Piezoelectric element and method for manufacturing the same

Abstract

Provided are a piezoelectric element (1) and a method for manufacturing a piezoelectric element with which it is possible to achieve high breakdown voltage and drive stability without a decrease in piezoelectric characteristics.　The piezoelectric element comprises a substrate (11) on which a lower electrode layer (12), a piezoelectric film (15) based on a perovskite type oxide, and an upper electrode layer (18) are provided in this order. The upper electrode layer includes an oxide conductive layer. An interface layer (16) including a constituent element of the oxide conductive layer and an OH group is provided between the piezoelectric film and the oxide conductive layer (18a). The interface layer has an amorphous structure and a thickness of 1 nm to 5 nm inclusive. In an intensity profile of bonding energy in the interface layer acquired by X-ray photoelectron spectroscopic measurement, if the peak intensity of the bonding energy deriving from the 1s orbital of oxygen bound to a metal is α, and the peak intensity of bonding energy deriving from the 1s orbital of oxygen forming an OH group is γ, the peak intensity ratio γ / α is greater than or equal to 0.35.

Description

[Technical Field]

[0001] The present disclosure relates to a piezoelectric element and a method for manufacturing a piezoelectric element. [Background technology]

[0002] Lead zirconate titanate (Pb(Zr,Ti)O3, hereafter referred to as PZT) is known as a material with excellent piezoelectric and ferroelectric properties. Taking advantage of its ferroelectric properties, PZT is used in nonvolatile memory, such as FeRAM (Ferroelectric Random Access Memory). Furthermore, in recent years, the integration of PZT with MEMS (Micro Electro-Mechanical Systems) technology has led to the practical application of MEMS piezoelectric elements with PZT films. PZT films are used as the piezoelectric film in piezoelectric elements that have a lower electrode, a piezoelectric film, and an upper electrode on a substrate. These piezoelectric elements have been applied to a variety of devices, including inkjet heads (actuators), micromirror devices, angular velocity sensors, gyro sensors, and vibration-driven power generation devices.

[0003] When applying piezoelectric elements to devices, high piezoelectric properties are desirable because the higher the piezoelectric properties, the better the device performance. Various studies have been conducted to improve the piezoelectric properties of piezoelectric films, and efforts have been made to improve the inherent piezoelectric properties of piezoelectric materials, but it is believed that further dramatic improvements to the inherent piezoelectric properties of piezoelectric materials are difficult. Meanwhile, the piezoelectric properties of a piezoelectric element are expressed as the product of the inherent piezoelectric properties of the piezoelectric material and the applied voltage. In other words, for a given piezoelectric film with the same piezoelectric properties, an element that can apply a higher voltage will have better performance as an actuator. Therefore, there is a demand for piezoelectric elements with a higher breakdown voltage (hereafter referred to as breakdown voltage) than conventional elements.

[0004] As a method for improving the breakdown voltage of a piezoelectric element, for example, Japanese Patent Application Laid-Open Nos. 2020-204083 and 2010-235402 propose a method for improving the crystallinity of a piezoelectric film and improving the breakdown voltage of the piezoelectric film by adding an additive that promotes sintering or an additive that adjusts the balance of electric charges to the piezoelectric material, which is the main component for forming a PZT film. Similarly, Japanese Patent Application Laid-Open No. 2019-052348 proposes a method for improving the crystallinity of a piezoelectric film and improving the breakdown voltage of the piezoelectric film itself by providing a buffer layer (also called a seed layer) on the surface on which the piezoelectric film is formed. Summary of the Invention [Problem to be solved by the invention]

[0005] In JP 2020-204083 A and JP 2010-235402 A, additives are added to the piezoelectric film to improve the breakdown voltage, but the introduction of additives causes a problem in that piezoelectric properties other than breakdown voltage, particularly the piezoelectric constant, are reduced.

[0006] JP 2019-052348 A aims to improve the breakdown voltage by improving the crystallinity of the PZT film by providing a seed layer. However, the introduction of a new layer, the seed layer, poses a problem of a large process load.

[0007] The technology disclosed herein has been made in consideration of the above circumstances, and aims to provide a piezoelectric element and a method for manufacturing a piezoelectric element that achieves high pressure resistance and driving stability without degrading the piezoelectric characteristics. [Means for solving the problem]

[0008] Specific means for solving the above problems include the following aspects.

[0009] A piezoelectric element according to the present disclosure is a piezoelectric element including, on a substrate, a lower electrode layer, a piezoelectric film containing a perovskite oxide as a main component, and an upper electrode layer, in this order, At least a region of the upper electrode layer closest to the piezoelectric film is made of an oxide conductive layer, an interface layer containing a constituent element of the oxide conductive layer and an OH group is provided between the piezoelectric film and the oxide conductive layer of the upper electrode layer; The interface layer has an amorphous structure and a thickness of 1 nm or more and 5 nm or less. In an intensity profile of the bond energy in the interface layer obtained by X-ray photoelectron spectroscopy, the peak intensity ratio γ / α satisfies the following formula (1), where α is the peak intensity of the bond energy derived from the 1s orbital of oxygen bonded to the metal and γ is the peak intensity of the bond energy derived from the 1s orbital of oxygen constituting the OH group. 0.35≦γ / α (1)

[0010] In the piezoelectric element of the present disclosure, the oxide conductive layer is a layer whose main component is ITO (indium tin oxide), IrO2 (iridium oxide), or SrRuO3 (strontium ruthenium oxide). "Main component" means a component that accounts for 50 mol% or more of the components that make up the film or layer.

