Stable liquid gas supply and heating equipment

Abstract

Gas-fed heating installations with multiple monitoring mechanisms provide better safety protection. [Solution] The liquid gas supply and heating equipment has an electromagnetic heating device attached to the bottom side of a gas storage tank, which can quickly vaporize liquid gas into a target gas. The gas temperature and pressure are monitored by a pressure control module and a temperature control module, and the electromagnetic heating device is controlled via a heating control system to ensure a stable supply of target gas. In particular, the electromagnetic heating device has an on / off switch that can be controlled by three different systems: the gas supply system, the heating control system, and the gas monitoring system. Therefore, even if an operator is in a different independent space, he or she can monitor and control the electromagnetic heating device and avoid uncontrollable temperature and pressure or dangerous situations such as temperature abnormalities during gas supply.

Description

[Technical Field]

[0001] The present invention relates to a gas supply facility for semiconductor processes, and more particularly to a gas supply facility having a multi-safety monitoring mechanism. [Background technology]

[0002] In the manufacturing process of semiconductor products (such as wafers, panels, or light-emitting diodes), it is necessary to use certain special gases (such as NH3, SiH4, N2O, etc.), some of which are liquid gases (such as NH3).

[0003] For this reason, the usual method of supplying air to an air supply facility involves installing a heating device in a separate space, purchasing a cylinder containing liquid gas, attaching the cylinder to a gas transport pipeline, heating the cylinder with the heating device when in use, vaporizing the liquid gas, and transporting the vaporized gas to a gas supply system (gas cabinet), and finally entering the point of use (POU) of the machine in the process. However, since these special gases usually all pose hazards such as corrosiveness, pyrophoricity, and suffocation, the safe supply of high-purity gas is a priority for semiconductor factories.

[0004] As is well known, there are many security devices on the market to protect heating devices from fire damage. For example, heating devices are equipped with temperature detectors or flame detectors to detect situations where the temperature of the heating device is too high or where incineration may cause a fire, and a warning system is provided to alert nearby staff to resolve the problem. In this way, dangerous situations such as the heating device burning down and gas leaking outside can be prevented.

[0005] However, in conventional air supply systems, in order to deal with a problematic heating device immediately, staff must often be stationed near the heating device, but with the development of modern equipment and high precision, special situations do not always occur. Thus, having staff stationed near the heating device for a long period of time is a waste of manpower. Summary of the Invention

[0006] The main purpose of the present invention is to provide a gas supply heating equipment with a multi-monitoring mechanism, so that the heating device can perform independent monitoring and control at three different positions, such as the heating end, the air supply end and the monitoring end, so that the entire supply heating equipment can have better safety protection measures.

[0007] A secondary object of the present invention is that all pressure and temperature parameters can be repeatedly set at the heating end according to the actual wafer processing requirements, allowing users to easily adjust the pressure and temperature conditions of the supply air pressure and protection mechanism in real time.

[0008] To achieve the above object, the stable liquid gas supply and heating equipment of the present invention includes a gas supply system, an upstream gas storage device, a gas monitoring system (GMS), and a heating control system, in which the upstream gas storage device includes a gas storage tank, a transport pipeline, a pressure sensor, a temperature sensor, and an electromagnetic heating device.

[0009] The gas supply system includes a gas cabinet having a gas panel therein with a plurality of valves, and an electrical control box having a control interface capable of controlling the plurality of valves.

[0010] The gas storage tank stores liquid gas. The transport pipeline is connected between the gas storage tank and the gas supply system. The pressure sensor is attached to the transport pipeline to detect changes in gas pressure and continuously generate a current value of air pressure. The temperature sensor is attached to the surface of the gas storage tank to detect changes in temperature of the gas storage tank and continuously generate a current value of temperature. The electromagnetic heating device is attached to the bottom side of the gas storage tank and has a magnetron unit that generates eddy currents and changes in magnetic flux to quickly heat the liquid gas inside the gas storage tank.

