Composite metal foil manufacturing method, equipment and system

Abstract

According to the present invention, a method, equipment, and system for manufacturing a composite metal foil are provided. The equipment includes a primary double-sided coating module and a secondary double-sided coating module that are spaced apart from each other. The primary double-sided coating module includes a first deposition column and a second deposition column that are opposite each other, and a winding roller, a first evaporation source, a first group of transition rollers, a second evaporation source, and a second group of transition rollers that are sequentially provided from bottom to top on the opposing surfaces of the first deposition column and the second deposition column. The secondary double-sided coating module includes a third deposition column and a first group of cooling rollers, a third evaporation source, a second group of cooling rollers, a fourth evaporation source, and a take-up roller that are sequentially provided from top to bottom on the third deposition column. The primary double-sided coating can be achieved by providing two evaporation sources and their corresponding roller systems from bottom to top on the opposing surfaces of the first and second deposition columns, and the secondary double-sided coating can be achieved by providing two evaporation sources and their corresponding roller systems from top to bottom on the third deposition column, thereby improving the space utilization rate and thin film production efficiency.

Description

[Technical Field]

[0001] The present invention relates to the technical field of thin film deposition, and in particular to a method, equipment and system for producing composite metal foils. [Background technology]

[0002] Vapor deposition refers to placing the material to be vaporized in a heat-resistant container such as a crucible, heating it to melt it, and vaporizing the material to be vaporized so that it is deposited on a thin film that passes through.

[0003] Chinese Patent Publication No. CN106086808A, entitled "Reel-to-Reel Vacuum Coating Machine and Coating Method," discloses a reel-to-reel vacuum coating machine, which includes a vacuum housing, a substrate unwinding shaft and a substrate winding shaft provided at the upper left and right ends of the housing, a plurality of cooling rollers provided below and between the substrate unwinding shaft and the substrate winding shaft, and evaporation sources provided below the cooling rollers, the plurality of evaporation sources being arranged in a tiled pattern along the horizontal direction.

[0004] In the process of realizing the present invention, the inventors found that the prior art has at least the following problems.

[0005] Conventional deposition machines are installed in a tiled configuration, which occupies a large space and results in low space utilization. Furthermore, conventional deposition equipment requires opening the vacuum cavity and continuing to unwind after one roll of coating is completed, making it impossible to coat multiple rolls at once, resulting in low production efficiency. Summary of the Invention

[0006] In view of this, an object of the embodiments of the present invention is to provide a method, equipment and system for manufacturing a composite metal foil to solve the problems of low space utilization rate and low production efficiency that exist in the prior art.

[0007] In a first aspect, according to an embodiment of the present invention, there is provided a manufacturing system for a composite metal foil, comprising: a primary double-sided coating module and a secondary double-sided coating module disposed in spaced relation; the primary double-sided coating module includes a first vapor deposition column and a second vapor deposition column that are disposed opposite each other, and a winding roller, a first vapor deposition source, a first group of transition rollers, a second vapor deposition source, and a second group of transition rollers that are disposed in this order from bottom to top on the opposing surfaces of the first vapor deposition column and the second vapor deposition column; The secondary double-sided coating module is a composite metal foil manufacturing equipment including a third vapor deposition column, and a first group of cooling rollers, a third evaporation source, a second group of cooling rollers, a fourth evaporation source, and a take-up roller, which are sequentially arranged from top to bottom on the third vapor deposition column.

[0008] In some possible embodiments, the first group of transition rollers includes a first transition roller and a second transition roller respectively provided on both sides above the first evaporation source, the second group of transition rollers includes a third transition roller and a fourth transition roller respectively provided on both sides above the second evaporation source, The first evaporation source performs a first coating on a first surface of a thin film to be coated; The second evaporation source performs a first coating on a second surface of the thin film to be coated, The third evaporation source applies a second coating to a second surface of the thin film to be coated; The fourth evaporation source applies a second coating to the first surface of the thin film to be coated.

[0009] In some possible embodiments, a vertically downward tangent line on the left side of the first transition roller overlaps with a vertically downward tangent line on the left side of the unwind roller; A vertically downward tangent line on the right side of the second transition roller overlaps with a vertically downward tangent line on the right side of the unwind roller.

