High Temperature Bipolar Electrostatic Chuck

Abstract

An exemplary support assembly may include an electrostatic chuck body defining a substrate support surface. The substrate support assembly may include a support stem coupled to the electrostatic chuck body. The substrate support assembly may include a heater embedded within the electrostatic chuck body. The substrate support assembly may include a first bipolar electrode embedded within the electrostatic chuck body between the heater and the substrate support surface. The first bipolar electrode may include at least two separated mesh sections, each mesh section characterized by a circular sector shape. The substrate support assembly may include a second bipolar electrode embedded within the electrostatic chuck body between the heater and the substrate support surface. The second bipolar electrode may include a continuous mesh extending through the at least two separated mesh sections of the first bipolar electrode.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of and priority to U.S. patent application Ser. No. 17 / 076,649, filed Oct. 21, 2020, entitled "HIGH TEMPERATURE BIPOLAR ELECTROSTATIC CHUCK," the entire contents of which are incorporated herein by reference.

[0002] Technical Field

[0002] The present technology relates to components and apparatus for semiconductor manufacturing. More particularly, the present technology relates to substrate support assemblies and other semiconductor processing equipment. [Background technology]

[0003]

[0003] Integrated circuits are realized through processes that create intricately patterned layers of material on a substrate surface. Fabricating patterned materials on a substrate requires controlled methods for forming and removing material. The temperatures at which these processes occur can directly affect the final product. The temperature of the substrate is often controlled and maintained by an assembly that supports the substrate during processing. Internally located heating devices generate heat within the support, which may be conductively transferred to the substrate. The substrate support may also be utilized in some techniques to generate a substrate-level plasma and electrostatically chuck the substrate to the support. Plasma generated near the substrate can cause component impingement and the formation of a parasitic plasma in undesirable areas of the chamber. This condition can also lead to discharges between the substrate support electrodes. Furthermore, utilizing a pedestal for both heat generation and plasma generation can result in interference effects.

[0004]

[0004] Because various operating processes may utilize elevated temperatures, as well as plasma formation at the substrate level, the construction materials of the substrate support may be exposed to temperatures that affect the electrical operation of the assembly. Therefore, there is a need for improved systems and methods that can be used to fabricate high quality devices and structures. The above needs and others are addressed by the present technology. Summary of the Invention

[0005] An exemplary support assembly may include an electrostatic chuck body defining a substrate support surface. The substrate support assembly may include a support stem coupled to the electrostatic chuck body. The substrate support assembly may include a heater embedded within the electrostatic chuck body. The substrate support assembly may include a first bipolar electrode embedded within the electrostatic chuck body between the heater and the substrate support surface. The first bipolar electrode may include at least two separated mesh sections, each mesh section characterized by a circular sector shape. The substrate support assembly may include a second bipolar electrode embedded within the electrostatic chuck body between the heater and the substrate support surface. The second bipolar electrode may include a continuous mesh extending through the at least two separated mesh sections of the first bipolar electrode.

[0006] In some embodiments, the second bipolar electrode can be or include two mesh sections connected by a bridge between at least two separated mesh sections of the first bipolar electrode. The two mesh sections of the second bipolar electrode can be characterized by a circular sector shape. The assembly can include an RF power source or a variable capacitor coupled to both the first bipolar electrode and the second bipolar electrode. The at least two separated mesh sections of the first bipolar electrode can include four mesh sections separated from each other by gaps. The second bipolar electrode can include an annular mesh extending around the four mesh sections of the first bipolar electrode. The annular mesh can include a bridge extending through the gap between the separated mesh sections of the first bipolar electrode. The assembly can include a first RF power source or a variable capacitor coupled to the first bipolar electrode. The assembly can include a second RF power source or a variable capacitor coupled to the second bipolar electrode. The assembly may include a first DC power supply coupled to the first bipolar electrode. The assembly may include a second DC power supply coupled to the second bipolar electrode. The assembly may include a third electrode positioned radially outward from and extending around the first and second bipolar electrodes. The assembly may include a third RF power supply or a variable capacitor coupled to the third electrode. Multiple leads may extend within the electrostatic chuck body to couple the third electrode to the third RF power supply or the variable capacitor. The electrostatic chuck body may be or include a ceramic material. The ceramic material may be or include aluminum nitride.

[0007] Some embodiments of the present technology may include a substrate support assembly. The assembly may include an electrostatic chuck body defining a substrate support surface. The assembly may include a support stem coupled to the electrostatic chuck body. The assembly may include a first bipolar electrode embedded within the electrostatic chuck body below the substrate support surface. The first bipolar electrode may include at least two mesh sections separated by a gap. The assembly may include a second bipolar electrode embedded within the electrostatic chuck body below the substrate support surface. The second bipolar electrode may extend through the gap between the at least two mesh sections of the first bipolar electrode.

[0008] In some embodiments, each mesh section of the first bipolar electrode may be characterized by a circular sector shape. The second bipolar electrode may include an annular mesh extending around at least two mesh sections of the first bipolar electrode. The annular mesh may include a bridge extending through a gap between at least two mesh sections of the first bipolar electrode. The assembly may include a first RF power source or a variable capacitor coupled to the first bipolar electrode. The assembly may include a second RF power source or a variable capacitor coupled to the second bipolar electrode. The assembly may include a third electrode positioned radially outward from and extending around the first and second bipolar electrodes. The assembly may include a third RF power source or a variable capacitor coupled to the third electrode. The assembly may include a first DC power source coupled to the first bipolar electrode. The assembly may include a second DC power supply coupled to the second bipolar electrode.

