Flange and cutting method

Abstract

To provide a flange of a new structure and a cutting method for making it possible to shorten a time for washing that is carried out to remove cutting chips and burrs.SOLUTION: Recessed spaces 57A, 54A are formed along a circumferential direction in front of and behind, respectively, in an axial direction of a cutting blade 51. During a cutting process of a workpiece W, a cutting liquid 39 supplied from a cutting liquid supply nozzle (a shower nozzle 38) to an outer peripheral part of the cutting blade 51 enters the recessed spaces 57A, 54A, is then repelled by outer peripheral surfaces 57d, 54d, and supplied toward a cutting area of an upper surface Wa of the workpiece W. Thus, the cutting fluid 39 can be efficiently caused to flow against a burr 31 of an electrode 30 caused due to the cutting process, and the burr 31 can be separated and removed from the upper surface Wa of the workpiece W.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a flange for fixing a cutting blade to a spindle in a cutting device, and to a cutting method using the cutting device. [Background technology]

[0002] In a conventional cutting device that cuts a workpiece (a workpiece) into semiconductor chips, cutting water is continuously supplied to the cutting blade during the cutting process. By continuously supplying cutting water in this way, the heat generated during cutting is cooled, preventing deterioration of processing quality, and cutting chips generated during cutting are washed away from the workpiece.

[0003] However, it is difficult to sufficiently remove cutting debris from the workpiece using only the cutting water supplied during cutting, so after cutting, the workpiece is washed using a dedicated washing device such as a spinner washing device.

[0004] On the other hand, when the workpiece is a package substrate such as a CSP substrate, cutting along the cutting lines with a cutting blade cuts off the multiple metal electrodes formed across the cutting lines. When these metal electrodes are cut, metal burrs are generated, and if burrs are generated on the solidified package, there is a risk of causing mounting defects during subsequent mounting.

[0005] In this regard, for example, Patent Document 1 discloses cleaning the package substrate after cutting and removing burrs generated by cutting. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2019-096759 Summary of the Invention [Problem to be solved by the invention]

[0007] There is a demand for more effective cleaning to ensure that no cutting chips or burrs remain.

[0008] Furthermore, if cutting water supplied to the cutting blade during cutting can more reliably remove cutting chips and burrs from the workpiece, it will be possible to shorten the cleaning time required to remove cutting chips and burrs.

[0009] In view of the above, the present invention provides a flange with a novel structure and a cutting method that can shorten the cleaning time for removing cutting chips and burrs. [Means for solving the problem]

[0010] The problem to be solved by the present invention is as described above, and the means for solving this problem will now be described.

[0011] According to one aspect of the present invention, a spindle having a cutting blade, which is made of an annular cutting edge and cuts a workpiece, fixed to its tip; and a holding unit, which holds the workpiece to be cut by the cutting blade fixed to the tip of the spindle; a cutting fluid supply nozzle that supplies cutting fluid to the cutting blade while cutting a workpiece held by the holding unit, the flange for fixing the cutting blade to the spindle of the cutting machine comprising at least the cutting fluid supply nozzle that supplies cutting fluid to the cutting blade while cutting a workpiece held by the holding unit, the flange comprising a front flange that clamps the cutting blade and a rear flange, the front flange having a first outer periphery that is smaller in diameter than the cutting blade and a second outer periphery that is smaller in diameter than the first outer periphery, a clamping surface that abuts against the front surface of the cutting blade is formed on an end face of the second outer periphery opposite to the first outer periphery, the diameter of the outer periphery of the second outer periphery being configured to be constant in the axial direction of the front flange or configured to increase with increasing distance from the cutting blade, has a first outer circumferential portion having a smaller diameter than the cutting blade, and a second outer circumferential portion having a smaller diameter than the first outer circumferential portion, and a clamping surface that abuts against the rear surface of the cutting blade is formed on the end face of the second outer circumferential portion opposite the first outer circumferential portion, and the diameter of the outer circumferential surface of the second outer circumferential portion is configured to be the same in the axial direction of the rear flange, or configured to increase the farther away from the cutting blade, so that when the cutting blade is clamped between the front flange and the rear flange, recessed spaces are formed on both sides of the cutting blade along the circumferential direction of the flange, and cutting fluid supplied to the cutting blade from the cutting fluid supply nozzle is bounced back in the recessed spaces and supplied to the cutting area on the upper surface of the workpiece.