[0011] In the piezoelectric element of the present disclosure, it is preferable that the peak intensity ratio γ / α in the intensity profile of the binding energy satisfies the following formula (2). 0.55≦γ / α (2)

[0012] In the piezoelectric element of the present disclosure, the interface layer preferably has a thickness of 3 nm or more and 5 nm or less.

[0013] In the piezoelectric element of the present disclosure, the difference in height between the projections and depressions on the surface of the piezoelectric layer is preferably 100 nm or less.

[0014] In the piezoelectric element of the present disclosure, the perovskite oxide preferably contains Pb (lead), Zr (zirconium), Ti (titanium) and O (oxygen).

[0015] In the piezoelectric element of the present disclosure, the perovskite oxide is a compound represented by the following general formula (3): Pb{(Zr x Ti 1-x ) y-1 B1y}O3(3) 0 <x<1、0<y<0.3、 B1 is preferably one or more elements selected from V (vanadium), Nb (niobium), Ta (tantalum), Sb (antimony), Mo (molybdenum), and W (tungsten).

[0016] In the piezoelectric element of the present disclosure, the piezoelectric film is preferably an oriented film oriented in the (100) plane.

[0017] In the piezoelectric element of the present disclosure, when the piezoelectric film is an oriented film oriented in the (100) plane, it is preferable that the (100) plane has an inclination of 1° or more with respect to the film surface.

[0018] A method for manufacturing a piezoelectric element according to the present disclosure includes a sputtering step of forming an oxide conductive layer on a piezoelectric film of a laminate including a lower electrode layer and a piezoelectric film on a substrate, At the beginning of the film formation in the sputtering process, sputtering is performed while introducing HO gas into the film formation chamber of the film formation apparatus, thereby forming an interface layer, and subsequently, sputtering is performed with the introduction of HO gas stopped, thereby forming an oxide conductive layer.

[0019] A method for manufacturing a piezoelectric element according to the present disclosure includes a sputtering step of forming an oxide conductive layer on a piezoelectric film of a laminate including a lower electrode layer and a piezoelectric film on a substrate, Before the sputtering process, the deposition chamber of the deposition equipment was 5×10 -3 Pa or more 5×10 -2 The chamber is evacuated until the back pressure reaches 0.001 Pa or less, and after the back pressure reaches 0.001 Pa, a film forming gas is introduced to perform the sputtering process. [Effects of the Invention]

[0020] According to the piezoelectric element and the method for manufacturing the piezoelectric element of the present disclosure, a piezoelectric element that achieves high withstand voltage can be obtained without deteriorating the piezoelectric properties of the piezoelectric film. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 2 is a cross-sectional view showing a layer structure of a piezoelectric element according to an embodiment. [Figure 2] FIG. 2 is an enlarged schematic view of a piezoelectric film. [Figure 3] FIG. 2 is a diagram showing a schematic configuration of an evaluation sample. [Figure 4] FIG. 1 is a schematic diagram of a HAADF-STEM image of a piezoelectric element. [Figure 5] FIG. 1 is an explanatory diagram of a method for preparing a sample for photoelectron spectroscopy. [Figure 6] FIG. 1 shows the bond energy profile for the interface layer of Example 1. [Figure 7] FIG. 10 shows the bond energy profile for the interface layer of Example 2. [Figure 8] FIG. 10 shows the bond energy profile for the interface layer of Example 3. [Figure 9] FIG. 10 shows the bond energy profile for the interface layer of Example 4. [Figure 10] FIG. 10 shows the bond energy profile for the interface layer of Example 5. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the thicknesses and ratios of each layer are appropriately modified for ease of viewing, and do not necessarily reflect the actual thicknesses and ratios.

[0023] (piezoelectric element) Fig. 1 is a cross-sectional view showing the layer structure of a piezoelectric element 1 according to one embodiment. As shown in Fig. 1, the piezoelectric element 1 includes a lower electrode layer 12, a piezoelectric film 15, and an upper electrode layer 18, which are arranged in this order on a substrate 11. The piezoelectric element 1 also includes an interface layer 16 between the piezoelectric film 15 and the upper electrode layer 18.

[0024] At least the region of the upper electrode layer 18 closest to the piezoelectric film is composed of an oxide conductive layer 18a. The oxide conductive layer 18a constituting the region of the upper electrode layer 18 closest to the piezoelectric film is preferably a layer containing ITO, IrO2 or SrRuO3 as a main component. The stoichiometric composition of iridium oxide is IrO2, but the iridium oxide used in the oxide conductive layer 18a is IrO, which is oxygen-deficient compared to the stoichiometric composition. x (x<2) is also acceptable. In this embodiment, an example is shown in which the upper electrode layer 18 has a single-layer structure and is made of an oxide conductive layer 18a. Note that the oxide conductive layer 18a is preferably a layer containing 80 mol % or more of ITO, IrO2, or SrRuO3. Note that the upper electrode layer 18 may have a multilayer structure instead of a single-layer structure, and in the case of a multilayer structure, it is sufficient that the oxide conductive layer is disposed closest to the piezoelectric film. Furthermore, when the upper electrode layer 18 has a multilayer structure, it may include a metal layer.

[0025] As described above, the interface layer 16 is formed between the piezoelectric film 15 and the upper electrode layer 18. The region of the upper electrode layer 18 closest to the piezoelectric film 15 is composed of an oxide conductive layer, so the interface layer 16 is formed between the piezoelectric film 15 and the oxide conductive layer 18a. The interface layer 16 contains at least the constituent elements of the oxide conductive layer 18a that constitutes the upper electrode layer 18 and OH groups. The interface layer 16 has an amorphous structure and a thickness of 1 nm or more and 5 nm or less. The thickness of the interface layer 16 is more preferably 3 nm or more and 4 nm or less.

