Storage cassette and processing device

Abstract

To provide a storage cassette capable of preventing dust from adhering to a wafer compared to an open type cassette, and capable of being opened / closed by a compact opening / closing mechanism compared to a load port for opening / closing a FOUP or SMIF pod.SOLUTION: A storage cassette includes a housing body including a disk-shaped top plate and bottom plate, and a side plate including an opening between the top plate and the bottom plate and positioned between at least a part of the outer periphery of the top plate and a part of the outer periphery of the bottom plate, at least two support members each having a support shelf provided in a manner protruding inward from the outer peripheries of the top plate and the bottom plate, and each provided along the first direction inside the outer peripheries of the top plate and the bottom plate, a door portion that opens and closes the opening, and a disk-shaped rotating plate arranged on the top plate so as to be rotatable around a rotating axis parallel to the first direction, and having a door portion fixed to the outer periphery thereof, and the opening is opened and closed by the rotating plate rotating around the rotation axis with respect to the top plate.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a storage cassette and a processing device including an opening / closing unit capable of opening and closing the storage cassette. [Background technology]

[0002] Semiconductor device chips are mounted on electronic devices such as mobile phones, personal computers, etc. To manufacture semiconductor device chips, for example, first, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in each area defined by a plurality of planned division lines set in a grid pattern on the surface of a semiconductor wafer (hereinafter simply referred to as wafer).

[0003] Next, the back side of the wafer is ground using a grinding device to thin it, and then the thinned wafer is divided along each planned division line using a cutting device, thereby dividing the wafer into a plurality of device chips.

[0004] When transporting wafers to a cutting device, for example, a wafer unit is created in which the wafer is supported by an annular frame via dicing tape, and multiple wafer units are stored in a single cassette, and the cassette is then transported to the cutting device (see, for example, Patent Document 1).

[0005] The cassette described in Patent Document 1 is an open type having a pair of side plates and a rod-shaped connector that connects the pair of side plates. A support shelf is formed on the inside of each side plate, and each wafer unit is housed in the cassette with its frame supported by the pair of support shelves.

[0006] However, since the interior of the cassette is exposed to the outside except for the pair of side plates and the connecting portion, dust, dirt, etc. may adhere to the wafers during transport. Therefore, if the cleanliness of the clean room is relatively low, a FOUP (Front Opening Unify Pod) or an SMIF (Standard Mechanical Interface) pod, each with an openable door, may be used to prevent the adhesion of dust, dirt, etc. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 8-80989 Summary of the Invention [Problem to be solved by the invention]

[0008] However, when using FOUP or SMIF pods, a relatively large load port (FOUP opener, SMIF opener) is required to open and close the pod, and in addition to the load port, an EFEM (Equipment Front End Module) equipped with an FFU (Fan Filter Unit) to maintain a relatively high level of cleanliness in the transfer space is required.

[0009] The present invention has been made in view of the above problems, and has as its object to provide a storage cassette that can prevent dust, dirt, and the like from adhering to wafers in comparison with open-type cassettes, and that can be opened and closed with a smaller opening and closing mechanism in comparison with load ports that open and close FOUPs and SMIF pods. [Means for solving the problem]

[0010] According to one aspect of the present invention, there is provided a storage cassette for storing a work unit in which a disk-shaped first workpiece or a disk-shaped or rectangular second workpiece is supported by a ring frame via a tape, the storage cassette having a disk-shaped top plate and a bottom plate, each of which includes an opening between the top plate and the bottom plate that allows the first workpiece or the work unit to be inserted and removed, and a side plate located between at least a part of the outer periphery of the top plate and a part of the outer periphery of the bottom plate. The upper ends of the side plates are fixed to the top plate, and the lower ends of the side plates are fixed to the bottom plate. and a support shelf provided inward from the outer periphery of the top plate and the bottom plate and capable of supporting the outer periphery of the first work or the work unit in a first direction from the bottom plate to the top plate. At least two support members are provided along the first direction on the inside of the outer periphery of the top plate and the bottom plate. A door portion for opening and closing the opening is provided on the top plate so as to be rotatable about a rotation axis parallel to the first direction, and the door portion is provided on the outer periphery. the top end of A disk-shaped rotating plate to which the a rotary table provided on the opposite side of the bottom plate from the top plate and rotatably supporting the bottom plate; Equipped with the rotating plate is supported by the top plate via a bearing provided on an upper surface of the top plate, and the bottom plate is supported by the rotary table via a bearing provided on a lower surface of the bottom plate; The storage cassette is provided such that the opening is opened and closed by the rotation of the rotary plate about the rotation axis relative to the top plate.

[0011] Preferably, the storage cassette further includes a locking mechanism that fixes the door portion and the side plate when the door portion is rotated to close the opening.

[0012] Preferably, the storage cassette further includes a regulating member that is provided on the inner side surface of the door portion along the first direction and that, when the door portion is positioned to close the opening, contacts the outer periphery of the first work or work unit supported by the at least two support members in a planar direction perpendicular to the first direction, thereby regulating movement of the first work or work unit in the planar direction.

[0013] Also preferably, The centers of the concentrically arranged top plate and bottom plate are offset in a predetermined direction from a point equidistant from the at least two support members, and the regulating member is positioned at the front side in the movement direction when the door section is closed.When the opening is closed with the door section, the movement of the first work or the work unit is regulated by the at least two support members and the regulating member, and when the opening is opened, the regulating member moves away from the outer periphery of the first work or the work unit.