[0012] According to another aspect of the present invention, A cutting method for cutting a workpiece using a cutting device comprising at least a spindle having a cutting blade, which is made of an annular cutting edge and which cuts a workpiece, fixed to its tip, a holding unit for holding a workpiece to be cut by the cutting blade fixed to the tip of the spindle, and a cutting fluid supply nozzle for supplying cutting fluid to the cutting blade while cutting the workpiece held by the holding unit, the cutting method comprising: a cutting blade fixing step for clamping the cutting blade with a flange having a front flange for clamping the cutting blade and a rear flange and fixing it to the tip of the spindle, a holding step for holding a workpiece with the holding unit, and a cutting step for supplying cutting fluid to the cutting blade from the cutting fluid supply nozzle and moving the cutting blade relative to the workpiece held by the holding unit to cut the workpiece with the cutting blade, the front flange having a first outer periphery having a smaller diameter than the cutting blade and a second outer periphery having a smaller diameter than the first outer periphery, a clamping surface that abuts against the front surface of the cutting blade is formed at an end face opposite to the front flange, and the diameter of the outer peripheral surface of the second outer peripheral portion is configured to be the same in the axial direction of the front flange or to increase as it moves away from the cutting blade; the rear flange has a first outer peripheral portion having a smaller diameter than the cutting blade and a second outer peripheral portion having a smaller diameter than the first outer peripheral portion; a clamping surface that abuts against the rear surface of the cutting blade is formed at an end face opposite to the first outer peripheral portion of the second outer peripheral portion, and the diameter of the outer peripheral surface of the second outer peripheral portion is configured to be the same in the axial direction of the rear flange or to increase as it moves away from the cutting blade; when the cutting blade is clamped between the front flange and the rear flange, recessed spaces are formed on both sides of the cutting blade along the circumferential direction of the flanges; and in the cutting step, cutting fluid supplied to the cutting blade from the cutting fluid supply nozzle is bounced back in the recessed spaces and supplied to the cutting area on the upper surface of the workpiece. [Effects of the Invention]

[0013] According to the configuration of the present invention, recessed spaces are formed on both sides of the cutting blade in the circumferential direction, making it difficult for cutting fluid to enter the recessed spaces and splash sideways. This allows more cutting fluid to be supplied to the cutting area being cut by the cutting blade, making it possible to more effectively separate and remove burrs during cutting. In addition, cleaning time for removing burrs and cutting chips can be shortened. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a diagram showing an example of a cutting device used in the practice of the present invention; [Figure 2] FIG. 2 is a diagram showing the configuration of a package substrate, which is an example of a workpiece. [Figure 3] FIG. 2 is a diagram showing the configuration of a cutting unit. [Figure 4] 5A and 5B are diagrams illustrating the configuration of a flange for fixing a cutting blade. [Figure 5] 5A and 5B are diagrams illustrating a recessed space formed in a flange. [Figure 6] 10A and 10B are diagrams illustrating how cutting fluid is supplied toward a cutting region. [Figure 7] (A) is a diagram showing the configuration of a flange according to one embodiment of the present invention. (B) is a diagram showing the configuration of a flange according to one embodiment of the present invention. (C) is a diagram showing the configuration of a flange not included in the present invention. (D) is a diagram showing the configuration of a flange not included in the present invention. [Figure 8] 10A to 10C are diagrams illustrating a cutting method. [Figure 9] 10A and 10B are diagrams showing the configuration of a flange according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0015] An embodiment of the present invention will now be described with reference to the drawings. FIG. 1 is a diagram showing an example of a cutting device 1 used in carrying out the present invention.

[0016] 1, the cutting device 1 cuts a plate-shaped workpiece W (workpiece) such as a package substrate using a cutting unit 5. The cutting device 1 is configured to include a holding unit 2, an imaging unit 3, a movement mechanism (a Y-axis movement mechanism 41, a Z-axis movement mechanism 42), and the cutting unit 5. Note that the workpiece W may be a semiconductor wafer, an optical device wafer, a plate-shaped inorganic material substrate, a plate-shaped ductile material, or the like, in addition to the package substrate.