[0010] In some possible embodiments, a plane on which a center line between the first transition roller and the second transition roller is located is a plane of symmetry between the first evaporation source and the second evaporation source; Alternatively, the top tangent plane of the first transition roller or the bottom tangent plane of the second transition roller is a plane of symmetry between the first evaporation source and the second evaporation source.

[0011] In some possible embodiments, at least one of the first transition roller, the second transition roller, the third transition roller, and the fourth transition roller is a cooling roller.

[0012] In some possible embodiments, the first group of transition rollers, the second group of transition rollers, the first group of cooling rollers, the second group of cooling rollers, the unwind roller, and the take-up roller are parallel to one another; The first deposition pillar, the second deposition pillar, and the third deposition pillar are provided along the vertical direction.

[0013] In some possible embodiments, the first transition roller has a lower vertical mounting height than the second transition roller; The highest point of the top of the first transition roller is on the same horizontal line as the lowest point of the bottom of the second transition roller.

[0014] In some possible embodiments, the method further includes a steering module including a fourth deposition column and a first steering roller and a second steering roller disposed on the fourth deposition column from top to bottom, The first vapor deposition pillar, the third vapor deposition pillar, and the fourth vapor deposition pillar are provided on the same straight line at a distance from each other.

[0015] In a second aspect, there is provided a composite metal foil manufacturing system, The manufacturing equipment for the composite metal foil according to any one of the first aspect, a visual inspection system for detecting hole defects in the thin film to be coated, the visual inspection system being installed in the first deposition column, the second deposition column, the third deposition column, or the fourth deposition column, or on the inner wall of the vacuum cavity, the visual inspection system outputting a signal to stop coating when detected hole defect data meets a preset condition; and a vacuum cavity for providing the composite metal foil manufacturing equipment according to any one of the first and second aspects therein.

[0016] In a third aspect, according to an embodiment of the present invention, there is provided a method for producing a composite metal foil, comprising: The manufacturing method is based on the manufacturing equipment for the composite metal foil according to the first aspect, releasing the thin film with an unwinding roller and guiding the thin film to pass through a first transition roller, above a first evaporation source, and a second transition roller to achieve a primary coating on side A of the thin film; guiding the thin film to pass through a fourth transition roller, over a second evaporation source, and reach a third transition roller to form a first coating on side B of the thin film; guiding the thin film to pass over a second cooling roller and a third evaporation source in order to reach the first cooling roller so as to form a secondary coating on the B side of the thin film; guiding the thin film past a first steering roller to a second steering roller; guiding the thin film to pass over a third cooling roller and a fourth evaporation source in order to reach a fourth cooling roller so as to form a secondary coating on the A side of the thin film; and guiding the thin film to reach a take-up roller to complete double-sided continuous coating of the thin film and obtain a composite metal foil. [Effects of the Invention]

[0017] The above technical means have the following beneficial effects: The first and second deposition columns are provided with two evaporation sources and corresponding roller systems, arranged from bottom to top, on the opposing surfaces, to achieve a primary double-sided coating. The third deposition column is provided with two evaporation sources and corresponding roller systems, arranged from top to bottom, to achieve a secondary double-sided coating. This reduces the space required for the deposition equipment and improves the utilization rate of the vacuum space and the efficiency of thin film production. [Brief explanation of the drawings]

[0018] In order to more clearly describe the technical solutions in the embodiments of the present invention or the prior art, the following briefly introduces the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings described below are only some embodiments of the present invention, and those skilled in the art can also obtain other drawings based on these drawings without any creative efforts.

[0019] [Figure 1] 1 is a three-dimensional schematic view of a manufacturing facility for a first composite metal foil according to a first embodiment of the present invention. [Figure 2] 1 is a schematic side view of a manufacturing facility for a first composite metal foil according to Example 1 of the present invention. [Figure 3] FIG. 2 is a front schematic view of a primary double-sided coating module of the first equipment according to the first embodiment of the present invention. [Figure 4] FIG. 2 is a front schematic view of a secondary double-sided coating module of the first equipment according to the first embodiment of the present invention. [Figure 5] FIG. 2 is a three-dimensional schematic view of a manufacturing facility for the second composite metal foil according to Example 1 of the present invention. [Figure 6] FIG. 4 is a schematic side view of a manufacturing facility for a second composite metal foil according to a second embodiment of the present invention. [Figure 7] FIG. 10 is a schematic side view of a manufacturing facility for a third composite metal foil according to Example 2 of the present invention. [Figure 8] 1 is a functional block diagram of a visual inspection system according to an embodiment of the present invention. [Figure 9]1 is a flowchart of a method for manufacturing a composite metal foil according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0020] Features and exemplary embodiments of various aspects of the present invention are described in detail below. In the following detailed description, numerous specific details are presented to provide a comprehensive understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is intended only to provide a better understanding of the present invention by illustrating examples of the present invention. In the drawings and the following description, at least some well-known structures and techniques are not shown to avoid unnecessarily obscuring the present invention. Also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the features, structures, or characteristics described herein may be combined in any suitable manner in one or more embodiments. Example 1

