Magnetic sensors and inspection devices

Abstract

To provide a magnetic sensor and an inspection device capable of detecting with high sensitivity.SOLUTION: A magnetic sensor includes a first element portion. The first element portion includes a first magnetic element, a first conductive member, a first magnetic member, and a first opposing magnetic member. The first magnetic element includes a first end portion and a first other end portion. A direction from the first end portion to the first other end portion is along a first direction. A second direction from the first conductive member to the first magnetic element crosses the first direction. A third direction from the first magnetic member to the first opposing magnetic member crosses a plane including the first direction and the second direction. The first magnetic member includes a first other magnetic portion and a first magnetic portion. A first other magnetic portion length along the first direction of the first other magnetic portion is longer than a first magnetic portion length along the first direction of the first magnetic portion. The first conductive member overlaps the first magnetic portion in the second direction. The first conductive member does not overlap the first other magnetic portion in the second direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to a magnetic sensor and an inspection device. [Background technology]

[0002] There are magnetic sensors that use magnetic layers. There are inspection devices that use magnetic sensors. High detection sensitivity is desired for magnetic sensors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-207167 Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide a magnetic sensor and an inspection device capable of highly sensitive detection. [Means for solving the problem]

[0005] According to an embodiment of the present invention, the magnetic sensor includes a first element unit. The first element unit includes a first magnetic element, a first conductive member, a first magnetic member, and a first opposing magnetic member. The first magnetic element includes a first end portion and a first other end portion. A direction from the first end portion to the first other end portion is along a first direction. A second direction from the first conductive member to the first magnetic element intersects with the first direction. A third direction from the first magnetic member to the first opposing magnetic member intersects with a plane including the first direction and the second direction. A position of at least a portion of the first magnetic element in the third direction is between a position of the first magnetic member in the third direction and a position of the first opposing magnetic member in the third direction. The first magnetic member includes a first other magnetic portion and a first magnetic portion. A direction from the first other magnetic portion to the first magnetic portion is along the third direction. The first other magnetic portion has a length along the first direction that is longer than the length of the first magnetic portion along the first direction. The first conductive member overlaps the first magnetic portion in the second direction. The first conductive member does not overlap the first other magnetic portion in the second direction. [Brief explanation of the drawings]

[0006] [Figure 1] 1A and 1B are schematic views illustrating the magnetic sensor according to the first embodiment. [Figure 2] FIG. 2 is a schematic plan view illustrating a part of the magnetic sensor according to the first embodiment. [Figure 3] FIG. 3 is a schematic plan view illustrating a part of the magnetic sensor according to the first embodiment. [Figure 4] FIG. 4 is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment. [Figure 5] FIG. 5 is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment. [Figure 6] 6(a) to 6(c) are graphs illustrating the characteristics of the magnetic sensor according to the first embodiment. [Figure 7]7A and 7B are schematic plan views illustrating the magnetic sensor according to the first embodiment. [Figure 8] 8(a) and 8(b) are schematic views illustrating a part of the magnetic sensor according to the first embodiment. [Figure 9] 9A and 9B are schematic views illustrating a part of the magnetic sensor according to the first embodiment. [Figure 10] 10A and 10B are schematic views illustrating a part of the magnetic sensor according to the first embodiment. [Figure 11] 11A and 11B are schematic plan views illustrating the magnetic sensor according to the first embodiment. [Figure 12] FIG. 12 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. [Figure 13] FIG. 13 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. [Figure 14] FIG. 14 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. [Figure 15] FIG. 15 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. [Figure 16] FIG. 16 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. [Figure 17] FIG. 17 is a schematic perspective view showing an inspection device according to the second embodiment. [Figure 18] FIG. 18 is a schematic plan view showing an inspection device according to the second embodiment. [Figure 19] FIG. 19 is a schematic diagram showing a sensor and an inspection device according to an embodiment. [Figure 20] FIG. 20 is a schematic diagram showing an inspection device according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) 1A and 1B are schematic views illustrating the magnetic sensor according to the first embodiment. Fig. 1(a) is a plan view, and Fig. 1(b) is a cross-sectional view taken along line A1-A2 in Fig. 1(a).

[0009] 1(a) and 1(b), the magnetic sensor 110 according to the embodiment includes a first element unit 11E. The first element unit 11E includes a first magnetic element 11, a first conductive member 21, a first magnetic member 51, and a first opposing magnetic member 51A. The first magnetic element 11 includes a first end portion 11e and a first other end portion 11f. The direction from the first end portion 11e to the first other end portion 11f is along a first direction D1.

[0010] The first direction D1 is defined as the Y-axis direction. A direction perpendicular to the Y-axis direction is defined as the Z-axis direction. A direction perpendicular to the Y-axis direction and the Z-axis direction is defined as the X-axis direction.

[0011] As shown in FIG. 1(b), a second direction D2 from the first conductive member 21 to the first magnetic element 11 intersects with the first direction D1.

[0012] A third direction D3 from the first magnetic member 51 to the first opposing magnetic member 51A intersects a plane including the first direction D1 and the second direction D2. The position of at least a part of the first magnetic element 11 in the third direction D3 is between the position of the first magnetic member 51 in the third direction D3 and the position of the first opposing magnetic member 51A in the third direction D3.

[0013] For example, the length of the first magnetic element 11 along the first direction D1 is longer than the length of the first magnetic element 11 along the third direction D3. For example, the length of the first magnetic element 11 along the first direction D1 is longer than the length of the first magnetic element 11 along the second direction D2. This makes it easier to stabilize the magnetization of the magnetic layer included in the first magnetic element 11.

[0014] As shown in FIG. 1(a), the first magnetic member 51 includes a first other magnetic portion 51f and a first magnetic portion 51e. The direction from the first other magnetic portion 51f to the first magnetic portion 51e is along the third direction D3. The length (width) of the first other magnetic portion 51f in the first direction D1 is defined as a first other magnetic portion length 51fL. The length (width) of the first magnetic portion 51e in the first direction D1 is defined as a first magnetic portion length 51eL. The first other magnetic portion length 51fL is longer than the first magnetic portion length 51eL. The first other magnetic portion 51f is, for example, a wide portion. The first magnetic portion 51e is, for example, a narrow portion.

[0015] 1(a) and 1(b), the first conductive member 21 overlaps with the first magnetic portion 51e in the second direction D2. The first conductive member 21 does not overlap with the first other magnetic portion 51f in the second direction D2.

[0016] For example, the magnetic field around the first element unit 11E is collected by the first magnetic member 51 and the first opposing magnetic member 51A. The collected magnetic field is applied to the first magnetic element 11. The first magnetic member 51 and the first opposing magnetic member 51A function as, for example, an MFC (Magnetic Flux Concentrator). The magnetic field around the first element unit 11E includes the magnetic field to be detected.

[0017] As will be described later, a first current I1 (see FIG. 1(a)) containing an AC component is supplied to the first conductive member 21. The magnetic field based on the first current I1 is also collected by the first magnetic member 51 and the first opposing magnetic member 51A. The collected magnetic field based on the first current I1 is effectively applied to the first magnetic element 11. For example, high sensitivity can be obtained. A magnetic sensor capable of highly sensitive detection can be provided.

[0018] In the embodiment, the first conductive member 21 overlaps with the first magnetic portion 51e but does not overlap with the first other magnetic portion 51f, thereby allowing a magnetic field based on the first current I1 to be effectively applied to the first magnetic element 11. The first conductive member 21 overlaps with the narrow portion but does not overlap with the wide portion, thereby suppressing noise.

[0019] As shown in FIG. 1(a), there is a portion where the width changes between the first other magnetic portion 51f and the first magnetic portion 51e. When the first conductive member 21 overlaps the portion where the width changes, noise increases. This is thought to be due to the magnetic domains contained in the magnetic layer becoming non-uniform in the portion where the width changes. In the narrow portion, the magnetic domains are thought to be uniform. When the first conductive member 21 overlaps the narrow portion, noise is suppressed. High sensitivity can be obtained while suppressing noise. A magnetic sensor capable of highly sensitive detection can be provided.

[0020] As shown in FIG. 1(a), the first magnetic member 51 may further include a first intermediate magnetic portion 51m. The first intermediate magnetic portion 51m is located between the first other magnetic portion 51f and the first magnetic portion 51e in the third direction D3. The length of the first intermediate magnetic portion 51m along the first direction D1 is defined as a first intermediate magnetic portion length 51mL. The first intermediate magnetic portion length 51mL is between the first other magnetic portion length 51fL and the first magnetic portion length 51eL. The first intermediate magnetic portion length 51mL varies in the third direction D3. The first intermediate magnetic portion 51m is a portion whose width varies.

[0021] The rate of change of the first magnetic portion length 51eL in the third direction D3 is lower than the rate of change of the first intermediate magnetic portion length 51mL in the third direction D3. The rate of change of the first magnetic portion length 51eL in the third direction D3 may be substantially zero. For example, the first magnetic portion length 51eL may be substantially constant. The first conductive member 21 does not overlap with the first intermediate magnetic portion 51m in the second direction D2. This suppresses noise.

[0022] The rate of change of the first other magnetic portion length 51fL in the third direction D3 is lower than the rate of change of the first intermediate magnetic portion length 51mL in the third direction D3. The rate of change of the first other magnetic portion length 51fL in the third direction D3 may be substantially zero. For example, the first other magnetic portion length 51fL may be substantially constant.

