Fluororesin coated materials

Abstract

This fluororesin coating member has a base material and a coating layer for coating at least a part of the base material. The coating layer is formed from a fluororesin mixture including at least a first fluororesin and a second fluororesin. The melting point of the first fluororesin is higher than the melting point of the second fluororesin. The surface of the coating layer has a sea-island structure, and the island phase of the sea-island structure comprises the first fluororesin as a main component.

Description

[Technical Field]

[0001] The present invention relates to a fluororesin-coated member, and more particularly to a member having a coating layer made of a fluororesin that exhibits water-repellent properties. [Background technology]

[0002] It is known that the surface of fluororesin has a water-repellent function. For example, Patent Document 1 discloses a polytetrafluoroethylene aqueous cleaning jig that has been treated with fluorine gas. It discloses that the surface of the polytetrafluoroethylene aqueous cleaning jig is treated with fluorine gas, resulting in a reduced surface energy and excellent water-shedding properties (see Patent Document 1 [Abstract],

[0013] , etc.). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 7-142433 Summary of the Invention [Problem to be solved by the invention]

[0004] Patent Document 1 discloses that the water-shedding properties of a jig are improved by fluorine gas treatment compared to a jig made of untreated polytetrafluoroethylene, and it is therefore recognized that the water-repellent function of the jig is improved to some extent by fluorine gas treatment. However, it is necessary to separately treat the molded product with fluorine gas, which is relatively difficult to handle, and this may complicate the manufacturing process. On the other hand, in recent years, there has been a demand for surfaces with even more water-repellent properties. The strength of water-repellent properties is usually evaluated by the contact angle between the surface of a fluororesin and water. The larger the contact angle, the greater the hydrophobicity, so a surface that exhibits a large contact angle with water indicates a higher water-repellent property. The contact angle between water and the surface of a fluororesin is generally 80 to 115°, so it is necessary to further increase this contact angle.

[0005] An object of the present invention is to provide a fluororesin-coated member having excellent water-repellent properties that can be easily produced without the need for a special treatment step to improve water-repellent properties. Because the fluororesin-coated member has excellent water-repellent properties, for example, it can have improved corrosion resistance when in contact with corrosive chemicals and improved thermal insulation when in contact with high-temperature chemicals. [Means for solving the problem]

[0006] As a result of extensive research, the present inventors have discovered that by baking a member coated with a mixture of two fluororesins with different melting points at a temperature between the melting points of the two fluororesins, a fluororesin-coated member with an even larger contact angle with water can be obtained, and that this member has excellent water-repellent properties, which led to the completion of the present invention.

[0007] The present specification includes the following embodiments. 1. A fluororesin-coated member comprising a substrate and a coating layer covering at least a portion of the substrate, wherein the coating layer is formed from a fluororesin mixture containing at least a first fluororesin and a second fluororesin, the first fluororesin having a higher melting point than the second fluororesin, the surface of the coating layer having a sea-island structure, and the island phases of the sea-island structure being composed primarily of the first fluororesin. 2. A fluororesin-coated member having a substrate and a coating layer that coats at least a portion of the substrate, wherein the coating layer is formed from a fluororesin mixture containing at least a first fluororesin and a second fluororesin, and the contact angle of a water droplet on the surface of the coating layer is 120° or greater. 3. A method for producing a fluororesin-coated member, comprising: a mixing step of mixing at least a first fluororesin and a second fluororesin to obtain a fluororesin mixture; an application step of applying the fluororesin mixture to at least a portion of a substrate to obtain a fluororesin-coated member; and a firing step of firing the fluororesin-coated member to obtain a fluororesin-coated member, wherein the firing step involves firing at a temperature between the melting points of the first fluororesin and the second fluororesin. [Effects of the Invention]

[0008] The fluororesin-coated member of the embodiment of the present invention has excellent water-repellent properties simply by undergoing a fluororesin coating process. Because the fluororesin-coated member has excellent water-repellent properties, for example, when it comes into contact with a corrosive chemical solution, it can have improved corrosion resistance and when it comes into contact with a high-temperature chemical solution, it can have improved heat insulation. [Brief explanation of the drawings]