[0009] Some embodiments of the present technology may include a substrate support assembly. The assembly may include an electrostatic chuck body defining a substrate support surface. The assembly may include a support stem coupled to the electrostatic chuck body. The assembly may include a first bipolar electrode embedded within the electrostatic chuck body below the substrate support surface. The first bipolar electrode may include at least two mesh sections separated by a gap. The assembly may include a second bipolar electrode embedded within the electrostatic chuck below the substrate support surface. The assembly may include a third electrode positioned radially outward from and extending around the first and second bipolar electrodes.

[0010] Such technology may offer numerous advantages over conventional systems and techniques. For example, embodiments of the technology may provide a substrate support that may allow radial adjustment during plasma processing and remain sustainable during high temperature operation. Furthermore, the substrate support may maintain a bipolar chuck while supporting RF modulation. These and other embodiments, along with their many advantages and features, are described in more detail in the description and accompanying drawings discussed below.

[0011] A further understanding of the nature and advantages of the disclosed technology may be obtained by reference to the remainder of this specification and the drawings. [Brief explanation of the drawings]

[0012] [Figure 1] 1 illustrates a top view of an exemplary processing system in accordance with some embodiments of the present technique. [Figure 2]

[0013] 1 shows a schematic cross-sectional view of an exemplary plasma system in accordance with some embodiments of the techniques of the present technology; [Figure 3]

[0014] 1 shows a schematic partial cross-sectional view of an exemplary substrate support assembly, in accordance with some embodiments of the present technique; [Figure 4A]

[0015] 1A-1C show schematic top views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; [Figure 4B]

[0016] 1A-1C show schematic partial cross-sectional views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; [Figure 4C]

[0017] 1A-1C show schematic partial cross-sectional views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; [Figure 5A]

[0018] 1A-1C show schematic top views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; [Figure 5B]

[0019] 1A-1C show schematic partial cross-sectional views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; [Figure 6A]

[0020] 1A-1C show schematic top views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; [Figure 6B]

[0021] 1A-1C show schematic partial cross-sectional views of electrode arrangements for exemplary substrate support assemblies, in accordance with some embodiments of the present technique; DETAILED DESCRIPTION OF THE INVENTION

[0013]

[0022] Some figures are included as schematics. It is understood that the figures are for illustrative purposes and should not be considered to scale unless expressly stated to be to scale. Furthermore, as schematics, the drawings are provided to aid in understanding and may not include all aspects or information compared to realistic depictions and may include exaggerated material for illustrative purposes.

[0014]

[0023] In the accompanying drawings, similar components and / or features may have the same reference numerals. Furthermore, various components of the same type may be distinguished according to the reference numeral, with a letter distinguishing between the similar components. When only a first reference numeral is used herein, the description is applicable to any one of the similar components having the same first reference numeral, regardless of the letter.

[0015]

[0024] Plasma-enhanced deposition processes can energize one or more constituent precursors to promote film formation on a substrate. Such formed films can be produced under conditions that impose stress on the substrate. Electrostatic chucks can be used to provide a clamping action on the substrate to overcome deflection stresses. However, as semiconductor processing becomes increasingly sophisticated and miniaturized, chucks can contribute to processing issues. Furthermore, many of these films are developed at relatively high temperatures, which further impact chamber components. For example, some deposition operations may be performed at temperatures exceeding 500°C, which can affect the resistivity of chamber components, such as the electrostatic chuck material. A decrease in material resistivity can increase leakage currents and lead to electrical arcing, potentially damaging the substrate and chamber components.

[0016]

[0025] Many conventional techniques use monopolar or semicircular electrode bipolar electrostatic chucks, which can cause many of these processing problems. While chucks can provide a chucking force to stabilize a substrate during processing, they can have other limitations that can contribute to processing problems. For example, monopolar chucks can cause substrate movement, which can affect process uniformity by displacing the chuck from its central position within the processing chamber. Monopolar chucks utilize plasma generated during processing to generate an electrostatic force on the substrate. When a substrate is seated on a support and the monopolar chuck is initially engaged, the wafer may be electrically floating relative to the DC power supply of the chuck electrode because the puck body may be insulating. When plasma is generated, the plasma may ground the substrate, effectively completing a circuit and generating an electrostatic force between the substrate and the chuck body. However, this initial movement can cause substrate movement, which can affect processing uniformity.

[0017]

[0026] A conventional bipolar chuck may include two semicircular electrodes, which overcome the problems of a monopolar chuck by coupling one electrode with positive power and one with negative power. The substrate may still be characterized by a net neutral charge, but the substrate may be clamped to the substrate support. However, as processing temperatures increase, leakage through the chuck body may increase, increasing the likelihood of a DC discharge occurring between the two electrodes. A further problem with both chucks is that they may offer limited additional functionality in terms of plasma regulation.

[0018]

[0027] The present technology overcomes these challenges with a substrate support assembly that combines bipolar chuck functionality with plasma-driven radial tuning. Radial non-uniformities on a substrate can be caused by many issues with the flow through the chamber. Some chamber components can be modified to address certain uniformity issues, but once implemented, the exact fit may be limited. By providing radial RF tuning with the electrodes of the electrostatic chuck, the present technology can enable high modulation in the center and high modulation at the edges of plasma growth in the processing region. Furthermore, by adjusting the power supplied or drawn by these electrodes, the degree of tuning can be tailored to any particular process exhibiting non-uniformities.

