Sensor Device

Abstract

This sensor device (100) comprises: a plurality of sensors (2) that detect a physical amount; a sensor placement member (1) that includes a plurality of recess portions (11) that open in different directions, the plurality of sensors (2) being disposed in respective recess portions (11); and a shielding lid member (7) that is provided between each recess portion (11) and a shielding cover member (4) for covering the sensor placement member, covers the recess portion (11) such that the sensor (2) disposed in the recess portion (11) is not exposed, and shields the same from electromagnetic noise.

Description

[Technical Field]

[0001] The present invention relates to a sensor device, and more particularly to a sensor device including a sensor arrangement member on which a plurality of sensors are arranged. [Background technology]

[0002] Conventionally, a sensor device including a sensor arrangement member on which a plurality of sensors are arranged is known. Such a sensor device is disclosed, for example, in Japanese Patent Laid-Open No. 2021-67625.

[0003] The inertial measurement unit (sensor device) described in JP 2021-67625 A includes a printed circuit board (sensor placement member) on which multiple gyroscopes corresponding to the X-axis, Y-axis, and Z-axis are mounted. The inertial measurement unit also includes a case that covers the multiple gyroscopes. That is, the multiple gyroscopes are housed in an accommodation space formed by the printed circuit board and the case. The multiple gyroscopes are arranged so as to be exposed (bare) within the accommodation space. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-67625 Summary of the Invention [Problem to be solved by the invention]

[0005] When multiple gyroscopes (sensors of the same type) are placed inside a case, as in JP 2021-67625 A, the multiple sensors must be placed in different positions and orientations inside the case so as to correspond to the X-axis, Y-axis, and Z-axis, respectively. However, when multiple gyroscopes are placed exposed inside the case, as in JP 2021-67625 A, the position and distance of the outer surface of the sensor placed close to or far from the inner surface of the member that makes up the case will differ for each sensor. This poses a problem in that the impact of noise that enters the case will differ for each sensor.

[0006] The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide a sensor device that, when multiple sensors that detect the same type of physical quantity are arranged, can suppress the effects of noise on the multiple sensors from differing from one another. [Means for solving the problem]

[0007] In order to achieve the above object, a sensor device according to one aspect of the present invention includes a plurality of sensors that detect the same type of physical quantity acting in two or more different directions, a sensor arrangement member in which the plurality of sensors are respectively arranged and which includes a plurality of recesses that open in different directions, a shielding cover member that is provided to cover the sensor arrangement member and has at least one first opening and that shields electromagnetic noise, and a shielding cover member that is provided between the recesses and the shielding cover member and that is provided in the recess of the sensor arrangement member. Multiple Sensor Each of so that it is not exposed Multiple recess Each of of individually Cover, shield against electromagnetic noise Multiple and a shielding lid member.

[0008] As described above, a sensor device according to one aspect of the present invention includes a shielding lid member that is disposed between the recessed portion of the sensor placement member and the shielding cover member that covers the sensor placement member. The shielding lid member shields electromagnetic noise and covers the recessed portion so that the sensor placed in the recessed portion of the sensor placement member is not exposed. This allows the shielding lid member to block electromagnetic noise even if electromagnetic noise penetrates the interior of the shielding cover member. That is, the shielding cover member and the shielding lid member provide doubly shielded electromagnetic noise. In particular, when the recessed portion is formed by machining, the recessed portion completely covers the sensor except for the opening side of the recessed portion. As a result, even when multiple sensors are disposed in a case and in different positions and orientations on the sensor placement member, the shielding cover member and the shielding lid member provide doubly shielded electromagnetic noise. Therefore, when multiple sensors detecting the same type of physical quantity are disposed in different positions and orientations, the effects of noise on the multiple sensors can be prevented from differing from one another.

[0009] The sensor device according to the above aspect preferably further includes a control unit that receives information from the sensors, wherein at least one of the sensors includes a sensor body and connection wiring connecting the sensor body and the control unit, and at least one of the recesses of the sensor placement member and / or at least one of the shielding lid members is / are provided with a second opening for drawing out the connection wiring. With this configuration, even if the recess is covered by the shielding lid member, the connection wiring can be easily drawn out of the recess through the second opening.

[0010] In this case, the connection wiring of the sensor preferably includes a flexible cable. With this configuration, the connection wiring can be bent while being drawn out from the recess, and therefore the connection wiring can be easily drawn out from the recess.

[0011] The sensor device according to the above aspect preferably further includes a base member to which the sensor placement member is fixed, which closes the first opening of the shielding cover member and is provided to cover at least one recess, thereby shielding against electromagnetic noise. With this configuration, the base member to which the sensor placement member is fixed can also be used as a member that shields the sensor from electromagnetic noise, thereby reducing the number of parts and preventing the configuration of the sensor device from becoming complicated.

[0012] In this case, the projected area of ​​the base member, as viewed from a direction perpendicular to the plane where the base member and the shielding cover member face each other, is preferably larger than the opening area of ​​the first opening of the shielding cover member. With this configuration, the first opening of the shielding cover member is entirely covered by the base member, thereby effectively suppressing electromagnetic noise from entering the inside of the shielding cover member.

[0013] In the sensor device according to the above aspect, preferably, the sensors arranged in the plurality of recesses of the sensor arrangement member and measuring the same type of physical quantity all have the same design. With this configuration, correction control of the sensor device due to differences in sensor design is not required, which, combined with the effect of the present invention of reducing the influence of electromagnetic noise from outside the sensor device and homogenizing noise on the sensor, makes correction control of the sensor device easier.

[0014] In this case, preferably, the plurality of sensors include one or more sensor sets each consisting of a first-axis sensor, a second-axis sensor, and a third-axis sensor corresponding to a first axis, a second axis, and a third axis that are orthogonal to one another, and the sensor arrangement member includes a first surface extending orthogonal to the first axis and provided with a recess in which the first-axis sensor is to be arranged, a second surface extending orthogonal to the second axis and provided with a recess in which the second-axis sensor is to be arranged, and a third surface extending orthogonal to the third axis and provided with a recess in which the third-axis sensor is to be arranged. With this configuration, it is possible to prevent the effects of noise on the first axis sensor, the second axis sensor, and the third axis sensor from differing from one another.