[0014] According to another aspect of the present invention, there is provided a processing device having a chuck table that suction-holds a work unit in which a disk-shaped first workpiece or a disk-shaped or rectangular second workpiece is supported on a ring frame via tape, and a processing unit that processes the first workpiece or the work unit suction-held by the chuck table, the processing device including a mounting table on which a storage cassette is placed, a rotary drive source provided on the mounting table, and a rotating body that is rotated by the rotary drive source, and an opening / closing unit that opens and closes the storage cassette with the rotating body, the storage cassette each having a disk-shaped top plate and bottom plate, and side plates that include an opening between the top plate and the bottom plate to allow the first workpiece or the work unit to be inserted and removed, and are located between at least a part of the outer periphery of the top plate and a part of the outer periphery of the bottom plate. The upper ends of the side plates are fixed to the top plate, and the lower ends of the side plates are fixed to the bottom plate. The storage body portion and the top plate and the bottom plate From the outside to the inside and a support shelf that is provided in a manner that protrudes toward the top plate and is capable of supporting the outer periphery of the first work or the work unit in a first direction proceeding from the bottom plate to the top plate, and at least two support members that are provided along the first direction on the inside of the outer periphery of the top plate and the bottom plate, a door portion that opens and closes the opening, and a door portion that is disposed on the top plate rotatably around a rotation axis parallel to the first direction and has the door portion on the outer periphery. the top end of A disk-shaped rotating plate to which the a rotary table provided on the opposite side of the bottom plate from the top plate and rotatably supporting the bottom plate; and the rotating plate is supported by the top plate via a bearing provided on an upper surface of the top plate, and the bottom plate is supported by the rotary table via a bearing provided on a lower surface of the bottom plate; The opening and closing unit provides a processing device that opens and closes the door portion by rotating the rotating body while the rotating body is in contact with the outer side surface of the door portion of the storage cassette, the bottom plate of which is placed on the mounting table. [Effects of the Invention]

[0015] A storage cassette according to one aspect of the present invention comprises a storage main body portion having a disk-shaped top plate and bottom plate, and a side plate that includes an opening between the top plate and the bottom plate and is positioned between at least a portion of the outer periphery of the top plate and a portion of the outer periphery of the bottom plate.

[0016] The storage cassette further includes at least two support members each having a support shelf protruding toward the center of the top plate and bottom plate, a door portion for opening and closing the opening, and a circular rotating plate disposed on the top plate and having the door portion fixed to its outer periphery.

[0017] In this storage cassette, the opening can be closed with a door, so that dust, dirt, etc. can be prevented from adhering to the workpieces, compared to an open-type cassette.

[0018] Furthermore, since the opening of the storage cassette can be opened and closed by rotating the rotating plate relative to the top plate, the door can be opened and closed by rotating the door and rotating plate with a rotating body fixed to a motor, for example. Therefore, the storage cassette can be opened and closed with a smaller opening and closing mechanism than a load port that opens and closes a FOUP or SMIF pod. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 10 is a perspective view of the storage cassette in an open state. [Figure 2] FIG. 2 is a perspective view of a disk-shaped workpiece. [Figure 3] FIG. 3(A) is a top view of the storage cassette in an open state, and FIG. 3(B) is a front view of the storage cassette in an open state. [Figure 4] FIG. 10 is a perspective view of the storage cassette with the door portion being closed. [Figure 5] FIG. 10 is a perspective view of the storage cassette in a closed state. [Figure 6] FIG. 10 is a view showing the locking mechanism in a disengaged state. [Figure 7] FIG. 7(A) is a diagram showing the locking mechanism when the door portion and the side plate are fixed, and FIG. 7(B) is an enlarged view of the locking mechanism when the storage cassette is viewed from above. [Figure 8] FIG. 8(A) is a top view of the storage cassette in an open state, and FIG. 8(B) is a top view of the storage cassette in a closed state. [Figure 9] FIG. [Figure 10]FIG. 2 is an enlarged view of the storage cassette and the opening / closing unit. [Figure 11] FIG. 11(A) is an enlarged view of the storage cassette etc. when the orientation is changed, and FIG. 11(B) is an enlarged view of the storage cassette etc. when inspected. [Figure 12] FIG. 12(A) is a perspective view of a work unit having a disk-shaped workpiece, and FIG. 12(B) is a perspective view of a work unit having a rectangular workpiece. DETAILED DESCRIPTION OF THE INVENTION

[0020] An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of an open state of a storage cassette 2 according to a first embodiment. The storage cassette 2 has a disk-shaped top plate 4a and a disk-shaped bottom plate 4b, each made of resin and having approximately the same diameter.

[0021] An annular bearing 6a (see FIG. 3(B)) is provided on the upper surface of the top plate 4a. The bearing 6a is, for example, a ball bearing. A disk-shaped rotating plate 8a made of resin and having a diameter larger than that of the top plate 4a is provided above the bearing 6a.

[0022] The rotating plate 8a is rotatable relative to the top plate 4a, and rotates around a rotation axis 10 parallel to the height direction (first direction) A of the storage cassette 2. A handle 12 is provided on the upper surface of the rotating plate 8a.