[0011] The gas monitoring system is electrically connected to the gas supply system and can control the plurality of valves of the gas panel. The heating control system is electrically connected to the gas supply system, the upstream gas storage device and the gas monitoring system, and includes: a pressure control module for obtaining a current value of the air pressure, a temperature control module for obtaining a current value of the temperature, a human-machine interface electrically connected to the pressure control module and the temperature control module, and a control module electrically connected to the pressure control module, the temperature control module and the electromagnetic heating device.

[0012] Among them, the pressure control module can change the pressure parameters through the human-machine interface, the temperature control module can change the temperature parameters through the human-machine interface, and the electromagnetic heating device is controlled by the control module and has an over-standard protection switch that can be automatically turned on and off, and an abnormal power off switch that must be manually reset.

[0013] When the value of either the current temperature value or the current air pressure value is greater than the parameter value of either the pressure parameter or the temperature parameter, the over-standard protection switch is automatically turned off by the control module, and the electromagnetic heating device suspends heating; conversely, when the value is smaller than the parameter value, the over-standard protection switch is automatically turned on by the control module, and the electromagnetic heating device resumes heating.

[0014] In particular, the gas supply system, the gas monitoring system and the human-machine interface can also directly control the control module to turn off the abnormal power off switch, allowing the user to remotely shut down the electromagnetic heating device.

[0015] The heating control system electromagnetic The heater is electrically connected to the electromagnetic It further includes an overheat protection module that acquires the operating temperature of the heating device, and the overheat protection module generates a power-off signal when the operating temperature is overloaded, and the power-off signal is transmitted to the control module to turn off the abnormal power-off switch, preventing the device from burning out due to excessive temperature.

[0016] The gas supply system, the gas monitoring system and the heating control system each include a first alarm module, a second alarm module and a third alarm module, pressure The parameter includes a pressure warning value, and the temperature parameter includes a temperature warning value. When the current value of the air pressure exceeds the pressure warning value, the first warning module, the second warning module, and the third warning module synchronously generate a first warning notification, and when the current value of the temperature exceeds the temperature warning value, the first warning module, the second warning module, and the third warning module synchronously generate a second warning notification.

[0017] The temperature warning value and the pressure warning value can be repeatedly set from an initial value to a target value by the human-machine interface.

[0018] The liquid gas supply and heating equipment further includes an auxiliary upstream gas storage device and a weight detection device including a first weight sensor corresponding to the upstream gas storage device and a second weight sensor corresponding to the auxiliary upstream gas storage device, and the control module is further electrically connected to the first weight sensor, the second weight sensor, and the auxiliary upstream gas storage device.

[0019] The control module can generate a weight difference ratio through the first weight sensor and the second weight sensor, and when the weight difference ratio exceeds a default value, the control module automatically adjusts the pressure parameter and the temperature parameter to control the first vaporization amount of the upstream gas storage device and the second vaporization amount of the auxiliary upstream gas storage device, so that the weight difference ratio becomes smaller than the default value.

[0020] The present invention is characterized in that the upstream gas storage device is equipped with an alarm module, allowing it to immediately rush to the scene as soon as a dangerous situation in the upstream gas storage device is detected, and the electromagnetic heating device can be remotely monitored and opened and closed by either the gas supply system, the gas monitoring system, or the heating control system, thereby improving the safety and convenience of the entire air supply equipment, and eliminating the need for an operator to wait continuously at the electromagnetic heating device. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a schematic diagram of a first embodiment of a stable liquid gas supply and heating system according to the present invention. [Figure 2] FIG. 2 is a schematic block diagram for setting pressure parameters and temperature parameters in the first embodiment. [Figure 3] FIG. 3 is a schematic block diagram of a first embodiment for transmitting the current atmospheric pressure and temperature values. [Figure 4] 4A to 4C are schematic diagrams illustrating the control of the electromagnetic heating device in the first embodiment. [Figure 5] FIG. 5 is a schematic block diagram of a control signal transmission in the first embodiment. [Figure 6] FIG. 6 is a schematic diagram of a safety protection mechanism of an electromagnetic heating device according to the present invention. [Figure 7] FIG. 7 is a schematic diagram of a second embodiment of the stable liquid gas supply and heating system according to the present invention. [Figure 8] FIG. 8 is a schematic block diagram for setting pressure parameters, temperature parameters, and weight difference set values ​​in the second embodiment. [Figure 9]FIG. 9 is a schematic block diagram of a second embodiment for transmitting the current atmospheric pressure and temperature values. [Figure 10] 10A to 10C are schematic diagrams illustrating the control of the auxiliary electromagnetic heating device in the second embodiment. [Figure 11] FIG. 11 is a schematic block diagram of a control signal transmission in the second embodiment. [Figure 12] FIG. 12 is a schematic diagram of a safety protection mechanism of the auxiliary electromagnetic heating device according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0022] In order to more clearly and specifically appreciate and understand the structure, use and features of the present invention, preferred embodiments will now be described in detail with reference to the accompanying drawings.