[0019]

[0028] While the remainder of the disclosure routinely identifies particular deposition processes utilizing the disclosed technology, it will be readily understood that the systems and methods are equally applicable to other deposition, etch, and cleaning chambers and processes that may occur in the described chambers. Thus, the present technology should not be considered limited to use with these specific deposition processes or chambers alone. This disclosure describes one possible system and chamber that may include a pedestal according to embodiments of the present technology, before describing additional modifications and adjustments to this system according to embodiments of the present technology.

[0020]

[0029] 1 illustrates a top view of one embodiment of a processing system 100 with deposition, etch, bake, and cure chambers, according to an embodiment. In the figure, a pair of front-opening unified pods 102 deliver substrates of various sizes that are received by a robotic arm 104 and placed in a low-pressure holding area 106 before being placed in one of the substrate processing chambers 108a-108f positioned in tandem sections 109a-109c. A second robotic arm 110 may be used to transfer substrate wafers from the holding area 106 to and from the substrate processing chambers 108a-108f. Each substrate processing chamber 108a-f may be equipped to perform many substrate processing operations, including plasma-enhanced chemical vapor deposition, atomic layer deposition, physical vapor deposition, etching, pre-cleaning, degassing, orientation, and the formation of stacks of semiconductor materials as described herein, in addition to other substrate processes including annealing, ashing, and the like.

[0021]

[0030] The substrate processing chambers 108a-f may include one or more system components for depositing, annealing, curing, and / or etching a dielectric or other film on a substrate. In one configuration, two pairs of processing chambers (e.g., 108c-d and 108e-f) may be used to deposit a dielectric material on a substrate, and a third pair of processing chambers (e.g., 108a-b) may be used to etch the deposited dielectric. In another configuration, all three pairs of chambers, e.g., 108a-108f, may be configured to deposit a stack of alternating dielectric films on a substrate. Any one or more of the described processes may be performed in chambers separate from the fabrication system shown in different embodiments. It will be understood that additional configurations of deposition, etching, annealing, and curing chambers for dielectric films are contemplated by system 100.

[0022]

[0031] 2 shows a schematic cross-sectional view of an exemplary plasma system 200 in accordance with some embodiments of the present technique. The plasma system 200 may illustrate a pair of processing chambers 108, which may be equipped in one or more of the tandem sections 109 discussed above and may include a substrate support assembly in accordance with embodiments of the present technique. The plasma system 200 may generally include a chamber body 202 having a sidewall 212, a bottom wall 216, and an interior sidewall 201 that define a pair of processing regions 220A and 220B. Each of the processing regions 220A-220B may be similarly configured and may include identical components.

[0023]

[0032] For example, processing region 220B (components of which may also be included in processing region 220A) may include a pedestal 228 disposed within the processing region through a passage 222 formed in the bottom wall 216 of the plasma system 200. The pedestal 228 may provide a heater adapted to support a substrate 229 on an exposed surface of the pedestal, such as a body portion. The pedestal 228 may include a heating element 232, e.g., a resistive heating element, that may heat and control the substrate temperature at a desired processing temperature. The pedestal 228 may also be heated by a remote heating element, such as a lamp assembly, or any other heating device.

[0024]

[0033] The body of the pedestal 228 may be coupled to the stem 226 by a flange 233. The stem 226 may electrically couple the pedestal 228 to a power output or power box 203. The power box 203 may include a driver system that controls the elevation and movement of the pedestal 228 within the processing region 220B. The stem 226 may also include a power interface for supplying power to the pedestal 228. The power box 203 may also include an interface for a power meter and a thermometer, such as a thermocouple interface. The stem 226 also includes a base assembly 238 adapted to removably couple to the power box 203. A circumferential ring 235 is shown above the power box 203. In some embodiments, the circumferential ring 235 may be a shoulder adapted as a mechanical stop or land configured to provide a mechanical interface between the base assembly 238 and the top surface of the power box 203.

[0025]

[0034] A rod 230 may be included through a passage 224 formed in the bottom wall 216 of the processing region 220B. The rod 230 may be utilized to position substrate lift pins 261 disposed through the body of the pedestal 228. The substrate lift pins 261 may selectively position the substrate 229 at a distance from the pedestal to facilitate exchange of the substrate 229 by a robot utilized to transfer substrates into and out of the processing region 220B through the substrate transfer port 260.

[0026]

[0035] The chamber lid 204 may be coupled to the top of the chamber body 202. The lid 204 may house one or more precursor delivery systems 208 coupled thereto. The precursor delivery system 208 may include a precursor inlet passage 240 that may deliver reactant and cleaning precursors into the processing region 220B through a dual channel showerhead 218. The dual channel showerhead 218 may include an annular base plate 248 having a shield plate 244 disposed intermediate a faceplate 246. A radio frequency (“RF”) source 265 may be coupled to the dual channel showerhead 218. The RF source 265 may power the dual channel showerhead 218 to facilitate plasma generation between the faceplate 246 and the pedestal 228 of the dual channel showerhead 218. In some embodiments, the RF source may be coupled to other portions of the chamber body 202, such as the pedestal 228, to facilitate plasma generation. A dielectric isolator 258 may be disposed between the lid 204 and the dual channel showerhead 218 to prevent conduction of RF power to the lid 204. A shadow ring 206 may be disposed on the outer edge of the pedestal 228, and the shadow ring 206 engages with the pedestal 228.

