Display device manufacturing apparatus and display device manufacturing method

Abstract

To provide a manufacturing device of a display device and a manufacturing method of the display device.SOLUTION: A manufacturing device of a display device includes: a droplet discharge unit including a nozzle that discharges droplets; a sensing unit that sets a virtual arbitrary plane arranged on a falling path of the droplet falling from the droplet discharge unit when the droplets fall, and senses the shape of a part of an outer surface of the droplet projected on this arbitrary plane or the cross-sectional shape of the droplet projected on this arbitrary plane; and a control unit that calculates at least one of a volume of the droplet, a drop speed of the droplet, a discharge angle at which the droplet is discharged from the nozzle, and a falling path of the droplet moving from the nozzle to a substrate based on the result detected by the sensing unit.SELECTED DRAWING: Figure 1 sann

Description

[Technical Field]

[0001] The present invention relates to an apparatus and a method, and more particularly to an apparatus and a method for manufacturing a display device. [Background technology]

[0002] Mobility-based electronic devices are widely used. Mobile electronic devices include not only small electronic devices such as mobile phones (e.g., mobile phone terminals or smartphones), but also tablet PCs, which have recently become widely used.

[0003] Such mobile electronic devices include a display device to provide a user with visual information such as an image or video to support various functions. Recently, as other components for driving the display device have been miniaturized, the proportion of the display unit in the electronic device has gradually increased, and structures that can be folded at a predetermined angle from a flat state have also been developed.

[0004] To manufacture such a display device, various layers can be formed. At least one of the various layers can be formed by dropping droplets onto a substrate through a head. In this case, to accurately realize an image on the display device, it is necessary to accurately supply the droplets to a desired position through the head. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Korean Patent No. 10-0975647 [Patent Document 2] Japanese Patent Application Laid-Open No. 2006-023275 [Patent Document 3] Japanese Patent Application Publication No. 2018-532138 Summary of the Invention [Problem to be solved by the invention]

[0006] Generally, when a droplet is dropped onto a substrate, the volume of the droplet is measured after the droplet has fallen onto the substrate in order to calculate the volume of the droplet. In such a case, the exact volume of the droplet cannot be known, and a separate test table or film is required to measure the volume of the droplet, which requires a lot of space and cost. Embodiments of the present invention provide a display device manufacturing apparatus and a display device manufacturing method that accurately measures the droplet while simplifying the structure and cost. [Means for solving the problem]

[0007] One embodiment of the present invention discloses a display device manufacturing apparatus including: a droplet ejection unit including a nozzle that ejects droplets; a sensing unit that sets an arbitrary virtual plane positioned on a fall path of the droplet falling from the droplet ejection unit when the droplet falls, and senses the shape of a portion of the outer surface of the droplet projected onto this arbitrary plane, or the cross-sectional shape of the droplet projected onto this arbitrary plane; and a control unit that calculates at least one of the volume of the droplet, the fall speed of the droplet, the ejection angle at which the droplet is ejected from the nozzle, and the fall path of the droplet moving from the nozzle to the substrate based on the results sensed by the sensing unit.

[0008] In this embodiment, the sensing unit may include a confocal microscope or a confocal sensor.

[0009] In this embodiment, a plurality of the sensing units may be provided, and the sensing units may be arranged at intervals along the falling path of the droplets.

[0010] In this embodiment, the device may further include a reflector disposed corresponding to at least one of the plurality of sensing units, for bending a laser beam emitted from the sensing unit and for bending light reflected by the droplet.

[0011] In this embodiment, some of the plurality of sensing units can sense the shape of a portion of the outer surface of the droplet, and other of the plurality of sensing units can sense the cross-sectional shape of the droplet with respect to any one surface.

[0012] In this embodiment, a plurality of the sensing units may be provided, and some of the sensing units and other parts of the sensing units may be arranged in opposite directions from each other around the movement path of the droplet.

[0013] In this embodiment, some of the plurality of sensing units can sense a partial shape of the outer surface of the droplet, and other of the plurality of sensing units can sense the cross-sectional shape of the droplet relative to any one plane.

[0014] In this embodiment, the control unit calculates the three-dimensional shape of the droplet by rotating the shape of a portion of the outer surface of the droplet sensed by the sensing unit based on the droplet's falling path, and can calculate the volume of the droplet based on the three-dimensional shape of the droplet.

[0015] In this embodiment, the sensing unit senses the droplets at regular time intervals, and the control unit can connect the centers of the droplets sensed by the sensing unit to calculate the drop path of the droplets or the ejection angle of the droplets.

[0016] In this embodiment, the sensing unit can sense the shape of a portion of the outer surface of one of the falling droplets at regular time intervals on a plane perpendicular to the direction in which the droplet falls.

[0017] In this embodiment, the control unit converts the shape of a portion of the outer surface of the droplet sensed by the sensing unit into a planar shape on a plane perpendicular to the falling direction of the droplet, and can calculate the three-dimensional shape of the droplet based on the planar shape of the droplet.

[0018] In this embodiment, the sensing unit senses the droplet at regular time intervals when the droplet falls, and the control unit can calculate the falling speed of the droplet based on the distance traveled by the droplet during the regular time period.

[0019] In this embodiment, a container for storing droplets ejected from the nozzle may be further included.

[0020] In this embodiment, the sensing units may be arranged to face in a direction perpendicular to the droplet movement path.

[0021] Another embodiment of the present invention discloses a method for manufacturing a display device, including the steps of ejecting a droplet, sensing at least one of the shape of a portion of the outer surface of the droplet projected onto an arbitrary plane on the fall path of the falling droplet and the cross section of the droplet, and calculating at least one of the volume of the droplet, the fall speed of the droplet, the fall path of the droplet, and the ejection angle of the droplet based on the sensed at least one of the shape of the portion of the outer surface of the droplet and the cross section of the droplet.

[0022] In this embodiment, the method may further include calculating a three-dimensional shape of the droplet based on at least one of the shape of a portion of the outer surface of the droplet and the cross section of the droplet.

[0023] In this embodiment, the method may further include calculating the three-dimensional shape of the droplet at regular time intervals.

[0024] In this embodiment, the method may further include calculating at least one of an ejection angle of the droplet and a drop path of the droplet by connecting centers of the three-dimensional shapes of the droplets spaced apart from each other.

[0025] In this embodiment, the method may further include a step of sensing the shape of a portion of the outer surface of the droplet on a plane perpendicular to the drop path of the droplet, and a step of calculating the cross-sectional shape of the droplet on a plane perpendicular to the drop path based on the shape of the portion of the outer surface of the droplet.

[0026] In this embodiment, the method may further include sensing the shape of a portion of the outer surface of the droplet on a plane perpendicular to the falling path at regular time intervals.

[0027] In this embodiment, the method may further include calculating a three-dimensional shape of the droplet based on the cross-sectional shape of the droplet calculated at regular time intervals.

[0028] In this embodiment, the method may further include the steps of sensing a cross section of the droplet projected onto a plane including the drop path of the droplet, and rotating the cross section of the droplet based on the drop path of the droplet to calculate a three-dimensional shape of the droplet.

[0029] In this embodiment, the method may further include a step of sensing the shape of a portion of the outer surface of the droplet on a plane including the drop path of the droplet, and a step of calculating the cross-sectional shape of the droplet on a plane including the drop path based on the shape of the portion of the outer surface of the droplet.

[0030] In this embodiment, the method may further include calculating a three-dimensional shape of the droplet by rotating the cross-sectional shape of the droplet based on the drop path of the droplet.

[0031] Yet another embodiment of the present invention discloses a method for manufacturing a display device, including the steps of: ejecting a droplet; sensing at least one of the shape of a portion of the outer surface of the droplet projected onto an arbitrary plane on the fall path of the falling droplet and the cross section of the droplet; calculating the volume of the droplet, the fall speed of the droplet, the fall path of the droplet, and the ejection angle of the droplet based on the sensed at least one of the shape of the portion of the outer surface of the droplet and the cross section of the droplet; and controlling at least one of the ejection amount and the ejection speed of the droplet based on at least one of the volume of the droplet, the fall speed of the droplet, the fall path of the droplet, and the ejection angle of the droplet.

[0032] Other aspects, features, and advantages beyond those described above will become apparent from the following drawings, claims, and detailed description of the invention.

[0033] Such general and specific aspects may be implemented using a system, a method, a computer program, or a combination of a system, a method, and a computer program. [Effects of the Invention]

[0034] The display device manufacturing apparatus and method according to the present invention can manufacture a display device capable of displaying a precise image.

[0035] The display device manufacturing apparatus and display device manufacturing method according to the embodiment of the present invention can measure droplets accurately and precisely in real time. [Brief explanation of the drawings]

[0036] [Figure 1] 1 is a perspective view showing a display device manufacturing apparatus according to an embodiment of the present invention; [Figure 2] FIG. 2 is a perspective view showing a part of the manufacturing apparatus for the display device shown in FIG. [Figure 3A] 3 is a front view showing a partial shape of a droplet placed at a first position shown in FIG. 2. FIG. [Figure 3B] 3B is a perspective view showing a three-dimensional shape of a droplet calculated from a partial shape of the droplet shown in FIG. 3A. FIG. [Figure 4A] 3 is a front view showing a partial shape of a droplet placed at the second position shown in FIG. 2. FIG. [Figure 4B] 4B is a perspective view showing a three-dimensional shape of a droplet calculated from the partial shape of the droplet shown in FIG. 4A. FIG. [Figure 5A] 3 is a front view showing a partial shape of a droplet placed at a third position shown in FIG. 2. FIG. [Figure 5B] 5B is a perspective view showing a three-dimensional shape of a droplet calculated from the partial shape of the droplet shown in FIG. 5A. FIG. [Figure 5C]3 is a perspective view showing the falling path of droplets discharged from the droplet discharge unit shown in FIG. 2 and the point where the droplets land on the display substrate. FIG. [Figure 6] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to another embodiment of the present invention. [Figure 7] 7 is a perspective view showing the relationship between the droplet shown in FIG. 6 and a measurement surface measured by a sensing unit. [Figure 8] 7 is a perspective view showing a plurality of planar shapes of droplets sensed through the sensing unit shown in FIG. 6. FIG. [Figure 9] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 10A] 10 is a side view showing the cross-sectional shape of a droplet sensed through the sensing unit shown in FIG. 9. [Figure 10B] 10 is a side view showing the cross-sectional shape of a droplet sensed through the sensing unit shown in FIG. 9. [Figure 10C] 10 is a side view showing the cross-sectional shape of a droplet sensed through the sensing unit shown in FIG. 9. [Figure 11] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 12] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 13] FIG. 10 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention. [Figure 14] 1 is a plan view showing a display device manufactured using an apparatus for manufacturing a display device according to an embodiment of the present invention; [Figure 15] 15 is a cross-sectional view showing the display device shown in FIG. 14. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0037] The present invention can be embodied in various forms by incorporating various modifications, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. The advantages and features of the present invention, as well as methods for achieving them, will become clearer with reference to the following detailed description of the embodiments together with the drawings. However, the present invention is not limited to the following embodiments, and may be embodied in various forms.

