Cutting equipment and jigs

Abstract

To provide a cutting device that facilitates arranging a rotational angle sensor of an unbalance detector at a detection position.SOLUTION: A cutting device used for cutting work of a workpiece includes: a chuck table for holding the workpiece; a spindle having a mount attached to a tip portion thereof, the mount allowing an annular cutting blade to be fixed thereto; a blade cover that covers a part of the cutting blade fixed to the mount; and an unbalance detector for detecting unbalance during rotation caused by a misalignment between a rotary shaft of a spindle and the center of gravity of the cutting blade. The unbalance detector includes a rotational angle sensor for detecting a change in angle caused by rotation of the spindle. The rotational angle sensor is installed on the blade cover to be thereby arranged at a detection position where the sensor can detect a change in angle caused by rotation of the spindle.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a cutting device used for cutting a workpiece and a jig used in the cutting device. [Background technology]

[0002] Device chips equipped with devices such as electronic circuits are essential components of electronic devices such as mobile phones and personal computers. Device chips are obtained, for example, by dividing the front surface of a wafer made of a semiconductor material such as silicon into multiple regions along planned division lines (streets), forming devices in each region, and then dividing the wafer along these planned division lines.

[0003] When dividing a plate-shaped workpiece, such as a wafer, into small pieces such as device chips, a cutting device is used, for example, which has a circular grinding wheel (a processing tool) called a cutting blade attached to a spindle. The cutting blade is rotated at high speed and cuts into the workpiece along the intended division line while supplying a liquid such as pure water, thereby cutting the workpiece and dividing it into multiple small pieces (see, for example, Patent Document 1).

[0004] In the cutting device used to cut a plate-shaped workpiece, the cutting blade is generally attached to the spindle by inserting a cylindrical boss of a blade mount fixed to the spindle into a central hole in the cutting blade. Therefore, the diameter of the hole in the cutting blade is slightly larger than the diameter of the boss so that the boss can be inserted into the hole in the cutting blade.

[0005] However, when the boss of the blade mount is inserted into the hole in the cutting blade, a small gap is created between the cutting blade and the boss. This causes the center of gravity of the cutting blade to be slightly offset from the rotational axis (axial center) of the spindle, which can cause the cutting blade to vibrate when the spindle is rotated at high speed. Cutting blade vibration can also lead to defects such as chipping in the workpiece.

[0006] To solve this problem, for example, a cutting machine equipped with an imbalance detector that can detect imbalance during rotation caused by a misalignment between the rotation axis of the spindle and the center of gravity of the cutting blade has been proposed (see, for example, Patent Document 2). By adjusting the weight balance of each part based on the detection results of the imbalance detector, it is possible to reduce vibration of the cutting blade and suppress the occurrence of defects in the cutting process. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 3-198363 [Patent Document 2] Japanese Patent Application Laid-Open No. 2001-129743 Summary of the Invention [Problem to be solved by the invention]

[0008] The unbalance detector typically includes a vibration sensor that detects vibrations of the spindle and cutting blade, and a rotation angle sensor that detects changes in the angle of the spindle as it rotates. The vibration sensor is attached, for example, to the bottom of a housing (spindle housing) that houses the spindle.

[0009] On the other hand, the rotation angle sensor is attached, for example, with a jig to the top surface of the chuck table that holds the workpiece, and the operator adjusts the position of the chuck table so that the rotation angle sensor is located at a detection position (typically a position in front of the cutting blade) where it can detect changes in the spindle angle. However, this work is cumbersome, and there has been a demand for an easier way to position the rotation angle sensor at the detection position.

[0010] The present invention has been made in consideration of such problems, and its object is to provide a cutting device that can easily position the rotation angle sensor of an unbalance detector at the detection position, and a jig that can easily position the rotation angle sensor of an unbalance detector at the detection position. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a cutting device used for cutting a workpiece, the cutting device comprising: a chuck table for holding the workpiece; a spindle having a mount attached to its tip end to which an annular cutting blade can be fixed; a blade cover for covering a part of the cutting blade fixed to the mount; and an imbalance detector for detecting imbalance during rotation caused by a misalignment between the rotation axis of the spindle and the center of gravity of the cutting blade. The change in the rotation angle of the spindle around the rotation axis due to Rotation angle sensor that detects and vibration sensors, The rotation angle sensor is attached to the blade cover to detect the rotation of the spindle. The change in the rotation angle of the spindle around the rotation axis due to A cutting device is provided that is positioned at a detection position where the cutting device can detect the cutting force.