[0015] In a sensor device provided with a set of a first axis sensor, a second axis sensor, and a third axis sensor, preferably, a plurality of sets of sensors are provided. With this configuration, even when a plurality of sets of sensors are provided, it is possible to prevent the effects of noise on the first axis sensor, the second axis sensor, and the third axis sensor from differing from one another.

[0016] In this case, preferably, the plurality of recesses in the sensor placement member where the first-axis sensors are disposed, the plurality of recesses in the second-axis sensors are disposed, and the plurality of recesses in the third-axis sensors are disposed have the same shape. With this configuration, the plurality of recesses have the same shape, which simplifies the manufacture of the sensor placement member compared to when the recesses have different shapes. Furthermore, because the recesses in the plurality of first-axis sensors (the plurality of second-axis sensors, the plurality of third-axis sensors) have the same shape, the distance between the inner surface of the recess and the outer surface of the sensor can be made uniform among the plurality of first-axis sensors (the plurality of second-axis sensors, the plurality of third-axis sensors), which further reduces the influence of noise from differing among the plurality of first-axis sensors (the plurality of second-axis sensors, the plurality of third-axis sensors).

[0017] In a sensor device in which the recesses have the same shape, the sensor arrangement member preferably has a rectangular parallelepiped shape, which makes it possible to easily arrange the first axis sensor, the second axis sensor, and the third axis sensor so as to correspond to the first axis, the second axis, and the third axis, which are orthogonal to each other, respectively.

[0018] In the sensor device according to the above aspect, the sensor preferably includes a gyroscope. Here, the gyroscope handles minute signals and is therefore susceptible to the effects of electromagnetic noise. Therefore, shielding the gyroscope from electromagnetic noise with the shielding cover member is particularly effective in ensuring normal operation of the gyroscope.

[0019] In the sensor device according to the above aspect, the shielding cover member preferably has a plate-like shape that is disposed along the surface of the sensor placement member. With this configuration, the shielding cover member protrudes a small height from the sensor placement member, thereby making it possible to further miniaturize the sensor device compared to when the shielding cover member is, for example, box-shaped.

[0020] In the sensor device according to the above aspect, the shielding lid member is preferably made of a non-magnetic material. With this configuration, the shielding lid member can more reliably block electromagnetic noise, thereby more reliably preventing abnormalities in the sensor covered by the shielding lid member due to electromagnetic noise. [Effects of the Invention]

[0021] According to the present invention, when a plurality of sensors that detect the same type of physical quantity are arranged as described above, it is possible to prevent the influence of noise on the plurality of sensors from differing from one another. [Brief explanation of the drawings]

[0022] [Figure 1] 1 is an exploded perspective view showing an entire sensor device according to an embodiment; [Figure 2] FIG. 2 is an exploded perspective view illustrating a sensor mount, a control board, and a power supply board according to one embodiment. [Figure 3] FIG. 2 is an exploded perspective view illustrating a sensor mount, a gyroscope, and a plate member according to one embodiment. [Figure 4] FIG. 1 is a perspective view of a sensor mount according to an embodiment, viewed obliquely from below. [Figure 5] 1 is a block diagram showing a configuration of a sensor device according to an embodiment. [Figure 6] 10 is a schematic cross-sectional view showing the relationship between connection wiring and a notch according to an embodiment. FIG. [Figure 7] 1 is a perspective view showing a configuration of a gyroscope according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0023] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0024] First, a sensor device 100 according to an embodiment will be described with reference to FIGS.

[0025] (Overall configuration of the sensor device) As shown in FIG. 1, the sensor device 100 includes a sensor mount 1, a gyroscope 2 (see FIG. 3), a base member 3, a cover member 4, a power supply board 5, a control board 6, and a plate member 7. The sensor mount 1 and the gyroscope 2 are examples of a "sensor placement member" and a "sensor" in the claims, respectively. The cover member 4 and the plate member 7 are examples of a "shielding cover member" and a "shielding lid member" in the claims, respectively. The control board 6 is an example of a "control unit" in the claims.

[0026] Two connectors 8 are attached to the sensor mount 1 to connect the power supply board 5 to an external power source (not shown) and to transmit and receive signals. The connectors 8 and the power supply board 5 are connected by a flexible cable 8a. The flexible cable 8a is provided in a bent state in the sensor device 100. Either an FPC (Flexible Printed Circuit) or an FFC (Flexible Flat Cable) can be used as the flexible cable 8a.

[0027] As shown in FIG. 2, the sensor mount 1 has a rectangular parallelepiped shape. The sensor mount 1 includes a pair of X-axis surfaces 1x extending perpendicular to the X-axis, a pair of Y-axis surfaces 1y extending perpendicular to the Y-axis, and a pair of Z-axis surfaces 1z extending perpendicular to the Z-axis. The X-axis surfaces 1x are an example of the "first surface" and "surface of the sensor placement member" in the claims. The Y-axis surfaces 1y are an example of the "second surface" and "surface of the sensor placement member" in the claims. The Z-axis surface 1z on the Z2 side of the pair of Z-axis surfaces 1z is an example of the "third surface" in the claims. The X-axis is an example of the "first axis" in the claims. The Y-axis is an example of the "second axis" in the claims. The Z-axis is an example of the "third axis" in the claims. In this embodiment, the Z-axis is an axis extending vertically.

[0028] The sensor mount 1 includes a plurality of Y-axis protrusions 1a provided on each of a pair of Y-axis surfaces 1y so as to protrude from the Y-axis surfaces 1y. A Y-axis control board 6y (described later) is connected (fastened) to the Y-axis protrusions 1a.

[0029] The sensor mount 1 also includes a plurality of Z-axis protrusions 1b provided on the Z1-side Z-axis surface 1z so as to protrude from the Z-axis surface 1z. A power supply board 5 is connected (fastened) to the Z-axis protrusions 1b. The sensor mount 1 also includes a plurality of Z-axis protrusions 1c provided on the Z1-side Z-axis surface 1z so as to protrude from the Z-axis surface 1z. The protrusion amount of the Z-axis protrusions 1c is smaller than the protrusion amount of the Z-axis protrusions 1b. A Z-axis control board 6z, which will be described later, is connected (fastened) to the Z-axis protrusions 1c.