[0026] In the intensity profile of the bond energy in the interface layer 16 obtained by X-ray photoelectron spectroscopy, the peak intensity ratio γ / α of the bond energy intensity α derived from the 1s orbital of oxygen bonded to the metal to the bond energy intensity γ derived from the 1s orbital of oxygen constituting the OH group satisfies the following formula (1): 0.35≦γ / α (1)

[0027] The details of the method for measuring the intensity profile of the binding energy will be described later in the Examples, but α and γ are defined as follows. Photoelectron spectroscopy is performed on the interface layer 16 to obtain an intensity profile with the vertical axis representing intensity and the horizontal axis representing binding energy. In this case, a spectrum derived from the oxygen 1s (O1s) orbital appearing near 530 eV is obtained as the intensity profile. The spectrum derived from the O1s orbital observed near 530 eV includes a peak derived from oxygen bonded to the metal M and a peak derived from oxygen constituting the OH group (i.e., oxygen bonded to hydrogen). The peak of the 1s orbital of oxygen bonded to hydrogen occurs on the higher energy side than the peak of the 1s orbital of oxygen bonded to the metal M. Therefore, the spectrum of the O1s orbital is separated into two peaks, and the peak on the higher energy side is taken as the binding energy peak derived from the 1s orbital of oxygen in the OH group, and its peak intensity is defined as γ. The peak on the lower energy side is taken as the binding energy peak derived from the 1s orbital of oxygen bonded to the metal M, and its peak intensity is defined as α. Here, the peak intensity ratio γ / α is calculated from the thus determined α and γ.

[0028] Here, the metal M includes all metals contained in the interface layer 16. For example, when the oxide conductive layer 18a is an ITO layer, the metal M includes at least In and Sn, and may also include metals that are constituent elements of the piezoelectric film. The bond energy derived from the 1s orbital of oxygen bonded to a metal is almost independent of the type of metal bonded, and therefore is treated as a single peak regardless of whether the metal is bonded to any other metal. Similarly, the bond energy derived from the 1s orbital of oxygen in an OH group is almost independent of the type of metal bonded to the OH group, and therefore is treated as a single peak. Note that the OH group is considered to exist as a metal hydroxide in the interface layer 16.

[0029] The inventors have found that the above-described piezoelectric element configuration can improve the withstand voltage and drive stability of the piezoelectric element 1 (see Examples below). As described above, providing the oxide conductive layer 18a in the region of the upper electrode layer 18 closest to the piezoelectric film 15 makes it less likely for oxygen elements to escape from the piezoelectric film 15, compared to when the region closest to the piezoelectric film 15 is made of metal, thereby suppressing degradation of piezoelectricity. On the other hand, when the oxide conductive layer 18a is formed on the piezoelectric film 15 by sputtering the upper electrode layer 18, an interface layer 16 containing OH groups is likely to be formed at the interface between the piezoelectric film 15 and the upper electrode layer 18. Details of the manufacturing method of the piezoelectric element will be described later, but each layer of this piezoelectric element is formed by sputtering. It is generally considered undesirable for electronic devices containing piezoelectric elements to contain OH groups, as they are prone to deterioration. In particular, when forming an oxide film, water is easily absorbed. Therefore, when forming each layer of the piezoelectric element 1 by sputtering, it is preferable to sufficiently reduce the back pressure in the film-forming chamber of the film-forming apparatus and sufficiently remove moisture contained in the film-forming chamber before forming the layer so that OH groups do not get mixed into the layers. However, the present inventors have discovered, contrary to common knowledge, that the pressure resistance and driving stability of the piezoelectric element 1 can be improved by providing an interface layer 16 containing at least a certain amount of OH groups at the interface between the piezoelectric film 15 and the oxide conductive layer 18a.

[0030] In the intensity profile of the binding energy, it is more preferable that the intensity ratio γ / α satisfies the following formula (2). 0.55≦γ / α (2)

[0031] Furthermore, when the interface layer 16 satisfies the above formula (2), higher pressure resistance and driving stability can be obtained.

[0032] Furthermore, it is preferable that γ / α≦0.9, and more preferably γ / α≦0.8. If γ / α≦0.8, fabrication is easy and the effect of improving breakdown voltage is high. Furthermore, it is preferable that γ / α≦0.8 from the viewpoint of suppressing the increase in resistance of the interface layer 16.

[0033] The thickness of the interface layer 16 is preferably 3 nm or more and 5 nm or less. By setting the thickness of the interface layer 16 within this range, higher breakdown voltage and driving stability can be obtained (see Examples).

[0034] When the oxide conductive layer 18a is a layer containing ITO as a main component, 0.4≦γ / α≦0.8 is preferable, and 0.55≦γ / α≦0.8 is more preferable.

[0035] When the oxide conductive layer 18a is a layer containing IrO2 as a main component, it is preferable that 0.4≦γ / α≦0.65.

[0036] When the oxide conductive layer 18a is a layer containing SrRuO3 as a main component, it is preferable that 0.35≦γ / α≦0.70.

[0037] The piezoelectric film 15 is mainly composed of a perovskite oxide represented by the general formula ABO3. In the general formula, A is an A-site element and is one or a combination of two or more of Pb, Ba (barium), La (lanthanum), Sr, Bi (bismuth), Li (lithium), Na (sodium), Ca (calcium), Cd (cadmium), Mg (magnesium), and K (potassium). In the general formula, B is a B-site element, and is one or a combination of two or more of Ti, Zr, V (vanadium), Nb (niobium), Ta (tantalum), Cr (chromium), Mo (molybdenum), W (tungsten), Mn (manganese), Fe (iron), Ru, Co (cobalt), Ir, Ni (nickel), Cu (copper), Zn (zinc), Ga (gallium), In, tin, antimony (Sb), and lanthanide elements. In the general formula, O is oxygen. The standard ratio of A:B:O is 1:1:3, but it may deviate within the range that allows for a perovskite structure.