[0023] The semicircular upper end of the semicylindrical side plate 14 is fixed to part of the outer periphery of the lower surface of the top plate 4a with an adhesive (not shown). Also, the semicircular lower end of the side plate 14 is fixed to part of the outer periphery of the upper surface of the bottom plate 4b with an adhesive (not shown).

[0024] In this way, the side plates 14 are located between the lower surface of the top plate 4a and the upper surface of the bottom plate 4b. The side plates 14 may be provided from the outer peripheral side surface of the top plate 4a to the outer peripheral side surface of the bottom plate 4b. The side plates 14 are formed, for example, from a resin that is transparent to visible light.

[0025] The side plates 14 in this embodiment are substantially semi-cylindrical, but the circumferential length of the side plates 14 may be appropriately determined so as not to interfere with the loading and unloading of a disk-shaped workpiece 11 (see FIG. 2), which will be described later. For example, the circumferential length of the side plates 14 is at least half the circumferential length of the top plate 4a (or bottom plate 4b).

[0026] An opening 14a is formed on the side of the side plate 14 opposite to the line (rotation axis 10) connecting the center of the lower surface of the top plate 4a and the center of the upper surface of the bottom plate 4b, extending from the top plate 4a to the bottom plate 4b.

[0027] The disk-shaped workpieces 11 are loaded into and unloaded from the storage cassette 2 through the opening 14a. The top plate 4a, the bottom plate 4b, and the side plates 14 form a storage body 16 that stores the workpieces 11.

[0028] A semi-cylindrical door portion 18 is disposed outside the side plate 14. The upper end of the inner circumferential surface of the door portion 18 is fixed to the outer circumferential portion of the rotating plate 8a. The door portion 18 is formed, for example, from a resin that is transparent to visible light.

[0029] The length of the door section 18 is longer than the side plates 14 in the height direction A extending from the bottom plate 4b to the top plate 4a, and the door section 18 is provided from the upper surface of the rotating plate 8a to the lower surface of the bottom plate 4b. The length of the arc-shaped portion of the door section 18 is also longer than the length of the arc-shaped portion of the outer periphery of the bottom plate 4b where the side plates 14 are not provided.

[0030] When opening 14a is opened, door section 18 is disposed on the outer periphery of side plate 14 in the radial direction of bottom plate 4b (see FIGS. 1, 3(A), and 3(B)). On the other hand, when opening 14a is closed by door section 18, door section 18 is rotated around rotation axis 10 together with rotary plate 8a, and door section 18 is disposed on the opposite side of rotation axis 10 from side plate 14 (see FIGS. 4 and 5).

[0031] The angular range in which the rotary plate 8a can rotate is limited to a predetermined range by a stopper (not shown) or the like. For example, the angular range in which the rotary plate 8a can rotate is limited so that the door section 18 can move between the open position (FIG. 1) and the closed position (FIG. 5).

[0032] Three (at least two) support members 20, each shaped like a rectangular pillar, are provided inside the outer peripheries of the top plate 4a and bottom plate 4b, extending in the height direction A from the top plate 4a to the bottom plate 4b.

[0033] The three support members 20 are spaced apart from one another along the circumferential direction of the bottom plate 4b (see FIG. 3(A)). One support member 20 is disposed near each of the lateral ends of the opening 14a, and another support member 20 is disposed further back than the opening 14a.

[0034] Each support member 20 has a plurality of support shelves 22 discretely arranged along the height direction A. Each support shelf 22 is provided in a manner that protrudes inward (i.e., toward the rotation shaft 10) from the outer periphery of the top plate 4a and the bottom plate 4b.

[0035] Two adjacent support shelves 22 in the height direction A are spaced apart by several millimeters. The workpiece 11 can be inserted into the gap between the two support shelves 22. The outer periphery of the workpiece 11 is supported by the support shelves 22 located at the same height among the three support members 20.

[0036] In addition, the distance 22a from the base of the support shelf 22 on one of the two support members 20 located near both lateral ends of the opening 14a to the base of the support shelf 22 on the other support member 20 is set to be approximately the same as the diameter of the workpiece 11.

[0037] An annular bearing 6b (see FIG. 3(B)) is provided on the underside of the bottom plate 4b. The bearing 6b is, for example, a ball bearing. A circular plate-shaped rotary table 8b made of resin and having a diameter larger than that of the bottom plate 4b is provided below the bearing 6b.

[0038] That is, the turntable 8b is disposed on the opposite side of the bottom plate 4b from the top plate 4a, and rotatably supports the bottom plate 4b via bearings 6b. A through-hole (not shown) is formed in the turntable 8b so as to penetrate the turntable 8b and to rotatably connect the cylindrical fixing member 24.

[0039] In addition, a hole (not shown) of approximately the same diameter as the through hole is formed in the bottom plate 4b, and when a fixing member 24 is inserted into this hole and the through hole, the bottom plate 4b and the rotary table 8b will no longer rotate relatively around the rotary shaft 10.

[0040] When the storage cassette 2 is used in the cutting device 42 (see FIG. 9), a sliding shutter 48c (see FIG. 11(A)) and the like are positioned below the rotary table 8b. The shutter 48c has the function of protecting the fixing member rotation mechanism 80 (see FIG. 11(A)) used to remove the fixing member 24.