[0030] The sensor mount 1 is made of metal. Specifically, the sensor mount 1 is made of a non-magnetic metal (for example, an aluminum alloy). That is, the sensor mount 1 shields against electromagnetic noise (magnetic flux).

[0031] The sensor mount 1 is fixed to the base member 3 by being fastened to the base member 3 with screws or the like (not shown).

[0032] As shown in FIG. 1 , the cover member 4 is provided to cover the sensor mount 1 and has at least one opening 4d. Specifically, the cover member 4 has a box shape that houses the sensor mount 1. The Z2 side of the cover member 4 is open. Specifically, the sensor mount 1 is housed in a housing space formed by the cover member 4 and the base member 3. That is, the cover member 4, the base member 3, and the connector 8 cover the sensor mount 1 so that it is not exposed. The opening 4d is an example of a "first opening" in the claims. Note that the sensor mount 1 may also be covered by the base member 3 and a cover member 4 that does not have the cutout portion 4c described below so that it is not exposed.

[0033] The cover member 4 is made of metal. Specifically, the cover member 4 is made of a non-magnetic metal (for example, an aluminum alloy). That is, the cover member 4 blocks electromagnetic noise (magnetic flux).

[0034] The cover member 4 is fastened to the base member 3. Specifically, a flange portion 4a that comes into surface contact with the base member 3 is provided at the end of the cover member 4 on the base member 3 side (Z2 side). The cover member 4 is fixed to the base member 3 by fastening the flange portion 4a to the base member 3 with screws 4b or the like. The cover member 4 also has two cutout portions 4c for exposing the two connectors 8. The flange portion 4a of the cover member 4 is in contact with the surface 3a of the base member 3 on the Z1 side. A gasket for blocking electromagnetic noise is provided at the interface between the connectors 8 and the cutout portions 4c of the cover member 4. The gasket is made of a conductive material.

[0035] The sensor device 100 also includes a pair of sensor sets 10. The sensor sets 10 are configured with a gyroscope 2, an acceleration sensor 9, a power supply circuit 5b, and a control board 6 (control circuit 6b). The pair of sensor sets 10 have the same configuration. The pair of sensor sets 10 are arranged side by side in the Y direction.

[0036] 2, the control board 6 includes an X-axis control board 6x, a Y-axis control board 6y, and a Z-axis control board 6z. Specifically, each of the pair of sensor groups 10 (see FIG. 1) includes a control board set consisting of the X-axis control board 6x, the Y-axis control board 6y, and the Z-axis control board 6z. In each control board set, the X-axis control board 6x and the Y-axis control board 6y, and the Y-axis control board 6y and the Z-axis control board 6z are connected by wiring 6a.

[0037] The pair of X-axis control boards 6x are attached to each of the pair of X-axis surfaces 1x of the sensor mount 1. The pair of Y-axis control boards 6y are attached to each of the pair of Y-axis surfaces 1y of the sensor mount 1. The Z-axis control board 6z of each of the pair of sensor sets 10 is attached to the Z-axis surface 1z on the Z1 side of the pair of Z-axis surfaces 1z of the sensor mount 1. The two Z-axis control boards 6z attached to the Z-axis surface 1z are arranged side by side in the Y direction.

[0038] The X1-side X-axis control board 6x is disposed on the Y1 side of the X1-side X-axis surface 1x, and the X2-side X-axis control board 6x is disposed on the Y2 side of the X2-side X-axis surface 1x.

[0039] Furthermore, a microcomputer, a power supply, etc. (not shown) are mounted on the control board 6. Furthermore, an acceleration sensor 9 is mounted on the control board 6. Note that the acceleration sensor 9 is shown schematically in Fig. 2.

[0040] The power supply board 5 is disposed so as to cover the two Z-axis control boards 6z from the Z1 side. The power supply board 5 is connected to the control board 6 (to each of the pair of Y-axis control boards 6y) by wiring 5a. Specifically, the power supply board 5 includes a power supply circuit 5b (see FIG. 5) that supplies power to a control circuit 6b (see FIG. 5) provided on the control board 6 via wiring 5a. The power supply circuit 5b also supplies power to the gyroscope 2 and the acceleration sensor 9. The power supply circuit 5b and the control circuit 6b are each provided in each of the pair of sensor sets 10. The control circuit 6b also receives information (detection values) from the gyroscope 2, the acceleration sensor 9, etc.

[0041] As shown in FIG. 3, multiple gyroscopes 2 are arranged in a sensor mount 1. The sensor mount 1 includes multiple recesses 11 in which multiple gyroscopes 2 are respectively arranged and which open in different directions. Specifically, the recesses 11 are provided on each of a pair of X-axis surfaces 1x, a pair of Y-axis surfaces 1y, and a Z-axis surface 1z on the Z2 side of the sensor mount 1. One recess 11 is provided on each of the pair of X-axis surfaces 1x. Also, one recess 11 is provided on each of the pair of Y-axis surfaces 1y. Also, as shown in FIG. 4, two recesses 11 are provided on the Z-axis surface 1z on the Z2 side. The two recesses 11 on the Z-axis surface 1z are arranged side by side in the Y direction (see FIG. 4).

[0042] Each of the plurality of gyroscopes 2 is housed in the recess 11. Specifically, the gyroscope 2 is housed in the recess 11 so as not to protrude from the open end 11a of the recess 11.

[0043] The gyroscope 2 is fixed to the recess 11 by fastening screws 2 a provided at the four corners of the gyroscope 2 into screw insertion holes 11 b provided in the recess 11 .

[0044] The gyroscope 2 includes multiple gyroscopes 2 that detect the same type of physical quantity acting in two or more different directions. The gyroscopes 2, each arranged in a multiple of recesses 11 of the sensor mount 1 and measuring the same type of physical quantity, are all sensors of the same design. Specifically, the gyroscopes 2 include an X-axis gyroscope 2x, a Y-axis gyroscope 2y, and a Z-axis gyroscope 2z, corresponding to the mutually orthogonal X-axis, Y-axis, and Z-axis, respectively. Two of each of the X-axis gyroscope 2x, Y-axis gyroscope 2y, and Z-axis gyroscope 2z are provided. That is, multiple (specifically, a pair) sensor sets 10, each consisting of the X-axis gyroscope 2x, Y-axis gyroscope 2y, and Z-axis gyroscope 2z, are provided. Note that one of the pair of sensor sets 10 is provided as a spare (redundant) for the other sensor set 10. The X-axis gyroscope 2x is an example of a "first axis sensor" in the claims. The Y-axis gyroscope 2y is an example of a "second axis sensor" in the claims, and the Z-axis gyroscope 2z is an example of a "third axis sensor" in the claims.