[0023] The stable liquid gas supply and heating equipment of the present invention mainly uses liquid gas to vaporize it into a target gas at a stable saturation pressure through a heating method, transports the target gas to a gas supply system 1, and finally provides the target gas to multiple semiconductor manufacturing devices through the gas supply system 1.

[0024] Referring to Figure 1, the stable liquid gas supply and heating equipment of the present invention comprises a gas supply system 1, an upstream gas storage device 2, a gas monitoring system 3, and a heating control system 4. The gas monitoring system 3 is installed in a monitoring room, and the gas supply system 1, the upstream gas storage device 2, and the heating control system 4 are installed in a gas room, and the monitoring room and the gas room are respectively located in different independent spaces in a semiconductor factory.

[0025] The gas supply system 1 is electrically connected to the heating control system 4 and the gas monitoring system 3, and includes a gas cabinet 11 and an electrical control box 12. The gas cabinet 11 is provided with a gas panel having a plurality of valves, which can receive the target gas from the upstream gas storage device 2 and distribute the target gas to the plurality of semiconductor manufacturing equipments. The electrical control box 12 is connected to the gas cabinet 11 and has a control interface 13 which can control the opening and closing of the plurality of valves, so that the target gas can be supplied to only some of the plurality of semiconductor manufacturing equipments by an operator.

[0026] The upstream gas storage device 2 includes a gas storage tank 21, a transport pipeline 22, a pressure sensor 23, a temperature sensor 24, and an electromagnetic heating device 25. The gas storage tank 21 stores the liquid gas. The transport pipeline 22 is connected between the gas storage tank 21 and the gas supply system 1 and is used to transport the target gas. The pressure sensor 23 is electrically connected to the heating control system 4 and attached to one end of the transport pipeline 22 near the gas storage tank 21. This detects changes in the pressure of the target gas inside the gas storage tank 21, and continuously generates and transmits a current air pressure value 231 to the heating control system 4. The temperature sensor 24 is electrically connected to the heating control system 4 and attached to the surface of the gas storage tank 21 to detect changes in the tank temperature, and continuously generates and transmits a current temperature value 241 to the heating control system 4. The electromagnetic heating device 25 is also electrically connected to the heating control system 4 and is attached to the bottom side of the outside of the gas storage tank 21. It has a magnetron unit that can generate a change in magnetic flux, and the magnetron unit uses an electromagnetic method to quickly heat the liquid gas inside the gas storage tank 21, so that the liquid gas can be quickly vaporized into the target gas.

[0027] The gas monitoring system 3 is electrically connected to the gas supply system 1 and the heating control system 4 and can monitor the valves of the gas cabinet 11 delivering the target gas to the target semiconductor manufacturing equipment.

[0028] 1, 2, and 3, the heating control system 4 includes a human-machine interface 41, a pressure control module 42, a temperature control module 43, and a control module 44. The human-machine interface 41 is electrically connected to the pressure control module 42 and the temperature control module 43, and can acquire pressure parameters 5 and temperature parameters 6 through manual input by an operator. In one preferred embodiment, the pressure parameter 5 includes a pressure setpoint 51 and a pressure warning value 52 whose value is greater than the pressure setpoint 51, and the temperature parameter 6 includes a temperature setpoint 61 and a temperature warning value 62 whose value is greater than the temperature setpoint 61.

