, FIG. 9, and / or FIG. 10A-10B, 1332 of FIG. 13) disposed at least partially within the vacuum chamber. The heights can be measured 1206 using light having a wavelength longer than EUV (e.g., infrared light, visible light, and / or ultraviolet light that is not EUV).

[0055] In some embodiments, light from a broadband light source (e.g., broadband light source 102 in FIG. 1, 912 in FIG. 9) located outside the vacuum chamber is provided 1208 through a window (e.g., window 908 in FIG. 9) in the outer wall of the vacuum chamber to an interferometer objective (e.g., objective 906 in FIG. 9, 1006 in FIGS. 10A-10B) located inside the vacuum chamber. Light from the interferometer objective passes through the window and is received 1210 by an image sensor (e.g., camera 106 in FIG. 1, image sensor 920 in FIG. 9, image sensor 1020 in FIGS. 10A-10B) located outside the vacuum chamber.

[0056] For example, a plate (e.g., plate 922 in FIG. 9) provided within the vacuum chamber divides the vacuum chamber into a first subchamber and a second subchamber (e.g., first subchamber 902-1 and second subchamber 902-2 in FIG. 9). An interferometer objective is disposed within the first subchamber, and a stage is disposed within the second subchamber. A photomask is illuminated with light from the interferometer objective through a window (e.g., window 924 in FIG. 9) in the plate.

[0057] In some embodiments, the horizontal and vertical translation of the stage is controlled 1212 using a stage controller (e.g., stage controller 1110 in FIG. 11). Synchronization signals (e.g., sync signal 1112 in FIG. 11) are sent from the stage controller to the optical height sensor, thereby controlling operation of the optical height sensor 1214. The synchronization signals can provide information corresponding to the vertical translation of the photomask.

[0058] In some embodiments, data is sent from the optical height sensor to a height sensor controller (e.g., height sensor controller 1124 in FIG. 11 ), where the uncorrected height of the patterned area on the photomask is determined based on the data from the optical height sensor. For example, a z-height frame 1126 ( FIG. 11 ) is generated in the height sensor controller.

[0059] A focal map (e.g., focal map 1108 of FIG. 11) for the photomask is created 1216 using the measured heights on the surface of the photomask. The focal map may also be created 1218 by adjusting the measured heights of the patterned areas based on the fill factors associated with the patterned areas (e.g., by step 812 of method 800 of FIG. 8). The focal map may also be created 1219 to account for height differences between the adjusted heights and the EUV focal position by applying height offsets to the adjusted heights according to a calibration height offset map (i.e., base map). Method 1200 may also generate the calibrated height offset map (e.g., prior to step 1202) using a calibration photomask having a grid of fixed patterns at known locations (e.g., as described with respect to system 1100 of FIG. 11).

[0060] In some embodiments, the height sensor controller sends the uncorrected heights to an image processing computer (e.g., image processing computer 1102 in FIG. 11 ), which corrects the uncorrected heights of the patterned areas, adjusting the uncorrected heights based on the fill factors of the patterned areas, and generates a focal map using the corrected heights of the patterned areas.

[0061] The photomask is inspected for defects (1220) using an extreme ultraviolet (EUV) objective (e.g., EUV objective 904 of FIG. 9 , 1004 of FIGS. 10A-10B ) disposed within a vacuum chamber (e.g., within a first subchamber). The EUV objective collects EUV light from the photomask and provides the EUV light to an EUV-sensitive sensor, which images the photomask. The photomask is then inspected using EUV light (thus, the measurement of the height of the patterned areas in step 1204 can be performed using light that is not EUV and has a longer wavelength than the EUV light used to inspect the photomask). For example, the photomask is inspected (1222) using 13.5 nm light. The photomask can be illuminated with EUV light from the EUV objective through a hole in a plate (e.g., hole 926 of FIG. 9 ). EUV light collected by an EUV objective is emitted from the photomask and passed through the holes into the EUV objective. To inspect the photomask, the stage is translated horizontally and vertically according to a focal map.

[0062] In some embodiments, the optical height sensor includes an objective (e.g., objective 906 in FIG. 9, 1006 in FIGS. 10A-10B) disposed within the vacuum chamber and positioned off-axis relative to the EUV objective (1224).

