Photomask, optical waveguide, optical circuit, and method for manufacturing optical waveguide

Abstract

Provided is an optical waveguide having little optical loss at a connection portion, in an optical circuit divided into a plurality of sub-circuits. Further provided is a photomask (110) in which a waveguide pattern of an optical circuit is divided into a plurality of regions and drawn. In order to connect the waveguide that is divided and drawn, the waveguide is provided with a waveguide pattern for drawing a junction region (112) in which the waveguide width changes toward an outer peripheral section (113). The waveguide is connected by overlapping and exposing the junction regions of two photomasks.

Description

[Technical Field]

[0001] The present invention relates to an optical waveguide, an optical circuit, and a method for manufacturing an optical waveguide, and more particularly to an optical waveguide manufactured using a divided photomask, an optical circuit using this waveguide, and a method for manufacturing an optical waveguide. [Background technology]

[0002] Guided-wave optical circuits using optical waveguides formed on a substrate are smaller and more highly integrated than free-space optical circuits, which are constructed using bulk optical components such as lenses and prisms. Furthermore, guided-wave optical circuits are characterized by their long-term stability and reliability, and are widely used in practical systems such as optical communication devices. For example, optical circuits using silica-based waveguides have been put to practical use, such as wavelength multiplexers / demultiplexers called arrayed waveguide gratings, which are constructed by arranging multiple waveguides in an array, and optical switches composed of Mach-Zehnder interferometers with variable phase shifters (see, for example, Non-Patent Documents 1 to 3). Optical circuits using waveguides made of dielectric materials such as lithium niobate or semiconductor materials such as indium phosphide and silicon have also been put to practical use, such as optical modulators and demodulators. To accommodate mass production, these optical circuits have their circuit patterns formed by a pattern transfer process using a photomask. For example, an optical circuit using a silica-based waveguide is formed using the following process.

[0003] 1A-1D are cross-sectional views illustrating the fabrication process of an optical circuit using a conventional silica-based waveguide. As shown in FIG. 1A, an underclad 11 and a core film 12 are sequentially deposited on a substrate 10, and then a photoresist 13 is applied on top of them. Next, the optical circuit pattern on the photomask is transferred to the photoresist 13 through an exposure / development process. If a positive photoresist is used, a photomask with a pattern that blocks light from the core portion and transmits light from the other portions is used. On the other hand, if a negative photoresist is used, a photomask with a pattern that transmits light from the core portion and blocks light from the other portions is used. In either case, as shown in FIG. 1B, the photoresist 14 above the core portion remains during the development process. Then, using the pattern-transferred photoresist 14 as a mask, the core film 12 is etched to form a waveguide core 15, as shown in FIG. 1C. Finally, as shown in FIG. 1D, the photoresist 14 is removed and an overclad 16 is deposited, completing the optical circuit with the embedded waveguide core 15. In this way, an optical circuit with the same pattern as that depicted on the photomask is fabricated. Note that, in the above exposure, a reduction projection exposure machine may be used to reduce and transfer the pattern depicted on the photomask, thereby fabricating an optical circuit with a fine circuit pattern.

[0004] With current optical circuit technology, it is difficult to bend light with a small bending radius with low loss, so optical circuits tend to be larger in size than electronic circuits. For large-scale optical circuits, the circuit pattern may not fit on a single photomask. For this reason, the circuit pattern is divided into appropriate partial circuit patterns, and these partial circuit patterns are then drawn on multiple photomasks. In the exposure process, these partial circuit patterns are connected to synthesize the original circuit pattern, creating the desired optical circuit.

[0005] 2A and 2B show an example of fabricating a large-scale optical circuit using multiple photomasks. As shown in FIG. 2A, the desired large-scale circuit 20 is configured with a large number of various element circuits interconnected by waveguides. In this example, the large-scale circuit 20 has partial circuit patterns 21-24 connected by multiple connectors (e.g., reference numeral 25 in FIG. 2A). As shown in FIG. 2B, the large-scale circuit 20 is fabricated by using photomasks 31-34 on which partial circuit patterns 21-24 are enlarged and then transferring these partial circuit patterns together using a reduced projection exposure machine. By using multiple photomasks for reduced projection on which the partial circuit patterns are separately drawn, high-precision optical circuits can be fabricated even for large-scale optical circuits.

[0006] When fabricating an optical circuit by connecting partial circuit patterns drawn on multiple photomasks in an exposure process, the accuracy of relative alignment of each photomask in the exposure process becomes an issue. If the accuracy of relative alignment is low, relative positional deviations occur between the partial circuit patterns in the fabricated optical circuit, causing deviations in the waveguide patterns at the joints between the partial circuit patterns.

[0007] FIG. 3A is a top view showing an example of a waveguide pattern at a joint when there is a relative misalignment between the photomasks during exposure. For example, consider an enlarged view of the joint 25 between the partial circuit patterns 21 and 22 of the large-scale circuit 20 shown in FIG. 2A. The left-side pattern region 44, including the waveguide core 41, is patterned using photomask 31, while the right-side pattern region 45, including the waveguide core 42, is patterned using photomask 32. The relative misalignment in the x-direction perpendicular to the waveguide direction, as shown in FIG. 3A, results in an optical axis misalignment between the waveguides before and after the joint, i.e., between the waveguide cores 41 and 42. This results in a mismatch in the field distribution of the guided light before and after the joint, resulting in loss. Note that the direction of the relative misalignment between the partial circuit patterns can basically be any direction. Loss also occurs when a relative misalignment in the z-direction parallel to the waveguide direction occurs, separating the joint and creating a gap in the waveguide pattern. However, for the same amount of misalignment, the loss is greater when the optical axis misalignment occurs than when a gap occurs.

[0008] FIG. 3B is a diagram showing the state of light propagation in the waveguide pattern of the joint portion shown in FIG. 3A. This state of light propagation is shown in the case where the relative refractive index difference Δ is 2%, the core height is 3.4 μm, and the waveguide In a silica-based waveguide with a waveguide width of 5 μm and guided light with a wavelength of 1.55 μm, the optical axis position The calculation was performed using the Beam Propagation Method (BPM), assuming a 0.5 μm deviation. The scale, waveguide width, and optical axis misalignment in Figure 3A are also shown based on this assumption. Also, because the image is a binary image, the power is higher toward the center of the waveguide and decreases with distance from the center, as shown by contour lines. To show the low power region in detail, the contour lines are spaced unevenly apart from the power.

[0009] As can be seen from Figure 3B, the light meanders after the joint. This is because a portion of the guided light propagating in the fundamental mode is converted into a higher-order mode or radiation mode due to the misalignment of the optical axis at the joint, and the inter-mode interference between this converted light and the remaining guided light in the fundamental mode is visible. When the loss is calculated, a misalignment of the optical axis of 0.5 μm results in a loss of approximately 0.15 dB, and a misalignment of the optical axis of 0.2 μm results in a loss of approximately 0.15 dB. It can be seen that a loss of about 0.024 dB occurs. This loss value is not so large. However, in large-scale optical circuits, multiple joints occur, and the total loss value cannot be ignored. Furthermore, in waveguides with a large relative refractive index difference, such as silicon waveguides, the core size is small, so the loss value for the same optical axis misalignment is even larger.

[0010] Several methods for avoiding or mitigating losses caused by misalignment of the waveguide pattern at the joint have been proposed. For example, the method described in Patent Document 1 divides the circuit pattern so that the joint contacts the slab waveguide, thereby preventing losses caused by misalignment of the waveguide pattern. This is because, unlike channel waveguides, slab waveguides do not confine light in the lateral direction, so the impact of misalignment at the joint is small. In addition, the method described in Non-Patent Document 4 makes the waveguide width at the joint wider than the normal waveguide width, thereby increasing the lateral size of the field distribution of the guided light. This relatively reduces the magnitude of the optical axis misalignment and reduces the impact of waveguide pattern misalignment on loss.

[0011] However, the avoidance and mitigation measures described in the above-mentioned prior art documents have the following problems. The method described in Patent Document 1 is based on the premise of using a slab waveguide, and therefore has the problem that it can only be applied to optical circuits that include a slab waveguide, such as an arrayed-waveguide grating multiplexer / demultiplexer. Furthermore, even in optical circuits that include a slab waveguide, the location where the circuit pattern is divided is limited to the slab waveguide portion, making it difficult to efficiently divide the circuit pattern onto each photomask.

[0012] The method described in Patent Document 2 has a problem in that the waveguide width needs to be made considerably wider than the standard waveguide width in order to obtain a sufficient loss reduction effect in response to optical axis misalignment.

[0013] Figure 4 shows the loss value versus the optical axis position shift Δx when the waveguide width W is changed in the waveguide pattern at the joint. The calculation conditions are the same as above, with a relative refractive index difference Δ of 2%, a silica-based waveguide with a core height of 3.4 μm, and a wavelength of the guided light of 1.55 μm. Unless otherwise specified, the same conditions are used for the loss calculations and BPM calculations that follow. 0.5 If a misalignment of the optical axis of μm is allowed, the waveguide width must be set to 0.01 dB or less. It is necessary to widen the waveguide width to approximately 30 μm. In such a wide-core waveguide, many higher-order modes can exist, and even slight disturbances, such as roughness on the waveguide sidewalls, can convert the fundamental-mode guided light into higher-order modes. Furthermore, when widening the waveguide width from the standard width of 5 μm to 30 μm, a long conversion length is required to change the waveguide width very slowly to prevent the fundamental-mode guided light from being converted into higher-order modes. For example, if the width change rate, i.e., the ratio dw of the width change to the conversion length dL (dw / dL), is to be kept below 1%, a conversion length of 2500 μm is required to change the waveguide width from 5 μm to 30 μm. This undesirably requires a large area for the connection within the circuit chip. [Prior art documents] [Patent documents]

[0014] [Patent Document 1] Japanese Patent Application Publication No. 8-122551 [Non-patent literature]

[0015] [Non-Patent Document 1] Akira Himeno, et al., "Silica-based planar lightwave circuits," IEEE Journal of Selected Topics in Quantum Electronics, vo. 4, no. 6, pp. 913-924, Nov. / Dec. 1998. [Non-patent document 2] Takashi Goh, et al., "Low loss and high extinction ratio strictly non-blocking 16×16 thermooptic matrix switch on 6-in wafer using silica-based planar lightwave circuit technology," IEEE Journal of Lightwave Technology, vol. 19, no. 3, pp. 371-379, March 2001. [Non-patent document 3] Toshio Watanabe, et al., "Compact PLC-based transponder aggregator for colorless and directionless ROADM," in Proceedings, Optical Fiber Communication Conference and NFOEC 2011, paper OTuD3, March 2011. [Non-patent document 4] Tae Joon Seok, et al., "240x240 wafer-scale silicon photonic switches," in Proceedings, Optical Fiber Communication Conference 2019, paper Th1E.5, March 2019. Summary of the Invention

[0016] An object of the present invention is to provide an optical waveguide in an optical circuit divided into a plurality of partial circuits, which has low optical loss at the connection portions.

[0017] In order to achieve the above object, one embodiment of the present invention is a photomask on which a waveguide pattern of an optical circuit is divided into a plurality of regions and drawn, and the photomask is provided with a waveguide pattern for drawing a joint region where the waveguide width changes toward the outer periphery in order to connect the divided and drawn waveguides, and the waveguide width of the waveguide pattern is changed so that the field distribution of the propagation mode of light propagating through the waveguide is adiabatically changed along with the propagation in the joint region; The waveguides are connected by exposing the two photomasks in an overlapping manner with the joint regions adjacent to each other via their ends.