[0029] The pressure control module 42 can obtain the current air pressure value 231 from the pressure sensor 23 and display the current air pressure value 231 in the current state through the human-machine interface 41 of the heating control system 4. The temperature control module 43 can obtain the current temperature value 241 from the temperature sensor 24 and display the current temperature value 241 in the current state through the display of the heating control system 4.

[0030] Among these, the pressure setpoint 51, the pressure warning value 52, the temperature setpoint 61, and the temperature warning value 62 can all be repeatedly set by the human-machine interface 41 from an initial value to a target value.

[0031] 4A to 4C, the electromagnetic heating device 25 has an over-standard protection switch 441 that can be automatically turned on and off under the control of the control module 44, and an abnormal power off switch 442 that must be manually reset. The over-standard protection switch 441 and the abnormal power off switch 442 are electrically connected and disposed in series between the electromagnetic heating device 25 and a power source, and the electromagnetic heating device 25 can only operate when the over-standard protection switch 441 and the abnormal power off switch 442 are turned on simultaneously.

[0032] In particular, the gas supply system 1, the gas monitoring system 3 and the human-machine interface 41 can directly control the control module 44 to turn off the abnormal power off switch 442, allowing the user to remotely shut down the electromagnetic heating device 25.

[0033] 5 and 6. In a first embodiment, the gas supply system 1 further comprises a first warning module 14, the gas monitoring system 3 further comprises a second warning module 31, and the heating control system 4 further comprises a third warning module 45.

[0034] If the current value 231 of the air pressure is less than the pressure set value 51, the pressure control module 42 sends a temperature increase start signal 71 to the control module 44, and if the current value 241 of the temperature is less than the temperature set value 61, the temperature control module 43 sends the temperature increase start signal 71 to the control module 44.

[0035] If the current air pressure value 231 is greater than the pressure set value 51, the pressure control module 42 sends a heating pause signal 72 to the control module 44, and if the current temperature value 241 is greater than the temperature set value 61, the temperature control module 43 sends the heating pause signal 72 to the control module 44.

[0036] In particular, the control module 44 controls the over-reference protection switch 441 to turn on, causing the electromagnetic heating device 25 to heat, only after simultaneously receiving the heating start signal 71 from the pressure control module 42 and the temperature control module 43. However, when the control module 44 receives the heating pause signal 72 from either the pressure control module 42 or the temperature control module 43, it controls the over-reference protection switch 441 to turn off, causing the electromagnetic heating device 25 to stop heating.

[0037] If the current atmospheric pressure value 231 is greater than the pressure warning value 52, the pressure control module 42 sends a first warning signal 73 to the first warning module 14, the second warning module 31, and the third warning module 45, and the three synchronously generate a first warning notification. In this case, the pressure control module 42 simultaneously sends a power-off signal 74 to the control module 44, and the control module 44 controls the abnormal power-off switch 442 to turn off, so that the electromagnetic heating device 25 is powered off and stops heating, and the control module 44 cannot again control the operation of the electromagnetic heating device 25 until the abnormal power-off switch 442 is manually reset by an operator.

[0038] If the current temperature value 241 is greater than the temperature warning value 62, the temperature control module 43 sends the second warning signal 75 to the first warning module 14, the second warning module 31, and the third warning module 45, and the three synchronously generate the second warning notification. In this case, the temperature control module 43 simultaneously sends the power-off signal 74 to the control module 44, and the control module 44 controls the abnormal power-off switch 442 to turn off, thereby powering off the electromagnetic heating device 25 and stopping heating, and the control module 44 cannot again control the operation of the electromagnetic heating device 25 until the abnormal power-off switch 442 is manually reset by an operator.