[0009] [Figure 1A] FIG. 1A shows an SEM image (surface shape) of the coating layer of Example 4. [Figure 1B] FIG. 1B shows an SEM image (elemental mapping of chlorine) of the coating layer of Example 4. [Figure 2A] FIG. 2A shows an SEM image (surface shape) of the coating layer of Example 6. [Figure 2B] FIG. 2B shows an SEM image (elemental mapping of chlorine) of the coating layer of Example 6. [Figure 3] FIG. 3 shows the temperature changes when the fluororesin-coated member of Example 11, the fluororesin-coated member of Comparative Example 4, and the member of Comparative Example 5 (the substrate (A2) itself) were subjected to a thermal history (heat cycle) of hot water (80°C) and water (20°C). [Figure 4] 4 shows a photograph of the fluororesin-coated member of Example 11 immersed in hot water (80° C.), showing that an air layer is formed on the surface of the coating layer. DETAILED DESCRIPTION OF THE INVENTION

[0010] A fluororesin-coated member according to an embodiment of the present invention has a substrate and a coating layer that coats at least a portion of the substrate, and the coating layer is formed from a fluororesin mixture that includes at least a first fluororesin (hereinafter referred to as the "first fluororesin") and a second fluororesin (hereinafter referred to as the "second fluororesin").

[0011] In the embodiment of the present invention, the "substrate" is not particularly limited as long as it is a substrate that can support a coating layer, preferably has excellent heat resistance and chemical resistance, and can provide the fluororesin-coated member of the embodiment of the present invention. Examples of such substrates include metals such as aluminum, stainless steel, iron, and other metals, or alloys of several of these metals; inorganic compounds such as quartz glass and ceramics; and plastics such as aromatic polyetherketones such as polyetheretherketone (PEEK) and polyetherketone (PEK), polyethersulfone (PES), polyimide resins, and polyamideimide resins. Metals and inorganic compounds are preferred. Metals and inorganic compounds offer high heat resistance and durability, and are easily kept clean, making them suitable for use as components in precision equipment manufacturing equipment, such as semiconductor manufacturing equipment. The shape and size of the substrate are not particularly limited as long as they can produce the fluororesin-coated member of an embodiment of the present invention. Examples include plate-like, rod-like, cylindrical, conical, and comb-like shapes. The shape and size can be selected appropriately depending on the intended use of the fluororesin-coated member.

[0012] In an embodiment of the present invention, a coating layer covers at least a portion of the substrate, and the coating layer is formed from a fluororesin mixture containing at least a first fluororesin and a second fluororesin.

[0013] In the embodiments of the present invention, the "first fluororesin" and the "second fluororesin" are resins that are normally understood as fluororesins, and the melting point of the "first fluororesin" is higher than the melting point of the "second fluororesin," and is not particularly limited as long as a fluororesin-coated member of the embodiments of the present invention can be obtained. Note that "first" and "second" are used for convenience of explanation and are not limited to these expressions, and mean that one of the fluororesins has a higher melting point than the other (that the melting points of the two types of fluororesins are different, or that the melting point of the first fluororesin and the melting point of the second fluororesin are different).

[0014] Examples of fluororesins constituting the first fluororesin and the second fluororesin include polytetrafluoroethylene (PTFE) (melting point: about 327°C), modified polytetrafluoroethylene (modified PTFE) (melting point: about 327°C), tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA) (melting point: about 310°C), tetrafluoroethylene / hexafluoropropylene copolymer (FEP) (melting point: about 260 to 275°C), ethylene / tetrafluoroethylene copolymer (ETFE) (melting point: about 270°C), ethylene / chlorotrifluoroethylene copolymer (ECTFE) (melting point: about 245°C), polychlorotrifluoroethylene (PCTFE) (melting point: about 210 to 220°C), polyvinylidene fluoride (PVDF) (melting point: about 156 to 178°C), and polyvinyl fluoride (PVF) (melting point: about 203°C).

[0015] In an embodiment of the present invention, the fluororesin has a particulate form and preferably has an average particle diameter of 500 μm or less, more preferably an average particle diameter of 1 to 250 μm, even more preferably an average particle diameter of 3 to 50 μm, and particularly preferably an average particle diameter of 5 to 25 μm.

[0016] In this specification, the average particle diameter of particles refers to the average particle diameter D obtained by measuring the particle size distribution using a laser diffraction scattering particle size distribution analyzer ("MT3300II" manufactured by Nikkiso). 50 (Median diameter, which means the particle diameter at 50% of the cumulative value in the particle size distribution determined by the laser diffraction scattering method).

[0017] The fluororesin may be a commercially available product that can be used as a fluororesin coating paint.