[0012] According to another aspect of the present invention, there is provided a jig used in positioning, in a predetermined position, a rotation angle sensor of an imbalance detector that detects imbalance during rotation caused by a misalignment between the rotation axis of a spindle provided in a cutting device and the center of gravity of an annular cutting blade fixed to a mount attached to the tip of the spindle, the jig comprising: a base attached to a blade cover that covers a part of the cutting blade when fixed to the mount; a holding part that holds the rotation angle sensor; and a connecting part that connects the base and the holding part so that, when the base is attached to the blade cover, the holding part is positioned outward of the cutting blade in the radial direction of the cutting blade. When the base is attached to the blade cover, the rotation angle sensor of the spindle is detected. The change in the rotation angle of the spindle around the rotation axis due to A jig is provided in which the rotation angle sensor is disposed at a detection position where the rotation angle sensor can detect the rotation angle.

[0013] Preferably, the detection position is a position facing the outer surface of a fixing nut that fixes the cutting blade to the mount, a position facing the outer surface of a fixing flange that clamps the cutting blade between the mount and the nut, or a position facing the outer surface of the cutting blade.

[0014] Also, preferably, the connection portion connects the holding portion to the base portion in a rotatable manner so that the position of the rotation angle sensor held in the holding portion can be adjusted in a direction parallel to the rotation axis of the spindle. [Effects of the Invention]

[0015] According to a cutting device according to one aspect of the present invention and a jig according to another aspect, the rotation angle sensor of the unbalance detector is attached to the blade cover, whose positional relationship with the spindle and cutting blade hardly changes. This eliminates the need for complicated adjustments that are required when attaching a rotation angle sensor to a chuck table or other structure whose positional relationship with the spindle and cutting blade changes. This allows the rotation angle sensor of the unbalance detector to be easily positioned at the detection position. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a perspective view schematically showing the structure of a cutting device. [Figure 2] FIG. 2 is an exploded perspective view schematically showing the structure of the cutting unit. [Figure 3] FIG. 3 is a side view schematically showing the structure of the blade cover. [Figure 4] FIG. 4 is a perspective view schematically showing the structure of the blade cover. [Figure 5] FIG. 5 is a perspective view schematically showing the structure of the jig. [Figure 6] FIG. 6 is a perspective view that schematically shows how some parts of the blade cover are removed. [Figure 7] FIG. 7 is a perspective view schematically showing how a jig is attached to a blade cover. [Figure 8] FIG. 8 is a side view showing a state in which the rotation angle sensor is placed at the detection position. [Figure 9] FIG. 9 is a rear view showing the state in which the rotation angle sensor is placed at the detection position. DETAILED DESCRIPTION OF THE INVENTION

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view schematically showing the structure of a cutting device 2 according to this embodiment. Note that the X-axis direction (processing feed direction, front-rear direction), Y-axis direction (indexing feed direction, left-right direction), and Z-axis direction (cutting feed direction, up-down direction) used in the following description are perpendicular to one another, and the x-axis direction, y-axis direction, and z-axis direction are perpendicular to one another.

[0018] As shown in Fig. 1, the cutting device 2 includes a base 4 that supports various components. An opening 4a is formed in a corner of the upper surface of the base 4, and a cassette table 6 that is raised and lowered by a lifting mechanism (not shown) is disposed within this opening 4a. A cassette 8 that can accommodate a plate-shaped workpiece 11 is placed on the upper surface of the cassette table 6. For ease of explanation, only the outline of the cassette 8 is shown in Fig. 1.

[0019] The workpiece 11 is typically a disk-shaped wafer made of a semiconductor such as silicon (Si). The surface (top surface in FIG. 1) of the workpiece 11 is divided into a plurality of small regions by a plurality of mutually intersecting division lines (streets), and a device such as an IC (Integrated Circuit) is formed in each small region.