[0021] FIG. 1 is a three-dimensional schematic diagram of a first composite metal foil manufacturing equipment according to Example 1 of the present invention. FIG. 2 is a side schematic diagram of the first composite metal foil manufacturing equipment according to Example 1 of the present invention. As shown in FIGS. 1 and 2, the composite metal foil manufacturing equipment includes a primary double-sided coating module 10 and a secondary double-sided coating module 20, which are spaced apart from each other. The primary double-sided coating module 10 includes a first vapor deposition column 11 and a second vapor deposition column 12, which are disposed opposite each other, and a winding roller 13, a first vapor deposition source 14, a first group of transition rollers 15, a second vapor deposition source 16, and a second group of transition rollers 17, which are disposed, from bottom to top, on the opposing surfaces of the first vapor deposition column 11 and the second vapor deposition column 12. The secondary double-sided coating module 20 includes a third vapor deposition column 21, and a first group of cooling rollers 22, a third vapor deposition source 23, a second group of cooling rollers 24, a fourth vapor deposition source 25, and a take-up roller 26, which are disposed, in order, on the third vapor deposition column 21. The composite metal foil can be obtained by depositing a metal such as copper or aluminum on a plastic thin film. The advantage of this technical solution is that the first double-sided coating can be achieved by installing two evaporation sources and corresponding roller systems on the opposing surfaces of the first evaporation column 11 and the second evaporation column 12 from bottom to top, and the second double-sided coating can be achieved by installing two evaporation sources and corresponding roller systems on the third evaporation column 21 from top to bottom, thereby improving space utilization and thin film production efficiency.

[0022] 3 is a front schematic view of a primary double-sided coating module 10 of a first facility according to a first embodiment of the present invention. As shown in FIG. 3, the unwind roller 13, the first group of transition rollers 15, and the second group of transition rollers 17 are preferably rotatably connected at one end to the first evaporation column 11 and at the other end to the second evaporation column 12. The first evaporation source 14 and the second evaporation source 16 are each detachably connected at one end to the first evaporation column 11 or the second evaporation column 12, respectively, and are suspended at the other end. Alternatively, the first evaporation source 14 and the second evaporation source 16 are each detachably connected at one end to the first evaporation column 11 and at the other end to the second evaporation column 12.

[0023] FIG. 4 is a front schematic view of a secondary double-sided coating module 20 of a first equipment according to Example 1 of the present invention. As shown in FIG. 4, the first group of cooling rollers 22, the second group of cooling rollers 24, and the take-up roller 26 are each rotatably connected to the third vapor deposition column 21 at one end and suspended at the other end. The third evaporation source 23 and the fourth evaporation source 25 are each non-rotatably and detachably connected to the third vapor deposition column 21 at one end and suspended at the other end. Alternatively, the third evaporation source 23 and the fourth evaporation source 25 may each be divided into two sub-evaporation sources each having a small volume (e.g., the same length but a smaller width), spaced apart in parallel, and at the same vertical mounting height. Specifically, the first evaporation column 11, the second evaporation column 12, and the third evaporation column 21 are vertically disposed and extend along the vertical direction (referred to as the Z direction). Each roller and each evaporation source is disposed along a first horizontal direction (referred to as the Y direction). The first and third evaporation columns 11 and 21 are spaced apart along the second horizontal direction (referred to as the X direction). X, Y, and Z are the three coordinate axes of a Cartesian coordinate system. The evaporation columns may have a plate-like, cylindrical, or elliptical structure. In this embodiment, the horizontal cross-section of the evaporation column is preferably elliptical. Compared to a plate-like structure, an elliptical structure occupies less space, while compared to a cylindrical structure, it has a larger surface area. This allows for multiple rollers and evaporation sources to be installed on the surface, thereby reducing the space occupied by the evaporation equipment and significantly improving coating efficiency. In some examples, the evaporation columns may be made of metal. The evaporation columns are hollow, with an internal cavity. The inner wall of the evaporation column has a certain thickness to withstand the rollers, and the internal cavity can accommodate several wiring and other equipment. The evaporation source is equipped with a heating element. For example, this may be an electric heating element such as a heating wire, or a hot liquid.