[0038] Preferably, perovskite oxide accounts for 80 mol % or more of the piezoelectric film 15. Furthermore, it is more preferable that the piezoelectric film 15 is made of perovskite oxide (however, it contains inevitable impurities).

[0039] As the perovskite-type oxide, lead zirconate titanate (PZT) containing Pb (lead), Zr (zirconium), Ti (titanium) and O (oxygen) is preferably a system.

[0040] In particular, it is preferable that the perovskite-type oxide is a compound represented by the following general formula (3) containing an additive B at the B site of PZT. Pb{(Zr x Ti 1-x ) 1-y B1 y}O3(3) Here, B1 is preferably one or more elements selected from V (vanadium), Nb (niobium), Ta (tantalum), Sb (antimony), Mo (molybdenum) and W (tungsten). Here, 0 < x < 1 and 0 < y < 0.3. In the general formula (3), Pb:{(Zr x Ti 1+x ) 1-y B y}:O is based on 1:1:3, but may deviate within the range capable of taking the perovskite structure

[0041] B1 may be a single element such as only V or only Nb, or a combination of two or more elements such as a mixture of V and Nb, or a mixture of V, Nb and Ta. When B1 is these elements, a very high piezoelectric constant can be realized in combination with the Pb of the A-site element.

[0042] In addition, as shown in the cross-sectional schematic diagram of FIG. 2, the piezoelectric film 15 is preferably a columnar structure film having a columnar structure including a large number of columnar crystals 17. The large number of columnar crystals 17 preferably extend non-parallel to the surface of the substrate 11 (see FIG. 1) and are a uniaxially oriented film with aligned crystal orientations. By adopting an oriented structure, a larger piezoelectric property can be obtained.

[0043] In the example shown in FIG. 2, the longitudinal direction of the columnar crystals has an inclination β of 1° or more with respect to the normal to the substrate. This means that the orientation plane of the piezoelectric film 15 is inclined at an angle of 1° or more with respect to the surface of the substrate. Here, the orientation plane is the (100) plane or the (001) plane. Thus, in the piezoelectric film 15, it is preferable that the (100) plane or the (001) plane of the columnar crystals is inclined at an angle of 1° or more with respect to the surface of the substrate. In this example, the lattice constants of the a-axis and the c-axis in the perovskite structure are almost equal, and XRD (X-ray diffraction) ) analysis cannot distinguish between the (100) and (001) planes. However, XRD analysis can confirm that the film is oriented on either plane.

[0044] The thickness of the piezoelectric film 15 is usually 200 nm or more, for example, 0.2 μm to 5 μm, and preferably 1 μm or more.

[0045] The height difference of the surface unevenness of the piezoelectric film 15 is preferably 100 nm or less. The method for measuring the surface unevenness will be explained in the examples below, but the height difference of the surface unevenness is the maximum difference between the peak and valley (PV value). Here, the period of the surface unevenness is several tens of nm to several hundreds of nm. The period is not so minute as this, but is on the order of μm.

[0046] If the PV value of the surface roughness of the piezoelectric film 15 is 100 nm or less, the piezoelectric film 15 can be covered with an extremely thin interface layer 16, and the provision of the interface layer 16 can provide a significant effect. That is, if the PV value of the surface roughness of the piezoelectric film 15 is 100 nm or less, the pressure resistance and driving stability of the piezoelectric element can be improved. It is more preferable that the PV value of the surface roughness of the piezoelectric film 15 is 80 nm or less.

[0047] The height difference of the surface irregularities was measured in Dynamic Force Mode (DFM) using a Scanning Probe Microscope (SPM). When a patterned upper electrode layer 18 is formed on the piezoelectric film 15, the height difference of the surface unevenness can be measured on the exposed surface of the piezoelectric film 15 where the upper electrode layer 18 is not formed. Alternatively, the measurement can be performed on the surface of the piezoelectric film 15 before the upper electrode layer 18 is formed.

[0048] The substrate 11 is not particularly limited and examples thereof include substrates of silicon, glass, stainless steel, yttrium-stabilized zirconia, alumina, sapphire, silicon carbide, etc. The substrate 11 may be a laminated substrate such as a silicon substrate with a thermally oxidized film, in which an SiO2 oxide film is formed on the surface of a silicon substrate.

[0049] The lower electrode layer 12 is paired with the upper electrode layer 18 and serves as an electrode for applying a voltage to the piezoelectric film 15. The main component of the lower electrode layer 12 is not particularly limited, and examples thereof include metals or metal oxides such as Au (gold), Pt (platinum), Ir (iridium), Ru (ruthenium), Ti, Mo, Ta, Al (aluminum), Cu (copper), and Ag (silver), as well as combinations thereof. Materials such as ITO (indium tin oxide), LaNiO3, and SRO (SrRuO3) may also be used. Various adhesion layers and seed layers may be included between the piezoelectric film 15 and the lower electrode layer 12, and between the lower electrode layer 12 and the substrate 11.

[0050] Here, "lower" and "upper" do not mean upper and lower in the vertical direction; rather, the electrode arranged on the substrate side across the piezoelectric film is referred to as the lower electrode, and the electrode arranged on the opposite side of the piezoelectric film from the substrate is referred to as the upper electrode.

[0051] There are no particular limitations on the thickness of the lower electrode layer 12 and the upper electrode layer 18, but it is preferably about 50 nm to 300 nm, and more preferably 100 nm to 300 nm.