[0018] The difference between the melting point of the first fluororesin and the melting point of the second fluororesin is preferably 10°C or more, more preferably 12 to 150°C, and even more preferably 15 to 120°C. When the difference between the melting points of the first fluororesin and the second fluororesin is 10° C. or more, temperature control in the baking step becomes easy, which has the advantageous effect of improving productivity.

[0019] The coating layer of the fluororesin-coated member of the embodiment of the present invention may be a mixture of the first fluororesin and the second fluororesin, and the mixing ratio is not particularly limited, but it is preferable that the first fluororesin:second fluororesin be mixed in a mass ratio of 1:9 to 9:1 (first fluororesin:second fluororesin), and more preferably in a mass ratio of 2:8 to 9:1. If the coating layer of the fluororesin-coated member is a mixture of the first fluororesin and the second fluororesin, the water-repellent function (magnitude of contact angle) is advantageously improved compared to the water-repellent function (magnitude of contact angle) of each resin alone.

[0020] The surface of the coating layer of the fluororesin-coated member according to the embodiment of the present invention preferably has a phase-separated structure. In the present disclosure, a phase-separated structure refers to a structure in which a first phase mainly composed of the first fluororesin and a second phase mainly composed of the second fluororesin are present without being completely melted and mixed together. Either the first phase or the second phase may be melted to form a smooth phase, but it is preferable that at least one of them has a granular resin shape. The first phase preferably contains 50% by mass or more of the first fluororesin, more preferably 60% by mass or more, even more preferably 70% by mass or more, and even more preferably 80% by mass or more. The second phase preferably contains 50% by mass or more of the second fluororesin, more preferably 60% by mass or more, even more preferably 70% by mass or more, and even more preferably 80% by mass or more.

[0021] The surface of the coating layer of the fluororesin-coated member according to an embodiment of the present invention preferably has a sea-island structure. In the present disclosure, the term "sea-island structure" refers to a structure consisting of two types of parts: a smooth, roughly flat part (referred to as "sea") and a part with clearly uneven undulations (referred to as "islands"). The unevenness of the island part may be the overlapping of particles. The abundance ratio of the sea part to the island part does not necessarily need to be such that the sea part is more abundant, and the island part does not necessarily need to be surrounded by the sea part, or the island part may surround the sea part. The smooth, flat sea part may, for example, be able to melt and adhere the island part to the substrate, thereby fixing the coating layer to the substrate.

[0022] The island phases (island portions) of the sea-island structure are preferably composed mainly of the first fluororesin. The island phase preferably contains the first fluororesin in an amount of 50% by mass or more, more preferably 60% by mass or more, even more preferably 70% by mass or more, and even more preferably 80% by mass or more.

[0023] The sea phase (sea portion) of the sea-island structure is preferably composed mainly of the second fluororesin. The sea phase preferably contains the second fluororesin in an amount of 50% by mass or more, more preferably 60% by mass or more, even more preferably 70% by mass or more, and even more preferably 80% by mass or more.

[0024] The combination of the first fluororesin and the second fluororesin is not particularly limited as long as it is a combination of the above-mentioned fluororesins having different melting points, and examples thereof include a combination of polytetrafluoroethylene (PTFE) and tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), a combination of PTFE and polychlorotrifluoroethylene (PCTFE), a combination of PTFE and tetrafluoroethylene / hexafluoropropylene copolymer (FEP), a combination of PTFE and ethylene / tetrafluoroethylene copolymer (ETFE), a combination of modified polytetrafluoroethylene (modified PTFE) and PFA, a combination of modified PTFE and PCTFE, a combination of modified PTFE and FEP, a combination of modified PTFE and ETFE, a combination of PFA and PCTFE, a combination of PFA and FEP, and a combination of PFA and ETFE. The combination of the first fluororesin and the second fluororesin is preferably a combination of PTFE and PFA, a combination of PTFE and PTCFE, a combination of modified PTFE and PFA, a combination of modified PTFE and PTCFE, or a combination of PFA and PCTFE.

[0025] The contact angle of a water droplet on the surface of the coating layer of the fluororesin-coated member according to an embodiment of the present invention is preferably 120° or more, more preferably 120° to 170°, even more preferably 135° to 170°, and even more preferably 150° to 170°. When the contact angle of a water droplet on the surface of the coating layer is 120° or more, the improvement in the water repellency has the advantageous effect of reducing the duration of contact of a liquid with the coating surface.