[0024] In some embodiments, the first group of transition rollers 15 includes a first transition roller 15a and a second transition roller 15b, which are respectively provided on both sides above the first evaporation source 14. However, the number of transition rollers is not limited to this, and the first group of transition rollers 15 may include more transition rollers. The second group of transition rollers 17 includes a third transition roller 17a and a fourth transition roller 17b, which are respectively provided on both sides above the second evaporation source 16. However, the number of transition rollers is not limited to this, and the second group of transition rollers 17 may include more transition rollers. Providing the third transition roller 17a and the fourth transition roller 17b on both sides above the second evaporation source 16 is advantageous for coating the B side of the thin film. The first group of cooling rollers 22 includes a first cooling roller 22a and a second cooling roller 22b, and the second group of cooling rollers 24 includes a third cooling roller 24a and a fourth cooling roller 24b. The number of cooling rollers in each group is not limited to two and may be more than two. The first group of cooling rollers 22, the third evaporation source 23, the second group of cooling rollers 24, the fourth evaporation source 25, and the take-up roller 26 are all provided on the same side of the third evaporation column 21. The first evaporation source 14 is used to perform a first coating on the first side of the thin film to be coated. The second evaporation source 16 is used to perform a first coating on the second side of the thin film to be coated. The third evaporation source 23 is used to perform a second coating on the second side of the thin film to be coated. The fourth evaporation source 25 is used to perform a second coating on the first side of the thin film to be coated.

[0025] In some embodiments, the vertically downward tangent line on the left side of the first transition roller 15a overlaps with the vertically downward tangent line on the left side of the unwind roller 13, and the vertically downward tangent line on the right side of the second transition roller 15b overlaps with the vertically downward tangent line on the right side of the unwind roller 13. Furthermore, the vertically downward tangent line on the left side of the unwind roller 13 further contacts the left sides of the first transition roller 15a and the third transition roller 17a, and the vertically downward tangent line on the right side of the unwind roller 13 contacts the right sides of the second transition roller 15b and the fourth transition roller 17b. In this embodiment, the first transition roller 15a may be provided at the upper left corner of the first evaporation source 14, and the second transition roller 15b may be provided at the upper right corner of the first evaporation source 14. The vertically downward tangent on the left side of the first transition roller 15a overlaps with the vertically downward tangent on the left side of the unwind roller 13, and the vertically downward tangent on the right side of the second transition roller 15b overlaps with the vertically downward tangent on the right side of the unwind roller 13. This prevents wrinkles from forming in the thin film when it travels from the unwind roller 13 to the first transition roller 15a or the second transition roller 15b.

[0026] In some embodiments, the plane on which the center line between the first transition roller 15a and the second transition roller 15b is located is the plane of symmetry between the first evaporation source 14 and the second evaporation source 16. Alternatively, the top tangent plane of the first transition roller 15a or the bottom tangent plane of the second transition roller 15b is the plane of symmetry between the first evaporation source 14 and the second evaporation source 16. By providing the second evaporation source 16 above the first transition roller 15a and the second transition roller 15b in a direction perpendicular to the first evaporation source 14, and by setting the connecting line between the central axes of the first transition roller 15a and the second transition roller 15b as the line of symmetry between the first evaporation source 14 and the second evaporation source 16, or by setting the plane on which the center line is located as the plane of symmetry, the evaporation column can be subjected to a balanced force.

[0027] In some embodiments, the first transition roller 15a is mounted at a lower vertical height than the second transition roller 15b, so that the highest point on the top of the first transition roller 15a is on the same horizontal line as the lowest point on the bottom of the second transition roller 15b. This allows the thin film to move from the top of the first transition roller 15a to the bottom of the second transition roller 15b and then be coated upward. This allows the thin film to pass evenly over the first evaporation source 14.