[0027]

[0036] Optional cooling channels 247 may be formed in the annular base plate 248 of the gas distribution system 208 to cool the annular base plate 248 during operation. A heat transfer fluid, such as water, ethylene glycol, gas, or the like, may be circulated through the cooling channels 247 so that the base plate 248 may be maintained at a predetermined temperature. A liner assembly 227 may be positioned in the processing region 220B in close proximity to the sidewalls 201, 212 of the chamber body 202 to prevent exposure of the sidewalls 201, 212 to the processing environment in the processing region 220B. The liner assembly 227 may include a circumferential pumping cavity 225 that may be coupled to a pumping system 264 configured to exhaust gases and byproducts from the processing region 220B and to control the pressure within the processing region 220B. A plurality of exhaust ports 231 may be formed in the liner assembly 227. The exhaust outlet 231 can be configured to allow gas flow from the processing region 220B to the circumferential pumping cavity 225 to facilitate processing within the system 200.

[0028]

[0037] 3 illustrates a schematic partial cross-sectional view of an exemplary semiconductor processing chamber 300 in accordance with some embodiments of the present technique. FIG. 3 may include one or more components discussed above in connection with FIG. 2 and may provide additional details regarding the chamber. Chamber 300 may be used to perform semiconductor processing operations, including the deposition of stacks of dielectric materials described above. Chamber 300 may illustrate a partial view of a processing region of a semiconductor processing system and may not include all of the components, such as the additional lid stack components described above, that are understood to be incorporated in certain embodiments of chamber 300.

[0029]

[0038] Thus, FIG. 3 may depict a portion of a processing chamber 300. The chamber 300 may include a substrate support assembly 310 along with a showerhead 305. The showerhead 305 and the substrate support 310, along with a chamber sidewall 315, may define a substrate processing region 320 within which a plasma may be generated. The substrate support assembly may include an electrostatic chuck body 325. The electrostatic chuck body 325 may include one or more components embedded or disposed within the body. Components embedded within the upper puck may not be exposed to processing materials in some embodiments and may be retained entirely within the chuck body 325. The electrostatic chuck body 325 may define a substrate support surface 327 and may be characterized by a thickness and length or diameter depending on the particular shape of the chuck body. In some embodiments, the chuck body may be elliptical and may be characterized by one or more radial dimensions from a central axis passing through the chuck body. It should be understood that the upper puck may be of any shape and, when discussing radial dimensions, may define any length from the center location of the chuck body.

[0030]

[0039] The electrostatic chuck body 325 may be coupled to a stem 330. The stem 330 may support the chuck body and may include channels for transmitting and receiving electrical and / or fluid lines that may be coupled to internal components of the chuck body 325. While the chuck body 325 may include associated channels or components for operating as an electrostatic chuck, in some embodiments, the assembly may operate as or include components for a vacuum chuck or any other type of chuck system. The stem 330 may be coupled to the chuck body on a second surface of the chuck body opposite the substrate support surface. The electrostatic chuck body 325 may include a first bipolar electrode 335a, which may be embedded within the chuck body proximate the substrate support surface. The electrode 335a may be electrically coupled to a DC power supply 340a. The power supply 340a may be configured to provide energy or voltage to the conductive chuck electrode 335a. It may be operated to form a plasma of a precursor within the processing region 320 of the semiconductor processing chamber 300, although other plasma operations may be sustained as well. For example, the electrode 335a may be a chuck mesh that acts as an electrical ground for a capacitive plasma system that includes an RF source 307 electrically coupled to the showerhead 305. For example, the electrode 335a may act as a ground path for RF power from the RF source 307 and simultaneously act as an electrical bias to the substrate to provide electrostatic clamping of the substrate to the substrate support surface. The power supply 340a may include a filter, a power source, and several other electrical components configured to provide a chucking voltage.

[0031]

[0040] The electrostatic chuck body may include a second bipolar electrode 335b, which may also be embedded within the chuck body proximate the substrate support surface. The electrode 335b may be electrically coupled to a DC power supply 340b. The power supply 340b may be configured to provide energy or voltage to the conductive chuck electrode 335b. Further details regarding electrical components and bipolar chucks according to some embodiments are described further below, any of which designs may be implemented in the processing chamber 300. For example, additional plasma-related power sources or components may be incorporated, as described further below.

[0032]

[0041] During operation, a substrate may at least partially contact the substrate support surface of the electrostatic chuck body, creating a contact gap that essentially creates a capacitive effect between the surface of the pedestal and the substrate. A voltage can be applied to the contact gap to generate an electrostatic force for the chuck. Power supplies 340a and 340b can provide electrical charge. The charge can migrate and accumulate from the electrodes to the substrate support surface, creating a charge layer with Coulombic attraction with the opposite charge on the substrate and electrostatically holding the substrate against the substrate support surface of the chuck body. This charge transfer can occur due to current flow through the dielectric material of the chuck body, based on the finite resistance in the dielectric for Johnsen-Rahbek type chucks that may be used in some embodiments of the present technology.

[0033]

[0042] The chuck body 325 may also define a recessed region 345 in the substrate support surface, which may provide a recessed pocket in which a substrate may be placed. The recessed region 345 may be formed in an interior region of the upper puck and may be configured to receive a substrate for processing. The recessed region 345 encompasses a central region of the electrostatic chuck body as shown and may be sized to accommodate any of a variety of substrate sizes. The substrate may seat within the recessed region and may be contained by an outer region 347 that may contain the substrate. In some embodiments, the height of the outer region 347 may be recessed such that the substrate is level with or below the surface height of the substrate support surface at the outer region 347. The concave surface may control edge effects during processing and, in some embodiments, improve deposition uniformity across the substrate. In some embodiments, an edge ring may be disposed around the periphery of the upper puck to at least partially define a recess in which the substrate may seat. In some embodiments, the surface of the chuck body may be substantially flat, and the edge ring may completely define the recess in which the substrate may seat.