[0020] A tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached to the back surface (the lower surface in FIG. 1 ) of the workpiece 11. An annular frame 15 is fixed to the outer periphery of the tape 13 so as to surround the workpiece 11. In this way, the workpiece 11 is accommodated in the cassette 8 while being supported by the frame 15 via the tape 13.

[0021] In this embodiment, the workpiece 11 is a disk-shaped wafer made of a semiconductor such as silicon, but there are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate made of other semiconductors, ceramics, resin, metal, etc. can also be used as the workpiece 11. Similarly, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of devices. The workpiece 11 does not have to have any devices formed on it.

[0022] An opening 4b that is long in the X-axis direction is formed on the side of the cassette table 6. A ball screw type X-axis movement mechanism (processing feed unit) 10 is disposed inside the opening 4b. This X-axis movement mechanism 10 includes a rotation drive source (not shown) such as a motor connected to the ball screw, and an X-axis movement table (not shown), and moves this X-axis movement table along the X-axis direction.

[0023] The top of the X-axis moving table is covered by a table cover 10a. In addition, accordion-shaped dustproof and drip-proof covers 10b that can expand and contract in accordance with the movement of the X-axis moving table (table cover 10a) are attached to the front and rear of the table cover 10a. A chuck table 12 that holds a workpiece 11 is arranged above this X-axis moving table so that it is exposed from the table cover 10a.

[0024] The chuck table 12 is connected to a rotary drive source (not shown) such as a motor, and rotates around a rotation axis that is roughly parallel to the Z-axis direction. The chuck table 12 is also moved in the X-axis direction together with the X-axis moving table by the X-axis moving mechanism 10 described above (processing feed).

[0025] The chuck table 12 includes a disk-shaped frame made of a metal such as stainless steel. A recess that is circular in plan view is formed on the top surface of the frame. A disk-shaped holding plate corresponding to the shape of the recess is fitted into this recess. Four clamps 14 are arranged around the frame to secure an annular frame 15 that supports the workpiece 11.

[0026] The holding plate is formed to be porous using a material such as ceramics, and its upper surface functions as holding surface 12a that holds workpiece 11. Note that holding surface 12a is formed so as to be approximately parallel to the X-axis and Y-axis directions when the holding plate is fitted into the recess.

[0027] A suction source (not shown) is connected to the bottom of the recess via a flow path (not shown) and a valve (not shown). Therefore, when the valve is opened, negative pressure from the suction source acts on the holding surface 12a through the flow path. As the suction source, for example, a vacuum pump or the like that combines an air supply source and an ejector can be used. However, a rotary pump or the like can also be used as the suction source.

[0028] Above the opening 4b, a transport unit (not shown) is disposed for transporting the above-mentioned workpiece 11 (frame 15) to the chuck table 12, etc. The workpiece 11 transported by the transport unit is placed on the holding surface 12a of the chuck table 12 so that the front surface side is exposed upward, for example.

[0029] A cantilevered support structure 16 is disposed adjacent to the opening 4b. A Y-axis / Z-axis movement mechanism (indexing feed unit, cutting feed unit) 18 is provided on the upper part of the support structure 16. The Y-axis / Z-axis movement mechanism 18 is disposed on the front (surface) of the support structure 16 and includes a pair of Y-axis guide rails 20 that are generally parallel to the Y-axis direction.

[0030] A Y-axis moving plate 22 that constitutes the Y-axis / Z-axis moving mechanism 18 is slidably attached to the Y-axis guide rail 20. A nut portion (not shown) that constitutes a ball screw is provided on the rear side (back surface side) of the Y-axis moving plate 22, and a screw shaft 24 that is generally parallel to the Y-axis guide rail 20 is rotatably connected to this nut portion.

[0031] A rotary drive source (not shown), such as a motor, is connected to one end of the screw shaft 24. By rotating the screw shaft 24 with the rotary drive source, the Y-axis moving plate 22 moves along the Y-axis guide rails 20. A pair of Z-axis guide rails 26 that are generally parallel to the Z-axis direction are provided on the front (surface) of the Y-axis moving plate 22. A Z-axis moving plate 28 is attached to the Z-axis guide rails 26 in a slidable manner.