[0017] The holding unit 2 has a disk-shaped table on the top of which a horizontal holding surface is formed. The holding surface is made of a porous material and is connected to a suction source (not shown) to generate negative pressure, thereby suction-holding the workpiece W on the holding surface.

[0018] The holding unit 2 is moved in the X-axis direction by an X-axis movement mechanism (not shown) provided in the base 6, and feeds the workpiece W to the cutting unit 5 for processing.

[0019] A plurality of clamps 7 are provided around the holding unit 2 to clamp an annular frame F to which a workpiece W is fixed. The workpiece W is fixed to the annular frame F via tape T and is handled as a workpiece unit U. Note that the workpiece W is not only held by suction in the holding unit 2 via tape T, but also may be held directly on a jig table in a holding unit having a jig table.

[0020] The cutting unit 5 is configured to have a spindle 52 driven by a motor (not shown) and a cutting blade 51 fixed to the tip of the spindle 52. The cutting blade 51 is, for example, a circular grinding stone in which abrasive grains made of artificial diamond are held by a bond material.

[0021] The cutting unit 5 is moved in the Y-axis direction and the Z-axis direction by a Y-axis movement mechanism 41 and a Z-axis movement mechanism 42. The Y-axis movement mechanism 41 supports the cutting unit 5 so that it can move relatively to the base 6 in the Y-axis direction (corresponding to the indexing feed direction). The Z-axis movement mechanism 42 supports the cutting unit 5 so that it can move relatively to the base 6 in the Z-axis direction (corresponding to the cutting feed direction).

[0022] The Y-axis moving mechanism 41 is configured to include a pair of guide rails 41a, 41a attached to the front surface of the gate-shaped column 9 and extending parallel to the Y-axis direction, a ball screw 41b arranged between the guide rails 41a, 41a, and a motor 41c fixed to one end of the ball screw 41b. The ball screw 41b is connected to the Y-axis moving plate 4Y via a nut (not shown), and by rotating the ball screw 41b with the motor 41c, the Y-axis moving plate 4Y moves in the Y-axis direction along the guide rails 41a, 41a.

[0023] The Z-axis movement mechanism 42 includes a pair of guide rails 42a, 42a attached to the front surface of the Y-axis movement plate 4Y and extending parallel to the Z-axis direction, a ball screw 42b disposed between the guide rails 42a, 42a, and a motor 42c fixed to one end of the ball screw 42b. The ball screw 42b is connected to the Z-axis movement plate 4Z via a nut (not shown), and the motor 42c rotates the ball screw 42b, thereby moving the Z-axis movement plate 4Z in the Z-axis direction along the guide rails 42a. The imaging unit 3 and the cutting unit 5 are fixed to the lower end of the Z-axis movement plate 4Z.

[0024] The imaging unit 3 captures an image of the workpiece W before cutting in order to adjust the alignment of the cutting unit 5 with respect to the planned dividing lines (streets) of the workpiece W. The imaging unit 3 is, for example, a camera using a CCD (Charge Coupled Device) image sensor.

[0025] FIG. 2 is a diagram showing the configuration of a package substrate 10, which is an example of the workpiece W. As shown in FIG. The package substrate 10 has a plurality of first planned dividing lines 21 extending in a first direction F1 on the surface 11a of the substrate 11 and second planned dividing lines 22 extending in a second direction F2 perpendicular to the first planned dividing lines 21, which are set in a grid pattern.

[0026] A semiconductor device chip (not shown) is mounted on the back surface 11 b of the substrate 11 in a mounting area 15 defined by the first dividing lines 21 and the second dividing lines 22 , and is sealed with a synthetic resin 16 .

[0027] On the front surface 11a side of the substrate 11, division lines 21 and 22 are set between the mounting areas 15, and a plurality of electrodes 30 are arranged at intervals across the division lines 21 and 22.