[0045] The pair of sensor sets 10 are arranged on a common sensor mount 1. That is, the sensor device 100 is provided with a single sensor mount 1 on which the pair of sensor sets 10 are commonly arranged.

[0046] In this embodiment, the pair of X-axis gyroscopes 2x, the pair of Y-axis gyroscopes 2y, and the pair of Z-axis gyroscopes 2z are arranged rotationally symmetrically with respect to an axis α that passes through the center of gravity of the sensor mount 1 and extends along the Z axis. As a result, the absolute values ​​of the detection values ​​of the pair of sensor groups 10 are the same. This eliminates the need for an interface board that performs calculations based on the detection values ​​of the pair of sensor groups 10. The sensor mount 1 has a rotationally symmetric shape with respect to the axis α. The term "rotationally symmetric" is a broad concept that includes not only perfect rotational symmetry but also rotational symmetry with a small error within a range in which the absolute values ​​of the detection values ​​of the pair of sensor groups 10 are the same. In other words, in a sensor mount 1 having a rotationally symmetric shape with respect to the axis α, the pair of X-axis gyroscopes 2x, the pair of Y-axis gyroscopes 2y, and the pair of Z-axis gyroscopes 2z may be arranged asymmetrically with respect to the axis α within a range in which the detection values ​​of the pair of sensor groups 10 are not affected.

[0047] Specifically, the pair of X-axis gyroscopes 2x are disposed at the same height in the Z direction. The pair of X-axis gyroscopes 2x are also disposed with their positions shifted from each other in the Y direction. Specifically, the X1-side X-axis gyroscope 2x is disposed in a recess 11 provided on the Y2 side of the X1-side X-axis plane 1x. The X2-side X-axis gyroscope 2x is also disposed in a recess 11 provided on the Y1 side of the X2-side X-axis plane 1x.

[0048] The pair of Y-axis gyroscopes 2y are disposed at the same height in the Z direction. The pair of Y-axis gyroscopes 2y are disposed with their positions shifted from each other in the X direction. Specifically, the Y1-side Y-axis gyroscope 2y is disposed in a recess 11 provided on the X1 side of the Y1-side Y-axis plane 1y. The Y2-side Y-axis gyroscope 2y is disposed in a recess 11 provided on the X2 side of the Y2-side Y-axis plane 1y.

[0049] The pair of Z-axis gyroscopes 2z are disposed at the same height in the Z direction. The pair of Z-axis gyroscopes 2z are disposed with their positions shifted from each other in the X direction. The Z-axis gyroscope 2z on the Y1 side is disposed in a recess 11 provided closer to the X1 side in the Z-axis plane 1z on the Z2 side. The Z-axis gyroscope 2z on the Y2 side is disposed in a recess 11 provided closer to the X2 side in the Z-axis plane 1z on the Z2 side.

[0050] In this embodiment, the recesses 11 in which the X-axis gyroscopes 2x of the sensor mount 1 are disposed have the same shape. The recesses 11 in which the Y-axis gyroscopes 2y are disposed have the same shape. The recesses 11 in which the Z-axis gyroscopes 2z are disposed have the same shape.

[0051] Since the pair of sensor sets 10 are arranged axially symmetrically (rotationally symmetrically) with respect to each other, the positive and negative detected values ​​of the pair of sensor sets 10 are reversed. The control board 6 (control circuit 6b) adjusts the detected values ​​of the pair of sensor sets 10 so that they are positive or negative. Furthermore, since the pair of sensor sets 10 are arranged axially symmetrically (rotationally symmetrically) with respect to each other, it is possible for the pair of control boards 6 to have a common configuration. In other words, the pair of control boards 6 have a common configuration in that they are made up of an X-axis control board 6x, a Y-axis control board 6y, and a Z-axis control board 6z.

[0052] In this embodiment, the pair of X-axis gyroscopes 2x are disposed in the recesses 11 of the pair of X-axis surfaces 1x that are disposed on opposite sides of each other. The pair of Y-axis gyroscopes 2y are disposed in the recesses 11 of the pair of Y-axis surfaces 1y that are disposed on opposite sides of each other. That is, one gyroscope 2 (2x, 2y) is disposed on each of the four side surfaces (1x, 1y) of the sensor mount 1.

[0053] The Z-axis gyroscopes 2z are disposed in two recesses 11 provided in the Z-axis surface 1z on the Z2 side. Note that no recesses 11 are provided in the Z-axis surface 1z on the Z1 side.

[0054] In this embodiment, the plate member 7 is provided between the recess 11 and the cover member 4, and is arranged to cover the recess 11 so that the gyroscope 2 arranged in the recess 11 of the sensor mount 1 is not exposed. Specifically, the plate member 7 is arranged to overlap the entire recess 11. Furthermore, the plate member 7 is fixed to the sensor mount 1 by inserting screws 7a provided at the four corners of the plate member 7 into screw insertion holes 11c provided on the outside of the recess 11.

[0055] Furthermore, the plate member 7 shields against electromagnetic noise. Specifically, the plate member 7 is made of metal. More specifically, the plate member 7 is made of a non-magnetic metal (for example, an aluminum alloy).

[0056] In this embodiment, the plate member 7 has a plate-like shape and is disposed along each of the pair of X-axis surfaces 1x or the pair of Y-axis surfaces 1y of the sensor mount 1. Specifically, the plate member 7 is formed in a square shape. The plate member 7 is attached to the Y2 side of the X1-side X-axis surface 1x, which is formed in a rectangular shape. The plate member 7 is also attached to the Y1 side of the X2-side X-axis surface 1x, which is formed in a rectangular shape.