[0032] A nut portion (not shown) constituting a ball screw is provided on the rear side (back surface side) of Z-axis moving plate 28, and a screw shaft 30 that is generally parallel to Z-axis guide rail 26 is rotatably coupled to this nut portion. A rotation drive source 32 such as a motor is connected to one end of screw shaft 30. By rotating screw shaft 30 with rotation drive source 32, Z-axis moving plate 28 moves along Z-axis guide rail 26.

[0033] A cutting unit 34 and an imaging unit (camera) 36 are fixed to the lower part of the Z-axis moving plate 28. Therefore, when the Y-axis moving plate 22 is moved along the Y-axis guide rail 20, the cutting unit 34 and the imaging unit 36 ​​move along the Y-axis direction (indexing feed), and when the Z-axis moving plate 28 is moved along the Z-axis guide rail 26, the cutting unit 34 and the imaging unit 36 ​​move along the Z-axis direction (cutting feed).

[0034] An opening 4c is formed at a position opposite opening 4b from opening 4a. A cleaning unit 38 is disposed within opening 4c for cleaning workpiece 11 and the like after cutting. A control unit (not shown) is connected to components such as X-axis movement mechanism 10, transport unit, Y-axis / Z-axis movement mechanism 18, cutting unit 34, imaging unit 36, and cleaning unit 38, and the operation of each component is controlled by this control unit.

[0035] The control unit is configured by a computer including, for example, a processing device such as a central processing unit (CPU), a main storage device such as a dynamic random access memory (DRAM), and an auxiliary storage device such as a hard disk drive or flash memory. The functions of the control unit are realized by operating the processing device and the like in accordance with software stored in the auxiliary storage device. However, the control unit may also be realized by hardware alone.

[0036] 2 is an exploded perspective view schematically illustrating the structure of the cutting unit 34. The cutting unit 34 includes a cylindrical housing (spindle housing) 40. The housing 40 accommodates a spindle 42 with its rotation axis (axial center) approximately parallel to the Y-axis direction. The tip (one end) of the spindle 42 is exposed to the outside of the housing 40. A threaded hole 42a is provided in the tip surface of the tip of the spindle 42. A rotation drive source (not shown), such as a motor, is connected to the base end (other end) of the spindle 42.

[0037] An annular cutting blade 46 is fixed to the tip of the spindle 42 via a mount (blade mount) 44. The mount 44 includes a disk-shaped flange portion 48 that supports the cutting blade 46, and a cylindrical boss portion 50 that protrudes from the center of a circular surface (one surface) 48a of the flange portion 48.

[0038] The mount 44 has a hole 44a formed therein, which penetrates the center of the flange portion 48 from the front surface 48a side to the back surface (the other surface) 48b side, and penetrates the center of the boss portion 50 from the tip 50a side to the base end side (the flange portion 48 side). The tip portion of the spindle 42 is inserted into the hole 44a from the back surface 48b side of the flange portion 48, and the mount 44 is attached to the spindle 42 from the back surface 48b side of the flange portion 48.

[0039] An annular receiving portion is provided inside the hole 44a to receive the head of the screw 52. Therefore, by inserting the screw 52 into the hole 44a from the tip 50a side of the boss portion 50 and tightening the screw 52 into the screw hole 42a of the spindle 42 through this hole 44a, the mount 44 is fixed to the tip portion of the spindle 42.

[0040] An annular protrusion 48c that protrudes slightly in a direction perpendicular to the surface 48a is provided on the outer periphery of the flange portion 48 on the surface 48a side. A tip surface 48d of the protrusion 48c is formed to be generally flat. A screw thread is provided in the region of the outer periphery 50b of the boss portion 50 on the tip 50a side.

[0041] The cutting blade 46 is a so-called hub-type cutting blade that integrally includes a truncated cone-shaped base 54 made of a metal such as aluminum and an annular cutting edge 56 provided along the outer periphery of the base 54. A hole 46a that penetrates the cutting blade 46 (base 54) in the thickness direction is provided in the center of the cutting blade 46 (center of the base 54). When attaching the cutting blade 46 to the mount 44, a boss portion 50 is inserted into this hole 46a. The diameter of the hole 46a is slightly larger than the diameter of the boss portion 50.