[0023] In this example, the first intermediate magnetic portion 51m changes linearly in the third direction D3. The change in the first intermediate magnetic portion 51m in the third direction D3 may also be curved. The length of the first intermediate magnetic portion 51m along the third direction D3 may be short. The change in the first intermediate magnetic portion 51m in the third direction D3 may also be abrupt.

[0024] As shown in FIG. 1(a), the first opposing magnetic member 51A includes a first opposing other magnetic portion 51Af and a first opposing other magnetic portion 51Ae. The direction from the first opposing other magnetic portion 51Ae to the first opposing other magnetic portion 51Af is along the third direction D3. The length (width) of the first opposing other magnetic portion 51Af in the first direction D1 is defined as a first opposing other magnetic portion length 51AfL. The length (width) of the first opposing other magnetic portion 51Ae in the first direction D1 is defined as a first opposing other magnetic portion length 51AeL. The first opposing other magnetic portion length 51AfL is longer than the first opposing magnetic portion length 51AeL.

[0025] 1(a) and 1(b), the first conductive member 21 overlaps with the first opposing magnetic portion 51Ae in the second direction D2. The first conductive member 21 does not overlap with the first opposing other magnetic portion 51Af in the second direction D2.

[0026] As shown in FIG. 1(a), the first opposing magnetic member 51A may further include a first opposing intermediate magnetic portion 51Am. The first opposing intermediate magnetic portion 51Am is located between the first opposing other magnetic portion 51Af and the first opposing magnetic portion 51Ae in the third direction D3. The length of the first opposing intermediate magnetic portion 51Am along the first direction D1 is defined as a first opposing intermediate magnetic portion length 51AmL. The first opposing intermediate magnetic portion length 51AmL is between the first opposing other magnetic portion length 51AfL and the first opposing magnetic portion length 51AeL. The first opposing intermediate magnetic portion length 51AmL changes in the third direction D3.

[0027] The rate of change of the first opposing magnetic portion length 51AeL in the third direction D3 is lower than the rate of change of the first opposing intermediate magnetic portion length 51AmL in the third direction D3. The rate of change of the first opposing magnetic portion length 51AeL in the third direction D3 may be substantially zero. For example, the first opposing magnetic portion length 51AeL may be substantially constant. The first conductive member 21 does not overlap with the first opposing intermediate magnetic portion 51Am in the second direction D2. This suppresses noise.

[0028] The first opposing other magnetic portion length 51AfL may be the same as the first other magnetic portion length 51fL. The first opposing magnetic portion length 51AeL may be the same as the first magnetic portion length 51eL. The first opposing intermediate magnetic portion length 51AmL may be the same as the first intermediate magnetic portion length 51mL.

[0029] The strength of the magnetic field based on the first current I1 supplied to the first conductive member 21 may be higher than the strength of the magnetic field to be detected, for example. The magnetic field based on the first current I1 is collected by the first magnetic member 51 and the first opposing magnetic member 51A and effectively applied to the first magnetic element 11, thereby suppressing the dynamic range of the system, for example. High sensitivity can be obtained as a system.

[0030] As shown in FIG. 1(b), the first magnetic element 11 includes, for example, a first magnetic layer 11a, a first opposing magnetic layer 11b, and a first non-magnetic layer 11n. The direction from the first opposing magnetic layer 11b to the first magnetic layer 11a is along the second direction D2. The first non-magnetic layer 11n is located between the first opposing magnetic layer 11b and the first magnetic layer 11a. At least one of the first magnetic layer 11a and the first opposing magnetic layer 11b may include at least one selected from the group consisting of Fe, Co, and Ni. The first non-magnetic layer 11n may include, for example, at least one selected from the group consisting of Cu and Al. The first non-magnetic layer 11n may include, for example, an insulating material.

[0031] 1(b), an insulating member 10i may be provided around the first magnetic element 11, the first conductive member 21, the first magnetic member 51, and the first opposing magnetic member 51A, for example.

[0032] 1(a), the first conductive member 21 may include a first conductive portion 21e and a first other conductive portion 21f. The direction from the first conductive portion 21e to the first other conductive portion 21f is along a first direction D1.

[0033] The distance between the first conductive portion 21e and the first end 11e is shorter than the distance between the first conductive portion 21e and the first other end 11f. The distance between the first other conductive portion 21f and the first other end 11f is shorter than the distance between the first other conductive portion 21f and the first end 11e.

[0034] 1(a), the magnetic sensor 110 may further include a circuit unit 70. The circuit unit 70 includes a first circuit 71. The first circuit 71 is capable of supplying a first current I1 including an AC component to the first conductive member 21. For example, the first circuit 71 is electrically connected to the first conductive portion 21e and the first other conductive portion 21f.

[0035] FIG. 2 is a schematic plan view illustrating a part of the magnetic sensor according to the first embodiment. 2, the circuit unit 70 may further include a second circuit 72 and a third circuit 73. The second circuit 72 supplies an element current Id or an element voltage to the first magnetic element 11. For example, the second circuit 72 is electrically connected to the first end 11e and the first other end 11f.

[0036] The third circuit 73 is electrically connected to the first end 11e and the first other end 11f. The third circuit 73 is capable of outputting a signal Sg1 corresponding to the first electrical resistance of the first magnetic element 11.

[0037] For example, the third circuit 73 can derive a change in the first electrical resistance based on the frequency of the AC component included in the first current I1. This enables detection with further reduced noise. An example of the detection operation of the magnetic sensor 110 will be described later.

[0038] FIG. 3 is a schematic plan view illustrating a part of the magnetic sensor according to the first embodiment. 3, the length of the first magnetic portion 51e along the third direction D3 is defined as a first length w1, the length of the first intermediate magnetic portion 51m along the third direction D3 is defined as a second length w2, and the length of the first other magnetic portion 51f along the third direction D3 is defined as a third length w3.

[0039] For example, the first length w1 may be shorter than the third length w3, and for example, the second length w2 may be shorter than the third length w3.

[0040] FIG. 4 is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment. The horizontal axis of FIG. 4 is the first ratio RR1. The first ratio RR1 is the ratio of the sum of the first length w1 and the second length w2 to the third length w3. The first ratio RR1 is (w1+w2) / w3. The vertical axis of FIG. 4 is the gain G1. The gain G1 is normalized to 1 when the first magnetic portion 51e and the first intermediate magnetic portion 51m are not provided and the entire first magnetic member 51 is the first other magnetic portion 51f. In this example, the entire length (w1+w2+w3) of the first magnetic member 51 and the second length w2 are constant, and the first length w1 and the third length w3 are changed.

[0041] 4, when the first ratio RR1 is less than 1, the gain G1 exceeds 1. In this embodiment, the first ratio RR1 is preferably less than 1. It is more preferable that the first ratio RR1 is 0.5 or less. This allows for an even higher gain G1 to be obtained.

[0042] An example of the change in electrical resistance in a magnetic element will now be described. FIG. 5 is a graph illustrating the characteristics of the magnetic sensor according to the first embodiment. 5 represents the strength of the external magnetic field Hex applied to the first magnetic element 11. The vertical axis represents the electrical resistance Rx of the first magnetic element 11. FIG. 5 corresponds to the RH characteristics (resistance-magnetic field characteristics).

[0043] As shown in FIG. 5, the electrical resistance Rx has an even function characteristic with respect to the magnetic field (external magnetic field Hex, for example, a magnetic field in the X-axis direction) applied to the first magnetic element 11. For example, the electrical resistance Rx has a first value R1 when a first magnetic field Hex1 is applied to the first magnetic element 11. The electrical resistance Rx has a second value R2 when a second magnetic field Hex2 is applied to the first magnetic element 11. The electrical resistance Rx has a third value R3 when a third magnetic field Hex3 is applied to the first magnetic element 11. The absolute value of the first magnetic field Hex1 is smaller than the absolute value of the second magnetic field Hex2 and smaller than the absolute value of the third magnetic field Hex3. For example, the first magnetic field Hex1 is substantially zero. The direction of the second magnetic field Hex2 is opposite to the direction of the third magnetic field Hex3. The first value R1 is smaller than the second value R2 and smaller than the third value R3.

[0044] In the following, an example will be described in which the first current I1 is an AC current and does not substantially contain a DC component. The first current I1 (AC current) is supplied to the first conductive member 21. An AC magnetic field caused by the AC current is applied to the first magnetic element 11. An example of the change in the electrical resistance Rx at this time will be described.

[0045] 6(a) to 6(c) are graphs illustrating the characteristics of the magnetic sensor according to the first embodiment. Fig. 6(a) shows the characteristics when the signal magnetic field Hsig (external magnetic field) applied to the first magnetic element 11 is 0. Fig. 6(b) shows the characteristics when the signal magnetic field Hsig is positive. Fig. 6(c) shows the characteristics when the signal magnetic field Hsig is negative. These figures show the relationship between the magnetic field H and the resistance R (corresponding to the electrical resistance Rx).

[0046] As shown in FIG. 6(a), when the signal magnetic field Hsig is 0, the resistance R exhibits symmetric characteristics with respect to the positive and negative magnetic fields H. When the AC magnetic field Hac is zero, the resistance R exhibits a low resistance Ro. For example, the magnetization of the magnetization free layer rotates in substantially the same manner with respect to the positive and negative magnetic fields H. This results in, for example, symmetric resistance increase characteristics. The fluctuation of the resistance R with respect to the AC magnetic field Hac has the same value for positive and negative polarities. The period of change in the resistance R is 1 / 2 the period of the AC magnetic field Hac. The change in the resistance R does not substantially have a frequency component of the AC magnetic field Hac.