[0026] Therefore, the fluororesin-coated member according to the embodiment of the present invention has excellent heat insulating properties and solvent resistance in applications where the surface of the coating layer comes into contact with a solvent (e.g., an aqueous solvent). This is thought to be because the coating layer has low wettability with a solvent (or medium) such as water, which reduces contact with the solvent, resulting in excellent heat insulating properties and solvent resistance.

[0027] In an embodiment of the present invention, a mixing step of mixing at least a first fluororesin and a second fluororesin to obtain a fluororesin mixture (or dispersion); a coating step of applying the fluororesin mixture to at least a part of a substrate to obtain a fluororesin-coated member; a baking step of baking the fluororesin-coated member to obtain a fluororesin-coated member, In the baking step, baking is performed at a temperature between the melting point of the first fluororesin and the melting point of the second fluororesin.

[0028] The method for producing a fluororesin-coated member according to an embodiment of the present invention includes a mixing step of mixing at least a first fluororesin and a second fluororesin to obtain a fluororesin mixture (or dispersion). For the first fluororesin and the second fluororesin, reference can be made to the above descriptions of the first fluororesin and the second fluororesin. In the mixing step, the mixing method and mixing conditions (mixing temperature, mixing speed, dispersion solvent, mixing concentration) can be appropriately selected as long as the fluororesin-coated member of the embodiment of the present invention can be produced.

[0029] The fluororesin mixture may be a mixture of the first fluororesin and the second fluororesin, and the mixing ratio is not particularly limited; however, it is preferable that the first fluororesin:second fluororesin ratio be 1:9 to 9:1 by mass, and more preferably 2:8 to 9:1 by mass. If the coating layer of the fluororesin-coated member is a mixture of the first fluororesin and the second fluororesin, the water-repellent function (magnitude of contact angle) is advantageously improved compared to the water-repellent function (magnitude of contact angle) of each resin alone.

[0030] The difference in melting point between the first fluororesin and the second fluororesin in the fluororesin mixture is preferably 10°C or more, more preferably 12 to 150°C, and even more preferably 15 to 120°C. When the difference between the melting points of the first fluororesin and the second fluororesin is 10° C. or more, temperature control in the baking step becomes easy, which has the advantageous effect of improving productivity.

[0031] A method for producing a fluororesin-coated member according to an embodiment of the present invention includes a coating step of applying the fluororesin mixture to at least a part of a substrate to obtain a fluororesin-coated member. For the substrate, reference can be made to the above description of the substrate. In the coating step, the coating method and conditions can be appropriately selected from commonly known conditions for powder coating, spray coating, and the like.

[0032] The fluororesin-coated member of an embodiment of the present invention includes a baking step of baking the fluororesin-coated member to obtain the fluororesin-coated member, and the baking step includes baking at a temperature between the melting point of the first fluororesin and the melting point of the second fluororesin. In the firing step, the firing method and firing conditions can be appropriately selected from commonly known conditions.

[0033] The baking temperature is a temperature between the melting points of the first fluororesin and the second fluororesin. It is speculated that baking within this temperature range melts the second fluororesin but not the first fluororesin, and therefore unevenness can be preferably formed on the surface of the coating layer despite the formation of the coating layer. Since appropriate irregularities are formed on the surface of the coating layer, the fluororesin-coated member of the embodiment of the present invention can be easily produced without the need for a special treatment step to improve water repellency, and yet it exhibits excellent water repellency and also excellent heat insulation, solvent resistance, etc. It is believed that the member of the embodiment of the present invention exhibits excellent effects for the reasons described above, but the present invention is not limited by these reasons.

[0034] The fluororesin-coated member of the embodiment of the present invention can be suitably used in applications where fluororesin-coated members have traditionally been used, and further, the fluororesin-coated member of the embodiment of the present invention can be suitably used in applications where heat resistance and solvent resistance are required. The fluororesin-coated member according to the embodiment of the present invention can be suitably used in, for example, semiconductor manufacturing equipment, liquid crystal manufacturing equipment, solar cell manufacturing equipment, pharmaceutical manufacturing equipment, and chemical manufacturing equipment. [Example]

[0035] EXAMPLES Hereinafter, the present invention will be specifically and in detail explained using examples and comparative examples, but these examples are merely one embodiment of the present invention, and the present invention is not limited to these examples in any way.