[0042] The base 54 has a curved surface (first surface) 54a corresponding to the side surface of the truncated cone, and a flat surface (second surface) (not shown) corresponding to the bottom surface of the truncated cone and located approximately opposite the curved surface 54a. When attaching the cutting blade 46 to the mount 44, the boss portion 50 is inserted into the hole 46a so that the flat surface of the base 54 contacts the tip surface 48d of the flange portion 48. The cutting blade 56 has a structure in which abrasive grains made of, for example, diamond or the like are fixed with a binder containing a metal such as nickel.

[0043] When fixing the cutting blade 46 to the mount 44, the boss 50 is inserted into the hole 46a of the cutting blade 46, and then the boss 50 is inserted into the circular hole 58a provided in the fixing nut 58. The inner circumferential surface of the hole 58a is provided with threads that correspond to the threads of the boss 50.

[0044] Then, the boss portion 50 and the fixing nut 58 are rotated relative to each other, and the fixing nut 58 is tightened onto the boss portion 50. As a result, the fixing nut 58 comes into contact with the curved surface 54a of the base 54 of the cutting blade 46, and the cutting blade 46 is clamped between the mount 44 and the fixing nut 58. In other words, the cutting blade 46 is fixed to the mount 44.

[0045] As shown in Fig. 1, a blade cover 60 that covers the outer periphery of the cutting blade 46 excluding the lower end thereof (i.e., a part of the cutting blade 46) is disposed around the cutting blade 46 when it is fixed to the mount 44. Fig. 3 is a side view that schematically shows the structure of the blade cover 60, and Fig. 4 is a perspective view that schematically shows the structure of the blade cover 60.

[0046] The blade cover 60 includes a fixed part 62 fixed to the housing 40 and a movable part 64 movable relative to the fixed part 62. As shown in Fig. 4, a supply port 62b capable of supplying a liquid (cutting fluid) such as pure water is provided at the lower end of an inner wall surface 62a of the fixed part 62 that faces the cutting blade 46. A liquid supply source is connected to this supply port 62b via a pipe (not shown) or the like, and the liquid is supplied to the cutting blade 46 through the supply port 62b.

[0047] The movable part 64 is connected to the fixed part 62 via a movement mechanism (not shown), such as an air cylinder, and slides along the X-axis direction by the power of this movement mechanism. When the movable part 64 is brought close to the fixed part 62, the outer periphery of the cutting blade 46, excluding the lower end, is covered by the blade cover 60. On the other hand, when the movable part 64 is moved away from the fixed part 62, operations such as replacing the cutting blade 46 become easier.

[0048] The movable part 64 includes a first part 66 on the housing 40 side and a second part 68 on the opposite side from the housing 40. A first shower nozzle 70 is provided at the bottom end of the first part 66, and a second shower nozzle 72 is provided at the bottom end of the second part 68. The lower part of the cutting blade 46 (cutting edge 56) is sandwiched between the first shower nozzle 70 and the second shower nozzle 72.

[0049] A supply source of the liquid described above is connected via piping (not shown) to the base ends of the first shower nozzle 70 and the second shower nozzle 72. Multiple slits (not shown) are formed in the first shower nozzle 70 and the second shower nozzle 72 at positions facing the cutting blade 46, and the liquid is supplied to the cutting blade 46 and workpiece 11 through these multiple slits.

[0050] The second part 68 is fixed to the first part 66 by a fixing screw 74. Therefore, by loosening the screw 74 and releasing the fixation of the second part 68 to the first part 66, it becomes possible to remove the second part 68 from the first part 66. In the cutting device 2 of this embodiment, a rotation angle sensor 78 (see FIG. 8) of an imbalance detector 76 (see FIG. 8) that detects imbalance during rotation caused by a misalignment between the rotation axis of the spindle 42 and the center of gravity of the cutting blade 46 is attached to the blade cover 60 configured in this manner.

[0051] The unbalance detector 76 is equipped with a vibration sensor (not shown) for detecting vibrations of the spindle 42 and cutting blade 46, in addition to the rotation angle sensor 78, and is connected to the control unit described above. The rotation angle sensor 78 is typically a high-speed camera or the like, and detects the rotation period and angle of the spindle 42 from the state of its field of view, which repeatedly changes as the spindle 42 rotates.