[0039] Among others, the heating control system 4 further includes an overheat protection module 46 that can obtain the operating temperature from the electromagnetic heating device 25. If the operating temperature is too high, the overheat protection module 46 sends the power-off signal 74 to the control module 44, and the control module 44 controls the abnormal power-off switch 442 to turn off, thereby powering off the electromagnetic heating device 25 and stopping heating. Until the abnormal power-off switch 442 is manually reset by an operator, the control module 44 cannot again control the operation of the electromagnetic heating device 25.

[0040] Referring to Figure 7, the stable liquid gas supply and heating equipment of the present invention further includes an auxiliary upstream gas storage device 8 and a weight sensor 26 associated with the upstream gas storage device 2, which is mounted below the gas storage tank 21 to detect changes in the weight of the gas storage tank 21, and continuously generate and transmit a weight value 261 to the control module 44.

[0041] The auxiliary upstream gas storage device 8 is electrically connected to the electromagnetic heating device 25 and is also installed in the gas supply chamber. The auxiliary upstream gas storage device 8 includes an auxiliary gas storage tank 81, an auxiliary transport pipeline 82, an auxiliary pressure sensor 83, an auxiliary temperature sensor 84, an auxiliary electromagnetic heating device 85, and an auxiliary weight sensor 86 associated with the auxiliary upstream gas storage device 8. The auxiliary gas storage tank 81 stores the liquid gas. The auxiliary transport pipeline 82 is connected between the auxiliary gas storage tank 81 and the gas supply system 1 and is used to transport the target gas. The auxiliary pressure sensor 83 is electrically connected to the heating control system 4 and is attached to one end of the auxiliary transport pipeline 82 near the auxiliary gas storage tank 81. This sensor detects changes in the pressure of the target gas in the auxiliary gas storage tank 81 and continuously generates and transmits a current auxiliary air pressure value 831 to the heating control system 4. The auxiliary temperature sensor 84 is electrically connected to the heating control system 4 and attached to the surface of the auxiliary gas storage tank 81 to detect changes in the tank temperature, and can continuously generate a current auxiliary temperature value 841 to transmit to the heating control system 4. The auxiliary electromagnetic heating device 85 is similarly electrically connected to the heating control system 4 and attached to the bottom of the auxiliary gas storage tank 81 to generate a magnetron unit that generates a change in magnetic flux, which uses an electromagnetic method to quickly heat the liquid gas inside the auxiliary gas storage tank 81 so that the liquid gas can quickly vaporize into the target gas. The auxiliary weight sensor 86 is attached below the auxiliary gas storage tank 81 to detect changes in the weight of the auxiliary gas storage tank 81, and can continuously generate an auxiliary weight value 861 to transmit to the control module 44.

[0042] 8 and 9, the human-machine interface 41 can obtain auxiliary pressure parameters 91, auxiliary temperature parameters 92, and weight difference setpoints 93 through manual input by the operator. In one preferred embodiment, the auxiliary pressure parameters 91 include an auxiliary pressure setpoint 911 and an auxiliary pressure warning value 912, and the auxiliary temperature parameters 92 include an auxiliary temperature setpoint 921 and an auxiliary temperature warning value 922.

[0043] The pressure control module 42 can obtain the current atmospheric pressure value 231 and the current auxiliary atmospheric pressure value 831 from the pressure sensor 23 and the auxiliary pressure sensor 83, respectively, and can display the current atmospheric pressure value 231 and the current auxiliary atmospheric pressure value 831 under the current conditions through the human-machine interface 41 of the heating control system 4.

[0044] The temperature control module 43 can obtain the current temperature value 241 and the current auxiliary temperature value 841 from the temperature sensor 24 and the auxiliary temperature sensor 84, respectively, and can also display the current temperature value 241 and the current auxiliary temperature value 841 under the current state through the human-machine interface 41 of the heating control system 4.