[0041] The fixing member 24 is, for example, a male screw. In this case, the through hole of the turntable 8b is a tapped hole with a female screw formed therein, and the bottom plate 4b is a hole (a so-called through hole) having a diameter larger than the diameter of the fixing member 24. Note that, to ensure the cleanliness of the interior, the hole of the bottom plate 4b may be a blind hole that does not go through.

[0042] The fixing member 24 may be a pin without a thread. In this case, the through-hole of the turntable 8b has substantially the same diameter as the fixing member 24, and holds the fixing member 24 by friction, preventing the fixing member 24 from falling. In contrast, the hole of the bottom plate 4b has a larger diameter than the fixing member 24.

[0043] Here, the workpiece (first workpiece) 11 will be described with reference to Fig. 2. Fig. 2 is a perspective view of the disk-shaped workpiece 11. In this embodiment, the workpiece 11 is a silicon wafer, but there are no limitations on the material of the workpiece 11, and the workpiece 11 may be a wafer formed from a compound semiconductor material such as gallium arsenide (GaAs) or silicon carbide (SiC).

[0044] A plurality of planned dividing lines 13 are set in a grid pattern on the surface 11a of the workpiece 11. A device 15 such as an IC (Integrated Circuit) is formed in each of the areas partitioned by the plurality of planned dividing lines 13. Note that the workpiece 11 does not necessarily need to have the device 15 formed thereon.

[0045] The thickness of the workpiece 11 (i.e., the distance from the front surface 11a to the back surface 11b) is, for example, 500 μm to 1000 μm, and the diameter of the workpiece 11 corresponds to the distance 22a and is, for example, about 200 mm (8 inches) or about 300 mm (12 inches).

[0046] Fig. 3(A) is a top view of the storage cassette 2 in an open state. However, in Fig. 3(A), the top plate 4a, bearing 6a, rotating plate 8a, etc. are omitted, and one workpiece 11 stored in the storage cassette 2 is indicated by a dashed line. Fig. 3(B) is a front view of the storage cassette 2 in an open state corresponding to Fig. 3(A).

[0047] 4 is a perspective view of the storage cassette 2 in the middle of closing the door portion 18. For example, an operator can close the door portion 18 by rotating the rotating plate 8a in a predetermined direction while gripping the handle 12 with their hands.

[0048] Instead of an operator manually closing the door section 18, the door section 18 can also be opened and closed by, for example, rotating the door section 18 and the rotating plate 8a together using a rotating body 52 (see Figure 10) fixed to a motor.

[0049] 5 is a perspective view of the storage cassette 2 in a closed state with the opening 14a closed. In the storage cassette 2 of this embodiment, the opening 14a can be closed with the door portion 18, which makes it possible to prevent dust, dirt, etc. from adhering to the workpieces 11, compared to an open-type cassette (not shown).

[0050] Furthermore, since the opening 14a of the storage cassette 2 can be opened and closed by rotating the rotating plate 8a relative to the top plate 4a and bottom plate 4b, the door portion 18 can also be opened and closed by rotating the door portion 18 and the rotating plate 8a with a rotating body 52 (see Figure 10) fixed to a motor.

[0051] Therefore, although the cleanliness level is lower than when a FOUP or SMIF pod is used, the storage cassette 2 can be opened and closed with a smaller opening and closing mechanism than a load port that opens and closes a FOUP or SMIF pod.

[0052] Next, a second embodiment will be described. The storage cassette 2 of the second embodiment is provided with a locking mechanism 30 (see FIG. 6). The locking mechanism 30 includes a catch portion 32 provided on the lower part of the outer side surface of the door portion 18 and a hook 34 provided on the lower part of the outer side surface of the side panel 14.

[0053] 6 is a diagram showing the locking mechanism 30 when disengaged (i.e., when the hook 34 is not engaged with the catch portion 32). The hook 34 is biased from the outer side surface of the side plate 14 to the inner side surface by a biasing member (not shown) such as a torsion coil spring.

[0054] When the door section 18 rotates to close the opening 14a, the hook 34 engages with the catch 32, fixing the door section 18 to the side panel 14. This prevents the door section 18 from being unintentionally opened.

[0055] Fig. 7(A) is a diagram showing the locking mechanism 30 when the door portion 18 and the side plate 14 are fixed together. Fig. 7(B) is an enlarged view of the locking mechanism 30 when the storage cassette 2 is viewed from above. Note that, when disengaging the hook 34 from the hook portion 32, the door portion 18 is rotated with a force equal to or greater than a predetermined value.

[0056] However, the locking mechanism 30 is not limited to the above example. For example, the hook 34 may be provided with a release lever (not shown) for applying a force in a direction against the biasing force of the biasing member.

[0057] When a release lever is provided, the door part 18 will not rotate even if it is rotated with a force equal to or greater than the above-mentioned predetermined value unless the release lever is pressed, so that the door part 18 can be more reliably prevented from being unintentionally opened.

[0058] Alternatively, the locking mechanism 30 may be configured with a round hole (not shown) formed in the door portion 18 and a push-lock type pin (not shown) provided on the side panel 14. The push-lock type pin is put into an extended state when pressed once, and into a retracted state when pressed again.

[0059] Next, a third embodiment will be described. The storage cassette 2 of the third embodiment is provided with a triangular prism-shaped restricting member 40, one surface 40a of which is fixed to the inner side surface of the door portion 18 (see FIG. 8(A)). FIG. 8(A) is a top view of the storage cassette 2 in an open state. However, in FIG. 8(A), the top plate 4a, bearing 6a, rotating plate 8a, etc. are omitted.