[0047] As shown in FIG. 6(b), when a positive signal magnetic field Hsig is applied, the characteristics of the resistance R shift toward the positive magnetic field H. In a positive AC magnetic field Hac, the resistance R increases. In a negative AC magnetic field Hac, the resistance R decreases.

[0048] As shown in FIG. 6(c), when a negative signal magnetic field Hsig is applied, the characteristics of the resistance R shift toward the negative magnetic field H. In a positive AC magnetic field Hac, the resistance R decreases. In a negative AC magnetic field Hac, the resistance R increases.

[0049] When a signal magnetic field Hsig of a predetermined magnitude is applied, the resistance R fluctuates differently depending on whether the AC magnetic field Hac is positive or negative. The period of the fluctuation of the resistance R depending on whether the AC magnetic field Hac is positive or negative is half the period of the AC magnetic field Hac. In response to the signal magnetic field Hsig, an output voltage with an AC frequency component having the same period as the period of the AC magnetic field Hac is generated.

[0050] The above characteristics are obtained when the signal magnetic field Hsig does not change over time. When the signal magnetic field Hsig changes over time, the following applies: The frequency of the signal magnetic field Hsig is defined as the signal frequency fsig. The frequency of the AC magnetic field Hac is defined as the AC frequency fac. In this case, an output corresponding to the signal magnetic field Hsig is generated at a frequency of fac±fsig.

[0051] When the signal magnetic field Hsig changes over time, the signal frequency fsig is, for example, 1 kHz or less. On the other hand, the AC frequency fac is sufficiently higher than the signal frequency fsig. For example, the AC frequency fac is 10 times or more the signal frequency fsig.

[0052] For example, by extracting an output voltage of a component (AC frequency component) having the same period (frequency) as the period (frequency) of the AC magnetic field Hac, the signal magnetic field Hsig can be detected with high accuracy. In the magnetic sensor 110 according to the embodiment, by using such characteristics, the external magnetic field Hex (signal magnetic field Hsig) to be detected can be detected with high sensitivity. In the embodiment, the external magnetic field Hex (signal magnetic field Hsig) and the AC magnetic field Hac due to the first current I1 can be efficiently applied to the first magnetic element 11. High sensitivity can be obtained.

[0053] One of the first magnetic layer 11a and the first opposing magnetic layer 11b may be a magnetization free layer, and the other of the first magnetic layer 11a and the first opposing magnetic layer 11b may be a reference layer. The electrical resistance changes as the angle between the magnetizations of these magnetic layers changes.

[0054] 7A and 7B are schematic plan views illustrating the magnetic sensor according to the first embodiment. 8(a) and 8(b) are schematic views illustrating a part of the magnetic sensor according to the first embodiment. Fig. 8(a) is a plan view, and Fig. 8(b) is a cross-sectional view taken along line B1-B2 of Fig. 8(a). 9A and 9B are schematic cross-sectional views illustrating a part of the magnetic sensor according to the first embodiment. Fig. 9(a) is a plan view, and Fig. 9(b) is a cross-sectional view taken along line C1-C2 of Fig. 9(a). 10(a) and 10(b) are schematic cross-sectional views illustrating a part of the magnetic sensor according to the first embodiment. Fig. 10(a) is a plan view, and Fig. 10(b) is a cross-sectional view taken along line D1-D2 in Fig. 10(a).

[0055] 7(a), the magnetic sensor 111 according to the embodiment further includes a second element unit 12E. In this example, the magnetic sensor 111 further includes a third element unit 13E and a fourth element unit 14E.

[0056] The second element portion 12E includes the second magnetic element 12, the second conductive member 22, the second magnetic member 52, and the second opposing magnetic member 52A. The second magnetic element 12 includes a second end portion 12e and a second other end portion 12f. The direction from the second end portion 12e to the second other end portion 12f is along the first direction D1.

[0057] As shown in FIG. 8(b), the direction from the second conductive member 22 to the second magnetic element 12 is along the second direction D2. As shown in FIG. 8(a), the second conductive member 22 includes a second conductive portion 22e and a second other conductive portion 22f. The direction from the second conductive portion 22e to the second other conductive portion 22f is along the first direction D1. The distance between the second conductive portion 22e and the second end 12e is shorter than the distance between the second conductive portion 22e and the second other end 12f. The distance between the second other conductive portion 22f and the second other end 12f is shorter than the distance between the second other conductive portion 22f and the second end 12e.

[0058] The direction from the second magnetic member 52 to the second opposing magnetic member 52A is along the third direction D3. The position of at least a part of the second magnetic element 12 in the third direction D3 is between the position of the second magnetic member 52 in the third direction D3 and the position of the second opposing magnetic member 52A in the third direction D3.

[0059] As shown in FIG. 7(b), in this example, the first other end 11f is electrically connected to the second end 12e. The first other conductive portion 21f is electrically connected to the second conductive portion 22e. The first other conductive portion 21f may be continuous with the second conductive portion 22e. The boundary between the first other conductive portion 21f and the second conductive portion 22e may be unclear or clear. One portion of one conductive member may correspond to the first conductive member 21, and another portion may correspond to the second conductive member 22.

[0060] 9(a), the third element portion 13E includes a third magnetic element 13, a third conductive member 23, a third magnetic member 53, and a third opposing magnetic member 53A. The third magnetic element 13 includes a third end portion 13e and a third other end portion 13f. The direction from the third end portion 13e to the third other end portion 13f is along the first direction D1.

[0061] As shown in FIG. 9(b), the direction from the third conductive member 23 to the third magnetic element 13 is along the second direction D2.

[0062] 9(a), the third conductive member 23 includes a third conductive portion 23e and a third other conductive portion 23f. The direction from the third conductive portion 23e to the third other conductive portion 23f is along the first direction D1. The distance between the third conductive portion 23e and the third end portion 13e is shorter than the distance between the third conductive portion 23e and the third other end portion 13f. The distance between the third other conductive portion 23f and the third other end portion 13f is shorter than the distance between the third other conductive portion 23f and the third end portion 13e.

[0063] 9(a) and 9(b), the direction from the third magnetic member 53 to the third opposing magnetic member 53A is along the third direction D3. The position of at least a portion of the third magnetic element 13 in the third direction D3 is between the position of the third magnetic member 53 in the third direction D3 and the position of the third opposing magnetic member 53A in the third direction D3.

[0064] 10(a), the fourth element part 14E includes a fourth magnetic element 14, a fourth conductive member 24, a fourth magnetic member 54, and a fourth opposing magnetic member 54A. The fourth magnetic element 14 includes a fourth end part 14e and a fourth other end part 14f. The direction from the fourth end part 14e to the fourth other end part 14f is along the first direction D1.

[0065] As shown in FIG. 10(b), the direction from the fourth conductive member 24 to the fourth magnetic element 14 is along the second direction D2.

[0066] 10(a), the fourth conductive member 24 includes a fourth conductive portion 24e and a fourth other conductive portion 24f. The direction from the fourth conductive portion 24e to the fourth other conductive portion 24f is along the first direction D1. The distance between the fourth conductive portion 24e and the fourth end portion 14e is shorter than the distance between the fourth conductive portion 24e and the fourth other end portion 14f. The distance between the fourth other conductive portion 24f and the fourth other end portion 14f is shorter than the distance between the fourth other conductive portion 24f and the fourth end portion 14e.

[0067] 10(a) and 10(b), the direction from the fourth magnetic member 54 to the fourth opposing magnetic member 54A is along the third direction D3. The position of at least a portion of the fourth magnetic element 14 in the third direction D3 is between the position of the fourth magnetic member 54 in the third direction D3 and the position of the fourth opposing magnetic member 54A in the third direction D3.

[0068] As shown in FIG. 7(b), in this example, the second other end 12f is electrically connected to the fourth other end 14f. The third end 13e is electrically connected to the first end 11e. The third other end 13f is electrically connected to the fourth end 14e. The second other conductive portion 22f is electrically connected to the fourth other conductive portion 24f. The third conductive portion 23e is electrically connected to the first conductive portion 21e. The third other conductive portion 23f is electrically connected to the fourth conductive portion 24e.

[0069] The third other conductive portion 23f may be continuous with the fourth conductive portion 24e. The boundary between the third other conductive portion 23f and the fourth conductive portion 24e may be unclear or clear. One portion of one conductive member may correspond to the third conductive member 23, and another portion may correspond to the fourth conductive member 24.

[0070] 7(a) and 7(b), the magnetic sensor 111 may include a circuit unit 70. The circuit unit 70 includes a first circuit 71, a second circuit 72, and a third circuit 73. The first circuit 71 is capable of supplying a first current I1 including an AC component between the first other conductive portion 21f and the third other conductive portion 23f.

[0071] The second circuit 72 is capable of supplying an element current Id or an element voltage between a first connection point CP1 of the first end 11e and the third end 13e and a second connection point CP2 of the second other end 12f and the fourth other end 14f.

[0072] The third circuit 73 can output a signal Sg1 corresponding to an electrical signal generated between a third connection point CP3 between the first other end 11 f and the second end 12 e and a fourth connection point CP4 between the third other end 13 f and the fourth end 14 e. By using a bridge circuit, detection with further suppressed noise is possible.

[0073] As shown in FIG. 8(a), the second magnetic member 52 includes a second other magnetic portion 52f and a second magnetic portion 52e. The direction from the second other magnetic portion 52f to the second magnetic portion 52e is along the third direction D3. The second other magnetic portion length 52fL of the second other magnetic portion 52f along the first direction D1 is longer than the second magnetic portion length 52eL of the second magnetic portion 52e along the first direction D1. The second conductive member 22 overlaps with the second magnetic portion 52e in the second direction D2. The second conductive member 22 does not overlap with the second other magnetic portion 52f in the second direction D2.