[0034]

[0043] In some embodiments, the electrostatic chuck body 325 and / or stem 330 may be made of an insulating or dielectric material. For example, oxides, nitrides, carbides, and other materials may be used to form the components. Exemplary materials may include ceramics including aluminum oxide, aluminum nitride, silicon carbide, tungsten carbide, and oxides, nitrides, carbides, borides, or titanates of other metals or transition metals, as well as combinations of these materials with other insulating or dielectric materials. Different grades of ceramic materials may be used to provide a composite material configured to operate over a specific temperature range; therefore, in some embodiments, different ceramic grades of the same material may be used for the upper puck and stem. In some embodiments, dopants may be incorporated to tailor electrical properties. Exemplary dopant materials may include yttrium, magnesium, silicon, iron, calcium, chromium, sodium, nickel, copper, zinc, or any number of other elements known to be incorporated into ceramic or dielectric materials.

[0035]

[0044] The electrostatic chuck body 325 may also include an embedded heater 350 contained within the chuck body. The heater 350 may, in embodiments, include a resistive heater or a fluid heater. In some embodiments, the electrode 335 can operate as a heater, but decoupling these operations may allow for more individual control and provide extended heater coverage while limiting the area for plasma formation. The heater 350 may include a polymer heater bonded or coupled to the chuck body material, but a conductive element may also be embedded within the electrostatic chuck body and configured to receive an electric current, such as an AC current, to heat the upper puck. The electric current may be supplied through the stem 330 through a channel similar to the DC power discussed above. The heater 350 may be coupled to a power source 365, which may provide an electric current to the resistive heating element to facilitate heating of the associated chuck body and / or substrate. The heater 350 may, in embodiments, include multiple heaters, each associated with a zone of the chuck body, such that an exemplary chuck body may include as many or more zones as there are heaters. The chuck mesh electrode 335 may, in some embodiments, be positioned between the heater 350 and the substrate support surface 327, and, as described further below, in some embodiments, may maintain a distance between the electrode within the chuck body and the substrate support surface.

[0036]

[0045] The heater 350 may be capable of regulating the temperature of the entire electrostatic chuck body 325 as well as the substrate residing on the substrate support surface 327. The heater may have an operating temperature range to heat the chuck body and / or substrate to about 100° C. or greater, and the heater may be configured to heat to temperatures of about 125° C. or greater, about 150° C. or greater, about 175° C. or greater, about 200° C. or greater, about 250° C. or greater, about 300° C. or greater, about 350° C. or greater, about 400° C. or greater, about 450° C. or greater, about 500° C. or greater, about 550° C. or greater, about 600° C. or greater, about 650° C. or greater, about 700° C. or greater, about 750° C. or greater, about 800° C. or greater, about 850° C. or greater, about 900° C. or greater, about 950° C. or greater, about 1000° C. or greater, or greater. The heater may also be configured to operate within any range encompassed between any two of these recited values, or within a smaller range encompassed within either of these ranges. In some embodiments, the chuck heater may be operated to maintain a substrate temperature above at least 500° C. during a deposition operation.

[0037]

[0046] 4A shows a schematic top view of an electrode arrangement 400 for an exemplary substrate support assembly in accordance with some embodiments of the present technique. The electrodes in arrangement 400 may be any of the previously described electrodes or any other pedestal or chuck, such as may be included in substrate support assembly 310. The electrodes may be operable as an electrostatic chuck, as discussed above and further described below. As shown, electrode arrangement 400 may include a first bipolar electrode 405 and a second bipolar electrode 410. The electrodes may be embedded in a puck or chuck body, such as a ceramic including aluminum nitride, as discussed above, and may feature any of the features, configurations, or characteristics discussed above for any substrate support.

[0038]

[0047] The first bipolar electrode 405 and the second bipolar electrode 410 may each include a mesh material that may be substantially coplanar across both electrodes within the electrostatic chuck. As shown, the mesh material may be separated into multiple sections. For example, the first bipolar electrode 405 may include at least two separated mesh sections 406. Each mesh section may feature any number of shapes or geometries, such as a sector of a circle as shown, but also a rectangle or any other shape. These may be determined, at least in part, from the geometry of the substrate, for example. While the sector shapes are substantially quadrant, it should be understood that any minor or major sector shape may be utilized in embodiments of the present technology. The mesh sections 406 may be discontinuous and, in some embodiments, may not contact each other along the plane of the mesh material. As shown, one or more gaps 408 may be formed around each mesh section 406 of the first bipolar electrode 405, and each mesh section may be isolated within the chuck body from any other mesh section of either the first or second bipolar electrode. While two such mesh sections are illustrated, in some embodiments, the first bipolar electrode 405 may include about two or more sections, about three or more sections, about four or more sections, about five or more sections, about six or more sections, about seven or more sections, about eight or more sections, or more. However, increasing the number of mesh sections may similarly increase the amount of interstitial area and reduce chucking in areas where the mesh is not stretched. Thus, in some embodiments, the mesh may include about eight or fewer sections, or about six or fewer sections. An electrode lead may be coupled to the first bipolar electrode at each mesh section, such as at location 409, which in some embodiments may be anywhere along the mesh.