[0052] (Manufacturing method of piezoelectric element) An embodiment of a method for manufacturing the piezoelectric element 1 will be described.

[0053] The lower electrode layer 12 and the piezoelectric film 15 are formed in this order by sputtering on the substrate 11. Next, the upper electrode layer 18 is formed on the piezoelectric film 15. The process of forming the upper electrode layer 18 includes a sputtering step of first forming an oxide conductive layer 18a on the piezoelectric film 15 of the laminate including the lower electrode layer 12 and the piezoelectric film 15 on the substrate 11.

[0054] In the initial stage of the sputtering process for forming the oxide conductive layer 18a, an interface layer 16 is formed between the piezoelectric film 15 and the oxide conductive layer 18a. Specifically, in the initial stage of the sputtering process for forming the oxide conductive layer 18a, sputtering is performed while introducing HO gas (i.e., water vapor) into the film-forming chamber of the film-forming apparatus, thereby forming the interface layer 16. Thereafter, sputtering is performed with the introduction of HO gas into the film-forming chamber stopped, thereby forming the oxide conductive layer 18a. The initial stage of the sputtering process for forming the oxide conductive layer 18a on the piezoelectric film 15 refers to the period from the start of sputtering after setting the target for forming the oxide conductive layer 18a in a target holder in the film-forming chamber until the formation of the interface layer 16. The amount of HO gas introduced and the initial film-forming time may be set according to the thickness of the interface layer 16 and the desired amount of OH added.

[0055] The above manufacturing method makes it possible to obtain a piezoelectric element 1 including an interface layer 16 that has an amorphous structure, is 1 to 5 nm thick, and contains OH groups, and that satisfies the following condition: In the intensity profile of the bond energy in the interface layer 16 obtained by X-ray photoelectron spectroscopy, the peak intensity ratio γ / α of the bond energy intensity α derived from the 1s orbital of oxygen O bonded to the metal and the bond energy intensity γ derived from the 1s orbital of oxygen constituting the OH groups satisfies the following formula (1): 0.35≦γ / α (1)

[0056] Methods for introducing water vapor into the deposition chamber of the deposition apparatus include introducing a H2+O2 mixed gas into the deposition chamber to generate H2O in plasma, and supplying water vapor from the outside. On the other hand, as a method for forming the interface layer 16 containing OH groups, in addition to introducing water vapor into the deposition chamber from the outside at the beginning of deposition in the sputtering step for forming the oxide conductive layer, there is also a method for utilizing residual gas in the deposition chamber, as described above.

[0057] As a modified example of the method for manufacturing the piezoelectric element 1, a method using residual gas in the film formation chamber will be described.

[0058] In a modified example of the method for manufacturing the piezoelectric element 1, the inside of the film-forming chamber is filled with 5×10 -3 Pa or more 5×10 -2 The chamber is evacuated until the back pressure reaches 1 Pa or less, and after evacuating to the above back pressure, a film formation gas is introduced and a sputtering process is performed. This method makes it possible to form a piezoelectric element 1 including an interface layer 16 between the piezoelectric film 15 and the oxide conductive layer 18a that has an amorphous structure, contains OH groups, and is 1 to 5 nm thick, and that satisfies the above conditions.

[0059] In order to prevent components contained in the residual gas in the deposition chamber from being incorporated into the film as impurities, the deposition chamber of a deposition apparatus used for sputtering is evacuated before being filled with deposition gas. The pressure inside the chamber after this evacuation is called back pressure. The lower the internal pressure is by evacuating the deposition chamber, i.e., the lower the back pressure, the less residual gas can be produced. The main component of the residue in the deposition chamber is water. In order to prevent water from adhering to the surface of oxides such as the piezoelectric film 15, conventionally, when depositing the upper electrode layer 18 on the piezoelectric film 15, the vacuum has been evacuated to a sufficiently low back pressure. Specifically, a vacuum of 2×10 -4In contrast, in the modified example of the method for manufacturing a piezoelectric element according to the present disclosure, the back pressure is set to 5×10 Pa, which is higher than the conventional back pressure. -3 Pa or more 5×10 -2 The pressure is set to be equal to or less than Pa. This increases the amount of residual gas compared to conventional methods, creating an environment in which water easily adheres to the surface of the piezoelectric film 15, thereby enabling the formation of an interface layer 16 that contains more OH groups than conventional methods.

[0060] In order to form the interface layer 16 between the piezoelectric film 15 and the oxide conductive layer 18a, the back pressure in the deposition chamber is set to 5×10 before the sputtering step of depositing the oxide conductive layer 18a on the piezoelectric film 15. -3 Pa or more 5×10 -2 Pa or less, and further, H 2 O gas may be introduced into the deposition chamber at the initial stage of the sputtering step for depositing the oxide conductive layer 18a. [Example]

[0061] Examples and comparative examples of the present disclosure will be described below.

[0062] First, a method for manufacturing the piezoelectric elements of the examples and comparative examples will be described, with reference to the reference numerals of the layers of the piezoelectric element 1 shown in FIG.

[0063] (Bottom electrode layer deposition) An 8-inch silicon substrate with a thermal oxide film was used as the substrate 11. A lower electrode layer 12 was formed on the substrate 11 by RF (radio-frequency) sputtering. In the example, a 20 nm thick Ti layer and a 150 nm thick Ir layer were laminated in this order on the substrate 11 as the lower electrode layer 12. The sputtering conditions for each layer were as follows.