[0038] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the drawings, identical or corresponding components will be denoted by the same reference numerals, and duplicate descriptions thereof will be omitted.

[0039] In the following examples, terms such as "first" and "second" are used to distinguish one component from another, and not in a limiting sense.

[0040] In the following examples, singular expressions include plural expressions unless the context clearly indicates otherwise.

[0041] In the following examples, the terms "comprise" or "have" mean that the features or components described in the specification are present, and do not preclude the possibility that one or more other features or components may be added.

[0042] In the following examples, when a film, region, component, or other part is said to be on or above another part, this does not only include the case where it is directly on top of the other part, but also the case where another film, region, component, or the like is interposed between them.

[0043] In the drawings, the size of elements may be exaggerated or reduced for the sake of clarity. For example, the size and thickness of each element shown in the drawings are arbitrarily shown for the sake of clarity, and the present invention is not necessarily limited to the illustrated examples.

[0044] In the following embodiments, the X-axis, Y-axis, and Z-axis are not limited to the three axes on a Cartesian coordinate system, but may be interpreted in a broader sense including this. For example, the X-axis, Y-axis, and Z-axis may be perpendicular to each other, or may indicate different directions that are not perpendicular to each other.

[0045] When an embodiment can be implemented differently, the order of certain steps may be different from that described. For example, two steps described in succession may be performed substantially simultaneously, or may be performed in the reverse order of that described.

[0046] 1 is a perspective view showing an apparatus for manufacturing a display device according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a part of the apparatus for manufacturing a display device shown in FIG.

[0047] 1 and 2, the display device manufacturing apparatus 100 may include a support unit 110, a gantry 120, a moving unit 130, a droplet ejecting unit 140, a sensing unit 150, a storage unit 160, and a control unit 180.

[0048] The support 110 may include a stage 111 , a guide member 112 , a substrate moving member 113 , and a substrate rotating member 114 .

[0049] The stage 111 may include online marks (not shown) for aligning the display substrate S.

[0050] Here, the display substrate S may be a display device under manufacture. The display substrate S may be glass or may include a polymer resin such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate (PC), cellulose triacetate (TAC), or cellulose acetate propionate.

[0051] The guide members 112 may be disposed spaced apart on both sides of the substrate moving member 113. The length of the guide members 112 may be longer than the edge length of the display substrate S. Here, the distance between the guide members 112 and the edge length of the display substrate S may be measured in the Y direction of FIG.

[0052] A gantry 120 may be disposed on the guide member 112. In one embodiment, the guide member 112 may include a rail that allows the gantry 120 to move linearly along the longitudinal direction of the guide member 112. In particular, the guide member 112 may include a linear motion rail.

[0053] The substrate moving member 113 may be disposed on the stage 111. The substrate moving member 113 may extend along the longitudinal direction of the guide member 112. For example, referring to FIG. 1, the substrate moving member 113 may extend along the Y direction. The substrate moving member 113 may also include a rail along which the substrate rotating member 114 can move linearly. In particular, the substrate moving member 113 may include a linear motion rail.

[0054] The substrate rotating member 114 may be rotatably disposed on the substrate moving member 113. When the substrate rotating member 114 is rotated, the display substrate S disposed on the substrate rotating member 114 may be rotated. In one embodiment, the substrate rotating member 114 may rotate about a rotation axis perpendicular to a surface of the stage 111 on which the display substrate S is placed. When the substrate rotating member 114 rotates about a rotation axis perpendicular to a surface of the stage 111 on which the display substrate S is placed, the display substrate S disposed on the substrate rotating member 114 may also rotate about a rotation axis perpendicular to the surface of the stage 111 on which the display substrate S is placed. In this case, the substrate rotating member 114 may fix the display substrate S after it is placed on the substrate. For example, the substrate rotating member 114 may include one of a vacuum chuck, an electrostatic chuck (ESC chuck), or an adhesive chuck.

[0055] The gantry 120 may be disposed on the guide member 112. That is, the gantry 120 may be disposed on the guide members 112 that are disposed spaced apart on both sides of the substrate moving member 113.

[0056] The gantry 120 can move along the longitudinal direction of the guide member 112. In one embodiment, the gantry 120 can be moved linearly manually or automatically using a motor cylinder (electric cylinder; for example, including a stepping motor or servo motor and a ball screw). For example, the gantry 120 can be moved automatically using a linear motion block that moves along a linear motion rail.

[0057] The moving unit 130 may move linearly on the gantry 120. For example, the gantry 120 may include a rail that allows the moving unit 130 to move linearly. In this case, the droplet ejecting unit 140 may be disposed on the moving unit 130 and move together with the moving unit 130 when the moving unit 130 moves.

[0058] The moving unit 130 and the droplet discharging unit 140 may be arranged in various ways. For example, there may be one moving unit 130 and one droplet discharging unit 140. In such a case, the droplet discharging unit 140 may include one head and at least one nozzle disposed in the head to discharge droplets DR.

[0059] In another example, a plurality of droplet ejection units 140 may be provided, and a single moving unit 130 may be provided. Here, the plurality of droplet ejection units 140 may be arranged on a single moving unit 130 and may be moved simultaneously by the movement of the moving unit 130. In such a case, each droplet ejection unit 140 may include at least one or more heads equipped with at least one or more nozzles.

[0060] In yet another example, a plurality of moving units 130 and a plurality of droplet discharging units 140 may be provided. Here, it may be said that one droplet discharging unit 140 is disposed on one moving unit 130, or that some of the plurality of droplet discharging units 140 are disposed on one moving unit 130, and other some of the plurality of droplet discharging units 140 are disposed on another moving unit 130.

[0061] For the sake of convenience, the following detailed description will be centered on the case where one droplet ejection section 140 is arranged on one moving section 130.

[0062] The moving unit 130 may include a plurality of moving units 130. In such a case, the number of moving units 130 may be arranged corresponding to the number of droplet ejecting units 140. For example, the moving unit 130 may include a first moving unit 131, a second moving unit 132, and a third moving unit 133.

[0063] The first moving unit 131 and the second moving unit 132 may be spaced apart such that the distance between them is the same as the distance between the second moving unit 132 and the third moving unit 133. In another embodiment, the distance between the first moving unit 131 and the second moving unit 132 and the distance between the second moving unit 132 and the third moving unit 133 may be different from each other. In this case, the first moving unit 131 to the third moving unit 133 may move independently of each other.

[0064] The moving unit 130 can move linearly on the gantry 120. Specifically, the moving unit 130 can move along the longitudinal direction of the gantry 120. For example, at least one of the first moving unit 131, the second moving unit 132, and the third moving unit 133 can move along the x direction or the −x direction (the opposite direction to the x direction).

[0065] In one embodiment, the moving unit 130 can be manually moved linearly. In another embodiment, the moving unit 130 can be automatically moved linearly by using a motor, a cylinder, or the like. For example, the moving unit 130 may include a linear motion block that moves along a linear motion rail.

[0066] The droplet ejection unit 140 may be disposed in the moving unit 130. For example, the first droplet ejection unit 141 may be disposed in the first moving unit 131. In another example, the second droplet ejection unit 142 may be disposed in the second moving unit 132. In yet another example, the third droplet ejection unit 143 may be disposed in the third moving unit 133.

[0067] The droplet ejection unit 140 may eject droplets DR onto the display substrate S or the container 160. Here, the droplets DR may be liquid crystal, alignment liquid, or ink of red, green, blue, or the like in which pigment particles are mixed in a solvent. In another embodiment, the droplets DR may be a polymer or low-molecular organic material corresponding to an emission layer of an organic light-emitting display device. In yet another embodiment, the droplets DR may include a solution containing inorganic particles such as quantum dot material.

[0068] The first droplet ejection unit 141, the second droplet ejection unit 142, and the third droplet ejection unit 143 may each independently adjust the amount of droplets DR they eject. Here, the first droplet ejection unit 141, the second droplet ejection unit 142, and the third droplet ejection unit 143 are each electrically connected to the control unit 180. Therefore, the first droplet ejection unit 141, the second droplet ejection unit 142, and the third droplet ejection unit 143 may each adjust the amount of droplets DR ejected by the control unit 180. In this case, at least one of the first droplet ejection unit 140, the second droplet ejection unit 142, and the third droplet ejection unit 143 may include at least one nozzle that ejects one droplet DR. In this case, if a plurality of nozzles are provided, at least one of the plurality of nozzles may provide the droplets DR inside the opening 19OP shown in FIG. 15 . For example, one nozzle may provide the droplets DR inside one opening 19OP. As another example, at least two or more nozzles may provide droplets DR inside one opening 19OP.

[0069] The sensing unit 150 can measure the shape of a portion of the outer surface of the droplet DR discharged from the droplet discharge unit 140 or the cross-sectional shape of the droplet DR relative to any one surface. The sensing unit 150 can have various forms. For example, the sensing unit 150 can include a confocal microscope, an interferometric microscope, or a chromatic confocal line sensor. Here, a confocal microscope is a microscope that obtains multiple 2D images of an object at different depths and reconstructs the 3D structure of the object based on the images. Examples of confocal microscopes include a chromatic confocal microscope and a chromatic line confocal microscope. An interferometric microscope is a microscope that observes and quantitatively measures changes in the microstructural irregularities and phase changes of an object. Examples of interferometric microscopes include a laser interferometric microscope and a white light interferometric microscope. For convenience of explanation, the following detailed description will be given focusing on the case where the sensing unit 150 includes a confocal line sensor.