[0074] 8(a), the second magnetic member 52 may further include a second intermediate magnetic portion 52m. The second intermediate magnetic portion 52m is located between the second other magnetic portion 52f and the second magnetic portion 52e in the third direction D3. The length of the second intermediate magnetic portion 52m along the first direction D1 is defined as a second intermediate magnetic portion length 52mL. The second intermediate magnetic portion length 52mL is located between the second other magnetic portion length 52fL and the second magnetic portion length 52eL.

[0075] The rate of change of the second magnetic portion length 52eL in the third direction D3 is lower than the rate of change of the second intermediate magnetic portion length 52mL in the third direction D3. The second conductive member 22 does not overlap with the second intermediate magnetic portion 52m in the second direction D2. This suppresses noise. The rate of change of the second other magnetic portion length 52fL in the third direction D3 is lower than the rate of change of the second intermediate magnetic portion length 52mL in the third direction D3.

[0076] 9(a), for example, the third magnetic member 53 includes a third other magnetic portion 53f and a third magnetic portion 53e. The direction from the third other magnetic portion 53f to the third magnetic portion 53e is along the third direction D3. The third other magnetic portion length 53fL of the third other magnetic portion 53f along the first direction D1 is longer than the third magnetic portion length 53eL of the third magnetic portion 53e along the first direction D1. The third conductive member 23 overlaps with the third magnetic portion 53e in the second direction D2. The third conductive member 23 does not overlap with the third other magnetic portion 53f in the second direction D2.

[0077] As shown in FIG. 10(a), the fourth magnetic member 54 includes a fourth other magnetic portion 54f and a fourth magnetic portion 54e. The direction from the fourth other magnetic portion 54f to the fourth magnetic portion 54e is along the third direction D3. The fourth other magnetic portion length 54fL of the fourth other magnetic portion 54f along the first direction D1 is longer than the fourth magnetic portion length 54eL of the fourth magnetic portion 54e along the first direction D1. The fourth conductive member 24 overlaps with the fourth magnetic portion 54e in the second direction D2. The fourth conductive member 24 does not overlap with the fourth other magnetic portion 54f in the second direction D2.

[0078] 9(a), the third magnetic member 53 may further include a third intermediate magnetic portion 53m. The third intermediate magnetic portion 53m is located between the third other magnetic portion 53f and the third magnetic portion 53e in the third direction D3. The length of the third intermediate magnetic portion 53m along the first direction D1 is defined as a third intermediate magnetic portion length 53mL. The third intermediate magnetic portion length 53mL is located between the third other magnetic portion length 53fL and the third magnetic portion length 53eL.

[0079] The rate of change of the third magnetic portion length 53eL in the third direction D3 is lower than the rate of change of the third intermediate magnetic portion length 53mL in the third direction D3. The third conductive member 23 does not overlap with the third intermediate magnetic portion 53m in the second direction D2. This suppresses noise. The rate of change of the third other magnetic portion length 53fL in the third direction D3 is lower than the rate of change of the third intermediate magnetic portion length 53mL in the third direction D3.

[0080] 10(a), the fourth magnetic member 54 may further include a fourth intermediate magnetic portion 54m. The fourth intermediate magnetic portion 54m is located between the fourth other magnetic portion 54f and the fourth magnetic portion 54e in the third direction D3. The length of the fourth intermediate magnetic portion 54m along the first direction D1 is defined as a fourth intermediate magnetic portion length 54mL. The fourth intermediate magnetic portion length 54mL is located between the fourth other magnetic portion length 54fL and the fourth magnetic portion length 54eL.

[0081] The rate of change of the fourth magnetic portion length 54eL in the third direction D3 is lower than the rate of change of the fourth intermediate magnetic portion length 54mL in the third direction D3. The fourth conductive member 24 does not overlap with the fourth intermediate magnetic portion 54m in the second direction D2. This suppresses noise. The rate of change of the fourth other magnetic portion length 54fL in the third direction D3 is lower than the rate of change of the fourth intermediate magnetic portion length 54mL in the third direction D3.

[0082] 8(a), the second opposing magnetic member 52A includes a second opposing other magnetic portion 52Af and a second opposing other magnetic portion 52Ae. The direction from the second opposing other magnetic portion 52Ae to the second opposing other magnetic portion 52Af is along the third direction D3. The length (width) of the second opposing other magnetic portion 52Af in the first direction D1 is defined as a second opposing other magnetic portion length 52AfL. The length (width) of the second opposing other magnetic portion 52Ae in the first direction D1 is defined as a second opposing other magnetic portion length 52AeL. The second opposing other magnetic portion length 52AfL is longer than the second opposing magnetic portion length 52AeL.

[0083] 8(a) and 8(b), the second conductive member 22 overlaps with the second opposing magnetic portion 52Ae in the second direction D2. The second conductive member 22 does not overlap with the second opposing other magnetic portion 52Af in the second direction D2.

[0084] As shown in FIG. 8(a), the second opposing magnetic member 52A may further include a second opposing intermediate magnetic portion 52Am. The second opposing intermediate magnetic portion 52Am is located between the second opposing other magnetic portion 52Af and the second opposing magnetic portion 52Ae in the third direction D3. The length of the second opposing intermediate magnetic portion 52Am along the first direction D1 is defined as a second opposing intermediate magnetic portion length 52AmL. The second opposing intermediate magnetic portion length 52AmL is located between the second opposing other magnetic portion length 52AfL and the second opposing magnetic portion length 52AeL.

[0085] The rate of change of the second opposing magnetic portion length 52AeL in the third direction D3 is lower than the rate of change of the second opposing intermediate magnetic portion length 52AmL in the third direction D3. The second conductive member 22 does not overlap with the second opposing intermediate magnetic portion 52Am in the second direction D2. This suppresses noise.

[0086] As shown in FIG. 9(a), the third opposing magnetic member 53A includes a third opposing other magnetic portion 53Af and a third opposing other magnetic portion 53Ae. The direction from the third opposing other magnetic portion 53Ae to the third opposing other magnetic portion 53Af is along the third direction D3. The length (width) of the third opposing other magnetic portion 53Af in the first direction D1 is defined as a third opposing other magnetic portion length 53AfL. The length (width) of the third opposing other magnetic portion 53Ae in the first direction D1 is defined as a third opposing other magnetic portion length 53AeL. The third opposing other magnetic portion length 53AfL is longer than the third opposing magnetic portion length 53AeL.

[0087] 9(a) and 9(b), the third conductive member 23 overlaps with the third opposing magnetic portion 53Ae in the second direction D2. The third conductive member 23 does not overlap with the third opposing other magnetic portion 53Af in the second direction D2.

[0088] As shown in FIG. 9(a), the third opposing magnetic member 53A may further include a third opposing intermediate magnetic portion 53Am. The third opposing intermediate magnetic portion 53Am is located between the third opposing other magnetic portion 53Af and the third opposing magnetic portion 53Ae in the third direction D3. The length of the third opposing intermediate magnetic portion 53Am along the first direction D1 is defined as a third opposing intermediate magnetic portion length 53AmL. The third opposing intermediate magnetic portion length 53AmL is located between the third opposing other magnetic portion length 53AfL and the third opposing magnetic portion length 53AeL.

[0089] The rate of change of the third opposing magnetic portion length 53AeL in the third direction D3 is lower than the rate of change of the third opposing intermediate magnetic portion length 53AmL in the third direction D3. The third conductive member 23 does not overlap with the third opposing intermediate magnetic portion 53Am in the second direction D2. This suppresses noise.

[0090] As shown in FIG. 10(a), the fourth opposing magnetic member 54A includes a fourth opposing other magnetic portion 54Af and a fourth opposing other magnetic portion 54Ae. The direction from the fourth opposing other magnetic portion 54Ae to the fourth opposing other magnetic portion 54Af is along the third direction D3. The length (width) of the fourth opposing other magnetic portion 54Af in the first direction D1 is defined as a fourth opposing other magnetic portion length 54AfL. The length (width) of the fourth opposing other magnetic portion 54Ae in the first direction D1 is defined as a fourth opposing other magnetic portion length 54AeL. The fourth opposing other magnetic portion length 54AfL is longer than the fourth opposing magnetic portion length 54AeL.

[0091] 10(a) and 10(b), the fourth conductive member 24 overlaps with the fourth opposing magnetic portion 54Ae in the second direction D2. The fourth conductive member 24 does not overlap with the fourth opposing other magnetic portion 54Af in the second direction D2.

[0092] As shown in FIG. 10(a), the fourth opposing magnetic member 54A may further include a fourth opposing intermediate magnetic portion 54Am. The fourth opposing intermediate magnetic portion 54Am is located between the fourth opposing other magnetic portion 54Af and the fourth opposing magnetic portion 54Ae in the third direction D3. The length of the fourth opposing intermediate magnetic portion 54Am along the first direction D1 is defined as a fourth opposing intermediate magnetic portion length 54AmL. The fourth opposing intermediate magnetic portion length 54AmL is located between the fourth opposing other magnetic portion length 54AfL and the fourth opposing magnetic portion length 54AeL.

[0093] The rate of change of the fourth opposing magnetic portion length 54AeL in the third direction D3 is lower than the rate of change of the fourth opposing intermediate magnetic portion length 54AmL in the third direction D3. The fourth conductive member 24 does not overlap with the fourth opposing intermediate magnetic portion 54Am in the second direction D2. This suppresses noise.