[0063] During inspection of the photomask in step 1220, deformations or drift over time may occur on the surface of the photomask, causing the focal map to become inaccurate. Photomask inspection can be paused (e.g., periodically) and steps 1204 and 1216 repeated to create an updated focal map that accounts for the deformations and / or drift. In some embodiments, the updated focal map is for areas of the photomask surface that are not being inspected. Photomask inspection is then resumed in step 1220 using the updated focal map, i.e., the stage is translated horizontally and vertically according to the updated focal map to inspect areas of the photomask that are not being inspected. In some embodiments, pausing photomask inspection and repeating steps 1204 and 1216 to create an updated focal map is performed periodically.

[0064] In addition to deformation and / or drift of the photomask surface, drift of optical elements can also change the height difference between the adjusted height and the desired (e.g., best) focus position of the EUV objective. To account for this drift, inspection of the photomask can be paused (e.g., periodically) to refresh the height offsets. The height offsets can be refreshed by unloading the photomask being inspected, loading a calibration photomask onto its stage, and regenerating a calibration height offset map using the calibration photomask. The calibration photomask is then unloaded, the photomask being inspected is reloaded onto its stage, and steps 1204 and 1216 are repeated to create an updated focal map using the refreshed height offsets, and inspection of the photomask is resumed using the updated focal map.

[0065] Figure 13 is a block diagram of a photomask inspection system 1300 according to some embodiments. The photomask inspection system 1300 includes an inspection tool 1330 (e.g., tool 900 of Figure 9, tool 1000 of Figures 10A-10B) that includes a broadband optical interferometer (BLI) 1332 (e.g., broadband optical interferometer 100 of Figure 1, broadband optical interferometers of Figures 9 and / or 10A-10B) that measures height on the photomask (e.g., generates an interferogram that is used to generate a height image (e.g., z-height frame 1126 of Figure 11), such as the height image of Figure 6), EUV optics 1334 for inspecting the photomask for defects, and a stage 1336 (e.g., stage 928 of Figure 9, 1028 of Figures 10A-10B, 1116 of Figure 11) for supporting and translating the photomask horizontally and vertically. EUV optics 1334 includes EUV objective 1335 (e.g., EUV objective 904 in FIG. 9, 1004 in FIGS. 10A-10B). In some embodiments, EUV optics 1334 and included EUV objective 1335 are designed for and use 13.5 nm light. In some embodiments, broadband optical interferometer 1332 is replaced with another type of optical height sensor.

[0066] Photomask inspection system 1300 also includes a computer system having one or more processors 1302 (e.g., CPUs), an optional user interface 1306, memory 1310, and one or more communication buses 1304 interconnecting these components and tools 1330 (as well as other components of photomask inspection system 1300, not shown, such as a photomask handling robotics system). User interface 1306 may include a display 1307 and one or more input devices 1308 (e.g., a keyboard, a mouse, a touch-sensitive surface of display 1307, etc.). The display may display height images, focal maps, and defect inspection data, as well as communicate the status of photomask inspection system 1300 (e.g., the status of method 800 of FIG. 8 and / or method 1200 of FIG. 12).

[0067] Memory 1310 may include volatile and / or nonvolatile memory. Memory 1310 (e.g., nonvolatile memory within memory 1310) may include a non-transitory computer-readable storage medium. Memory 1310 may optionally include one or more storage devices located remotely from processor(s) 1302 and / or non-transitory computer-readable storage media removably inserted into the computer system of photomask inspection system 1300. In some embodiments, memory 1310 (e.g., a non-transitory computer-readable storage medium within memory 1310) stores modules and data, or a subset or superset thereof, such as an operating system 1312 that includes procedures for handling various basic system services and performing hardware-dependent tasks, a broadband optical interferometry (BLI) module 1314 that controls a broadband optical interferometer 1332, a focal map creation module 1316, a defect inspection module 1318 that controls photomask defect inspection using EUV optics 1334, and a notification module 1320 that reports results obtained by modules 1314, 1316, and / or 1318. Memory 1310 (e.g., a non-transitory computer-readable storage medium within memory 1310) includes instructions for performing all or a portion of method 800 ( FIG. 8 ) and / or method 1200 ( FIG. 12 ). Each module stored within memory 1310 is associated with a set of instructions for performing one or more of the functions described herein. The individual modules need not be implemented as separate software programs. These modules and various subsets of these modules may be rearranged, e.g., combined. In some embodiments, a subset or superset of the modules and / or data structures described above are stored in memory 1310.