[0070] In one embodiment, one sensing unit 150 may be provided to sense a plurality of droplets DR at a time. In another embodiment, a plurality of sensing units 150 may be provided, with one sensing unit 150 disposed corresponding to one droplet ejection unit 140 to sense droplets DR ejected from one droplet ejection unit 140. In another embodiment, a plurality of sensing units 150 may be provided, with one of the plurality of sensing units 150 sensing at least one droplet DR ejected from a portion of the plurality of droplet ejection units 140, and another of the plurality of sensing units 150 sensing at least one droplet DR ejected from another portion of the plurality of droplet ejection units 140. For convenience of explanation, the following detailed description will be focused on a case where a plurality of sensing units 150 are provided and one sensing unit 150 senses droplets DR ejected from one droplet ejection unit 140.

[0071] In one embodiment, the sensing unit 150 may be fixedly disposed on the stage 111. In such a case, a plurality of sensing units 150 may be provided, and each sensing unit 150 may be arranged to correspond to each droplet ejection unit 140. In another embodiment, although not shown in the drawings, the sensing unit 150 may be slidably disposed on the stage 111. In such a case, the number of sensing units 150 may be equal to or less than the number of droplet ejection units 140, and the position of the sensing unit 150 may be variable to correspond to the position of the droplet ejection unit 140 to be measured.

[0072] The storage unit 160 may be disposed between the guide members 112. Here, the storage unit 160 can temporarily store the droplets DR when measuring the droplets DR falling from the droplet discharge unit 140. Such a storage unit 160 may be disposed on the stage 111. As another example, the storage unit 160 may be disposed on the lower surface of the stage 111. In such a case, a hole may be formed in the stage 111 at a portion where the storage unit 160 is disposed.

[0073] The control unit 180 can calculate at least one of the three-dimensional shape of the droplets DR, the falling speed of the droplets DR, the falling path of the droplets DR, and the ejection angle of the droplets DR based on the results measured by the sensing unit 150. The control unit 180 can also control the entire display device manufacturing apparatus 100.

[0074] The display device manufacturing apparatus 100 described above can supply droplets DR to the display substrate S to form an organic layer on the display substrate S. In this case, the display device manufacturing apparatus 100 needs to supply the droplets DR to the display substrate S in accurate amounts to each predetermined position on the display substrate S. To confirm this, each droplet ejection unit 140 can be disposed corresponding to the storage unit 160, and then the droplets DR can be ejected into the storage unit 160 and detected by the sensing unit 150. As another example, each droplet ejection unit 140 can eject droplets DR onto the display substrate S, and the sensing unit 150 can detect the droplets DR. As yet another example, although not shown in the drawings, a test substrate (not shown) having the same shape as the display substrate S can be placed on a separately provided support plate or the like at the portion where the substrate rotation unit 114 or the storage unit 160 is disposed, and droplets DR can be supplied to the test substrate (not shown) from the droplet ejection unit 140 and detected by the sensing unit 150. However, for the sake of convenience, the following detailed description will be centered on the case where the droplet ejection unit 140 ejects droplets DR into the storage unit 160 and the sensing unit 150 senses such droplets DR.

[0075] The sensing unit 150 can sense the droplet DR between the droplet discharge unit 140 and the storage unit 160. In such a case, the sensing unit 150 can sense the shape of a part of the outer surface of the droplet DR. For example, the sensing unit 150 can irradiate the outer surface shape of the droplet DR with laser light toward a first plane SF1 parallel to the XZ plane in FIG. 2, and sense the part of the outer surface shape of the droplet DR where the laser light is reflected off the droplet DR and returned.

[0076] Specifically, when a droplet DR falls from the droplet discharge unit 140, the position of the droplet DR may change over time. For example, a droplet DR disposed at a first position PO1 after a first time has elapsed immediately after falling from the droplet discharge unit 140 may have a long tail due to the attractive force between the droplet DR and the nozzle of the droplet discharge unit 140. Also, a droplet DR disposed at a second position PO2 after a second time has elapsed immediately after falling from the droplet discharge unit 140 has a tail that is more contracted than the droplet DR disposed at the first position PO1. A droplet DR disposed at a third position PO3 after a third time has elapsed immediately after falling from the droplet discharge unit 140 has a tail that is more contracted than the droplet DR disposed at the second position PO2, becoming almost spherical.

[0077] The sensing unit 150 can sense the droplets DR at the first, second, and third times as described above. In this case, the intervals between the times when the droplets DR start to fall from the droplet discharge unit 140, the first time, the interval between the first and second times, and the interval between the second and third times may be the same. That is, the sensing unit 150 can sense the positions of the falling droplets DR over time by sensing the droplets DR at regular time intervals.

[0078] The control unit 180 can calculate the three-dimensional shape of the droplet DR based on the shape of a portion of the outer surface of the droplet DR sensed as described above. At this time, the control unit 180 can calculate the volume of the droplet DR based on the three-dimensional shape of the droplet DR. The control unit 180 can also calculate the fall path of the droplet DR based on the position of the droplet DR sensed by the sensing unit 150 at each time. The control unit 180 can also calculate the discharge angle of the droplet DR by connecting the fall path of the droplet DR to the point where the droplet DR is initially discharged and calculating the angle formed between the length of the nozzle of the droplet discharge unit 140 and the fall path. The control unit 180 can also calculate the velocity of the droplet DR based on the position of the droplet DR at each time.

[0079] The control unit 180 can control at least one of the droplet discharge unit 140 and the moving unit 130 based on at least one of the volume of the droplet DR, the falling path of the droplet DR, the discharge angle of the droplet DR, and the discharge speed of the droplet DR.

[0080] For example, the amount of droplets DR discharged from the droplet discharge unit 140 or the discharge speed of the droplets DR can be adjusted. In addition, by changing the position of the droplet discharge unit 140 using the moving unit 130, the discharge angle of the droplets DR and the falling path of the droplets DR can be changed, allowing the droplets DR to land at accurate positions on the display substrate S. As another example, the droplet discharge unit 140 can be cleaned, or the moving speed of the display substrate S or the moving speed of the droplet discharge unit 140 can be controlled depending on the discharge angle of the droplets DR or the falling path of the droplets DR. Details of the above control methods will be described later.

[0081] Therefore, the display device manufacturing apparatus 100 and the display device manufacturing method can supply a precise amount of droplets DR to the display substrate S at precise positions.

[0082] Furthermore, the display device manufacturing apparatus 100 and the display device manufacturing method can manufacture a precise display device.

[0083] Hereinafter, a method for measuring the falling path of the droplet DR, the falling speed of the droplet DR, the ejection angle of the droplet DR, and the volume of the droplet DR will be described in detail.

[0084] Figure 3A is a front view showing a partial shape of a droplet placed at a first position shown in Figure 2. Figure 3B is a perspective view showing a three-dimensional shape of a droplet calculated from the partial shape of the droplet shown in Figure 3A. Hereinafter, the same reference numerals as those in Figures 1 and 2 indicate the same components.

[0085] 3A and 3B, when a droplet DR is discharged from the droplet discharge unit 140 and positioned at a first position PO1 for a first time, the sensing unit 150 may sense a portion of the outer surface of the cross-section of the droplet DR positioned at the first position PO1 on the first plane SF1. Since the distance traveled by the sensing unit 150 varies depending on the color of the laser emitted from the sensing unit 150, the sensing unit 150 can sense the distance from the sensing unit 150 to the outer surface of the droplet DR by sensing the wavelength of the laser reflected by the droplet DR. In this case, the sensing unit 150 may be arranged to face in a direction perpendicular to the drop path of the droplet DR. That is, the sensing unit 150 may be arranged on a side of the drop path of the droplet DR (e.g., in the X-axis direction in FIG. 3A).

[0086] The sensing unit 150 can sense a portion of the outer surface of the droplet DR arranged on a first plane SF1 that includes the fall path of the droplet DR as shown in FIG. 3A or is parallel to the fall path of the droplet DR.

[0087] The control unit 180 may calculate the three-dimensional shape of the droplet DR based on the result of sensing by the sensing unit 150. Specifically, in one embodiment, the control unit 180 may assume that a line connecting both ends of a portion of the shape of the outer surface of the droplet DR sensed by the sensing unit 150 is the center line CL. In another embodiment, the center line CL may be any line parallel to a line perpendicular to one surface of the display substrate S on which the droplet DR lands. In another embodiment, the center line CL may be the same as or parallel to the falling path of the droplet DR. In this case, the falling path of the droplet DR may be parallel to a line perpendicular to one surface of the display substrate S.

[0088] The control unit 180 can calculate the three-dimensional shape of the droplet DR by rotating a part of the outer surface shape of the droplet DR with the center line CL as a reference.

[0089] The control unit 180 may store the three-dimensional shape of the droplet DR. In this case, the control unit 180 may calculate a first center CE1 of the droplet DR. In this case, the center CE1 may be the center of gravity of the three-dimensional shape of the droplet DR, the geometric center of the three-dimensional shape, etc.

[0090] In this case, the control unit 180 can calculate the position of the droplet DR on the X-axis, Y-axis, and Z-axis in FIG. 2 using a virtual point where the X-axis, Y-axis, and Z-axis in FIG. 2 intersect as a reference point. For example, the control unit 180 can set the center of the tip of the nozzle of the droplet ejection unit 140 from which the droplet DR falls as a reference point, and compare the calculated first center CE1 of the droplet DR to how far the first center CE1 of the droplet DR has moved from the reference point along the X-axis, Y-axis, and Z-axis. In this case, the control unit 180 can calculate the distance from the reference point to the first center CE1 of the droplet DR in the Y-axis direction. After calculating the first center CE1 of the droplet DR based on the results of sensing by the sensing unit 150, the control unit 180 can calculate the distance between the first center CE1 of the droplet DR and the reference point in the X-axis direction. The control unit 180 can also calculate the distance between the first center CE1 of the droplet DR and the reference point in the Z-axis direction. After calculating the distances, the control unit 180 may calculate and store the X, Y, and Z coordinates of the first center CE1 of the droplet DR relative to the reference point.

[0091] Fig. 4A is a front view showing the shape of a portion of a droplet placed at the second position PO2 shown in Fig. 2. Fig. 4B is a perspective view showing the three-dimensional shape of a droplet calculated using the shape of the portion of the droplet as shown in Fig. 4A. Hereinafter, the same reference numerals as in Figs. 1 and 2 indicate the same components.