[0064] -Ti layer sputtering conditions- Target-substrate distance: 100 mm Target input power: 600W Ar gas pressure: 0.2 Pa Substrate temperature setting: 350℃

[0065] -Ir layer sputtering conditions- Target-substrate distance: 100 mm Target input power: 600W Ar gas pressure 0.2:Pa Substrate temperature setting: 350℃

[0066] (Piezoelectric film deposition) The substrate with the lower electrode layer was placed in an RF sputtering device, and a 2 μm thick Nb-doped PZT film with a Nb doping amount of 10 at % in the B site was formed under the following sputtering conditions:

[0067] -Piezoelectric film sputtering conditions- Target-substrate distance: 60 mm Target input power: 500W Degree of vacuum: 0.3 Pa, Ar / O2 mixed atmosphere (O2 volume fraction 2.0%) Substrate temperature setting: 700℃

[0068] The above steps up to the deposition of the piezoelectric film are common to all Examples and Comparative Examples. The following method or deposition conditions for depositing the upper electrode layer differ between Examples and Comparative Examples.

[0069] (Top electrode layer formation) Next, a 200 nm thick upper electrode layer 18 was formed on the surface of the piezoelectric film 15 by sputtering. For each example and comparative example, the upper electrode layer 18 was formed from the upper electrode layer material shown in Table 1. When an ITO layer was formed as the upper electrode layer 18, an ITO target was used, and when an SrRuO3 layer was formed, an SrRuO3 target was used. On the other hand, when an IrO2 layer was formed as the upper electrode layer 18, an Ir target was used and reactive sputtering was performed. The interface layer 16 was formed in the early stage of the formation of this upper electrode layer 18.

[0070] [Examples 1-4, 8, 10, Comparative Example 1] The substrate after the piezoelectric film formation was placed in the film formation chamber of the RF sputtering device, and after evacuation to the back pressure shown in Table 1 for each example and comparative example, Ar / O2 mixed gas (O2 volume fraction 10%) was introduced into the device to achieve a vacuum of 0.3 Pa. The substrate temperature was set to RT (room temperature), and the target input power was 200 W.

[0071] [Comparative Examples 2 and 3] The substrate temperature was set to 200° C. The conditions other than the substrate temperature setting were the same as those in Example 1.

[0072] [Examples 5, 6, 9, and 11] During the initial 10 seconds of deposition, H2O gas was introduced. A target using the material for the upper electrode layer was set, and 10 seconds after the start of sputtering deposition, H2O gas was introduced into the deposition chamber while sputtering was continued. Ar was bubbled through a bottle containing pure water as a carrier gas, and H2O gas was supplied directly into the deposition chamber using the water vapor pressure. The flow rate ratio of H2O gas, H2O / (H2O+O2), was adjusted to 10%.

[0073] [Example 7] The film was formed while introducing H2O gas for the first 20 seconds. After the 20 seconds, the film was formed with the introduction of H2O gas stopped. The conditions other than the introduction time of H2O gas were the same as in Example 5.

[0074] Comparative Example 4 The film was formed while introducing H2O gas for the first 30 seconds. After the 30 seconds, the film was formed with the introduction of H2O gas stopped. The conditions other than the introduction time of H2O gas were the same as in Example 5.

[0075] As described above, laminates were prepared for cutting out the piezoelectric elements of each Example or Comparative Example. The piezoelectric elements of the Examples and Comparative Examples cut out from the laminates thus prepared were evaluated and measured as follows. The piezoelectric elements of Examples 5 and 6 were the same laminate, cut out from the center and periphery of an 8-inch substrate.

[0076] <Layer structure and crystallinity evaluation> Scanning Transmission Electron Microscope (STEM) image In addition, transmission electron microscope (TEM) images were taken to evaluate the layer structure of the piezoelectric element and the crystallinity of each layer.

[0077] FIG. 4 is a schematic diagram showing high-angle annular dark field (HAADF)-STEM images of the region centered on the interface layer 16 in the cross section of the piezoelectric element of the example and comparative example. As shown in FIG. 4, contrast due to the composition is clearly observed in the HAADF-STEM image. In the example and comparative example, the presence of an interface layer 16, which has a different composition from both the upper electrode layer 18 and the piezoelectric film 15, was confirmed (see FIG. 4). Furthermore, a further enlarged TEM image was obtained of the vicinity of the interface layer 16, such as the rectangular region surrounded by the dashed line in FIG. 4, to confirm the state of the crystals (not shown). In the ITO layer constituting the upper electrode layer 18, lines extending in a diagonal direction intersecting the interface layer 16, and a striped pattern of the diagonal lines was observed. Furthermore, in the PZT film constituting the piezoelectric film 15, a horizontal stripe pattern was observed in which lines extended in a horizontal direction approximately parallel to the interface layer 16 and the horizontally extending lines were arranged in a striped pattern (arranged in a direction approximately parallel to the interface layer 16). The stripes observed are thought to be crystal planes. On the other hand, no regular stripes were observed in the interface layer 16, and the interface layer 16 had an amorphous structure. Note that similar structures were observed in each example and comparative example, and there were no significant differences other than the thickness of the interface layer 16.

[0078] <Interface layer thickness measurement> The thickness of the interface layer in each example and comparative example was measured by drawing lines on the TEM image at the boundary between the piezoelectric film 15 and the interface layer 16 and at the boundary between the interface layer 16 and the upper electrode layer 18, and then measuring the distance between the two lines. The thickness of each example is shown in Table 1 below. The measured thickness values ​​include an error of about 10%.

[0079] <Evaluation of OH content in the interface layer> The OH content in the interface layer was evaluated by photoelectron spectroscopy of the interface layer. Fig. 5 is an explanatory diagram of a method for producing a sample for photoelectron spectroscopy measurement, in which Fig. 5A is a schematic cross-sectional view of a portion of a piezoelectric element, and Fig. 5B is a schematic view of the cut surface of a measurement sample obtained from the piezoelectric element shown in Fig. 5A.