[0018] The waveguide pattern also has a varying waveguide width so that the overlap of the seam regions is reduced.

[0019] Furthermore, the waveguide pattern is a linear taper pattern in which the waveguide width changes constantly toward the outer periphery, or a nonlinear taper pattern in which the waveguide width changes nonlinearly toward the outer periphery.

[0020] Furthermore, the linear tapered pattern and the nonlinear tapered pattern have a waveguide width that changes from the alignment position when the two photomasks are overlapped toward the outer periphery.

[0021] Furthermore, the waveguide width of the waveguide pattern is set so that the field distribution of the propagation mode of light changes adiabatically as the light propagates through the joint region.

[0022] Furthermore, the waveguide pattern may be laid out such that the waveguiding direction in the joint region is oblique (θ≠90°) with respect to the division boundary line.

[0023] Furthermore, the joint region of the waveguide pattern may be a part of a bent waveguide.

[0024] Furthermore, the width of the waveguide in the joint region exposed by the two photomasks in an overlapping manner differs depending on the amount of exposure, compared to the width of the waveguide in other regions.

[0025] Furthermore, the waveguide may be a single-mode waveguide.

[0026] One embodiment of the optical waveguide is fabricated using the photomask described above.

[0027] In one embodiment of the optical circuit, the first photomask is divided into a first photomask having a waveguide pattern of a plurality of optical functional circuits and a second photomask having a waveguide pattern of a waveguide connected to each of the optical functional circuits, and the waveguide patterns of the optical functional circuits have different circuit characteristic parameters or different functions, and the second photomask is combined with the first photomask of an optical functional circuit selected from the plurality of optical functional circuits. If It is characterized by being made in combination.

[0028] Furthermore, the writing magnification of the first photomask is different from the writing magnification of the second photomask.

[0029] In one embodiment of the method for manufacturing an optical waveguide, a photomask on which a waveguide pattern of an optical circuit is divided into a plurality of regions and drawn includes a waveguide pattern for drawing a joint region where the waveguide width changes toward the outer periphery in order to connect the divided and drawn waveguides, and two of the photomasks the waveguide width of the waveguide pattern is changed so that the field distribution of the propagation mode of light propagating through the waveguide is adiabatically changed along with the propagation in the joint region;The optical waveguide is fabricated by exposing the two photomasks in a positional relationship in which the joint regions are adjacent to each other via their ends.

[0030] According to the above-described embodiment, when a desired optical circuit is fabricated by connecting a plurality of partial circuit patterns in an exposure process, even if the alignment accuracy of each partial circuit pattern is low, the loss at the joint portion in any channel waveguide can be kept extremely low, and the area of ​​the joint portion can be kept small.

[0031] Another embodiment of the present invention is an optical waveguide produced using a photomask on which a waveguide pattern of an optical circuit is divided into multiple regions and drawn, wherein the joint regions of two photomasks are overlapped and exposed, and the divided regions are connected, and in the joint region, the field distribution of the propagation mode changes adiabatically as light propagates.

[0032] The propagation mode may be a single mode.

[0033] The seam region has a waveguide width that varies towards the periphery of the photomask, preferably such that the overlap of the seam region decreases.

[0034] The waveguide width may be a linear taper pattern in which the width changes uniformly toward the outer periphery, or a nonlinear taper pattern in which the width changes nonlinearly.

[0035] Furthermore, the linear tapered pattern and the nonlinear tapered pattern have a waveguide width that changes from the alignment position when the two photomasks are overlapped toward the outer periphery.

[0036] Furthermore, the waveguide direction of the joint region may be laid out obliquely (θ≠90°) with respect to the division boundary line.

[0037] Furthermore, the joint region of the waveguide pattern may be a part of a bent waveguide.

[0038] Furthermore, the width of the waveguide in the joint region exposed by the two photomasks in an overlapping manner differs depending on the amount of exposure, compared to the width of the waveguide in other regions.

[0039] Yet another embodiment of the present invention is an optical circuit fabricated using a photomask on which a waveguide pattern is drawn and divided into multiple regions, characterized in that the joint regions of two photomasks are overlapped and exposed, and the circuit has an optical waveguide connected between the divided regions.

[0040] In the optical waveguide, a field distribution of a propagation mode changes adiabatically in the joint region as light propagates. The propagation mode may be a single mode.

[0041] The seam region has a waveguide width that varies towards the periphery of the photomask, preferably such that the overlap of the seam region decreases.

[0042] The waveguide width may be a linear taper pattern in which the width changes uniformly toward the outer periphery, or a nonlinear taper pattern in which the width changes nonlinearly.

[0043] Furthermore, the linear tapered pattern and the nonlinear tapered pattern have a waveguide width that changes from the alignment position when the two photomasks are overlapped toward the outer periphery.

[0044] Furthermore, the optical waveguide may be laid out obliquely (θ≠90°) with respect to the dividing boundary line.

[0045] Furthermore, the optical waveguide may be a bent waveguide in the joint region.

[0046] Furthermore, the width of the waveguide in the joint region exposed by the two photomasks in an overlapping manner differs depending on the amount of exposure, compared to the width of the waveguide in other regions.

[0047] Yet another embodiment of the present invention is a method for fabricating an optical circuit using a photomask on which a waveguide pattern is drawn in a divided manner into a plurality of regions, characterized in that, in order to connect the divided and drawn waveguides, the divided and drawn waveguides are connected by exposing the joint regions of two photomasks in an overlapping manner using a photomask including a waveguide pattern for drawing joint regions where the waveguide width changes toward the outer periphery.

[0048] The waveguide pattern also has a varying waveguide width so that the overlap of the seam regions is reduced.

[0049] Furthermore, the waveguide pattern is a linear taper pattern in which the waveguide width changes constantly toward the outer periphery, or a nonlinear taper pattern in which the waveguide width changes nonlinearly toward the outer periphery.

[0050] Furthermore, the linear tapered pattern and the nonlinear tapered pattern have a waveguide width that changes from the alignment position when the two photomasks are overlapped toward the outer periphery.

[0051] Furthermore, the waveguide width of the waveguide pattern is set so that the field distribution of the propagation mode of light changes adiabatically as the light propagates through the joint region.

[0052] Furthermore, the waveguide pattern may be laid out such that the waveguiding direction in the joint region is oblique (θ≠90°) with respect to the division boundary line.

[0053] Furthermore, the joint region of the waveguide pattern may be a part of a bent waveguide.

[0054] Furthermore, the width of the waveguide in the joint region exposed by the two photomasks in an overlapping manner differs depending on the amount of exposure, compared to the width of the waveguide in other regions. [Brief explanation of the drawings]

[0055] [Figure 1A] FIG. 1A is a cross-sectional view showing a manufacturing process of an optical circuit using a conventional silica-based waveguide; [Figure 1B] FIG. 1B is a cross-sectional view showing the manufacturing process of an optical circuit using a conventional silica-based waveguide; [Figure 1C] FIG. 1C is a cross-sectional view showing the manufacturing process of an optical circuit using a conventional silica-based waveguide; [Figure 1D] FIG. 1D is a cross-sectional view showing the manufacturing process of an optical circuit using a conventional silica-based waveguide. [Figure 2A] Figure 2A shows an example of fabricating a large-scale optical circuit using multiple photomasks. [Figure 2B] Figure 2B shows an example of fabricating a large-scale optical circuit using multiple photomasks. [Figure 3A] FIG. 3A is a top view showing an example of a waveguide pattern at a joint when there is a relative positional misalignment between photomasks during exposure; [Figure 3B] FIG. 3B is a diagram showing the state of light propagation in the waveguide pattern at the joint portion shown in FIG. 3A; [Figure 4] FIG. 4 shows the loss value versus the optical axis position shift Δx when the waveguide width W is changed in the waveguide pattern at the joint. [Figure 5A] FIG. 5A is a diagram showing a photomask pattern at a joint portion of a waveguide of a partial circuit pattern divided into each photomask according to the first embodiment of the present invention; [Figure 5B] FIG. 5B is a diagram showing a photomask pattern at a joint portion of a waveguide of a partial circuit pattern divided into each photomask according to the first embodiment of the present invention; [Figure 6A] FIG. 6A is a diagram showing the state of an exposure pattern when there is no relative positional deviation between the photomasks during exposure; [Figure 6B] FIG. 6B is a top view showing a waveguide pattern at a joint portion produced by the exposure pattern shown in FIG. 6A; [Figure 7A] FIG. 7A is a diagram showing the state of an exposure pattern when there is a relative positional deviation between photomasks during exposure; [Figure 7B] FIG. 7B is a top view showing a waveguide pattern at a joint portion produced by the exposure pattern shown in FIG. 7A; [Figure 7C] FIG. 7C is a diagram showing the state of light propagation in the waveguide pattern at the joint portion shown in FIG. 7B; [Figure 8A] FIG. 8A is a diagram showing the dependency of loss values ​​on relative positional deviation Δx in the waveguide pattern of the first embodiment; [Figure 8B] Figure 8B is a diagram where the vertical axis of Figure 8A is scaled 10 times. [Figure 8C] FIG. 8C is a diagram showing the taper length LTpr dependence of the first peak loss value in the waveguide pattern of the first embodiment; [Figure 8D] Figure 8D is a diagram where the vertical axis of Figure 8C is scaled 10 times. [Figure 9A] FIG. 9A is a diagram showing the state of an exposure pattern when the exposure amount is different for each photomask during exposure; [Figure 9B] FIG. 9B is a top view showing a waveguide pattern at a joint portion produced by the exposure pattern shown in FIG. 9A; [Figure 10A] FIG. 10A is a diagram showing a photomask pattern at a joint portion of a waveguide of a partial circuit pattern divided into each photomask according to a second embodiment of the present invention; [Figure 10B] FIG. 10B is a diagram showing a photomask pattern at a joint portion of a waveguide of a partial circuit pattern divided into each photomask according to a second embodiment of the present invention; [Figure 11A] FIG. 11A is a diagram showing the state of an exposure pattern when there is a relative positional deviation between photomasks during exposure; [Figure 11B] FIG. 11B is a top view showing a waveguide pattern at a joint portion produced by the exposure pattern shown in FIG. 7A; [Figure 12A] FIG. 12A is a diagram showing the dependency of loss values ​​on the relative positional deviation amount Δx in the waveguide pattern of the second embodiment; [Figure 12B] Figure 12B is a diagram where the vertical axis of Figure 12A is scaled 10 times. [Figure 12C] FIG. 12C is a diagram showing the taper length LTpr dependence of the first peak loss value in the waveguide pattern of the second embodiment; [Figure 12D] FIG. 12D is a diagram in which the vertical axis of FIG. 12C is scaled 10 times larger. [Figure 13A] FIG. 13A is a diagram showing a photomask pattern at a joint portion of a waveguide of a partial circuit pattern divided into each photomask according to a third embodiment of the present invention; [Figure 13B] FIG. 13B is a diagram showing a photomask pattern at a joint portion of a waveguide of a partial circuit pattern divided into each photomask according to a third embodiment of the present invention; [Figure 14] FIG. 14 is a diagram showing an exposure pattern when a photomask pattern according to a fourth embodiment of the present invention is used; [Figure 15] FIG. 15 is a diagram showing an exposure pattern when a photomask pattern according to a fifth embodiment of the present invention is used; [Figure 16] FIG. 16 is a diagram showing an exposure pattern when a photomask pattern according to a sixth embodiment of the present invention is used; [Figure 17] FIG. 17 is a diagram showing an exposure pattern when a photomask pattern according to a seventh embodiment of the present invention is used; [Figure 18] FIG. 18 is a diagram showing the configuration of an optical circuit according to a first embodiment of the present invention; [Figure 19A] FIG. 19A is a diagram showing a layout on a photomask in Example 2 of the present invention; [Figure 19B] FIG. 19B is a diagram showing a layout of the switch element array of Example 2 on a photomask; [Figure 20]FIG. 20 is a diagram showing a layout on a photomask in Example 3 of the present invention; [Figure 21] FIG. 21 is a diagram showing a conceptual configuration of an optical circuit according to a fourth embodiment of the present invention; [Figure 22] FIG. 22 is a diagram showing an example of a layout on a photomask in the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0056] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In this embodiment, an example in which a silica-based waveguide is used is shown, but the pattern shape drawn on the photomask and the pattern shape of the fabricated waveguide do not specify the material of the waveguide. Therefore, it is not limited to a silica-based waveguide, and the present invention can also be applied to cases in which waveguides of other materials such as silicon (Si) waveguides, indium phosphide (InP) waveguides, and polymer-based waveguides are used. In addition, as a specific example of a waveguide design, a specific refractive index difference Δ is 2%, a core height is 3.4 μm, and a basic waveguide width is 1.5 μm. Although the explanation will be given taking a waveguide with a diameter of 5 μm as an example, the basic parameters of the waveguide are not limited to these, and the same concept can be applied to other parameters.