[0060] The restricting member 40 is disposed at the leading end of the circumferential direction of the door part 18 in the direction of movement when closing the door part 18. The restricting member 40 is disposed along the height direction A between the lower surface of the top plate 4a and the upper surface of the bottom plate 4b.

[0061] Moreover, one side 40b of the restricting member 40, which is positioned on the opposite side to the one surface 40a, protrudes from the inner side surface of the door portion 18 toward the rotary shaft 10 (that is, inward).

[0062] In the third embodiment, a point 20a equidistant from the three support members 20 does not coincide with the center 4c of the top plate 4a and the bottom plate 4b in the BC plane defined by the second direction B and the third direction C, each perpendicular to the height direction A, but is slightly shifted in the specified direction 20b.

[0063] The specified direction 20b is, for example, in the BC plane shown in Figure 8(A), a direction (for example, from the -10° direction to the -45° direction) from the center 4c toward the opposite direction (-90° direction) of the support member 20 located at the circumferential center of the side panel 14 and the direction (0° direction) toward the support member 20 that the door section 18 will ultimately cover when closing the door section 18.

[0064] Therefore, when the workpiece 11 is supported and held on three sides by the three support members 20, the center 11c of the surface 11a of the workpiece 11 also shifts in the predetermined direction 20b in the BC plane direction, similar to the point 20a.

[0065] When the door part 18 is positioned to close the opening part 14a, one side 40b of the regulating member 40 contacts a part of the outer periphery of all the workpieces 11 in the storage cassette 2. Fig. 8(B) is a top view of the storage cassette 2 in the closed state.

[0066] In the third embodiment, when the door portion 18 is closed, the three support members 20 and the regulating member 40 can regulate the movement of the workpiece 11 in the BC plane direction, thereby more stably holding the workpiece 11 within the storage cassette 2.

[0067] Furthermore, when the opening 14a is open, the regulating member 40 moves away from the outer periphery of the work 11, so that the regulating member 40 does not interfere with the work 11 when the work 11 is taken in or out of the storage cassette 2.

[0068] Next, a fourth embodiment will be described. In the fourth embodiment, the above-mentioned storage cassette 2 is placed in a cutting device 42. Fig. 9 is a perspective view of the cutting device 42 (processing device).

[0069] 9, some of the components of the cutting device 42 are shown in functional blocks. In the following description, the X-axis direction (processing feed direction), Y-axis direction (indexing feed direction), and Z-axis direction (height direction) are perpendicular to each other.

[0070] An operation panel 44, which functions as an input device, is provided on the front side (one side in the Y-axis direction) of the cutting device 42. In addition, a monitor 46, which functions as a display device, is provided on the side surface of the front side of the cutting device 42.

[0071] A mounting table 48 having a rectangular shape when viewed from above is provided at a corner on the front side of the cutting device 42. An elevator (not shown) that can move the mounting table 48 up and down is connected to the bottom of the mounting table 48.

[0072] A plurality of elongated holes 48a are formed radially from the center of the upper surface of the mounting table 48. The elongated holes 48a are arranged at approximately equal intervals in the radial direction of a predetermined circle, and pins 48b are arranged in the elongated holes 48a so as to protrude from the elongated holes 48a.

[0073] Each pin 48b is positioned at an equal distance from the center of the top surface of the mounting table 48, and by moving forward and backward the same distance from the center of the top surface, the storage cassette 2 placed on the top surface of the mounting table 48 is adjusted to a predetermined position in the center of the top surface.

[0074] The storage cassette 2 stores multiple (e.g., 25) workpieces 11, and a dicing tape (not shown) made of resin and having approximately the same diameter as the workpiece 11 is attached to the back surface 11b side of each workpiece 11.

[0075] The mounting table 48 is provided with an opening / closing unit 50 (see FIG. 10) for opening and closing the door portion 18 of the storage cassette 2. FIG. 10 is an enlarged view of the storage cassette 2 and the opening / closing unit 50. Note that FIG. 10 does not show the pin 48b disposed in the elongated hole 48a and the mechanism for moving the pin 48b.

[0076] The opening / closing unit 50 has a cylindrical rotating body 52 that comes into contact with the outer side surface of the door section 18 when the storage cassette 2 is placed in a predetermined position. The rotating body 52 is made of natural rubber, resin, or the like that has a relatively high slip resistance value against the door section 18.

[0077] The rotating body 52 is connected to an output shaft 56 of a rotary drive source 54 such as a motor. When the rotating body 52 is in contact with the outer side surface of the door section 18, the door section 18 can be opened by rotating the rotating body 52 in a predetermined direction, and the door section 18 can be closed by rotating the rotating body 52 in the opposite direction to the predetermined direction.

[0078] 9, other components of the cutting device 42 will now be described. A push-pull arm 58 that can access the storage cassette 2 is provided behind the mounting table 48 (on the other side in the Y-axis direction). A pair of guide rails 60 that adjust the position of the workpiece 11 in the X-axis direction is provided on both sides of the movement path of the push-pull arm 58.

[0079] A first transport unit 62 that can access the pair of guide rails 60 is provided near the pair of guide rails 60. The first transport unit 62 transports the workpiece 11 from the pair of guide rails 60 to a disk-shaped chuck table 64 that is arranged in the loading / unloading area D1.