[0068] 13 is intended as a functional, rather than structural, description of various features that may be present in photomask inspection system 1300. Portions of the modules stored in memory 1310 may alternatively be stored in one or more other computer systems communicatively coupled to photomask inspection system 1300 via one or more networks.

[0069] In some embodiments, the functionality of the computer system may be shared among multiple devices (e.g., multiple computers and controllers) in photomask inspection system 1300. For example, photomask inspection system 1300 may be an example of photomask inspection system 1100, which may include image processing computer 1102, height sensor controller 1124, and stage controller 1110 (FIG. 11).

[0070] FIG. 14 is a block diagram of a height sensor controller 1400 according to some embodiments. The height sensor controller 1400 is an example of the height sensor controller 1124 (FIG. 11). The height sensor controller 1400 includes one or more processors 1402 (e.g., CPUs), a memory 1410, and one or more communication buses 1404 interconnecting these components. The memory 1410 includes volatile and / or nonvolatile memory. The memory 1410 (e.g., nonvolatile memory within the memory 1410) includes a non-transitory computer-readable storage medium. The memory 1410 optionally includes one or more storage devices remotely located from the processor(s) 1402 and / or a non-transitory computer-readable storage medium removably inserted within the height sensor controller 1400. In some embodiments, memory 1410 (e.g., a non-transitory computer-readable storage medium within memory 1410) may store modules and data, or a subset or superset thereof, such as an operating system 1412 that includes procedures for handling various basic system services and performing hardware-dependent tasks, an uncorrected height determination module 1414 that determines the uncorrected height of a patterned area on a photomask based on data from broadband optical interferometer 1332 (FIG. 13) (e.g., to generate z-height frame 1126 of FIG. 11), and an intensity determination module 1416 that determines the intensity of light reflected from the photomask (e.g., to generate intensity frame 1128 of FIG. 11). Memory 1410 (e.g., a non-transitory computer-readable storage medium within memory 1410) may also contain instructions for performing all or a portion of steps 802 and / or 808 of method 800 (FIG. 8) and / or all or a portion of step 1204 of method 1200 (FIG. 12).

[0071] Each module stored in memory 1410 is associated with a set of instructions for performing one or more of the functions described herein. Individual modules need not be implemented as separate software programs. These modules and various subsets of these modules may be rearranged, e.g., combined. In some embodiments, a subset or superset of the modules and / or data structures described above are stored in memory 1410.

[0072] FIG. 15 is a block diagram of an image processing computer 1500 according to some embodiments. Image processing computer 1500 is an example of image processing computer 1102 (FIG. 11). Image processing computer 1500 includes one or more processors 1502 (e.g., CPUs), memory 1510, and one or more communication buses 1504 interconnecting these components. Memory 1510 includes volatile and / or nonvolatile memory. Memory 1510 (e.g., nonvolatile memory within memory 1510) includes a non-transitory computer-readable storage medium. Memory 1510 optionally includes one or more storage devices located remotely from processor(s) 1502 and / or non-transitory computer-readable storage media removably inserted within image processing computer 1500. In some embodiments, memory 1510 (e.g., a non-transitory computer-readable storage medium of memory 1510) stores modules and data, or a subset or superset thereof, such as an operating system 1512 that includes procedures for handling various basic system services and performing hardware-dependent tasks, a height correction module 1514 that corrects the height of patterned areas on the surface of a photomask (e.g., by adjusting the height based on a fill factor associated with the patterned areas), and a focal map creation module 1516 that uses the corrected heights to generate a focal map (e.g., focal map 1108 of FIG. 11). In some embodiments, memory 1510 also stores a defect inspection module 1518 (e.g., module 1318 of FIG. 13) that controls photomask defect inspection. Memory 1510 (e.g., a non-transitory computer-readable storage medium of memory 1510) may also contain instructions for performing all or a portion of steps 806, 810, 812, and / or 820 of method 800 (FIG. 8) and / or all or a portion of steps 1216 and / or 1220 of method 1200 (FIG. 12).

[0073] Each module stored in memory 1510 is associated with a set of instructions for performing one or more of the functions described herein. Individual modules need not be implemented as separate software programs. These modules and various subsets of these modules may be rearranged, e.g., combined. In some embodiments, a subset or superset of the modules and / or data structures described above are stored in memory 1510.

