Vacuum hollow magnetic coupling feed-through device for magnetron sputtering coating machine

Abstract

The utility model relates to the technical field of vacuum feed-through, and discloses a vacuum hollow magnetic coupling feed-through device used for a magnetron sputtering coating machine, which comprises an isolation cover, a magnetic coupling feed-through device and a magnetic coupling feed-through device, the first end of the hollow main shaft extends into the isolation hood; the outer magnetic rotor surrounds the outer side of the isolation cover; the inner magnetic rotor is connected to the outer side of the first end of the hollow main shaft; the input wheel is connected with the outer magnetic rotor and is used for being connected with external driving equipment; according to the utility model, the hollow main shaft is adopted, while magnetic coupling torque transmission is realized, the hollow main shaft rotates in the vacuum chamber, and devices which do not need to be rotated, such as wiring and installation of manipulators, can be accommodated in the hollow main shaft, so that the feed-through structure is endowed with more functional richness, flexibility and various possibilities; flanges at two ends of the isolation cover facilitate connection of an external device outside the vacuum chamber.

Description

Technical Field

[0001] This utility model relates to the field of vacuum feedthrough technology, and in particular to a vacuum hollow magnetic coupling feedthrough device used in a magnetron sputtering coating machine. Background Technology

[0002] A vacuum feedthrough is a device used to transmit matter, energy, or signals in a vacuum-sealed environment. It connects a vacuum system to external devices or other vacuum components, ensuring that the vacuum feedthrough remains airtight in high vacuum or ultra-high vacuum environments.

[0003] Magnetic vacuum feedthroughs utilize the effect of magnetic fields to transmit torque, force, and magnetic signals within and outside a vacuum system. They are commonly used in magnetic drive devices or magnetic sensor systems that need to operate in a vacuum environment, such as motor drives in a vacuum environment and performance testing of magnetic materials.

[0004] In existing magnetic coupling feedthroughs, the main shaft inside the vacuum chamber of the motor drive and shaft drive is a solid shaft with no hollow interior. It only enables the transmission of torque and force between the inside and outside of the vacuum chamber, but it cannot enable wiring or other operations inside the shaft. This is not conducive to the transmission of electrical signals and the transmission of other equipment actions. Utility Model Content

[0005] The purpose of this invention is to solve the problems in the prior art mentioned above and to provide a vacuum hollow magnetic coupling feedthrough device for use in a magnetron sputtering coating machine.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A vacuum hollow magnetic coupling feedthrough device used in a magnetron sputtering coating machine includes:

[0008] The isolation enclosure has flanges at both ends;

[0009] A hollow spindle, with its first end extending into the isolation cover;

[0010] An external magnetic rotor surrounds the outside of the isolation shield;

[0011] An internal magnetic rotor is connected to the outside of the first end of the hollow main shaft;

[0012] An input wheel is connected to the external magnetic rotor and is used for connection to an external drive device.

[0013] Furthermore, the flanges at both ends of the isolation cover are respectively connected to the vacuum chamber and the external device that needs to communicate with the vacuum chamber; the second end of the hollow spindle is located inside the vacuum chamber.

[0014] Furthermore, the input pulley is an annular synchronous pulley surrounding the isolation cover.

[0015] Furthermore, the isolation cover and the hollow main shaft are arranged vertically; the input wheel is connected to the upper end of the outer magnetic rotor; and a thrust bearing is provided on the outside of the isolation cover to support the lower side of the outer magnetic rotor.

[0016] Furthermore, the outer side of the isolation cover is provided with a step that supports the underside of the thrust bearing.

[0017] Furthermore, the outer magnetic rotor has several outer magnetic rings surrounding the isolation cover on its inner side; the inner magnetic rotor has several inner magnetic rings on its outer side.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0019] This invention employs a hollow spindle, which, while transmitting magnetically coupled torque, allows the spindle to rotate within the vacuum chamber while simultaneously accommodating non-rotating devices such as wiring, robotic arms, and other equipment. This enriches the feedthrough structure with greater functionality, flexibility, and versatility. The flanges at both ends of the isolation cover facilitate the connection of external devices to the outside of the vacuum chamber. This invention features a simple structure, convenient maintenance, minimal vacuum contamination, and the hollow spindle provides greater possibilities for feedthrough within the vacuum chamber. The torque transmission via the magnetic coupling structure results in extremely low friction, high transmission efficiency, and large torque. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0021] Figure 2 This is a schematic diagram of the internal structure of this utility model.