[0057] [First embodiment: Basic form when using positive resist] 5A and 5B are diagrams showing photomask patterns at the joints of waveguides in partial circuit patterns divided into photomasks according to the first embodiment of the present invention. These diagrams are enlarged views of the connection portions of waveguides in a photomask on which the waveguide pattern of an optical circuit is divided into multiple regions and drawn. The photomask pattern is, for example, a photomask pattern for forming connection portion 25 in large-scale circuit 20 shown in FIG. 2A, and is a waveguide pattern for connecting the divided and drawn waveguides.

[0058] Photomask 110 corresponds to photomask 31, and photomask 120 corresponds to photomask 32. Here, connection portion 25 is assumed to be a straight waveguide with a waveguide width W0. The patterns of these photomasks 110 and 120 are pattern shapes assuming the use of a positive photoresist in the exposure process. The hatched portions are light-shielding patterns, and the remaining portions are transparent patterns. The drawing pattern of photomask 110 shown in FIG. 5A will be described in detail below, but the drawing pattern of photomask 120 shown in FIG. 5B also has the same shape and characteristics as photomask 110, except for the orientation.

[0059] A waveguide pattern 114 is drawn as a partial circuit pattern 21 in a normal drawing region 111 of the photomask 110. In a joint extension region 112, a tapered pattern 115 is drawn following the waveguide pattern 114, and then a solid pattern 116 of an outer periphery 113 is drawn. The waveguide width of the waveguide pattern 114 is W0. The width of the tapered pattern 115 is W0 at a point where it is connected to the waveguide pattern 114, and the taper width W at a point where it is connected to the solid pattern 116 is W0. Tpr The shape gradually widens to (W Tpr >W0). The portion where the waveguide pattern 114 and the tapered pattern 115 are connected is a matching position 119, which will be described later. The boundary position of the tapered pattern 115 at the portion where it is connected to the solid pattern 116 is located outside an upper boundary extension line 117 and a lower boundary extension line 118, which are extensions of the upper and lower pattern boundaries of the waveguide pattern 114 to the outer periphery 113 (dW A >0, dW B >0).

[0060] In the conventional photomask pattern, there is no joint extension region 112, and the waveguide pattern 114 drawn in the normal drawing region 111 is directly connected to the solid pattern 116 in the outer periphery 113. As described above, the first embodiment is significantly different from the conventional photomask pattern in that the joint extension region 112 is provided and the tapered pattern 115 is drawn. Furthermore, the tapered pattern 115 is not a pattern that is simply an extension of the waveguide pattern 114, but its width changes from W0 to W1 as it moves from the normal drawing region 111 side to the outer periphery 113 side. Tpr The difference is that it gradually becomes thicker.

[0061] As will be described later with reference to FIGS. 6-7 , the photomasks 110 and 120 are overlapped during the exposure process so that the alignment positions 119 and 129 are aligned, connecting the waveguides drawn on both masks. Therefore, the tapered pattern 115 overlaps the waveguide pattern 124 of the photomask 120, covering it. Since the waveguide width of the waveguide pattern 124 is W0, the upper boundary extension line 117 and the lower boundary extension line 118 overlap the upper and lower pattern boundary lines of the waveguide pattern 124. Therefore, the boundary position of the tapered pattern 115 is the same as the boundary position of the waveguide pattern 124 at the point where it connects to the waveguide pattern 114. As the tapered pattern 115 moves toward the outer periphery 113, it gradually becomes wider than the upper and lower pattern boundary lines of the waveguide pattern 124, and the difference between them also increases. The tapered pattern 115 in the joint extension region 112 has these characteristics.

[0062] In FIG. 5A, the waveguide pattern 114, the tapered pattern 115, and the solid pattern 116 are drawn as a continuous, connected pattern. However, even if there are gaps or dips that are not resolved in the exposure process, the pattern reflected in the photoresist is continuous and therefore considered to be the same pattern. Furthermore, even if there are gaps or depressions that are resolved in the exposure process, as mentioned above, the loss caused by the gaps is smaller than the loss caused by optical axis misalignment, so the main effect of reducing the loss caused by optical axis misalignment can be achieved. Of course, it is preferable to avoid unnecessary gaps and dips.

[0063] FIG. 6A shows the exposure pattern when there is no relative misalignment between the photomasks during exposure. This is an enlarged top view of the connection portion of the optical circuit during the fabrication process shown in FIG. 1A. This figure shows how a pattern is exposed onto the photoresist 13 according to the pattern drawn on the photomask. Each pattern is exposed so that alignment position 119 of photomask 110 and alignment position 129 of photomask 120 both coincide with exposure position 134 on the photoresist 13, and the photomasks 110 and 120 are used in the relative positions as designed. Exposed portions 131 and 132 are portions exposed only by the photomasks 110 and 120, respectively. Exposed portion 133 is a portion exposed by both the photomasks 110 and 120. The overlapping region 135 including the exposed portion 133 is a region where the two photomasks 110 and 120 are exposed in an overlapping manner due to the presence of the joint extension regions 112 and 122, forming a waveguide pattern. In overlap region 135, the waveguide width changes so that the overlap in the seam region is reduced.

[0064] In the first embodiment, a positive photoresist is used as the photoresist, and the photoresist in these exposed portions 131-133 is dissolved and removed in the development process. Therefore, in the etching process of the core film 12, the core film 12 in the exposed portions 131-133 is etched, and these portions ultimately become the clad 16 (143). On the other hand, the portions of the core film 12 that are not exposed by either photomask, i.e., the portions other than the exposed portions 131-133, remain as the cores 15 (141, 142).

[0065] FIG. 6B is a top view showing a waveguide pattern at a joint portion created using the exposure pattern shown in FIG. 6A. Since there was no relative positional misalignment in the exposure pattern shown in FIG. 6A, the boundary between exposed portions 131-133 is a straight line as designed. That is, the pattern directly reflects waveguide pattern 114 of photomask 110 and waveguide pattern 124 of photomask 120. Therefore, waveguide core 141 becomes a waveguide with a waveguide width W0 that reflects waveguide pattern 114 of photomask 110, and waveguide core 142 becomes a waveguide with a waveguide width W0 that reflects waveguide pattern 124 of photomask 120. The waveguide created using photomasks 110 and 120 has a waveguide width W0 and is a single straight waveguide as designed.

[0066] FIG. 7A shows the exposure pattern when there is a relative misalignment between the photomasks during exposure. Each pattern is exposed so that alignment position 119 of photomask 110 is at exposure position 154, and alignment position 129 of photomask 120 is at exposure position 155 on the wafer. There is a relative misalignment of Δx between exposure positions 154 and 155 in the x direction perpendicular to the waveguide direction. That is, photomasks 110 and 120 are used at relative positions that result in an optical axis misalignment of Δx. As in FIG. 6A, exposed portions 151 and 152 are portions exposed only by photomasks 110 and 120, respectively, and exposed portion 153 is a portion exposed by both photomasks 110 and 120. Overlapping regions 158 and 159, including exposed portion 153, are regions where the two photomasks 110 and 120 overlap and form a pattern due to the presence of seam extension regions 112 and 122. Since a positive photoresist is used, these exposed areas 151 to 153 ultimately become the clad 16 (163), and the areas not exposed by any of the photomasks, i.e., the areas other than the exposed areas 151 to 153, become the core 15 (161, 162).

[0067] When the photomask pattern according to the first embodiment is used, a characteristic feature of the exposure pattern is the formation of tapered portions 156 and 157, which are surrounded by triangular frames in the figure. The exposed portion within the overlap region 159 of the exposed portion 151 is formed to reflect the tapered pattern 115 of the seam extension region 112 of the photomask 110. Similarly, the exposed portion within the overlap region 158 of the exposed portion 152 is formed to reflect the tapered pattern 125 of the seam extension region 122 of the photomask 120. That is, the tapered portions 156 and 157 are formed by the seam extension regions 112 and 122, respectively. Conventional photomask patterns do not have these seam extension regions 112 and 122, and therefore do not have overlap regions 158 and 159. Therefore, the tapered portions 156 and 157 are not formed, and a step of Δx occurs in the exposure pattern at the boundary between the overlap region 158 and the overlap region 159.

[0068] 7B is a top view showing the waveguide pattern of the joint portion produced by the exposure pattern shown in FIG. 7A. The waveguide core 161 in the pattern region 164 is a waveguide having a waveguide width W0 that reflects the waveguide pattern 114 of the photomask 110. The waveguide core 161 in the pattern region 165 has a waveguide width that changes from W0 to W100, reflecting the tapered portion 157. P (=W0-Δx), and the position of the waveguide center in the x direction shifts by Δx / 2. The waveguide core 162 in the pattern region 166 reflects the tapered portion 156, and the waveguide width changes to W P to W0, and the x-direction position of the waveguide center shifts further by Δx / 2. The waveguide core 162 in the pattern region 167 becomes a waveguide with a waveguide width W0 that reflects the waveguide pattern 124 of the photomask 120. In this way, the pattern regions 165 and 166 that reflect the tapered portions 156 and 157 gradually shift the x-direction positions of the waveguide centers of the waveguide cores 161 and 162 without abrupt changes, thereby absorbing the relative positional deviation Δx of each photomask in the x-direction during exposure. Furthermore, in the pattern regions 165 and 166 that reflect the tapered portions 156 and 157, the waveguide width changes, but this also changes slowly rather than abruptly.