[0092] 4A and 4B, at a second time after the droplet DR is discharged, the droplet DR may fall further from the first position PO1 and be positioned at a second position PO2. The sensing unit 150 may sense the droplet DR positioned at the second position PO2. In this case, the sensing method of the sensing unit 150 may be the same as described above. In this case, the first plane SF1 on which a portion of the surface of the droplet DR sensed by the sensing unit 150 is projected may be the same plane as the first plane SF1 shown in FIGS. 3A and 3B or a plane parallel to it.

[0093] The control unit 180 may calculate the three-dimensional shape of the droplet DR placed at the second position PO2 sensed by the sensing unit 150. In this case, the method of calculating the three-dimensional shape of the droplet DR may be the same as or similar to that described above.

[0094] After calculating the three-dimensional shape of the droplet DR placed at the second position PO2, the control unit 180 may store the three-dimensional shape of the droplet DR at the second position PO2. At this time, the three-dimensional shape of the droplet DR may be stored in a separately provided storage unit (not shown) connected to the control unit 180. In addition, the control unit 180 may calculate a second center CE2 of the droplet DR at the second position PO2 from the calculated three-dimensional shape of the droplet DR.

[0095] In this case, the control unit 180 may calculate the positions in the Z-axis, X-axis, and Y-axis directions of the reference point relative to the second center CE2 of the droplet DR at the second position PO2. In particular, after calculating each distance, the control unit 180 may calculate and store the X, Y, and Z coordinates of the second center CE2 of the droplet DR relative to the reference point. This calculation method may be similar to the calculation method for the first center CE1 described above, and therefore a detailed description thereof will be omitted.

[0096] Fig. 5A is a front view showing the shape of a portion of a droplet placed at the third position shown in Fig. 2. Fig. 5B is a perspective view showing the three-dimensional shape of a droplet calculated using the shape of the portion of the droplet as shown in Fig. 5A. Fig. 5C is a perspective view showing the falling path and landing point on the display substrate of a droplet ejected from the droplet ejection unit shown in Fig. 2. Hereinafter, the same reference numerals as in Figs. 1 and 2 indicate the same components.

[0097] 5A through 5C, the droplet DR may reach a third position PO3 at a third time after being discharged from the droplet discharge unit 140. At this time, the sensing unit 150 may sense the droplet DR that has reached the third position PO3. The method by which the sensing unit 150 senses the droplet DR at the third position PO3 is the same as or similar to the method described above, and therefore a detailed description thereof will be omitted. In this sensing operation, the sensing unit 150 may sense a portion of the surface of the droplet DR reflected on a first plane SF1. In this case, the first plane SF1 may be the same plane as or parallel to the first planes shown in FIGS. 3A and 3B, 4A and 4B.

[0098] The control unit 180 can calculate the three-dimensional shape of the droplet DR at the third position PO3 based on the result of sensing by the sensing unit 150. The control unit 180 can also calculate the center of the three-dimensional shape of the droplet DR. In such a case, the three-dimensional shape of the droplet DR at the third position PO3 may be substantially the same as or similar to a sphere.

[0099] By calculating the three-dimensional shape of the droplet DR at the first position PO1, the second position PO2, and the third position PO3 as described above, the control unit 180 can calculate the volume of the droplet DR at each position. For example, the control unit 180 can calculate the volume of the droplet DR at each position by creating a three-dimensional shape using a straight line connecting some of the ends of the planar shape of the droplet DR at each position as a center line CL and calculating the volume of such a three-dimensional shape.

[0100] Furthermore, when the droplet DR moves from one position to another, the control unit 180 can calculate the falling speed of the droplet DR based on the time and the distance traveled (the distance between positions). That is, the control unit 180 can calculate the falling speed of the droplet DR based on the distance in the Z-axis direction from the tip of the nozzle of the droplet discharge unit 140 to the first position PO1 and the time required to travel that distance. The control unit 180 can also calculate the falling speed of the droplet DR based on the distance in the Z-axis direction between the first position PO1 and the second position PO2 and the time it takes for the droplet DR to fall from the first position PO1 to the second position PO2. The control unit 180 can also calculate the falling speed of the droplet DR based on the distance in the Z-axis direction between the second position PO2 and the third position PO3 and the time it takes for the droplet DR to fall from the second position PO2 to the third position PO3. The control unit 180 can also calculate the average falling speed of the droplet DR by arithmetically averaging the falling speeds calculated as described above.

[0101] The control unit 180 can also calculate the fall path of the droplet DR by connecting the centers of the droplets DR at each position to form an imaginary line and connecting this line to the point from which the droplet DR is discharged by the droplet discharge unit 140. The control unit 180 can also determine the angle formed by the center line CL and the fall path of the droplet DR as the discharge angle of the droplet DR and calculate this angle to calculate the discharge angle of the droplet DR. As another example, the control unit 180 can also determine the angle between an arbitrary line perpendicular to the tip surface of the nozzle of the droplet discharge unit 140 from which the droplet DR is discharged and the fall path of the droplet DR as the discharge angle of the droplet DR.

[0102] In the above case, the control unit 180 can calculate the discharge angle of the droplet DR in the droplet discharge unit 140 and the path of the droplet DR in the X-axis direction and the Y-axis direction, respectively. For example, as described above, the control unit 180 can calculate the angle at which the droplet DR is discharged in the X-axis direction or the Y-axis direction from the nozzle end of the droplet discharge unit 140 based on the respective positions of the first center CE1, second center CE2, and third center CE3 of the droplet DR. In particular, the control unit 180 can calculate the discharge angle of the droplet DR and the fall path of the droplet DR by connecting the X-axis and Y-axis coordinates of the droplet DR with respect to the reference point, as described above.

[0103] Through the above process, the control unit 180 can calculate at least one of the three-dimensional shape of the droplet DR, the volume of the droplet DR, the falling speed of the droplet DR, the falling path of the droplet DR, and the discharge angle of the droplet DR.

[0104] Thereafter, the control unit 180 can precisely control the droplet ejection unit based on the above-mentioned contents as described above.

[0105] When droplets DR are supplied to one opening 19OP of the pixel partition film 19 through one nozzle, the control unit 180 may compare the measured volume of the droplets DR with a preset volume. If it is determined that the measured volume of the droplets DR is less than the preset volume, the control unit 180 may control the droplet discharge unit 140 to increase the amount of droplets DR discharged from the droplet discharge unit 140. On the other hand, if it is determined that the measured volume of the droplets DR exceeds the preset volume, the control unit 180 may control the droplet discharge unit 140 to decrease the amount of droplets DR discharged from the droplet discharge unit 140. If the measured volume of the droplets DR is the same as the preset volume, the control unit 180 may control the droplet discharge unit 140 to maintain the current state. In this case, if the preset volume is the total amount of droplets DR that must be supplied to one opening 19OP of the pixel partition film 19, it is also possible to adjust the time for ejecting the droplets DR from the droplet ejection section 140 based on the measured amount of droplets DR.

[0106] Meanwhile, when droplets DR are supplied to one opening 19OP of the pixel division film 19 through at least two or more nozzles, the control unit 180 may calculate the volume of the droplets DR to be ejected from each nozzle. In such a case, the control unit 180 may control at least one of the at least two or more nozzles to provide the droplets DR through a set volume, which is a preset total amount of droplets DR to be supplied to one opening 19OP of the pixel division film 19. For example, the control unit 180 may adjust the volume of droplets DR ejected from one of the at least two or more nozzles to correspond to the preset total amount of droplets DR, and disable the operation of the other nozzles. In another embodiment, the control unit 180 may individually control the volume of droplets DR ejected from at least two or more nozzles to correspond to the preset total amount of droplets DR. In yet another embodiment, only some of three or more nozzles may be operated and the other nozzles may not be operated in accordance with the preset total amount of droplets DR. For example, when three nozzles supply droplets DR to one opening 19OP of the pixel division film 19, the total amount of droplets DR that must be supplied to one opening 19OP of the pixel division film 19 is 20 mm. 3 The amount of droplets ejected from one of the three nozzles is 9 mm 3 and the amount of droplets DR ejected from another one of the three nozzles is 10 mm 3 The amount of droplets DR ejected from another one of the three nozzles is 11 mm 3In this case, one of the three nozzles and another of the three nozzles may be operated, and the remaining one of the three nozzles may not be operated. By doing so, it is possible to accurately provide a preset amount of droplets DR to each opening 19OP of the pixel division film 19. As another example, when multiple nozzles are used, it is possible to make the total amount of droplets DR that must be supplied to one opening 19OP of the pixel division film 19 match a preset value by controlling the ejection times of droplets DR from each nozzle to be different from each other.

[0107] The control unit 180 may compare the calculated drop speed (or average drop speed) of the droplets DR with a preset speed. In this case, the control unit 180 may control the transfer speed of the display substrate S or the movement speed of the droplet discharge unit 140 based on the drop speed. For example, if the calculated drop speed (or average drop speed) of the droplets DR is less than the preset speed, the control unit 180 may control the transfer speed of the display substrate S or the movement speed of the droplet discharge unit 140 to be faster than the preset moving speed when the droplet discharge unit 140 discharges the droplets DR onto the display substrate S. On the other hand, if the calculated drop speed (or average drop speed) of the droplets DR exceeds the preset speed, the control unit 180 may control the movement speed of the display substrate S or the transfer speed of the droplet discharge unit 140 to be slower than the preset moving speed when the droplet discharge unit 140 discharges the droplets DR onto the display substrate S. Therefore, through the above process, it is possible to eject the droplets DR at accurate positions.

[0108] When the droplets DR are discharged onto the display substrate S and supplied to the openings 19OP of the pixel partition layer 19, the display substrate S or the droplet discharge unit 140 may be moved. In this case, the control unit 180 may control the movement of the display substrate S or the droplet discharge unit 140 by comparing the falling path of the droplets DR with the preset falling path as described above.

[0109] Specifically, the control unit 180 may compare the fall path of the droplet DR with a preset fall path. In this case, the control unit 180 may calculate a fall path of the droplet DR in the movement direction of the display substrate S or the droplet discharging unit 140 from among the fall paths of the droplet DR. Based on the fall path, the control unit 180 may calculate a point at which the droplet DR will land on the display substrate S. In particular, the control unit 180 may determine whether the calculated landing point of the droplet DR on the display substrate S passes through the preset set point D0 and is located on an arbitrary straight line that is parallel to the movement direction of the display substrate S or the droplet discharging unit 140 (e.g., the Y-axis direction in FIG. 5C ).