[0057] In this embodiment, the plate member 7 includes an X-axis plate member 7x that covers the recess 11 provided in the X-axis surface 1x, and a Y-axis plate member 7y that covers the recess 11 provided in the Y-axis surface 1y. The X-axis plate member 7x is arranged side by side with the X-axis control board 6x in the Y direction without overlapping with the X-axis control board 6x (see FIG. 1). The Y-axis plate member 7y is arranged so as to overlap with the Y-axis control board 6y (see FIGS. 1 and 2). The X-axis plate member 7x and the Y-axis plate member 7y are each an example of a "shielding cover member" in the claims.

[0058] The Y-axis plate member 7y is provided with a plurality of notches 7b to avoid the Y-axis protrusion 1a of the sensor mount 1. It should be noted that the X-axis plate member 7x is not provided with any notches.

[0059] Furthermore, in this embodiment, the base member 3 is provided to fix the sensor mount 1, close the opening 4d of the cover member 4, and cover at least one recess 11, thereby shielding against electromagnetic noise. Specifically, the base member 3 (see FIG. 1) is provided to cover a recess 11 (see FIG. 4) provided in the Z-axis surface 1z on the Z2 side of the sensor mount 1. The base member 3 is provided to cover the entire surface of the Z2-side Z-axis surface 1z. In other words, the two recesses 11 in which the two Z-axis gyroscopes 2z are disposed are covered by a common (single) base member 3 on the Z-axis surface 1z.

[0060] In this embodiment, the projected area of ​​the base member 3 when viewed from a direction (Z direction) perpendicular to the plane where the base member 3 and the cover member 4 face each other is larger than the opening area of ​​the opening 4d of the cover member 4. In other words, the entire area of ​​the opening 4d of the cover member 4 is covered by the base member 3.

[0061] Furthermore, the base member 3 shields against electromagnetic noise. Specifically, the base member 3 is made of metal. More specifically, the base member 3 is formed of a non-magnetic metal (for example, an aluminum alloy). That is, the cover member 4, the plate member 7, the sensor mount 1, and the base member 3 are all formed of the same material.

[0062] In this embodiment, the thickness t1 (see FIG. 1) of the base member 3 is greater than the thickness t2 (see FIG. 1) of the cover member 4. Specifically, the thickness t1 of the base member 3 is at least twice (for example, three times) the thickness t2 of the cover member 4.

[0063] Furthermore, the thickness t1 of the base member 3 (see FIG. 1) is greater than the thickness t3 of the plate member 7 (see FIG. 3). Specifically, the thickness t1 of the base member 3 is at least twice (for example, three times) the thickness t3 of the plate member 7. No plate member that blocks electromagnetic noise is disposed between the base member 3 and the Z-axis gyroscope 2z. In other words, the base member 3 and the Z-axis gyroscope 2z are disposed so as to face each other without a plate member in between. By surrounding the Z-axis gyroscope 2z between the recess 11 and the base member 3, electromagnetic noise to the Z-axis gyroscope 2z is blocked.

[0064] Furthermore, at least one gyroscope 2 (specifically, all of the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z) includes a sensor body 2b and a connection wiring 2c that connects the sensor body 2b and the control board 6 (Y-axis control board 6y). The gyroscopes 2 and the control board 6 (Y-axis control board 6y) included in a common sensor set 10 are connected by the connection wiring 2c.

[0065] In this embodiment, at least one recess 11 (specifically, all recesses 11) of the sensor mount 1 is provided with a notch 11d for drawing out the connection wiring 2c. The notch 11d is provided at the opening end 11a of the recess 11. That is, the connection wiring 2c is drawn out through the notch 11d in a state in which the recess 11 is covered by the plate member 7 (base member 3) (see FIG. 6). The notch 11d is an example of a "second opening" in the claims. The notch 11d may be provided in the plate member 7, or may be provided in both the recess 11 and the plate member 7.

[0066] As shown in FIG. 6, the connection wiring 2c has a thickness t3 (for example, 0.8 mm). The notch 11d has a depth h (for example, 1 mm) that is greater than the thickness t3. The connection wiring 2c has a width W1. The notch 11d has a width W2 that is greater than the width W1. The multiple notches 11d have the same size.

[0067] In this embodiment, the connection wiring 2c of the gyroscope 2 includes a flexible cable. That is, the connection wiring 2c is flexible (flexible). The connection wiring 2c is formed of, for example, polyimide. Since the connection wiring 2c includes a flexible cable, even if vibration occurs, the flexible cable can absorb impact. As a result, it is possible to prevent the connection wiring 2c from being disconnected from the control board 6. Furthermore, since the connection wiring 2c includes a flexible cable, it is possible to bend the connection wiring 2c within the recess 11 at an angle that makes it easy to pull out the connection wiring 2c from the cutout portion 11d. As a result, even if the clearance between the cutout portion 11d and the connection wiring 2c is reduced, the connection wiring 2c can be easily pulled out from the cutout portion 11d. By reducing the clearance, it is possible to broaden the frequency range of electromagnetic noise shielded by each of the plate member 7 and the base member 3 (increase the upper limit on the high-frequency side).

[0068] In each of the pair of sensor sets 10, the connection wires 2c drawn out from the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z are connected to the Y-axis control board 6y in a bent (flexed) state.

[0069] As shown in FIG. 7, the gyroscope 2 includes a rigid-flexible substrate. A rigid-flexible substrate refers to a substrate including a rigid portion and a flexible portion. The sensor main body 2b includes two rigid portions 2d and a flexible portion 2e connecting the rigid portions 2d to each other. The two rigid portions 2d are arranged to face each other by bending the flexible portion 2e. The connection wiring 2c is led out from one of the two rigid portions 2d. The flexible portion 2e is made of the same material as the connection wiring 2c (i.e., polyimide).

[0070] The sensor main body 2b also includes a spacer member 2f provided between a pair of rigid portions 2d arranged to face each other. The spacer member 2f forms a predetermined space between the two rigid portions 2d. The spacer members 2f are provided at the four corners of the rectangular (square) rigid portion 2d. The spacer member 2f also has a cylindrical shape. The screw 2a is provided to penetrate the cylindrical spacer member 2f. The dotted line in FIG. 7 indicates the sensor head 2g. The sensor head 2g is, for example, an electromagnetic type that uses MEMS technology.

[0071] (Effects of this embodiment) In this embodiment, the following effects can be obtained.