[0045] The control module 44 obtains the weight value 261 and the auxiliary weight value 861 from the weight sensor 26 and the auxiliary weight sensor 86, respectively, calculates the weight value 261 and the auxiliary weight value 861 to generate a weight difference value, and compares the weight difference value with the weight difference set value 93. If the weight difference exceeds the weight difference set value 93, the control module 44 enters an automatic balancing mode for the two gas storage tanks, and the program automatically adjusts one of the pressure parameter 5 and the auxiliary pressure parameter 91 of the pressure control module 42 and one of the temperature parameter 6 and the auxiliary temperature parameter 92 of the temperature control module 43 to change the heating temperature of one of the gas storage tank 21 and the auxiliary gas storage tank 81 to increase the vaporization amount, thereby reducing the weight difference between the gas storage tank 21 and the auxiliary gas storage tank 81.

[0046] In particular, the temperature setpoint 61, the temperature warning value 62, the pressure setpoint 51, the pressure warning value 52, the auxiliary temperature setpoint 921, the auxiliary temperature warning value 922, the auxiliary pressure setpoint 911, the auxiliary pressure warning value 912, and the weight difference setpoint 93 can all be repeatedly set from different initial values ​​to different target values ​​by the human-machine interface 41.

[0047] 10A to 10C, the auxiliary electromagnetic heating device 85 is controlled by the control module 44 and has an auxiliary over-reference protection switch 443 that can be automatically opened and closed, and an auxiliary abnormal power off switch 444 that must be manually reset. The auxiliary over-reference protection switch 443 and the auxiliary abnormal power off switch 444 are electrically connected and disposed in series between the auxiliary electromagnetic heating device 85 and the auxiliary power supply, and the auxiliary electromagnetic heating device 85 can only operate when the auxiliary over-reference protection switch 443 and the auxiliary abnormal power off switch 444 are simultaneously turned on.

[0048] 11 and 12, if the current value 831 of the auxiliary air pressure is less than the auxiliary pressure set value 911, the auxiliary pressure control module 42 sends an auxiliary heating start signal 76 to the control module 44, and if the current value 831 of the auxiliary air pressure is greater than the auxiliary pressure set value 911, the pressure control module 42 sends an auxiliary heating pause signal 77 to the control module 44.

[0049] If the current value 841 of the auxiliary temperature is smaller than the auxiliary temperature set value 921, the temperature control module 43 sends the auxiliary heating start signal 76 to the control module 44, and if the current value 841 of the auxiliary temperature is greater than the auxiliary temperature set value 921, the temperature control module 43 sends the auxiliary heating pause signal 77 to the control module 44.

[0050] In particular, the control module 44 controls the auxiliary over-reference protection switch 441 to turn on, causing the auxiliary electromagnetic heating device 25 to heat, only after simultaneously receiving the auxiliary heating start signal 76 from the pressure control module 42 and the temperature control module 43. However, if the control module 44 receives the auxiliary heating pause signal 77 from either the pressure control module 42 or the temperature control module 43, the control module 44 controls the over-reference protection switch 441 to turn off, causing the electromagnetic heating device 25 to stop heating.

[0051] If the current value 831 of the auxiliary air pressure is greater than the auxiliary pressure warning value 912, the pressure control module 42 sends the first warning signal 73 to the first warning module 14, the second warning module 31, and the third warning module 45, and the three synchronously generate the first warning notification. In this case, the pressure control module 42 simultaneously sends an auxiliary power off signal 78 to the control module 44, and the control module 44 controls the auxiliary abnormal power off switch 444 to turn off, thereby powering off the auxiliary electromagnetic heating device 85 and stopping heating, and the control module 44 cannot again control the operation of the auxiliary electromagnetic heating device 85 until the auxiliary abnormal power off switch 444 is manually reset by an operator.

[0052] If the current auxiliary temperature value 841 is greater than the auxiliary temperature warning value 922, the temperature control module 43 sends the second warning signal 75 to the first warning module 14, the second warning module 31, and the third warning module 45, and the three synchronously generate the second warning notification. In this case, the temperature control module 43 simultaneously sends the auxiliary power off signal 78 to the control module 44, and the control module 44 controls the auxiliary abnormal power off switch 444 to turn off, thereby powering off the auxiliary electromagnetic heating device 85 and stopping heating, and the control module 44 cannot again control the operation of the auxiliary electromagnetic heating device 85 until the auxiliary abnormal power off switch 444 is manually reset by an operator.