[0080] The chuck table 64 has a metal disk-shaped frame and a disk-shaped porous plate placed in the center of the frame. Negative pressure is transmitted to the porous plate from a suction source (not shown) such as an ejector. The upper surface of the porous plate and the upper surface of the frame are substantially flush with each other, forming a holding surface 64a that holds the workpiece 11 by suction.

[0081] A plurality of clamp units 64b are provided on the outer periphery of the chuck table 64. When the workpieces 11 are accommodated in the accommodation cassette 2, the clamp units 64b are not used.

[0082] However, when work units 23 and 33 (see FIGS. 12A and 12B) described later are held by suction on the chuck table 64, the ring frame 27 is clamped by a plurality of clamp units 64b.

[0083] A rotation drive source (not shown), such as a motor, that rotates the chuck table 64 around a predetermined rotation axis is connected below the chuck table 64. A ball screw type X-axis direction movement mechanism (not shown) is provided below the rotation drive source.

[0084] The X-axis direction movement mechanism moves the chuck table 64 between the carry-in / carry-out area D1 and the cutting area D2. Furthermore, the X-axis direction movement mechanism feeds the chuck table 64 for processing in the cutting area D2 at a predetermined processing feed rate.

[0085] A microscope camera unit 66 is provided above the movement path of the chuck table 64 so as to face the holding surface 64a. The microscope camera unit 66 includes a predetermined optical system and an imaging element such as a CCD image sensor or a CMOS image sensor.

[0086] Above the cutting region D2, there is provided a cutting unit (processing unit) 68. The cutting unit 68 has a cylindrical spindle housing 70 whose longitudinal direction is arranged along the Y-axis direction.

[0087] A portion of a cylindrical spindle (not shown) is rotatably housed in the spindle housing 70. A rotary drive source (not shown), such as a motor, is provided at the base end of the spindle, and a cutting blade 72 having an annular cutting edge is attached to the tip end of the spindle.

[0088] A ball screw type cutting feed mechanism (not shown) that moves the cutting unit 68 along the Z-axis direction is connected to the spindle housing 70. The cutting feed mechanism is moved along the Y-axis direction together with the cutting unit 68 by a ball screw type indexing feed mechanism (not shown).

[0089] When cutting the workpiece 11, first, alignment is performed using the microscope camera unit 66, a rotary drive source, etc., and one of the planned dividing lines 13 of the workpiece 11, whose back surface 11b side is suction-held by the holding surface 64a, is made approximately parallel to the X-axis direction.

[0090] Then, the lower end of the rotating cutting blade 72 is positioned at a height corresponding to a predetermined depth that does not reach the back surface 11b. Thereafter, the chuck table 64 is fed for processing while cutting water such as pure water is supplied to the contact point between the cutting blade 72 and the workpiece 11. As a result, the workpiece 11 is cut (processed) along one of the planned dividing lines 13.

[0091] A second transport unit 74 and a spinner cleaning unit 76 are provided behind the load-in / load-out area D1. After cutting the workpiece 11, the second transport unit 74 accesses the chuck table 64 arranged in the load-in / load-out area D1 and transports the workpiece 11 from the chuck table 64 in the load-in / load-out area D1 to the spinner table of the spinner cleaning unit 76.

[0092] After being spin-cleaned and spin-dried in the spinner cleaning unit 76, the workpiece 11 is transported to the pair of guide rails 60 by the first transport unit 62, and then carried into the storage cassette 2 by the push-pull arm 58 or the like.

[0093] Each component of the cutting device 42 is controlled by a control unit 78. The control unit 78 in this embodiment is configured by a computer. The control unit 78 includes a processor (processing device) represented by a CPU (Central Processing Unit), a main memory device, and an auxiliary memory device.

[0094] The primary storage device includes a dynamic random access memory (DRAM), a static random access memory (SRAM), a read-only memory (ROM), etc. The secondary storage device includes a flash memory, a hard disk drive, a solid-state drive, etc.

[0095] The auxiliary storage device stores software including a predetermined program. The functions of the control unit 78 are realized by operating the processing device and the like in accordance with this software.

[0096] After cutting, cleaning, and drying of a predetermined number of workpieces 11 have been completed, the worker may remove one workpiece 11 from the storage cassette 2 and inspect it under a microscope (not shown) to check whether the cutting has been performed properly.

[0097] In this case, the operator sends a predetermined command to the control unit 78 via the operation panel 44. When the control unit 78 receives the predetermined command, it first temporarily stops the loading and unloading of the workpieces 11 between the push-pull arm 58 and the storage cassette 2.

[0098] Next, the rotor 52 is rotated to close the door portion 18. At this time, it is preferable to fix the door portion 18 and the side panel 14 with the locking mechanism 30. Thereafter, the shutter 48c provided on the mounting table 48 is moved away from directly below the fixing member 24.

[0099] If the fixing member 24 is a male thread, the fixing member 24 is rotated using the fixing member rotation mechanism 80 (see FIG. 11(A)) and pulled out below the bottom plate 4b. At this time, the upper end of the fixing member 24 may be positioned at the same height as the through-hole in the rotary table 8b. This reduces the risk of losing the fixing member 24.