[0080] For each example and comparative example, a sample for composition analysis was prepared using an oblique cutting method. As shown in FIG. 5A, a diamond knife was inserted into the surface of the piezoelectric element at an angle θ, and the piezoelectric element was cut obliquely. This resulted in the cut surface shown in FIG. 5B. As shown in FIG. 5B, the interface layer 16 having a thickness t shown in FIG. 5A is exposed on the cut surface with a width equal to 1 / sinθ. The thickness t of the interface layer 16 was estimated to be approximately 10 nm, and the angle θ was set so that the width of the interface layer 16 exposed on the cut surface after oblique cutting was 5 μm or more.

[0081] A measurement area (area surrounded by a circle in FIG. 5B) was set on the cut surface obtained as described above so as to include a small amount of the piezoelectric film 15, and photoelectron spectroscopy measurement was carried out.

[0082] 6 to 10 show intensity profiles of binding energy obtained by photoelectron spectroscopy for the piezoelectric elements of Examples 1 to 5. In FIGS. 6 to 10, the intensity profiles indicated by solid lines are measurement data with noise removed. Examples 1 to 5 are all examples in which the oxide conductive layer constituting the upper electrode layer is ITO. As shown in FIGS. 6 to 10, a spectrum originating from the oxygen 1s orbital appears near a binding energy of 530 eV. As shown in FIGS. 6 to 10, the spectrum originating from the oxygen 1s orbital has two maxima. The spectrum was separated into two peaks with peak values ​​at the binding energies showing these two maxima. As mentioned above, the peaks indicated by dashed lines in FIGS. 6 to 10 are binding energy peaks originating from the 1s orbital of oxygen O bonded to metal M (hereinafter referred to as "oxygen O in the M-O bond"). 6 to 10, of the two separated peaks, the peak on the higher energy side indicated by the dotted line is a peak of bond energy resulting from the 1s orbital of O in the OH group bonded to the metal M (hereinafter referred to as "oxygen O in the M-OH bond"). The respective peak intensities α and γ were determined, and the peak intensity ratio γ / α was calculated.

[0083] 6 to 10 show the intensity profiles for Examples 1 to 5. For all Examples and Comparative Examples, the bond energy intensity profile was obtained using the same procedure, and the peak intensity ratio γ / α was calculated from the intensity profile. This peak intensity ratio corresponds to the abundance of M-OH bonds relative to the abundance of M-O bonds, and serves as a guide for evaluating the OH content in the interface layer. The peak intensity ratio for each Example is shown in Table 1 below.

[0084] For peak separation, the bond energies of the M–O bond and the M–OH bond were obtained from the NIST (National Institute of Standards and Technology) database ([online], [searched March 23, 2021], Internet,<URL:https: / / srdata.nist.gov / xps / main_search_menu.aspx> However, since the spectrum may shift depending on the measurement device, the values ​​in the database were referenced, and the respective binding energies were set from the maximum values ​​of the acquired spectrum to perform peak separation.

[0085] <Measurement of withstand voltage> The breakdown voltage of the piezoelectric element was measured using evaluation sample 2 shown in Figure 3 for the examples and comparative examples. Evaluation sample 2 was fabricated using the above-mentioned manufacturing method, but with a metal mask having a 400 μm diameter opening when forming the upper electrode layer. Circular upper electrode layers 18 each having a diameter of 400 μm were formed by sputtering through the metal mask. Furthermore, evaluation sample 2 shown in Figure 3 was fabricated by cutting out a 25 mm x 25 mm piece centered on one upper electrode layer 18. The lower electrode layer 12 was grounded, and the upper electrode layer 18 was set to a negative potential. The voltage was gradually increased at a rate of 1 V / sec. The voltage at which a current of 1 mA or more flowed was considered to be the breakdown voltage. A total of 10 measurements were performed, and the average (absolute value) was defined as the breakdown voltage. The measurement results are shown in Table 1. The upper voltage limit was set to 300 V. If breakdown did not occur up to 300 V, it was noted as ">300" in Table 1.

[0086] <Electrical property measurement> The bipolar polarization-electric field characteristics (PE hysteresis characteristics) of the piezoelectric elements were measured. Using evaluation sample 2, which was the same as the sample used in the withstand voltage measurement, measurements were carried out at a frequency of 10 Hz and a maximum applied voltage of 80 V (i.e., a maximum applied electric field of 400 kV / cm). The spontaneous polarization P was calculated from the obtained PE hysteresis curve. The spontaneous polarizations of the examples and comparative examples are shown in Table 1. Note that the larger the spontaneous polarization P, the larger the piezoelectric constant and the higher the piezoelectric characteristics.

[0087] <Evaluation of driving stability> A time-dependent dielectric breakdown (TDDB) test was conducted to evaluate the driving stability. In a 50°C environment, lower electrode layer 12 was grounded, and a voltage of -30 V was applied to upper electrode layer 18, and the time (hr) from the start of voltage application until breakdown occurred was measured. The measurement results are shown in Table 1. The TDDB test was performed for 100 hours, and those that did not experience breakdown over 100 hours were marked with ">100" in Table 1, since the time until breakdown occurred exceeded 100 hours.

[0088] <Measurement of surface irregularities of piezoelectric film> The surface roughness was measured in dynamic force mode (DFM) using an S-image scanning probe microscope (SPM) manufactured by Hitachi High-Tech Science Corporation. 5 μm of the surface of the piezoelectric film 15 that is exposed without being broken 2 The maximum difference in surface roughness, or peak to valley (PV value), is shown in Table 1.