[0069] FIG. 7C is a diagram showing the state of light propagation in the waveguide pattern at the joint shown in FIG. 7B. Assuming that a relative positional deviation Δx in the x direction is 0.5 μm, The design values ​​for the photomasks 110 and 120 are the waveguide width W0=5 μm and the taper length L Tpr = 200 μm, taper width W Tpr = 6 μm, dW A =dW B =(W T pr-W0) / 2. The scale, waveguide width, and relative positional deviation Δx in Figure 7B are also shown based on this assumption. Also, because the image is a binary image, the power is higher toward the center of the waveguide and decreases with distance from the center, as shown by contour lines. To show the low power region in detail, the contour lines are spaced at uneven intervals relative to the power. As can be seen from Figure 7C, the center position of the propagating light in the x direction gradually shifts in pattern regions 165 and 166, and the light propagates smoothly with almost no meandering even beyond pattern region 167.

[0070] This indicates that the guided light propagating in the fundamental mode propagates in the pattern regions 165, 166, and 167 in the fundamental mode, with almost no conversion to higher-order modes or radiation modes. In other words, since the x-direction position of the waveguide center and the waveguide width change slowly in the pattern regions 165 and 166, the field distribution of the light propagation mode changes adiabatically, suppressing conversion from the fundamental mode to other modes. The loss value calculated in this propagation light calculation is approximately 0.0001 dB. Conventional waveguide patterns at joints The loss value for the relative position shift Δx is significantly higher than the loss value of 0.15 dB in the previous model. It is clear that it has been reduced.

[0071] In this way, by using a photomask pattern having the joint extension regions 112, 122, it is possible to reduce the loss value at the joint portion even if the relative positional deviation of each photomask occurs in the x direction perpendicular to the waveguide direction during exposure. However, since the normal writing regions 111, 121 that can be written on the photomasks 110, 120 are narrowed by the area of ​​the joint extension regions 112, 122, it is desirable to make the area of ​​the joint extension regions 112, 122 as small as possible.

[0072] The independent design parameters of the taper patterns 115, 125 of the joint extension regions 112, 122 are the taper length L Tpr and taper width W Tpr The waveguide width W0 is given, and dWA =dW B =(W Tpr As described above, when there is a relative positional deviation Δx in the x direction between the photomasks during exposure, it is important to form the tapered portions 156 and 157 in order to suppress loss. Therefore, the maximum value of the expected relative positional deviation Δx is set to Δx Max Then, dW A =dW B ≧Δx Max Therefore, the taper width W Tp r is W Tpr ≧W0+2Δx Max For example, Δx Max =0.5μm , when W0=5μm, W Tpr ≧6 μm is a requirement, so from the viewpoint of making the area of ​​the joint extension regions 112 and 122 as small as possible, W Tpr = 6μm.

[0073] Furthermore, even if there is a relative positional deviation Δx in the x direction between the photomasks during exposure, it is important for loss suppression that the positions of the waveguide centers of the waveguide cores 161 and 162 in the x direction shift gradually without abrupt changes. Tpr The change in pattern width (W Tpr -W0) ratio (W Tpr -W0) / L Tpr , that is, the width change rate must be sufficiently small.

[0074] 8A is a diagram showing the dependency of the loss value on the relative positional deviation Δx in the waveguide pattern of the first embodiment. FIG. 8B is a diagram in which the scale of the vertical axis of FIG. 8A is 10 times larger. In the photomasks 110 and 120, the waveguide width W0=5 μm, W Tpr = 6 μm, taper length L Tpr = 50, 100, 200, 300 μm. Taper length L TprIn each of the above, the loss value for the relative positional deviation Δx in the x direction is calculated by the beam propagation method. The loss value in the conventional waveguide pattern at the joint portion is also plotted with an x. The loss value in the waveguide pattern of this embodiment is Tpr It can be seen that even for a relative misalignment amount Δx, the loss value is smaller than that of the waveguide pattern at the conventional joint portion. It can also be seen that in the waveguide pattern of this embodiment, the loss varies oscillatorily with the relative misalignment amount Δx, and the first peak (first peak) Pk has the largest loss value (first peak loss value) in the range of small Δx. That is, within the range of Δx that is likely to occur as a relative misalignment between photomasks, at least in the range of −0.5 to +0.5 μm, the first peak loss value is the worst-case loss value.

[0075] FIG. 8C shows the taper length L of the first peak loss value in the waveguide pattern of the first embodiment. T pr 8D is a diagram showing the dependence of the vertical axis of FIG. 8C on the taper length L. In the waveguide pattern of this embodiment, the first peak loss value is Tpr It can be seen that the larger the pattern, that is, the smaller the width change rate, the smaller the taper length L Tpr For example, if you want to suppress the loss at the joint to 0.002 dB or less regardless of whether the relative positional deviation Δx between the photomasks is −0.5 to +0.5 μm, the taper length L Tpr ≧about 200 From the viewpoint of minimizing the area of ​​the joint extension regions 112 and 122, the taper length L Tpr = approximately 200 μm. Width change rate dW / dL = (W Tpr -W0) / L Tpr , W0=5μm, W Tpr In the case of 6 μm, the requirement is dW / dL≦0.5%, so dW / dL=0.5% is sufficient. Similarly, if you want to suppress the loss at the joint to 0.01 dB or less, the taper length L Tpr = about 100μm, d W / dL = 1% is sufficient. These values ​​vary depending on the relative refractive index difference, core size, and operating wavelength of the waveguide, so optimization can be performed for each waveguide using the same method.

[0076] The photomask pattern according to the first embodiment has seam extension regions 112, 122, so even if the relative positional deviation of each photomask occurs in the z direction parallel to the waveguide direction during exposure, loss at the seam can be suppressed.

[0077] Conventional photomask patterns lack these seam extension regions 112, 122, so if the two photomasks are misaligned in a direction that separates them, the solid patterns on the periphery of the two photomasks will overlap. Not only are there no common exposed areas on both photomasks, but gaps also occur between the exposed areas on one photomask and the other. Because a positive photoresist is used, these gaps remain as cores. In other words, unnecessary waveguide cores are formed perpendicular to the original waveguide cores at the seam, where cladding should be. The presence of unnecessary waveguide cores crossing the original waveguide cores is undesirable because it generates loss at the seam.

[0078] In the photomask pattern according to the first embodiment, even if a relative misalignment occurs in a direction that separates the two photomasks 110 and 120, the joint extension regions 112 and 122 function as margin regions. Therefore, the solid-color patterns 116 and 126 of the outer peripheries 113 and 123 are not arranged to overlap each other on the two photomasks, and the exposed portions 131 and 132 are always continuous. Therefore, unnecessary waveguide cores that cross the original waveguide cores are not formed, and loss due to unnecessary waveguide cores does not occur. Thus, by providing the joint extension regions 112 and 122, the photomask pattern according to this embodiment can minimize loss at the joints, regardless of the relative misalignment of the photomasks in any direction during exposure.

[0079] The photomask pattern according to the first embodiment not only suppresses loss at the joints when there is a relative misalignment between the photomasks during exposure, but also suppresses loss at the joints even when the exposure doses for the photomasks are different during exposure. Normally, the exposure dose is the same for each photomask, but if the appropriate exposure dose differs depending on the type of circuit drawn on each photomask, or if different exposure machines are used for each photomask as described below, the exposure dose may differ for each photomask.

[0080] FIG. 9A illustrates the exposure patterns obtained when the exposure doses differ for each photomask. The patterns are exposed so that alignment position 119 of photomask 110 and alignment position 129 of photomask 120 coincide with exposure position 174 on photoresist 13. Photomasks 110 and 120 are used in the relative positions as designed. However, the exposure dose for photomask 120 is lower than normal. As in FIG. 6A, exposed portions 171 and 172 are portions exposed only by photomasks 110 and 120, respectively, and exposed portion 173 is a portion exposed by both photomasks 110 and 120. Reflecting the lower exposure dose, the effective pattern width of exposed portions 172 and 173 is reduced by δW. Therefore, the boundary of exposed portion 172 is W0′ (=W0+δW), which is wider than the width W0 of waveguide pattern 124 on photomask 120. Since a positive photoresist is used, these exposed areas 171 to 173 will eventually become the clad 16 (183) area, and the areas not exposed by either photomask, i.e., the areas other than the exposed areas 171 to 173, will become the core 15 (181, 182).

[0081] When the photomask pattern according to the first embodiment is used with different exposure doses in this way, a characteristic of the exposure pattern is the formation of tapered portions 175 and 176, which are shown as regions surrounded by triangular frames in the figure. The exposed portion within the overlap region 178 of the exposed portion 171 is formed to reflect the tapered pattern 115 of the seam extension region 112 of the photomask 110. That is, the tapered portions 175 and 176 are formed by the seam extension region 112. In a conventional photomask pattern, these seam extension regions 112 are not present, so the tapered portions 175 and 176 are not formed, and a difference ΔW occurs in the width of the exposure pattern at the boundary between the overlap region 177 and the overlap region 178.

[0082] 9B is a top view showing a waveguide pattern at a joint portion created using the exposure pattern shown in FIG. 9A. The waveguide cores 181 in the pattern regions 184 and 185 have a waveguide width W0 that reflects the waveguide pattern 114 of the photomask 110. The waveguide core 182 in the pattern region 186 has a waveguide width W0 that changes from W0 to W0' that reflects the tapered portions 175 and 176. The waveguide core 182 in the pattern region 187 has a waveguide width W0' that reflects the width of the boundary of the exposed portion 172. Thus, despite the difference between the width W0 of the waveguide core 181 in the pattern region 184 and the width W0' of the waveguide core 182 in the pattern region 187, the pattern region 186 reflects the tapered portions 175 and 176, the waveguide width changes gradually, not abruptly. By slowly changing the waveguide width in this way, the magnitude of the field distribution of the propagating fundamental mode also changes slowly and adiabatically, and there is almost no conversion from the fundamental mode to other modes such as higher-order modes or radiation modes, thereby suppressing an increase in loss at the joint.

[0083] The same applies when the exposure dose of photomask 110 is lower than normal and when the exposure dose of photomask 110 is normal. The exposed portion within overlap region 177 of exposed portion 172 is formed to reflect tapered pattern 125 of seam extension region 122 of photomask 120, and a tapered portion is formed in overlap region 177. Therefore, a waveguide taper in which the waveguide width changes from W0' to W0 is formed in pattern region 185. In either case, the waveguide width does not change suddenly but changes gradually due to the tapered portion, thereby suppressing an increase in loss at the seam.

[0084] [Second embodiment: Basic form when using negative resist] 10A and 10B are diagrams illustrating photomask patterns at the joints of waveguides in partial circuit patterns divided into photomasks according to a second embodiment of the present invention. These diagrams are enlarged views of the waveguide connection portion of a photomask on which a waveguide pattern of an optical circuit is divided into multiple regions. The basic concept of the photomask pattern configuration and usage method are the same as those of the photomask pattern according to the first embodiment, but the difference is that the pattern shape is designed to use a negative photoresist in the exposure process. The photomasks 110 and 120 described in the first embodiment correspond to the photomasks 210 and 220 in the second embodiment, respectively. The patterns of these photomasks 210 and 220 have light-shielding patterns in the hatched portions and transparent patterns in the remaining portions. In a photomask designed to use a negative photoresist, the light-shielding pattern serves as the base, and the waveguide portion is drawn as a transparent pattern. The pattern drawn on the photomask 210 will be described in detail below. The pattern drawn on the photomask 220 also has the same shape and characteristics as the photomask 210, except for the orientation.