[0072] In this embodiment, as described above, the sensor device 100 is configured to include a plate member 7 that is disposed between the recess 11 and the cover member 4, covers the recess 11, and shields against electromagnetic noise so that the gyroscope 2 disposed in the recess 11 of the sensor mount 1 is not exposed. This allows the plate member 7 to shield against electromagnetic noise even if it penetrates inside the cover member 4. That is, the cover member 4 and the plate member 7 provide doubly shielded electromagnetic noise. As a result, even when multiple gyroscopes 2 are disposed inside the cover member 4 and in different positions and orientations on the sensor mount 1, the cover member 4 and the base member 3 form an outer shield, and the plate member 7 and the recess 11 of the sensor mount 1 form an inner shield. In this way, electromagnetic noise is shielded doubly. For the Z-axis gyroscope 2z, the base member 3 and the sensor mount 1 are closely attached to each other, so that the recess 11 of the sensor mount 1 and the base member 3 form an inner shield. In particular, when recess 11 is formed by machining, recess 11 completely covers the gyroscope 2 except for the opening side of recess 11. As a result, when multiple gyroscopes 2 that detect the same type of physical quantity are arranged in different positions and orientations, it is possible to prevent the effects of noise on the multiple gyroscopes 2 from differing from one another.

[0073] Furthermore, because the sensor head 2g is an electromagnetic type that uses MEMS technology, the sensor head 2g includes a magnet. Therefore, when multiple gyroscopes 2 that detect the same type of physical quantity are arranged in different positions and orientations, the effect of suppressing the difference in the influence of noise on the multiple gyroscopes 2 is particularly large for an electromagnetic sensor head 2g that uses MEMS technology. Even if the sensor head 2g does not include a magnet and is a piezoelectric or electrostatic type, it can handle minute signals in the same way as the electromagnetic sensor head 2g, thereby achieving the effect of suppressing the difference in the influence of noise on the multiple gyroscopes 2.

[0074] In this embodiment, as described above, the sensor device 100 is configured so that the recess 11 of the sensor mount 1 is provided with a cutout 11d for drawing out the connection wiring 2c. This allows the connection wiring 2c to be easily drawn out of the recess 11 through the cutout 11d even when the recess 11 is covered by the plate member 7.

[0075] In this embodiment, as described above, the sensor device 100 is configured so that the connection wiring 2c of the gyroscope 2 includes a flexible cable. This allows the connection wiring 2c to be drawn out of the recess 11 while being bent, making it easy to draw the connection wiring 2c out of the recess 11.

[0076] In this embodiment, as described above, the sensor device 100 is configured to include a base member 3 to which the sensor mount 1 is fixed, which closes the opening 4d of the cover member 4 and which is provided to cover the recess 11 provided in the Z-axis surface 1z, thereby blocking electromagnetic noise. This allows the base member 3 to which the sensor mount 1 is fixed to also serve as a member that blocks electromagnetic noise from reaching the Z-axis gyroscope 2z, thereby reducing the number of parts and preventing the configuration of the sensor device 100 from becoming too complicated.

[0077] In this embodiment, as described above, the projected area of ​​the base member 3 when viewed from the direction (Z direction) perpendicular to the plane where the base member 3 and the cover member 4 face each other is larger than the opening area of ​​the opening 4d of the cover member 4. As a result, the opening 4d of the cover member 4 is entirely covered by the base member 3, so that electromagnetic noise entering the inside of the cover member 4 can be effectively suppressed.

[0078] In this embodiment, as described above, the gyroscopes 2 that are respectively disposed in the multiple recesses 11 of the sensor mount 1 and measure the same type of physical quantity are all sensors of the same design. This eliminates the need for correction control of the sensor device 100 due to differences in the design of the gyroscopes 2, reducing the influence of electromagnetic noise from outside the sensor device 100, and, combined with the effect of the present invention of homogenizing noise to the gyroscopes 2, makes correction control of the sensor device 100 easier.

[0079] In this embodiment, as described above, the sensor mount 1 includes an X-axis surface 1x that extends perpendicular to the X-axis and has a recess 11 in which the X-axis gyroscope 2x is disposed, a Y-axis surface 1y that extends perpendicular to the Y-axis and has a recess 11 in which the Y-axis gyroscope 2y is disposed, and a Z-axis surface 1z that extends perpendicular to the Z-axis and has a recess 11 in which the Z-axis gyroscope 2z is disposed. This makes it possible to prevent the effects of noise on the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z from differing from one another.

[0080] As described above, in this embodiment, a plurality of sensor sets 10 are provided. This makes it possible to prevent the influence of noise on the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z from differing from one another even when a plurality of sensor sets 10 are provided.

[0081] In this embodiment, as described above, the multiple recesses 11 in which the X-axis gyroscopes 2x of the sensor mount 1 are disposed have the same shape. The multiple recesses 11 in which the Y-axis gyroscopes 2y are disposed have the same shape. The multiple recesses 11 in which the Z-axis gyroscopes 2z are disposed have the same shape. As a result, since the multiple recesses 11 have the same shape, manufacturing of the sensor mount 1 can be simplified compared to when the recesses 11 have different shapes. Furthermore, since the recesses 11 in the multiple X-axis gyroscopes 2x (the multiple Y-axis gyroscopes 2y and the multiple Z-axis gyroscopes 2z) have the same shape, the distance between the inner surface of the recess 11 and the outer surface of the gyroscope 2 can be made uniform among the multiple X-axis gyroscopes 2x (the multiple Y-axis gyroscopes 2y and the multiple Z-axis gyroscopes 2z). This makes it possible to further suppress differences in the influence of noise among the multiple X-axis gyroscopes 2x (the multiple Y-axis gyroscopes 2y and the multiple Z-axis gyroscopes 2z).

[0082] In this embodiment, as described above, the sensor mount 1 has a rectangular parallelepiped shape, which makes it easy to arrange the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z so that they correspond to the mutually orthogonal X-axis, Y-axis, and Z-axis, respectively.

[0083] In this embodiment, as described above, the sensor device 100 is configured to include the gyroscope 2. Here, the gyroscope 2 handles minute signals and is therefore susceptible to the effects of electromagnetic noise. Therefore, shielding the electromagnetic noise with the plate member 7 is particularly effective in ensuring normal operation of the gyroscope 2.