[0036] The components used in this example are listed below. (A) Base material (A1) 2mm thick aluminum plate (100mm x 50mm) (also called "(A1) aluminum base material") (A2) A cylindrical SUS304 (Φ10mm x 100mm) with a hole (Φ2mm x 50mm) provided in the center of one end on the axial side (also called "(A2) SUS base material")

[0037] (B) Fluorine resin (B1) Tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (NEOFLON (registered trademark) PFA ACX-34 (trade name) manufactured by Daikin Industries, Ltd.), melting point 310°C, particle diameter D 50 25 μm (also called "(B1) PFA") (B2) Polychlorotrifluoroethylene (NEOFLON (registered trademark) PCTFE M-300H (trade name) manufactured by Daikin Industries, Ltd.), melting point 220°C, particle diameter D 50 9μm (also known as "(B2)PCTFE") (B3) Polytetrafluoroethylene (Polyflon (registered trademark) PTFE Lubron (registered trademark) L-5 (trade name) manufactured by Daikin Industries, Ltd.), melting point 327°C, particle diameter D 50 6μm (also known as "(B3)PTFE")

[0038] The average particle size (D 50 ) measurement Fluorine resin average particle diameter (D 50 ) was measured using a laser diffraction scattering particle size analyzer (Nikkiso "MT3300II") to determine the particle size distribution and the average particle diameter (D 50 ) (median diameter, which means the particle diameter at 50% of the cumulative value in the particle size distribution determined by the laser diffraction scattering method) was obtained. 50 ) was as described above.

[0039] Production of fluororesin-coated member of Example 1 (B1) PFA and (B2) PCTFE were added to ethylene glycol monobutyl ether in a mass ratio of B1 / B2 = 90 / 10 and mixed to prepare a dispersion. The dispersion was spray-coated onto (A1) aluminum substrate to obtain a coating layer of fluororesin powder on the (A1) aluminum substrate. This coating layer was baked in an oven at 280°C for 60 minutes to obtain the fluororesin-coated member of Example 1. Because the coating layer had a sea-island structure, its thickness was not uniform, but was in the range of approximately 25 to 50 μm.

[0040] Production of fluororesin-coated members of Examples 2 to 9 Fluororesin-coated members of Examples 2 to 9 were obtained in the same manner as in Example 1, except that the fluororesins shown in Table 1 were used in the mass ratios shown in Table 1.

[0041] Production of fluororesin-coated member of Example 10 The fluororesin-coated member of Example 10 was produced using the same method as that described in Example 5, except that (B3) PTFE was used instead of (B1) PFA and the baking temperature was changed from 280°C to 320°C.

[0042] Manufacture of fluororesin coated member of Comparative Example 1 (B2) A fluororesin-coated member of Comparative Example 1 was produced in the same manner as in Example 1, except that PCTFE was not used and the baking temperature was changed from 280°C to 320°C.

[0043] Manufacture of fluororesin-coated member of Comparative Example 2 (B1) A fluororesin-coated member of Comparative Example 2 was produced in the same manner as in Example 1, except that PFA was not used.

[0044] Manufacture of fluororesin coated member of Comparative Example 3 A fluororesin-coated member of Comparative Example 3 was produced in the same manner as in Example 5, except that the baking temperature was changed from 280°C to 320°C.

[0045] Contact angle measurement method Measurements were carried out in accordance with JIS R 3257 using a contact angle meter "FACE CA-DT" (product name) manufactured by Kyowa Interface Science Co., Ltd. Specifically, a fixed amount of droplet (pure water) was dropped onto the horizontally placed sample surface using a dispenser, and the angle between the sample surface and a line connecting one of the end points of the sample surface where the droplet was in contact with the apex of the droplet was determined. This was doubled to calculate the contact angle θ (θ / 2 method).

[0046] Surface shape observation and elemental analysis of the coating layer For the fluororesin-coated members of Examples 4 and 6 described above, observation of the surface shape of the coating layer and elemental analysis were performed using a scanning electron microscope (SEM) "FrexSEM 1000" (product name) equipped with an energy dispersive X-ray (EDX) analyzer manufactured by Hitachi High-Technologies Corporation. After observing the surface shape at an accelerating voltage of 15.0 kV and 500x magnification, elemental mapping of chlorine was performed. An image of the surface shape of the coating layer of Example 4 is shown in Figure 1A, and an image of the elemental mapping of chlorine is shown in Figure 1B. An image of the surface shape of the coating layer of Example 6 is shown in Figure 2A, and an image of the elemental mapping of chlorine is shown in Figure 2B.