[0052] The vibration sensor is formed, for example, by a piezoelectric element or the like, and is attached to the housing 40. The unbalance detector 76 configured in this manner detects imbalance during rotation caused by a misalignment between the rotation axis of the spindle 42 and the center of gravity of the cutting blade 46, based on the correlation between the rotation period and rotation angle of the spindle 42 detected by the rotation angle sensor 78 and the vibrations of the spindle 42 and cutting blade 46 detected by the vibration sensor.

[0053] 5 is a perspective view that schematically shows the structure of a jig (mounting jig) 80 used to mount the rotation angle sensor 78 to the blade cover 60. This jig 80 is used by attaching it to the first part 66 that constitutes the movable part 64 of the blade cover 60, with the second part 68 removed from the first part 66.

[0054] 5, the jig 80 includes a base 82 formed in a rectangular pillar shape. A slot 82a is provided in a first side surface of the base 82, penetrating the base 82 in a direction from the first side surface toward a second side surface on the opposite side (y-axis direction). The length of the slot 82a in the direction from the bottom surface to the top surface of the base 82 (z-axis direction) is longer than the length of the slot 82a in the direction from the back surface to the front surface of the base 82 (x-axis direction).

[0055] A screw 84 is inserted into the elongated hole 82a, and the base 82 is attached to the first part 66 of the blade cover 60 by this screw 84. By changing the position (position in the z-axis direction) of the screw 84 in the elongated hole 82a, the position (position in the z-axis direction) of the base 82 relative to the blade cover 60 (first part 66) and the like can be adjusted.

[0056] A connecting portion 86 is provided on the underside of the base 82. The connecting portion 86 includes a plate-shaped fixed portion 86a fixed to the base 82 and a cylindrical shaft portion 86b protruding from the fixed portion 86a toward the rear side. The axis of the shaft portion 86b is generally parallel to the x-axis direction. A holding portion 88 capable of holding the rotation angle sensor 78 is connected to this shaft portion 86b.

[0057] The holding part 88 includes a first member 90 having a plate-shaped bearing part and a rectangular pillar-shaped grip part connected to the end of the bearing part. The bearing part of the first member 90 is provided with a hole 90a into which the shaft part 86b can be inserted, and the first member 90 is connected to the connecting part 86 by inserting the shaft part 86b into the hole 90a in the bearing part. Furthermore, with the shaft part 86b inserted into the hole 90a in the bearing part, the first member 90 can rotate around the axis of the shaft part 86b.

[0058] A second member 92, which is formed in the same rectangular column shape as the gripping portion of the first member 90, is fixed to the gripping portion of the first member 90. Specifically, the second member 92 is provided with a hole 92a into which a screw 94 can be inserted, and the second member 92 is fixed to the first member 90 by this screw 94. A groove 90b that matches the shape of the rotation angle sensor 78 is formed on the side of the gripping portion of the first member 90 that faces the second member 92.

[0059] Additionally, a groove 92b that matches the shape of the rotation angle sensor 78 is formed on the side of the second member 92 that faces the gripping portion of the first member 90. The groove 90b of the first member 90 and the groove 92b of the second member 92 are arranged to face each other, and the rotation angle sensor 78 is held by the holding portion 88 by being inserted into a cylindrical space (gap) defined by the groove 90b and the groove 92b.

[0060] Fig. 6 is a perspective view that schematically shows how the second part 68 of the blade cover 60 is removed in order to attach the jig 80 to the blade cover 60, and Fig. 7 is a perspective view that schematically shows how the jig 80 is attached to the blade cover 60. As described above, the second part 68 can be removed from the first part 66 by loosening the fixing screws 74 and releasing the second part 68 from the first part 66.

[0061] As shown in Fig. 6, when the second part 68 is removed from the first part 66, a screw hole 66b is exposed in a side surface 66a of the first part 66 facing the second part 68. As shown in Fig. 7, the base 82 of the jig 80 can be attached to the blade cover 60 by inserting a screw 84 into this screw hole 66b and tightening it.