[0094] 8(b), the second magnetic element 12 includes, for example, a second magnetic layer 12a, a second opposing magnetic layer 12b, and a second non-magnetic layer 12n. The direction from the second opposing magnetic layer 12b to the second magnetic layer 12a is along the second direction D2. The second non-magnetic layer 12n is located between the second opposing magnetic layer 12b and the second magnetic layer 12a.

[0095] 9(b), the third magnetic element 13 includes, for example, a third magnetic layer 13a, a third opposing magnetic layer 13b, and a third non-magnetic layer 13n. The direction from the third opposing magnetic layer 13b to the third magnetic layer 13a is along the second direction D2. The third non-magnetic layer 13n is located between the third opposing magnetic layer 13b and the third magnetic layer 13a.

[0096] 10(b), the fourth magnetic element 14 includes, for example, a fourth magnetic layer 14a, a fourth opposing magnetic layer 14b, and a fourth non-magnetic layer 14n. The direction from the fourth opposing magnetic layer 14b to the fourth magnetic layer 14a is along the second direction D2. The fourth non-magnetic layer 14n is located between the fourth opposing magnetic layer 14b and the fourth magnetic layer 14a.

[0097] At least one of the second magnetic layer 12a, the third magnetic layer 13a, and the fourth magnetic layer 14a may contain the material contained in the first magnetic layer 11a. At least one of the second opposing magnetic layer 12b, the third opposing magnetic layer 13b, and the fourth opposing magnetic layer 14b may contain the material contained in the first opposing magnetic layer 11b. At least one of the second non-magnetic layer 12n, the third non-magnetic layer 13n, and the fourth non-magnetic layer 14n may contain the material contained in the first non-magnetic layer 11n.

[0098] 11A and 11B are schematic plan views illustrating the magnetic sensor according to the first embodiment. 11(a), in the magnetic sensor 112 according to the embodiment, the second magnetic member 52 and the second opposing magnetic member 52A may be omitted from the second element portion 12E. The third magnetic member 53 and the third opposing magnetic member 53A may be omitted from the third element portion 13E. The configuration of the magnetic sensor 112 may be the same as that of the magnetic sensor 111. The magnetic sensor 112 can achieve high sensitivity while suppressing noise.

[0099] The magnetic sensor 112 includes a first element portion 11E, a second element portion 12E, a third element portion 13E, and a fourth element portion 14E. The first element portion 11E in the magnetic sensor 112 may be similar to the first element portion 11E in the magnetic sensor 110.

[0100] The second element portion 12E includes a second magnetic element 12 and a second conductive member 22. The second magnetic element 12 includes a second end portion 12e and a second other end portion 12f. The direction from the second end portion 12e to the second other end portion 12f is along the first direction D1.

[0101] The direction from the second conductive member 22 to the second magnetic element 12 is along the second direction D2. The second conductive member 22 includes a second conductive portion 22e and a second other conductive portion 22f. The direction from the second conductive portion 22e to the second other conductive portion 22f is along the first direction D1. The distance between the second conductive portion 22e and the second end 12e is shorter than the distance between the second conductive portion 22e and the second other end 12f. The distance between the second other conductive portion 22f and the second other end 12f is shorter than the distance between the second other conductive portion 22f and the second end 12e.

[0102] The third element portion 13E includes the third magnetic element 13 and the third conductive member 23. The third magnetic element 13 includes a third end portion 13e and a third other end portion 13f. The direction from the third end portion 13e to the third other end portion 13f is along the first direction D1.

[0103] The direction from the third conductive member 23 to the third magnetic element 13 is along the second direction D2. The third conductive member 23 includes a third conductive portion 23e and a third other conductive portion 23f. The direction from the third conductive portion 23e to the third other conductive portion 23f is along the first direction D1. The distance between the third conductive portion 23e and the third end 13e is shorter than the distance between the third conductive portion 23e and the third other end 13f. The distance between the third other conductive portion 23f and the third other end 13f is shorter than the distance between the third other conductive portion 23f and the third end 13e.

[0104] The fourth element portion 14E includes a fourth magnetic element 14, a fourth conductive member 24, a fourth magnetic member 54, and a fourth opposing magnetic member 54A. The fourth magnetic element 14 includes a fourth end portion 14e and a fourth other end portion 14f. The direction from the fourth end portion 14e to the fourth other end portion 14f is along the first direction D1.

[0105] The direction from the fourth conductive member 24 to the fourth magnetic element 14 is along the second direction D2. The fourth conductive member 24 includes a fourth conductive portion 24e and a fourth other conductive portion 24f. The direction from the fourth conductive portion 24e to the fourth other conductive portion 24f is along the first direction D1. The distance between the fourth conductive portion 24e and the fourth end 14e is shorter than the distance between the fourth conductive portion 24e and the fourth other end 14f. The distance between the fourth other conductive portion 24f and the fourth other end 14f is shorter than the distance between the fourth other conductive portion 24f and the fourth end 14e.

[0106] The position of at least a portion of the fourth magnetic element 14 in the third direction D3 is between the position of the fourth magnetic member 54 in the third direction D3 and the position of the fourth opposing magnetic member 54A in the third direction D3.

[0107] The first other end 11f is electrically connected to the second end 12e. The second other end 12f is electrically connected to the fourth other end 14f. The third end 13e is electrically connected to the first end 11e. The third other end 13f is electrically connected to the fourth end 14e.

[0108] The first other conductive portion 21f is electrically connected to the second conductive portion 22e. The second other conductive portion 22f is electrically connected to the fourth other conductive portion 24f. The third other conductive portion 23e is electrically connected to the first conductive portion 21e. The third other conductive portion 23f is electrically connected to the fourth conductive portion 24e.

[0109] The first circuit 71 is capable of supplying a first current I1 including an AC component between the first other conductive portion 21f and the third other conductive portion 23f.

[0110] The second circuit 72 is capable of supplying an element current Id or an element voltage between a first connection point CP1 of the first end 11e and the third end 13e and a second connection point CP2 of the second other end 12f and the fourth other end 14f.

[0111] The third circuit 73 is capable of outputting a signal Sg1 corresponding to an electrical signal generated between the third connection point CP3 of the first other end 11f and the second end 12e and the fourth connection point CP4 of the third other end 13f and the fourth end 14e.

[0112] FIG. 12 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. 12, in the magnetic sensor 113 according to the embodiment, the third magnetic member 53 is continuous with the first opposing magnetic member 51A. The fourth magnetic member 54 is continuous with the second opposing magnetic member 52A. Except for the above, the configuration of the magnetic sensor 113 may be the same as that of the magnetic sensor 111. The magnetic sensor 113 also achieves high sensitivity while suppressing noise.

[0113] FIG. 13 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. 13, in the magnetic sensor 114 according to the embodiment, the second magnetic member 52 is continuous with the first magnetic member 51. The second opposing magnetic member 52A is continuous with the first opposing magnetic member 51A. The fourth magnetic member 54 may be continuous with the third magnetic member 53. The fourth opposing magnetic member 54A is continuous with the third opposing magnetic member 53A. Except for the above, the configuration of the magnetic sensor 114 may be the same as the configuration of the magnetic sensor 113. The magnetic sensor 114 also achieves high sensitivity while suppressing noise.

[0114] FIG. 14 is a schematic plan view illustrating the magnetic sensor according to the first embodiment. 14, in the magnetic sensor 115 according to the embodiment, the first magnetic member 51, the first opposing magnetic member 51A, the second magnetic member 52, the second opposing magnetic member 52A, the third magnetic member 53, the third opposing magnetic member 53A, the fourth magnetic member 54, and the fourth opposing magnetic member 54A may each be asymmetric with respect to a line along the X-axis direction. Except for the above, the configuration of the magnetic sensor 115 may be the same as the configuration of the magnetic sensor 113. The magnetic sensor 115 also achieves high sensitivity while suppressing noise.

[0115] 15 and 16 are schematic plan views illustrating the magnetic sensor according to the first embodiment. As shown in Fig. 15, the magnetic sensor 116 according to the embodiment includes a first element portion 11E, a second element portion 12E, a third element portion 13E, and a fourth element portion 14E. The first element portion 11E in the magnetic sensor 116 may be the same as the first element portion 11E in the magnetic sensor 110 or the magnetic sensor 115.

[0116] In the magnetic sensor 116, the second element part 12E includes the second magnetic element 12, the second magnetic member 52, and the second opposing magnetic member 52A. The second magnetic element 12 includes a second end part 12e and a second other end part 12f. The direction from the second end part 12e to the second other end part 12f is along the first direction D1.

[0117] The direction from a portion of the first conductive member 21 to the second magnetic element 12 is along the second direction D2. A portion of the first conductive member 21 overlaps with the second magnetic element 12 in the second direction D2.

[0118] The position of at least a portion of the second magnetic element 12 in the third direction D3 is between the position of the second magnetic member 52 in the third direction D3 and the position of the second opposing magnetic member 52A in the third direction D3.

[0119] The third element portion 13E includes the third magnetic element 13. The third magnetic element 13 includes a third end portion 13e and a third other end portion 13f. The fourth element portion 14E includes the fourth magnetic element 14. The fourth magnetic element 14 includes a fourth end portion 14e and a fourth other end portion 14f.

[0120] 16, in the magnetic sensor 116, the first end 11e is electrically connected to the third end 13e. The first other end 11f is electrically connected to the fourth end 14e. The third other end 13f is electrically connected to the second end 12e. The second other end 12f is electrically connected to the fourth other end 14f.