[0028] In some embodiments, at least one of the first transition roller 15a, the second transition roller 15b, the third transition roller 17a, and the fourth transition roller 17b is a cooling roller, which allows the thin film to cool before and after deposition, preventing the thin film from being burned by high-temperature particles, causing holes in the thin film and affecting product quality.

[0029] In some embodiments, the first group of transition rollers 15, the second group of transition rollers 17, the first group of cooling rollers 22, the second group of cooling rollers 24, the unwind roller 13, and the take-up roller 26 are parallel to one another.

[0030] The process for realizing double-sided continuous coating using the composite metal foil manufacturing equipment of this embodiment includes the following steps.

[0031] In S110, the thin film is unwound onto the unwinding roller 13, which releases the thin film and guides the thin film to pass through the first transition roller 15a, the top of the first evaporation source 14, and the second transition roller 15b to form a primary coating on side A of the thin film.

[0032] In S120, the thin film is guided to pass through the fourth transition roller 17b and above the second evaporation source 16 in order to achieve a primary coating on the B side of the thin film, and then reach the third transition roller 17a.

[0033] In S130, in order to form a secondary coating on side B of the thin film, the thin film is guided to pass over the second cooling roller 22b and the third evaporation source 23 in that order and reach the first cooling roller 22a.

[0034] In S140, in order to form a secondary coating on the A side of the thin film, the thin film is guided to pass over the third cooling roller 24a and the fourth evaporation source 25 in that order and reach the fourth cooling roller 24b.

[0035] In S150, the thin film is guided to reach the take-up roller 26 on the top surface of the third vapor deposition column 21 to complete the continuous coating of the thin film on both sides and obtain a composite metal foil. Example 2

[0036] Fig. 5 is a three-dimensional schematic diagram of a second composite metal foil manufacturing equipment according to Example 2 of the present invention. Fig. 6 is a side schematic diagram of the second composite metal foil manufacturing equipment according to Example 2 of the present invention. Fig. 7 is a side schematic diagram of a third composite metal foil manufacturing equipment according to Example 2 of the present invention. As shown in Figs. 5 to 7, Example 2 differs from Example 1 in that, in order to coat both sides (A and B) of the thin film multiple times, the composite metal foil manufacturing equipment further includes a steering module 30 including a fourth vapor deposition column 31 and a first steering roller 32 and a second steering roller 33 provided spaced apart from each other from above to below the fourth vapor deposition column 31, and the first vapor deposition column 11, third vapor deposition column 21, and fourth vapor deposition column 31 are provided spaced apart on the same straight line, for example, along the X direction. The advantage of providing two steering rollers in this embodiment is that the first steering roller 32 and the first cooling roller 22a are parallel, and the second steering roller 33 and the third cooling roller 24a are parallel, so providing them in this manner is advantageous for steering the thin film from the layer of the first steering roller 32 to the layer of the second steering roller 33. Figure 5 differs from Figure 4 in that the vertical mounting height of the third cooling roller 24a in Figure 4 is higher than the vertical mounting height of the fourth cooling roller 24b, while the vertical mounting height of the third cooling roller 24a in Figure 5 is the same as that of the fourth cooling roller 24b.

[0037] One end of the unwinding roller 13 is rotatably connected to the first vapor deposition column 11, and the other end is rotatably connected to the second vapor deposition column 12. An evaporation source and transition roller are further provided above the unwinding roller 13. The thin film passes from the unwinding roller 13 through the transition roller and evaporation source, completing the primary double-sided coating of the thin film. The third vapor deposition column 21 is provided with a cooling roller, evaporation source, and take-up roller 26, and the fourth vapor deposition column 31 is provided with two steering rollers. The thin film passes from the first vapor deposition column 11 and the second vapor deposition column 12 to the cooling roller and evaporation source on the third vapor deposition column 21, and then reaches the steering roller of the fourth vapor deposition column 31, completing the continuous double-sided coating of the thin film and producing a composite metal foil.

[0038] In some embodiments, the composite metal foil manufacturing equipment further includes one or more of a visual inspection system, a rotation speed controller, an evaporation rate controller, and a vacuum cavity.

[0039] The visual inspection system is provided in the first deposition column 11, the second deposition column 12, the third deposition column 21, or the fourth deposition column 31 to detect hole defects in the thin film being coated, and outputs a signal to stop the coating if a hole defect is detected in the thin film. Specifically, the visual inspection system may be a CDD visual inspection system that can automatically recognize holes on the top surface of the thin film and determine whether to continue the coating.