[0039] The second bipolar electrode 410 can be or include a continuous mesh section, as shown, which can extend through at least two separated mesh sections of the first bipolar electrode 405. For example, as shown, the second bipolar electrode 410 can extend through the gap 408 between the sections of the first bipolar electrode as shown. At least one electrode lead can be coupled to the second bipolar electrode at a location 413 along the electrode. The second bipolar electrode 410 can be characterized by any shape or geometry, as discussed above, and can be characterized by a shape that corresponds to or matches the shape of the first bipolar electrode 405. For example, if the first bipolar electrode section is circular sector-shaped as shown, the second bipolar electrode 410 can also feature at least two mesh sections, which can be circular sector-shaped. The sections of the second bipolar electrode 410 can be coupled with a bridge 412 portion that extends through the gap between the first bipolar electrode sections, as shown.

[0040]

[0049] As shown, in some embodiments, the arrangement 400 may include a third electrode 415, which may be located or positioned radially outward from the first and second bipolar electrodes and may extend around the bipolar electrodes as shown. In some embodiments, the third electrode may be included, for example, under the outer region 347 or may otherwise be around the edge region of the substrate support. Electrode leads may be coupled to the third electrode at one or more locations 417, as shown. While four such lead locations are shown, any number of leads may be provided in embodiments to ensure uniform delivery to the electrodes. Each of the electrodes may be coupled to one or more power sources, as can be seen in FIG. 4B. FIG. 4B shows a schematic partial cross-sectional view of an electrode arrangement 400 for an exemplary substrate support assembly in accordance with some embodiments of the present technique. As shown, the arrangement 400 may include a first bipolar electrode 405 and a second bipolar electrode 410. Here, the cross section can illustrate a second bipolar electrode 410 through the bridge 412 portion of the mesh. In some embodiments, the arrangement can also include a third electrode 415.

[0041]

[0050] Each electrode may be coupled to one or more power sources, as previously described. While FIG. 4B shows an exemplary coupling arrangement, it should be understood that any number of electrode coupling configurations may be used. For example, the first bipolar electrode section may be coupled to a first DC power source 420, and the second bipolar electrode section may be coupled to a second DC power source 425. Either power source may operate in a positive or negative voltage configuration, which may be switched during processing, for example, or increased or decreased in either direction to provide electrostatic chucking. Also, in some embodiments, one or more RF power sources may be incorporated. For example, a first RF power source 430 may be coupled to the third electrode 415, and a second RF power source 430 may be coupled to the first and second bipolar electrodes. As described below, separate RF power sources may be coupled to each of the bipolar electrodes, although in some embodiments, a single power source may be used based on the electrode configuration.

[0042]

[0051] In operation, by including a separate RF power supply coupled to the third electrode, the processing plasma can be adjusted to affect the ongoing process. For example, in the illustrated bottom-up RF power configuration, increasing RF power to the edge of the chuck can deliver increased current to the plasma at the edge, improving plasma characteristics. During deposition operations, for example, this can increase edge deposition, which can compensate for a center-high deposition process and improve radial process uniformity. Depending on the degree of non-uniformity, the delivered power can be increased or decreased to create a more uniform process. In this way, a bipolar configuration can be created that can ensure sufficient chucking, while the substrate support can also be used to provide additional process adjustments through RF control in multiple regions. Furthermore, as illustrated, electrode leads can extend laterally through the chuck body in different vertical planes, thereby limiting leakage and interference.

[0043]

[0052] While the figure illustrates a bottom RF feed configuration, it should be understood that any of the configurations illustrated throughout this disclosure may similarly be generated with a top RF feed, such as in embodiments based on RF source 307. For example, FIG. 4C shows a schematic partial cross-sectional view of an electrode arrangement 400 for an exemplary substrate support assembly in accordance with some embodiments of the present technique, illustrating the same configuration for the electrodes but utilizing top RF feed control. For example, instead of utilizing an RF power supply as shown in FIG. 4B, in some embodiments, variable capacitors may be used to control current division through various electrode sections. For example, instead of increasing power from a power supply to add power to the plasma, in some embodiments, the control scheme may utilize a variable capacitor, which can increase capacitance, thereby increasing the current flowing through the plasma to the associated electrode in that region. This, in turn, can increase plasma density in the associated region, increasing deposition or etching in that region.

[0044]

[0053] The present technique may similarly encompass other bipolar chuck configurations that may be incorporated into any of the substrate supports, as previously described. FIG. 5A shows a schematic top view of an electrode arrangement 500 for an exemplary substrate support assembly in accordance with some embodiments of the present technique. Arrangement 500 may include any of the features or characteristics of arrangement 400 and may be incorporated into any substrate support for which a bipolar chuck may be used, including any of the substrate supports previously described. For example, arrangement 500 may include a first bipolar electrode 505 and a second bipolar electrode 510. The first bipolar electrode 505 may include at least two separated mesh sections 506, and in the illustrated exemplary embodiment, may include four mesh sections 506, although it should be understood that any number of mesh sections may be included, as previously discussed. Each mesh section 506 of the first bipolar electrode 505 may be separated from the others by a gap 508. Each of the mesh sections 506 may be electrically coupled to a single power source as discussed below, and any number of electrode leads may be used to couple the individual sections at locations 509 anywhere along the mesh.

[0045]

[0054] The second bipolar electrode 510 may include an annular mesh extending around the mesh section of the first bipolar electrode. Additionally, the second bipolar electrode 510 may include a bridge 512 extending through the gap between the separated mesh sections of the first bipolar electrode. Such a configuration may provide both RF conditioning, as described above, and electrostatic chucking from two bipolar electrodes. This may improve edge region chucking in some embodiments. For example, some semiconductor processes may involve processing incoming wafers characterized by increased wafer bow at the edge region of the substrate. Ensuring complete clamping at the outer edge may ensure that the substrate remains substantially flat during processing. Failure to do so may increase process non-uniformity or damage to the substrate. Because the second bipolar electrode 510 may extend to or beyond the edge of the semiconductor substrate being processed, such a design, including a second bipolar electrode extending around the first bipolar electrode, may provide sufficient clamping.