[0121] The third magnetic element 13 and the fourth magnetic element 14 do not overlap with the first magnetic member 51, the first opposing magnetic member 51A, the second magnetic member 52, and the second opposing magnetic member 52A in the second direction D2.

[0122] In this example, the position of the third magnetic element 13 in the first direction D1 is between the position of the first magnetic member 51 in the first direction D1 and the position of the second magnetic member 52 in the first direction D1. The position of the fourth magnetic element 14 in the first direction D1 is between the position of the first opposing magnetic member 51A in the first direction D1 and the position of the second opposing magnetic member 52A in the first direction D1.

[0123] As shown in FIG. 15, the first circuit 71 is capable of supplying a first current I1 including an AC component between the first conductive portion 21e and the first other conductive portion 21f.

[0124] As shown in FIG. 16, the second circuit 72 can supply an element current Id or an element voltage between a first connection point CP1 of the first end 11e and the third end 13e and a second connection point CP2 of the second other end 12f and the fourth other end 14f.

[0125] The third circuit 73 is capable of outputting a signal Sg1 corresponding to an electrical signal generated between the third connection point CP3 of the third other end 13f and the second end 12e and the fourth connection point CP4 of the first other end 11f and the fourth end 14e.

[0126] (Second embodiment) The second embodiment relates to an examination device, which may include a diagnostic device, as will be described later.

[0127] FIG. 17 is a schematic perspective view showing an inspection device according to the second embodiment. As shown in Fig. 17, an inspection device 710 according to the second embodiment includes a sensor 150a (magnetic sensor) and a processing unit 770. The sensor 150a may be the sensor according to the first embodiment or a variation thereof. The processing unit 770 processes an output signal obtained from the sensor 150a. The processing unit 770 may compare the signal obtained from the sensor 150a with a reference value. The processing unit 770 can output an inspection result based on the processing result.

[0128] For example, the test object 680 is tested by the test device 710. The test object 680 is, for example, an electronic device (including a semiconductor circuit, etc.). The test object 680 may also be, for example, a battery 610.

[0129] For example, the sensor 150a according to the embodiment may be used together with the battery 610. For example, the battery system 600 includes the battery 610 and the sensor 150a. The sensor 150a can detect a magnetic field generated by a current flowing through the battery 610.

[0130] FIG. 18 is a schematic plan view showing an inspection device according to the second embodiment. 18, the sensor 150a includes, for example, a plurality of sensors according to the embodiment. In this example, the sensor 150a includes a plurality of sensors (such as element units 10E of the magnetic sensors 110). The plurality of sensors are arranged, for example, along two directions (such as the X-axis direction and the Y-axis direction). The plurality of sensors (magnetic sensors 110) are provided, for example, on a substrate.

[0131] The sensor 150a can detect a magnetic field generated by a current flowing through the inspection target 680 (which may be, for example, a battery 610). For example, when the battery 610 approaches an abnormal state, an abnormal current may flow through the battery 610. By detecting the abnormal current with the sensor 150a, it is possible to know a change in the state of the battery 610. For example, with the sensor 150a placed close to the battery 610, the entire battery 610 can be inspected in a short time using sensor group driving means in two directions. The sensor 150a may be used to inspect the battery 610 during the manufacture of the battery 610.

[0132] The sensor according to the embodiment can be applied to an inspection device 710 such as a diagnostic device, for example. FIG. 19 is a schematic diagram showing a sensor and an inspection device according to an embodiment. 19, a diagnostic device 500, which is an example of an inspection device 710, includes a sensor 150 (magnetic sensor). The sensor 150 includes the sensors described in relation to the first embodiment and modifications thereof.

[0133] In the diagnostic device 500, the sensor 150 is, for example, a magnetoencephalograph. The magnetoencephalograph detects magnetic fields emitted by cranial nerves. When the sensor 150 is used in a magnetoencephalograph, the size of the magnetic element included in the sensor 150 is, for example, 1 mm or more and less than 10 mm. This size is, for example, the length including the MFC.

[0134] As shown in Fig. 19, the sensor 150 (magnetoencephalograph) is worn on, for example, the head of a human body. The sensor 150 (magnetoencephalograph) includes a sensor unit 301. The sensor 150 (magnetoencephalograph) may include a plurality of sensor units 301. The number of the plurality of sensor units 301 is, for example, approximately 100 (for example, not less than 50 and not more than 150). The plurality of sensor units 301 are provided on a flexible base 302.

[0135] The sensor 150 may include, for example, a circuit for differential detection, etc. The sensor 150 may also include a sensor (for example, a potential terminal or an acceleration sensor) separate from the sensor.

[0136] The size of the sensor 150 is smaller than that of a conventional SQUID sensor. This makes it easy to install multiple sensor units 301. It also makes it easy to install multiple sensor units 301 together with other circuits. It also makes it easy for multiple sensor units 301 to coexist with other sensors.

[0137] The base 302 may include an elastic material such as silicone resin. For example, a plurality of sensor units 301 are connected to the base 302. The base 302 can be attached to the head, for example.

[0138] The input / output cord 303 of the sensor unit 301 is connected to a sensor driving unit 506 and a signal input / output unit 504 of the diagnostic device 500. The sensor unit 301 performs magnetic field measurement based on power from the sensor driving unit 506 and a control signal from the signal input / output unit 504. The measurement result is input to the signal input / output unit 504. The signal obtained by the signal input / output unit 504 is supplied to a signal processing unit 508. The signal processing unit 508 performs processing such as noise removal, filtering, amplification, and signal calculation. The signal processed by the signal processing unit 508 is supplied to a signal analysis unit 510. The signal analysis unit 510 extracts, for example, a specific signal for magnetoencephalography. The signal analysis unit 510 performs signal analysis, for example, to align the signal phase.

[0139] The output of the signal analysis unit 510 (data after signal analysis) is supplied to a data processing unit 512. The data processing unit 512 performs data analysis. In this data analysis, for example, image data such as MRI (Magnetic Resonance Imaging) can be incorporated. In this data analysis, for example, scalp potential information such as EEG (Electroencephalogram) can be incorporated. By the data analysis, for example, neural firing point analysis or inverse problem analysis can be performed.

[0140] The results of the data analysis are supplied to, for example, the imaging diagnostic unit 516. Imaging is performed in the imaging diagnostic unit 516. The imaging assists diagnosis.

[0141] The above series of operations is controlled, for example, by a control mechanism 502. For example, necessary data such as primary signal data or metadata during data processing is stored in a data server. The data server and the control mechanism may be integrated.

[0142] The diagnostic device 500 according to the embodiment includes a sensor 150 and a processing unit that processes an output signal obtained from the sensor 150. The processing unit includes, for example, at least one of a signal processing unit 508 and a data processing unit 512. The processing unit includes, for example, a computer.

[0143] In the sensor 150 shown in Fig. 19, the sensor unit 301 is placed on the head of the human body. The sensor unit 301 may also be placed on the chest of the human body. This allows for cardiac magnetism measurement. For example, the sensor unit 301 may also be placed on the abdomen of a pregnant woman. This allows for fetal heart rate testing.

[0144] The sensor device including the subject is preferably placed in a shielded room, which can suppress the influence of, for example, geomagnetism or magnetic noise.

[0145] For example, a mechanism may be provided to locally shield the measurement site on the human body or the sensor unit 301. For example, a shielding mechanism may be provided in the sensor unit 301. For example, effective shielding may be performed in signal analysis or data processing.

[0146] In the embodiment, the substrate 302 may be flexible or may not have substantial flexibility. In the example shown in FIG. 19, the substrate 302 is a continuous film processed into a hat shape. The substrate 302 may be net-shaped. This may provide, for example, good wearability. For example, the substrate 302 may adhere better to the human body. The substrate 302 may be helmet-shaped and hard.

[0147] FIG. 20 is a schematic diagram showing an inspection device according to an embodiment. In the example shown in FIG. 20, a sensor section 301 is provided on a flat hard substrate 305 .

[0148] In the example shown in Fig. 20, the input and output of signals obtained from the sensor unit 301 are the same as the input and output described with reference to Fig. 19. In the example shown in Fig. 20, the processing of signals obtained from the sensor unit 301 is the same as the processing described with reference to Fig. 19.

[0149] There is a reference example in which a SQUID (Superconducting Quantum Interference Device) sensor is used as a device to measure weak magnetic fields such as those generated by living organisms. However, because this reference example uses superconductivity, the device is large and consumes a lot of power, which places a heavy burden on the subject (patient) to be measured.

[0150] According to the embodiment, the device can be made smaller. Power consumption can be reduced. The burden on the measurement subject (patient) can be reduced. According to the embodiment, the signal-to-noise ratio of magnetic field detection can be improved. Sensitivity can be improved.

[0151] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) a first element portion including a first magnetic element, a first conductive member, a first magnetic member, and a first opposing magnetic member; the first magnetic element includes a first end and a first other end, and a direction from the first end to the first other end is along a first direction; a second direction from the first conductive member to the first magnetic element intersects with the first direction; a third direction from the first magnetic member to the first opposing magnetic member intersects with a plane including the first direction and the second direction; a position of at least a portion of the first magnetic element in the third direction is between a position of the first magnetic member in the third direction and a position of the first opposing magnetic member in the third direction; the first magnetic member includes a first other magnetic portion and a first magnetic portion, a direction from the first other magnetic portion to the first magnetic portion is along the third direction, and a length of the first other magnetic portion along the first direction of the first other magnetic portion is longer than a length of the first magnetic portion along the first direction of the first magnetic portion; the first conductive member overlaps with the first magnetic portion in the second direction; The magnetic sensor, wherein the first conductive member does not overlap the first other magnetic portion in the second direction.