[0053] In particular, the overheat protection module 46 of the heating control system 4 can further obtain the auxiliary operating temperature from the auxiliary electromagnetic heating device 85. If the auxiliary operating temperature is too high, the overheat protection module 46 will send the power-off signal 74 to the control module 44. The control module 44 will then control the auxiliary abnormal power-off switch 444 to turn off, thereby powering off the auxiliary electromagnetic heating device 85 and stopping heating. Until the auxiliary abnormal power-off switch 444 is manually reset by an operator, the control module 44 will not be able to control the operation of the auxiliary electromagnetic heating device 85 again.

[0054] The present invention forms different safety protection mechanisms using the pressure parameter 5, the current atmospheric pressure value 231, the temperature parameter 6, the current temperature value 241, the auxiliary pressure parameter 91, the current auxiliary atmospheric pressure value 831, the auxiliary temperature parameter 92, and the current auxiliary temperature value 841, and transmits the first warning signal 73 and the second warning signal 75 to the gas supply system 1, the gas monitoring system 3, and the heating control system 4 to monitor the upstream gas storage device 2 in a multiplexed manner, not only allowing immediate knowledge of the status of the upstream gas storage device 2, but also allowing quick identification of the source of the problem in the upstream gas storage device 2 via the first warning signal 73 and the second warning signal 75. In addition, the gas supply system 1, the gas monitoring system 3, and the heating control system 4 can also directly turn off the abnormal power off switch 442 and the auxiliary abnormal power off switch 444 remotely, thereby enabling various dangerous situations to be dealt with.

[0055] In one embodiment, when an operator is located in the monitoring room, the operator can monitor the upstream gas storage device 2 through the gas monitoring system 3, and when the first warning signal 73 and the second warning signal 75 are generated, the operator can go to the site and deal with it immediately.

[0056] In another embodiment, if an operator is located in the gas room and gas leaks from the gas cabinet 11, the operator can remotely turn off the abnormal power off switch 442 directly through the electrical control box 12, thereby stopping the electromagnetic heating device 25 and the production of the target gas. [Explanation of symbols]

[0057] 1. Gas supply system 11 Gas Cabinet 12 Electrical control box 13 Control Interface 14 First Warning Module 2. Upstream gas storage equipment 21 Gas storage tank 22 Transport pipeline 23 Pressure Sensor 231 Current atmospheric pressure 24 Temperature Sensor 241 Current temperature 25 Electromagnetic heating device 26 Weight Sensor 261 Weight 3 Gas Monitoring System 31 Second Warning Module 4. Heating control system 41 Human-Machine Interface 42 Pressure Control Module 43 Temperature Control Module 44 Control Module 441 Over-standard protection switch 442 Abnormal power off switch 443 Auxiliary Standard Overload Protection Switch 444 Auxiliary abnormal power off switch 45 Third Warning Module 46 Overheat Protection Module 5 Pressure parameters 51 Pressure setting value 52 Pressure warning value 6 Temperature parameters 61 Temperature setting value 62 Temperature warning value 71 Heat up start signal 72 Heating pause signal 73 First Warning Signal 74 Power Off Signal 75 Second Warning Signal 76 Auxiliary heating start signal 77 Auxiliary heating pause signal 78 Auxiliary power off signal 8 Auxiliary upstream gas storage device 81 Auxiliary gas storage tank 82 Auxiliary transport pipeline 83 Auxiliary pressure sensor 831 Current auxiliary pressure 84 Auxiliary Temperature Sensor 841 Current auxiliary temperature 85 Auxiliary electromagnetic heating device 86 Auxiliary weight sensor 861 Auxiliary Weight Value 91 Auxiliary Pressure Parameters 911 Auxiliary pressure setting value 912 Auxiliary pressure warning value 92 Auxiliary Temperature Parameters 921 Auxiliary temperature setpoint 922 Auxiliary temperature warning value 93 Weight difference setting value