[0110] If it is determined that the calculated landing points of the droplets DR are located on the arbitrary straight line, the control unit 180 may compare the calculated landing points of the droplets DR with a preset set point D0. For example, if the landing points of the droplets DR calculated by the control unit 180 are the first landing point D1 shown in FIG. 5C, the control unit 180 may slow the movement speed of the display substrate S or the droplet discharging unit 140 below the preset set movement speed. On the other hand, if the calculated landing points of the droplets DR are the second landing point D2 shown in FIG. 5, the control unit 180 may speed up the movement speed of the display substrate S or the droplet discharging unit 140 above the preset set movement speed.

[0111] If it is determined that the calculated landing points of the droplets DR are not located on the arbitrary straight line, the control unit 180 may clean the droplet discharging unit 140. For example, if the calculated landing points of the droplets DR are the third landing point D3 and the fourth landing point D4 shown in FIG. 5C, the control unit 180 may clean the droplet discharging unit 140. As another example, the control unit 180 may control the moving unit 130 to adjust the position of the droplet discharging unit 140 so that the calculated landing points of the droplets DR are located on the arbitrary straight line.

[0112] The control unit 180 may compare the calculated discharge angle of the droplets DR with a preset discharge angle. In this case, the control unit 180 may calculate the calculated discharge angle of the droplets DR in the X-axis direction and the Y-axis direction. In this case, if the calculated discharge angle of the droplets DR exceeds a predetermined value in the X-axis direction of FIG. 5C , which is a direction other than the movement direction of the display substrate S or the droplet discharge unit 140, the control unit 180 may control the droplet discharge unit 140 to be cleaned. Although not shown, the droplet discharge unit 140 may be cleaned using a brush or by spraying a cleaning solution from a tank containing the cleaning solution.

[0113] If the calculated discharge angle of the droplets DR does not exceed a predetermined value in the X-axis direction of FIG. 5C , which is a direction other than the movement direction of the display substrate S or the droplet discharge unit 140, the control unit 180 may compare the calculated discharge angle of the droplets DR in the Y-axis direction of FIG. 5C , which is the movement direction of the display substrate S or the droplet discharge unit 140, with a preset angle. In this case, if the calculated discharge angle of the droplets DR has a first discharge angle θ1 shown in FIG. 5C , the control unit 180 may control the movement speed of the display substrate S or the droplet discharge unit 140 to be slower than the preset movement speed. On the other hand, if the calculated discharge angle of the droplets DR has a second discharge angle θ2 shown in FIG. 5C , the control unit 180 may control the movement speed of the display substrate S or the droplet discharge unit 140 to be faster than the preset movement speed. Therefore, through the above-described control, it is possible to make the droplets DR land at accurate positions on the display substrate S according to the discharge angle of the droplets DR.

[0114] The above-described control may be performed individually or in combination. That is, when at least two or more of the three-dimensional shape of the droplets DR, the volume of the droplets DR, the falling speed of the droplets DR, the falling path of the droplets DR, and the discharge angle of the droplets DR are different from the preset values, the control unit 180 controls each component of the display device manufacturing apparatus in a combined manner, thereby enabling the droplets DR to land at accurate positions on the display substrate S.

[0115] Fig. 6 is a perspective view showing a portion of an apparatus for manufacturing a display device according to another embodiment of the present invention. Fig. 7 is a perspective view showing the relationship between the droplets shown in Fig. 6 and a measurement surface measured by a sensing unit. Fig. 8 is a perspective view showing the shapes of a plurality of slice planes for the droplets sensed by the sensing unit shown in Fig. 6.

[0116] 6 to 8, the display device manufacturing apparatus 100 is similar to that described with reference to Figures 1 and 2. Here, the sensing unit 150 may include a confocal line sensor.

[0117] The sensing unit 150 can irradiate a laser onto any second plane (SF2, for example, a plane parallel to the XY plane in FIG. 6) perpendicular to the drop path of the droplet DR and sense part of the shape of the slice plane of the droplet DR through the reflected laser. In such a case, based on the result sensed by the sensing unit 150, the control unit 180 can calculate the shape of the portion (slice plane) where the second plane SF2 and the droplet DR overlap when passing through any second plane SF2 perpendicular to the drop path of the droplet DR.

[0118] Specifically, when the sensing unit 150 irradiates the droplet DR with a laser, the laser that collides with the droplet DR returns to the sensing unit 150, and the wavelength of the returned laser can be sensed by the sensing unit 150. The control unit 180 can calculate a portion DR-1A of the outer surface shape of the droplet DR by analyzing the result sensed by the sensing unit 150. The control unit 180 can determine that the portion DR-1A of the outer surface shape of the droplet DR is half of the entire slice planar shape DR-1B of the droplet DR where the droplet DR overlaps with the second plane SF2. Therefore, the control unit 180 can calculate the entire planar shape DR-1B of the droplet DR where the droplet DR overlaps with the second plane SF2 using the portion DR-1A of the outer surface shape of the droplet DR.

[0119] The calculated slice plane shape DR-1B of the droplet DR overlapping the second plane SF2 may be measured over time at regular intervals by the sensing unit 150. For example, after a certain time has elapsed since the droplet DR was discharged, the sensing unit 150 may emit a laser at regular intervals to sequentially sense the shape of the droplet DR on the second plane SF2.

[0120] The detected result is transmitted to the control unit 180, which may sequentially stack sliced ​​planar shapes of the droplet DR on the second plane SF2 over time. For example, the control unit 180 may stack the first planar shape DR-1 to the Nth planar shape DR-1 (where N is a natural number) of the droplet DR over time as shown in FIG.

[0121] 8, the control unit 180 can calculate the three-dimensional shape of the droplet DR by connecting the outer surfaces (peripheries) of the sliced ​​planar shapes of the droplet DR to each other. After the calculation of the three-dimensional shape of the droplet DR is completed, the control unit 180 can calculate the volume of the droplet DR.

[0122] Based on the calculated volume of the droplets DR, the control unit 180 can control the amount of droplets DR discharged from the droplet discharge unit 140. Alternatively, based on the calculated volume of the droplets DR, the control unit 180 can determine which nozzles to operate from at least two or more nozzles of the droplet discharge unit 140. Furthermore, the control unit 180 can adjust the discharge speed of the droplet discharge unit 140 to control the total amount of droplets DR that will subsequently land on the display substrate S.

[0123] Therefore, the display device manufacturing apparatus and the display device manufacturing method can adjust the droplets DR supplied to the display substrate S.

[0124] 9 is a perspective view showing a part of an apparatus for manufacturing a display device according to another embodiment of the present invention, and FIGS. 10A to 10C are side views showing cross-sectional shapes of droplets sensed by the sensing unit shown in FIG.

[0125] 9 to 10C, the manufacturing apparatus (not shown) for the display device is similar to that described with reference to FIGS.

[0126] The sensing unit 150 may include a confocal microscope or an interference microscope. In such a case, the sensing unit 150 can sense the planar shape of the falling droplet DR projected onto a third plane SF3 (e.g., a plane parallel to the XZ plane in FIG. 9). That is, the sensing unit 150 can sense the cross-sectional shape of the droplet DR disposed on the third plane SF3. Here, depending on the falling path of the droplet DR, the positions of the third planes SF3 may be the same or parallel to each other.

[0127] 10A to 10C, the sensing unit 150 may sense the cross-sectional shape of the droplet DR at each of a first position PO1, a second position PO2, and a third position PO3 of the droplet DR. In such a case, the sensing unit 150 may operate at regular time intervals to separately sense the position of the droplet DR at each position. In another embodiment, the sensing unit 150 may continuously sense the cross-sectional shape of the droplet DR.

[0128] The control unit 180 can calculate the three-dimensional shape of the droplet DR based on the cross-sectional shape of the droplet DR sensed by the sensing unit 150 at each position. In this case, the control unit 180 assumes that the shape of the droplet DR is the shape of a body of revolution. In addition, the control unit 180 can assume that an arbitrary straight line that passes through the cross-sectional shape of the droplet DR at each position and is parallel to a line perpendicular to the upper surface of the display substrate S is the center line CL. As another example, the control unit 180 can assume that the falling path of the droplet DR is the center line CL.

[0129] The control unit 180 can rotate the cross-sectional shape of the droplet DR based on the center line CL as described above. The control unit 180 determines that the shape of the droplet DR created by the rotation is the three-dimensional shape of the droplet DR.

[0130] The control unit 180 can perform the above-described operations at the first position PO1, the second position PO2, and the third position PO3, respectively. The control unit 180 can also calculate the center (not shown) of the droplet DR when the droplet DR is placed at the first position PO1 to the third position PO3. Here, the method of calculating the center of the droplet DR is the same as or similar to the method described with reference to FIGS. 3A to 5B, and therefore, a detailed description thereof will be omitted.

[0131] As described above, once the position of the droplet DR, the three-dimensional shape of the droplet DR, and the center of the droplet DR are determined for each position, the control unit 180 can calculate at least one of the volume of the droplet DR, the falling path of the droplet DR, the falling speed of the droplet DR, and the ejection angle of the droplet DR. In this case, the method by which the control unit 180 calculates at least one of the volume of the droplet DR, the falling path of the droplet DR, the falling speed of the droplet DR, and the ejection angle of the droplet DR is the same as or similar to the above description, and therefore a detailed description thereof will be omitted.

[0132] The control unit 180 can control the movement speed of the droplet discharge unit 40 or the display substrate S based on at least one of the volume of the droplet DR, the fall path of the droplet DR, the fall speed of the droplet DR, and the discharge angle of the droplet DR calculated as described above.