[0152] (Configuration 2) the first magnetic member further includes a first intermediate magnetic portion; the first intermediate magnetic portion is located between the first other magnetic portion and the first magnetic portion in the third direction; a first intermediate magnetic portion length along the first direction of the first intermediate magnetic portion is between the first other magnetic portion length and the first magnetic portion length; the first intermediate magnetic portion length varies in the third direction; a rate of change of the first magnetic portion length in the third direction is lower than a rate of change of the first intermediate magnetic portion length in the third direction; 2. The magnetic sensor of claim 1, wherein the first conductive member does not overlap the first intermediate magnetic portion in the second direction.

[0153] (Configuration 3) 3. The magnetic sensor of claim 2, wherein the first magnetic portion length is substantially constant.

[0154] (Configuration 4) A magnetic sensor as described in configuration 2 or 3, wherein a first ratio of the sum of the length of the first magnetic portion along the third direction and the length of the first intermediate magnetic portion along the third direction to the length of the first other magnetic portion along the third direction is less than 1.

[0155] (Configuration 5) 5. The magnetic sensor of claim 4, wherein the first ratio is 0.5 or less.

[0156] (Configuration 6) the first conductive member includes a first conductive portion and a first other conductive portion; a direction from the first conductive portion to the first other conductive portion is along the first direction; A magnetic sensor described in any one of configurations 1 to 5, wherein the distance between the first conductive portion and the first end is shorter than the distance between the first conductive portion and the first other end, and the distance between the first other conductive portion and the first other end is shorter than the distance between the first other conductive portion and the first end.

[0157] (Configuration 7) further comprising a circuit section including a first circuit; 7. The magnetic sensor of claim 6, wherein the first circuit is capable of supplying a first current including an AC component to the first conductive member.

[0158] (Configuration 8) the circuit section further includes a second circuit and a third circuit; the second circuit is capable of supplying an element current or an element voltage to the first magnetic element; 8. The magnetic sensor according to configuration 7, wherein the third circuit is capable of outputting a signal corresponding to a first electrical resistance of the first magnetic element.

[0159] (Configuration 9) Further comprising a second element portion, the second element portion includes a second magnetic element, a second conductive member, a second magnetic member, and a second opposing magnetic member; the second magnetic element includes a second end and a second other end, and a direction from the second end to the second other end is along the first direction; a direction from the second conductive member to the second magnetic element is along the second direction; the second conductive member includes a second conductive portion and a second other conductive portion; a direction from the second conductive portion to the second other conductive portion is along the first direction; a distance between the second conductive portion and the second end portion is shorter than a distance between the second conductive portion and the second other end portion, and a distance between the second other conductive portion and the second other end portion is shorter than a distance between the second other conductive portion and the second end portion, a position of at least a portion of the second magnetic element in the third direction is between a position of the second magnetic member in the third direction and a position of the second opposing magnetic member in the third direction; the first other end is electrically connected to the second end, 7. The magnetic sensor according to configuration 6, wherein the first other conductive portion is electrically connected to the second conductive portion.

[0160] (Configuration 10) the second magnetic member includes a second other magnetic portion and a second magnetic portion, the direction from the second other magnetic portion to the second magnetic portion is along the third direction, and the length of the second other magnetic portion along the first direction of the second other magnetic portion is longer than the length of the second magnetic portion along the first direction of the second magnetic portion; the second conductive member overlaps with the second magnetic portion in the second direction; 10. The magnetic sensor of claim 9, wherein the second conductive member does not overlap the second other magnetic portion in the second direction.

[0161] (Configuration 11) the second magnetic member is continuous with the first magnetic member, 11. The magnetic sensor of claim 9, wherein the second opposing magnetic member is continuous with the first opposing magnetic member.

[0162] (Configuration 12) Further comprising a third element portion and a fourth element portion, the third element portion includes a third magnetic element, a third conductive member, a third magnetic member, and a third opposing magnetic member; the third magnetic element includes a third end and a third other end, and a direction from the third end to the third other end is along the first direction; a direction from the third conductive member to the third magnetic element is along the second direction; the third conductive member includes a third conductive portion and a third other conductive portion, a direction from the third conductive portion to the third other conductive portion is along the first direction; a distance between the third conductive portion and the third end portion is shorter than a distance between the third conductive portion and the third other end portion, and a distance between the third other conductive portion and the third other end portion is shorter than a distance between the third other conductive portion and the third end portion, a position of at least a portion of the third magnetic element in the third direction is between a position of the third magnetic member in the third direction and a position of the third opposing magnetic member in the third direction; the fourth element portion includes a fourth magnetic element, a fourth conductive member, a fourth magnetic member, and a fourth opposing magnetic member, the fourth magnetic element includes a fourth end and a fourth other end, and a direction from the fourth end to the fourth other end is along the first direction; a direction from the fourth conductive member to the fourth magnetic element is along the second direction; the fourth conductive member includes a fourth conductive portion and a fourth other conductive portion, a direction from the fourth conductive portion to the fourth other conductive portion is along the first direction; a distance between the fourth conductive portion and the fourth end portion is shorter than a distance between the fourth conductive portion and the fourth other end portion, and a distance between the fourth other conductive portion and the fourth other end portion is shorter than a distance between the fourth other conductive portion and the fourth end portion, a position of at least a part of the fourth magnetic element in the third direction is between a position of the fourth magnetic member in the third direction and a position of the fourth opposing magnetic member in the third direction; the second other end is electrically connected to the fourth other end, the third end is electrically connected to the first end, the third other end is electrically connected to the fourth end, the second other conductive portion is electrically connected to the fourth other conductive portion, the third conductive portion is electrically connected to the first conductive portion; 10. The magnetic sensor according to configuration 9, wherein the third other conductive portion is electrically connected to the fourth conductive portion.

[0163] (Configuration 13) Further comprising a circuit unit, the circuit section includes a first circuit, a second circuit, and a third circuit; the first circuit is capable of supplying a first current including an AC component between the first other conductive portion and the third other conductive portion; the second circuit is capable of supplying an element current or an element voltage between a first connection point of the first end and the third end and a second connection point of the second other end and the fourth other end, A magnetic sensor as described in configuration 12, wherein the third circuit is capable of outputting a signal corresponding to an electrical signal generated between a third connection point between the first other end and the second end and a fourth connection point between the third other end and the fourth end.

[0164] (Configuration 14) the third magnetic member includes a third other magnetic portion and a third magnetic portion, the direction from the third other magnetic portion to the third magnetic portion is along the third direction, and the third other magnetic portion length along the first direction of the third other magnetic portion is longer than the third magnetic portion length along the first direction of the third magnetic portion; the third conductive member overlaps with the third magnetic portion in the second direction, the third conductive member does not overlap the third other magnetic portion in the second direction, the fourth magnetic member includes a fourth other magnetic portion and a fourth magnetic portion, the direction from the fourth other magnetic portion to the fourth magnetic portion is along the third direction, and the fourth other magnetic portion length along the first direction of the fourth other magnetic portion is longer than the fourth magnetic portion length along the first direction of the fourth magnetic portion, the fourth conductive member overlaps with the fourth magnetic portion in the second direction, 14. The magnetic sensor according to claim 13, wherein the fourth conductive member does not overlap the fourth other magnetic portion in the second direction.

[0165] (Configuration 15) the third magnetic member is continuous with the first opposing magnetic member, 15. The magnetic sensor according to any one of configurations 12 to 14, wherein the fourth magnetic member is continuous with the second opposing magnetic member.

[0166] (Configuration 16) Further comprising a second element portion, a third element portion and a fourth element portion, the second element portion includes a second magnetic element and a second conductive member, the second magnetic element includes a second end and a second other end, and a direction from the second end to the second other end is along the first direction; a direction from the second conductive member to the second magnetic element is along the second direction; the second conductive member includes a second conductive portion and a second other conductive portion; a direction from the second conductive portion to the second other conductive portion is along the first direction; a distance between the second conductive portion and the second end portion is shorter than a distance between the second conductive portion and the second other end portion, and a distance between the second other conductive portion and the second other end portion is shorter than a distance between the second other conductive portion and the second end portion, the third element portion includes a third magnetic element and a third conductive member, the third magnetic element includes a third end and a third other end, and a direction from the third end to the third other end is along the first direction; a direction from the third conductive member to the third magnetic element is along the second direction; the third conductive member includes a third conductive portion and a third other conductive portion, a direction from the third conductive portion to the third other conductive portion is along the first direction; a distance between the third conductive portion and the third end portion is shorter than a distance between the third conductive portion and the third other end portion, and a distance between the third other conductive portion and the third other end portion is shorter than a distance between the third other conductive portion and the third end portion, the fourth element portion includes a fourth magnetic element, a fourth conductive member, a fourth magnetic member, and a fourth opposing magnetic member, the fourth magnetic element includes a fourth end and a fourth other end, and a direction from the fourth end to the fourth other end is along the first direction; a direction from the fourth conductive member to the fourth magnetic element is along the second direction; the fourth conductive member includes a fourth conductive portion and a fourth other conductive portion, a direction from the fourth conductive portion to the fourth other conductive portion is along the first direction; a distance between the fourth conductive portion and the fourth end portion is shorter than a distance between the fourth conductive portion and the fourth other end portion, and a distance between the fourth other conductive portion and the fourth other end portion is shorter than a distance between the fourth other conductive portion and the fourth end portion, a position of at least a part of the fourth magnetic element in the third direction is between a position of the fourth magnetic member in the third direction and a position of the fourth opposing magnetic member in the third direction; the first other end is electrically connected to the second end, the first other conductive portion is electrically connected to the second conductive portion; the second other end is electrically connected to the fourth other end, the third end is electrically connected to the first end, the third other end is electrically connected to the fourth end, the second other conductive portion is electrically connected to the fourth other conductive portion, the third conductive portion is electrically connected to the first conductive portion; 7. The magnetic sensor according to configuration 6, wherein the third other conductive portion is electrically connected to the fourth conductive portion.