[0040] FIG. 8 is a functional block diagram of a visual inspection system according to an embodiment of the present invention. As shown in FIG. 8, the visual inspection system 40 includes an image capture device 41 for capturing surface images of the thin film during deposition; an image processing system 42 for acquiring surface images of the thin film during deposition, performing hole defect detection (which may be based on an image recognition algorithm) on the surface images of the thin film during deposition, and identifying hole defect data on the surface of the thin film during deposition; and a deposition controller 43 for determining whether to output a control signal to stop deposition or an alarm signal based on the hole defect data on the surface of the thin film during deposition and a preset condition (e.g., satisfying one or more preset threshold conditions). The hole data includes at least one of the distribution number of holes per unit area, the size of the holes per unit area, and the distribution density of the holes per unit area. The size may be the maximum size of the holes or the diameter of an equivalent circle after equating the holes to a circle. The above equalization process may be performed by calculating the area of ​​irregular holes to convert them into the diameter of an equivalent circle based on the area. Correspondingly, the predetermined condition includes at least one of the following: the distribution number of pores per unit area is greater than a predetermined number threshold, the size of the pores per unit area is greater than a predetermined diameter threshold, and the distribution density of the pores per unit area is greater than a predetermined density threshold. Outputting the control signal to stop deposition includes outputting a control signal to the drive motor of each roller to stop rotation, or cutting off the operating power of the drive motor, or cutting off the operating power of all evaporation source devices. The entire visual inspection system may be provided within the vacuum cavity, for example, on the inner wall of the vacuum cavity, or may be provided in an associated evaporation column. Alternatively, at least its image capture device may be provided within the vacuum cavity, and other components may be provided outside the vacuum cavity.

[0041] Specifically, the image capturing device 41 further employs a high-brightness LED industrial linear focusing light source of a specific wavelength to illuminate the product surface (adopting a reflection detection principle for opaque thin film products), while simultaneously scanning and collecting product images illuminated by the light source in real time using an industrial CCD camera.

[0042] Specifically, the specific operating principle of the CCD (Charge-Coupled Device) visual inspection system is as follows: The thin film passes through the CCD, and then an image capture device 41 is installed inside and above the CCD. The image capture device 41 converts the captured image of the thin film into an image signal and transmits it to an image processing system 42. The image processing system 42 automatically calculates the number and size of pores on the thin film based on a preset program. If the number and / or size of pores per square centimeter exceeds a specific preset threshold value, the deposition controller 43 issues a command to the rotation speed control device to stop deposition, or issues an alarm to prompt an operator to stop the coating process. The threshold value or thresholds vary according to customer quality requirements. The number of pores per square meter may not exceed several to several tens, and the size of the pores may not exceed a few tenths of a millimeter or several millimeters.

[0043] The rotational speed control device includes a controller panel and a servo motor that are communicatively connected. The controller panel is used to receive roller rotational speed control parameters input by a user and transmit them to the servo motor. The servo motor is used to control the rotational speed of one or more of the unwind roller 13, the first group of transition rollers 15, the second group of transition rollers 17, the first group of cooling rollers 22, the second group of cooling rollers 24, and the take-up roller 26 based on the roller rotational speed control parameters. Specifically, the rotational speed of the rollers can be controlled by the servo motor. For example, one controller panel is configured, and the roller speed can be controlled by inputting parameters into the controller panel.

[0044] The evaporation rate control device is electrically connected to the first evaporation source 14, the second evaporation source 16, the third evaporation source 23, and the fourth evaporation source 25, and is used to control the evaporation rate by controlling the operating current applied to the first evaporation source 14, the second evaporation source 16, the third evaporation source 23, and the fourth evaporation source 25 to control the heat generation amount thereof. Specifically, the evaporation rate of the evaporation source can be controlled by controlling the current applied to the heating wire to control the heat generation amount of the heating wire.

[0045] The vacuum cavity is then used to accommodate the primary double sided coating module 10 and the secondary double sided coating module 20. The cavity preferably has a vacuum inside during operation.

[0046] 9 is a flowchart of a method for manufacturing a composite metal foil according to an embodiment of the present invention. As shown in FIG. 9, the manufacturing process of the composite metal foil according to this embodiment includes the following steps:

[0047] In S210, the thin film is unwound onto the unwinding roller 13, which releases the thin film and guides the thin film to pass through the first transition roller 15a, the top of the first evaporation source 14, and the second transition roller 15b to form a primary coating on side A of the thin film.