[0085] In the photomask 210, a waveguide pattern 214 as a sub-circuit pattern 21 is drawn as a transmission pattern in the regular drawing area 211. In the joint extension area 212, a taper pattern 215 is drawn as a transmission pattern following the waveguide pattern 214. The outer peripheral portion 213 remains as the base light-shielding pattern. The waveguide width of the waveguide pattern 214 is W0. The taper pattern 215 has a shape in which its width gradually narrows from W0 at the location where it is connected to the waveguide pattern 214 to the taper width W Tpr at the location where it contacts the outer peripheral portion 213 (W Tpr <W0). The location where the waveguide pattern 214 and the taper pattern 215 are connected becomes the alignment position 119 described later. Also, the boundary position of the taper pattern 215 at the location where it contacts the outer peripheral portion 213 is located inside the upper boundary extension line 217 and the lower boundary extension line 218 obtained by extending the upper and lower pattern boundary lines of the waveguide pattern 214 as they are to the outer peripheral portion 213 (dW A >0, dW B >0).

[0086] In the pattern of the conventional photomask, there is no joint extension area 212, and only the waveguide pattern 214 drawn in the regular drawing area 211 is drawn, and the waveguide pattern 214 is cut off at the outer peripheral portion 213. Thus, the provision of the joint extension area 212 and the drawing of the taper pattern 215 are significantly different from the pattern of the conventional photomask. Furthermore, the taper pattern 215 is not simply a pattern obtained by extending the waveguide pattern 214, and its width gradually becomes narrower from the regular drawing area 211 side to the outer peripheral portion 213 side, different in that it changes from W0 to W Tpr gradually.

[0087] As will be described later with reference to Figures 11A and 11B, the photomasks 210 and 220 are used in an overlapping manner so that the alignment positions 219 and 229 are aligned in the exposure process, and the waveguides drawn on both are connected. Therefore, the tapered pattern 215 overlaps the waveguide pattern 224 of the photomask 220 in a manner that hides it. Since the waveguide width of the waveguide pattern 224 is W0, the upper boundary extension line 217 and the lower boundary extension line 218 overlap the upper and lower pattern boundary lines of the waveguide pattern 224. Therefore, the boundary position of the tapered pattern 215 is the same as the boundary position of the waveguide pattern 224 at the point where it connects to the waveguide pattern 214. As the tapered pattern 215 moves toward the outer periphery 213, it gradually becomes narrower than the boundary position of the waveguide pattern 224, and the difference between them also increases. The tapered pattern 215 in the joint extension region 212 has these characteristics.

[0088] 10A, the waveguide pattern 214 and the tapered pattern 215 are drawn as a continuous, connected pattern, but even if there are lines or protrusions that are not resolved in the exposure process, they are considered to be the same pattern because the pattern reflected in the photoresist is continuous. Also, even if there are lines or protrusions that are resolved in the exposure process and gaps or depressions are formed in the waveguide after waveguide pattern processing, as mentioned above, the loss when a gap occurs is smaller than the loss due to optical axis misalignment, so the main effect of reducing loss due to optical axis misalignment can be achieved. Of course, it is preferable not to include unnecessary lines or protrusions in the mask pattern.

[0089] FIG. 11A shows the exposure pattern when there is a relative misalignment of each photomask during exposure. This is an enlarged top view of the connection portion of the optical circuit during the fabrication process shown in FIG. 1A. This figure shows how a pattern is exposed onto photoresist 13 according to the pattern drawn on the photomask. Each pattern is exposed so that alignment position 219 of photomask 210 corresponds to exposure position 254, and alignment position 229 of photomask 220 corresponds to exposure position 255 on the wafer. There is a relative misalignment of Δx between exposure positions 254 and 255 in the x direction perpendicular to the waveguide direction. That is, photomasks 210 and 220 are used at relative positions that cause an optical axis misalignment of Δx. Exposed portions 251 and 252 are exposed only by photomasks 210 and 220, respectively, and exposed portion 253 is exposed by both photomasks 210 and 220. The overlapping regions 258 and 259 including the exposed portion 253 are regions where the two photomasks 210 and 220 are overlappingly exposed and a waveguide pattern is formed due to the presence of the seam extension regions 212 and 222. In the overlapping regions 258 and 259, the waveguide width is changed so that the overlap of the seam regions is reduced.

[0090] In the second embodiment, a negative photoresist is used as the photoresist, and therefore, the portions not exposed by any of the photomasks, i.e., the photoresist other than the exposed portions 251 to 253, are dissolved and removed in the development process. Therefore, in the etching process of the core film 12, the core film 12 other than these exposed portions 251 to 253 is etched, and this portion ultimately becomes the clad 16 (263), and the core film 12 in the exposed portions 251 to 253 remains as the core 15 (261, 262).

[0091] When the photomask pattern according to the second embodiment is used, a characteristic feature of the exposure pattern is the formation of tapered portions 256 and 257, which are surrounded by triangular frames in the figure. The exposed portion within the overlap region 259 of the exposed portion 251 is formed to reflect the tapered pattern 215 of the seam extension region 212 of the photomask 210. Similarly, the exposed portion within the overlap region 258 of the exposed portion 252 is formed to reflect the tapered pattern 225 of the seam extension region 222 of the photomask 220. That is, the tapered portions 256 and 257 are formed by the seam extension regions 212 and 222, respectively. Conventional photomask patterns do not have these seam extension regions 212 and 222, and therefore do not have overlap regions 258 and 259. Therefore, the tapered portions 256 and 257 are not formed, and a step of Δx occurs in the exposure pattern at the boundary between the overlap region 258 and the overlap region 259.

[0092] 11B is a top view showing the waveguide pattern of the joint portion produced by the exposure pattern shown in FIG. 11A. The waveguide core 261 in the pattern region 264 is a waveguide having a waveguide width W0 that reflects the waveguide pattern 214 of the photomask 210. The waveguide core 261 in the pattern region 265 has a waveguide width that changes from W0 to W100, reflecting the tapered portion 257. N (=W0+Δx), and the position of the waveguide center in the x direction shifts by Δx / 2. The waveguide core 262 in the pattern region 266 reflects the tapered portion 256, and the waveguide width changes to W N to W0, and the x-direction position of the waveguide center shifts further by Δx / 2. The waveguide core 262 in the pattern region 267 becomes a waveguide with a waveguide width W0 that reflects the waveguide pattern 224 of the photomask 220. In this way, the pattern regions 265 and 266 that reflect the tapered portions 256 and 257 gradually shift the x-direction positions of the waveguide centers of the waveguide cores 261 and 262 without abrupt changes, thereby absorbing the relative positional deviation Δx of each photomask in the x-direction during exposure. Furthermore, in the pattern regions 265 and 266 that reflect the tapered portions 256 and 257, the waveguide width changes, but this also changes slowly rather than abruptly.

[0093] The beam propagation behavior of the waveguide pattern at the joint in the second embodiment was also calculated using the beam propagation method. Similar to the waveguide pattern at the joint in the first embodiment, the center position of the propagating light in the x direction gradually shifts in pattern regions 265 and 266, and the light propagates smoothly from pattern region 267 onward with almost no meandering. In the second embodiment, the x direction position of the waveguide center and the waveguide width change slowly in pattern regions 265 and 266, causing the propagation mode of the light to change adiabatically, suppressing conversion from the fundamental mode to other modes. The loss value calculated in this propagation light calculation is approximately 0.0015 dB. Compared to the loss value of 0.15 dB in the conventional waveguide pattern at the joint, this loss value for the relative positional shift Δx is significantly reduced.

[0094] In this way, by using a photomask pattern having the joint extension regions 212, 222, it is possible to reduce the loss value at the joint portion even if the relative positional deviation of each photomask occurs in the x direction perpendicular to the waveguide direction during exposure. However, since the normal writing regions 211, 221 that can be written on the photomasks 210, 220 are narrowed by the area of ​​the joint extension regions 212, 222, it is desirable to make the area of ​​the joint extension regions 212, 222 as small as possible.

[0095] The independent design parameters of the taper patterns 215, 225 of the joint extension regions 212, 222 are the taper length L Tpr and taper width W Tpr The waveguide width W0 is given, and dW A =dW B =(W0-W Tpr ) / 2. As described above, when there is a relative positional deviation Δx in the x direction between the photomasks during exposure, it is important to form the tapered portions 256 and 257 in order to suppress loss. Therefore, the maximum value of the expected relative positional deviation Δx is set to Δx Max Then, dW A =dW B ≧Δx MaxTherefore, the taper width W Tp r is W Tpr ≦W0-2Δx Max For example, Δx Max =0.5μm , when W0=5μm, W Tpr ≦4 μm is a requirement, so from the viewpoint of making the area of ​​the joint extension regions 212 and 222 as small as possible, W Tpr = 4μm.

[0096] Furthermore, even if there is a relative positional deviation Δx in the x direction between the photomasks during exposure, it is important for loss suppression that the positions of the waveguide centers of the waveguide cores 261 and 262 in the x direction shift gradually without abrupt changes. Tpr The change in pattern width (W0-W Tpr ) ratio (W0-W Tpr ) / L Tpr , that is, the width change rate must be sufficiently small.

[0097] 12A is a diagram showing the dependency of the loss value on the relative positional deviation Δx in the waveguide pattern of the second embodiment. FIG. 12B is a diagram in which the scale of the vertical axis of FIG. 12A is 10 times larger. In the photomasks 210 and 220, the waveguide width W0=5 μm, W Tpr = 4 μm, dW A =dW B =(W0-W Tpr ) / 2, taper length L Tpr = 50, 100, 200, 300 μm. Taper length L Tpr In each of the graphs, the loss value for the relative positional deviation Δx in the x direction is calculated using the beam propagation method. The loss value for the conventional waveguide pattern at the joint is also plotted with an x. It can be seen that FIG. 12A is a graph that is almost the same as FIG. 8A. The loss value for the waveguide pattern of this embodiment is TprIt can be seen that even for a relative misalignment amount Δx, the loss value is smaller than that of the waveguide pattern at the conventional joint portion. It can also be seen that in the waveguide pattern of this embodiment, the loss varies oscillatorily with the relative misalignment amount Δx, and the first peak (first peak) Pk has the largest loss value (first peak loss value) in the range of small Δx. That is, within the range of Δx that is likely to occur as a relative misalignment between photomasks, at least in the range of −0.5 to +0.5 μm, the first peak loss value is the worst-case loss value.

[0098] FIG. 12C shows the taper length L of the first peak loss value in the waveguide pattern of the second embodiment. Tpr 12D is a diagram showing the dependence of the vertical axis of FIG. 12C on the scale of 10 times. It can be seen that FIG. 12C is also a graph that is almost the same as FIG. 8C. In the waveguide pattern of this embodiment, the first peak loss value is Tpr It can be seen that the larger the pattern, that is, the smaller the width change rate, the smaller the taper length L Tpr For example, if you want to suppress the loss at the joint to 0.002 dB or less regardless of whether the relative positional deviation Δx between the photomasks is −0.5 to +0.5 μm, the taper length L Tpr The requirement is ≧ 200 μm In order to minimize the area of ​​the joint extension regions 212 and 222, the taper length L Tpr = approximately 200 μm. Width change rate dW / dL = (W0 - W Tpr ) / L T pr , W0=5μm, W Tpr = 4μm, dW / dL≦0.5% Similarly, if you want to suppress the loss at the joint to 0.01 dB or less, the taper length L Tpr = approximately 100 μm, and dW / dL = 1%. These values ​​vary depending on the relative refractive index difference, core size, and operating wavelength of the waveguide, so optimization can be performed for each waveguide using the same method.