[0047] Thermal insulation (A2) SUS substrate was used as the substrate. The coating layer (film thickness 150 μm) of Example 5 was applied to the entire surface of the substrate to obtain a fluororesin-coated member of Example 11. The coating layer (film thickness 150 μm) of Comparative Example 2 was applied to the entire surface of the substrate, to obtain a fluororesin-coated member of Comparative Example 4. The substrate itself was used as the member of Comparative Example 5.

[0048] A thermocouple was inserted into a hole provided at one end of the axial direction of the (A2) SUS substrate of each member, and the other end was immersed 80 mm in hot water (80°C) for 15 seconds. The other end was then immersed 80 mm in cold water (20°C) for 15 seconds. This heat cycle was repeated five times. The results are shown in Figure 3. The fluororesin-coated member of Example 11 had a low temperature increase rate and a low temperature decrease rate, which indicates that it has a high heat insulating effect. Furthermore, the temperature change of the member was small, which indicates that the thermal stress on the fluororesin-coated member was also small. A photograph of the fluororesin-coated member of Example 11 immersed in hot water (80°C) is shown in Figure 4. It was observed that an air layer was formed on the surface of the coating layer. The formation of this air layer is also expected to contribute to the heat insulation effect.

[0049] [Table 1]

[0050] [Table 2]

[0051] The fluororesin-coated members of Examples 1 to 11 each comprise: (i) a substrate and a coating layer covering at least a portion of the substrate, the coating layer being formed from a fluororesin mixture containing at least a first fluororesin and a second fluororesin, the melting point of the first fluororesin being higher than that of the second fluororesin, the surface of the coating layer having a sea-island structure, the island phases of the sea-island structure being composed primarily of the first fluororesin; or (ii) a substrate and a coating layer covering at least a portion of the substrate, the coating layer being formed from a fluororesin mixture containing at least the first fluororesin and a second fluororesin, the surface of the coating layer having a water droplet contact angle of 120° or greater. Thus, the fluororesin-coated members of Examples 1 to 11 have excellent water repellency and also excellent heat insulation.

[0052] In contrast, the fluororesin-coated members of Comparative Examples 1 to 4 do not satisfy the above-mentioned (i) or (ii), and therefore do not necessarily have sufficient water repellency or heat insulation. [Industrial Applicability]

[0053] The fluororesin-coated member of the embodiment of the present invention has excellent water-repellent properties simply by undergoing a fluororesin coating process. Because the fluororesin-coated member has excellent water-repellent properties, for example, when it comes into contact with a corrosive chemical solution, it can have improved corrosion resistance and when it comes into contact with a high-temperature chemical solution, it can have improved heat insulation.

[0054] Related Applications This application claims priority under Article 4 of the Paris Convention from application number 2019-221571 filed in Japan on December 6, 2019, the contents of which are incorporated herein by reference.

Claims

1. A substrate and a coating layer that covers at least a portion of the substrate, the coating layer is formed of a fluororesin mixture containing at least a first fluororesin and a second fluororesin, the first fluororesin is a tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, the second fluororesin is polychlorotrifluoroethylene, the contact angle of a water droplet on the surface of the coating layer is 135° or more; the surface of the coating layer has a sea-island structure, The island phase of the sea-island structure is composed mainly of the first fluororesin. Fluororesin coated parts.

2. 2. The fluororesin-coated member according to claim 1, wherein a mixing ratio of the first fluororesin to the second fluororesin in the fluororesin mixture is 1:9 to 9:

1.

3. 3. A semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, a solar cell manufacturing apparatus, a pharmaceutical manufacturing apparatus, or a chemical manufacturing apparatus, comprising the fluororesin-coated member according to claim 1 or 2.

4. A method for producing a fluororesin mixture, comprising: a mixing step of mixing at least a first fluororesin and a second fluororesin to obtain a fluororesin mixture; a coating step of applying the fluororesin mixture to at least a part of a substrate to obtain a fluororesin-coated member; a baking step of baking the fluororesin-coated member to obtain a fluororesin-coated member, In the baking step, baking is performed at a temperature between the melting point of the first fluororesin and the melting point of the second fluororesin, the first fluororesin is a tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, The second fluororesin is polychlorotrifluoroethylene. A method for producing the fluororesin-coated member according to claim 1.

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