[0133] Specifically, if it is determined that the calculated volume of the droplets DR exceeds the preset volume, the control unit 180 reduces the amount of droplets DR discharged from the droplet discharge unit 140, thereby reducing the amount of droplets DR that land on the display substrate S within the same time. On the other hand, if it is determined that the calculated volume of the droplets DR is equal to or less than the preset volume, the control unit 180 increases the amount of droplets DR discharged from the droplet discharge unit 140, thereby increasing the amount of droplets DR that land on the display substrate S within the same time. As another example, it is also possible to adjust the time for discharging the droplets DR from the droplet discharge unit 140 by comparing the calculated volume of the droplets DR with the total amount of droplets DR that must be supplied to one opening 19OP of the pixel partition film 19. In yet another embodiment, when droplets DR are supplied to one opening 19OP of the pixel partition film 19 through at least two or more nozzles, the volume of the droplets DR supplied from each nozzle can be adjusted as described above, or the droplets DR can be supplied through only some of the multiple nozzles, or the supply time of the droplets DR from each nozzle can be controlled.

[0134] The control unit 180 may measure the falling path of the droplets DR or the discharge angle of the droplets DR, and then calculate the point where the droplets DR land on the display substrate S, thereby adjusting the position of the droplet discharge unit 140. In another embodiment, the control unit 180 may control the moving speed of the display substrate S or the moving speed of the droplet discharge unit 140, or control cleaning of the droplet discharge unit 140, as described above, through the falling path of the droplets DR or the discharge angle of the droplets DR.

[0135] Therefore, the display device manufacturing apparatus 100 and the display device manufacturing method can precisely control and discharge the droplets DR, and therefore can supply the droplets to precise positions on the display substrate S.

[0136] FIG. 11 is a perspective view showing a part of a manufacturing apparatus for a display device according to still another embodiment of the present invention.

[0137] Referring to FIG. 11, the display device manufacturing apparatus 100 may be similar to that described with reference to FIGS.

[0138] A plurality of sensing units 150 may be provided. In this case, the plurality of sensing units 150 may be arranged to face various directions. For example, one of the plurality of sensing units 150 may be arranged to face a direction perpendicular to the falling path of the droplets DR. Another of the plurality of sensing units 150 may be arranged to face a direction parallel to the falling path of the droplets DR.

[0139] That is, the plurality of sensing units 150 may include a first sensing unit 150A disposed in the center, and second and third sensing units 150B and 150C disposed apart from the first sensing unit 150A. In this case, the second sensing unit 150B and the third sensing unit 150C may be disposed opposite to each other.

[0140] The display device manufacturing apparatus 100 may include a second reflector 170B and a third reflector 170C disposed corresponding to the second sensing unit 150B and the third sensing unit 150C, respectively. Here, the second reflector 170B and the third reflector 170C may reflect the laser beam emitted from the second sensing unit 150B and the third sensing unit 150C, respectively, and may guide the laser beam reflected by the droplets DR to the second sensing unit 150B and the third sensing unit 150C, respectively. The second reflector 170B and the third reflector 170C may be mirror-shaped.

[0141] The first sensing unit 150A, the second sensing unit 150B, and the third sensing unit 150C can sense the droplet DR at different positions. For example, the first sensing unit 150A can sense the droplet DR when it is positioned at the second position PO2. The second sensing unit 150B can sense the droplet DR when it is positioned at the first position PO1. The third sensing unit 150C can sense the droplet DR when it is positioned at the third position PO3.

[0142] The first to third sensing units 150A to 150C may include one of a confocal microscope, an interferometric microscope, or a chromatic confocal line sensor. As another example, at least one of the first to third sensing units 150A to 150C may include one of a confocal microscope, an interferometric microscope, or a chromatic confocal line sensor, and the remaining ones of the first to third sensing units 150A to 150C may include another one of a confocal microscope, an interferometric microscope, or a chromatic confocal line sensor. As yet another embodiment, the first to third sensing units 150A to 150C may include different devices from each other, such as a confocal microscope, an interferometric microscope, or a chromatic confocal line sensor.

[0143] The first to third sensing units 150A to 150C can sense a portion of the planar shape of the droplet DR or the cross-sectional shape of the droplet DR projected onto an arbitrary plane at each of the first to third positions (height ranges). In this case, a control unit (not shown) can calculate the three-dimensional shape of the droplet DR at each position based on the results sensed by each sensing unit. Through this, the control unit can calculate the volume of the droplet DR. In addition, the control unit can calculate at least one of the drop path of the droplet DR, the drop velocity of the droplet DR, and the ejection angle of the droplet DR based on the position of the center of the droplet DR in each of the height ranges of the first to third positions.

[0144] Therefore, the display device manufacturing apparatus 100 and the display device manufacturing method are capable of precisely controlling and discharging the droplets DR, and therefore can supply the droplets to the display substrate S at precise positions.

[0145] FIG. 12 is a perspective view showing a part of a manufacturing apparatus for a display device according to still another embodiment of the present invention.

[0146] Referring to FIG. 12, a display device manufacturing apparatus (not shown) may be similar to that shown in FIG.

[0147] The sensing unit 150 may include, in addition to the first sensing unit 150A, the second sensing unit 150B, and the third sensing unit 150C, a fourth sensing unit 150D and a fifth sensing unit 150E that are arranged at an angle with respect to the falling path of the droplets DR. In such a case, the fourth sensing unit 150D and the fifth sensing unit 150E are disposed corresponding to the fourth reflecting unit 170D and the fifth reflecting unit 170E, and can irradiate a laser onto the falling path of the droplets DR.

[0148] In this case, the first to fifth sensing units 150A to 150E may be arranged to perform sensing at different heights. For example, the sensing locations of the first to fifth sensing units 150A to 150E may be arranged spaced apart from each other between the droplet ejection unit 140 and the container 160. Here, when the space between the droplet ejection unit 140 and the container 160 is vertically divided into a plurality of spaces (height sections), the first to fifth sensing units 150A to 150E can sense droplets DR passing through each space (height section).

[0149] At least one of the first to fifth sensing units 150A to 150E may include at least one of a confocal line sensor, a confocal microscope, and an interference microscope, as described above.

[0150] In the above case, the first sensing unit 150A to the fifth sensing unit 150E can each sense at least one of a portion of the planar shape of the droplet DR or the cross-sectional shape of the droplet DR projected onto an arbitrary plane at each position (each height range).

[0151] Based on the sensed result, the control unit 180 can calculate the three-dimensional shape of the droplet DR at each position (each height interval) and calculate the volume of the droplet DR at each position.

[0152] Furthermore, the control unit 180 can calculate the center of the three-dimensional shape of each droplet DR, and calculate at least one of the falling speed of each droplet DR, the falling path of the droplet DR, and the ejection angle of the droplet DR.

[0153] Based on at least one of the volume of the droplet DR, the falling speed of the droplet DR, the falling path of the droplet DR, and the ejection angle of the droplet DR calculated in this manner, the control unit 180 can adjust the ejection operation of the droplet ejection unit 140 so that the droplet DR lands precisely when it is supplied to the display substrate (not shown) by the droplet ejection unit 140.

[0154] Therefore, the display device manufacturing apparatus 100 and the display device manufacturing method can precisely control and discharge the droplets DR, and therefore can supply the droplets to precise positions on the display substrate S.

[0155] FIG. 13 is a perspective view showing a part of a display device manufacturing apparatus according to still another embodiment of the present invention.

[0156] Referring to FIG. 13, a manufacturing apparatus (not shown) for the display device may be similar to that described with reference to FIG.

[0157] Here, a plurality of sensing units 150 may be provided, and the plurality of sensing units 150 may include a first sensing unit 150A, a second sensing unit 150B, a third sensing unit 150C, a fourth sensing unit 150D, a fifth sensing unit 150E, and a sixth sensing unit 150F. In such a case, the first sensing unit 150A to the third sensing unit 150C may be arranged in the same manner as described above with reference to FIG. 10. The fourth sensing unit 150D may be disposed opposite the first sensing unit 150A, the fifth sensing unit 150E may be disposed opposite the second sensing unit 150B, and the sixth sensing unit 150F may be disposed opposite the third sensing unit 150C. Here, the first sensing unit 150A and the fourth sensing unit 150D may sense droplets DR passing through the same region (same height section). In addition, the second sensing unit 150B and the fifth sensing unit 150E may sense droplets DR passing through the same region (same height section), and the third sensing unit 150C and the sixth sensing unit 150F may sense droplets DR passing through the same region (same height section). In this case, the region sensed by the first sensing unit 150A and the fourth sensing unit 150D (second height section), the region sensed by the second sensing unit 150B and the fifth sensing unit 150E (first height section), and the region sensed by the third sensing unit 150C and the sixth sensing unit 150F (third height section) are different regions and may be contiguous or spaced apart from one another.

[0158] When the first to sixth sensing units 150A to 150F are arranged as described above, the fifth and sixth reflecting units 170E and 170F may be disposed corresponding to the fifth and sixth sensing units 150E and 150F, respectively. Here, the fifth and sixth reflecting units 170E and 170F may guide the lasers emitted from the fifth and sixth sensing units 150E and 150F, respectively, onto the falling path of the droplets DR.

[0159] In this case, the sensors that sense droplets DR in the same region (same height range) may have the same or different shapes. In particular, when the sensors have different shapes, one of the first sensor 150A and the fourth sensor 150D may include a confocal line sensor, and the other of the first sensor 150A and the fourth sensor 150D may include a confocal microscope or an interference microscope. One of the second sensor 150B and the fifth sensor 150E may include a confocal line sensor, and the other of the second sensor 150B and the fifth sensor 150E may include a confocal microscope or an interference microscope. Furthermore, one of the third sensor 150C and the sixth sensor 150F may include a confocal line sensor, and the other of the third sensor 150C and the sixth sensor 150F may include a confocal microscope or an interference microscope.

[0160] In this case, the results of sensing by each sensing unit may be transmitted to the control unit 180. The control unit 180 may calculate the three-dimensional shape of the droplet DR in each region (height section) based on the results of sensing by each sensing unit. In this case, the control unit 180 may calculate the three-dimensional shape of the droplet DR by combining the results of sensing by two sensing units disposed opposite each other and sensing droplets passing through the same region (height section). For example, the control unit 180 may calculate the three-dimensional shape of the droplet DR by averaging the three-dimensional shapes of the droplet DR sensed and calculated in one region (height section).

[0161] As described above, based on the results of sensing the droplet DR passing through each region, the control unit 180 can calculate at least one of the three-dimensional shape of the droplet DR, the volume of the droplet DR, the falling path of the droplet DR, and the ejection angle of the droplet DR.

[0162] The control unit 180 can control the droplet ejection unit 140 based on the above results.