[0074] 14 and 15 are intended as functional descriptions, rather than structural diagrams, of the various features that may reside within the height sensor controller 1400 and image processing computer 1500. FIG.

[0075] The above description is for illustrative purposes and has been written with reference to specific embodiments. However, the above illustrative discussion is not intended to be exhaustive or to limit the scope of the claims to the precise forms disclosed. Many modifications and variations can be made in light of the above teachings. The embodiments have been selected to best explain the principles underlying the claims and their practical application, and to enable others skilled in the art to best utilize the embodiments and various modifications commensurate with the particular use contemplated.

Claims

1. 1. A photomask inspection system comprising: a vacuum chamber; a stage disposed within the vacuum chamber for supporting a photomask and for translating the photomask horizontally and vertically; an optical height sensor at least partially disposed within the vacuum chamber for measuring a height above a surface of the photomask, the optical height sensor using light that is not extreme ultraviolet (EUV) light but has a wavelength longer than EUV light; a stage controller that translates the stage horizontally and vertically according to a focal map associated with the photomask, the focal map being created using the measured height on the surface of the photomask; an EUV objective disposed within the vacuum chamber for collecting EUV light from the photomask and inspecting the photomask for defects; one or more processors; a memory in which one or more programs are stored for execution by said one or more processors; the one or more programs including instructions for generating the focal map using the measured heights on the surface of the photomask; the measured height comprises a measured height of a patterned area on the photomask; the instructions for creating the focal map include instructions for adjusting the measured heights of the patterned areas based on a fill factor, which is a percentage of the area of ​​the patterned areas that is not covered by absorber material; 10. The photomask inspection system of claim 9, wherein the instructions for creating the focal map further include instructions for applying a height offset to the adjusted height according to a calibration height offset map to account for a height difference between the adjusted height and an EUV focal position.

2. 2. The system of claim 1, wherein the optical height sensor comprises an objective disposed within the vacuum chamber and positioned off-axis relative to the EUV objective.

3. 10. The system of claim 1, A system in which the EUV light is 13.5 nm light.

4. 10. The system of claim 1, the optical height sensor comprises a broadband optical interferometer; The broadband optical interferometer includes an interferometer objective disposed within the vacuum chamber.

5. 5. The system of claim 4, the broadband optical interferometer further comprises a broadband light source disposed outside the vacuum chamber, and an image sensor disposed outside the vacuum chamber; The vacuum chamber has a window on an outer wall thereof through which light related to the broadband optical interferometer passes.

6. 6. The system of claim 5, wherein the broadband optical interferometer further comprises: a beam splitter disposed outside the vacuum chamber to direct light from the broadband light source through the window to the interferometer objective; a tube lens disposed outside the vacuum chamber between the beam splitter and the image sensor to focus light from the interferometer objective onto the image sensor; A system comprising:

7. The system of claim 4 , wherein the interferometer objective is mechanically coupled to the EUV objective.

8. 8. The system of claim 7, the interferometer objective is coupled to a bottom surface of the EUV objective; A system in which the bottom surface of the EUV objective faces the stage.

9. 2. The system of claim 1, wherein the one or more programs further include instructions for calculating the fill factor based on a database of designs for the photomask.

10. 10. The system of claim 1, the optical height sensor comprises a broadband optical interferometer; the one or more programs further comprising: determining the reflectivity of the patterned area based on data from the broadband optical interferometer; determining the fill factor based on the reflectance; A system containing instructions for

11. 10. The system of claim 1, comprising a height sensor controller and an image processing computer, the height sensor controller comprising one or more first processors and a first memory, the first memory having one or more first programs stored for execution by the one or more first processors, the one or more first programs including instructions for determining the measured height of a patterned area on the photomask based on data from the optical height sensor; The system wherein the image processing computer comprises one or more second processors and a second memory, the second memory storing one or more second programs for execution by the one or more second processors, the one or more second programs including instructions for generating the focal map.

12. 12. The system of claim 11, wherein the set of instructions for creating the focal map comprises: applying a height offset to the adjusted height according to a calibration height offset map to account for a height difference between the adjusted height and the EUV focal position; A system containing instructions for

13. 10. The system of claim 1, wherein the stage controller is configured to control operation of the optical height sensor by sending a synchronization signal to the optical height sensor.