[0084] In this embodiment, as described above, the sensor device 100 is configured so that the plate member 7 includes an X-axis plate member 7x that covers the recess 11 provided in the X-axis surface 1x, and a Y-axis plate member 7y that covers the recess 11 provided in the Y-axis surface 1y. As a result, even if electromagnetic noise enters the inside of the cover member 4, the electromagnetic noise can be blocked by each of the X-axis plate member 7x and the Y-axis plate member 7y, and therefore, abnormalities in the X-axis gyroscope 2x and the Y-axis gyroscope 2y due to electromagnetic noise can be further suppressed.

[0085] In this embodiment, as described above, the sensor device 100 is configured so that the multiple recesses 11 in which the multiple Z-axis gyroscopes 2z are arranged are covered on the Z-axis surface 1z by a common base member 3. This allows the number of parts to be reduced compared to when the multiple recesses 11 in which the multiple Z-axis gyroscopes 2z are arranged are covered with different members.

[0086] In this embodiment, as described above, the sensor device 100 is configured so that the X-axis gyroscope 2x is disposed in each recess 11 of a pair of X-axis surfaces 1x arranged opposite to each other, and the Y-axis gyroscope 2y is disposed in the recess 11 of a pair of Y-axis surfaces 1y arranged opposite to each other. This makes it possible to easily reduce the area of ​​the X-axis surface 1x (Y-axis surface 1y) compared to when the X-axis gyroscopes 2x are provided on a common X-axis surface 1x (and the Y-axis gyroscopes 2y are provided on a common Y-axis surface 1y). As a result, the sensor mount 1 (sensor device 100) can be easily miniaturized.

[0087] In this embodiment, as described above, the sensor device 100 is configured so that the two sensor sets 10 are arranged symmetrically with respect to the axis α that passes through the center of gravity of the sensor mount 1 and extends along the Z axis. This allows the absolute values ​​of the detection values ​​of the pair of sensor sets 10 to be the same, so that even if an abnormality occurs in one of the pair of sensor sets 10, the detection value of the other of the pair of sensor sets 10 can be used.

[0088] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims, not by the description of the above embodiments, and includes all modifications (variations) within the meaning and scope of the claims.

[0089] In the above embodiment, an example was shown in which the cover member 4, the sensor mount 1, and the base member 3 were each formed as a single unit, but the cover member 4, the sensor mount 1, and the base member 3 may each be assembled from multiple parts. However, with regard to the sensor mount 1, when the sensor set 10 is used as a "pair," it is preferable to use single-piece molding in order to align the multiple X-axis gyroscopes 2x (multiple Y-axis gyroscopes 2y, multiple Z-axis gyroscopes 2z) in the sensor set 10.

[0090] In the above embodiment, the cover member 4, the sensor mount 1, and the base member 3 are each separate components, but two or more of these components may be integrated. Furthermore, from the standpoint of manufacturing and assembly, the sensor device 100 is divided into the cover member 4, the sensor mount 1, and the base member 3, but the sensor device 100 may be divided into functional components based on a standpoint other than manufacturing and assembly.

[0091] For example, in the above embodiment, an example was shown in which the gyroscope 2 (sensor) was arranged in the recess 11 of the sensor mount 1 (sensor arrangement member), but the present invention is not limited to this. For example, a sensor other than the gyroscope 2 (for example, an acceleration sensor 9 or a temperature sensor) may be arranged in the recess 11. Also, multiple types of sensors may be arranged in the recess 11. Furthermore, recesses 11 accommodating sensors of the same type arranged close to each other may have a communicating structure.

[0092] In the above embodiment, the connection wiring 2c of the gyroscope 2 (sensor) is drawn out from the notch 11d (opening) of the recess 11, but the present invention is not limited to this. For example, the connection wiring 2c may be drawn out from a hole provided near the opening end 11a of the recess 11.

[0093] In the above embodiment, the connection wiring 2c includes a flexible cable, but the present invention is not limited to this. For example, the connection wiring 2c may be a cable (such as a bus bar) that does not have flexibility (flexibility).

[0094] In the above embodiment, the sensor mount 1 (sensor placement member), plate member 7 (shielding cover member), and base member 3 are each made of metal, but the present invention is not limited to this. For example, at least one of the sensor mount 1, plate member 7, and base member 3 may be made of non-magnetic ceramic or non-magnetic resin. From the perspective of heat dissipation, it is desirable that the sensor mount 1, plate member 7, and base member 3 be made of metal.

[0095] In the above embodiment, an example was shown in which gyroscopes 2 (sensors) were provided individually corresponding to the X axis (first axis), Y axis (second axis), and Z axis (third axis), but the present invention is not limited to this. A single gyroscope may be provided corresponding to all of the X axis, Y axis, and Z axis.

[0096] Furthermore, in the above embodiment, an example was shown in which no plate member for blocking electromagnetic noise was provided between the base member 3 and the Z-axis gyroscope 2z (third-axis sensor), but the present invention is not limited to this. A plate member for blocking electromagnetic noise may be provided between the base member 3 and the Z-axis gyroscope 2z (third-axis sensor). In this case, the base member 3 and the plate member between the base member 3 and the Z-axis gyroscope 2z are examples of a "shielding cover member" and a "shielding lid member," respectively.

[0097] In the above embodiment, the thickness t1 of the base member 3 is greater than the thickness t2 of the cover member 4 (shielding cover member), but the present invention is not limited to this. The thickness t1 of the base member 3 may be equal to or less than the thickness t2 of the cover member 4.

[0098] Furthermore, in the above embodiment, an example has been shown in which the base member 3 is directly attached to the opening 4d of the cover member 4, but the present invention is not limited to this. Another component may be placed in part or all of the opening 4d of the cover member 4, and the base member 3 may be attached to the opening 4d of the cover member 4 via the other component. Furthermore, airtightness is not required between the cover member 4 and the base member 3.

[0099] In addition, in the above embodiment, an example was shown in which the sensor mount 1 (sensor placement member) has a rectangular parallelepiped shape, but the present invention is not limited to this. The sensor mount 1 may have a shape other than a rectangular parallelepiped shape (for example, a cube shape).