[0048] In S220, the thin film is guided to pass over the fourth transition roller 17b and the second evaporation source 16 to reach the third transition roller 17a, so that the primary coating is applied to the B side of the thin film.

[0049] In S230, in order to form a secondary coating on side B of the thin film, the thin film is guided to pass over the second cooling roller 22b and the third evaporation source 23 in that order and reach the first cooling roller 22a.

[0050] In S240, the thin film is guided past the first steering roller 32 and onto the second steering roller 33.

[0051] In S250, in order to form a secondary coating on the A side of the thin film, the thin film is guided to pass over the third cooling roller 24a and the fourth evaporation source 25 in that order and reach the fourth cooling roller 24b.

[0052] In S260, the thin film is guided to reach the third vapor deposition pillar 21 on the upper surface of the take-up roller 26 to complete the continuous coating of both sides of the thin film and obtain a composite metal foil.

[0053] It should be noted that in describing the present invention, orientations or positional relationships indicated by terms such as "upper, lower, inner, and outer" are based on orientations or positional relationships shown in the drawings and are merely for the convenience and simplification of describing the present invention, and do not indicate or imply that the devices or elements referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore cannot be understood as limitations of the present invention. Also, the terms "first, second, or third" are for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0054] In the present invention, unless explicitly specified or limited, "attached, connected to each other, or connected" should be understood in a broad sense, and may refer to, for example, a fixed connection, a detachable connection, or an integral connection. Similarly, it may refer to a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, or internal communication between two elements. Those skilled in the art will be able to understand the specific meaning of the above terms in the present invention depending on the specific circumstances.

[0055] While the present invention has been described above with reference to preferred embodiments, various modifications may be made and the components may be replaced with equivalents without departing from the spirit of the present invention. In particular, as long as there is no structural contradiction, the technical features described in each embodiment may be combined in any form. The present invention is not limited to the specific embodiments disclosed in this specification, but includes all technical means included within the scope of the claims. [Explanation of symbols]

[0056] 100A, 100B, 100C, composite metal foil manufacturing equipment 10. Primary double-sided coating module 20. Secondary double-sided coating module 30. Steering module 11, 1st vapor deposition column 12, 2nd evaporation column 13. Unwinding roller 14. First evaporation source 15. First group transition roller 15a, first transition roller 15b, second transition roller 16. Second evaporation source 17. Second group transition roller 17a, third transition roller 17b, 4th transition roller 21, 3rd vapor deposition pillar 22, the first group of cooling rollers 22a, first cooling roller 22b, second cooling roller 23. Third evaporation source 24, the second group of cooling rollers 24a, third cooling roller 24B, 4th cooling roller 25. Fourth evaporation source 26. Winding roller 31, 4th vapor deposition pillar 32, first steering roller 33, second steering roller 40. Visual inspection system 41. Imaging device 42. Image processing system 43. Deposition controller

Claims

1. A manufacturing facility for composite metal foil, a primary double-sided coating module and a secondary double-sided coating module disposed in spaced relation; the primary double-sided coating module includes first and second vapor deposition columns disposed opposite to each other, and a winding roller, a first vapor deposition source, a first group of transition rollers, a second vapor deposition source, and a second group of transition rollers disposed in this order from bottom to top between the first and second vapor deposition columns so as to be connected to both the first and second vapor deposition columns, the secondary double-sided coating module includes a third vapor deposition column, a first group of cooling rollers, a third vapor deposition source, a second group of cooling rollers, a fourth vapor deposition source, and a take-up roller, which are sequentially disposed on the third vapor deposition column from top to bottom; the first deposition pillars and the third deposition pillars are arranged at intervals along a first horizontal direction, the first deposition pillars and the second deposition pillars are arranged along a second horizontal direction perpendicular to the first horizontal direction, the unwinding roller, the first evaporation source, the first group of transition rollers, the second evaporation source, and the second group of transition rollers each extend along the second horizontal direction; the first group of cooling rollers, the third evaporation source, the second group of cooling rollers, the fourth evaporation source, and the take-up roller are all provided on the same side of the third evaporation column as the first evaporation source, the first group of transition rollers, the second evaporation source, and the second group of transition rollers are provided on the first evaporation column; the first group of transition rollers includes a first transition roller and a second transition roller; the second evaporation source is located between the first transition roller and the second transition roller; the second group of transition rollers includes a third transition roller and a fourth transition roller; the second evaporation source is located between the third transition roller and the fourth transition roller; The first evaporation source performs a first coating on a first surface of a thin film to be coated; The second evaporation source performs a first coating on a second surface of the thin film to be coated, The third evaporation source applies a second coating to a second surface of the thin film to be coated; The fourth evaporation source performs a second coating on the first surface of the thin film to be coated, the thin film guided by the first transition roller, the second transition roller, the third transition roller, and the fourth transition roller surrounds the second evaporation source; A manufacturing facility for composite metal foil.