[0099] In the second embodiment, similarly to the photomask pattern according to the first embodiment, the photomask pattern has the joint extension regions 212 and 222, so that even if the relative positional deviation of each photomask occurs in the z direction parallel to the waveguide direction during exposure, the loss at the joint portion can be suppressed. As in the first embodiment, the position of the waveguide center in the x direction and the waveguide width change slowly in the pattern regions 265 and 266, so that the field distribution of the optical propagation mode changes adiabatically, and conversion from the fundamental mode to other modes is suppressed.

[0100] Conventional photomask patterns do not have these seam extension regions 212, 222. Therefore, if the two photomasks are misaligned relative to each other, the waveguide pattern is interrupted. Not only are there no exposed areas common to both photomasks, but gaps also occur between the exposed areas of one photomask and the other. Because a negative photoresist is used, these gaps become cladding, which directly translates into gaps in the waveguide core. Naturally, these gaps in the waveguide core are undesirable because they cause loss at the seam.

[0101] In the photomask pattern according to the second embodiment, even if a relative positional shift occurs in a direction that separates the two photomasks 210 and 220, the joint extension regions 212 and 222 function as margin regions. Therefore, the waveguide pattern is not interrupted, and the exposed portions 251 and 252 are always continuous. Gaps are not formed in the waveguide cores, and loss due to these gaps does not occur. Thus, by having the joint extension regions 212 and 222, the photomask pattern according to this embodiment can keep the loss value at the joints small, even if a relative positional shift occurs in any direction between the photomasks during exposure.

[0102] In the second embodiment, similar to the photomask pattern of the first embodiment, loss at the joints can be suppressed not only when there is a relative positional misalignment between the photomasks during exposure, but also when the exposure doses of the photomasks are different during exposure.

[0103] [Third embodiment: When the waveguide crosses the dividing boundary obliquely] 13A and 13B are diagrams illustrating photomask patterns at the joints of waveguides in partial circuit patterns divided into photomasks according to a third embodiment of the present invention. In the photomask pattern according to the first embodiment, the waveguide direction of the divided waveguide pattern is laid out perpendicular (θ=90°) to the division boundary line for each photomask. The photomask pattern according to the third embodiment differs in that the waveguide direction of the divided waveguide pattern is laid out obliquely (θ≠90°) to the division boundary line for each photomask. The basic concept of the configuration of the photomask pattern and the method of use are the same as those of the photomask pattern according to the first embodiment. The photomasks 110 and 120 described in the first embodiment correspond to photomasks 310 and 320, respectively, in the third embodiment. The patterns of these photomasks 310 and 320 are pattern shapes intended for use with positive photoresists in the exposure process, as in the first embodiment. The hatched portions are opaque patterns, and the remaining portions are transparent patterns.

[0104] As in the first embodiment, each photomask 310, 320 has a normal writing region 311, 321, a seam extension region 312, 322, and an outer periphery 313, 323. Tapered patterns 315, 325 are written in the seam extension regions 312, 322. Although the shape is slightly different from that of the first embodiment because θ≠90°, the tapered patterns 315, 325 can be designed to change the pattern width at a predetermined width change rate, as in the first embodiment. Also in this embodiment, alignment positions 319, 329 are overlapped during the exposure process.

[0105] The third embodiment also provides the same advantages as the first embodiment. That is, since the joint extension regions 312 and 322 are provided, the loss value at the joint portion can be kept small even if the relative positional deviation of each photomask occurs in any direction during exposure. Furthermore, even if the exposure dose differs between each photomask during exposure, the loss at the joint can be suppressed.

[0106] In the second embodiment, which is a pattern shape that assumes the use of a negative photoresist in the exposure process, it is also possible to arrange it into an embodiment with a layout in which θ≠90, similar to this embodiment.

[0107] In this way, even if the waveguiding direction of the divided waveguide pattern is oblique (θ≠90°) to the dividing boundary line to each photomask, loss at the joint is suppressed. Therefore, application of this embodiment has the advantage of increasing the degree of freedom in dividing locations.

[0108] [Fourth embodiment: When the waveguide pattern at the dividing boundary is a curved waveguide] Up to this point, the explanation has been given on the assumption that the waveguide at the joint between the partial circuit patterns is a straight waveguide with a constant width, i.e., the connection portion 25 is a straight waveguide with a waveguide width W0. However, the waveguide at the joint between the partial circuit patterns is not limited to a straight waveguide, and may be a curved waveguide or a tapered waveguide with a variable waveguide width. In other words, the division point into the partial circuit patterns does not necessarily have to be a straight waveguide, but may be a curved waveguide or a tapered waveguide. Furthermore, it may be a tapered-bent waveguide, which is a combination of these.

[0109] FIG. 14 is a diagram showing the state of an exposure pattern when using a photomask pattern in the fourth embodiment of the present invention. Only the core part is described. In the fourth embodiment, the split location to the partial circuit pattern is a curved waveguide. The exposed portion 431 is the portion exposed by only one photomask, the exposed portion 432 is the portion exposed by only the other photomask, and the exposed portion 433 is the portion exposed by both photomasks. The overlapping region 437 including the exposed portion 433 is a region where both photomasks overlap and pattern formation is performed due to the presence of a joint extension region in the photomask pattern in the fourth embodiment. It is illustrated in the case of using a photomask pattern that uses a negative photoresist in the exposure process, where the illustration of the exposure pattern is simple. Also, it is illustrated when there is no relative positional deviation of each photomask during exposure.

[0110] In the fourth embodiment, the widths of the tapered exposure portions 434 and 435 are the same as the width W0 of the exposed portions 432 and 431, respectively, at the joint center position 436, but gradually become narrower as they move away from the joint center position 436, and become W Tpr (<W0) at the tip. Also, the shapes of the tapered exposure portions 434 and 435 are not simple linear taper shapes, but are curved taper shapes that match the curvature of the curved waveguide.

[0111] Also in the fourth embodiment, in the exposure pattern when there is no relative positional deviation of each photomask during exposure, similar to the second embodiment, the widths of the tapered exposure portions are the same as the widths of all the exposed portions at the joint center position. And it has the characteristic of the exposure pattern that it gradually becomes smaller compared to the width of the exposed portion at the same position as it moves away from the joint center position. Due to such characteristics of the exposure pattern, even when there is a relative positional deviation of each photomask during exposure, the position in the direction perpendicular to the waveguide direction at the center of the waveguide and the waveguide width always change slowly, so the loss at the joint portion can be suppressed.

[0112] Even when a photomask pattern using a positive photoresist is used in the exposure process, the present invention can be applied to the bent waveguide portion and the tapered waveguide portion based on the same concept. Also, even when the waveguide direction of the divided waveguide pattern is laid out at an angle (θ≠90°) to the division boundary line for each photomask, the present invention can be applied to the bent waveguide portion and the tapered waveguide portion based on the same concept.

[0113] In this way, even if the waveguide at the joint of the partial circuit pattern is a curved waveguide, loss at the joint can be suppressed, so applying this embodiment has the advantage of further increasing the freedom of the division location.

[0114] [Fifth embodiment: When the waveguide pattern at the dividing boundary is a tapered waveguide] FIG. 15 is a diagram showing the appearance of an exposure pattern when a photomask pattern according to a fifth embodiment of the present invention is used. Only the core portion is shown. In the fifth embodiment, the division into partial circuit patterns is a tapered waveguide. The exposed portion 531 is a portion exposed only by one photomask, the exposed portion 532 is a portion exposed only by the other photomask, and the exposed portion 533 is a portion exposed by both photomasks. The overlapping region 537 including the exposed portion 533 is a region where a pattern is formed by overlapping both photomasks due to the presence of a joint extension region in the photomask pattern according to the fifth embodiment. The illustration shows a case where a photomask pattern using a negative photoresist in the exposure process is used, which simplifies the illustration of the exposure pattern. The illustration also shows a case where there is no relative positional misalignment between the photomasks during exposure.

[0115] In the fifth embodiment, the widths of the tapered exposed portions 534 and 535 are the width W at the center of the joint between the exposed portions 532 and 531 at the joint center position 536. CIt is the same. Further, as it moves away from the joint center position 536, it gradually becomes smaller compared to the widths of the exposed portions 532 and 531 at the same position, and at the tip, it is W Tpr1 (<W2), W Tpr2 (<W1). Here, the tapered exposure portions 534 and 535 do not necessarily have to be in a tapered shape. In the exposure pattern shown in FIG. 15, the width of the thicker side of the original tapered waveguide to be divided is W1, the width of the thinner side is W2, and the width at the joint center position is W C and the magnitude relationship is W1 > W C > W2. The width of the tip of the tapered exposure portion 535 is W Tpr2 but its width, although it is W Tpr2 < W1, does not necessarily have to be W T pr2 < W C and may be such that W Tpr2 ≧ W C . Therefore, the shape of the tapered exposure portion 535 may be a shape with the same width (W Tpr2 = W C ) or an inverse taper (W Tpr2 > W C ). However, even in those cases, the width of W Tpr2 is necessarily smaller than the width of the exposed portion 531 at the tip position of the tapered exposure portion 535.

[0116] In the fifth embodiment as well, since it has the same characteristics of the exposure pattern as in the fourth embodiment, even when there is a relative positional deviation of each photomask during exposure, the position in the direction perpendicular to the wave guiding direction at the center of the waveguide and the waveguide width always change slowly, so that the loss at the joint portion can be suppressed.

[0117] Even when a photomask pattern using a positive photoresist is used in the exposure process, the present invention can be applied to the bent waveguide portion and the tapered waveguide portion based on the same concept. Also, even when the waveguide direction of the divided waveguide pattern is laid out at an angle (θ≠90°) to the division boundary line for each photomask, the present invention can be applied to the bent waveguide portion and the tapered waveguide portion based on the same concept.

[0118] In this way, even if the waveguide at the joint of the partial circuit pattern is a curved waveguide, loss at the joint can be suppressed, so applying this embodiment has the advantage of further increasing the freedom of the division location.

[0119] [Sixth embodiment: When the taper pattern of the joint extension portion is a nonlinear tapered waveguide] In the first to fifth embodiments, the shape of the tapered pattern in the joint extension region is a linear tapered pattern whose width changes by a constant value in the waveguiding direction, but this is not limited to this, and the tapered pattern may be a nonlinear tapered pattern whose width changes nonlinearly. For example, there is a nonlinear tapered shape in which the waveguide width W changes exponentially from the initial waveguide width W0 with respect to the coordinate z along the waveguiding direction. A specific example is as follows:

[0120]

number

[0121] FIG. 16 shows the exposure pattern when a photomask pattern according to the sixth embodiment of the present invention is used. Only the core portion is shown. This embodiment also illustrates a case where a photomask pattern using a negative photoresist in the exposure process is used, which simplifies the illustration of the exposure pattern. The illustration also illustrates a case where there is no relative misalignment between the photomasks during exposure. The exposed portion 631 is a portion exposed by only one photomask, the exposed portion 632 is a portion exposed by only the other photomask, and the exposed portion 633 is a portion exposed by both photomasks. The overlap region 637, including the exposed portion 633, is a region where both photomasks overlap and form a pattern due to the presence of a seam extension region in the photomask pattern according to the sixth embodiment. In this embodiment, the tapered exposed portions 634 and 635 have a nonlinear tapered shape.