[0100] In the above embodiment, an example has been shown in which the sensor device 100 is provided with two sensor sets 10, each of which includes an X-axis gyroscope 2x (first axis sensor), a Y-axis gyroscope 2y (second axis sensor), and a Z-axis gyroscope 2z (third axis sensor). However, the present invention is not limited to this. Only one sensor set 10 may be provided in the sensor device 100. Furthermore, three or more sensor sets 10 may be provided in the sensor device 100.

[0101] In the above embodiment, an example was shown in which a pair of Z-axis gyroscopes 2z (third-axis sensors) were arranged on a common Z-axis plane 1z (third surface) of the sensor mount 1 (sensor arrangement member), but the present invention is not limited to this. The pair of Z-axis gyroscopes 2z may be arranged on Z-axis planes 1z opposite each other. Furthermore, a pair of X-axis gyroscopes 2x (first-axis sensors) may be arranged on a common X-axis plane 1x (first surface). Furthermore, a pair of Y-axis gyroscopes 2y (second-axis sensors) may be arranged on a common Y-axis plane 1y (second surface).

[0102] In the above embodiment, an example has been shown in which the pair of sensor sets 10 are arranged rotationally symmetrically with respect to the axis α along the Z axis (third axis), but the present invention is not limited to this. Two sensor sets 10 may be arranged rotationally symmetrically with respect to an axis that passes through the center of gravity of the sensor mount 1 (sensor arrangement member) and is along the X axis (first axis) or the Y axis (second axis). A pair of sensor sets 10 may be arranged origin symmetrically with respect to the origin of the sensor mount 1. Furthermore, a pair of sensor sets 10 may be arranged side by side along the X axis direction, the Y axis direction, and the Z axis direction.

[0103] Furthermore, in the above embodiment, an example has been shown in which a plurality or a pair of sensor sets 10 share a common cover member 4, sensor mount 1, and base member 3, but the present invention is not limited to this. One or more of the cover member 4, sensor mount 1, and base member 3 may be individual components for each sensor set 10. For example, a plurality of sensor sets 10 may share the base member 3, and the sensor mount 1 and cover member 4 may be arranged separately for each sensor set 10.

[0104] In the above embodiment, the recess 11 of the sensor mount 1 is provided with the cutout 11d for leading out the connection wiring 2c, but the present invention is not limited to this. For example, instead of the cutout 11d of the recess 11, an opening (cutout) for leading out the connection wiring 2c may be provided in at least one or more plate members 7. Furthermore, in addition to the cutout 11d of the recess 11, an opening (cutout) for leading out the connection wiring 2c may be provided in at least one or more plate members 7. [Explanation of symbols]

[0105] 1. Sensor mount (sensor placement component) 1x X-axis plane (1st plane) (plane) 1y Y-axis surface (2nd surface) (surface) 1z Z-axis plane (3rd plane) 2 Gyroscope (sensor) 2b Sensor body 2c connection wiring 2x X-axis gyroscopes (first axis sensors) 2y Y-axis gyroscope (second axis sensor) 2z Z-axis gyroscope (third axis sensor) 3 Base material 4 Covering material (shielding covering material) 4d opening (1st opening) 6 Control board (control unit) 7 Plate member (shielding cover member) 7x X-axis plate components (shielding cover components) 7y Y-axis plate member (shielding cover member) 10 Sensor set 11 Recess 11d Notch (second opening) 100 Sensor Device t1 Thickness (thickness of base material) t2 Thickness (thickness of cover material) X axis (1st axis) Y axis (second axis) Z axis (3rd axis) α axis

Claims

1. a plurality of sensors that detect the same type of physical quantity acting in two or more different directions; a sensor arrangement member including a plurality of recesses in which the plurality of sensors are respectively arranged and which open in different directions from each other; a shielding cover member that is provided to cover the sensor placement member and that shields against electromagnetic noise and has at least one first opening; a plurality of shielding lid members that are provided between the recesses and the shielding cover member, and that individually cover each of the plurality of recesses so that each of the plurality of sensors arranged in the recesses of the sensor placement member is not exposed, thereby shielding the electromagnetic noise.

2. a control unit that receives information from the sensor; At least one of the sensors includes a sensor body and a connection wire connecting the sensor body and the control unit, The sensor device according to claim 1 , wherein at least one of the recesses of the sensor placement member and / or at least one of the shielding lid members is provided with a second opening for drawing out the connection wires.

3. The sensor device according to claim 2 , wherein the connection wiring of the sensor includes a flexible cable.

4. The sensor device according to claim 1 , further comprising a base member to which the sensor placement member is fixed, which blocks the first opening of the shielding cover member, and which is arranged to cover at least one of the recesses, thereby blocking the electromagnetic noise.

5. 5. The sensor device according to claim 4, wherein a projected area of ​​the base member, as viewed in a direction perpendicular to a plane where the base member and the shielding cover member face each other, is larger than an opening area of ​​the first opening of the shielding cover member.

6. The sensor device according to claim 1 , wherein the sensors arranged in the plurality of recesses of the sensor arrangement member and measuring the same type of physical quantity are all sensors of the same design.

7. the plurality of sensors include one or more sensor sets each including a first axis sensor, a second axis sensor, and a third axis sensor corresponding to a first axis, a second axis, and a third axis, each of which is orthogonal to one another; 7. The sensor device of claim 6, wherein the sensor placement member includes a first surface extending perpendicular to the first axis and having the recess in which the first axis sensor is placed, a second surface extending perpendicular to the second axis and having the recess in which the second axis sensor is placed, and a third surface extending perpendicular to the third axis and having the recess in which the third axis sensor is placed.

8. The sensor device according to claim 7 , wherein a plurality of sensor sets are provided.

9. The sensor device described in claim 8, wherein the plurality of recesses in which the first axis sensors of the sensor placement member are placed, the plurality of recesses in which the second axis sensors are placed, and the plurality of recesses in which the third axis sensors are placed have the same shape.

10. The sensor device according to claim 9 , wherein the sensor placement member has a rectangular parallelepiped shape.

11. The sensor device of claim 10 , wherein the first axis sensor, the second axis sensor, and the third axis sensor included in the sensor set each include a gyroscope.

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