14. 14. The system of claim 13, wherein the synchronization signal provides information corresponding to the vertical translation of the photomask.

15. 1. A method comprising: Positioning the photomask on a stage within a vacuum chamber measuring a height of a patterned area on a surface of the photomask using an optical height sensor disposed at least partially within the vacuum chamber and using light that is not extreme ultraviolet (EUV) light but has a wavelength longer than EUV light; generating a focal map associated with the photomask using the measured heights on the surface of the photomask; adjusting the measured heights of the patterned areas based on a fill factor, which is the percentage of the area of ​​the patterned areas that is not covered by absorber material; Applying a height offset to the adjusted height according to a calibration height offset map to account for the height difference between the adjusted height and the EUV focal position. This includes: inspecting the photomask for defects using an EUV objective disposed within the vacuum chamber; translating the stage horizontally and vertically according to the focal map; Collecting EUV light from the photomask using the EUV objective according to the focal map. A method comprising:

16. 16. The method of claim 15, the optical height sensor comprises an objective disposed within the vacuum chamber and positioned off-axis with respect to the EUV objective; The method wherein inspection of said photomask for defects is performed using 13.5 nm light.

17. 16. The method of claim 15, the optical height sensor comprises a broadband optical interferometer, the broadband optical interferometer comprising an interferometer objective disposed within the vacuum chamber, a broadband light source disposed outside the vacuum chamber, and an image sensor disposed outside the vacuum chamber; When measuring the height of the patterned area, providing light from the broadband light source to the interferometer objective through a window in an outer wall of the vacuum chamber; Light from the interferometer objective system is passed through the window and received by the image sensor. method.

18. 18. The method of claim 17, the vacuum chamber comprising a plate dividing the vacuum chamber into a first sub-chamber and a second sub-chamber; the EUV objective and the interferometer objective are disposed in the first subchamber; the stage is disposed within the second sub-chamber; measuring the height of the patterned area further includes illuminating the photomask with light from the interferometer objective through a window in the plate; The method includes illuminating the photomask with EUV light from the EUV objective through an opening in the plate when inspecting the photomask for defects.

19. 16. The method of claim 15, further comprising generating the calibrated height offset map using a calibration photomask having a grid of fixed patterns at known locations.

20. 16. The method of claim 15, When measuring the height of the patterned area, transmitting data from the optical height sensor to a height sensor controller; determining, at the height sensor controller, the measured height of the patterned area on the photomask based on the data from the optical height sensor; When creating the focal map, transmitting the measured height from the height sensor controller to an image processing computer; and correcting the measured heights of the patterned areas in the image processing computer, adjusting the measured heights of the patterned areas based on fill factors associated with the patterned areas, and applying a height offset to the adjusted heights according to a calibration height offset map to account for height differences between the adjusted heights and an EUV focal position.

21. 16. The method of claim 15, further comprising: Pausing the test, generating an updated focal map by repeating the measuring and generating while the inspection is paused; restarting the examination with the updated focal map.

22. 16. The method of claim 15, wherein measuring the height of the patterned area comprises: controlling horizontal and vertical translation of said stage using a stage controller; controlling the operation of the optical height sensor by sending a synchronization signal from the stage controller to the optical height sensor; method.

23. 23. The method of claim 22, wherein the synchronization signal provides information corresponding to the vertical translation of the photomask.

24. A photomask inspection system comprising: a vacuum chamber having a plate dividing the chamber into a first subchamber and a second subchamber; a stage disposed within the vacuum chamber for supporting a photomask and for translating the photomask horizontally and vertically; an optical height sensor disposed at least partially within the vacuum chamber for measuring a height above a surface of the photomask; the optical height sensor comprises a broadband optical interferometer; the broadband optical interferometer comprises an interference objective disposed in the first subchamber of the vacuum chamber; The optical height sensor uses light having a wavelength longer than that of extreme ultraviolet (EUV) light, rather than EUV light; a stage controller that translates the stage horizontally and vertically according to a focal map associated with the photomask, the focal map being created using the measured height on the surface of the photomask; an EUV objective disposed within the first subchamber of the vacuum chamber for collecting EUV light from the photomask and inspecting the photomask for defects; Equipped with The plate is a window that is located between the interferometer objective system and the photomask and through which light passes; a photomask disposed between the photomask and the EUV objective system and having a hole through which the EUV light passes; Photomask inspection system.

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