[0028] FIG. 3 is a diagram showing the configuration of the cutting unit 5. As shown in FIG. The cutting unit 5 cuts a workpiece with a detachable cutting blade 51. The cutting blade 51 is a so-called washer-type blade, and is made of an annular cutting edge in which abrasive grains are bonded with a bonding material.

[0029] A blade cover 34 is provided above the cutting blade 51 to cover the upper part of the cutting blade 51. A nozzle block 35 is provided on one side of the blade cover 34, and a pair of blade cooler nozzles 36 are provided below the nozzle block 35 in such a way that they sandwich both side surfaces of the cutting blade 51 in the direction of the rotation axis.

[0030] 3 shows only one of the blade cooler nozzles 36. The blade cooler nozzle 36 is provided to extend in the horizontal direction and is set at a predetermined height in the height direction (Z-axis direction) of the cutting device so as not to come into contact with the upper surface of the workpiece.

[0031] The blade cooler nozzles 36 are connected via first tubes 36a to a cutting fluid supply source (not shown) that supplies cutting fluid such as pure water. Each blade cooler nozzle 36 supplies cutting fluid to the cutting blade 51 when cutting a workpiece.

[0032] A shower nozzle block 37 is provided on the other side of the blade cover 34. The shower nozzle block 37 is provided with a shower nozzle 38 (cutting fluid supply nozzle) that supplies cutting fluid 39 to the outer periphery of the cutting blade 51. The shower nozzle 38 is connected to a cutting fluid supply source (not shown) that supplies cutting fluid such as pure water via a flow path 37b provided in the shower nozzle block 37 and a second tube 37a provided on the upper part of the shower nozzle block 37.

[0033] FIG. 4 is a diagram illustrating the configuration of a flange for fixing the cutting blade 51 of the cutting unit 5. As shown in FIG. A spindle housing 53 is fixed to the bottom of the Z-axis moving plate 4Z (FIG. 1), and a rear flange 54 is fixed to the tip of the spindle 52 protruding from the spindle housing 53. The cutting blade 51 is sandwiched and fixed between the rear flange 54 and the front flange 57.

[0034] The rear flange 54 includes a cylindrical boss portion 541 and a flange portion 542 provided at one end of the boss portion 541 on the spindle housing 53 side. The flange portion 542 is formed in an annular shape with a diameter larger than the outer diameter of the boss portion 541, and is formed with an annular end surface 544 for abutting against the rear surface of the cutting blade 51. A male thread 543 is formed on the outer periphery of the other end of the boss portion 541 of the rear flange 54.

[0035] A through hole 545 into which the tip of the spindle 52 is inserted is formed in the rear flange 54. The tip of the spindle 52 is inserted into the through hole 545, and a fixing bolt 55 is screwed into a female thread 522 provided at the tip of the spindle 52, whereby the rear flange 54 is fixed to the spindle 52.

[0036] The cutting blade 51 is configured as a so-called washer blade, and is made of a predetermined thickness from abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal, resin, or vitrified, and its outer periphery forms a cutting edge.

[0037] The cutting blade 51 is configured in the shape of a circular ring having a through hole portion 514, and the cylindrical boss portion 541 of the rear flange 54 is inserted into the through hole portion 514, and the rear surface of the cutting blade 51 abuts against the annular end surface 544 formed on the front side of the rear flange 54.

[0038] The front flange 57 is configured as a disk-shaped member having a through-hole 576, and the cylindrical boss portion 541 of the rear flange 54 is inserted into the through-hole 576. An annular end face 574 for contacting the front surface of the cutting blade 51 is formed on the rear side of the front flange 57.

[0039] The blade fixing nut 56 is configured as an annular member having a through hole 566 , and inside the through hole 566 is formed a female thread 563 that screws onto the male thread 543 of the boss portion 541 of the rear flange 54 .

[0040] The cutting blade 51 and front flange 57 are attached to the rear flange 54 fixed to the spindle 52, with the boss portion 541 of the rear flange 54 protruding from the front flange 57, and the blade fixing nut 56 is tightened to the boss portion 541, thereby clamping and fixing the cutting blade 51 between the rear flange 54 and the front flange 57.