[0122] Even when a photomask pattern using a positive photoresist is used in the exposure process, a nonlinear tapered pattern in which the width of the tapered pattern changes nonlinearly can be applied based on the same concept. Also, when the waveguide direction of the divided waveguide pattern is laid out diagonally (θ≠90°) with respect to the division boundary line to each photomask, and the division point into partial circuit patterns is a bent waveguide or a tapered waveguide, a nonlinear tapered shape can be applied based on the same concept.

[0123] [Seventh embodiment: When overlapping of tapered patterns of joint extensions in the Z direction is reduced] In the above embodiment, the portions divided into partial circuit patterns exposed by both photomasks are exposed twice, and therefore receive twice the amount of exposure as the portions exposed by only one photomask. Therefore, the portions exposed by both photomasks effectively have a slightly larger area than the exposure area defined by the photomasks.

[0124] For example, in the first embodiment, in the example shown in FIG. 6A using a positive photoresist, the amount of exposure at the exposed portion 133 is twice that of the exposed portions 131 and 132. Therefore, the exposed region is slightly wider near the center position of the seam (exposure position 134), and the width of the unexposed region is slightly narrower. In other words, the width of the waveguide core near the center position of the seam is slightly narrower. In the second embodiment using a negative photoresist, the exposed region becomes the waveguide core, so the width of the waveguide core near the center position of the seam is slightly wider. To avoid this problem of an increase in the effective amount of exposure, it is sufficient to arrange the tapered pattern so that it extends into the normal writing region rather than only within the seam extension region.

[0125] FIG. 17 is a diagram showing the appearance of an exposure pattern when a photomask pattern according to a seventh embodiment of the present invention is used. Only the core portion is shown. This embodiment also illustrates a case where a photomask pattern using a negative photoresist in the exposure process is used, which simplifies the illustration of the exposure pattern. The illustration also illustrates a case where there is no relative positional misalignment between the photomasks during exposure. The exposed portion 731 is a portion exposed by only one photomask, the exposed portion 732 is a portion exposed by only the other photomask, and the exposed portion 733 is a portion exposed by both photomasks. The overlap region 737, including the exposed portion 733, is a region where both photomasks overlap and form a pattern due to the presence of a seam extension region in the photomask pattern according to the seventh embodiment.

[0126] In the photomask according to the seventh embodiment, the tapered patterns are arranged so as to encroach on the normal writing area. That is, the tapered patterns are arranged on the photomask so that the positions of the insides of the tapered exposed portions 734 and 735 are at the joint center position 736. By forming the tapered exposed portions in this way, the width W of the exposed area at the joint center position 736 is C becomes slightly narrower (W C<W0). By doubling the exposure amount, the effective spread of the exposed area 733 is offset W C By selecting the amount of penetration of the tapered pattern into the normal drawing area so as to achieve this, it is possible to suppress the deviation of the waveguide core width that finally results.

[0127] The same applies when using a photomask pattern with a positive photoresist in the exposure process. Instead of placing the tapered pattern only within the joint extension area, if the tapered pattern is placed so as to penetrate into the normal drawing area, it is possible to suppress the deviation of the waveguide core width that finally results.

[0128] When the waveguide direction of the waveguide pattern to be divided is laid out obliquely (θ≠90°) with respect to the division boundary line for each photomask, when the division location to the partial circuit pattern is a curved waveguide or a tapered waveguide, and furthermore, even if the shape of the tapered pattern is a non-linear tapered shape, the present embodiment can be applied with the same concept.

[0129] [Other Embodiments] In the above-described embodiment, the waveguide at the joint portion of the partial circuit pattern has been described on the premise of a waveguide that basically operates in a single mode (single-mode waveguide), a waveguide in which the guided light in at least the fundamental mode mainly guides. However, it is not limited to this, and a waveguide that operates in multiple modes (multi-mode waveguide) may also be used. If the taper length L is provided sufficiently slowly, that is, adiabatically, so that the mode field distribution of each mode changes, the waveguide at the joint portion may be a multi-mode waveguide, and the configuration of the above-described embodiment can be applied. Tpr If it is provided, the waveguide at the joint portion may be a multi-mode waveguide, and the configuration of the above-described embodiment can be applied.

[0130] In a multi-mode waveguide in which generally a large number of modes can exist, mode conversion between each mode easily occurs due to a slight disturbance. Therefore, the taper length L required in a waveguide in which the guided light in the fundamental mode is the main component Tpr is longer than the taper length L required in a multi-mode waveguide TprFrom the viewpoint of minimizing the area of ​​the joint extension region, it is desirable to use a waveguide that basically operates in a single mode, or at least a waveguide that mainly guides light in the fundamental mode.

[0131] [Effects of this embodiment] According to the above-described embodiment, even if there is a relative misalignment between the partial circuit patterns in the x direction perpendicular to the waveguide direction, the waveguide pattern at the joint has a gentle taper, and the center position of the waveguide changes gradually with respect to the waveguide direction. This pattern shape allows guided light in the fundamental mode to propagate while maintaining the fundamental mode and hardly being converted to a higher-order mode, thereby minimizing loss. Furthermore, even if there is a relative misalignment between the partial circuit patterns in the z direction parallel to the waveguide direction, gaps or unnecessary transverse waveguides are not generated in the waveguide at the joint, thereby minimizing loss. Thus, when an optical circuit is fabricated by joining multiple partial circuit patterns in an exposure process, even if the alignment accuracy of the partial circuit patterns in any direction is low, loss at the joint can be minimized in any channel waveguide. Additionally, an optical circuit can be provided in which the area of ​​the joint region is minimized.

[0132] According to the above-described embodiment, a desired optical circuit can be fabricated by connecting multiple partial circuit patterns in an exposure process with almost no increase in loss. This makes it possible to provide a large-scale optical circuit with low-loss optical characteristics. Furthermore, multiple types of element circuits and element circuits with multiple parameters are designed as partial circuit patterns and prepared in advance as photomasks. This makes it possible to fabricate a desired optical circuit with low-loss optical characteristics from the exposure process, thereby shortening the design process and enabling the use of standard photomasks. Furthermore, since a desired optical circuit can be fabricated by combining photomasks with different projection magnifications, a large-scale optical circuit with high performance and low-loss optical characteristics can be provided at low cost. [Example]

[0133] An example of a 16x16 matrix switch using the above-described embodiment in an optical circuit using silica-based waveguide technology is shown below. These optical circuits are fabricated on a silicon substrate using a known combination of glass film deposition technology such as flame-deposition deposition (FHD) and microfabrication technology such as reactive ion etching (RIE). Waveguides with a relative refractive index difference Δ of 2% are used, and the minimum bending radius of the curved waveguide is designed to be 1 mm.

[0134] [Example 1: Example of application to a large-scale matrix switch using a two-division mask] 18 is a diagram showing the configuration of an optical circuit according to a first embodiment of the present invention. The optical circuit according to the first embodiment is a 16×16 matrix switch 800 that can switch and connect inputs and outputs in any combination in a non-blocking manner. The 16×16 matrix switch 800 comprises 16 input waveguides 831, followed by 16 stages of switch element arrays 801 to 816, followed by 16 output waveguides 832. The switch element arrays are connected to each other by 32 inter-switch element connecting waveguides 833.

[0135] The switch element arrays 801 to 816 are each an array of 16 switch elements, each consisting of two Mach-Zehnder interferometers with variable phase shifters. The switch elements have an up-down orientation, with the up-facing switch elements and the down-facing switch elements alternately arranged in the switch element array. The switch element arrays have two layouts, A and B, depending on whether the top switch element faces up or down. The odd-numbered switch element arrays 801, 803 to 815 use the switch element array of layout A, while the even-numbered switch element arrays 802, 804 to 816 use the switch element array of layout B. The detailed configuration of the 16 × 16 matrix switch is described in Non-Patent Document 2. Unlike the configuration described in Non-Patent Document 2, in Example 1, the switch element arrays 801 to 816 are arranged in a zigzag pattern, with the input waveguide 831 and the output waveguide 832 arranged on the same side.

[0136] The size of the 16×16 matrix switch 800 is approximately 70×30 mm. When this optical circuit is fabricated using an exposure tool with a reduction ratio of 1 / 2, it is necessary to divide the optical circuit into regions of partial circuit patterns 821 and 822 and draw them due to the size constraints of the photomask. One photomask has drawn thereon partial circuit pattern 821, i.e., input waveguide 831, output waveguide 832, switch element arrays 801, 802, 807-810, 815, and 816, and switch connection waveguides 833a, 833b, 833f-833j, 833n, and 833o connecting these. The other photomask has drawn thereon partial circuit pattern 822, i.e., switch element arrays 803-806 and 811-814, and switch connection waveguides 833b-833f and 833nj-833n connecting these. Both photomasks use an exposure machine with a reduction ratio of 1 / 2, so the patterns are drawn at a magnification of 2x.

[0137] The waveguide pattern of any one of the above-described embodiments or a combination thereof is used for the joint 834 of the waveguide that straddles the partial circuit patterns 821 and 822. Specific design parameters of the waveguide pattern at the joint are W0=5 μm, W Tpr = 6 μm, taper length L Tp r = 200 μm, dW A =dW B =(W Tpr -W0) / 2.

[0138] Therefore, light guided through the fabricated 16×16 matrix switch 800 passes through four joints while being guided from the input waveguide 831 to the output waveguide 832. When a conventional waveguide pattern at the joints is used, a relative positional deviation of 0.5 μm occurs in the x direction perpendicular to the waveguiding direction between the partial circuit patterns 821 and 822, and the joints are distorted. The loss increase due to this part is 0.6 dB, which is a significant increase in loss.

[0139] On the other hand, when the waveguide pattern at the joint portion of the above-described embodiment is used, the Even if a relative positional misalignment occurs, the increase in loss due to the joint is kept to 0.008 dB or less. The number of seams in a matrix switch is roughly proportional to the number of input / output ports. For example, in a 32 x 32 matrix switch, the pattern is divided into four photomasks for drawing, resulting in nine seams. Therefore, the larger the circuit, the more significantly the loss caused by the seams can be reduced compared to conventional techniques when the waveguide pattern for the seams of this embodiment is used.

[0140] According to the first embodiment, a desired optical circuit can be fabricated by connecting a plurality of partial circuit patterns in an exposure process without incurring almost no increase in loss, and therefore a large-scale optical circuit with low-loss optical characteristics can be provided.

[0141] [Example 2: Example of using a separate mask for the switch element array] The optical circuit of Example 2 is also a 16×16 matrix switch, and the configuration of the fabricated optical circuit is the same as that of Example 1. The difference from Example 1 is that the division into partial circuit patterns is not limited to the division into regions of partial circuit patterns 821 and 822, but also includes division into switch element arrays 801 to 816.