[0022] In the diagram: 1. Isolation cover; 2. Hollow main shaft; 3. External magnetic rotor; 4. Internal magnetic rotor; 5. Synchronous pulley; 6. Thrust bearing; 7. Step; 8. External magnetic ring; 9. Internal magnetic ring; 10. External guide ring; 11. Internal guide ring; 101. First flange; 102. Second flange. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model; that is, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The components of the embodiments of the present utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.

[0024] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the term "provided with" should be interpreted broadly. For example, the object "provided with" can be a part of the main body, or it can be separately arranged from the main body and connected to it. This connection can be detachable or non-detachable. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] The present invention will be further described in detail below with reference to the embodiments.

[0027] A specific embodiment of the vacuum hollow magnetic coupling feedthrough device used in the magnetron sputtering coating machine provided by this utility model:

[0028] Please see Figure 1-2 The vacuum baffle valve in this embodiment includes an isolation cover 1, a hollow main shaft 2, an outer magnetic rotor 3, an inner magnetic rotor 4, and an input wheel.

[0029] The isolation cover 1 is made of austenitic stainless steel, which separates the outer magnetic rotor 3 and the inner magnetic rotor 4. Magnetic lines of force can pass through the isolation cover 1 to achieve contactless torque transmission, while avoiding direct contact between the two to prevent friction and wear.

[0030] The isolation chamber 1 has metal-sealed ultra-high vacuum connection flanges at both ends. The isolation chamber 1 is cylindrical, and the flanges at both ends of the isolation chamber 1 are a first flange 101 and a second flange 102, respectively. The first flange 101 is an annular structure formed by bending the end of the isolation chamber 1 outward, and has a through hole for bolts to pass through. The second flange 102 is an annular structure formed by bending the end of the isolation chamber 1 inward, and has a threaded blind hole. The first flange 101 and the second flange 102 are used to connect the vacuum chamber and external devices that need to communicate with the vacuum chamber, respectively.

[0031] The first end of the hollow spindle 2 extends into the isolation cover 1, and the second end of the hollow spindle 2 is located in the vacuum chamber; a non-rotating stator structure or a rotor structure that does not rotate synchronously with the hollow spindle 2 can be installed inside the hollow spindle 2; the structure installed inside the hollow spindle 2 comes from an external device or is connected to an external device.

[0032] An outer magnetic rotor 3 surrounds the outer side of the isolation cover 1; a plurality of outer magnetic rings 8 surrounding the isolation cover 1 are provided on the inner side of the outer magnetic rotor 3; a plurality of outer magnetic rings 8 are arranged axially; an outer guide ring 10 is provided on the inner side of the outer magnetic rotor 3; an annular groove is provided on the inner side of the outer guide ring 10; an annular protrusion corresponding to the annular groove of the outer guide ring 10 and extending into the annular groove is provided on the outer side of the isolation cover 1.

[0033] The isolation cover 1 and the hollow main shaft 2 are arranged vertically; a thrust bearing 6 is provided on the outside of the isolation cover 1 to support the lower side of the outer magnetic rotor 3, and the thrust bearing 6 reduces friction and wear during the rotation of the outer magnetic rotor 3. An annular step 7 is provided on the outside of the isolation cover 1 to support the lower side of the thrust bearing 6.

[0034] The position of the inner magnetic rotor 4 corresponds to the position of the outer magnetic rotor 3. The inner magnetic rotor 4 is connected to the outer side of the first end of the hollow main shaft 2. The hollow main shaft 2 is fixed to the inner magnetic rotor 4 using set screws. Several inner magnetic rings 9 are provided on the outer side of the inner magnetic rotor 4. Several inner magnetic rings 9 are arranged axially. An inner guide ring 11 is provided on the outer side of the inner magnetic rotor 4. An annular groove is provided on the outer ring side of the inner guide ring 11. An annular protrusion is provided on the inner side of the isolation cover 1, which corresponds to the annular groove of the inner guide ring 11 and extends into the annular groove.