[0041] 1, the above configuration forms a cutting device 1 that includes at least a spindle 52 to which a cutting blade 51, which is made of an annular cutting edge and cuts a workpiece W, is fixed at its tip, a holding unit 2 that holds the workpiece W to be cut by the cutting blade 51 fixed to the tip of the spindle 52, and a shower nozzle 38 (FIG. 3) that serves as a cutting fluid supply nozzle that supplies cutting fluid to the cutting blade 51 while cutting the workpiece W held by the holding unit 2. The flange for fixing the cutting blade 51 to the spindle 52 is configured to include a front flange 57 that holds the cutting blade 51 in place and a rear flange 54.

[0042] As shown in Figure 5, the front flange 57 has a first outer peripheral portion 57a ​​having a smaller diameter than the cutting blade 51, and a second outer peripheral portion 57b having a smaller diameter than the first outer peripheral portion 57a, and a clamping surface 57c that abuts against the front surface 51a of the cutting blade 51 is formed on the end face of the second outer peripheral portion 57b opposite the first outer peripheral portion 57a, and the diameter of the outer peripheral surface 57d of the second outer peripheral portion 57b is configured to be the same in the axial direction of the front flange 57 (the Y-axis direction in Figure 5), or to increase the further away from the cutting blade 51.

[0043] As a result, a wall surface 57e facing the front surface 51a of the cutting blade 51 is formed between the first outer peripheral portion 57a ​​and the second outer peripheral portion 57b, and a recessed space 57A surrounded by the wall surface 57e, the front surface 51a of the cutting blade 51, and the outer peripheral surface 57d of the second outer peripheral portion 57b is formed in the circumferential direction of the front flange 57.

[0044] Similarly, the rear flange 54 has a first outer peripheral portion 54a having a smaller diameter than the cutting blade 51, and a second outer peripheral portion 54b having a smaller diameter than the first outer peripheral portion 54a, and a clamping surface 54c that abuts against the rear surface 51b of the cutting blade 51 is formed on the end face of the second outer peripheral portion 54b opposite the first outer peripheral portion 54a, and the diameter of the outer peripheral surface 54d of the second outer peripheral portion 54b is configured to be the same in the axial direction of the rear flange 54 (the Y-axis direction in Figure 5), or to become larger the further away from the cutting blade 51.

[0045] As a result, a wall surface 54e facing the rear surface 51b of the cutting blade 51 is formed between the first outer peripheral portion 54a and the second outer peripheral portion 54b, and a recessed space 54A surrounded by the wall surface 54e, the rear surface 51b of the cutting blade 51, and the outer peripheral surface 54d of the second outer peripheral portion 54b is formed in the circumferential direction of the rear flange 54.

[0046] As a result of the above, recessed spaces 57A and 54A are formed along the circumferential direction, respectively, in front of and behind the axial direction (Y-axis direction in FIG. 5) of the cutting blade 51. Then, as shown in FIG. 6, during cutting of the workpiece W, cutting fluid 39 supplied from the cutting fluid supply nozzle (shower nozzle 38 (FIG. 3)) to the outer periphery of the cutting blade 51 enters the recessed spaces 57A and 54A, is bounced off the outer periphery surfaces 57d and 54d, and is supplied toward the cutting region of the upper surface Wa of the workpiece W.

[0047] This allows the cutting fluid 39 to be efficiently directed onto the burrs 31 of the electrode 30 that are generated by cutting, and the burrs 31 can be separated and removed from the upper surface Wa of the workpiece W.

[0048] Here, as shown in FIG. 7(A), It is preferable that the diameter 54φ of the outer peripheral surface 54d of the second outer peripheral portion 54b of the rear flange 54 is configured to be constant in the axial direction (Y-axis direction) of the rear flange 54. The same is true for the front flange 57. In the example of Fig. 7(A), the outer peripheral surface 54d is formed to be flat in the horizontal direction in a side view, and is shown to be approximately parallel to the upper surface Wa of the workpiece, i.e., the holding surface 2a of the holding unit (Fig. 5).

[0049] Thus, according to the configuration shown in Figure 7(A), the cutting fluid 39 that enters the recess space 54A and is bounced off the outer peripheral surface 54d is guided radially outward of each flange, thereby preventing it from splashing away from the cutting blade 51.