[0100] Then, the rotating body 52 in contact with the door portion 18 or the side plate 14 is rotated. As a result, the door portion 18, rotating plate 8a, top plate 4a, side plate 14, and bottom plate 4b rotate together relative to the rotary table 8b, and the orientation of the opening 14a can be changed to the front side of the cutting device 42. Figure 11(A) is an enlarged view of the storage cassette 2 and the opening / closing unit 50 when the orientation is changed.

[0101] The control unit 78 changes the orientation of the storage cassette 2 so that the opening 14a faces forward of the cutting device 42, and then inserts the fixing member 24 again. Next, when the rotating body 52 is rotated, the rotating plate 8a rotates relative to the bottom plate 4b and the rotating table 8b, and the door portion 18 opens.

[0102] This allows the worker to put his / her hand into the opening 14a, take out the cut workpiece 11, and perform inspection. Fig. 11(B) is an enlarged view of the storage cassette 2 and the opening / closing unit 50 during inspection.

[0103] As mentioned above, the range of rotation of the door section 18 and the rotating plate 8a relative to the top plate 4a is limited, and when the door section 18 is in the open position (see Figure 1), the door section 18 and the rotating plate 8a cannot rotate any further relative to the top plate 4a in a specified direction.

[0104] In this case, if the door 18 and the rotary plate 8a are further rotated in a predetermined direction while the opening 14a is left open, the door 18, the rotary plate 8a, the top plate 4a, the side plates 14, and the bottom plate 4b rotate together relative to the rotary table 8b. In this way, the orientation of the opening 14a may be changed to the front side of the cutting device 42.

[0105] Next, various modified examples of the workpiece 11 will be described. Fig. 12(A) is a perspective view of a workpiece unit 23 having a disk-shaped workpiece (second workpiece) 21. Like the workpiece 11, the workpiece 21 has a front surface 21a and a back surface 21b. Like the workpiece 11, a device 15 may be formed on the front surface 21a side.

[0106] A dicing tape 25 having a diameter larger than that of the workpiece 21 is attached to the rear surface 21b of the workpiece 21. One surface of a metal ring frame 27 is attached to the outer periphery of the dicing tape 25.

[0107] This forms a work unit 23 in which the work 21 is supported by the ring frame 27 via the dicing tape 25. The work unit 23, like the work 11, is carried into the storage body 16 through the opening 14a, and its outer periphery (i.e., the ring frame 27) is supported by the multiple support shelves 22.

[0108] Furthermore, when the storage cassette 2 has the regulating member 40 as in the third embodiment, the regulating member 40 comes into contact with the outer periphery of the work unit 23 (i.e., the ring frame 27), thereby regulating the movement of the work unit 23 in the BC plane direction.

[0109] Incidentally, instead of the disk-shaped workpiece 21, a rectangular workpiece (second workpiece) 31 may be supported on the ring frame 27 via a dicing tape 25. Fig. 12(B) is a perspective view of a workpiece unit 33 having a rectangular workpiece 31.

[0110] The workpiece 31 is, for example, a resin package substrate in which multiple device chips (not shown) are sealed. A grid-like multiple planned division lines (not shown) are set on the front surface 31a of the workpiece 31, and a dicing tape 25 is attached to the back surface 31b.

[0111] Like the work unit 23, the work unit 33 is also stored in the storage cassette 2. The structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. For example, the number of support members 20 is not limited to three, and may be two, four, or more.

[0112] Furthermore, the storage cassette 2 may be placed on a table 48 provided in a laser processing device, a grinding device, or a polishing device (none of which are shown) instead of the cutting device 42. In addition to the table 48, the laser processing device has a disk-shaped chuck table (not shown).

[0113] The laser processing device has a laser beam irradiation unit (processing unit) (not shown) for irradiating a pulsed laser beam substantially perpendicularly onto the holding surface of the chuck table. The laser beam irradiation unit includes a laser oscillator, a predetermined optical system, a condenser lens, etc.

[0114] The grinding device has a disk-shaped chuck table (not shown) in addition to the mounting table 48. A grinding unit (processing unit) (not shown) is arranged above the chuck table. The grinding unit has a cylindrical spindle (not shown). The spindle is arranged, for example, approximately parallel to the Z-axis direction (vertical direction).

[0115] A rotary drive source (not shown), such as a motor, is provided at the upper end of the spindle, and a disk-shaped mount is fixed to the lower end of the spindle. An annular grinding wheel is attached to the underside of the mount.

[0116] The polishing apparatus has a disk-shaped chuck table (not shown) in addition to the mounting table 48. A polishing unit (processing unit) (not shown) is arranged above the chuck table. The polishing unit has a cylindrical spindle (not shown). The spindle is arranged, for example, approximately parallel to the Z-axis direction (vertical direction).