2. a vertically downward tangent line on the left side of the first transition roller overlaps with a vertically downward tangent line on the left side of the unwind roller; a vertically downward tangent line on the right side of the second transition roller overlaps with a vertically downward tangent line on the right side of the unwind roller; 2. The manufacturing equipment for composite metal foil according to claim 1.

3. a plane on which a center line between the first transition roller and the second transition roller is located is a plane of symmetry between the first evaporation source and the second evaporation source; Alternatively, a top tangent plane of the first transition roller or a bottom tangent plane of the second transition roller is a plane of symmetry between the first evaporation source and the second evaporation source.

2. The manufacturing equipment for composite metal foil according to claim 1.

4. the first group of cooling rollers includes a first cooling roller and a second cooling roller, the second group of cooling rollers includes a third cooling roller and a fourth cooling roller; 2. The manufacturing equipment for composite metal foil according to claim 1.

5. the first group of transition rollers, the second group of transition rollers, the first group of cooling rollers, the second group of cooling rollers, the unwinding roller, and the winding roller are parallel to one another; the first vapor deposition pillar, the second vapor deposition pillar, and the third vapor deposition pillar are all provided to extend along a vertical direction, the first transition roller is mounted lower in the vertical direction than the second transition roller; the highest point of the top of the first transition roller is on the same horizontal line as the lowest point of the bottom of the second transition roller; 2. The manufacturing equipment for composite metal foil according to claim 1.

6. a steering module including a fourth deposition column and a first steering roller and a second steering roller disposed on the fourth deposition column from top to bottom, the first vapor deposition pillar, the third vapor deposition pillar, and the fourth vapor deposition pillar are provided on the same straight line and spaced apart from each other; 2. The manufacturing equipment for composite metal foil according to claim 1.

7. A composite metal foil manufacturing system, The manufacturing equipment for the composite metal foil according to claim 6; a visual inspection system for detecting hole defects in the thin film to be coated, the visual inspection system being provided on the first deposition column, the second deposition column, the third deposition column, or the fourth deposition column, or on an inner wall of a vacuum cavity, the visual inspection system outputting a signal to stop coating when detected hole defect data meets a preset condition; A vacuum cavity for installing the composite metal foil manufacturing equipment therein. A composite metal foil manufacturing system.

8. The visual inspection system includes: an imaging device for taking a surface image of the thin film during deposition; an image processing system for acquiring a surface image of the thin film during deposition, performing hole defect detection on the surface image of the thin film during deposition, and identifying hole defect data on the surface of the thin film during deposition; a deposition controller for determining whether to output a control signal to stop deposition or an alarm signal based on the hole defect data and a preset condition; 8. The manufacturing system for composite metal foil according to claim 7.

9. A method for producing a composite metal foil, The manufacturing method is based on the manufacturing equipment for composite metal foil according to claim 4, releasing the thin film with an unwind roller and guiding the thin film past a first transition roller, above a first evaporation source, and a second transition roller to achieve a primary coating on the first side of the thin film; guiding the thin film to pass through a fourth transition roller, over a second evaporation source, and reach a third transition roller to form a primary coating on the second surface of the thin film; guiding the thin film to pass over a second cooling roller and a third evaporation source in order to reach a first cooling roller so as to form a secondary coating on the second surface of the thin film; guiding the thin film past a first steering roller to a second steering roller; guiding the thin film to pass over a third cooling roller and a fourth evaporation source in order to reach a fourth cooling roller so as to form a secondary coating on the first surface of the thin film; and guiding the thin film to a take-up roller to complete double-sided continuous coating of the thin film and obtain a composite metal foil. A method for producing a composite metal foil.

Images