[0050] Or, as shown in FIG. 7(B), The diameter 54φ of the outer peripheral surface 54d of the second outer peripheral portion 54b of the rear flange 54 is preferably configured to increase as it moves away from the cutting blade 51. The same applies to the front flange 57. In the example of FIG. 7(B), the outer peripheral surface 54d is formed so as to be inclined so that the diameter increases as it moves away from the cutting blade 51 in a side view.

[0051] Thus, according to the configuration shown in Figure 7(B), the cutting fluid 39 that enters the recess space 54A and is bounced off the outer peripheral surface 54d is guided radially outward of each flange and toward the cutting blade 51, thereby preventing it from splashing away from the cutting blade 51.

[0052] As described above, the configuration shown in Figures 7(A) and (B) can prevent the cutting fluid 39 from scattering in a direction away from the cutting blade 51, thereby allowing more cutting fluid 39 to be supplied toward the cutting area Wc, making it possible to more effectively separate and remove the burrs 31 (Figure 6) during cutting processing.

[0053] Note that Figure 7(C) shows an example of a configuration that is not the configuration of the present invention, in which the diameter 54φ of the outer surface 54d becomes smaller as it moves away from the cutting blade 51. With this configuration, the cutting fluid 39 bounces back in the direction away from the cutting blade 51, which raises concerns that the effect of separating and removing the burrs 31 (Figure 6) may be weakened.

[0054] Furthermore, as shown in FIG. 7(D), the same applies when the outer peripheral surface 54d forms a substantially U-shaped arc, unlike the configuration of the present invention, and the supply of cutting fluid 39 contributes little to separating and removing burrs 31 (FIG. 6).

[0055] Using the above flange configuration, the following cutting method can be carried out. That is, as shown in FIGS. 6 and 8, a cutting blade fixing step of clamping the cutting blade 51 with a flange having a front flange 57 and a rear flange 54 for clamping the cutting blade 51 and fixing the cutting blade 51 to the tip of the spindle 52; a holding step in which the workpiece W is held by the holding unit 2; A cutting step is carried out in which cutting fluid 39 is supplied to the cutting blade 51 from a cutting fluid supply nozzle (shower nozzle 38 (Figure 3)), and the cutting blade 51 is moved relative to the workpiece W held by the holding unit 2 to cut the workpiece W with the cutting blade 51.

[0056] 6, in this cutting method, recessed spaces 57A, 54A are formed on both sides of the cutting blade 51 in the circumferential direction of the flange, making it difficult for cutting fluid to enter the recessed spaces 57A, 54A and splash sideways. This allows more cutting fluid 39 to be supplied to the cutting area being cut by the cutting blade 51 (the area immediately adjacent to the cutting position of the cutting blade 51), making it possible to separate and remove burrs 31 more effectively during cutting.

[0057] Furthermore, the flange configuration described above is effective in removing burrs generated by electrode cutting during the cutting of package substrates, and can also efficiently supply cutting fluid to the cutting area, improving the cleaning effect in the cutting area, even when cutting workpieces that are difficult to clean after processing because of the tendency for contaminants such as cutting debris to adhere, such as semiconductor wafers with image sensor devices formed on them. In this way, cleaning time required to remove burrs and cutting debris can be shortened.

[0058] Furthermore, as shown in FIG. 9, in addition to the recessed spaces 57A and 54A formed on both sides of the cutting blade 51, recessed spaces 57B and 54B may be additionally provided on the outer periphery of each flange.

[0059] According to this configuration, the cutting fluid that has entered the recessed spaces 57B and 54B can be rebounded in the radial direction and supplied to the top surface of the workpiece, thereby improving the cleaning effect on the top surface of the workpiece.