[0163] Therefore, the display device manufacturing apparatus 100 and the display device manufacturing method can precisely control and discharge the droplets DR, and therefore can supply the droplets to precise positions on the display substrate S.

[0164] 14 is a plan view showing a display device manufactured using an apparatus for manufacturing a display device according to an embodiment of the present invention, and FIG. 15 is a cross-sectional view showing the display device shown in FIG.

[0165] 14 and 15, the display device 1 may include a display substrate S. Such a display substrate S may include a substrate 10 and layers of the display layer DL excluding the intermediate layer (light-emitting layer 22) and the common electrode 23.

[0166] A display layer DL and a thin-film encapsulation layer TFE may be disposed on the substrate 10. The display layer DL may include a pixel circuit layer PCL and a display element layer DEL.

[0167] The substrate 10 may be glass or may comprise a polymer resin such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate, cellulose triacetate, or cellulose acetate propionate.

[0168] A barrier layer (not shown) may be further included between the display layer DL and the substrate 10. This barrier layer is a barrier layer that prevents penetration of external foreign matter, and is made of silicon nitride (SiN x , x>0), silicon oxide (SiO x , x>0).

[0169] A pixel circuit layer PCL is disposed on the substrate 10. Fig. 15 illustrates the pixel circuit layer PCL, which includes a buffer layer 11, a first gate insulating layer 13a, a second gate insulating layer 13b, an interlayer insulating layer 15, and a planarizing insulating layer 17 disposed below (on the substrate 10 side) and / or above (on the opposite side from the substrate 10) the thin film transistor TFT and components of the thin film transistor TFT.

[0170] The buffer layer 11 may contain an inorganic insulator such as silicon nitride, silicon oxynitride, or silicon oxide, and may be a single layer film or a multilayer film containing the aforementioned inorganic insulator.

[0171] The thin film transistor TFT includes a semiconductor layer 12, which may include polysilicon. Alternatively, the semiconductor layer 12 may include amorphous silicon, an oxide semiconductor, an organic semiconductor, or the like. The semiconductor layer 12 may include a channel region 12c, and a drain region 12a and a source region 12b disposed on either side of the channel region 12c, respectively. A gate electrode 14 may overlap the channel region 12c.

[0172] The gate electrode 14 may include a low-resistance metal material. The gate electrode 14 may include a conductive material such as molybdenum (Mo), aluminum (Al), copper (Cu), or titanium (Ti), and may be formed as a laminated film or a single layer containing the above materials.

[0173] The first gate insulating layer 13a between the semiconductor layer 12 and the gate electrode 14 is made of silicon oxide (SiO2), silicon nitride (SiN x ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0174] A second gate insulating layer 13b may be provided to cover the gate electrode 14. The second gate insulating layer 13b may be made of silicon oxide (SiO2), silicon nitride (SiN), or the like, similar to the first gate insulating layer 13a. x ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO2).

[0175] An upper electrode Cst2 of the storage capacitor Cst may be disposed above the second gate insulating layer 13b (on the side opposite to the substrate 10). The upper electrode Cst2 overlaps with the gate electrode 14 below it (on the substrate 10 side). Here, the gate electrode 14 and the upper electrode Cst2, which overlap with the second gate insulating layer 13b sandwiched therebetween, may form the storage capacitor Cst. That is, the gate electrode 14 may function as a lower electrode Cst1 of the storage capacitor Cst.

[0176] In this manner, the storage capacitor Cst and the thin film transistor TFT may be formed to overlap each other, or in some embodiments, the storage capacitor Cst may be formed not to overlap the thin film transistor TFT.

[0177] The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and / or copper (Cu), and may be a single layer film or a stacked film of the aforementioned materials.

[0178] The interlayer insulating layer 15 can cover the upper electrode Cst2. The interlayer insulating layer 15 can be made of silicon oxide (SiO2), silicon nitride (SiN x), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), zinc oxide (ZnO2), etc. The interlayer insulating layer 15 may be a single layer film or a multilayer film containing the inorganic insulators described above.

[0179] The drain electrode 16a and the source electrode 16b may be located on the interlayer insulating layer 15. The drain electrode 16a and the source electrode 16b may include a material with excellent conductivity. The drain electrode 16a and the source electrode 16b may include a conductive material such as molybdenum (Mo), aluminum (Al), copper (Cu), or titanium (Ti), and may be formed as a laminated film or a single layer containing the above materials. In one embodiment, the drain electrode 16a and the source electrode 16b may have a three-layer laminated structure of Ti / Al / Ti.

[0180] The planarization insulating layer 17 may include an organic insulating layer, such as a general-purpose polymer such as polymethyl methacrylate (PMMA) or polystyrene (PS), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aryl ether polymer, an amide polymer, a fluorine-based polymer, a p-xylene polymer, a vinyl alcohol polymer, or a blend thereof.

[0181] The display element layer DEL is disposed on the pixel circuit layer PCL having the above-described structure. The display element layer DEL includes an organic light emitting diode OLED, and a pixel electrode 21 of the organic light emitting diode OLED can be electrically connected to the thin film transistor TFT through a contact hole in the planarization insulating layer 17.

[0182] The pixel PX may include an organic light emitting diode OLED and a thin film transistor TFT. Each pixel PX emits, for example, red, green, or blue light through the organic light emitting diode OLED, or emits red, green, blue, or white light.

[0183] The pixel electrode 21 may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). In another embodiment, the pixel electrode 21 may include a reflective film including silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof. In another embodiment, the pixel electrode 21 may further include a film formed of ITO, IZO, ZnO, or In2O3 above and / or below the reflective film.

[0184] A pixel partition film 19 having an opening 19OP exposing a central portion of the pixel electrode 21 is disposed on the pixel electrode 21. The pixel partition film 19 may include an organic insulator and / or an inorganic insulator. The opening 19OP can determine the extent of an emitting area (hereinafter referred to as an emitting area, EA) of light emitted from the organic light emitting diode OLED. For example, the width of the opening 19OP corresponds to the width of the emitting area EA.

[0185] An emissive layer 22 may be disposed in the opening 19OP of the pixel partition film 19. The emissive layer 22 may include a polymer or low-molecular-weight organic material that emits light of a predetermined color. In another embodiment, the emissive layer 22 may include a quantum dot material. Such an emissive layer 22 may be formed by ejecting droplets using the display device manufacturing apparatus according to an embodiment of the present invention.

[0186] Although not shown, a first functional layer and a second functional layer may be disposed above and below the light-emitting layer 22, respectively. The first functional layer may include, for example, a hole transport layer (HTL) or a hole transport layer and a hole injection layer (HIL). The second functional layer is an optional component disposed on the light-emitting layer 22. The second functional layer may include an electron transport layer (ETL) and / or an electron injection layer (EIL). The first functional layer and / or the second functional layer may be a common layer formed to cover the entire substrate 10, similar to the common electrode 23 described below.

[0187] The common electrode 23 may be made of a conductive material with a low work function. For example, the common electrode 23 may include a (semi-)transparent layer (e.g., a metal layer at least partially forming a mesh or lattice pattern) containing silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or an alloy thereof. Alternatively, the common electrode 23 may further include a transparent conductive layer such as ITO, IZO, ZnO, or In2O3 on the (semi-)transparent layer containing the aforementioned material.

[0188] In one embodiment, the thin film sealing layer TFE includes at least one inorganic sealing layer and at least one organic sealing layer, and as one example, FIG. 15 illustrates that the thin film sealing layer TFE includes a first inorganic sealing layer 31, an organic sealing layer 32, and a second inorganic sealing layer 33 stacked in sequence.

[0189] The first inorganic encapsulation layer 31 and the second inorganic encapsulation layer 33 may include one or more inorganic materials selected from the group consisting of aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer 32 may include a polymer-based material. Examples of polymer-based materials include acrylic resin, epoxy resin, polyimide, and polyethylene. In one embodiment, the organic encapsulation layer 32 may include acrylate.

[0190] In another embodiment, the thin film encapsulation layer TFE may have a structure in which the substrate 10 and a transparent upper substrate are bonded together by a sealing member at the periphery surrounding the display area, thereby sealing the internal space between the substrate 10 and the upper substrate. A moisture absorbent or a filler may be disposed in the internal space. The sealing member may be a sealant, and in another embodiment, the sealing member may be made of a material that is hardened by a laser. For example, the sealing member may be frit. Specifically, the sealing member may be made of an organic sealant such as a urethane-based resin, an epoxy-based resin, or an acrylic-based resin, or an inorganic sealant such as silicone. Examples of urethane-based resins include urethane acrylate. Examples of acrylic resins include butyl acrylate and ethylhexyl acrylate. The sealing member may be made of a material that is hardened by heat.

[0191] A touch electrode layer (not shown) including a touch electrode may be disposed on the thin film encapsulation layer TFE, and an optical functional layer (not shown) may be disposed on the touch electrode layer. The touch electrode layer may acquire coordinate information based on an external input, for example, a touch event. The optical functional layer may reduce the reflectance of light (external light) incident on the display device 1 from the outside and / or improve the color purity of light emitted from the display device 1. In one embodiment, the optical functional layer may include a phase retarder and a polarizer. The phase retarder may be a film type or a liquid crystal coating type and may include a λ / 2 phase retarder and / or a λ / 4 phase retarder. The polarizer may also be a film type or a liquid crystal coating type. The film type may include a stretched synthetic resin film, and the liquid crystal coating type may include liquid crystals aligned according to a predetermined alignment. The phase retarder and the polarizer may further include a protective film.

[0192] In another embodiment, the optically functional layer may include a black matrix and a plurality of color filters. The plurality of color filters may be arranged in consideration of the hue of light emitted from each pixel of the display device 1. The plurality of color filters may each include a red, green, or blue pigment or dye. Alternatively, each of the plurality of color filters may further include quantum dots in addition to the aforementioned pigments or dyes. Alternatively, some of the plurality of color filters may include scattering particles such as titanium oxide without including the aforementioned pigments or dyes. Such color filters may be formed by ejecting droplets using a display device manufacturing apparatus according to an embodiment of the present invention.

[0193] In another embodiment, the optically functional layer may include a destructive interference structure. The destructive interference structure may include a first reflective layer and a second reflective layer disposed on different layers. The first reflected light and the second reflected light reflected by the first reflective layer and the second reflective layer, respectively, may destructively interfere with each other, thereby reducing the reflectance of external light.