[0046]

[0055] Additionally, a configuration having an annular bipolar electrode extending around the first bipolar electrode may facilitate radial RF adjustment as well. Figure 5B shows a schematic partial cross-sectional view of an electrode arrangement 500 for an exemplary substrate support assembly in accordance with some embodiments of the present technique, which may include any of the features, characteristics, or components described above and may be included in any of the substrate supports described elsewhere. As shown in cross-section, the second bipolar electrode 510 may extend around the first bipolar electrode 505 and may include a bridge 512 extending between mesh sections of the first bipolar electrode 505. Similar to the above, a first DC power source 520 may be coupled to the first bipolar electrode 505, and a second DC power source 525 may be coupled to the second bipolar electrode. Additionally, a first RF power source 530 may be coupled to the first bipolar electrode 505, and a second RF power source 535 may be coupled to the second bipolar electrode 510. The second bipolar electrode may extend around the first bipolar electrode 505 so that radial adjustment of the plasma can be performed in the inner and outer zones by operating individual RF power supplies as discussed above, and adjustments can be performed in situ prior to or during any processing operation. As noted above, the configuration of Figure 5B can also be created using a variable capacitor for the top RF feed, as previously discussed and as would be readily understood by one of ordinary skill in the art.

[0047]

[0056] 6A shows a schematic top view of an electrode arrangement 600 for an exemplary substrate support assembly in accordance with some embodiments of the present technique. Arrangement 600 may include any of the features or characteristics of arrangement 400 or arrangement 500 and may be incorporated into any substrate support for which a bipolar chuck may be used, including any of the substrate supports described above. For example, arrangement 600 may include a first bipolar electrode 605 and a second bipolar electrode 610. First bipolar electrode 605 may include at least two separated mesh sections 606; in the illustrated exemplary embodiment, four mesh sections 606 may be included, although it should be understood that any number of mesh sections may be included, as discussed above. Each mesh section 606 of first bipolar electrode 605 may be separated from the others by a gap 608. Each of mesh sections 606 may be electrically coupled to a single power source, as discussed below, and any number of electrode leads may be used to couple individual sections at locations 609 anywhere along the mesh.

[0048]

[0057] The second bipolar electrode 610 may include an annular mesh extending around the mesh section of the first bipolar electrode. Additionally, the second bipolar electrode 610 may include a bridge 612 extending through the gap between the separated mesh sections of the first bipolar electrode. In some embodiments, a third electrode 615 may also be included, which may be located or positioned radially outward from the first and second bipolar electrodes and may extend around the bipolar electrodes as shown. In some embodiments, the third electrode may be included under the outer region 347, as described above, or may otherwise be around the edge region of the substrate support. An electrode lead may be coupled to the third electrode at one or more locations 617, as shown. While four such lead locations are shown, any number of leads may be provided in an embodiment, as previously described.

[0049]

[0058] Such a configuration may provide both greater RF modulation as described above and electrostatic chucking from two bipolar electrodes. This may improve edge region chucking in some embodiments by providing three individually controllable radial concentric zones. This configuration may provide both improved chucking and improved radial RF modulation compared to the prior art.

[0050]

[0059] As described above, by utilizing three distinct radial zones based on electrode position, an additional amount of radial adjustment can be provided by the configuration. Figure 6B shows a schematic partial cross-sectional view of an electrode arrangement 600 for an exemplary substrate support assembly in accordance with some embodiments of the present technique, which may include any of the features, characteristics, or components described above and may be included in any of the substrate supports described elsewhere. As shown in cross-section, the second bipolar electrode 610 may extend around the first bipolar electrode 605 and may include a bridge 612 extending between mesh sections of the first bipolar electrode 605. The third electrode 615 may be located radially outward from the second bipolar electrode 610. Similar to the above, a first DC power source 620 may be coupled to the first bipolar electrode 605, and a second DC power source 625 may be coupled to the second bipolar electrode. Furthermore, the first RF power source 630 may be coupled to the third power source 615, the second RF power source 635 may be coupled to the first bipolar electrode 605, and the third RF power source 640 may be coupled to the second bipolar electrode 610.

[0051]

[0060] Because the second bipolar electrode may extend around the first bipolar electrode 605 and the third electrode may extend around the second bipolar electrode 615, radial adjustment of the plasma can be performed in the inner, middle, and outer zones by operating individual RF power sources as discussed above, and adjustments can be made in situ prior to or during any processing operation. Again, as mentioned above, the configuration can utilize either a bottom RF feed or a top RF feed utilizing a variable capacitor, as previously described in FIG. 4C . Utilizing a bipolar configuration according to embodiments of the present technology can ensure consistent substrate placement while also providing additional process control that results in radial adjustment of the generated plasma.

[0052]

[0061] Although the above description, for purposes of explanation, sets forth certain details in order to facilitate an understanding of various embodiments of the present technology, it will be apparent to one skilled in the art that certain embodiments may be practiced without some of these details or with additional implementation details.

[0053]

[0062] Although several embodiments have been disclosed, those skilled in the art will recognize that various modifications, alternative structures, and equivalents may be used without departing from the essence of the embodiments. In addition, in order to avoid unnecessarily obscuring the technology, some well-known processes and elements have not been described. Therefore, the above description should not be construed as limiting the scope of the technology.