[0117] A rotary drive source (not shown), such as a motor, is provided at the upper end of the spindle, and a disk-shaped mount is fixed to the lower end of the spindle, with a disk-shaped polishing pad attached to the underside of the mount. [Explanation of symbols]

[0118] 2: storage cassette, 4a: top plate, 4b: bottom plate, 4c: center, 6a, 6b: bearings 8a: Rotating plate, 8b: Rotating table, 10: Rotating shaft, 12: Handle 11: Workpiece (first workpiece), 11a: Front surface, 11b: Back surface, 11c: Center 13: Planned division line, 15: Device 14: Side panel, 14a: Opening, 16: Storage body, 18: Door 20: Support member, 20a: Point, 20b: Predetermined direction, 22: Support shelf, 22a: Distance 21: Work (second work), 21a: Front surface, 21b: Back surface 23: Work unit, 25: Dicing tape, 27: Ring frame 24: fixing member, 30: locking mechanism, 32: hook portion, 34: hook 31: workpiece (second workpiece), 31a: front surface, 31b: back surface, 33: workpiece unit 40: Regulating member, 40a: one surface, 40b: one side 42: Cutting device, 44: Operation panel, 46: Monitor 48: Placement table, 48a: Slot, 48b: Pin, 48c: Shutter 50: Opening and closing unit, 52: Rotating body, 54: Rotation drive source, 56: Output shaft 58: Push-pull arm, 60: Guide rail, 62: First transport unit 64: chuck table, 64a: holding surface, 64b: clamp unit 66: Microscope camera unit, 68: Cutting unit (processing unit) 70: Spindle housing, 72: Cutting blade 74: second transfer unit, 76: spinner cleaning unit, 78: control unit 80: Fixed member rotation mechanism A: Height direction, B: Second direction, C: Third direction, D1: Loading / unloading area, D2: Cutting area

Claims

1. A storage cassette that stores a work unit in which a disk-shaped first work or a disk-shaped or rectangular second work is supported on a ring frame via a tape, an accommodation body having a disk-shaped top plate and bottom plate, and side plates that include an opening between the top plate and the bottom plate to allow the first work or the work unit to be inserted and removed, and that are positioned between at least a part of the outer periphery of the top plate and a part of the outer periphery of the bottom plate, with upper ends of the side plates fixed to the top plate and lower ends of the side plates fixed to the bottom plate; at least two support members each having a support shelf that is provided in a manner that protrudes inward from the outer periphery of the top plate and the bottom plate and that can support the outer periphery of the first work or the work unit in a first direction proceeding from the bottom plate to the top plate, and each provided along the first direction on the inside of the outer periphery of the top plate and the bottom plate; a door portion that opens and closes the opening; a disk-shaped rotating plate that is disposed on the top plate so as to be rotatable about a rotation axis that is parallel to the first direction, and has an upper end of the door portion fixed to an outer periphery thereof; a rotary table provided on the opposite side of the bottom plate from the top plate and rotatably supporting the bottom plate; Equipped with the rotating plate is supported by the top plate via a bearing provided on the top surface of the top plate; the bottom plate is supported by the rotary table via a bearing provided on the underside of the bottom plate; The opening is opened and closed by the rotation of the rotary plate about the rotation axis relative to the top plate.

2. 2. The storage cassette according to claim 1, further comprising a locking mechanism that fixes the door and the side plate when the door is rotated to close the opening.

3. A storage cassette as described in claim 1 or 2, characterized in that it further comprises a regulating member provided on the inner side of the door portion along the first direction, and when the door portion is positioned in a position that closes the opening, it contacts the outer periphery of the first work or work unit supported by the at least two support members in a planar direction perpendicular to the first direction, thereby regulating movement of the first work or work unit in the planar direction.

4. The centers of the top plate and the bottom plate, which are arranged concentrically, are offset in a predetermined direction from a point equidistant from the at least two support members, and the regulating member is arranged at the front side in the movement direction when the door section is closed, When the door portion closes the opening, the at least two support members and the regulating member regulate movement of the first workpiece or the work unit, 4. The storage cassette according to claim 3, wherein when the opening is opened, the regulating member moves away from the outer periphery of the first work or the work unit.

5. a chuck table that suction-holds a work unit in which a disk-shaped first workpiece or a disk-shaped or rectangular second workpiece is supported on a ring frame via a tape; a processing unit that processes the first workpiece or the work unit that is suction-held by the chuck table, a mounting table on which the storage cassette is placed; an opening / closing unit having a rotary drive source provided on the mounting table and a rotating body rotated by the rotary drive source, the opening / closing unit opening and closing the storage cassette by the rotating body; Equipped with The storage cassette comprises: an accommodation body having a disk-shaped top plate and bottom plate, and side plates that include an opening between the top plate and the bottom plate to allow the first work or the work unit to be inserted and removed, and that are positioned between at least a part of the outer periphery of the top plate and a part of the outer periphery of the bottom plate, with upper ends of the side plates fixed to the top plate and lower ends of the side plates fixed to the bottom plate; at least two support members each having a support shelf that is provided in a manner that protrudes inward from the outer periphery of the top plate and the bottom plate and that can support the outer periphery of the first work or the work unit in a first direction proceeding from the bottom plate to the top plate, and each provided along the first direction on the inside of the outer periphery of the top plate and the bottom plate; a door portion that opens and closes the opening; a disk-shaped rotating plate that is disposed on the top plate so as to be rotatable about a rotation axis that is parallel to the first direction, and has an upper end of the door portion fixed to an outer periphery thereof; a rotary table provided on the opposite side of the bottom plate from the top plate and rotatably supporting the bottom plate; and the rotating plate is supported by the top plate via a bearing provided on the top surface of the top plate; the bottom plate is supported by the rotary table via a bearing provided on the underside of the bottom plate; The opening / closing unit is a processing device characterized in that it opens and closes the door portion by rotating the rotating body while the rotating body is in contact with the outer side surface of the door portion of the storage cassette whose bottom plate is placed on the mounting table.

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