[0194] An adhesive may be disposed between the touch electrode layer and the optical function layer. The adhesive may be a pressure-sensitive adhesive (PSA) or any other adhesive known in the art.

[0195] Although the present invention has been described above with reference to the embodiments shown in the drawings, these are merely illustrative, and those skilled in the art will understand that various modifications and variations of the embodiments are possible. Therefore, the true technical scope of protection of the present invention should be determined by the technical spirit of the claims.

[0196] In a preferred specific embodiment, the background and solution means are as follows.

[0197] When forming patterns such as light-emitting layers and color filters of organic light-emitting display devices, droplets are ejected and landed at predetermined locations (especially at each opening in a pixel partition film or each pixel dot area) using an inkjet method.

[0198] Accurate control of the amount of ink supplied by ejection is important in order to obtain a predetermined color density, etc. Therefore, in the past, ink was ejected onto a test substrate or the like and the change in weight was accurately measured.

[0199] In recent years, as in Patent Documents 1 and 2, it has been proposed to capture falling droplets with a camera or laser.

[0200] However, it has not been easy to accurately and quickly capture the three-dimensional contour of a droplet and the droplet volume based on this contour, with minimal equipment and at low cost.

[0201] Through intensive research, the present inventors came up with the idea of ​​employing a confocal microscope or a confocal sensor as disclosed in Patent Document 3.

[0202] To embody this idea, the specific examples are as follows: A1 to A3. More specifically, the specific examples are any of B1 to B3, and preferably at least any of C1 to C3.

[0203] A1: A plurality of height sections in the falling path of the droplet are captured by the respective sensing units (150; particularly, a confocal microscope or a confocal sensor). In this way, the outline of the droplet is captured sequentially by the respective sensing units (150) as the droplet falls.

[0204] A2 Based on the detection by the sensor, the three-dimensional outline of the droplet is estimated and constructed at each point in time (each height interval) of the drop.

[0205] A3 Then, based on such a three-dimensional contour, the position of the center (center of gravity or geometric center) of the droplet at each time point (each height interval) is determined, and based on this, the falling speed, discharge angle, etc. are determined.

[0206] B1: A virtual plane SF1 is set that includes the drop path and the sensing end of the sensing unit (150) (FIG. 2), and the sensing unit (150) captures the half of the droplet's outline on the virtual plane SF1 (the right half in FIGS. 2 and 3A). Then, this half-plane outline is rotated around the drop path to construct a three-dimensional outline of the droplet (FIG. 3B).

[0207] B2: We set up a virtual plane SF2 perpendicular to the droplet's falling path (Fig. 7), and capture a number of slice planes formed by the droplet being cut by SF2 (Fig. 8). Using the series of slice planes thus obtained, we then construct a three-dimensional outline of the droplet.

[0208] B3: A virtual plane SF3 is set that includes the drop path and is perpendicular to the line connecting this plane to the sensing unit 150 (Fig. 9), and the cross section of the droplet cut by this virtual plane is captured by the sensing unit 150. Based on this detection, a three-dimensional outline of the droplet is constructed by rotating it around the drop path.

[0209] C1: To enable a shorter fall path to be captured by more sensors 150, a means for bending light such as laser light, such as a reflecting mirror, is used as appropriate (FIGS. 11-12). In this way, the sensors 150 can be arranged to face horizontally, vertically, and diagonally.

[0210] C2 The same height section in the falling path can be captured by multiple sensing parts with different shapes, and in particular, can be captured by a confocal microscope and an interference microscope (Figure 13,

[0159] ).

[0211] C3: When the substrate onto which the droplets are supplied, or the stage for this, and the discharge unit 140 are moved relative to each other in one direction, the speed of the relative movement is adjusted depending on how far the impact point deviates from the intended point in the direction of relative movement (FIG. 5C). Furthermore, if there is excessive deviation in a direction perpendicular to the direction of relative movement (FIG. 5C), the droplets are removed by cleaning. After this, droplets are supplied again. [Explanation of symbols]

[0212] 1 Display device 10 Substrate 100 Display device manufacturing equipment 110 Support part 120 Gantry 130 Mobile Unit 140 Droplet discharge part 150 Sensing part 160 Storage area 170 Control Unit

Claims

1. a droplet ejection unit including a nozzle for ejecting droplets; a sensing unit that sets an arbitrary imaginary plane on a falling path of the droplet that falls from the droplet discharge unit onto a substrate when the droplet falls, and senses the shape of a part of the outer surface of the droplet projected onto the arbitrary plane, or the cross-sectional shape of the droplet projected onto the arbitrary plane; a control unit that calculates at least one of a volume of the droplet, a drop velocity of the droplet, a discharge angle at which the droplet is discharged from the nozzle, and a drop path of the droplet moving from the nozzle to the substrate based on the result sensed by the sensing unit, The display device manufacturing apparatus, wherein the sensing unit includes a confocal microscope or a confocal sensor.

2. A droplet ejection unit including a nozzle for ejecting droplets; a sensing unit that sets an arbitrary imaginary plane on a falling path of the droplet that falls from the droplet discharge unit onto a substrate when the droplet falls, and senses the shape of a part of the outer surface of the droplet projected onto the arbitrary plane, or the cross-sectional shape of the droplet projected onto the arbitrary plane; a control unit that calculates at least one of a volume of the droplet, a drop velocity of the droplet, a discharge angle at which the droplet is discharged from the nozzle, and a drop path of the droplet moving from the nozzle to the substrate based on the result sensed by the sensing unit, The control unit calculates the three-dimensional shape of the droplet by rotating the shape of a portion of the outer surface of the droplet sensed by the sensing unit based on the drop path of the droplet, and calculates the volume of the droplet based on the three-dimensional shape of the droplet.

3. A droplet ejection unit including a nozzle for ejecting droplets; a sensing unit that sets an arbitrary imaginary plane on a falling path of the droplet that falls from the droplet discharge unit onto a substrate when the droplet falls, and senses the shape of a part of the outer surface of the droplet projected onto the arbitrary plane, or the cross-sectional shape of the droplet projected onto the arbitrary plane; a control unit that calculates at least one of a volume of the droplet, a drop velocity of the droplet, a discharge angle at which the droplet is discharged from the nozzle, and a drop path of the droplet moving from the nozzle to the substrate based on the result sensed by the sensing unit, the sensing unit senses the shape of a part of the outer surface of one of the falling droplets at regular time intervals on a plane perpendicular to the falling direction of the droplet; The control unit converts the shape of a portion of the outer surface of the droplet sensed by the sensing unit into a planar shape on a plane perpendicular to the direction in which the droplet falls, and calculates the three-dimensional shape of the droplet based on the planar shape of the droplet.

4. 4. The display device manufacturing apparatus of claim 1, wherein the sensing unit senses the droplets at regular time intervals, and the control unit connects the centers of the droplets sequentially sensed by the sensing unit to calculate a falling path of the droplets or an ejection angle of the droplets.

5. the sensing unit senses the droplet at regular time intervals when the droplet falls, 4. The display device manufacturing apparatus according to claim 1, wherein the control unit calculates a falling speed of the droplet based on a moving distance of the droplet for a certain period of time.

6. ejecting droplets; sensing at least one of a shape of a part of an outer surface of the droplet projected onto an arbitrary plane on the falling path of the droplet and a cross section of the droplet; and calculating at least one of a volume of the droplet, a drop velocity of the droplet, a drop path of the droplet, and an ejection angle of the droplet based on at least one of the sensed shape of a portion of the outer surface of the droplet and the cross section of the droplet; sensing a shape of a portion of an outer surface of the droplet on a plane perpendicular to a fall path of the droplet; calculating a cross-sectional shape of the droplet on a plane perpendicular to the falling path based on a shape of a portion of the outer surface of the droplet; sensing a shape of a portion of the outer surface of the droplet on a plane perpendicular to the falling path at regular time intervals; The method for manufacturing a display device further includes calculating a three-dimensional shape of the droplet based on the cross-sectional shape of the droplet calculated at regular time intervals.

7. A step of ejecting droplets; sensing at least one of a shape of a part of an outer surface of the droplet projected onto an arbitrary plane on the falling path of the droplet and a cross section of the droplet; and calculating at least one of a volume of the droplet, a drop velocity of the droplet, a drop path of the droplet, and an ejection angle of the droplet based on at least one of the sensed shape of a portion of the outer surface of the droplet and the cross section of the droplet; sensing a shape of a portion of an outer surface of the droplet on a plane including a falling path of the droplet; calculating a cross-sectional shape of the droplet on a plane including the falling path based on a shape of a portion of an outer surface of the droplet; The method for manufacturing a display device further includes: calculating a three-dimensional shape of the droplet by rotating the cross-sectional shape of the droplet based on a falling path of the droplet.

8. A step of ejecting droplets; sensing at least one of a shape of a part of an outer surface of the droplet projected onto an arbitrary plane on the falling path of the droplet and a cross section of the droplet; and calculating at least one of a volume of the droplet, a drop velocity of the droplet, a drop path of the droplet, and an ejection angle of the droplet based on at least one of the sensed shape of a portion of the outer surface of the droplet and the cross section of the droplet; The method for manufacturing a display device, wherein the sensing step is performed by a confocal microscope or a confocal sensor.

9. A step of ejecting droplets; sensing at least one of a shape of a part of an outer surface of the droplet projected onto an arbitrary plane on the falling path of the droplet and a cross section of the droplet; and calculating at least one of a volume of the droplet, a drop velocity of the droplet, a drop path of the droplet, and an ejection angle of the droplet based on at least one of the sensed shape of a portion of the outer surface of the droplet and the cross section of the droplet; In the calculating step, the detected shape of a portion of the outer surface of the droplet is rotated based on the falling path of the droplet to calculate a three-dimensional shape of the droplet, and the volume of the droplet is calculated based on the three-dimensional shape of the droplet.

10. calculating a three-dimensional shape of the droplet based on at least one of a shape of a portion of an outer surface of the droplet and a cross section of the droplet; calculating the three-dimensional shape of the droplet at regular time intervals; 10. The method of claim 7, further comprising: connecting centers of the three-dimensional shapes of the droplets spaced apart from each other to calculate at least one of an ejection angle of the droplets and a falling path of the droplets.

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