[0062] 5 are oriented so that the x-axis direction, y-axis direction, and z-axis direction correspond to the x-axis direction, y-axis direction, and z-axis direction, respectively. As a result, the holding portion 88 of the jig 80 is positioned outward of the cutting blade 46 in the radial direction of the cutting blade 46. In this way, the connecting portion 86 connects the base 82 and the holding portion 88 such that, with the base 82 attached to the blade cover 60, the holding portion 88 is positioned outward of the cutting blade 46 in the radial direction of the cutting blade 46.

[0063] After attaching the jig 80 to the blade cover 60, the rotation angle sensor 78 of the unbalance detector 76 is held by the jig 80, and the rotation angle sensor 78 is disposed at a detection position where it can detect changes in angle associated with the rotation of the spindle 42. Fig. 8 is a side view showing the rotation angle sensor 78 disposed at the detection position, and Fig. 9 is a rear view showing the rotation angle sensor 78 disposed at the detection position.

[0064] Specifically, first, the rotation angle sensor 78 is inserted into the cylindrical space defined by the grooves 90b and 92b of the holder 88. After the rotation angle sensor 78 has been inserted into the space defined by the grooves 90b and 92b, the screw 94 can be sufficiently tightened to reduce the distance between the first member 90 and the second member 92. This allows the first member 90 and the second member 92 to tightly grip and securely hold the rotation angle sensor 78.

[0065] After the rotation angle sensor 78 is held by the holding portion 88, for example, the holding portion 88 is rotated around the shaft portion 86b of the connecting portion 86 to adjust the position of the rotation angle sensor 78 held by the holding portion 88 in a direction parallel to the rotation axis of the spindle 42. In this way, the connecting portion 86 connects the holding portion 88 to the base portion 82 in a rotatable state so that the position of the rotation angle sensor 78 held by the holding portion 88 can be adjusted in a direction parallel to the rotation axis of the spindle 42.

[0066] By following this procedure, the rotation angle sensor 78 can be easily disposed at the detection position. In this embodiment, as shown in Figures 8 and 9, the detection position at which the rotation angle sensor 78 is disposed is a position facing the outer peripheral surface of the fixing nut 58 that fixes the cutting blade 46 to the mount 44, but the detection position may be any position that can appropriately detect changes in angle that occur with the rotation of the spindle 42. For example, the detection position may be a position facing the outer peripheral surface of the cutting blade 46 (base 54 or cutting edge 56).

[0067] As described above, with the cutting device 2 and jig 80 according to this embodiment, the rotation angle sensor 78 of the unbalance detector 76 is attached to the blade cover 60, whose positional relationship with the spindle 42 and cutting blade 46 hardly changes. This eliminates the need for complicated adjustment work, which is required when attaching the rotation angle sensor 78 to the chuck table 12 or other structures whose positional relationship with the spindle 42 and cutting blade 46 changes. This allows the rotation angle sensor 78 of the unbalance detector 76 to be easily positioned at the detection position.

[0068] The present invention is not limited to the above-described embodiment and can be implemented with various modifications. For example, in the above-described embodiment, the jig 80 is attached to the blade cover 60, and then the rotation angle sensor 78 is held by the holder 88. However, the jig 80 may be attached to the blade cover 60 with the rotation angle sensor 78 held by the holder 88.

[0069] In the above-described embodiment, the holding portion 88 is connected to the first member 90 and the second member 91. 2 Materials 92 However, the holding portion of the present invention is only required to be configured so as to be able to hold at least the rotation angle sensor 78. For example, the holding portion may be configured with only one member.

[0070] Furthermore, in the above-described embodiment, a cutting device 2 is described that uses a so-called hub-type cutting blade 46 that integrally comprises a base 54 and an annular cutting edge 56 provided along the outer periphery of the base 54, but the present invention can also be applied to a cutting device that uses a so-called washer-type cutting blade that is composed only of an annular cutting edge.

[0071] In a cutting device that uses this washer-type cutting blade, the cutting blade is fixed so that it is sandwiched between a mount similar to the above-mentioned mount 44 and a disk-shaped fixing flange with a circular hole in the center. In this case, the detection position of the rotation angle sensor 78 may be set at a position facing the outer circumferential surface of the fixing flange that sandwiches the cutting blade between the mount and the fixing flange.