[0060] In the above-described configuration, the recessed spaces 57A and 54A may be provided in both the front and rear flanges, respectively, or a recessed space may be formed in either one of the flanges. [Explanation of symbols]

[0061] 2 holding units 5 Cutting unit 31 Bali 37 shower nozzle block 38 shower nozzle 39 Cutting fluid 51 Cutting blade 51a Front 51b Rear 52 Spindle 53 Spindle housing 54 Rear flange 54A Recessed space 54a First outer periphery 54b Second outer periphery 54c Clamping surface 54d Outer surface 54e Wall 54φ diameter 55 Fixing bolt 56 Blade fixing nut 57 Front flange 57A Recessed space 57a First outer periphery 57b Second outer periphery 57c Clamping surface 57d Outer surface 57e Wall double work

Claims

1. a spindle having a cutting blade fixed to its tip, the cutting blade having an annular cutting edge for cutting the workpiece; a holding unit fixed to the tip of the spindle for holding a workpiece to be cut by the cutting blade; a cutting fluid supply nozzle for supplying cutting fluid to the cutting blade while cutting the workpiece held by the holding unit; A flange for fixing the cutting blade to the spindle of a cutting device, comprising at least a front flange and a rear flange that sandwich the cutting blade; The front flange has a first outer circumferential portion having a smaller diameter than the cutting blade, and a second outer circumferential portion having a smaller diameter than the first outer circumferential portion, and a clamping surface that abuts against the front surface of the cutting blade is formed on an end face of the second outer circumferential portion opposite to the first outer circumferential portion, and the diameter of the outer circumferential surface of the second outer circumferential portion is configured to be constant in the axial direction of the front flange, or to increase as it moves away from the cutting blade, The rear flange has a first outer circumferential portion having a smaller diameter than the cutting blade, and a second outer circumferential portion having a smaller diameter than the first outer circumferential portion, and a clamping surface that abuts against the rear surface of the cutting blade is formed on the end face of the second outer circumferential portion opposite to the first outer circumferential portion, and the diameter of the outer circumferential surface of the second outer circumferential portion is configured to be the same in the axial direction of the rear flange, or to increase as it moves away from the cutting blade, When the cutting blade is sandwiched between the front flange and the rear flange, recessed spaces are formed on both sides of the cutting blade along the circumferential direction of the flange, A flange in which cutting fluid supplied from the cutting fluid supply nozzle to the cutting blade is bounced back in the recessed space and supplied to the cutting area on the top surface of the workpiece.

2. a spindle having a cutting blade fixed to its tip, the cutting blade having an annular cutting edge for cutting the workpiece; a holding unit fixed to the tip of the spindle for holding a workpiece to be cut by the cutting blade; a cutting fluid supply nozzle for supplying cutting fluid to the cutting blade while cutting the workpiece held by the holding unit; A cutting method for cutting a workpiece with a cutting device comprising at least a cutting blade fixing step of clamping the cutting blade with a flange having a front flange and a rear flange that clamp the cutting blade and fixing it to the tip of the spindle; a holding step of holding a workpiece with the holding unit; a cutting step of supplying cutting fluid to the cutting blade from the cutting fluid supply nozzle and cutting the workpiece with the cutting blade by moving the cutting blade relative to the workpiece held by the holding unit, The front flange has a first outer circumferential portion having a smaller diameter than the cutting blade, and a second outer circumferential portion having a smaller diameter than the first outer circumferential portion, and a clamping surface that abuts against the front surface of the cutting blade is formed on an end face of the second outer circumferential portion opposite to the first outer circumferential portion, and the diameter of the outer circumferential surface of the second outer circumferential portion is configured to be constant in the axial direction of the front flange, or to increase as it moves away from the cutting blade, The rear flange has a first outer circumferential portion having a smaller diameter than the cutting blade, and a second outer circumferential portion having a smaller diameter than the first outer circumferential portion, and a clamping surface that abuts against the rear surface of the cutting blade is formed on the end face of the second outer circumferential portion opposite to the first outer circumferential portion, and the diameter of the outer circumferential surface of the second outer circumferential portion is configured to be the same in the axial direction of the rear flange, or to increase as it moves away from the cutting blade, When the cutting blade is sandwiched between the front flange and the rear flange, recessed spaces are formed on both sides of the cutting blade along the circumferential direction of the flange, In the cutting step, the cutting fluid supplied from the cutting fluid supply nozzle to the cutting blade is bounced back in the recessed space and supplied to the cutting area on the top surface of the workpiece.

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