Claims

1. A stable liquid gas supply and heating installation including a gas supply system, an upstream gas storage device, a gas monitoring system, and a heating control system, The gas supply system includes a gas cabinet having a gas panel therein having a plurality of valves, and an electric control box having a control interface capable of controlling opening and closing of the plurality of valves; The upstream gas storage device a gas storage tank in which liquid gas is stored; a pipeline connected between the gas storage tank and the gas supply system; a pressure sensor attached to the transport pipeline to detect changes in gas pressure and continuously generate a current value of atmospheric pressure; a temperature sensor attached to a surface of the gas storage tank to detect temperature changes in the gas storage tank and continuously generate a current value of the temperature; an electromagnetic heating device having a magnetron unit attached to the bottom side of the exterior of the gas storage tank, capable of generating a change in magnetic flux to generate eddy currents and rapidly heat the liquid gas inside the gas storage tank; the gas monitoring system is electrically connected to the gas supply system and is capable of controlling the plurality of valves of the gas panel; the heating control system includes: a pressure control module electrically connected to the gas supply system, the upstream gas storage device, and the gas monitoring system, for obtaining a current value of the air pressure; a temperature control module for obtaining a current value of the temperature; a human-machine interface electrically connected to the pressure control module and the temperature control module; and a control module electrically connected to the pressure control module, the temperature control module, and the electromagnetic heating device; The pressure control module can change pressure parameters through the human-machine interface, the temperature control module can change temperature parameters through the human-machine interface, and the electromagnetic heating device is controlled by the control module and has an over-standard protection switch that can be automatically turned on and off, and an abnormal power-off switch that must be manually reset; When the value of either the current temperature value or the current atmospheric pressure value is greater than the parameter value of either the pressure parameter or the temperature parameter, the over-standard protection switch is automatically turned off by the control module, and the electromagnetic heating device suspends heating; conversely, when the value is less than the parameter value, the over-standard protection switch is automatically turned on by the control module, and the electromagnetic heating device resumes heating; The gas supply system, the gas monitoring system and the human-machine interface can also directly control the control module to turn off the abnormal power off switch, allowing the user to remotely shut down the electromagnetic heating device, thereby providing a stable liquid gas supply and heating equipment.

2. The stable liquid gas supply and heating equipment of claim 1, characterized in that the heating control system further includes an overheat protection module electrically connected to the electromagnetic heating device to obtain the operating temperature of the electromagnetic heating device, the overheat protection module generating a power-off signal when the operating temperature is overloaded, and the power-off signal is transmitted to the control module to turn off the abnormal power-off switch, thereby preventing the device from burning out due to excessive temperature.

3. 2. The stable liquid gas supply and heating equipment of claim 1, wherein the gas supply system, the gas monitoring system and the heating control system respectively comprise a first warning module, a second warning module and a third warning module, the pressure parameter including a pressure warning value, the temperature parameter including a temperature warning value, the first warning module, the second warning module and the third warning module synchronously generating a first warning notification when the current value of the air pressure exceeds the pressure warning value, and the first warning module, the second warning module and the third warning module synchronously generating a second warning notification when the current value of the temperature exceeds the temperature warning value.

4. The stable liquid gas supply and heating equipment according to claim 3, wherein the temperature warning value and the pressure warning value can be repeatedly set from an initial value to a target value by the human-machine interface.

5. The stable liquid gas supply and heating equipment of claim 1, characterized in that the liquid gas supply and heating equipment further includes an auxiliary upstream gas storage device and a weight detection device including a first weight sensor corresponding to the upstream gas storage device and a second weight sensor corresponding to the auxiliary upstream gas storage device, and the control module is further electrically connected to the first weight sensor, the second weight sensor and the auxiliary upstream gas storage device.

6. The stable liquid gas supply and heating equipment of claim 5, characterized in that the control module can generate a weight difference ratio through the first weight sensor and the second weight sensor, and when the weight difference ratio exceeds a default value, the control module automatically adjusts the pressure parameter and the temperature parameter to control the first vaporization amount of the upstream gas storage device and the second vaporization amount of the auxiliary upstream gas storage device, so that the weight difference ratio becomes smaller than the default value.

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