[0089] [Table 1]

[0090] As shown in Table 1, Examples 1 to 11, which have an interface layer between the piezoelectric film and the oxide conductive layer (top electrode layer) with a thickness of 1 to 5 nm and satisfy the condition γ / α = 0.35 to 0.33, clearly show significant improvements in breakdown voltage and driving stability compared to Comparative Examples 1 to 3, in which γ / α = 0.3 to 0.33. Examples 1 to 11 have a high breakdown voltage of 120 V or more, and driving stability is at least 1.5 times longer than the conventional 40 hours (Comparative Example 1). Furthermore, Examples 1 to 11 have a spontaneous polarization P equivalent to that of Comparative Example 1. That is, the piezoelectric elements of Examples 1 to 11 were able to maintain their piezoelectric properties while improving their breakdown voltage and driving stability. Examples 1 to 5 reveal that the higher the OH group content in the interface layer, i.e., the larger γ / α within the range of 0.35 to 0.8, the higher the breakdown voltage can be. Furthermore, when γ / α is 0.55 to 0.8, driving stability exceeded 100 hours, demonstrating extremely high reliability. The upper electrode layer is an ITO layer in all of Examples 1 to 5, but a similar tendency is observed when the upper electrode layer is an IrO2 layer in Examples 8 and 9, and when the upper electrode layer is an SrRuO3 layer in Examples 10 and 11. A comparison of Examples 5 and 6 showed that the smaller the surface unevenness, the better the pressure resistance.

[0091] On the other hand, when the thickness of the interface layer was increased to 10 nm as in Comparative Example 4, it was found that although the withstand voltage and driving stability were improved, the piezoelectric characteristics were degraded.

[0092] From the results of Examples 1 to 4 and Comparative Example 1, it is clear that the OH groups contained in the interface layer can be adjusted by adjusting the back pressure of the deposition chamber before the sputtering process when depositing the upper electrode layer. Furthermore, by introducing HO gas at the beginning of deposition in the sputtering process, the OH groups contained in the interface layer can be more effectively increased.

[0093] The disclosure of Japanese Patent Application No. 2021-058185, filed on March 30, 2021, is incorporated herein by reference in its entirety. All publications, patent applications, and technical standards mentioned in this specification are herein incorporated by reference to the same extent as if each individual publication, patent application, or technical standard was specifically and individually indicated to be incorporated by reference.

Claims

1. A piezoelectric element comprising a lower electrode layer, a piezoelectric film mainly composed of a perovskite oxide, and an upper electrode layer in this order on a substrate, At least a region of the upper electrode layer closest to the piezoelectric film is made of an oxide conductive layer, an interface layer containing a constituent element of the oxide conductive layer and an OH group is provided between the piezoelectric film and the oxide conductive layer of the upper electrode layer; the interface layer has an amorphous structure and a thickness of 1 nm or more and 5 nm or less; A piezoelectric element, in which, in an intensity profile of bond energy in the interface layer obtained by X-ray photoelectron spectroscopy, a peak intensity ratio γ / α satisfies the following formula (1), where α is the peak intensity of bond energy derived from the 1s orbital of oxygen bonded to a metal, and γ is the peak intensity of bond energy derived from the 1s orbital of oxygen constituting the OH group: 0.35≦γ / α (1)

2. The oxide conductive layer is made of ITO, IrO ２ or SrRuO ３ The piezoelectric element according to claim 1 , wherein the layer is composed mainly of

3. 3. The piezoelectric element according to claim 1, wherein in the intensity profile of the binding energy, the peak intensity ratio γ / α satisfies the following formula (2): 0.55≦γ / α (2)

4. The piezoelectric element according to claim 1 , wherein the thickness of the interface layer is 3 nm or more and 5 nm or less.

5. 5. The piezoelectric element according to claim 1, wherein the unevenness of the surface of the piezoelectric film has a height difference of 100 nm or less.

6. The piezoelectric element according to claim 1 , wherein the perovskite oxide contains Pb, Zr, Ti, and O.

7. The perovskite oxide is a compound represented by the following general formula (3): P｡{(Cr ｘ Ti １－ｘ ) ｙ－１ B1 ｙ }O ３ (3) 0<x<1, 0<y<0.3, 7. The piezoelectric element according to claim 6, wherein B1 is one or more elements selected from the group consisting of V, Nb, Ta, Sb, Mo, and W.

8. The piezoelectric element according to claim 1 , wherein the piezoelectric film has a columnar structure made up of a large number of columnar crystals.

9. 9. The piezoelectric element according to claim 8, wherein the (100) or (001) plane of the columnar crystal has an inclination of 1° or more with respect to the surface of the substrate.

10. A method for manufacturing a piezoelectric element according to any one of claims 1 to 9, comprising: a sputtering step of depositing the oxide conductive layer on the piezoelectric film of a laminate including the lower electrode layer and the piezoelectric film on the substrate, At the beginning of the film formation in the sputtering process, H ２ The interface layer is formed by sputtering while introducing O gas. ２ sputtering is performed while the introduction of O gas is stopped, to form the oxide conductive layer.

11. A method for manufacturing a piezoelectric element according to any one of claims 1 to 9, comprising: a sputtering step of depositing the oxide conductive layer on the piezoelectric film of a laminate including the lower electrode layer and the piezoelectric film on the substrate, Before the sputtering process was carried out, the inside of the film formation chamber of the film formation apparatus was 5×10 －３ Pa or more 5×10 －２ a vacuum is drawn until a back pressure of 100 Pa or less is reached, and after the back pressure is reached, a film forming gas is introduced and the sputtering step is carried out.

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