[0142] 19A is a diagram showing a layout on a photomask in Example 2 of the present invention. Photomask 920 is patterned with a partial circuit pattern 821 of Example 1 excluding switch element arrays 801, 802, 807-810, 815, and 816, which are optical functional circuits, i.e., only waveguides for connecting the optical functional circuits. The removed portions are blank portions 901, 902, 907-910, 915, and 916, and no waveguide pattern is drawn. Photomask 930 is patterned with a partial circuit pattern 822 of Example 1 excluding switch element arrays 803-806 and 811-814. The removed portions are blank portions 903-906 and 911-914, and no waveguide pattern is drawn.

[0143] 19B is a diagram showing the layout of the switch element array on a photomask in Example 2. On photomask 940, multiple types of switch element array patterns for layouts A and B are written using different circuit characteristic parameters. For example, three types of switch element array patterns for layout A are written (941, 943, 945), and three types of switch element array patterns for layout B are written (942, 944, 946). Each of photomasks 920, 930, and 940 uses an exposure machine with a reduction ratio of 1 / 2, so the patterns are written at a magnification ratio of 2, as in Example 1.

[0144] The waveguide patterns of any one of the above-described embodiments or a combination thereof are used for the joints of the waveguides spanning the circuit patterns of the photomasks 920 and 930 and the joints of the waveguides spanning the blank portions 901 to 916 and the switch element array patterns 941 to 946. The specific design parameters of the waveguide patterns of the joints are the same as those of the first embodiment.

[0145] When actually fabricating an optical circuit, exposure is performed by combining photomasks 920 and 930 with switch element array patterns (e.g., 943 and 944) of layouts A and B with appropriate circuit characteristic parameters. By being able to select an appropriate combination in this way, the number of photomasks to be prepared when fabricating optical functional circuits with multiple specifications can be reduced.

[0146] For example, the basic element of this matrix switch is a Mach-Zehnder interferometer with a variable phase shifter as described above, but its design differs depending on the operating wavelength band (S-band: 1460 to 1530 nm, C-band: 1530 to 1565 nm, L-band: 1565 to 1625 nm). In Example 1, when fabricating matrix switches for the S-band, C-band, and L-band, it is necessary to prepare individual photomasks for each band, requiring a total of six photomasks. On the other hand, in Example 2, three types of circuit characteristic patterns are prepared on the photomask 940, and a selection can be made from these, so only three photomasks are required.

[0147] In addition to differences in matrix switch specifications, multiple designs may also be prepared for manufacturing reasons. For example, if the thickness or refractive index of the core film has a distribution across the wafer, and you want to make subtle changes to the design values ​​depending on the circuit position on the wafer, the total number of photomasks required can be kept small.

[0148] In Example 2, light guided through the fabricated 16x16 matrix switch passes through 36 joints while guiding from the input waveguide to the output waveguide. When a conventional waveguide pattern at the joints is used, the relative position of each photomask is adjusted to 0.5 μm. If a leak occurs, in the worst case, the increase in loss due to the joint will be 5.4 dB. On the other hand, when the waveguide pattern of the joint portion of the embodiment described above is used with the same design parameters as in Example 1, a relative positional deviation of 0 to 0.5 μm is observed. Even if it does occur, the increase in loss due to the joint is less than 0.072 dB in the worst case. The amount of heat can be suppressed and remains at a sufficiently acceptable value.

[0149] In this way, multiple types of element circuits, optical functional circuits with multiple parameters, etc. are designed as partial circuit patterns and prepared in advance as photomasks, which allows the desired optical circuits with low-loss optical characteristics to be fabricated from the exposure process, shortening the design process and enabling the use of standard photomasks.

[0150] [Example 3: Example of combining photomasks for life-size exposure and reduction exposure] The optical circuit of Example 3 is also a 16×16 matrix switch, and the configuration of the fabricated optical circuit is the same as that of Example 1. Also, the division into partial circuit patterns is not limited to the division into regions of partial circuit patterns 821 and 822, but also includes division of the switch element arrays 801 to 816, which are optical functional circuits, as in Example 2. Example 3 differs from Example 2 in that the photomask reduction ratios are different for the waveguide patterns of the switch element arrays 801 to 816 and the waveguide pattern in which only waveguides for connecting optical functional circuits are drawn.

[0151] 20 is a diagram showing a layout on a photomask in Example 3 of the present invention. A pattern obtained by excluding switch element arrays 801 to 816 from pattern 800 of the entire 16×16 matrix switch of Example 1 is drawn on photomask 950 at a reduction ratio of 1:1. The removed portions become blank portions 961 to 976, and no waveguide pattern is drawn on them. In Example 3, photomask 940 shown in FIG. 19B of Example 2 is used in combination with photomask 950.

[0152] The photomask 950 is used to expose the substrate using a 1:1 exposure machine, and the photomask 940 is used to expose the substrate using a 1:2 reduction exposure machine. The waveguide patterns in any one of the above-described embodiments or a combination thereof are used for the joints of the waveguides that straddle the blank portions 961-976 of the photomask 950 and the switch element array patterns 941-946. Specific design parameters for the waveguide patterns in the joints are the same as those in Example 1.

[0153] In the 16×16 matrix switch 800, the switch element arrays 801 to 816, each including a Mach-Zehnder interferometer, must be fabricated with high precision to obtain the desired interference characteristics. On the other hand, the input / output waveguides and the waveguides connecting the switch elements do not require such high precision. Therefore, a reduction exposure machine capable of high-precision pattern transfer is used for the switch element arrays 801 to 816, while a life-size exposure machine is used for the input / output waveguides and the waveguides connecting the switch elements. In this way, by changing the photomask drawing magnification depending on the required precision, the number of photomasks required, which was three in total in Example 2, can be reduced to two in Example 3.

[0154] In Example 3, different exposure machines are used depending on the photomask, and the projection reduction ratios are also different, so it is highly likely that the effective exposure dose will differ for each photomask. However, as described above, the joints of the waveguides in this embodiment not only suppress loss at the joints when there is a relative positional misalignment between the photomasks during exposure, but also suppress loss at the joints even when the exposure doses for the photomasks are different.

[0155] In this way, the desired optical circuit can be fabricated by combining photomasks with different projection magnifications, making it possible to provide large-scale optical circuits with high performance and low-loss optical characteristics at low cost.

[0156] In Examples 1 to 3, a matrix switch was used as an example of an optical circuit. However, the present invention is not limited to this, and can also be applied to optical switches with other configurations, such as a splitter switch (also called a multicast switch) described in Non-Patent Document 3. Furthermore, the present invention may also be applied to optical circuits including a wavelength multiplexer / demultiplexer such as an arrayed waveguide grating, or optical circuits including an optical modulator and demodulator.

[0157] [Example 4: Example of preparing multiple mask patterns on one mask substrate] In Examples 1 to 3, the divided partial circuit patterns are written on a plurality of separate photomask substrates, but the present invention is not limited to this and the divided partial circuit patterns may be written on the same photomask substrate.

[0158] 21 is a diagram showing a conceptual configuration of an optical circuit according to a fourth embodiment of the present invention. An optical circuit 850 according to the fourth embodiment is shown as a conceptual configuration. The optical circuit 850 comprises an input waveguide 861, N=4 stages of circuit element blocks 851 to 854, and an output waveguide 862. The circuit element blocks, which are optical functional circuits, are connected to each other by inter-element connecting waveguides 863a to 863c.

[0159] It is assumed that various circuit element blocks are combined and incorporated into each circuit element block. For example, an optical circuit can be considered in which circuit element block A is incorporated into all of circuit element blocks 851 to 854. It is also possible to consider an optical circuit in which circuit element blocks A, B, C, and D, each having a different function, are incorporated into circuit element blocks 851 to 854. If there are four types M of circuit element blocks, then MN=4 4 =256 possible combinations.

[0160] 22 is a diagram showing an example of a layout on a photomask in Example 4. An upper half 980a of the photomask 980 is patterned with only the framework of the optical circuit, excluding the circuit element blocks 851 to 854 from the optical circuit 850. The removed portions become blank sections 981 to 984, and no waveguide pattern is drawn therein. A lower half 980b of the photomask 980 is patterned with element block patterns A, B, C, and D for the circuit element blocks. The joints of the waveguides spanning the blank sections 981 to 984 and the element block patterns A, B, C, and D use any one of the waveguide patterns in the above-described embodiments or a combination thereof. The specific design parameters of the waveguide patterns in the joints are the same as those in Example 1.

[0161] As described above, all 256 optical circuits can be fabricated with a single photomask by using such a photomask 980 and an optical circuit framework pattern and any combination of element block patterns. In this way, the divided partial circuit patterns can be written on the same photomask substrate, and any of the above-described embodiments can be applied.

[0162] In Examples 1 to 4, the division into the multiple partial circuit patterns was at the waveguide portion between the interferometers, but it may also be at the waveguide portion inside the interferometer. However, division inside the interferometer not only increases loss at the division portion but also causes deviation in the optical path length, so it is desirable to avoid this if possible.

Claims

1. A photomask on which a waveguide pattern of an optical circuit is drawn in a divided manner into a plurality of regions, a waveguide pattern for drawing a joint region in which the waveguide width changes toward the outer periphery in order to connect the divided and drawn waveguides; The two photomasks are characterized in that the waveguide widths of the waveguide patterns change so that the field distribution of the propagation mode of light propagating through the waveguides changes adiabatically with propagation through the joint region, and the two photomasks are overlapped and exposed in a positional relationship such that the joint regions are adjacent via their ends, thereby connecting the waveguides.

2. 2. The photomask according to claim 1, wherein the waveguide pattern has a width that varies so as to reduce overlap in the joint region.

3. 2. The photomask according to claim 1, wherein the waveguide pattern is a linear tapered pattern in which the width of the waveguide changes uniformly toward the outer periphery, or a nonlinear tapered pattern in which the width changes nonlinearly toward the outer periphery.

4. 4. The photomask according to claim 1, wherein the width of the waveguide in the joint region exposed by the two photomasks in an overlapping state differs depending on the amount of exposure, compared with the width of the waveguide in other regions.

5. 5. An optical waveguide manufactured by using the photomask according to claim 1, wherein the optical waveguide is manufactured by exposing two of the joint regions in an overlapping manner.

6. An optical circuit including the optical waveguide according to claim 5, a first photomask having a waveguide pattern of a plurality of optical functional circuits and a second photomask having a waveguide pattern of a waveguide connected to each of the optical functional circuits; the waveguide patterns of the respective optical functional circuits have different circuit characteristic parameters or different functions; An optical circuit fabricated by combining the second photomask with the first photomask of an optical functional circuit selected from the plurality of optical functional circuits.

7. 7. The optical circuit according to claim 6, wherein the drawing magnification of the first photomask is different from the drawing magnification of the second photomask.

8. A method for manufacturing an optical waveguide, in which an optical waveguide is manufactured using a photomask on which a waveguide pattern of an optical circuit is divided into a plurality of regions and drawn, comprising the steps of: the photomask includes a waveguide pattern for drawing a joint region where the waveguide width changes toward an outer periphery in order to connect the divided and drawn waveguides, a method for manufacturing an optical waveguide, characterized in that the two photomasks change the waveguide width of the waveguide pattern so that the field distribution of the propagation mode of light propagating through the waveguide changes adiabatically with propagation in the joint region, and the two photomasks are superimposed and exposed in a positional relationship in which the joint regions are adjacent to each other via their ends, thereby manufacturing the waveguide.

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