[0054]

[0063] Where a range of values ​​is provided, each intervening value between the upper and lower limits of that range is understood to be specifically disclosed, to the smallest unit of the lower limit (unless the context clearly dictates otherwise). Narrower ranges between any stated or unstated intervening values ​​in a stated range, as well as all other stated or intervening values ​​in such stated range, are encompassed. The upper and lower limits of any narrower range may individually be included in or excluded from the range. Each range where either, neither, or both limits are included in the narrower range is also encompassed within the technology, provided that there is a specifically excluded limit in the stated range. When a stated range includes one or both limits, ranges excluding either or both of those included limits are also included.

[0055]

[0064] As used in this specification and the appended claims, the singular forms "a", "an" and "the" include the plural (unless the context clearly dictates otherwise). Thus, for example, a reference to "a heater" includes a plurality of such heaters, and a reference to "the protrusion" includes a reference to one or more protrusions and equivalents thereof known to those skilled in the art, and so forth.

[0056]

[0065] Additionally, the words "comprise(s) / comprising", "contain(s) / containing", and "include(s) / including", when used in this specification and the following claims, are intended to specify the presence of stated features, integers, components, or operations, but do not exclude the presence or addition of one or more other features, integers, components, operations, acts, or groups.

Claims

1. 1. A substrate support assembly comprising: an electrostatic chuck body defining a substrate support surface; a support stem connected to the electrostatic chuck body; a heater embedded in the electrostatic chuck body; a first bipolar electrode embedded within the electrostatic chuck body between the heater and the substrate support surface, the first bipolar electrode including at least two separated mesh sections, each mesh section characterized by a circular sector shape; a second bipolar electrode embedded within the electrostatic chuck body between the heater and the substrate support surface, the second bipolar electrode including a continuous mesh extending through the at least two separated mesh sections of the first bipolar electrode; a first radio frequency (RF) power source or variable capacitor coupled to the first bipolar electrode; Including, the at least two separated mesh sections of the first bipolar electrode include four mesh sections separated from one another by gaps; Substrate support assembly.

2. 2. The substrate support assembly of claim 1, wherein the second bipolar electrode comprises two mesh sections connected by a bridge between the at least two separated mesh sections of the first bipolar electrode, and the two mesh sections of the second bipolar electrode are characterized by a circular sector shape.

3. The substrate support assembly of claim 2 , wherein the first RF power source or variable capacitor is coupled to both the first bipolar electrode and the second bipolar electrode.

4. 2. The substrate support assembly of claim 1, wherein the second bipolar electrode includes an annular mesh extending around the four mesh sections of the first bipolar electrode, the annular mesh including bridges extending through the gaps between the separated mesh sections of the first bipolar electrode.

5. The substrate support assembly of claim 4 , further comprising a second RF power source or a variable capacitor coupled to the second bipolar electrode.

6. a first DC power source coupled to the first bipolar electrode; a second DC power source coupled to the second bipolar electrode; The substrate support assembly of claim 5 , further comprising:

7. 6. The substrate support assembly of claim 5, further comprising a third electrode positioned radially outward from and extending around the first and second bipolar electrodes.

8. The substrate support assembly of claim 7 , further comprising a third RF power source or a variable capacitor coupled to the third electrode.

9. 9. The substrate support assembly of claim 8, wherein a plurality of leads extending within the electrostatic chuck body couple the third electrode to the third RF power source or a variable capacitor.

10. The substrate support assembly of claim 1 , wherein the electrostatic chuck body comprises a ceramic material.

11. The substrate support assembly of claim 10 , wherein the ceramic material comprises aluminum nitride.

12. 1. A substrate support assembly comprising: an electrostatic chuck body defining a substrate support surface; a support stem connected to the electrostatic chuck body; a first bipolar electrode embedded within the electrostatic chuck body below the substrate support surface, the first bipolar electrode including at least two mesh sections separated by a gap; a second bipolar electrode embedded within the electrostatic chuck body below the substrate support surface, the second bipolar electrode extending through the gap between the at least two mesh sections of the first bipolar electrode; a first radio frequency (RF) power source or variable capacitor coupled to the first bipolar electrode; Including, the second bipolar electrode includes an annular mesh extending around the at least two mesh sections of the first bipolar electrode, the annular mesh including a bridge extending through the gap between the at least two mesh sections of the first bipolar electrode; Substrate support assembly.

13. The substrate support assembly of claim 12 , wherein each mesh section of the first bipolar electrode is characterized by a circular sector shape.

14. The substrate support assembly of claim 12 , further comprising a second RF power source or a variable capacitor coupled to the second bipolar electrode.

15. 15. The substrate support assembly of claim 14, further comprising a third electrode positioned radially outward from and extending around the first and second bipolar electrodes.

16. The substrate support assembly of claim 15 , further comprising a third RF power source or a variable capacitor coupled to the third electrode.

17. a first DC power source coupled to the first bipolar electrode; a second DC power source coupled to the second bipolar electrode; The substrate support assembly of claim 12 further comprising:

18. 1. A substrate support assembly comprising: an electrostatic chuck body defining a substrate support surface; a support stem connected to the electrostatic chuck body; a first bipolar electrode embedded within the electrostatic chuck body below the substrate support surface, the first bipolar electrode including at least two mesh sections separated by a gap; a second bipolar electrode embedded within the electrostatic chuck body below the substrate support surface; a third bipolar electrode positioned radially outward from and extending around the first and second bipolar electrodes; and a first radio frequency (RF) power source or variable capacitor coupled to the first bipolar electrode and / or the second bipolar electrode; a third RF power source or variable capacitor coupled to the third bipolar electrode and / or the second bipolar electrode; a substrate support assembly including:

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