[0072] In addition, the structures, methods, etc. according to the above-described embodiments and modifications can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0073] 2:Cutting device 4: Base 4a:Aperture 4b:Aperture 4c: opening 6: Cassette table 8: Cassette 10: X-axis movement mechanism (processing feed unit) 10a: Table cover 10b: Dustproof / waterproof cover 12: Chuck table 12a: Holding surface 14: Clamp 16:Support structure 18: Y-axis and Z-axis movement mechanism (indexing feed unit, cutting feed unit) 20: Y-axis guide rail 22: Y-axis moving plate 24: Screw shaft 26: Z-axis guide rail 28: Z-axis moving plate 30: Screw shaft 32: Rotation drive source 34: Cutting unit 36: Imaging unit (camera) 38: Cleaning unit 40: Housing (spindle housing) 42: Spindle 42a: screw hole 44: Mount (Blade Mount) 44a: Hole 46: Cutting blade 46a: Hole 48: Flange part 48a: Surface (one side) 48b: Back side (other side) 48c: Convex part 48d: Tip surface 50: Boss section 50a: Tip 50b: Outer surface 52: Screw 54: Foundation 54a: Curved surface (first surface) 56: Cutting edge 58: Fixing nut 58a: Hole 60: Blade cover 62:Fixed part 62a: Inner wall surface 62b: Supply port 64: Moving part 66: First part 66a: Side 66b: screw hole 68: Second part 70: 1st shower nozzle 72: Second shower nozzle 74: Screw 76: Unbalance detector 78: Rotation angle sensor 80: Jig (mounting jig) 82: Base 82a: Long hole 84: Screw 86: Connection part 86a: Fixed part 86b:Shaft part 88: Holding part 90: First member 90a: Hole 90b:Groove 92: Second member 92a: Hole 92b:Groove 94: Screw 11: Workpiece 13: Tape (dicing tape) 15: Frame

Claims

1. A cutting device used for cutting a workpiece, a chuck table for holding the workpiece; a spindle having a mount attached to its tip that can secure an annular cutting blade; a blade cover that covers a part of the cutting blade while fixed to the mount; an imbalance detector that detects imbalance during rotation caused by a misalignment between the rotation axis of the spindle and the center of gravity of the cutting blade; the unbalance detector includes a rotation angle sensor that detects a change in a rotation angle of the spindle about the rotation axis as the spindle rotates, and a vibration sensor; The rotation angle sensor is attached to the blade cover and is disposed at a detection position where it can detect a change in the rotation angle of the spindle around the rotation axis as the spindle rotates.

2. The cutting device according to claim 1, wherein the detection position is a position facing the outer surface of a fixing nut that fixes the cutting blade to the mount, a position facing the outer surface of a fixing flange that sandwiches the cutting blade between the mount and the fixing nut, or a position facing the outer surface of the cutting blade.

3. A jig used to position a rotation angle sensor of an imbalance detector at a predetermined position, which detects imbalance during rotation caused by a misalignment between the rotation axis of a spindle provided in a cutting device and the center of gravity of an annular cutting blade fixed to a mount attached to the tip of the spindle, a base attached to a blade cover that covers a portion of the cutting blade while being fixed to the mount; a holder for holding the rotation angle sensor; a connecting portion that connects the base portion and the holding portion such that the holding portion is positioned outward of the cutting blade in the radial direction of the cutting blade when the base portion is attached to the blade cover, The base is attached to the blade cover, and the rotation angle sensor is disposed at a detection position where it can detect changes in the rotation angle of the spindle around the rotation axis as the spindle rotates.

4. A jig as described in claim 3, wherein the detection position is a position facing the outer surface of a fixing nut that fixes the cutting blade to the mount, a position facing the outer surface of a fixing flange that sandwiches the cutting blade between the mount and the fixing nut, or a position facing the outer surface of the cutting blade.

5. 5. The jig according to claim 3 or claim 4, wherein the connection portion connects the holding portion to the base portion in a rotatable manner so that the position of the rotation angle sensor held in the holding portion can be adjusted in a direction parallel to the rotation axis of the spindle.

Images