[0035] The input wheel is connected to the outer magnetic rotor 3 and is used to connect to an external drive device. The input wheel is bolted to the upper end of the outer magnetic rotor 3; in this embodiment, the input wheel is an annular synchronous pulley 5 surrounding the isolation cover 1; the external drive device includes a motor, a drive pulley, and a synchronous belt, and the external drive device causes the synchronous pulley 5 to drive the outer magnetic rotor 3 to rotate.

[0036] The outer magnetic rotor 3 drives the inner magnetic rotor 4 and the hollow main shaft 2 to rotate through magnetic force in a non-contact manner. Both the outer magnetic rotor 3 and the inner magnetic rotor 4 are tangentially magnetized. The outer magnetic ring 8 and the inner magnetic ring 9 have permanent magnets, which are arranged alternately in the circumferential direction of the magnetic rings and have different polarities. During operation, the outer magnetic rotor 3 is driven to rotate by an external drive device, which drives the inner magnetic ring 9 and the inner magnetic rotor 4 to rotate through magnetic force, thereby realizing torque transmission.

[0037] This embodiment provides a specific application scenario: the vacuum chamber is the chamber of a magnetron sputtering vacuum coating machine. The lower end (second end) of the hollow spindle 2 is connected to a support and a sample stage, which can drive the sample stage to rotate. The external device is a robotic arm control and support device with a flange. The robotic arm passes through the hollow spindle 2 and can adjust the posture of the sample on the sample stage. Signal lines for detection can also be run through the hollow spindle 2 for signal transmission inside and outside the vacuum chamber. In other embodiments, other devices can pass through the hollow spindle 2, bringing different possibilities and functions to the vacuum feedthrough.

[0038] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make modifications to the technical solutions described in the foregoing embodiments without creative effort, or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum hollow magnetic coupling feedthrough device used in a magnetron sputtering coating machine, characterized in that, include: The isolation enclosure (1) has flanges at both ends; A hollow main shaft (2) has its first end extending into the isolation cover (1); An external magnetic rotor (3) surrounds the outside of the isolation cover (1); An internal magnetic rotor (4) is connected to the outside of the first end of the hollow main shaft (2); The input wheel is connected to the external magnetic rotor (3) and is used to connect to an external drive device.

2. The vacuum hollow magnetic coupling feedthrough device used in the magnetron sputtering coating machine according to claim 1, characterized in that, The flanges at both ends of the isolation cover (1) are respectively connected to the vacuum chamber and the external device that needs to communicate with the vacuum chamber; the second end of the hollow spindle (2) is located inside the vacuum chamber.

3. The vacuum hollow magnetic coupling feedthrough device used in the magnetron sputtering coating machine according to claim 1, characterized in that, The input wheel is an annular synchronous pulley (5) surrounding the isolation cover (1).

4. The vacuum hollow magnetic coupling feedthrough device used in the magnetron sputtering coating machine according to claim 1, characterized in that, The isolation cover (1) and the hollow main shaft (2) are arranged vertically; the input wheel is connected to the upper end of the outer magnetic rotor (3); the outer side of the isolation cover (1) is provided with a thrust bearing (6) supporting the lower side of the outer magnetic rotor (3).

5. The vacuum hollow magnetic coupling feedthrough device used in the magnetron sputtering coating machine according to claim 4, characterized in that, The outer side of the isolation cover (1) is provided with a step (7) supporting the underside of the thrust bearing (6).

6. The vacuum hollow magnetic coupling feedthrough device used in the magnetron sputtering coating machine according to claim 1, characterized in that, The outer magnetic rotor (3) is provided with several outer magnetic rings (8) surrounding the isolation cover (1) on its inner side; the inner magnetic rotor (4) is provided with several inner magnetic rings (9) on its outer side.

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