[0167] (Configuration 17) Further comprising a circuit unit, the circuit section includes a first circuit, a second circuit, and a third circuit; the first circuit is capable of supplying a first current including an AC component between the first other conductive portion and the third other conductive portion; the second circuit is capable of supplying an element current or an element voltage between a first connection point of the first end and the third end and a second connection point of the second other end and the fourth other end, The magnetic sensor of configuration 16, wherein the third circuit is capable of outputting a signal corresponding to an electrical signal generated between a third connection point between the first other end and the second end and a fourth connection point between the third other end and the fourth end.

[0168] (Configuration 18) Further comprising a second element portion, a third element portion and a fourth element portion, the second element portion includes a second magnetic element, a second magnetic member, and a second opposing magnetic member; the second magnetic element includes a second end and a second other end, and a direction from the second end to the second other end is along the first direction; a direction from a portion of the first conductive member to the second magnetic element is along the second direction; a position of at least a portion of the second magnetic element in the third direction is between a position of the second magnetic member in the third direction and a position of the second opposing magnetic member in the third direction; the third element portion includes a third magnetic element, the third magnetic element includes a third end and a third other end, the fourth element portion includes a fourth magnetic element, the fourth magnetic element includes a fourth end and a fourth other end, the first end is electrically connected to the third end, the first other end is electrically connected to the fourth end, the third other end is electrically connected to the second end, the second other end is electrically connected to the fourth other end, The magnetic sensor of configuration 6, wherein the third magnetic element and the fourth magnetic element do not overlap with the first magnetic member, the first opposing magnetic member, the second magnetic member, and the second opposing magnetic member in the second direction.

[0169] (Configuration 19) Further comprising a circuit unit, the circuit section includes a first circuit, a second circuit, and a third circuit; the first circuit is capable of supplying a first current including an AC component between the first conductive portion and the first other conductive portion; the second circuit is capable of supplying an element current or an element voltage between a first connection point of the first end and the third end and a second connection point of the second other end and the fourth other end, A magnetic sensor as described in configuration 18, wherein the third circuit is capable of outputting a signal corresponding to an electrical signal generated between a third connection point between the third other end and the second end and a fourth connection point between the first other end and the fourth end.

[0170] (Configuration 20) The magnetic sensor according to any one of configurations 1 to 19, a processing unit for processing an output signal obtained from the magnetic sensor; An inspection device equipped with:

[0171] According to the embodiment, it is possible to provide a magnetic sensor and an inspection device that can improve sensitivity.

[0172] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0173] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the magnetic sensor, such as the element portion, magnetic element, magnetic layer, non-magnetic layer, conductive member, conductive layer, and circuit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0174] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0175] In addition, all magnetic sensors and inspection devices that can be implemented by a person skilled in the art by making appropriate design modifications based on the magnetic sensors and inspection devices described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0176] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and these modifications and alterations are also considered to fall within the scope of the present invention.

[0177] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0178] 10E: element portion, 10i: element insulating layer, 11-14...first to fourth magnetic elements, 11E-14E...first to fourth element portions, 11a-14a: first to fourth magnetic layers, 11b-14b: first to fourth opposing magnetic layers, 11e-14e: first to fourth end portions, 11f-14f: first to fourth other end portions, 11n-14n: first to fourth non-magnetic layers, 21-24: first to fourth conductive members, 21e-24e: first to fourth conductive portions, 21f-24f: first to fourth other conductive portions, 51-54: first to fourth magnetic members, 51A-54A: first to fourth opposing magnetic members, 51Ae-54Ae: first to fourth opposing magnetic portions, 51AeL~54AeL: 1st~4th opposing magnetic part length, 51Af~54Af: 1st~4th opposing other magnetic part, 51AfL~54AfL: 1st~4th opposing other magnetic part length, 51Am~54Am: 1st~4th opposing intermediate magnetic part, 51AmL~54AmL: 1st~4th opposing intermediate magnetic part length, 51e~54e: 1st~4th magnetic part, 51eL~54eL: 1st~4th magnetic part length, 51f~54f: 1st~4th magnetic other part, 51fL~54fL: 1st~4th magnetic other part length, 51m to 54m: 1st to 4th intermediate magnetic part, 51mL to 54mL: 1st to 4th intermediate magnetic part length, 70: Circuit section, 71 to 73: 1st to 3rd circuit, 110-116: magnetic sensors, 150, 150a: sensors, 301: sensor unit, 302: base body, 303: input / output code, 305: base body, 500: diagnostic device, 502: control mechanism, 504: signal input / output unit, 506: sensor drive unit, 508: signal processing unit, 510: signal analysis unit, 512: data processing unit, 516: imaging diagnostic unit, 600: battery system, 610: battery, 680: inspection object, 710: inspection device, 770: processing unit, CP1-CP4: first to fourth connection points, D1-D3: first to third directions, G1...gain, H: magnetic field, Hac: AC magnetic field, Hex: external magnetic field, Hex1-Hex3: first to third magnetic fields, Hsig: signal magnetic field, I1: first current, Id: element current, R: resistance, R1 to R3: first to third values, RR1...first ratio, Ro: low resistance, Rx: electrical resistance, Sig1: signal

Claims

1. a first element portion including a first magnetic element, a first conductive member, a first magnetic member, and a first opposing magnetic member; the first magnetic element includes a first end and a first other end, and a direction from the first end to the first other end is along a first direction; a second direction from the first conductive member to the first magnetic element intersects with the first direction; a third direction from the first magnetic member to the first opposing magnetic member intersects with a plane including the first direction and the second direction; a position of at least a portion of the first magnetic element in the third direction is between a position of the first magnetic member in the third direction and a position of the first opposing magnetic member in the third direction, the first magnetic member includes a first other magnetic portion and a first magnetic portion, a direction from the first other magnetic portion to the first magnetic portion is along the third direction, and a length of the first other magnetic portion along the first direction of the first other magnetic portion is longer than a length of the first magnetic portion along the first direction of the first magnetic portion, the first conductive member overlaps with the first magnetic portion in the second direction; the first conductive member does not overlap the first other magnetic portion in the second direction, the first magnetic member further includes a first intermediate magnetic portion; the first intermediate magnetic portion is located between the first other magnetic portion and the first magnetic portion in the third direction; a first intermediate magnetic portion length along the first direction of the first intermediate magnetic portion is between the first other magnetic portion length and the first magnetic portion length; the first intermediate magnetic portion length varies in the third direction; a rate of change of the first magnetic portion length in the third direction is lower than a rate of change of the first intermediate magnetic portion length in the third direction; the first conductive member does not overlap the first intermediate magnetic portion in the second direction; A magnetic sensor, wherein a first ratio of the sum of the length of the first magnetic portion along the third direction and the length of the first intermediate magnetic portion along the third direction to the length of the first other magnetic portion along the third direction is less than 1.

2. The magnetic sensor of claim 1 , wherein the first magnetic portion length is substantially constant.

3. The magnetic sensor according to claim 1 , wherein the first ratio is equal to or less than 0.

5.

4. the first conductive member includes a first conductive portion and a first other conductive portion; a direction from the first conductive portion to the first other conductive portion is along the first direction; 2. The magnetic sensor of claim 1, wherein the distance between the first conductive portion and the first end is shorter than the distance between the first conductive portion and the first other end, and the distance between the first other conductive portion and the first other end is shorter than the distance between the first other conductive portion and the first end.

5. further comprising a circuit section including a first circuit; The magnetic sensor according to claim 4 , wherein the first circuit is capable of supplying a first current including an AC component to the first conductive member.

6. the circuit section further includes a second circuit and a third circuit; the second circuit is capable of supplying an element current or an element voltage to the first magnetic element; The magnetic sensor according to claim 5 , wherein the third circuit is capable of outputting a signal corresponding to a first electrical resistance of the first magnetic element.

7. Further comprising a second element portion, the second element portion includes a second magnetic element, a second conductive member, a second magnetic member, and a second opposing magnetic member; the second magnetic element includes a second end and a second other end, and a direction from the second end to the second other end is along the first direction; a direction from the second conductive member to the second magnetic element is along the second direction; the second conductive member includes a second conductive portion and a second other conductive portion, a direction from the second conductive portion to the second other conductive portion is along the first direction; a distance between the second conductive portion and the second end portion is shorter than a distance between the second conductive portion and the second other end portion, and a distance between the second other conductive portion and the second other end portion is shorter than a distance between the second other conductive portion and the second end portion, a position of at least a portion of the second magnetic element in the third direction is between a position of the second magnetic member in the third direction and a position of the second opposing magnetic member in the third direction, the first other end is electrically connected to the second end, The magnetic sensor according to claim 4 , wherein the first other conductive portion is electrically connected to the second conductive portion.

8. A magnetic sensor according to any one of claims 1 to 7; a processing unit for processing an output signal obtained from the magnetic sensor; An inspection device equipped with:

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